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WO1996000849A1 - Micropompe - Google Patents

Micropompe Download PDF

Info

Publication number
WO1996000849A1
WO1996000849A1 PCT/DE1995/000841 DE9500841W WO9600849A1 WO 1996000849 A1 WO1996000849 A1 WO 1996000849A1 DE 9500841 W DE9500841 W DE 9500841W WO 9600849 A1 WO9600849 A1 WO 9600849A1
Authority
WO
WIPO (PCT)
Prior art keywords
dynamic
pump chamber
micropump according
membrane
microvalves
Prior art date
Application number
PCT/DE1995/000841
Other languages
German (de)
English (en)
Inventor
Torsten Gerlach
Original Assignee
Torsten Gerlach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Torsten Gerlach filed Critical Torsten Gerlach
Publication of WO1996000849A1 publication Critical patent/WO1996000849A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1077—Flow resistance valves, e.g. without moving parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2203/00—Non-metallic inorganic materials
    • F05C2203/02—Glass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2203/00—Non-metallic inorganic materials
    • F05C2203/08—Ceramics; Oxides
    • F05C2203/0865—Oxide ceramics
    • F05C2203/0886—Silica

Definitions

  • the invention relates to a micropump.
  • the micropump has dynamic passive valves and is used especially for the conveyance of gases and liquids. It can be produced very advantageously using known semiconductor technologies and is suitable for use in integrated microsystems. State of the art
  • a micropump based on silicon which essentially consists of three identical piezoelectrically driven valve elements which are arranged in series in terms of flow technology.
  • the sagging membrane does volume work and creates a corresponding pressure on the fluid. If the individual valves are actuated in a suitable three-phase cycle, the fluid is conveyed in a certain direction, which is determined by the peristaltic wave.
  • micropump also suitable for system integration, is presented in CH-PS 04055/89. It contains a piezoelectrically driven membrane which periodically pressurizes the fluid to be pumped. Two passive micro valves at the inlet and outlet of the pump rectify this alternating pressure and thus determine the direction of flow.
  • the working principle corresponds structurally to the classic piston pump.
  • micropumps have in common the relatively complicated mechanical structure, which complicates the use of microtechnologies and increases the manufacturing costs.
  • a strongly structured hydraulic line system can be realized by multiple lithography, combined with a corresponding number of etching processes.
  • the joining of the different layers into a sandwich is associated with some technological difficulties.
  • the micropumps take up a relatively large area on the carrier substrate. This is countered by the high metering accuracy and a relatively high pump pressure, but also by a comparatively low delivery rate, which can be explained, among other things, by the high flow resistances and the pass times of the fluids flowing through, which are quite noteworthy in connection with the relatively large dead volumes leads.
  • a valveless micropump which also effects periodic pressure impressing on the flowing medium by an actuator device, generally a vibrating membrane.
  • an actuator device generally a vibrating membrane.
  • the rectification is carried out partially by a structure which is anisotropic from a fluidic point of view without any moving mechanical functional elements.
  • An anisotropic structure is, inter alia, a gap-like region which is otherwise not specified and which is designed as a sawtooth.
  • Whose Manufacturing with the microtechnologies is complicated, however, since the sawtooth shape does not necessarily have to coincide with the crystal structure of the substrate material, and this makes the use of anisotropic etching processes more difficult.
  • the proposed embodiment whose sawtooth-like geometry is realized by arranging two V-shaped gap-like structures one behind the other, requires costly precision joining methods given the dimensions specified in the micrometer range.
  • the micropump according to the invention has the advantage over the arrangements just recognized that it has a very simple geometric structure that can be produced in an uncomplicated manner by a few microtechnological processes.
  • the necessary joining steps can be reduced to a minimum depending on the number and required accuracy.
  • the micro pump is particularly suitable for inexpensive mass production.
  • the space requirement of the micropump according to the invention is significantly reduced, especially in comparison to the two documents first recognized.
  • the simple geometry of the micro-pump according to the invention optimizes the fluidodynamic system, which increases the maximum possible working frequency, volume flow and pump pressure.
  • a particularly advantageous embodiment of the micropump provides at least two dynamic passive microvalves, which consist of a microflow channel with a truncated pyramid-shaped geometry.
  • the channel cross section along the axis of symmetry thus decreases continuously in one direction up to its narrowest point, in order then to suddenly widen.
  • This shape of the microflow channel has the effect that its flow resistance depends on the direction of flow at sufficiently high flow velocities.
  • the microchannel described is therefore able to partially rectify an alternating flow according to the principle "two steps forward - one step back", as a result of which a net volume flow is brought about in a preferred flow direction. Since this effect only occurs at higher speeds, it is referred to as a dynamic microvalve.
  • Such dynamic microvalves are used in a micropump according to claim 1.
  • FIG. 1 shows a perspective illustration of a first exemplary embodiment of a micropump
  • FIG. 2 shows a section along the line 1-1 in FIG. 1
  • FIG. 3 shows a section along the line 2-2 in FIG. 1
  • FIG. 4 to FIG. 7 shows a second to fifth exemplary embodiment a micropump.
  • the micropump according to the invention consists of an essentially closed pump chamber 3, which is filled with the fluid to be pumped and which is periodically impressed by a suitable drive device 4. Furthermore, the micropump contains at least two of the described dynamic microvalves 5, which serve in the form of flow channels as the inlet or outlet opening of the pumping chamber 3.
  • the micropump is characterized in particular by its very simple construction, which can be produced very advantageously, for example, using generally known microtechnologies such as photolithography and anisotropic etching on the basis of silicon and glass.
  • the dynamic microvalves 5 can be implemented in a ⁇ 100> -oriented silicon wafer in such a way that, starting from a sufficiently large opening in the etching mask, the material removal proceeds by means of an anisotropic etching solution such as KOH over the entire wafer thickness.
  • the resulting channel is laterally delimited by four crystallographic ⁇ 111> surfaces, which results in its truncated pyramidal geometry.
  • the respectively opposite ⁇ 111> surfaces enclose an angle of approximately 70 °.
  • a line 14, which runs in the middle in the main flow direction, represents the axis of symmetry of the dynamic microvalve 5. It is perpendicular to the wafer surface.
  • a membrane 7 is particularly suitable for the drive device 4, which is excited electromagnetically, electrostatically, pneumatically or piezoelectrically and executes bending vibrations indicated by the double arrow 16.
  • the piezoelectric drive can advantageously be carried out using a bimorph.
  • the pump chamber 3 is fixed in an element 10, 11, 11a or 11b and 11c by suitable microtechnologies. This can be done, for example, by photolithography with a subsequent etching step in silicon or glass as the starting material. If an appropriate etching stop method is used, the material removal can be stopped before the element 10 is completely penetrated, as a result of which the membrane 7 of the drive device 4 is formed. As such an etch stop special, on the Starting material of the element 10 previously applied layers, such as silicon oxide or silicon nitride on a silicon substrate, are understood, on which the etching process comes to a standstill and which are exposed by the material removal and thus fix the membrane 7.
  • the pump chamber 3 is closed on a side 12 facing away from the drive device 4 by the wafer 6, which contains the dynamic microvalves 5 and which is connected to the element 10, 11, 11a or 11c.
  • the element 11, 11a or 11b and 11c containing the pump chamber 3 can be open per se on a side 13 facing away from the wafer 6, realized, for example, by an etching step which runs completely through the element 11, 11a or 11b and 11c.
  • the membrane 7 is then attached as a thin material or film 15 with suitable joining methods on the element 11, 11a or 11b, whereby the pump chamber 3 is closed. This is possible, for example, by applying a glass foil, which forms the membrane 7, to the element 11, 11a or 11b by anodic bonding.
  • Typical dimensions of the dynamic micropump according to the invention are for: the cross section of the dynamic microvalves 5 at the narrowest point between one micrometer and five hundred micrometers, the extension of the dynamic microvalves 5 along the axes of symmetry
  • the typical oscillation frequency of the membrane 7 is between one hundred hertz and twenty kilohertz.
  • the dynamic microvalves 5 are implemented in an anti-parallel arrangement in the double-sided polished silicon wafer 6.
  • the element 10, which is firmly connected to the wafer 6 on the side 12 facing away from the membrane 7, contains the pump chamber 3, which is produced by an anisotropic etching step and has a truncated pyramidal geometry.
  • a thin material residue remains on a side of the pump chamber 3 facing away from the dynamic microvalves 5, which forms the membrane 7.
  • the membrane 7, which is part of the drive device 4, which is otherwise not described in detail, carries out bending vibrations identified by the double arrow 16.
  • FIG. 4 shows a second exemplary embodiment of the micropump, the pump chamber 3 of which is fixed in the element 11 by an anisotropic etching step and has a truncated pyramidal geometry.
  • the ele- element 11 is closed on the side 13 by means of the membrane 15 serving as membrane 7, which is fastened on the element 11.
  • the third exemplary embodiment of the micropump shown in FIG. 5 differs from the previous one in that the pump chamber 3 has a smaller dead volume instead of the element 11 due to the modified element 11a.
  • the element 11a contains two partial structures 17 and 18 with different cross-sectional areas, the mutually facing end faces of which partially coincide within the element 11a, the larger partial structure 17 with the membrane 7 and the smaller partial structure 18 with the wafer 6 containing the dynamic microvalves 5 is in direct connection.
  • the element 11a can be produced, for example, in that after double-sided lithography with different mask sizes in each case, an anisotropic etching process proceeds from the sides 12 and 13 until the etching fronts meet.
  • the pump chamber 3 is defined by the partial element 11b, which contains an opening with a larger cross-sectional area, and the partial element 11c, which contains an opening with a smaller cross-sectional area, instead of the element 11a, the partial element 11b with the membrane 7 and the partial element 11c is connected to the wafer 6 and the two sub-elements 11b and 11c are firmly connected to one another on a joining surface 19.
  • the drive device 4 is defined by the membrane 7 and a piezo element 9, the piezo element 9 being arranged on the membrane 7 and forming a bimorph structure with it.
  • the piezo element 9 is either a piezo plate, which is attached to the membrane 7, for example by an adhesive connection, or in the integrated form around a piezoelectrically active which is physically and chemically deposited on the membrane 7 with known microtechnologies and subsequently structured Layer.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

Les micropompes connues se caractérisent par une structure relativement complexe qui en général est difficile à produire et à monter. Les débits atteignables sont en outre limités. Une nouvelle micropompe doit avoir une structure plus simple et plus facile à produire en série, ainsi que des propriétés dynamiques améliorées qui permettent d'obtenir des débits plus élevés. Au moins deux microvannes dynamiques (5) sont utilisées pour redresser le courant alternatif généré par un oscillateur d'entraînement (4). Ces microvannes comprennent essentiellement un microcanal dont la section transversale se rétrécit en continu dans un sens d'écoulement jusqu'à atteindre son point le plus étroit. Des pièces mécaniques mobiles ne sont pas nécessaires, de sorte que les microvannes dynamiques peuvent être réalisées de manière très simple par exemple en silicium. Le système hydraulique simple de la micropompe permet d'atteindre des fréquences élevées de fonctionnement, donc des débits élevés. Cette micropompe est utile surtout dans la technique des microsystèmes, par exemple comme élément d'entraînement dans des systèmes microhydrauliques ou micropneumatiques.
PCT/DE1995/000841 1994-06-29 1995-06-29 Micropompe WO1996000849A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEP4422743.4 1994-06-29
DE4422743A DE4422743A1 (de) 1994-06-29 1994-06-29 Mikropumpe

Publications (1)

Publication Number Publication Date
WO1996000849A1 true WO1996000849A1 (fr) 1996-01-11

Family

ID=6521804

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1995/000841 WO1996000849A1 (fr) 1994-06-29 1995-06-29 Micropompe

Country Status (2)

Country Link
DE (1) DE4422743A1 (fr)
WO (1) WO1996000849A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000036892A1 (fr) * 1998-12-11 2000-06-22 Telefonaktiebolaget Lm Ericsson (Publ) Dispositif accroissant les transferts thermiques
US6227809B1 (en) 1995-03-09 2001-05-08 University Of Washington Method for making micropumps
JP2011513649A (ja) * 2008-03-14 2011-04-28 ザ テクノロジー パートナーシップ ピーエルシー ポンプ
US8821134B2 (en) * 2009-06-03 2014-09-02 The Technology Partnership Plc Fluid disc pump

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19539020C2 (de) * 1995-10-19 1999-04-22 Siemens Ag Pumpe zur Förderung gasförmiger oder flüssiger Medien
DE19648695C2 (de) * 1996-11-25 1999-07-22 Abb Patent Gmbh Vorrichtung zur automatischen und kontinuierlichen Analyse von Flüssigkeitsproben
DE19648694C1 (de) * 1996-11-25 1998-04-30 Vermes Mikrotechnik Gmbh Bidirektionale dynamische Mikropumpe
JP2001505640A (ja) 1996-12-11 2001-04-24 ゲーシム・ゲゼルシャフト・フューア・ズィリーツィウム−ミクロズュステーメ・ミト・ベシュレンクテル・ハフツング マイクロポンプ
DE19711270C2 (de) * 1997-03-18 2001-07-26 Schwerionenforsch Gmbh Mikropumpe für fluide Medien
JP3582316B2 (ja) * 1997-08-20 2004-10-27 株式会社日立製作所 化学分析装置
JP4396095B2 (ja) 2002-06-03 2010-01-13 セイコーエプソン株式会社 ポンプ
JP4378937B2 (ja) * 2002-06-03 2009-12-09 セイコーエプソン株式会社 ポンプ
DE10233235B4 (de) * 2002-07-22 2004-07-22 Siemens Ag Pumpvorrichtung und Verfahren zur Herstellung der Pumpvorrichtung
KR100499141B1 (ko) * 2003-01-15 2005-07-04 삼성전자주식회사 유체의 상변화에 의해 구동되는 마이크로 펌프
GB0308197D0 (en) * 2003-04-09 2003-05-14 The Technology Partnership Plc Gas flow generator
WO2005060593A2 (fr) 2003-12-10 2005-07-07 Purdue Research Foundation Micro-pompe de refroidissement d'appareils electroniques
CN1583541B (zh) * 2004-05-27 2010-09-29 哈尔滨工程大学 采用多层驱动膜结构的微驱动器及其制作方法
GB0508194D0 (en) * 2005-04-22 2005-06-01 The Technology Partnership Plc Pump
CN102459900A (zh) * 2009-06-03 2012-05-16 技术合伙公司 流体盘形泵
US8371829B2 (en) 2010-02-03 2013-02-12 Kci Licensing, Inc. Fluid disc pump with square-wave driver
US8646479B2 (en) 2010-02-03 2014-02-11 Kci Licensing, Inc. Singulation of valves
GB201202346D0 (en) 2012-02-10 2012-03-28 The Technology Partnership Plc Disc pump with advanced actuator
JP6183862B2 (ja) 2012-03-07 2017-08-23 ケーシーアイ ライセンシング インコーポレイテッド 改良アクチュエータを備えるディスクポンプ
GB201322103D0 (en) 2013-12-13 2014-01-29 The Technology Partnership Plc Fluid pump
GB2583880A (en) 2020-07-31 2020-11-11 Ttp Ventus Ltd Actuator for a resonant acoustic pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2248891A (en) * 1990-10-18 1992-04-22 Westonbridge Int Ltd Membrane micropump
WO1993005295A1 (fr) * 1991-09-11 1993-03-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micropompe microminiaturisee a membrane et a commande electrostatique
WO1994019609A1 (fr) * 1993-02-23 1994-09-01 Erik Stemme Pompe volumetrique du type a diaphragme

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2248891A (en) * 1990-10-18 1992-04-22 Westonbridge Int Ltd Membrane micropump
WO1993005295A1 (fr) * 1991-09-11 1993-03-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micropompe microminiaturisee a membrane et a commande electrostatique
WO1994019609A1 (fr) * 1993-02-23 1994-09-01 Erik Stemme Pompe volumetrique du type a diaphragme

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
STEMME & STEMME: "A VALVELESS DIFFUSER/NOZZLE-BASED FLUID PUMP", SENSORS AND ACTUATORS, no. 2, LAUSANNE, pages 159 - 167, XP000425002 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6227809B1 (en) 1995-03-09 2001-05-08 University Of Washington Method for making micropumps
WO2000036892A1 (fr) * 1998-12-11 2000-06-22 Telefonaktiebolaget Lm Ericsson (Publ) Dispositif accroissant les transferts thermiques
US6252769B1 (en) 1998-12-11 2001-06-26 Telefonaktiebolaget Lm Ericsson (Publ) Device for increasing heat transfer
JP2011513649A (ja) * 2008-03-14 2011-04-28 ザ テクノロジー パートナーシップ ピーエルシー ポンプ
US8821134B2 (en) * 2009-06-03 2014-09-02 The Technology Partnership Plc Fluid disc pump

Also Published As

Publication number Publication date
DE4422743A1 (de) 1996-01-04

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