TN2010000195A1 - Transparent conductive oxide coating for thin film photovoltaic applications and methods of making the same - Google Patents

Transparent conductive oxide coating for thin film photovoltaic applications and methods of making the same

Info

Publication number: TN2010000195A1
Authority: TN; Tunisia
Prior art keywords: making; methods; transparent conductive; same; conductive oxide
Prior art date: 2007-11-02

Application number

TN2010000195A

Other languages

English (en)

Inventor

Christopher R Cording

Kunio Masumo

Sveinn Otto Agustsson

Original Assignee

Agc Flat Glass North America

Agc Flat Glass Europ S A Be

Asahi Glass Co Ltd Jp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2007-11-02

Filing date

2010-04-29

Publication date

2011-11-11

2010-04-29 Application filed by Agc Flat Glass North America, Agc Flat Glass Europ S A Be, Asahi Glass Co Ltd Jp filed Critical Agc Flat Glass North America

2011-11-11 Publication of TN2010000195A1 publication Critical patent/TN2010000195A1/fr

Links

Classifications

- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3423—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings comprising a suboxide
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3417—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials all coatings being oxide coatings
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3435—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/3411—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
- C03C17/3429—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
- C03C17/3441—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising carbon, a carbide or oxycarbide
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/407—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/138—Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/90—Other aspects of coatings
- C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/90—Other aspects of coatings
- C03C2217/94—Transparent conductive oxide layers [TCO] being part of a multilayer coating
- C03C2217/948—Layers comprising indium tin oxide [ITO]
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/32—After-treatment
- C03C2218/324—De-oxidation
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Chemical Kinetics & Catalysis (AREA)
Materials Engineering (AREA)
Organic Chemistry (AREA)
General Chemical & Material Sciences (AREA)
Geochemistry & Mineralogy (AREA)
Life Sciences & Earth Sciences (AREA)
Metallurgy (AREA)
Mechanical Engineering (AREA)
Inorganic Chemistry (AREA)
Surface Treatment Of Glass (AREA)
Chemical Vapour Deposition (AREA)
Manufacturing Of Electric Cables (AREA)
Photovoltaic Devices (AREA)
Non-Insulated Conductors (AREA)
Inorganic Compounds Of Heavy Metals (AREA)
Chemically Coating (AREA)

TN2010000195A 2007-11-02 2010-04-29 Transparent conductive oxide coating for thin film photovoltaic applications and methods of making the same TN2010000195A1 (en)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US99614407P	2007-11-02	2007-11-02
PCT/US2008/012409 WO2009058385A1 (fr)	2007-11-02	2008-11-03	Revêtement d'oxyde conducteur transparent pour applications photovoltaïques en couche mince et procédés de fabrication de ce revêtement

Publications (1)

Publication Number	Publication Date
TN2010000195A1 true TN2010000195A1 (en)	2011-11-11

Family

ID=40279714

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TN2010000195A TN2010000195A1 (en)	2007-11-02	2010-04-29	Transparent conductive oxide coating for thin film photovoltaic applications and methods of making the same

Country Status (20)

Country	Link
US (1)	US9181124B2 (fr)
EP (1)	EP2217542A1 (fr)
JP (2)	JP2011504293A (fr)
KR (1)	KR101567615B1 (fr)
CN (1)	CN101980986B (fr)
AR (1)	AR069169A1 (fr)
AU (1)	AU2008319304B2 (fr)
BR (1)	BRPI0818917A2 (fr)
CA (1)	CA2704389A1 (fr)
CL (1)	CL2008003281A1 (fr)
IL (1)	IL205443A (fr)
MA (1)	MA31896B1 (fr)
MX (1)	MX2010004936A (fr)
MY (1)	MY162545A (fr)
RU (1)	RU2010122049A (fr)
SG (1)	SG10201402245VA (fr)
TN (1)	TN2010000195A1 (fr)
TW (2)	TWI533334B (fr)
WO (1)	WO2009058385A1 (fr)
ZA (1)	ZA201003879B (fr)

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- 2008-11-03 SG SG10201402245VA patent/SG10201402245VA/en unknown
- 2008-11-03 MY MYPI2010001965A patent/MY162545A/en unknown
- 2008-11-03 CA CA2704389A patent/CA2704389A1/fr not_active Abandoned
- 2008-11-03 WO PCT/US2008/012409 patent/WO2009058385A1/fr active Application Filing
- 2008-11-03 AR ARP080104807A patent/AR069169A1/es not_active Application Discontinuation
- 2008-11-03 BR BRPI0818917A patent/BRPI0818917A2/pt not_active IP Right Cessation
- 2008-11-03 US US12/263,648 patent/US9181124B2/en not_active Expired - Fee Related
- 2008-11-03 CN CN200880123892.7A patent/CN101980986B/zh not_active Expired - Fee Related
- 2008-11-03 CL CL2008003281A patent/CL2008003281A1/es unknown
- 2008-11-03 TW TW103126649A patent/TWI533334B/zh not_active IP Right Cessation
- 2008-11-03 AU AU2008319304A patent/AU2008319304B2/en not_active Ceased
- 2008-11-03 KR KR1020107012120A patent/KR101567615B1/ko not_active Expired - Fee Related
- 2008-11-03 JP JP2010532067A patent/JP2011504293A/ja active Pending
- 2008-11-03 EP EP08844315A patent/EP2217542A1/fr not_active Withdrawn
- 2008-11-03 RU RU2010122049/03A patent/RU2010122049A/ru unknown
- 2008-11-03 MX MX2010004936A patent/MX2010004936A/es active IP Right Grant
- 2008-11-03 TW TW097142396A patent/TWI453173B/zh not_active IP Right Cessation
2010
- 2010-04-29 IL IL205443A patent/IL205443A/en not_active IP Right Cessation
- 2010-04-29 TN TN2010000195A patent/TN2010000195A1/fr unknown
- 2010-05-31 ZA ZA2010/03879A patent/ZA201003879B/en unknown
- 2010-06-01 MA MA32885A patent/MA31896B1/fr unknown
2014
- 2014-10-03 JP JP2014204772A patent/JP5960221B2/ja not_active Expired - Fee Related

Also Published As

Publication number	Publication date
KR101567615B1 (ko)	2015-11-09
TWI533334B (zh)	2016-05-11
AU2008319304B2 (en)	2014-02-06
AU2008319304A1 (en)	2009-05-07
IL205443A (en)	2014-11-30
JP5960221B2 (ja)	2016-08-02
WO2009058385A1 (fr)	2009-05-07
MX2010004936A (es)	2010-12-21
MA31896B1 (fr)	2010-12-01
US9181124B2 (en)	2015-11-10
JP2011504293A (ja)	2011-02-03
JP2015053494A (ja)	2015-03-19
CA2704389A1 (fr)	2009-05-07
CN101980986A (zh)	2011-02-23
BRPI0818917A2 (pt)	2017-05-16
CN101980986B (zh)	2016-04-27
TWI453173B (zh)	2014-09-21
IL205443A0 (en)	2010-12-30
TW201443929A (zh)	2014-11-16
KR20100091208A (ko)	2010-08-18
RU2010122049A (ru)	2011-12-10
AR069169A1 (es)	2010-01-06
EP2217542A1 (fr)	2010-08-18
US20090120496A1 (en)	2009-05-14
SG10201402245VA (en)	2014-08-28
TW200938501A (en)	2009-09-16
ZA201003879B (en)	2011-03-30
MY162545A (en)	2017-06-15
CL2008003281A1 (es)	2009-10-16

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