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EP1356664A4 - Cmos-compatible three-dimensional image sensing using quantum efficiency modulation - Google Patents

Cmos-compatible three-dimensional image sensing using quantum efficiency modulation

Info

Publication number
EP1356664A4
EP1356664A4 EP01987386A EP01987386A EP1356664A4 EP 1356664 A4 EP1356664 A4 EP 1356664A4 EP 01987386 A EP01987386 A EP 01987386A EP 01987386 A EP01987386 A EP 01987386A EP 1356664 A4 EP1356664 A4 EP 1356664A4
Authority
EP
European Patent Office
Prior art keywords
cmos
compatible
dimensional image
image sensing
quantum efficiency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP01987386A
Other languages
German (de)
French (fr)
Other versions
EP1356664A2 (en
Inventor
Cyrus Bamji
Edoardo Charbon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Microsoft Corp
Original Assignee
Canesta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/876,373 external-priority patent/US6587186B2/en
Application filed by Canesta Inc filed Critical Canesta Inc
Publication of EP1356664A2 publication Critical patent/EP1356664A2/en
Publication of EP1356664A4 publication Critical patent/EP1356664A4/en
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491Details of non-pulse systems
    • G01S7/4912Receivers
    • G01S7/4915Time delay measurement, e.g. operational details for pixel components; Phase measurement
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only
    • G01S17/32Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G01S17/36Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated with phase comparison between the received signal and the contemporaneously transmitted signal
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88Lidar systems specially adapted for specific applications
    • G01S17/89Lidar systems specially adapted for specific applications for mapping or imaging
    • G01S17/8943D imaging with simultaneous measurement of time-of-flight at a 2D array of receiver pixels, e.g. time-of-flight cameras or flash lidar
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491Details of non-pulse systems
    • G01S7/4912Receivers
    • G01S7/4913Circuits for detection, sampling, integration or read-out
    • G01S7/4914Circuits for detection, sampling, integration or read-out of detector arrays, e.g. charge-transfer gates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/491Details of non-pulse systems
    • G01S7/493Extracting wanted echo signals
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10Integrated devices
    • H10F39/12Image sensors
    • H10F39/18Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/803Pixels having integrated switching, control, storage or amplification elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80Constructional details of image sensors
    • H10F39/806Optical elements or arrangements associated with the image sensors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Measurement Of Optical Distance (AREA)
  • Length Measuring Devices By Optical Means (AREA)
EP01987386A 2000-12-11 2001-12-11 Cmos-compatible three-dimensional image sensing using quantum efficiency modulation Ceased EP1356664A4 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US25487300P 2000-12-11 2000-12-11
US254873P 2000-12-11
US876373 2001-06-06
US09/876,373 US6587186B2 (en) 2000-06-06 2001-06-06 CMOS-compatible three-dimensional image sensing using reduced peak energy
PCT/US2001/048219 WO2002049339A2 (en) 2000-12-11 2001-12-11 Cmos-compatible three-dimensional image sensing using quantum efficiency modulation

Publications (2)

Publication Number Publication Date
EP1356664A2 EP1356664A2 (en) 2003-10-29
EP1356664A4 true EP1356664A4 (en) 2009-07-22

Family

ID=26944292

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01987386A Ceased EP1356664A4 (en) 2000-12-11 2001-12-11 Cmos-compatible three-dimensional image sensing using quantum efficiency modulation

Country Status (4)

Country Link
EP (1) EP1356664A4 (en)
JP (1) JP4533582B2 (en)
AU (1) AU2002239608A1 (en)
WO (1) WO2002049339A2 (en)

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WO2004093318A2 (en) * 2003-04-11 2004-10-28 Canesta, Inc. Method and system to differentially enhance sensor dynamic range
JP4280822B2 (en) * 2004-02-18 2009-06-17 国立大学法人静岡大学 Optical time-of-flight distance sensor
US7126100B1 (en) * 2004-05-21 2006-10-24 Kla-Tencor Technologies Corporation System and method for sensing using adjustable modulation transfer function (MTF)
DE102004037137B4 (en) * 2004-07-30 2017-02-09 PMD Technologie GmbH Method and device for distance measurement
US7362419B2 (en) 2004-09-17 2008-04-22 Matsushita Electric Works, Ltd. Range image sensor
JP2006337286A (en) * 2005-06-03 2006-12-14 Ricoh Co Ltd Shape-measuring device
JP4944579B2 (en) * 2005-11-14 2012-06-06 パナソニック株式会社 Spatial information detection device
NL1032435C2 (en) * 2006-09-05 2008-03-06 Maasland Nv Device for automatically milking a dairy animal.
JP4757779B2 (en) * 2006-11-15 2011-08-24 浜松ホトニクス株式会社 Distance image sensor
JP5295511B2 (en) * 2007-03-23 2013-09-18 富士フイルム株式会社 Ranging device and ranging method
JP4831760B2 (en) * 2007-03-29 2011-12-07 日本放送協会 3D information detection method and apparatus
US8629976B2 (en) * 2007-10-02 2014-01-14 Microsoft Corporation Methods and systems for hierarchical de-aliasing time-of-flight (TOF) systems
EP2208239A1 (en) 2007-10-11 2010-07-21 Jie Yao Photo-detector array and semiconductor image intensifier
WO2010083263A1 (en) 2009-01-15 2010-07-22 Jie Yao Mesa heterojunction phototransistor and method for making same
DE102013209161B4 (en) 2013-05-16 2025-03-13 pmdtechnologies ag Light transit time sensor
JP6386777B2 (en) * 2014-05-08 2018-09-05 浜松ホトニクス株式会社 Distance image sensor
DE102014211071A1 (en) * 2014-06-11 2015-12-17 Robert Bosch Gmbh Vehicle lidar system
US20160225812A1 (en) 2015-02-03 2016-08-04 Microsoft Technology Licensing, Llc Cmos depth image sensor with integrated shallow trench isolation structures
EP3602109B1 (en) * 2017-03-19 2021-01-20 Kovilta Oy Systems and methods for modulated image capture

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US5754280A (en) * 1995-05-23 1998-05-19 Olympus Optical Co., Ltd. Two-dimensional rangefinding sensor
US5859462A (en) * 1997-04-11 1999-01-12 Eastman Kodak Company Photogenerated carrier collection of a solid state image sensor array
DE19821974A1 (en) * 1998-05-18 1999-11-25 Rudolf Schwarte Device and method for detecting the phase and amplitude of electromagnetic waves

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DE19704496A1 (en) * 1996-09-05 1998-03-12 Rudolf Prof Dr Ing Schwarte Method and device for determining the phase and / or amplitude information of an electromagnetic wave
US5859462A (en) * 1997-04-11 1999-01-12 Eastman Kodak Company Photogenerated carrier collection of a solid state image sensor array
DE19821974A1 (en) * 1998-05-18 1999-11-25 Rudolf Schwarte Device and method for detecting the phase and amplitude of electromagnetic waves

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Title
See also references of WO0249339A2 *

Also Published As

Publication number Publication date
WO2002049339A2 (en) 2002-06-20
WO2002049339A3 (en) 2003-02-27
JP4533582B2 (en) 2010-09-01
EP1356664A2 (en) 2003-10-29
JP2004525351A (en) 2004-08-19
AU2002239608A1 (en) 2002-06-24

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