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WO1993016486A1 - Procede de spectrosopie electronique et spectrometre electronique - Google Patents

Procede de spectrosopie electronique et spectrometre electronique Download PDF

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Publication number
WO1993016486A1
WO1993016486A1 PCT/FI1992/000043 FI9200043W WO9316486A1 WO 1993016486 A1 WO1993016486 A1 WO 1993016486A1 FI 9200043 W FI9200043 W FI 9200043W WO 9316486 A1 WO9316486 A1 WO 9316486A1
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WO
WIPO (PCT)
Prior art keywords
electron
angle
analyzer
stage
spectrometer
Prior art date
Application number
PCT/FI1992/000043
Other languages
English (en)
Inventor
Seppo Aksela
Original Assignee
Dca Instruments Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dca Instruments Oy filed Critical Dca Instruments Oy
Priority to AU12731/92A priority Critical patent/AU1273192A/en
Priority to PCT/FI1992/000043 priority patent/WO1993016486A1/fr
Publication of WO1993016486A1 publication Critical patent/WO1993016486A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/482—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with cylindrical mirrors

Definitions

  • This invention relates to a method in the gas phase electron spectroscopy to determine the intensity and/or the distribution of electrons and to a two stage electrostatic cylindrical mirror analyzer (CMA) electron spectrometer to be used as electron energy analyzer in the electron spectroscopy, specially for gas phase and metal vapors, which spectrometer consists of the first stage analyzer and the second stage analyzer where the source slit and the image slit are located on the symmetry axis or close to it.
  • CMA electrostatic cylindrical mirror analyzer
  • CMA-analyzers The two common types of CMA-analyzers are the so called magic angle (54.7°) and the second order focusing (42.3°) types.
  • the magic angle version is advantageous for determination of relative total intensities and partial cross sections which are then independent from the possible inherent angular distributions of the electrons. Therefore it is often used in the gas phase electron spectroscopy.
  • Electron optical source and image slits are located on the surface of the inner cylinder in the previous models.
  • the main advantage of the second order focusing (42.3°) version is the very high transmission due to large useful angular acceptance.
  • This also commercially available analyzer type is common both as single and double pass versions in the solid state spectrometers. In these models slits are on the axis of the cylinders making double pass analyzers possible.
  • the electron optical properties of the cylindrical mirror analyzer (CMA) have been studied by several authors.
  • n the geometric parameter defined by the equation
  • ⁇ central emission angle of the electron emission direction with respect to the symmetry axis
  • k parameter that can be calculated from the expression
  • the first order focusing can be obtained by a set of k and ⁇ values.
  • the real source on the symmetry axis is extended and diffuse and the electron optical source is on the surface of the inner cylinder.
  • the source slit and the image slit are on the symmetry axis or close to it.
  • the effective source volume is of the same size as the slit widths.
  • a very important advantage of this arrangement is the possibility to use conveniently double pass analyzers and to locate retardation at the end of the first stage. Because in the case of retardation only the stage after retardation works as the effective energy analyzer, the location of the retardation to the front of the first stage in commercial analyzers does not have any physical advantage.
  • the purpose of this invention is to provide a new method in the gas phase electron spectroscopy and a new dual electrostatic cylindrical mirror analyzer (CMA) electron spectrometer for featuring a new set of operational parameters making possible for the first time the use of the magic angle in the double pass CMA analyzers.
  • CMA cylindrical mirror analyzer
  • the method of according to the invention is characterized by measuring the intensity and/or the distribution of electrons so that the central emission angle ( ⁇ ) of the electron emission direction with respect to the symmetry axis is between 50° and 60°, preferably the magic angle 54.7°, and measuring the electron detection around the symmetry axis at the angle that is between 0° and 360°, preferable 360°.
  • the electron spectrometer according to the invention is characterized in that the central emission angle ( ⁇ ) of the electron emission direction with respect to the symmetry axis is between 50° and 60° or preferably the magic angle 54.7°, and the inner cylinders of the analyzers are equipped with apertures which enable the electron emission direction around the symmetry axis at the angle that is between 0° and 360°, preferable 360°.
  • the spectrometer can be used to measure intensities which are independent of the inherent angular distribution using synchrotron radiation, X-rays or electron exitation.
  • the spectrometer can also be used in a constant pass-energy mode or in a constant fractional retardation mode.
  • FIG. 1 is a sectional view of a two stage cylindrical mirror analyzer (CMA) electron spectrometer.
  • FIG. 2 presents the geometry of the flight path of the electron in a cylindrical mirror analyzer (CMA) .
  • FIG. 3 presents a perspective view of a two stage cylindrical mirror analyzer (CMA) .
  • FIG. 4 is a schematic view of the cylindrical mirror analyzer (CMA) of prior art.
  • FIG. 5 is a schematic view of the cylindrical mirror analyzer (CMA) according to the invention.
  • FIG. 6 presents the flight distance of electron as a function of the central emission angle ⁇ .
  • FIG. 7 is a sectional view of a retardation lens system. DETAILED DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is a dual electrostatic cylindrical mirror analyzer (CMA) electron spectrometer 10 including two analyzing stages, the first stage 20 and the second stage 30.
  • the both analyzer stages 20, 30 are in a vacuum chamber 11 and they consist of inner cylinders 21, 31 and outer cylinders 22, 32.
  • the sample 12 is located at the left end of the first stage analyzer 20.
  • the opposite end of the first stage analyzer 20 is provided with a retardation lens system 40.
  • the analyzers 20, 30 are cylinder symmetric a full 360° angle can be used for electron detection.
  • the spectrometer 10 uses a constant pass-energy mode or a constant fractional retardation mode.
  • the distortion of electric fields at the end of the cylinder electrodes 21, 22 and 31, 32 is reduced with cylinder end plates 23, 24 and 33, 34.
  • the plates give accurate field densities especially at the sample end where the electrons are very sensitive to any forces acting on them.
  • the detector 50 is located at the right end of the second stage analyzer.
  • the suspension of the detector is flexible and gives the freedom to use a microchannel-plate 51 in the detector. So the two-dimensional electron detection can be measured with no moving parts in the angle distribution measurements.
  • the detector 50 can be modified for special applications.
  • the spectrometer in FIG. 1 is specially designed for gas phase measurements and it can also be modified for experiments with metal vapors.
  • a special gas shell is used to increase the intensity and decrease the gas consumption.
  • the spectrometer is bakeable and can be used in a ultra high vacuum (UHV) environment. Secondary electron emission from inner parts is minimized by the analyzer geometry design and a coating of the surfaces.
  • the spectrometer is used to measure electron energies and intensities using synchrotron radiation or electron exitation in ESCA, XPS, UPS and AES instruments.
  • FIG. 2 is schematically presented a sectional view of a cylindrical mirror analyzer (CMA) and the geometry of the flight path of the electron in the analyzer.
  • the analyzer 20 is formed of two electrodes, the inner cylinder 21 and the outer cylinder 22, and there is a reflecting voltage U between those cylinder electrodes.
  • the electron path goes from the source slit 14, curves under the influence of the electrostatic field between the cylinder electrodes and goes to the image slit 15.
  • In the inner cylinder 21 there are two apertures 25 and 26 for the electron path.
  • FIG. 3 is a perspective view of a two stage cylindrical mirror analyzer (CMA) .
  • CMA cylindrical mirror analyzer
  • Both the first stage 20 and the second stage 30 consist of inner cylinders 21, 31 and outer cylinders 22, 32.
  • the path of the electrons is referred by the reference number 16. Because the analyzers 20 and 30 are cylinder symmetric electrons can be detected at a full 360° angle between the cylinders.
  • FIG. 4 is presented a schematic view of the cylindrical mirror analyzer (CMA) of prior art.
  • the source slit 14 and the image slit 15 are small apertures located on the surface of the inner cylinder 21.
  • the difference compared to the cylindrical mirror analyzer (CMA) according to the invention is clearly seen in FIG. 5.
  • FIG. 5 is presented a schematic view of the cylindrical mirror analyzer (CMA) according to the invention.
  • the source slit 14 and the image slit 15 are located on the axis 13 of the inner cylinder 21.
  • the apertures for electrons in the inner cylinder 21 are the grooves 25 and 26 which go around the whole cylinder 21 so that the electron detection angle is 360°.
  • the magic angle 54.7° the relative total intensities and partial cross sections are independent from the possible inherent angular distributions of the electrons.
  • FIG. 7 shows a sectional view of a retardation lens system in the dual electrostatic cylindrical mirror analyzer (CMA) electron spectrometer 10 of FIG.l.
  • the view of FIG. 7 is an enlargement of the center of the spectrometer 10 where the first stage analyzer 20 and the second stage analyzer 30 have been joined together.
  • CMA cylindrical mirror analyzer
  • FIG. 7 there is a retardation lens system 40 between the analyzer stages at the end of the first stage analyzer 20.
  • the energy distribution of electrons is measured by using constant pass energy.
  • the retardation of electrons is done by the retardation lens 40 which is situated just before the second stage analyzer 30.
  • the retardation lens system 40 in FIG. 7 consists of three retardation elements 41, 42, and 43.
  • the first retardation element 41 has the same potential with the inner cylinder 21 of the first stage analyzer 20 and the third retardation element 43 has the same potential with the inner cylinder 31 of the second stage analyzer 30.
  • the potential of the second retardation element 42 in the middle can be set from outside. The retardation of electrons is done by regulating the potential of the second retardation element 42 so that the intensity of electrons in the detector is maximized.
  • the retardation lens system 40 at the end of the first stage analyzer 20 in essential to the two stage cylindrical mirror analyzer (CMA) electron spectrometer 10 in FIG. 1 according to the invention.
  • CMA cylindrical mirror analyzer
  • an accelerating lens system 17 at the sample 12 end of the first stage analyzer 20 together with retardation lens systems.
  • the sample 12 end lens system 17 is for accelerating the electrons
  • the other lens system 40 at the end of the first stage analyzer 20 is for retardating the electrons.
  • the co-operation of the lens systems will result better intensity and resolution in the detector.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

Procédé et spectromètre électronique (10) à analyseur électrostatique à miroir cylindrique (CMA) à deux étages, pour phases gazeuses et vapeurs métalliques. Le spectromètre est constitué d'un analyseur (20, 30) à deux étages dans lequel la fente de source (14) et la fente d'image (15) se trouvent sur l'axe de symétrie (13). L'angle central d'émission (Ζ) formé entre le sens de l'émission d'électrons et l'axe de symétrie (13) est de préférence l'angle magique 54,7°. Les cylindres internes (21 et 31) des analyseurs (20 et 30) sont équipés d'ouvertures (21, 26, 35, 36) permettent d'orienter l'émission d'électrons autour de l'axe de symétrie (13) selon angle compris entre 0° et 360°, de préférence 360°.
PCT/FI1992/000043 1992-02-17 1992-02-17 Procede de spectrosopie electronique et spectrometre electronique WO1993016486A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU12731/92A AU1273192A (en) 1992-02-17 1992-02-17 Method in the electron spectroscopy and an electron spectrometer
PCT/FI1992/000043 WO1993016486A1 (fr) 1992-02-17 1992-02-17 Procede de spectrosopie electronique et spectrometre electronique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/FI1992/000043 WO1993016486A1 (fr) 1992-02-17 1992-02-17 Procede de spectrosopie electronique et spectrometre electronique

Publications (1)

Publication Number Publication Date
WO1993016486A1 true WO1993016486A1 (fr) 1993-08-19

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1298700A3 (fr) * 1995-03-31 2006-04-19 Thermo Finnigan LLC Spectromètre de masse
EP1097466A4 (fr) * 1998-07-14 2006-09-06 Univ Nebraska Systeme d'analyse haute resolution a miroir pour detecter l'energie des particules chargees et son procede d'utilisation
RU2338295C1 (ru) * 2007-01-30 2008-11-10 ЗАО "Торгово-промышленая компания "Удмуртия" Электронный магнитный спектрометр
WO2009053666A3 (fr) * 2007-10-24 2009-07-30 Shimadzu Res Lab Europe Ltd Analyseurs d'énergie de particules chargées
US20130112870A1 (en) * 2011-11-04 2013-05-09 Victor Gorelik Hollow cylindrical analyzer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3805057A (en) * 1971-03-22 1974-04-16 Hitachi Ltd Energy analyzer of coaxial cylindrical type
DE2458025C2 (de) * 1973-12-20 1982-04-22 Naamloze Vennootschap Philips' Gloeilampenfabrieken, 5621 Eindhoven Analysevorrichtung für eine Oberflächenschicht

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3805057A (en) * 1971-03-22 1974-04-16 Hitachi Ltd Energy analyzer of coaxial cylindrical type
DE2458025C2 (de) * 1973-12-20 1982-04-22 Naamloze Vennootschap Philips' Gloeilampenfabrieken, 5621 Eindhoven Analysevorrichtung für eine Oberflächenschicht

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DERWENT'S ABSTRACT, No. 85-215 279/35; & SU,A,680 534, publ. week 8535, AS KAZA NUCLEAR PHY. *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1298700A3 (fr) * 1995-03-31 2006-04-19 Thermo Finnigan LLC Spectromètre de masse
EP1097466A4 (fr) * 1998-07-14 2006-09-06 Univ Nebraska Systeme d'analyse haute resolution a miroir pour detecter l'energie des particules chargees et son procede d'utilisation
RU2338295C1 (ru) * 2007-01-30 2008-11-10 ЗАО "Торгово-промышленая компания "Удмуртия" Электронный магнитный спектрометр
WO2008147247A3 (fr) * 2007-01-30 2009-02-12 Irina Nikolaevna Shabanova Spectromètre magnétique électronique
WO2009053666A3 (fr) * 2007-10-24 2009-07-30 Shimadzu Res Lab Europe Ltd Analyseurs d'énergie de particules chargées
US8373122B2 (en) 2007-10-24 2013-02-12 Shimadzu Research Laboratory (Europe) Ltd Spheroidal charged particle energy analysers
US20130112870A1 (en) * 2011-11-04 2013-05-09 Victor Gorelik Hollow cylindrical analyzer

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Publication number Publication date
AU1273192A (en) 1993-09-03

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