EP1356664A4 - Cmos-compatible three-dimensional image sensing using quantum efficiency modulation - Google Patents
Cmos-compatible three-dimensional image sensing using quantum efficiency modulationInfo
- Publication number
- EP1356664A4 EP1356664A4 EP01987386A EP01987386A EP1356664A4 EP 1356664 A4 EP1356664 A4 EP 1356664A4 EP 01987386 A EP01987386 A EP 01987386A EP 01987386 A EP01987386 A EP 01987386A EP 1356664 A4 EP1356664 A4 EP 1356664A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- cmos
- compatible
- dimensional image
- image sensing
- quantum efficiency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/491—Details of non-pulse systems
- G01S7/4912—Receivers
- G01S7/4915—Time delay measurement, e.g. operational details for pixel components; Phase measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
- G01S17/36—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated with phase comparison between the received signal and the contemporaneously transmitted signal
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
- G01S17/894—3D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/491—Details of non-pulse systems
- G01S7/4912—Receivers
- G01S7/4913—Circuits for detection, sampling, integration or read-out
- G01S7/4914—Circuits for detection, sampling, integration or read-out of detector arrays, e.g. charge-transfer gates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/491—Details of non-pulse systems
- G01S7/493—Extracting wanted echo signals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/803—Pixels having integrated switching, control, storage or amplification elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Electromagnetism (AREA)
- Optical Radar Systems And Details Thereof (AREA)
- Measurement Of Optical Distance (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US25487300P | 2000-12-11 | 2000-12-11 | |
US254873P | 2000-12-11 | ||
US876373 | 2001-06-06 | ||
US09/876,373 US6587186B2 (en) | 2000-06-06 | 2001-06-06 | CMOS-compatible three-dimensional image sensing using reduced peak energy |
PCT/US2001/048219 WO2002049339A2 (en) | 2000-12-11 | 2001-12-11 | Cmos-compatible three-dimensional image sensing using quantum efficiency modulation |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1356664A2 EP1356664A2 (en) | 2003-10-29 |
EP1356664A4 true EP1356664A4 (en) | 2009-07-22 |
Family
ID=26944292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01987386A Ceased EP1356664A4 (en) | 2000-12-11 | 2001-12-11 | Cmos-compatible three-dimensional image sensing using quantum efficiency modulation |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1356664A4 (en) |
JP (1) | JP4533582B2 (en) |
AU (1) | AU2002239608A1 (en) |
WO (1) | WO2002049339A2 (en) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2003281107A1 (en) * | 2002-07-15 | 2004-02-02 | Matsushita Electric Works, Ltd. | Light receiving device with controllable sensitivity and spatial information detecting apparatus using the same |
WO2004093318A2 (en) * | 2003-04-11 | 2004-10-28 | Canesta, Inc. | Method and system to differentially enhance sensor dynamic range |
JP4280822B2 (en) * | 2004-02-18 | 2009-06-17 | 国立大学法人静岡大学 | Optical time-of-flight distance sensor |
US7126100B1 (en) * | 2004-05-21 | 2006-10-24 | Kla-Tencor Technologies Corporation | System and method for sensing using adjustable modulation transfer function (MTF) |
DE102004037137B4 (en) * | 2004-07-30 | 2017-02-09 | PMD Technologie GmbH | Method and device for distance measurement |
US7362419B2 (en) | 2004-09-17 | 2008-04-22 | Matsushita Electric Works, Ltd. | Range image sensor |
JP2006337286A (en) * | 2005-06-03 | 2006-12-14 | Ricoh Co Ltd | Shape-measuring device |
JP4944579B2 (en) * | 2005-11-14 | 2012-06-06 | パナソニック株式会社 | Spatial information detection device |
NL1032435C2 (en) * | 2006-09-05 | 2008-03-06 | Maasland Nv | Device for automatically milking a dairy animal. |
JP4757779B2 (en) * | 2006-11-15 | 2011-08-24 | 浜松ホトニクス株式会社 | Distance image sensor |
JP5295511B2 (en) * | 2007-03-23 | 2013-09-18 | 富士フイルム株式会社 | Ranging device and ranging method |
JP4831760B2 (en) * | 2007-03-29 | 2011-12-07 | 日本放送協会 | 3D information detection method and apparatus |
US8629976B2 (en) * | 2007-10-02 | 2014-01-14 | Microsoft Corporation | Methods and systems for hierarchical de-aliasing time-of-flight (TOF) systems |
EP2208239A1 (en) | 2007-10-11 | 2010-07-21 | Jie Yao | Photo-detector array and semiconductor image intensifier |
WO2010083263A1 (en) | 2009-01-15 | 2010-07-22 | Jie Yao | Mesa heterojunction phototransistor and method for making same |
DE102013209161B4 (en) | 2013-05-16 | 2025-03-13 | pmdtechnologies ag | Light transit time sensor |
JP6386777B2 (en) * | 2014-05-08 | 2018-09-05 | 浜松ホトニクス株式会社 | Distance image sensor |
DE102014211071A1 (en) * | 2014-06-11 | 2015-12-17 | Robert Bosch Gmbh | Vehicle lidar system |
US20160225812A1 (en) | 2015-02-03 | 2016-08-04 | Microsoft Technology Licensing, Llc | Cmos depth image sensor with integrated shallow trench isolation structures |
EP3602109B1 (en) * | 2017-03-19 | 2021-01-20 | Kovilta Oy | Systems and methods for modulated image capture |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19704496A1 (en) * | 1996-09-05 | 1998-03-12 | Rudolf Prof Dr Ing Schwarte | Method and device for determining the phase and / or amplitude information of an electromagnetic wave |
US5754280A (en) * | 1995-05-23 | 1998-05-19 | Olympus Optical Co., Ltd. | Two-dimensional rangefinding sensor |
US5859462A (en) * | 1997-04-11 | 1999-01-12 | Eastman Kodak Company | Photogenerated carrier collection of a solid state image sensor array |
DE19821974A1 (en) * | 1998-05-18 | 1999-11-25 | Rudolf Schwarte | Device and method for detecting the phase and amplitude of electromagnetic waves |
Family Cites Families (25)
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US4764982A (en) * | 1962-07-02 | 1988-08-16 | Pfund Charles E | Secure communication system |
US4277167A (en) * | 1976-08-25 | 1981-07-07 | The United States Of America As Represented By The Secretary Of The Navy | Depth mapping system |
EP0106514B1 (en) * | 1982-09-23 | 1989-03-15 | The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and | Infrared detectors |
JPH0224590A (en) * | 1988-07-13 | 1990-01-26 | Fujitsu Ltd | Amplitude modulation distance measuring device |
JP2847289B2 (en) * | 1988-10-19 | 1999-01-13 | キヤノン株式会社 | Distance shape measuring device |
US5446529A (en) * | 1992-03-23 | 1995-08-29 | Advanced Scientific Concepts, Inc. | 3D imaging underwater laser radar |
GB2265514B (en) * | 1992-03-28 | 1995-08-16 | Marconi Gec Ltd | A receiver-transmitter for a target identification system |
JP3307730B2 (en) * | 1993-08-30 | 2002-07-24 | 浜松ホトニクス株式会社 | Optical measuring device |
JPH07110381A (en) * | 1993-10-07 | 1995-04-25 | Wacom Co Ltd | Distance camera device |
JP3305083B2 (en) * | 1993-12-22 | 2002-07-22 | キヤノン株式会社 | Optical radar |
DE4440613C1 (en) * | 1994-11-14 | 1996-07-25 | Leica Ag | Device and method for the detection and demodulation of an intensity-modulated radiation field |
US5682229A (en) * | 1995-04-14 | 1997-10-28 | Schwartz Electro-Optics, Inc. | Laser range camera |
DE69635891T2 (en) * | 1995-06-22 | 2006-12-14 | 3Dv Systems Ltd. | IMPROVED OPTICAL CAMERA FOR DISTANCE MEASUREMENT |
IL116438A (en) * | 1995-12-18 | 2000-01-31 | Israel State | Laser sensor |
US5831719A (en) * | 1996-04-12 | 1998-11-03 | Holometrics, Inc. | Laser scanning system |
US5892575A (en) * | 1996-05-10 | 1999-04-06 | Massachusetts Institute Of Technology | Method and apparatus for imaging a scene using a light detector operating in non-linear geiger-mode |
JP4060365B2 (en) * | 1996-09-05 | 2008-03-12 | ルドルフ シュヴァルト | Method and apparatus for examining phase information and / or amplitude information of electromagnetic waves |
DE19643287A1 (en) * | 1996-10-21 | 1998-04-23 | Leica Ag | Method and device for calibrating distance measuring devices |
US5953110A (en) * | 1998-04-23 | 1999-09-14 | H.N. Burns Engineering Corporation | Multichannel laser radar |
FR2780163B1 (en) * | 1998-06-18 | 2000-08-11 | Agence Spatiale Europeenne | INCOHERENT LASER DOPPLER TELESCOPY SYSTEM |
JP2000121332A (en) * | 1998-10-14 | 2000-04-28 | Fuji Xerox Co Ltd | Three-dimensional shape measuring apparatus |
US6137566A (en) * | 1999-02-24 | 2000-10-24 | Eoo, Inc. | Method and apparatus for signal processing in a laser radar receiver |
US6323942B1 (en) * | 1999-04-30 | 2001-11-27 | Canesta, Inc. | CMOS-compatible three-dimensional image sensor IC |
JP2001289951A (en) * | 2000-04-11 | 2001-10-19 | Yokogawa Electric Corp | Distance measuring device |
WO2002027352A1 (en) * | 2000-09-27 | 2002-04-04 | Kurt Giger | System and method for signal acquisition in a distance meter |
-
2001
- 2001-12-11 EP EP01987386A patent/EP1356664A4/en not_active Ceased
- 2001-12-11 WO PCT/US2001/048219 patent/WO2002049339A2/en active Application Filing
- 2001-12-11 JP JP2002550710A patent/JP4533582B2/en not_active Expired - Lifetime
- 2001-12-11 AU AU2002239608A patent/AU2002239608A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5754280A (en) * | 1995-05-23 | 1998-05-19 | Olympus Optical Co., Ltd. | Two-dimensional rangefinding sensor |
DE19704496A1 (en) * | 1996-09-05 | 1998-03-12 | Rudolf Prof Dr Ing Schwarte | Method and device for determining the phase and / or amplitude information of an electromagnetic wave |
US5859462A (en) * | 1997-04-11 | 1999-01-12 | Eastman Kodak Company | Photogenerated carrier collection of a solid state image sensor array |
DE19821974A1 (en) * | 1998-05-18 | 1999-11-25 | Rudolf Schwarte | Device and method for detecting the phase and amplitude of electromagnetic waves |
Non-Patent Citations (1)
Title |
---|
See also references of WO0249339A2 * |
Also Published As
Publication number | Publication date |
---|---|
WO2002049339A2 (en) | 2002-06-20 |
WO2002049339A3 (en) | 2003-02-27 |
JP4533582B2 (en) | 2010-09-01 |
EP1356664A2 (en) | 2003-10-29 |
JP2004525351A (en) | 2004-08-19 |
AU2002239608A1 (en) | 2002-06-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
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17P | Request for examination filed |
Effective date: 20030710 |
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AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR |
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AX | Request for extension of the european patent |
Extension state: AL LT LV MK RO SI |
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RIC1 | Information provided on ipc code assigned before grant |
Ipc: 7G 03B 13/00 B Ipc: 7H 01L 31/00 B Ipc: 7G 01T 1/24 B Ipc: 7G 01C 3/08 A |
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A4 | Supplementary search report drawn up and despatched |
Effective date: 20090622 |
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RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 27/146 20060101ALI20090616BHEP Ipc: G01S 17/36 20060101ALI20090616BHEP Ipc: G01S 7/491 20060101ALI20090616BHEP Ipc: G01S 17/89 20060101AFI20090616BHEP |
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17Q | First examination report despatched |
Effective date: 20091207 |
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RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: MICROSOFT CORPORATION |
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REG | Reference to a national code |
Ref country code: DE Ref legal event code: R003 |
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STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN REFUSED |
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18R | Application refused |
Effective date: 20150102 |