AU2003265469A1 - Using scanning probe microscope topographic data to repair photomask defect using charged particle beams - Google Patents

Using scanning probe microscope topographic data to repair photomask defect using charged particle beams

Info

Publication number: AU2003265469A1
Authority: AU; Australia
Prior art keywords: repair; charged particle; scanning probe; probe microscope; particle beams
Prior art date: 2002-08-08
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2003265469A

Other versions

AU2003265469A8 (en

Inventor

David C. Ferranti

Christian R. Musil

Valery Ray

Gerald Smith

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

FEI Co

Original Assignee

FEI Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-08-08

Filing date

2003-08-08

Publication date

2004-02-25

2003-08-07 Priority claimed from US10/636,309 external-priority patent/US20040121069A1/en

2003-08-08 Application filed by FEI Co filed Critical FEI Co

2004-02-25 Publication of AU2003265469A8 publication Critical patent/AU2003265469A8/en

2004-02-25 Publication of AU2003265469A1 publication Critical patent/AU2003265469A1/en

Status Abandoned legal-status Critical Current

Links

AU2003265469A 2002-08-08 2003-08-08 Using scanning probe microscope topographic data to repair photomask defect using charged particle beams Abandoned AU2003265469A1 (en)

Applications Claiming Priority (6)

Application Number	Priority Date	Filing Date	Title
US63630902A	2002-08-08	2002-08-08
US40201002P	2002-08-08	2002-08-08
US60/402,010		2002-08-08
US10/636,309		2003-08-07
US10/636,309 US20040121069A1 (en)	2002-08-08	2003-08-07	Repairing defects on photomasks using a charged particle beam and topographical data from a scanning probe microscope
PCT/US2003/025801 WO2004015496A2 (en)	2002-08-08	2003-08-08	Using scanning probe microscope topographic data to repair photomask defect using charged particle beams

Publications (2)

Publication Number	Publication Date
AU2003265469A8 AU2003265469A8 (en)	2004-02-25
AU2003265469A1 true AU2003265469A1 (en)	2004-02-25

Family

ID=34198894

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2003265469A Abandoned AU2003265469A1 (en)	2002-08-08	2003-08-08	Using scanning probe microscope topographic data to repair photomask defect using charged particle beams

Country Status (1)

Country	Link
AU (1)	AU2003265469A1 (en)

2003
- 2003-08-08 AU AU2003265469A patent/AU2003265469A1/en not_active Abandoned

Also Published As

Publication number	Publication date
AU2003265469A8 (en)	2004-02-25

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Legal Events

Date	Code	Title	Description
2005-06-09	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase