US20100089879A1 - Method of bonding a member to a support by addition of material, and device for arranging two elements, one on the other - Google Patents
Method of bonding a member to a support by addition of material, and device for arranging two elements, one on the other Download PDFInfo
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- US20100089879A1 US20100089879A1 US12/310,907 US31090707A US2010089879A1 US 20100089879 A1 US20100089879 A1 US 20100089879A1 US 31090707 A US31090707 A US 31090707A US 2010089879 A1 US2010089879 A1 US 2010089879A1
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- mass
- holder
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- Abandoned
Links
- 238000000034 method Methods 0.000 title claims abstract description 22
- 239000000463 material Substances 0.000 title description 2
- 238000010438 heat treatment Methods 0.000 claims abstract description 21
- 229910000679 solder Inorganic materials 0.000 claims description 38
- 238000001514 detection method Methods 0.000 claims description 25
- 230000006835 compression Effects 0.000 claims description 19
- 238000007906 compression Methods 0.000 claims description 19
- 238000006073 displacement reaction Methods 0.000 claims description 16
- 238000005476 soldering Methods 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 12
- 239000013307 optical fiber Substances 0.000 claims description 5
- 238000009529 body temperature measurement Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 description 7
- 230000004913 activation Effects 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/005—Soldering by means of radiant energy
- B23K1/0056—Soldering by means of radiant energy soldering by means of beams, e.g. lasers, E.B.
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/08—Auxiliary devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass
- B23K37/04—Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass for holding or positioning work
- B23K37/0408—Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass for holding or positioning work for planar work
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3478—Applying solder preforms; Transferring prefabricated solder patterns
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/741—Apparatus for manufacturing means for bonding, e.g. connectors
- H01L2224/743—Apparatus for manufacturing layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/831—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
- H01L2224/83101—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12042—LASER
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0195—Tool for a process not provided for in H05K3/00, e.g. tool for handling objects using suction, for deforming objects, for applying local pressure
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
- H05K2203/0278—Flat pressure, e.g. for connecting terminals with anisotropic conductive adhesive
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/04—Soldering or other types of metallurgic bonding
- H05K2203/0415—Small preforms other than balls, e.g. discs, cylinders or pillars
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/08—Treatments involving gases
- H05K2203/082—Suction, e.g. for holding solder balls or components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/10—Using electric, magnetic and electromagnetic fields; Using laser light
- H05K2203/107—Using laser light
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/16—Inspection; Monitoring; Aligning
- H05K2203/163—Monitoring a manufacturing process
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3485—Applying solder paste, slurry or powder
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- This invention relates to a method for soldering a component to a holder by addition of material and a device for arranging two elements, one on the other.
- a method for soldering a component on a holder by addition of mass forming solder, of the type comprising a step in which the mass is heated is already known in the state of the art.
- the mass forming solder consists of a soldering paste or a thin strip cut up into discs or rectangles which is inserted between the semi-conductor chip, and the holder.
- the component is placed precisely on the mass forming solder in an initial position guaranteeing parallelism between the chip and the holder.
- the mass forming solder When the mass forming solder is heated to a temperature greater than or equal to the melting point of the solder, the mass melts and on solidifying assembles the chip to the holder.
- a laser beam is directed to a first side of the holder opposite a second side of the holder bearing the mass, at the position of this mass, and the heat generated by the impact of the beam on the holder propagates through the holder to the mass.
- the contact surfaces between the mass forming solder and the chip, firstly, and the holder and the mass forming solder, secondly, are relatively irregular making heat transfer from the holder to the chip difficult during the heating step.
- the intensity of this compressive force must be relatively low to avoid damaging the semi-conductor chip during compression.
- the temperature of the assembly comprising the chip, the mass and the holder is not homogeneous during the heating step and the joint resulting from cooling of the mass forming solder may then exhibit faults, such as in particular non uniform thickness.
- the main purpose of the invention is therefore to improve the quality of the joint between the chip and the holder formed by cooling the mass forming solder.
- the invention therefore relates to a soldering method of the above-mentioned type, characterised in that before the heating step, it includes the following steps of arranging the mass and the component on the holder:
- the soldering process according to the invention can take into account the different compressive strengths of the chip and the mass forming solder.
- the intensity of the first compressive force is for example 50 grams-force and the intensity of the second compressive force is 10 grams-force.
- a relatively high value can be chosen to flatten the mass sufficiently and thereby improve the heat transfer between the holder and the mass.
- the second compressive force can then be applied to the component against the flattened mass and the holder, the second predefined value can be chosen relatively low.
- the chip is therefore protected from damage due to the intensity of the compressive force being too high.
- the heat transfer is optimised between the holder and the chip.
- the mass is moved towards the holder until detection of a position where the mass comes into contact with the holder and, during the application step, the intensity of the first force is increased from a substantially zero initial value set during detection of the contact position up to the first predefined value.
- the component is moved towards the flattened mass until detection of a position where the component comes into contact with the flattened mass and, during the application step, the intensity of the second force is increased from a substantially zero initial value set during detection of the contact position up to the second predefined value.
- the steps of detection of a contact position and application of a compressive force of substantially zero initial intensity provide efficient control over compression of the mass against the holder and compression of the chip against the flattened mass and the holder.
- the intensity of the first and/or the second compressive force is increased in incrementation steps from the value of the intensity up to the first and/or the second predefined value
- a laser beam is directed to a first side of the holder opposite a second side of the holder bearing this mass, at the position of this mass, during a period of irradiation of the holder by the beam, and the relative position of the component against the holder is maintained constant, at least during the period of irradiation;
- the first predefined value is determined according to a lower critical limit of the mass thickness after the step of applying the first force
- the second predefined value is less than a critical value beyond which the component would be damaged
- the component is a semi-conductor chip.
- the invention also relates to a device for arranging a first element on a second element comprising:
- means of compressing the first element against the second element characterised in that it further comprises:
- the displacement means comprise suction type holding means to hold the first element
- the displacement means comprise infrared type temperature measurement means with an optical fibre passing through a suction tube of the holding means;
- the detection means are chosen amongst a capacitive type contact detector and a pressure sensor;
- the device is designed to arrange a first element chosen amongst a mass forming solder and a semi-conductor chip on a second element forming holder.
- FIG. 1 is a diagram of a soldering installation comprising an arranging device according to the invention
- FIGS. 2 to 8 are front views of the arranging device shown on FIG. 1 , illustrating various steps of a soldering process to solder a chip on a holder according to the invention.
- a soldering installation is represented on FIG. 1 .
- the soldering installation is designated by the general reference 10 .
- the installation 10 is used to solder a component 12 on a holder 14 by addition of mass forming solder 16 .
- component 12 is a conventional semi-conductor chip.
- the mass forming solder 16 consists of a soldering paste or a thin strip cut up into discs or rectangles.
- holder 14 comprises a metal part PM, in particular copper, at least partially surrounded by a part PS made of synthetic material forming part of a protective box to protect the semi-conductor chip 12 supported by the holder 14 .
- the holder 14 comprises first S 1 and second S 2 opposite sides, the mass forming solder 16 being intended to be attached to the second side S 2 of the metal part PM of the holder 14 .
- the second side S 2 is plated with a thin layer of nickel.
- the soldering installation 10 also comprises a device 18 for arranging a first element chosen amongst the mass forming solder 16 and the semi-conductor chip 12 on a second element forming holder (such as holder 14 ).
- the arranging device 18 includes means 20 for displacing the chip 12 or the mass 16 on the second element forming holder.
- the displacement means 20 includes articulated means 22 for displacement of the chip 12 or of the mass 16 in a horizontal plane substantially parallel to the X and Y axes and in a vertical direction substantially parallel to a Z axis.
- the displacement means 20 also include holding means 24 to hold the first element 12 or 16 .
- the holding means 24 are suction type.
- the holding means 24 therefore include a suction tube 26 connected to suction means 28 including for example a vacuum pump.
- the displacement means 20 comprise connection means 30 to connect the articulated means 22 and the holding means 24 , capable of adopting an active state in which the means 24 are fastened to the articulated means 22 and an idle state in which the means 24 are separated from the articulated means 22 .
- connection means 30 comprise for example first 32 A and second 32 B linear actuator arms with horizontal action (in this example, parallel to the y-axis) fastened to the articulated means 22 equipped with first 34 A and second 34 B clamping jaws ( FIGS. 2 to 8 ).
- the actuator arms 32 are of type pneumatic linear cylinder with rod.
- Each jaw 34 A, 34 B is fastened to one end of the rod of the corresponding cylinder 32 A, 32 B.
- the clamping jaws 34 are intended to clamp the holding means 24 and in the idle state of the connection means 30 , the clamping jaws 34 are intended to release the holding means 24 .
- the arranging device 18 also comprises compression means 36 to compress the first element against the second element intended to apply a compressive force on the first element against the second element.
- the compression means 36 comprise for example first 38 A and second 38 B linear actuator arms with vertical action (in the example, parallel to the z-axis), fastened to the articulated means 22 .
- the actuator arms 38 are intended to apply a vertical compressive force on the first element against the second element by exerting a vertical thrust on the holding means 24 .
- Each actuator arm 38 is also of type pneumatic linear cylinder with rod. In a conventional manner, therefore, the actuator arms 38 are intended to adopt an idle state in which the rod of each cylinder is retracted and a working state in which the rod of each cylinder is extended.
- the holding means 24 fastened to the cylinder rods, are displaced by the cylinder rods such that they are raised when the cylinders of the actuator arms 38 change from an active state to an idle state and lowered otherwise.
- the device 18 also includes means 40 for adjusting the intensity of the compressive force (shown on FIG. 1 ).
- the arranging device 18 also comprises means 42 for detecting a contact position when the first element comes into contact with the second element.
- the detection means 42 preferably comprise a pressure sensor integrated in the holding means 24 .
- the detection means 42 comprise a capacitive type contact detector.
- the arranging device 18 also comprises means forming counterweight (not shown) of the displacement means 20 .
- the means form counterweight of the holding means 24 and form an element of the compression means 36 , more especially an element of the actuator arms 38 .
- the arranging device 18 also comprises means 44 for controlling the compression means 36 and means forming counterweight according to detection of the contact position by the means 42 .
- the installation 10 also comprises a heat source (not shown), such as for example a laser source emitting a laser beam 46 .
- the installation 10 also comprises means 48 for focusing the laser beam 46 at a point 50 at the position of the mass forming solder 16 .
- the displacement means 20 comprise infrared type temperature measurement means 52 ( FIG. 1 ).
- the measurement means 52 comprise an optical fibre 54 passing through the suction tube 26 of the holding means 24 .
- the measurement means 52 also comprise an infrared pyrometer 56 connected to the optical fibre 54 .
- FIGS. 2 to 8 the main steps of a soldering method according to the invention.
- this method comprises steps for arranging the component 12 and the mass 16 on the holder 14 .
- the mass 16 is positioned on the holder 12 .
- the initial general shape of the mass forming solder 16 is relatively irregular.
- the clamping jaws 34 clamp the holding means 24 such that the holding means 24 are fastened to the articulated means 22 .
- the actuator arms 38 are in their idle state. Consequently, displacement of the holding means 24 is relatively precise since perfectly controlled by the articulated means 22 .
- the holding means 24 hold the mass forming solder 16 by suction.
- the displacement means 20 then displace the mass 16 horizontally and vertically, relatively quickly, up to a first predefined position P 0 with coordinates X 0 , Y 0 and Z 0 .
- the coordinates X 0 , Y 0 are predetermined according to the positions of the electrical connectors on the holder 14 (not shown) intended for electrical connection with the chip 12 .
- the coordinate Z 0 is chosen so that the holder 14 and the mass 16 are far enough apart to avoid any accidental contact between these two elements.
- the means 20 then progressively displace the mass 16 in the vertical direction Z until detection of a position where the mass 16 comes into contact with the holder 14 .
- the means 44 Upon detection of the position where the mass 16 comes into contact with the holder 14 , the means 44 control activation of the compression means 36 .
- the compression means 36 apply on the mass 16 a first compressive force F 1 for compressing the mass 16 against the holder 14 using the holding means 24 .
- the means 30 for connecting the articulated means 22 and the holding means 24 are in idle state.
- the holding means 24 are therefore no longer fastened to the articulated means 22 .
- the actuator arms 38 then exert a vertical thrust along the direction defined by the z-axis on the holding means 24 in order to apply the compressive force F 1 on the mass 16 against the holder 14 .
- the compression means 36 increase the intensity of the first force F 1 up to a first predefined value, chosen so as to flatten the mass forming solder 16 .
- the means 44 also control activation of the means forming counterweight of the holding means 24 on detection of the contact position. Activation of the means forming counterweight therefore cancels out the force of gravity of the holding means 24 exerted on the mass 16 .
- the intensity of the first force F 1 can be adjusted to an initial value of zero, firstly by adjusting the intensity of the force with the adjustment means 40 and secondly by activating the means forming counterweight.
- the compression means 36 increase the intensity of the first force F 1 from the substantially zero initial value, set on detection of the contact position, up to the first predefined value.
- the intensity of the first compressive force F 1 is increased in incrementation steps from the value of the intensity up to the first predefined value.
- the holding means 24 descend to a position P 1 where the cylinder rods 38 are extended by a length l 1 required to reach the first predefined value of the intensity of the compressive force F 1 .
- the first predefined value is about 50 grams-force.
- the initial thickness of the mass forming solder 16 , before the step when the compressive force is applied is about 100 microns.
- the first predefined value is determined according to the lower critical limit of the mass 16 thickness after the step when the first force F 1 is applied.
- this lower critical limit of the thickness is defined as being the limiting thickness below which the joint resulting from cooling of the mass 16 is likely to be relatively fragile.
- the lower critical limit of the thickness of the mass is about 70 microns.
- the suction means 52 are deactivated so that the holding means 24 release the mass 16 ( FIG. 4 ).
- the actuator arms 38 then switch from their active state to their idle state, allowing the holding means 24 to rise.
- the means 30 for connecting the holding means 24 comprising in particular the clamping jaws 34 are activated so that the holding means 24 are once again fastened to the articulated means 22 .
- the semi-conductor chip 12 is positioned on the flattened mass 16 .
- the displacement means 20 move to pick up the chip 12 by suction.
- the displacement means 20 then displace the chip 12 horizontally and vertically, relatively quickly, up to the predefined position P 0 with coordinates X 0 , Y 0 and Z 0 . In this position, the chip 12 is not in contact with the mass 16 .
- the means 20 progressively displace the chip 12 in the vertical direction Z until detection of a position where the chip 12 comes into contact with the flattened mass 16 .
- the means 44 Upon detection of the position where the chip 12 comes into contact with the flattened mass 16 , the means 44 control activation of the compression means 36 .
- the compression means 36 apply on the chip 12 a second compressive force F 2 on the chip 12 against the flattened mass 16 and the holder 14 .
- the compression means 36 increase the intensity of the second force F 2 up to a second predefined value less than the first predefined value.
- the second predefined value is less than a critical value beyond which the chip 12 would be damaged.
- the second predefined value is about 10 grams-force.
- the means 44 also control activation of the means forming counterweight of the holding means 24 .
- the initial value can be adjusted to a substantially zero value.
- the intensity of the second force F 2 is then increased from the initial substantially zero value, set on detection of the contact position, up to the second predefined value.
- the intensity of the second compressive force F 2 is increased in incrementation steps from the value of the intensity up to the second predefined value.
- the holding means 24 descend to a position P 2 where the cylinder rods 38 are extended by a length l 2 required to reach the second predefined value of the intensity of the compressive force F 2 .
- the method After performing the arranging steps, the method also comprises a step for heating the mass forming solder 16 illustrated on FIG. 7 .
- the laser beam 46 is directed on the first side S 1 of the holder 14 . More precisely, the laser beam 46 is directed at the position of the mass forming solder 16 during a period of irradiation of the holder 14 by the beam 46 .
- the heat generated at the point 50 of irradiation of the holder 14 by the laser beam 46 propagates through the holder 14 to the mass forming solder 16 and the chip 12 .
- the relative position of the chip 12 and the holder 14 is maintained constant, at least during the period of irradiation of the holder by the beam 46 .
- the holding means 24 are blocked in position P 2 .
- the control means 44 deactivate the compression means 36 while maintaining the cylinder rods 38 extended by a length l 2 and the clamping jaws 34 are activated.
- the mass 16 Before the heating step, the mass 16 is relatively hard.
- the force F 2 of intensity equal to the second predefined value is compensated, traditionally, by the reaction of the mass 16 and of the chip 12 on the holding means 24 of intensity also equal to that of the force F 2 .
- the holding means 24 are maintained in position P 2 . Due to the softening of the mass 16 , the intensity of the reaction of the mass 16 and of the chip 12 on the holding means 24 decreases down to zero when the mass 16 is liquid. Since the compression means 36 are deactivated, the intensity of the force F 2 exerted by the holding means 24 on the chip 12 and the mass 16 decreases in the same way.
- the relative position of the chip 12 and the holder 14 is maintained constant until the mass forming solder 16 has cooled.
- the temperature of the chip 12 can be checked using the measurement means 52 .
- the optical fibre 54 collects the infrared flux emitted by the chip 12 and transmits it to the pyrometer 56 .
- the pyrometer 56 then converts the luminous flux collected into a temperature value.
- the suction means 28 are deactivated and the holding means 24 release the chip 12 .
- the connection means 30 are deactivated and the jaws 34 release the holding means 24 .
- the cylinder rods 38 are retracted, allowing the holding means 24 to rise.
- the connection means 30 are then activated again and the articulated means 22 can move the holding means 24 , for example to arrange and solder a new element on the holder 14 .
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- Die Bonding (AREA)
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Abstract
Description
- This invention relates to a method for soldering a component to a holder by addition of material and a device for arranging two elements, one on the other.
- It applies more particularly to soldering a component such as a semi-conductor chip on a holder.
- A method for soldering a component on a holder by addition of mass forming solder, of the type comprising a step in which the mass is heated is already known in the state of the art. In a conventional manner, the mass forming solder consists of a soldering paste or a thin strip cut up into discs or rectangles which is inserted between the semi-conductor chip, and the holder. Generally, before the heating step, the component is placed precisely on the mass forming solder in an initial position guaranteeing parallelism between the chip and the holder.
- When the mass forming solder is heated to a temperature greater than or equal to the melting point of the solder, the mass melts and on solidifying assembles the chip to the holder. For example, to heat the solder, a laser beam is directed to a first side of the holder opposite a second side of the holder bearing the mass, at the position of this mass, and the heat generated by the impact of the beam on the holder propagates through the holder to the mass.
- Generally, the contact surfaces between the mass forming solder and the chip, firstly, and the holder and the mass forming solder, secondly, are relatively irregular making heat transfer from the holder to the chip difficult during the heating step.
- Consequently, generally, to improve the heat transfer between the chip and the holder, while positioning the chip before the heating step a compression force is applied on the assembly comprising the chip, the mass forming solder and the holder to remove, as much as possible, the surface irregularities.
- The intensity of this compressive force must be relatively low to avoid damaging the semi-conductor chip during compression.
- Since the intensity of this compressive force is relatively low, however, some irregularities remain making the heat transfer sometimes insufficient during the heating step.
- Consequently, the temperature of the assembly comprising the chip, the mass and the holder is not homogeneous during the heating step and the joint resulting from cooling of the mass forming solder may then exhibit faults, such as in particular non uniform thickness.
- The main purpose of the invention is therefore to improve the quality of the joint between the chip and the holder formed by cooling the mass forming solder.
- The invention therefore relates to a soldering method of the above-mentioned type, characterised in that before the heating step, it includes the following steps of arranging the mass and the component on the holder:
- positioning the mass on the holder,
- applying a first compressive force on the mass so as to compress the mass against the holder, the intensity of the first force increasing up to a predefined first value chosen so as to flatten the mass forming solder,
- positioning the component on the flattened mass, and
- applying a second compressive force to the component so as to compress the component against the flattened mass and the holder, the intensity of the second force increasing up to a second predefined value, the second predefined value being lower than the first predefined value.
- Since the first predefined value of the first force is greater than the second predefined value of the second force, the soldering process according to the invention can take into account the different compressive strengths of the chip and the mass forming solder.
- The intensity of the first compressive force is for example 50 grams-force and the intensity of the second compressive force is 10 grams-force.
- Due to the fact that, firstly, the first compressive force is applied to the mass forming solder without the chip, a relatively high value can be chosen to flatten the mass sufficiently and thereby improve the heat transfer between the holder and the mass.
- Second, the second compressive force can then be applied to the component against the flattened mass and the holder, the second predefined value can be chosen relatively low. The chip is therefore protected from damage due to the intensity of the compressive force being too high.
- In addition, by applying a second compressive force on the chip, the mass and the holder, the heat transfer is optimised between the holder and the chip.
- Preferably, during the step of positioning the mass on the holder, the mass is moved towards the holder until detection of a position where the mass comes into contact with the holder and, during the application step, the intensity of the first force is increased from a substantially zero initial value set during detection of the contact position up to the first predefined value.
- Similarly, during the step of positioning the component on the flattened mass, the component is moved towards the flattened mass until detection of a position where the component comes into contact with the flattened mass and, during the application step, the intensity of the second force is increased from a substantially zero initial value set during detection of the contact position up to the second predefined value.
- Thus, the steps of detection of a contact position and application of a compressive force of substantially zero initial intensity provide efficient control over compression of the mass against the holder and compression of the chip against the flattened mass and the holder.
- A soldering method according to the invention may also include one or more of the following characteristics:
- the intensity of the first and/or the second compressive force is increased in incrementation steps from the value of the intensity up to the first and/or the second predefined value;
- during the heating step, the relative position of the component against the holder is maintained constant;
- during the heating step, a laser beam is directed to a first side of the holder opposite a second side of the holder bearing this mass, at the position of this mass, during a period of irradiation of the holder by the beam, and the relative position of the component against the holder is maintained constant, at least during the period of irradiation;
- the first predefined value is determined according to a lower critical limit of the mass thickness after the step of applying the first force;
- the second predefined value is less than a critical value beyond which the component would be damaged;
- the component is a semi-conductor chip.
- The invention also relates to a device for arranging a first element on a second element comprising:
- means of moving the first element on the second element,
- means of compressing the first element against the second element, characterised in that it further comprises:
- means of detecting a contact position when the first element comes into contact with the second element,
- means forming counterweight of the displacement means, and
- means of controlling the compression means and the means forming counterweight according to detection of the contact position.
- An arranging device according to the invention may also include one or more of the characteristics according to which:
- the displacement means comprise suction type holding means to hold the first element;
- the displacement means comprise infrared type temperature measurement means with an optical fibre passing through a suction tube of the holding means;
- the detection means are chosen amongst a capacitive type contact detector and a pressure sensor;
- the device is designed to arrange a first element chosen amongst a mass forming solder and a semi-conductor chip on a second element forming holder.
- It will be easier to understand the invention on reading the description below, given as an example and referring to the drawings, on which:
-
FIG. 1 is a diagram of a soldering installation comprising an arranging device according to the invention; -
FIGS. 2 to 8 are front views of the arranging device shown onFIG. 1 , illustrating various steps of a soldering process to solder a chip on a holder according to the invention. A soldering installation is represented onFIG. 1 . The soldering installation is designated by thegeneral reference 10. - The
installation 10 is used to solder acomponent 12 on aholder 14 by addition ofmass forming solder 16. - In the example described,
component 12 is a conventional semi-conductor chip. In a conventional manner, themass forming solder 16 consists of a soldering paste or a thin strip cut up into discs or rectangles. - In the example described,
holder 14 comprises a metal part PM, in particular copper, at least partially surrounded by a part PS made of synthetic material forming part of a protective box to protect thesemi-conductor chip 12 supported by theholder 14. - The
holder 14 comprises first S1 and second S2 opposite sides, themass forming solder 16 being intended to be attached to the second side S2 of the metal part PM of theholder 14. Preferably, the second side S2 is plated with a thin layer of nickel. - In order to precisely arrange the
chip 12 and themass 16 on theholder 14, thesoldering installation 10 also comprises adevice 18 for arranging a first element chosen amongst themass forming solder 16 and thesemi-conductor chip 12 on a second element forming holder (such as holder 14). - The arranging
device 18 includes means 20 for displacing thechip 12 or themass 16 on the second element forming holder. In this example, the displacement means 20 includes articulatedmeans 22 for displacement of thechip 12 or of themass 16 in a horizontal plane substantially parallel to the X and Y axes and in a vertical direction substantially parallel to a Z axis. - Preferably, the displacement means 20 also include
holding means 24 to hold thefirst element - Preferably, the holding means 24 are suction type. The holding means 24 therefore include a
suction tube 26 connected to suction means 28 including for example a vacuum pump. In order to precisely displace theholding means 24, the displacement means 20 comprise connection means 30 to connect the articulatedmeans 22 and theholding means 24, capable of adopting an active state in which themeans 24 are fastened to the articulatedmeans 22 and an idle state in which themeans 24 are separated from the articulatedmeans 22. - These connection means 30 comprise for example first 32A and second 32B linear actuator arms with horizontal action (in this example, parallel to the y-axis) fastened to the articulated
means 22 equipped with first 34A and second 34B clamping jaws (FIGS. 2 to 8 ). For example, the actuator arms 32 are of type pneumatic linear cylinder with rod. Eachjaw corresponding cylinder - In this example, in the active state of the connection means 30, the clamping jaws 34 are intended to clamp the holding means 24 and in the idle state of the connection means 30, the clamping jaws 34 are intended to release the holding means 24.
- The arranging
device 18 also comprises compression means 36 to compress the first element against the second element intended to apply a compressive force on the first element against the second element. - The compression means 36 comprise for example first 38A and second 38B linear actuator arms with vertical action (in the example, parallel to the z-axis), fastened to the articulated means 22. The
actuator arms 38 are intended to apply a vertical compressive force on the first element against the second element by exerting a vertical thrust on the holding means 24. - Each
actuator arm 38 is also of type pneumatic linear cylinder with rod. In a conventional manner, therefore, theactuator arms 38 are intended to adopt an idle state in which the rod of each cylinder is retracted and a working state in which the rod of each cylinder is extended. The holding means 24, fastened to the cylinder rods, are displaced by the cylinder rods such that they are raised when the cylinders of theactuator arms 38 change from an active state to an idle state and lowered otherwise. - In the example described, the
device 18 also includesmeans 40 for adjusting the intensity of the compressive force (shown onFIG. 1 ). - In addition, the arranging
device 18 also comprises means 42 for detecting a contact position when the first element comes into contact with the second element. The detection means 42 preferably comprise a pressure sensor integrated in the holding means 24. - As a variant, the detection means 42 comprise a capacitive type contact detector.
- The arranging
device 18 also comprises means forming counterweight (not shown) of the displacement means 20. In this example, more precisely, the means form counterweight of the holding means 24 and form an element of the compression means 36, more especially an element of theactuator arms 38. - The arranging
device 18 also comprises means 44 for controlling the compression means 36 and means forming counterweight according to detection of the contact position by themeans 42. - To heat the
mass forming solder 16 to solder thechip 12 on theholder 14, theinstallation 10 also comprises a heat source (not shown), such as for example a laser source emitting alaser beam 46. - The
installation 10 also comprises means 48 for focusing thelaser beam 46 at apoint 50 at the position of themass forming solder 16. - Possibly, in order to check the temperature of the
mass forming solder 16 and of thesemi-conductor chip 12 while heating these two elements, the displacement means 20 comprise infrared type temperature measurement means 52 (FIG. 1 ). - For example, the measurement means 52 comprise an
optical fibre 54 passing through thesuction tube 26 of the holding means 24. Possibly, the measurement means 52 also comprise aninfrared pyrometer 56 connected to theoptical fibre 54. - We will now describe, referring to
FIGS. 2 to 8 , the main steps of a soldering method according to the invention. - Firstly, this method comprises steps for arranging the
component 12 and themass 16 on theholder 14. - Thus, during a first arranging step illustrated on
FIG. 2 , themass 16 is positioned on theholder 12. As can be seen onFIG. 2 , the initial general shape of themass forming solder 16 is relatively irregular. - During this step, the clamping jaws 34 clamp the holding means 24 such that the holding means 24 are fastened to the articulated means 22. In addition, the
actuator arms 38 are in their idle state. Consequently, displacement of the holding means 24 is relatively precise since perfectly controlled by the articulated means 22. - The holding means 24 hold the
mass forming solder 16 by suction. - The displacement means 20 then displace the
mass 16 horizontally and vertically, relatively quickly, up to a first predefined position P0 with coordinates X0, Y0 and Z0. In this example, the coordinates X0, Y0 are predetermined according to the positions of the electrical connectors on the holder 14 (not shown) intended for electrical connection with thechip 12. The coordinate Z0 is chosen so that theholder 14 and themass 16 are far enough apart to avoid any accidental contact between these two elements. - The means 20 then progressively displace the
mass 16 in the vertical direction Z until detection of a position where themass 16 comes into contact with theholder 14. - Upon detection of the position where the
mass 16 comes into contact with theholder 14, themeans 44 control activation of the compression means 36. - Thus, during a second step for arranging the
mass 16 on theholder 14, illustrated byFIG. 3 , the compression means 36 apply on the mass 16 a first compressive force F1 for compressing themass 16 against theholder 14 using the holding means 24. - More precisely, during this step, the
means 30 for connecting the articulated means 22 and the holding means 24 are in idle state. The holding means 24 are therefore no longer fastened to the articulated means 22. - The
actuator arms 38 then exert a vertical thrust along the direction defined by the z-axis on the holding means 24 in order to apply the compressive force F1 on themass 16 against theholder 14. According to the invention, the compression means 36 increase the intensity of the first force F1 up to a first predefined value, chosen so as to flatten themass forming solder 16. - Preferably, in order to precisely control the intensity of the compressive force F1, the
means 44 also control activation of the means forming counterweight of the holding means 24 on detection of the contact position. Activation of the means forming counterweight therefore cancels out the force of gravity of the holding means 24 exerted on themass 16. - In this case, on detection of the contact position, the intensity of the first force F1 can be adjusted to an initial value of zero, firstly by adjusting the intensity of the force with the adjustment means 40 and secondly by activating the means forming counterweight.
- Thus, during the step when force F1 is applied, the compression means 36 increase the intensity of the first force F1 from the substantially zero initial value, set on detection of the contact position, up to the first predefined value.
- Preferably, the intensity of the first compressive force F1 is increased in incrementation steps from the value of the intensity up to the first predefined value.
- During the step when force F1 is applied, the holding means 24 descend to a position P1 where the
cylinder rods 38 are extended by a length l1 required to reach the first predefined value of the intensity of the compressive force F1. - In the example described, the first predefined value is about 50 grams-force. Generally, the initial thickness of the
mass forming solder 16, before the step when the compressive force is applied, is about 100 microns. - Preferably, the first predefined value is determined according to the lower critical limit of the mass 16 thickness after the step when the first force F1 is applied.
- For example, this lower critical limit of the thickness is defined as being the limiting thickness below which the joint resulting from cooling of the
mass 16 is likely to be relatively fragile. In this example, the lower critical limit of the thickness of the mass is about 70 microns. - After the
mass 16 has been flattened, the suction means 52 are deactivated so that the holding means 24 release the mass 16 (FIG. 4 ). Theactuator arms 38 then switch from their active state to their idle state, allowing the holding means 24 to rise. In addition, themeans 30 for connecting the holding means 24 comprising in particular the clamping jaws 34 are activated so that the holding means 24 are once again fastened to the articulated means 22. - During a third arranging step illustrated on
FIG. 5 , thesemi-conductor chip 12 is positioned on the flattenedmass 16. - The displacement means 20 move to pick up the
chip 12 by suction. - The displacement means 20 then displace the
chip 12 horizontally and vertically, relatively quickly, up to the predefined position P0 with coordinates X0, Y0 and Z0. In this position, thechip 12 is not in contact with themass 16. - The means 20 progressively displace the
chip 12 in the vertical direction Z until detection of a position where thechip 12 comes into contact with the flattenedmass 16. - Upon detection of the position where the
chip 12 comes into contact with the flattenedmass 16, themeans 44 control activation of the compression means 36. - Thus, during a fourth arranging step illustrated on
FIG. 6 , to reduce the irregularities of the contact surface between thechip 12 and the flattenedmass 16, the compression means 36 apply on the chip 12 a second compressive force F2 on thechip 12 against the flattenedmass 16 and theholder 14. - According to the invention, the compression means 36 increase the intensity of the second force F2 up to a second predefined value less than the first predefined value. The second predefined value is less than a critical value beyond which the
chip 12 would be damaged. For example, the second predefined value is about 10 grams-force. - Preferably, in order to precisely control the intensity of the compressive force F2, on detection of the position when the
chip 12 comes into contact with themass 16, themeans 44 also control activation of the means forming counterweight of the holding means 24. By activating the means forming counterweight and adjusting the value of the intensity of the second force using adjustment means 40, the initial value can be adjusted to a substantially zero value. - The intensity of the second force F2 is then increased from the initial substantially zero value, set on detection of the contact position, up to the second predefined value.
- Preferably, the intensity of the second compressive force F2 is increased in incrementation steps from the value of the intensity up to the second predefined value.
- During the step when force F2 is applied, the holding means 24 descend to a position P2 where the
cylinder rods 38 are extended by a length l2 required to reach the second predefined value of the intensity of the compressive force F2. - After performing the arranging steps, the method also comprises a step for heating the
mass forming solder 16 illustrated onFIG. 7 . - To heat the
mass forming solder 16, therefore, thelaser beam 46 is directed on the first side S1 of theholder 14. More precisely, thelaser beam 46 is directed at the position of themass forming solder 16 during a period of irradiation of theholder 14 by thebeam 46. - The heat generated at the
point 50 of irradiation of theholder 14 by thelaser beam 46 propagates through theholder 14 to themass forming solder 16 and thechip 12. - Since the surface irregularities were attenuated during the steps when the compressive forces F1 and F2 were applied, the heat transfer is relatively good between the
holder 14 and themass 16 as well as between the mass 16 and thechip 12. - During the heating step, in this example, the relative position of the
chip 12 and theholder 14 is maintained constant, at least during the period of irradiation of the holder by thebeam 46. - Before the heating step, therefore, the holding means 24 are blocked in position P2. In particular, the control means 44 deactivate the compression means 36 while maintaining the
cylinder rods 38 extended by a length l2 and the clamping jaws 34 are activated. - Before the heating step, the
mass 16 is relatively hard. The force F2 of intensity equal to the second predefined value is compensated, traditionally, by the reaction of themass 16 and of thechip 12 on the holding means 24 of intensity also equal to that of the force F2. - During the heating step, the holding means 24 are maintained in position P2. Due to the softening of the
mass 16, the intensity of the reaction of themass 16 and of thechip 12 on the holding means 24 decreases down to zero when themass 16 is liquid. Since the compression means 36 are deactivated, the intensity of the force F2 exerted by the holding means 24 on thechip 12 and themass 16 decreases in the same way. - This is carried out in particular to take into account the softening of the mass 16 during the heating step and thereby prevent damage to the
chip 12. Applying a compressive force of excessive intensity on thechip 12 and the softenedmass 16 during the heating step could project the softenedmass 16 on the sides of thechips 12 and thereby compress thechip 12 directly on theholder 14. - Preferably, the relative position of the
chip 12 and theholder 14 is maintained constant until themass forming solder 16 has cooled. - In addition, during irradiation of the
holder 14 by thelaser beam 46 and cooling of themass 16, the temperature of thechip 12, in particular, can be checked using the measurement means 52. Theoptical fibre 54 collects the infrared flux emitted by thechip 12 and transmits it to thepyrometer 56. Thepyrometer 56 then converts the luminous flux collected into a temperature value. - After the
mass 16 has cooled, as illustrated onFIG. 8 , the suction means 28 are deactivated and the holding means 24 release thechip 12. The connection means 30 are deactivated and the jaws 34 release the holding means 24. Thecylinder rods 38 are retracted, allowing the holding means 24 to rise. The connection means 30 are then activated again and the articulated means 22 can move the holding means 24, for example to arrange and solder a new element on theholder 14.
Claims (14)
Applications Claiming Priority (3)
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FR0653731 | 2006-09-14 | ||
FR0653731A FR2905883B1 (en) | 2006-09-14 | 2006-09-14 | METHOD FOR WELDING AN ORGAN ON A SUPPORT BY DELIVERING MATERIAL AND DEVICE FOR ARRANGING TWO ELEMENTS ON ONE ANOTHER |
PCT/FR2007/051904 WO2008031981A2 (en) | 2006-09-14 | 2007-09-11 | Method of bonding a member to a support by addition of material, and device for arranging two elements, one on the other |
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PCT/FR2007/051904 A-371-Of-International WO2008031981A2 (en) | 2006-09-14 | 2007-09-11 | Method of bonding a member to a support by addition of material, and device for arranging two elements, one on the other |
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US13/672,400 Continuation US8952288B2 (en) | 2006-09-14 | 2012-11-08 | Method of bonding a member to a support by addition of material, and device for arranging two elements, one on the other |
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US12/310,907 Abandoned US20100089879A1 (en) | 2006-09-14 | 2007-09-11 | Method of bonding a member to a support by addition of material, and device for arranging two elements, one on the other |
US13/672,400 Expired - Fee Related US8952288B2 (en) | 2006-09-14 | 2012-11-08 | Method of bonding a member to a support by addition of material, and device for arranging two elements, one on the other |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20200170155A1 (en) * | 2018-11-28 | 2020-05-28 | International Business Machines Corporation | Flux residue detection |
CN111511122A (en) * | 2020-05-19 | 2020-08-07 | 中国电子科技集团公司第二十九研究所 | Clamping soldering paste coating device and method for bottom pin-free packaged device |
DE102022116028A1 (en) | 2022-06-28 | 2023-12-28 | Pac Tech - Packaging Technologies Gmbh | Device and method for producing a contact connection |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2937216B1 (en) | 2008-10-10 | 2010-12-31 | Valeo Etudes Electroniques | METHOD AND DEVICE FOR ASSEMBLING A PASTILLE ON A SUBSTRATE BY PROVIDING A BRASS MASS. |
CH708932B1 (en) * | 2013-12-09 | 2017-04-13 | Besi Switzerland Ag | Downholder for holding down the substrate locations of a substrate for the purpose of mounting semiconductor components. |
DE102014110915A1 (en) * | 2014-07-31 | 2016-02-04 | Thyssenkrupp Ag | Hold-down device, welding device and method for checking the presence and / or the quality of a joint connection |
US10104772B2 (en) | 2014-08-19 | 2018-10-16 | International Business Machines Incorporated | Metallized particle interconnect with solder components |
FR3036301B1 (en) | 2015-05-21 | 2017-10-20 | Valeo Equip Electr Moteur | WELDING PROCESS WITH MATERIAL SUPPLY AND ELECTRONIC POWER MODULE MADE THEREBY |
CN113618192B (en) * | 2021-10-13 | 2021-12-24 | 深圳荣耀智能机器有限公司 | Circuit board assembly welding device and circuit board assembly welding method |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5285946A (en) * | 1991-10-11 | 1994-02-15 | Sanyo Electric Co., Ltd. | Apparatus for mounting components |
US5673844A (en) * | 1995-12-29 | 1997-10-07 | Gte Laboratories Incorporated | Gas pressure adjustable diebonding apparatus and method |
US6131795A (en) * | 1997-11-10 | 2000-10-17 | Matsushita Electric Industrial Co., Ltd. | Thermal compression bonding method of electronic part with solder bump |
US6353202B1 (en) * | 1997-07-23 | 2002-03-05 | Infineon Technologies Ag | Apparatus and method for producing a chip-substrate connection |
US6471110B1 (en) * | 1999-09-10 | 2002-10-29 | Esec Trading Sa | Method and apparatus for mounting semiconductor chips |
US20030140678A1 (en) * | 2002-01-31 | 2003-07-31 | Stmicroelectronics, Inc. | System and method for aligning an integrated circuit die on an integrated circuit substrate |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6420630A (en) * | 1987-07-15 | 1989-01-24 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPS6420630U (en) | 1987-07-28 | 1989-02-01 | ||
JPH02134831A (en) * | 1988-11-16 | 1990-05-23 | Fujikura Ltd | Die-bonding |
JPH055388U (en) * | 1991-07-15 | 1993-01-26 | 山形カシオ株式会社 | Component mounting device |
US5615012A (en) * | 1996-03-04 | 1997-03-25 | Motorola, Inc. | Method for detecting obstructed nozzles |
US6270898B1 (en) | 1996-05-27 | 2001-08-07 | Sumitomo Electric Industries, Ltd. | Tool tip and bonding tool comprising the tool tip and control method for the bonding tool |
JP3520702B2 (en) * | 1996-12-24 | 2004-04-19 | 澁谷工業株式会社 | Light irradiation bonding head |
DE10038330C2 (en) | 2000-08-05 | 2002-07-11 | Bosch Gmbh Robert | Soldering method for fastening electrical components |
US6666368B2 (en) * | 2000-11-10 | 2003-12-23 | Unitive Electronics, Inc. | Methods and systems for positioning substrates using spring force of phase-changeable bumps therebetween |
AT411855B (en) * | 2001-06-26 | 2004-06-25 | Datacon Semiconductor Equip | POSITIONING DEVICE |
US7296727B2 (en) * | 2001-06-27 | 2007-11-20 | Matsushita Electric Industrial Co., Ltd. | Apparatus and method for mounting electronic components |
JP3817207B2 (en) | 2002-08-21 | 2006-09-06 | Tdk株式会社 | Mounting processing device and control device for mounting processing device |
JP4038435B2 (en) * | 2002-10-15 | 2008-01-23 | Juki株式会社 | Die bonding equipment |
JP2004303757A (en) * | 2003-03-28 | 2004-10-28 | Japan Aviation Electronics Industry Ltd | Bonding equipment |
JP2006324533A (en) * | 2005-05-20 | 2006-11-30 | Nidec Tosok Corp | Bonding load control unit |
-
2006
- 2006-09-14 FR FR0653731A patent/FR2905883B1/en active Active
-
2007
- 2007-09-11 EP EP07823800A patent/EP2064017A2/en not_active Withdrawn
- 2007-09-11 WO PCT/FR2007/051904 patent/WO2008031981A2/en active Application Filing
- 2007-09-11 US US12/310,907 patent/US20100089879A1/en not_active Abandoned
- 2007-09-11 JP JP2009527866A patent/JP5399247B2/en not_active Expired - Fee Related
-
2012
- 2012-02-02 JP JP2012021293A patent/JP5733633B2/en not_active Expired - Fee Related
- 2012-11-08 US US13/672,400 patent/US8952288B2/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5285946A (en) * | 1991-10-11 | 1994-02-15 | Sanyo Electric Co., Ltd. | Apparatus for mounting components |
US5673844A (en) * | 1995-12-29 | 1997-10-07 | Gte Laboratories Incorporated | Gas pressure adjustable diebonding apparatus and method |
US6353202B1 (en) * | 1997-07-23 | 2002-03-05 | Infineon Technologies Ag | Apparatus and method for producing a chip-substrate connection |
US6131795A (en) * | 1997-11-10 | 2000-10-17 | Matsushita Electric Industrial Co., Ltd. | Thermal compression bonding method of electronic part with solder bump |
US6471110B1 (en) * | 1999-09-10 | 2002-10-29 | Esec Trading Sa | Method and apparatus for mounting semiconductor chips |
US20030140678A1 (en) * | 2002-01-31 | 2003-07-31 | Stmicroelectronics, Inc. | System and method for aligning an integrated circuit die on an integrated circuit substrate |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20200170155A1 (en) * | 2018-11-28 | 2020-05-28 | International Business Machines Corporation | Flux residue detection |
US10939600B2 (en) * | 2018-11-28 | 2021-03-02 | International Business Machines Corporation | Flux residue detection |
CN111511122A (en) * | 2020-05-19 | 2020-08-07 | 中国电子科技集团公司第二十九研究所 | Clamping soldering paste coating device and method for bottom pin-free packaged device |
DE102022116028A1 (en) | 2022-06-28 | 2023-12-28 | Pac Tech - Packaging Technologies Gmbh | Device and method for producing a contact connection |
WO2024002691A1 (en) * | 2022-06-28 | 2024-01-04 | Pac Tech - Packaging Technologies Gmbh | Device and method for establishing a contact connection |
Also Published As
Publication number | Publication date |
---|---|
FR2905883B1 (en) | 2008-12-05 |
JP5733633B2 (en) | 2015-06-10 |
JP2010503982A (en) | 2010-02-04 |
US8952288B2 (en) | 2015-02-10 |
JP2012138583A (en) | 2012-07-19 |
EP2064017A2 (en) | 2009-06-03 |
US20130062326A1 (en) | 2013-03-14 |
FR2905883A1 (en) | 2008-03-21 |
JP5399247B2 (en) | 2014-01-29 |
WO2008031981A2 (en) | 2008-03-20 |
WO2008031981A3 (en) | 2008-05-08 |
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Legal Events
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---|---|---|---|
AS | Assignment |
Owner name: VALEO ELECTRONIQUE ET SYSTEMES DE LIAISON,FRANCE Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:MORELLE, JEAN-MICHEL;VIVET, LAURENT;MEDINA, MATHIEU;AND OTHERS;REEL/FRAME:023018/0592 Effective date: 20090705 |
|
AS | Assignment |
Owner name: VALEO ELECTRONIQUE ET SYSTEMES DE LIAISON,FRANCE Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:MORELLE, JEAN-MICHEL;VIVET, LAURENT;MEDINA, MATHIEU;AND OTHERS;REEL/FRAME:023790/0322 Effective date: 20090605 |
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STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |