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EP1752665B1 - Dispositif d'actionnement avec un capteur de position à micro-ondes. - Google Patents

Dispositif d'actionnement avec un capteur de position à micro-ondes. Download PDF

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Publication number
EP1752665B1
EP1752665B1 EP05017445A EP05017445A EP1752665B1 EP 1752665 B1 EP1752665 B1 EP 1752665B1 EP 05017445 A EP05017445 A EP 05017445A EP 05017445 A EP05017445 A EP 05017445A EP 1752665 B1 EP1752665 B1 EP 1752665B1
Authority
EP
European Patent Office
Prior art keywords
actuator
protective cover
housing
cover device
microwave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP05017445A
Other languages
German (de)
English (en)
Other versions
EP1752665A1 (fr
Inventor
Gerald Müller
Wolfgang Rammler
Thomas Reininger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Festo SE and Co KG
Original Assignee
Festo SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=35466072&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1752665(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Festo SE and Co KG filed Critical Festo SE and Co KG
Priority to AT05017445T priority Critical patent/ATE430881T1/de
Priority to DE502005007242T priority patent/DE502005007242D1/de
Priority to EP05017445A priority patent/EP1752665B1/fr
Priority to US11/492,565 priority patent/US7451684B2/en
Publication of EP1752665A1 publication Critical patent/EP1752665A1/fr
Application granted granted Critical
Publication of EP1752665B1 publication Critical patent/EP1752665B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20—Other details, e.g. assembly with regulating devices
    • F15B15/28—Means for indicating the position, e.g. end of stroke
    • F15B15/2815—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT
    • F15B15/2869—Position sensing, i.e. means for continuous measurement of position, e.g. LVDT using electromagnetic radiation, e.g. radar or microwaves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00—Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20—Other details, e.g. assembly with regulating devices
    • F15B15/28—Means for indicating the position, e.g. end of stroke
    • F15B15/2892—Means for indicating the position, e.g. end of stroke characterised by the attachment means

Definitions

  • the invention relates to an actuator device, with a linearly movable in a movement space of an actuator housing actuator member, with a microwave position measuring device for detecting the position of Aktorglieds in the movement space, wherein the actuator member generates an acting on the position measuring device pressure wave when approaching the position measuring device with a radio frequency microwave antenna arrangement for transmitting and receiving microwaves which are at least partially reflected by the actuator member, the actuator apparatus comprising a dielectric protective cover means arranged in front of the microwave antenna assembly for mechanically protecting the microwave antenna assembly, the protective cover means providing an end stop forms for the Aktorglied and between the protective cover device and the microwave Antennenanordnüng for mechanical decoupling of the protective cover device of the microwave antenna assembly e is at a distance, in which the protective cover device can deform as a result of the pressure wave.
  • Such an actuator device is for example from the DE 198 33 220 A1 known.
  • the microwave antenna arrangement is preceded by a protective cover device, which serves as an end stop for the actuator member.
  • An actuator device with a microwave position measuring device is also known from German Offenlegungsschrift DE 102 05 904 A1 known. There is described as an actuator device, a pneumatic cylinder with an actuator member, which is formed by a piston of the cylinder.
  • the position measuring device includes a high frequency microwave antenna assembly for measuring a position of the piston from an annular stop annularly surrounding the microwave antenna assembly. As it approaches the microwave antenna arrangement, the piston pushes a pressure wave in front of it, which mechanically loads the microwave antenna arrangement and thus, for example, alters the position of the microwave antenna arrangement relative to the housing.
  • the distance measurement signal that generates the position-measuring device is relatively strongly influenced. It can also lead to a failure of the measurement signal.
  • the protective cover means has at least one stop portion which forms an end stop for the Aktorglied and protrudes in front of a cover portion of the protective cover means for protecting the microwave antenna assembly in the direction of the movement space, and the at least one stop section extends laterally on the microwave antenna arrangement and is supported on a rear wall and / or a side wall of the housing.
  • the position of the microwave antenna arrangement of pressure and temperature influences is unaffected constant or at least substantially constant.
  • the protective cover device may deform as a result of the pressure wave, but remains mechanically removed from the microwave antenna assembly and initiates any residual kinetic energy of the Aktorglieds, such as a piston of a pneumatic cylinder, in the actuator housing, so that the microwave antenna assembly by the Pressure wave or other mechanical influences is not affected. There is thus a mechanical decoupling between the housing and the microwave antenna arrangement.
  • the protective cover device protrudes into the movement space.
  • the protective cover device has an end stop for the actuator member.
  • the protective cover device forms a kind of impact body and / or end-of-stroke damper for the actuator member, eg the piston of a pneumatic cylinder.
  • the protective cover device has at least one stop portion, which forms an end stop for the actuator member.
  • the fluid channel is provided, for example, in the stopper portion.
  • the end stop projects in front of a cover portion of the protective cover device for protecting the microwave antenna assembly in the direction of the movement space, so that the actuator member impinges on the stopper portion, but not on the cover portion.
  • the abutment portion carries mechanical energy laterally past the microwave antenna assembly and is supported on a rear wall and / or a side wall of the housing.
  • the stopper portion is, for example, annular and annularly surrounds the microwave antenna arrangement. It is understood that a kind of supports or struts can be provided which protrude away from a rear wall of the housing in the direction of the movement space and form an end stop for the actuator member.
  • the protective cover device expediently consists of a plastic which has a small temperature-dependent volume change.
  • a plastic which has a small temperature-dependent volume change.
  • LCP liquid crystal copolyester
  • the protective cover device is electrically non-conductive and forms a dielectric, so that it does not affect the propagation of the microwaves, which have, for example, a frequency range of 10 MHz to 25 GHz.
  • the protective cover device is a kind of secondary emission system wherein, for example, the dielectric constant and / or the geometry of the protective cover device are adapted to the microwave antenna arrangement and / or the geometry of the actuator housing, so that the microwaves propagate in a predetermined mode or in predetermined modes in the movement space.
  • the protective cover means is pressure-tightly connected to at least one wall of the housing to shield the microwave antenna assembly pressure-tight.
  • This pressure-tightness is produced for example by gluing, screwing, snapping, welding or the like.
  • the wall can be a side wall, a circumferential wall or an end wall.
  • the protective cover device is advantageously applied to a side wall of the housing.
  • This side wall can be a peripheral wall of the movement space and / or the lid, an end wall of the lid or the like.
  • the protective cover device is molded or glued to the housing, such a seal is advantageous, but not essential.
  • the protective cover device advantageously forms part of a fluid drive, in particular a pneumatic working cylinder. It is understood that the protective cover device can also be used in principle in electrical drives.
  • the actuator member is formed by a piston or a rotor of the respective drive.
  • Another variant of the invention may provide that the protective cover device forms part of a fluid valve, for example a pneumatic valve.
  • the actuator member is expediently provided for driving the valve member.
  • the actuator member may form part of the valve member.
  • the protective cover device according to the invention expediently has at least one fluid channel connected to the movement space.
  • This fluid channel is used for example for connecting the movement space or the piston chamber with a fluid connection, for example a compressed air connection.
  • the fluid channel of the protective cover device is expediently assigned a corresponding recess, for example a blind channel, and / or a projection.
  • Such compensation means cause the microwaves in the movement space to propagate substantially symmetrically.
  • the microwave antenna arrangement is expediently connected to a rear wall of the actuator housing, which is formed for example by a cover of the actuator housing.
  • the protective cover device is connected to this cover.
  • a Anspritz-, an adhesive or a screw method are suitable.
  • the cover be attached as a kind of cover module with attached protective cover device to the actuator housing and can be fastened there, for example by means of bolts, clamps, by gluing, welding or the like.
  • the actuator housing for example a cover of the actuator housing, expediently forms part of the microwave antenna arrangement.
  • the microwave antenna assembly includes a coupling probe that cooperates with the housing, which is an electrical conduction structure.
  • the protective cover device according to the invention protects the sensitive coupling probe against mechanical stress.
  • the protective cover device is expediently an injection-molded part.
  • the protective cover device can be produced away from the actuator housing and later be inserted into the actuator housing, for example screwed in and / or glued and / or locked. However, it is particularly preferred to inject the protective cover device to the actuator housing, for example a housing cover.
  • a pneumatic working cylinder 10 forms an actuator device 11, in particular a fluidic actuator device.
  • a piston 13 which forms an actuator member 14, mounted linearly movable back and forth.
  • Via fluid or compressed air connections 15, 16, compressed air 17 can be introduced or discharged into a chamber 18, which forms a movement space 19 for the actuator member 14, in order to drive the piston 13.
  • a middle part 20 of the housing 12, for example made of metal, is designed like a tube and has an inner cross-section which correlates with an outer contour of the actuator member 14 and, for example, is substantially circular.
  • a bearing cover 23 and a closure cover 24 at the front and rear ends 21, 22 of the housing 12 seal the chamber 18 pressure-tight.
  • a side wall or peripheral wall 25 of the central part 20, which bounds the chamber 18 on the outside, and the particular metal lids 23, 24 seals 26, 27 are arranged, for example O-rings.
  • the covers 23, 24 are screwed by means of bolts 28 to the central part 20.
  • the bolts 28 are screwed, for example, in bead-like reinforcement and retaining webs 29 which extend in the longitudinal direction 30 of the working cylinder 10 along the outer circumference of the housing 12 and are arranged in the corner regions of the housing 12, for example, has a substantially rectangular outer contour.
  • the holding webs 29 contain, for example in the region of the end cover 24 holes 74 through which the bolts 28 are pushed through.
  • the piston 13 is screwed by means of a screw arrangement 31 to a piston rod 32.
  • an end position damping device can also be arranged in the region of the piston 13.
  • the piston rod 32 forms a Kraftabgriffsglied, which penetrates the bearing cap 23.
  • fastening means 34 for example an annular flange, arranged for attachment to actuated objects.
  • the piston rod 32 is guided on a bearing 35 of the bearing cap 23. A penetrated by the piston rod 32 seal 36 of the bearing cap 23 forms a pressure-tight closure of the chamber 18th
  • the actuator device 11 is attachable to a bracket.
  • the piston 13 is longitudinally movable in the longitudinal direction 30 between the bearing cover 23 and the end cover 24 (arrow 30 ').
  • a position measuring device 40 measures the distance 41 of the actuator member 14 relative to an end position 42 in the region of the end cover 24.
  • the position measuring device 40 operates with the aid of microwaves, for example in the range of 1 MHz to about 25 GHz, suitably about 3 to 10 GHz, which emits a microwave antenna assembly 43 with a coupling probe 44 in the movement space 19, which is at least substantially electrically on its inside is conductive and thus forms a line structure 45 for the microwaves.
  • the actuator member 14 forms a measuring object 46, which reflects the microwaves.
  • a position of the actuator element 14 remote from the end position 42 is shown in dashed lines-the phase of microwaves emitted and received by the microwave antenna arrangement 43 changes.
  • an evaluation device 47 of the position measuring device 40 can determine the position of the actuator member 14 in the movement space 19 and report, for example, to a control device (not shown) for controlling the actuator device 11, e.g. a programmable logic controller.
  • the evaluation device 47 contains, for example, a transmitting device and a receiving device for transmitting and receiving the microwaves by means of the coupling probe 44, and other components 80, e.g. a digital signal processor, a bus coupling, a transmitting and / or receiving device for wired and / or wireless transmission and reception of position signals by means of an antenna 38 to the higher-level control and the like.
  • other components 80 e.g. a digital signal processor, a bus coupling, a transmitting and / or receiving device for wired and / or wireless transmission and reception of position signals by means of an antenna 38 to the higher-level control and the like.
  • the evaluation device 47 includes, for example, a high-frequency board 48 with unspecified components and interconnects for generating or transmitting and receiving microwaves and an evaluation board 49, for example contains a bus connection.
  • the circuit boards 48, 49 are electrically connected to each other, for example with a connector cable 50.
  • a lid 51 protects the boards 48, 49, which are arranged for example in a chamber 55 of the housing 12 and the end cover 24, from environmental influences.
  • the microwave antenna arrangement 43 contains an electrically insulating or dielectric holding body 52 which, for example, has a stepped, cylindrical shape and is, for example, an electrically insulating plastic, in particular a low thermal expansion.
  • the holding body 52 holds centrally, in particular coaxially, an antenna pole body 54 of the microwave antenna arrangement 43 which is electrically conductive at least on the outside.
  • the holding body 52 and thus the microwave antenna arrangement 43 are central, in particular coaxial with the measuring or movement space 19 at a rear end wall 53 arranged the end cover 24, for example, inserted into a corresponding recess or receptacle 85 on the end wall 53, glued, screwed or fastened in any other way.
  • First pole faces of the antenna pole body 54 cooperate with second pole faces of the housing 12 / the line structure 45.
  • the antenna pole body 54 penetrates the holding body 52 and is electrically connected to the high-frequency board 48 through a line 84.
  • the electrically conductive end wall 53 and thus the housing 12 are connected via a e.g. flexible line 56 connected to the high-frequency board 48.
  • a front mushroom-like end wall 76 of the antenna pole body 54 which is arranged at the front on a central cylindrical antenna part 77, which may have, for example, an annular groove 86, protrudes toward the measuring or movement space 19 and is connected to the high-frequency circuit board by means of an electrical conductor section 78 48 connected.
  • the conductor section 78 is guided through the holding body 52 and a channel 87 of the end wall 53, expediently with insulation distance to the end wall 53, to the high-frequency board 48 and mechanically or directly coupled via the suitably flexible line 84 to the high-frequency board 48 ,
  • the front wall 76 rests on an end face 88 of a front part 81 of the holding body 52, in particular on circular segment-like projections 79.
  • the front part 81 has a larger circumference than a rear section 82 of the holding body 52, which is received in the receptacle 85.
  • the front part 81 rests on the front wall 53 at the front or projects in front of the end wall 53.
  • the microwaves go from a coaxial mode to a waveguide mode.
  • the antenna pole body 54 is, for example, a substantially metallic insert which is glued and / or welded to the holding body 52, in particular glued or welded into the receiving space 59.
  • a variant of the invention provides that the antenna pole body 54 is encapsulated with the holding body 52 in a casting process, in particular an injection molding process.
  • the position of the microwave antenna arrangement 43 relative to the housing 12 or the movement space 19, but in particular the position of the antenna pole body 54 relative to the line structure 45 with which the microwave antenna arrangement 43 cooperates, are essential for the exact position determination of the distance 41. So that these distances are maintained and thus a high measurement accuracy is achieved, are in the actuator device 11, the following measures are taken.
  • a protective cover device 60 In front of the microwave antenna arrangement, a protective cover device 60 is arranged, which protects the microwave antenna arrangement 43 against mechanical loading by the actuator member 14.
  • the protective cover device 60 includes an annular abutment portion 61 which protrudes forward of a lid-like cover portion 62 toward the movement space 19 and forms a stopper 63 for the actuator member 14.
  • the piston 13 strikes, for example, with a ring-like projection 37 on the stop 63.
  • the projection 37 may be a solid or elastic, resilient ring.
  • the stopper portion 61 forms a kind of ring which extends around the microwave antenna assembly 43 and is supported on the rear wall or rear end wall 53 of the end cover 24.
  • the cover portion 62 forms a kind of floor or false ceiling in the stop ring 64, which is integral with the stopper portion 61 in the present case.
  • a multi-part design with, for example, screwed together and / or glued components of a protective cover device according to the invention is also possible.
  • the protective cover device 60 seals the microwave antenna arrangement 43 against the pressure chamber or movement space 19 in a pressure-tight manner.
  • the cover portion 62 is integral with the stop ring 64, so that there is no pressure wave in the direction of the microwave antenna arrangement between these two parts 43 can penetrate.
  • seals 65, 66 for example O-rings between the outer periphery of the stop ring 64 and the peripheral wall 25 of the middle part 20 and a peripheral wall 67 of the end cover 24 are arranged.
  • the protective cover device 60 has, for example, receptacles 65 ', 66', for example circumferential grooves, for receiving the seals 65, 66.
  • the stop ring 64 protrudes in front of the end cover 24 and extends into the middle part 20. At its front portion, between the stop 63 and the false ceiling, which forms the cover portion 62, the stop ring 64 defines a receiving space 68 for the screw assembly 31 or an end-of-stroke damping device, not shown.
  • the protective cover device 60 and the microwave antenna arrangement there is a distance 69 into which the cover section 62 can deform, for example due to a pressure wave which causes the actuator element 14.
  • the protective cover device 60 and the microwave antenna assembly 43 are mechanically decoupled from each other and the microwave antenna assembly 43 is protected from compressive loading.
  • the protective cover device 60 includes a fluid channel 70 for connecting the chamber 18 to the compressed air connection 16, which extends through the stop ring 64, for example.
  • the microwaves in the movement space 19 can spread substantially symmetrically, the fluid channel 70 as a compensation means 71 associated with a blind channel 72, the at the fluid channel 70 opposite side of the stop ring 64 extends.
  • the blind channel 72 terminates at the peripheral wall 67, ie the peripheral wall 67 closes the blind channel 72 radially outward.
  • the compensation means 71 may also have a projection 73 instead of the blind channel 72, for example.
  • the projection 73 is eg a ring, a ring segment, a cone or the like.
  • the protective cover device 60 is made of a dielectric material, in particular a plastic with a small volume change as a function of thermal changes, e.g. from Lexan, Vectra or the like.
  • the protective cover device 60 is tuned to the radiation behavior of the microwave antenna arrangement 43, so that the microwaves emitted by the microwave antenna arrangement 43 propagate in a predetermined fashion in the line structure 45 and the movement space 19, respectively.
  • the protective cover device 60 is expediently as a whole, such as in FIG. 3b shown pre-mounted on the end cover 24, for example, inserted, glued, snapped and / or screwed.
  • the end cover 24 can be attached with the protective cover device 60 already mounted on the central part 20 as a whole module.
  • the protective cover device 60 also forms a kind of cover which prevents pressure waves from passing via the microwave antenna arrangement 43 to the evaluation device 47, which is arranged protected on the rear side of the rear wall or end wall 53 of the end cover 24.
  • a front part 90 of the protective cover device 60 has a larger diameter than a rear part 91, so that between the front and the rear part 90, 91 a stop 92, for example a Versprung, is formed. If the Protective cover device 60 is inserted into a receptacle 93 of the end cover 24, the stop 92 is located on an end face 94 of the peripheral wall 67 of the end cover 24 at. Thus, the protective cover means 60 is supported not only on the rear end wall 53 of the end cover 24, which forms the bottom of the receptacle 93, but also on the end face 94th
  • the front part 81 of the holding body 52 projecting in front of the end wall 53 is enclosed pressure-tight by the protective cover device 60 in order to prevent mechanical loading by the actuator element 14 as it approaches the microwave antenna arrangement 43.
  • the front part 81 and the end wall 76 of the antenna pole body 54 are arranged in a chamber 57 of the protective cover device 60 with the distance 69.
  • the chamber 67 is formed by the bottom-like cover portion 62 and a rear side wall 58, which is a part of the stopper portion 61.
  • FIG. 6 An in FIG. 6 shown pneumatic working cylinder 10 ', that is, an actuator device 11, is substantially equal to the working cylinder 10.
  • pneumatic working cylinder 10 ' that is, an actuator device 11
  • FIG. 6 identical or similar components are shown as in the previous embodiment, the same reference numerals or partially with an index 'changed indexes are used.
  • the protective cover device projects less far in the direction of the measuring or movement space 19 '. It contains no fluid channels, so that no compensation means are required.
  • the protective cover device 60 ' is completely supported on a front end wall 53' of a closure lid 24 '.
  • a stop ring 64 ' which forms a stop section 61', projects in the direction of the movement space 19 '. and forms a stop 63 'for the piston 14'.
  • a cover section 62 ' is set back behind the stop 63' and rests with an edge region 95 on the end wall 53 '.
  • a receptacle 85 'of the end cover 24' for the microwave antenna assembly 43 is lower relative to the end wall 53 ', so that the microwave antenna assembly 43 is set back relative to the end wall 53' and a distance 69 'to the protective cover floor or cover 62nd ' having.
  • the distance 69 'into the cover 62' may deform, for example, as a result of a pressure wave caused by the actuator member 14 '.
  • the coupling board 49 ' is connected via a line 96 to a control device, not shown, for the working cylinder 10' wired, which sends position measuring signals on the position of the Aktorglieds 14 'in the movement space 19'.
  • the distance 69 ' may also be at least partially filled with a resilient, in particular elastic material.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Remote Sensing (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Health & Medical Sciences (AREA)
  • Actuator (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Radar Systems Or Details Thereof (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)

Claims (16)

  1. Dispositif d'actionnement , avec un organe actionneur (14, 14') mobile de façon linéaire dans un espace de mouvement (19, 19') d'un boîtier d'actionneur (12, 12'), avec un dispositif (40) de mesure de position à micro-ondes pour relever la position de l'organe actionneur dans l'espace de mouvement (19, 19'), dans lequel l'organe actionneur, quand il se rapproche du dispositif de mesure de position, produit une onde de pression agissant sur le dispositif de mesure de position (40), avec un système d'antenne (43) à micro-ondes haute fréquence pour émettre et recevoir des micro-ondes, qui sont réfléchies au moins partiellement par l'organe actionneur (14, 14'), dans lequel le dispositif d'actionnement présente un dispositif diélectrique formant capot de protection (60, 60'), placé devant le système d'antenne à micro-ondes pour protéger mécaniquement le système d'antenne à micro-ondes, dans lequel le dispositif (60, 60') formant capot de protection forme une butée de fin de course (63, 63') pour l'organe actionneur (14, 14') et une distance (69) est présente entre le dispositif formant capot de protection et le système d'antenne à micro-ondes pour le découplage mécanique du dispositif (60, 60') formant capot de protection par rapport au système d'antenne à micro-ondes, distance dans laquelle le dispositif formant capot de protection peut se déformer par suite de l'onde de pression, caractérisé en ce que le dispositif (60, 60') formant capot de protection présente au moins une section de butée (61, 61') qui forme une butée de fin de course pour l'organe actionneur (14, 14') et forme saillie en direction de l'espace de mouvement (19, 19') devant une section de recouvrement (62, 62') du dispositif formant capot de protection afin de protéger le système d'antenne à micro-ondes (43), et en ce que la section de butée (61, 61') au nombre d'au moins une s'appuie contre une paroi arrière et/ou une paroi latérale (67) du boîtier (12, 12') et apporte de l'énergie mécanique latéralement au niveau du système d'antenne à micro-ondes (43).
  2. Dispositif d'actionnement selon la revendication 1, caractérisé en ce que le dispositif (60, 60') formant capot de protection est relié de manière hermétique à la pression avec au moins une paroi (25, 67) du boîtier (12, 12'), de sorte que le système d'antenne à micro-ondes (43) est protégé de manière hermétique à la pression.
  3. Dispositif d'actionnement selon la revendication 1 ou 2, caractérisé en ce que le dispositif (60, 60') formant capot de protection est adapté au comportement d'émission et/ou au comportement de réception du système d'antenne à micro-ondes (43).
  4. Dispositif d'actionnement selon l'une des revendications précédentes, caractérisé en ce que le dispositif (60, 60') formant capot de protection s'appuie contre une paroi latérale (25, 67) du boîtier (12, 12'), en particulier une paroi latérale (67) d'un couvercle et/ou une paroi latérale (25) de l'espace de mouvement (19, 19').
  5. Dispositif d'actionnement selon la revendication 4, caractérisé en ce qu'entre la paroi latérale (25, 67) du boîtier (12, 12') et le dispositif (60, 60') formant capot de protection est placé au moins un joint d'étanchéité (65, 66).
  6. Dispositif d'actionnement selon l'une des revendications précédentes, caractérisé en ce que la distance (69) entre le dispositif (60, 60') formant capot de protection et le système d'antenne à micro-ondes (43) est formée par le dispositif formant capot de protection, en particulier par une chambre (57) dans le dispositif formant capot de protection.
  7. Dispositif d'actionnement selon l'une des revendications précédentes, caractérisé en ce que le dispositif (60, 60') formant capot de protection forme saillie dans l'espace de mouvement (19, 19').
  8. Dispositif d'actionnement selon l'une des revendications précédentes, caractérisé en ce que la section de butée (61, 61') au nombre d'au moins une est pour l'essentiel annulaire.
  9. Dispositif d'actionnement selon l'une des revendications précédentes, caractérisé en ce que le système d'antenne à micro-ondes (43) est relié à une paroi arrière du boîtier d'actionneur (12, 12'), en particulier à un couvercle du boîtier d'actionneur (12, 12').
  10. Dispositif d'actionnement selon l'une des revendications précédentes, caractérisé en ce que le boîtier d'actionneur (12, 12'), en particulier un couvercle du boîtier d'actionneur, forme un composant du système d'antenne à micro-ondes (43).
  11. Dispositif d'actionnement selon l'une des revendications précédentes, caractérisé en ce que le dispositif (60,60') formant capot de protection forme un composant du boîtier d'actionneur (12,12'), en particulier d'un couvercle du boîtier d'actionneur.
  12. Dispositif d'actionnement selon l'une des revendications précédentes, caractérisé en ce que le dispositif (60, 60') formant capot de protection est vissé et/ou collé et/ou encliqueté dans le boîtier d'actionneur (12, 12') et/ou est surmoulé sur le boîtier d'actionneur (12, 12'), en particulier sur un couvercle (24) du boîtier d'actionneur (12, 12').
  13. Dispositif d'actionnement selon l'une des revendications précédentes, caractérisé en ce qu'il forme un entraînement par fluide, en particulier un vérin de travail pneumatique (10, 10'), et en ce que l'organe actionneur (14, 14') est formé par un piston (13, 13').
  14. Dispositif d'actionnement selon l'une des revendications 1 à 12, caractérisé en ce qu'il forme une soupape pour fluide, en particulier une soupape pneumatique, et en ce que l'organe actionneur (14, 14') est prévu pour entraîner l'obturateur de soupape.
  15. Dispositif d'actionnement selon la revendication 13 ou 14, caractérisé en ce que le dispositif (60, 60') formant capot de protection présente au moins un canal de fluide (70), relié à l'espace de mouvement (19, 19').
  16. Dispositif d'actionnement selon la revendication 15, caractérisé en ce qu'au canal de fluide (70) au nombre d'au moins un est associé un moyen de compensation (71), en particulier un évidement correspondant ou un canal borgne (72), de sorte que les micro-ondes peuvent se diffuser de manière sensiblement symétrique dans l'espace de mouvement (19, 19').
EP05017445A 2005-08-11 2005-08-11 Dispositif d'actionnement avec un capteur de position à micro-ondes. Not-in-force EP1752665B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
AT05017445T ATE430881T1 (de) 2005-08-11 2005-08-11 Aktorvorrichtung mit einer mikrowellen- positionsmesseinrichtung
DE502005007242T DE502005007242D1 (de) 2005-08-11 2005-08-11 Aktorvorrichtung mit einer Mikrowellen-Positionsmesseinrichtung
EP05017445A EP1752665B1 (fr) 2005-08-11 2005-08-11 Dispositif d'actionnement avec un capteur de position à micro-ondes.
US11/492,565 US7451684B2 (en) 2005-08-11 2006-07-25 Actuator device with a microwave position detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05017445A EP1752665B1 (fr) 2005-08-11 2005-08-11 Dispositif d'actionnement avec un capteur de position à micro-ondes.

Publications (2)

Publication Number Publication Date
EP1752665A1 EP1752665A1 (fr) 2007-02-14
EP1752665B1 true EP1752665B1 (fr) 2009-05-06

Family

ID=35466072

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05017445A Not-in-force EP1752665B1 (fr) 2005-08-11 2005-08-11 Dispositif d'actionnement avec un capteur de position à micro-ondes.

Country Status (4)

Country Link
US (1) US7451684B2 (fr)
EP (1) EP1752665B1 (fr)
AT (1) ATE430881T1 (fr)
DE (1) DE502005007242D1 (fr)

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EP2375085A1 (fr) 2010-04-12 2011-10-12 Samson Aktiengesellschaft Mécanisme de commande pour le réglage d'un actionneur et procédé d'établissement du réglage de l'actionneur
EP2937593B1 (fr) 2014-03-31 2019-05-01 Steinel Normalien AG Vérin à gaz

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USD570236S1 (en) * 2005-07-21 2008-06-03 Curtis Roys Cycle indicator for fluid distribution systems
US7461670B1 (en) * 2004-07-23 2008-12-09 Curtis Roys Cycle indicator for fluid distribution systems
ATE381031T1 (de) * 2005-08-11 2007-12-15 Festo Ag & Co Abstandsmessvorrichtung mit einer mikrowellen- antennenanordnung
DE102007009094B4 (de) * 2007-02-24 2009-11-26 Festo Ag & Co. Kg Aktor mit Positionsmessvorrichtung
DE502007002623D1 (de) * 2007-07-20 2010-03-04 Festo Ag & Co Kg Verfahren und Messvorrichtung zur Erfassung der Kolbenposition eines Kolbens in einem fluidischen Zylinder mittels einer Mikrowellen-Koppelsonde
DE102007035252A1 (de) * 2007-07-27 2009-02-12 Truma Gerätetechnik GmbH & Co. KG Vorrichtung zum Bestimmen der Position eines Kolbens in einem Zylinder
WO2009021755A2 (fr) * 2007-08-16 2009-02-19 Astyx Gmbh Double tige de piston
DE102008048673A1 (de) * 2008-09-24 2010-04-08 Festo Ag & Co. Kg Fluidische Zylinderanordnung mit einer Mikrowellen-Messvorrichtung zur Erfassung der Kolbenposition
DE102011008381A1 (de) * 2011-01-12 2012-07-12 Liebherr-Elektronik Gmbh Kolben-Zylinder-Einheit mit Vorrichtung zur Positionsbestimmung
US9285206B1 (en) * 2012-02-07 2016-03-15 Pile Dynamics, Inc. Measurement device for pile displacement and method for use of the same
DE102013018342A1 (de) * 2013-10-31 2015-04-30 Liebherr-Elektronik Gmbh Kolbenzylindereinheit mit Auswerteeinheit zur Positionsbestimmung des Kolbens
TWI612310B (zh) * 2016-12-28 2018-01-21 致茂電子股份有限公司 吸附式測試裝置
DE102018212789A1 (de) * 2018-07-31 2020-02-06 Astyx Gmbh Vorrichtung Verbindungsstruktur zwischen Auswerteelektronik und Sonde in Zylindersystemen
DE102019122121A1 (de) * 2019-08-16 2021-02-18 Precision Nanosensors Inc Kolben-Zylinder-Einheit mit radial verbauter Kolbenpositionserfassungseinheit
DE102023127894A1 (de) * 2023-10-12 2025-04-17 Vega Grieshaber Kg Bodendeckel mit einem Radarsensor

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DE19833220A1 (de) * 1997-12-15 1999-06-17 Mikrowellen Technologie Und Se Abstandsmeßvorrichtung und Verfahren zur Bestimmung eines Abstandes
EP1040316B1 (fr) * 1997-12-15 2007-10-03 Astyx GmbH Dispositif de mesure de distance et procede pour determiner une distance
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2375085A1 (fr) 2010-04-12 2011-10-12 Samson Aktiengesellschaft Mécanisme de commande pour le réglage d'un actionneur et procédé d'établissement du réglage de l'actionneur
DE102010014668A1 (de) 2010-04-12 2011-10-13 Samson Aktiengesellschaft Stellantrieb zum Stellen eines Stellglieds und Verfahren zum Erfassen der Stellung des Stellglieds
US8869675B2 (en) 2010-04-12 2014-10-28 Samson Aktiengesellschaft Actuating drive for positioning a final control element and method for capturing a position of the final control element
EP2937593B1 (fr) 2014-03-31 2019-05-01 Steinel Normalien AG Vérin à gaz

Also Published As

Publication number Publication date
DE502005007242D1 (de) 2009-06-18
EP1752665A1 (fr) 2007-02-14
ATE430881T1 (de) 2009-05-15
US20070035310A1 (en) 2007-02-15
US7451684B2 (en) 2008-11-18

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