US8364320B2 - Method for the highly precise regulation of load-variable heat sources or heat sinks, and device for controlling the temperature of a dynamic heat source, especially pump diodes for solid-state lasers - Google Patents
Method for the highly precise regulation of load-variable heat sources or heat sinks, and device for controlling the temperature of a dynamic heat source, especially pump diodes for solid-state lasers Download PDFInfo
- Publication number
- US8364320B2 US8364320B2 US12/227,477 US22747707A US8364320B2 US 8364320 B2 US8364320 B2 US 8364320B2 US 22747707 A US22747707 A US 22747707A US 8364320 B2 US8364320 B2 US 8364320B2
- Authority
- US
- United States
- Prior art keywords
- temperature
- heat
- coolant circuit
- pump
- regulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related, expires
Links
- 230000033228 biological regulation Effects 0.000 title claims abstract description 36
- 238000000034 method Methods 0.000 title claims abstract description 21
- 239000002826 coolant Substances 0.000 claims abstract description 47
- 230000001276 controlling effect Effects 0.000 claims abstract description 9
- 230000001105 regulatory effect Effects 0.000 claims abstract description 6
- 230000006641 stabilisation Effects 0.000 claims abstract description 5
- 238000004364 calculation method Methods 0.000 claims abstract description 4
- 238000011105 stabilization Methods 0.000 claims abstract description 4
- 238000001816 cooling Methods 0.000 claims description 26
- 238000012937 correction Methods 0.000 claims description 20
- 238000012546 transfer Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 7
- 230000005855 radiation Effects 0.000 claims description 7
- 239000003507 refrigerant Substances 0.000 claims description 7
- 230000007306 turnover Effects 0.000 claims description 5
- 238000005259 measurement Methods 0.000 claims description 4
- 230000001419 dependent effect Effects 0.000 claims description 3
- 238000012935 Averaging Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 claims 1
- 230000001143 conditioned effect Effects 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 4
- 230000032683 aging Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 239000008186 active pharmaceutical agent Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000005670 electromagnetic radiation Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000012821 model calculation Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000000960 laser cooling Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/024—Arrangements for thermal management
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/0941—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light of a laser diode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/024—Arrangements for thermal management
- H01S5/02407—Active cooling, e.g. the laser temperature is controlled by a thermo-electric cooler or water cooling
- H01S5/02423—Liquid cooling, e.g. a liquid cools a mount of the laser
Definitions
- the invention relates to a method for the highly precise regulation of load-variable heat sources or heat sinks, and to a device for controlling the temperature of a dynamic heat source, especially of pump diodes for solid-state lasers according to the preamble of the independent claims.
- the temperature of the forward flow is kept constant by a regulation device in commercially available cooling or heating devices with liquid media.
- the return temperature and the flow through the connected load are not taken into account.
- the heating or cooling performance of the system is adapted to the load conditions by the provided regulation only after a prolonged period of time, i.e. when the coolant within a reservoir has warmed up to such a degree that the forward flow temperature changes. This results in a comparatively slow reaction of the system to an alternating heat introduction by the heat source or heat sink to be temperature-controlled.
- the actual temperature depends on the load conditions in that in real systems, the heat source or heat sink is not temperature-controlled directly by the cooling medium itself, but additional heat transfer resistances are present between the heat source/sink and the temperature-controlled media. Due to that, the temperature at the heat source or heat sink will change in a load-dependent manner while the flow temperature is constant.
- Devices for controlling the temperature of pump diodes for solid-state lasers belong to the known state of the art.
- the forward flow temperature is regulated or pre-defined as a set value.
- the return temperature thereby depends on the input quantity of heat and the heat flow, i.e. on the coolant flowing per unit of time. Further dependencies occur due to cross-sectional changes, e.g. by depositions in the coolant circuit.
- a precise adaptation of the emission wavelength of the pump diodes to the pump bands of the laser crystal is one of the decisive parameters for optimizing the overall laser efficiency.
- a pump band from 805 nm to 809 nm of the Nd:YAG crystal is in the range of the emission wavelength of gallium arsenide diodes, the highest efficiency of the laser system being reached at a pump wavelength of 808 nm.
- the used laser diodes basically exhibit different diode-specific wavelengths as a consequence of variances during the manufacturing process. If several of such laser diodes are used for pumping, the pumping light will also contain spectral wavelength portions which only can be used with a low efficiency for exciting the laser crystal.
- a calculated mean value of the forward flow temperature and the return flow temperature is used as an actual value for regulation.
- the stabilisation of the heat source may be improved without additional information on the type of thermal load and the heat quantity to be dissipated.
- a mean value-regulation is used taking into account the actual heat flow through the temperature-controlling device.
- the cooling power (heat flow) Q K (T V ⁇ T R ) ⁇ Vdt ⁇ k of the cooling device may be determined.
- Vdt represents the volume flow.
- the heat transfer resistance needed for the model calculation may be determined empirically by manually optimizing the system at two operating points, e.g. at a load of 40% and at a load of 90%.
- a further method-related realization of the invention consists in the mean value regulation with consideration of the actual heat flow by the temperature-controlling device and the disturbance variable Q S .
- the method-related, as well as the basic idea of the invention embodied in the device may be summarized at this point in that for a precise regulation of a laser beam source temperature the return flow temperature is detected as well as the cooling circuit forward flow temperature in order to build up a mean value regulation on this basis, which optionally takes into account the actual heat flow and/or several disturbance variables in the regulation on a model-basis. This may be realized by means of correction factors intended to shift the mentioned mean value in proportion to the difference of the forward and return flows.
- the device for controlling the temperature of pump diodes for a solid-state laser which are arranged on a cooling block, accordingly possesses a forward flow temperature measuring device in the pump diode coolant circuit, and in addition a temperature measuring device arranged in the return flow.
- a through-flow measuring device for the coolant may be used to determine the actual heat flow.
- the forward and return flow measuring devices are connected to a computing unit, which even may be analog, and which performs the already mentioned mean value calculation in order to determine a refrigerating capacity set value transmitted to corresponding switching devices or valves for the regulation of the power, which are present in the coolant circuit.
- the forward flow and/or return flow temperature measuring device may be configured in one embodiment as a temperature difference sensor.
- the coolant circuit may be provided with a flow sensor for determining the heat flow from the temperature difference and the forward or return flow temperature.
- the heat transition between the pump diodes and the material of a pump diode cooling block is determined on a refrigerant-specific basis, and this value is input into the computing unit as a correction factor K 1 .
- the diode specific heat irradiation over the respective pump performance is likewise determined. This dependency is then input into the computing unit as a second correction value K 2 or as a correction function f(K 2 ).
- the computing unit will transmit a control signal to the circulating pump in the coolant circuit.
- FIG. 1 shows a schematic representation for the understanding of the model view of the regulation method according to the invention
- FIG. 2 shows a schematic representation of a device for controlling the temperature, comprising a pump diode coolant circuit (water circuit) and a cooling circuit.
- the representation according to FIG. 1 namely the model of a fluid-controlled system with radiation losses, shows a heat source or heat sink with outlined electromagnetic radiation.
- This heat source may comprise one laser diode or a set of laser diodes.
- T Q,S designates the actual temperature of the heat source or heat sink.
- Q S represents the heat flow due to electromagnet-irradiation or radiation and further disturbance variables.
- Q L refers to the heat flow to/from the temperature-controlling medium, and
- Q k refers to the heat flow of the cooler. Corresponding temperature sensors are present in the forward and return flows.
- the heat flow of the cooler circuit is determined by the product of the temperature difference T V ⁇ T R and the flow rate of the medium, as well as the heat capacity k of the medium, i.e. Q K ⁇ (T V ⁇ T R ) ⁇ Vdt ⁇ k.
- the heat flow Q L from or into the heat sink is proportional to the temperature difference T QS ⁇ T M and the thermal conductivity resistance R WL between heat source/heat sink and the temperature-controlling circuit, i.e. Q L ⁇ T QS ⁇ (T V ⁇ T R )/2 ⁇ R WL .
- a disturbance variable Q S may increase or decrease the heat flow of Q L , and may either be neglected as a constant, may be described by a characteristic or may be, metrologically detected.
- the additional heat flow into or from the temperature-controlling device may be calculated. From the heat flow such determined, a correction value will be calculated for the mean reference temperature T M with consideration of the heat transfer resistance R WL , which is to be set in order to maintain the temperature of the load T Q,S constant under the measured load conditions.
- the determination of the heat transfer resistance required for the model calculation may, for example, be performed by a manual optimization at two operating points of the system concerned.
- a further improvement of the method together with an increase of the regulation accuracy is possible when a dependence on the load is taken into account with respect to the disturbance variable Q S .
- this may be the characteristic radiant power as a function of the electric input power, which is easily detectable by metrology.
- FIG. 2 shows a-schematic representation of a device for controlling the temperature at a dynamic heat source, here in particular of pump diodes for solid-state lasers, comprising a pump diode coolant circuit and a refrigerant circuit coupled to this coolant circuit through a heat exchanger.
- the return flow 1 of the laser which is not shown in FIG. 2 , comprises a temperature sensor 2 , e.g. in the form of a thermoelement.
- a first water filter 3 and a first flowmeter turbine 4 are connected in series.
- a heat exchanger e.g. realized in the form of a plate-type evaporator 5 .
- This plate-type evaporator 5 is in communication with a coolant reservoir 6 .
- the coolant reservoir 6 comprises a reservoir heating system 7 located inside the reservoir.
- a bypass may also be connected with respect to a corresponding connection on the water filter 9 .
- a-forward flow temperature measuring device 14 is arranged, again preferably realized in the form of a thermoelement.
- the forward flow 15 and the return flow 1 may be short-circuited through an overpressure valve 16 , which is provided as an option.
- valve 21 By means of the valve 21 , short-circuit connections from the output of the compressor 19 may be established to the input of the plate-type evaporator 5 .
- the condenser block 22 possesses at its output a drying device 23 , downstream of which a pressure guard 24 is connected.
- a connection to the expansion-valve 18 is provided, the output of which in turn leads to the plate-type evaporator 5 .
- the condenser block 22 comprises a temperature sensor 26 for detecting its temperature.
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Semiconductor Lasers (AREA)
- Led Devices (AREA)
- Control Of Temperature (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
-
- 1 return flow
- 2 temperature sensor return flow
- 3 first water filter
- 4 first flowmeter turbine
- 5 plate-type evaporator.
- 6 coolant reservoir
- 7 reservoir heating system
- 8 pump
- 9 second water filter
- 10 valve
- 11 fine filter cartridge
- 12 pressure sensor
- 13 second flowmeter turbine
- 14 temperature sensor (forward) flow
- 15 forward flow
- 16 overpressure valve
- 17 sensor for expansion valve
- 18 expansion valve
- 19 compressor
- 20 plate-type evaporator
- 21 valve
- 22 condenser block
- 23 drying device
- 24 pressure guard
- 25 header
- 26 temperature sensor
- 27 three-way valve
- P pump
- DS flow sensor
- TV forward flow temperature.
- TR return flow temperature
- TM mean value (TV+TR)/2
- Vdt volume flow
- QK heat flow of cooler
- TQ,S actual temperature of heat source or heat sink
- QL heat flow to/from the temperature-controlling medium
- QS heat flow due to radiation or further disturbance variables
Claims (23)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102006023615 | 2006-05-19 | ||
DE102006023615 | 2006-05-19 | ||
DE102006023615.7 | 2006-05-19 | ||
PCT/EP2007/054504 WO2007134969A1 (en) | 2006-05-19 | 2007-05-09 | Method for the highly precise regulation of load-variable heat sources or heat sinks, and device for controlling the temperature of a dynamic heat source, especially pump diodes for solid-state lasers |
Publications (2)
Publication Number | Publication Date |
---|---|
US20090306831A1 US20090306831A1 (en) | 2009-12-10 |
US8364320B2 true US8364320B2 (en) | 2013-01-29 |
Family
ID=38521198
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/227,477 Expired - Fee Related US8364320B2 (en) | 2006-05-19 | 2007-05-09 | Method for the highly precise regulation of load-variable heat sources or heat sinks, and device for controlling the temperature of a dynamic heat source, especially pump diodes for solid-state lasers |
Country Status (7)
Country | Link |
---|---|
US (1) | US8364320B2 (en) |
EP (1) | EP2020061B1 (en) |
JP (1) | JP2009537998A (en) |
AT (1) | ATE490579T1 (en) |
CA (1) | CA2653113A1 (en) |
DE (1) | DE502007005854D1 (en) |
WO (1) | WO2007134969A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10966291B2 (en) * | 2013-12-19 | 2021-03-30 | Neturen Co., Ltd. | Power conversion apparatus and power conversion method |
US11355898B2 (en) * | 2017-10-30 | 2022-06-07 | Bae Systems Plc | Laser diode array |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008064080A1 (en) * | 2008-12-19 | 2010-07-01 | Converteam Gmbh | Method and device for operating a power semiconductor component |
US20130319635A1 (en) * | 2011-02-10 | 2013-12-05 | Mitsubishi Electric Corporation | Cooling device and power conversion device |
US11025034B2 (en) * | 2016-08-31 | 2021-06-01 | Nlight, Inc. | Laser cooling system |
US10784645B2 (en) | 2018-03-12 | 2020-09-22 | Nlight, Inc. | Fiber laser having variably wound optical fiber |
CN111342326B (en) * | 2020-04-09 | 2025-02-07 | 深圳市雷迈科技有限公司 | A constant temperature device |
US20220337014A1 (en) * | 2021-04-16 | 2022-10-20 | General Electric Company | Thermal control apparatus for laser system |
CN113958867B (en) * | 2021-10-19 | 2024-01-23 | 中控创新(北京)能源技术有限公司 | Control method, system, equipment and storage medium for natural gas pipeline |
CN115528517A (en) * | 2022-11-25 | 2022-12-27 | 中国航天三江集团有限公司 | Temperature-control direct-cooling type cooling system and method for high-power laser debugging |
DE102023110827A1 (en) * | 2023-04-27 | 2024-10-31 | Connaught Electronics Ltd. | Control device arrangement for a vehicle, which has a liquid-cooled control unit and temperature sensors at the inlet and outlet of a heat sink, vehicle and method for operating the control device arrangement |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0987799A2 (en) | 1998-09-11 | 2000-03-22 | Cutting Edge Optronics, Inc. | Laser system using phase change material for thermal control |
WO2000077456A1 (en) | 1999-06-16 | 2000-12-21 | David Seitz | Fluid heating and control system |
US20030043867A1 (en) * | 2000-04-13 | 2003-03-06 | Trumpf Laser Gmbh + Co. Kg | Diode laser device with cooling and operation monitoring |
US20030127526A1 (en) * | 2000-05-02 | 2003-07-10 | Kuboyuki Sasayama | Temperature control device |
US20030198264A1 (en) * | 2002-04-18 | 2003-10-23 | The Boeing Company | Systems and methods for thermal management of diode-pumped solid-state lasers |
US20050205241A1 (en) * | 2001-09-28 | 2005-09-22 | The Board Of Trustees Of The Leland Stanford Junior University | Closed-loop microchannel cooling system |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3403716B2 (en) * | 2000-05-02 | 2003-05-06 | 株式会社ニシヤマ | Temperature control device |
TWI284785B (en) * | 2002-04-24 | 2007-08-01 | Nikon Corp | Exposure system and device manufacturing method |
-
2007
- 2007-05-09 DE DE502007005854T patent/DE502007005854D1/en active Active
- 2007-05-09 CA CA002653113A patent/CA2653113A1/en not_active Abandoned
- 2007-05-09 EP EP07728956A patent/EP2020061B1/en not_active Not-in-force
- 2007-05-09 US US12/227,477 patent/US8364320B2/en not_active Expired - Fee Related
- 2007-05-09 AT AT07728956T patent/ATE490579T1/en active
- 2007-05-09 JP JP2009511449A patent/JP2009537998A/en active Pending
- 2007-05-09 WO PCT/EP2007/054504 patent/WO2007134969A1/en active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0987799A2 (en) | 1998-09-11 | 2000-03-22 | Cutting Edge Optronics, Inc. | Laser system using phase change material for thermal control |
WO2000077456A1 (en) | 1999-06-16 | 2000-12-21 | David Seitz | Fluid heating and control system |
US20030043867A1 (en) * | 2000-04-13 | 2003-03-06 | Trumpf Laser Gmbh + Co. Kg | Diode laser device with cooling and operation monitoring |
US20030127526A1 (en) * | 2000-05-02 | 2003-07-10 | Kuboyuki Sasayama | Temperature control device |
US20050205241A1 (en) * | 2001-09-28 | 2005-09-22 | The Board Of Trustees Of The Leland Stanford Junior University | Closed-loop microchannel cooling system |
US20030198264A1 (en) * | 2002-04-18 | 2003-10-23 | The Boeing Company | Systems and methods for thermal management of diode-pumped solid-state lasers |
Non-Patent Citations (3)
Title |
---|
El-Genk, et al., DynMo-TE:Dynamic simulation model of space reactor power system with thermoelectric converters; Nuclear Engineering and Design, No. 236 (2006); pp. 2501-2529. |
Publisher: Elsevier B.V. Author: Mohamed S. El-Genk and Jean-Michel Tournier Title: DynMo-TE: Dynamic simulation model of space reactor power system with thermoelectric converters Relevant pp. 2501-2529 Date of Publication (Month/Year): Dec. 2006 Place of Publication (Name of journal or magazine): Nuclear Engineering and Design, vol. 236, Issue 23. |
Publisher: The International Bureau of the World Intellectual Property Organization Author: Yoline Cussac Title: Notification of Transmittal of Translation of the International Preliminary Report on Patentability, English translation of the International Preliminary Report on Patentability and English translation of the Written Opinion of the International Searching Authority Relevant pp. 1-9 (unnumbered by WIPO) Date of Publication (Month/Year): Jan. 29, 2009 Place of Publication (Name of journal or magazine): WIPO (Geneva, Switzerland). |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10966291B2 (en) * | 2013-12-19 | 2021-03-30 | Neturen Co., Ltd. | Power conversion apparatus and power conversion method |
US11355898B2 (en) * | 2017-10-30 | 2022-06-07 | Bae Systems Plc | Laser diode array |
Also Published As
Publication number | Publication date |
---|---|
JP2009537998A (en) | 2009-10-29 |
CA2653113A1 (en) | 2007-11-29 |
DE502007005854D1 (en) | 2011-01-13 |
US20090306831A1 (en) | 2009-12-10 |
EP2020061A1 (en) | 2009-02-04 |
WO2007134969A1 (en) | 2007-11-29 |
EP2020061B1 (en) | 2010-12-01 |
ATE490579T1 (en) | 2010-12-15 |
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