US3018194A - Metal plating process - Google Patents
Metal plating process Download PDFInfo
- Publication number
- US3018194A US3018194A US831077A US83107759A US3018194A US 3018194 A US3018194 A US 3018194A US 831077 A US831077 A US 831077A US 83107759 A US83107759 A US 83107759A US 3018194 A US3018194 A US 3018194A
- Authority
- US
- United States
- Prior art keywords
- lithium
- aluminum
- substrate
- plating
- cyclopentadienide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims description 57
- 238000007747 plating Methods 0.000 title claims description 52
- 229910052751 metal Inorganic materials 0.000 title claims description 51
- 239000002184 metal Substances 0.000 title claims description 50
- 239000000758 substrate Substances 0.000 claims description 62
- 150000001875 compounds Chemical class 0.000 claims description 36
- 238000000354 decomposition reaction Methods 0.000 claims description 30
- 150000002902 organometallic compounds Chemical class 0.000 claims description 28
- 150000002739 metals Chemical class 0.000 claims description 17
- 229910052739 hydrogen Inorganic materials 0.000 claims description 14
- 239000001257 hydrogen Substances 0.000 claims description 13
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical class [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 11
- 150000002430 hydrocarbons Chemical group 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- -1 lithium aluminum tetracyclopentadienide Chemical compound 0.000 description 118
- 239000000956 alloy Substances 0.000 description 32
- 229910045601 alloy Inorganic materials 0.000 description 31
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 29
- 229910052744 lithium Inorganic materials 0.000 description 29
- 239000003795 chemical substances by application Substances 0.000 description 20
- 229910052782 aluminium Inorganic materials 0.000 description 17
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 17
- 239000011135 tin Substances 0.000 description 16
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 15
- 229910052718 tin Inorganic materials 0.000 description 15
- 125000002524 organometallic group Chemical group 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 13
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 9
- 229910052725 zinc Inorganic materials 0.000 description 9
- 239000011701 zinc Substances 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 229910052796 boron Inorganic materials 0.000 description 8
- 239000011651 chromium Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- 238000000151 deposition Methods 0.000 description 8
- 229930195733 hydrocarbon Natural products 0.000 description 8
- 239000004215 Carbon black (E152) Substances 0.000 description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 7
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 7
- 229910052804 chromium Inorganic materials 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 7
- 229910052733 gallium Inorganic materials 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 7
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 7
- 229910052753 mercury Inorganic materials 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- JFBZPFYRPYOZCQ-UHFFFAOYSA-N [Li].[Al] Chemical compound [Li].[Al] JFBZPFYRPYOZCQ-UHFFFAOYSA-N 0.000 description 6
- 150000001450 anions Chemical class 0.000 description 6
- 229910052790 beryllium Inorganic materials 0.000 description 6
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 6
- 229910052793 cadmium Inorganic materials 0.000 description 6
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 6
- 125000004432 carbon atom Chemical group C* 0.000 description 6
- 239000012159 carrier gas Substances 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000000470 constituent Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- 229910052720 vanadium Inorganic materials 0.000 description 5
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 5
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- XTEGARKTQYYJKE-UHFFFAOYSA-M Chlorate Chemical compound [O-]Cl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-M 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 4
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 description 4
- ZSWFCLXCOIISFI-UHFFFAOYSA-N cyclopentadiene Chemical compound C1C=CC=C1 ZSWFCLXCOIISFI-UHFFFAOYSA-N 0.000 description 4
- SINKOGOPEQSHQD-UHFFFAOYSA-N cyclopentadienide Chemical compound C=1C=C[CH-]C=1 SINKOGOPEQSHQD-UHFFFAOYSA-N 0.000 description 4
- 125000000058 cyclopentadienyl group Chemical group C1(=CC=CC1)* 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 230000006698 induction Effects 0.000 description 4
- LYUARYSAVQUGLK-UHFFFAOYSA-N lithium;triethylborane Chemical compound [Li].CCB(CC)CC LYUARYSAVQUGLK-UHFFFAOYSA-N 0.000 description 4
- QWDJLDTYWNBUKE-UHFFFAOYSA-L magnesium bicarbonate Chemical compound [Mg+2].OC([O-])=O.OC([O-])=O QWDJLDTYWNBUKE-UHFFFAOYSA-L 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 230000000737 periodic effect Effects 0.000 description 4
- OSCYNRVVNHYCMA-UHFFFAOYSA-N potassium;triethylborane Chemical compound [K].CCB(CC)CC OSCYNRVVNHYCMA-UHFFFAOYSA-N 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 239000005297 pyrex Substances 0.000 description 4
- 229910052712 strontium Inorganic materials 0.000 description 4
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 4
- 238000009834 vaporization Methods 0.000 description 4
- 230000008016 vaporization Effects 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 3
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 3
- 229910002651 NO3 Inorganic materials 0.000 description 3
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 3
- 229910019142 PO4 Inorganic materials 0.000 description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000006227 byproduct Substances 0.000 description 3
- 229910052791 calcium Inorganic materials 0.000 description 3
- 239000011575 calcium Substances 0.000 description 3
- 229910017052 cobalt Inorganic materials 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- XLJMAIOERFSOGZ-UHFFFAOYSA-M cyanate Chemical compound [O-]C#N XLJMAIOERFSOGZ-UHFFFAOYSA-M 0.000 description 3
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 229910052749 magnesium Inorganic materials 0.000 description 3
- 239000011777 magnesium Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 3
- 239000010452 phosphate Substances 0.000 description 3
- 229910052700 potassium Inorganic materials 0.000 description 3
- 239000011591 potassium Substances 0.000 description 3
- 229910052706 scandium Inorganic materials 0.000 description 3
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000005979 thermal decomposition reaction Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- IOVCWXUNBOPUCH-UHFFFAOYSA-M Nitrite anion Chemical compound [O-]N=O IOVCWXUNBOPUCH-UHFFFAOYSA-M 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
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- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- GPWHDDKQSYOYBF-UHFFFAOYSA-N ac1l2u0q Chemical compound Br[Br-]Br GPWHDDKQSYOYBF-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Chemical group 0.000 description 2
- 229910052767 actinium Inorganic materials 0.000 description 2
- QQINRWTZWGJFDB-UHFFFAOYSA-N actinium atom Chemical compound [Ac] QQINRWTZWGJFDB-UHFFFAOYSA-N 0.000 description 2
- 125000000217 alkyl group Chemical group 0.000 description 2
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- 229910052746 lanthanum Inorganic materials 0.000 description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 2
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 2
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- 229910052757 nitrogen Inorganic materials 0.000 description 2
- OJMIONKXNSYLSR-UHFFFAOYSA-N phosphorous acid Chemical compound OP(O)O OJMIONKXNSYLSR-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
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- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
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- LUJQZRBUOWMZTF-UHFFFAOYSA-N boron cesium Chemical compound [B].[Cs] LUJQZRBUOWMZTF-UHFFFAOYSA-N 0.000 description 1
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- 229910052792 caesium Inorganic materials 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
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- FQNHWXHRAUXLFU-UHFFFAOYSA-N carbon monoxide;tungsten Chemical group [W].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-] FQNHWXHRAUXLFU-UHFFFAOYSA-N 0.000 description 1
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- 230000007797 corrosion Effects 0.000 description 1
- 150000001913 cyanates Chemical class 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- HMOJUCUJIXEKOH-UHFFFAOYSA-N dicyanoalumanylformonitrile Chemical compound N#C[Al](C#N)C#N HMOJUCUJIXEKOH-UHFFFAOYSA-N 0.000 description 1
- 125000004177 diethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 1
- 229910052730 francium Inorganic materials 0.000 description 1
- KLMCZVJOEAUDNE-UHFFFAOYSA-N francium atom Chemical compound [Fr] KLMCZVJOEAUDNE-UHFFFAOYSA-N 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 239000011491 glass wool Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 150000008282 halocarbons Chemical group 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical group 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 125000003454 indenyl group Chemical group C1(C=CC2=CC=CC=C12)* 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910001412 inorganic anion Inorganic materials 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- DBLMXLQJTBGLMP-UHFFFAOYSA-N iron tetracarbonyl hydride Chemical group [Fe].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-] DBLMXLQJTBGLMP-UHFFFAOYSA-N 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- MGRWKWACZDFZJT-UHFFFAOYSA-N molybdenum tungsten Chemical compound [Mo].[W] MGRWKWACZDFZJT-UHFFFAOYSA-N 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 150000002825 nitriles Chemical class 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 125000002577 pseudohalo group Chemical group 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 229910052705 radium Inorganic materials 0.000 description 1
- HCWPIIXVSYCSAN-UHFFFAOYSA-N radium atom Chemical compound [Ra] HCWPIIXVSYCSAN-UHFFFAOYSA-N 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- GNWRAZCUQNKMIT-UHFFFAOYSA-N sodium thallium Chemical compound [Na].[Tl] GNWRAZCUQNKMIT-UHFFFAOYSA-N 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- VSSLEOGOUUKTNN-UHFFFAOYSA-N tantalum titanium Chemical compound [Ti].[Ta] VSSLEOGOUUKTNN-UHFFFAOYSA-N 0.000 description 1
- 229910052713 technetium Inorganic materials 0.000 description 1
- GKLVYJBZJHMRIY-UHFFFAOYSA-N technetium atom Chemical compound [Tc] GKLVYJBZJHMRIY-UHFFFAOYSA-N 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
- 150000003567 thiocyanates Chemical class 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- LALRXNPLTWZJIJ-UHFFFAOYSA-N triethylborane Chemical compound CCB(CC)CC LALRXNPLTWZJIJ-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
- 125000005023 xylyl group Chemical group 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/922—Static electricity metal bleed-off metallic stock
- Y10S428/9335—Product by special process
- Y10S428/934—Electrical process
- Y10S428/935—Electroplating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/922—Static electricity metal bleed-off metallic stock
- Y10S428/9335—Product by special process
- Y10S428/936—Chemical deposition, e.g. electroless plating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S428/00—Stock material or miscellaneous articles
- Y10S428/922—Static electricity metal bleed-off metallic stock
- Y10S428/9335—Product by special process
- Y10S428/938—Vapor deposition or gas diffusion
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12778—Alternative base metals from diverse categories
Definitions
- This invention relates to the plating of appropriate substrates using polymetallic organometallic compounds. More particularly this invention relates to the plating of alloys on appropriate substrates by the decomposition of bimetallic organometallic compounds.
- Another object of this invention is that of providing a process for plating alloys on substrates using bimetallic organometallic compounds. Another object is to provide a decomposition process for plating substrates using these bimetallic organometallic compounds. A further object of this invention is to provide a thermal process for plating substrates by thermal decomposition of bimetallic organometallic compounds. Still another object of this invention is to provide novel and highly useful alloy plated articles made according to these processes. Other important objects of this invention will be apparent from the ensuing description.
- a process for alloy plating a substrate by the decomposition of a polymetallic organometallic compound in contact with the substrate contains at least two difierent metals.
- a process for plating a substrate comprising heating the object to be plated to a temperature above the decomposition temperature of a bimetallic organometallic compound and contacting said compound with said heated substrate.
- Those bimetallic organometallic compounds which contain as the exclusive constituents of the molecule, two different metals and unsubstituted hydrocarbon radicals are especially useful in vapor phase alloy plating operations.
- the substrate to be alloy plated is heated to a temperature above about 200 C. while maintained under an inert atmosphere such as nitrogen, the rare gases (e.g. neon, argon, krypton, xenon) etc.
- an inert atmosphere such as nitrogen, the rare gases (e.g. neon, argon, krypton, xenon) etc.
- Bimetallic organometallic compounds used in this invention and comprising one embodiment thereof can be represented by the general formula wherein M is a metal selected from the group consisting of groups I, II, III-B, IV-B, V-B, VI-B, VII-B, VIII of the periodic chart of the elements and tin and aluminum; M is a difierent metal selected from the group consisting of group III-A of the periodic chart of the elements and zinc and cadmium; R is a monovalent anioni.e. group or radical; x is an integer corresponding to the valence of the metal M; y is an integer corresponding to the valence of the metal M.
- the monovalent anion R be a substituent which upon the decomposition of the bimetallic organometallic plating agent forms decomposition by-products which are devoid of free hydrogen. Hydrogen by-product is particularly undesirable in those cases wherein the alloys to be plated and the substrate are susceptible to hydrogen embrittlement.
- the process of this invention presents a significant advance over the prior art in that for the first time it is possible to produce alloy plates from bimetallic organometallic compounds in a simple, safe, economical process.
- a further advantage of this invention is that through the employment of this process, it becomes possible to produce alloy plates having exceptional purity and excellent adherence to the substrate on which the alloy is plated.
- the process of this invention provides easy control of the proportionate metallic content of the respective metal of the alloy. That is, because of the ready availability of bimetallic organometallic compounds having wide variation in the percent weight ratio of the different metals contained therein, it is, as a result of this invention, now simply a matter of choosing the compound having a metal content tailor made to producing the desired alloy.
- the process of this invention provides easy control of the alloy plate thickness.
- a micro molecular alloy film can be plated on the substrate and in other cases, if so desired, thicker alloy plates can be obtained.
- a particular advantage of using bimetallic organometallic compounds which upon decomposition yield by-products which are exclusive of free hydrogen and oxidizing materials is that the alloy plates are thereby obtained free of undesirable oxide impurities and are not deteriorated through hydrogen embrittlement.
- any prior art technique for metal plating an object by thermal decomposition of the metal containing compound can be employed in the plating process of this invention as long as a bimetallic organometallic compound is employed as the plating agent (i.e. the metallic source of the metal plate).
- the plating agent i.e. the metallic source of the metal plate.
- any technique heretofore known for the thermal decomposition and subsequent plating of group VI-B metals from the hexacarbonyl derivatives of those metals can be so employed.
- illustrative are those techniques described by Lander and Germer, American Institute of Mining and Met-allurgical Engineers, Tech. Publication No.
- the technique to be employed comprises heatin glthe object to be plated to a temperature above thef deicomposition temperature of the metal containing compoundand thereafter contacting the metal containing compoundwith the heated object.
- the following example s are; more fully illustrative of the process of this invention and in these and other working examples all parts and percentages are by weight.
- the substrate is heated to a temperature abovethe decomposition temperature of the bimetallic.
- organometallic plating agent the system is evacuatedfand the organometallic compound is heated to an appropriate temperature where it possesses vapor pres-. sureof up to about 10 millimeters. In most instances the process is conducted at no lower than 0.01 millimeter pressure,
- the yapors of the bimetallic organometallic compound are pulled through the system as the evacuating'nieans' operates and they impinge on the heated object decomposing and forming alloy plates.
- No carrier gas need be employed. However, in certain cases a carrier gas can be employed to' increase the efficiency of the above disclosed plating system. In those cases where 40 a carrier gas is employed, asystern such as described by Lander and Germer, American Institute of Mining and Metallurgical Engineers, Tech. Publication No. 2259 (1947), at page 7, can be utilized.
- Example I Compound Sn(AlEt (tin bis (aluminum tetraethyl)). Temp. of.substrate 350 C.
- Example II Compound Li(AlCp (lithium aluminum tetracyclopentadienide) Temp; of substrate 350 C. Nature of substrate Mild steel.” Pressure' 0.1 mm. Compound temp, 150 C. Time lhour. Results' Dull metallic coating.
- Example III Compound ".I Li(Al indenide (lithium aluminum tetraindenide). 'f mry tsvb t te- C- 10 Nature of substrate .J; Pyrex; Pressure 0.5 mm. Compoundtemp. 130 C;- Time" 1 hour. Results Dull metallic.
- Example IV Compound Li(AlEt l-I) (lithium aluminum triethylhydride Temp. of substrate 300 C. Nature of substrate Nickel.
- Example V Compound Cp TiCl AlEt: (dicyclopentadie nyltitanium dichloride aluminum diethyl).
- Example VI Compound Fe(CO) PbEt (iron tetracarbonyl leaddiethyl); Temp. of substrate 400 C. Nature of substrate Mild steel.
- Example s The process employed in Example s 'l and following is utilized with the exception that an ultrasonic generator is proximately positioned to theplating apparatus.
- the compound is heated to its decomposition threshold'and thereafter the ultrasonic generator is utilized to effect final decomposition;
- the bimetallic d gsnqmttamc plating agents of this invention can be represented by the general formula MtM' xmy wherein M is a metal selected from the group consisting of groups I, II, III-B, IV-B, V-B, VI-B, VII-B, VIII, of the periodic chart of the elements and the metals tin and aluminum; M is a metal selected from the group consisting of group III-A of the periodic chart of the elements and the metals zinc and cadmium; R represents a monovalent anion; x is an integer equal to the valence of M; y is an integer equal to the valence of M.
- the metals designated by M include, lithium, sodium, potassium, rubidium, cesium, francium of group I-A. Within this group lithium is the especially preferred metal because of the desirable high temperature characteristics lithium imparts when alloyed with certain metals.
- the symbol M further designates the metals beryllium, magnesium, calcium, strontium, barium, radium within group II-A; scandium, indium, lanthanum, actinium (including the lanthanum and actinium series) within group III-B; titanium, zirconium, hafnium, within group IV-B; vanadium, niobium, tantalum within group V-B; chromium,
- molybdenum tungsten within group VI-B; manganese, technetium, rhenium within group VII-B; and iron, ruthenium, osmium, cobalt, rhodium, iridium, nickel, palladium, platinum of group VIII.
- M designates the metals silver, copper, gold, zinc, cadmium and mercury. It of course should be recognized that because of the scarcity of certain of the above metals, their use would be reserved for those instances where their unique alloying properties are desired or needed.
- the metal M includes any of the elements of group III-A and thus includes boron, aluminum, thallium, indium and gallium. Of these aluminum is most preferred because of its wide availability and use in plating technology.
- R is a monovalent anion, preferably an unsubstituted hydrocarbon group.
- the hydrocarbon groups generally contain between about 1 and 20 carbon atoms each.
- a preferred class of bimetallic organometallic plating agents of this invention contains as one of the R groups at least one cyclopentadienyl group.
- a cyclopentadieuyl group is meant groups containing the five carbon atom ring found in cyclopentadiene itself.
- Examples are the cyclopentadienyl, indenyl'and fluorenyl groups, and the corresponding groups substituted with one or more hydrocarbon radicals such as the methylcyclopentadienyl, methyl-tert-butylcyclopentadienyl, triethylindenyl, phenylcyclopentadienyl and related groups.
- R can also be other monovalent anions.
- These anions include organic hydrocarbon radicals and substituted bydrocarbon radicalsincluding the halogenated hydrocarbon residues of organic acids containing up to about 20 carbon atoms, such as the acetate, propIonate, butyrate, hexanoate.
- R can also be inorganic anions such as hydrogen, the halides, hydrides; pseudo halides, e.g., cyanates, thiocyanates, cyanides, cyanimides, amides; alcohol residues (OR) wherein the hydrocarbon portions con tain up to about 18 carbon atoms; or inorganic acid anions such as sulfate, nitrate, borate, phosphate, arsenate and the like.
- inorganic anions such as hydrogen, the halides, hydrides; pseudo halides, e.g., cyanates, thiocyanates, cyanides, cyanimides, amides; alcohol residues (OR) wherein the hydrocarbon portions con tain up to about 18 carbon atoms; or inorganic acid anions such as sulfate, nitrate, borate, phosphate, arsenate and the like.
- Typical examples of the bimetallic organometallic plating agents of this invention comprise: tin tetramethylboron, chromium tetraethylboron, scandium tetraethylboron, copper tetraisopropylboron, titanium tetraoctylboron, vanadium tetraoctadecylboron, chromium tetraeicosylboron, tin tetravinylboron, iron tetra-Z-butenylboron, cobalt l-hexynyltriethylboron, nickel tetraethynylboron, tin tetracyclohexylboron, vanadium tetraphenylboron, copper tetrabenzylboron, titanium tetranaphthylboron, titanium tetracyclohexenylboron, vanadium t
- the first metal, M be tin, chromium, copper, vanadium, manganese, iron, cobalt, nickel, or titanium
- the second metal, M be aluminum or boron with all of the chemical groups attached to the latter being hydrocarbon radicals having up to about 8 carbon atoms, especially the unsubstituted hydrocarbon radical, e.g. alkyl radicals.
- Compounds of the metals tin, chromium, and copper comprise an especially unique group of compounds of high stability and effective use.
- especially preferred embodiments comprise tin, chromium, or copper tetraethylaluminum or boron.
- bimetallic organometallic plating agents include the following: lithium tetramethylboron, lithium tetraethylboron, lithium tetraethylaluminum, lithium triethylzinc, lithium tetraisopropylboron, lithium tetraoctylboron, lithium tetraoctylaluminum, lithium trioctylzinc, lithium tetraoctadecylboron, lithium tetraeicosylboron, lithium tetravinylboron, lithium tetra 2 butenylboron, lithium tetra-2- butenylalurninurn, lithium tri-Z-butenylzinc, lithium 1- hexynyl triethylboron, lithium tetraethynylboron, lithium tetracyclohexyl
- hydrocarbon portions of the above and other bimetallic organometallic compounds can be further substituted with other functional groups which do not interfere with the reaction as, for example, the halogens, acid groups, both inorganic and organic, and the like.
- the R groups of the bimetallic organometallic be hydrocarbon groups, especially the lower alkyl in accordance with the present invention wherein at least one of the hydrocarbon groups is a cyclopentadienyl group arerlithiumboron tetrakis(cyclopentadienide), lithium aluminum 'tetrakis(cyclopentadienide), lithium aluminum tetrakis(methylcyclopentadienide), lithium gallium tetrakis (cyclopentadienide), lithuim indium tetrakis(ethylcyclopentadienide), lithium boron cyclopentadienide trihydride, lithium boron tris(cyclopentadienide) hydride, lithium aluminum tris(cyclopentadienide) hydride, lithium aluminumcyclopentadienide triethyl, lithium aluminum bis(cyclopentadienide) diethyl, lithium aluminum cyclopentadienide trimethyl, sodium
- cyclopentadienyl groups including the isopropyl, diisopropyl, hexyl, tolyl, xylyl, and other alkyl and aryl derivatives of cyclopentadienyl groups.
- the bimetallic organometallic plating agents of this invention When employing the bimetallic organometallic plating agents of this invention in the absence of a carrier gas, it is desirable to maintain enough vapor pressure below the decomposition temperature of the organometallic to enable the process to be conducted at an appreciable rate of plating. Too high vapor pressure results in poor substrate' adherence. Thus it is preferred to employ up to about mm. pressure during the plating operation; prefe'rably 0.01 to 10 mm. of pressure. When an inert carrier gas such as argon or other carrier gases such as hydrogen and carbon dioxide are employed in the process, it is desirable to employ a higher vapor pressure, e.g. between about 10 to 20 mm. of pressure. In this connection, however, it is to be noted that the partial pressure" of the bimetallic organometallic is about 0.01 to about 10 mm. pressure during the plating operation.
- temperatures above the decomposition temperature of the organometallic plating agent are generally employed, (usually temperatures no higher than about 700 C. are used), a preferred temperature exists for each organom'etallic plating-agent. When'this temperature is employed betterplatingresultscan beobtained. At these temperatures exceptionally brighter, better adhering coatings are obtained.
- alloy as employed herein is meant a mixture of two or more metallic elements (or non-metals,
- pack metallizing techniques In some cases more uniform'coating can be obtained through the employment of pack metallizing techniques.
- the plating agent when employed in such pack metallizing technique is a solid such as chromium tris(aluminum tetraethyl).
- One of the advantages of employing such pack metallizing techniques is that very uniform plating temperatures can be achieved because of the solid mate rials employed in this type of process.
- Pack metallizing involves packing the substrate to be plated into a metal or glass reaction vessel provided with a gas outlet means. (Usually a metal substrate is used.) With the plating agent is employed an'inert filler material such as sand, refractory powders or any other material inert under the application conditions.
- reaction vessel contains the object to be plated surrounded by the solid plating agent, the remaining space of the reaction vessel being filled with the aforesaid inert filler.
- the reaction container is thereafter placed in an induction heating furnace and the temperature of the furnace raised to a point above the decomposition temperature'of the plating agent.
- Example X Compound Cr(AlEt '(chro'mium tris- (aluminum tetraethyl) Temp. of substrate 400 C. Nature of Substrate Mild steel. Pressure 0.1 mm. Time 1% hours. Results Dull, metallic. Method Pack metallizingi
- other methods for decomposition of the bimetallic organometallic plating agents of the instant invention can also be employed. These other methods encompass other techniques such as decomposition of the bimetallic organometallic plating agent with ultraviolet irradiation.
- Example I employing such a technique an apparatus substantially the same as employed in Example I is used with the exception that in place of the high frequency induction heating means a source of ultraviolet irradiation is employed.
- This ultraviolet technique is particularly applicable to those bimetallic organometallic compounds of this invention having good volatility characteristics.
- Another decomposition technique which can be employed in achieving alloy plates from the plating agents of this invention involves chemical decomposition.
- Illustrative of such chemical decomposition is the decomposition of copper tetraethylaluminum by treating with acid (50 percent HCl) to produce a colloidal alloy deposition.
- any substrate which is stable to decomposition at the temperatures employed in the plating process utilized are suitable substrates for this invention.
- substrates for this invention are metallic substrates such as ferrous metal substrates (particularly steel), aluminum, coper, yttrium, molybdenum, beryllium, and the like. Alloy substrates can also be employed which result in the deposition of an alloy upon an alloy material. Glass substrates such as Pyrex can be used.
- substrates which can be employed are ceramics, cermeis, refractories such as alumina, graphite and the like; plastics such as Teflon (e.g. polyfluoro hydrocarbons), and a multitude of cellulose materials such as Wood, cloth, paper, etc.
- bimetallic organometallic plating agents can be employed in the above working examples to produce similar alloy plating on the substrate to be plated.
- tin tetramethylboron, scandium tetraethylboron, tin triethylzinc, titanium triethylzinc, potassium triethylboron chloride, sodium indium tetracyclopentadienide, beryllium bis(boron cyclopentadienide) triethyl, strontium bis(gallium tetracyclopentadienide), zinc bis(aluminum tetracyclopentadienide) are employed in the examples described above, alloy plates of the corresponding metals contained in each of these compounds are deposited upon the substrate plated.
- the decomposition techniques of this invention can be varied so that, in some instances, substrates can be plated with one or both of the metals from the bimetalic organometallic compound while concurrently depositing therefrom metal powders.
- substrates can be plated with one or both of the metals from the bimetalic organometallic compound while concurrently depositing therefrom metal powders.
- the alloy depositions produced from bimetallic organometallic compounds according to the processes of this invention have many applications in the metallurgical and related arts. 'In the following working example the application of the processes of this invention to plating aircraft landing gear fabrication materials is illustrated.
- Example X A high performance steel aircraft landing gear structural member is placed in a conventional heating chamber provided with means for high frequency induction heating and gas inlet and outlet means. Lithium aluminum tetracyclopentadiem'de is placed in a standard vaporization chamber provided with heating means, said vaporization chamber being connected through an outlet port to the aforesaid combustion chamber inlet means. The member is heated to a temperature of approximately 350 C. and the system is evacuated. The lithium aluminum tetracyclopentadienide is heated to a temperature (about 150 C.) where it possesses vapor pressure of up to about mm.
- the lithium aluminum tetracyclopentadienide vapors are pulled through the system by a vacuum pump and they impinge on the heated aircraft landing gear structural member decomposing and forming a well adherent lithium-aluminum alloy coating over the entire surface of the structural member.
- the structural member is coated with a high performance corrosion resistant lithium-aluminum alloy coating having high tensile strength for application to the extreme requirements of modern age aircraft.
- a process for metal plating a substrate by decomposition of a metal containing compound in contact with said substrate the improvement which comprises employing as said metal containing compound a bimetallic organometallic compound, containing at least two diiferent metals and wherein said organo group is an unsubstituted hydrocarbon group containing between about l-20 carbon atoms, and conducting said process in an inert atmosphere, essentially devoid of free hydrogen.
- a process for plating a substrate comprising heating the object to be plated, in an inert atmosphere essentially devoid of free hydrogen, to a temperature above the decomposition temperature of a bimetallic organometallic compound and contacting said bimetallic compound with said heated object, said bimetallic organometallic compound being further defined as having the general formula wherein M is a metal selected from the groups consisting of groups I, H, III-B, IV-B, V-B, VI-B, VII-B, VIII, tin and aluminum; M is a difierent metal selected from the group consisting of group III-A, zinc and cadmium; R is a monovalent anion, x is an integer corresponding to the valence of the metal M, y is an integer corresponding to the valence M.
- a process for plating a substrate which comprises heating said substrate to a temperature above the decom posit-ion temperature of tin bis(aluminum tetraethyl) and contacting the tin bis(aluminum tetraethyl) with said substrate; said process being conducted under vacuum; the (tin bis(aluminum tetraethyl) compound having a vapor pressure of up to about 10 millimeters of mercury.
- a process for plating a ferrous metal substrate with an alloy of lithium and aluminum which comprises heating said substrate to a temperature above the decomposition temperature of a bimetallic organometallic compound, wherein lithium, aluminum and an unsubstituted hydrocarbon group containing 1-20 carbon atoms are the exclusive constituents of the molecule, and contacting said compound with said substrate; said process being conducted under an inert atmosphere essentially devoid of free hydrogen.
- a process for plating a substrate which comprises heating said substrate to a temperature above the decomposition temperature of lithium aluminum tetracyclopentadienide and contacting the lithium aluminum tetracyclopentadienide with said substrate; said process being conducted under vacuum; the lithium aluminum tetracyclopentadienide compound having a vapor pressure of up to about 10 millimeters of mercury.
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Description
United States Patent i 3,018,194 METAL PLATING PROCESS Vello Norman and Thomas P. Whaley, Baton Rouge, La., assignors to Ethyl Corporation, New York, N.Y., a corporation of Delaware No Drawing. Filed Aug. 3, 1959, Ser. No. 831,077 6 Claims. (Cl. 117-107) This invention relates to the plating of appropriate substrates using polymetallic organometallic compounds. More particularly this invention relates to the plating of alloys on appropriate substrates by the decomposition of bimetallic organometallic compounds.
Heretofore, in order to deposit alloys by the decomposition of organometallic compounds, it has been necessary to employ two difierent mono metal containing compounds. For example, molybdenum-tungsten alloys have been prepared by pyrolysis of the mixed carbonyl vapors, i.e. a mixture of molybdenum carbonyl and tungsten carbonyl. Furthermore, alloys have been produced by hydrogen reduction of the mixed chloride vapors. Thus titanium-tantalum alloys have been obtained by co-deposition from the respective bromides utilizing hydrogen reduction. However, in attempting alloy plating from two different chemical compounds it often happens that a marked difierence exists in the chemical afiinities of the two alloying constituents. In such cases deposition of only one constituent will usually occur to the entire exclusion of the other constituent. Thus, it becomes necessary to, as nearly as possible, equalize rates of deposition by proper choice of deposition temperature. In other words, it becomes necessary to choose chemically compatible compounds as plating agents. Because of this, the choice of available compounds for producing alloy plates from two diiferent mono metal containing compounds becomes considerably narrowed. Consequently the types of feasible alloys also are decreased. According to the present invention, these inherent disadvantages in the prior art processes for plating alloys by decomposition or reduction of difierent metal compounds are overcome by employing bimetallic organometallic compounds in the plating process. By virtue of this plating process vastly improved alloy plates are provided on a wide range of substrates.
Thus, among the objects of this invention is that of providing a process for plating alloys on substrates using bimetallic organometallic compounds. Another object is to provide a decomposition process for plating substrates using these bimetallic organometallic compounds. A further object of this invention is to provide a thermal process for plating substrates by thermal decomposition of bimetallic organometallic compounds. Still another object of this invention is to provide novel and highly useful alloy plated articles made according to these processes. Other important objects of this invention will be apparent from the ensuing description.
According to this invention there is provided a process for alloy plating a substrate by the decomposition of a polymetallic organometallic compound in contact with the substrate. In their broadest aspect the bimetallic organometallic compounds of this invention contain at least two difierent metals. Within the scope of this invention is a process for plating a substrate comprising heating the object to be plated to a temperature above the decomposition temperature of a bimetallic organometallic compound and contacting said compound with said heated substrate. Those bimetallic organometallic compounds which contain as the exclusive constituents of the molecule, two different metals and unsubstituted hydrocarbon radicals are especially useful in vapor phase alloy plating operations. In carrying out these vapor phase techniques the substrate to be alloy plated is heated to a temperature above about 200 C. while maintained under an inert atmosphere such as nitrogen, the rare gases (e.g. neon, argon, krypton, xenon) etc.
Bimetallic organometallic compounds used in this invention and comprising one embodiment thereof can be represented by the general formula wherein M is a metal selected from the group consisting of groups I, II, III-B, IV-B, V-B, VI-B, VII-B, VIII of the periodic chart of the elements and tin and aluminum; M is a difierent metal selected from the group consisting of group III-A of the periodic chart of the elements and zinc and cadmium; R is a monovalent anioni.e. group or radical; x is an integer corresponding to the valence of the metal M; y is an integer corresponding to the valence of the metal M. It is especially preferred that the monovalent anion R be a substituent which upon the decomposition of the bimetallic organometallic plating agent forms decomposition by-products which are devoid of free hydrogen. Hydrogen by-product is particularly undesirable in those cases wherein the alloys to be plated and the substrate are susceptible to hydrogen embrittlement.
The process of this invention presents a significant advance over the prior art in that for the first time it is possible to produce alloy plates from bimetallic organometallic compounds in a simple, safe, economical process. A further advantage of this invention is that through the employment of this process, it becomes possible to produce alloy plates having exceptional purity and excellent adherence to the substrate on which the alloy is plated. Furthermore, the process of this invention provides easy control of the proportionate metallic content of the respective metal of the alloy. That is, because of the ready availability of bimetallic organometallic compounds having wide variation in the percent weight ratio of the different metals contained therein, it is, as a result of this invention, now simply a matter of choosing the compound having a metal content tailor made to producing the desired alloy. Thus, it becomes unnecessary to hunt for compounds having suitable mutual chemical aflinity such as compatible decomposition temperatures, decomposition rates, etc., which heretofore has been such a limiting factor in applying organometallic decomposition technology to the production of alloys. Also, the process of this invention provides easy control of the alloy plate thickness. On the one hand, a micro molecular alloy film can be plated on the substrate and in other cases, if so desired, thicker alloy plates can be obtained. A particular advantage of using bimetallic organometallic compounds which upon decomposition yield by-products which are exclusive of free hydrogen and oxidizing materials is that the alloy plates are thereby obtained free of undesirable oxide impurities and are not deteriorated through hydrogen embrittlement.
In general, any prior art technique for metal plating an object by thermal decomposition of the metal containing compound can be employed in the plating process of this invention as long as a bimetallic organometallic compound is employed as the plating agent (i.e. the metallic source of the metal plate). Thus, for example, any technique heretofore known for the thermal decomposition and subsequent plating of group VI-B metals from the hexacarbonyl derivatives of those metals can be so employed. illustrative are those techniques described by Lander and Germer, American Institute of Mining and Met-allurgical Engineers, Tech. Publication No. 2259 (1947)} Usually the technique to be employed comprises heatin glthe object to be plated to a temperature above thef deicomposition temperature of the metal containing compoundand thereafter contacting the metal containing compoundwith the heated object. The following example s are; more fully illustrative of the process of this invention and in these and other working examples all parts and percentages are by weight.
The process employed in these examplesis as follows: Into a conventional heating chamber provided with means forihigh frequency induction heating and gas inlet and outlet means is placed the object to be plated. The bimetallic organometallic compound is placed in a standard vaporization chamber provided with heating means, said vaporization chamber being connected through an outlet port to the aforesaid combustion chamber inlet means.
Forthe plating operation the substrate is heated to a temperature abovethe decomposition temperature of the bimetallic. organometallic plating agent, the system is evacuatedfand the organometallic compound is heated to an appropriate temperature where it possesses vapor pres-. sureof up to about 10 millimeters. In most instances the process is conducted at no lower than 0.01 millimeter pressure, The yapors of the bimetallic organometallic compound are pulled through the system as the evacuating'nieans' operates and they impinge on the heated object decomposing and forming alloy plates. No carrier gas need be employed. However, in certain cases a carrier gas can be employed to' increase the efficiency of the above disclosed plating system. In those cases where 40 a carrier gas is employed, asystern such as described by Lander and Germer, American Institute of Mining and Metallurgical Engineers, Tech. Publication No. 2259 (1947), at page 7, can be utilized.
Example I Compound Sn(AlEt (tin bis (aluminum tetraethyl)). Temp. of.substrate 350 C.
Nature of substrate Pyrex.
Pressure 0.5 mm. Compound temp. 90-100 C. Time, 2 hours. W V Results Dull, grey,'metallic coating.
, Example II Compound Li(AlCp (lithium aluminum tetracyclopentadienide) Temp; of substrate 350 C. Nature of substrate Mild steel." Pressure' 0.1 mm. Compound temp, 150 C. Time lhour. Results' Dull metallic coating.
Example III Compound ".I Li(Al indenide (lithium aluminum tetraindenide). 'f mry tsvb t te- C- 10 Nature of substrate .J; Pyrex; Pressure 0.5 mm. Compoundtemp. 130 C;- Time" 1 hour. Results Dull metallic.
4. Example IV Compound Li(AlEt l-I) (lithium aluminum triethylhydride Temp. of substrate 300 C. Nature of substrate Nickel.
Pressure 3-4 mm. Compound temp. 130 C. Time 1 hour. a Results Dull metallic.
Example V Compound Cp TiCl AlEt: (dicyclopentadie nyltitanium dichloride aluminum diethyl).
Temp. of substrate 250 C.
Nature of substrate Pyrex.
Temp. of substrate 450 C. Nature of substrate Graphite.
Pressure 5 mm.
Compound temp, 75 C.
Time 2% hours; Results Dark grey, dull coating.-
Example VI I Compound Fe(CO) PbEt (iron tetracarbonyl leaddiethyl); Temp. of substrate 400 C. Nature of substrate Mild steel.
Pressure 2 mm.
Compound temp. C.
Time lhour. Results Dark grey, dull coating:
The process employed in Example s 'l and following is utilized with the exception that an ultrasonic generator is proximately positioned to theplating apparatus. The compound is heated to its decomposition threshold'and thereafter the ultrasonic generator is utilized to effect final decomposition;
Example Vl ll num tetraethyl)). Temp. of substrate" 200 C. Nature of substrate Glass wool.
Temp. of substrate 300 C. Nature of substrate Pressure 0.1 mm.
Compound temp, 60 C.
Time 4 hours.
Results Powder, chromium-boride or mix ture.
As discussed hereinbefore the bimetallic d gsnqmttamc plating agents of this invention can be represented by the general formula MtM' xmy wherein M is a metal selected from the group consisting of groups I, II, III-B, IV-B, V-B, VI-B, VII-B, VIII, of the periodic chart of the elements and the metals tin and aluminum; M is a metal selected from the group consisting of group III-A of the periodic chart of the elements and the metals zinc and cadmium; R represents a monovalent anion; x is an integer equal to the valence of M; y is an integer equal to the valence of M.
The metals designated by M include, lithium, sodium, potassium, rubidium, cesium, francium of group I-A. Within this group lithium is the especially preferred metal because of the desirable high temperature characteristics lithium imparts when alloyed with certain metals. The symbol M further designates the metals beryllium, magnesium, calcium, strontium, barium, radium within group II-A; scandium, indium, lanthanum, actinium (including the lanthanum and actinium series) within group III-B; titanium, zirconium, hafnium, within group IV-B; vanadium, niobium, tantalum within group V-B; chromium,
molybdenum, tungsten within group VI-B; manganese, technetium, rhenium within group VII-B; and iron, ruthenium, osmium, cobalt, rhodium, iridium, nickel, palladium, platinum of group VIII. Within the groups I-B and II-B, M designates the metals silver, copper, gold, zinc, cadmium and mercury. It of course should be recognized that because of the scarcity of certain of the above metals, their use would be reserved for those instances where their unique alloying properties are desired or needed.
The metal M includes any of the elements of group III-A and thus includes boron, aluminum, thallium, indium and gallium. Of these aluminum is most preferred because of its wide availability and use in plating technology.
As noted above, R is a monovalent anion, preferably an unsubstituted hydrocarbon group. The hydrocarbon groups generally contain between about 1 and 20 carbon atoms each. A preferred class of bimetallic organometallic plating agents of this invention contains as one of the R groups at least one cyclopentadienyl group. By a cyclopentadieuyl group is meant groups containing the five carbon atom ring found in cyclopentadiene itself. Examples are the cyclopentadienyl, indenyl'and fluorenyl groups, and the corresponding groups substituted with one or more hydrocarbon radicals such as the methylcyclopentadienyl, methyl-tert-butylcyclopentadienyl, triethylindenyl, phenylcyclopentadienyl and related groups.
R can also be other monovalent anions. These anions include organic hydrocarbon radicals and substituted bydrocarbon radicalsincluding the halogenated hydrocarbon residues of organic acids containing up to about 20 carbon atoms, such as the acetate, propIonate, butyrate, hexanoate. R can also be inorganic anions such as hydrogen, the halides, hydrides; pseudo halides, e.g., cyanates, thiocyanates, cyanides, cyanimides, amides; alcohol residues (OR) wherein the hydrocarbon portions con tain up to about 18 carbon atoms; or inorganic acid anions such as sulfate, nitrate, borate, phosphate, arsenate and the like.
Typical examples of the bimetallic organometallic plating agents of this invention comprise: tin tetramethylboron, chromium tetraethylboron, scandium tetraethylboron, copper tetraisopropylboron, titanium tetraoctylboron, vanadium tetraoctadecylboron, chromium tetraeicosylboron, tin tetravinylboron, iron tetra-Z-butenylboron, cobalt l-hexynyltriethylboron, nickel tetraethynylboron, tin tetracyclohexylboron, vanadium tetraphenylboron, copper tetrabenzylboron, titanium tetranaphthylboron, titanium tetracyclohexenylboron, vanadium tetrabutadienylboron; chromium ethyltributylboron, zirconium ethyltrioctylboron, iron ethyltrioctadecylboron, cobalt ethyltricyclohexylboron, cobalt ethyltriphenylboron, nickel ethyltri(2-phenylethyl)boron, manganese ethyltriisopropylboron, copper diethyldiisopropylboron, titanium diethyldiphenylboron, vanadium diethyldioctadecylboron, chromium octyltrioctadecylboron; molybdenum ethylborontrichloride, trifiuoride, tribromide, or triiodide; iron triethylboron hydride, cobalt trioctylboron hydride; nickel ethyltrimethoxyboron, tungsten triethylethoxyboron, tin trioctylboron octanoate, copper triethylboron cyanide, titanium triphenylboron cyanide, vanadium triethylboron cyanate and thiocyanate; chromium triethylboron amide, molybdenum triethylboron mercaptide, iron triethylboron azide, cobalt triethylboron acetate, nickel triethylboron octanoate, tin triethylboron phenolate; chromium triethylboron sulfate, nitrate, nitrite, sulfite, phosphate, phosphite, arsonate, or chlorate, and the like; also similar compounds wherein other group III-A elements, zinc, or cadmium are substituted for boron as, for example, tin tetraethylaluminum, chromium tetraethylaluminum, zirconium tetraethylaluminum, copper tetraethyl aluminum, tin triethylzinc, titanium triethylzinc, manganese tetraethylaluminum, and the like. It is preferable that the first metal, M, be tin, chromium, copper, vanadium, manganese, iron, cobalt, nickel, or titanium, and the second metal, M, be aluminum or boron with all of the chemical groups attached to the latter being hydrocarbon radicals having up to about 8 carbon atoms, especially the unsubstituted hydrocarbon radical, e.g. alkyl radicals. Compounds of the metals tin, chromium, and copper comprise an especially unique group of compounds of high stability and effective use. Thus, especially preferred embodiments comprise tin, chromium, or copper tetraethylaluminum or boron.
Further examples of the bimetallic organometallic plating agents, some of which are tailormade to produce the highly desirable lithium-aluminum alloys, include the following: lithium tetramethylboron, lithium tetraethylboron, lithium tetraethylaluminum, lithium triethylzinc, lithium tetraisopropylboron, lithium tetraoctylboron, lithium tetraoctylaluminum, lithium trioctylzinc, lithium tetraoctadecylboron, lithium tetraeicosylboron, lithium tetravinylboron, lithium tetra 2 butenylboron, lithium tetra-2- butenylalurninurn, lithium tri-Z-butenylzinc, lithium 1- hexynyl triethylboron, lithium tetraethynylboron, lithium tetracyclohexylboron, lithium tetracyclohexylaluminum, lithium tetraphenylboron, lithium tetrabenzylboron, lithium tetranaphthylboron, lithium tetracyclohexenylboron, lithium tetrabutadienylboron; lithium ethyltributylboron, lithium ethyldibutylcadmium, lithium ethyltrioctylboron, lithium ethyitrioctadecylboron, lithium ethyltricyclohexylboron, lithium ethyltriphenylboron, lithium ethy1tri 2- phenylethyl)boron, lithium ethyltriisopropylboron, lithium diethyldiisopropylboron, lithium diethyldiphenylboron, lithium diethyldioctadecylboron, lithium octyltrioctadecylboron; lithium ethylboron trichloride, trifluoride, tribromide, or .triiodide; lithium triethylboron hydride, lithium triethylaluminum hydride, lithium trioctylboron hydride; lithium ethyltrimethoxyboron, lithium triethylethoxyboron, lithium trioctylboron octanoate, lithium triethylboron or aluminum cyanide, lithium triphenylboron cyanide, lithium triethylboron cyanate and thiocyanate; lithium triethylboron amide, lithium triethylboron mercaptide, lithium triethylboron azide, lithium triethylboron acetate, lithium triethylboron octanoate, lithium triethylboron phenolate; lithium triethylboron, sulfate, nitrate, nitrite, sulfite, phosphate, phosphite, arsonate, or chlorate; potassium tetraethylboron, potassium tetraethylaluminum, lithium tetraethylboron, magnesium tetraethylaluminum, calcium tetraethylboron, magnesium tetraethylboron, strontium tetraethylboron, potassium ethyltriphenylboron, potassium triethylboron cyanide, potassium triethylboron chloride, potassium triethylboron cyanate, potassium triethylboron sulfate, and the like. It is to be understood that the hydrocarbon portions of the above and other bimetallic organometallic compounds can be further substituted with other functional groups which do not interfere with the reaction as, for example, the halogens, acid groups, both inorganic and organic, and the like. It is preferable that the R groups of the bimetallic organometallic be hydrocarbon groups, especially the lower alkyl in accordance with the present invention wherein at least one of the hydrocarbon groups is a cyclopentadienyl group arerlithiumboron tetrakis(cyclopentadienide), lithium aluminum 'tetrakis(cyclopentadienide), lithium aluminum tetrakis(methylcyclopentadienide), lithium gallium tetrakis (cyclopentadienide), lithuim indium tetrakis(ethylcyclopentadienide), lithium boron cyclopentadienide trihydride, lithium boron tris(cyclopentadienide) hydride, lithium aluminum tris(cyclopentadienide) hydride, lithium aluminumcyclopentadienide triethyl, lithium aluminum bis(cyclopentadienide) diethyl, lithium aluminum cyclopentadienide trimethyl, sodium aluminum cyclopentadienide triisobutyl, sodium aluminum cyclopentadienide diethylhydride, sodium aluminum cyclopentadienide trifluoride, sodium aluminum cyclopentadienide diethyl chloride, sodium aluminum cyclopentadienide ethyl dichloride, sodium aluminum cyclopentadienide ethyl dibromide, sodium aluminum cyclopentadienide ethyl difluoride, sodium aluminum cyclopentadienide ethyl diiodide, sodium aluminum tricyclopentadienide chloride, sodium aluminum tricyclopentadienide fluoride, sodium gallium *tricyclopentadienide ethyl, sodium gallium tetracyclopentadienide, sodium indium tetracyclopentadienide, sodium thallium cyclopentadienide trichloride, potassium boron tetracyclopentadienide, potassium boron tricyclepentadienide hydride, potassium boron tricyclopentadienide ethyl, potassium boron tricyclopentadienide chloride, potassium boron cyclopentadienide triethyl, potassium boron cyclopentadienide trihydride, potassium boron cyclopentadienide trichloride, potassium aluminum tetracyclopentadienide, potassium aluminum tetra indenide, rubidium aluminum tetracyclopentadienide, rubidium aluminum tetraethyl, cyclopentadienide, cesium boron tetraeyclopentadienide, cesium aluminum tetracyclopentadienide, beryllium bis(boron cyclopentadienide triethyl) beryllium bis(aluminum tetracyclopentadienide),berylliu bis (aluminum' tricyclopentadienide ethyl), beryllium bis (aluminum cyclopentadienide triethyl), magnesium bis boron tetracyclopentadienide), magnesium bis(boron tetraphenyl cyclopentadienide), magnesium bis(aluminum tetramethyl cyclopentadienide), magnesium bis(aluminum tricyclopentadienide chloride), magnesium bis (aluminum cyclopentadienide tribromide), calcium bis boron cyclopentadienide trichloride), calcium bis(boron cyclopentadienide trihydride), strontium bis(gallium tetracyclopentadienide), barium bis(indium tetrafluorenide), zinc bis'(boron tetracyclopentadienide), zinc bis(aluminum tetracyclopentadienide), zinc bis(aluminum cyclopentadienide triethyl), cadmium bis(alurniuum tetracyclopentadienide), mercury bis(boron cyclopentadienide trihydride), mercury bis(aluminum cyclopentadienide trihydride), mercury bis(aluminum cyclopentadienide trichloride), and mercury bis(gallium tetracyclopentadienide). In addition to the compounds above, similar compounds can be made containing other cyclopentadienyl groups including the isopropyl, diisopropyl, hexyl, tolyl, xylyl, and other alkyl and aryl derivatives of cyclopentadienyl groups.
When employing the bimetallic organometallic plating agents of this invention in the absence of a carrier gas, it is desirable to maintain enough vapor pressure below the decomposition temperature of the organometallic to enable the process to be conducted at an appreciable rate of plating. Too high vapor pressure results in poor substrate' adherence. Thus it is preferred to employ up to about mm. pressure during the plating operation; prefe'rably 0.01 to 10 mm. of pressure. When an inert carrier gas such as argon or other carrier gases such as hydrogen and carbon dioxide are employed in the process, it is desirable to employ a higher vapor pressure, e.g. between about 10 to 20 mm. of pressure. In this connection, however, it is to be noted that the partial pressure" of the bimetallic organometallic is about 0.01 to about 10 mm. pressure during the plating operation.
Although temperatures above the decomposition temperature of the organometallic plating agent are generally employed, (usually temperatures no higher than about 700 C. are used), a preferred temperature exists for each organom'etallic plating-agent. When'this temperature is employed betterplatingresultscan beobtained. At these temperatures exceptionally brighter, better adhering coatings are obtained.
By the term alloy as employed herein is meant a mixture of two or more metallic elements (or non-metals,
such as-Te, P) which have a metallic appearance and which are either: (1) A molecular mixture, microscopically homogeneous; (2) a colloidal mixture, microscopically heterogeneous; Hackhs Chemical Dictionary, 3rd edition (1944), McGraw-Hill Book Co., Inc., page 34.
In some cases more uniform'coating can be obtained through the employment of pack metallizing techniques. The plating agent when employed in such pack metallizing technique is a solid such as chromium tris(aluminum tetraethyl). One of the advantages of employing such pack metallizing techniques is that very uniform plating temperatures can be achieved because of the solid mate rials employed in this type of process. Pack metallizing involves packing the substrate to be plated into a metal or glass reaction vessel provided with a gas outlet means. (Usually a metal substrate is used.) With the plating agent is employed an'inert filler material such as sand, refractory powders or any other material inert under the application conditions. Thus the reaction vessel contains the object to be plated surrounded by the solid plating agent, the remaining space of the reaction vessel being filled with the aforesaid inert filler. The reaction container is thereafter placed in an induction heating furnace and the temperature of the furnace raised to a point above the decomposition temperature'of the plating agent. The following example'illustratesthis technique more fully.
Example X Compound Cr(AlEt '(chro'mium tris- (aluminum tetraethyl) Temp. of substrate 400 C. Nature of Substrate Mild steel. Pressure 0.1 mm. Time 1% hours. Results Dull, metallic. Method Pack metallizingi In addition to the thermal and ultrasonic techniques discussed hereinabove, other methods for decomposition of the bimetallic organometallic plating agents of the instant invention can also be employed. These other methods encompass other techniques such as decomposition of the bimetallic organometallic plating agent with ultraviolet irradiation. ln employing such a technique an apparatus substantially the same as employed in Example I is used with the exception that in place of the high frequency induction heating means a source of ultraviolet irradiation is employed. This ultraviolet technique is particularly applicable to those bimetallic organometallic compounds of this invention having good volatility characteristics.
Another decomposition technique which can be employed in achieving alloy plates from the plating agents of this invention involves chemical decomposition. Illustrative of such chemical decomposition is the decomposition of copper tetraethylaluminum by treating with acid (50 percent HCl) to produce a colloidal alloy deposition.
In general any substrate which is stable to decomposition at the temperatures employed in the plating process utilized are suitable substrates for this invention. Exemplary of the wide diversity of substrates which can be employed in the instant invention are metallic substrates such as ferrous metal substrates (particularly steel), aluminum, coper, yttrium, molybdenum, beryllium, and the like. Alloy substrates can also be employed which result in the deposition of an alloy upon an alloy material. Glass substrates such as Pyrex can be used. Other substrates which can be employed are ceramics, cermeis, refractories such as alumina, graphite and the like; plastics such as Teflon (e.g. polyfluoro hydrocarbons), and a multitude of cellulose materials such as Wood, cloth, paper, etc.
Other bimetallic organometallic plating agents can be employed in the above working examples to produce similar alloy plating on the substrate to be plated. Thus when tin tetramethylboron, scandium tetraethylboron, tin triethylzinc, titanium triethylzinc, potassium triethylboron chloride, sodium indium tetracyclopentadienide, beryllium bis(boron cyclopentadienide) triethyl, strontium bis(gallium tetracyclopentadienide), zinc bis(aluminum tetracyclopentadienide) are employed in the examples described above, alloy plates of the corresponding metals contained in each of these compounds are deposited upon the substrate plated.
The decomposition techniques of this invention can be varied so that, in some instances, substrates can be plated with one or both of the metals from the bimetalic organometallic compound while concurrently depositing therefrom metal powders. By such techniques it is possible to produce two useful materials from one plating agent, i.e. the plated article of manufacture and the concurrently deposited metallic powders.
The alloy depositions produced from bimetallic organometallic compounds according to the processes of this invention have many applications in the metallurgical and related arts. 'In the following working example the application of the processes of this invention to plating aircraft landing gear fabrication materials is illustrated.
Example X] A high performance steel aircraft landing gear structural member is placed in a conventional heating chamber provided with means for high frequency induction heating and gas inlet and outlet means. Lithium aluminum tetracyclopentadiem'de is placed in a standard vaporization chamber provided with heating means, said vaporization chamber being connected through an outlet port to the aforesaid combustion chamber inlet means. The member is heated to a temperature of approximately 350 C. and the system is evacuated. The lithium aluminum tetracyclopentadienide is heated to a temperature (about 150 C.) where it possesses vapor pressure of up to about mm. The lithium aluminum tetracyclopentadienide vapors are pulled through the system by a vacuum pump and they impinge on the heated aircraft landing gear structural member decomposing and forming a well adherent lithium-aluminum alloy coating over the entire surface of the structural member. In such a manner the structural member is coated with a high performance corrosion resistant lithium-aluminum alloy coating having high tensile strength for application to the extreme requirements of modern age aircraft.
We claim:
1. In a process for metal plating a substrate by decomposition of a metal containing compound in contact with said substrate, the improvement which comprises employing as said metal containing compound a bimetallic organometallic compound, containing at least two diiferent metals and wherein said organo group is an unsubstituted hydrocarbon group containing between about l-20 carbon atoms, and conducting said process in an inert atmosphere, essentially devoid of free hydrogen.
2. A process for plating a substrate comprising heating the object to be plated, in an inert atmosphere essentially devoid of free hydrogen, to a temperature above the decomposition temperature of a bimetallic organometallic compound and contacting said bimetallic compound with said heated object, said bimetallic organometallic compound being further defined as having the general formula wherein M is a metal selected from the groups consisting of groups I, H, III-B, IV-B, V-B, VI-B, VII-B, VIII, tin and aluminum; M is a difierent metal selected from the group consisting of group III-A, zinc and cadmium; R is a monovalent anion, x is an integer corresponding to the valence of the metal M, y is an integer corresponding to the valence M.
3. The process of claim 2 wherein said object is heated to a temperature above about 200 C. while maintained under an inert gas selected from the group consisting of nitrogen, neon, argon, krypton and xenon.
4. A process for plating a substrate which comprises heating said substrate to a temperature above the decom posit-ion temperature of tin bis(aluminum tetraethyl) and contacting the tin bis(aluminum tetraethyl) with said substrate; said process being conducted under vacuum; the (tin bis(aluminum tetraethyl) compound having a vapor pressure of up to about 10 millimeters of mercury.
5. A process for plating a ferrous metal substrate with an alloy of lithium and aluminum, which comprises heating said substrate to a temperature above the decomposition temperature of a bimetallic organometallic compound, wherein lithium, aluminum and an unsubstituted hydrocarbon group containing 1-20 carbon atoms are the exclusive constituents of the molecule, and contacting said compound with said substrate; said process being conducted under an inert atmosphere essentially devoid of free hydrogen.
6. A process for plating a substrate which comprises heating said substrate to a temperature above the decomposition temperature of lithium aluminum tetracyclopentadienide and contacting the lithium aluminum tetracyclopentadienide with said substrate; said process being conducted under vacuum; the lithium aluminum tetracyclopentadienide compound having a vapor pressure of up to about 10 millimeters of mercury.
References Cited in the file of this patent UNITED STATES PATENTS
Claims (1)
1. IN A PROCESS FOR METAL PLATING A SUBSTRATE BY DECOMPOSITION OF A METAL CONTAINING COMPOUND IN CONTACT WITH SAID SUBSTRATE, THE IMPROVEMENT WHICH COMPRISES EMPLOYING AS SAID METAL CONTAINING COMPOUND A BIMETALLIC ORGANOMETALLIC COMPOUND, CONTAINING AT LEAST TWO DIFFERENT METALS AND WHEREIN SAID ORGANO GROUP IS AN UNSUBSTITUTED HYDROCARBON GROUP CONTAINING BETWEEN ABOUT 1-20 CARBON ATOMS, AND CONDUCTING SAID PROCESS IN AN INERT ATMOSPHERE, ESSENTIALLY DEVOID OF FREE HYDROGEN.
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US831077A US3018194A (en) | 1959-08-03 | 1959-08-03 | Metal plating process |
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US831077A US3018194A (en) | 1959-08-03 | 1959-08-03 | Metal plating process |
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US3018194A true US3018194A (en) | 1962-01-23 |
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US831077A Expired - Lifetime US3018194A (en) | 1959-08-03 | 1959-08-03 | Metal plating process |
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Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3071493A (en) * | 1961-11-15 | 1963-01-01 | Ethyl Corp | Metal plating process |
US3167403A (en) * | 1960-06-09 | 1965-01-26 | Nat Steel Corp | Base materials coated with an alloy of aluminum and manganese |
US3355318A (en) * | 1963-09-26 | 1967-11-28 | Union Carbide Corp | Gas plating metal deposits comprising boron |
US3378401A (en) * | 1964-02-11 | 1968-04-16 | Minnesota Mining & Mfg | Process for the formation of visible images on a substrate |
US3894164A (en) * | 1973-03-15 | 1975-07-08 | Rca Corp | Chemical vapor deposition of luminescent films |
US3911176A (en) * | 1974-01-02 | 1975-10-07 | Rca Corp | Method for vapor-phase growth of thin films of lithium niobate |
USB381709I5 (en) * | 1973-07-23 | 1976-01-13 | ||
US4155235A (en) * | 1977-07-13 | 1979-05-22 | Armco Steel Corporation | Production of heavy pure aluminum coatings on small diameter tubing |
EP0073417A2 (en) * | 1981-08-27 | 1983-03-09 | Ruhrchemie Aktiengesellschaft | Use of a homogeneous coating of two or more metals or metal compounds |
US4851296A (en) * | 1985-07-03 | 1989-07-25 | The Standard Oil Company | Process for the production of multi-metallic amorphous alloy coatings on a substrate and product |
US4882206A (en) * | 1988-06-22 | 1989-11-21 | Georgia Tech Research Corporation | Chemical vapor deposition of group IIIB metals |
US4915988A (en) * | 1988-06-22 | 1990-04-10 | Georgia Tech Research Corporation | Chemical vapor deposition of group IIA metals and precursors therefor |
US4948623A (en) * | 1987-06-30 | 1990-08-14 | International Business Machines Corporation | Method of chemical vapor deposition of copper, silver, and gold using a cyclopentadienyl/metal complex |
US4992305A (en) * | 1988-06-22 | 1991-02-12 | Georgia Tech Research Corporation | Chemical vapor deposition of transistion metals |
DE102008029691A1 (en) * | 2008-06-24 | 2009-12-31 | Leibniz-Institut Für Neue Materialien Gemeinnützige Gmbh | Mixtures of precursors for the production of ceramic layers by means of MOCVD |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2898234A (en) * | 1953-08-14 | 1959-08-04 | Ohio Commw Eng Co | Method of producing composite metallic bodies |
US2903471A (en) * | 1958-01-13 | 1959-09-08 | Metal Hydrides Inc | Method for preparing a complex of an aluminum alcoholate with aluminum and boron hydrides |
-
1959
- 1959-08-03 US US831077A patent/US3018194A/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2898234A (en) * | 1953-08-14 | 1959-08-04 | Ohio Commw Eng Co | Method of producing composite metallic bodies |
US2903471A (en) * | 1958-01-13 | 1959-09-08 | Metal Hydrides Inc | Method for preparing a complex of an aluminum alcoholate with aluminum and boron hydrides |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3167403A (en) * | 1960-06-09 | 1965-01-26 | Nat Steel Corp | Base materials coated with an alloy of aluminum and manganese |
US3071493A (en) * | 1961-11-15 | 1963-01-01 | Ethyl Corp | Metal plating process |
US3355318A (en) * | 1963-09-26 | 1967-11-28 | Union Carbide Corp | Gas plating metal deposits comprising boron |
US3378401A (en) * | 1964-02-11 | 1968-04-16 | Minnesota Mining & Mfg | Process for the formation of visible images on a substrate |
US3894164A (en) * | 1973-03-15 | 1975-07-08 | Rca Corp | Chemical vapor deposition of luminescent films |
USB381709I5 (en) * | 1973-07-23 | 1976-01-13 | ||
US3984587A (en) * | 1973-07-23 | 1976-10-05 | Rca Corporation | Chemical vapor deposition of luminescent films |
US3911176A (en) * | 1974-01-02 | 1975-10-07 | Rca Corp | Method for vapor-phase growth of thin films of lithium niobate |
US4155235A (en) * | 1977-07-13 | 1979-05-22 | Armco Steel Corporation | Production of heavy pure aluminum coatings on small diameter tubing |
EP0073417A2 (en) * | 1981-08-27 | 1983-03-09 | Ruhrchemie Aktiengesellschaft | Use of a homogeneous coating of two or more metals or metal compounds |
DE3133871A1 (en) * | 1981-08-27 | 1983-03-10 | M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 8000 München | METHOD FOR PRODUCING HOMOGENOUS COATINGS FROM TWO OR MORE METALS AND / OR METAL COMPOUNDS |
EP0073417A3 (en) * | 1981-08-27 | 1983-04-20 | Ruhrchemie Aktiengesellschaft | Process for the deposition of a homogeneous coating of two or more metals or metal compounds |
US4510182A (en) * | 1981-08-27 | 1985-04-09 | Ruhrchemie Aktiengesellschaft | Method for the production of homogeneous coatings of two or more metals and/or metal compounds |
US4851296A (en) * | 1985-07-03 | 1989-07-25 | The Standard Oil Company | Process for the production of multi-metallic amorphous alloy coatings on a substrate and product |
US4948623A (en) * | 1987-06-30 | 1990-08-14 | International Business Machines Corporation | Method of chemical vapor deposition of copper, silver, and gold using a cyclopentadienyl/metal complex |
US4882206A (en) * | 1988-06-22 | 1989-11-21 | Georgia Tech Research Corporation | Chemical vapor deposition of group IIIB metals |
US4915988A (en) * | 1988-06-22 | 1990-04-10 | Georgia Tech Research Corporation | Chemical vapor deposition of group IIA metals and precursors therefor |
US4992305A (en) * | 1988-06-22 | 1991-02-12 | Georgia Tech Research Corporation | Chemical vapor deposition of transistion metals |
DE102008029691A1 (en) * | 2008-06-24 | 2009-12-31 | Leibniz-Institut Für Neue Materialien Gemeinnützige Gmbh | Mixtures of precursors for the production of ceramic layers by means of MOCVD |
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