BibTeX record journals/tsmc/QiaoZWZLQ21

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@article{DBLP:journals/tsmc/QiaoZWZLQ21,
  author       = {Yan Qiao and
                  SiWei Zhang and
                  NaiQi Wu and
                  MengChu Zhou and
                  ZhiWu Li and
                  Ting Qu},
  title        = {Efficient Approach to Failure Response of Process Module in Dual-Arm
                  Cluster Tools With Wafer Residency Time Constraints},
  journal      = {{IEEE} Trans. Syst. Man Cybern. Syst.},
  volume       = {51},
  number       = {3},
  pages        = {1612--1629},
  year         = {2021}
}