US9123590B2 - Array substrate, display device and method for fabricating array substrate - Google Patents
Array substrate, display device and method for fabricating array substrate Download PDFInfo
- Publication number
- US9123590B2 US9123590B2 US14/235,324 US201314235324A US9123590B2 US 9123590 B2 US9123590 B2 US 9123590B2 US 201314235324 A US201314235324 A US 201314235324A US 9123590 B2 US9123590 B2 US 9123590B2
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- Prior art keywords
- via hole
- goa
- array substrate
- backward
- reset
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- H01L27/124—
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C19/00—Digital stores in which the information is moved stepwise, e.g. shift registers
- G11C19/28—Digital stores in which the information is moved stepwise, e.g. shift registers using semiconductor elements
-
- H01L27/1259—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/01—Manufacture or treatment
- H10D86/021—Manufacture or treatment of multiple TFTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/441—Interconnections, e.g. scanning lines
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/04—Structural and physical details of display devices
- G09G2300/0404—Matrix technologies
- G09G2300/0408—Integration of the drivers onto the display substrate
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
- G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
- G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
- G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
- G09G3/3266—Details of drivers for scan electrodes
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
- G09G3/3611—Control of matrices with row and column drivers
- G09G3/3674—Details of drivers for scan electrodes
- G09G3/3677—Details of drivers for scan electrodes suitable for active matrices only
Definitions
- Embodiments of the invention relate to the display field, more particularly, to an array substrate, a display device and a method for fabricating an array substrate.
- the gate driver In Gate Driver on Array (GOA) technology, the gate driver is integrated on the array substrate such that the disposition of additional drivers such as Chip On Film (COF) at the edge of the array substrate is omitted, which can not only facilitate compaction of the array substrate but also reduce the material cost as well as the fabrication process cost.
- COF Chip On Film
- a GOA element corresponds to a gate line on the array substrate. Specifically, the output of a GOA element is connected to the gate line and simultaneously connected to the input of another GOA element which is connected with the next scanned gate line.
- the first is forward scan, which starts from the proximate end of the array substrate and scans to the distal end, with respect to the Print Circuit Board (PCB).
- PCB Print Circuit Board
- the second one is backward scan, which starts from the distal end of the array substrate and scans to the proximate end, with respect to the PCB.
- the internal configuration of the GOA elements and layout of via holes of the GOA elements for forward scanned array substrate and backward scanned substrate are quite different during the fabrication.
- individual masks are substantially different from each other, which make the fabrication process of low compatibility, high fabrication and design cost.
- An objective of the invention is to provide an array substrate, a display device and a method for fabricating an array substrate which have strong compatibility with both forward and backward scanned array substrate, low production and design cost as well as good driving effect.
- An aspect of the invention provides an array substrate which comprises at least two gate driver GOA elements and a start vertical STV signal line, a transmission channel between two of the adjacent GOA elements is formed by a via hole and a gate metal layer or by a via hole and a source/drain metal layer,
- the forward via hole region is for disposing a forward via hole which is configured for forming a forward transmission channel connecting an output of m th GOA element and an input of (m+1) th GOA element, a connection point connecting to the STV signal line is disposed on the first GOA element;
- the backward via hole region is for disposing a backward via hole which is configured for forming a backward transmission channel connecting an output of the (m+1) th GOA element and an input of the m th GOA element, a connection point connecting to the STV signal line is disposed on the last GOA element;
- the forward via hole region is further for disposing a forward reset via hole which is configured for forming a forward reset channel connecting a reset of the m th GOA element and the output of the (m+1) th GOA element;
- the backward via hole region is further for disposing a backward reset via hole which is configured for forming a backward reset channel connecting a reset of the (m+1) th GOA element and the output of the m th GOA element.
- a second aspect of the invention provides a display device comprising the above array substrate.
- a third aspect of the invention provides a method for fabricating an array substrate, which comprises a step of forming a forward via hole region and a backward via hole region on a substrate.
- a forward via hole for forming a forward transmission channel connecting an output of m th GOA element and an input of (m+1) th GOA element in the forward via hole region by using a via hole mask process a connection point connecting to an STV signal line is disposed on the first GOA element;
- the array substrate is fabricated for forward scan, disposing a forward reset via hole for forming a forward reset channel connecting a reset of the m th GOA element and the output of the (m+1) th GOA element in the forward via hole region by using a via hole mask process;
- the via hole mask process is a via hole mask process of a 4 mask process or a 5 mask process.
- the display device and the method for fabricating the array substrate a forward via hole region and a backward via hole region are pre-reserved on the same array substrate; as a result, the production processes for the forward and backward scanned array substrates have good compatibility, little design variation and low production cost. Moreover, the same batch of products can be conveniently and timely changed to the array substrates scanned in the other way according to the production requirement. Meanwhile, the structural difference between the forward and backward scanned array substrates is small and the driving effect is good.
- FIG. 1 schematically illustrates a partial configuration of an array substrate in accordance with Embodiment 1 of the invention
- FIG. 2 illustrates a signal flow chart during forward scan of the array substrate of Embodiment 1 of the invention.
- FIG. 3 illustrates a signal flow chart during backward scan of the array substrate of Embodiment 1 of the invention.
- FIG. 4 is a schematic structural section view of an array substrate in an example in accordance with Embodiment 1 of the invention.
- FIG. 5 is a schematic structural section view of an array substrate in another example in accordance with Embodiment 1 of the invention.
- an array substrate 1 comprises at least two gate driver (GOA) elements 2 and a start vertical (STV) signal line.
- a transmission channel between two adjacent GOA elements 2 is formed by a via hole 3 ′, 4 ′ and a gate metal layer 5 or formed by a via hole 3 ′, 4 ′ and a source/drain (S/D) metal layer 6 .
- a pixel matrix, gate lines and data lines are disposed on the array substrate, the GOA elements 2 are driving elements providing voltages to gate lines respectively connected thereto according to a time sequence.
- a previous GOA element on the array substrate is connected to the gate metal layer 5 by way of a via hole, and a next GOA element is also connected to the gate metal layer by way of a via hole, thereby forming a transmission channel between the two GOA elements.
- the transmission channel may also be formed by connecting to the S/D metal layer by way of a via hole.
- Forward via hole regions 3 and backward via hole regions 4 are disposed on the array substrate (the number of forward and backward via hole regions decided by the number of GOA elements).
- the backward via hole region 4 is for disposing a backward via hole, which is configured for forming a backward transmission channel connecting the output terminal OUTPUT of the (m+1) th GOA element and the input terminal INPUT of the m th GOA element, a connection point connecting to the STV signal line is disposed on the last GOA element.
- the first GOA element is a GOA element proximate to the PCB
- the last GOA element is the one distal to the PCB. That is, the numbering of the GOA elements is done from the end proximate to the PCB to the end distal to the PCB.
- both the forward via hole region and the backward via hole region are pre-reserved on the array substrate at the same time.
- the backward scanned array substrate and the forward scanned array substrate are different from each other only in the positions of the via holes during production processes, which helps to improve the process compatibility.
- the variation in design the forward scanned array substrate and backward scanned array substrate become small, thereby simplifying the design and saving the design cost.
- the array substrate in accordance with the embodiment of the invention has the advantages of low production and design cost, and little difference between the forward and backward scanned array substrate, by pre-reserving the forward and backward via hole regions on the array substrate.
- the forward via hole region 3 is further configured for disposing a forward reset via hole for forming a forward reset channel connecting the reset terminal Reset of the m th GOA element and the output terminal OUTPUT of the (m+1) th GOA element.
- the backward via hole region 4 is further configured for disposing a backward reset via hole for forming a backward reset channel connecting the reset terminal Reset of the (m+1) th GOA element and the output terminal OUTPUT of the m th GOA element.
- the configuration of the forward via hole allows the forward transmission of the STV frame start signal from the end proximate to the PCB to the end distal to the PCB along the vertical start STV signal line
- the configuration of the backward via hole allows the transmission of the STV frame start signal from the end distal to the PCB to the end proximate to the PCB.
- the configuration of the forward reset via hole allows the output signal of a next scanned GOA element at the end distal to the PCB to trigger the reset of a previous scanned GOA element at the end proximate to the PCB.
- the configuration of the backward reset via hole allows the output signal of a next scanned GOA element at the end proximate to the PCB to trigger the reset of a previous scanned GOA element at the end distal to the PCB.
- the array substrate of the embodiment pre-reserves spaces for both the forward and backward via hole regions at the same time, which facilitates the fabrication process, reduces the fabrication and design cost and has the advantages of being convenient.
- CLK1 is an input terminal for inputting a first clock signal to the GOA element
- VSS is a low voltage input terminal
- CKL2 is an input terminal for inputting a second clock signal to the GOA element.
- a display device comprises the array substrate of Embodiment 1.
- An example of the display device is a liquid crystal display (LCD) device, wherein the array substrate and an opposed substrate are disposed opposite to each other to form a liquid crystal cell, in which a liquid crystal material is filled.
- the opposed substrate is for example a color filter substrate.
- a pixel electrode of each pixel element of the array substrate is controlling the rotation degree of the liquid crystal material by applying an E-field to display images.
- the LCD device further comprises a backlight source for providing backlight for the array substrate.
- OLED organic light-emitting diode
- Still another example of the display device is an E-paper device, wherein an E-ink layer is formed on the array substrate, a pixel electrode of each pixel element is adapted for applying a voltage to drive the charged particles in the E-ink to move so as to display images.
- a method for fabricating an array substrate according to the embodiment comprises a step of forming a forward via hole region and a backward via hole region.
- a forward via hole for forming a forward transmission channel connecting the output of the m th GOA element and the input of the (m+1) th GOA element is disposed in the forward via hole region using a via hole mask process, a connection point connecting to the STV signal line is disposed on the first GOA element.
- a backward via hole for forming a backward transmission channel connecting the output of the (m+1) th GOA element and the input of the m th GOA element is disposed in the backward via hole region using a via hole mask process, a connection point connecting to the STV signal line is disposed on the last GOA element.
- M is the number of the GOA elements.
- the method for fabricating the array substrate of the invention differs from a conventional method for fabricating array substrates in that: the method for fabricating the array substrate of the invention has to pre-reserve two regions on the array substrate, one is the forward via hole region for disposing the forward via hole and the other is the backward via hole region for disposing the backward via hole.
- the backward scanned array substrate and the forward scanned array substrate are different from each other only in the positions of the via holes.
- the array substrate therefore has the advantages of having good process compatibility, low fabrication and design cost.
- a conventional method inverts the transistor set M3 and the transistor set M4 in the GOA element to form two different array substrates scanned forwardly or backwardly.
- such method is only suitable for small-sized array substrates.
- the difference between the transistor set M3 and the transistor set M4 is significant, and serious driving defect will be generated on the backward scanned array substrate when fabricating the array substrate by simple exchanging the transistor sets.
- the array substrate fabricated by the method according to the embodiment of the invention and the array substrate of the invention has the advantages of good process compatibility in fabricating the forward and backward scanned array substrates, low production and design cost, and good driving effect.
- the method for fabricating the array substrate according to the embodiment further limits the via hole mask process to a via hole mask process of a 4 mask process or a 5 mask process.
- the 4 mask process or 5 mask process has the advantages of low fabrication cost and easy fabrication.
- the forward and backward scanned array substrates fabricated by the method of the embodiment have little structural differences and no difference in the internal structure of the GOA element.
- the fabrication process has good compatibility, the fabrication and design cost is low and the driving effect is good.
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal Display Device Control (AREA)
Abstract
Description
Claims (7)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310211057.1A CN103295516B (en) | 2013-05-30 | 2013-05-30 | The preparation method of array base palte, display device and array base palte |
CN201310211057 | 2013-05-30 | ||
CN201310211057.1 | 2013-05-30 | ||
PCT/CN2013/088716 WO2014190710A1 (en) | 2013-05-30 | 2013-12-06 | Array substrate, display device, and fabrication method of array substrate |
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US20140353844A1 US20140353844A1 (en) | 2014-12-04 |
US9123590B2 true US9123590B2 (en) | 2015-09-01 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104090436B (en) * | 2014-06-26 | 2017-03-22 | 京东方科技集团股份有限公司 | Gate line drive circuit of array substrate and display device |
CN104181714B (en) * | 2014-08-11 | 2017-01-18 | 京东方科技集团股份有限公司 | GOA (Gate Driver on Array) layout method, array substrate and display device |
CN112652272B (en) | 2019-10-11 | 2022-04-26 | 合肥京东方卓印科技有限公司 | Array substrate, manufacturing method thereof and display device |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US20100201666A1 (en) * | 2009-02-09 | 2010-08-12 | Mitsubishi Electric Corporation | Electro-optical device, shift register circuit, and semiconductor device |
US20120327057A1 (en) * | 2010-02-25 | 2012-12-27 | Sharp Kabushiki Kaisha | Display device |
US20130038587A1 (en) * | 2011-08-08 | 2013-02-14 | Samsung Electronics Co., Ltd. | Scan driver, display device including the same, and driving method thereof |
CN103018991A (en) | 2012-12-24 | 2013-04-03 | 京东方科技集团股份有限公司 | Array substrate, manufacturing method thereof and display device |
CN103295516A (en) | 2013-05-30 | 2013-09-11 | 京东方科技集团股份有限公司 | Array substrate, display device and manufacturing method of array substrate |
-
2013
- 2013-12-06 US US14/235,324 patent/US9123590B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100201666A1 (en) * | 2009-02-09 | 2010-08-12 | Mitsubishi Electric Corporation | Electro-optical device, shift register circuit, and semiconductor device |
US20120327057A1 (en) * | 2010-02-25 | 2012-12-27 | Sharp Kabushiki Kaisha | Display device |
US20130038587A1 (en) * | 2011-08-08 | 2013-02-14 | Samsung Electronics Co., Ltd. | Scan driver, display device including the same, and driving method thereof |
CN103018991A (en) | 2012-12-24 | 2013-04-03 | 京东方科技集团股份有限公司 | Array substrate, manufacturing method thereof and display device |
CN103295516A (en) | 2013-05-30 | 2013-09-11 | 京东方科技集团股份有限公司 | Array substrate, display device and manufacturing method of array substrate |
Non-Patent Citations (2)
Title |
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International Search Report Issued Feb. 27, 2014; Appln No. PCT/CN2013/088716. |
Written Opinion of the International Searching Authority dated Feb. 18, 2014; PCT/CN2013/088716. |
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