US20140110264A1 - Light induced nickel plating method for p-type silicon and n/p solar cell material - Google Patents
Light induced nickel plating method for p-type silicon and n/p solar cell material Download PDFInfo
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- US20140110264A1 US20140110264A1 US13/659,018 US201213659018A US2014110264A1 US 20140110264 A1 US20140110264 A1 US 20140110264A1 US 201213659018 A US201213659018 A US 201213659018A US 2014110264 A1 US2014110264 A1 US 2014110264A1
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- nickel plating
- nickel
- solar cell
- cell material
- plated sample
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 title claims abstract description 132
- 229910052759 nickel Inorganic materials 0.000 title claims abstract description 66
- 238000007747 plating Methods 0.000 title claims abstract description 55
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 31
- 239000010703 silicon Substances 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 title claims abstract description 28
- 239000000463 material Substances 0.000 title claims abstract description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 30
- 230000008021 deposition Effects 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 9
- 238000004140 cleaning Methods 0.000 claims description 6
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 claims description 4
- 239000007864 aqueous solution Substances 0.000 claims description 4
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims description 4
- 239000004327 boric acid Substances 0.000 claims description 4
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 claims description 4
- 238000005245 sintering Methods 0.000 claims description 3
- 238000003756 stirring Methods 0.000 claims description 3
- 238000000151 deposition Methods 0.000 abstract description 10
- 230000003197 catalytic effect Effects 0.000 abstract description 8
- 230000008569 process Effects 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000012545 processing Methods 0.000 abstract description 7
- 239000004065 semiconductor Substances 0.000 abstract description 7
- 238000009713 electroplating Methods 0.000 abstract description 5
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 3
- 238000006722 reduction reaction Methods 0.000 abstract description 3
- 230000007246 mechanism Effects 0.000 abstract description 2
- 238000005286 illumination Methods 0.000 abstract 1
- 229910021645 metal ion Inorganic materials 0.000 abstract 1
- 238000001465 metallisation Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 238000011160 research Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 229910021334 nickel silicide Inorganic materials 0.000 description 2
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 150000002940 palladium Chemical class 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
Images
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1655—Process features
- C23C18/1664—Process features with additional means during the plating process
- C23C18/1671—Electric field
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1635—Composition of the substrate
- C23C18/1639—Substrates other than metallic, e.g. inorganic or organic or non-conductive
- C23C18/1642—Substrates other than metallic, e.g. inorganic or organic or non-conductive semiconductor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1655—Process features
- C23C18/1664—Process features with additional means during the plating process
- C23C18/1667—Radiant energy, e.g. laser
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/011—Electroplating using electromagnetic wave irradiation
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
- C25D7/123—Semiconductors first coated with a seed layer or a conductive layer
- C25D7/126—Semiconductors first coated with a seed layer or a conductive layer for solar cells
Definitions
- the present invention relates to a simple and fast light induced nickel plating method for p-type silicon wafer and n/p solar cell material.
- this invention relates to a simple and fast light induced nickel plating method for p-type silicon wafer and n/p silicon solar cell material, which does not need any surface catalytic processing, reducing agent, or applied voltage, but instead can carry out the nickel deposition on the specific surface with high a nickel plating rate, a simple process and a low production cost.
- the mechanism of nickel plating in this invention is nickel electroplating under the reduction reaction with the use of interfacial potential between the nickel plating bath and the metal surface.
- nickel/copper electrode is regarded as a next-generation electrode substituting for screen printing silver electrode.
- Such a program contains forming first a layer of nickel metallic film, and copper plating using conventional electroplating method after forming a nickel silicide by silicidation.
- the copper electrode acts as a thickening conductive layer.
- the copper plating is a mature technology, and therefore a key feature thereof is the nickel coating and the formation of nickel silicide thin layer having palisade local area.
- nickel plating methods that have been mentioned include: electroless plating, and light induced plating developed by Fraunhofer ISE and so on.
- electroless plating and light induced plating developed by Fraunhofer ISE and so on.
- these methods have their limitations and shortcomings, so that they are still difficult to be successfully put into mass productions.
- the electrodeless nickel plating method is a mature technology. However if applied to the ohmic contact of the semiconductor, it is not proper to be subject to activated palladium processing as a catalytic layer. Surface catalytic processing of electrodeless nickel plating for solar cells is exclusive to some manufacturers as their proprietary technology.
- the electrodeless plating includes the following disadvantages:
- Fraunhofer ISE in 2009 proposed the light induced plating technology which is regarded as the most promising method. It uses a solar cell to form an n/p junction and screen printed aluminum back electrode. A plating surface (the surface to be plated) is coated with a seed layer. When the light emits on the plating surface and an additional voltage is applied to the aluminum back electrode, a nickel metallic film is deposited on the light-emitted surface (n-type surface). For this reason, the technology still has problems such as need of applying bias and pre-formation of the seed layer.
- a main purpose of this invention is to provide a light induced nickel plating method which does not need any surface catalytic processing, reducing agent, or applied voltage, but instead can carry out the nickel deposition on the specific surface with a high nickel plating rate, a simple process and a low production cost.
- the simple and fast light induced nickel plating method for p-type silicon wafer and n/p silicon solar cell material at least includes the following steps:
- Step 1 taking a silicon wafer substrate, and forming a layer of aluminum metallic film on a p-type surface thereof after cleaning so as to obtain a plated sample after sintering;
- Step 2 formulating a nickel plating bath in a translucent container
- Step 3 cleaning the surface of the plated sample again, and removing a native oxide layer
- Step 4 immersing the plated sample in the nickel plating bath
- Step 5 emitting a light source directly on a plated surface of the plated sample for nickel deposition
- Step 6 after the scheduled time for the nickel deposition, the light source is removed and the plated sample is taken out to wash and then to dry so that the light-induced nickel plating on the plated sample is completed and a metallic ohmic contact electrode for solar
- the silicon substrate is of p-type silicon wafer and n/p silicon solar cell material.
- the container at Step 2 is a translucent container.
- the nickel plating bath at Step 2 bases on a mixed aqueous solution of nickel chloride and boric acid, and is placed at room temperature while stirring.
- the light source at Step 5 is a lamp or sunlight.
- the scheduled time for nickel deposition is one minute to two minutes.
- FIG. 1 and FIG. 2 are schematic views of Step 1 according to one embodiment of the invention.
- FIG. 3 is a schematic view of Step 2 according to one embodiment of the invention.
- FIG. 4 is a schematic view of Step 3 according to one embodiment of the invention.
- FIG. 5 is a schematic view of Step 4 according to one embodiment of the invention.
- FIG. 6 is a schematic view of Step 5 according to one embodiment of the invention.
- FIG. 7 is a schematic view of Step 6 according to one embodiment of the invention.
- FIG. 1 and FIG. 2 are schematic views of Step 1 according to one embodiment of the invention.
- FIG. 3 is a schematic view of Step 2 according to one embodiment of the invention.
- FIG. 4 is a schematic view of Step 3 according to one embodiment of the invention.
- FIG. 5 is a schematic view of Step 4 according to one embodiment of the invention.
- FIG. 6 is a schematic view of Step 5 according to one embodiment of the invention.
- FIG. 7 is a schematic view of Step 6 according to one embodiment of the invention.
- the present invention provides a simple and fast light induced nickel plating method for p-type silicon wafer and n/p silicon solar cell material at least contains the following steps:
- Step 1 taking a silicon substrate 11 of p-type semiconductor or n/p-type semiconductor material, and forming a layer of aluminum metallic film 12 on a p-type surface of the silicon substrate 11 after cleaning so as to obtain a plated sample 1 after sintering (such as the one shown in FIG. 1 and FIG. 2 ).
- Step 2 formulating a nickel plating bath 21 in a translucent container 2 (as shown in FIG. 3 ), wherein the nickel plating bath 21 bases on a mixed aqueous solution of nickel chloride and boric acid, and is placed at room temperature while stirring.
- Step 3 cleaning the surface of the plated sample 1 again (as shown in FIG. 4 ), and removing a native oxide layer.
- Step 4 immersing the plated sample 1 in the nickel plating bath 21 inside the container 2 (as shown in FIG. 5 ).
- Step 5 emitting a light source 3 directly on a plated surface 13 of the plated sample 1 (as shown in FIG. 6 ) for nickel deposition.
- the light source 3 can be a lamp or sunlight.
- Step 6 After one minute to two minutes of the scheduled time for the nickel deposition, the light source 3 is removed and the plated sample 1 is taken out to wash and then dry. Thereby, the light-induced nickel plating on the plated sample is completed and a metallic ohmic contact electrode 4 for solar cell is obtained (as shown in FIG. 7 ).
- the present invention can be applied to solar cells and other optoelectronic components, and produces the metallic film as the ohmic contact or the semiconductor buffer layer.
- the light induced nickel plating (LINP) technology pre-forms the aluminum metallic film 12 on the p-type surface of the silicon substrate 11 (p-type silicon wafer or n/p junction silicon solar cell) which is immersed in the nickel plating bath 21 .
- the nickel-plating reaction triggers.
- the invention has the simple and rapid process without the need of adding extra voltage.
- the principle of nickel plating in this invention is nickel electroplating, rather than the reduction of the chemical solution itself. So the rate of the nickel plating is fast (about 1 minute to 2 minutes), a nickel metallic film of about 1 ⁇ m in thickness will be obtained.
- the plating surface i.e. the surface to be plated, in this invention does not need to go through any of the catalytic processing, simplifying the process of nickel plating.
- the nickel deposition occurs only on the semiconductor surface, not on the aluminum metallic film 12 . Therefore there is no need of more one procedure to protect the back surface, further simplifying the nickel plating process
- the nickel plating bath 21 in this invention uses a mixed aqueous solution of nickel chloride and boric acid.
- the composition of the bath is simple.
- the present invention can obtain a high-quality nickel metallic film.
- the present invention is simple and fast to carry out the nickel plating process for p-type silicon wafer and n/p silicon solar cell material by light induced plating. It can effectively improve the shortcomings of conventional technology without any surface catalytic processing and extra voltage.
- the process is simple and the production cost is low, making the invention more progressive and more practical in use which complies with the patent law.
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Abstract
A simple and fast light induced nickel plating method for p-type silicon wafer and n/p silicon solar cell material is revealed. When a n/p solar cell or p-Si semiconductor substrate, which is subjected to metallization with metal contact on the rear side, is immersed in a plating bath, metal ions are reduced on the front surface of semiconductor as soon as illumination starts on the front. The mechanism of nickel plating in this invention is nickel electroplating under the reduction reaction with the use of interfacial potential between the nickel plating bath and the metal surface. It does not need any surface catalytic processing and extra voltage. Instead, it can carry out the nickel deposition on the specific surface with a high nickel plating rate, a simple process and a low production cost.
Description
- 1. Field of the Invention
- The present invention relates to a simple and fast light induced nickel plating method for p-type silicon wafer and n/p solar cell material. Particularly, this invention relates to a simple and fast light induced nickel plating method for p-type silicon wafer and n/p silicon solar cell material, which does not need any surface catalytic processing, reducing agent, or applied voltage, but instead can carry out the nickel deposition on the specific surface with high a nickel plating rate, a simple process and a low production cost. The mechanism of nickel plating in this invention is nickel electroplating under the reduction reaction with the use of interfacial potential between the nickel plating bath and the metal surface.
- 2. Description of Related Art
- In the electrode manufacturing process of solar cells, based on the cost consideration, nickel/copper electrode is regarded as a next-generation electrode substituting for screen printing silver electrode. Such a program contains forming first a layer of nickel metallic film, and copper plating using conventional electroplating method after forming a nickel silicide by silicidation. The copper electrode acts as a thickening conductive layer. The copper plating is a mature technology, and therefore a key feature thereof is the nickel coating and the formation of nickel silicide thin layer having palisade local area.
- In republished research literatures about nickel/copper electrodes for solar cells, nickel plating methods that have been mentioned include: electroless plating, and light induced plating developed by Fraunhofer ISE and so on. However, these methods have their limitations and shortcomings, so that they are still difficult to be successfully put into mass productions.
- The electrodeless nickel plating method is a mature technology. However if applied to the ohmic contact of the semiconductor, it is not proper to be subject to activated palladium processing as a catalytic layer. Surface catalytic processing of electrodeless nickel plating for solar cells is exclusive to some manufacturers as their proprietary technology. The electrodeless plating includes the following disadvantages:
- (1) need of being subject to surface catalytic steps;
- (2) need of special chemical bath and high cost;
- (3) need of an additional heating step (about 80 to 90° C.); and
- (4) low plating rate compared to conventional plating.
- Fraunhofer ISE in 2009 proposed the light induced plating technology which is regarded as the most promising method. It uses a solar cell to form an n/p junction and screen printed aluminum back electrode. A plating surface (the surface to be plated) is coated with a seed layer. When the light emits on the plating surface and an additional voltage is applied to the aluminum back electrode, a nickel metallic film is deposited on the light-emitted surface (n-type surface). For this reason, the technology still has problems such as need of applying bias and pre-formation of the seed layer.
- In order to solve the aforementioned problems, the inventors has studied and proceeded in-depth discussion, and actively seek approaches for many years engaged in the research and experiences of related industries and manufacturing. After long-term research and efforts in development, the inventors has finally the successfully developed this invention “a light induced nickel plating method for p-type silicon wafer and n/p silicon solar cell material” so as to improve the problem encountered in the prior art.
- A main purpose of this invention is to provide a light induced nickel plating method which does not need any surface catalytic processing, reducing agent, or applied voltage, but instead can carry out the nickel deposition on the specific surface with a high nickel plating rate, a simple process and a low production cost.
- In order to achieve the above and other objectives, the simple and fast light induced nickel plating method for p-type silicon wafer and n/p silicon solar cell material according to the invention at least includes the following steps:
- Step 1: taking a silicon wafer substrate, and forming a layer of aluminum metallic film on a p-type surface thereof after cleaning so as to obtain a plated sample after sintering;
- Step 2: formulating a nickel plating bath in a translucent container;
- Step 3: cleaning the surface of the plated sample again, and removing a native oxide layer;
- Step 4: immersing the plated sample in the nickel plating bath;
- Step 5: emitting a light source directly on a plated surface of the plated sample for nickel deposition; and
- Step 6: after the scheduled time for the nickel deposition, the light source is removed and the plated sample is taken out to wash and then to dry so that the light-induced nickel plating on the plated sample is completed and a metallic ohmic contact electrode for solar
- In one embodiment of the invention, the silicon substrate is of p-type silicon wafer and n/p silicon solar cell material.
- In one embodiment of the invention, the container at
Step 2 is a translucent container. - In one embodiment of the invention, the nickel plating bath at
Step 2 bases on a mixed aqueous solution of nickel chloride and boric acid, and is placed at room temperature while stirring. - In one embodiment of the invention, the light source at Step 5 is a lamp or sunlight.
- In one embodiment of the invention, the scheduled time for nickel deposition is one minute to two minutes.
-
FIG. 1 andFIG. 2 are schematic views ofStep 1 according to one embodiment of the invention. -
FIG. 3 is a schematic view ofStep 2 according to one embodiment of the invention. -
FIG. 4 is a schematic view ofStep 3 according to one embodiment of the invention. -
FIG. 5 is a schematic view of Step 4 according to one embodiment of the invention. -
FIG. 6 is a schematic view of Step 5 according to one embodiment of the invention. -
FIG. 7 is a schematic view of Step 6 according to one embodiment of the invention. - The aforementioned illustrations and following detailed descriptions are exemplary for the purpose of further explaining the scope of the present invention. Other objectives and advantages related to the present invention will be illustrated in the subsequent descriptions and appended tables.
-
FIG. 1 andFIG. 2 are schematic views ofStep 1 according to one embodiment of the invention.FIG. 3 is a schematic view ofStep 2 according to one embodiment of the invention.FIG. 4 is a schematic view ofStep 3 according to one embodiment of the invention.FIG. 5 is a schematic view of Step 4 according to one embodiment of the invention.FIG. 6 is a schematic view of Step 5 according to one embodiment of the invention.FIG. 7 is a schematic view of Step 6 according to one embodiment of the invention. As shown, the present invention provides a simple and fast light induced nickel plating method for p-type silicon wafer and n/p silicon solar cell material at least contains the following steps: - Step 1: taking a
silicon substrate 11 of p-type semiconductor or n/p-type semiconductor material, and forming a layer of aluminummetallic film 12 on a p-type surface of thesilicon substrate 11 after cleaning so as to obtain aplated sample 1 after sintering (such as the one shown inFIG. 1 andFIG. 2 ). - Step 2: formulating a
nickel plating bath 21 in a translucent container 2 (as shown inFIG. 3 ), wherein thenickel plating bath 21 bases on a mixed aqueous solution of nickel chloride and boric acid, and is placed at room temperature while stirring. - Step 3: cleaning the surface of the plated
sample 1 again (as shown inFIG. 4 ), and removing a native oxide layer. - Step 4: immersing the
plated sample 1 in thenickel plating bath 21 inside the container 2 (as shown inFIG. 5 ). - Step 5: emitting a
light source 3 directly on aplated surface 13 of the plated sample 1 (as shown inFIG. 6 ) for nickel deposition. Thelight source 3 can be a lamp or sunlight. - Step 6: After one minute to two minutes of the scheduled time for the nickel deposition, the
light source 3 is removed and the platedsample 1 is taken out to wash and then dry. Thereby, the light-induced nickel plating on the plated sample is completed and a metallic ohmic contact electrode 4 for solar cell is obtained (as shown inFIG. 7 ). - Taking advantages of traditional electroplating and electroless plating, the present invention can be applied to solar cells and other optoelectronic components, and produces the metallic film as the ohmic contact or the semiconductor buffer layer.
- The present invention at least offers the following advantages:
- 1. The light induced nickel plating (LINP) technology pre-forms the aluminum
metallic film 12 on the p-type surface of the silicon substrate 11 (p-type silicon wafer or n/p junction silicon solar cell) which is immersed in thenickel plating bath 21. When the light source directly emitted onto the surface to be plated with nickel, the nickel-plating reaction triggers. The invention has the simple and rapid process without the need of adding extra voltage. - 2. When the aluminum
metallic film 12 and thenickel plating bath 21 are at equilibrium, there forms an interface potential difference between the surface of the aluminummetallic film 12 and thenickel plating bath 21. Meanwhile, there also forms a potential difference between the surface of thesilicon substrate 11 and thenickel plating bath 21. The sum of these two potential differences can achieve the required potential difference for nickel deposition. The principle of nickel plating in this invention is nickel electroplating, rather than the reduction of the chemical solution itself. So the rate of the nickel plating is fast (about 1 minute to 2 minutes), a nickel metallic film of about 1 μm in thickness will be obtained. - 3 The plating surface, i.e. the surface to be plated, in this invention does not need to go through any of the catalytic processing, simplifying the process of nickel plating.
- 4. The nickel deposition occurs only on the semiconductor surface, not on the aluminum
metallic film 12. Therefore there is no need of more one procedure to protect the back surface, further simplifying the nickel plating process - 5 The
nickel plating bath 21 in this invention uses a mixed aqueous solution of nickel chloride and boric acid. The composition of the bath is simple. - 6. The present invention can obtain a high-quality nickel metallic film.
- In summary, the present invention is simple and fast to carry out the nickel plating process for p-type silicon wafer and n/p silicon solar cell material by light induced plating. It can effectively improve the shortcomings of conventional technology without any surface catalytic processing and extra voltage. The process is simple and the production cost is low, making the invention more progressive and more practical in use which complies with the patent law.
- The descriptions illustrated supra set forth simply the preferred embodiments of the present invention; however, the characteristics of the present invention are by no means restricted thereto. All changes, alternations, or modifications conveniently considered by those skilled in the art are deemed to be encompassed within the scope of the present invention delineated by the following claims.
Claims (6)
1. A simple and fast light induced nickel plating method for p-type silicon wafer and n/p silicon solar cell material at least comprising the following steps:
Step 1: taking a silicon substrate, and forming a layer of aluminum metallic film on a p-type surface thereof after cleaning so as to obtain a plated sample after sintering;
Step 2: formulating a nickel plating bath in a translucent container;
Step 3: cleaning the surface of the plated sample again, and removing a native oxide layer;
Step 4: immersing the plated sample in the nickel plating bath;
Step 5: emitting a light source directly on a plated surface of the plated sample for nickel deposition; and
Step 6: after the scheduled time for the nickel deposition, the light source is removed and the plated sample is taken out to wash and then to dry so that the light induced nickel plating on the plated sample is completed and a metallic film on silicon substrate is obtained.
2. The method of claim 1 , wherein the silicon substrate is of p-type silicon wafer and n/p silicon solar cell material.
3. The method of claim 1 , wherein the container at Step 2 is a translucent container.
4. The method of claim 1 , wherein the nickel plating bath at Step 2 bases on a mixed aqueous solution of nickel chloride and boric acid, and is placed at room temperature while stirring.
5. The method of claim 1 , wherein the light source at Step 5 is a lamp or sunlight.
6. The method of claim 1 , wherein the scheduled time for nickel deposition is one minute to two minutes.
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FR2481717A1 (en) * | 1980-05-05 | 1981-11-06 | Anvar | Electrochemical prepn. method for solar surface - comprising forming grey nickel deposit and anodising |
US4507181A (en) * | 1984-02-17 | 1985-03-26 | Energy Conversion Devices, Inc. | Method of electro-coating a semiconductor device |
US20090120492A1 (en) * | 2007-11-09 | 2009-05-14 | Ashok Sinha | Low-cost solar cells and methods for their production |
US20110065274A1 (en) * | 2009-08-25 | 2011-03-17 | Rohm And Haas Electronic Materials Llc | Enhanced method of forming nickel silicides |
US20110253545A1 (en) * | 2010-04-19 | 2011-10-20 | International Business Machines Corporation | Method of direct electrodeposition on semiconductors |
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FR2481717A1 (en) * | 1980-05-05 | 1981-11-06 | Anvar | Electrochemical prepn. method for solar surface - comprising forming grey nickel deposit and anodising |
US4507181A (en) * | 1984-02-17 | 1985-03-26 | Energy Conversion Devices, Inc. | Method of electro-coating a semiconductor device |
US20090120492A1 (en) * | 2007-11-09 | 2009-05-14 | Ashok Sinha | Low-cost solar cells and methods for their production |
US20110065274A1 (en) * | 2009-08-25 | 2011-03-17 | Rohm And Haas Electronic Materials Llc | Enhanced method of forming nickel silicides |
US20110253545A1 (en) * | 2010-04-19 | 2011-10-20 | International Business Machines Corporation | Method of direct electrodeposition on semiconductors |
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Amblard et al., FR 2481717 A English Abstract and Machine Translation (1981). * |
Badarulzaman et al., The Evaluation of Nickel Deposit Obtained Via Watts Electrolyte at Ambient Temperature, 7 (6) J. Coat. Tech. Res. 815 (2010). * |
Bay et al., Electrolytic Nickel Deposition for the Front Side Metallization of Silicon Solar Cells, 24th European PV Solar Energy Conf. & Exhibition (2009). * |
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