EP1946929A3 - Tête d'imprimante à jet d'encre et son procédé de fabrication - Google Patents

Tête d'imprimante à jet d'encre et son procédé de fabrication Download PDF

Info

Publication number: EP1946929A3
Authority: EP; European Patent Office
Prior art keywords: ink; print head; jet print; manufacturing; partition walls
Prior art date: 2007-01-18
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

EP07123153A

Other languages

German (de)

English (en)

Other versions

EP1946929A2 (fr

Inventor

Sung Joon Park

Jeong Wuk Han

Yong Shik Park

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Samsung Electronics Co Ltd

Original Assignee

Samsung Electronics Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2007-01-18

Filing date

2007-12-13

Publication date

2009-03-18

2007-12-13 Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd

2008-07-23 Publication of EP1946929A2 publication Critical patent/EP1946929A2/fr

2009-03-18 Publication of EP1946929A3 publication Critical patent/EP1946929A3/fr

Status Withdrawn legal-status Critical Current

Links

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B63—SHIPS OR OTHER WATERBORNE VESSELS; RELATED EQUIPMENT
- B63C—LAUNCHING, HAULING-OUT, OR DRY-DOCKING OF VESSELS; LIFE-SAVING IN WATER; EQUIPMENT FOR DWELLING OR WORKING UNDER WATER; MEANS FOR SALVAGING OR SEARCHING FOR UNDERWATER OBJECTS
- B63C5/00—Equipment usable both on slipways and in dry docks
- B63C5/02—Stagings; Scaffolding; Shores or struts
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
- B—PERFORMING OPERATIONS; TRANSPORTING
- B63—SHIPS OR OTHER WATERBORNE VESSELS; RELATED EQUIPMENT
- B63C—LAUNCHING, HAULING-OUT, OR DRY-DOCKING OF VESSELS; LIFE-SAVING IN WATER; EQUIPMENT FOR DWELLING OR WORKING UNDER WATER; MEANS FOR SALVAGING OR SEARCHING FOR UNDERWATER OBJECTS
- B63C5/00—Equipment usable both on slipways and in dry docks
- B63C5/02—Stagings; Scaffolding; Shores or struts
- B63C2005/022—Shores or struts, e.g. individual oblique support elements for stabilizing hulls in dry-docks
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

Engineering & Computer Science (AREA)
Manufacturing & Machinery (AREA)
Mechanical Engineering (AREA)
Ocean & Marine Engineering (AREA)
Particle Formation And Scattering Control In Inkjet Printers (AREA)

EP07123153A 2007-01-18 2007-12-13 Tête d'imprimante à jet d'encre et son procédé de fabrication Withdrawn EP1946929A3 (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
KR1020070005707A KR20080068237A (ko)	2007-01-18	2007-01-18	잉크젯 프린트헤드 및 그 제조방법

Publications (2)

Publication Number	Publication Date
EP1946929A2 EP1946929A2 (fr)	2008-07-23
EP1946929A3 true EP1946929A3 (fr)	2009-03-18

Family

ID=39247116

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP07123153A Withdrawn EP1946929A3 (fr)	2007-01-18	2007-12-13	Tête d'imprimante à jet d'encre et son procédé de fabrication

Country Status (5)

Country	Link
US (1)	US20080174639A1 (fr)
EP (1)	EP1946929A3 (fr)
JP (1)	JP2008173972A (fr)
KR (1)	KR20080068237A (fr)
CN (1)	CN101269575A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP5225132B2 (ja)	2009-02-06	2013-07-03	キヤノン株式会社	液体吐出ヘッドおよびインクジェット記録装置
JP6806464B2 (ja) *	2016-05-30	2021-01-06	キヤノン株式会社	記録素子基板、液体吐出ヘッドおよび液体吐出装置
EP3781405B1 (fr)	2018-09-27	2024-08-28	Hewlett-Packard Development Company, L.P.	Supports comprenant des puces d'éjection de fluide
JP7313884B2 (ja) *	2019-04-22	2023-07-25	キヤノン株式会社	液体吐出ヘッド及びその製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH028057A (ja) *	1988-06-28	1990-01-11	Canon Inc	液体噴射記録ヘッド
US20040061741A1 (en) *	2002-09-30	2004-04-01	Aschoff Christopher C.	Fluid ejection device and method of manufacturing a fluid ejection device
US20050093927A1 (en) *	2003-10-31	2005-05-05	Lassar Noah C.	Fluid ejection device with insulating feature

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2730481B2 (ja) *	1994-03-31	1998-03-25	日本電気株式会社	インクジェット記録ヘッドの製造方法
JP3604953B2 (ja) *	1998-06-17	2004-12-22	キヤノン株式会社	液体噴射記録ヘッド用素子基板の製造方法および液体噴射記録ヘッドの製造方法
KR100452850B1 (ko) *	2002-10-17	2004-10-14	삼성전자주식회사	잉크젯 프린터의 프린트 헤드 및 그 제조방법
KR20050072356A (ko)	2004-01-06	2005-07-11	삼성전자주식회사	잉크젯 프린트 헤드칩들을 갖는 반도체 웨이퍼 및 그것을제조하는 방법
KR100560721B1 (ko) *	2004-08-23	2006-03-13	삼성전자주식회사	금속 챔버층을 구비하는 잉크젯 헤드의 제조방법 및 그에의하여 제조된 잉크젯 헤드
JP2006281679A (ja) *	2005-04-04	2006-10-19	Canon Inc	液体吐出ヘッドの製造方法および液体吐出ヘッド

2007
- 2007-01-18 KR KR1020070005707A patent/KR20080068237A/ko not_active Ceased
- 2007-11-28 US US11/946,250 patent/US20080174639A1/en not_active Abandoned
- 2007-12-13 EP EP07123153A patent/EP1946929A3/fr not_active Withdrawn
- 2007-12-14 CN CNA2007101857816A patent/CN101269575A/zh active Pending
2008
- 2008-01-08 JP JP2008001569A patent/JP2008173972A/ja active Pending

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH028057A (ja) *	1988-06-28	1990-01-11	Canon Inc	液体噴射記録ヘッド
US20040061741A1 (en) *	2002-09-30	2004-04-01	Aschoff Christopher C.	Fluid ejection device and method of manufacturing a fluid ejection device
US20050093927A1 (en) *	2003-10-31	2005-05-05	Lassar Noah C.	Fluid ejection device with insulating feature

Also Published As

Publication number	Publication date
US20080174639A1 (en)	2008-07-24
KR20080068237A (ko)	2008-07-23
CN101269575A (zh)	2008-09-24
EP1946929A2 (fr)	2008-07-23
JP2008173972A (ja)	2008-07-31

Legal Events

Date	Code	Title	Description
2008-06-20	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2008-07-23	AK	Designated contracting states	Kind code of ref document: A2 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
2008-07-23	AX	Request for extension of the european patent	Extension state: AL BA HR MK RS
2009-02-13	PUAL	Search report despatched	Free format text: ORIGINAL CODE: 0009013
2009-03-18	AK	Designated contracting states	Kind code of ref document: A3 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
2009-03-18	AX	Request for extension of the european patent	Extension state: AL BA HR MK RS
2009-10-21	17Q	First examination report despatched	Effective date: 20090922
2009-11-11	17P	Request for examination filed	Effective date: 20090826
2009-11-25	AKX	Designation fees paid	Designated state(s): DE FR GB NL
2010-06-25	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN
2010-07-28	18D	Application deemed to be withdrawn	Effective date: 20100203

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