+

US20180363137A1 - Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium - Google Patents

Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium Download PDF

Info

Publication number
US20180363137A1
US20180363137A1 US16/109,417 US201816109417A US2018363137A1 US 20180363137 A1 US20180363137 A1 US 20180363137A1 US 201816109417 A US201816109417 A US 201816109417A US 2018363137 A1 US2018363137 A1 US 2018363137A1
Authority
US
United States
Prior art keywords
gas
gas supply
hole
side pipe
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
US16/109,417
Inventor
Kosuke Takagi
Ryota Sasajima
Shintaro Kogura
Naonori Akae
Risa YAMAKOSHI
Toshiki Fujino
Masato Terasaki
Masanori Minami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to US16/109,417 priority Critical patent/US20180363137A1/en
Assigned to HITACHI KOKUSAI ELECTRIC INC. reassignment HITACHI KOKUSAI ELECTRIC INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FUJINO, TOSHIKI, YAMAKOSHI, RISA, SASAJIMA, RYOTA, AKAE, NAONORI, MINAMI, MASAYOSHI, TERASAKI, MASATO, KOGURA, SHINTARO, TAKAGI, KOSUKE
Publication of US20180363137A1 publication Critical patent/US20180363137A1/en
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HITACHI KOKUSAI ELECTRIC INC.
Pending legal-status Critical Current

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24—Deposition of silicon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
    • C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
    • C23C16/45531—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations specially adapted for making ternary or higher compositions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45578—Elongated nozzles, tubes with holes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
    • H01L21/02299—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment
    • H01L21/02312—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer pre-treatment treatment by exposure to a gas or vapour
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
    • H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
    • H01L21/02337—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a gas or vapour
    • H01L21/205—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • H01L21/54—Providing fillings in containers, e.g. gas fillings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
    • H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
    • H01L21/02211—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound being a silane, e.g. disilane, methylsilane or chlorosilane
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
    • H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD

Definitions

  • the present invention relates to a gas supply nozzle, a substrate processing apparatus, a method of manufacturing a semiconductor device, and a program.
  • a process of forming films on substrates is performed by non-simultaneously supplying a source gas and a reaction gas to multiple stages of the substrates arranged in a processing chamber.
  • the present invention is to provide a technique capable of improving film thickness uniformity among substrates.
  • a technology including: a nozzle base end portion which is provided in a processing chamber processing a substrate to extend in a vertical direction and into which a processing gas processing the substrate is introduced; a nozzle distal end portion which is configured in a U shape and in which a gas supply hole supplying the processing gas into the processing chamber is provided to a side surface of the substrate side; and a gas residence suppressing hole which is provided in a downstream end of the nozzle distal end portion and has a diameter larger than that of the gas supply hole.
  • FIG. 1 is a schematic configuration diagram illustrating a vertical processing furnace in a substrate processing apparatus appropriately used for an embodiment of the present invention and is a vertical cross-sectional diagram illustrating a processing furnace portion;
  • FIG. 2 is a schematic configuration diagram illustrating the vertical processing furnace in the substrate processing apparatus appropriately used for the embodiment of the present invention and is a cross-sectional diagram of the processing furnace portion taken along line A-A of FIG. 1 ;
  • FIG. 3 is a schematic configuration diagram illustrating a controller in the substrate processing apparatus appropriately used for the embodiment of the present invention and is a block diagram illustrating a control system of the controller;
  • FIG. 4 is a diagram illustrating an installation example of a process container and nozzles in the substrate processing apparatus appropriately used for the embodiment of the present invention
  • FIG. 5 is a perspective diagram illustrating the nozzle in the substrate processing apparatus appropriately used for the embodiment of the present invention.
  • FIG. 6A is an enlarged diagram illustrating a broken-line region A of the nozzle of FIG. 5
  • FIG. 6B is an enlarged diagram illustrating a broken-line region B of the nozzle of FIG. 5 ;
  • FIG. 7A is a diagram illustrating a relationship between a height direction of the nozzle and a gas reaction ratio in a straight nozzle shape
  • FIG. 7B is a diagram illustrating a relationship between the height direction of the nozzle and the gas reaction ratio in a case where a hole diameter of a gas residence suppressing hole in a nozzle distal end in the nozzle shape of FIG. 5 is ⁇ 1.1;
  • FIG. 7C is a diagram illustrating a relationship between the height direction of the nozzle and the gas reaction ratio in a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is ⁇ 4
  • FIG. 7D is a diagram illustrating a relationship between the height direction of the nozzle and the gas reaction ratio in a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is ⁇ 8;
  • FIG. 8A is a diagram illustrating an image of a gas reaction ratio distribution in the straight nozzle shape
  • FIG. 8B is a diagram illustrating an image of the gas reaction ratio distribution in a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ⁇ 1.1
  • FIG. 8C is a diagram illustrating an image of the gas reaction ratio distribution in a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ⁇ 8;
  • FIG. 9 is a diagram illustrating a film-forming sequence appropriately used for the embodiment of the present invention.
  • FIG. 10A is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ⁇ 4
  • FIG. 10B is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ⁇ 1.1
  • FIG. 10C is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ⁇ 8;
  • FIG. 10D is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ⁇ 4 and gas supply holes are provided to the nozzle at a downstream side from a folded portion of the nozzle
  • FIG. 10E is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ⁇ 4 and gas supply holes are provided to the nozzle at an upstream side from the folded portion of the nozzle
  • FIG. 10F is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG.
  • FIG. 10G is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG.
  • gas supply holes are provided to the nozzle at the upstream side from the folded portion between the nozzle center and the folded portion of the nozzle, and gas supply holes are provided to the nozzle at the downstream side from the folded portion of the nozzle between the nozzle center and the nozzle distal end portion;
  • FIG. 10H is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ⁇ 4, a length of the nozzle at the downstream side from the folded portion of the nozzle is large, and an installation position of gas supply hole at the downstream side from the folded portion of the nozzle is located in a lower portion of the reaction tube
  • FIG. 10I is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG.
  • FIG. 10J is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ⁇ 4, the length of the nozzle at the downstream side from the folded portion of the nozzle is large, and gas supply holes are provided to only the upstream side from the folded portion of the nozzle
  • FIG. 10K is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ⁇ 4, the length of the nozzle at the downstream side from the folded portion of the nozzle is large, and gas supply holes are provided to only the downstream side from the folded portion of the nozzle;
  • FIG. 11 is a diagram illustrating an installation example of a process container and nozzles in a substrate processing apparatus appropriately used for another embodiment of the present invention.
  • FIG. 12 is a schematic configuration diagram illustrating a vertical processing furnace in the substrate processing apparatus appropriately used for another embodiment of the present invention and is a cross-sectional diagram of the processing furnace portion taken along line A-A of FIG. 11 .
  • FIGS. 1 to 3 An embodiment of the present invention will be described with reference to FIGS. 1 to 3 .
  • a processing furnace 202 includes a heater 207 as a heating unit (heating mechanism).
  • the heater 207 has a cylindrical shape and is vertically installed by being supported by a heater base (not shown) as a holding plate.
  • the heater 207 also functions as an activating mechanism (excitation unit) of activating (exciting) a gas by heat as described later.
  • a reaction tube 203 constituting a reaction container is installed inside the heater 207 to be concentric with the heater 207 .
  • the reaction tube 203 is made of a heat resistant material such as quartz (SiO 2 ) or silicon carbide (SiC) and is formed in a cylindrical shape of which top end is closed and of which bottom end is opened.
  • a processing chamber 201 is formed in a cylindrical hollow portion of the reaction tube 203 .
  • the processing chamber 201 is configured so as to be capable of accommodating the wafers 200 as the substrates in the state that multiple stages of the wafers in a horizontal posture are arranged in the vertical direction by a later-described boat 217 .
  • a nozzle 249 a as the later-described first gas supply nozzle and a nozzle 249 b as the later-described second gas supply nozzle are incorporated into the processing chamber 201 so as to penetrate the lower side wall of the reaction tube 203 .
  • Each of the nozzles 249 a and 249 b is configured with quartz.
  • the nozzles 249 a and 249 b are connected to gas supply pipes 232 a and 232 b , respectively. In this manner, the two nozzles 249 a and 249 b and the two gas supply pipes 232 a and 232 b are provided to the reaction tube 203 , so that plural types of gases can be supplied to the processing chamber 201 .
  • the processing furnace 202 is not limited to the above-described form.
  • a metal manifold supporting the reaction tube 203 is provided to the lower side of the reaction tube 203 , and each nozzle may be provided so as to penetrate the side wall of the manifold.
  • the later-described exhaust pipe 231 may be further provided to the manifold.
  • the exhaust pipe 231 may be provided to not the manifold but the lower portion of the reaction tube 203 .
  • the furnace opening portion of the processing furnace 202 is made of a metal, and the nozzles and the like may be attached to the metal furnace opening portion.
  • Mass flow controllers (MFCs) 241 a and 241 b that are flow rate controllers (flow rate control units) and valves 243 a and 243 b that are opening/closing valves are provided to the gas supply pipes 232 a and 232 b in the order from the upstream direction, respectively.
  • Gas supply pipes 232 c and 232 d supplying inert gas are connected to downstream sides from the valves 243 a and 243 b of the gas supply pipes 232 a and 232 b , respectively.
  • MFCs 241 c and 241 d that are flow rate controllers (flow rate control units) and valves 243 c and 243 d that are opening/closing valves are provided to the gas supply pipes 232 c and 232 d in the order from the upstream direction, respectively.
  • each of the nozzles 249 a and 249 b is provided in a ring-shaped space between the inner wall of the reaction tube 203 and the wafers 200 along an upper portion from a lower portion of the inner wall of the reaction tube 203 so as to stand erect upwards in the arrangement direction of the wafers 200 .
  • each of the nozzles 249 a and 249 b is provided at the side of a wafer arrangement region where the wafers 200 are arranged in a region horizontally surrounding the wafer arrangement region so as to extend along the wafer arrangement region.
  • each of the nozzles 249 a and 249 b is provided on the side of the edge portion (circumference portion) of the wafer 200 carried into the processing chamber 201 to be perpendicular to the surface (flat surface) of the wafer 200 .
  • Each of the nozzles 249 a and 249 b is configured as an L-shaped long nozzle.
  • Each horizontal portion thereof is provided so as to penetrate a lower side wall of the reaction tube 203 , and each vertical portion thereof is provided so as to stand erect at least from the one end side to the other end side of the wafer arrangement region.
  • Gas supply holes 250 a and 250 c and the gas supply holes 250 b and 250 d supplying gases are provided to the respective side surfaces of the nozzles 249 a and 249 b .
  • the gas supply holes 250 a and 250 c provided to the nozzle 249 a are simply referred to as the gas supply hole 250 a ( 250 c )
  • the gas supply holes 250 b and 250 d provided to the nozzle 249 b are simply referred to as the gas supply hole 250 b ( 250 d ).
  • the gas supply holes 250 a , 250 b , 250 c , and 250 d are also collectively simply referred to as the gas supply hole 250 .
  • the gas supply holes 250 a ( 250 c ) and the gas supply holes 250 b ( 250 d ) are opened so as to be directed to the center of the reaction tube 203 , so that the gas can be supplied toward the wafer 200 .
  • the plural gas supply holes 250 a ( 250 c ) and the plural gas supply holes 250 b ( 250 d ) are provided over the range from the lower portion to the upper portion of the reaction tube 203 , have the same opening area, and are provided at the same opening pitch.
  • the gas is carried through the nozzles 249 a and 249 b arranged in a ring-shaped elongated space defined by an inner wall of the side wall of the reaction tube 203 and the edge portion (circumference portion) of the plural laminated wafers 200 , that is, in a cylindrical space.
  • the gas is ejected from the gas supply holes 250 a ( 250 c ) and 250 b ( 250 d ) opened in the respective nozzles 249 a and 249 b into the reaction tube 203 first in the vicinity of the wafers 200 .
  • the main flow of the gas in the reaction tube 203 is directed in the direction parallel to the surface of the wafer 200 , that is, in the horizontal direction.
  • gas can be uniformly supplied to each wafer 200 , so that it is possible to improve film thickness uniformity of a thin film formed on each wafer 200 .
  • the gas being flowed on the surface of the wafer 200 that is, the remaining gas after the reaction is flowed in the direction to the exhaust outlet, that is, the later-described exhaust pipe 231 .
  • the direction of the flow of the remaining gas is appropriately specified according to the position of the exhaust outlet, but the direction is not limited to the vertical direction.
  • a halosilane source gas containing Si and halogen elements as predetermined elements is supplied from the gas supply pipe 232 a through the MFC 241 a , the valve 243 a , and the nozzle 249 a to the processing chamber 201 .
  • the halosilane source gas is a gaseous halosilane source, for example, a gas obtained by vaporizing a halosilane source which is in a liquid state under the normal temperature and pressure, a halosilane source which is in a gas state under the normal temperature and pressure, or the like.
  • the halosilane source is a silane source having a halogen group.
  • the halogen group includes a chloro group, a fluoro group, a bromo group, an iodine group, and the like. Namely, the halogen group includes halogen elements such as chlorine (Cl), fluorine (F), bromine (Br), and iodine (I).
  • the halosilane source is a kind of a halide.
  • the case of using the term “source” includes a case where the source denotes a “liquid source in a liquid state”, a case where the source denotes a “source gas in a gas state”, or a case where the source denotes both thereof.
  • a C-free source gas containing Si and Cl that is, an inorganic-based chlorosilane source gas
  • an inorganic-based chlorosilane source gas for example, hexachlorodisilane (Si 2 Cl 6 , abbreviation: HCDS) gas, octachlorotrisilane (Si 3 Cl 8 , abbreviation: OCTS) gas, or the like may be used. It may be said that such a gas is a source gas having at least two Si in one molecule, further containing Cl, and having a Si—Si bond. Such a gas functions as a Si source in the later-described film-forming process.
  • halosilane source gas for example, a source containing Si, Cl, and an alkylene group and having a Si—C bond that is, an alkylene chlorosilane source gas that is an organic-based chlorosilane source gas may be used.
  • the alkylene group includes a methylene group, an ethylene group, a propylene group, a butylene group, and the like.
  • the alkylene chlorosilane source gas may also be referred to as an alkylene halosilane source gas.
  • alkylene chlorosilane source gas for example, bis(trichlorosilyl) methane ((SiCl 3 ) 2 CH 2 , abbreviation: BTCSM) gas, ethylene bis (trichlorosilane) gas, that is, 1,2-bis (trichlorosilyl) ethane ((SiCl 3 ) 2 C 2 H 4 , abbreviation: BTCSE) gas, or the like may be used.
  • BTCSM bis(trichlorosilyl) methane
  • ethylene bis (trichlorosilane) gas that is, 1,2-bis (trichlorosilyl) ethane ((SiCl 3 ) 2 C 2 H 4 , abbreviation: BTCSE) gas, or the like
  • BTCSE 1,2-bis (trichlorosilyl) ethane
  • a gas is a source gas having at least two Si in one molecule, further containing C and Cl, and having a Si—
  • halosilane source gas for example, a source gas containing Si, Cl, and an alkyl group and having a Si—C bond, that is, an alkyl chlorosilane source gas that is an organic-based chlorosilane source gas may be used.
  • the alkyl group includes a methyl group, an ethyl group, a propyl group, a butyl group, and the like.
  • the alkyl chlorosilane source gas may also be referred to as an alkyl halosilane source gas.
  • alkyl chlorosilane source gas for example, 1,1,2,2-tetrachloro-1,2-dimethyldisilane ((CH 3 ) 2 Si 2 Cl 4 , abbreviation: TCDMDS) gas, 1,2-dichloro-1,1,2,2-tetramethyl disilane ((CH 3 ) 4 Si 2 Cl 2 , abbreviation: DCTMDS) gas, 1-monochloro-1,1,2,2,2-pentamethyl disilane ((CH 3 ) 5 Si 2 Cl, abbreviation: MCPMDS) gas may be used. It may be said that such a gas is a source gas having at least two Si in one molecule, further containing C and Cl, and having a Si—C bond. In addition, such a gas further has a Si—Si bond. Such a gas functions as a Si source and functions as a C source in the later-described film-forming process.
  • TCDMDS 1,1,2,2-tetrachloro-1,2-dimethyldisi
  • the liquid-state source is vaporized by a vaporizing system such as a vaporizer or a bubbler to be supplied as a source gas (HCDS gas, BTCSM gas, TCDMDS gas, or the like).
  • a vaporizing system such as a vaporizer or a bubbler to be supplied as a source gas (HCDS gas, BTCSM gas, TCDMDS gas, or the like).
  • a reaction gas having a chemical structure (molecular structure) different from that of the source gas for example, a carbon (C)-containing gas is supplied from the gas supply pipe 232 a through the MFC 241 a , the valve 243 a , and the nozzle 249 a to the processing chamber 201 .
  • a carbon (C)-containing gas for example, a hydrocarbon-based gas may be used.
  • the hydrocarbon-based gas may be a material configured with only two elements of C and H and functions as a C source in the later-described film-forming process.
  • propylene (C 3 H 6 ) gas may be used as the hydrocarbon-based gas.
  • an oxygen (O)-containing gas is supplied from the gas supply pipe 232 b through the MFC 241 b , the valve 243 b , and the nozzle 249 b to the processing chamber 201 .
  • the O-containing gas functions as an oxidizing gas, that is, an O source in the later-described film-forming process.
  • oxygen gas (O 2 ) may be used as the O-containing gas.
  • reaction gas having a chemical structure different from that of the source gas for example, a hydrogen (H)-containing gas is supplied from the gas supply pipe 232 b through the MFC 241 b , the valve 243 b , and the nozzle 249 b to the processing chamber 201 .
  • H hydrogen
  • a hydrogen nitride-based gas that is a gas containing nitrogen (N) and hydrogen (H) may be used.
  • the hydrogen nitride-based gas may be a material configured with only two elements of N and H and may also be referred to as a nitrogen (N)-containing gas.
  • the N-containing gas functions as a nitriding gas, that is, an N source in the later-described film-forming process.
  • As the hydrogen nitride-based gas for example, ammonia (NH 3 ) gas may be used.
  • an amine-based gas that is a gas containing N, C, and H may be used.
  • the amine-based gas may be a material configured with only three elements of C, N, and H and may also be referred to as a gas containing N and C.
  • the amine-based gas functions as an N source and functions as a C source in the later-described film-forming process.
  • triethylamine ((C 2 H 5 ) 3 N, abbreviation: TEA) gas may be used as the amine-based gas.
  • the liquid state amine is vaporized by a vaporizing system such as a vaporizer or a bubbler to be supplied as amine-based gas (TEA gas).
  • a vaporizing system such as a vaporizer or a bubbler to be supplied as amine-based gas (TEA gas).
  • an organic hydrazine-based gas that is a gas containing N, C, and H may be used.
  • the organic hydrazine-based gas may be a material configured with only three elements of N, C, and H and may be referred to as a gas containing N and C.
  • the organic hydrazine-based gas functions as an N source and functions as a C source in the later-described film-forming process.
  • the organic hydrazine-based gas for example, trimethyl hydrazine ((CH 3 ) 2 N 2 (CH 3 )H, abbreviation: TMH) gas may be used.
  • the liquid state amine is vaporized by a vaporizing system such as a vaporizer or a bubbler to be supplied as organic hydrazine-based gas (TMH gas).
  • a vaporizing system such as a vaporizer or a bubbler to be supplied as organic hydrazine-based gas (TMH gas).
  • H-containing gas for example, an N-free or C-free gas such as hydrogen (H 2 ) gas or deuterium (D 2 ) gas may be used.
  • H 2 hydrogen
  • D 2 deuterium
  • the nitrogen (N 2 ) gas is supplied from the gas supply pipes 232 c and 232 d through the MFCs 241 c and 241 d , the valves 243 c and 243 d , the gas supply pipes 232 a and 232 b , and the nozzles 249 a and 249 b , respectively to the processing chamber 201 .
  • the source gas supply system is configured to mainly include the gas supply pipe 232 a , the MFC 241 a , and the valve 243 a .
  • the nozzle 249 a may be considered to be included in the source gas supply system.
  • the source gas supply system may also be referred to as a source supply system.
  • the source gas supply system may also be referred to as a halosilane source gas supply system or a halosilane source supply system.
  • the C-containing gas supply system is configured to mainly include the gas supply pipe 232 a , the MFC 241 a , and the valve 243 a .
  • the nozzle 249 a may be considered to be included in the C-containing gas supply system.
  • the C-containing gas supply system may also be referred to as a hydrocarbon-based gas supply system or a hydrocarbon supply system.
  • the O-containing gas supply system is configured to mainly include the gas supply pipe 232 b , the MFC 241 b , and the valve 243 b .
  • the nozzle 249 b may be considered to be included in the O-containing gas supply system.
  • the O-containing gas supply system may also be referred to as an oxidizing gas supply system or an oxidant supply system.
  • the H-containing gas supply system is configured to mainly include the gas supply pipe 232 b , the MFC 241 b , and the valve 243 b .
  • the nozzle 249 b may be considered to be included in the H-containing gas supply system.
  • the H-containing gas supply system may also be referred to as an N-containing gas supply system, an N- and H-containing gas supply system, or the like.
  • the H-containing gas supply system may also be referred to as an N-containing gas supply system, a C-containing gas supply system, an N- and C-containing gas supply system, or the like.
  • the N-containing gas supply system may also be referred to as a nitriding gas supply system or a nitriding agent supply system.
  • the H-containing gas supply system may also be referred to as a hydrogen nitride-based gas supply system, an amine-based gas supply system, or an organic hydrazine-based gas supply system.
  • the inert gas supply system is configured to mainly include the gas supply pipes 232 c and 232 d , the MFCs 241 c and 241 d , and the valves 243 c and 243 d .
  • the inert gas supply system may also be referred to as a purging gas supply system, a diluted gas supply system, or a carrier gas supply system.
  • all the gases of the source gas, the reaction gas, the inert gas, and the like which are supplied to the processing chamber 201 through the nozzles 249 a and 249 b may be collectively referred to as a processing gas.
  • the exhaust pipe 231 exhausting the atmosphere in the processing chamber 201 is provided to the reaction tube 203 .
  • a vacuum pump 246 as a vacuum evacuation apparatus is connected to the exhaust pipe 231 through a pressure sensor 245 as a pressure detector (pressure detection unit) detecting the pressure of the processing chamber 201 and an APC (auto pressure controller) valve 244 as a pressure regulator (pressure regulation unit).
  • the APC valve 244 is a valve configured to be capable of performing vacuum evacuation and vacuum evacuation stop of the processing chamber 201 by opening and closing the valve in the state that the vacuum pump 246 is operated and is also a valve configured to be capable of regulating the pressure of the processing chamber 201 by regulating a valve opening degree based on pressure information detected by the pressure sensor 245 in the state that the vacuum pump 246 is operated.
  • An exhaust system is configured to mainly include the exhaust pipe 231 , the APC valve 244 , and the pressure sensor 245 .
  • the vacuum pump 246 may be considered to be included in the exhaust system.
  • a seal cap 219 as a furnace opening lid body capable of air-tightly closing a bottom end opening of the reaction tube 203 is installed below the reaction tube 203 .
  • the seal cap 219 is configured so as to be in contact with the bottom end of the reaction tube 203 from the bottom side in the vertical direction.
  • the seal cap 219 is made of, for example, a metal such as SUS and is formed in a disk shape.
  • An O-ring 220 as a sealing member being in contact with the bottom end of the reaction tube 203 is provided on the top surface of the seal cap 219 .
  • a rotation mechanism 267 rotating the later-described boat 217 is provided to the side of the seal cap 219 opposite to the processing chamber 201 .
  • a rotation shaft 255 of the rotation mechanism 267 penetrates the seal cap 219 to be connected to the boat 217 .
  • the rotation mechanism 267 is configured to rotate the wafer 200 by rotating the boat 217 .
  • the seal cap 219 is configured to be lifted up and down in the vertical direction by a boat elevator 115 as a lifting mechanism provided vertically outside the reaction tube 203 .
  • the boat elevator 115 is configured to be capable of loading and unloading the boat 217 into and from the processing chamber 201 by lifting up and down the seal cap 219 .
  • the boat elevator 115 is configured as a carrying unit (carrying mechanism) carrying the boat 217 , that is, the wafer 200 into and from the processing chamber 201 .
  • the boat 217 as a substrate supporting jig is configured so as to support multiple stages of plural wafers, for example, 25 to 200 of the wafers 200 to be in a horizontal posture and to be arranged in the vertical direction in the state that the centers of the wafers are aligned with one another, namely, to arrange the wafers to be spaced with an interval.
  • the boat 217 is made of a heat resistant material such as quartz or SiC.
  • the lower portion of the boat 217 is supported by multiple stages of insulating plates 218 which are made of a heat resistant material such as quartz or SiC in a horizontal posture.
  • the insulating plates 218 are not provided in the lower portion of the boat 217 , but an insulating cylinder configured with a cylindrical member made of a heat resistant material such as quartz or SiC may be provided.
  • a temperature sensor 263 as a temperature detector is provided inside the reaction tube 203 .
  • the temperature sensor 263 is configured in an L shape similarly to the nozzles 249 a and 249 b and is provided along the inner wall of the reaction tube 203 .
  • a controller 121 that is a control unit is configured as a computer including a CPU (Central Processing Unit) 121 a , a RAM (Random Access Memory) 121 b , a memory device 121 c , and an I/O port 121 d .
  • the RAM 121 b , the memory device 121 c , and the I/O port 121 d are configured to be capable of exchanging data with the CPU 121 a via an internal bus 121 e .
  • An input/output device 122 such as a touch panel is connected to the controller 121 .
  • the memory device 121 c is configured with, for example, a flash memory, an HDD (hard disk drive), or the like.
  • a control program controlling operations of the substrate processing apparatus, an etching recipe, a process recipe, and the like describing procedures, conditions, and the like of an etching process and a film-forming process of the nozzle described later, and the like are readably stored in the memory device 121 c .
  • the etching recipe or the process recipe is a combination of procedures in the later-described substrate processing process so as to obtain a predetermined result by allowing the controller 121 to execute the procedures and functions as a program.
  • the process recipe, the control program, and the like are also collectively simply referred to as a program.
  • the etching recipe or the process recipe is also simply referred to as a recipe.
  • program there is a case including only the recipe alone, a case including only the control program along, or a case including both thereof.
  • the RAM 121 b is configured as a memory area (work area) temporarily retaining a program, data, and the like read out by the CPU 121 a.
  • the I/O port 121 d is connected to the MFCs 241 a to 241 d , the valves 243 a to 243 d , the pressure sensor 245 , the APC valve 244 , vacuum pump 246 , the heater 207 , the temperature sensor 263 , the rotation mechanism 267 , the boat elevator 115 , and the like described above.
  • the CPU 121 a is configured to execute reading the control program from the memory device 121 c and to read out the recipe from the memory device 121 c according to input or the like of a manipulation command from the input/output device 122 .
  • the CPU 121 a is configured to control, according to contents of the read recipe, flow rate regulating operations for various gases by the MFCs 241 a to 241 d , a pressure regulating operation by the APC valve 244 based on opening/closing operations of the valves 243 a to 243 d , opening/closing operations of the APC valve 244 , and the pressure sensor 245 , activating and stopping of the vacuum pump 246 , an adjusting operation of the temperature of the heater 207 based on the temperature sensor 263 , an adjusting operation of the rotation and rotation speed of the boat 217 by the rotation mechanism 267 , lifting up/down operations of the boat 217 by the boat elevator 115 , and the like.
  • the controller 121 may be configured to install the above-described program stored in an external memory device (for example, a magnetic tape, a magnetic disk such as a flexible disk or a hard disk, an optical disk such as a CD or a DVD, a magneto-optical disk such as an MO, or a semiconductor memory such as a USB memory or a memory card) 123 in the computer.
  • an external memory device for example, a magnetic tape, a magnetic disk such as a flexible disk or a hard disk, an optical disk such as a CD or a DVD, a magneto-optical disk such as an MO, or a semiconductor memory such as a USB memory or a memory card.
  • the memory device 121 c and the external memory device 123 are configured as a non-transitory computer-readable recording medium. Hereinafter, these are also collectively simply referred to as a recording medium.
  • supplying the program to the computer may be performed by using a communication unit such as the Internet or a private line without using the external memory device 123 .
  • the nozzle 249 for supplying the processing gas will be described with reference to FIGS. 4 to 8C .
  • the nozzles 249 a and 249 b supplying the gas are extended in the vertical direction inside the reaction tube 203 .
  • the nozzle 249 is configured with an L-shaped nozzle base end portion 270 and a U-shaped nozzle distal end portion 271 .
  • FIGS. 4 to 8C illustrate the nozzles 249 a and 249 b supplying the gas.
  • the nozzle distal end portion 271 is configured with a folded portion 273 , an upstream side pipe 271 - 1 connecting the nozzle base end portion 270 and the folded portion 273 , and a downstream side pipe 271 - 2 connected to a downstream end of the folded portion 273 .
  • the gas supply holes 250 supplying the processing gas to the processing chamber 201 are provided to side surfaces of the upstream side pipe 271 - 1 and the downstream side pipe 271 - 2 in the directions different from the folding direction of the folded portion 273 .
  • a gas residence suppressing hole 280 for suppressing residence of the processing gas in the nozzle is provided to the downstream end of the downstream side pipe 271 - 2 .
  • the folded portion 273 indicates the gas supply nozzle 249 existing at the side in the vertical direction upper than the gas supply hole 250 located at the highest position of the gas supply nozzle and indicates the portion of changing the direction of the gas flow.
  • the term “folded portion 273 ” there is one of a case denoting the “nozzle 249 existing at the side in the vertical direction upper than the gas supply hole 250 located at the highest position” and a case denoting the “portion of changing the direction of the gas flow in the nozzle distal end portion 271 ” or a case denoting both thereof.
  • the gas residence suppressing hole 280 is formed to have a hole diameter larger than that of the gas supply hole 250 in order to suppress the residence of the processing gas supplied to the nozzle 249 inside the nozzle and is formed to have a hole diameter smaller than a pipe diameter of the downstream side pipe 271 - 2 .
  • the processing gas is prevented from being in an exhaust rate-controlling of the gas residence suppressing hole 280 , so that it is possible to efficiently supply the uniformly activated processing gas from the gas supply hole 250 to the wafer 200 .
  • the hole diameter of the gas residence suppressing hole 280 is smaller than that of the gas supply hole 250 , the gas supplied to the nozzle 249 is hard to pull out, so that the gas resides in the downstream end of the downstream side pipe 271 - 2 . For this reason, a large amount of the processing gas which is heated by the heating unit to be activated is easily supplied mainly from the vicinity of the downstream end of the downstream side pipe 271 - 2 , and thus, the film thickness uniformity between the surfaces of the multiple stages of the wafers 200 arranged in the horizontal direction cannot be achieved.
  • a deposited film is formed on an inner wall in the vicinity of the downstream end of the downstream side pipe 271 - 2 by the activated processing gas, and in some cases, there is possibility that the gas supply holes 250 is obstracted.
  • the hole diameter of the gas residence suppressing hole 280 is formed to be a certain diameter, for example, a hole diameter equal to the pipe diameter of the downstream side pipe 271 - 2 , the supplied processing gas is in an exhaust rate-controlling of the gas residence suppressing hole 280 , so that it is difficult to supply the gas from the gas supply hole 250 .
  • the gas residence suppressing hole 280 needs to be configured to have a hole diameter larger than the hole diameter of the gas supply hole 250 .
  • the gas residence suppressing hole 280 is preferably configured to have a hole diameter in a range of 1.1 times to 25 times the hole diameter of the gas supply hole 250 . More appropriately, the gas residence suppressing hole 280 is preferably configured to have a hole diameter in a range of 5 times to 15 times the hole diameter of the gas supply hole 250 .
  • the hole diameter of the gas residence suppressing hole 280 is configured so that the flow velocity of the gas being flowed on a horizontal cross section Si of the upstream side pipe 271 - 1 located below the gas supply hole 250 a ( 250 b ) located at the lowest position of the upstream side pipe 271 - 1 is equal to the flow velocity of the gas being flowed on a horizontal cross section S 2 of the downstream side pipe 271 - 2 located below the gas supply hole 250 c ( 250 d ) located at the lowest position of the downstream side pipe 271 - 2 .
  • the gas residence suppressing hole 280 is provided at the distal end of the nozzle 249 downward, and for example, as illustrated in FIG. 1 or FIG. 4 , the gas residence suppressing hole 280 is located in the vicinity of an exhaust outlet.
  • FIGS. 7A to 7D The evaluation conditions in FIGS. 7A to 7D are as follows.
  • the substrate processing temperature is heated to 600° C., 0.3 slm of the HCDS gas and 0.5 slm of N 2 gas are supplied as the processing gas, the substrate processing pressure is set to 50 Pa, the hole diameter of the gas supply hole and the number of the gas supply holes are set to ⁇ 1 mm ⁇ 143, and the interval (pitch) of the gas supply holes is set to about 8 mm.
  • the substrate processing pressure is set to 50 Pa
  • the hole diameter of the gas supply hole and the number of the gas supply holes are set to ⁇ 1 mm ⁇ 143
  • the interval (pitch) of the gas supply holes is set to about 8 mm.
  • the gas supply holes are denoted by serial numbers over the range from the lower portion to the upper portion of the nozzle 249 in the vertical direction, heights corresponding to the serial numbers of the gas supply holes are indicated on the vertical axis, the reaction ratios (PT ⁇ /V a ) in the nozzle 249 obtained by calculation using pressure, temperature, density, and gas flow velocity in the nozzle are indicated on the horizontal axis.
  • the vertical axis indicates the height of the nozzle 249 in the vertical direction
  • the horizontal axis indicates the amount of the gas reacted (decomposed) in the nozzle 249 . It can be determined that, as the graph is close to a straight line, the inter-plane film thickness uniformity between the wafers 200 is good.
  • the processing gas in the nozzle is reacted (decomposed). Namely, the processing gas is reacted at the position which is farthest away from the nozzle upstream portion where the processing gas is introduced, and if this is compared with a predetermined film formed on the wafer 200 , it can be determined that the film thickness of the wafer 200 in the upper portion in the vertical direction is increased, and thus, the inter-plane film thickness uniformity cannot be achieved. If the magnitude of the decomposed amount is indicated by color density by using a schematic diagram of the nozzle shape, as illustrated in FIG.
  • FIG. 7B on the contrary to FIG. 7A , it can be understood that, as it goes to the lower portion of the graph, the processing gas is reacted inside the nozzle 249 .
  • This is the same as FIG. 7A in that the processing gas is reacted at the position which is farthest away from the nozzle base end portion 270 where the processing gas is introduced.
  • the nozzle distal end portion 271 of the nozzle 249 has a U shape and the distal end of the nozzle 249 is located at the lower portion in the vertical direction, that is, the position which is farthest away from the nozzle upstream portion where the processing gas is introduced.
  • the film thickness of a predetermined film formed on the wafer 200 is increased, so that the inter-plane film thickness uniformity between the wafers 200 cannot be easily achieved.
  • the gas residence suppressing hole 280 having a hole diameter of ⁇ 1.1 mm is provided at the distal end of the nozzle 249 , and the processing gas is exhausted from the gas residence suppressing hole 280 . Therefore, it can be determined that, in comparison with FIG. 7A , the flow velocity of the processing gas in the nozzle distal end portion is fast and the inter-plane film thickness uniformity of the film thickness between the wafers 200 is improved.
  • FIG. 7C similarly to FIG. 7B , as it goes to the lower portion of the graph, the gas is reacted inside the nozzle 249 .
  • the nozzle distal end portion 271 of the nozzle 249 has a U shape, and the distal end of the nozzle 249 at the position which is farthest away from the nozzle upstream portion where the processing gas is introduced is located in the lower portion in the vertical direction, so that the activated gas is easily supplied to the lower portion.
  • the magnitude of the decomposed amount is indicated by color density by using a schematic diagram of the nozzle shape, as illustrated in FIG.
  • the slope of the graph in the vertical direction is almost zero, and the reaction ration inside the nozzle is almost uniform in the upper and lower portions.
  • the inter-plane film thickness uniformity between the wafers 200 can be achieved. It is considered that this is because, as illustrated in FIG. 8C , the hole diameter of the gas residence suppressing hole 280 is formed to be ⁇ 8 mm, and thus, the flow velocity of the processing gas in the distal end portion of the nozzle 249 is higher than that of the case illustrated in FIG. 7C , so that the flow velocity is close to the flow velocity of the processing gas introduced into the nozzle distal end portion 271 .
  • the gas residence suppressing hole 280 By configuring the gas residence suppressing hole 280 in this manner, it can be determined that, without the processing gas supplied to the gas supply nozzle 249 being in an exhaust rate-controlling by the gas residence suppressing hole 280 , and the residence of the processing gas in the distal end portion of the nozzle 249 is suppressed, and the uniformly heated processing gas is supplied from the gas supply holes to the processing chamber 201 .
  • the hole diameter of the gas residence suppressing hole 280 is configured so as to be in a range of 1/90 times or more and less than 1 times the nozzle diameter of the nozzle 249 . It is more preferable that the hole diameter of the gas residence suppressing hole 280 is configured so as to be in a range of 0.3 times or more and 0.7 times or less the nozzle diameter of the nozzle 249 .
  • the hole diameter of the gas residence suppressing hole 280 is configured so as to be in a range of 0.05 times or more and less than 1 times the distal end area of the nozzle 249 . It is more preferable that the hole diameter of the gas residence suppressing hole 280 is configured so as to be in a range of 0.1 times or more and 0.5 times or less the distal end area of the nozzle 249 .
  • gas residence suppressing hole 280 may be provided to any location on the distal end surface of the nozzle 249 as well as the center of the distal end portion of the nozzle 249 , and plural gas residence suppressing holes may be provided. By such a configuration, it is possible to more efficiently suppress the residence of the gas in the distal end of the nozzle 249 .
  • a film is formed on the wafer 200 by performing a predetermined number of times (once or more) of a cycle of non-simultaneously performing:
  • a film containing Si, O, C, and N that is, a silicon oxycarbonitride film (SiOCN film) is formed on the wafer 200 by performing a predetermined number of times (n times) of a cycle of non-simultaneously, that is, without synchronization performing:
  • the SiOCN film may also be referred to as a C-containing silicon oxynitride film (SiON film), a C-added (doped) SiON film, or a C-containing SiON film.
  • the case of using the term “wafer” may include the case of denoting a “wafer itself” and the case of denoting a “stacked body (aggregate) of a wafer and predetermined layers, films, or the like formed on a surface thereof”. Namely, a wafer including predetermined layers, films, or the like formed on a surface thereof may be referred to as a wafer.
  • the case of using the phrase “surface of a wafer” may include the case of denoting a “surface (exposed surface) of a wafer itself” or the case of denoting a “surface of a predetermined layer, film, or the like formed on a wafer, that is, an uppermost surface of a wafer as a stacked body”.
  • the case of expressing the phrase “to supply a predetermined gas to a wafer” may include the case of denoting “to directly supply a predetermined gas to a surface (exposed surface) of a wafer itself” or the case of denoting “to supply a predetermined gas to a layer, film, or the like formed on a wafer, that is, to an uppermost surface of a wafer as a stacked body”.
  • the case of expressing the phrase “to form a predetermined layer (or film) on a wafer” may include the case of denoting “to directly form a predetermined layer (or film) on a surface (exposed surface) of a wafer itself” or the case of denoting “to form a predetermined layer (or film) on a layer or film formed on a wafer, that is, on an uppermost surface of a wafer as a stacked body”.
  • the plural wafers 200 are charged into the boat 217 (wafer charging). After that, as illustrated in FIG. 1 , the boat 217 supporting the plural wafers 200 is lifted up by the boat elevator 115 and is loaded into the processing chamber 201 (boat loading). In this state, the seal cap 219 is in the state that the seal cap seals the lower end of the reaction tube 203 through the O-ring 220 .
  • Vacuum evacuation pressure reducing evacuation
  • the vacuum pump 246 is performed by the vacuum pump 246 so that the processing chamber 201 , that is, the space where the wafer 200 exists is at a desired pressure (degree of vacuum).
  • the pressure of the processing chamber 201 is measured by the pressure sensor 245 , and the APC valve 244 is feedback controlled based on the measured pressure information.
  • the vacuum pump 246 maintains the state that the vacuum pump is operated at all the time at least until the process for the wafer 200 is ended.
  • the wafer 200 in the processing chamber 201 is heated by the heater 207 so as to be at a desired temperature.
  • the state of electric conduction to the heater 207 is feedback controlled based on temperature information detected by the temperature sensor 263 so that the processing chamber 201 has a desired temperature distribution.
  • the heating of the processing chamber 201 by the heater 207 continues to be performed at least until the process for the wafer 200 is ended.
  • rotation of the boat 217 and the wafer 200 by the rotation mechanism 267 is started.
  • the rotation of the boat 217 and the wafer 200 by the rotation mechanism 267 continues to be performed at least until the process for the wafer 200 is ended.
  • steps 1 to 4 are sequentially performed.
  • the HCDS gas is supplied to the wafer 200 in the processing chamber 201 .
  • the valve 243 a is opened, and the HCDS gas is flowed in the gas supply pipe 232 a .
  • the flow rate of the HCDS gas is regulated by the MFC 241 a , is supplied to the processing chamber 201 through the nozzle 249 a , and is exhausted from the exhaust pipe 231 .
  • the HCDS gas is supplied to the wafer 200 .
  • the valve 243 c is opened, the N 2 gas is flowed in the gas supply pipe 232 c .
  • the flow rate of the N 2 gas is regulated by the MFC 241 c , is supplied together with the HCDS gas to the processing chamber 201 , and is exhausted from the exhaust pipe 231 .
  • the valve 243 d is opened, and the N 2 gas is flowed in the gas supply pipe 232 d .
  • the N 2 gas is supplied to the processing chamber 201 through the gas supply pipe 232 b and the nozzle 249 b and is exhausted from the exhaust pipe 231 .
  • the supply flow rate of the HCDS gas controlled by the MFC 241 a is set, for example, to be a flow rate in a range of 1 to 2000 sccm, preferably 10 to 1000 sccm.
  • Each of the supply flow rates of the N 2 gas controlled by the MFCs 241 c and 241 d is set, for example, to be a flow rate in a range of 100 to 10000 sccm.
  • the pressure of the processing chamber 201 is set, for example, to be a pressure in a range of 1 to 2666 Pa, preferably 67 to 1333 Pa.
  • the time of supplying the HCDS gas to the wafer 200 is set, for example, to be a time in a range of 1 to 120 seconds, preferably 1 to 60 seconds.
  • the temperature of the heater 207 is set to a temperature so that the temperature of the wafer 200 is, for example, a temperature in a range of 250 to 700° C., preferably 300 to 650° C., more preferably 350 to 600° C.
  • the HCDS is less likely to be chemically adsorbed on the wafer 200 , and in some cases, a practical deposition rate cannot be obtained.
  • the temperature of the wafer 200 By setting the temperature of the wafer 200 to be 250° C. or more, this problem can be solved.
  • the temperature of the wafer 200 By setting the temperature of the wafer 200 to be 300° C. or more or to be 350° C. or more, the HCDS can be more sufficiently adsorbed on the wafer 200 , and a more sufficient deposition rate can be obtained.
  • the temperature of the wafer 200 exceeds 700° C., the CVD reaction becomes too strong (excessive gas phase reaction occurs). Therefore, the film thickness uniformity is likely to be deteriorated, and the control thereof is difficult.
  • a proper gas phase reaction can be induced. Therefore, the deterioration of the film thickness uniformity can be suppressed, and the control thereof can be performed.
  • the temperature of the wafer 200 is 650° C. or less or 600° C. or less, the surface reaction dominates the gas phase reaction. Therefore, the film thickness uniformity is easily secured, and the control thereof is facilitated.
  • the temperature of the wafer 200 may be set to be a temperature in a range of 250 to 700° C., preferably 300 to 650° C., more preferably 350 to 600° C.
  • a Si-containing layer containing Cl having a thickness of from a thickness less than that of a one-atom layer to a thickness of a several-atom layer is formed on the uppermost surface of the wafer 200 .
  • the Si-containing layer containing Cl may be a Si layer containing Cl, may be an HCDS adsorbing layer, or may include both thereof.
  • the Si layer containing Cl is a general term including a continuous layer being configured with Si and containing Cl, a discontinuous layer, and a Si thin film containing Cl obtained by overlapping the above layers.
  • the continuous layer being configured with Si and containing Cl may be called a Si thin film containing Cl.
  • the Si constituting the Si layer containing Cl includes Si of which bond to Cl is completely disconnected besides Si of which bond to Cl is not completely disconnected.
  • the HCDS adsorbing layer also includes a discontinuous adsorbing layer besides a continuous adsorbing layer configured with HCDS molecules.
  • the HCDS adsorbing layer includes an adsorbing layer having a thickness of a one-molecule layer configured with HCDS molecules or an adsorbing layer having a thickness less than that of the one-molecule layer.
  • the HCDS molecules constituting the HCDS adsorbing layer also include molecules where a portion of bonds with Si and Cl is disconnected.
  • the HCDS adsorbing layer may be a physical adsorbing layer of the HCDS, may be a chemical adsorbing layer of the HCDS, or may include both thereof.
  • a layer having a thickness less than that of a one-atom layer denotes a discontinuously formed atom layer
  • a layer having a thickness of a one-atom layer denotes a continuously formed atom layer
  • a layer having a thickness less than that of a one-molecule layer denotes a discontinuously formed molecule layer
  • a layer having a thickness of a one-molecule layer denotes a continuously formed molecule layer.
  • the Si-containing layer containing Cl may include both of the Si layer containing Cl and the HCDS adsorbing layer. However, as described above, the Si-containing layer containing Cl is expressed by using expression such as “one-atom layer”, “several-atom layer”, or the like.
  • the HCDS gas Under the condition that the HCDS gas is self-decomposed (thermally decomposed), that is, under the condition that a thermal decomposition reaction of the HCDS gas occurs, Si is deposited on the wafer 200 , so that the Si layer containing Cl is formed. Under the condition that the HCDS gas is not self-decomposed (thermally decomposed), that is, under the condition that the thermal decomposition reaction of the HCDS gas does not occur, the HCDS is adsorbed on the wafer 200 , so that the HCDS adsorbing layer is formed.
  • the formation of the Si layer containing Cl on the wafer 200 is preferred in comparison with the formation of the HCDS adsorbing layer on the wafer 200 in terms that the film-forming rate can be increased.
  • the thickness of the first layer exceeds a thickness of a several-atom layer, the function of the reformation in the later-described steps 3 and 4 does not reach the entire first layer.
  • the minimum value of the thickness of the first layer is less than a thickness of a one-atom layer. Therefore, the thickness of the first layer is preferably in a range from a thickness less than a one-atom layer to a thickness of a several-atom layer.
  • the thickness of the first layer By setting the thickness of the first layer to be a thickness of a one-atom layer or less, that is, to a thickness of a one-atom layer or a thickness less than that of a one-atom layer, the function of the reforming reaction in the later-described steps 3 and 4 can be relatively increased, and the time required for the reforming reaction in steps 3 and 4 can be shortened.
  • the time required for the formation of the first layer in step 1 can also be shortened.
  • the processing time per cycle can be shortened, and thus, the total processing time can also be shortened. Namely, it is possible to increase the film-forming rate.
  • the thickness of the first layer by setting the thickness of the first layer to be a thickness of a one-atom layer or less, it is possible to improve the controllability of the film thickness uniformity.
  • the valve 243 a is closed, so that the supply of the HCDS gas is stopped.
  • the APC valve 244 is maintained opened, so that the processing chamber 201 is vacuum-exhausted by the vacuum pump 246 , and the unreacted HCDS gas remaining in the processing chamber 201 or the HCDS gas after being contributed to the formation of the first layer is exhausted from the processing chamber 201 .
  • the valves 243 c and 243 d are maintained opened, so that the supply of the N 2 gas to the processing chamber 201 is maintained.
  • the N 2 gas functions as a purging gas, and thus, the effect of exhausting a gas remaining in the processing chamber 201 from the processing chamber 201 can be improved.
  • the gas remaining in the processing chamber 201 may not be completely exhausted, and the processing chamber 201 may not be completed purged. If the gas remaining in the processing chamber 201 is very small, no adverse effect occurs in step 2 performed subsequently. There is no need to set the flow rate of the N 2 gas supplied to the processing chamber 201 to be a large flow rate, and for example, by supply the N 2 gas of which amount is approximately equal to the volume of the reaction tube 203 (processing chamber 201 ), the purging can be performed to such an extent that no adverse effect occurs in step 2. In this manner, the processing chamber 201 is not completely purged, so that the purge time is shortened, and it is possible to improve the throughput. It is possible to suppress the consumption of the N 2 gas to a necessary minimum.
  • an inorganic-based halosilane source gas such as OCTS gas, dichlorosilane (SiH 2 Cl 2 , abbreviation: DCS) gas, monochlorosilane (SiH 3 Cl, abbreviation: MCS) gas, tetrachlorosilane, that is, silicon tetrachloride (SiCl 4 , abbreviation: STC) gas, or trichlorosilane (SiHCl 3 , abbreviation: TCS) gas may be used.
  • OCTS gas dichlorosilane (SiH 2 Cl 2 , abbreviation: DCS) gas
  • monochlorosilane (SiH 3 Cl, abbreviation: MCS) gas monochlorosilane
  • tetrachlorosilane that is, silicon tetrachloride (SiCl 4 , abbreviation: STC) gas
  • trichlorosilane SiHCl 3
  • an organic-based halosilane source gas such as BTCSE gas, BTCSM gas, TCDMDS gas, DCTMDS gas, or MCPMDS gas can be used.
  • a halogen group-free inorganic-based silane source gas such as monosilane (SiH 4 , abbreviation: MS) gas, disilane (Si 2 H 6 , abbreviation: DS) gas, or trisilane (Si 3 H 8 , abbreviation: TS) gas may be used.
  • a halogen group-free organic-based silane source gas such as dimethylsilane (SiC 2 H 8 , abbreviation: DMS) gas, trimethylsilane (SiC 3 H 10 , abbreviation: TMS) gas, diethylsilane (SiC 4 H 12 , abbreviation: DES) gas, or 1,4-disilabutane (Si 2 C 2 H 10 , abbreviation: DSB) gas may be used.
  • DMS dimethylsilane
  • TMS trimethylsilane
  • DES diethylsilane
  • DSB 1,4-disilabutane
  • a halogen group-free amino-based (amine-based) silane source gas such as trisdimethyl aminosilane (Si[N(CH 3 ) 2 ] 3 H, abbreviation: 3DMAS) gas, tetrakisdimethyl aminosilane (Si[N(CH 3 ) 2 ] 4 , abbreviation: 4DMAS) gas, bisdiethyl aminosilane (Si[N(C 2 H 5 ) 2 ] 2 H 2 , abbreviation: BDEAS) gas, or bis tertiarybutylaminosilane (SiH 2 [NH(C 4 H 9 )] 2 , abbreviation: BTBAS) gas may be used.
  • 3DMAS trisdimethyl aminosilane
  • tetrakisdimethyl aminosilane Si[N(CH 3 ) 2 ] 4
  • 4DMAS bisdiethyl aminosilane
  • BDEAS bisdiethyl aminosilane
  • C in the case of using an organic-based halosilane source gas or an organic-based silane source gas functioning as a C source as the source gas, C can be allowed to be included in the first layer.
  • the C concentration in the SiOCN film finally formed on the wafer 200 can be increased in comparison with the case of using an inorganic-based halosilane source gas or an inorganic-based silane source gas as the source gas.
  • C and N in the case of using an amino-based silane source gas functioning as a C source and an N source as the source gas, C and N can be allowed to be included in the first layer.
  • the C concentration and the N concentration in the SiOCN film finally formed on the wafer 200 can be increased respectively in comparison with the case of using an inorganic-based silane source gas as the source gas.
  • the inert gas besides the N 2 gas, for example, a rare gas such as Ar gas, He gas, Ne gas, or Xe gas may be used.
  • a rare gas such as Ar gas, He gas, Ne gas, or Xe gas may be used.
  • step 1 the C 3 H 6 gas which is activated by heat is supplied to the wafer 200 in the processing chamber 201 , that is, the first layer formed on the wafer 200 .
  • the control of opening and closing of the valves 243 a , 243 c , and 243 d is performed in the same procedure as that of the control of opening and closing of the valves 243 a , 243 c , and 243 d in step 1.
  • the flow rate of the C 3 H 6 gas is regulated by the MFC 241 a , is supplied to the processing chamber 201 through the nozzle 249 a , and is exhausted from the exhaust pipe 231 . At this time, the C 3 H 6 gas is supplied to the wafer 200 .
  • the supply flow rate of the C 3 H 6 gas controlled by the MFC 241 a is set, for example, to be a flow rate in a range of 100 to 10000 sccm.
  • the pressure of the processing chamber 201 is set, for example, to be a pressure in a range of 1 to 5000 Pa, preferably 1 to 4000 Pa.
  • the partial pressure of the C 3 H 6 gas in the processing chamber 201 is set, for example, to be a pressure in a range of 0.01 to 4950 Pa.
  • the C 3 H 6 gas that is activated by heat to be supplied can induce a relatively soft reaction, so that the later-described C-containing layer formation is facilitated.
  • the time of supplying the C 3 H 6 gas to the wafer 200 is set, for example, to be a time in a range of 1 to 200 seconds, preferably 1 to 120 seconds, more preferably 1 to 60 seconds.
  • the other process conditions are set, for example, to be the same as the process conditions of step 1.
  • the gas being flowed in the processing chamber 201 is the thermally activated C 3 H 6 gas, and the HCDS gas is not flowed in the processing chamber 201 . Therefore, the C 3 H 6 gas does not induce a gas phase reaction and is supplied to the wafer 200 in an activated state.
  • a carbon-containing layer (C-containing layer) is formed on the first layer formed on the wafer 200 in step 1, that is, on the surface of the Si-containing layer containing Cl.
  • the C-containing layer may be a C layer, may be a C 3 H 6 adsorbing layer, or may include both thereof.
  • the C-containing layer becomes a layer having a thickness less than that of a one-molecule layer or a thickness less than that of a one-atom layer, that is, a discontinuous layer.
  • a chemical adsorbing layer of the molecules constituting the C 3 H 6 is formed in an unsaturated state. Therefore, a second layer containing Si, Cl, and C is formed on the uppermost surface of the wafer 200 .
  • the second layer is a layer including a Si-containing layer containing Cl and a C-containing layer.
  • a portion of the first layer and the C 3 H 6 gas react with each other, and thus, the first layer is reformed (carbonized), so that the SiC layer is included in the second layer.
  • the C-containing layer needs to be configured as a discontinuous layer. If the C-containing layer is configured as a continuous layer, the entire surface of the Si-containing layer containing Cl is covered with the C-containing layer. In this case, Si does not exist on the surface of the second layer, and as a result, in some cases, the oxidizing reaction of the second layer in the later-described step 3 or the nitriding reaction of the third layer in the later-described step 4 is not easily performed. This is because, under the above-described process condition, O or N bonds to Si, but O or N does not easily bond to C.
  • the adsorption state of the C-containing layer for example, a chemical adsorbing layer of the C 3 H 6 on the Si-containing layer containing Cl is allowed to be an unsaturated state, and thus, Si needs to be in the state that Si is exposed to the surface of the second layer.
  • the process condition in step 2 is set to be a process condition within the above-described process condition range, it is possible to allow the C-containing layer to be a discontinuous layer.
  • the valve 243 a is closed, so that the supply of the C 3 H 6 gas is stopped.
  • the unreacted C 3 H 6 gas remaining in the processing chamber 201 , the C 3 H 6 gas after being contributed to the formation of the C-containing layer, or the reaction by-products is exhausted from the processing chamber 201 .
  • the gas remaining in the processing chamber 201 and the like may not be completely exhausted.
  • a hydrocarbon-based gas such as acetylene (C 2 H 2 ) gas or ethylene (C 2 H 4 ) gas may be used.
  • the inert gas besides the N 2 gas, for example, various types of the rare gases exemplified in step 1 may be used.
  • step 2 the O 2 gas which is activated by heat is supplied to the wafer 200 in the processing chamber 201 , that is, the second layer formed on the wafer 200 .
  • the control of opening and closing of the valves 243 b to 243 d is performed in the same procedure as that of the control of opening and closing of the valves 243 a , 243 c , and 243 d in step 1.
  • the flow rate of the O 2 gas is regulated by the MFC 241 b , is supplied to the processing chamber 201 through the nozzle 249 b , and is exhausted from the exhaust pipe 231 . At this time, the O 2 gas is supplied to the wafer 200 .
  • the supply flow rate of the O 2 gas controlled by the MFC 241 b is set, for example, to be a flow rate in a range of 100 to 10000 sccm.
  • the pressure of the processing chamber 201 is set, for example, to be a pressure in a range of 1 to 4000 Pa, preferably 1 to 3000 Pa.
  • the partial pressure of the O 2 gas in the processing chamber 201 is set, for example, to be a pressure in a range of 0.01 to 3960 Pa.
  • the O 2 gas that is activated by heat to be supplied can induce a relatively soft reaction, so that the later-described oxidation can be softly performed.
  • the time of supplying the O 2 gas to the wafer 200 is set, for example, to be a time in a range of 1 to 120 seconds, preferably 1 to 60 seconds.
  • the other process conditions are set, for example, to be the same as the process conditions of step 1.
  • the gas being flowed in the processing chamber 201 is the thermally activated O 2 gas, and the HCDS gas and the C 3 H 6 gas are not flowed in the processing chamber 201 . Therefore, the O 2 gas does not induce a gas phase reaction and is supplied to the wafer 200 in an activated state.
  • the O 2 gas supplied to the wafer 200 reacts with at least a portion of the second layer containing Si, Cl, and C (layer including the Si-containing layer containing Cl and the C-containing layer) formed on the wafer 200 in step 2.
  • the second layer is thermally oxidized in a non-plasma manner to be changed (reformed) into the third layer containing Si, O, and C, that is, the silicon oxycarbide layer (SiOC layer).
  • impurities such as Cl contained in the second layer constitute a gaseous material containing at least Cl in the process of the reforming reaction by the O 2 gas and is exhausted from the processing chamber 201 .
  • the impurities such as Cl in the second layer are extracted from the second layer or are desorbed, so that the impurities are separated from the second layer. Therefore, the third layer becomes a layer having a smaller number of the impurities such as Cl than the second layer.
  • the oxidizing reaction of the second layer is allowed not to be saturated.
  • the Si-containing layer containing Cl having a thickness of a several-atom layer is formed in step 1
  • the C-containing layer having a thickness less than that of a one-atom layer is formed in step 2
  • at least a portion of the surface layer (one-atom layer of the surface) is oxidized.
  • the oxidation is performed under the condition that the oxidizing reaction of the second layer is unsaturated.
  • the oxidizing of the only surface layer is preferred because the controllability of the composition ratio of the SiOCN film finally formed on the wafer 200 can be improved.
  • the Si-containing layer containing Cl having a thickness of a one-atom layer or a thickness less than that of a one-atom layer is formed in step 1
  • the C-containing layer having a thickness less than that of a one-atom layer is formed in step 2
  • a portion of the surface layer is oxidized.
  • the oxidation is performed under the condition that the oxidizing reaction of the second layer is unsaturated so that the entire second layer is not oxidized.
  • the process condition in step 3 to be a process condition within the above-described process condition range, it is possible to allow the oxidizing reaction of the second layer to be unsaturated.
  • the above-described process condition may be adjusted so that the dilution ratio of the O 2 gas is increased (concentration is decreased), the supply time of the O 2 gas is shortened, or the partial pressure of the O 2 gas is decreased.
  • the dilution ratio of the reaction gas may be increased, the supply time of the reaction gas may be shortened, or the partial pressure of the reaction gas may be decreased. Therefore, the oxidizing power in step 3 can be appropriately reduced, so that unsaturation of the oxidizing reaction of the second layer is further facilitated.
  • step 3 By reducing the oxidizing power in step 3, in the oxidizing process, it is possible to suppress desorption of C from the second layer. Since the bonding energy of the Si—O bond is higher than that of the Si—C bond, if the Si—O bond is formed, there is a tendency that the Si—C bond is disconnected. Therefore, by appropriately reducing the oxidizing power in step 3, when the Si—O bond is formed in the second layer, it is possible to suppress the disconnection of the Si—C bond, and thus, it is possible to suppress the desorption of the C of which bond to the Si is disconnected from the second layer.
  • the state that Si is exposed to the uppermost surface of the oxidized second layer, that is, the third layer can be retained.
  • the state that Si is exposed to the uppermost surface of the third layer is retained, so that in the later-described step 4, the nitridation of the uppermost surface of the third layer is facilitated.
  • the Si—O bond or the Si—C bond is formed over the entire uppermost surface of the third layer, and thus, the Si is not exposed to the uppermost surface, there is a tendency that the Si—N bond is not easily formed under the condition of the later-described step 4.
  • the valve 243 b is closed, so that the supply of the O 2 gas is stopped.
  • the unreacted O 2 gas remaining in the processing chamber 201 , the O 2 gas after being contributed to the formation of the third layer, or the reaction by-products is exhausted from the processing chamber 201 .
  • the gas remaining in the processing chamber 201 and the like may not be completely exhausted.
  • an O-containing gas such as water vapor (H 2 O gas), nitric oxide (NO) gas, nitrous oxide (N 2 O) gas, nitrogen dioxide (NO 2 ) gas, carbon monoxide (CO) gas, carbon dioxide (CO 2 ) gas, or ozone (O 3 ) gas may be used.
  • H 2 O gas water vapor
  • NO nitric oxide
  • N 2 O nitrous oxide
  • NO 2 nitrogen dioxide
  • CO carbon monoxide
  • CO 2 carbon dioxide
  • CO 2 carbon dioxide
  • O 3 ozone
  • the inert gas besides the N 2 gas, for example, various types of the rare gases exemplified in step 1 may be used.
  • step 3 the NH 3 gas which is activated by heat is supplied to the wafer 200 in the processing chamber 201 , that is, the third layer formed on the wafer 200 .
  • the control of opening and closing of the valves 243 b to 243 d is performed in the same procedure as the control of opening and closing of the valves 243 a , 243 c , and 243 d in step 1.
  • the flow rate of the NH 3 gas is regulated by the MFC 241 b , is supplied to the processing chamber 201 through the nozzle 249 b , and is exhausted from the exhaust pipe 231 . At this time, the NH 3 gas is supplied to the wafer 200 .
  • the supply flow rate of the NH 3 gas controlled by the MFC 241 b is set, for example, to be a flow rate in a range of 100 to 10000 sccm.
  • the pressure of the processing chamber 201 is set, for example, to be a pressure in a range of 1 to 4000 Pa, preferably 1 to 3000 Pa.
  • the partial pressure of the NH 3 gas in the processing chamber 201 is set, for example, to be a pressure in a range of 0.01 to 3960 Pa.
  • the NH 3 gas that is activated by heat to be supplied can induce a relatively soft reaction, so that the later-described nitridation can be softly performed.
  • the time of supplying the NH 3 gas to the wafer 200 is set, for example, to be a time in a range of 1 to 120 seconds, preferably 1 to 60 seconds.
  • the other process conditions are set, for example, to be the same as the process conditions of step 1.
  • the gas being flowed in the processing chamber 201 is the thermally activated NH 3 gas, and the HCDS gas, the C 3 H 6 gas, and the O 2 gas are not flowed in the processing chamber 201 . Therefore, the NH 3 gas does not induce a gas phase reaction and is supplied to the wafer 200 in an activated state.
  • the NH 3 gas supplied to the wafer 200 reacts with at least a portion of the third layer (SiOC layer) formed on the wafer 200 in step 3. Therefore, the third layer is thermally nitrided in a non-plasma manner to be changed (reformed) into a fourth layer containing Si, O, C, and N, that is, the silicon oxycarbonnitride layer (SiOCN layer).
  • impurities such as Cl contained in the third layer constitute a gaseous material containing at least Cl in the process of the reforming reaction by the NH 3 gas and is exhausted from the processing chamber 201 .
  • the impurities such as Cl in the third layer are extracted from the third layer or are desorbed, so that the impurities are separated from the third layer. Therefore, the fourth layer becomes a layer having a smaller number of the impurities such as Cl than the third layer.
  • the NH 3 gas used in step 4 functions as an adsorption/deposition facilitating gas facilitating adsorption and deposition of the HCDS or the Si on the uppermost surface of the fourth layer (uppermost surface of the wafer 200 ).
  • the nitriding reaction of the third layer is allowed not to be saturated.
  • the third layer having a thickness of the several-atom layer is formed insteps 1 to 3
  • at least a portion of the surface layer thereof is nitrided.
  • the nitridation is performed under the condition that the nitriding reaction of the third layer is unsaturated.
  • the nitriding of the only surface layer is preferred because the controllability of the composition ratio of the SiOCN film finally formed on the wafer 200 .
  • the third layer having a thickness of a one-atom layer or a thickness less than that of a one-atom layer is formed in steps 1 to 3, similarly, a portion of the surface layer is nitrided. Even in this case, the nitridation is performed under the condition that the nitriding reaction of the third layer is unsaturated so that the entire third layer is not nitrided.
  • the process condition in step 4 is set to be the process condition within the above-described process condition range, it is possible to allow the nitriding reaction of the third layer to be unsaturated.
  • the valve 243 b is closed, so that the supply of the NH 3 gas is stopped.
  • the unreacted NH 3 gas remaining in the processing chamber 201 , the NH 3 gas after being contributed to the formation of the fourth layer, or the reaction by-products is exhausted from the processing chamber 201 .
  • the gas remaining in the processing chamber 201 and the like may not be completely exhausted.
  • nitriding gas besides the NH 3 gas, a hydrogen nitride-based gas such as diazene (N 2 H 2 ) gas, hydrazine (N 2 H 4 ) gas, or N 3 H 8 gas or a gas containing a compound thereof may be used.
  • a hydrogen nitride-based gas such as diazene (N 2 H 2 ) gas, hydrazine (N 2 H 4 ) gas, or N 3 H 8 gas or a gas containing a compound thereof may be used.
  • the inert gas besides the N 2 gas, for example, various types of the rare gases exemplified in step 1 may be used.
  • the SiOCN film having a predetermined composition and a predetermined film thickness may be formed on the wafer 200 by performing a predetermined number of times (n times) of the cycle of performing the above-described four steps non-simultaneously, that is, without synchronization.
  • n times a predetermined number of times (n times) of the cycle of performing the above-described four steps non-simultaneously
  • the above-described cycle is repeated in several times. Namely, it is preferable that the thickness of the fourth layer (SiOCN layer) formed by performing the above-described cycle once is allowed to be smaller than a desired film thickness, and the above-described cycle is repeated several times until the film thickness of the SiOCN film formed by laminating the fourth layer (SiOCN layer) becomes a desired film thickness.
  • the valves 243 c and 243 d are opened, so that the N 2 gas is supplied from the respective gas supply pipes 232 c and 232 d to the processing chamber 201 and is exhausted from the exhaust pipe 231 .
  • the N 2 gas functions as a purging gas. Therefore, the processing chamber 201 is purged, a gas or a reaction by-products remaining in the processing chamber 201 is removed (purged) from the processing chamber 201 . After that, the atmosphere in the processing chamber 201 is replaced with an inert gas (inert gas replacement), and the pressure of the processing chamber 201 is returned to the normal pressure (atmospheric pressure return).
  • the seal cap 219 is lifted down by the boat elevator 115 , and thus, the bottom end of the reaction tube 203 is opened.
  • the processed wafer 200 is unloaded from the bottom end of the reaction tube 203 to the outside of the reaction tube 203 in the state that the wafer is supported by the boat 217 (boat unloading).
  • the processed wafer 200 is discharged from the boat 217 (wafer discharging).
  • the nozzle distal end portion 271 is configured to have a U shape, so that it is possible to lengthen the heating time or the distance of the processing gas introduced into the gas supply nozzle, and it is possible to uniformly supply the activated processing gas to the wafer.
  • the gas residence suppressing hole 280 is provided to the distal end of the nozzle 249 , so that it is possible to suppress the residence of the processing gas in the distal end of the nozzle.
  • the gas residence suppressing hole 280 is provided to the distal end of the nozzle 249 , so that it is possible to suppress a decrease in gas flow velocity of the processing gas as it goes toward the distal end of the nozzle, and it is possible to uniformly supply the processing gas from the gas supply hole to the wafer.
  • the gas residence suppressing hole 280 is provided to the distal end of the nozzle 249 , so that it is possible to prevent by-products such as particles inside the nozzle 249 from being attached on the wafer 200 .
  • the hole diameter of the gas residence suppressing hole 280 is configured to be larger than that of the gas supply hole 250 , so that it is possible to efficiently suppress the residence of the gas in the distal end of the nozzle.
  • the hole diameter of the gas residence suppressing hole 280 is configured to have such a size that the flow velocity of the gas supplied to the most upstream of the upstream side pipe 271 - 1 is equal to the flow velocity of the gas supplied to the most downstream of the downstream side pipe 271 - 2 , so that it is possible to prevent the supplied processing gas from being in the exhaust rate-controlling by the gas residence suppressing hole 280 , and it is possible to uniformly supply the gas from the gas supply hole 250 to the wafer.
  • the gas supply holes 250 are provided to both of the upstream side pipe 271 - 1 and the downstream side pipe 271 - 2 of the nozzle 249 , and as illustrated in FIG. 10D , the gas supply holes 250 are provided to only the downstream side pipe 271 - 2 , and thus, the processing gas activated by heating is easily supplied on the wafer 200 , so that it is possible to obtain the effect that it is possible to improve the inter-plane film thickness uniformity between the wafers.
  • the gas supply holes 250 are provided to only the upstream side pipe 271 - 1 , and thus, even in a case where by-products such as particles inside the nozzle occur, since the gas supply holes 250 are not provided to the downstream side pipe 271 - 2 , it is possible to obtain the effect that it is possible to easily exhaust the by-products such as particles to an exhaust direction.
  • the installation heights of the gas supply holes 250 provided to the upstream side pipe 271 - 1 and the downstream side pipe 271 - 2 are formed to be different from each other, so that it is possible to obtain the effect that it is possible to uniformly supply the activated processing gas to the wafer 200 .
  • the gas supply holes 250 are provided, so that in a height-direction central portion of the upstream side pipe 271 - 1 and a height-direction central portion of the downstream side pipe 271 - 2 , the activated processing gas can be easily supplied.
  • the invention can be effectively used for a case where the reaction of the processing gas in the vicinity of the central portion of the wafer arrangement region is bad.
  • the gas supply holes 250 are provided, so that in the vicinity of the highest position or the lowest position of the wafer arrangement region, the activated processing gas can be easily supplied. Therefore, the invention can be effectively used for a case where the reaction of the processing gas in the vicinity of the highest position or the lowest position of the wafer arrangement region is bad.
  • the gas residence suppressing hole 280 is provided to as low a portion as possible in the vertical direction, so that it is possible to prevent by-products such as particles from being attached on the wafer 200 .
  • the gas residence suppressing hole 280 is provided to a position lower than the region where the wafer 200 is supported.
  • the gas residence suppressing hole 280 is formed so as to be located in an insulating region below the region where the wafer 200 is supported, and thus, the gas residence suppressing hole 280 can be arranged in the vicinity of the exhaust outlet, so that the gas containing by-products such as particles can be exhausted in the vicinity of the exhaust outlet. Therefore, even in a case where by-products such as particles occur inside the nozzle 249 due to peeling of the deposited film or the like, the gas exhausted from the gas residence suppressing hole 280 is immediately exhausted from the exhaust outlet of the exhaust pipe 231 , so that it is possible to prevent the by-products such as particles from being attached on the wafer 200 .
  • an etching gas can be directly supplied to the insulating region at the time of cleaning a processing chamber by supplying the etching gas, and thus, it is possible to efficiently remove the deposited film which is deposited in the insulating region.
  • a substrate processing apparatus is different from that of the first embodiment in that, as illustrated in FIG. 11 , the nozzle 249 a supplying the source gas is arranged as a U-shaped nozzle, and instead of the nozzle 249 b illustrated in FIGS. 1 and 2 , a nozzle supplying the reaction gas or the inert gas is arranged as a straight-pipe-type nozzle 251 .
  • the other configurations are the same as those of the first embodiment.
  • nozzle 249 a supplying a source gas which needs to be activated by heating is arranged as a U-shaped nozzle, so that it is possible to facilitate maintenance, and it is possible to reduce device cost.
  • the present invention is not limited thereto.
  • the nozzle illustrated in FIG. 10C may be used as the nozzle 249 a
  • the nozzle illustrated in FIG. 10E may be used as the nozzle 249 b
  • the installation positions of the gas supply holes may be different between the nozzles 249 a and 249 b.
  • the to-be-formed films can be changed by changing the types of the supplied gases or the supply timing thereof.
  • a reaction gas is arbitrarily selected to be used, or a supply order of a source gas and a reaction gas is arbitrarily changed, so that composition, composition ratio, film quality, or the like of a to-be-formed film can be changed.
  • plural kinds of the reaction gases may be used in a form of an arbitrary combination thereof.
  • the NH 3 gas, the TEA gas, or the HCDS gas may be added (mixed) with the C 3 H 6 gas in use. Therefore, a composition, a composition ratio, a film quality, or the like of a to-be-formed film can be changed.
  • the silicon-based insulating film formed by the film-forming sequence illustrated in FIG. 9 or by each modified example is used as a sidewall spacer, so that it is possible to provide a device forming technique having a small leak current and an excellent processability.
  • the above-described silicon-based insulating film is used as an etching stopper, so that it is possible to provide a device forming technique having an excellent processability.
  • the supply flow rate of the TEA gas controlled by the MFC 241 b is set, for example, to be a flow rate in a range of 100 to 10000 sccm.
  • the pressure of the processing chamber 201 is set, for example, to be a pressure in a range of 1 to 5000 Pa, preferably 1 to 4000 Pa.
  • the partial pressure of the TEA gas in the processing chamber 201 is set, for example, to be a pressure in a range of 0.01 to 4950 Pa.
  • the time of supplying the TEA gas to the wafer 200 is set, for example, to be a time in a range of 1 to 200 seconds, preferably 1 to 120 seconds, more preferably 1 to 60 seconds.
  • the other process conditions are set, for example, to be the same as the process conditions of step 4 of the film-forming sequence illustrated in FIG. 9 .
  • an ethylamine-based gas such as diethylamine ((C 2 H 5 ) 2 NH, abbreviation: DEA) gas or monoethylamine (C 2 H 5 NH 2 , abbreviation: MEA) gas
  • a methylamine-based gas such as trimethylamine ((CH 3 ) 3 N, abbreviation: TMA) gas, dimethylamine ((CH 3 ) 2 NH, abbreviation: DMA) gas, or monomethylamine (CH 3 NH 2 , abbreviation: MMA) gas, or the like may be used.
  • the process procedure and process condition of the other steps may be set, for example, to be the same as the process procedure and process condition of each step in the film-forming sequence illustrated in FIG. 9 .
  • the film-forming sequence described in the above-described exemplary embodiment may be appropriately applied to even the case of forming an oxide film containing a metal element such as titanium (Ti), zirconium (Zr), hafnium (Hf), tantalum (Ta), niobium (Nb), aluminum (Al), molybdenum (Mo), or tungsten (W), that is, a metal-based oxide film on the wafer 200 .
  • a metal element such as titanium (Ti), zirconium (Zr), hafnium (Hf), tantalum (Ta), niobium (Nb), aluminum (Al), molybdenum (Mo), or tungsten (W), that is, a metal-based oxide film on the wafer 200 .
  • the above-described film-forming sequence can also be appropriately applied to the case of forming a TiOCN film, a TiOC film, a TION film, a TiO film, a ZrOCN film, a ZrOC film, a ZrON film, a ZrO film, a HfOCN film, a HfOC film, a HfON film, an HfO film, a TaOCN film, a TaOC film, a TaON film, a TaO film, an NbOCN film, an NbOC film, an NbON film, an NbO film, an AlOCN film, an AlOC film, an AlON film, an AlO film, an MoOCN film, an MoOC film, an MoON film, an MoO film, a WOCN film, a WOC film, a WON film, or a WO film on the wafer 200 .
  • an inorganic metal source gas containing a metal element and a halogen element such as a titanium tetrachloride (TiCl 4 ) gas, a titanium tetrafluoride (TiF 4 ) gas, a zirconium tetrachloride (ZrCl 4 ) gas, a zirconium tetrafluoride (ZrF 4 ) gas, a hafnium tetrachloride (HfCl 4 ) gas, a hafnium tetrafluoride (HfF 4 ) gas, a tantalum pentachloride (TaCl 5 ) gas, a tantalum pentafluoride (TaF 5 ) gas, a niobium pentachloride (NbCl 5 ) gas, a niobium pentafluoride (NbF 5 ) gas, a niobium pentafluoride (NbF 5
  • an organic metal source gas containing a metal element and carbon such as a trimethyl aluminum (Al(CH 3 ) 3 , abbreviation: TMA) gas may be used.
  • TMA trimethyl aluminum
  • a reaction gas the same as those of the above-described embodiment may be used.
  • a TION film or TiO film may be formed on the wafer 200 .
  • the present invention can be appropriately applied to the case of forming a film containing predetermined elements such as semiconductor elements or metal elements. Even in the case of performing the film forming, the film forming can be performed in the same process conditions as those of the above-described embodiments, so that it is possible to obtain the same effects as those of the above-described embodiments.
  • recipes programs where process procedures or process conditions are written
  • contents of process film types, composition ratios, film qualities, film thicknesses, process procedures, process conditions, and the like of films which are to be formed on a substrate
  • the CPU 121 a appropriately selects a proper recipe according to the contents of the process among plural recipes stored in the memory device 121 c . Therefore, films having various film types, composition ratios, film qualities, and film thicknesses can be allowed to be formed with good reproducibility by one substrate processing apparatus.
  • the burden of the operator burden of inputting of the process procedure, the process condition, and the like
  • the above-described process recipe is not limited to a case where the recipe is newly produced, but for example, an existing recipe which is installed in advance in the substrate processing apparatus may be modified to be prepared.
  • the modified recipe may be installed in the substrate processing apparatus through an electric communication line or a recording medium where the recipe is recorded.
  • an existing recipe installed in advance in the substrate processing apparatus may be allowed to be directly modified.
  • the examples of forming films by using a substrate processing apparatus having a hot-wall-type processing furnace were described.
  • the present invention is not limited to the above-described embodiments, but the present invention can be appropriately applied to even the case of forming films by using a substrate processing apparatus having a cold-wall-type processing furnace.
  • film-forming can be performed in the same sequence and process conditions as those of the above-described embodiments or modified examples so that it is possible to obtain the same effects as those of the above-described embodiments or modified examples.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

Provided is a technology including a nozzle base end portion which is provided in a processing chamber processing a substrate to extend in a vertical direction and into which a processing gas processing the substrate is introduced, a nozzle distal end portion which is configured in a U shape and in which a gas supply hole supplying the processing gas is provided to a side surface of the substrate, and a gas residence suppressing hole which is provided in a downstream end of the nozzle distal end portion and has a diameter larger than that of the gas supply hole.

Description

    BACKGROUND OF THE INVENTION Field of the Invention
  • The present invention relates to a gas supply nozzle, a substrate processing apparatus, a method of manufacturing a semiconductor device, and a program.
    • Description of the Related Art
  • As one process of a process of manufacturing a semiconductor device, in some cases, a process of forming films on substrates is performed by non-simultaneously supplying a source gas and a reaction gas to multiple stages of the substrates arranged in a processing chamber.
    • SUMMARY OF THE INVENTION
  • However, in recent years, since such a semiconductor device has a tendency to be highly integrated and the pattern size has been remarkably miniaturized, it has been difficult to uniformly form films on a substrate. The present invention is to provide a technique capable of improving film thickness uniformity among substrates.
  • According to an aspect of the present invention, there is provided a technology including: a nozzle base end portion which is provided in a processing chamber processing a substrate to extend in a vertical direction and into which a processing gas processing the substrate is introduced; a nozzle distal end portion which is configured in a U shape and in which a gas supply hole supplying the processing gas into the processing chamber is provided to a side surface of the substrate side; and a gas residence suppressing hole which is provided in a downstream end of the nozzle distal end portion and has a diameter larger than that of the gas supply hole.
  • According to the present invention, it is possible to improve film thickness uniformity among substrates.
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is a schematic configuration diagram illustrating a vertical processing furnace in a substrate processing apparatus appropriately used for an embodiment of the present invention and is a vertical cross-sectional diagram illustrating a processing furnace portion;
  • FIG. 2 is a schematic configuration diagram illustrating the vertical processing furnace in the substrate processing apparatus appropriately used for the embodiment of the present invention and is a cross-sectional diagram of the processing furnace portion taken along line A-A of FIG. 1;
  • FIG. 3 is a schematic configuration diagram illustrating a controller in the substrate processing apparatus appropriately used for the embodiment of the present invention and is a block diagram illustrating a control system of the controller;
  • FIG. 4 is a diagram illustrating an installation example of a process container and nozzles in the substrate processing apparatus appropriately used for the embodiment of the present invention;
  • FIG. 5 is a perspective diagram illustrating the nozzle in the substrate processing apparatus appropriately used for the embodiment of the present invention;
  • FIG. 6A is an enlarged diagram illustrating a broken-line region A of the nozzle of FIG. 5, and FIG. 6B is an enlarged diagram illustrating a broken-line region B of the nozzle of FIG. 5;
  • FIG. 7A is a diagram illustrating a relationship between a height direction of the nozzle and a gas reaction ratio in a straight nozzle shape, and FIG. 7B is a diagram illustrating a relationship between the height direction of the nozzle and the gas reaction ratio in a case where a hole diameter of a gas residence suppressing hole in a nozzle distal end in the nozzle shape of FIG. 5 is ϕ1.1;
  • FIG. 7C is a diagram illustrating a relationship between the height direction of the nozzle and the gas reaction ratio in a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is ϕ4, and FIG. 7D is a diagram illustrating a relationship between the height direction of the nozzle and the gas reaction ratio in a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is ϕ8;
  • FIG. 8A is a diagram illustrating an image of a gas reaction ratio distribution in the straight nozzle shape, FIG. 8B is a diagram illustrating an image of the gas reaction ratio distribution in a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ϕ1.1, and FIG. 8C is a diagram illustrating an image of the gas reaction ratio distribution in a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ϕ8;
  • FIG. 9 is a diagram illustrating a film-forming sequence appropriately used for the embodiment of the present invention;
  • FIG. 10A is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ϕ4, FIG. 10B is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ϕ1.1, and FIG. 10C is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ϕ8;
  • FIG. 10D is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ϕ4 and gas supply holes are provided to the nozzle at a downstream side from a folded portion of the nozzle, FIG. 10E is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ϕ4 and gas supply holes are provided to the nozzle at an upstream side from the folded portion of the nozzle, FIG. 10F is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ϕ4, gas supply holes are provided to the nozzle at the upstream side from the folded portion of the nozzle between a nozzle center and a nozzle base end portion, and gas supply holes are provided to the nozzle at the downstream side from the folded portion of the nozzle between the nozzle center and the folded portion of the nozzle, and FIG. 10G is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ϕ4, gas supply holes are provided to the nozzle at the upstream side from the folded portion between the nozzle center and the folded portion of the nozzle, and gas supply holes are provided to the nozzle at the downstream side from the folded portion of the nozzle between the nozzle center and the nozzle distal end portion;
  • FIG. 10H is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ϕ4, a length of the nozzle at the downstream side from the folded portion of the nozzle is large, and an installation position of gas supply hole at the downstream side from the folded portion of the nozzle is located in a lower portion of the reaction tube, FIG. 10I is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ϕ4, the length of the nozzle at the downstream side from the folded portion of the nozzle is large, and the installation positions of gas supply holes at the upstream and downstream from the folded portion of the nozzle are located at the same height, FIG. 10J is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ϕ4, the length of the nozzle at the downstream side from the folded portion of the nozzle is large, and gas supply holes are provided to only the upstream side from the folded portion of the nozzle, and FIG. 10K is a diagram illustrating a case where the hole diameter of the gas residence suppressing hole in the nozzle distal end in the nozzle shape of FIG. 5 is set to ϕ4, the length of the nozzle at the downstream side from the folded portion of the nozzle is large, and gas supply holes are provided to only the downstream side from the folded portion of the nozzle;
  • FIG. 11 is a diagram illustrating an installation example of a process container and nozzles in a substrate processing apparatus appropriately used for another embodiment of the present invention; and
  • FIG. 12 is a schematic configuration diagram illustrating a vertical processing furnace in the substrate processing apparatus appropriately used for another embodiment of the present invention and is a cross-sectional diagram of the processing furnace portion taken along line A-A of FIG. 11.
    •  DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment
  • Hereinafter, an embodiment of the present invention will be described with reference to FIGS. 1 to 3.
    • (1) Configuration of Substrate-Processing Apparatus
  • (Heating Unit)
  • As illustrated in FIG. 1, a processing furnace 202 includes a heater 207 as a heating unit (heating mechanism). The heater 207 has a cylindrical shape and is vertically installed by being supported by a heater base (not shown) as a holding plate. The heater 207 also functions as an activating mechanism (excitation unit) of activating (exciting) a gas by heat as described later.
  • A reaction tube 203 constituting a reaction container (process container) is installed inside the heater 207 to be concentric with the heater 207. The reaction tube 203 is made of a heat resistant material such as quartz (SiO2) or silicon carbide (SiC) and is formed in a cylindrical shape of which top end is closed and of which bottom end is opened. A processing chamber 201 is formed in a cylindrical hollow portion of the reaction tube 203. The processing chamber 201 is configured so as to be capable of accommodating the wafers 200 as the substrates in the state that multiple stages of the wafers in a horizontal posture are arranged in the vertical direction by a later-described boat 217.
  • (Gas Supply Unit)
  • A nozzle 249 a as the later-described first gas supply nozzle and a nozzle 249 b as the later-described second gas supply nozzle are incorporated into the processing chamber 201 so as to penetrate the lower side wall of the reaction tube 203. Each of the nozzles 249 a and 249 b is configured with quartz. The nozzles 249 a and 249 b are connected to gas supply pipes 232 a and 232 b, respectively. In this manner, the two nozzles 249 a and 249 b and the two gas supply pipes 232 a and 232 b are provided to the reaction tube 203, so that plural types of gases can be supplied to the processing chamber 201.
  • However, the processing furnace 202 according to the embodiment is not limited to the above-described form. For example, a metal manifold supporting the reaction tube 203 is provided to the lower side of the reaction tube 203, and each nozzle may be provided so as to penetrate the side wall of the manifold. In this case, the later-described exhaust pipe 231 may be further provided to the manifold. Even in this case, the exhaust pipe 231 may be provided to not the manifold but the lower portion of the reaction tube 203. In this manner, the furnace opening portion of the processing furnace 202 is made of a metal, and the nozzles and the like may be attached to the metal furnace opening portion.
  • Mass flow controllers (MFCs) 241 a and 241 b that are flow rate controllers (flow rate control units) and valves 243 a and 243 b that are opening/closing valves are provided to the gas supply pipes 232 a and 232 b in the order from the upstream direction, respectively. Gas supply pipes 232 c and 232 d supplying inert gas are connected to downstream sides from the valves 243 a and 243 b of the gas supply pipes 232 a and 232 b, respectively. MFCs 241 c and 241 d that are flow rate controllers (flow rate control units) and valves 243 c and 243 d that are opening/closing valves are provided to the gas supply pipes 232 c and 232 d in the order from the upstream direction, respectively.
  • The nozzles 249 a and 249 b described later in detail are connected to distal end portions of the gas supply pipes 232 a and 232 b, respectively. In addition, the nozzles 249 a and 249 b may be collectively simply referred to as nozzles 249. As illustrated in FIG. 2, each of the nozzles 249 a and 249 b is provided in a ring-shaped space between the inner wall of the reaction tube 203 and the wafers 200 along an upper portion from a lower portion of the inner wall of the reaction tube 203 so as to stand erect upwards in the arrangement direction of the wafers 200. Namely, each of the nozzles 249 a and 249 b is provided at the side of a wafer arrangement region where the wafers 200 are arranged in a region horizontally surrounding the wafer arrangement region so as to extend along the wafer arrangement region. Namely, each of the nozzles 249 a and 249 b is provided on the side of the edge portion (circumference portion) of the wafer 200 carried into the processing chamber 201 to be perpendicular to the surface (flat surface) of the wafer 200. Each of the nozzles 249 a and 249 b is configured as an L-shaped long nozzle. Each horizontal portion thereof is provided so as to penetrate a lower side wall of the reaction tube 203, and each vertical portion thereof is provided so as to stand erect at least from the one end side to the other end side of the wafer arrangement region. Gas supply holes 250 a and 250 c and the gas supply holes 250 b and 250 d supplying gases are provided to the respective side surfaces of the nozzles 249 a and 249 b. In addition, the gas supply holes 250 a and 250 c provided to the nozzle 249 a are simply referred to as the gas supply hole 250 a (250 c), and the gas supply holes 250 b and 250 d provided to the nozzle 249 b are simply referred to as the gas supply hole 250 b (250 d). In addition, the gas supply holes 250 a, 250 b, 250 c, and 250 d are also collectively simply referred to as the gas supply hole 250. The gas supply holes 250 a (250 c) and the gas supply holes 250 b (250 d) are opened so as to be directed to the center of the reaction tube 203, so that the gas can be supplied toward the wafer 200. The plural gas supply holes 250 a (250 c) and the plural gas supply holes 250 b (250 d) are provided over the range from the lower portion to the upper portion of the reaction tube 203, have the same opening area, and are provided at the same opening pitch.
  • In this manner, in the embodiment, the gas is carried through the nozzles 249 a and 249 b arranged in a ring-shaped elongated space defined by an inner wall of the side wall of the reaction tube 203 and the edge portion (circumference portion) of the plural laminated wafers 200, that is, in a cylindrical space. The gas is ejected from the gas supply holes 250 a (250 c) and 250 b (250 d) opened in the respective nozzles 249 a and 249 b into the reaction tube 203 first in the vicinity of the wafers 200. The main flow of the gas in the reaction tube 203 is directed in the direction parallel to the surface of the wafer 200, that is, in the horizontal direction. By such a configuration, gas can be uniformly supplied to each wafer 200, so that it is possible to improve film thickness uniformity of a thin film formed on each wafer 200. The gas being flowed on the surface of the wafer 200, that is, the remaining gas after the reaction is flowed in the direction to the exhaust outlet, that is, the later-described exhaust pipe 231. However, the direction of the flow of the remaining gas is appropriately specified according to the position of the exhaust outlet, but the direction is not limited to the vertical direction.
  • As the source gas, for example, a halosilane source gas containing Si and halogen elements as predetermined elements is supplied from the gas supply pipe 232 a through the MFC 241 a, the valve 243 a, and the nozzle 249 a to the processing chamber 201.
  • The halosilane source gas is a gaseous halosilane source, for example, a gas obtained by vaporizing a halosilane source which is in a liquid state under the normal temperature and pressure, a halosilane source which is in a gas state under the normal temperature and pressure, or the like. The halosilane source is a silane source having a halogen group. The halogen group includes a chloro group, a fluoro group, a bromo group, an iodine group, and the like. Namely, the halogen group includes halogen elements such as chlorine (Cl), fluorine (F), bromine (Br), and iodine (I). It is can be said that the halosilane source is a kind of a halide. In this specification, the case of using the term “source” includes a case where the source denotes a “liquid source in a liquid state”, a case where the source denotes a “source gas in a gas state”, or a case where the source denotes both thereof.
  • As the halosilane source gas, for example, a C-free source gas containing Si and Cl, that is, an inorganic-based chlorosilane source gas may be used. As the inorganic-based chlorosilane source gas, for example, hexachlorodisilane (Si2Cl6, abbreviation: HCDS) gas, octachlorotrisilane (Si3Cl8, abbreviation: OCTS) gas, or the like may be used. It may be said that such a gas is a source gas having at least two Si in one molecule, further containing Cl, and having a Si—Si bond. Such a gas functions as a Si source in the later-described film-forming process.
  • In addition, as the halosilane source gas, for example, a source containing Si, Cl, and an alkylene group and having a Si—C bond that is, an alkylene chlorosilane source gas that is an organic-based chlorosilane source gas may be used. The alkylene group includes a methylene group, an ethylene group, a propylene group, a butylene group, and the like. The alkylene chlorosilane source gas may also be referred to as an alkylene halosilane source gas. As the alkylene chlorosilane source gas, for example, bis(trichlorosilyl) methane ((SiCl3)2CH2, abbreviation: BTCSM) gas, ethylene bis (trichlorosilane) gas, that is, 1,2-bis (trichlorosilyl) ethane ((SiCl3)2C2H4, abbreviation: BTCSE) gas, or the like may be used. It may be said that such a gas is a source gas having at least two Si in one molecule, further containing C and Cl, and having a Si—C bond. Such a gas functions as a Si source and functions as a C source in the later-described film-forming process.
  • In addition, as the halosilane source gas, for example, a source gas containing Si, Cl, and an alkyl group and having a Si—C bond, that is, an alkyl chlorosilane source gas that is an organic-based chlorosilane source gas may be used. The alkyl group includes a methyl group, an ethyl group, a propyl group, a butyl group, and the like. The alkyl chlorosilane source gas may also be referred to as an alkyl halosilane source gas. As the alkyl chlorosilane source gas, for example, 1,1,2,2-tetrachloro-1,2-dimethyldisilane ((CH3)2Si2Cl4, abbreviation: TCDMDS) gas, 1,2-dichloro-1,1,2,2-tetramethyl disilane ((CH3)4Si2Cl2, abbreviation: DCTMDS) gas, 1-monochloro-1,1,2,2,2-pentamethyl disilane ((CH3)5Si2Cl, abbreviation: MCPMDS) gas may be used. It may be said that such a gas is a source gas having at least two Si in one molecule, further containing C and Cl, and having a Si—C bond. In addition, such a gas further has a Si—Si bond. Such a gas functions as a Si source and functions as a C source in the later-described film-forming process.
  • In the case of using a liquid source which is in a liquid state under the normal temperature and pressure such as HCDS, BTCSM, or TCDMDS, the liquid-state source is vaporized by a vaporizing system such as a vaporizer or a bubbler to be supplied as a source gas (HCDS gas, BTCSM gas, TCDMDS gas, or the like).
  • In addition, as a reaction gas having a chemical structure (molecular structure) different from that of the source gas, for example, a carbon (C)-containing gas is supplied from the gas supply pipe 232 a through the MFC 241 a, the valve 243 a, and the nozzle 249 a to the processing chamber 201. As the C-containing gas, for example, a hydrocarbon-based gas may be used. The hydrocarbon-based gas may be a material configured with only two elements of C and H and functions as a C source in the later-described film-forming process. As the hydrocarbon-based gas, for example, propylene (C3H6) gas may be used.
  • In addition, as a reaction gas having a chemical structure different from that of the source gas, for example, an oxygen (O)-containing gas is supplied from the gas supply pipe 232 b through the MFC 241 b, the valve 243 b, and the nozzle 249 b to the processing chamber 201. The O-containing gas functions as an oxidizing gas, that is, an O source in the later-described film-forming process. As the O-containing gas, for example, oxygen gas (O2) may be used.
  • In addition, as the reaction gas having a chemical structure different from that of the source gas, for example, a hydrogen (H)-containing gas is supplied from the gas supply pipe 232 b through the MFC 241 b, the valve 243 b, and the nozzle 249 b to the processing chamber 201.
  • As the H-containing gas, for example, a hydrogen nitride-based gas that is a gas containing nitrogen (N) and hydrogen (H) may be used. The hydrogen nitride-based gas may be a material configured with only two elements of N and H and may also be referred to as a nitrogen (N)-containing gas. The N-containing gas functions as a nitriding gas, that is, an N source in the later-described film-forming process. As the hydrogen nitride-based gas, for example, ammonia (NH3) gas may be used.
  • In addition, as the H-containing gas, for example, an amine-based gas that is a gas containing N, C, and H may be used. The amine-based gas may be a material configured with only three elements of C, N, and H and may also be referred to as a gas containing N and C. The amine-based gas functions as an N source and functions as a C source in the later-described film-forming process. As the amine-based gas, for example, triethylamine ((C2H5)3N, abbreviation: TEA) gas may be used. In the case of using amine which is in a liquid state under the normal temperature and pressure such as TEA, the liquid state amine is vaporized by a vaporizing system such as a vaporizer or a bubbler to be supplied as amine-based gas (TEA gas).
  • In addition, as the H-containing gas, for example, an organic hydrazine-based gas that is a gas containing N, C, and H may be used. The organic hydrazine-based gas may be a material configured with only three elements of N, C, and H and may be referred to as a gas containing N and C. The organic hydrazine-based gas functions as an N source and functions as a C source in the later-described film-forming process. As the organic hydrazine-based gas, for example, trimethyl hydrazine ((CH3)2N2(CH3)H, abbreviation: TMH) gas may be used. In the case of using amine which is in a liquid state under the normal temperature and pressure such as TMH, the liquid state amine is vaporized by a vaporizing system such as a vaporizer or a bubbler to be supplied as organic hydrazine-based gas (TMH gas).
  • In addition, as the H-containing gas, for example, an N-free or C-free gas such as hydrogen (H2) gas or deuterium (D2) gas may be used.
  • As the inert gas, for example, the nitrogen (N2) gas is supplied from the gas supply pipes 232 c and 232 d through the MFCs 241 c and 241 d, the valves 243 c and 243 d, the gas supply pipes 232 a and 232 b, and the nozzles 249 a and 249 b, respectively to the processing chamber 201.
  • In the case of supplying a source gas from the gas supply pipe 232 a, the source gas supply system is configured to mainly include the gas supply pipe 232 a, the MFC 241 a, and the valve 243 a. The nozzle 249 a may be considered to be included in the source gas supply system. The source gas supply system may also be referred to as a source supply system. In the case of supplying a halosilane source gas from the gas supply pipe 232 a, the source gas supply system may also be referred to as a halosilane source gas supply system or a halosilane source supply system.
  • In the case of supplying the C-containing gas from the gas supply pipe 232 a, the C-containing gas supply system is configured to mainly include the gas supply pipe 232 a, the MFC 241 a, and the valve 243 a. The nozzle 249 a may be considered to be included in the C-containing gas supply system. In the case of supplying the hydrocarbon-based gas from the gas supply pipe 232 a, the C-containing gas supply system may also be referred to as a hydrocarbon-based gas supply system or a hydrocarbon supply system.
  • In the case of supplying the O-containing gas from the gas supply pipe 232 b, the O-containing gas supply system is configured to mainly include the gas supply pipe 232 b, the MFC 241 b, and the valve 243 b. The nozzle 249 b may be considered to be included in the O-containing gas supply system. The O-containing gas supply system may also be referred to as an oxidizing gas supply system or an oxidant supply system.
  • In the case of supplying an H-containing gas from the gas supply pipe 232 b, the H-containing gas supply system is configured to mainly include the gas supply pipe 232 b, the MFC 241 b, and the valve 243 b. The nozzle 249 b may be considered to be included in the H-containing gas supply system. In the case of supplying a gas containing N and H from the gas supply pipe 232 b, the H-containing gas supply system may also be referred to as an N-containing gas supply system, an N- and H-containing gas supply system, or the like. In addition, in the case of supplying a gas containing N, C, and H from the gas supply pipe 232 b, the H-containing gas supply system may also be referred to as an N-containing gas supply system, a C-containing gas supply system, an N- and C-containing gas supply system, or the like. The N-containing gas supply system may also be referred to as a nitriding gas supply system or a nitriding agent supply system. In the case of supplying a hydrogen nitride-based gas, an amine-based gas, or an organic hydrazine-based gas as the H-containing gas, the H-containing gas supply system may also be referred to as a hydrogen nitride-based gas supply system, an amine-based gas supply system, or an organic hydrazine-based gas supply system.
  • Anyone of the C-containing gas supply system, the O-containing gas supply system, and the H-containing gas supply system described above or all the gas supply systems may also be referred to as a reaction gas supply system or a reactant supply system.
  • In addition, the inert gas supply system is configured to mainly include the gas supply pipes 232 c and 232 d, the MFCs 241 c and 241 d, and the valves 243 c and 243 d. The inert gas supply system may also be referred to as a purging gas supply system, a diluted gas supply system, or a carrier gas supply system.
  • In addition, all the gases of the source gas, the reaction gas, the inert gas, and the like which are supplied to the processing chamber 201 through the nozzles 249 a and 249 b may be collectively referred to as a processing gas.
  • (Exhaustion Unit)
  • The exhaust pipe 231 exhausting the atmosphere in the processing chamber 201 is provided to the reaction tube 203. A vacuum pump 246 as a vacuum evacuation apparatus is connected to the exhaust pipe 231 through a pressure sensor 245 as a pressure detector (pressure detection unit) detecting the pressure of the processing chamber 201 and an APC (auto pressure controller) valve 244 as a pressure regulator (pressure regulation unit). The APC valve 244 is a valve configured to be capable of performing vacuum evacuation and vacuum evacuation stop of the processing chamber 201 by opening and closing the valve in the state that the vacuum pump 246 is operated and is also a valve configured to be capable of regulating the pressure of the processing chamber 201 by regulating a valve opening degree based on pressure information detected by the pressure sensor 245 in the state that the vacuum pump 246 is operated. An exhaust system is configured to mainly include the exhaust pipe 231, the APC valve 244, and the pressure sensor 245. The vacuum pump 246 may be considered to be included in the exhaust system.
  • (Peripheral Mechanisms)
  • A seal cap 219 as a furnace opening lid body capable of air-tightly closing a bottom end opening of the reaction tube 203 is installed below the reaction tube 203. The seal cap 219 is configured so as to be in contact with the bottom end of the reaction tube 203 from the bottom side in the vertical direction. The seal cap 219 is made of, for example, a metal such as SUS and is formed in a disk shape. An O-ring 220 as a sealing member being in contact with the bottom end of the reaction tube 203 is provided on the top surface of the seal cap 219. A rotation mechanism 267 rotating the later-described boat 217 is provided to the side of the seal cap 219 opposite to the processing chamber 201. A rotation shaft 255 of the rotation mechanism 267 penetrates the seal cap 219 to be connected to the boat 217. The rotation mechanism 267 is configured to rotate the wafer 200 by rotating the boat 217. The seal cap 219 is configured to be lifted up and down in the vertical direction by a boat elevator 115 as a lifting mechanism provided vertically outside the reaction tube 203. The boat elevator 115 is configured to be capable of loading and unloading the boat 217 into and from the processing chamber 201 by lifting up and down the seal cap 219. Namely, the boat elevator 115 is configured as a carrying unit (carrying mechanism) carrying the boat 217, that is, the wafer 200 into and from the processing chamber 201.
  • (Substrate Supporting Jig)
  • The boat 217 as a substrate supporting jig is configured so as to support multiple stages of plural wafers, for example, 25 to 200 of the wafers 200 to be in a horizontal posture and to be arranged in the vertical direction in the state that the centers of the wafers are aligned with one another, namely, to arrange the wafers to be spaced with an interval. The boat 217 is made of a heat resistant material such as quartz or SiC. The lower portion of the boat 217 is supported by multiple stages of insulating plates 218 which are made of a heat resistant material such as quartz or SiC in a horizontal posture. By this configuration, heat from the heater 207 is not easily transmitted to the seal cap 219 side. However, the embodiment is not limited to the above-described form. For example, the insulating plates 218 are not provided in the lower portion of the boat 217, but an insulating cylinder configured with a cylindrical member made of a heat resistant material such as quartz or SiC may be provided.
  • (Temperature Sensor)
  • A temperature sensor 263 as a temperature detector is provided inside the reaction tube 203. By adjusting an electric conduction state of the heater 207 based on temperature information detected by the temperature sensor 263, the temperature of the processing chamber 201 is in a desired temperature distribution. The temperature sensor 263 is configured in an L shape similarly to the nozzles 249 a and 249 b and is provided along the inner wall of the reaction tube 203.
  • (Control Unit)
  • As illustrated in FIG. 3, a controller 121 that is a control unit is configured as a computer including a CPU (Central Processing Unit) 121 a, a RAM (Random Access Memory) 121 b, a memory device 121 c, and an I/O port 121 d. The RAM 121 b, the memory device 121 c, and the I/O port 121 d are configured to be capable of exchanging data with the CPU 121 a via an internal bus 121 e. An input/output device 122 such as a touch panel is connected to the controller 121.
  • The memory device 121 c is configured with, for example, a flash memory, an HDD (hard disk drive), or the like. A control program controlling operations of the substrate processing apparatus, an etching recipe, a process recipe, and the like describing procedures, conditions, and the like of an etching process and a film-forming process of the nozzle described later, and the like are readably stored in the memory device 121 c. The etching recipe or the process recipe is a combination of procedures in the later-described substrate processing process so as to obtain a predetermined result by allowing the controller 121 to execute the procedures and functions as a program. Hereinafter, the process recipe, the control program, and the like are also collectively simply referred to as a program. In addition, the etching recipe or the process recipe is also simply referred to as a recipe. In this specification, as the case of using the term “program”, there is a case including only the recipe alone, a case including only the control program along, or a case including both thereof. The RAM 121 b is configured as a memory area (work area) temporarily retaining a program, data, and the like read out by the CPU 121 a.
  • The I/O port 121 d is connected to the MFCs 241 a to 241 d, the valves 243 a to 243 d, the pressure sensor 245, the APC valve 244, vacuum pump 246, the heater 207, the temperature sensor 263, the rotation mechanism 267, the boat elevator 115, and the like described above.
  • The CPU 121 a is configured to execute reading the control program from the memory device 121 c and to read out the recipe from the memory device 121 c according to input or the like of a manipulation command from the input/output device 122. The CPU 121 a is configured to control, according to contents of the read recipe, flow rate regulating operations for various gases by the MFCs 241 a to 241 d, a pressure regulating operation by the APC valve 244 based on opening/closing operations of the valves 243 a to 243 d, opening/closing operations of the APC valve 244, and the pressure sensor 245, activating and stopping of the vacuum pump 246, an adjusting operation of the temperature of the heater 207 based on the temperature sensor 263, an adjusting operation of the rotation and rotation speed of the boat 217 by the rotation mechanism 267, lifting up/down operations of the boat 217 by the boat elevator 115, and the like.
  • The controller 121 may be configured to install the above-described program stored in an external memory device (for example, a magnetic tape, a magnetic disk such as a flexible disk or a hard disk, an optical disk such as a CD or a DVD, a magneto-optical disk such as an MO, or a semiconductor memory such as a USB memory or a memory card) 123 in the computer. The memory device 121 c and the external memory device 123 are configured as a non-transitory computer-readable recording medium. Hereinafter, these are also collectively simply referred to as a recording medium. In this specification, as the case of using the term “recording medium”, there is a case including only the memory device 121 c alone, a case including only the external memory device 123, or a case including both thereof. In addition, supplying the program to the computer may be performed by using a communication unit such as the Internet or a private line without using the external memory device 123.
  • (Gas Supply Nozzle)
  • Next, the nozzle 249 for supplying the processing gas will be described with reference to FIGS. 4 to 8C. As illustrated in FIG. 4, the nozzles 249 a and 249 b supplying the gas are extended in the vertical direction inside the reaction tube 203. As illustrated in FIG. 5, the nozzle 249 is configured with an L-shaped nozzle base end portion 270 and a U-shaped nozzle distal end portion 271. In addition, as illustrated in FIGS. 5, 6A, and 6B, the nozzle distal end portion 271 is configured with a folded portion 273, an upstream side pipe 271-1 connecting the nozzle base end portion 270 and the folded portion 273, and a downstream side pipe 271-2 connected to a downstream end of the folded portion 273. The gas supply holes 250 supplying the processing gas to the processing chamber 201 are provided to side surfaces of the upstream side pipe 271-1 and the downstream side pipe 271-2 in the directions different from the folding direction of the folded portion 273. A gas residence suppressing hole 280 for suppressing residence of the processing gas in the nozzle is provided to the downstream end of the downstream side pipe 271-2. Herein, the folded portion 273 indicates the gas supply nozzle 249 existing at the side in the vertical direction upper than the gas supply hole 250 located at the highest position of the gas supply nozzle and indicates the portion of changing the direction of the gas flow. In addition, in this specification, as the case of using the term “folded portion 273”, there is one of a case denoting the “nozzle 249 existing at the side in the vertical direction upper than the gas supply hole 250 located at the highest position” and a case denoting the “portion of changing the direction of the gas flow in the nozzle distal end portion 271” or a case denoting both thereof.
  • As illustrated in FIG. 6B, the gas residence suppressing hole 280 is formed to have a hole diameter larger than that of the gas supply hole 250 in order to suppress the residence of the processing gas supplied to the nozzle 249 inside the nozzle and is formed to have a hole diameter smaller than a pipe diameter of the downstream side pipe 271-2. By such a configuration, it is possible to suppress the residence of the supplied processing gas in the downstream end of the downstream side pipe 271-2. In addition, the processing gas is prevented from being in an exhaust rate-controlling of the gas residence suppressing hole 280, so that it is possible to efficiently supply the uniformly activated processing gas from the gas supply hole 250 to the wafer 200.
  • If the hole diameter of the gas residence suppressing hole 280 is smaller than that of the gas supply hole 250, the gas supplied to the nozzle 249 is hard to pull out, so that the gas resides in the downstream end of the downstream side pipe 271-2. For this reason, a large amount of the processing gas which is heated by the heating unit to be activated is easily supplied mainly from the vicinity of the downstream end of the downstream side pipe 271-2, and thus, the film thickness uniformity between the surfaces of the multiple stages of the wafers 200 arranged in the horizontal direction cannot be achieved. In addition, a deposited film is formed on an inner wall in the vicinity of the downstream end of the downstream side pipe 271-2 by the activated processing gas, and in some cases, there is possibility that the gas supply holes 250 is obstracted. On the contrary, if the hole diameter of the gas residence suppressing hole 280 is formed to be a certain diameter, for example, a hole diameter equal to the pipe diameter of the downstream side pipe 271-2, the supplied processing gas is in an exhaust rate-controlling of the gas residence suppressing hole 280, so that it is difficult to supply the gas from the gas supply hole 250.
  • Therefore, the gas residence suppressing hole 280 needs to be configured to have a hole diameter larger than the hole diameter of the gas supply hole 250. Appropriately, the gas residence suppressing hole 280 is preferably configured to have a hole diameter in a range of 1.1 times to 25 times the hole diameter of the gas supply hole 250. More appropriately, the gas residence suppressing hole 280 is preferably configured to have a hole diameter in a range of 5 times to 15 times the hole diameter of the gas supply hole 250. In addition, further more appropriately, it is preferable that the hole diameter of the gas residence suppressing hole 280 is configured so that the flow velocity of the gas being flowed on a horizontal cross section Si of the upstream side pipe 271-1 located below the gas supply hole 250 a (250 b) located at the lowest position of the upstream side pipe 271-1 is equal to the flow velocity of the gas being flowed on a horizontal cross section S2 of the downstream side pipe 271-2 located below the gas supply hole 250 c (250 d) located at the lowest position of the downstream side pipe 271-2.
  • In addition, the gas residence suppressing hole 280 is provided at the distal end of the nozzle 249 downward, and for example, as illustrated in FIG. 1 or FIG. 4, the gas residence suppressing hole 280 is located in the vicinity of an exhaust outlet. By such a configuration, it is possible to prevent the gas from being excessively supplied to the wafer 200, and the by-products such as particles inside the nozzle 249 can be easily exhausted without being attached on the wafer 200.
  • Next, in the case of supplying a gas by using a straight-tube-type nozzle (for example, a nozzle 251 illustrated in FIG. 11 described later), the gas reaction ratio (decomposition ratio) in the nozzle will be described with respect to FIG. 7A, and in the case of supplying a gas by using the nozzle 249 illustrated in FIG. 5, the gas reaction ratio (decomposition ratio) in the nozzle 249 will be described with reference to FIGS. 7B, 7C and 7D and FIGS. 8A to 8C. The evaluation conditions in FIGS. 7A to 7D are as follows. The substrate processing temperature is heated to 600° C., 0.3 slm of the HCDS gas and 0.5 slm of N2 gas are supplied as the processing gas, the substrate processing pressure is set to 50 Pa, the hole diameter of the gas supply hole and the number of the gas supply holes are set to ϕ1 mm×143, and the interval (pitch) of the gas supply holes is set to about 8 mm. In addition, as illustrated in FIGS. 7A to 7D, the gas supply holes are denoted by serial numbers over the range from the lower portion to the upper portion of the nozzle 249 in the vertical direction, heights corresponding to the serial numbers of the gas supply holes are indicated on the vertical axis, the reaction ratios (PTρ/Va) in the nozzle 249 obtained by calculation using pressure, temperature, density, and gas flow velocity in the nozzle are indicated on the horizontal axis. Namely, the vertical axis indicates the height of the nozzle 249 in the vertical direction, and the horizontal axis indicates the amount of the gas reacted (decomposed) in the nozzle 249. It can be determined that, as the graph is close to a straight line, the inter-plane film thickness uniformity between the wafers 200 is good.
  • As illustrated in FIG. 7A, it can be understood that, as it goes to the upper portion of the graph, the processing gas in the nozzle is reacted (decomposed). Namely, the processing gas is reacted at the position which is farthest away from the nozzle upstream portion where the processing gas is introduced, and if this is compared with a predetermined film formed on the wafer 200, it can be determined that the film thickness of the wafer 200 in the upper portion in the vertical direction is increased, and thus, the inter-plane film thickness uniformity cannot be achieved. If the magnitude of the decomposed amount is indicated by color density by using a schematic diagram of the nozzle shape, as illustrated in FIG. 8A, this is illustrated so that, as it goes to the upper portion of the nozzle, the color becomes darker. It is considered that this is because the heating time and length of the processing gas in the upper portion of the nozzle are larger than those of the processing gas in the lower portion of the nozzle. In other words, it is considered that this is because, as it goes to the distal end portion in the upper portion of the nozzle, the flow velocity of the supplied processing gas becomes slow so as to be close to 0 m/s, and as the flow velocity is slow, the processing gas is easily heated and reacted.
  • In contrast, as illustrated in FIG. 7B, on the contrary to FIG. 7A, it can be understood that, as it goes to the lower portion of the graph, the processing gas is reacted inside the nozzle 249. This is the same as FIG. 7A in that the processing gas is reacted at the position which is farthest away from the nozzle base end portion 270 where the processing gas is introduced. However, this is because the nozzle distal end portion 271 of the nozzle 249 has a U shape and the distal end of the nozzle 249 is located at the lower portion in the vertical direction, that is, the position which is farthest away from the nozzle upstream portion where the processing gas is introduced. Therefore, as it goes to the lower portion in the vertical direction, the film thickness of a predetermined film formed on the wafer 200 is increased, so that the inter-plane film thickness uniformity between the wafers 200 cannot be easily achieved. However, as illustrated in FIG. 7B, the gas residence suppressing hole 280 having a hole diameter of ϕ1.1 mm is provided at the distal end of the nozzle 249, and the processing gas is exhausted from the gas residence suppressing hole 280. Therefore, it can be determined that, in comparison with FIG. 7A, the flow velocity of the processing gas in the nozzle distal end portion is fast and the inter-plane film thickness uniformity of the film thickness between the wafers 200 is improved.
  • In addition, it can be understood that, as illustrated in FIG. 7C, similarly to FIG. 7B, as it goes to the lower portion of the graph, the gas is reacted inside the nozzle 249. This is because, as illustrated in FIG. 7B, the nozzle distal end portion 271 of the nozzle 249 has a U shape, and the distal end of the nozzle 249 at the position which is farthest away from the nozzle upstream portion where the processing gas is introduced is located in the lower portion in the vertical direction, so that the activated gas is easily supplied to the lower portion. If the magnitude of the decomposed amount is indicated by color density by using a schematic diagram of the nozzle shape, as illustrated in FIG. 8B, this is illustrated so that, in the upstream side pipe 271-1, the color density is almost uniform, but in the downstream side pipe 271-2, as it goes to the lower portion of the nozzle, the color becomes darker. Herein, as illustrated in FIG. 7C, it can be understood that a deviation between the reaction ratio in the lower portion of the nozzle and the reaction ratio in the upper portion of the nozzle is suppressed in comparison with FIG. 7B. This is because the hole diameter of the gas residence suppressing hole 280 is ϕ4 mm and larger than that illustrated in FIG. 7B, and thus, the flow velocity of the processing gas in the distal end portion of the nozzle 249 is further heightened. Therefore, the residence of the processing gas in the distal end portion of the nozzle 249 is suppressed, and thus, it can be determined that the inter-plane film thickness uniformity between the wafers 200 is remarkably improved.
  • As illustrated in FIG. 7D, it can be understood that the slope of the graph in the vertical direction is almost zero, and the reaction ration inside the nozzle is almost uniform in the upper and lower portions. Namely, it can be understood that the inter-plane film thickness uniformity between the wafers 200 can be achieved. It is considered that this is because, as illustrated in FIG. 8C, the hole diameter of the gas residence suppressing hole 280 is formed to be ϕ8 mm, and thus, the flow velocity of the processing gas in the distal end portion of the nozzle 249 is higher than that of the case illustrated in FIG. 7C, so that the flow velocity is close to the flow velocity of the processing gas introduced into the nozzle distal end portion 271. By configuring the gas residence suppressing hole 280 in this manner, it can be determined that, without the processing gas supplied to the gas supply nozzle 249 being in an exhaust rate-controlling by the gas residence suppressing hole 280, and the residence of the processing gas in the distal end portion of the nozzle 249 is suppressed, and the uniformly heated processing gas is supplied from the gas supply holes to the processing chamber 201.
  • Heretofore, it is preferable that the hole diameter of the gas residence suppressing hole 280 is configured so as to be in a range of 1/90 times or more and less than 1 times the nozzle diameter of the nozzle 249. It is more preferable that the hole diameter of the gas residence suppressing hole 280 is configured so as to be in a range of 0.3 times or more and 0.7 times or less the nozzle diameter of the nozzle 249.
  • In addition, it is preferable that the hole diameter of the gas residence suppressing hole 280 is configured so as to be in a range of 0.05 times or more and less than 1 times the distal end area of the nozzle 249. It is more preferable that the hole diameter of the gas residence suppressing hole 280 is configured so as to be in a range of 0.1 times or more and 0.5 times or less the distal end area of the nozzle 249.
  • In addition, the gas residence suppressing hole 280 may be provided to any location on the distal end surface of the nozzle 249 as well as the center of the distal end portion of the nozzle 249, and plural gas residence suppressing holes may be provided. By such a configuration, it is possible to more efficiently suppress the residence of the gas in the distal end of the nozzle 249.
    • (2) Film-Forming Process
  • As one process of the method of manufacturing the semiconductor device (device) by using the above-described substrate processing apparatus, an example of sequences of a process (hereinafter, referred to as a film-forming process) of forming a film on the substrate will be described with reference to FIG. 9. In the description hereinafter, operations of each component constituting the substrate processing apparatus are controlled by the controller 121.
  • In the film-forming process according to the embodiment, a film is formed on the wafer 200 by performing a predetermined number of times (once or more) of a cycle of non-simultaneously performing:
  • a step of supplying a source gas to the wafer 200 as a substrate in the processing chamber 201 through the nozzle 249 a as a first nozzle;
  • a step of supplying an O-containing gas to the wafer 200 in the processing chamber 201 through the nozzle 249 b as a second nozzle which is configured with quartz and is different from the nozzle 249 a; and
  • a step of supplying an H-containing gas to the wafer 200 in the processing chamber 201 through the nozzle 249 b.
  • In addition, in the film-forming sequence illustrated in FIG. 9, as an example, a film containing Si, O, C, and N, that is, a silicon oxycarbonitride film (SiOCN film) is formed on the wafer 200 by performing a predetermined number of times (n times) of a cycle of non-simultaneously, that is, without synchronization performing:
  • a step 1 of supplying HCDS gas to the wafer 200 in the processing chamber 201 through the nozzle 249 a;
  • a step 2 of supplying C3H6 gas to the wafer 200 in the processing chamber 201 through the nozzle 249 a;
  • a step 3 of supplying O2 gas to the wafer 200 in the processing chamber 201 through the nozzle 249 b; and
  • a step 4 of supplying NH3 gas to the wafer 200 in the processing chamber 201 through the nozzle 249 b. In addition, the SiOCN film may also be referred to as a C-containing silicon oxynitride film (SiON film), a C-added (doped) SiON film, or a C-containing SiON film.
  • In this specification, for the convenience, the film-forming sequence illustrated in FIG. 9 may be expressed as follows. In addition, it is assumed that the same expressions are used for description of the later-described modified examples or other embodiments.

  • (HCDS→C3H6→O2→NH3)×n⇒SiOCN
  • In this specification, in some cases, the case of using the term “wafer” may include the case of denoting a “wafer itself” and the case of denoting a “stacked body (aggregate) of a wafer and predetermined layers, films, or the like formed on a surface thereof”. Namely, a wafer including predetermined layers, films, or the like formed on a surface thereof may be referred to as a wafer. In addition, in this specification, in some cases, the case of using the phrase “surface of a wafer” may include the case of denoting a “surface (exposed surface) of a wafer itself” or the case of denoting a “surface of a predetermined layer, film, or the like formed on a wafer, that is, an uppermost surface of a wafer as a stacked body”.
  • Therefore, in this specification, in some cases, the case of expressing the phrase “to supply a predetermined gas to a wafer” may include the case of denoting “to directly supply a predetermined gas to a surface (exposed surface) of a wafer itself” or the case of denoting “to supply a predetermined gas to a layer, film, or the like formed on a wafer, that is, to an uppermost surface of a wafer as a stacked body”. In addition, in this specification, in some cases, the case of expressing the phrase “to form a predetermined layer (or film) on a wafer” may include the case of denoting “to directly form a predetermined layer (or film) on a surface (exposed surface) of a wafer itself” or the case of denoting “to form a predetermined layer (or film) on a layer or film formed on a wafer, that is, on an uppermost surface of a wafer as a stacked body”.
  • In addition, in this specification, the case of using the term “substrate” is the same as the case of using the term “wafer”, and in this case, it may be considered that a “wafer” is replaced with a “substrate” in the above description.
  • (Wafer Charging and Boat Loading)
  • The plural wafers 200 are charged into the boat 217 (wafer charging). After that, as illustrated in FIG. 1, the boat 217 supporting the plural wafers 200 is lifted up by the boat elevator 115 and is loaded into the processing chamber 201 (boat loading). In this state, the seal cap 219 is in the state that the seal cap seals the lower end of the reaction tube 203 through the O-ring 220.
  • (Pressure Regulation and Temperature Adjustment)
  • Vacuum evacuation (pressure reducing evacuation) is performed by the vacuum pump 246 so that the processing chamber 201, that is, the space where the wafer 200 exists is at a desired pressure (degree of vacuum). At this time, the pressure of the processing chamber 201 is measured by the pressure sensor 245, and the APC valve 244 is feedback controlled based on the measured pressure information. The vacuum pump 246 maintains the state that the vacuum pump is operated at all the time at least until the process for the wafer 200 is ended. In addition, the wafer 200 in the processing chamber 201 is heated by the heater 207 so as to be at a desired temperature. At this time, the state of electric conduction to the heater 207 is feedback controlled based on temperature information detected by the temperature sensor 263 so that the processing chamber 201 has a desired temperature distribution. The heating of the processing chamber 201 by the heater 207 continues to be performed at least until the process for the wafer 200 is ended. In addition, rotation of the boat 217 and the wafer 200 by the rotation mechanism 267 is started. The rotation of the boat 217 and the wafer 200 by the rotation mechanism 267 continues to be performed at least until the process for the wafer 200 is ended.
  • (SiOCN Film Forming Process)
  • Next, the subsequent four steps, that is, steps 1 to 4 are sequentially performed.
  • [Step 1]
  • In this step, the HCDS gas is supplied to the wafer 200 in the processing chamber 201.
  • The valve 243 a is opened, and the HCDS gas is flowed in the gas supply pipe 232 a. The flow rate of the HCDS gas is regulated by the MFC 241 a, is supplied to the processing chamber 201 through the nozzle 249 a, and is exhausted from the exhaust pipe 231. At this time, the HCDS gas is supplied to the wafer 200. At the same time, the valve 243 c is opened, the N2 gas is flowed in the gas supply pipe 232 c. The flow rate of the N2 gas is regulated by the MFC 241 c, is supplied together with the HCDS gas to the processing chamber 201, and is exhausted from the exhaust pipe 231.
  • In addition, in order to prevent the HCDS gas from intruding into the nozzle 249 b, the valve 243 d is opened, and the N2 gas is flowed in the gas supply pipe 232 d. The N2 gas is supplied to the processing chamber 201 through the gas supply pipe 232 b and the nozzle 249 b and is exhausted from the exhaust pipe 231.
  • The supply flow rate of the HCDS gas controlled by the MFC 241 a is set, for example, to be a flow rate in a range of 1 to 2000 sccm, preferably 10 to 1000 sccm. Each of the supply flow rates of the N2 gas controlled by the MFCs 241 c and 241 d is set, for example, to be a flow rate in a range of 100 to 10000 sccm. The pressure of the processing chamber 201 is set, for example, to be a pressure in a range of 1 to 2666 Pa, preferably 67 to 1333 Pa. The time of supplying the HCDS gas to the wafer 200, that is, the gas supply time (irradiation time) is set, for example, to be a time in a range of 1 to 120 seconds, preferably 1 to 60 seconds. The temperature of the heater 207 is set to a temperature so that the temperature of the wafer 200 is, for example, a temperature in a range of 250 to 700° C., preferably 300 to 650° C., more preferably 350 to 600° C.
  • If the temperature of the wafer 200 is less than 250° C., the HCDS is less likely to be chemically adsorbed on the wafer 200, and in some cases, a practical deposition rate cannot be obtained. By setting the temperature of the wafer 200 to be 250° C. or more, this problem can be solved. By setting the temperature of the wafer 200 to be 300° C. or more or to be 350° C. or more, the HCDS can be more sufficiently adsorbed on the wafer 200, and a more sufficient deposition rate can be obtained.
  • If the temperature of the wafer 200 exceeds 700° C., the CVD reaction becomes too strong (excessive gas phase reaction occurs). Therefore, the film thickness uniformity is likely to be deteriorated, and the control thereof is difficult. By setting the temperature of the wafer 200 to be 700° C. or less, a proper gas phase reaction can be induced. Therefore, the deterioration of the film thickness uniformity can be suppressed, and the control thereof can be performed. Particularly, by setting the temperature of the wafer 200 to be 650° C. or less or 600° C. or less, the surface reaction dominates the gas phase reaction. Therefore, the film thickness uniformity is easily secured, and the control thereof is facilitated.
  • Therefore, the temperature of the wafer 200 may be set to be a temperature in a range of 250 to 700° C., preferably 300 to 650° C., more preferably 350 to 600° C.
  • By supplying the HCDS gas to the wafer 200 under the above-described conditions, as the first layer, for example, a Si-containing layer containing Cl having a thickness of from a thickness less than that of a one-atom layer to a thickness of a several-atom layer is formed on the uppermost surface of the wafer 200. The Si-containing layer containing Cl may be a Si layer containing Cl, may be an HCDS adsorbing layer, or may include both thereof.
  • The Si layer containing Cl is a general term including a continuous layer being configured with Si and containing Cl, a discontinuous layer, and a Si thin film containing Cl obtained by overlapping the above layers. In some cases, the continuous layer being configured with Si and containing Cl may be called a Si thin film containing Cl. The Si constituting the Si layer containing Cl includes Si of which bond to Cl is completely disconnected besides Si of which bond to Cl is not completely disconnected.
  • The HCDS adsorbing layer also includes a discontinuous adsorbing layer besides a continuous adsorbing layer configured with HCDS molecules. Namely, the HCDS adsorbing layer includes an adsorbing layer having a thickness of a one-molecule layer configured with HCDS molecules or an adsorbing layer having a thickness less than that of the one-molecule layer. The HCDS molecules constituting the HCDS adsorbing layer also include molecules where a portion of bonds with Si and Cl is disconnected. Namely, the HCDS adsorbing layer may be a physical adsorbing layer of the HCDS, may be a chemical adsorbing layer of the HCDS, or may include both thereof.
  • Herein, a layer having a thickness less than that of a one-atom layer denotes a discontinuously formed atom layer, and a layer having a thickness of a one-atom layer denotes a continuously formed atom layer. A layer having a thickness less than that of a one-molecule layer denotes a discontinuously formed molecule layer, and a layer having a thickness of a one-molecule layer denotes a continuously formed molecule layer. The Si-containing layer containing Cl may include both of the Si layer containing Cl and the HCDS adsorbing layer. However, as described above, the Si-containing layer containing Cl is expressed by using expression such as “one-atom layer”, “several-atom layer”, or the like.
  • Under the condition that the HCDS gas is self-decomposed (thermally decomposed), that is, under the condition that a thermal decomposition reaction of the HCDS gas occurs, Si is deposited on the wafer 200, so that the Si layer containing Cl is formed. Under the condition that the HCDS gas is not self-decomposed (thermally decomposed), that is, under the condition that the thermal decomposition reaction of the HCDS gas does not occur, the HCDS is adsorbed on the wafer 200, so that the HCDS adsorbing layer is formed. The formation of the Si layer containing Cl on the wafer 200 is preferred in comparison with the formation of the HCDS adsorbing layer on the wafer 200 in terms that the film-forming rate can be increased.
  • If the thickness of the first layer exceeds a thickness of a several-atom layer, the function of the reformation in the later-described steps 3 and 4 does not reach the entire first layer. In addition, the minimum value of the thickness of the first layer is less than a thickness of a one-atom layer. Therefore, the thickness of the first layer is preferably in a range from a thickness less than a one-atom layer to a thickness of a several-atom layer. By setting the thickness of the first layer to be a thickness of a one-atom layer or less, that is, to a thickness of a one-atom layer or a thickness less than that of a one-atom layer, the function of the reforming reaction in the later-described steps 3 and 4 can be relatively increased, and the time required for the reforming reaction in steps 3 and 4 can be shortened. The time required for the formation of the first layer in step 1 can also be shortened. As a result, the processing time per cycle can be shortened, and thus, the total processing time can also be shortened. Namely, it is possible to increase the film-forming rate. In addition, by setting the thickness of the first layer to be a thickness of a one-atom layer or less, it is possible to improve the controllability of the film thickness uniformity.
  • After the first layer is formed, the valve 243 a is closed, so that the supply of the HCDS gas is stopped. At this time, the APC valve 244 is maintained opened, so that the processing chamber 201 is vacuum-exhausted by the vacuum pump 246, and the unreacted HCDS gas remaining in the processing chamber 201 or the HCDS gas after being contributed to the formation of the first layer is exhausted from the processing chamber 201. At this time, the valves 243 c and 243 d are maintained opened, so that the supply of the N2 gas to the processing chamber 201 is maintained. The N2 gas functions as a purging gas, and thus, the effect of exhausting a gas remaining in the processing chamber 201 from the processing chamber 201 can be improved.
  • At this time, the gas remaining in the processing chamber 201 may not be completely exhausted, and the processing chamber 201 may not be completed purged. If the gas remaining in the processing chamber 201 is very small, no adverse effect occurs in step 2 performed subsequently. There is no need to set the flow rate of the N2 gas supplied to the processing chamber 201 to be a large flow rate, and for example, by supply the N2 gas of which amount is approximately equal to the volume of the reaction tube 203 (processing chamber 201), the purging can be performed to such an extent that no adverse effect occurs in step 2. In this manner, the processing chamber 201 is not completely purged, so that the purge time is shortened, and it is possible to improve the throughput. It is possible to suppress the consumption of the N2 gas to a necessary minimum.
  • As the source gas, besides the HCDS gas, an inorganic-based halosilane source gas such as OCTS gas, dichlorosilane (SiH2Cl2, abbreviation: DCS) gas, monochlorosilane (SiH3Cl, abbreviation: MCS) gas, tetrachlorosilane, that is, silicon tetrachloride (SiCl4, abbreviation: STC) gas, or trichlorosilane (SiHCl3, abbreviation: TCS) gas may be used.
  • In addition, as the source gas, an organic-based halosilane source gas such as BTCSE gas, BTCSM gas, TCDMDS gas, DCTMDS gas, or MCPMDS gas can be used.
  • In addition, as the source gas, a halogen group-free inorganic-based silane source gas such as monosilane (SiH4, abbreviation: MS) gas, disilane (Si2H6, abbreviation: DS) gas, or trisilane (Si3H8, abbreviation: TS) gas may be used.
  • In addition, as the source gas, a halogen group-free organic-based silane source gas such as dimethylsilane (SiC2H8, abbreviation: DMS) gas, trimethylsilane (SiC3H10, abbreviation: TMS) gas, diethylsilane (SiC4H12, abbreviation: DES) gas, or 1,4-disilabutane (Si2C2H10, abbreviation: DSB) gas may be used.
  • In addition, as the source gas, a halogen group-free amino-based (amine-based) silane source gas such as trisdimethyl aminosilane (Si[N(CH3)2]3H, abbreviation: 3DMAS) gas, tetrakisdimethyl aminosilane (Si[N(CH3)2]4, abbreviation: 4DMAS) gas, bisdiethyl aminosilane (Si[N(C2H5)2]2H2, abbreviation: BDEAS) gas, or bis tertiarybutylaminosilane (SiH2[NH(C4H9)]2, abbreviation: BTBAS) gas may be used.
  • In addition, in the case of using an organic-based halosilane source gas or an organic-based silane source gas functioning as a C source as the source gas, C can be allowed to be included in the first layer. As a result, the C concentration in the SiOCN film finally formed on the wafer 200 can be increased in comparison with the case of using an inorganic-based halosilane source gas or an inorganic-based silane source gas as the source gas. In addition, in the case of using an amino-based silane source gas functioning as a C source and an N source as the source gas, C and N can be allowed to be included in the first layer. As a result, the C concentration and the N concentration in the SiOCN film finally formed on the wafer 200 can be increased respectively in comparison with the case of using an inorganic-based silane source gas as the source gas.
  • As the inert gas, besides the N2 gas, for example, a rare gas such as Ar gas, He gas, Ne gas, or Xe gas may be used.
  • [Step 2]
  • After step 1 is ended, the C3H6 gas which is activated by heat is supplied to the wafer 200 in the processing chamber 201, that is, the first layer formed on the wafer 200.
  • In this step, the control of opening and closing of the valves 243 a, 243 c, and 243 d is performed in the same procedure as that of the control of opening and closing of the valves 243 a, 243 c, and 243 d in step 1. The flow rate of the C3H6 gas is regulated by the MFC 241 a, is supplied to the processing chamber 201 through the nozzle 249 a, and is exhausted from the exhaust pipe 231. At this time, the C3H6 gas is supplied to the wafer 200.
  • The supply flow rate of the C3H6 gas controlled by the MFC 241 a is set, for example, to be a flow rate in a range of 100 to 10000 sccm. The pressure of the processing chamber 201 is set, for example, to be a pressure in a range of 1 to 5000 Pa, preferably 1 to 4000 Pa. The partial pressure of the C3H6 gas in the processing chamber 201 is set, for example, to be a pressure in a range of 0.01 to 4950 Pa. By setting the pressure of the processing chamber 201 to be in such a relatively high pressure range, the C3H6 gas can be thermally activated in a non-plasma manner. The C3H6 gas that is activated by heat to be supplied can induce a relatively soft reaction, so that the later-described C-containing layer formation is facilitated. The time of supplying the C3H6 gas to the wafer 200, that is, the gas supply time (irradiation time) is set, for example, to be a time in a range of 1 to 200 seconds, preferably 1 to 120 seconds, more preferably 1 to 60 seconds. The other process conditions are set, for example, to be the same as the process conditions of step 1.
  • At this time, the gas being flowed in the processing chamber 201 is the thermally activated C3H6 gas, and the HCDS gas is not flowed in the processing chamber 201. Therefore, the C3H6 gas does not induce a gas phase reaction and is supplied to the wafer 200 in an activated state. As a result, a carbon-containing layer (C-containing layer) is formed on the first layer formed on the wafer 200 in step 1, that is, on the surface of the Si-containing layer containing Cl. The C-containing layer may be a C layer, may be a C3H6 adsorbing layer, or may include both thereof. The C-containing layer becomes a layer having a thickness less than that of a one-molecule layer or a thickness less than that of a one-atom layer, that is, a discontinuous layer. For example, in a case where the C3H6 adsorbing layer is formed as the C-containing layer, a chemical adsorbing layer of the molecules constituting the C3H6 is formed in an unsaturated state. Therefore, a second layer containing Si, Cl, and C is formed on the uppermost surface of the wafer 200. The second layer is a layer including a Si-containing layer containing Cl and a C-containing layer. In addition, in some cases, according to the condition, a portion of the first layer and the C3H6 gas react with each other, and thus, the first layer is reformed (carbonized), so that the SiC layer is included in the second layer.
  • The C-containing layer needs to be configured as a discontinuous layer. If the C-containing layer is configured as a continuous layer, the entire surface of the Si-containing layer containing Cl is covered with the C-containing layer. In this case, Si does not exist on the surface of the second layer, and as a result, in some cases, the oxidizing reaction of the second layer in the later-described step 3 or the nitriding reaction of the third layer in the later-described step 4 is not easily performed. This is because, under the above-described process condition, O or N bonds to Si, but O or N does not easily bond to C. In order to induce a desired reaction in the later-described step 3 or 4, the adsorption state of the C-containing layer, for example, a chemical adsorbing layer of the C3H6 on the Si-containing layer containing Cl is allowed to be an unsaturated state, and thus, Si needs to be in the state that Si is exposed to the surface of the second layer. In addition, by setting the process condition in step 2 to be a process condition within the above-described process condition range, it is possible to allow the C-containing layer to be a discontinuous layer.
  • After the second layer is formed, the valve 243 a is closed, so that the supply of the C3H6 gas is stopped. Next, by the same process procedure and process condition as those of step 1, the unreacted C3H6 gas remaining in the processing chamber 201, the C3H6 gas after being contributed to the formation of the C-containing layer, or the reaction by-products is exhausted from the processing chamber 201. At this time, similarly to step 1, the gas remaining in the processing chamber 201 and the like may not be completely exhausted.
  • As the C-containing gas, besides the C3H6 gas, a hydrocarbon-based gas such as acetylene (C2H2) gas or ethylene (C2H4) gas may be used.
  • As the inert gas, besides the N2 gas, for example, various types of the rare gases exemplified in step 1 may be used.
  • [Step 3]
  • After step 2 is ended, the O2 gas which is activated by heat is supplied to the wafer 200 in the processing chamber 201, that is, the second layer formed on the wafer 200.
  • In this step, the control of opening and closing of the valves 243 b to 243 d is performed in the same procedure as that of the control of opening and closing of the valves 243 a, 243 c, and 243 d in step 1. The flow rate of the O2 gas is regulated by the MFC 241 b, is supplied to the processing chamber 201 through the nozzle 249 b, and is exhausted from the exhaust pipe 231. At this time, the O2 gas is supplied to the wafer 200.
  • The supply flow rate of the O2 gas controlled by the MFC 241 b is set, for example, to be a flow rate in a range of 100 to 10000 sccm. The pressure of the processing chamber 201 is set, for example, to be a pressure in a range of 1 to 4000 Pa, preferably 1 to 3000 Pa. The partial pressure of the O2 gas in the processing chamber 201 is set, for example, to be a pressure in a range of 0.01 to 3960 Pa. By setting the pressure of the processing chamber 201 to be in such a relatively high pressure range, the O2 gas can be thermally activated in a non-plasma manner. The O2 gas that is activated by heat to be supplied can induce a relatively soft reaction, so that the later-described oxidation can be softly performed. The time of supplying the O2 gas to the wafer 200, that is, the gas supply time (irradiation time) is set, for example, to be a time in a range of 1 to 120 seconds, preferably 1 to 60 seconds. The other process conditions are set, for example, to be the same as the process conditions of step 1.
  • At this time, the gas being flowed in the processing chamber 201 is the thermally activated O2 gas, and the HCDS gas and the C3H6 gas are not flowed in the processing chamber 201. Therefore, the O2 gas does not induce a gas phase reaction and is supplied to the wafer 200 in an activated state. The O2 gas supplied to the wafer 200 reacts with at least a portion of the second layer containing Si, Cl, and C (layer including the Si-containing layer containing Cl and the C-containing layer) formed on the wafer 200 in step 2. Therefore, the second layer is thermally oxidized in a non-plasma manner to be changed (reformed) into the third layer containing Si, O, and C, that is, the silicon oxycarbide layer (SiOC layer). In addition, when the third layer is formed, impurities such as Cl contained in the second layer constitute a gaseous material containing at least Cl in the process of the reforming reaction by the O2 gas and is exhausted from the processing chamber 201. Namely, the impurities such as Cl in the second layer are extracted from the second layer or are desorbed, so that the impurities are separated from the second layer. Therefore, the third layer becomes a layer having a smaller number of the impurities such as Cl than the second layer.
  • At this time, the oxidizing reaction of the second layer is allowed not to be saturated. For example, in a case where the Si-containing layer containing Cl having a thickness of a several-atom layer is formed in step 1, and the C-containing layer having a thickness less than that of a one-atom layer is formed in step 2, at least a portion of the surface layer (one-atom layer of the surface) is oxidized. In this case, so as not to oxidize the entire second layer, the oxidation is performed under the condition that the oxidizing reaction of the second layer is unsaturated. In addition, although several layers underlying the surface layer of the second layer may be oxidized according to the condition, the oxidizing of the only surface layer is preferred because the controllability of the composition ratio of the SiOCN film finally formed on the wafer 200 can be improved. In addition, for example, in a case where the Si-containing layer containing Cl having a thickness of a one-atom layer or a thickness less than that of a one-atom layer is formed in step 1, and the C-containing layer having a thickness less than that of a one-atom layer is formed in step 2, similarly, a portion of the surface layer is oxidized. Even in this case, the oxidation is performed under the condition that the oxidizing reaction of the second layer is unsaturated so that the entire second layer is not oxidized. In addition, by setting the process condition in step 3 to be a process condition within the above-described process condition range, it is possible to allow the oxidizing reaction of the second layer to be unsaturated.
  • In addition, at this time, particularly, the above-described process condition may be adjusted so that the dilution ratio of the O2 gas is increased (concentration is decreased), the supply time of the O2 gas is shortened, or the partial pressure of the O2 gas is decreased. For example, in comparison with steps 2 and 4, the dilution ratio of the reaction gas may be increased, the supply time of the reaction gas may be shortened, or the partial pressure of the reaction gas may be decreased. Therefore, the oxidizing power in step 3 can be appropriately reduced, so that unsaturation of the oxidizing reaction of the second layer is further facilitated.
  • By reducing the oxidizing power in step 3, in the oxidizing process, it is possible to suppress desorption of C from the second layer. Since the bonding energy of the Si—O bond is higher than that of the Si—C bond, if the Si—O bond is formed, there is a tendency that the Si—C bond is disconnected. Therefore, by appropriately reducing the oxidizing power in step 3, when the Si—O bond is formed in the second layer, it is possible to suppress the disconnection of the Si—C bond, and thus, it is possible to suppress the desorption of the C of which bond to the Si is disconnected from the second layer.
  • In addition, by reducing the oxidizing power in step 3, the state that Si is exposed to the uppermost surface of the oxidized second layer, that is, the third layer can be retained. The state that Si is exposed to the uppermost surface of the third layer is retained, so that in the later-described step 4, the nitridation of the uppermost surface of the third layer is facilitated. In the state that the Si—O bond or the Si—C bond is formed over the entire uppermost surface of the third layer, and thus, the Si is not exposed to the uppermost surface, there is a tendency that the Si—N bond is not easily formed under the condition of the later-described step 4. However, the state that Si is exposed to the uppermost surface of the third layer is retained, namely, Si capable of bonding with N under the conditions of the later-described step 4 is allowed to exist on the uppermost surface of the third layer, so that the formation of the Si—N bond is facilitated.
  • After the third layer is formed, the valve 243 b is closed, so that the supply of the O2 gas is stopped. Next, by the same process procedure and process conditions as those of step 1, the unreacted O2 gas remaining in the processing chamber 201, the O2 gas after being contributed to the formation of the third layer, or the reaction by-products is exhausted from the processing chamber 201. At this time, similarly to step 1, the gas remaining in the processing chamber 201 and the like may not be completely exhausted.
  • As the oxidizing gas, besides the O2 gas, an O-containing gas such as water vapor (H2O gas), nitric oxide (NO) gas, nitrous oxide (N2O) gas, nitrogen dioxide (NO2) gas, carbon monoxide (CO) gas, carbon dioxide (CO2) gas, or ozone (O3) gas may be used.
  • As the inert gas, besides the N2 gas, for example, various types of the rare gases exemplified in step 1 may be used.
  • [Step 4]
  • After step 3 is ended, the NH3 gas which is activated by heat is supplied to the wafer 200 in the processing chamber 201, that is, the third layer formed on the wafer 200.
  • In this step, the control of opening and closing of the valves 243 b to 243 d is performed in the same procedure as the control of opening and closing of the valves 243 a, 243 c, and 243 d in step 1. The flow rate of the NH3 gas is regulated by the MFC 241 b, is supplied to the processing chamber 201 through the nozzle 249 b, and is exhausted from the exhaust pipe 231. At this time, the NH3 gas is supplied to the wafer 200.
  • The supply flow rate of the NH3 gas controlled by the MFC 241 b is set, for example, to be a flow rate in a range of 100 to 10000 sccm. The pressure of the processing chamber 201 is set, for example, to be a pressure in a range of 1 to 4000 Pa, preferably 1 to 3000 Pa. The partial pressure of the NH3 gas in the processing chamber 201 is set, for example, to be a pressure in a range of 0.01 to 3960 Pa. By setting the pressure of the processing chamber 201 to be in such a relatively high pressure range, the NH3 gas can be thermally activated in a non-plasma manner. The NH3 gas that is activated by heat to be supplied can induce a relatively soft reaction, so that the later-described nitridation can be softly performed. The time of supplying the NH3 gas to the wafer 200, that is, the gas supply time (irradiation time) is set, for example, to be a time in a range of 1 to 120 seconds, preferably 1 to 60 seconds. The other process conditions are set, for example, to be the same as the process conditions of step 1.
  • At this time, the gas being flowed in the processing chamber 201 is the thermally activated NH3 gas, and the HCDS gas, the C3H6 gas, and the O2 gas are not flowed in the processing chamber 201. Therefore, the NH3 gas does not induce a gas phase reaction and is supplied to the wafer 200 in an activated state. The NH3 gas supplied to the wafer 200 reacts with at least a portion of the third layer (SiOC layer) formed on the wafer 200 in step 3. Therefore, the third layer is thermally nitrided in a non-plasma manner to be changed (reformed) into a fourth layer containing Si, O, C, and N, that is, the silicon oxycarbonnitride layer (SiOCN layer). In addition, when the fourth layer is formed, impurities such as Cl contained in the third layer constitute a gaseous material containing at least Cl in the process of the reforming reaction by the NH3 gas and is exhausted from the processing chamber 201. Namely, the impurities such as Cl in the third layer are extracted from the third layer or are desorbed, so that the impurities are separated from the third layer. Therefore, the fourth layer becomes a layer having a smaller number of the impurities such as Cl than the third layer.
  • In addition, by supplying the activated NH3 gas to the wafer 200, the uppermost surface of the third layer is reformed in the process where the third layer is nitrided. After the surface reforming treatment is performed in the process of the nitriding, the uppermost surface of the third layer, that is, the uppermost surface of the fourth layer is in the surface state that, in step 1 performed in the next cycle, the HCDS is easily adsorbed and the Si is easily deposited. Namely, the NH3 gas used in step 4 functions as an adsorption/deposition facilitating gas facilitating adsorption and deposition of the HCDS or the Si on the uppermost surface of the fourth layer (uppermost surface of the wafer 200).
  • At this time, the nitriding reaction of the third layer is allowed not to be saturated. For example, in a case where the third layer having a thickness of the several-atom layer is formed insteps 1 to 3, at least a portion of the surface layer thereof (one-atom layer of the surface) is nitrided. In this case, so as not to nitride the entire third layer, the nitridation is performed under the condition that the nitriding reaction of the third layer is unsaturated. In addition, although several layers underlying the surface layer of the third layer may be nitrided according to the condition, the nitriding of the only surface layer is preferred because the controllability of the composition ratio of the SiOCN film finally formed on the wafer 200. In addition, for example, in a case where the third layer having a thickness of a one-atom layer or a thickness less than that of a one-atom layer is formed in steps 1 to 3, similarly, a portion of the surface layer is nitrided. Even in this case, the nitridation is performed under the condition that the nitriding reaction of the third layer is unsaturated so that the entire third layer is not nitrided. In addition, by setting the process condition in step 4 to be the process condition within the above-described process condition range, it is possible to allow the nitriding reaction of the third layer to be unsaturated.
  • After the fourth layer is formed, the valve 243 b is closed, so that the supply of the NH3 gas is stopped. Next, by the same process procedure and process conditions as those of step 1, the unreacted NH3 gas remaining in the processing chamber 201, the NH3 gas after being contributed to the formation of the fourth layer, or the reaction by-products is exhausted from the processing chamber 201. At this time, similarly to step 1, the gas remaining in the processing chamber 201 and the like may not be completely exhausted.
  • As the nitriding gas, besides the NH3 gas, a hydrogen nitride-based gas such as diazene (N2H2) gas, hydrazine (N2H4) gas, or N3H8 gas or a gas containing a compound thereof may be used.
  • As the inert gas, besides the N2 gas, for example, various types of the rare gases exemplified in step 1 may be used.
  • (Performing Predetermined Number of Times)
  • The SiOCN film having a predetermined composition and a predetermined film thickness may be formed on the wafer 200 by performing a predetermined number of times (n times) of the cycle of performing the above-described four steps non-simultaneously, that is, without synchronization. In addition, it is preferable that the above-described cycle is repeated in several times. Namely, it is preferable that the thickness of the fourth layer (SiOCN layer) formed by performing the above-described cycle once is allowed to be smaller than a desired film thickness, and the above-described cycle is repeated several times until the film thickness of the SiOCN film formed by laminating the fourth layer (SiOCN layer) becomes a desired film thickness.
  • (Purge and Return to Atmospheric Pressure)
  • After the formation of the SiOCN film is completed, the valves 243 c and 243 d are opened, so that the N2 gas is supplied from the respective gas supply pipes 232 c and 232 d to the processing chamber 201 and is exhausted from the exhaust pipe 231. The N2 gas functions as a purging gas. Therefore, the processing chamber 201 is purged, a gas or a reaction by-products remaining in the processing chamber 201 is removed (purged) from the processing chamber 201. After that, the atmosphere in the processing chamber 201 is replaced with an inert gas (inert gas replacement), and the pressure of the processing chamber 201 is returned to the normal pressure (atmospheric pressure return).
  • (Boat Unloading and Wafer Discharging)
  • The seal cap 219 is lifted down by the boat elevator 115, and thus, the bottom end of the reaction tube 203 is opened. Next, the processed wafer 200 is unloaded from the bottom end of the reaction tube 203 to the outside of the reaction tube 203 in the state that the wafer is supported by the boat 217 (boat unloading). The processed wafer 200 is discharged from the boat 217 (wafer discharging).
    • (3) Effects of Embodiment
  • According to the embodiment, it is possible to obtain one effect or plural effects described below.
  • (a) The nozzle distal end portion 271 is configured to have a U shape, so that it is possible to lengthen the heating time or the distance of the processing gas introduced into the gas supply nozzle, and it is possible to uniformly supply the activated processing gas to the wafer.
  • (b) The gas residence suppressing hole 280 is provided to the distal end of the nozzle 249, so that it is possible to suppress the residence of the processing gas in the distal end of the nozzle.
  • (c) The gas residence suppressing hole 280 is provided to the distal end of the nozzle 249, so that it is possible to suppress a decrease in gas flow velocity of the processing gas as it goes toward the distal end of the nozzle, and it is possible to uniformly supply the processing gas from the gas supply hole to the wafer.
  • (d) The gas residence suppressing hole 280 is provided to the distal end of the nozzle 249, so that it is possible to prevent by-products such as particles inside the nozzle 249 from being attached on the wafer 200.
  • (e) The hole diameter of the gas residence suppressing hole 280 is configured to be larger than that of the gas supply hole 250, so that it is possible to efficiently suppress the residence of the gas in the distal end of the nozzle.
  • (f) The hole diameter of the gas residence suppressing hole 280 is configured to have such a size that the flow velocity of the gas supplied to the most upstream of the upstream side pipe 271-1 is equal to the flow velocity of the gas supplied to the most downstream of the downstream side pipe 271-2, so that it is possible to prevent the supplied processing gas from being in the exhaust rate-controlling by the gas residence suppressing hole 280, and it is possible to uniformly supply the gas from the gas supply hole 250 to the wafer.
    • Modified Example
  • Next, modified Examples of the present invention will be described with reference to FIGS. 10A to 10C. As illustrated in FIGS. 10A, 10B, and 10C, the gas supply holes 250 are provided to both of the upstream side pipe 271-1 and the downstream side pipe 271-2 of the nozzle 249, and as illustrated in FIG. 10D, the gas supply holes 250 are provided to only the downstream side pipe 271-2, and thus, the processing gas activated by heating is easily supplied on the wafer 200, so that it is possible to obtain the effect that it is possible to improve the inter-plane film thickness uniformity between the wafers.
  • In addition, as illustrated in FIG. 10E, the gas supply holes 250 are provided to only the upstream side pipe 271-1, and thus, even in a case where by-products such as particles inside the nozzle occur, since the gas supply holes 250 are not provided to the downstream side pipe 271-2, it is possible to obtain the effect that it is possible to easily exhaust the by-products such as particles to an exhaust direction.
  • In addition, as illustrated in FIGS. 10F and 10G, the installation heights of the gas supply holes 250 provided to the upstream side pipe 271-1 and the downstream side pipe 271-2 are formed to be different from each other, so that it is possible to obtain the effect that it is possible to uniformly supply the activated processing gas to the wafer 200. Namely, as illustrated in FIG. 10F, the gas supply holes 250 are provided, so that in a height-direction central portion of the upstream side pipe 271-1 and a height-direction central portion of the downstream side pipe 271-2, the activated processing gas can be easily supplied. Therefore, a large amount of the processing gas can be supplied to the vicinity of the central portion of the wafer arrangement region, and thus, the invention can be effectively used for a case where the reaction of the processing gas in the vicinity of the central portion of the wafer arrangement region is bad. Furthermore, as illustrated in FIG. 10G, the gas supply holes 250 are provided, so that in the vicinity of the highest position or the lowest position of the wafer arrangement region, the activated processing gas can be easily supplied. Therefore, the invention can be effectively used for a case where the reaction of the processing gas in the vicinity of the highest position or the lowest position of the wafer arrangement region is bad.
  • In addition, as illustrated in FIGS. 10H to 10K, by extending the length of the downstream side pipe 271-2, the gas residence suppressing hole 280 is provided to as low a portion as possible in the vertical direction, so that it is possible to prevent by-products such as particles from being attached on the wafer 200. In this case, it is preferable that the gas residence suppressing hole 280 is provided to a position lower than the region where the wafer 200 is supported. Namely, by extending the length of the downstream side pipe 271-2, the gas residence suppressing hole 280 is formed so as to be located in an insulating region below the region where the wafer 200 is supported, and thus, the gas residence suppressing hole 280 can be arranged in the vicinity of the exhaust outlet, so that the gas containing by-products such as particles can be exhausted in the vicinity of the exhaust outlet. Therefore, even in a case where by-products such as particles occur inside the nozzle 249 due to peeling of the deposited film or the like, the gas exhausted from the gas residence suppressing hole 280 is immediately exhausted from the exhaust outlet of the exhaust pipe 231, so that it is possible to prevent the by-products such as particles from being attached on the wafer 200.
  • In addition, as illustrated in FIG. 10H, if the gas supply holes 250 are formed so as to be arranged also in the insulating region, an etching gas can be directly supplied to the insulating region at the time of cleaning a processing chamber by supplying the etching gas, and thus, it is possible to efficiently remove the deposited film which is deposited in the insulating region.
    • Second Embodiment
  • Next, a second embodiment of the present invention will be described with reference to FIGS. 11 and 12. A substrate processing apparatus according to the second embodiment is different from that of the first embodiment in that, as illustrated in FIG. 11, the nozzle 249 a supplying the source gas is arranged as a U-shaped nozzle, and instead of the nozzle 249 b illustrated in FIGS. 1 and 2, a nozzle supplying the reaction gas or the inert gas is arranged as a straight-pipe-type nozzle 251. The other configurations are the same as those of the first embodiment.
  • In addition, as illustrated in FIG. 12, only the nozzle 249 a supplying a source gas which needs to be activated by heating is arranged as a U-shaped nozzle, so that it is possible to facilitate maintenance, and it is possible to reduce device cost.
  • By the configuration according to the second embodiment, it is possible to obtain the following effects.
  • (g) The number of U-shaped nozzles of which structure is complicated is decreased, so that it is possible to facilitate device maintenance.
  • (h) The number of U-shaped nozzles of which structure is complicated is decreased, so that it is possible to reduce device cost.
    • OTHER EMBODIMENTS
  • Heretofore, the embodiments of the present invention were described specifically. However, the present invention is not limited to the above-described embodiments, but various changes are available within the scope without departing from the spirit of the present invention, and the effects thereof can be obtained.
  • For example, in the first embodiment of the present invention, a case where the same nozzles are used as the nozzles 249 a and 249 b is described, but the present invention is not limited thereto. The nozzle illustrated in FIG. 10C may be used as the nozzle 249 a, the nozzle illustrated in FIG. 10E may be used as the nozzle 249 b, and the installation positions of the gas supply holes may be different between the nozzles 249 a and 249 b.
  • In addition, for example, as described below, in the film-forming sequence in the embodiment, the to-be-formed films can be changed by changing the types of the supplied gases or the supply timing thereof.

  • (C3H6→HCDS→C3H6→O2→NH3)×n⇒SiOCN

  • (HCDS→C3H6→NH3→O2)×n⇒SiOCN

  • (HCDS→NH3→C3H6→O2)×n⇒SiOCN

  • (HCDS→NH3→O2→C3H6)×n⇒SiOCN

  • (HCDS→O2→NH3→C3H6)×n⇒SiOCN

  • (HCDS→O2→C3H6→NH3)×n⇒SiOCN

  • (HCDS→TEA→O2)×n⇒SiOCN, SiOC

  • (HCDS→O2→TEA)×n⇒SiOCN, SiOC

  • (TEA→HCDS→O2)×n⇒SiOCN, SiOC

  • (HCDS→H2→O2)×n⇒SiO

  • (HCDS→O2→H2)×n⇒SiO

  • (H2→HCDS→O2)×n⇒SiO

  • (HCDS→NH3→O2)×n⇒SiON

  • (HCDS→O2→NH3)×n⇒SiON

  • (NH3→HCDS→O2)×n⇒SiON

  • (HCDS→H2+O2→NH3)×n⇒SiON
  • Like these modified examples, a reaction gas is arbitrarily selected to be used, or a supply order of a source gas and a reaction gas is arbitrarily changed, so that composition, composition ratio, film quality, or the like of a to-be-formed film can be changed. In addition, plural kinds of the reaction gases may be used in a form of an arbitrary combination thereof. For example, the NH3 gas, the TEA gas, or the HCDS gas may be added (mixed) with the C3H6 gas in use. Therefore, a composition, a composition ratio, a film quality, or the like of a to-be-formed film can be changed.
  • The silicon-based insulating film formed by the film-forming sequence illustrated in FIG. 9 or by each modified example is used as a sidewall spacer, so that it is possible to provide a device forming technique having a small leak current and an excellent processability. In addition, the above-described silicon-based insulating film is used as an etching stopper, so that it is possible to provide a device forming technique having an excellent processability. In addition, according to the film-forming sequence illustrated in FIG. 9 or each modified example, it is possible to form a silicon-based insulating film with an ideal stoichiometric ratio without using plasma. Since the silicon-based insulating film can be formed without using plasma, the present invention can be applied to a process of forming, for example, an SADP film of DPT or the like which may cause a concern about plasma damage.
  • In addition, in the above-described modified examples, in the step of supplying the TEA gas which is activated by heat to the wafer 200, the supply flow rate of the TEA gas controlled by the MFC 241 b is set, for example, to be a flow rate in a range of 100 to 10000 sccm. The pressure of the processing chamber 201 is set, for example, to be a pressure in a range of 1 to 5000 Pa, preferably 1 to 4000 Pa. In addition, the partial pressure of the TEA gas in the processing chamber 201 is set, for example, to be a pressure in a range of 0.01 to 4950 Pa. The time of supplying the TEA gas to the wafer 200, that is, the gas supply time (irradiation time) is set, for example, to be a time in a range of 1 to 200 seconds, preferably 1 to 120 seconds, more preferably 1 to 60 seconds. The other process conditions are set, for example, to be the same as the process conditions of step 4 of the film-forming sequence illustrated in FIG. 9. As the gas containing N, C, and H, beside the TEA gas, for example, an ethylamine-based gas such as diethylamine ((C2H5)2NH, abbreviation: DEA) gas or monoethylamine (C2H5NH2, abbreviation: MEA) gas, a methylamine-based gas such as trimethylamine ((CH3)3N, abbreviation: TMA) gas, dimethylamine ((CH3)2NH, abbreviation: DMA) gas, or monomethylamine (CH3NH2, abbreviation: MMA) gas, or the like may be used.
  • The process procedure and process condition of the other steps may be set, for example, to be the same as the process procedure and process condition of each step in the film-forming sequence illustrated in FIG. 9.
  • In addition, the film-forming sequence described in the above-described exemplary embodiment may be appropriately applied to even the case of forming an oxide film containing a metal element such as titanium (Ti), zirconium (Zr), hafnium (Hf), tantalum (Ta), niobium (Nb), aluminum (Al), molybdenum (Mo), or tungsten (W), that is, a metal-based oxide film on the wafer 200. Namely, the above-described film-forming sequence can also be appropriately applied to the case of forming a TiOCN film, a TiOC film, a TION film, a TiO film, a ZrOCN film, a ZrOC film, a ZrON film, a ZrO film, a HfOCN film, a HfOC film, a HfON film, an HfO film, a TaOCN film, a TaOC film, a TaON film, a TaO film, an NbOCN film, an NbOC film, an NbON film, an NbO film, an AlOCN film, an AlOC film, an AlON film, an AlO film, an MoOCN film, an MoOC film, an MoON film, an MoO film, a WOCN film, a WOC film, a WON film, or a WO film on the wafer 200.
  • In the case of forming a metal-based oxide film, as a source gas, for example, an inorganic metal source gas containing a metal element and a halogen element such as a titanium tetrachloride (TiCl4) gas, a titanium tetrafluoride (TiF4) gas, a zirconium tetrachloride (ZrCl4) gas, a zirconium tetrafluoride (ZrF4) gas, a hafnium tetrachloride (HfCl4) gas, a hafnium tetrafluoride (HfF4) gas, a tantalum pentachloride (TaCl5) gas, a tantalum pentafluoride (TaF5) gas, a niobium pentachloride (NbCl5) gas, a niobium pentafluoride (NbF5) gas, an aluminum trichloride (AlCl3) gas, an aluminum trifluoride (AlF3) gas, a molybdenum pentachloride (MoCl5) gas, a molybdenum pentafluoride (MoF5) gas, a tungsten hexachloride (WCl6) gas, or a tungsten hexafluoride (WF6) gas may be used. In addition, as the source gas, for example, an organic metal source gas containing a metal element and carbon such as a trimethyl aluminum (Al(CH3)3, abbreviation: TMA) gas may be used. As a reaction gas, the same as those of the above-described embodiment may be used.
  • For example, by the film-forming sequence described hereinafter, a TION film or TiO film may be formed on the wafer 200.

  • (TiCl4→NH3→O3)×n⇒TION, TiO

  • (TiCl4→O3→NH3)×n⇒TION, TiO

  • (NH3→TiCl4→O3)×n⇒TION, TiO
  • Namely, the present invention can be appropriately applied to the case of forming a film containing predetermined elements such as semiconductor elements or metal elements. Even in the case of performing the film forming, the film forming can be performed in the same process conditions as those of the above-described embodiments, so that it is possible to obtain the same effects as those of the above-described embodiments.
  • It is preferable that recipes (programs where process procedures or process conditions are written) used for the substrate process are individually prepared according to contents of process (film types, composition ratios, film qualities, film thicknesses, process procedures, process conditions, and the like of films which are to be formed on a substrate) and are stored in the memory device 121 c through an electric communication line or the external memory device 123. It is preferable that, when starting various processes, the CPU 121 a appropriately selects a proper recipe according to the contents of the process among plural recipes stored in the memory device 121 c. Therefore, films having various film types, composition ratios, film qualities, and film thicknesses can be allowed to be formed with good reproducibility by one substrate processing apparatus. In addition, the burden of the operator (burden of inputting of the process procedure, the process condition, and the like) can be reduced, so that it is possible to avoid manipulation mistake, and it is possible to quickly start the substrate process.
  • The above-described process recipe is not limited to a case where the recipe is newly produced, but for example, an existing recipe which is installed in advance in the substrate processing apparatus may be modified to be prepared. In the case of modifying the recipe, the modified recipe may be installed in the substrate processing apparatus through an electric communication line or a recording medium where the recipe is recorded. In addition, by manipulating the input/output device 122 included in the existing substrate processing apparatus, an existing recipe installed in advance in the substrate processing apparatus may be allowed to be directly modified.
  • In the above-described embodiments, the examples of forming films by using a substrate processing apparatus having a hot-wall-type processing furnace were described. The present invention is not limited to the above-described embodiments, but the present invention can be appropriately applied to even the case of forming films by using a substrate processing apparatus having a cold-wall-type processing furnace.
  • Even in the case of using such a substrate processing apparatus, film-forming can be performed in the same sequence and process conditions as those of the above-described embodiments or modified examples so that it is possible to obtain the same effects as those of the above-described embodiments or modified examples.
  • The above-described embodiments and modified examples may be used in a form of an appropriate combination thereof. In addition, the process conditions of the case are set, for example, to be the same as the process conditions of the above-described embodiments or modified examples.

Claims (17)

What is claimed is:
1. A gas supply nozzle comprising:
an upstream side pipe for introducing a gas;
a folded portion connected to a downstream end of the upstream side pipe, for reversing a flowing direction of the gas;
a downstream side pipe connected to a downstream end of the folded portion;
a set of a plurality of gas supply holes, disposed at a side surface of the upstream side pipe or the downstream side pipe, each hole of the set of a plurality of gas supply holes being opened for flowing the gas to a direction different from the folding direction of the folded portion; and
a gas residence suppressing hole, disposed at a downstream bottom end of the downstream side pipe, for flowing the gas to a longitudinal direction of the downstream side pipe, a total area of the gas residence suppressing hole being larger than at least an area of a gas supply hole of the set of the plurality of gas supply holes, and the total area of the gas residence supplying hole being smaller than a cross-sectional area of the downstream side pipe.
2. The gas supply nozzle according to claim 1,
wherein the gas residence suppressing hole is comprised of a single hole.
3. The gas supply nozzle according to claim 1,
wherein the gas residence suppressing hole is comprised of plural holes.
4. The gas supply nozzle according to claim 1,
wherein the set of a plurality of gas supply holes is disposed at least at a side surface of the downstream side pipe.
5. The gas supply nozzle according to claim 4,
wherein the gas residence suppressing hole is comprised of a single hole.
6. The gas supply nozzle according to claim 4,
wherein the gas residence suppressing hole is comprised of plural holes.
7. A gas supply nozzle comprising:
an upstream side pipe for introducing a gas;
a folded portion connected to a downstream end of the upstream side pipe, for reversing a flowing direction of the gas;
a downstream side pipe connected to a downstream end of the folded portion;
a first set of a plurality of gas supply holes, arranged in a longitudinal direction in a side of the upstream side pipe, each hole of the first set of the plurality of gas supply holes being opened for flowing the gas to a direction different from the folding direction of the folded portion; and
a second set of a plurality of gas supply holes, arranged in a longitudinal direction in a side of the downstream side pipe, each hole of the second set of the plurality of gas supply holes being opened for flowing the gas to a direction different from the folding direction of the folded portion,
wherein a first hole in the first set of the plurality of gas supply holes on the upstream side pipe, and a second hole in the second set of the plurality of gas supply holes on the downstream side pipe, are arranged in one plane crossing a longitudinal direction of the upstream or downstream side pipes.
8. The gas supply nozzle according to claim 7, further comprising:
a gas residence suppressing hole, disposed at a downstream bottom end of the downstream side pipe, for flowing the gas to a longitudinal direction of the downstream side pipe, a total area of the gas residence suppressing hole being larger than at least an area of a gas supply hole of the set of the plurality of gas supply holes, and the total area of the gas residence supplying hole being smaller than a cross-sectional area of the downstream side pipe.
9. The gas supply nozzle according to claim 8,
wherein the gas residence suppressing hole is comprised of a single hole.
10. The gas supply nozzle according to claim 8,
wherein the gas residence suppressing hole is comprised of plural holes.
11. A substrate processing apparatus comprising:
a heater having a cylindrical shape, being vertically installed;
a reaction tube installed inside the heater;
a processing chamber formed in a cylindrical hollow portion of the reaction tube, the processing chamber having an exhaust outlet of an exhaust pipe at lower position of the processing chamber;
a boat supporting a plurality of substrates to be in a horizontal posture and to be arranged in a vertical direction; and
a first gas supply nozzle including:
an upstream side pipe standing vertically between an inner wall of the reaction tube and the plurality of substrates supported by the boat, for introducing a gas;
a folded portion connected to a downstream end of the upstream side pipe, for reversing a flowing direction of the gas;
a downstream side pipe connected to a downstream end of the folded portion;
a first set of a plurality of gas supply holes, arranged in a longitudinal direction in a side of the upstream side pipe, each hole of the first set of the plurality of gas supply holes being opened for flowing the gas to a direction different from the folding direction of the folded portion; and
a second set of a plurality of gas supply holes, arranged in a longitudinal direction in a side of the downstream side pipe, each hole of the second set of the plurality of gas supply holes being opened for flowing the gas to a direction different from the folding direction of the folded portion,
wherein a first pair of holes, comprised of a first hole in the first set of the plurality of gas supply holes, and a first hole in the second set of the plurality of gas supply holes, is arranged horizontally in a first plane, for flowing the gas to a first substrate of the plurality of substrates.
12. The substrate processing apparatus according to claim 11, further comprising:
a second pair of holes, comprised of a second hole in the first set of the plurality of gas supply holes, and a second hole in the second set of the plurality of gas supply holes, is arranged horizontally in a second plane adjacent to the first plane, for flowing the gas to a second substrate of the plurality of substrates, adjacent to the first substrate.
13. The substrate processing apparatus according to claim 12, wherein an upstream end of the first gas supply nozzle is connected to a source gas supply system for supplying a source gas to the processing chamber, the source gas is at least one selected from the group consisting of an inorganic-based halosilane source gas, an organic-based halosilane source gas, a halogen group-free inorganic-based silane source gas, a halogen group-free organic-based silane source gas, and a halogen group-free amino-based (amine-based) silane source gas.
14. The substrate processing apparatus according to claim 12, further comprising:
a gas residence suppressing hole, disposed at a downstream bottom end of the downstream side pipe, for flowing the gas downward to a longitudinal direction of the downstream side pipe, a total area of the gas residence suppressing hole being larger than at least an area of a gas supply hole of the set of the plurality of gas supply holes, and the total area of the gas residence supplying hole being smaller than a cross-sectional area of the downstream side pipe.
15. The substrate processing apparatus according to claim 14,
wherein the gas residence suppressing hole is provided to a position lower than a region where the substrates are supported, and arranged in a vicinity of the exhaust outlet of the exhaust pipe.
16. The gas supply nozzle according to claim 15,
wherein the gas residence suppressing hole is comprised of a single hole.
17. The gas supply nozzle according to claim 15,
wherein the gas residence suppressing hole is comprised of plural holes.
US16/109,417 2015-07-17 2018-08-22 Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium Pending US20180363137A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US16/109,417 US20180363137A1 (en) 2015-07-17 2018-08-22 Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2015142902 2015-07-17
JP2015-142902 2015-07-17
JP2016108773A JP6578243B2 (en) 2015-07-17 2016-05-31 Gas supply nozzle, substrate processing apparatus, semiconductor device manufacturing method and program
JP2016-108773 2016-05-31
US15/211,583 US10081868B2 (en) 2015-07-17 2016-07-15 Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium
US16/109,417 US20180363137A1 (en) 2015-07-17 2018-08-22 Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US15/211,583 Continuation US10081868B2 (en) 2015-07-17 2016-07-15 Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium

Publications (1)

Publication Number Publication Date
US20180363137A1 true US20180363137A1 (en) 2018-12-20

Family

ID=57946546

Family Applications (2)

Application Number Title Priority Date Filing Date
US15/211,583 Active US10081868B2 (en) 2015-07-17 2016-07-15 Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium
US16/109,417 Pending US20180363137A1 (en) 2015-07-17 2018-08-22 Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US15/211,583 Active US10081868B2 (en) 2015-07-17 2016-07-15 Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium

Country Status (4)

Country Link
US (2) US10081868B2 (en)
JP (4) JP6578243B2 (en)
KR (6) KR20170009725A (en)
CN (3) CN109943827B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112563156A (en) * 2019-09-10 2021-03-26 株式会社国际电气 Substrate processing apparatus, method of manufacturing semiconductor device, and storage medium
US11261528B2 (en) * 2018-03-23 2022-03-01 Kokusai Electric Corporation Substrate processing apparatus and method of manufacturing semiconductor device

Families Citing this family (369)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10378106B2 (en) 2008-11-14 2019-08-13 Asm Ip Holding B.V. Method of forming insulation film by modified PEALD
US9394608B2 (en) 2009-04-06 2016-07-19 Asm America, Inc. Semiconductor processing reactor and components thereof
US8802201B2 (en) 2009-08-14 2014-08-12 Asm America, Inc. Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species
US9312155B2 (en) 2011-06-06 2016-04-12 Asm Japan K.K. High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules
US10364496B2 (en) 2011-06-27 2019-07-30 Asm Ip Holding B.V. Dual section module having shared and unshared mass flow controllers
US10854498B2 (en) 2011-07-15 2020-12-01 Asm Ip Holding B.V. Wafer-supporting device and method for producing same
US20130023129A1 (en) 2011-07-20 2013-01-24 Asm America, Inc. Pressure transmitter for a semiconductor processing environment
US9017481B1 (en) 2011-10-28 2015-04-28 Asm America, Inc. Process feed management for semiconductor substrate processing
US9659799B2 (en) 2012-08-28 2017-05-23 Asm Ip Holding B.V. Systems and methods for dynamic semiconductor process scheduling
US10714315B2 (en) 2012-10-12 2020-07-14 Asm Ip Holdings B.V. Semiconductor reaction chamber showerhead
US20160376700A1 (en) 2013-02-01 2016-12-29 Asm Ip Holding B.V. System for treatment of deposition reactor
US9484191B2 (en) 2013-03-08 2016-11-01 Asm Ip Holding B.V. Pulsed remote plasma method and system
US9589770B2 (en) 2013-03-08 2017-03-07 Asm Ip Holding B.V. Method and systems for in-situ formation of intermediate reactive species
US9240412B2 (en) 2013-09-27 2016-01-19 Asm Ip Holding B.V. Semiconductor structure and device and methods of forming same using selective epitaxial process
US10683571B2 (en) 2014-02-25 2020-06-16 Asm Ip Holding B.V. Gas supply manifold and method of supplying gases to chamber using same
US10167557B2 (en) 2014-03-18 2019-01-01 Asm Ip Holding B.V. Gas distribution system, reactor including the system, and methods of using the same
US11015245B2 (en) 2014-03-19 2021-05-25 Asm Ip Holding B.V. Gas-phase reactor and system having exhaust plenum and components thereof
US10858737B2 (en) 2014-07-28 2020-12-08 Asm Ip Holding B.V. Showerhead assembly and components thereof
US9890456B2 (en) 2014-08-21 2018-02-13 Asm Ip Holding B.V. Method and system for in situ formation of gas-phase compounds
US9657845B2 (en) 2014-10-07 2017-05-23 Asm Ip Holding B.V. Variable conductance gas distribution apparatus and method
US10941490B2 (en) 2014-10-07 2021-03-09 Asm Ip Holding B.V. Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same
KR102263121B1 (en) 2014-12-22 2021-06-09 에이에스엠 아이피 홀딩 비.브이. Semiconductor device and manufacuring method thereof
US10529542B2 (en) 2015-03-11 2020-01-07 Asm Ip Holdings B.V. Cross-flow reactor and method
US10276355B2 (en) 2015-03-12 2019-04-30 Asm Ip Holding B.V. Multi-zone reactor, system including the reactor, and method of using the same
US10458018B2 (en) 2015-06-26 2019-10-29 Asm Ip Holding B.V. Structures including metal carbide material, devices including the structures, and methods of forming same
US10600673B2 (en) 2015-07-07 2020-03-24 Asm Ip Holding B.V. Magnetic susceptor to baseplate seal
JP6560924B2 (en) * 2015-07-29 2019-08-14 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ Substrate processing apparatus, semiconductor device manufacturing method, and program
US9960072B2 (en) 2015-09-29 2018-05-01 Asm Ip Holding B.V. Variable adjustment for precise matching of multiple chamber cavity housings
US10211308B2 (en) 2015-10-21 2019-02-19 Asm Ip Holding B.V. NbMC layers
KR102412614B1 (en) * 2015-10-22 2022-06-23 삼성전자주식회사 Material layer, semiconductor device including the same, and fabrication methods thereof
US10322384B2 (en) 2015-11-09 2019-06-18 Asm Ip Holding B.V. Counter flow mixer for process chamber
US11139308B2 (en) 2015-12-29 2021-10-05 Asm Ip Holding B.V. Atomic layer deposition of III-V compounds to form V-NAND devices
US10529554B2 (en) 2016-02-19 2020-01-07 Asm Ip Holding B.V. Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches
US10468251B2 (en) 2016-02-19 2019-11-05 Asm Ip Holding B.V. Method for forming spacers using silicon nitride film for spacer-defined multiple patterning
US10501866B2 (en) 2016-03-09 2019-12-10 Asm Ip Holding B.V. Gas distribution apparatus for improved film uniformity in an epitaxial system
US10343920B2 (en) 2016-03-18 2019-07-09 Asm Ip Holding B.V. Aligned carbon nanotubes
US9892913B2 (en) 2016-03-24 2018-02-13 Asm Ip Holding B.V. Radial and thickness control via biased multi-port injection settings
JP6546872B2 (en) * 2016-04-07 2019-07-17 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ Semiconductor device manufacturing method, substrate processing apparatus, and program
US10865475B2 (en) 2016-04-21 2020-12-15 Asm Ip Holding B.V. Deposition of metal borides and silicides
US10190213B2 (en) 2016-04-21 2019-01-29 Asm Ip Holding B.V. Deposition of metal borides
US10367080B2 (en) 2016-05-02 2019-07-30 Asm Ip Holding B.V. Method of forming a germanium oxynitride film
US10032628B2 (en) 2016-05-02 2018-07-24 Asm Ip Holding B.V. Source/drain performance through conformal solid state doping
KR102592471B1 (en) 2016-05-17 2023-10-20 에이에스엠 아이피 홀딩 비.브이. Method of forming metal interconnection and method of fabricating semiconductor device using the same
US11453943B2 (en) 2016-05-25 2022-09-27 Asm Ip Holding B.V. Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor
US10388509B2 (en) 2016-06-28 2019-08-20 Asm Ip Holding B.V. Formation of epitaxial layers via dislocation filtering
US9859151B1 (en) 2016-07-08 2018-01-02 Asm Ip Holding B.V. Selective film deposition method to form air gaps
US10612137B2 (en) 2016-07-08 2020-04-07 Asm Ip Holdings B.V. Organic reactants for atomic layer deposition
US10714385B2 (en) 2016-07-19 2020-07-14 Asm Ip Holding B.V. Selective deposition of tungsten
KR102354490B1 (en) 2016-07-27 2022-01-21 에이에스엠 아이피 홀딩 비.브이. Method of processing a substrate
US9812320B1 (en) 2016-07-28 2017-11-07 Asm Ip Holding B.V. Method and apparatus for filling a gap
US9887082B1 (en) 2016-07-28 2018-02-06 Asm Ip Holding B.V. Method and apparatus for filling a gap
US10395919B2 (en) 2016-07-28 2019-08-27 Asm Ip Holding B.V. Method and apparatus for filling a gap
KR102532607B1 (en) 2016-07-28 2023-05-15 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus and method of operating the same
KR102613349B1 (en) 2016-08-25 2023-12-14 에이에스엠 아이피 홀딩 비.브이. Exhaust apparatus and substrate processing apparatus and thin film fabricating method using the same
US10410943B2 (en) 2016-10-13 2019-09-10 Asm Ip Holding B.V. Method for passivating a surface of a semiconductor and related systems
US10643826B2 (en) 2016-10-26 2020-05-05 Asm Ip Holdings B.V. Methods for thermally calibrating reaction chambers
US11532757B2 (en) 2016-10-27 2022-12-20 Asm Ip Holding B.V. Deposition of charge trapping layers
US10714350B2 (en) 2016-11-01 2020-07-14 ASM IP Holdings, B.V. Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures
US10435790B2 (en) 2016-11-01 2019-10-08 Asm Ip Holding B.V. Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap
US10229833B2 (en) 2016-11-01 2019-03-12 Asm Ip Holding B.V. Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures
US10643904B2 (en) 2016-11-01 2020-05-05 Asm Ip Holdings B.V. Methods for forming a semiconductor device and related semiconductor device structures
US10134757B2 (en) 2016-11-07 2018-11-20 Asm Ip Holding B.V. Method of processing a substrate and a device manufactured by using the method
KR102546317B1 (en) 2016-11-15 2023-06-21 에이에스엠 아이피 홀딩 비.브이. Gas supply unit and substrate processing apparatus including the same
US10340135B2 (en) 2016-11-28 2019-07-02 Asm Ip Holding B.V. Method of topologically restricted plasma-enhanced cyclic deposition of silicon or metal nitride
KR102762543B1 (en) 2016-12-14 2025-02-05 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
US11447861B2 (en) 2016-12-15 2022-09-20 Asm Ip Holding B.V. Sequential infiltration synthesis apparatus and a method of forming a patterned structure
US11581186B2 (en) 2016-12-15 2023-02-14 Asm Ip Holding B.V. Sequential infiltration synthesis apparatus
KR102700194B1 (en) 2016-12-19 2024-08-28 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
US10269558B2 (en) 2016-12-22 2019-04-23 Asm Ip Holding B.V. Method of forming a structure on a substrate
US10867788B2 (en) 2016-12-28 2020-12-15 Asm Ip Holding B.V. Method of forming a structure on a substrate
US11390950B2 (en) 2017-01-10 2022-07-19 Asm Ip Holding B.V. Reactor system and method to reduce residue buildup during a film deposition process
JP6857503B2 (en) * 2017-02-01 2021-04-14 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ Semiconductor device manufacturing methods, substrate processing devices and programs
US10655221B2 (en) 2017-02-09 2020-05-19 Asm Ip Holding B.V. Method for depositing oxide film by thermal ALD and PEALD
US10468261B2 (en) 2017-02-15 2019-11-05 Asm Ip Holding B.V. Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
CN110121763B (en) 2017-02-23 2023-12-26 株式会社国际电气 Substrate processing apparatus, method for manufacturing semiconductor device, and storage medium
JP6780557B2 (en) 2017-03-21 2020-11-04 東京エレクトロン株式会社 Gas supply member and gas treatment equipment
JP6759137B2 (en) * 2017-03-24 2020-09-23 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ Substrate processing equipment, semiconductor equipment manufacturing methods and programs
US10529563B2 (en) 2017-03-29 2020-01-07 Asm Ip Holdings B.V. Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures
US10283353B2 (en) 2017-03-29 2019-05-07 Asm Ip Holding B.V. Method of reforming insulating film deposited on substrate with recess pattern
KR102457289B1 (en) 2017-04-25 2022-10-21 에이에스엠 아이피 홀딩 비.브이. Method for depositing a thin film and manufacturing a semiconductor device
US10770286B2 (en) 2017-05-08 2020-09-08 Asm Ip Holdings B.V. Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures
US10892156B2 (en) 2017-05-08 2021-01-12 Asm Ip Holding B.V. Methods for forming a silicon nitride film on a substrate and related semiconductor device structures
US10446393B2 (en) 2017-05-08 2019-10-15 Asm Ip Holding B.V. Methods for forming silicon-containing epitaxial layers and related semiconductor device structures
US10504742B2 (en) 2017-05-31 2019-12-10 Asm Ip Holding B.V. Method of atomic layer etching using hydrogen plasma
US10886123B2 (en) 2017-06-02 2021-01-05 Asm Ip Holding B.V. Methods for forming low temperature semiconductor layers and related semiconductor device structures
US12040200B2 (en) 2017-06-20 2024-07-16 Asm Ip Holding B.V. Semiconductor processing apparatus and methods for calibrating a semiconductor processing apparatus
US11306395B2 (en) 2017-06-28 2022-04-19 Asm Ip Holding B.V. Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
US10685834B2 (en) 2017-07-05 2020-06-16 Asm Ip Holdings B.V. Methods for forming a silicon germanium tin layer and related semiconductor device structures
KR20190009245A (en) 2017-07-18 2019-01-28 에이에스엠 아이피 홀딩 비.브이. Methods for forming a semiconductor device structure and related semiconductor device structures
US11374112B2 (en) 2017-07-19 2022-06-28 Asm Ip Holding B.V. Method for depositing a group IV semiconductor and related semiconductor device structures
US11018002B2 (en) 2017-07-19 2021-05-25 Asm Ip Holding B.V. Method for selectively depositing a Group IV semiconductor and related semiconductor device structures
US10541333B2 (en) 2017-07-19 2020-01-21 Asm Ip Holding B.V. Method for depositing a group IV semiconductor and related semiconductor device structures
US10590535B2 (en) 2017-07-26 2020-03-17 Asm Ip Holdings B.V. Chemical treatment, deposition and/or infiltration apparatus and method for using the same
US10312055B2 (en) 2017-07-26 2019-06-04 Asm Ip Holding B.V. Method of depositing film by PEALD using negative bias
US10605530B2 (en) 2017-07-26 2020-03-31 Asm Ip Holding B.V. Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace
TWI815813B (en) 2017-08-04 2023-09-21 荷蘭商Ａｓｍ智慧財產控股公司 Showerhead assembly for distributing a gas within a reaction chamber
US10770336B2 (en) 2017-08-08 2020-09-08 Asm Ip Holding B.V. Substrate lift mechanism and reactor including same
US10692741B2 (en) 2017-08-08 2020-06-23 Asm Ip Holdings B.V. Radiation shield
US10249524B2 (en) 2017-08-09 2019-04-02 Asm Ip Holding B.V. Cassette holder assembly for a substrate cassette and holding member for use in such assembly
US11139191B2 (en) 2017-08-09 2021-10-05 Asm Ip Holding B.V. Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
US11769682B2 (en) 2017-08-09 2023-09-26 Asm Ip Holding B.V. Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
USD900036S1 (en) 2017-08-24 2020-10-27 Asm Ip Holding B.V. Heater electrical connector and adapter
US11830730B2 (en) 2017-08-29 2023-11-28 Asm Ip Holding B.V. Layer forming method and apparatus
US11056344B2 (en) 2017-08-30 2021-07-06 Asm Ip Holding B.V. Layer forming method
US11295980B2 (en) 2017-08-30 2022-04-05 Asm Ip Holding B.V. Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
KR102491945B1 (en) 2017-08-30 2023-01-26 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
KR102401446B1 (en) 2017-08-31 2022-05-24 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
US10607895B2 (en) 2017-09-18 2020-03-31 Asm Ip Holdings B.V. Method for forming a semiconductor device structure comprising a gate fill metal
KR102630301B1 (en) 2017-09-21 2024-01-29 에이에스엠 아이피 홀딩 비.브이. Method of sequential infiltration synthesis treatment of infiltrateable material and structures and devices formed using same
US10844484B2 (en) 2017-09-22 2020-11-24 Asm Ip Holding B.V. Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
US10658205B2 (en) 2017-09-28 2020-05-19 Asm Ip Holdings B.V. Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber
US10403504B2 (en) 2017-10-05 2019-09-03 Asm Ip Holding B.V. Method for selectively depositing a metallic film on a substrate
US10319588B2 (en) 2017-10-10 2019-06-11 Asm Ip Holding B.V. Method for depositing a metal chalcogenide on a substrate by cyclical deposition
US10923344B2 (en) 2017-10-30 2021-02-16 Asm Ip Holding B.V. Methods for forming a semiconductor structure and related semiconductor structures
US10910262B2 (en) 2017-11-16 2021-02-02 Asm Ip Holding B.V. Method of selectively depositing a capping layer structure on a semiconductor device structure
KR102443047B1 (en) 2017-11-16 2022-09-14 에이에스엠 아이피 홀딩 비.브이. Method of processing a substrate and a device manufactured by the same
US11022879B2 (en) 2017-11-24 2021-06-01 Asm Ip Holding B.V. Method of forming an enhanced unexposed photoresist layer
WO2019103610A1 (en) 2017-11-27 2019-05-31 Asm Ip Holding B.V. Apparatus including a clean mini environment
CN111316417B (en) 2017-11-27 2023-12-22 阿斯莫Ip控股公司 Storage device for storing wafer cassettes for use with batch ovens
US10290508B1 (en) 2017-12-05 2019-05-14 Asm Ip Holding B.V. Method for forming vertical spacers for spacer-defined patterning
JP6952595B2 (en) * 2017-12-20 2021-10-20 東京エレクトロン株式会社 Vertical heat treatment equipment
US10872771B2 (en) 2018-01-16 2020-12-22 Asm Ip Holding B. V. Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures
US11482412B2 (en) 2018-01-19 2022-10-25 Asm Ip Holding B.V. Method for depositing a gap-fill layer by plasma-assisted deposition
TWI852426B (en) 2018-01-19 2024-08-11 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Deposition method
USD903477S1 (en) 2018-01-24 2020-12-01 Asm Ip Holdings B.V. Metal clamp
US11018047B2 (en) 2018-01-25 2021-05-25 Asm Ip Holding B.V. Hybrid lift pin
USD880437S1 (en) 2018-02-01 2020-04-07 Asm Ip Holding B.V. Gas supply plate for semiconductor manufacturing apparatus
US10535516B2 (en) 2018-02-01 2020-01-14 Asm Ip Holdings B.V. Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures
US11081345B2 (en) 2018-02-06 2021-08-03 Asm Ip Holding B.V. Method of post-deposition treatment for silicon oxide film
US10896820B2 (en) 2018-02-14 2021-01-19 Asm Ip Holding B.V. Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
US11685991B2 (en) 2018-02-14 2023-06-27 Asm Ip Holding B.V. Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
US10731249B2 (en) 2018-02-15 2020-08-04 Asm Ip Holding B.V. Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus
US10658181B2 (en) 2018-02-20 2020-05-19 Asm Ip Holding B.V. Method of spacer-defined direct patterning in semiconductor fabrication
KR102636427B1 (en) 2018-02-20 2024-02-13 에이에스엠 아이피 홀딩 비.브이. Substrate processing method and apparatus
US10975470B2 (en) 2018-02-23 2021-04-13 Asm Ip Holding B.V. Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
US11473195B2 (en) 2018-03-01 2022-10-18 Asm Ip Holding B.V. Semiconductor processing apparatus and a method for processing a substrate
US11629406B2 (en) 2018-03-09 2023-04-18 Asm Ip Holding B.V. Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate
US11114283B2 (en) 2018-03-16 2021-09-07 Asm Ip Holding B.V. Reactor, system including the reactor, and methods of manufacturing and using same
KR102646467B1 (en) 2018-03-27 2024-03-11 에이에스엠 아이피 홀딩 비.브이. Method of forming an electrode on a substrate and a semiconductor device structure including an electrode
US11088002B2 (en) 2018-03-29 2021-08-10 Asm Ip Holding B.V. Substrate rack and a substrate processing system and method
US11230766B2 (en) 2018-03-29 2022-01-25 Asm Ip Holding B.V. Substrate processing apparatus and method
US10510536B2 (en) 2018-03-29 2019-12-17 Asm Ip Holding B.V. Method of depositing a co-doped polysilicon film on a surface of a substrate within a reaction chamber
KR102501472B1 (en) 2018-03-30 2023-02-20 에이에스엠 아이피 홀딩 비.브이. Substrate processing method
KR102600229B1 (en) 2018-04-09 2023-11-10 에이에스엠 아이피 홀딩 비.브이. Substrate supporting device, substrate processing apparatus including the same and substrate processing method
JP7012585B2 (en) 2018-04-12 2022-01-28 東京エレクトロン株式会社 Heat treatment equipment and heat treatment method
US12025484B2 (en) 2018-05-08 2024-07-02 Asm Ip Holding B.V. Thin film forming method
TWI811348B (en) 2018-05-08 2023-08-11 荷蘭商Ａｓｍ 智慧財產控股公司 Methods for depositing an oxide film on a substrate by a cyclical deposition process and related device structures
US12272527B2 (en) 2018-05-09 2025-04-08 Asm Ip Holding B.V. Apparatus for use with hydrogen radicals and method of using same
KR20190129718A (en) 2018-05-11 2019-11-20 에이에스엠 아이피 홀딩 비.브이. Methods for forming a doped metal carbide film on a substrate and related semiconductor device structures
KR102596988B1 (en) 2018-05-28 2023-10-31 에이에스엠 아이피 홀딩 비.브이. Method of processing a substrate and a device manufactured by the same
TWI840362B (en) 2018-06-04 2024-05-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Wafer handling chamber with moisture reduction
US11718913B2 (en) 2018-06-04 2023-08-08 Asm Ip Holding B.V. Gas distribution system and reactor system including same
US11286562B2 (en) 2018-06-08 2022-03-29 Asm Ip Holding B.V. Gas-phase chemical reactor and method of using same
KR102568797B1 (en) 2018-06-21 2023-08-21 에이에스엠 아이피 홀딩 비.브이. Substrate processing system
US10797133B2 (en) 2018-06-21 2020-10-06 Asm Ip Holding B.V. Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures
US11499222B2 (en) 2018-06-27 2022-11-15 Asm Ip Holding B.V. Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
TWI871083B (en) 2018-06-27 2025-01-21 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Cyclic deposition processes for forming metal-containing material
KR102686758B1 (en) 2018-06-29 2024-07-18 에이에스엠 아이피 홀딩 비.브이. Method for depositing a thin film and manufacturing a semiconductor device
US10612136B2 (en) 2018-06-29 2020-04-07 ASM IP Holding, B.V. Temperature-controlled flange and reactor system including same
US10388513B1 (en) 2018-07-03 2019-08-20 Asm Ip Holding B.V. Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
US10755922B2 (en) 2018-07-03 2020-08-25 Asm Ip Holding B.V. Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
US10767789B2 (en) 2018-07-16 2020-09-08 Asm Ip Holding B.V. Diaphragm valves, valve components, and methods for forming valve components
JP1624352S (en) * 2018-07-19 2019-02-12
US10483099B1 (en) 2018-07-26 2019-11-19 Asm Ip Holding B.V. Method for forming thermally stable organosilicon polymer film
US11053591B2 (en) 2018-08-06 2021-07-06 Asm Ip Holding B.V. Multi-port gas injection system and reactor system including same
US10883175B2 (en) 2018-08-09 2021-01-05 Asm Ip Holding B.V. Vertical furnace for processing substrates and a liner for use therein
US10829852B2 (en) 2018-08-16 2020-11-10 Asm Ip Holding B.V. Gas distribution device for a wafer processing apparatus
US11430674B2 (en) 2018-08-22 2022-08-30 Asm Ip Holding B.V. Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
KR102707956B1 (en) 2018-09-11 2024-09-19 에이에스엠 아이피 홀딩 비.브이. Method for deposition of a thin film
US11024523B2 (en) 2018-09-11 2021-06-01 Asm Ip Holding B.V. Substrate processing apparatus and method
US11049751B2 (en) 2018-09-14 2021-06-29 Asm Ip Holding B.V. Cassette supply system to store and handle cassettes and processing apparatus equipped therewith
JP6920262B2 (en) 2018-09-20 2021-08-18 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ Semiconductor device manufacturing methods, board processing methods, board processing devices, and programs
CN110970344B (en) 2018-10-01 2024-10-25 Asmip控股有限公司 Substrate holding apparatus, system comprising the same and method of using the same
US11232963B2 (en) 2018-10-03 2022-01-25 Asm Ip Holding B.V. Substrate processing apparatus and method
KR102592699B1 (en) 2018-10-08 2023-10-23 에이에스엠 아이피 홀딩 비.브이. Substrate support unit and apparatuses for depositing thin film and processing the substrate including the same
US10847365B2 (en) 2018-10-11 2020-11-24 Asm Ip Holding B.V. Method of forming conformal silicon carbide film by cyclic CVD
US10811256B2 (en) 2018-10-16 2020-10-20 Asm Ip Holding B.V. Method for etching a carbon-containing feature
KR102546322B1 (en) 2018-10-19 2023-06-21 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus and substrate processing method
KR102605121B1 (en) 2018-10-19 2023-11-23 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus and substrate processing method
USD948463S1 (en) 2018-10-24 2022-04-12 Asm Ip Holding B.V. Susceptor for semiconductor substrate supporting apparatus
US10381219B1 (en) 2018-10-25 2019-08-13 Asm Ip Holding B.V. Methods for forming a silicon nitride film
US11087997B2 (en) 2018-10-31 2021-08-10 Asm Ip Holding B.V. Substrate processing apparatus for processing substrates
KR102748291B1 (en) 2018-11-02 2024-12-31 에이에스엠 아이피 홀딩 비.브이. Substrate support unit and substrate processing apparatus including the same
US11572620B2 (en) 2018-11-06 2023-02-07 Asm Ip Holding B.V. Methods for selectively depositing an amorphous silicon film on a substrate
US11031242B2 (en) 2018-11-07 2021-06-08 Asm Ip Holding B.V. Methods for depositing a boron doped silicon germanium film
US10847366B2 (en) 2018-11-16 2020-11-24 Asm Ip Holding B.V. Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process
US10818758B2 (en) 2018-11-16 2020-10-27 Asm Ip Holding B.V. Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
US10559458B1 (en) 2018-11-26 2020-02-11 Asm Ip Holding B.V. Method of forming oxynitride film
US12040199B2 (en) 2018-11-28 2024-07-16 Asm Ip Holding B.V. Substrate processing apparatus for processing substrates
US11217444B2 (en) 2018-11-30 2022-01-04 Asm Ip Holding B.V. Method for forming an ultraviolet radiation responsive metal oxide-containing film
KR102636428B1 (en) 2018-12-04 2024-02-13 에이에스엠 아이피 홀딩 비.브이. A method for cleaning a substrate processing apparatus
US11158513B2 (en) 2018-12-13 2021-10-26 Asm Ip Holding B.V. Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures
JP7504584B2 (en) 2018-12-14 2024-06-24 エーエスエム・アイピー・ホールディング・ベー・フェー Method and system for forming device structures using selective deposition of gallium nitride - Patents.com
TWI819180B (en) 2019-01-17 2023-10-21 荷蘭商Ａｓｍ 智慧財產控股公司 Methods of forming a transition metal containing film on a substrate by a cyclical deposition process
KR102727227B1 (en) 2019-01-22 2024-11-07 에이에스엠 아이피 홀딩 비.브이. Semiconductor processing device
JP1648531S (en) * 2019-01-28 2019-12-23
CN111524788B (en) 2019-02-01 2023-11-24 Asm Ip私人控股有限公司 Method for forming topologically selective films of silicon oxide
TWI845607B (en) 2019-02-20 2024-06-21 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Cyclical deposition method and apparatus for filling a recess formed within a substrate surface
US11482533B2 (en) 2019-02-20 2022-10-25 Asm Ip Holding B.V. Apparatus and methods for plug fill deposition in 3-D NAND applications
KR102626263B1 (en) 2019-02-20 2024-01-16 에이에스엠 아이피 홀딩 비.브이. Cyclical deposition method including treatment step and apparatus for same
TWI873122B (en) 2019-02-20 2025-02-21 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Method of filling a recess formed within a surface of a substrate, semiconductor structure formed according to the method, and semiconductor processing apparatus
TWI842826B (en) 2019-02-22 2024-05-21 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Substrate processing apparatus and method for processing substrate
KR102782593B1 (en) 2019-03-08 2025-03-14 에이에스엠 아이피 홀딩 비.브이. Structure Including SiOC Layer and Method of Forming Same
KR20200108242A (en) 2019-03-08 2020-09-17 에이에스엠 아이피 홀딩 비.브이. Method for Selective Deposition of Silicon Nitride Layer and Structure Including Selectively-Deposited Silicon Nitride Layer
KR102762833B1 (en) 2019-03-08 2025-02-04 에이에스엠 아이피 홀딩 비.브이. STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME
JP2020167398A (en) 2019-03-28 2020-10-08 エーエスエム・アイピー・ホールディング・ベー・フェー Door openers and substrate processing equipment provided with door openers
US11551925B2 (en) 2019-04-01 2023-01-10 Asm Ip Holding B.V. Method for manufacturing a semiconductor device
US11447864B2 (en) 2019-04-19 2022-09-20 Asm Ip Holding B.V. Layer forming method and apparatus
KR20200125453A (en) 2019-04-24 2020-11-04 에이에스엠 아이피 홀딩 비.브이. Gas-phase reactor system and method of using same
KR20200130121A (en) 2019-05-07 2020-11-18 에이에스엠 아이피 홀딩 비.브이. Chemical source vessel with dip tube
KR20200130118A (en) 2019-05-07 2020-11-18 에이에스엠 아이피 홀딩 비.브이. Method for Reforming Amorphous Carbon Polymer Film
KR20200130652A (en) 2019-05-10 2020-11-19 에이에스엠 아이피 홀딩 비.브이. Method of depositing material onto a surface and structure formed according to the method
JP7612342B2 (en) 2019-05-16 2025-01-14 エーエスエム・アイピー・ホールディング・ベー・フェー Wafer boat handling apparatus, vertical batch furnace and method
JP7598201B2 (en) 2019-05-16 2024-12-11 エーエスエム・アイピー・ホールディング・ベー・フェー Wafer boat handling apparatus, vertical batch furnace and method
USD975665S1 (en) 2019-05-17 2023-01-17 Asm Ip Holding B.V. Susceptor shaft
USD947913S1 (en) 2019-05-17 2022-04-05 Asm Ip Holding B.V. Susceptor shaft
USD935572S1 (en) 2019-05-24 2021-11-09 Asm Ip Holding B.V. Gas channel plate
USD922229S1 (en) 2019-06-05 2021-06-15 Asm Ip Holding B.V. Device for controlling a temperature of a gas supply unit
KR20200141002A (en) 2019-06-06 2020-12-17 에이에스엠 아이피 홀딩 비.브이. Method of using a gas-phase reactor system including analyzing exhausted gas
KR20200141931A (en) 2019-06-10 2020-12-21 에이에스엠 아이피 홀딩 비.브이. Method for cleaning quartz epitaxial chambers
KR20200143254A (en) 2019-06-11 2020-12-23 에이에스엠 아이피 홀딩 비.브이. Method of forming an electronic structure using an reforming gas, system for performing the method, and structure formed using the method
USD944946S1 (en) 2019-06-14 2022-03-01 Asm Ip Holding B.V. Shower plate
USD931978S1 (en) 2019-06-27 2021-09-28 Asm Ip Holding B.V. Showerhead vacuum transport
KR20210005515A (en) 2019-07-03 2021-01-14 에이에스엠 아이피 홀딩 비.브이. Temperature control assembly for substrate processing apparatus and method of using same
JP7499079B2 (en) 2019-07-09 2024-06-13 エーエスエム・アイピー・ホールディング・ベー・フェー Plasma device using coaxial waveguide and substrate processing method
CN112216646A (en) 2019-07-10 2021-01-12 Asm Ip私人控股有限公司 Substrate supporting assembly and substrate processing device comprising same
KR20210010307A (en) 2019-07-16 2021-01-27 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
KR20210010820A (en) 2019-07-17 2021-01-28 에이에스엠 아이피 홀딩 비.브이. Methods of forming silicon germanium structures
KR20210010816A (en) 2019-07-17 2021-01-28 에이에스엠 아이피 홀딩 비.브이. Radical assist ignition plasma system and method
US11643724B2 (en) 2019-07-18 2023-05-09 Asm Ip Holding B.V. Method of forming structures using a neutral beam
KR20210010817A (en) 2019-07-19 2021-01-28 에이에스엠 아이피 홀딩 비.브이. Method of Forming Topology-Controlled Amorphous Carbon Polymer Film
TWI839544B (en) 2019-07-19 2024-04-21 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Method of forming topology-controlled amorphous carbon polymer film
TWI851767B (en) 2019-07-29 2024-08-11 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Methods for selective deposition utilizing n-type dopants and/or alternative dopants to achieve high dopant incorporation
CN112309900A (en) 2019-07-30 2021-02-02 Asm Ip私人控股有限公司 Substrate processing apparatus
KR20210015655A (en) 2019-07-30 2021-02-10 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus and method
CN112309899A (en) 2019-07-30 2021-02-02 Asm Ip私人控股有限公司 Substrate processing apparatus
US11227782B2 (en) 2019-07-31 2022-01-18 Asm Ip Holding B.V. Vertical batch furnace assembly
US11587814B2 (en) 2019-07-31 2023-02-21 Asm Ip Holding B.V. Vertical batch furnace assembly
US11587815B2 (en) 2019-07-31 2023-02-21 Asm Ip Holding B.V. Vertical batch furnace assembly
CN112323048B (en) 2019-08-05 2024-02-09 Asm Ip私人控股有限公司 Liquid level sensor for chemical source container
CN112342526A (en) 2019-08-09 2021-02-09 Asm Ip私人控股有限公司 Heater assembly including cooling device and method of using same
USD965044S1 (en) 2019-08-19 2022-09-27 Asm Ip Holding B.V. Susceptor shaft
USD965524S1 (en) 2019-08-19 2022-10-04 Asm Ip Holding B.V. Susceptor support
JP2021031769A (en) 2019-08-21 2021-03-01 エーエスエム アイピー ホールディング ビー．ブイ． Production apparatus of mixed gas of film deposition raw material and film deposition apparatus
USD940837S1 (en) 2019-08-22 2022-01-11 Asm Ip Holding B.V. Electrode
USD949319S1 (en) 2019-08-22 2022-04-19 Asm Ip Holding B.V. Exhaust duct
USD979506S1 (en) 2019-08-22 2023-02-28 Asm Ip Holding B.V. Insulator
USD930782S1 (en) 2019-08-22 2021-09-14 Asm Ip Holding B.V. Gas distributor
KR20210024423A (en) 2019-08-22 2021-03-05 에이에스엠 아이피 홀딩 비.브이. Method for forming a structure with a hole
KR20210024420A (en) 2019-08-23 2021-03-05 에이에스엠 아이피 홀딩 비.브이. Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane
US11286558B2 (en) 2019-08-23 2022-03-29 Asm Ip Holding B.V. Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
US11495459B2 (en) 2019-09-04 2022-11-08 Asm Ip Holding B.V. Methods for selective deposition using a sacrificial capping layer
KR102733104B1 (en) 2019-09-05 2024-11-22 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
KR102783210B1 (en) * 2019-09-09 2025-03-19 주식회사 원익아이피에스 Gas supply nozzle and substrate processing apparatus using the same
US11562901B2 (en) 2019-09-25 2023-01-24 Asm Ip Holding B.V. Substrate processing method
CN112575312B (en) * 2019-09-30 2023-08-29 长鑫存储技术有限公司 Film preparation equipment and film preparation method
CN112593212B (en) 2019-10-02 2023-12-22 Asm Ip私人控股有限公司 Method for forming topologically selective silicon oxide film by cyclic plasma enhanced deposition process
TWI846953B (en) 2019-10-08 2024-07-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Substrate processing device
KR20210042810A (en) 2019-10-08 2021-04-20 에이에스엠 아이피 홀딩 비.브이. Reactor system including a gas distribution assembly for use with activated species and method of using same
KR20210043460A (en) 2019-10-10 2021-04-21 에이에스엠 아이피 홀딩 비.브이. Method of forming a photoresist underlayer and structure including same
US12009241B2 (en) 2019-10-14 2024-06-11 Asm Ip Holding B.V. Vertical batch furnace assembly with detector to detect cassette
TWI834919B (en) 2019-10-16 2024-03-11 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Method of topology-selective film formation of silicon oxide
US11637014B2 (en) 2019-10-17 2023-04-25 Asm Ip Holding B.V. Methods for selective deposition of doped semiconductor material
KR20210047808A (en) 2019-10-21 2021-04-30 에이에스엠 아이피 홀딩 비.브이. Apparatus and methods for selectively etching films
KR20210050453A (en) 2019-10-25 2021-05-07 에이에스엠 아이피 홀딩 비.브이. Methods for filling a gap feature on a substrate surface and related semiconductor structures
US11646205B2 (en) 2019-10-29 2023-05-09 Asm Ip Holding B.V. Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same
KR20210054983A (en) 2019-11-05 2021-05-14 에이에스엠 아이피 홀딩 비.브이. Structures with doped semiconductor layers and methods and systems for forming same
US11501968B2 (en) 2019-11-15 2022-11-15 Asm Ip Holding B.V. Method for providing a semiconductor device with silicon filled gaps
KR20210062561A (en) 2019-11-20 2021-05-31 에이에스엠 아이피 홀딩 비.브이. Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure
CN112951697A (en) 2019-11-26 2021-06-11 Asm Ip私人控股有限公司 Substrate processing apparatus
KR20210065848A (en) 2019-11-26 2021-06-04 에이에스엠 아이피 홀딩 비.브이. Methods for selectivley forming a target film on a substrate comprising a first dielectric surface and a second metallic surface
CN112885692A (en) 2019-11-29 2021-06-01 Asm Ip私人控股有限公司 Substrate processing apparatus
CN112885693A (en) 2019-11-29 2021-06-01 Asm Ip私人控股有限公司 Substrate processing apparatus
JP7527928B2 (en) 2019-12-02 2024-08-05 エーエスエム・アイピー・ホールディング・ベー・フェー Substrate processing apparatus and substrate processing method
KR20210070898A (en) 2019-12-04 2021-06-15 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus
JP2021097227A (en) 2019-12-17 2021-06-24 エーエスエム・アイピー・ホールディング・ベー・フェー Method of forming vanadium nitride layer and structure including vanadium nitride layer
KR20210080214A (en) 2019-12-19 2021-06-30 에이에스엠 아이피 홀딩 비.브이. Methods for filling a gap feature on a substrate and related semiconductor structures
TW202140135A (en) 2020-01-06 2021-11-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Gas supply assembly and valve plate assembly
JP7636892B2 (en) 2020-01-06 2025-02-27 エーエスエム・アイピー・ホールディング・ベー・フェー Channeled Lift Pins
US11993847B2 (en) 2020-01-08 2024-05-28 Asm Ip Holding B.V. Injector
KR20210093163A (en) 2020-01-16 2021-07-27 에이에스엠 아이피 홀딩 비.브이. Method of forming high aspect ratio features
KR102675856B1 (en) 2020-01-20 2024-06-17 에이에스엠 아이피 홀딩 비.브이. Method of forming thin film and method of modifying surface of thin film
TWI871421B (en) 2020-02-03 2025-02-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Devices and structures including a vanadium or indium layer and methods and systems for forming the same
KR20210100010A (en) 2020-02-04 2021-08-13 에이에스엠 아이피 홀딩 비.브이. Method and apparatus for transmittance measurements of large articles
WO2021156987A1 (en) * 2020-02-05 2021-08-12 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ Substrate processing device, semiconductor device manufacturing method, and recording medium
US11776846B2 (en) 2020-02-07 2023-10-03 Asm Ip Holding B.V. Methods for depositing gap filling fluids and related systems and devices
KR20210103956A (en) 2020-02-13 2021-08-24 에이에스엠 아이피 홀딩 비.브이. Substrate processing apparatus including light receiving device and calibration method of light receiving device
US11781243B2 (en) 2020-02-17 2023-10-10 Asm Ip Holding B.V. Method for depositing low temperature phosphorous-doped silicon
TW202203344A (en) 2020-02-28 2022-01-16 荷蘭商Ａｓｍ Ｉｐ控股公司 System dedicated for parts cleaning
KR20210113043A (en) 2020-03-04 2021-09-15 에이에스엠 아이피 홀딩 비.브이. Alignment fixture for a reactor system
KR20210116240A (en) 2020-03-11 2021-09-27 에이에스엠 아이피 홀딩 비.브이. Substrate handling device with adjustable joints
US11876356B2 (en) 2020-03-11 2024-01-16 Asm Ip Holding B.V. Lockout tagout assembly and system and method of using same
KR102775390B1 (en) 2020-03-12 2025-02-28 에이에스엠 아이피 홀딩 비.브이. Method for Fabricating Layer Structure Having Target Topological Profile
US12173404B2 (en) 2020-03-17 2024-12-24 Asm Ip Holding B.V. Method of depositing epitaxial material, structure formed using the method, and system for performing the method
JP7365946B2 (en) * 2020-03-18 2023-10-20 東京エレクトロン株式会社 Substrate processing equipment and cleaning method
KR102755229B1 (en) 2020-04-02 2025-01-14 에이에스엠 아이피 홀딩 비.브이. Thin film forming method
TW202146689A (en) 2020-04-03 2021-12-16 荷蘭商Ａｓｍ Ｉｐ控股公司 Method for forming barrier layer and method for manufacturing semiconductor device
TW202145344A (en) 2020-04-08 2021-12-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Apparatus and methods for selectively etching silcon oxide films
KR20210128343A (en) 2020-04-15 2021-10-26 에이에스엠 아이피 홀딩 비.브이. Method of forming chromium nitride layer and structure including the chromium nitride layer
US11821078B2 (en) 2020-04-15 2023-11-21 Asm Ip Holding B.V. Method for forming precoat film and method for forming silicon-containing film
US11996289B2 (en) 2020-04-16 2024-05-28 Asm Ip Holding B.V. Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods
TW202143328A (en) 2020-04-21 2021-11-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Method for adjusting a film stress
KR20210132600A (en) 2020-04-24 2021-11-04 에이에스엠 아이피 홀딩 비.브이. Methods and systems for depositing a layer comprising vanadium, nitrogen, and a further element
TW202208671A (en) 2020-04-24 2022-03-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Methods of forming structures including vanadium boride and vanadium phosphide layers
US11898243B2 (en) 2020-04-24 2024-02-13 Asm Ip Holding B.V. Method of forming vanadium nitride-containing layer
KR20210132612A (en) 2020-04-24 2021-11-04 에이에스엠 아이피 홀딩 비.브이. Methods and apparatus for stabilizing vanadium compounds
TW202146831A (en) 2020-04-24 2021-12-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Vertical batch furnace assembly, and method for cooling vertical batch furnace
KR102783898B1 (en) 2020-04-29 2025-03-18 에이에스엠 아이피 홀딩 비.브이. Solid source precursor vessel
KR20210134869A (en) 2020-05-01 2021-11-11 에이에스엠 아이피 홀딩 비.브이. Fast FOUP swapping with a FOUP handler
TW202147543A (en) 2020-05-04 2021-12-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Semiconductor processing system
KR102788543B1 (en) 2020-05-13 2025-03-27 에이에스엠 아이피 홀딩 비.브이. Laser alignment fixture for a reactor system
TW202146699A (en) 2020-05-15 2021-12-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Method of forming a silicon germanium layer, semiconductor structure, semiconductor device, method of forming a deposition layer, and deposition system
TW202147383A (en) 2020-05-19 2021-12-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Substrate processing apparatus
KR20210145079A (en) 2020-05-21 2021-12-01 에이에스엠 아이피 홀딩 비.브이. Flange and apparatus for processing substrates
KR102795476B1 (en) 2020-05-21 2025-04-11 에이에스엠 아이피 홀딩 비.브이. Structures including multiple carbon layers and methods of forming and using same
TWI873343B (en) 2020-05-22 2025-02-21 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Reaction system for forming thin film on substrate
US11767589B2 (en) 2020-05-29 2023-09-26 Asm Ip Holding B.V. Substrate processing device
TW202212620A (en) 2020-06-02 2022-04-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Apparatus for processing substrate, method of forming film, and method of controlling apparatus for processing substrate
TW202208659A (en) 2020-06-16 2022-03-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Method for depositing boron containing silicon germanium layers
JP7365973B2 (en) * 2020-06-19 2023-10-20 東京エレクトロン株式会社 Gas nozzle, substrate processing equipment and substrate processing method
TW202218133A (en) 2020-06-24 2022-05-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Method for forming a layer provided with silicon
TWI873359B (en) 2020-06-30 2025-02-21 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Substrate processing method
KR102707957B1 (en) 2020-07-08 2024-09-19 에이에스엠 아이피 홀딩 비.브이. Method for processing a substrate
KR20220010438A (en) 2020-07-17 2022-01-25 에이에스엠 아이피 홀딩 비.브이. Structures and methods for use in photolithography
KR20220011092A (en) 2020-07-20 2022-01-27 에이에스엠 아이피 홀딩 비.브이. Method and system for forming structures including transition metal layers
KR20220011093A (en) 2020-07-20 2022-01-27 에이에스엠 아이피 홀딩 비.브이. Method and system for depositing molybdenum layers
KR20220021863A (en) 2020-08-14 2022-02-22 에이에스엠 아이피 홀딩 비.브이. Method for processing a substrate
JP1685215S (en) * 2020-08-18 2024-05-10 Gas introduction pipe for substrate processing equipment
US12040177B2 (en) 2020-08-18 2024-07-16 Asm Ip Holding B.V. Methods for forming a laminate film by cyclical plasma-enhanced deposition processes
TW202228863A (en) 2020-08-25 2022-08-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Method for cleaning a substrate, method for selectively depositing, and reaction system
US11725280B2 (en) 2020-08-26 2023-08-15 Asm Ip Holding B.V. Method for forming metal silicon oxide and metal silicon oxynitride layers
TW202229601A (en) 2020-08-27 2022-08-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Method of forming patterned structures, method of manipulating mechanical property, device structure, and substrate processing system
JP2020205438A (en) * 2020-09-02 2020-12-24 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ Substrate processing equipment, semiconductor equipment manufacturing methods and programs
TW202217045A (en) 2020-09-10 2022-05-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Methods for depositing gap filing fluids and related systems and devices
USD990534S1 (en) 2020-09-11 2023-06-27 Asm Ip Holding B.V. Weighted lift pin
KR20220036866A (en) 2020-09-16 2022-03-23 에이에스엠 아이피 홀딩 비.브이. Silicon oxide deposition method
USD1012873S1 (en) 2020-09-24 2024-01-30 Asm Ip Holding B.V. Electrode for semiconductor processing apparatus
TW202218049A (en) 2020-09-25 2022-05-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Semiconductor processing method
US12009224B2 (en) 2020-09-29 2024-06-11 Asm Ip Holding B.V. Apparatus and method for etching metal nitrides
KR20220045900A (en) 2020-10-06 2022-04-13 에이에스엠 아이피 홀딩 비.브이. Deposition method and an apparatus for depositing a silicon-containing material
CN114293174A (en) 2020-10-07 2022-04-08 Asm Ip私人控股有限公司 Gas supply unit and substrate processing apparatus including the same
TW202229613A (en) 2020-10-14 2022-08-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Method of depositing material on stepped structure
KR20220050048A (en) 2020-10-15 2022-04-22 에이에스엠 아이피 홀딩 비.브이. Method of manufacturing semiconductor device, and substrate treatment apparatus using ether-cat
KR20220053482A (en) 2020-10-22 2022-04-29 에이에스엠 아이피 홀딩 비.브이. Method of depositing vanadium metal, structure, device and a deposition assembly
TW202223136A (en) 2020-10-28 2022-06-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Method for forming layer on substrate, and semiconductor processing system
TW202229620A (en) 2020-11-12 2022-08-01 特文特大學 Deposition system, method for controlling reaction condition, method for depositing
TW202229795A (en) 2020-11-23 2022-08-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 A substrate processing apparatus with an injector
TW202235649A (en) 2020-11-24 2022-09-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Methods for filling a gap and related systems and devices
JP7284139B2 (en) * 2020-11-27 2023-05-30 株式会社Kokusai Electric Semiconductor device manufacturing method, program, substrate processing apparatus, and substrate processing method
KR20220076343A (en) 2020-11-30 2022-06-08 에이에스엠 아이피 홀딩 비.브이. an injector configured for arrangement within a reaction chamber of a substrate processing apparatus
US12255053B2 (en) 2020-12-10 2025-03-18 Asm Ip Holding B.V. Methods and systems for depositing a layer
TW202233884A (en) 2020-12-14 2022-09-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Method of forming structures for threshold voltage control
CN114639631A (en) 2020-12-16 2022-06-17 Asm Ip私人控股有限公司 Fixing device for measuring jumping and swinging
TW202232639A (en) 2020-12-18 2022-08-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Wafer processing apparatus with a rotatable table
TW202242184A (en) 2020-12-22 2022-11-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Precursor capsule, precursor vessel, vapor deposition assembly, and method of loading solid precursor into precursor vessel
TW202226899A (en) 2020-12-22 2022-07-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Plasma treatment device having matching box
TW202231903A (en) 2020-12-22 2022-08-16 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 Transition metal deposition method, transition metal layer, and deposition assembly for depositing transition metal on substrate
JP7670436B2 (en) 2021-02-02 2025-04-30 東京エレクトロン株式会社 Processing device and processing method
USD980813S1 (en) 2021-05-11 2023-03-14 Asm Ip Holding B.V. Gas flow control plate for substrate processing apparatus
USD1023959S1 (en) 2021-05-11 2024-04-23 Asm Ip Holding B.V. Electrode for substrate processing apparatus
USD981973S1 (en) 2021-05-11 2023-03-28 Asm Ip Holding B.V. Reactor wall for substrate processing apparatus
USD980814S1 (en) 2021-05-11 2023-03-14 Asm Ip Holding B.V. Gas distributor for substrate processing apparatus
JP7308241B2 (en) * 2021-08-20 2023-07-13 株式会社Kokusai Electric SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
KR20230029414A (en) * 2021-08-24 2023-03-03 삼성전자주식회사 Batch-type apparatus for ALE(Atomic Layer Etching), and ALE method and semiconductor manufacturing method based on the same apparatus
USD990441S1 (en) 2021-09-07 2023-06-27 Asm Ip Holding B.V. Gas flow control plate
CN116083877A (en) * 2021-11-08 2023-05-09 长鑫存储技术有限公司 Furnace tube and method for forming thin film
USD1060598S1 (en) 2021-12-03 2025-02-04 Asm Ip Holding B.V. Split showerhead cover
JP7597776B2 (en) 2022-02-07 2024-12-10 株式会社Kokusai Electric Gas supply unit, processing device, and method for manufacturing semiconductor device
JP2024049208A (en) 2022-09-28 2024-04-09 株式会社Kokusai Electric Gas supplier, processing device, and method for manufacturing semiconductor device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040112288A1 (en) * 2002-12-13 2004-06-17 Whitesell Christopher S. Gas injectors for a vertical furnace used in semiconductor processing
US20120076936A1 (en) * 2010-09-24 2012-03-29 Hitachi Kokusai Electric Inc. Substrate processing apparatus, gas nozzle and method of processing substrate
US20230407472A1 (en) * 2018-07-05 2023-12-21 Kokusai Electric Corporation Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06318556A (en) * 1993-05-06 1994-11-15 Nippon Steel Corp Heat treatment furnace
JP2781741B2 (en) * 1995-05-24 1998-07-30 九州日本電気株式会社 Heat treatment equipment for semiconductor substrates
JP2000294511A (en) * 1999-04-09 2000-10-20 Ftl:Kk Manufacture for semiconductor device
JP2001140077A (en) * 1999-11-11 2001-05-22 Sony Corp Semi-conductor manufacturing device
TW546399B (en) * 2000-02-15 2003-08-11 Macronix Int Co Ltd Vertical low-pressure chemical vapor deposition furnace
JP2001267309A (en) * 2000-03-16 2001-09-28 Hitachi Kokusai Electric Inc Semiconductor manufacturing equipment
JP3980840B2 (en) 2001-04-25 2007-09-26 東京エレクトロン株式会社 Vapor growth apparatus and vapor growth film forming method
JP2004006551A (en) 2002-06-03 2004-01-08 Hitachi Kokusai Electric Inc Substrate processing apparatus and substrate processing method
JP4238812B2 (en) * 2003-11-20 2009-03-18 東京エレクトロン株式会社 Oxidizer for workpiece
JP4595702B2 (en) * 2004-07-15 2010-12-08 東京エレクトロン株式会社 Film forming method, film forming apparatus, and storage medium
JP4983159B2 (en) * 2006-09-01 2012-07-25 東京エレクトロン株式会社 Process for oxidizing object, oxidation apparatus and storage medium
JP4899744B2 (en) 2006-09-22 2012-03-21 東京エレクトロン株式会社 Oxidizer for workpiece
JP5211464B2 (en) * 2006-10-20 2013-06-12 東京エレクトロン株式会社 Oxidizer for workpiece
JP2009295729A (en) 2008-06-04 2009-12-17 Hitachi Kokusai Electric Inc Substrate processing apparatus
JP2011199214A (en) * 2010-03-24 2011-10-06 Hitachi Kokusai Electric Inc Thermal processing apparatus, method of manufacturing semiconductor device and method of manufacturing substrate
JP2013066829A (en) * 2011-09-21 2013-04-18 Tokyo Electron Ltd Discharge nozzle for process liquid and substrate processing device
JP5887962B2 (en) 2012-01-31 2016-03-16 東京エレクトロン株式会社 Deposition equipment
JP2013197329A (en) * 2012-03-21 2013-09-30 Renesas Electronics Corp Manufacturing apparatus of semiconductor device and manufacturing method of semiconductor device
JP5958231B2 (en) * 2012-09-24 2016-07-27 東京エレクトロン株式会社 Vertical heat treatment equipment
KR101396601B1 (en) * 2013-02-26 2014-05-20 주식회사 테라세미콘 Batch type substrate processing apparatus
KR101555238B1 (en) * 2013-04-29 2015-09-24 국제엘렉트릭코리아 주식회사 Semiconductor Apparatus of Furnace Type
JP6128969B2 (en) 2013-06-03 2017-05-17 株式会社日立国際電気 Substrate processing apparatus, semiconductor device manufacturing method, and program

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040112288A1 (en) * 2002-12-13 2004-06-17 Whitesell Christopher S. Gas injectors for a vertical furnace used in semiconductor processing
US20120076936A1 (en) * 2010-09-24 2012-03-29 Hitachi Kokusai Electric Inc. Substrate processing apparatus, gas nozzle and method of processing substrate
US20230407472A1 (en) * 2018-07-05 2023-12-21 Kokusai Electric Corporation Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11261528B2 (en) * 2018-03-23 2022-03-01 Kokusai Electric Corporation Substrate processing apparatus and method of manufacturing semiconductor device
US11967501B2 (en) 2018-03-23 2024-04-23 Kokusai Electric Corporation Substrate processing apparatus and method of manufacturing semiconductor device
CN112563156A (en) * 2019-09-10 2021-03-26 株式会社国际电气 Substrate processing apparatus, method of manufacturing semiconductor device, and storage medium

Also Published As

Publication number Publication date
KR20240054233A (en) 2024-04-25
JP2019204962A (en) 2019-11-28
JP2017028256A (en) 2017-02-02
CN111261503B (en) 2024-04-16
KR102657085B1 (en) 2024-04-15
KR20170009725A (en) 2017-01-25
US10081868B2 (en) 2018-09-25
KR20190022590A (en) 2019-03-06
JP2022179556A (en) 2022-12-02
CN111261503A (en) 2020-06-09
JP6578243B2 (en) 2019-09-18
JP6902576B2 (en) 2021-07-14
JP2021097245A (en) 2021-06-24
KR102239085B1 (en) 2021-04-13
KR102276878B1 (en) 2021-07-14
KR20210035795A (en) 2021-04-01
CN109943827B (en) 2022-03-22
JP7382471B2 (en) 2023-11-16
CN110534461A (en) 2019-12-03
CN109943827A (en) 2019-06-28
JP7150923B2 (en) 2022-10-11
KR20210127688A (en) 2021-10-22
KR102459905B1 (en) 2022-10-27
CN110534461B (en) 2023-12-26
US20170051408A1 (en) 2017-02-23
KR20180090767A (en) 2018-08-13

Similar Documents

Publication Publication Date Title
JP7382471B2 (en) Gas supply nozzle, substrate processing equipment, semiconductor device manufacturing method and program
US10513775B2 (en) Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US10036092B2 (en) Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US10074535B2 (en) Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
US10066294B2 (en) Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
CN106356289B (en) Gas supply nozzle, substrate processing apparatus, and method for manufacturing semiconductor device
US10340134B2 (en) Semiconductor device manufacturing method, substrate processing apparatus, and recording medium
WO2017056155A1 (en) Semiconductor device manufacturing method, substrate processing device, and recording medium
JP6654232B2 (en) Semiconductor device manufacturing method, substrate processing apparatus, and program

Legal Events

Date Code Title Description
STPP Information on status: patent application and granting procedure in general

Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION

AS Assignment

Owner name: HITACHI KOKUSAI ELECTRIC INC., JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:TAKAGI, KOSUKE;SASAJIMA, RYOTA;KOGURA, SHINTARO;AND OTHERS;SIGNING DATES FROM 20160803 TO 20160809;REEL/FRAME:047498/0589

AS Assignment

Owner name: KOKUSAI ELECTRIC CORPORATION, JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:HITACHI KOKUSAI ELECTRIC INC.;REEL/FRAME:047875/0251

Effective date: 20181205

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER

STPP Information on status: patent application and granting procedure in general

Free format text: FINAL REJECTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER

STPP Information on status: patent application and granting procedure in general

Free format text: FINAL REJECTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER

STPP Information on status: patent application and granting procedure in general

Free format text: FINAL REJECTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER

STPP Information on status: patent application and granting procedure in general

Free format text: FINAL REJECTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

点击 这是indexloc提供的php浏览器服务，不要输入任何密码和下载