AU2002368165A1 - Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism - Google Patents

Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism

Info

Publication number: AU2002368165A1
Authority: AU; Australia
Prior art keywords: microfabricated; double; latch mechanism; throw relay; electrostatic latch
Prior art date: 2002-08-08
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2002368165A

Inventor

Peter D. Bogdanoff

Daniel J. Hyman

Mark K. Hyman

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

XCOM Wireless Inc

Original Assignee

XCOM Wireless Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-08-08

Filing date

2002-08-08

Publication date

2004-02-25

2002-08-08 Application filed by XCOM Wireless Inc filed Critical XCOM Wireless Inc

2004-02-25 Publication of AU2002368165A1 publication Critical patent/AU2002368165A1/en

Status Abandoned legal-status Critical Current

Links

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H57/00—Electrostrictive relays; Piezoelectric relays
- H01H2057/006—Micromechanical piezoelectric relay
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H2061/006—Micromechanical thermal relay
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H57/00—Electrostrictive relays; Piezoelectric relays
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H61/00—Electrothermal relays
- H01H61/02—Electrothermal relays wherein the thermally-sensitive member is heated indirectly, e.g. resistively, inductively

Landscapes

Physics & Mathematics (AREA)
Electromagnetism (AREA)
Micromachines (AREA)
Thermally Actuated Switches (AREA)

AU2002368165A 2002-08-08 2002-08-08 Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism Abandoned AU2002368165A1 (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
PCT/US2002/025109 WO2004015728A1 (en)	2002-08-08	2002-08-08	Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism

Publications (1)

Publication Number	Publication Date
AU2002368165A1 true AU2002368165A1 (en)	2004-02-25

Family

ID=31713788

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2002368165A Abandoned AU2002368165A1 (en)	2002-08-08	2002-08-08	Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism

Country Status (4)

Country	Link
EP (1)	EP1527465A1 (en)
JP (1)	JP2005536013A (en)
AU (1)	AU2002368165A1 (en)
WO (1)	WO2004015728A1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2006289520A (en) *	2005-04-06	2006-10-26	Toshiba Corp	Semiconductor device using MEMS technology
KR100787997B1 (en)	2006-04-06	2007-12-21	송건화	Method for manufacturing piezoelectric bimorph actuator for semiconductor device lead wire clamping
US8063456B2 (en) *	2006-09-12	2011-11-22	Alcatel Lucent	Mechanical switch with a curved bilayer
US7473859B2 (en) *	2007-01-12	2009-01-06	General Electric Company	Gating voltage control system and method for electrostatically actuating a micro-electromechanical device
JP5468242B2 (en) *	2008-11-21	2014-04-09	株式会社東芝	MEMS package and method for manufacturing MEMS package
US8375538B2 (en) *	2009-03-27	2013-02-19	Ngk Insulators, Ltd.	Method for manufacturing piezoelectric actuator
US8576029B2 (en) *	2010-06-17	2013-11-05	General Electric Company	MEMS switching array having a substrate arranged to conduct switching current
DE102014202763B4 (en)	2014-02-14	2016-11-10	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.	Micro-electro-mechanical system and method of making same
US9437911B1 (en) *	2015-05-21	2016-09-06	Harris Corporation	Compliant high speed interconnects
EP3378080B1 (en) *	2015-11-16	2022-11-23	Qorvo US, Inc.	Mems device and method for fabricating a mems device
DE102019211460A1 (en)	2019-07-31	2021-02-04	Siemens Aktiengesellschaft	Arrangement of MEMS switches
US11615924B2 (en) *	2020-10-25	2023-03-28	AAC Technologies Pte. Ltd.	MEMS switch
KR20220056029A (en)	2020-10-27	2022-05-04	주식회사 엘지에너지솔루션	Relay switch device with integrated precharge system
EP4002407A1 (en) *	2020-11-24	2022-05-25	Siemens Aktiengesellschaft	Microelectromechanical switching element, device and manufacturing method
FR3144611A1 (en) *	2023-01-02	2024-07-05	Airmems	Voltage Shielded MEMS Switch and Voltage Shielded MEMS Switch Array

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5828138A (en) *	1996-12-02	1998-10-27	Trw Inc.	Acceleration switch
US5796152A (en) *	1997-01-24	1998-08-18	Roxburgh Ltd.	Cantilevered microstructure
WO1998034269A1 (en) *	1997-02-04	1998-08-06	California Institute Of Technology	Micro-electromechanical relays
AUPO821697A0 (en) *	1997-07-25	1997-08-14	Alcatel Alsthom Compagnie Generale D'electricite	Miniature connector array
US6504118B2 (en) *	2000-10-27	2003-01-07	Daniel J Hyman	Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism
US6483056B2 (en) *	2000-10-27	2002-11-19	Daniel J Hyman	Microfabricated relay with multimorph actuator and electrostatic latch mechanism

2002
- 2002-08-08 WO PCT/US2002/025109 patent/WO2004015728A1/en active Application Filing
- 2002-08-08 EP EP02752736A patent/EP1527465A1/en not_active Withdrawn
- 2002-08-08 AU AU2002368165A patent/AU2002368165A1/en not_active Abandoned
- 2002-08-08 JP JP2004527503A patent/JP2005536013A/en active Pending

Also Published As

Publication number	Publication date
EP1527465A1 (en)	2005-05-04
WO2004015728A1 (en)	2004-02-19
JP2005536013A (en)	2005-11-24

Legal Events

Date	Code	Title	Description
2005-07-21	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase

Publication	Publication Date	Title
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AU2002368165A1 (en)	2004-02-25	Microfabricated double-throw relay with multimorph actuator and electrostatic latch mechanism
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AU2001234044A1 (en)	2001-08-27	Vandalism-resistant door assembly
AU2003280290A1 (en)	2004-04-23	Actuator
AU2001281866A1 (en)	2002-03-04	Window or door fitting assembly