AU2001297847A1 - Polishing pads with polymer filled fibrous web, and methods for fabricating and using same - Google Patents

Polishing pads with polymer filled fibrous web, and methods for fabricating and using same

Info

Publication number: AU2001297847A1
Authority: AU; Australia
Prior art keywords: fabricating; methods; same; fibrous web; polishing pads
Prior art date: 2000-11-20
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2001297847A

Inventor

Scott Clayton Billings

Shyng-Tsong Chen

Kenneth. Davis

David S. Gilbride

Oscar Kai Chi. Hsu

Kenneth P. Rodbell

Jean Vangsness

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Freudenberg Nonwovens Ltd

International Business Machines Corp

Original Assignee

Freudenberg Nonwovens Ltd

International Business Machines Corp

Freudenberg Nonwovens LP

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2000-11-20

Filing date

2001-11-20

Publication date

2002-12-23

2000-11-20 Priority claimed from US09/715,184 external-priority patent/US6712681B1/en

2001-11-20 Application filed by Freudenberg Nonwovens Ltd, International Business Machines Corp, Freudenberg Nonwovens LP filed Critical Freudenberg Nonwovens Ltd

2002-12-23 Publication of AU2001297847A1 publication Critical patent/AU2001297847A1/en

Status Abandoned legal-status Critical Current

Links

238000000034 method Methods 0.000 title 1
238000005498 polishing Methods 0.000 title 1
229920000642 polymer Polymers 0.000 title 1

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
- B24D11/008—Finishing manufactured abrasive sheets, e.g. cutting, deforming
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Mechanical Treatment Of Semiconductor (AREA)
Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Polishing Bodies And Polishing Tools (AREA)
Nonwoven Fabrics (AREA)
Manufacture Of Macromolecular Shaped Articles (AREA)

AU2001297847A 2000-11-20 2001-11-20 Polishing pads with polymer filled fibrous web, and methods for fabricating and using same Abandoned AU2001297847A1 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US09/715,184 US6712681B1 (en)	2000-06-23	2000-11-20	Polishing pads with polymer filled fibrous web, and methods for fabricating and using same
US09/715,184		2000-11-20
PCT/US2001/043208 WO2002100593A2 (en)	2000-11-20	2001-11-20	Polishing pads with polymer filled fibrous web, and methods for fabricating and using same

Publications (1)

Publication Number	Publication Date
AU2001297847A1 true AU2001297847A1 (en)	2002-12-23

Family

ID=24872997

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2001297847A Abandoned AU2001297847A1 (en)	2000-11-20	2001-11-20	Polishing pads with polymer filled fibrous web, and methods for fabricating and using same

Country Status (5)

Country	Link
EP (1)	EP1341643A4 (en)
JP (1)	JP2004528997A (en)
AU (1)	AU2001297847A1 (en)
CA (1)	CA2441419A1 (en)
WO (1)	WO2002100593A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US7086932B2 (en) *	2004-05-11	2006-08-08	Freudenberg Nonwovens	Polishing pad
TWI409136B (en) *	2006-07-19	2013-09-21	Innopad Inc	Chemical mechanical planarization pad having micro-grooves on the pad surface
JP5234916B2 (en) *	2007-01-30	2013-07-10	東レ株式会社	Laminated polishing pad
JP5485978B2 (en) *	2008-04-01	2014-05-07	イノパッド，インコーポレイテッド	Polishing pad with controlled void formation
KR101050274B1 (en)	2009-12-31	2011-07-19	한국생산기술연구원	Abrasive pad containing polishing pad and method for manufacturing same
JP2012101298A (en) *	2010-11-08	2012-05-31	Ritsumeikan	Polishing pad
JP2015127094A (en) *	2015-03-04	2015-07-09	学校法人立命館	Polishing pad

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4728552A (en) *	1984-07-06	1988-03-01	Rodel, Inc.	Substrate containing fibers of predetermined orientation and process of making the same
US4927432A (en) *	1986-03-25	1990-05-22	Rodel, Inc.	Pad material for grinding, lapping and polishing
US5197999A (en) *	1991-09-30	1993-03-30	National Semiconductor Corporation	Polishing pad for planarization

2001
- 2001-11-20 WO PCT/US2001/043208 patent/WO2002100593A2/en not_active Application Discontinuation
- 2001-11-20 AU AU2001297847A patent/AU2001297847A1/en not_active Abandoned
- 2001-11-20 EP EP01274075A patent/EP1341643A4/en not_active Withdrawn
- 2001-11-20 JP JP2003503398A patent/JP2004528997A/en active Pending
- 2001-11-20 CA CA002441419A patent/CA2441419A1/en not_active Abandoned

Also Published As

Publication number	Publication date
CA2441419A1 (en)	2002-12-19
WO2002100593A3 (en)	2003-06-05
JP2004528997A (en)	2004-09-24
EP1341643A2 (en)	2003-09-10
WO2002100593A2 (en)	2002-12-19
EP1341643A4 (en)	2004-06-09

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Legal Events

Date	Code	Title	Description
2004-01-29	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase