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FR2240530B3 - - Google Patents

Info

Publication number
FR2240530B3
FR2240530B3 FR7424964A FR7424964A FR2240530B3 FR 2240530 B3 FR2240530 B3 FR 2240530B3 FR 7424964 A FR7424964 A FR 7424964A FR 7424964 A FR7424964 A FR 7424964A FR 2240530 B3 FR2240530 B3 FR 2240530B3
Authority
FR
France
Prior art keywords
wafer
edge
recess
aug
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7424964A
Other languages
English (en)
Other versions
FR2240530A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semikron GmbH and Co KG
Original Assignee
Semikron GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semikron GmbH and Co KG filed Critical Semikron GmbH and Co KG
Publication of FR2240530A1 publication Critical patent/FR2240530A1/fr
Application granted granted Critical
Publication of FR2240530B3 publication Critical patent/FR2240530B3/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • H10D8/01Manufacture or treatment
    • H10D8/045Manufacture or treatment of PN junction diodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D18/00Thyristors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D18/00Thyristors
    • H10D18/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/104Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices having particular shapes of the bodies at or near reverse-biased junctions, e.g. having bevels or moats
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/117Shapes of semiconductor bodies
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/13Semiconductor regions connected to electrodes carrying current to be rectified, amplified or switched, e.g. source or drain regions
    • H10D62/141Anode or cathode regions of thyristors; Collector or emitter regions of gated bipolar-mode devices, e.g. of IGBTs
    • H10D62/142Anode regions of thyristors or collector regions of gated bipolar-mode devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/192Base regions of thyristors
    • H10D62/199Anode base regions of thyristors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/192Base regions of thyristors
    • H10D62/206Cathode base regions of thyristors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • H10D8/422PN diodes having the PN junctions in mesas

Landscapes

  • Thyristors (AREA)
FR7424964A 1973-08-08 1974-07-18 Expired FR2240530B3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2340128A DE2340128C3 (de) 1973-08-08 1973-08-08 Halbleiterbauelement hoher Sperrfähigkeit

Publications (2)

Publication Number Publication Date
FR2240530A1 FR2240530A1 (fr) 1975-03-07
FR2240530B3 true FR2240530B3 (fr) 1977-05-20

Family

ID=5889197

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7424964A Expired FR2240530B3 (fr) 1973-08-08 1974-07-18

Country Status (10)

Country Link
US (1) US4092663A (fr)
JP (2) JPS5040280A (fr)
AR (1) AR199857A1 (fr)
BR (1) BR7406470D0 (fr)
CH (1) CH582426A5 (fr)
DE (1) DE2340128C3 (fr)
FR (1) FR2240530B3 (fr)
GB (1) GB1482585A (fr)
IT (1) IT1017891B (fr)
SE (1) SE403537B (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4255757A (en) * 1978-12-05 1981-03-10 International Rectifier Corporation High reverse voltage semiconductor device with fast recovery time with central depression
JPS58170044A (ja) * 1982-03-31 1983-10-06 Fujitsu Ltd 半導体素子
GB8703405D0 (en) * 1987-02-13 1987-03-18 Marconi Electronic Devices Power semi-conductor device
US6063046A (en) * 1997-04-11 2000-05-16 Allum; John H. Method and apparatus for the diagnosis and rehabilitation of balance disorders
DE102004063180B4 (de) * 2004-12-29 2020-02-06 Robert Bosch Gmbh Verfahren zum Herstellen von Halbleiterchips aus einem Siliziumwafer und damit hergestellte Halbleiterbauelemente
JP4817448B2 (ja) * 2006-11-22 2011-11-16 学校法人日本大学 コンクリート強度試験用供試体及び供試体製造用型枠
CN105453250A (zh) * 2013-08-08 2016-03-30 夏普株式会社 半导体元件衬底及其制造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3370209A (en) * 1964-08-31 1968-02-20 Gen Electric Power bulk breakdown semiconductor devices
GB1079261A (en) * 1965-01-01 1967-08-16 Westinghouse Brake & Signal Smei-conductor elements and their manufacture
NL6603372A (fr) * 1965-03-25 1966-09-26
US3458781A (en) * 1966-07-18 1969-07-29 Unitrode Corp High-voltage planar semiconductor devices
JPS4421068Y1 (fr) * 1966-09-29 1969-09-08
JPS4418910Y1 (fr) * 1966-11-07 1969-08-14
GB1201732A (en) * 1967-06-27 1970-08-12 Westinghouse Brake & Signal Manufacture of semiconductor elements
GB1211627A (en) * 1968-08-06 1970-11-11 Westinghouse Brake & Signal Methods of manufacture of semiconductor elements and elements manufactured therby
US3697829A (en) * 1968-12-30 1972-10-10 Gen Electric Semiconductor devices with improved voltage breakdown characteristics

Also Published As

Publication number Publication date
IT1017891B (it) 1977-08-10
BR7406470D0 (pt) 1975-05-20
CH582426A5 (fr) 1976-11-30
FR2240530A1 (fr) 1975-03-07
DE2340128B2 (de) 1978-02-23
SE403537B (sv) 1978-08-21
JPS5735056U (fr) 1982-02-24
DE2340128C3 (de) 1982-08-12
DE2340128A1 (de) 1975-02-20
SE7410115L (fr) 1975-02-10
GB1482585A (en) 1977-08-10
US4092663A (en) 1978-05-30
AR199857A1 (es) 1974-09-30
JPS5040280A (fr) 1975-04-12

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