WO1997049998B1 - Accelerometre sans masselottes - Google Patents
Accelerometre sans masselottesInfo
- Publication number
- WO1997049998B1 WO1997049998B1 PCT/CA1997/000442 CA9700442W WO9749998B1 WO 1997049998 B1 WO1997049998 B1 WO 1997049998B1 CA 9700442 W CA9700442 W CA 9700442W WO 9749998 B1 WO9749998 B1 WO 9749998B1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- primary
- wires
- heater
- auxiliary
- electrically conductive
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims abstract 8
- 230000001133 acceleration Effects 0.000 claims abstract 5
- 239000012530 fluid Substances 0.000 claims abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 14
- 235000012239 silicon dioxide Nutrition 0.000 claims 7
- 239000000377 silicon dioxide Substances 0.000 claims 7
- 239000004020 conductor Substances 0.000 claims 6
- 238000005530 etching Methods 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- 238000000059 patterning Methods 0.000 claims 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000005459 micromachining Methods 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- 229920005591 polysilicon Polymers 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 abstract 1
Abstract
L'invention porte sur un accéléromètre fait d'un substrat comportant une cavité, un fil chauffant s'étendant au dessus de la cavité, une paire de fils détecteurs de température s'étendant au dessus de la cavité et équidistants du fil chauffant un moyen d'alimentation en courant du fil chauffant pour créer dans un fluide un gradient de température symétrique partant du fil chauffant en direction des deux détecteurs de température. Ledit fluide peut être un liquide ou un gaz entourant le fil chauffant et les détecteurs de température. L'application d'une accélération modifie la symétrie et produit entre les deux détecteurs de température un différentiel de température proportionnel à l'accélération.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AU31622/97A AU3162297A (en) | 1996-06-26 | 1997-06-24 | Accelerometer without proof mass |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US67373396A | 1996-06-26 | 1996-06-26 | |
| US08/673,733 | 1996-06-26 | ||
| US80058897A | 1997-02-18 | 1997-02-18 | |
| US08/800,588 | 1997-02-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO1997049998A1 WO1997049998A1 (fr) | 1997-12-31 |
| WO1997049998B1 true WO1997049998B1 (fr) | 1998-03-12 |
Family
ID=27100999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/CA1997/000442 WO1997049998A1 (fr) | 1996-06-26 | 1997-06-24 | Accelerometre sans masselottes |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6666088B2 (fr) |
| AU (1) | AU3162297A (fr) |
| WO (1) | WO1997049998A1 (fr) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19810286A1 (de) * | 1998-03-10 | 1999-09-23 | Siemens Ag | Mikrosensor, Verfahren zu seiner Herstellung und Verfahren zum Betreiben eines Mikrosensors |
| WO1999046559A1 (fr) * | 1998-03-12 | 1999-09-16 | Honeywell Inc. | Detecteur d'attitude/orientation |
| DE19847455A1 (de) * | 1998-10-15 | 2000-04-27 | Bosch Gmbh Robert | Verfahren zur Bearbeitung von Silizium mittels Ätzprozessen |
| DE59905866D1 (de) * | 1999-12-20 | 2003-07-10 | Heinz Ploechinger | Sensor zur Erfassung einer Drehbewegung oder einer Drehbeschleunigung |
| US6722199B2 (en) * | 1999-12-20 | 2004-04-20 | Heinz Ploechinger | Sensor for detecting a rotational movement or an angular acceleration |
| DE10111840C2 (de) | 2001-03-13 | 2003-06-05 | Bosch Gmbh Robert | Verfahren zur Vermeidung von Verschmutzungen auf einem Sensorchip und Verwendung eines Zusatzheizers auf einem Sensorchip |
| DE10230198A1 (de) * | 2002-07-05 | 2004-01-22 | Robert Bosch Gmbh | Sensor mit einer Heizeinrichtung und Verfahren |
| US7795723B2 (en) | 2004-02-05 | 2010-09-14 | Analog Devices, Inc. | Capped sensor |
| KR100552480B1 (ko) * | 2004-07-08 | 2006-02-15 | 삼성전자주식회사 | 마이크로 가속도계 |
| US20060179940A1 (en) * | 2005-02-11 | 2006-08-17 | Finemems Inc. | Ultra-small Profile, Low Cost Chip Scale Accelerometers of Two and Three Axes Based on Wafer Level Packaging |
| US7424826B2 (en) * | 2005-11-10 | 2008-09-16 | Memsic, Inc. | Single chip tri-axis accelerometer |
| DE602006019548D1 (de) * | 2006-03-31 | 2011-02-24 | Sensirion Holding Ag | Durchflusssensor mit Thermoelementen |
| WO2008052306A1 (fr) * | 2006-09-28 | 2008-05-08 | Simon Fraser University | Microstructures tridimensionnelles et procédé de fabrication de celles-ci |
| CN100453972C (zh) * | 2007-06-01 | 2009-01-21 | 北京沃尔康科技有限责任公司 | 气体摆式惯性传感器 |
| JP5178598B2 (ja) | 2009-03-24 | 2013-04-10 | 日立オートモティブシステムズ株式会社 | 熱式流量計 |
| EP2435789B1 (fr) * | 2009-05-27 | 2015-04-08 | King Abdullah University Of Science And Technology | Système masse-ressort-amortisseur de système microélectromécanique (mems) utilisant un schéma de suspension hors-plan |
| US8517605B2 (en) * | 2009-09-18 | 2013-08-27 | Northwestern University | Bimetallic integrated on-chip thermocouple array |
| EP2762864B1 (fr) | 2013-01-31 | 2018-08-08 | Sensirion AG | Dispositif de capteur à membrane et son procédé de fabrication |
| EP2930475B1 (fr) | 2014-12-22 | 2017-11-15 | Sensirion AG | Agencement de capteur de débit |
| CN110134164B (zh) * | 2019-04-29 | 2020-10-30 | 淮南万泰电气有限公司 | 一种用于恒温车间的温度控制系统 |
| CN111060715B (zh) * | 2019-12-24 | 2022-02-08 | 中国航空工业集团公司北京长城航空测控技术研究所 | 一种基于热电堆的加速度传感器 |
Family Cites Families (57)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2455394A (en) | 1943-06-29 | 1948-12-07 | Sperry Corp | Accelerometer |
| US2440189A (en) | 1945-04-13 | 1948-04-20 | Rca Corp | Convection current responsive instrument |
| US2650496A (en) | 1948-05-17 | 1953-09-01 | Phillips Petroleum Co | Fluid flowmeter with heated resistance bridge circuit |
| US2709365A (en) | 1949-07-18 | 1955-05-31 | Phillips Petroleum Co | Flowmeter |
| US2726546A (en) | 1952-03-26 | 1955-12-13 | Jr Robert W King | Apparatus for measuring fluid flow |
| US2947938A (en) | 1954-04-09 | 1960-08-02 | Victory Engineering Corp | Electrothermal measuring apparatus and method for the calibration thereof |
| US3114261A (en) | 1959-09-03 | 1963-12-17 | Richard C Dillon | Strain wire flowmeter |
| US3241374A (en) | 1962-07-13 | 1966-03-22 | G V Controls Inc | Sensing of acceleration |
| US3247723A (en) * | 1964-07-20 | 1966-04-26 | Raphael O Yavne | Accelerometer, gravity meter and gas flow responsive instrument |
| US3429178A (en) | 1965-01-07 | 1969-02-25 | Enoch J Durbin | Measuring system |
| US3677085A (en) | 1970-04-08 | 1972-07-18 | Yugen Kaisha Tsukasa Sokken | Tandem-type hot-wire velocity meter probe |
| US3800592A (en) | 1972-01-13 | 1974-04-02 | Westerbeke J Corp | Flowmeter |
| US3995481A (en) | 1973-02-07 | 1976-12-07 | Environmental Instruments, Inc. | Directional fluid flow transducer |
| US3881181A (en) | 1973-02-22 | 1975-04-29 | Rca Corp | Semiconductor temperature sensor |
| US3992940A (en) | 1973-11-02 | 1976-11-23 | Chrysler Corporation | Solid state fluid flow sensor |
| IN141238B (fr) | 1974-02-16 | 1977-02-05 | Hoechst Ag | |
| US3975951A (en) | 1974-03-21 | 1976-08-24 | Nippon Soken, Inc. | Intake-air amount detecting system for an internal combustion engine |
| US3996799A (en) | 1975-09-29 | 1976-12-14 | Putten Antonius Ferdinandus Pe | Device for measuring the flow velocity of a medium |
| US4232553A (en) * | 1979-01-12 | 1980-11-11 | Kbg Corporation | Angular acceleration sensing apparatus |
| US4624137A (en) | 1981-10-09 | 1986-11-25 | Honeywell Inc. | Semiconductor device |
| US4472239A (en) | 1981-10-09 | 1984-09-18 | Honeywell, Inc. | Method of making semiconductor device |
| DE3142325C2 (de) | 1981-10-24 | 1983-08-25 | Hewlett-Packard GmbH, 7030 Böblingen | Brückenschaltung für Messzwecke |
| US4478077A (en) | 1982-09-30 | 1984-10-23 | Honeywell Inc. | Flow sensor |
| US4548078A (en) | 1982-09-30 | 1985-10-22 | Honeywell Inc. | Integral flow sensor and channel assembly |
| US4478076A (en) | 1982-09-30 | 1984-10-23 | Honeywell Inc. | Flow sensor |
| US4651564A (en) | 1982-09-30 | 1987-03-24 | Honeywell Inc. | Semiconductor device |
| US4501144A (en) | 1982-09-30 | 1985-02-26 | Honeywell Inc. | Flow sensor |
| US4677850A (en) | 1983-02-11 | 1987-07-07 | Nippon Soken, Inc. | Semiconductor-type flow rate detecting apparatus |
| US4686856A (en) | 1983-02-28 | 1987-08-18 | Vavra Randall J | Mass flow meter |
| US4522058A (en) | 1983-06-15 | 1985-06-11 | Mks Instruments, Inc. | Laminar-flow channeling in thermal flowmeters and the like |
| JPS601525A (ja) | 1983-06-20 | 1985-01-07 | Nippon Soken Inc | 半導体式流量検出装置 |
| JPS6013220A (ja) | 1983-07-04 | 1985-01-23 | Esutetsuku:Kk | ガス流量センサ−及びその製造方法 |
| US4487063A (en) | 1983-07-11 | 1984-12-11 | General Motors Corporation | Solid state mass air flow sensor |
| US4542650A (en) | 1983-08-26 | 1985-09-24 | Innovus | Thermal mass flow meter |
| US4502325A (en) | 1983-09-08 | 1985-03-05 | General Motors Corporation | Measurement of mass airflow into an engine |
| JPS60151517A (ja) | 1984-01-18 | 1985-08-09 | Nippon Soken Inc | 半導体式流量検出装置 |
| US4693115A (en) | 1984-04-24 | 1987-09-15 | Nippon Soken, Inc. | Device for measuring flow rate of air |
| JPS60236025A (ja) | 1984-05-09 | 1985-11-22 | Nippon Soken Inc | 空気流量センサ |
| US4637253A (en) | 1984-05-22 | 1987-01-20 | Kabushiki Kaisha Toshiba | Semiconductor flow detector for detecting the flow rate and flowing direction of fluid |
| FR2574538B1 (fr) | 1984-12-07 | 1988-02-26 | Air Liquide | Montage electronique et methode d'etalonnage pour debitmetre a fil chaud |
| JPS61170618A (ja) | 1985-01-24 | 1986-08-01 | Toyota Central Res & Dev Lab Inc | 流速検出用半導体センサ |
| US4685331A (en) | 1985-04-10 | 1987-08-11 | Innovus | Thermal mass flowmeter and controller |
| DE3512960C2 (de) | 1985-04-11 | 1987-03-05 | Intra-Automation GmbH Meß- und Regelinstrumente, 4053 Jüchen | Differenzdruckströmungssonde |
| DE3539013A1 (de) | 1985-11-02 | 1987-05-07 | Vdo Schindling | Anordnung mit einem luftmassenmesser fuer eine brennkraftmaschine |
| DE3539015A1 (de) | 1985-11-02 | 1987-05-07 | Vdo Schindling | Anordnung mit einem luftmassenmesser fuer eine brennkraftmaschine |
| US4744246A (en) | 1986-05-01 | 1988-05-17 | Busta Heinz H | Flow sensor on insulator |
| US4739651A (en) | 1986-07-28 | 1988-04-26 | Air Sensors, Inc. | Throttle body with internally mounted anemometer |
| DE3818385A1 (de) | 1987-06-04 | 1988-12-22 | Mazda Motor | Hitzdraht-stroemungsmengensensor |
| US4739657A (en) | 1987-06-22 | 1988-04-26 | Honeywell Inc. | Resistance with linear temperature coefficient |
| US4735086A (en) | 1987-06-26 | 1988-04-05 | Ford Motor Company | Thick film mass airflow meter with minimal thermal radiation loss |
| JP2992660B2 (ja) | 1991-06-19 | 1999-12-20 | 本田技研工業株式会社 | ガスレートセンサ |
| US5719333A (en) | 1994-01-20 | 1998-02-17 | Honda Giken Kogyo Kabushiki Kaisha | Acceleration sensor |
| JP3244208B2 (ja) | 1994-02-07 | 2002-01-07 | 本田技研工業株式会社 | ガスレート検出器 |
| JP3312227B2 (ja) | 1994-02-23 | 2002-08-05 | 本田技研工業株式会社 | ガス式角速度センサ |
| US5786744A (en) * | 1994-03-24 | 1998-07-28 | Honda Giken Kogyo Kabushiki Kaisha | Hybrid sensor |
| US5581034A (en) * | 1995-01-13 | 1996-12-03 | Remec, Inc. | Convective accelerometer and inclinometer |
| US5808197A (en) * | 1995-01-13 | 1998-09-15 | Remec, Inc. | Vehicle information and control system |
-
1997
- 1997-06-24 AU AU31622/97A patent/AU3162297A/en not_active Abandoned
- 1997-06-24 WO PCT/CA1997/000442 patent/WO1997049998A1/fr active Application Filing
-
2001
- 2001-05-04 US US09/848,000 patent/US6666088B2/en not_active Expired - Lifetime
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