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WO1997035045B1 - Dispositif d'injection de vapeur cloisonne interieurement servant a distribuer des melanges sources de vapeurs reactives pour le depot chimique en phase vapeur - Google Patents

Dispositif d'injection de vapeur cloisonne interieurement servant a distribuer des melanges sources de vapeurs reactives pour le depot chimique en phase vapeur

Info

Publication number
WO1997035045B1
WO1997035045B1 PCT/US1997/005690 US9705690W WO9735045B1 WO 1997035045 B1 WO1997035045 B1 WO 1997035045B1 US 9705690 W US9705690 W US 9705690W WO 9735045 B1 WO9735045 B1 WO 9735045B1
Authority
WO
WIPO (PCT)
Prior art keywords
housing
interior volume
baffle plate
showerhead
front wall
Prior art date
Application number
PCT/US1997/005690
Other languages
English (en)
Other versions
WO1997035045A1 (fr
Filing date
Publication date
Priority claimed from US08/621,088 external-priority patent/US5741363A/en
Application filed filed Critical
Publication of WO1997035045A1 publication Critical patent/WO1997035045A1/fr
Publication of WO1997035045B1 publication Critical patent/WO1997035045B1/fr

Links

Abstract

Dispositif de dispersion et de pulvérisation (2) servant à mélanger plusieurs flux de vapeur et comprenant un boîtier (10) comportant des parois avant et arrière (12, 14), ainsi qu'une paroi latérale (16) intermédiaire, le tout définissant un volume intérieur (15). La paroi avant possède une multiplicité d'ouvertures d'évacuation (20) d'un mélange de vapeur servant à évacuer du boîtier ledit mélange, des passages d'écoulement (24) liés au boîtier pour l'introduction des fluides dans ce dernier et, au moins, une chicane (18) montée dans le volume intérieur du boîtier, ladite chicane et la paroi latérale créant entre elles un passage annulaire d'écoulement (21), au moins un des fluides respectifs étant dirigé contre ladite chicane, lorsqu'il est introduit dans le volume intérieur du boîtier, afin d'être distribué dans ledit volume. Ce dispositif à chicane peut être utilisé avantageusement afin de créer des couches minces par dépôt chimique en phase vapeur présentant une composition et une épaisseur de grande homogénéité.
PCT/US1997/005690 1996-03-22 1997-03-24 Dispositif d'injection de vapeur cloisonne interieurement servant a distribuer des melanges sources de vapeurs reactives pour le depot chimique en phase vapeur WO1997035045A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/621,088 US5741363A (en) 1996-03-22 1996-03-22 Interiorly partitioned vapor injector for delivery of source reagent vapor mixtures for chemical vapor deposition
US621,088 1996-03-22

Publications (2)

Publication Number Publication Date
WO1997035045A1 WO1997035045A1 (fr) 1997-09-25
WO1997035045B1 true WO1997035045B1 (fr) 1997-11-13

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1997/005690 WO1997035045A1 (fr) 1996-03-22 1997-03-24 Dispositif d'injection de vapeur cloisonne interieurement servant a distribuer des melanges sources de vapeurs reactives pour le depot chimique en phase vapeur

Country Status (2)

Country Link
US (2) US5741363A (fr)
WO (1) WO1997035045A1 (fr)

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