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WO1996003629A1 - Membrane protectrice pour detecteur de pression au silicium - Google Patents

Membrane protectrice pour detecteur de pression au silicium Download PDF

Info

Publication number
WO1996003629A1
WO1996003629A1 PCT/DE1995/000907 DE9500907W WO9603629A1 WO 1996003629 A1 WO1996003629 A1 WO 1996003629A1 DE 9500907 W DE9500907 W DE 9500907W WO 9603629 A1 WO9603629 A1 WO 9603629A1
Authority
WO
WIPO (PCT)
Prior art keywords
protective membrane
cover
membrane
silicon chip
pressure sensor
Prior art date
Application number
PCT/DE1995/000907
Other languages
German (de)
English (en)
Inventor
Peter Bauer
Manfred Frimberger
Lorenz Pfau
Josef Dirmeyer
Günter EHRLER
Original Assignee
Siemens Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Aktiengesellschaft filed Critical Siemens Aktiengesellschaft
Priority to JP8505349A priority Critical patent/JPH10503021A/ja
Priority to KR1019970700391A priority patent/KR970705015A/ko
Priority to EP95924852A priority patent/EP0771415A1/fr
Publication of WO1996003629A1 publication Critical patent/WO1996003629A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings
    • G01L19/143—Two part housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means

Definitions

  • the invention relates to a protective membrane for a silicon pressure sensor according to the preamble of patent claim 1.
  • connection wires of silicon pressure sensors such as Bond wires and connection areas such as Bond pads must be protected from environmental influences in order to ensure the functionality of silicon pressure sensors over a long period of time.
  • the document EP 0 059 488 A1 shows a stainless steel membrane arranged at a distance above a capacitive silicon pressure sensor.
  • the cavity between the silicon pressure sensor and the protective membrane is filled with silicone oil.
  • the mass of the silicon chip acting as a pressure sensor membrane is increased by the gel applied to the silicon chip, the oil as the transmission medium between the silicon chip and the protective membrane, or the protective membrane lying directly on the silicon chip.
  • the pressure sensor membrane is sluggish. As a result, the pressure sensor no longer only records pressure but also accelerations. If the pressure sensor is used in a vehicle, for example, it is subjected to accelerations, which are then incorporated into its output signal.
  • the object of the present invention is to create an inexpensive pressure sensor which is protected against environmental influences and which, in particular, has a low sensitivity to acceleration and a high sensitivity to pressure.
  • a protective membrane which is connected to a cover enclosing the silicon chip, is made of a weakly air-permeable and water-impermeable material and is arranged at a distance above the pressure-absorbing silicon chip, one through the membrane, the cover and the silicon chip formed closed cavity is filled with air.
  • the protective membrane protects the pressure sensor, its connection surfaces and its connection wires against environmental influences and prevents corrosion on these components.
  • the mass of the pressure sensor membrane is increased only slightly by the protective membrane according to the invention and its arrangement above the air-filled cavity, so that the pressure sensor is very responsive and almost only absorbs pressure fluctuations but not changes in acceleration.
  • the protective membrane has poor air permeability.
  • a pressure increase in the cavity caused by a temperature increase causes pressure equalization with the environment via the protective membrane.
  • the pressure equalization takes place in a large time interval - for example in the minute range - compared to the duration of significant pressure signals recorded. The recorded pressure signals are thus not weakened or falsified.
  • FIG. 1 shows a longitudinal section through a pressure sensor with a cover formed in one piece with the protective membrane
  • FIG. 2 shows a perspective illustration of a cover which is formed in one piece with the protective membrane
  • FIG. 3 shows a view of the cover according to FIG. 2 from below
  • FIG. 4 shows a longitudinal section through a cover formed in two pieces with the protective membrane
  • FIG. 5 shows a longitudinal section through a pressure sensor with cover and protective membrane built into a housing.
  • FIG. 1 shows a pressure sensor designed as a silicon chip 2 and arranged on a base plate 1.
  • the pressure sensor can work according to the piezoresistive, the piezoelectric, the capacitive or another principle.
  • the silicon chip 2 is connected to an evaluating control circuit via connecting wires 3 which are led out downward through the base plate 1.
  • the connecting wires 3 are guided in a known manner through glass tubes, not shown here, through the base plate, so that the leadthroughs are tight against the environment.
  • the connection wires 3 are connected above the silicon chip 2 via bond wires 4, schematically indicated, to bond pads 5 on the surface of the silicon chip 2.
  • the bond wires 4, the bond pads 5 and in particular the connection points between bond wires 4 and bond pads 5 are at risk of corrosion. Furthermore, the entire surface of the silicon chip 2 is at risk of corrosion, in particular if the sensor is used in a chemically aggressive environment such as, for example, an atmosphere with salt spray. The surface of the silicon chip 2 with the connection structures 4 and 5 is therefore shielded from the environment.
  • a cover 7 is placed on the silicon chip 2 according to FIG. 1 and encloses the silicon chip 2.
  • a protective membrane 8 made of a weakly air-permeable and water-impermeable material, preferably plastic, is connected to the cover 7.
  • the cover 7 is also preferably made of plastic.
  • the cover 7, the protective membrane 8 and the silicon chip 2 describe a cavity 6 which is filled with air and as a pressure-transmitting medium between the protective membrane 8 and
  • Silicon chip 2 is used.
  • a pressure equalization with the environment takes place via the weakly air-permeable protective membrane 8.
  • a pressure equalization between the cavity and the environment via the membrane can also be necessary if the pressure sensor is operated at different ambient pressures.
  • different ambient air pressures act on the vehicle depending on the height above sea level in which the vehicle is operated. Filling the cavity with a pressure-transmitting medium that has an almost temperature-independent expansion coefficient, such as oil is therefore superfluous.
  • a protective membrane made of elastic plastic, preferably silicone rubber, has these properties with a simultaneous water resistance to a particular degree.
  • a suitable silicone rubber is sold, for example, by Bayer (Leverkusen, DE) under the name "LSR".
  • the protective membrane 8 can, for example, also be made from a natural rubber or another elastomer which has the aforementioned properties.
  • Cover 7 and protective membrane 8 can, according to FIG. 1, be made in one piece from the same material - plastic, elastic plastic, elastomer, silicone rubber - for example by injection molding, or have two material components according to FIG.
  • cover 7 is made of a different material than the protective membrane 8, the cover 7 and the protective membrane 8 are sealingly connected to one another. Sealing lips 9 are preferably formed on the ends of the cover 7 and seal the cover 7 according to FIG. 5 against a housing enclosing an electronics module with the pressure sensor.
  • the protective membrane 8 preferably has a bead 10 in its outer peripheral part. If the pressure sensor is exposed to changing temperatures or changing ambient pressures, the protective membrane 8 can expand or contract within certain limits by means of the bead 10. Stresses in the protective membrane 8, which influence the sensitivity of the pressure sensor, are thus avoided. Furthermore, voltages in the protective membrane 8 that occur during their manufacture are compensated for.
  • the mobility 10 of the protective membrane 8 is also influenced by the bead 10. If, for example, the protective membrane 8 is thick, it nevertheless remains easily movable due to a thin bead area. If the protective membrane 8 has a bead, the protective membrane 8 has an almost constant restoring force over its entire deflection range.
  • the inertia and the damping behavior of the protective membrane 8 and thus also the sensitivity of the pressure sensor can be influenced by the thickness of the protective membrane 8, its material properties and the configuration of the bead 10.
  • the protective membrane 8 is preferably very soft in order to transmit a pressure wave to be recorded to the pressure sensor with as little loss as possible. If the cover 7 is also made of a very soft material, its handling causes difficulties during assembly. According to Figure 4, the cover 7 is therefore made of an easy-to-handle harder material, while the protective membrane 8 is made of a softer material.
  • FIG. 2 shows a perspective view of the cover 7 with the protective membrane 8 in one piece.
  • the inner circumference of the cover 7, with which the cover 7 is pushed onto the pressure sensor can be of a uniformly round shape or, according to FIG. 3, wavy.
  • FIG. 3 shows the cover 7 formed in one piece with the protective membrane 8 from below.
  • the waves 11 in the inner circumference 12 of the cover 7, when the cover 7 is attached to the pressure sensor cause small, semi-cylindrical cavities through which a superfluous air from the cavity 6 between the protective membrane 8 and the pressure sensor arises when the cover 7 is attached to the pressure sensor is discharged downwards.
  • the cavity 6 is also closed off next to the protective membrane 8, the cover 7 and the silicon chip 2 by a printed circuit board 13 carrying the silicon chip 2.
  • FIG. 5 shows a pressure sensor enclosed by a cover 7 with a protective membrane 8, which is mounted with its connecting wires 3 onto a printed circuit board 13.
  • a housing which has an upper wall 14 and a lower wall 15 encloses this arrangement.
  • In the upper wall 14 there is an opening 16 which connects the pressure sensor to the surroundings via a channel 17, so that the pressure fluctuations to be measured are channel 17 and the protective membrane 8 to the pressure sensor.
  • the channel 17 runs approximately parallel to the wall 14 of the housing. This prevents manual contact of the protective membrane 8 from the outside.
  • the cover 7 is fitted between the upper wall 14 and the printed circuit board 13 in such a way that it covers the silicon chip 2 in a sealing manner and at the same time encloses the opening 16 with its sealing lips 9 so that the opening 16 is completely sealed off from the rest of the housing interior.
  • the pressure sensor with the protective membrane according to the invention is preferably used for side impact detection in side parts of vehicles.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne une membrane protectrice pour détecteurs de pression au silicium, qui permet de mettre la micropastille de silicium et ses structures électriques de raccordement à l'abri des influences néfastes de l'environnement. La membrane comporte dans sa périphérie extérieure, un bourrelet qui permet de compenser les contraintes thermiques et les contraintes de compression et d'influer sur la force d'inertie de la membrane.
PCT/DE1995/000907 1994-07-21 1995-07-11 Membrane protectrice pour detecteur de pression au silicium WO1996003629A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP8505349A JPH10503021A (ja) 1994-07-21 1995-07-11 シリコン圧力センサのための保護ダイヤフラム
KR1019970700391A KR970705015A (ko) 1994-07-21 1995-07-11 실리콘 압력 감지기용 보호 격막
EP95924852A EP0771415A1 (fr) 1994-07-21 1995-07-11 Membrane protectrice pour detecteur de pression au silicium

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEP4425921.2 1994-07-21
DE4425921 1994-07-21

Publications (1)

Publication Number Publication Date
WO1996003629A1 true WO1996003629A1 (fr) 1996-02-08

Family

ID=6523837

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1995/000907 WO1996003629A1 (fr) 1994-07-21 1995-07-11 Membrane protectrice pour detecteur de pression au silicium

Country Status (4)

Country Link
EP (1) EP0771415A1 (fr)
JP (1) JPH10503021A (fr)
KR (1) KR970705015A (fr)
WO (1) WO1996003629A1 (fr)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1096243A2 (fr) * 1999-10-28 2001-05-02 Motorola, Inc. Capteur physique, en particulier capteur de pression semiconducteur
US6506110B1 (en) 1997-11-28 2003-01-14 Siemens Aktiengesellschaft Ventilation device, especially for electrical control devices
US6769319B2 (en) 2001-07-09 2004-08-03 Freescale Semiconductor, Inc. Component having a filter
FR2854023A1 (fr) * 2003-04-16 2004-10-22 Valeo Systemes Dessuyage Boitier comportant un conduit de circulation d'air empechant toute accumulation de liquide
EP1593478A1 (fr) * 2004-05-05 2005-11-09 Schreiner Group GmbH & Co. KG Procédé pour recouvrir et ventiler un domaine fonctionnel et dispositif avec des feuilles pour réaliser ce procédé
DE102010022642A1 (de) 2010-06-04 2011-12-08 Rolls-Royce Deutschland Ltd & Co Kg Vorrichtung zur Überprüfung des Durchflusses von Öl oder Brennstoff durch eine Filteranordnung
CN101179910B (zh) * 2006-11-10 2012-11-14 罗伯特·博世有限公司 外壳的压力平衡装置
DE102012202038A1 (de) 2012-02-10 2013-08-14 Rolls-Royce Deutschland Ltd & Co Kg Messvorrichtung mit einem Drucksensor
EP2848909A1 (fr) * 2013-09-13 2015-03-18 Hella KGaA Hueck & Co. Capteur de gaz et véhicule automobile équipé d'un capteur de gaz
CN105697001A (zh) * 2016-03-31 2016-06-22 杭州乾景科技有限公司 潜油井下测温测压装置
CN107063324A (zh) * 2017-04-21 2017-08-18 士彩材料科技（苏州）有限公司 一种防水透气的传感器保护机构

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015025769A (ja) * 2013-07-29 2015-02-05 ビフレステック株式会社 検体情報検出ユニット、検体情報処理装置、及び検体情報検出ユニットの製造方法
WO2014021335A1 (fr) * 2012-07-30 2014-02-06 株式会社三菱ケミカルホールディングス Unité de détection d'information de sujet, dispositif de traitement d'information de sujet, dispositif de brosse à dents électrique, dispositif de rasoir électrique, dispositif de détection d'information de sujet, procédé d'évaluation du degré de vieillissement, et dispositif d'évaluation du degré de vieillissement

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59224534A (ja) * 1983-06-03 1984-12-17 Citizen Watch Co Ltd 圧力電気変換器
WO1986002446A1 (fr) * 1984-10-12 1986-04-24 Ametek, Inc. Transducteur de pression
WO1993007457A1 (fr) * 1991-10-04 1993-04-15 Robert Bosch Gmbh Capteur de pression

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59224534A (ja) * 1983-06-03 1984-12-17 Citizen Watch Co Ltd 圧力電気変換器
WO1986002446A1 (fr) * 1984-10-12 1986-04-24 Ametek, Inc. Transducteur de pression
WO1993007457A1 (fr) * 1991-10-04 1993-04-15 Robert Bosch Gmbh Capteur de pression

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 9, no. 101 (P - 353) 2 May 1985 (1985-05-02) *

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6506110B1 (en) 1997-11-28 2003-01-14 Siemens Aktiengesellschaft Ventilation device, especially for electrical control devices
EP1096243A2 (fr) * 1999-10-28 2001-05-02 Motorola, Inc. Capteur physique, en particulier capteur de pression semiconducteur
EP1096243A3 (fr) * 1999-10-28 2002-06-12 Motorola, Inc. Capteur physique, en particulier capteur de pression semiconducteur
US6453749B1 (en) 1999-10-28 2002-09-24 Motorola, Inc. Physical sensor component
US6769319B2 (en) 2001-07-09 2004-08-03 Freescale Semiconductor, Inc. Component having a filter
FR2854023A1 (fr) * 2003-04-16 2004-10-22 Valeo Systemes Dessuyage Boitier comportant un conduit de circulation d'air empechant toute accumulation de liquide
WO2004093509A2 (fr) * 2003-04-16 2004-10-28 Valeo Systemes D'essuyage Boitier comportant un conduit de circulation d’air empechant toute accumulation de liquide
WO2004093509A3 (fr) * 2003-04-16 2005-04-28 Valeo Systemes Dessuyage Boitier comportant un conduit de circulation d’air empechant toute accumulation de liquide
EP1593478A1 (fr) * 2004-05-05 2005-11-09 Schreiner Group GmbH & Co. KG Procédé pour recouvrir et ventiler un domaine fonctionnel et dispositif avec des feuilles pour réaliser ce procédé
CN101179910B (zh) * 2006-11-10 2012-11-14 罗伯特·博世有限公司 外壳的压力平衡装置
DE102010022642A1 (de) 2010-06-04 2011-12-08 Rolls-Royce Deutschland Ltd & Co Kg Vorrichtung zur Überprüfung des Durchflusses von Öl oder Brennstoff durch eine Filteranordnung
DE102012202038A1 (de) 2012-02-10 2013-08-14 Rolls-Royce Deutschland Ltd & Co Kg Messvorrichtung mit einem Drucksensor
EP2848909A1 (fr) * 2013-09-13 2015-03-18 Hella KGaA Hueck & Co. Capteur de gaz et véhicule automobile équipé d'un capteur de gaz
CN104459027A (zh) * 2013-09-13 2015-03-25 赫拉胡克公司 气体传感器和带有气体传感器的机动车
US9372102B2 (en) 2013-09-13 2016-06-21 Hella Kgaa Hueck & Co. Gas sensor and motor vehicle with a gas sensor
CN105697001A (zh) * 2016-03-31 2016-06-22 杭州乾景科技有限公司 潜油井下测温测压装置
CN105697001B (zh) * 2016-03-31 2018-12-21 杭州乾景科技有限公司 潜油井下测温测压装置
CN107063324A (zh) * 2017-04-21 2017-08-18 士彩材料科技（苏州）有限公司 一种防水透气的传感器保护机构

Also Published As

Publication number Publication date
JPH10503021A (ja) 1998-03-17
KR970705015A (ko) 1997-09-06
EP0771415A1 (fr) 1997-05-07

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