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WO1992011517A1 - Spectrographe a guide d'ondes plan - Google Patents

Spectrographe a guide d'ondes plan Download PDF

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Publication number
WO1992011517A1
WO1992011517A1 PCT/US1991/009634 US9109634W WO9211517A1 WO 1992011517 A1 WO1992011517 A1 WO 1992011517A1 US 9109634 W US9109634 W US 9109634W WO 9211517 A1 WO9211517 A1 WO 9211517A1
Authority
WO
WIPO (PCT)
Prior art keywords
spectrograph
waveguide
edge
grating
input
Prior art date
Application number
PCT/US1991/009634
Other languages
English (en)
Inventor
Mark W. Beranek
Barbara A. Capron
Raymond W. Huggins
David M. Griffith
Darrell L. Livezy
Timothy Traynor
Original Assignee
The Boeing Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by The Boeing Company filed Critical The Boeing Company
Priority to US08/075,597 priority Critical patent/US5493393A/en
Publication of WO1992011517A1 publication Critical patent/WO1992011517A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/20—Rowland circle spectrometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/40—Measuring the intensity of spectral lines by determining density of a photograph of the spectrum; Spectrography
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J2003/1842—Types of grating
    • G01J2003/1847—Variable spacing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G01J2003/2813—2D-array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/24—Generating the spectrum; Monochromators using diffraction elements, e.g. grating using gratings profiled to favour a specific order
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
    • G02B6/29316—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide
    • G02B6/29325—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide of the slab or planar or plate like form, i.e. confinement in a single transverse dimension only
    • G02B6/29328—Diffractive elements operating in reflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
    • G02B6/2938—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device for multiplexing or demultiplexing, i.e. combining or separating wavelengths, e.g. 1xN, NxM

Definitions

  • the present invention relates to spectrographs and, in particular, to a compact spectrograph that uses a planar waveguide.
  • the spectrograph of the invention has particular utility in wavelength division multiplexed optical sensing systems.
  • WDM wavelength division multiplexing
  • the present invention provides a spectrograph that is well suited to serve as a demultiplexer/detector in a WDM system.
  • the spectrograph receives an optical input signal, and detects the optical energy of the input signal in a plurality of different wavelength ranges.
  • the spectrograph of the present invention comprises a planar waveguide and a detector array.
  • the planar waveguide has a plurality of side edges extending between upper and lower faces.
  • the side edges include a dispersive edge having an inwardly concave shape, an input edge, and a straight output edge.
  • the dispersive edge has a reflective diffraction grating formed on it, the grating comprising a plurality of lines with a variable line spacing.
  • the line spacing and the positions of the input and output edges are selected such that when the optical input signal is introduced into the waveguide at the input edge, the input signal travels through the waveguide and strikes the grating.
  • the grating focuses the optical energy in each of the wavelength ranges of the input signal at a focal spot at the output edge, with the position of each focal spot being a function of wavelength.
  • the detector array comprises a plurality of photodetectors positioned along a straight line.
  • the detector array is positioned such that the photodetectors are positioned at the respective focal spots, so that each photodetector (or group of adjacent photodetectors) detects the optical energy in a corresponding one of the wavelength ranges.
  • the waveguide comprises a unitary sheet of material
  • the grating comprises grooves formed on the dispersive edge. The grooves may be formed mechanically, by mechanical replication, or by selectively etching the dispersive edge using radiation from a pair of coherent illumination points.
  • a plurality of waveguides of the type described above are stacked one upon the other to form a multi-channel spectrograph.
  • the multi-channel spectrograph receives a plurality of optical input signals, and detects the optical energy of each input signal in a plurality of different wavelength ranges.
  • the output edges are preferably positioned in a plane, so that the stack of waveguides can be directly interfaced to a two- dimensional detector array such as a CCD array.
  • Adjacent waveguides may be isolated from one another by plates, or by thin films deposited on the upper and lower waveguide surfaces, to maintain total internal reflection. Total internal reflection may also be maintained by lowering the refractive index of the waveguide near its surfaces, for example, by ion-diffusion.
  • FIGURES 1A and IB schematically illustrate the operation of Rowland spectrometers
  • FIGURE 2 illustrates a prior art demultiplexer using a slab waveguide
  • FIGURE 3 is a second schematic view of the demultiplexer of FIGURE 2
  • FIGURE 4 is a perspective drawing of the spectrograph of the present invention
  • FIGURE 5 is a graph illustrating the geometry of the spectrograph of FIGURE 4.
  • FIGURE 6 illustrates a first preferred method for optically forming the grating
  • FIGURE 7 illustrates a second preferred method for optically forming the grating
  • FIGURE 8 is a schematic cross-sectional view showing multimode propagation within a waveguide
  • FIGURE 9 is a graph showing the line shape produced by a monochromatic input
  • FIGURES lOa-lOc illustrate the use of separate cylindrical lenses to collimate the input light
  • FIGURES 11a- lib illustrate the use of cylindrical lens features directly attached to the edge of the waveguide
  • FIGURE l ie illustrates the use of a slab lens integral with the edge of the waveguide;
  • FIGURE 12 illustrates the line shape with input collimation;
  • FIGURE 13 illustrates a multi-channel spectrograph embodiment of the invention
  • FIGURE 14 illustrates the detector array of the embodiment of FIGURE 13; and FIGURE 15 illustrates the assembly process for a two channel spectrograph.
  • the spectrograph of the present invention is derived from the classical Rowland spectrometer that is schematically illustrated in FIGURE 1A.
  • the Rowland spectrometer makes use of a concave, reflective diffraction grating 10 as a dispersion element.
  • Grating 10 is formed on substrate 12, and has a concave spherical shape, with a radius of curvature equal to R.
  • the grating comprises lines that are equally spaced from one another along a chord of the concave grating.
  • Rowland circle 14 that has a radius of R/2 and that is tangent to the midpoint of the grating.
  • the significance of the Rowland circle is that if a monochromatic point source 16 is positioned on the Rowland circle, then grating 10 will produce a focused image 18 of source 16 at another position on the Rowland circle. The position of image 18 is a function of the wavelength of the light. Thus, if source 16 comprises three different spectral ranges or bands, then three focused images 18, 18', and 18" will be produced on the Rowland circle. If source 16 is a broadband source, then a continuous spectrum will be imaged on the Rowland circle.
  • FIGURE IB illustrates one of the principal advantages that can be obtained through the use of variable line spacings.
  • Diffraction grating 20 has been produced holographically, and the spacing of the lines is no longer constant along a chord as in the conventional Rowland spectrometer.
  • a point source 24 having three wavelength components will be imaged at points 26, 26', and 26", with the source and image points now no longer located on Rowland circle 22.
  • radiation emitted by source 24 will be imaged along focal line 28, at positions that depend upon the wavelengths emitted by the source.
  • the location of focal line 28 can be controlled by adjustment of the location of source 24 and of the variable line spacing of the grating.
  • the device comprises a body 30 formed by epoxying a thin cover glass 32 between two microscope slides 34, to thereby form a thin planar waveguide 36 in the cover glass layer.
  • Body 30 has a cylindrical end face 38 having a radius of curvature R, and a cylindrical front face 40 having a radius of curvature of R/2.
  • a diffraction grating is formed on end face 38 by wrapping a gold foil with a linear grating on it around the end face. The distance between the center points of the front and end faces is equal to R, the radius of curvature of the grating.
  • Input optical fiber 44 containing a signal to be demultiplexed, is butted up against waveguide 36 at front face 40.
  • the input signal on optical fiber 44 includes a plurality of different wavelength components.
  • Light introduced into waveguide 36 from optical fiber 44 is reflected and diffracted by grating 42, at an angle that depends upon the wavelength of the light.
  • Output optical fibers 46 are also butted up against waveguide 36 at the same front face 40, such that each output optical fiber receives light of a different wavelength.
  • the operation of the demultiplexer shown in FIGURES 2 and 3 is generally similar to that of a conventional Rowland spectrometer, except that the light path is two-dimensional and confined within the planar waveguide. Confinement of the light within the waveguide degrades the resolution to about 1 % of the input wavelength for an input optical fiber having a numerical aperture of 0.2, due to multimode propagation within the waveguide. Since this intrinsic degradation is comparable to the resolution limit due to the optical fiber diameter, small devices (e.g., 1 cm. square) are practical where fiber diameter effects will still dominate.
  • a factor that significantly degrades the performance of the demultiplexer is the fact that the grating is linear along the circumference of the Rowland circle, and not along a chord as required by the Rowland theory.
  • the spectrograph comprises planar waveguide 50, photodetector array 52, and measurement circuit 54.
  • Waveguide 50 comprises a thin layer of a material that is transparent at the wavelengths of interest, and includes an inwardly concave surface 56 on which diffraction grating 60 is formed.
  • Waveguide 50 also includes input surface 62 and straight (planar) output surface 64.
  • Optical fiber 66 is butted up against input surface 62, while photodetector array 52 is butted up against output surface 64.
  • An input optical signal on optical fiber 66 enters waveguide 50 at entry point 68, spreads laterally at a rate that depends upon the numerical aperture of the optical fiber, and strikes concave diffraction grating 60.
  • Grating 60 disperses the different wavelength ranges or components of the optical input signal, and images such components onto straight output surface 64, with the position of each component being a function of its wavelength.
  • Photodetector array 52 comprises a linear array of individually addressable photodetectors, e.g., a CCD array. In such an array, each photodetector converts incident optical energy into a quantity of electrical charge, which charge is then converted into a voltage signal that may be read and recorded by measurement circuit 54. The measurement circuit may thereby determine the amount of optical energy of the input signal in each wavelength range.
  • spectrograph focuses different wavelength components along a straight line (i.e., output surface 64). This feature permits the focused light to be directly interfaced to the photodetector array.
  • Flat field spectrographs differ from the classical Rowland spectrometer in two respects. First, the source point is located off the Rowland circle. Second, the grating line spacing is asymmetrically varied about the center of the grating. A geometric plan view of such a spectrograph is shown in FIGURE 5.
  • Concave grating 60 is cylindrical in shape, and has a circular cross section with center of curvature 70, radius of curvature R, and center point 72.
  • the corresponding Rowland circle of diameter R is indicated by reference numeral 74.
  • X and Y axes are constructed as shown, with axis X being normal to grating 60 at center point 72, and axis Y being tangential to the grating at center point 72.
  • the location of the optical source is designated by A, and the image position (for a particular wavelength) is designated by B.
  • Point A corresponds to entry point 68 in FIGURE 4.
  • the focused image will in general be located along a focus line 80, with the position of the image along focus line 80 being a function of wavelength. It is desired to design the line spacing of grating 60 such that focus line 80 includes a region 82 along which the focus line is substantially a straight line.
  • a (r a , ) is the source point
  • B ( ⁇ ,, ⁇ ) is the image point
  • m is the diffraction order
  • ⁇ is the line spacing at the center of the grating
  • H200 is the azimuthal focusing constant that defines the variability and degree of the line spacing variation
  • R is the radius of curvature of the diffraction grating (i.e., the diameter of the Rowland circle)
  • ⁇ is the wavelength of the radiation
  • ⁇ ⁇ is the wavelength of the light used to create the grating (further described below)
  • ⁇ is the refractive index of waveguide 50
  • ⁇ m is a refractive index that is further described below.
  • focus line 80 indicates the position of image point B as a function of wavelength ⁇ for a given source position A and for selected values of ⁇ and H200- Combinations of these parameters can be found for which focus line 80 approximates a straight line over a desired wavelength range.
  • the parameters ⁇ and H200 mav be determined by Equations (1) and (2).
  • grating 60 may be created either optically or mechanically by replication.
  • a thin uniform layer of photoresist is deposited on the curved edge of the waveguide on which the diffraction grating is to be formed, for example, on curved edge 56 of waveguide 50 shown in FIGURE 4.
  • the photoresist is then exposed to coherent light from two slits or pin holes positioned precisely at a pair of illumination points. These points are indicated by the letters C and D in FIGURE 5.
  • Equation (3) and (4) indicate that there are infinite number of pairs of positions for the two sources.
  • the source positions are chosen to minimize the spectral line width by setting the coma-like third order aberration term to zero. The positions of sources C and D that minimize coma and hence line width are then selected.
  • a spectrograph of the type described above was produced, and was found to perform exceptionally well as an optical demultiplexer.
  • the specifications of the spectrograph were as follows: ⁇ 1500 lines per millimeter ⁇ 1.51
  • the thickness of the planar waveguide was 0.05 inches.
  • the spectrograph operated over wavelength range of 700-900 nanometers, and had a focal field length along output edge 64 of 8 millimeters.
  • FIGURES 6 and 7 illustrate two methods for positioning sources C and D 1 for creating grating 60 on an edge of waveguide 50.
  • slits are located at illumination positions C and D 1 , and diverging radiation from the slits passes through waveguide 50, and falls on a portion of curved edge 56 to form grating 60.
  • Radiation from source C enters waveguide 50 via lateral edge 78, while radiation from point D' enters waveguide 50 through input surface 62.
  • source point A will be located along input surface 62, while image point B will be located along output surface 64, as indicated in FIGURE 4.
  • Illumination points C and D' appear to be located at points C and D which would apply if the waveguide was extended away from curved edge 56.
  • FIGURE 7 A second and generally more convenient method for creating the grating is illustrated in FIGURE 7.
  • slits are located at illumination points C and D ⁇ and the radiation from such points is converted to converging radiation by lenses 84 and 86, respectively.
  • the illumination points C and D 1 and lenses 84 and 86 are selected such that the radiation striking edge 56 appears to be coming from virtual sources C and D.
  • Virtual sources C and D are then positioned as in the arrangement of FIGURE 6.
  • Interferometrically controlled ruling engines now permit ruled master diffraction gratings to be fabricated with variable groove spacing.
  • the ruling engine is computer controlled, and the groove spacing is typically specified by a polynomial or an analytical expression.
  • the width (along line 82) of the focused and diffracted image B is affected by multimode light propagation within planar waveguide 50.
  • light rays entering waveguide 50 from optical fiber 66 form a cone 90 of light. Inside the waveguide, the rays therefore have a propagation component in the direction parallel to the diffraction grating rulings, i.e., normal to the plane of the waveguide.
  • the diffraction equation for rays propagating within the waveguide may be determined to be
  • i and r are the angles of incidence and reflection at the grating surface in the plane of the waveguide
  • d is the local grating spacing
  • m is the diffraction order
  • ⁇ is the angle between the ray and the plane of the waveguide.
  • ⁇ increases for a constant value of ⁇
  • the cone of rays 90 emerging from the optical fiber into the waveguide has a distribution of ⁇ values up to ⁇ m - ⁇
  • curve 94 includes a long wavelength tail 96.
  • the line width at the 10% point is 4.5 times greater than that which would result from broadening due to the width of the optical fiber source alone.
  • the discontinuous nature of the graph in FIGURE 9 results from the finite pixel size of the detector array.
  • the line broadening illustrated in FIGURE 9 may be minimized by reducing the angle ⁇ max shown in FIGURE 8. In principle, this could be achieved by reducing the numerical aperture of the optical fiber. However, for many applications, this would lead to reduced light being coupled into the waveguide, and would therefore be counterproductive.
  • the line broadening is minimized by collimating the light emerging from the optical fiber in the plane normal to the plane of the waveguide. In a first preferred embodiment, such collimation is achieved as shown in FIGURE 10a, by placing cylindrical lens 100 between optical fiber 66 and input surface 62 of waveguide 50.
  • the cylindrical lens may comprise a cylindrical rod lens 102 as shown in cross section in FIGURE 10b, or a plano-convex cylindrical lens 104 as shown in cross section in FIGURE 10c.
  • the rays emerging from optical fiber 66 are substantially collimated along the direction normal to the waveguide, thereby reducing the angle ⁇ m - ⁇ and minimizing line broadening.
  • FIGURES lla-llc Three further preferred methods for collimating the input light are illustrated in FIGURES lla-llc.
  • cylindrical lens 106 is directly attached to waveguide 50, for example using an optical cement.
  • FIGURE lib shows a variation, in which input surface 62' of waveguide 50 is shaped so as to form a cylindrical lens that is integral with the waveguide.
  • graded index slab lens 108 may be attached directly to input surface 62 of waveguide 50, with optical fiber 66 being butted up directly against the graded index lens. Suitable graded index slab lenses are available from Hoya Optics Inc.
  • the advantage produced by collimating the input light may be seen by comparing FIGURE 9 (discussed above) with FIGURE 12.
  • FIGURE 12 illustrates the spectral line 120 obtained at the same wavelength as FIGURE 9, by collimating the input beam using a cylindrical lens as in FIGURE 10a. Collimation reduces the width at half maximum from 3.8 nanometers to 2.9 nanometers, and reduces the 10% line width from 10.7 nanometers to 5.9 nanometers.
  • Line 120 can be seen to be nearly symmetrical, whereas line 94 obtained using an uncollimated beam includes a very distinct long wavelength tail 96.
  • the narrow line width obtained using collimated input beams means that the channel spacing that can be obtained is about half that which can be obtained using uncollimated input.
  • FIGURE 13 illustrates a side view of a stack 140 of six planar waveguides 142(1)-142(6).
  • Waveguides 142 are positioned such that their output surfaces lie in a plane, so that the waveguide output surfaces can be directly interfaced to a two-dimensional photodetector array 144.
  • the six spectrographs do not occupy significantly greater space than a single spectrograph.
  • the face of array 144 contains a rectangular, planar array of individual photodetectors 146, arranged in six rows.
  • Array 144 may be a two-dimensional CCD array, such as those used in television cameras.
  • each row of the array receives light from only one spectrograph, while each column of the array receives light of a particular wavelength.
  • each spectrograph may illuminate one or more rows of photodetectors.
  • a single diffraction grating is formed extending across the entire thickness of the stack, such that an identical grating is created on each waveguide, and such that the gratings on the different waveguides have their grooves aligned with one another.
  • different gratings are first formed on the individual waveguides, and the waveguides are then assembled into a stack.
  • the mapping of wavelengths to the photodetectors in a row can be varied from one channel to another, for increased versatility.
  • a relatively lower refractive index material is deposited in the form of a thin (e.g., two micron) film on the upper and lower surfaces of each waveguide.
  • a preferred film material is amorphous silica, which forms a robust thin film via ion-assisted electron beam evaporation or sputtering.
  • Silica also has an extremely low optical absorption in the near infrared, so radiation loss of such light propagating in the film is negligible.
  • the refractive index of amorphous silica (1.46) is sufficiently lower to provide the required confinement, and to produce a relatively high numerical aperture of about 0.38, to provide efficient coupling of light from the optical fiber.
  • amorphous silica will not function optimally if heating is required, and other techniques for providing isolation between the waveguides should be used for such cases. Such techniques include the use of a lower refractive index polymeric coating and/or a lower refractive index spacer material.
  • An example of a lower refractive index polymeric coating is poly(methyl-methacrylate) with a refractive index of 1.49.
  • An example of a lower refractive index spacer material is fused quartz (refractive index of 1.46).
  • a thin region of lower refractive index may also be created by ion-diffusion in the waveguide surface. For some cases, the use of a spacer having a rough (i.e., non- optically flat) surface will provide enough of a gap to obviate the light leakage problem.
  • FIGURE 15 A preferred technique for fabrication of a two-channel spectrograph in accordance with the present invention is outlined in FIGURE 15.
  • the process begins with a pair of waveguides 150, 152.
  • Each waveguide may comprise a disk of BK-7 glass, 0.015 inches thick, with two micron thick films of amorphous silica on each of its sides.
  • Waveguides 150 and 152 are formed into a stack 160 using plates 154-156.
  • a suitable material for the plates is a ceramic material available from Corning under the trademark MACOR.
  • Each plate surface to which a waveguide will be joined includes a pattern of grooves 162 in which solder glass 164, or another suitable adhesive, is deposited.
  • the use of grooves provides precise separation of the waveguides, to ensure effective registration of an array of input optical fibers to the waveguides.
  • the adhesive may optionally be deposited directly onto the surfaces of waveguides 150 and 152, respectively.
  • the illustrated layers are then formed into stack 160 in a suitable jig, and heated and/or pressed to cause the adhesive to flow, to join the waveguides and plates in place into a precisely spaced and rigid stack.
  • a preferred adhesive material is Ferro 1160HZ solder glass, because it has a coefficient of thermal expansion and optical finishing characteristics that closely match BK-7 glass and MACOR ceramic.
  • Suitable adhesives include inorganic alumina and zirconium based ceramic adhesives such as a Cotronics 903HP, polymer based adhesives (e.g., silicones, alkaloids and epoxies), and metallic alloys such as low melting indium based solders.
  • the diffraction grating is preferably formed in a single step, such that identical gratings are formed on the two waveguides contained within the body. This assures accurate registration of the gratings with one another. Forming and finishing of the waveguide edges after assembly of the waveguides into a sandwich structure provides precise end face coplanarity, and enables radial alignment of the gratings.

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  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

Spectrographe pouvant être utilisé comme détecteur/démultiplexeur dans un système optique à multiplexage par répartition en longueurs d'onde. Le spectrographe comprend un guide d'ondes plan (50) et un réseau de détecteurs (52). Le guide d'ondes plan (50) présente un bord de dispersion (56) de profil concave, un bord d'entrée (62) et un bord de sortie droit (64). Le bord de dispersion (56) comporte un réseau de diffraction réfléchissant (60) présentant un espacement de lignes variable. Un signal optique d'entrée comprenant une multiplicité de différentes plages de longueurs d'onde pénètre dans le guide d'ondes au niveau du bord d'entrée (62) et voyage à travers le guide d'ondes pour se heurter au réseau (60). Celui-ci concentre l'énergie optique de chacune des plages de longueurs d'onde en un point focal du bord de sortie (64), la position de chaque point focal étant déterminée en fonction de la longueur d'onde. Le réseau de détecteurs (52) comprend une multiplicité de photodétecteurs placés le long d'une ligne droite, de manière que les photodétecteurs soient situés sur les points focaux.Chaque photodétecteur détecte ainsi l'énergie optique contenue dans l'une des plages d'entrée. Une pile de tels guides d'ondes plans peut être assemblée pour former un spectrographe multicanal.
PCT/US1991/009634 1989-03-17 1991-12-18 Spectrographe a guide d'ondes plan WO1992011517A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US08/075,597 US5493393A (en) 1989-03-17 1991-12-18 Planar waveguide spectrograph

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US63189890A 1990-12-21 1990-12-21
US631,898 1990-12-21

Publications (1)

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WO1992011517A1 true WO1992011517A1 (fr) 1992-07-09

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PCT/US1991/009634 WO1992011517A1 (fr) 1989-03-17 1991-12-18 Spectrographe a guide d'ondes plan

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EP (1) EP0563314A1 (fr)
CA (1) CA2098832A1 (fr)
WO (1) WO1992011517A1 (fr)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997002475A1 (fr) * 1995-07-05 1997-01-23 Lockheed Martin Energy Systems, Inc. Spectrometre monolithique et son procede de fabrication
DE19543729A1 (de) * 1995-11-23 1997-05-28 Bodenseewerk Perkin Elmer Co Spektrometer
DE19609916A1 (de) * 1996-03-14 1997-09-18 Robert Prof Dr Ing Massen Preisgünstiger spektroskopischer Sensor für die Erkennung von Kunststoffen
DE19626969A1 (de) * 1996-07-04 1998-01-15 Karlsruhe Forschzent Spektrometersystem zur räumlich und zeitlich aufgelösten Spektralanalyse
DE19717015A1 (de) * 1997-04-23 1998-10-29 Inst Mikrotechnik Mainz Gmbh Miniaturisiertes optisches Bauelement sowie Verfahren zu seiner Herstellung
EP1008878A1 (fr) * 1998-12-09 2000-06-14 Nippon Sheet Glass Co., Ltd. Démultiplexeur de longueur d'ondes optiques
EP0982616A4 (fr) * 1998-03-11 2003-03-19 Nippon Sheet Glass Co Ltd Demultiplexeur optique
EP1296166A1 (fr) * 2001-09-25 2003-03-26 Agilent Technologies Inc. (a Delaware Corporation) Démultiplexeur optique incluant une conversion de signaux optiques en signaux électriques
WO2004111586A1 (fr) * 2003-05-27 2004-12-23 Wayne State University Spectrometre d'imagerie de diffraction
KR101154714B1 (ko) 2009-08-31 2012-06-14 전남대학교산학협력단 평판형 분광기
EP2116828A4 (fr) * 2008-03-04 2014-01-08 Hamamatsu Photonics Kk Module de spectroscopie
CN110186563A (zh) * 2019-06-13 2019-08-30 浙江溯源光科技有限公司 基于柱面光栅的分光波导模块和集成光谱仪及制作方法
WO2023197106A1 (fr) * 2022-04-11 2023-10-19 Goertek Optical Technology Co., Ltd Dispositif de mesure de guide d'ondes

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JPS556320A (en) * 1978-06-27 1980-01-17 Ritsuo Hasumi Spectral module
JPS56119822A (en) * 1980-02-27 1981-09-19 Toshiba Corp Multichannel spectral radiometer
US4784935A (en) * 1986-04-04 1988-11-15 Kernforschungszentrum Karlsruhe Gmbh Method of producing a passive optical device including at least one reflection grating

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See also references of EP0563314A4 *

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5754290A (en) * 1995-07-05 1998-05-19 Lockheed Martin Energy Systems, Inc. Monolithic spectrometer
WO1997002475A1 (fr) * 1995-07-05 1997-01-23 Lockheed Martin Energy Systems, Inc. Spectrometre monolithique et son procede de fabrication
DE19543729A1 (de) * 1995-11-23 1997-05-28 Bodenseewerk Perkin Elmer Co Spektrometer
DE19543729B4 (de) * 1995-11-23 2008-08-21 Berthold Gmbh & Co. Kg Spektrometer
DE19609916A1 (de) * 1996-03-14 1997-09-18 Robert Prof Dr Ing Massen Preisgünstiger spektroskopischer Sensor für die Erkennung von Kunststoffen
DE19626969A1 (de) * 1996-07-04 1998-01-15 Karlsruhe Forschzent Spektrometersystem zur räumlich und zeitlich aufgelösten Spektralanalyse
DE19626969C2 (de) * 1996-07-04 1998-08-13 Karlsruhe Forschzent Spektrometersystem zur räumlich und zeitlich aufgelösten Spektralanalyse
DE19717015A1 (de) * 1997-04-23 1998-10-29 Inst Mikrotechnik Mainz Gmbh Miniaturisiertes optisches Bauelement sowie Verfahren zu seiner Herstellung
EP0982616A4 (fr) * 1998-03-11 2003-03-19 Nippon Sheet Glass Co Ltd Demultiplexeur optique
US6256436B1 (en) 1998-12-09 2001-07-03 Nippon Sheet Glass Co., Ltd Optical wavelength demultiplexer
EP1008878A1 (fr) * 1998-12-09 2000-06-14 Nippon Sheet Glass Co., Ltd. Démultiplexeur de longueur d'ondes optiques
EP1296166A1 (fr) * 2001-09-25 2003-03-26 Agilent Technologies Inc. (a Delaware Corporation) Démultiplexeur optique incluant une conversion de signaux optiques en signaux électriques
WO2004111586A1 (fr) * 2003-05-27 2004-12-23 Wayne State University Spectrometre d'imagerie de diffraction
US7262845B2 (en) 2003-05-27 2007-08-28 Wayne State University Diffractive imaging spectrometer
EP2116828A4 (fr) * 2008-03-04 2014-01-08 Hamamatsu Photonics Kk Module de spectroscopie
EP2801802A1 (fr) * 2008-03-04 2014-11-12 Hamamatsu Photonics K.K. Module de spectroscopie
KR101154714B1 (ko) 2009-08-31 2012-06-14 전남대학교산학협력단 평판형 분광기
CN110186563A (zh) * 2019-06-13 2019-08-30 浙江溯源光科技有限公司 基于柱面光栅的分光波导模块和集成光谱仪及制作方法
WO2023197106A1 (fr) * 2022-04-11 2023-10-19 Goertek Optical Technology Co., Ltd Dispositif de mesure de guide d'ondes

Also Published As

Publication number Publication date
CA2098832A1 (fr) 1992-06-22
EP0563314A4 (fr) 1994-02-16
EP0563314A1 (fr) 1993-10-06

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