US20090316429A1 - Light coupling device and system, and method for manufacturing the device and system - Google Patents
Light coupling device and system, and method for manufacturing the device and system Download PDFInfo
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- US20090316429A1 US20090316429A1 US12/487,980 US48798009A US2009316429A1 US 20090316429 A1 US20090316429 A1 US 20090316429A1 US 48798009 A US48798009 A US 48798009A US 2009316429 A1 US2009316429 A1 US 2009316429A1
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- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
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- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
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- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1039—Details on the cavity length
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
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- H10K50/80—Constructional details
- H10K50/85—Arrangements for extracting light from the devices
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10S977/949—Radiation emitter using nanostructure
- Y10S977/95—Electromagnetic energy
Definitions
- the present invention generally relates to an optical device, system and method according to the preambles of the independent claims that are proposed.
- OLEDs organic light emitting diodes
- OLEDs can be fabricated by purely additive low-temperature processes such as ink-jet printing and can thus be easily integrated onto almost any substrate.
- they are ultra-thin and thus offer the potential for being substantially space-saving.
- a major challenge pertaining to OLEDs is the coupling of the light emitted there into a low-order mode (less than 20 modes) supporting waveguide.
- Various publications teach how light emitted from an OLED may be coupled into a waveguide. However, implementations of these publications are not suitable for the coupling of light into a waveguide in low-order modes.
- U.S. Pat. No. 5,907,160 discloses a thin film organic light emitting diode with edge emitter waveguide comprising, in sequence, a substrate, a waveguide, an anode, a hole transport layer, an electroluminescent layer, and a cathode. Voltage applied between the anode and cathode causes the electroluminescent layer to emit light through the hole transport layer and the anode into the waveguide where the light is internally reflected within the waveguide and propagates through the length of the waveguide to be emitted through the edge of the waveguide.
- U.S. Pat. No. 6,472,817 discloses an organic light emitting device having a first electrode and a transparent electrode with an organic light emitting layer there between; characterized by a waveguide provided on the opposite side of the transparent electrode compared to the organic light emitting layer.
- U.S. Pat. No. 6,472,817 also discloses a device incorporating at least two such organic light emitting devices so as to provide a pulsed modulation output or a multi-color output.
- U.S. Pat. No. 6,704,335 discloses an edge-emitting type light-emitting device that comprises an organic light-emitting layer, a pair of electrode layers for applying an electric field to the organic light-emitting layer, and an optical waveguide which transmits light emitted from the organic light-emitting layer to the edge.
- the optical waveguide disclosed in U.S. Pat. No. 6,704,335 further comprises a core layer mainly transmitting light, and cladding layers having a refractive index lower than that of the core layer.
- the core layer is a layer different from the organic light-emitting layer or comprises the organic light-emitting layer.
- a grating is formed in the core layer or in the boundary area between the core layer and the cladding layer.
- a light-emitting device comprises an optical fiber section.
- Another embodiment comprises a defect and a grating having a one-dimensional periodic refractive index distribution and constituting a photonic band gap.
- implementations of teachings disclosed in U.S. Pat. Nos. 5,907,160, 6,472,817 and 6,704,335 may induce waveguide losses caused by the presence of the OLED itself. Accordingly, implementations of the above-mentioned US patents fail to efficiently couple light emitted from the OLEDs into a low-order mode waveguide.
- Y. Ohmori et al. disclose in the publication “Realization of Polymeric Optical Integrated Devices Utilizing Organic Light-Emitting Diodes and Photodetectors Fabricated on a Polymeric Waveguide, IEEE Journal of Selected Topics in Quantum Electronics 10, p. 70, 2004” a 45° cut mirror at one end of a waveguide of 70 ⁇ m core size to reflect the light from the OLED on top of the waveguide into the core.
- the approach disclosed by Y. Ohmori et al. may yield insufficient power in the case of low-order mode waveguides.
- Y.-Y. Lin et al. disclose in their publication “100 ⁇ m waveguide. 50 ⁇ m diffuser particles embedded in waveguide to enhance coupling efficiency, Applied Physics Letters 89, 063501, 2006” the introduction of a diffuser layer into the waveguide to couple light from an OLED into a coplanar waveguide.
- diffuser particles may be difficult to integrate into low-order mode waveguides of thicknesses equal to the wavelength of the light they guide.
- multiple scattering events may constitute a major problem in the case of low-order mode waveguides and limit the achievable coupling efficiency considerably.
- U.S. Pat. No. 6,160,273A discloses an OLED-based edge emitter that mitigates the problem of unacceptably large losses by physically separating the OLED from the waveguide using an optical cladding layer.
- the thickness of the cladding layer between the fluorescent medium/waveguide and the OLED is comparable to the wavelength of the photons generated in the fluorescent medium/waveguide.
- the fluorescent medium also acts as a waveguide. In case the fluorescent medium cannot provide the required optical confinement, separate sub-structures of fluorescing material and light guiding material are proposed.
- FIG. 1A is a schematic block diagram illustration of a side view of an optical device adapted to pump a photo-luminescent layer with a luminescent light source from the opposite side of the substrate and couple light emitted from the photo-luminescent layer into a low-order mode waveguide, according to an embodiment of the invention
- FIG. 1B is a schematic block diagram illustration of a side view of an optical device adapted to couple light emitted from a luminescent source into a low-order mode waveguide, according to an alternative embodiment of the invention
- FIG. 2A is a schematic block diagram illustration of a side view of an optical device adapted to couple light emitted from a luminescent source into a low-order mode waveguide with high coupling efficiency based on a far mirror approach, according to a yet alternative embodiment of the invention
- FIG. 2B is a schematic block diagram illustration of a side view of an optical device adapted to couple light emitted from a luminescent source into a low-order mode waveguide with high coupling efficiency based on a close mirror approach, according to another embodiment of the invention
- FIG. 3A is a detailed schematic block diagram illustration of a side view of an embodiment of the pump light source, according to an embodiment of the invention.
- FIG. 3B is a detailed schematic block diagram illustration of a side view of a photoluminescent layer and the individual light sources thereof and an external light source operatively associated with another embodiment of the luminescent source;
- FIG. 4A shows a graph that schematically depicts an embodiment of a photo-luminescent material where the absorption peak and the photo-luminescent emission peak are well separated from each other by a large wavelength shift;
- FIG. 4B shows a graph that schematically depicts absorption and emission spectra of photo-luminescent layer MEH-PPV;
- FIG. 5A shows a graph that schematically depicts normalized photo-luminescent emission power of MEH-PPV in different environmental atmospheres
- FIG. 5B shows a graph that schematically depicts the dependence of the power coupled into the waveguide as a function of the pumped length of the photoluminescent layer
- FIG. 6A is a schematic block diagram illustration of a side view of an optical device adapted to couple light emitted from the luminescent source into a low-order mode waveguide and couple it out to the air at the output grating, according to a further alternative embodiment of the invention
- FIG. 6B is a schematic block diagram illustration of a side view of an optical device adapted to couple light emitted from the luminescent source into a low-order mode waveguide and couple it out to the substrate at the output grating, according to a yet further alternative embodiment of the invention
- FIG. 7A is a schematic block diagram illustration of a side view of an optical device adapted to work as an optical sensor with the detector array placed or provided above the waveguide, according to an embodiment of the invention
- FIG. 7B is a schematic block diagram illustration of a side view of an optical device adapted to work as an optical sensor with the detector array placed below the substrate, according to an embodiment of the invention
- FIG. 8A shows a graph depicting the response of a P3HT:PCBM-based polymer photodiode detector (PPD) which can be used in the detector array DA in embodiments of the invention;
- PPD polymer photodiode detector
- FIG. 8B shows a graph depicting the spectra of the guided light measured by the organic spectrometer or detector array DA of FIG. 8A (triangles) and by an inorganic spectrometer (squares) set up in similar measuring condition—influence of the grating out-coupling angle condition are similar for both measurements; and
- FIG. 9 is a schematic block diagram illustration of a top view of an integrated optical system, according to an embodiment of the invention.
- Embodiments of the disclosed invention provide an optical device generating light by luminescence comprising a substrate, a waveguide, a pump light source and a light source.
- the waveguide is mechanically evanescently coupled with a photoluminescent layer of the light source.
- the pump light source is provided opposite to the photoluminescent layer at the backside of the substrate.
- the pump light source is adapted to pump theotoluminescent layer to emit light; and at least some of said emitted light is evanescently coupled into the waveguide.
- the waveguide is positioned between the substrate and the photoluminescent layer.
- the photoluminescent layer is positioned between the substrate and the waveguide.
- the waveguide is a low-order waveguide with a thickness in the range of 10 nm to 10 ⁇ m.
- the absorption and emission peak of light emitted by the photoluminescent layer are spectrally separated by at least 50 nm.
- the optical device by comprises an encapsulation layer sealing at least the photoluminescent layer of the light source.
- the light source comprises a spacer layer and a mirror, wherein the spacer layer has a separation distance t SL and is disposed between the photoluminescent layer and the mirror, the mirror reflecting and re-injecting at least some of the light pumped by the pump light source back into the photoluminescent layer.
- the separation distance t SL may be at least twice as large as the penetration depth L P of a wavefront field into the photoluminescent layer and preferably has a thickness of at least 1 ⁇ m.
- the optical device comprises an optical filter structure adapted to modify at least some of the light being coupled into the waveguide.
- the optical filter structured is positioned between the waveguide and the photoluminescent layer.
- the optical filter structure is positioned between the substrate and the waveguide.
- the present invention further discloses an optical system comprising at least one substrate, at least one waveguide, at least one pump light source, at least one light source, and at least one waveguide.
- the at least one waveguide is evanescently coupled with a photoluminescent layer of the at least one light source.
- the at least one pump light source is provided on the backside of the substrate opposite to the at least one light source, respectively.
- the at least one pump light source is adapted to pump the photoluminescent layer to emit light, and at least some of the emitted light is optically coupled into the at least one waveguide, respectively.
- the present invention discloses an optical device configured in a manner that enables to couple light emitted from a luminescent source such as, for example but not limited to an organic light emitting diode (OLED), into a low-order mode waveguide.
- a luminescent source such as, for example but not limited to an organic light emitting diode (OLED)
- OLED organic light emitting diode
- the present invention enables the usage of luminescent sources in association with waveguides that support only low-order modes.
- the term “low-order mode” as used herein may refer, in some embodiments of the invention, to less than 20 modes. In some embodiments of the invention, the term “low-order mode” may refer to less than 5 modes.
- a low-order waveguide may refer to a waveguide that supports the propagation of light therein at less than 20 modes, and in some embodiments of the invention, at less than 5 modes.
- an optical device 100 A includes, inter alia, a low-order mode waveguide (WG) 130 that is mechanically and evanescently coupled with a photoluminescent layer (PL) 120 , as well as a luminescent pump light source (PLS) 150 provided at least approximately in alignment with or opposite to PL 120 on the backside of SU 140 . Accordingly, SU 140 may be provided between WG 130 and PLS 150 . PLS 150 is adapted to optically pump PL 120 , e.g., indirectly.
- WG 130 is provided on and positioned between a substrate (SU) 140 and a photoluminescent layer (PL) 120 .
- the low-order mode waveguide (WG) 130 is provided on one side of the substrate (SU) 140 and the luminescent pump light source (PLS) 150 is still provided on the backside of SU 140 but the photoluminescent layer (PL) 120 is placed or provided between the waveguide 130 and the substrate SU 140 .
- PL 120 is mechanically coupled with WG 130 in a manner such that at least some of the light re-emitted by PL 120 is coupled, e.g., as known in the art, evanescently to the low-order modes of into WG 130 .
- the term “evanescently coupling” as well as grammatical variations thereof may refer to the case wherein the vertical distance along Y between any two points of PL 120 and WG 130 may be less than one wavelength of the emitted light.
- PL 120 is configured such that its absorption and emission bands are well separated, thus minimizing or at least reducing the re-absorption of light coupled into WG 130 .
- the power coupled into WG 130 scales at least approximately linearly with the area of PL 120 pumped by PLS 150 . It should be noted that in some embodiments (not shown), PL 120 may be located between WG 130 and SU 140 .
- PLS 150 may be embodied, for example, by a photoluminescent, an electroluminescent, a chemiluminescence or any other suitable additional or alternative material; by inorganic light-emitting diodes (LEDs), laser diodes, an OLED, or any other light emitting material, e.g., as known in the art.
- LEDs inorganic light-emitting diodes
- OLED organic light-emitting diodes
- PL 120 may have a thickness ranging from 1 ⁇ m to 10 ⁇ m. In some preferred embodiment of the invention, thickness of PL 120 may range, for example, from 100 nm to 1 ⁇ m.
- WG 130 may have a thickness t WG supporting propagation of light in low-order modes only.
- WG 130 may have a thickness t WG ranging from 10 nm to 10 ⁇ m; from 50 nm to 1 ⁇ m, or for example, from 100 nm to 500 nm.
- the thickness of WG 130 is in the range of 100 nm to 300 nm.
- Overall thickness t LS of PLS 150 may be at least approximately equal or be smaller than, e.g., 100 ⁇ m. In some embodiments of the invention, the thickness t LS of PLS may be at least approximately equal or be smaller than 10 ⁇ m, or at least approximately equal or smaller than, for example, 1 ⁇ m.
- optical device 100 A may include an encapsulation layer 110 sealing at least PL 120 of light source 105 to protect the latter against potentially damaging environmental influences such as the penetration of oxygen and/or moisture.
- encapsulation layer 110 sealing at least PL 120 of light source 105 to protect the latter against potentially damaging environmental influences such as the penetration of oxygen and/or moisture.
- the term “sealing” as well as grammatical variations thereof also encompass the meaning of the term “substantially sealing” with the respective grammatical variations.
- PL 120 is less susceptible to, e.g., photooxidation, and other processes that may modify the optical properties PL 120 and have the potential to degrade the operability of optical device 100 A.
- the overall lifetime of the photoluminescent material of PL 120 is increased compared to the lifetime if no encapsulation layer 110 would have been employed.
- WG 130 of an optical device 100 B may include an optical filter structure (OF) 125 , which may be positioned between WG 130 and PL 120 and/or between SU 140 and WG 130 .
- OF 125 and PL 120 may constitute light source 105 .
- OF 125 is adapted to modify at least some of the light prior and/or while being coupled into WG 130 .
- Such modification of light, which may occur at an interface 160 between WG 130 and OF 125 may comprise, for example, narrowing the spectra and/or modifying the polarization of light.
- Such modifications may, for example, cause an increase of the coupling efficiency between PL 120 and WG 130 .
- OF 125 may be embodied, for example, by diffractive gratings, dielectric color filters, polarizers, dichroic filters, liquid crystal devices, or by any combination of the above.
- PL 120 and WG 130 may be monolithically integrated, i.e., integrally formed with each other.
- WG 130 may be embodied by a polymer matrix, a photoresist layer or a spin-on-glass doped with a photoluminescent material embodying PL 120 . Fabrication processes may include but are not limited to at least one of the following: spin-coating, dip-coating and solgel.
- WG 130 may embody SU 140 .
- the coupling of light with SU 140 may be accomplished, e.g., as known in the art.
- PLS 150 may include optically dissipative and/or metallic layers and may thus cause modal loss in WG 130 .
- a metallic layer may, for example, give rise to modal loss of light propagating in WG 130 due to a) surface plasmons and/or b) absorption losses and/or c) quenching, which is hereinafter referred to as non-radiative damping.
- the latter may be separated from PLS 150 by a given distance corresponding, e.g., to the thickness of SU 140 , as is for example schematically illustrated in FIG. 1A .
- An optical device may be configured such that modal loss of light propagating in WG 130 is lower than, e.g., 100 cm ⁇ 1 . In some preferred embodiments of the invention, modal loss is less than, e.g., 10 cm ⁇ 1 .
- encapsulation layer 110 may seal PL 120 and OF 125 .
- light source 105 of an optical device 200 A may include a reflective mirror 116 that is placed or provided at some separation distance t SL from PL 120 , wherein the separation distance corresponds to the thickness t SL of a spacer layer (SL) 115 that may be disposed between PL 120 and mirror 116 of light source 105 .
- Mirror 116 reflects at least some of the light pumped from PLS 150 that has not been absorbed by PL 120 and re-injects it into PL 120 .
- employing mirror 116 increases the amount of light coupled into WG 130 by a factor of 2.
- the separation distance t SL may be at least twice as large as the penetration depth L P of a wavefront field into PL 120 .
- t SL is, for example, at least 1 ⁇ m.
- Mirror 116 may be embodied, for example, by a metallic mirror, a dielectric multi-layer stack, or by any other suitable material.
- optical device 200 A includes encapsulation layer 110 sealing light source 105 of optical device 200 A to seal mirror 116 , SL 115 and PL 120 against oxygen and/or moisture.
- light source 105 of an optical device 200 B includes mirror 116 that is placed or provided at a specific distance t SL in close proximity to PL 120 .
- Mirror 116 in conjunction with WG 130 builds an effective optical cavity of a length t SL +t PL such to potentially increase the pump-light intensity up to a factor 4.
- Mirror 116 is separated from PL 120 by SL 115 having thickness t SL .
- t SL is less than 1000 nm, particularly preferred below 300 nm, especially preferred less than 100 nm.
- t SL is chosen in such a way that the effective cavity length, the sum of t SL and t PL is half the peak wavelength of PLS 150 or a multiple thereof.
- light source 105 of optical device 200 B is encapsulated by encapsulation layer 110 sealing PL 120 , and optionally mirror 116 and/or SL 115 against oxygen and/or moisture.
- mirror 116 can be designed in such a way that either TE or TM polarization is absorbed, thus enabling the selective coupling of one polarization into WG 130 .
- Selective coupling increases the signal-to-noise-ratio of the coupled light, compared to signal-to-noise ratio that would otherwise be obtained without selective coupling.
- PLS 150 as schematically illustrated in FIG. 3A may not realizable, since in a real-world PLS the electroluminescent layer must cover the edges of the electrodes in order to avoid electrical short circuits between them. However, to simplify the discussion that follows, schematic illustration of PLS 150 is used for outlining its functional features.
- PLS 150 may be implemented by means of electroluminescence (light emitting capacitor). The embodiment thereof is schematically indicated and comprises at least a first electrode layer 151 , a second electrode layer 152 and at least one electroluminescent layer 153 sandwiched between electrode layer 151 and 152 . In addition, PLS 150 may also include at least one dielectric layer (not shown), situated and covering at least some of the interface between electrode layer 151 and electroluminescent layer 153 , or the interface between electrode layer 152 and electroluminescent layer 153 .
- electrode layer 151 is hereinafter referred as to the electrode that is positioned closer to a substrate (e.g., SU) than electrode layer 152 .
- the electrode that is closer to e.g., SU must be at least partially transparent for the light produced by electroluminescent layer 153 .
- This may be achieved by using a suitable material that is substantially transparent or semitransparent for the said light.
- Such materials may be, for example, conducting oxides, semi-transparent thin metal films, conducting polymer layers as electrodes and the like.
- electroluminescence may be generated.
- electroluminescent layer 153 is subjected to high alternating electrical fields (e.g., 10 6 V/cm), which in turn causes the excitation of, e.g., phosphors in electroluminescent layer 153 .
- the dielectric layer (not shown) should minimize or at least reduce the electrical current through PLS 150 .
- PLS 150 may be implemented by an OLED.
- the upper electrode layer 151 i.e. the one in contact with substrate 140 , must be at least partially transparent for the light produced by the OLED. This may be achieved by using transparent conducting oxides, semi-transparent thin metal films, or conducting polymer layers as electrodes. Additional charge transport layers can be inserted between the electroluminescent layer(s) and the cathode and between the electroluminescent layer(s) and the anode. Suitable thicknesses for all these layers are in the range of, for example, 1 nm to 1 ⁇ m. Preferred are thicknesses in the range of, for example, 5 nm to 200 nm.
- suitable materials for electrode layer 151 of the OLED may include, for example, substantially transparent conducting oxides, semi-transparent thin metal films, or conducting polymer layers as electrodes.
- charge transport layers may be sandwiched or inserted between electroluminescent layer 153 and electrode layer 151 , as well as between electroluminescent layer 153 and electrode layer 152 .
- the thickness for the charge transport layers may range, for example, from 1 nm to 1 ⁇ m. In preferred embodiments of the invention, the thickness of the charge transport layers may range, for example, from 5 nm to 200 nm.
- FIG. 3B It shows a detailed view of a light source 105 , according to an embodiment of the invention, wherein light source 105 includes at least one PL 120 that emits light when being irradiated with photons.
- light source 105 includes at least one PL 120 that emits light when being irradiated with photons.
- PL 120 may absorb some of the light L in and emit as a result thereof light PL out .
- ELS 106 may be a monolithically integrated light source according to and embodied by PLS 150 , or be any suitable external light source such as, for example, an ultraviolet lamp, an inorganic LED, a laser diode, a laser or an OLED on a separate substrate. At least some of the wavelength(s) of light L in differ from PL out .
- some of the photoluminescent material(s) of PL 120 schematically illustrated in FIG. 3B may be identical (and thus also substantially identical) to the electroluminescent material(s) of electroluminescent layer 153 .
- the thickness of PL 120 may be about equal or be smaller than, e.g., 100 ⁇ m. In some preferred embodiments of the invention, the thickness of PL 120 may be about equal or be smaller than, e.g., 10 ⁇ m. In some more preferred embodiments of the invention, the thickness of PL 120 may be about equal or be smaller than, for example, 1 ⁇ m.
- the distance D between the light emitting zone(s) of PL 120 from WG 130 is an additional parameter that may have an influence on the coupling efficiency of light from PL 120 into WG 130 .
- the light emitting zones are herein schematically indicated as an assembly of point sources, which may be embodied, for example, by dipoles and/or quadrupoles and/or by any other electrical pole arrangement.
- sources may be arranged substantially in one plane, as is schematically indicated in FIG. 3B .
- sources may be arranged in various planes and/or may be positioned in light source 105 in a substantially random manner (not shown).
- the rate at which sources can emit light into a given mode of WG 130 is proportional to the square of the electric field distribution E 2 of that given mode at the location of source.
- the square of the electric field distribution for the mode of order zero is schematically illustrated for example, in FIG. 1A and FIG. 1B by means of curve E 2 .
- the electric field distribution E decays exponentially with an increase of the distance from WG 130 . It may therefore be advantageous that the distance D between sources and WG 130 is about equal or smaller than the decay length of the exponential tails of the modes supported by WG 130 to ensure that light emitted from PL 120 is coupled into low-order mode WG 130 .
- Suitable distances D between WG 130 and sources of light source 105 may be about equal to or be smaller than, for example, 5 ⁇ m. In some preferred embodiments of the invention, distance D may be about equal or be smaller than, for example, 500 nm. In some more preferred embodiments of the invention, D may be about equal or be smaller than, for example, 150 nm.
- the efficiency of transfer of optical power from PL 120 into a waveguide such as, for example, WG 130 may be referred to, for example, in accordance to the term “coupling efficiency” and may be expressed as the ratio between the optical power in all the modes of WG 130 and the total optical power emitted by the light source(s).
- Light propagating in PL 120 may be subjected to other and/or additional obstacles that may cause modal loss during the propagation of light.
- FIG. 4A In the proposed evanescent coupling scheme photons emitted from PL 120 in FIG. 1A couple into the waveguide mode depicted by the mode profile. By the inverse mechanism, light propagating inside WG 130 could couple into PL 120 and being reabsorbed. In order to avoid or reduce re-absorption it is of high importance that the absorption band and the photoluminescence emission band are spectrally well separated from each other by a wavelength shift dW. This shift dW is defined as the distance of the absorption and emission peak maxima of PL 120 .
- Preferred dW is larger than, e.g., 50 nm, especially preferred larger than, e.g., 80 nm and particularly preferred larger than, e.g., 100 nm.
- the overlap between the absorption curve and the emission curve should preferably be as small as possible.
- In practice good candidates for PL 120 are materials with narrow absorption and emission peaks and large Stokes shifts.
- FIG. 4B wherein the re-emission spectrum of F8BT is schematically depicted, the re-emission spectrum being well separated from its absorption spectrum by a large Stokes shift.
- FIG. 5A It shows the importance of encapsulation of PL 120 in order to increase the lifetime.
- a 200 nm thick PL 120 of MEH-PPV was encapsulated by a glass slide maintained with epoxy glue.
- the material of encapsulated PL 120 showed stable lifetime in ambient atmosphere with variation of 10% during 1 hour.
- FIG. 5A shows a graph that schematically depicts normalized photo-luminescent emission power of MEH-PPV in different environmental atmospheres. Further reference is made to FIG. 5B schematically depicting the power at the output grating which is roughly proportional to the power coupled into WG 130 , while it is assumed that the area of PLS 150 is much larger than the area of PL 120 and as such PL 120 is illuminated homogeneously while border effects can be neglected. In such configuration the power coupled into WG 130 scales linearly with the length of PL 120 .
- the optical device had at least approximately the following parameters:
- Optical devices 400 A and 400 B may each comprise an out-coupling grating structure (GS) 132 manufactured in WG 130 adapted to couple light out of WG 130 .
- the first grate of GS 132 (viewed from the direction of the propagation of light in WG 130 ) may be located at a distance D GS from the outermost edge of the PL 120 .
- Angle “ ⁇ ” schematically illustrates an out-coupling angle of the light (L out ) emitting from WG 130 , whereby angle “ ⁇ ” is measured with respect to a normal “N normal ” of WG 130 .
- the said angle “ ⁇ ” may be given by the following equation:
- n c represents the refractive index of the layer cladding of WG 130 at its output.
- n c may represent the refractive index of air or of SU 140 , depending whether GS 132 is situated on the upper or lower side of WG 130 .
- N represents the effective refractive index of the waveguide mode in WG 130
- ⁇ the wavelength(s) of the light propagating in WG 130
- ⁇ the grating period of GS 132 .
- Optical devices 400 A and 400 B may also feature in-coupling GS 131 adapted to increase the optical coupling efficiency of light into WG 130 .
- In-coupling GS 131 and out-coupling GS 132 may be fabricated, e.g., as known in the art.
- GS 131 and 132 may be fabricated by dry or wet etching techniques.
- Further in-coupling GS 131 and out-coupling GS 132 may be fabricated by replication from molds or Ni-maters in case that WG 130 is made of polymeric substrates or UV cast materials.
- Either one or both in-coupling and out-coupling GS 131 and GS 132 may be grafted—before the deposition of WG 130 into SU 140 .
- either one or both in-coupling GS 131 or out-coupling GS 132 may be grafted into WG 130 after their deposition onto SU 140 .
- a grating period ⁇ of in-coupling GS 131 and/or out-coupling GS 132 may range, for example, from 100 nm to 1 ⁇ m. In some preferred embodiments of the invention, a grating period ⁇ of in-coupling and out-coupling GS 131 and/or GS 132 may range, for example, from 200 nm to 500 nm. According to some embodiments of the invention, the depth of in-coupling and out-coupling GS 131 and/or GS 132 , respectively may range, for example, from 1 nm to 500 nm. In some preferred embodiments of the invention, the depth of in-coupling GS 131 and/or out-coupling GS 132 and may range, for example, from 5 nm to 50 nm.
- the spectrally resolved output at out-coupling GS 132 can be either detected on the waveguide side ( FIG. 6A ) or on the substrate side ( FIG. 6B ).
- the out-coupling GS 132 could be a blazed grating, which may be most effective either towards top or bottom emission.
- optical devices 600 A and 600 B include an absorbing layer (AL) 160 situated on the backside of substrate 140 , like PLS 150 .
- AL 160 is adapted to suppress substrate modes that might be excited by PLS 150 .
- Substrate modes are undesirable since they might get coupled into a detection system (not shown), add optical noise and therefore lower the signal-to-noise ratio of optical device 600 A and/or 600 B.
- Optical device 600 A and/or 600 B may be implemented as outlined hereinafter.
- SU 140 may be, for example, a 14 mm ⁇ 57 mm glass substrate onto which a substantially planar single mode WG 130 , being 150 nm thick and comprising Ta 2 O 5 , was sputter-deposited.
- a substantially uniform rectangular out-coupling GS 132 of, e.g., 312 nm period and 12 nm depth may be grafted into SU 140 by employing a photolithographic process and dry etching prior the deposition of Ta 2 O 5 .
- PL 120 may be deposited on top of WG 130 by means of spin-coating or drop-casting.
- PLS 150 is mechanically coupled with SU 140 either by lamination or by being monolithically integrated with SU 140 .
- PLS 150 is embodied by an OLED.
- First electrode layer 151 may for example comprise of an Indium Tin Oxides (ITO) layer that was sputtered onto one side of SU 140 and subsequently patterned by chemical- or plasma etching or laser ablation or by any other method, e.g., known in the art.
- the subsequent charge injection layers and electroluminescent layers as well as second electrode layer 152 may be depositable by employing a procedure selected of the following group: liquid processing, vacuum deposition and lamination.
- the OLED is processed on a separate substrate which is then laminated to the chip.
- AL 160 may be embodied, for example, by a black light-absorbing film that is laminated onto the lower side of SU 140 or by a substantially black ink layer that is deposited on the lower side of SU 140 by liquid coating techniques, e.g., known in the art.
- either one or both optical devices 600 A or 600 B may include OF 125 adapted to modify at least some of the light prior and/or while being coupled into WG 130 as outlined herein with reference to FIG. 1B .
- An optical device 700 A may be integrated with a fluid (e.g., liquid or gas) flow cell 790 including a functionalized surface 791 for sensing applications.
- Sensing applications include but are not limited to chemical sensing of gas and liquids, DNA, Gen-Antigen, protein interaction, chemical interaction.
- Functionalized surface (FS) 791 may be located on top of WG 130 between PL 120 and out-coupling GS 132 inside flow cell 790 .
- the optical modes in WG 130 are response to changes to FS 791 induced by a respective specimen (not shown).
- PL 120 lies outside flow cell 790 in order to avoid cross-contamination of specimen with the material of PL 120 and also to avoid light scattering from PL 120 into the liquid specimen.
- the detection takes place on the upper side of WG 130 .
- PL 120 constitutes a sensing layer.
- oxygen and glucose sensors based on phosphorescent lifetime quenching of oxygen sensitive dyes such as PtOEP (2,3,7,8,12,13,17,18-Octaethyl-21H,23H-porphine platinum (II)) or PdOEP (2,3,7,8,12,13,17,18-Octaethyl-21H,23H-porphine palladium).
- FS 791 may be provided on top of out-coupling GS 132 or be monolithically integrated with GS 132 .
- an optical (not shown) microstructure may be deposited on top of WG 130 in order to increase the interaction with FS 791 .
- light diffracted from the out-coupling GS 132 is collected by a detector array (DA) 795 located on the lower side of the substrate next to AL 160 .
- DA detector array
- DA 795 may be adapted to measure the intensity and the spectral distribution—and thus specimen-induced changes thereof—of light propagating in the waveguide.
- DA 795 includes of a one- or two-dimensional array of photodiodes or a charge coupled device or any other kind of light sensitive device having an arbitrary number of pixels.
- a special case of such a DA would be a single pixel detector.
- Additional optical filters 796 could be integrated or placed or provided in front of DA 795 including but not limited to band-pass and edge filters and polarizer.
- DA 795 is an array of organic photodiodes that could be integrated monolithically onto SU 140 or be on a separate substrate situated below SU 140 .
- DA 795 may be monolithically integrated on top of WG 130 or be on a separate substrate positioned above WG 130 .
- PLS 150 may also be modulated in order to enable phase sensitive detection as for example lock-in techniques.
- FIG. 7B In contrast to FIG. 7A , light in an optical device 700 B is detected on the same side of SU 140 as PLS 150 .
- This configuration has the advantage that the excitation in PLS 150 and the detection are located on one side of SU 140 790 , thus facilitating encapsulation of PLS 150 , which may be monolithic with SU 140 an very sensitive to water and humidity.
- DA 795 includes an array of polymer photodiodes (PPDs) to detect the spectrum of the out-coupled light.
- PPDs polymer photodiodes
- the PPD-blend includes of Poly(3-hexylthiophene):phenyl-C61-butyric acid methyl ester, P3HT:PCBM with weight ratio of 1:1.
- the layer thickness of the PPD is 240 nm and has been optimized for optimal external quantum efficiency, on/off ratio and lifetime.
- FIG. 8B schematically depicting the spectrum measured with an integrated organic spectrometer based on an array of PPDs.
- Experimental spectral resolution was obtained by comparing the c bandwidth (80 nm) of the guided spectrum with the spectra obtained with the PPDs array.
- the PPDs have a sensitivity cut-off at 640 nm, one can estimate the full width at half maximum (FHWM) of the guided light at 60 nm.
- Pixel to pixel spectral resolution of ⁇ 5 nm FWHM was achieved with this set-up when the PL material is pumped by an inorganic LED.
- OLED a spectral resolution of ⁇ 7 nm was achieved.
- Signal to noise ratio is about 10.
- An optical device may be integrated into an optical system 900 , which may include at least one photoluminescent layer (e.g., PL 120 ), which may be coupled to a structure comprising of at least one SU 140 and at least one low-order mode waveguide 130 , which may be a thin film of high-index layer deposited on SU 140 .
- Optical system 900 may further include at least one sensing area (SA) 905 and at least one detector (DE) 910 , whereby the at least one SA 905 and DE 910 are substantially aligned with respect to PL 120 .
- SA sensing area
- DE detector
- light may interact in WG 130 with a respective specimen (not shown).
- DE 910 may be adapted to measure the intensity and the spectral distribution—and thus specimen-induced changes thereof—of light propagating in the respective WG 130 .
- Optical system 900 comprising one or more optical devices according to embodiments of the invention offer many advantages over systems known in the art, which rely on one or more external light sources, such as laser diodes for example.
- the integrated solution provided by optical system 900 allows substantial savings in space requirements since a) no bulky external light sources are needed and b) the proposed luminescent PLS 150 are extremely thin and may have in some embodiments of the invention a thickness of only a few micrometers. In some embodiments of the invention, PLS 150 may for example have a thickness of less than 1 ⁇ m.
- alignment of elements in optical system 900 can be performed with relatively fault-prone free and time saving procedures.
- optical system 900 facilitates the integration of a plurality of light sources by depositing PL 120 having different operational specifications.
- a first and a second PL 120 may emit light having respectively different wavelengths ⁇ 1 and ⁇ 2 . Therefore, a highly parallel integrated optical system, such as optical system 900 , comprising of an array of monolithically integrated light sources can be realized.
- An alternative embodiment of the invention may rely on an external PLS 150 embodied, for example by an UV LED.
- a single PLS 150 may pump different types of PLS 150 and thus generate a wide range of different wavelength.
- a plurality of PLS 150 and PL 120 may be fabricated by additive print technologies such as for example, ink-jet or gravure printing, which is state-of-the-art in the field of OLEDs (cf. B.-J. de Gans et al., Inkjet Printing of Polymers: State of the Art and Future Developments, Advanced Materials 16, p. 203, 2004, hereinafter referred to as “Gans et al.”).
- additive print technologies such as for example, ink-jet or gravure printing, which is state-of-the-art in the field of OLEDs (cf. B.-J. de Gans et al., Inkjet Printing of Polymers: State of the Art and Future Developments, Advanced Materials 16, p. 203, 2004, hereinafter referred to as “Gans et al.”).
- the fabrication methods described, inter alia, by Gans et al. allow the deposition of a variety of PLS 150 /PL 120 pairs on a substrate in accordance to respective predefined locations.
- the fabrication methods enable juxtaposing neighboring PL 120 at a distance of a few ⁇ m from each other. For example, a lateral resolution of a few ⁇ m of a matrix of a plurality of identical or various light sources is achievable.
- each of the PLS 150 /PL 120 pairs described herein are compatible with flexible substrates, thus enabling fully integrated optical systems on a polymer basis.
- optical system 900 offers the potential to be fabricated in a cost-effective way.
- the reasons therefore are, for example: Polymeric substrates may be used instead of glass substrates, (high-volume) print processes may be used instead of standard processes such as vacuum deposition methods and photolithographic patterning.
- PLS' 150 do not have to be integrated in a cost-intensive packaging step to fabricate optical system. In case an external PLS 150 is used only the at least one PL 120 needs to be aligned properly.
- optical system 900 may be used in association with a wide range of applications, including medical diagnostics (e.g. DNA screening), automotive (e.g. rain sensor), industrial (e.g. gas sensor), security and information technologies.
- medical diagnostics e.g. DNA screening
- automotive e.g. rain sensor
- industrial e.g. gas sensor
- security and information technologies e.g.
- a prototypical application is a low-cost, disposable, card-type, multiple-channel fully integrated optical biosensor for point-of-care diagnostics.
- WG 130 may be made of any suitable material.
- WG 130 may be made of a dielectric material having a relatively high index of refraction.
- materials of which WG 130 may be made of include Ta 2 O 5 , TiO 2 , HfO 2 , SiO x N y , poly(1-naphthyl methacrylate), poly(1-naphthyl methacrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(2,4,6-tribromophenyl methacrylate), poly(2,4,6-tribromophenyl methacrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(2,6-dichlorostyrene), poly(2-chlorostyrene), poly(2-vinylthiophene), poly(bis(4-iodophenoxy)phosphazene), poly(N
- Electrode layer 151 may be made of indium thin oxide (ITO), zinc oxide (ZnO), especially In or Al doped ZnO, tin oxide (SnO 2 ), especially Sb and F doped SnO 2 , gold, silver, nickel, poly(3,4-ethylenedioxythiophene)poly(styrenesulfonate), polyanyline, polyacetylene and polypyrrole.
- Electrode layer 152 may be made of calcium, barium, lithium fluoride, aluminum and silver.
- EL may be made of poly[2-methoxy-5-(2-ethylhexyl-oxy)-1,4-phenylene-vinylene], poly[2,5-bis(3,7-dimethyloctyloxy)-1,4-phenylene-vinylene], poly[2-methoxy-5-(3,7-dimethyl-octyloxy)-1,4-phenylenevinylene], poly(9,9-dioctylfluorenyl-2,7-diyl), poly[9,9-di-(2-ethylhexyl)-fluorenyl-2,7-diyl], poly(9,9-di ⁇ 2-[2-(2-methoxy-ethoxy)ethoxy]ethyl ⁇ fluorenyl-2,7-diyl), poly[2-(6-cyano-6-methyl-heptyloxy)-1,4-phenylene], poly(2,5-dioctyl-1,4-
- the charge transport layers may be made of any suitable material such as, for example, N,N′-bis(3-methylphenyl)-N,N′-bis(phenyl)benzidine, N′N′-bis(4-methylphenyl)-N,N′-bis(phenyl)benzidine, N,N′-bis(2-naphtalenyl)-N-N′-bis(phenylbenzidine), 1,3,5-tris(3-methyldiphenyl-amino)benzene, N,N′-bis(1-naphtalenyl)-N-N′-bis(phenylbenzidine), 4,4′,4′′-tris(N,N-phenyl-3-methylphenylamino)triphenylamine, 4,4′,N,N′-diphenylcarbazole, poly[(9,9-dihexylfluorenyl-2,7-diyl)-co-(N,N′bis ⁇ p-butyl
- Electroluminescent layer 153 may be made of, for example, ZnS, ZnSe, SrS,and GaN doped with rare earth or transition metal ions (ZnS:Mn, SrS:Cu, GaN:Er).
- the insulating layer (not shown) may be made of, for example, barium titanate, SiO 2 , Al 2 O 3 , poly(2,2,2-trifluoroethyl methacrylate), poly(2,2,3,3,3-pentafluoropropyl methacrylate), poly(1,1,1,3,3,3-hexafluoroisopropyl acrylate, poly(1,1,2,4,4,5,5,6,7,7-decafluoro-3-oxa-1,6-heptadiene), poly(2,2,2-trifluoroethyl acrylate), poly(2,2,3,3,3-pentafluoropropyl acrylate), poly(2,2,3,3,4,4,4-heptafluorobutyl acrylate), poly
- Suitable substrates for the organic devices are glass, polymer, especially polymeric foil, paper or metal.
- Flexible substrates are well suited for roll-to-roll processes.
- the substrate can be for example a flexible polymer foil like acrylonitrile butadiene styrene ABS, polycarbonate PC, polyethylene PE, polyetherimide PEI, polyetherketone PEK, poly(ethylene naphthalate) PEN, poly(ethylene therephtalate) PET, polyimide PI, poly(methyl methacrylate) PMMA, poly-oxy-methylene POM, mono oriented polypropylene MOPP, polystyrene PS, polyvinyl chloride PVC and the like.
- Other materials like paper weight per area 20-500 g/m 2 , preferably 40-200 g/m 2
- metal foil for example Al—, Au—, Cu—, Fe—, Ni—, Sn—, steel-foil etc., especially surface modified, coated with a lacquer or polymer, are suitable too.
- the substrate can be coated with a barrier layer or a barrier layer stack to increase the barrier properties (J. Lange and Y. Wyser, “Recent Innovations in Barrier Technologies for Plastic Packaging—a Review”, Packag. Technol. and Sci. 16, 2003, p. 149-158).
- a barrier layer or a barrier layer stack to increase the barrier properties
- inorganic materials like SiO 2 , Si 3 N 4 , SiO x N y , Al 2 O 3 , AlO x N y and the like are often used. They can be deposited e.g. in vacuum processes like evaporation, sputtering or chemical vapour deposition CVD, especially plasma enhanced CVD (PECVD). Other suitable materials are mixtures of organic and inorganic materials deposited in a sol-gel process. Such materials can even be deposited in a wet coating process like e.g. gravure printing. Barrier properties are obtained by multilayer coatings of organic and inorganic materials as described in WO03/094256A2. In the following the term substrate shells denote substrates with and without barrier coatings.
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Abstract
Description
- The present invention claims priority from U.S. provisional patent application 61/075,282 filed on Jun. 24, 2008, the application which is incorporated herein by reference in its entirety.
- The present invention generally relates to an optical device, system and method according to the preambles of the independent claims that are proposed.
- Using organic light emitting diodes (OLEDs) as monolithically integrated luminescent source in integrated optical devices might be beneficial in many applications for the following reasons: first, OLEDs can be fabricated by purely additive low-temperature processes such as ink-jet printing and can thus be easily integrated onto almost any substrate. Second, they are ultra-thin and thus offer the potential for being substantially space-saving. Third, via chemical modification of the OLED's light emitting molecule(s) the emission spectrum can be tuned over a wide range of the optical spectrum. Fourth, they are compatible with flexible polymeric substrates. Finally, due to their simple device architecture and processing scheme they hold the promise for low-cost fabrication and integration.
- A major challenge pertaining to OLEDs is the coupling of the light emitted there into a low-order mode (less than 20 modes) supporting waveguide. Various publications teach how light emitted from an OLED may be coupled into a waveguide. However, implementations of these publications are not suitable for the coupling of light into a waveguide in low-order modes.
- U.S. Pat. No. 5,907,160 discloses a thin film organic light emitting diode with edge emitter waveguide comprising, in sequence, a substrate, a waveguide, an anode, a hole transport layer, an electroluminescent layer, and a cathode. Voltage applied between the anode and cathode causes the electroluminescent layer to emit light through the hole transport layer and the anode into the waveguide where the light is internally reflected within the waveguide and propagates through the length of the waveguide to be emitted through the edge of the waveguide.
- U.S. Pat. No. 6,472,817 discloses an organic light emitting device having a first electrode and a transparent electrode with an organic light emitting layer there between; characterized by a waveguide provided on the opposite side of the transparent electrode compared to the organic light emitting layer. In addition, U.S. Pat. No. 6,472,817 also discloses a device incorporating at least two such organic light emitting devices so as to provide a pulsed modulation output or a multi-color output.
- U.S. Pat. No. 6,704,335 discloses an edge-emitting type light-emitting device that comprises an organic light-emitting layer, a pair of electrode layers for applying an electric field to the organic light-emitting layer, and an optical waveguide which transmits light emitted from the organic light-emitting layer to the edge. The optical waveguide disclosed in U.S. Pat. No. 6,704,335 further comprises a core layer mainly transmitting light, and cladding layers having a refractive index lower than that of the core layer. The core layer is a layer different from the organic light-emitting layer or comprises the organic light-emitting layer. A grating is formed in the core layer or in the boundary area between the core layer and the cladding layer. A light-emitting device comprises an optical fiber section. Another embodiment comprises a defect and a grating having a one-dimensional periodic refractive index distribution and constituting a photonic band gap. However, implementations of teachings disclosed in U.S. Pat. Nos. 5,907,160, 6,472,817 and 6,704,335 may induce waveguide losses caused by the presence of the OLED itself. Accordingly, implementations of the above-mentioned US patents fail to efficiently couple light emitted from the OLEDs into a low-order mode waveguide.
- Further, Y. Ohmori et al. disclose in the publication “Realization of Polymeric Optical Integrated Devices Utilizing Organic Light-Emitting Diodes and Photodetectors Fabricated on a Polymeric Waveguide, IEEE Journal of Selected Topics in Quantum Electronics 10, p. 70, 2004” a 45° cut mirror at one end of a waveguide of 70 μm core size to reflect the light from the OLED on top of the waveguide into the core. However, since the optical power that can be coupled scales with the core size of the waveguide, the approach disclosed by Y. Ohmori et al. may yield insufficient power in the case of low-order mode waveguides.
- Y.-Y. Lin et al. disclose in their publication “100 μm waveguide. 50 μm diffuser particles embedded in waveguide to enhance coupling efficiency, Applied Physics Letters 89, 063501, 2006” the introduction of a diffuser layer into the waveguide to couple light from an OLED into a coplanar waveguide. However, diffuser particles may be difficult to integrate into low-order mode waveguides of thicknesses equal to the wavelength of the light they guide. Furthermore, multiple scattering events may constitute a major problem in the case of low-order mode waveguides and limit the achievable coupling efficiency considerably.
- U.S. Pat. No. 6,160,273A discloses an OLED-based edge emitter that mitigates the problem of unacceptably large losses by physically separating the OLED from the waveguide using an optical cladding layer. In their preferred embodiment the thickness of the cladding layer between the fluorescent medium/waveguide and the OLED is comparable to the wavelength of the photons generated in the fluorescent medium/waveguide. In their preferred embodiment the fluorescent medium also acts as a waveguide. In case the fluorescent medium cannot provide the required optical confinement, separate sub-structures of fluorescing material and light guiding material are proposed.
- The subject matter regarded as the invention will become more clearly understood in light of the ensuing description of embodiments herein, given by way of example and for purposes of illustrative discussion of the present invention only, with reference to the accompanying Figures, wherein:
-
FIG. 1A is a schematic block diagram illustration of a side view of an optical device adapted to pump a photo-luminescent layer with a luminescent light source from the opposite side of the substrate and couple light emitted from the photo-luminescent layer into a low-order mode waveguide, according to an embodiment of the invention; -
FIG. 1B is a schematic block diagram illustration of a side view of an optical device adapted to couple light emitted from a luminescent source into a low-order mode waveguide, according to an alternative embodiment of the invention; -
FIG. 2A is a schematic block diagram illustration of a side view of an optical device adapted to couple light emitted from a luminescent source into a low-order mode waveguide with high coupling efficiency based on a far mirror approach, according to a yet alternative embodiment of the invention; -
FIG. 2B is a schematic block diagram illustration of a side view of an optical device adapted to couple light emitted from a luminescent source into a low-order mode waveguide with high coupling efficiency based on a close mirror approach, according to another embodiment of the invention; -
FIG. 3A is a detailed schematic block diagram illustration of a side view of an embodiment of the pump light source, according to an embodiment of the invention; -
FIG. 3B is a detailed schematic block diagram illustration of a side view of a photoluminescent layer and the individual light sources thereof and an external light source operatively associated with another embodiment of the luminescent source; -
FIG. 4A shows a graph that schematically depicts an embodiment of a photo-luminescent material where the absorption peak and the photo-luminescent emission peak are well separated from each other by a large wavelength shift; -
FIG. 4B shows a graph that schematically depicts absorption and emission spectra of photo-luminescent layer MEH-PPV; -
FIG. 5A shows a graph that schematically depicts normalized photo-luminescent emission power of MEH-PPV in different environmental atmospheres; -
FIG. 5B shows a graph that schematically depicts the dependence of the power coupled into the waveguide as a function of the pumped length of the photoluminescent layer; -
FIG. 6A is a schematic block diagram illustration of a side view of an optical device adapted to couple light emitted from the luminescent source into a low-order mode waveguide and couple it out to the air at the output grating, according to a further alternative embodiment of the invention; -
FIG. 6B is a schematic block diagram illustration of a side view of an optical device adapted to couple light emitted from the luminescent source into a low-order mode waveguide and couple it out to the substrate at the output grating, according to a yet further alternative embodiment of the invention; -
FIG. 7A is a schematic block diagram illustration of a side view of an optical device adapted to work as an optical sensor with the detector array placed or provided above the waveguide, according to an embodiment of the invention; -
FIG. 7B is a schematic block diagram illustration of a side view of an optical device adapted to work as an optical sensor with the detector array placed below the substrate, according to an embodiment of the invention; -
FIG. 8A shows a graph depicting the response of a P3HT:PCBM-based polymer photodiode detector (PPD) which can be used in the detector array DA in embodiments of the invention; -
FIG. 8B shows a graph depicting the spectra of the guided light measured by the organic spectrometer or detector array DA ofFIG. 8A (triangles) and by an inorganic spectrometer (squares) set up in similar measuring condition—influence of the grating out-coupling angle condition are similar for both measurements; and -
FIG. 9 is a schematic block diagram illustration of a top view of an integrated optical system, according to an embodiment of the invention. - Embodiments of the disclosed invention provide an optical device generating light by luminescence comprising a substrate, a waveguide, a pump light source and a light source.
- In embodiments, the waveguide is mechanically evanescently coupled with a photoluminescent layer of the light source.
- In embodiments, the pump light source is provided opposite to the photoluminescent layer at the backside of the substrate.
- In embodiments, the pump light source is adapted to pump theotoluminescent layer to emit light; and at least some of said emitted light is evanescently coupled into the waveguide.
- In embodiments, the waveguide is positioned between the substrate and the photoluminescent layer.
- In embodiments, the photoluminescent layer is positioned between the substrate and the waveguide.
- In embodiments, the waveguide is a low-order waveguide with a thickness in the range of 10 nm to 10 μm.
- In embodiments, the absorption and emission peak of light emitted by the photoluminescent layer are spectrally separated by at least 50 nm.
- In embodiments, the optical device by comprises an encapsulation layer sealing at least the photoluminescent layer of the light source.
- In embodiments, the light source comprises a spacer layer and a mirror, wherein the spacer layer has a separation distance tSL and is disposed between the photoluminescent layer and the mirror, the mirror reflecting and re-injecting at least some of the light pumped by the pump light source back into the photoluminescent layer.
- In embodiments, the separation distance tSL may be at least twice as large as the penetration depth LP of a wavefront field into the photoluminescent layer and preferably has a thickness of at least 1 μm.
- In embodiments, the optical device comprises an optical filter structure adapted to modify at least some of the light being coupled into the waveguide.
- In embodiments the optical filter structured is positioned between the waveguide and the photoluminescent layer.
- In embodiments, the optical filter structure is positioned between the substrate and the waveguide.
- The present invention further discloses an optical system comprising at least one substrate, at least one waveguide, at least one pump light source, at least one light source, and at least one waveguide.
- In embodiments, the at least one waveguide is evanescently coupled with a photoluminescent layer of the at least one light source.
- In embodiments, the at least one pump light source is provided on the backside of the substrate opposite to the at least one light source, respectively.
- In embodiments, the at least one pump light source is adapted to pump the photoluminescent layer to emit light, and at least some of the emitted light is optically coupled into the at least one waveguide, respectively.
- The present invention discloses an optical device configured in a manner that enables to couple light emitted from a luminescent source such as, for example but not limited to an organic light emitting diode (OLED), into a low-order mode waveguide. Correspondingly, the present invention enables the usage of luminescent sources in association with waveguides that support only low-order modes. The term “low-order mode” as used herein may refer, in some embodiments of the invention, to less than 20 modes. In some embodiments of the invention, the term “low-order mode” may refer to less than 5 modes. Correspondingly, a low-order waveguide may refer to a waveguide that supports the propagation of light therein at less than 20 modes, and in some embodiments of the invention, at less than 5 modes.
- The terms “right”, “left”, “bottom”, “underneath”, “below”, “lowered”, “low”, “top”, “above”, “elevated” and “high” as well as grammatical variations thereof as optionally used herein do not necessarily indicate that, for example, a “bottom” component is below a “top” component, or that a component that is “below” is indeed “below” another component or that a component that is “above” is indeed “above” another component as such directions, components or both may be flipped, rotated, moved in space, placed or provided in a diagonal orientation or position, placed or provided horizontally or vertically, or be similarly modified. Accordingly, it will be appreciated that terms such as “bottom”, “below”, “underneath” “top” and “above” may be used herein for exemplary purposes only, to illustrate the relative positioning or placement of certain components, to indicate a first and a second component or to do both.
- Reference is now made to
FIG. 1A . The present invention discloses an optical device generating light by luminescence. In embodiments of the disclosed invention, anoptical device 100A includes, inter alia, a low-order mode waveguide (WG) 130 that is mechanically and evanescently coupled with a photoluminescent layer (PL) 120, as well as a luminescent pump light source (PLS) 150 provided at least approximately in alignment with or opposite toPL 120 on the backside ofSU 140. Accordingly,SU 140 may be provided betweenWG 130 andPLS 150.PLS 150 is adapted to optically pumpPL 120, e.g., indirectly. In some embodiments,WG 130 is provided on and positioned between a substrate (SU) 140 and a photoluminescent layer (PL) 120. In another embodiment (not shown), the low-order mode waveguide (WG) 130 is provided on one side of the substrate (SU) 140 and the luminescent pump light source (PLS) 150 is still provided on the backside ofSU 140 but the photoluminescent layer (PL) 120 is placed or provided between thewaveguide 130 and thesubstrate SU 140. - In some embodiments,
PL 120 is mechanically coupled withWG 130 in a manner such that at least some of the light re-emitted byPL 120 is coupled, e.g., as known in the art, evanescently to the low-order modes of intoWG 130. - It should be noted that the term “evanescently coupling” as well as grammatical variations thereof may refer to the case wherein the vertical distance along Y between any two points of
PL 120 andWG 130 may be less than one wavelength of the emitted light. -
PL 120 is configured such that its absorption and emission bands are well separated, thus minimizing or at least reducing the re-absorption of light coupled intoWG 130. As a matter of fact the power coupled intoWG 130 scales at least approximately linearly with the area ofPL 120 pumped byPLS 150. It should be noted that in some embodiments (not shown),PL 120 may be located betweenWG 130 andSU 140. -
PLS 150 may be embodied, for example, by a photoluminescent, an electroluminescent, a chemiluminescence or any other suitable additional or alternative material; by inorganic light-emitting diodes (LEDs), laser diodes, an OLED, or any other light emitting material, e.g., as known in the art. -
PL 120 may have a thickness ranging from 1 μm to 10 μm. In some preferred embodiment of the invention, thickness ofPL 120 may range, for example, from 100 nm to 1 μm. -
WG 130 may have a thickness tWG supporting propagation of light in low-order modes only. For example,WG 130 may have a thickness tWG ranging from 10 nm to 10 μm; from 50 nm to 1 μm, or for example, from 100 nm to 500 nm. In preferred embodiments, the thickness ofWG 130 is in the range of 100 nm to 300 nm. - Overall thickness tLS of
PLS 150 may be at least approximately equal or be smaller than, e.g., 100 μm. In some embodiments of the invention, the thickness tLS of PLS may be at least approximately equal or be smaller than 10 μm, or at least approximately equal or smaller than, for example, 1 μm. - In some embodiments of the invention,
optical device 100A may include anencapsulation layer 110 sealing atleast PL 120 oflight source 105 to protect the latter against potentially damaging environmental influences such as the penetration of oxygen and/or moisture. It should be noted that the term “sealing” as well as grammatical variations thereof also encompass the meaning of the term “substantially sealing” with the respective grammatical variations. By providingencapsulation layer 110,PL 120 is less susceptible to, e.g., photooxidation, and other processes that may modify theoptical properties PL 120 and have the potential to degrade the operability ofoptical device 100A. Moreover, the overall lifetime of the photoluminescent material ofPL 120 is increased compared to the lifetime if noencapsulation layer 110 would have been employed. - Additional reference is now made specifically to
FIG. 1B . According to some embodiments of the invention,WG 130 of anoptical device 100B may include an optical filter structure (OF) 125, which may be positioned betweenWG 130 andPL 120 and/or betweenSU 140 andWG 130. OF 125 andPL 120 may constitutelight source 105. OF 125 is adapted to modify at least some of the light prior and/or while being coupled intoWG 130. Such modification of light, which may occur at aninterface 160 betweenWG 130 and OF 125 may comprise, for example, narrowing the spectra and/or modifying the polarization of light. Such modifications may, for example, cause an increase of the coupling efficiency betweenPL 120 andWG 130. OF 125 may be embodied, for example, by diffractive gratings, dielectric color filters, polarizers, dichroic filters, liquid crystal devices, or by any combination of the above. - In embodiments of the disclosed technique,
PL 120 andWG 130 may be monolithically integrated, i.e., integrally formed with each other. For example,WG 130 may be embodied by a polymer matrix, a photoresist layer or a spin-on-glass doped with a photoluminescentmaterial embodying PL 120. Fabrication processes may include but are not limited to at least one of the following: spin-coating, dip-coating and solgel. - In some embodiments,
WG 130 may embodySU 140. The coupling of light withSU 140 may be accomplished, e.g., as known in the art. -
PLS 150 may include optically dissipative and/or metallic layers and may thus cause modal loss inWG 130. A metallic layer may, for example, give rise to modal loss of light propagating inWG 130 due to a) surface plasmons and/or b) absorption losses and/or c) quenching, which is hereinafter referred to as non-radiative damping. To at least reduce the modal loss insideWG 130, the latter may be separated fromPLS 150 by a given distance corresponding, e.g., to the thickness ofSU 140, as is for example schematically illustrated inFIG. 1A . An optical device according to embodiments of the invention may be configured such that modal loss of light propagating inWG 130 is lower than, e.g., 100 cm−1. In some preferred embodiments of the invention, modal loss is less than, e.g., 10 cm−1. In embodiments,encapsulation layer 110 may sealPL 120 and OF 125. - Reference is now made to
FIG. 2A . In order to increase the light-coupling fromPL 120 intoWG 130,light source 105 of anoptical device 200A may include areflective mirror 116 that is placed or provided at some separation distance tSL fromPL 120, wherein the separation distance corresponds to the thickness tSL of a spacer layer (SL) 115 that may be disposed betweenPL 120 andmirror 116 oflight source 105.Mirror 116 reflects at least some of the light pumped fromPLS 150 that has not been absorbed byPL 120 and re-injects it intoPL 120. Ideally, employingmirror 116 increases the amount of light coupled intoWG 130 by a factor of 2. The separation distance tSL may be at least twice as large as the penetration depth LP of a wavefront field intoPL 120. In a preferred embodiment tSL is, for example, at least 1 μm.Mirror 116 may be embodied, for example, by a metallic mirror, a dielectric multi-layer stack, or by any other suitable material. in some embodiments,optical device 200A includesencapsulation layer 110 sealinglight source 105 ofoptical device 200A to sealmirror 116,SL 115 andPL 120 against oxygen and/or moisture. - Reference is now made to
FIG. 2B . To increase the light-coupling efficiency betweenPL 120 andWG 130,light source 105 of anoptical device 200B includesmirror 116 that is placed or provided at a specific distance tSL in close proximity toPL 120.Mirror 116 in conjunction withWG 130 builds an effective optical cavity of a length tSL+tPL such to potentially increase the pump-light intensity up to afactor 4.Mirror 116 is separated fromPL 120 bySL 115 having thickness tSL. In a preferred embodiment tSL is less than 1000 nm, particularly preferred below 300 nm, especially preferred less than 100 nm. Inoptical device 200B, tSL is chosen in such a way that the effective cavity length, the sum of tSL and tPL is half the peak wavelength ofPLS 150 or a multiple thereof. Again, in some embodimentslight source 105 ofoptical device 200B is encapsulated byencapsulation layer 110 sealingPL 120, and optionally mirror 116 and/orSL 115 against oxygen and/or moisture. It should be noted that in thisapproach mirror 116 can be designed in such a way that either TE or TM polarization is absorbed, thus enabling the selective coupling of one polarization intoWG 130. Selective coupling increases the signal-to-noise-ratio of the coupled light, compared to signal-to-noise ratio that would otherwise be obtained without selective coupling. - Further reference is now made to
FIG. 3A . It should be noted thatPLS 150 as schematically illustrated inFIG. 3A may not realizable, since in a real-world PLS the electroluminescent layer must cover the edges of the electrodes in order to avoid electrical short circuits between them. However, to simplify the discussion that follows, schematic illustration ofPLS 150 is used for outlining its functional features. - As already indicated herein,
PLS 150 may be implemented by means of electroluminescence (light emitting capacitor). The embodiment thereof is schematically indicated and comprises at least afirst electrode layer 151, asecond electrode layer 152 and at least oneelectroluminescent layer 153 sandwiched betweenelectrode layer PLS 150 may also include at least one dielectric layer (not shown), situated and covering at least some of the interface betweenelectrode layer 151 andelectroluminescent layer 153, or the interface betweenelectrode layer 152 andelectroluminescent layer 153. For exemplary purposes only,electrode layer 151 is hereinafter referred as to the electrode that is positioned closer to a substrate (e.g., SU) thanelectrode layer 152. In the said embodiment, the electrode that is closer to e.g., SU must be at least partially transparent for the light produced byelectroluminescent layer 153. This may be achieved by using a suitable material that is substantially transparent or semitransparent for the said light. Such materials may be, for example, conducting oxides, semi-transparent thin metal films, conducting polymer layers as electrodes and the like. - The following is an example of how electroluminescence may be generated. For example, by applying an alternating voltage to
electrode layer electroluminescent layer 153 is subjected to high alternating electrical fields (e.g., 106V/cm), which in turn causes the excitation of, e.g., phosphors inelectroluminescent layer 153. The dielectric layer (not shown) should minimize or at least reduce the electrical current throughPLS 150. -
PLS 150 may be implemented by an OLED. Again, theupper electrode layer 151, i.e. the one in contact withsubstrate 140, must be at least partially transparent for the light produced by the OLED. This may be achieved by using transparent conducting oxides, semi-transparent thin metal films, or conducting polymer layers as electrodes. Additional charge transport layers can be inserted between the electroluminescent layer(s) and the cathode and between the electroluminescent layer(s) and the anode. Suitable thicknesses for all these layers are in the range of, for example, 1 nm to 1 μm. Preferred are thicknesses in the range of, for example, 5 nm to 200 nm. - In the event that
PLS 150 is embodied by an OLED, suitable materials forelectrode layer 151 of the OLED may include, for example, substantially transparent conducting oxides, semi-transparent thin metal films, or conducting polymer layers as electrodes. - It should be noted that in the embodiments in which
PLS 150 is implemented by an OLED, charge transport layers (not shown) may be sandwiched or inserted betweenelectroluminescent layer 153 andelectrode layer 151, as well as betweenelectroluminescent layer 153 andelectrode layer 152. In embodiments of the invention, the thickness for the charge transport layers may range, for example, from 1 nm to 1 μm. In preferred embodiments of the invention, the thickness of the charge transport layers may range, for example, from 5 nm to 200 nm. - Additional reference is now made to
FIG. 3B . It shows a detailed view of alight source 105, according to an embodiment of the invention, whereinlight source 105 includes at least onePL 120 that emits light when being irradiated with photons. Correspondingly, ifPL 120 is suitably subjected to light Lin emitted from an external light source (ELS) 106,PL 120 may absorb some of the light Lin and emit as a result thereof light PLout. - In embodiments,
ELS 106 may be a monolithically integrated light source according to and embodied byPLS 150, or be any suitable external light source such as, for example, an ultraviolet lamp, an inorganic LED, a laser diode, a laser or an OLED on a separate substrate. At least some of the wavelength(s) of light Lin differ from PLout. In some embodiments of the invention, some of the photoluminescent material(s) ofPL 120 schematically illustrated inFIG. 3B may be identical (and thus also substantially identical) to the electroluminescent material(s) ofelectroluminescent layer 153. - The thickness of
PL 120 may be about equal or be smaller than, e.g., 100 μm. In some preferred embodiments of the invention, the thickness ofPL 120 may be about equal or be smaller than, e.g., 10 μm. In some more preferred embodiments of the invention, the thickness ofPL 120 may be about equal or be smaller than, for example, 1 μm. - The distance D between the light emitting zone(s) of
PL 120 fromWG 130 is an additional parameter that may have an influence on the coupling efficiency of light fromPL 120 intoWG 130. - For exemplary purposes only, the light emitting zones are herein schematically indicated as an assembly of point sources, which may be embodied, for example, by dipoles and/or quadrupoles and/or by any other electrical pole arrangement. In any event, sources may be arranged substantially in one plane, as is schematically indicated in
FIG. 3B . Alternatively, sources may be arranged in various planes and/or may be positioned inlight source 105 in a substantially random manner (not shown). - It should be noted that the rate at which sources can emit light into a given mode of
WG 130 is proportional to the square of the electric field distribution E2 of that given mode at the location of source. The square of the electric field distribution for the mode of order zero is schematically illustrated for example, inFIG. 1A andFIG. 1B by means of curve E2. Outside WG 130 itself the electric field distribution E decays exponentially with an increase of the distance fromWG 130. It may therefore be advantageous that the distance D between sources andWG 130 is about equal or smaller than the decay length of the exponential tails of the modes supported byWG 130 to ensure that light emitted fromPL 120 is coupled into low-order mode WG 130. Suitable distances D betweenWG 130 and sources oflight source 105 may be about equal to or be smaller than, for example, 5 μm. In some preferred embodiments of the invention, distance D may be about equal or be smaller than, for example, 500 nm. In some more preferred embodiments of the invention, D may be about equal or be smaller than, for example, 150 nm. - In general, the efficiency of transfer of optical power from
PL 120 into a waveguide such as, for example,WG 130, may be referred to, for example, in accordance to the term “coupling efficiency” and may be expressed as the ratio between the optical power in all the modes ofWG 130 and the total optical power emitted by the light source(s). - The above-mentioned requirements of efficient transfer of optical power from
PL 120 intoWG 130 imply, inter alia, thatPL 120 ought to be as close as possible to a waveguide (e.g., WG 130) and/or that a waveguide (e.g., WG 130) should be near cutoff wavelength. Near cutoff, the waveguide modes are largely outsideWG 130 and will overlap withPL 120 even when the waveguide is relatively distant fromPL 120. - Light propagating in
PL 120 may be subjected to other and/or additional obstacles that may cause modal loss during the propagation of light. - Reference is now made to
FIG. 4A . In the proposed evanescent coupling scheme photons emitted fromPL 120 inFIG. 1A couple into the waveguide mode depicted by the mode profile. By the inverse mechanism, light propagating insideWG 130 could couple intoPL 120 and being reabsorbed. In order to avoid or reduce re-absorption it is of high importance that the absorption band and the photoluminescence emission band are spectrally well separated from each other by a wavelength shift dW. This shift dW is defined as the distance of the absorption and emission peak maxima ofPL 120. Preferred dW is larger than, e.g., 50 nm, especially preferred larger than, e.g., 80 nm and particularly preferred larger than, e.g., 100 nm. In other word, the overlap between the absorption curve and the emission curve should preferably be as small as possible. In practice good candidates forPL 120 are materials with narrow absorption and emission peaks and large Stokes shifts. - Reference is now made to
FIG. 4B wherein the re-emission spectrum of F8BT is schematically depicted, the re-emission spectrum being well separated from its absorption spectrum by a large Stokes shift. - Reference is now made to
FIG. 5A . It shows the importance of encapsulation ofPL 120 in order to increase the lifetime. A 200 nmthick PL 120 of MEH-PPV was encapsulated by a glass slide maintained with epoxy glue. The material of encapsulatedPL 120 showed stable lifetime in ambient atmosphere with variation of 10% during 1 hour. -
FIG. 5A shows a graph that schematically depicts normalized photo-luminescent emission power of MEH-PPV in different environmental atmospheres. Further reference is made toFIG. 5B schematically depicting the power at the output grating which is roughly proportional to the power coupled intoWG 130, while it is assumed that the area ofPLS 150 is much larger than the area ofPL 120 and assuch PL 120 is illuminated homogeneously while border effects can be neglected. In such configuration the power coupled intoWG 130 scales linearly with the length ofPL 120. - For the measurement depicted in
FIG. 5B , the optical device had at least approximately the following parameters: - Su—material: Glass, n=1.45
- WG—material: Ta2O5, n=2.2, thickness tWG=200 nm
- PL—material: American Dye Source ADS133YE, thickness tPL=100 nm
PL 120 was excited with a large area emitter consisting of a blue inorganic LED emitting at 465 nm providing a pump intensity of 4.75 mW/cm2 and a diffuser plate (not shown). - Additional reference is now made to
FIG. 6A andFIG. 6A . Optical devices 400A and 400B according to embodiments of the disclosed invention, may each comprise an out-coupling grating structure (GS) 132 manufactured inWG 130 adapted to couple light out ofWG 130. The first grate of GS 132 (viewed from the direction of the propagation of light in WG 130) may be located at a distance DGS from the outermost edge of thePL 120. - Angle “α” schematically illustrates an out-coupling angle of the light (Lout) emitting from
WG 130, whereby angle “α” is measured with respect to a normal “Nnormal” ofWG 130. The said angle “α” may be given by the following equation: -
- wherein “nc” represents the refractive index of the layer cladding of
WG 130 at its output. Correspondingly, “nc” may represent the refractive index of air or ofSU 140, depending whetherGS 132 is situated on the upper or lower side ofWG 130. “N” represents the effective refractive index of the waveguide mode inWG 130, “λ” the wavelength(s) of the light propagating inWG 130, and “Λ” the grating period ofGS 132. - Optical devices 400A and 400B may also feature in-coupling GS 131 adapted to increase the optical coupling efficiency of light into
WG 130. - In-coupling GS 131 and out-
coupling GS 132 may be fabricated, e.g., as known in the art. For example,GS 131 and 132 may be fabricated by dry or wet etching techniques. Further in-coupling GS 131 and out-coupling GS 132 may be fabricated by replication from molds or Ni-maters in case thatWG 130 is made of polymeric substrates or UV cast materials. - Either one or both in-coupling and out-coupling GS 131 and
GS 132 may be grafted—before the deposition ofWG 130 intoSU 140. Alternatively, either one or both in-coupling GS 131 or out-coupling GS 132 may be grafted intoWG 130 after their deposition ontoSU 140. - According to some embodiments of the invention, a grating period Λ of in-coupling GS 131 and/or out-
coupling GS 132 may range, for example, from 100 nm to 1 μm. In some preferred embodiments of the invention, a grating period Λ of in-coupling and out-coupling GS 131 and/orGS 132 may range, for example, from 200 nm to 500 nm. According to some embodiments of the invention, the depth of in-coupling and out-coupling GS 131 and/orGS 132, respectively may range, for example, from 1 nm to 500 nm. In some preferred embodiments of the invention, the depth of in-coupling GS 131 and/or out-coupling GS 132 and may range, for example, from 5 nm to 50 nm. - The spectrally resolved output at out-
coupling GS 132 can be either detected on the waveguide side (FIG. 6A ) or on the substrate side (FIG. 6B ). The out-coupling GS 132 could be a blazed grating, which may be most effective either towards top or bottom emission. - In embodiments of the invention,
optical devices substrate 140, likePLS 150.AL 160 is adapted to suppress substrate modes that might be excited byPLS 150. Substrate modes are undesirable since they might get coupled into a detection system (not shown), add optical noise and therefore lower the signal-to-noise ratio ofoptical device 600A and/or 600B. -
Optical device 600A and/or 600B may be implemented as outlined hereinafter.SU 140 may be, for example, a 14 mm×57 mm glass substrate onto which a substantially planarsingle mode WG 130, being 150 nm thick and comprising Ta2O5, was sputter-deposited. At least approximately, parallel to the long sides ofSU 140, at 2.25 mm from thesubstrates SU 140 edge, a substantially uniform rectangular out-coupling GS 132 of, e.g., 312 nm period and 12 nm depth may be grafted intoSU 140 by employing a photolithographic process and dry etching prior the deposition of Ta2O5. In anext step PL 120 may be deposited on top ofWG 130 by means of spin-coating or drop-casting.PLS 150 is mechanically coupled withSU 140 either by lamination or by being monolithically integrated withSU 140. In some embodiments,PLS 150 is embodied by an OLED.First electrode layer 151 may for example comprise of an Indium Tin Oxides (ITO) layer that was sputtered onto one side ofSU 140 and subsequently patterned by chemical- or plasma etching or laser ablation or by any other method, e.g., known in the art. The subsequent charge injection layers and electroluminescent layers as well assecond electrode layer 152 may be depositable by employing a procedure selected of the following group: liquid processing, vacuum deposition and lamination. In a different embodiment the OLED is processed on a separate substrate which is then laminated to the chip. -
AL 160 may be embodied, for example, by a black light-absorbing film that is laminated onto the lower side ofSU 140 or by a substantially black ink layer that is deposited on the lower side ofSU 140 by liquid coating techniques, e.g., known in the art. - In embodiments of the invention, either one or both
optical devices WG 130 as outlined herein with reference toFIG. 1B . - Reference is now made to
FIG. 7A . An optical device 700A according to an embodiment of the invention may be integrated with a fluid (e.g., liquid or gas)flow cell 790 including afunctionalized surface 791 for sensing applications. Sensing applications include but are not limited to chemical sensing of gas and liquids, DNA, Gen-Antigen, protein interaction, chemical interaction. Functionalized surface (FS) 791 may be located on top ofWG 130 betweenPL 120 and out-coupling GS 132 insideflow cell 790. The optical modes inWG 130 are response to changes toFS 791 induced by a respective specimen (not shown). - In an embodiment of the invention,
PL 120 lies outsideflow cell 790 in order to avoid cross-contamination of specimen with the material ofPL 120 and also to avoid light scattering fromPL 120 into the liquid specimen. In the embodiment of optical device 700A the detection takes place on the upper side ofWG 130. - In an alternative embodiment,
PL 120 constitutes a sensing layer. Examples include oxygen and glucose sensors based on phosphorescent lifetime quenching of oxygen sensitive dyes such as PtOEP (2,3,7,8,12,13,17,18-Octaethyl-21H,23H-porphine platinum (II)) or PdOEP (2,3,7,8,12,13,17,18-Octaethyl-21H,23H-porphine palladium). - In an embodiment of the invention,
FS 791 may be provided on top of out-coupling GS 132 or be monolithically integrated withGS 132. - In yet another embodiment an optical (not shown) microstructure may be deposited on top of
WG 130 in order to increase the interaction withFS 791. - According to one embodiment of the invention, light diffracted from the out-
coupling GS 132 is collected by a detector array (DA) 795 located on the lower side of the substrate next toAL 160. - Further,
DA 795 may be adapted to measure the intensity and the spectral distribution—and thus specimen-induced changes thereof—of light propagating in the waveguide. According to an embodiment of theinvention DA 795 includes of a one- or two-dimensional array of photodiodes or a charge coupled device or any other kind of light sensitive device having an arbitrary number of pixels. A special case of such a DA would be a single pixel detector. - Additional
optical filters 796 could be integrated or placed or provided in front ofDA 795 including but not limited to band-pass and edge filters and polarizer. - In an
alternative embodiment DA 795 is an array of organic photodiodes that could be integrated monolithically ontoSU 140 or be on a separate substrate situated belowSU 140. - In yet another embodiment,
DA 795 may be monolithically integrated on top ofWG 130 or be on a separate substrate positioned aboveWG 130. In all embodiments of theinvention PLS 150 may also be modulated in order to enable phase sensitive detection as for example lock-in techniques. - Reference is now made to
FIG. 7B . In contrast toFIG. 7A , light in an optical device 700B is detected on the same side ofSU 140 asPLS 150. This configuration has the advantage that the excitation inPLS 150 and the detection are located on one side ofSU 140 790, thus facilitating encapsulation ofPLS 150, which may be monolithic withSU 140 an very sensitive to water and humidity. - Additional reference is now made to
FIG. 8A . In one embodiment,DA 795 includes an array of polymer photodiodes (PPDs) to detect the spectrum of the out-coupled light. The PPD-blend includes of Poly(3-hexylthiophene):phenyl-C61-butyric acid methyl ester, P3HT:PCBM with weight ratio of 1:1. The layer thickness of the PPD is 240 nm and has been optimized for optimal external quantum efficiency, on/off ratio and lifetime. As a result, we report on organic photodiodes with EQE of 70% at 0V bias, an on/off current ratio of 106 at −1V and 40 mW/cm2 illumination, dark current densities below 10 nA/cm2 at −1V, and a lifetime of at least 3000 hours. More details can be found in M. Ramuz et al, Organic Electronics 9 (2008), page 369-376. PPDs based on a blend of Poly(3-hexylthiophene):phenyl-C61-butyric acid methyl ester (P3HT:PCBM, 1:1 by weight) are at least sensitive in the 400-640 nm range. - Reference is now made to
FIG. 8B , schematically depicting the spectrum measured with an integrated organic spectrometer based on an array of PPDs. Experimental spectral resolution was obtained by comparing the c bandwidth (80 nm) of the guided spectrum with the spectra obtained with the PPDs array. By taking into account that the PPDs have a sensitivity cut-off at 640 nm, one can estimate the full width at half maximum (FHWM) of the guided light at 60 nm. Pixel to pixel spectral resolution of Δ≈5 nm FWHM was achieved with this set-up when the PL material is pumped by an inorganic LED. By using an OLED, a spectral resolution of Δ≈7 nm was achieved. Signal to noise ratio is about 10. - Reference is now made to
FIG. 9 . An optical device according to each of the embodiments of the invention may be integrated into an optical system 900, which may may include at least one photoluminescent layer (e.g., PL 120), which may be coupled to a structure comprising of at least oneSU 140 and at least one low-order mode waveguide 130, which may be a thin film of high-index layer deposited onSU 140. Optical system 900 may further include at least one sensing area (SA) 905 and at least one detector (DE) 910, whereby the at least oneSA 905 andDE 910 are substantially aligned with respect toPL 120. - At
SA 905, light may interact inWG 130 with a respective specimen (not shown). Further,DE 910 may be adapted to measure the intensity and the spectral distribution—and thus specimen-induced changes thereof—of light propagating in therespective WG 130. - Optical system 900 comprising one or more optical devices according to embodiments of the invention offer many advantages over systems known in the art, which rely on one or more external light sources, such as laser diodes for example.
- First, the integrated solution provided by optical system 900 allows substantial savings in space requirements since a) no bulky external light sources are needed and b) the proposed
luminescent PLS 150 are extremely thin and may have in some embodiments of the invention a thickness of only a few micrometers. In some embodiments of the invention,PLS 150 may for example have a thickness of less than 1 μm. - Second, alignment of elements in optical system 900 can be performed with relatively fault-prone free and time saving procedures.
- Third, optical system 900 facilitates the integration of a plurality of light sources by depositing
PL 120 having different operational specifications. For example, a first and asecond PL 120 may emit light having respectively different wavelengths λ1 and λ2. Therefore, a highly parallel integrated optical system, such as optical system 900, comprising of an array of monolithically integrated light sources can be realized. - An alternative embodiment of the invention may rely on an
external PLS 150 embodied, for example by an UV LED. Asingle PLS 150 may pump different types ofPLS 150 and thus generate a wide range of different wavelength. - In some embodiments of the invention, a plurality of
PLS 150 andPL 120 may be fabricated by additive print technologies such as for example, ink-jet or gravure printing, which is state-of-the-art in the field of OLEDs (cf. B.-J. de Gans et al., Inkjet Printing of Polymers: State of the Art and Future Developments, Advanced Materials 16, p. 203, 2004, hereinafter referred to as “Gans et al.”). - The fabrication methods described, inter alia, by Gans et al., allow the deposition of a variety of
PLS 150/PL 120 pairs on a substrate in accordance to respective predefined locations. In addition, the fabrication methods enablejuxtaposing neighboring PL 120 at a distance of a few μm from each other. For example, a lateral resolution of a few μm of a matrix of a plurality of identical or various light sources is achievable. - Fourth, each of the
PLS 150/PL 120 pairs described herein are compatible with flexible substrates, thus enabling fully integrated optical systems on a polymer basis. - Fifth, due to a combination of the above reasons, optical system 900 offers the potential to be fabricated in a cost-effective way. The reasons therefore are, for example: Polymeric substrates may be used instead of glass substrates, (high-volume) print processes may be used instead of standard processes such as vacuum deposition methods and photolithographic patterning. PLS' 150 do not have to be integrated in a cost-intensive packaging step to fabricate optical system. In case an
external PLS 150 is used only the at least onePL 120 needs to be aligned properly. - Due to the advantages described herein, optical system 900 may be used in association with a wide range of applications, including medical diagnostics (e.g. DNA screening), automotive (e.g. rain sensor), industrial (e.g. gas sensor), security and information technologies. A prototypical application is a low-cost, disposable, card-type, multiple-channel fully integrated optical biosensor for point-of-care diagnostics.
- In some embodiments of the invention,
WG 130 may be made of any suitable material. For example,WG 130 may be made of a dielectric material having a relatively high index of refraction. Non-limiting examples of materials of whichWG 130 may be made of include Ta2O5, TiO2, HfO2, SiOxNy, poly(1-naphthyl methacrylate), poly(1-naphthyl methacrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(2,4,6-tribromophenyl methacrylate), poly(2,4,6-tribromophenyl methacrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(2,6-dichlorostyrene), poly(2-chlorostyrene), poly(2-vinylthiophene), poly(bis(4-iodophenoxy)phosphazene), poly(N-vinylphthalimide), poly(pentabromobenzyl acrylate), poly(pentabromobenzyl methacrylate), poly(pentabromobenzyl methacrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(pentabromophenyl acrylate), poly(pentabromophenyl acrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(pentabromophenyl methacrylate), poly(pentabromophenyl methacrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(pentachlorophenyl methacrylate), poly(vinyl phenyl sulfide), and poly(vinyl phenyl sulfide-co-glycidyl methacrylate)glycidyl methacrylate. Additionally, losses due toSU 140 should be as low as possible. -
Electrode layer 151 may be made of indium thin oxide (ITO), zinc oxide (ZnO), especially In or Al doped ZnO, tin oxide (SnO2), especially Sb and F doped SnO2, gold, silver, nickel, poly(3,4-ethylenedioxythiophene)poly(styrenesulfonate), polyanyline, polyacetylene and polypyrrole.Electrode layer 152 may be made of calcium, barium, lithium fluoride, aluminum and silver. EL may be made of poly[2-methoxy-5-(2-ethylhexyl-oxy)-1,4-phenylene-vinylene], poly[2,5-bis(3,7-dimethyloctyloxy)-1,4-phenylene-vinylene], poly[2-methoxy-5-(3,7-dimethyl-octyloxy)-1,4-phenylenevinylene], poly(9,9-dioctylfluorenyl-2,7-diyl), poly[9,9-di-(2-ethylhexyl)-fluorenyl-2,7-diyl], poly(9,9-di{2-[2-(2-methoxy-ethoxy)ethoxy]ethyl}fluorenyl-2,7-diyl), poly[2-(6-cyano-6-methyl-heptyloxy)-1,4-phenylene], poly(2,5-dioctyl-1,4-phenylene), poly[9,9-di-(2-ethylhexyl)-fluorenyl-2,7-diyl], poly[(9,9-dioctyl-2,7-divinylene-fluorenylene)-alt-co-{2-methoxy-5-(2-ethyl-hexyloxy)-1,4-phenylene}], poly[(9,9-dioctylfluorenyl-2,7-diyl)-co-(1,4-vinylenephenylene)], poly[9,9-dioctylfluorenyl-2,7-diyl)-co-1,4-benzo-{2,1′-3}-thiadiazole)], poly[(9,9-dihexylfluorenyl-2,7-diyl)-alt-co-(2-methoxy-5-{2-ethylhexyloxy}-1,4-phenylene)], poly[(9,9-dihexylfluorenyl-2,7-diyl)-co-(2,5-p-xylene)], poly[(9,9-di(3,3′-N,N′-trimethyl-ammonium)propylfluorenyl-2,7-diyl)-alt-(9,9-dioctylfluorenyl-2,7-diyl)]diiodide salt, poly[(9,9-dioctylfluorenyl-2,7-diyl)-co-(N,N′-diphenyl)-N,N′di(p-butyl-oxy-phenyl)-1,4-diaminobenzene)], poly[(9,9-dioctylfluorenyl-2,7-diyl)-co-(1,4-benzo-{2,1′,3}-thiadiazole)], 4,4′-bis(9-ethyl-3-carbazo-vinylene)-1,1′-biphenyl, 9,10-Bis[(9-ethyl-3-carbazoyl)-vinylenyl]-anthracene, 4′4-bis(diphenylvinylenyl)-biphenyl, 1,4-bis(9-ethyl-3-carbazo-vinylene)-2-methoxy-5-(2-thylhexyloxy)-benzene, 4,4′bis(diphenylvinylenyl)-anthracene, 1,4-bis(9-ethyl-3-carbazo-vinylene)-9,9-dihexyl-fluorene, 9,9,9′,9′,9″,9″-hexakis(hexyl)-2,7′;2′,7″-trifluorene, 9,9,9′,9′,9″,9″-hexakis(octyl)-2,7′,2′,7″-trifluorene, 9,9,9′,9′,9″,9″,9′″,9′″,9″″,9″″-decakis(hexyl)-2,7′;2′,7″,2″,7′″;2′″,7″″-pentafluorene, 9,9,9′,9′,9″,9″,9′″,9′″,9″″,9″″,9′″″,9′″″,9″″″,9″″″-dodecakis(hexyl)-2,7′;2′,7″,2″,7′″;2′″,7″″, 2″″,7′″″, 2′″″,7″″″-heptafluorene, 3,7-bis-(9,9-di-n-hexylfluoren-2-yl)-dibenzothiophene-S,S-dioxide, 3,7-Bis[7-(9,9-di-n-hexylfluoren-2-yl)]-9,9-di-n-hexylfluoren-2-yl]dibenzothiophene-S,S-dioxide, 2,7-Bis[7-(9,9-di-n-hexylfluoren-2-yl)dibenzothiophene-S,S-dioxide-3-yl]-9,9-di-n-hexylfluorene, lithium tetra(2-methyl-8-hydroxyquinolinato)boron, lithium tetra(8-hydroxy-quinolinato)boron, bis(8-hydroxyquinolinato)zinc, bis(2-methyl-8-hydroxy-quinolinato)zinc, tris(benzoylacetonato)mono-(phenanathroline)europium, tris(dibenzoylmethane)mono-(phenanthroline)europium(III), tris(dibenzoylmethane)-mono(5-aminophenanthroline)europium (III), Tris(dinaphtoylmethane)-mono(phenanthroline)europium (III), tris(dibiphenoylmethane)-mono(phenanthroline)europium (III), tris(dibenzoylmethane)-mono(4,7-diphenylphenanthroline)-europium (III), tris[di(4-(2-(2-ethoxyethoxy)ethoxy)benzoylmethane)]mono(phenanthro-line)europium (III), tris(2-phenylpyridine)iridium (III), tris(8-hydroxyquinolato)-aluminum (III), tris(8-hydroxyquinolato)gallium (III), platinum (III) [2(4,6-difluorophenyl)pyridinato-N,C2)-(acetyl-acetonate), iridium (III) bis(2-(4,6-difluorephenyl)pyridinato-N,C2), iridium (III) tris(2-(4-totyl)pyridinato-N,C2), iridium (III) bis(2-(2′-benzo-thienyl)pyridinatoN,C3′)(acetyl-acetonate), tris(1-phenylisoquinoline)iridium (III), bis(1-phenylisoquinoline)-(acetylacetonate)iridium (III), tris(2-(2,4-difluorophenyl)pyridine)iridium (III), iridium(III)bis(2-methyldibenzo-[f,h]quinoxaline)(acetylacetonate), bis(2-(9,9-dibutylfluorenyl)-1-isoquinoline(acetylacetonate), bis(2-(9,9-dihexylfluorenyl)-1-pyridine)(acetylacetonate)iridium(III), Tris(3-methyl-1-phenyl-4-trimethyl-acetyl-5-pyrazoline)terbium(III), dichlorotris(1,10-phenanthroline)ruthenium(II) and rubrene. - The charge transport layers (not shown) may be made of any suitable material such as, for example, N,N′-bis(3-methylphenyl)-N,N′-bis(phenyl)benzidine, N′N′-bis(4-methylphenyl)-N,N′-bis(phenyl)benzidine, N,N′-bis(2-naphtalenyl)-N-N′-bis(phenylbenzidine), 1,3,5-tris(3-methyldiphenyl-amino)benzene, N,N′-bis(1-naphtalenyl)-N-N′-bis(phenylbenzidine), 4,4′,4″-tris(N,N-phenyl-3-methylphenylamino)triphenylamine, 4,4′,N,N′-diphenylcarbazole, poly[(9,9-dihexylfluorenyl-2,7-diyl)-co-(N,N′bis{p-butylphenyl}-1,4-diamino-phenylene)], poly[9,9-dioctylfluorenyl-2,7-diyl)-co-(N,N′bis(4-butylphenyl-1,1′-bipheny-lene-4,4-diamine)], poly(N,N′-bis(4-butylphenyl)-N,N′-bis(phenyl)benzidine, 2-(4-biphenylyl)-5-phenyl-1,3,4-oxadiazole, 2-(4-tert-Butylphenyl)-5-(4-biphenylyl)-1,3,4-oxadiazole, 3,5-bis(4-tert-butylphenyl)-4-phenyl-4H-1,2,4-triazole, 3-(biphenyl-4-yl)-5-(4-tert-butylphenyl)-4-phenyl-4H-1,2,4-triazole, bathocuproine, bathophenanthroline, tris(8-hydroxyquinolato)-aluminum (III), poly(3,4-ethylenedioxythiophene)poly(styrenesulfonate), polyanyline, polyacetylene and polypyrrole.
-
Electroluminescent layer 153 may be made of, for example, ZnS, ZnSe, SrS,and GaN doped with rare earth or transition metal ions (ZnS:Mn, SrS:Cu, GaN:Er). The insulating layer (not shown) may be made of, for example, barium titanate, SiO2, Al2O3, poly(2,2,2-trifluoroethyl methacrylate), poly(2,2,3,3,3-pentafluoropropyl methacrylate), poly(1,1,1,3,3,3-hexafluoroisopropyl acrylate, poly(1,1,2,4,4,5,5,6,7,7-decafluoro-3-oxa-1,6-heptadiene), poly(2,2,2-trifluoroethyl acrylate), poly(2,2,3,3,3-pentafluoropropyl acrylate), poly(2,2,3,3,4,4,4-heptafluorobutyl acrylate), poly(2,2,3,3,4,4,4-heptafluorobutyl methacrylate), poly(2,2,3,3-tetrafluoropropyl methacrylate), poly(2,2,3,3-tetrafluoropropyl acrylate), poly(2,2,3,4,4,4-hexafluorobutyl acrylate), poly(2,2,3,4,4,4-hexafluorobutyl methacrylate), poly[4,5-difluoro-2,2-bis(trifluoromethyl)-1,3-dioxole-co-tetrafluoroethylene]dioxole, poly(1,1,1,3,3,3-hexafluoroisopropyl methacrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(1,1,1,3,3,3-hexafluoroisopropyl methacrylate), poly(1,1,1,3,3,3-hexafluoroisopropyl methacrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(2,2,2-trifluoroethyl methacrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(2,2,3,3,3-pentafluoropropyl methacrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(2,2,3,3,4,4,4-heptafluorobutyl methacrylate-co-glycidyl methacrylate glycidyl methacrylate, poly(2,2,3,3-tetrafluoropropyl methacrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(2,2,3,4,4,4,-hexafluorobutyl methacrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(2,2,3,3-tetrafluoropropyl methacrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(2,2,2-trifluoroethyl methacrylate), poly(2,2,2-trifluoroethyl methacrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(2,2,3,3,3-pentafluoropropyl methacrylate), poly(2,2,3,3,3-pentafluoropropyl methacrylate-co-glycidyl methacrylate), poly(2,2,3,3,4,4,4-heptafluorobutyl methacrylate), poly(2,2,3,3,4,4,4-heptafluorobutyl methacrylate-co-glycidyl methacrylate glycidyl methacrylate, poly(2,2,3,3-tetrafluoropropyl methacrylate), poly(2,2,3,3-tetrafluoropropyl methacrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(2,2,3,4,4,4-hexafluorobutyl methacrylate), poly(2,2,3,4,4,4,-hexafluorobutyl methacrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(pentafluorostyrene), poly(pentafluorostyrene-co-glycidyl methacrylate)glycidyl methacrylate, poly(tert-butyl methacrylate-co-glycidyl methacrylate)glycidyl methacrylate, poly(methyl methacrylate), polycarbonate, cyclo olefin copolymers (COCs), or sol-gel materials. - Suitable substrates for the organic devices are glass, polymer, especially polymeric foil, paper or metal. Flexible substrates are well suited for roll-to-roll processes. The substrate can be for example a flexible polymer foil like acrylonitrile butadiene styrene ABS, polycarbonate PC, polyethylene PE, polyetherimide PEI, polyetherketone PEK, poly(ethylene naphthalate) PEN, poly(ethylene therephtalate) PET, polyimide PI, poly(methyl methacrylate) PMMA, poly-oxy-methylene POM, mono oriented polypropylene MOPP, polystyrene PS, polyvinyl chloride PVC and the like. Other materials like paper (weight per area 20-500 g/m2, preferably 40-200 g/m2), metal foil, (for example Al—, Au—, Cu—, Fe—, Ni—, Sn—, steel-foil etc., especially surface modified, coated with a lacquer or polymer, are suitable too. The substrate can be coated with a barrier layer or a barrier layer stack to increase the barrier properties (J. Lange and Y. Wyser, “Recent Innovations in Barrier Technologies for Plastic Packaging—a Review”, Packag. Technol. and Sci. 16, 2003, p. 149-158). E.g. inorganic materials like SiO2, Si3N4, SiOxNy, Al2O3, AlOxNy and the like are often used. They can be deposited e.g. in vacuum processes like evaporation, sputtering or chemical vapour deposition CVD, especially plasma enhanced CVD (PECVD). Other suitable materials are mixtures of organic and inorganic materials deposited in a sol-gel process. Such materials can even be deposited in a wet coating process like e.g. gravure printing. Barrier properties are obtained by multilayer coatings of organic and inorganic materials as described in WO03/094256A2. In the following the term substrate shells denote substrates with and without barrier coatings.
- It will be appreciated by persons skilled in the art that the disclosed technique is not limited to what has been particularly shown and described hereinabove.
Claims (14)
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US8503073B2 (en) | 2013-08-06 |
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