FR2908185B1 - Procede de caracterisation de materiau dielectrique en film mince dans le domaine de l'infrarouge lointain et dispositif et banc de mesure pour la mise en oeuvre d'un tel procede - Google Patents
Procede de caracterisation de materiau dielectrique en film mince dans le domaine de l'infrarouge lointain et dispositif et banc de mesure pour la mise en oeuvre d'un tel procedeInfo
- Publication number
- FR2908185B1 FR2908185B1 FR0654741A FR0654741A FR2908185B1 FR 2908185 B1 FR2908185 B1 FR 2908185B1 FR 0654741 A FR0654741 A FR 0654741A FR 0654741 A FR0654741 A FR 0654741A FR 2908185 B1 FR2908185 B1 FR 2908185B1
- Authority
- FR
- France
- Prior art keywords
- implementing
- far
- dielectric material
- film dielectric
- infrared domain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000003989 dielectric material Substances 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Toxicology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0654741A FR2908185B1 (fr) | 2006-11-06 | 2006-11-06 | Procede de caracterisation de materiau dielectrique en film mince dans le domaine de l'infrarouge lointain et dispositif et banc de mesure pour la mise en oeuvre d'un tel procede |
| PCT/FR2007/052297 WO2008056078A2 (fr) | 2006-11-06 | 2007-11-05 | Procede de caracterisation de materiau dielectrique en film mince dans le domaine de l'infrarouge lointain et dispositif et banc de mesure pour la mise en œuvre d'un tel procede |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0654741A FR2908185B1 (fr) | 2006-11-06 | 2006-11-06 | Procede de caracterisation de materiau dielectrique en film mince dans le domaine de l'infrarouge lointain et dispositif et banc de mesure pour la mise en oeuvre d'un tel procede |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2908185A1 FR2908185A1 (fr) | 2008-05-09 |
| FR2908185B1 true FR2908185B1 (fr) | 2011-06-03 |
Family
ID=38157827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR0654741A Expired - Fee Related FR2908185B1 (fr) | 2006-11-06 | 2006-11-06 | Procede de caracterisation de materiau dielectrique en film mince dans le domaine de l'infrarouge lointain et dispositif et banc de mesure pour la mise en oeuvre d'un tel procede |
Country Status (2)
| Country | Link |
|---|---|
| FR (1) | FR2908185B1 (fr) |
| WO (1) | WO2008056078A2 (fr) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1986007149A1 (fr) * | 1985-05-29 | 1986-12-04 | Kurt Tiefenthaler | Senseur optique pour etablir selectivement la presence de substances ainsi que la variation d'indice de refraction dans les substances objet de mesures |
| KR20050103100A (ko) * | 2004-04-24 | 2005-10-27 | 케이 비 광통신 주식회사 | 박막의 굴절률 및 두께 측정장치 |
-
2006
- 2006-11-06 FR FR0654741A patent/FR2908185B1/fr not_active Expired - Fee Related
-
2007
- 2007-11-05 WO PCT/FR2007/052297 patent/WO2008056078A2/fr active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2008056078A3 (fr) | 2008-07-17 |
| FR2908185A1 (fr) | 2008-05-09 |
| WO2008056078A2 (fr) | 2008-05-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| CL | Concession to grant licences | ||
| PLFP | Fee payment |
Year of fee payment: 10 |
|
| PLFP | Fee payment |
Year of fee payment: 11 |
|
| ST | Notification of lapse |
Effective date: 20180731 |