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WO1997025531A1 - Micro-pompe pourvue d'un generateur d'energie sonique - Google Patents

Micro-pompe pourvue d'un generateur d'energie sonique Download PDF

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Publication number
WO1997025531A1
WO1997025531A1 PCT/US1997/000076 US9700076W WO9725531A1 WO 1997025531 A1 WO1997025531 A1 WO 1997025531A1 US 9700076 W US9700076 W US 9700076W WO 9725531 A1 WO9725531 A1 WO 9725531A1
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WIPO (PCT)
Prior art keywords
tunnel
set forth
pump
sample
plate
Prior art date
Application number
PCT/US1997/000076
Other languages
English (en)
Inventor
Stuart W. Wenzel
Benedict J. Costello
Original Assignee
Berkeley Microinstruments, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berkeley Microinstruments, Inc. filed Critical Berkeley Microinstruments, Inc.
Priority to AU13586/97A priority Critical patent/AU1358697A/en
Publication of WO1997025531A1 publication Critical patent/WO1997025531A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/222—Constructional or flow details for analysing fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • G—PHYSICS
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    • G01N30/26—Conditioning of the fluid carrier; Flow patterns
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    • B01J2219/00925—Irradiation
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01J2219/0095—Control aspects
    • B01J2219/00952—Sensing operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/10—Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/087—Multiple sequential chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/088—Channel loops
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0883—Serpentine channels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0433—Moving fluids with specific forces or mechanical means specific forces vibrational forces
    • B01L2400/0439—Moving fluids with specific forces or mechanical means specific forces vibrational forces ultrasonic vibrations, vibrating piezo elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L5/00—Gas handling apparatus
    • B01L5/02—Gas collection apparatus, e.g. by bubbling under water
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
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    • G01N2030/022—Column chromatography characterised by the kind of separation mechanism
    • G01N2030/025—Gas chromatography
    • G—PHYSICS
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    • G01N30/06—Preparation
    • G01N30/12—Preparation by evaporation
    • G01N2030/121—Preparation by evaporation cooling; cold traps
    • G—PHYSICS
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    • G01N2030/121—Preparation by evaporation cooling; cold traps
    • G01N2030/123—Preparation by evaporation cooling; cold traps using more than one trap
    • G—PHYSICS
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    • G01N30/02—Column chromatography
    • G01N30/26—Conditioning of the fluid carrier; Flow patterns
    • G01N30/28—Control of physical parameters of the fluid carrier
    • G01N30/32—Control of physical parameters of the fluid carrier of pressure or speed
    • G01N2030/326—Control of physical parameters of the fluid carrier of pressure or speed pumps
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    • G01N30/02—Column chromatography
    • G01N30/62—Detectors specially adapted therefor
    • G01N2030/621—Detectors specially adapted therefor signal-to-noise ratio
    • G01N2030/623—Detectors specially adapted therefor signal-to-noise ratio by modulation of sample feed or detector response
    • G—PHYSICS
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    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
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    • G01N2030/77—Detectors specially adapted therefor detecting radioactive properties
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    • G01N30/02—Column chromatography
    • G01N30/88—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86
    • G01N2030/8809—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86 analysis specially adapted for the sample
    • G01N2030/8813—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86 analysis specially adapted for the sample biological materials
    • G01N2030/8827—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86 analysis specially adapted for the sample biological materials involving nucleic acids
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Definitions

  • the invention relates to micro sized pumps which transport chemicals on micro sized devices for chemical analysis on such devices and to micro sized chemical analysis systems utilizing such pumps.
  • the pumps are formed on silicon chips.
  • sensors and actuators can be made to monitor measurands such as pressure, acceleration, chemical-vapor concentrations, light intensity and magnetic fields.
  • Actuators include pumps and valves for fluid manipulation, heated chambers to induce chemical reactions, moveable mirrors for optical displays and relay switches for high-frequency communications.
  • micromachining In addition to direct miniaturization and mass production, a feature of micromachining is that it enables the implementation of new types of technologies. With miniaturization, physical laws of scaling inherently favor certain technologies and phenomena over others. In some cases, technologies that can be made by micromachining work well on the microscopic scale but have no analogy or usefulness in the macroscopic domain (e.g., the electrostatic micromotor).
  • MEMS microelectromechanical systems
  • An example of a complex microelectromechanical system is the digital micromirror display marketed by Texas Instruments, based on an array of a plurality of individually- addressable micromirrors.
  • microfabrication In the area of instrumentation, microfabrication, micromachining, holds much promise for making small low-cost, fast- operating, portable, easy-to-operate systems for chemical analysis, clinical diagnostics and other applications. These microinstruments will rely on the integration of fluid-handling components.
  • Micromachining techniques of the nature disclosed in the present document allow the provision of analytical-instrument performance in microinstruments that are comparable in size, cost and ease-of-use to individual sensors. These same techniques can also be used to make disposable medical instruments such as DNA-based diagnostic tests, and miniature scientific instruments based on a number of technologies such as gas and liquid chromatography, electrophoresis, and flow-injection analysis. Several of these analysis techniques can be combined into a single chip to create very sophisticated systems that separate and analyze tiny samples without human intervention.
  • micromachined pumps Essential for these microinstruments are suitable pump technologies to transport samples and reagents on the microscale.
  • Many types of micromachined pumps have been developed recently. Most of these are discrete pumps, meaning that they operate by creating a pressure differential that drives fluids through the system in which they are functioning.
  • the most common are silicon-based diaphragm pumps, which rely on electrostatic or thermo-pneumatic actuation to deflect a membrane that displaces fluid through one of two integrated check valves. Higher pump rates and higher pumping pressures have been achieved by actuating micromachined diaphragms with off-chip piezoelectric elements.
  • These types of pumps are useful but have limitations. They are complicated to fabricate, subject to clogging, and pressure is generally limited by valve leakage.
  • Discrete pump technologies also do not work well for moving fluids through microtunnels, i.e. , through enclosed tunnels with cross-sectional dimensions of less than about 500 microns. This is because the pressure required to maintain a given flow rate increases extremely rapidly as the cross-sectional area of the tunnel is reduced.
  • Electroosmosis is the movement of a liquid, under an applied electric field, in a fine tube or membrane. Electrophoresis is the movement of charged particles under an electric field in a liquid or gel. Electroosmosis and electrophoresis are very useful pumping mechanisms for liquid-based microinstruments. However, they do not work with gases, and are sensitive to the properties of the liquid such as conductivity and pH. Electroosmosis is also sensitive to the surface properties of the tunnel.
  • Acoustic streaming is steady fluid flow or pressure induced by high-intensity sound. It was first described by Faraday in 1831 and addressed theoretically by Rayleigh in 1884. Acoustic streaming fluid velocities are generally proportional to the square of the (mechanical) displacement of the driving source, and to the square of the acoustic displacement and velocity fields in the fluid. Acoustic streaming has been observed in fluids contacting vibrating cylinders, spheres, and plates. Recently, steady-state pumping and localized stirring have been demonstrated with a micromachined flexural-plate-wave delay line. Pumping velocities as high as 30 mm/ sec in air and 0.3 mm/ sec in water have been observed.
  • the present inventors have shown as disclosed herein that a related structure can produce air flow rates of over 18 mm/sec in an enclosed tunnel 50 micrometers high, 500 micrometers wide and 8 mm long.
  • flexural-wave structure has inherent limitations that prevent their use in forming a flexural-plate-wave pump or delay line from an enclosed narrow channel, that is, a channel with width less than about a wavelength. This is because in these configurations flexural-plate waves are generated via bimorph actuation using transducers that are uniform across the plate width.
  • a composite plate is formed by laminating an actuation layer of a piezoelectric or electrostrictive material to one or more other layers. The center of flexure (neutral plane) of this plate is offset from the geometric center of the actuation layer.
  • Flexural motion is produced when voltage is applied to the actuation layer, inducing a n in plane stress; since the neutral plane is offset from the center of the actuation layer, this stress causes the plate to flex.
  • the entire area of the actuation layer under the applied voltage is driven into one in-plane stress state (compression or tension) causing the plate in that region to bend with one curvature (positive or negative).
  • This mechanism works well when the plate width is large compared to the ultrasonic wavelength; however, when the plate is narrow compared to the wavelength and the plate edges are clamped (such as with the pump structure proposed wherein pumping is through a narrow tunnel) it is ineffective for producing flexural motion and flexural waves.
  • GC gas chromatograph
  • the design was based on a conventional gas chromatograph (GC), which has five main components: (1) separation column, (2) detector, (3) sample injector, (4) column heater, and (5) bottled pressurized carrier gas.
  • the pressurized carrier gas is attached to the inlet of the column and used to force gases through the column and into the detector on the end of the column.
  • the sample injector typically employs a multiport valve between the bottled carrier gas and column to introduce a plug of sample gas into the carrier gas at the column inlet, which is under pressure.
  • the sample is generally a mixture of known or unknown chemicals in different concentrations.
  • the sample plug After the sample plug is injected, it travels down the column with the carrier gas, and interacts with a coating on the interior walls of the column termed the stationary phase. This interaction causes the chemical components of the sample to be retained differentially, so that they become spatially separated as they travel down the column.
  • the detector is generally a non-specific sensor that tells the presence or absence of a chemical. As the chemical components pass the detector, it outputs a series of peaks called a chromatogram. An individual chemical component is identified by its retention time.
  • the column heater is needed stabilize column temperature so that retention times are predictable; additionally, it can be used to speed analysis times by temperature ramping.
  • Component identification in chromatography can also be aided by using multiple detectors that respond differently to a given set of chemicals. For example, using both a photoionization detector and a SAW sensor will yield more information than either detector alone.
  • the mass spectrometer is another powerful analysis system that is used both alone and as a chromatographic detector; it separates and identifies chemicals by atomic mass. Microsized and microfabricated mass spectrometers are currently under development by Carl Friedhoff, et al at Northrup Grumman Corporation.
  • these components are all macroscopic in size; for example, the column is typically a coiled, fused-silica capillary around 10 meters in length.
  • the resulting GC systems are bench-top-sized or larger with power requirements of hundreds or thousands of Watts.
  • Terry miniaturized a conventional GC by micromachining the column was fabricated on a silicon wafer, to which individual silicon valves were attached for sample injection, and a thermal-conductivity detector for sample detection. This demonstrated that all of these components can be miniaturized by micromachining, with the exception of the bottled carrier gas.
  • the Terry GC did not perform as well as expected.
  • the silicon-micromachined column had a non-round cross section unlike conventional fused-silica capillary columns and could not be coated evenly with a stationary phase, leading to poor performance or efficiency and resolution.
  • Efficiency refers to the resolution of separation that can be achieved with a given length of column: A column with high efficiency separates and resolves chemicals in a shorter distance than a column with lower efficiency.
  • the design did not provide any inherent advantages over a conventional GC in terms of manufacturing costs or performance, and the advantage of size reduction was negated by the need for bottled carrier gas.
  • a company founded on this technology now produces portable gas chromatographs that use a few micromachined parts but still employ conventional fused-silica capillary columns and weigh several pounds.
  • a micro sized pump in accordance with an embodiment of the invention, comprises a substrate which at least partially defines one or more walls of a longitudinally extending tunnel.
  • the tunnel has a vibratable wall portion.
  • An ultrasonic energy generator is positioned in ultrasonic energy transmitting relation to the vibratable wall portion.
  • the ultrasonic energy generator is adapted to generate elastic waves which travel along the longitudinal extension of the tunnel.
  • the pump is useful for moving material along the tunnel whereby chemical and biological analysis can be carried out on a micro scale.
  • Another embodiment of the invention is a chromatographic column comprising the pump as set forth above with walls of the tunnel being coated with a stationary phase.
  • Yet another embodiment of the invention is a chromatograph which includes the coated tunnel, a sample injector and one or more detectors; where appropriate a column heater is also provided.
  • Still another embodiment of the invention is an analysis system comprising the pump as set forth above in combination with any desired chemical analysis station with the pump being used to deliver a sample to be analyzed to the analysis station.
  • the present invention uses ultrasonic waves to move gases, liquids and particulate solids within and along a tunnel by the physical phenomenon of acoustic streaming.
  • Elastic waves traveling along the interface of a solid and a fluid produce intense sound in the fluid, causing it to move with some component of motion along the interface.
  • the pump is formed with a tunnel that has elastic waves propagating along its wall thereby moving fluids longitudinally along the tunnel.
  • the structure also has transducers which are used to generate the elastic waves.
  • This acoustic streaming pump is novel and has distinct advantages over other types of pumps, thereby enabling many applications in miniature/micro fluidic systems.
  • discrete pumps such as diaphragm pumps
  • the mechanism that induces fluid motion is distributed over the length of a flow tunnel.
  • the elastic waves act on the fluid very close to the interface with the wall. The result is that the pump moves fluids down long shallow and narrow tunnels without incurring the pressure limitations of discrete pumps.
  • the fabrication of this pump is also simple compared to most micropumps. It has no moving parts that are prone to mechanical failure. It is also distinctly different from the ultrasonic transport technologies described by White et al and the work of Shiokawa et al, which only move fluids on an open surface, or recirculate them in a well.
  • the present invention is also a significant departure from prior art as it describes structures and transducers that are effective for forming enclosed, narrow-channel acoustic pumps and sensors based on flexural plate waves as well as other types of ultrasonic waves.
  • the invention also includes microinstruments based on the pump. Brief Description of the Drawings
  • Figure 1 illustrates, in isometric view, a pumping structure in accordance with an embodiment of the invention which provides ultrasonic pumping along a tunnel on a micromachined substrate.
  • Figure 2 illustrates, in side section partial view, a piezoelectric embodiment of Figure 1.
  • Figure 3 shows another preferred piezoelectric embodiment that uses a new transducer design that is more efficient than a uniform transducer for generating and detecting flexural motion and flexural waves in the walls of narrow channels.
  • Figure 4 shows another preferred piezoelectric embodiment that uses a second new transducer design that is more efficient than a uniform transducer for generating and detecting flexural motion and flexural waves in the walls of narrow channels.
  • Figure 5 illustrates, in side sectional section partial view, an electrostatic embodiment of Figure 1.
  • Figure 6 illustrates, in isometric end section view, an embodiment as in Figure 5 which utilizes an SAW-based pump.
  • Figure 7 illustrates, schematically, a microsized gas chromatograph used with a pumping structure in accordance with one or more embodiments of the invention.
  • Figure 8 illustrates a more detailed view of a gas chromatograph than does Figure 7 showing an embodiment of a sample injector made from a heated platform with a sorptive material connected to the separation column.
  • Figure 9 is a section view taken along the line AA of Figure
  • Figure 10 is a cyclic chromatograph.
  • Figure 11 illustrates, in schematic format, a fluidic microsystem based on a pump in accordance with one or more embodiments of the invention.
  • a system that improves the performance of an individual sensor by reducing drift of its output signal caused by undesirable interferences such as temperature and aging.
  • a pump draws an analyte, generally a gas, past a concentration modulator to a sensor.
  • the user programs the concentration modulator to vary the concentration of analyte reaching the sensor.
  • the sensor system is otherwise unaffected by the concentration monitor.
  • the sensor output signal then varies in synchrony with the concentration modulator when the analyte is present; the sensor response due to the analyte can thus be separated from uncorrelated drift.
  • the pump is used to make a miniature, simple, high- performance GC that is not possible with conventional components.
  • a micromachined separation column is made with the pump distributed along a desired portion of its length.
  • the pumped column draws the carrier gas and sample through it, so that pressurized carrier gas is not needed to induce flow. Since the system is not under pressure, valves are not needed for injecting the sample.
  • Sample collection and injection can be performed with sorptive materials on a temperature-controllable platform near the column inlet. Detection can be achieved with one or more sensors, positioned near the column outlet, that are appropriate for the chemicals of interest.
  • a further simplification of the system is achieved by using detectors that can operate in air rather than just in a specific type of carrier gas (such as helium).
  • ambient air can be used for the carrier gas, eurninating the bottled, pressurized carrier gas altogether.
  • the entire system (sample injector, pumped separation column and detectors) can be integrated on single chip of area less than about 1-cm 2 , with the appropriate choice of miniature detectors.
  • a column heater can also be included in this area, if appropriate.
  • Electronics to drive, control and interrogate the system can be included on or off the chip.
  • the GC system may operate as follows: The ultrasonically pumped column draws sample air through the sample collector and column for a specified period of time; the temperature-controlled platform is heated quickly to desorb and inject a plug of the collected sample into the column; the sample plug is drawn down the column by the pump and separates into its different chemical components, which are detected by the detectors.
  • the temperature of the optional column heater can be set to a specific temperature or varied during operation.
  • ultrasonic sensor which uses the same basic technology as the ultrasonic pump.
  • An ultrasonic delay line is coated with a chemically sensitive film; when chemicals are present, they interact with the film and change its mass, and with it the ultrasonic wave velocity. The velocity change is measured electronically and correlated with chemical concentration.
  • an ultrasonic pump separate from that of the column can be used to draw sample air through the sample collector.
  • the invention may also include filters to prevent particles and aerosols from clogging or otherwise adversely affecting the system.
  • a denuder may also be included to scrub the carrier gas.
  • SAMs self-assemble monolayers
  • J. Wirth and H.O. Fatunmbi, LC-GC, Volume 12, No. 3, pp. 222-228, March 1994 demonstrates the use of a SAM film as the stationary phase in a liquid chromatograph.
  • SAMs offer the potential to obtain uniform, high-quality stationary phase coatings on columns of arbitrary cross-sectional shape and dimensions.
  • a chemical or biological reaction system can be constructed utilizing a pump as set forth herein.
  • a system can comprise one or more of the pumps as described in detail below in combination with a reaction region adjacent the substrate.
  • the reaction region is connected to receive a reaction sample having one or more reactants which are pumped there via one or more tunnel(s) and to carry forth a reaction to form a reacted sample.
  • the system can include an additional reaction region, the additional reaction region being connected to receive the reacted sample pumped via a tunnel and to carry forth an additional reaction to thereby form a further reacted sample.
  • the additional reaction region can be connected to receive one or more additional reactants for reaction with the reacted sample to thereby form the further reacted sample.
  • FIG 1 shows a preferred embodiment of a pump structure 10 in accordance with an embodiment of the invention.
  • a substrate 12 made of a material, such as, for example, silicon, fused silica or quartz, has a longitudinally extending tunnel 14 formed in it.
  • the material of the substrate 12 is not at all critical and the invention can be applied using any desired substrate material so long as it has sufficient structural integrity.
  • plate is a solid media with two surfaces that are free or bordered by mechanically compliant media.
  • the plate may be clamped so that it is of limited subject to stress, such as in-plane tension or compression.
  • Plate waves are elastic waves that propagate in plates, as defined herein. These include modes akin to Lamb waves, which have particle motions both longitudinal and transverse to wave propagation, the transverse motion being perpendicular to the plate surfaces or plane of the plate. Also included are shear horizontal plate waves, in which displacements are transverse to the direction of propagation and in the plane of the plate. Strictly speaking, Lamb modes can only exist in plates that have both surfaces free, are of infinite extent in the two dimensions in the plane of the plate, and are stress free. The structures presented herein use plates that deviate from this structure significantly; therefore the elastic waves that can be supported are not strictly Lamb or shear-horizontal plate modes.
  • the lowest-order antisymmetric Lamb mode (AO mode) in a free plate is sometimes termed the "flexural plate wave".
  • Narrow-plate structures are disclosed herein that can support flexural waves that differ from the AO mode because the particle motion contains transverse components that are in the plane of the plate.
  • the propagation properties (e.g., velocity and frequency) of this flexural wave are affected strongly by the finite plate width and the clamping conditions and can not be predicted/derived accurately using the Rayleigh-Lamb frequency equation, which describes Lamb-wave propagation.
  • the thin plate 16 can suitably be made of a structural layer 18, an electronically conducting layer 20 and a piezoelectric material layer 22.
  • the layers can be silicon dioxide, aluminum and zinc oxide, respectively. While specific materials are set forth it should be recognized that the invention is not limited to the use of these materials and that substantially any structural, electronically conducting and piezoelectric materials may be used in their place.
  • some other useful piezoelectric materials are aluminum nitride, lead zirconate titanate, barium titanate and lithium niobate. Provision of the electrically conducting layer 20 works well and is preferred but such a layer is not a necessity.
  • the fingers are arranged substantially parallel relative to one another and extend along the longitudinal extension of the tunnel 14.
  • an alternating voltage is applied between the layer 20 and the interdigited fingers 24a, 24b of the conductive transducer 24. This creates strain in the piezoelectric layer 22 and generates ultrasonic waves that travel longitudinally down the tunnel 14 in the substrate 12. Gases or liquids in the tunnel 14 move down the tunnel 14.
  • an alternating voltage is applied between the fingers 24a and the conducting layer 20 at 180° out of phase with the voltage applied between the fingers 24b and the conducting layer 20.
  • the frequency is adjusted such that the elastic wavelength is equal to P. This results in a maximized acoustic wave of the same frequency as the alternating voltage.
  • Less efficient but useful operation is practical when these parameters are deviated from.
  • the distance between adjacent pairs of fingers must be no more than the distance the elastic waves will sustain themselves along the tunnel.
  • Single-phase transducers may also be used, wherein a single set of electrodes at the same voltage is used to generate or detect waves.
  • Single-phase transducers are usually less efficient than multiple-phase transducers.
  • Figure 3 shows electrodes 24a, 24b in top view with the electrodes extending part way across the plate 16 from its periphery.
  • FIG. 4 shows electrodes 24a, 24b in top view which extend laterally onto the center portion of the top of the plate 16 with the contacts 24aa, 24bb being as small as possible so that the electrodes are centered.
  • Figure 5 shows a second embodiment of the pump 10, using electrostatic actuation to generate wave motion.
  • the substrate 12a must be conductive (as illustrated) or must have a conducting layer (not illustrated) on it.
  • the tunnel 14 is closed at its top by a thin plate 16a which forms a wall of the tunnel 14 and is made of a dielectric such as, for example, silicon, fused silica, quartz or silicon nitride.
  • a dielectric such as, for example, silicon, fused silica, quartz or silicon nitride.
  • the materials specified are merely illustrative. Substantially any nonconductor which has the requisite structural integrity can be used. Thus, for example, plastics can be used.
  • an alternating voltage is applied between the transducers 24a, 24b and the substrate 12a.
  • Electrostatic attraction between the transducers 24a, 24b and the substrate 12a creates strain in the thin plate 16a, generating ultrasonic waves that travel down the tunnel 14.
  • This structure is especially useful for generating flexural waves, because electrostatic force bends the plate directly out of plane. This implementation will work best when the tunnel width is less than the ultrasonic wavelength.
  • the transducers generate a net force on the plate that tends to pull the entire plate toward the substrate. If the plate is wide compared to the transducer period P, the entire plate deflects, and there is very little local bending under the transducers. In a narrow structure (plate width less than P) the clamped plate edges counter the net plate force and prevent the entire plate from bending, but do allow local bending under the transducers.
  • FIG 6 shows yet another preferred embodiment of the pump 10 that employs surface acoustic waves.
  • the substrate 12b is made of, or has on the portion of it which forms a portion of the wall of the tunnel 14b, a piezoelectric material.
  • interdigited transducers 24a, 24b On the substrate 12b, within the tunnel 14b, are interdigited transducers 24a, 24b.
  • Atop the substrate 12b is a tunnel plate 16b in which the tunnel 14b is formed..
  • the tunnel plate 16b is bonded to the substrate 12b to form the enclosed tunnel 14b with the pluralities of interdigited fingers 24a, 24b extending longitudinally along a desired portion of the length of the tunnel 14b.
  • This embodiment is much like the Figure 2 embodiment and operates similarly. The difference is that of geometry, and of the type of waves that are generated and induce the pumping.
  • Substrate 12B is generally about the same thickness or thicker than the ultrasonic wavelength. Therefore surface acoustic waves are generated. Uni
  • An ultrasonic-wave reflector will generally be positioned in spacial relation to a transducer such that waves incident upon it in the non-preferred direction reflect and propagate in phase with waves emitted from the transducer in the preferred direction.
  • An ultrasonic- wave absorber will simply damp and absorb the waves propagating in non-preferred directions to leave the wave traveling in the preferred direction.
  • bi-directional transducers are shown for ease of depiction/description. However, it is intended that for pump operation, the actual structure will be unidirectional, whether it be by transducer design alone, or by a combination of transducer design with ultrasonic reflectors and absorbers.
  • Reflectors may be made from any structure that causes a large impedance discontinuity in the ultrasonic path. If the material is mechanically rigid and thick enough, it presents a large impedance mismatch and acts as a wave reflector.
  • a reflector can also be formed from a slot part or all of the way through the plate (or substrate for SAWs).
  • a mechanically lossy or viscous material may be used to form an elastic wave absorber.
  • Ultrasonic-absorbing sections can also be used to terminate sections of the propagation path.
  • Electrostatic drive separate from tunnel
  • Figure 6a shows another embodiment of the pump invention, where a tunnel 14 is built above the substrate 12.
  • the ultrasonically driven plate 16 forms the lower wall of the fluid tunnel 14 shown in Fig 6a with the tunnel being covered by an upper wall 13.
  • This configuration can be advantageous because the ultrasonic drive portion is separate from the fluid tunnel 14, giving more design freedom for the individual components.
  • height of the fluid tunnel 14 height can be designed arbitrarily large to accommodate different fluids and flow rates, while a plate-to- substrate spacing 11 can be small (of order 0.1 to 10 microns) so that large electric fields can be generated with low voltages.
  • the bending force and displacement (deflection) experienced by the plate 16 due to the electric field are proportional to the square of the electric field strength, which is equal to the applied voltage divided by the electrode-substrate spacing. Therefore, larger-amplitude waves and more efficient operation can be obtained for a given voltage by using smaller electrode-substrate spacing.
  • the electrodes 24a, 24b can also be located on the substrate
  • the plate 16 must be conductive, or have a conductive material on it so that voltage can be applied between electrodes and plate.
  • the medium between the electrodes 24a, 24b and the substrate 12 can be sealed into the plate-to-electrode volume, and can be different than that in the fluid tunnel 14.
  • the medium should be a dielectric, and should have low mechanical stiffness, so that it is compliant to compression as the plate above it bends.
  • this medium is a gas, a gas at reduced pressure or even vacuum. Wave generation and propagation may be optimized by using a low-pressure gas medium in the plate-substrate space 11 (rather than a liquid, solid or gas at higher pressure, such as atmospheric pressure).
  • large electric fields typically on the order of 10 6 V/cm, are typically needed to generate force sufficient to bend the tunnel wall, in this case the plate 16.
  • the large fields are primarily confined in the plate- substrate gap 11 external to the tunnel 14, and will have little or no effect on the materials and processes inside the fluid tunnel 14. This may be very advantageous when a liquid or conducting liquid is present inside the fluid tunnel.
  • Fig. 6c shows another embodiment of the pump invention, whereby ultrasonic wave motion is generated by a transducer composed of electrodes 24a, 24b separated from a plate 16 which serves as the upper wall of the tunnel 14. Alternating voltage is applied between electrodes 24a, 24b and the tunnel plate 16, generating an attractive force between these two that causes the plate 16 to bend, thereby generating flexural waves.
  • the plate must be conductive or have a conductive layer on it.
  • a single set of electrodes, for example, the electrodes 24a without the electrodes 24b, may be used in which case they will act as a single phase transducer.
  • the use of multiple phases, e.g., the two-phase system described, is preferable as this provides efficiency and versatility for making the waves unidirectional.
  • This configuration is advantageous because the gap height between electrodes 24a, 24b and the channel plate 16 can be changed independently of the tunnel depth. Also, the large electric fields needed to generate force sufficient to bend the plate terminate at the plate because it is conductive; therefore these fields are completely external to the fluid tunnel 14 and will not affect the materials and processes inside the tunnel 14. This may be advantageous when a liquid or conducting liquid is present inside the tunnel.
  • the (electrostatic) transducer designs shown) can also be used for receiving or detecting ultrasonic waves.
  • Ultrasonic waves in the plate 16 may pass below the transducer electrodes 24a, 24b and change the gap spacing. This change in gap spacing can be detected electronically to sense the waves and their properties.
  • the capacitance between the electrodes 24a, 24b and the plate 16 is inversely proportional to the gap height; therefore, capacitance changes can be used to measure wave amplitude and frequency.
  • Capacitance can be measured in different ways; one method is to apply a voltage between the electrodes 24a, 24b and the plate, and sense the current traveling to and from the resulting capacitor. Multiple transducers can be placed along a delay line to generate and detect waves.
  • a structure as shown in Fig. 6d may be used to pump fluids against an external differential pressure and to create a large pressure differential between its ends.
  • a tunnel can be formed in two parts, 14a and 14b to serve as a fluid conduit.
  • the tunnel part 14a is formed from a top shell portion 17 and the substrate 12.
  • a plate 16 serves as the bottom of the tunnel part 14a and as the top of the tunnel part 14b.
  • the plate 16 supports ultrasonic waves that transport fluid down the length of the tunnel.
  • the plate 16 may have perforations 19 in it to allow the pressure to equilibrate across it, such that plate 16 does not experience differential fluid pressure across it that would cause it to deflect.
  • Transducers electrostatic, piezoelectric, magnetic, etc
  • the overall tunnel is narrow and shallow enough to present a high impedance to fluid flow that would be caused by differential pressure applied between the ends of the tunnel.
  • Ultrasonic waves in the plate 16 form a distributed pump that transports fluid down the length of the tunnel more effectively than externally applied pressure.
  • the pump 10 can transport fluids even in the presence of, and working against, an externally applied pressure.
  • this distributed pump 10 may used to create a differential pressure by pumping fluids to or from a sealed or partially-sealed volume.
  • An advantage of this structure is that the shell 17 and the substrate 12 that form the walls of the overall tunnel can be designed arbitrarily thick, stiff and strong enough to sustain a high pressure differential (for example, one atmosphere or greater) between the inside and outside of the tunnel.
  • the plate 16 never experiences differential fluid pressure, and so can be built as thin as necessary to be compliant to plate- wave generation by the transducers.
  • the pump efficiency and ability to move fluids against an external pressure can be adjusted by design.
  • the tunnel can be made longer, or its cross section decreased, in order to increase impedance to external flow. Decreasing the tunnel height (distance between inside of shell 17 and substrate 12) increases the average pumping velocity across the channel.
  • One application is as a vacuum pump, where the invention is attached to a volume and evacuates it until the pressure is below the ambient.
  • a preferred method to form a tunnel 14 sealed by a thin plate wall 16 is to use wafer bonding and etch-back techniques. Channels or grooves are made in a first wafer or substrate using standard photolithographic techniques to define the groove, and then etching into the substrate with wet chemicals or a plasma. A second wafer is coated with a thin layer of structural material that will act as the channel wall, such as silicon nitride or silicon dioxide.
  • the second wafer is etched away, stopping on the structural layer.
  • the etching can be performed with a combination of mechanical grinding, chemical-mechanical polishing (CMP) and chemical etching.
  • CMP chemical-mechanical polishing
  • the material of the second wafer can be used as the structural plate material, by using CMP to etch the second wafer sufficiently thin (in this case, deposition of a structural material is not needed). This leaves the thin-walled tunnel structure on the first wafer.
  • Metal may be deposited by sputtering or evaporation.
  • Piezoelectric materials may be deposited by sputtering, sol-gel, CVD or metal-organic deposition techniques. All layers can be patterned with standard photolithographic techniques and wet- chemical or dry (plasma) etching or lift-off.
  • a sacrificial layer such as PSG (phosphosilicate glass) is deposited on a substrate or wafer and patterned into channel shape.
  • a thin layer of polysilicon is deposited under conditions such that it is permeable to wet chemicals.
  • the PSG layer is then etched through the permeable poly using hydrofluoric acid.
  • the HF is removed by soaking in deionized (DI) water, and the DI water removed by heating or by supercritical fluid extraction. This leaves a shell of polysilicon.
  • DI deionized
  • Further processing can then be performed, such as deposition of materials to seal the shell, and subsequent metal and piezoelectric deposition, photolithography and etching.
  • Thin walled tunnels can also be formed using xenon difluoride processing techniques where a sacrificial layer (e.g., polysilicon ) is etched from underneath a shell of structural material such as silicon nitride.
  • a sacrificial layer e.g., polysilicon
  • the substrate can be a plastic and the tunnels, etc. can be formed by a molding step.
  • the stationary phase will usually, but not always, be applied in the liquid phase, requiring that solvents be removed at a later stage. Solvent extraction may be difficult using conventional techniques with these long, fine, thin- walled tunnels, and may be aided/effected by supercritical fluid extraction.
  • a miniature DNA-diagnostic or analysis system may be built using the polymerase chain reaction (PCR) ⁇ a technique that replicates (or "amplifies") DNA very rapidly.
  • PCR is used to create a "significant" sample of DNA from an original sample that was too small to analyze.
  • PCR targets a given section of the original DNA, and can yield an end sample that contains millions or billions of copies of the base sequence contained in this section of original DNA.
  • the end sample can then be analyzed in various ways. For example, simple detection schemes can be performed to determine the presence or absence of products; separation of the end products can be performed to determine contamination.
  • PCR requires mixmg/combining a DNA sample with other compounds such as primers and XXX, and then going through a repetitive heating sequence.
  • a peristaltic pump may be formed using multi-phase transducers with three phases or more.
  • Fig 6f electrodes Tl, T2 and T3 are driven with voltages at phases ⁇ , ⁇ 2 and ⁇ 3 respectively. These voltages are phased such that the plate displacement that constricts the tunnel is induced under the electrodes and moves in a single direction.
  • the movement of the constrictions cause fluid pumping by peristaltic action.
  • the velocity at which the constrictions move is determined by the frequency and phasing of the applied voltage, and does not depend on the elastic wave velocity.
  • Figure 7 is a conceptual view of a miniature chromatographic separation system 28 based on use of and incorporating the pump 10.
  • the interdigited fingers 24a, 24b, as illustrated extend along most or all of the length of the separation column 34.
  • a filter or denuder 30 is attached to the inlet 32 of an ultrasonically pumped separation column 34.
  • sample injector 36 is also attached to the column 34 which is shown in Figures 8 and 9.
  • a detector 38 is attached at an outlet end 40 of the column 34. However, they need not extend the entire length of the column 34 since the elastic waves will sustain themselves beyond the last of the fingers. What is important is that each adjacent set of the finger pairs 24a, 24b must not be separated from the next adjacent set of finger pairs 24a, 24b by more than the distance the elastic waves will sustain themselves.
  • Fig 7a shows an embodiment of a split sample injector 62 that may be used with the chromatograph or other system.
  • Sorptive sample injector 64 at the inlet 66 of the instrument e.g., separation column
  • the dilution pumps are used to draw gas away from the sorptive sample injector as it releases trapped vapors, thereby reducing the amount of sample injected into the instrument at inlet 66.
  • Figures 8 and 9 show more details of a preferred embodiment of micro GC system of Figure 7. It will be noted that the column interior 42 is coated with a stationary phase 44 of sorptive material on one or more walls. The stationary phase extends substantially all of the column length. Attached to the column 34 is the sample injector 36.
  • the sample injector is composed of a sorptive material 45, which may be a polymer or particulate material such as Tenax or Carbopack, and a heater 46 for releasing compounds that have been trapped by the sorptive material.
  • Figure 10 shows cyclic or re-entrant chromatographic system based on pump 10.
  • Ultrasonically-pumped column 47 forms a closed loop in which samples can be recirculated multiple times to increase the effective column length and obtain higher resolution of separation. Any desired resolution can be achieved in situ by monitoring the detector output each time the sample completes the loop. This design can use a shorter column than required by a non-reentrant design, which aids in reducing the size of the system. The rest of system is similar to Figures 8 and 9.
  • FIG 11 conceptually shows a general microfluidic system 48 based on the pump 10.
  • Sample receptacles 50, valves 52, pumps 54 and reaction chambers 56 are illustrated.
  • This type of system may be used for a variety of purposes, such as to automate tests for biochemical warfare agents and diseases, mix and deliver drugs, pre-process environmental and industrial samples for analysis by micro or macro analytical instruments.
  • the system can be used to carry out microscale PCR procedures as described above.
  • the system can also be used for any of many chemical, physical and/or biological analysis and/or reaction techniques as discussed in detail above. Delivery of drugs, etc. from an implanted device to a desired location in a patient is also attainable.
  • the present invention provides a micro sized pump 10 and pumping system useful, inter alia, to pump materials from one place to another whereby micro chemical and biological analysis can be carried out in the field on very small samples.

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Abstract

L'invention porte sur une micro-pompe (10) comportant un substrat (12) délimitant, tout au moins partiellement, une ou plusieurs parois d'un tunnel se déployant longitudinalement (14). Ce tunnel comporte un segment de paroi susceptible de vibrer. Un générateur d'énergie sonique se trouve placé en relation d'émission d'énergie sonique par rapport à ce segment de paroi. Le générateur d'énergie sonique est conçu pour produire des ondes élastiques parcourant le tunnel dans toute sa longueur.
PCT/US1997/000076 1996-01-05 1997-01-06 Micro-pompe pourvue d'un generateur d'energie sonique WO1997025531A1 (fr)

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AU13586/97A AU1358697A (en) 1996-01-05 1997-01-06 Micropump with sonic energy generator

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US60/009,665 1996-01-05

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Cited By (15)

* Cited by examiner, † Cited by third party
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WO2000048736A1 (fr) * 1999-02-19 2000-08-24 GeSIM Gesellschaft für Silizium-Mikrosysteme mbH Champ de mesure de detecteur destine au controle du bon fonctionnement d'une micropipette
WO2002103210A1 (fr) * 2001-06-15 2002-12-27 Hansford Derek J Procedes et dispositifs de nanopompe
EP1400600A1 (fr) * 2002-09-17 2004-03-24 STMicroelectronics S.r.l. Dispositif intégrén pour les analyses biologiques
EP1403383A1 (fr) 2002-09-17 2004-03-31 STMicroelectronics S.r.l. Micropompe spécialement pour un dispositif intégré pour les analyses biologiques
WO2004076047A1 (fr) * 2003-02-27 2004-09-10 Advalytix Ag Procede et dispositif permettant de generer un mouvement dans une pellicule liquide de faible epaisseur
WO2004076046A1 (fr) * 2003-02-27 2004-09-10 Advalytix Ag Procede et dispositif pour melanger de petites quantites de liquide dans des microcavites
JP2006519091A (ja) * 2003-02-27 2006-08-24 アドヴァリティクス アーゲー 薄い液体フィルム内に運動を起こす方法と装置
JP2006519685A (ja) * 2003-02-27 2006-08-31 アドヴァリティクス アーゲー ミクロキャビティでの少量液体の混合方法と装置
EP1486780A4 (fr) * 2002-02-19 2008-04-02 Ngk Insulators Ltd Puce microchimique
WO2009014261A1 (fr) 2007-07-25 2009-01-29 Canon Kabushiki Kaisha Appareil de commande de liquide
WO2009013705A1 (fr) * 2007-07-26 2009-01-29 Fondazione Istituto Italiano Di Tecnologia Dispositif pour commander un mouvement de fluide dans des micro/nanocanaux aux moyens d'ondes acoustiques de surface
US8097222B2 (en) 2005-05-12 2012-01-17 Stmicroelectronics, S.R.L. Microfluidic device with integrated micropump, in particular biochemical microreactor, and manufacturing method thereof
US8603076B2 (en) 2001-09-14 2013-12-10 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
TWI498552B (zh) * 2013-01-14 2015-09-01 Nat Univ Chung Hsing 可拋式毛細管電泳檢測儀器
CN113187702A (zh) * 2021-05-11 2021-07-30 上海芯物科技有限公司 一种无阀压电泵及其制作方法

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WO2000048736A1 (fr) * 1999-02-19 2000-08-24 GeSIM Gesellschaft für Silizium-Mikrosysteme mbH Champ de mesure de detecteur destine au controle du bon fonctionnement d'une micropipette
US7799197B2 (en) 2001-06-15 2010-09-21 The Ohio State University Research Foundation Nanopump devices and methods
WO2002103210A1 (fr) * 2001-06-15 2002-12-27 Hansford Derek J Procedes et dispositifs de nanopompe
US8986727B2 (en) 2001-09-14 2015-03-24 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
US9433574B2 (en) 2001-09-14 2016-09-06 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
US9433573B2 (en) 2001-09-14 2016-09-06 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
US9271926B2 (en) 2001-09-14 2016-03-01 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
US9066875B2 (en) 2001-09-14 2015-06-30 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
US8603076B2 (en) 2001-09-14 2013-12-10 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
US9066876B2 (en) 2001-09-14 2015-06-30 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
US9005650B2 (en) 2001-09-14 2015-04-14 Delpor, Inc. Microfabricated nanopore device for sustained release of therapeutic agent
EP1486780A4 (fr) * 2002-02-19 2008-04-02 Ngk Insulators Ltd Puce microchimique
US7794611B2 (en) 2002-09-17 2010-09-14 Stmicroelectronics S.R.L. Micropump for integrated device for biological analyses
US7527480B2 (en) 2002-09-17 2009-05-05 Stmicroelectronics S.R.L. Micropump for integrated device for biological analyses
EP1403383A1 (fr) 2002-09-17 2004-03-31 STMicroelectronics S.r.l. Micropompe spécialement pour un dispositif intégré pour les analyses biologiques
EP1400600A1 (fr) * 2002-09-17 2004-03-24 STMicroelectronics S.r.l. Dispositif intégrén pour les analyses biologiques
JP4732329B2 (ja) * 2003-02-27 2011-07-27 ベックマン コールター， インコーポレイテッド 薄い液体フィルム内に運動を起こす方法と装置
JP2006519091A (ja) * 2003-02-27 2006-08-24 アドヴァリティクス アーゲー 薄い液体フィルム内に運動を起こす方法と装置
US8303778B2 (en) 2003-02-27 2012-11-06 Beckman Coulter, Inc. Method and device for generating movement in a thin liquid film
WO2004076047A1 (fr) * 2003-02-27 2004-09-10 Advalytix Ag Procede et dispositif permettant de generer un mouvement dans une pellicule liquide de faible epaisseur
US8038337B2 (en) 2003-02-27 2011-10-18 Beckman Coulter, Inc. Method and device for blending small quantities of liquid in microcavities
JP4925819B2 (ja) * 2003-02-27 2012-05-09 ベックマン コールター， インコーポレイテッド ミクロキャビティでの少量液体の混合方法と装置
JP2006519685A (ja) * 2003-02-27 2006-08-31 アドヴァリティクス アーゲー ミクロキャビティでの少量液体の混合方法と装置
WO2004076046A1 (fr) * 2003-02-27 2004-09-10 Advalytix Ag Procede et dispositif pour melanger de petites quantites de liquide dans des microcavites
US8097222B2 (en) 2005-05-12 2012-01-17 Stmicroelectronics, S.R.L. Microfluidic device with integrated micropump, in particular biochemical microreactor, and manufacturing method thereof
EP2167979A4 (fr) * 2007-07-25 2015-02-18 Canon Kk Appareil de commande de liquide
WO2009014261A1 (fr) 2007-07-25 2009-01-29 Canon Kabushiki Kaisha Appareil de commande de liquide
WO2009013705A1 (fr) * 2007-07-26 2009-01-29 Fondazione Istituto Italiano Di Tecnologia Dispositif pour commander un mouvement de fluide dans des micro/nanocanaux aux moyens d'ondes acoustiques de surface
US8393356B2 (en) 2007-07-26 2013-03-12 Fondazione Istituto Italiano Di Tecnologia Device for controlling fluid motion into micro/nanochannels by means of surface acoustic waves
TWI498552B (zh) * 2013-01-14 2015-09-01 Nat Univ Chung Hsing 可拋式毛細管電泳檢測儀器
CN113187702A (zh) * 2021-05-11 2021-07-30 上海芯物科技有限公司 一种无阀压电泵及其制作方法

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