WO1994006002A1 - Capacitive sensor and method of measuring changes in capacitance - Google Patents
Capacitive sensor and method of measuring changes in capacitance Download PDFInfo
- Publication number
- WO1994006002A1 WO1994006002A1 PCT/US1993/008352 US9308352W WO9406002A1 WO 1994006002 A1 WO1994006002 A1 WO 1994006002A1 US 9308352 W US9308352 W US 9308352W WO 9406002 A1 WO9406002 A1 WO 9406002A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- capacitor
- voltage
- generating
- output signal
- series
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract description 7
- 239000003990 capacitor Substances 0.000 abstract description 97
- 238000005259 measurement Methods 0.000 abstract description 6
- 239000006096 absorbing agent Substances 0.000 abstract description 3
- 230000035939 shock Effects 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000004812 Fluorinated ethylene propylene Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 230000001151 other effect Effects 0.000 description 2
- 229920009441 perflouroethylene propylene Polymers 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 239000005041 Mylar™ Substances 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- HQQADJVZYDDRJT-UHFFFAOYSA-N ethene;prop-1-ene Chemical group C=C.CC=C HQQADJVZYDDRJT-UHFFFAOYSA-N 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2605—Measuring capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/2405—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by varying dielectric
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/228—Circuits therefor
Definitions
- CAPACITANCE The invention relates to an apparatus and method for measuring the capacitance of a capacitive sensor and, more particularly, to the measurement of variations in the capacitance of the sensor.
- Measuring circuitry such as that disclosed by Moser can be realized using a microprocessor to switch in various combinations of capacitors for the variable capacitor while balancing the bridge.
- a look-up table in the microprocessor then provides an output code for the voltage corresponding to the value of the measured capacitance.
- This type of circuit is difficult to reduce to a single monolithic integrated circuit due to the large values and number of capacitors used and requires extra components to produce a linear electrical output with change in dimension or distance traveled.
- the invention is an apparatus for measuring the capacitance of a capacitive sensor comprising means for charging the capacitor; means for generating an electrical signal when the capacitor is charged to a certain voltage; and means for generating an output signal corresponding to the time required to charge the capacitor to the certain voltage.
- the invention is also a method of measuring the capacitance of a capacitor comprising the steps of charging the capacitor; measuring the time required to charge the capacitor to a first voltage; and generating an output signal linearly proportional to the time required to charge the capacitor to the first voltage.
- Figs. 1(a) and Kb) are cross-sectional views of a capacitive sensor including a sensor body and electronics.
- Figs. 2 is a cross-sectional view of another sensor body.
- Figs. 3(a) and 3(b) are cross-sectional views of another sensor body.
- Figs. 4 is a cross-sectional view of another sensor body.
- Fig. 5 is a block diagram of an electrical circuit for measuring capacitance.
- Figs. 6 is a detailed circuit diagrams of an embodiment of the electrical circuit of Fig. 5.
- Fig. 7 is a timing diagram for the operation of the electrical circuit of Fig. 5.
- Figs. 8 is a block diagram of another electrical circuit for measuring capacitance.
- a capacitive sensor of the invention comprises a sensor body
- the sensor body 10 comprises a piston 12 with a dielectric sleeve 14 mounted thereon, a body 16, and a cylindrical opening 18 extending a distance into the body 16 from an end thereof.
- the inner and outer walls of the cylindrical opening 18 are covered with electrically conductive layers 20 and 22, respectively, which form the electrodes of a capacitor .
- the electrically conductive layers 20 and 22 are connected to the external electrodes 24 and 26 respectively.
- the electrodes 24 and 26 are connected to the input terminals of the electronics 10.
- the dielectric 14 moves in and out of the opening 18 thereby changing the value of the capacitor.
- the electronics 10 measure the capacitance and produce an output voltage or pulse-width-modulated signal which is preferably linearly proportional to the value of capacitance. The measurement of the change in the capacitance provides a direct measure of the distance moved by the piston 12.
- the body 16 is typically a cylinder preferably formed of a material such as Kapton or Mylar with screened-on conductors as the layers 20 and 22. Plated plastic parts of any suitable shape could be used.
- the electrodes of the sensor capacitor are fixed and an insulating dielectric attached to the moving member moves in and out of the fixed capacitor to effect the capacitance change.
- a sensor body 30 includes an electrically conductive layer, corresponding to the layer 22 of Fig. 1, which is divided into three separate, unconnected conductive layers 32, 34 and 36.
- the conductive layers 32, 34 and 36 together with the electrically conductive layer 20 form the capacitor electrodes of three separate capacitors.
- the electrically conductive layers 32, 34 and 36 are connected to the external electrodes 38, 40 and 42 respectively.
- the first capacitor formed by layers 20 and 32, is always filled with the dielectric body 14 regardless of the position of the piston 12, thus providing a reference capacitor which can be used to measure, and correct for, wear, temperature variations and other effects which might change the characteristics of the dielectric and, thus, the magnitude of the capacitor.
- the second capacitor formed by layers 20 and 34, corresponds to the capacitor of Fig. 1.
- the extent to which the body 14- fills the space between the layers 20 and 34 varies, thereby changing the value of the capacitor.
- the measurement of the change in the capacitance of this capacitor provides a direct measure of the distance moved by the piston 12.
- the third capacitor formed by layers 20 and 36, has any other material present in the sensor, for example an oil such as is used in a shock absorber, between the electrodes.
- the third capacitor since it" is always filled with the other material regardless of the position of the piston 12, provides a reference capacitor which can be used to measure, and correct for the change in the characteristics of such material and, thus, the magnitude of the capacitor.
- a sensor body 50 containing a variable capacitor comprises a piston 52 with a dielectric slab 54 mounted thereon, a body 56, and a rectangular opening 57 extending a distance into the body 56 from an end thereof. Two opposed walls of the opening 57 are covered with electrically conductive layers 58 and 60, respectively, which form the electrodes of a capacitor.
- the electrically conductive layers.58 and 60 are connected to the first external electrode 68 and common electrode 70 respectively.
- the dielectric body 54 moves in and out of the opening 57 thereby changing the value of the capacitor.
- the measurement of the change in the capacitance of this capacitor provides a direct measure of the distance moved by the piston 52.
- the sensor body 50 also includes second and third reference capacitors to provide calibration of the sensor body due to changes in the characteristics of the variable capacitor due to wear, temperature variations and other effects which might change the characteristics of the dielectric and, thus, the magnitude of the capacitor or the characteristics of other materials such as an oil present in the sensor between the electrodes.
- the second capacitor comprises a dielectric body 62 of the same material as the body 54 between electrically conducting layers 64 and 66 which are connected to the common electrode 70 and the second external electrode 72, respectively.
- the third capacitor comprises a material 74, such as an oil, between electrically conducting layers 76 and 78 which are connected to the common electrode 70 and the third external electrode 80, respectively.
- an alternative sensor body 100 comprises a piston 102, an outer metal cylinder 104 with a dielectric sleeve 106 therebetween.
- the magnitude C of the capacitor is:
- the sensor body was made using telescoping brass tubing as the electrodes and heatshrink fluorinated ethylene propylene (FEP) as the insulator.
- FEP heatshrink fluorinated ethylene propylene
- the maximum capacitance C is then equal to about 130 picofarads.
- the invention comprises charging a capacitor from a constant current source.
- the capacitor charges at a uniform, linear rate and thus the voltage across the capacitor increases linearly during charging.
- the capacitor can be charged from a current or voltage source in a substantially linear way. In this case, the voltage V developed across the capacitor C as a function of time T is
- V V 0 (l-e-(T/RO).
- V Q is the asymptotic value of the voltage across the capacitor and R is the resistance across the capacitor.
- R is the resistance across the capacitor.
- the capacitance is thus linearly proportional to the length of time required to charge the capacitor to a voltage V provided that T «RC.
- the invention further comprises comparing the voltage developed across the capacitor to a reference voltage and generating a signal pulse once the voltage across the capacitor has reached a certain level.
- the invention further comprises measuring the time required to charge the capacitor, using for example counting means, and generating an output signal linearly proportional to the charging time T.
- the signal pulse resets the counter and latches the latch.
- the output of the latch in digital form can be used in apparatus (not shown) which accepts a digital signal. Alternatively the output of the latch can be converted to an analog signal.
- a preferred circuit 150 for measuring the change in capacitance is shown in Fig. 5 in block diagram form.
- a constant-current source 152 having an input electrode 154 connected to a power source such as a battery charges a variable capacitor 156 through a multiplexer 158.
- the multiplexer alternately connects the current source 152 to the electrode of the capacitor 156 and to a source of reference potential such as ground potential.
- the voltage V developed across the capacitor 156 is a linear ramp from 0 V with the slope of the ramp being proportional to the value of the sensor capacitance.
- the voltage V is also applied to a first input electrode 160 of a comparator 162.
- the comparator 162 changes output state when the voltage V c becomes greater than a reference voltage V re f applied to a second comparator input electrode 164.
- the clock oscillator 174 provides two synchronous outputs, a first series of high frequency pulses 176 and a second series of low frequency pulses 178.
- the first series 174 is counted by the counter 166 to provide the measure of time; the second series 178 switches the multiplexer 158, alternately connecting the the input electrode of the variable capacitor 156 to the current source or to ground.
- the period of the second series must be long compared to the time T required to charge the capacitor 154.
- a DAC 170 converts the digital representation of the counts into a voltage at electrode 172.
- DAC 170 is not required if the device connected to electrode 172 accepts a signal in digital format.
- Fig. 6 a detailed implementation of the circuit of Fig. 5 is shown. In the Figure all resistors are in kilohms and all capacitors are in microfarads ( ⁇ f) unless otherwise indicated.
- the circuit includes a constant-current source 152 including transistor 153, a variable capacitor 156, multiplexer 158, comparator 162, level converter 163, counter 166, latch 168, DAC 170, output section 210 and power supply 200.
- the clock 174 provides two synchronous outputs. The high-frequency output is counted by the counter; the low-frequency output switches the multiplexer 158.
- the multiplexer 158 alternately connects the capacitor 156 to the current source or to ground.
- Transistor 153 is preferably a type 2N4250.
- Multiplexer 158 is preferably a type 74HC4053.
- Comparator 162 is preferably a type CA339.
- Level converter 163 is a Schmidt trigger used to sharpen the pulse output generated by the comparator 162.
- Converter 163 is preferably a type CD4093. The output pulse from converter 163 resets counters 166 and latches the data of latches 168.
- Output section 210 including an operational amplifier 212, provides means for adjusting the voltage swing of the analog output.
- Latch 168 includes two octal latch circuits 168A which are preferably type 74HC564.
- Counters 166 include counter circuits 166A each of which is one half of an eight bit binary upcounter which are preferably type 74HC4520, NAND gates 166B which are preferably type 74HC20 and quad two input OR gates 166C which are preferably type 74HC32.
- the NAND gates 168B and the OR gates 168C are connected to the counter circuits 168A as shown to produce a 14-bit binary counter.
- DAC 170 includes the converter circuit 170A which is preferably a Burr-Brown 12 bit digital-to- analog converter type DAC80-CBI-V.
- Clock 174 is preferably a type 74HC4060 having a clock frequency of about 11 MHz.
- the divided clock frequency used to control multiplexer 158 is about 700 Hz.
- the parts can be purchased from one of Harris Corporation, Motorola, Inc. or Signetics
- Operational amplifier 212 is preferably a Bun- Brown type CA3140.
- Power supply 200 is a conventional three terminal regulator, producing +12V, -12V and +5V outputs.
- the positive polarity section includes a type 1N5001 diode 202, 0.1 ⁇ f capacitor to ground, a type 7812 12 V regulator 204, 0.1 ⁇ f filtering capacitor to ground and a type 7905 5V regulator 206.
- the negative polarity section includes a type 1N5001 diode 202, 0.1 ⁇ f capacitor to ground, a type 7912 -12 V regulator 208 and 0.1 ⁇ f filtering capacitor to ground.
- a timing diagram for the operation of the circuits of Figs. 5 and 6 is shown in Fig. 7. In Fig.
- the voltage Vc increases linearly with time T during the time interval TAB during which the multiplexer 158 connects the constant current source 152 to the capacitor 156.
- the time interval Tc is the alternating time interval where the multiplexer 158 connects the constant current source 152 to the reference potential.
- TAB is approximately equal to Tc and their sum is equal to the period of the low- frequency output of the clock 174.
- the time for the capacitor to charge to voltage Vref is TO ⁇ TAB.
- comparator 162 changes state, emitting a reset pulse which stops the counter 166 counting and causes it to reset. This is shown schematically in Fig. 7(b), where, during time interval A, counter 166 is counting. During time interval B, counter 166 is not counting.
- the counter After the first cycle with the circuit of Fig. 6, the counter begins counting at the start of interval C and continues to count until the comparator changes state at the end of the next interval A.
- the low-frequency clock pulse is OR'd (for example, using one- quarter of a 74HC32A quad 2-input OR gate) with the comparator output, and this OR'd output is used as the counter reset and latch enable, then the counter will only be counting during the voltage ramp of Vc.
- the clock pulse can be used to prevent the counter from counting during the interval C when the capacitor is being discharged.
- an alternative embodiment of the circuit includes a microprocessor 802 which replaces the counter, clock, and latch. By using a pulse-width-modulated output port, it can also emulate the DAC, if required.
- a suitable microprocessor is an Intel model 87C51FA.
- Fig. 8 the use of a reference capacitor 804 to compensate for environmental changes in the value of the capacitor 156 is shown.
- the multiplexer provides alternate charge/discharge cycles for both the variable capacitor 156 and the reference capacitor 804.
- the comparator 162 operates to generate a signal when the voltage across either capacitor exceeds V re f.
- the microprocessor uses changes in the value of the reference capacitor 804 to correct the measurement of capacitor 156.
- the invention is apparatus for measuring the variation in the capacitance of a capacitive sensor comprising means for charging the capacitor; means for generating an electrical signal when the capacitor is charged to a certain voltage; and means for generating an output signal corresponding to the time required to charge the capacitor to the certain voltage.
- the means for charging the capacitor comprises means for providing a source of constant electrical current to an electrode of the capacitor and the means for generating an output signal comprises comparator means for comparing the voltage on the capacitor to a reference voltage.
- the comparator means generates an output signal when the voltage on the capacitor is greater than the reference voltage.
- the means for generating an output signal may comprise means for generating a first series of timing pulses; and means for counting the first series of pulses emitted by the generating means in a given time interval.
- the multiplexing means alternately connects an electrode of the capacitor to the means for charging the capacitor and to a reference potential.
- the means for generating an output signal corresponding to the time required to charge the capacitor can be implemented using a microprocessor
- the invention is also a position sensing device having variable extension comprising capacitor means variable with extension of the device; constant current means for charging the capacitor; and means for forming an electrical output signal representative of the extension of the device. Also a method of measuring the capacitance of a capacitor comprising the steps of charging the capacitor from a constant current source; comparing the voltage developed across the capacitor to a reference voltage; generating a signal pulse once the voltage across the capacitor has reached a certain level; measuring the time required to charge the capacitor, using for example counting means; and generating an output signal linearly proportional to the charging time.
- the invention can be used as part of a position sensor or shock absorber to adjust the distance between a road surface and the chassis of a motor vehicle.
- the output of the sensor of the invention may be connected to a computer for controlling the leveling of a vehicle.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
An apparatus and method for measuring the capacitance of a capacitor or the variable capacitance of a capacitive sensor (10). The capacitor is charged from a current source and the time required to charge the capacitor to a voltage level is measured. An output signal linearly proportional to the time required to charge the capacitor to the voltage level is produced. An application of the sensor to the measurement of the change in length of a telescoping device (8) such as a shock absorber is also disclosed.
Description
CAPACITIVE SENSOR AND METHOD OF MEASURING CHANGES IN
CAPACITANCE The invention relates to an apparatus and method for measuring the capacitance of a capacitive sensor and, more particularly, to the measurement of variations in the capacitance of the sensor.
BACKGROUND OF THE INVENTION The use of capacitive sensors to measure a change in dimension of an object such as a telescoping device having a variable dimension are known. Moser in U.S. Patent 4587850 discloses apparatus for detecting and measuring the motion of a piston in a cylinder, including a variable impedance comprising a dielectric moving between the fixed electrodes. The extent of the motion of the dielectric into the space between the electrodes provides a measure of the motion of the piston. The change in the magnitude of the capacitor is determined using a capacitance bridge, such as a Wheatstone bridge. A reference capacitor is also provided to compensate for changes in the variable capacitor arising from changes in temperature and other ambient conditions. Measuring circuitry such as that disclosed by Moser can be realized using a microprocessor to switch in various combinations of capacitors for the variable capacitor while balancing the bridge. A look-up table in the microprocessor then provides an output code for the voltage corresponding to the value of the measured capacitance. This type of circuit is difficult to reduce to a single monolithic integrated circuit due to the large values and number of capacitors used and requires extra components to produce a linear electrical output with change in dimension or distance traveled.
It would be desirable to have an electronic system to measure the variation in capacitance having an electrical output which is linear with the change in capacitance and which can be implemented in an integrated circuit. SUMMARY OF THE INVENTION
The invention is an apparatus for measuring the capacitance of a capacitive sensor comprising means for charging the capacitor; means for generating an electrical signal when the capacitor is charged to a certain voltage; and means for generating an output signal corresponding to the time required to charge the capacitor to the certain voltage.
The invention is also a method of measuring the capacitance of a capacitor comprising the steps of charging the capacitor; measuring the time required to charge the capacitor to a first voltage; and generating an
output signal linearly proportional to the time required to charge the capacitor to the first voltage.
BRIEF DESCRIPTION OF THE DRAWING Figs. 1(a) and Kb) are cross-sectional views of a capacitive sensor including a sensor body and electronics.
Figs. 2 is a cross-sectional view of another sensor body. Figs. 3(a) and 3(b) are cross-sectional views of another sensor body. Figs. 4 is a cross-sectional view of another sensor body. Fig. 5 is a block diagram of an electrical circuit for measuring capacitance.
Figs. 6 is a detailed circuit diagrams of an embodiment of the electrical circuit of Fig. 5.
Fig. 7 is a timing diagram for the operation of the electrical circuit of Fig. 5. Figs. 8 is a block diagram of another electrical circuit for measuring capacitance.
DETAILED DESCRIPTION Elements common to different Figures have the same numerical designation in each Figure. In Fig. 1 a capacitive sensor of the invention comprises a sensor body
8 containing a variable capacitor and electronics 10 to provide an electronic output signal 11 proportional to, and preferably linear with, a change in the value of the capacitor. The sensor body 10 comprises a piston 12 with a dielectric sleeve 14 mounted thereon, a body 16, and a cylindrical opening 18 extending a distance into the body 16 from an end thereof. The inner and outer walls of the cylindrical opening 18 are covered with electrically conductive layers 20 and 22, respectively, which form the electrodes of a capacitor . The electrically conductive layers 20 and 22 are connected to the external electrodes 24 and 26 respectively. The electrodes 24 and 26 are connected to the input terminals of the electronics 10. As the piston moves along the cylindrical axis of the sensor body, the dielectric 14 moves in and out of the opening 18 thereby changing the value of the capacitor. The electronics 10 measure the capacitance and produce an output voltage or pulse-width-modulated signal which is preferably linearly proportional to the value of capacitance. The measurement of the change in the capacitance provides a direct measure of the distance moved by the piston 12.
The body 16 is typically a cylinder preferably formed of a material such as Kapton or Mylar with screened-on conductors as the layers 20 and
22. Plated plastic parts of any suitable shape could be used. In a preferred embodiment the electrodes of the sensor capacitor are fixed and an insulating dielectric attached to the moving member moves in and out of the fixed capacitor to effect the capacitance change. An advantage of this arrangement is that the external electrical connections to the sensor body do not flex as the motion occurs, thereby simplifying the structure of these connections and greatly increasing their reliability and that of the system as a whole.
In Fig. 2 a sensor body 30 includes an electrically conductive layer, corresponding to the layer 22 of Fig. 1, which is divided into three separate, unconnected conductive layers 32, 34 and 36. The conductive layers 32, 34 and 36 together with the electrically conductive layer 20 form the capacitor electrodes of three separate capacitors. The electrically conductive layers 32, 34 and 36 are connected to the external electrodes 38, 40 and 42 respectively.
The first capacitor, formed by layers 20 and 32, is always filled with the dielectric body 14 regardless of the position of the piston 12, thus providing a reference capacitor which can be used to measure, and correct for, wear, temperature variations and other effects which might change the characteristics of the dielectric and, thus, the magnitude of the capacitor.
The second capacitor, formed by layers 20 and 34, corresponds to the capacitor of Fig. 1. As the piston moves along the cylindrical axis of the sensor body, the extent to which the body 14- fills the space between the layers 20 and 34 varies, thereby changing the value of the capacitor. The measurement of the change in the capacitance of this capacitor provides a direct measure of the distance moved by the piston 12.
The third capacitor, formed by layers 20 and 36, has any other material present in the sensor, for example an oil such as is used in a shock absorber, between the electrodes. The third capacitor, since it" is always filled with the other material regardless of the position of the piston 12, provides a reference capacitor which can be used to measure, and correct for the change in the characteristics of such material and, thus, the magnitude of the capacitor. In Fig. 3, a sensor body 50 containing a variable capacitor comprises a piston 52 with a dielectric slab 54 mounted thereon, a body 56, and a rectangular opening 57 extending a distance into the body 56 from an end thereof. Two opposed walls of the opening 57 are covered with electrically conductive layers 58 and 60, respectively, which form the electrodes of a
capacitor. The electrically conductive layers.58 and 60 are connected to the first external electrode 68 and common electrode 70 respectively. As the piston moves along the axis of the opening 57, the dielectric body 54 moves in and out of the opening 57 thereby changing the value of the capacitor. The measurement of the change in the capacitance of this capacitor provides a direct measure of the distance moved by the piston 52.
The sensor body 50 also includes second and third reference capacitors to provide calibration of the sensor body due to changes in the characteristics of the variable capacitor due to wear, temperature variations and other effects which might change the characteristics of the dielectric and, thus, the magnitude of the capacitor or the characteristics of other materials such as an oil present in the sensor between the electrodes. The second capacitor comprises a dielectric body 62 of the same material as the body 54 between electrically conducting layers 64 and 66 which are connected to the common electrode 70 and the second external electrode 72, respectively. The third capacitor comprises a material 74, such as an oil, between electrically conducting layers 76 and 78 which are connected to the common electrode 70 and the third external electrode 80, respectively. In Fig. 4 an alternative sensor body 100 comprises a piston 102, an outer metal cylinder 104 with a dielectric sleeve 106 therebetween. The magnitude C of the capacitor is:
C = {2πεkε()L}/l (rj/^) where r-^ and x^ are the outer and inner conductor radii, E^_ is the dielectric constant of the insulator, EQ is the dielectric constant of free space equal to
8.85 x 10~12 farads/meter, and L is the length of the capacitor. The sensor body was made using telescoping brass tubing as the electrodes and heatshrink fluorinated ethylene propylene (FEP) as the insulator. The dimensions of the sensor 10 were typically about
cm, £k=2.1, and L=15.25 cm. The maximum capacitance C is then equal to about 130 picofarads.
The invention comprises charging a capacitor from a constant current source. The capacitor charges at a uniform, linear rate and thus the voltage across the capacitor increases linearly during charging. Alternatively the capacitor can be charged from a current or voltage source in a substantially linear way. In this case, the voltage V developed across the capacitor C as a function of time T is
V = V0(l-e-(T/RO).
where VQ is the asymptotic value of the voltage across the capacitor and R is the resistance across the capacitor. For T«RC, the voltage is
V - V0(l- (1-T RC)) = V0T/RC C - (V0R/V) T = constant T The capacitance is thus linearly proportional to the length of time required to charge the capacitor to a voltage V provided that T«RC.
The invention further comprises comparing the voltage developed across the capacitor to a reference voltage and generating a signal pulse once the voltage across the capacitor has reached a certain level. The invention further comprises measuring the time required to charge the capacitor, using for example counting means, and generating an output signal linearly proportional to the charging time T. The signal pulse resets the counter and latches the latch. The output of the latch in digital form can be used in apparatus (not shown) which accepts a digital signal. Alternatively the output of the latch can be converted to an analog signal.
A preferred circuit 150 for measuring the change in capacitance is shown in Fig. 5 in block diagram form. A constant-current source 152 having an input electrode 154 connected to a power source such as a battery charges a variable capacitor 156 through a multiplexer 158. The multiplexer alternately connects the current source 152 to the electrode of the capacitor 156 and to a source of reference potential such as ground potential. The voltage V developed across the capacitor 156 is a linear ramp from 0 V with the slope of the ramp being proportional to the value of the sensor capacitance. The voltage V is also applied to a first input electrode 160 of a comparator 162. The comparator 162 changes output state when the voltage Vc becomes greater than a reference voltage Vref applied to a second comparator input electrode 164. At this point the reading of counter 166 held in latch 168 is converted by digital to analog converter (DAC) 170 into a voltage and the counter 166 is reset. The clock oscillator 174 provides two synchronous outputs, a first series of high frequency pulses 176 and a second series of low frequency pulses 178. The first series 174 is counted by the counter 166 to provide the measure of time; the second series 178 switches the multiplexer 158, alternately connecting the the input electrode of the variable capacitor 156 to the current source or to ground. The period of the second series must be long compared to the time T required to charge the capacitor 154. A DAC 170 converts the digital representation of the counts into a voltage at electrode 172. DAC 170 is not required if the device connected to electrode 172 accepts a signal in digital format.
In Fig. 6 a detailed implementation of the circuit of Fig. 5 is shown. In the Figure all resistors are in kilohms and all capacitors are in microfarads (μf) unless otherwise indicated. The circuit includes a constant-current source 152 including transistor 153, a variable capacitor 156, multiplexer 158, comparator 162, level converter 163, counter 166, latch 168, DAC 170, output section 210 and power supply 200. The clock 174 provides two synchronous outputs. The high-frequency output is counted by the counter; the low-frequency output switches the multiplexer 158. The multiplexer 158 alternately connects the capacitor 156 to the current source or to ground.
Transistor 153 is preferably a type 2N4250. Multiplexer 158 is preferably a type 74HC4053. Comparator 162 is preferably a type CA339. Level converter 163 is a Schmidt trigger used to sharpen the pulse output generated by the comparator 162. Converter 163 is preferably a type CD4093. The output pulse from converter 163 resets counters 166 and latches the data of latches 168. Output section 210, including an operational amplifier 212, provides means for adjusting the voltage swing of the analog output.
Latch 168 includes two octal latch circuits 168A which are preferably type 74HC564. Counters 166 include counter circuits 166A each of which is one half of an eight bit binary upcounter which are preferably type 74HC4520, NAND gates 166B which are preferably type 74HC20 and quad two input OR gates 166C which are preferably type 74HC32. The NAND gates 168B and the OR gates 168C are connected to the counter circuits 168A as shown to produce a 14-bit binary counter. DAC 170 includes the converter circuit 170A which is preferably a Burr-Brown 12 bit digital-to- analog converter type DAC80-CBI-V. Clock 174 is preferably a type 74HC4060 having a clock frequency of about 11 MHz. The divided clock frequency used to control multiplexer 158 is about 700 Hz. The parts can be purchased from one of Harris Corporation, Motorola, Inc. or Signetics
Corporation among others. Operational amplifier 212 is preferably a Bun- Brown type CA3140.
Power supply 200 is a conventional three terminal regulator, producing +12V, -12V and +5V outputs. The positive polarity section includes a type 1N5001 diode 202, 0.1 μf capacitor to ground, a type 7812 12 V regulator 204, 0.1 μf filtering capacitor to ground and a type 7905 5V regulator 206. The negative polarity section includes a type 1N5001 diode 202, 0.1 μf capacitor to ground, a type 7912 -12 V regulator 208 and 0.1 μf filtering capacitor to ground.
A timing diagram for the operation of the circuits of Figs. 5 and 6 is shown in Fig. 7. In Fig. 7(a), the voltage Vc increases linearly with time T during the time interval TAB during which the multiplexer 158 connects the constant current source 152 to the capacitor 156. The time interval Tc is the alternating time interval where the multiplexer 158 connects the constant current source 152 to the reference potential. TAB is approximately equal to Tc and their sum is equal to the period of the low- frequency output of the clock 174. The time for the capacitor to charge to voltage Vref is TO < TAB. At time T0, comparator 162 changes state, emitting a reset pulse which stops the counter 166 counting and causes it to reset. This is shown schematically in Fig. 7(b), where, during time interval A, counter 166 is counting. During time interval B, counter 166 is not counting. After the first cycle with the circuit of Fig. 6, the counter begins counting at the start of interval C and continues to count until the comparator changes state at the end of the next interval A. Alternatively, if the low-frequency clock pulse is OR'd (for example, using one- quarter of a 74HC32A quad 2-input OR gate) with the comparator output, and this OR'd output is used as the counter reset and latch enable, then the counter will only be counting during the voltage ramp of Vc. Alternatively, the clock pulse can be used to prevent the counter from counting during the interval C when the capacitor is being discharged.
In Fig. 8 an alternative embodiment of the circuit includes a microprocessor 802 which replaces the counter, clock, and latch. By using a pulse-width-modulated output port, it can also emulate the DAC, if required. A suitable microprocessor is an Intel model 87C51FA.
In Fig. 8, the use of a reference capacitor 804 to compensate for environmental changes in the value of the capacitor 156 is shown. The multiplexer provides alternate charge/discharge cycles for both the variable capacitor 156 and the reference capacitor 804. The comparator 162 operates to generate a signal when the voltage across either capacitor exceeds Vref. The microprocessor uses changes in the value of the reference capacitor 804 to correct the measurement of capacitor 156.
The invention is apparatus for measuring the variation in the capacitance of a capacitive sensor comprising means for charging the capacitor; means for generating an electrical signal when the capacitor is charged to a certain voltage; and means for generating an output signal corresponding to the time required to charge the capacitor to the certain voltage. In the apparatus the means for charging the capacitor comprises
means for providing a source of constant electrical current to an electrode of the capacitor and the means for generating an output signal comprises comparator means for comparing the voltage on the capacitor to a reference voltage. The comparator means generates an output signal when the voltage on the capacitor is greater than the reference voltage. The means for generating an output signal may comprise means for generating a first series of timing pulses; and means for counting the first series of pulses emitted by the generating means in a given time interval. The multiplexing means alternately connects an electrode of the capacitor to the means for charging the capacitor and to a reference potential. The means for generating an output signal corresponding to the time required to charge the capacitor can be implemented using a microprocessor.
The invention is also a position sensing device having variable extension comprising capacitor means variable with extension of the device; constant current means for charging the capacitor; and means for forming an electrical output signal representative of the extension of the device. Also a method of measuring the capacitance of a capacitor comprising the steps of charging the capacitor from a constant current source; comparing the voltage developed across the capacitor to a reference voltage; generating a signal pulse once the voltage across the capacitor has reached a certain level; measuring the time required to charge the capacitor, using for example counting means; and generating an output signal linearly proportional to the charging time.
It is to be understood that the apparatus and method of operation taught herein are illustrative of the invention. Modifications may readily be devised by those skilled in the art without departing from the spirit or scope of the invention. The invention can be used as part of a position sensor or shock absorber to adjust the distance between a road surface and the chassis of a motor vehicle. The output of the sensor of the invention may be connected to a computer for controlling the leveling of a vehicle.
Claims
WE CLAIM:
1. Apparatus for measuring the capacitance of a capacitor comprising means for charging the capacitor; means for generating an electrical signal when the capacitor is charged to a first voltage; and means for generating an output signal corresponding to the time required to charge the capacitor to the first voltage in response to the electrical signal. 8. Tho ttppβmfcua of Claim l where the mean* far charβrinff the capacitor comprises means for providing a source of constant electrical current to an electrode of the capacitor.
3. The apparatus of Claim 2 wherein the means for generating an output signal comprises comparator means for comparing the voltage on the capacitor to a reference voltage. 4. The apparatus of Claim 3 wherein the comparator means generates an output signal when the voltage on the capacitor is greater than the reference voltage.
5. The apparatus of Claim 3 wherein the means for generating an output signal comprises means for generating a first series of timing pulses; and means for counting the first series of pulses emitted by the generating means in a given time interval.
6. The apparatus of Claim 5 further comprising means for converting the total count of pulses to an output signal representative of the magnitude of the capacitor.
7. The apparatus of Claim 6 wherein the output pulse from the comparator means resets the counting means.
8. The apparatus of Claim 5 further comprising multiplexing means for alternately connecting an electrode of the capacitor to the means for charging the capacitor and to a reference potential.
9. The apparatus of Claim 8 wherein the multiplexing means alternately connects the electrode in response to a second series of timing pulses.
10. The apparatus of Claim 9 wherein the second series is a submultiple of the first series.
11. A position sensing device having variable extension comprising capacitor means variable with extension of the device; current means for charging the capacitor; and
means for forming an electrical output signal representative of the extension of the device.
12. A method of measuring the capacitance of a capacitor comprising the steps of charging the capacitor from a current source; measuring the time required to charge the capacitor to a first voltage; and generating an output signal linearly proportional to the time required to charge the capacitor to the first voltage. 13. The method of Claim 12 wherein the current source is a constant current source.
14. The method of Claim 13 further comprising comparing the voltage developed across the capacitor to a reference voltage; and generating an electrical signal once the voltage across the capacitor becomes greater than the first voltage for measuring the time required to charge the capacitor to the first voltage.
15. The method of Claim 14 wherein the step of generating an output signal comprises generating a first series of timing pulses; and counting the first series of pulses emitted by the generating means in a given time interval.
16. A method of measuring the extension of a telescoping device having a variable capacitor, the variation in the magnitude of the capacitance being directly proportional to the extension; the method comprising the steps of charging the capacitor from a current source; measuring the time required to charge the capacitor to a first voltage; and generating an output signal linearly proportional to the time required to charge the capacitor to the first voltage.
17. The method of Claim 16 wherein the current source is a constant current source.
18. The method of Claim 17 further comprising comparing the voltage developed across the capacitor to a reference voltage; and generating an electrical signal once the voltage across the capacitor becomes greater than the first voltage for measuring the time required to charge the capacitor to the first voltage.
19. The apparatus of Claim 18 wherein the step of generating an output signal comprises generating a first series of timing pulses; and counting the first series of pulses emitted by the generating means in a given time interval.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US94308092A | 1992-09-10 | 1992-09-10 | |
US07/943,080 | 1992-09-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1994006002A1 true WO1994006002A1 (en) | 1994-03-17 |
Family
ID=25479070
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1993/008352 WO1994006002A1 (en) | 1992-09-10 | 1993-09-10 | Capacitive sensor and method of measuring changes in capacitance |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO1994006002A1 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5811807A (en) * | 1996-07-19 | 1998-09-22 | Ail Systems, Inc. | Uncooled background limited detector and method |
DE10258417B3 (en) * | 2002-12-13 | 2004-08-12 | Beru Ag | Method and circuit arrangement for detecting and / or determining the nature of a medium |
GB2425843A (en) * | 2005-05-07 | 2006-11-08 | Acam Messelectronic Gmbh | Measuring a capacitance by measuring charging / discharging time |
CN102129145A (en) * | 2010-01-12 | 2011-07-20 | 马克西姆综合产品公司 | Micro electro-me-chanical systems driver with a capacitance measuring circuit |
US9218095B2 (en) | 2013-05-21 | 2015-12-22 | Synaptics Incorporated | Non-linear feedback capacitance sensing |
CN109405733A (en) * | 2018-12-14 | 2019-03-01 | 中核新科(天津) 精密机械制造有限公司 | Quick high accuracy plane parallelism measurement device |
CN110749779A (en) * | 2019-12-05 | 2020-02-04 | 上海芯凌微电子有限公司 | Capacitance change detection method and circuit for capacitive sensor |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4149231A (en) * | 1977-05-04 | 1979-04-10 | Bunker Ramo Corporation | Capacitance-to-voltage transformation circuit |
US4404481A (en) * | 1980-10-20 | 1983-09-13 | Matsushita Electric Industrial Co., Ltd. | Capacitance to voltage conversion apparatus |
US4558274A (en) * | 1983-09-14 | 1985-12-10 | Johnson Service Company | Apparatus and method determining the value of a capacitance |
US4587850A (en) * | 1983-09-24 | 1986-05-13 | Boge Gmbh | Arrangement for determining the travel of a piston |
US4825147A (en) * | 1988-09-14 | 1989-04-25 | Sencore, Inc. | Capacitance measuring method and apparatus |
US4961055A (en) * | 1989-01-04 | 1990-10-02 | Vickers, Incorporated | Linear capacitance displacement transducer |
-
1993
- 1993-09-10 WO PCT/US1993/008352 patent/WO1994006002A1/en active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4149231A (en) * | 1977-05-04 | 1979-04-10 | Bunker Ramo Corporation | Capacitance-to-voltage transformation circuit |
US4404481A (en) * | 1980-10-20 | 1983-09-13 | Matsushita Electric Industrial Co., Ltd. | Capacitance to voltage conversion apparatus |
US4558274A (en) * | 1983-09-14 | 1985-12-10 | Johnson Service Company | Apparatus and method determining the value of a capacitance |
US4587850A (en) * | 1983-09-24 | 1986-05-13 | Boge Gmbh | Arrangement for determining the travel of a piston |
US4825147A (en) * | 1988-09-14 | 1989-04-25 | Sencore, Inc. | Capacitance measuring method and apparatus |
US4961055A (en) * | 1989-01-04 | 1990-10-02 | Vickers, Incorporated | Linear capacitance displacement transducer |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5811807A (en) * | 1996-07-19 | 1998-09-22 | Ail Systems, Inc. | Uncooled background limited detector and method |
US6166381A (en) * | 1996-07-19 | 2000-12-26 | Ail Systems, Inc. | Uncooled background limited detector and method |
DE10258417B3 (en) * | 2002-12-13 | 2004-08-12 | Beru Ag | Method and circuit arrangement for detecting and / or determining the nature of a medium |
GB2425843A (en) * | 2005-05-07 | 2006-11-08 | Acam Messelectronic Gmbh | Measuring a capacitance by measuring charging / discharging time |
US7403020B2 (en) | 2005-05-07 | 2008-07-22 | Acam-Messelectronic Gmbh | Method and device for measuring capacitances |
GB2425843B (en) * | 2005-05-07 | 2008-10-15 | Acam Messelectronic Gmbh | Method and device for measuring capacitances |
CN102129145A (en) * | 2010-01-12 | 2011-07-20 | 马克西姆综合产品公司 | Micro electro-me-chanical systems driver with a capacitance measuring circuit |
US9218095B2 (en) | 2013-05-21 | 2015-12-22 | Synaptics Incorporated | Non-linear feedback capacitance sensing |
CN109405733A (en) * | 2018-12-14 | 2019-03-01 | 中核新科(天津) 精密机械制造有限公司 | Quick high accuracy plane parallelism measurement device |
CN109405733B (en) * | 2018-12-14 | 2024-04-09 | 中核新科(天津)精密机械制造有限公司 | Quick high-precision plane parallelism measuring device |
CN110749779A (en) * | 2019-12-05 | 2020-02-04 | 上海芯凌微电子有限公司 | Capacitance change detection method and circuit for capacitive sensor |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5585733A (en) | Capacitive sensor and method of measuring changes in capacitance | |
US6700392B2 (en) | Digital measurement circuit and system using a grounded capacitive sensor | |
CN1065675C (en) | Electromagnetic-noise protection circuit | |
JPH0114545B2 (en) | ||
EP0397584B1 (en) | A humidity meter | |
WO1994006002A1 (en) | Capacitive sensor and method of measuring changes in capacitance | |
JP2515456B2 (en) | Sensor signal processor | |
US5408236A (en) | High-voltage unit comprising a measuring divider/resistor arrangement | |
JPH08304488A (en) | Method and equipment for measuring variation of capacitance value of dual capacitor | |
KR20040053121A (en) | Sensor capacity sensing apparatus and sensor capacity sensing method | |
US5406137A (en) | Circuit arrangement for evaluating the signal of a capacitive measuring sensor | |
US4241317A (en) | Frequency generator suitable for use as position-frequency transducer | |
US5189376A (en) | Method for the measurment of capacitance, with application to linear measurement of distance | |
JPH073340B2 (en) | Device for processing sensor signals | |
US5585559A (en) | Environment measuring apparatus | |
JP2003057093A (en) | Electrode for liquid level detector | |
US11692886B2 (en) | Force detection circuit and device, and force input device | |
KR100211114B1 (en) | Liquid level detector | |
EP1072870B1 (en) | A capacitive sensor for water level measurement in an oil tank | |
CN209783608U (en) | Circuit for monitoring capacitance change of capacitive sensor | |
SU1188523A1 (en) | Variable-capacitance displacement transducer | |
JP2705128B2 (en) | Electronic thermo-hygrometer and electronic hygrometer | |
JP2732671B2 (en) | Heat detection method and heat detection circuit | |
EP0319826A2 (en) | Movement sensor to be employed as pressure or fluid level gauge | |
JP3802431B2 (en) | Capacitive sensor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): CA JP KR |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE CH DE DK ES FR GB GR IE IT LU MC NL PT SE |
|
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
122 | Ep: pct application non-entry in european phase | ||
NENP | Non-entry into the national phase |
Ref country code: CA |