US20130186965A1 - Integrated temperature and humidity control device - Google Patents
Integrated temperature and humidity control device Download PDFInfo
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- US20130186965A1 US20130186965A1 US13/446,169 US201213446169A US2013186965A1 US 20130186965 A1 US20130186965 A1 US 20130186965A1 US 201213446169 A US201213446169 A US 201213446169A US 2013186965 A1 US2013186965 A1 US 2013186965A1
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- 230000005540 biological transmission Effects 0.000 claims abstract description 45
- 238000004891 communication Methods 0.000 claims abstract description 24
- 238000005259 measurement Methods 0.000 claims description 67
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 230000002159 abnormal effect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/30—Control or safety arrangements for purposes related to the operation of the system, e.g. for safety or monitoring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/50—Control or safety arrangements characterised by user interfaces or communication
- F24F11/52—Indication arrangements, e.g. displays
- F24F11/523—Indication arrangements, e.g. displays for displaying temperature data
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/50—Control or safety arrangements characterised by user interfaces or communication
- F24F11/56—Remote control
- F24F11/58—Remote control using Internet communication
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/62—Control or safety arrangements characterised by the type of control or by internal processing, e.g. using fuzzy logic, adaptive control or estimation of values
- F24F11/63—Electronic processing
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D22/00—Control of humidity
- G05D22/02—Control of humidity characterised by the use of electric means
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D27/00—Simultaneous control of variables covered by two or more of main groups G05D1/00 - G05D25/00
- G05D27/02—Simultaneous control of variables covered by two or more of main groups G05D1/00 - G05D25/00 characterised by the use of electric means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/50—Control or safety arrangements characterised by user interfaces or communication
- F24F11/52—Indication arrangements, e.g. displays
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2110/00—Control inputs relating to air properties
- F24F2110/10—Temperature
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2110/00—Control inputs relating to air properties
- F24F2110/20—Humidity
Definitions
- the present invention relates to integrated temperature and humidity control devices, and more particularly, to an integrated temperature and humidity control device for controlling temperature and humidity with a view to serving industry-related purposes.
- manufacturing processes of industrial products require that temperature and humidity of the operation environment at every production-related zone in a fab have to be closely monitored and strictly controlled, and that variations in the ambient temperature and humidity of the fab have to be coped with, in order to ensure the quality and stability of products being manufactured on a production line.
- Another objective of the present invention is to simplify the integration of local-end temperature and humidity control and remote-end temperature and humidity control and an installation process thereof.
- Yet another objective of the present invention is to simplify the integration of a high-precision temperature and humidity sensing element and a low-precision temperature and humidity sensing element.
- the present invention provides an integrated temperature and humidity control device, controlled by a control console, comprising: at least a temperature and humidity sensing element for sensing temperature and humidity and generating at least a temperature and humidity sensing signal; a temperature and humidity sensing transmission interface connected to the at least a temperature and humidity sensing element for receiving the at least a temperature and humidity sensing signal; a computation processing module connected to the temperature and humidity sensing transmission interface for receiving the at least a temperature and humidity sensing signal to generate at least a temperature and humidity measurement result; a communication interface connected to the computation processing module for sending the at least a temperature and humidity measurement result to the control console; and at least a display interface connected to the computation processing module for displaying the at least a temperature and humidity measurement result.
- control console comprises a remote host and/or a local host.
- the at least a temperature and humidity sensing element comprises at least a high-precision temperature and humidity sensing element and/or at least a low-precision temperature and humidity sensing element.
- the at least a high-precision temperature and humidity sensing element senses temperature and humidity and generates at least a high-precision temperature and humidity sensing signal.
- the at least a low-precision temperature and humidity sensing element senses temperature and humidity and generates at least a low-precision temperature and humidity sensing signal.
- the temperature and humidity sensing transmission interface comprises a high-precision temperature and humidity sensing transmission interface and/or a low-precision temperature and humidity sensing transmission interface.
- the high-precision temperature and humidity sensing transmission interface is connected to the at least a high-precision temperature and humidity sensing element for communicating with the at least a high-precision temperature and humidity sensing element by two-wire transmission and receiving the at least a high-precision temperature and humidity sensing signal.
- the low-precision temperature and humidity sensing transmission interface is connected to the at least a low-precision temperature and humidity sensing element for receiving the at least a low-precision temperature and humidity sensing signal.
- the computation processing module is connected to the high-precision temperature and humidity sensing transmission interface and/or the low-precision temperature and humidity sensing transmission interface.
- the computation processing module receives the at least a high-precision temperature and humidity sensing signal and directly computes temperature and humidity levels to generate at least a high-precision temperature and humidity measurement result.
- the computation processing module receives the at least a low-precision temperature and humidity sensing signal, performs analog-to-digital conversion on the at least a low-precision temperature and humidity sensing signal, computes temperature and humidity levels, and generates at least a low-precision temperature and humidity measurement result.
- the communication interface comprises a first communication interface and/or a second communication interface.
- the first communication interface is connected to the computation processing module and adapted to transmit the at least a high-precision temperature and humidity measurement result and the at least a low-precision temperature and humidity measurement result to the remote host by Ethernet.
- the second communication interface is connected to the computation processing module and adapted to transmit the at least a high-precision temperature and humidity measurement result and the at least a low-precision temperature and humidity measurement result to the local host via a RS232 interface.
- an integrated temperature and humidity control device further comprises a storage unit connected to the computation processing module and adapted to receive and store the at least a high-precision temperature and humidity measurement result and the at least a low-precision temperature and humidity measurement result.
- the high-precision temperature and humidity measurement result or the low-precision temperature and humidity measurement result is processed by a programmable logic device (PLD) in the computation processing module and then sent to the display interface for display.
- PLD programmable logic device
- the high-precision temperature and humidity measurement result or the low-precision temperature and humidity measurement result is processed by a driving circuit of a universal asynchronous receiver/transmitter (UART) in the computation processing module and then sent to the local host via the second communication interface.
- UART universal asynchronous receiver/transmitter
- the at least a high-precision temperature and humidity measurement result and the at least a low-precision temperature and humidity measurement result are selectively read by the remote control console and the local control console such that, in case of an abnormal measurement result, at least one of the remote control console and the local control console issue an adjustment control signal for adjusting temperature and humidity.
- the at least a low-precision temperature and humidity sensing element calculates a measured temperature level according to an intrinsic impedance level and calculates a measured humidity level according to an output voltage level.
- the temperature and humidity sensing transmission interface effectuates data latch by one of a clock signal and a data signal.
- the present invention provides an integrated temperature and humidity control device for simplifying remote-end data transmission and local-end data transmission by means of an Ethernet and a RS232 interface, respectively, integrating a high-precision sensing signal and a low-precision sensing signal by means of high-precision and low-precision temperature and humidity sensing elements, performing local-end and remote-end temperature and humidity control on a fab, and providing on-site temperature and humidity level display.
- FIG. 1 is a functional block diagram of an integrated temperature and humidity control device according to a specific embodiment of the present invention.
- FIG. 2 is a functional block diagram of the integrated temperature and humidity control device according to another specific embodiment of the present invention.
- the integrated temperature and humidity control device 10 which is controlled by a control console 20 , comprises at least a temperature and humidity sensing element 11 , temperature and humidity sensing transmission interface 12 , a computation processing module 13 , a communication interface 14 , and at least a display interface 15 .
- the temperature and humidity sensing element 11 senses temperature and humidity and generates at least a temperature and humidity sensing signal.
- the temperature and humidity sensing transmission interface 12 is connected to the temperature and humidity sensing element 11 and adapted to receive the temperature and humidity sensing signal.
- the computation processing module 13 is connected to the temperature and humidity sensing transmission interface 12 .
- the computation processing module 13 receives the temperature and humidity sensing signal and generates at least a temperature and humidity measurement result according to the temperature and humidity sensing signal received.
- the communication interface 14 is connected to the computation processing module 13 and adapted to send the temperature and humidity measurement result to the control console 20 .
- the display interface 15 is connected to the computation processing module 13 and adapted to display the temperature and humidity measurement result.
- the integrated temperature and humidity control device 100 comprises at least a high-precision temperature and humidity sensing element 110 , at least a low-precision temperature and humidity sensing element 111 , a high-precision temperature and humidity sensing transmission interface 120 , a low-precision temperature and humidity sensing transmission interface 121 , a computation processing module 130 , a first communication interface 140 , a second communication interface 141 , and at least a display interface 150 .
- the integrated temperature and humidity control device 100 further comprises a remote host 210 and a local host 211 each of which functions as a control console for controlling the integrated temperature and humidity control device 100 .
- the high-precision temperature and humidity sensing element 110 senses temperature and humidity and generates a high-precision temperature and humidity sensing signal.
- the high-precision temperature and humidity sensing element 110 is connected to the high-precision temperature and humidity sensing transmission interface 120 .
- the high-precision temperature and humidity sensing element 110 sends the high-precision temperature and humidity sensing signal to the high-precision temperature and humidity sensing transmission interface 120 by means of two-wire transmission.
- the quantity of the high-precision temperature and humidity sensing element 110 is subject to changes as needed.
- the low-precision temperature and humidity sensing element 111 senses temperature and humidity and generates a low-precision temperature and humidity sensing signal.
- the low-precision temperature and humidity sensing element 111 is connected to the low-precision temperature and humidity sensing transmission interface 121 .
- the low-precision temperature and humidity sensing element 111 sends the low-precision temperature and humidity sensing signal to the low-precision temperature and humidity sensing transmission interface 111 .
- the quantity of the low-precision temperature and humidity sensing element 111 is subject to changes as needed.
- the computation processing module 130 is connected to the high-precision temperature and humidity sensing transmission interface 120 and the low-precision temperature and humidity sensing transmission interface 121 .
- the computation processing module 130 receives the high-precision temperature and humidity sensing signal and performs computation on the temperature and humidity levels directly to generate a high-precision temperature and humidity measurement result.
- the computation processing module 130 receives the low-precision temperature and humidity sensing signal, performs an analog-to-digital conversion (ADC) process on the low-precision temperature and humidity sensing signal, and performs computation on the temperature and humidity levels to generate a low-precision temperature and humidity measurement result
- ADC analog-to-digital conversion
- the first communication interface 140 is connected to the computation processing module 130 and adapted to transmit over an Ethernet the high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result to the remote host 210 for remote-end control.
- a local fab performs remote-end control from outside or performs centralized remote-end control by a control center of the fab.
- the second communication interface 141 is connected to the computation processing module 130 and adapted to transmit via a RS232 interface the at least a high-precision temperature and humidity measurement result and the at least a low-precision temperature and humidity measurement result to the local host 211 for local-end control exercised by a control center of the fab, for example.
- the at least a display interface 150 is connected to the computation processing module 130 and adapted to display the at least a high-precision temperature and humidity measurement result and/or the at least a low-precision temperature and humidity measurement result for performing fixed-point head-up control at a fixed location of a working area within the fab, for example.
- the at least a high-precision temperature and humidity sensing element 110 makes minimal errors, operates steadily, and performs a measurement process without prior precision calibration, and thus is suitable for use in a fab that requires high-precision temperature control.
- the at least a high-precision temperature and humidity sensing element 110 automatically converts a detected physical parameter value into a digital value and generates the at least a high-precision temperature and humidity sensing signal.
- the high-precision temperature and humidity sensing transmission interface 120 After receiving the at least a high-precision temperature and humidity sensing signal from the at least a high-precision temperature and humidity sensing element 110 by means of two-wire transmission, the high-precision temperature and humidity sensing transmission interface 120 sends the at least a high-precision temperature and humidity sensing signal to the computation processing module 130 for further computation.
- Two-wire transmission is a smart transmission technique whereby data latch is accomplished by means of clock and data signals; hence, two-wire transmission outperforms multiwire transmission and single-wire transmission and thus enhances the reliability and stability in transmitting the high-precision temperature and humidity sensing signal.
- the low-precision temperature and humidity sensing element 111 is disadvantaged by its low measurement precision and thus has to undergo linear calibration regularly. Despite its low measurement precision, the low-precision temperature and humidity sensing element 111 is cheap enough to be widely used in fab areas which require no high-precision temperature and humidity control. After finishing the ambient temperature and humidity sensing process, the low-precision temperature and humidity sensing element 111 calculates a measured temperature level according to an intrinsic impedance level, calculates a measured humidity level according to an output voltage level, and generates the low-precision temperature and humidity sensing signal.
- the low-precision temperature and humidity sensing transmission interface 121 After receiving the low-precision temperature and humidity sensing signal from the low-precision temperature and humidity sensing element 111 , the low-precision temperature and humidity sensing transmission interface 121 sends the low-precision temperature and humidity sensing signal to the computation processing module 130 for further computation.
- the computation processing module 130 After receiving the low-precision temperature and humidity sensing signal, the computation processing module 130 performs an analog-to-digital conversion (ADC) process on the low-precision temperature and humidity sensing signal by means of an analog-to-digital converter built in the computation processing module 130 , to facilitate subsequent computation of temperature and humidity levels.
- ADC analog-to-digital conversion
- a plurality of analog-to-digital converters is disposed in the computation processing module 130 of the integrated temperature and humidity control device 100 for driving multiple said low-precision temperature and humidity sensing elements 111 simultaneously and thereby performing temperature and humidity control over different positions of the fab respectively and simultaneously, or measuring the temperature and humidity at different portions of an apparatus simultaneously (for example, controlling the temperature and humidity of different components of a motherboard.)
- the computation processing module 130 after receiving the high-precision temperature and humidity sensing signal and the low-precision temperature and humidity sensing signal, performs numerical computation on the high-precision temperature and humidity sensing signal and the low-precision temperature and humidity sensing signal that has undergone analog-to-digital conversion (ADC) by means of a computation processing unit (such as a central processing unit (CPU) or a microprocessing unit (MCU)) in the computation processing module 130 .
- the computation processing unit executes a preset computation-required program to generate the high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result.
- the high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result are processed by a programmable logic device (PLD) in the computation processing module 130 and then sent to the display interface 150 at the fab for display.
- the display interface 150 is a large display panel comprising a plurality of seven-step displays and is adapted to display temperature and humidity levels, such that workers working in the fab can know the ambient temperature and humidity levels in the fab.
- the high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result are processed by a driving circuit disposed on the physical layer (PHY) in the computation processing module 130 and then sent to the remote host 210 via the first communication interface 140 for remote-end control.
- PHY physical layer
- the high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result are processed by a driving circuit of a universal asynchronous receiver/transmitter (UART) in the computation processing module 130 and then sent to the local host 211 via the second communication interface 141 for local-end control.
- UART universal asynchronous receiver/transmitter
- the high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result which have been processed by the computation processing module 130 are sent over an Ethernet to the remote host 210 at the remote-end control center via the first communication interface 140 for remote-end control.
- the high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result can be directly transmitted by means of a RJ45 terminal network line disposed in the fab, and then the temperature and humidity levels are read by a browser installed on the operating system of a computer in real time so as to accomplish remote-end temperature and humidity control without designing a layout anew or developing a compatible control software.
- the integrated temperature and humidity control device 100 performs high-precision temperature and humidity control and low-precision temperature and humidity control simultaneously, such that the administrative team working at the local-end control center and/or the remote-end control center can selectively read the high-precision temperature and humidity measurement result and/or the low-precision temperature and humidity measurement result as needed, in order to monitor software or apparatuses and observe the current temperature and humidity levels in the fab.
- the remote control console and/or the local control console issue an adjustment control signal for adjusting the temperature and humidity.
- the monitoring software generates an alert sound or directly sends a command for performing adjustment control of temperature and humidity.
- the integrated temperature and humidity control device 100 further comprises a storage unit 160 connected to the computation processing module 130 and adapted to receive and store the high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result for subsequent data processing or data analysis.
- the present invention provides an integrated temperature and humidity control device for performing remote-end temperature and humidity control, local-end temperature and humidity control, and on-site display.
- the integrated temperature and humidity control device not only performs high-precision temperature and humidity control, low-precision temperature and humidity control, and a plurality of temperature and humidity control simultaneously, but also features systemic integration of temperature and humidity control in a fab so as to meet industrial needs better.
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Abstract
Description
- This non-provisional application claims priority under 35 U.S.C. §119(a) on Patent Application No(s). 101102453 filed in Taiwan, R.O.C. on Jan. 20, 2012, the entire contents of which are hereby incorporated by reference.
- The present invention relates to integrated temperature and humidity control devices, and more particularly, to an integrated temperature and humidity control device for controlling temperature and humidity with a view to serving industry-related purposes.
- In general, manufacturing processes of industrial products require that temperature and humidity of the operation environment at every production-related zone in a fab have to be closely monitored and strictly controlled, and that variations in the ambient temperature and humidity of the fab have to be coped with, in order to ensure the quality and stability of products being manufactured on a production line.
- At present, systems for controlling the ambient temperature and humidity in a fab are mostly self-contained, and thus every workstation in operation has its own independent control system which displays the current temperature and humidity at every part of the workstation. As a result, it is difficult to exercise real-time control over the ambient temperature and humidity of the fab from a remote end, thereby compromising the product quality of the production line in its entirety.
- It is an objective of the present invention to provide an integrated temperature and humidity control device for exercising local-end and remote-end control over the temperature and humidity in a fab and providing on-site display of temperature and humidity levels at the fab in real time.
- Another objective of the present invention is to simplify the integration of local-end temperature and humidity control and remote-end temperature and humidity control and an installation process thereof.
- Yet another objective of the present invention is to simplify the integration of a high-precision temperature and humidity sensing element and a low-precision temperature and humidity sensing element.
- In order to achieve the above and other objectives, the present invention provides an integrated temperature and humidity control device, controlled by a control console, comprising: at least a temperature and humidity sensing element for sensing temperature and humidity and generating at least a temperature and humidity sensing signal; a temperature and humidity sensing transmission interface connected to the at least a temperature and humidity sensing element for receiving the at least a temperature and humidity sensing signal; a computation processing module connected to the temperature and humidity sensing transmission interface for receiving the at least a temperature and humidity sensing signal to generate at least a temperature and humidity measurement result; a communication interface connected to the computation processing module for sending the at least a temperature and humidity measurement result to the control console; and at least a display interface connected to the computation processing module for displaying the at least a temperature and humidity measurement result.
- In an embodiment, the control console comprises a remote host and/or a local host.
- In an embodiment, the at least a temperature and humidity sensing element comprises at least a high-precision temperature and humidity sensing element and/or at least a low-precision temperature and humidity sensing element. The at least a high-precision temperature and humidity sensing element senses temperature and humidity and generates at least a high-precision temperature and humidity sensing signal. The at least a low-precision temperature and humidity sensing element senses temperature and humidity and generates at least a low-precision temperature and humidity sensing signal.
- In an embodiment, the temperature and humidity sensing transmission interface comprises a high-precision temperature and humidity sensing transmission interface and/or a low-precision temperature and humidity sensing transmission interface. The high-precision temperature and humidity sensing transmission interface is connected to the at least a high-precision temperature and humidity sensing element for communicating with the at least a high-precision temperature and humidity sensing element by two-wire transmission and receiving the at least a high-precision temperature and humidity sensing signal. The low-precision temperature and humidity sensing transmission interface is connected to the at least a low-precision temperature and humidity sensing element for receiving the at least a low-precision temperature and humidity sensing signal.
- In an embodiment, the computation processing module is connected to the high-precision temperature and humidity sensing transmission interface and/or the low-precision temperature and humidity sensing transmission interface. The computation processing module receives the at least a high-precision temperature and humidity sensing signal and directly computes temperature and humidity levels to generate at least a high-precision temperature and humidity measurement result. The computation processing module receives the at least a low-precision temperature and humidity sensing signal, performs analog-to-digital conversion on the at least a low-precision temperature and humidity sensing signal, computes temperature and humidity levels, and generates at least a low-precision temperature and humidity measurement result.
- In an embodiment, the communication interface comprises a first communication interface and/or a second communication interface. The first communication interface is connected to the computation processing module and adapted to transmit the at least a high-precision temperature and humidity measurement result and the at least a low-precision temperature and humidity measurement result to the remote host by Ethernet. The second communication interface is connected to the computation processing module and adapted to transmit the at least a high-precision temperature and humidity measurement result and the at least a low-precision temperature and humidity measurement result to the local host via a RS232 interface.
- In an embodiment, an integrated temperature and humidity control device further comprises a storage unit connected to the computation processing module and adapted to receive and store the at least a high-precision temperature and humidity measurement result and the at least a low-precision temperature and humidity measurement result.
- In an embodiment, the high-precision temperature and humidity measurement result or the low-precision temperature and humidity measurement result is processed by a programmable logic device (PLD) in the computation processing module and then sent to the display interface for display.
- In an embodiment, the high-precision temperature and humidity measurement result or the low-precision temperature and humidity measurement result is processed by a driving circuit of a universal asynchronous receiver/transmitter (UART) in the computation processing module and then sent to the local host via the second communication interface.
- In an embodiment, the at least a high-precision temperature and humidity measurement result and the at least a low-precision temperature and humidity measurement result are selectively read by the remote control console and the local control console such that, in case of an abnormal measurement result, at least one of the remote control console and the local control console issue an adjustment control signal for adjusting temperature and humidity.
- In an embodiment, the at least a low-precision temperature and humidity sensing element calculates a measured temperature level according to an intrinsic impedance level and calculates a measured humidity level according to an output voltage level.
- In an embodiment, the temperature and humidity sensing transmission interface effectuates data latch by one of a clock signal and a data signal.
- In conclusion, the present invention provides an integrated temperature and humidity control device for simplifying remote-end data transmission and local-end data transmission by means of an Ethernet and a RS232 interface, respectively, integrating a high-precision sensing signal and a low-precision sensing signal by means of high-precision and low-precision temperature and humidity sensing elements, performing local-end and remote-end temperature and humidity control on a fab, and providing on-site temperature and humidity level display.
- Objectives, features, and advantages of the present invention are hereunder illustrated with specific embodiments in conjunction with the accompanying drawings, in which:
-
FIG. 1 is a functional block diagram of an integrated temperature and humidity control device according to a specific embodiment of the present invention; and -
FIG. 2 is a functional block diagram of the integrated temperature and humidity control device according to another specific embodiment of the present invention. - Referring to
FIG. 1 , there is shown a functional block diagram of an integrated temperature andhumidity control device 10 according to a specific embodiment of the present invention. As shown in the diagram, the integrated temperature andhumidity control device 10, which is controlled by acontrol console 20, comprises at least a temperature andhumidity sensing element 11, temperature and humiditysensing transmission interface 12, acomputation processing module 13, acommunication interface 14, and at least adisplay interface 15. - The temperature and humidity sensing
element 11 senses temperature and humidity and generates at least a temperature and humidity sensing signal. The temperature and humiditysensing transmission interface 12 is connected to the temperature andhumidity sensing element 11 and adapted to receive the temperature and humidity sensing signal. Thecomputation processing module 13 is connected to the temperature and humiditysensing transmission interface 12. Thecomputation processing module 13 receives the temperature and humidity sensing signal and generates at least a temperature and humidity measurement result according to the temperature and humidity sensing signal received. Thecommunication interface 14 is connected to thecomputation processing module 13 and adapted to send the temperature and humidity measurement result to thecontrol console 20. Thedisplay interface 15 is connected to thecomputation processing module 13 and adapted to display the temperature and humidity measurement result. - Referring to
FIG. 2 , there is shown a functional block diagram of the integrated temperature and humidity control device according to another specific embodiment of the present invention. As shown in the diagram, the integrated temperature andhumidity control device 100 comprises at least a high-precision temperature andhumidity sensing element 110, at least a low-precision temperature andhumidity sensing element 111, a high-precision temperature and humiditysensing transmission interface 120, a low-precision temperature and humiditysensing transmission interface 121, acomputation processing module 130, afirst communication interface 140, asecond communication interface 141, and at least adisplay interface 150. - The integrated temperature and
humidity control device 100 further comprises aremote host 210 and alocal host 211 each of which functions as a control console for controlling the integrated temperature andhumidity control device 100. - The high-precision temperature and humidity sensing
element 110 senses temperature and humidity and generates a high-precision temperature and humidity sensing signal. The high-precision temperature andhumidity sensing element 110 is connected to the high-precision temperature and humiditysensing transmission interface 120. The high-precision temperature andhumidity sensing element 110 sends the high-precision temperature and humidity sensing signal to the high-precision temperature and humiditysensing transmission interface 120 by means of two-wire transmission. In practice, the quantity of the high-precision temperature andhumidity sensing element 110 is subject to changes as needed. - The low-precision temperature and humidity sensing
element 111 senses temperature and humidity and generates a low-precision temperature and humidity sensing signal. The low-precision temperature andhumidity sensing element 111 is connected to the low-precision temperature and humiditysensing transmission interface 121. The low-precision temperature andhumidity sensing element 111 sends the low-precision temperature and humidity sensing signal to the low-precision temperature and humiditysensing transmission interface 111. In practice, the quantity of the low-precision temperature andhumidity sensing element 111 is subject to changes as needed. - The
computation processing module 130 is connected to the high-precision temperature and humiditysensing transmission interface 120 and the low-precision temperature and humiditysensing transmission interface 121. Thecomputation processing module 130 receives the high-precision temperature and humidity sensing signal and performs computation on the temperature and humidity levels directly to generate a high-precision temperature and humidity measurement result. Thecomputation processing module 130 receives the low-precision temperature and humidity sensing signal, performs an analog-to-digital conversion (ADC) process on the low-precision temperature and humidity sensing signal, and performs computation on the temperature and humidity levels to generate a low-precision temperature and humidity measurement result - The
first communication interface 140 is connected to thecomputation processing module 130 and adapted to transmit over an Ethernet the high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result to theremote host 210 for remote-end control. For example, a local fab performs remote-end control from outside or performs centralized remote-end control by a control center of the fab. - The
second communication interface 141 is connected to thecomputation processing module 130 and adapted to transmit via a RS232 interface the at least a high-precision temperature and humidity measurement result and the at least a low-precision temperature and humidity measurement result to thelocal host 211 for local-end control exercised by a control center of the fab, for example. - The at least a
display interface 150 is connected to thecomputation processing module 130 and adapted to display the at least a high-precision temperature and humidity measurement result and/or the at least a low-precision temperature and humidity measurement result for performing fixed-point head-up control at a fixed location of a working area within the fab, for example. - In an embodiment of the present invention, the at least a high-precision temperature and
humidity sensing element 110 makes minimal errors, operates steadily, and performs a measurement process without prior precision calibration, and thus is suitable for use in a fab that requires high-precision temperature control. To perform ambient temperature and humidity sensing, the at least a high-precision temperature andhumidity sensing element 110 automatically converts a detected physical parameter value into a digital value and generates the at least a high-precision temperature and humidity sensing signal. After receiving the at least a high-precision temperature and humidity sensing signal from the at least a high-precision temperature andhumidity sensing element 110 by means of two-wire transmission, the high-precision temperature and humiditysensing transmission interface 120 sends the at least a high-precision temperature and humidity sensing signal to thecomputation processing module 130 for further computation. Two-wire transmission is a smart transmission technique whereby data latch is accomplished by means of clock and data signals; hence, two-wire transmission outperforms multiwire transmission and single-wire transmission and thus enhances the reliability and stability in transmitting the high-precision temperature and humidity sensing signal. - In an embodiment of the present invention, the low-precision temperature and
humidity sensing element 111 is disadvantaged by its low measurement precision and thus has to undergo linear calibration regularly. Despite its low measurement precision, the low-precision temperature andhumidity sensing element 111 is cheap enough to be widely used in fab areas which require no high-precision temperature and humidity control. After finishing the ambient temperature and humidity sensing process, the low-precision temperature andhumidity sensing element 111 calculates a measured temperature level according to an intrinsic impedance level, calculates a measured humidity level according to an output voltage level, and generates the low-precision temperature and humidity sensing signal. After receiving the low-precision temperature and humidity sensing signal from the low-precision temperature andhumidity sensing element 111, the low-precision temperature and humiditysensing transmission interface 121 sends the low-precision temperature and humidity sensing signal to thecomputation processing module 130 for further computation. - For example, after receiving the low-precision temperature and humidity sensing signal, the
computation processing module 130 performs an analog-to-digital conversion (ADC) process on the low-precision temperature and humidity sensing signal by means of an analog-to-digital converter built in thecomputation processing module 130, to facilitate subsequent computation of temperature and humidity levels. Furthermore, a plurality of analog-to-digital converters is disposed in thecomputation processing module 130 of the integrated temperature andhumidity control device 100 for driving multiple said low-precision temperature andhumidity sensing elements 111 simultaneously and thereby performing temperature and humidity control over different positions of the fab respectively and simultaneously, or measuring the temperature and humidity at different portions of an apparatus simultaneously (for example, controlling the temperature and humidity of different components of a motherboard.) - In an embodiment of the present invention, after receiving the high-precision temperature and humidity sensing signal and the low-precision temperature and humidity sensing signal, the
computation processing module 130 performs numerical computation on the high-precision temperature and humidity sensing signal and the low-precision temperature and humidity sensing signal that has undergone analog-to-digital conversion (ADC) by means of a computation processing unit (such as a central processing unit (CPU) or a microprocessing unit (MCU)) in thecomputation processing module 130. The computation processing unit executes a preset computation-required program to generate the high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result. - For example, the high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result are processed by a programmable logic device (PLD) in the
computation processing module 130 and then sent to thedisplay interface 150 at the fab for display. Thedisplay interface 150 is a large display panel comprising a plurality of seven-step displays and is adapted to display temperature and humidity levels, such that workers working in the fab can know the ambient temperature and humidity levels in the fab. The high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result are processed by a driving circuit disposed on the physical layer (PHY) in thecomputation processing module 130 and then sent to theremote host 210 via thefirst communication interface 140 for remote-end control. Furthermore, the high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result are processed by a driving circuit of a universal asynchronous receiver/transmitter (UART) in thecomputation processing module 130 and then sent to thelocal host 211 via thesecond communication interface 141 for local-end control. - The high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result which have been processed by the
computation processing module 130 are sent over an Ethernet to theremote host 210 at the remote-end control center via thefirst communication interface 140 for remote-end control. The high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result can be directly transmitted by means of a RJ45 terminal network line disposed in the fab, and then the temperature and humidity levels are read by a browser installed on the operating system of a computer in real time so as to accomplish remote-end temperature and humidity control without designing a layout anew or developing a compatible control software. - In an embodiment of the present invention, the integrated temperature and
humidity control device 100 performs high-precision temperature and humidity control and low-precision temperature and humidity control simultaneously, such that the administrative team working at the local-end control center and/or the remote-end control center can selectively read the high-precision temperature and humidity measurement result and/or the low-precision temperature and humidity measurement result as needed, in order to monitor software or apparatuses and observe the current temperature and humidity levels in the fab. In case of an abnormal measurement result, the remote control console and/or the local control console issue an adjustment control signal for adjusting the temperature and humidity. For example, in case of an abnormal change in temperature and humidity, the monitoring software generates an alert sound or directly sends a command for performing adjustment control of temperature and humidity. - The integrated temperature and
humidity control device 100 further comprises astorage unit 160 connected to thecomputation processing module 130 and adapted to receive and store the high-precision temperature and humidity measurement result and the low-precision temperature and humidity measurement result for subsequent data processing or data analysis. - In conclusion, the present invention provides an integrated temperature and humidity control device for performing remote-end temperature and humidity control, local-end temperature and humidity control, and on-site display. The integrated temperature and humidity control device not only performs high-precision temperature and humidity control, low-precision temperature and humidity control, and a plurality of temperature and humidity control simultaneously, but also features systemic integration of temperature and humidity control in a fab so as to meet industrial needs better.
- The present invention is disclosed above by preferred embodiments. However, persons skilled in the art should understand that the preferred embodiments are illustrative of the present invention only, but should not be interpreted as restrictive of the scope of the present invention. Hence, all equivalent modifications and replacements made to the aforesaid embodiments should fall within the scope of the present invention. Accordingly, the legal protection for the present invention should be defined by the appended claims.
Claims (12)
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TW101102453 | 2012-01-20 | ||
TW101102453A TW201331736A (en) | 2012-01-20 | 2012-01-20 | Integrated temperature and humidity control device |
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US20130186965A1 true US20130186965A1 (en) | 2013-07-25 |
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US13/446,169 Abandoned US20130186965A1 (en) | 2012-01-20 | 2012-04-13 | Integrated temperature and humidity control device |
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