US20080017966A1 - Pillar Bump Package Technology - Google Patents
Pillar Bump Package Technology Download PDFInfo
- Publication number
- US20080017966A1 US20080017966A1 US11/696,172 US69617207A US2008017966A1 US 20080017966 A1 US20080017966 A1 US 20080017966A1 US 69617207 A US69617207 A US 69617207A US 2008017966 A1 US2008017966 A1 US 2008017966A1
- Authority
- US
- United States
- Prior art keywords
- die
- semiconductor die
- leadframe
- bump
- pillar bump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000005516 engineering process Methods 0.000 title description 3
- 239000004065 semiconductor Substances 0.000 claims abstract description 45
- 238000000034 method Methods 0.000 claims description 33
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 229910000679 solder Inorganic materials 0.000 abstract description 4
- 238000004806 packaging method and process Methods 0.000 abstract description 3
- 239000004033 plastic Substances 0.000 abstract description 3
- 239000011810 insulating material Substances 0.000 abstract 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 239000000872 buffer Substances 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000004020 conductor Substances 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002991 molded plastic Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49575—Assemblies of semiconductor devices on lead frames
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49503—Lead-frames or other flat leads characterised by the die pad
- H01L23/4951—Chip-on-leads or leads-on-chip techniques, i.e. inner lead fingers being used as die pad
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16245—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48464—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area also being a ball bond, i.e. ball-to-ball
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01015—Phosphorus [P]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01047—Silver [Ag]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1203—Rectifying Diode
- H01L2924/12032—Schottky diode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13063—Metal-Semiconductor Field-Effect Transistor [MESFET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Definitions
- U.S. patent application Ser. No. 11/381,292 discloses a package technology for semiconductor products that reduces electrical parasitics.
- the package technology provides an interconnection method referred to as “bump-on-leadframe” or BOL.
- a typical implementation of a semiconductor product that uses the BOL method includes a leadframe and a die both included in a plastic package.
- the BOL method uses “bumps” made out of silver or other conducting material to interconnect the leadframe and die.
- the leadframe consists of a series of leads that project from one or more sides of the package. Inside the package, each lead extends to overlap some portion of the die. A bump or ball, made of a conductive material such as silver, is positioned between each lead and the die in the region of overlap.
- the bumps perform several different functions, including: 1) they form the electrical connection between the leads and the die, 2) they support the die during packaging, and 3) they conduct heat away from the die.
- the die is positioned below the leads. In other words, this means that the leads extend over or above the die to create the required regions of overlap. Alternately, the die may be position above the leads with the leads extending under the die. This flexibility also means that two separate die may be included: one above and one below the leadframe.
- one or more leads may be electrically isolated from the die.
- BOL is typically accomplished by omitting the bump between those leads and the die.
- the die may be fabricated to be non-conducting at the relevant locations.
- the BOL method may be used in combination with traditional interconnection methods such as wire bonding. In some cases, this means that a single die may be attached to the leadframe using a combination of wire bonds and bumps. In other cases, where a single package includes multiple dice, some die may be connected using bumps while others are connected using traditional techniques such as wire bonds.
- the current invention provides an interconnection method referred to as “pillar bump-on-leadframe” or PBOL.
- a typical implementation of a semiconductor product that uses the PBOL method includes a leadframe and a die both included in a plastic package.
- the PBOL method uses “pillar bumps” to interconnect the leadframe and die.
- Each pillar bump has a cylindrical (or substantially cylindrical) base section. On one end of the base section, a solder bump or ball is attached.
- the leadframe consists of a series of leads that project from one or more sides of the package. Inside the package, each lead extends to overlap some portion of the die. A pillar bump is positioned between each lead and the die in the region of overlap. The base section of each pillar bump is connected to the die and the pillar bump portion is in contact with one of the leads.
- the pillar bumps perform several different functions, including: 1) they form the electrical connection between the leads and the die, 2) they support the die during packaging, and 3) they conduct heat away from the die.
- the die is positioned below the leads. In other words, this means that the leads extend over or above the die to create the required regions of overlap. Alternately, the die may be position above the leads with the leads extending under the die. This flexibility also means that two separate die may be included: one above and one below the leadframe.
- one or more leads may be electrically isolated from the die.
- PBOL PBOL
- the die may be fabricated to be non-conducting at the relevant locations.
- the PBOL method may be used in combination with traditional interconnection methods such as wire bonding. In some cases, this means that a single die may be attached to the leadframe using a combination of wire bonds and pillar bumps. In other cases, where a single package includes multiple dice, some die may be connected using pillar bumps while others are connected using traditional techniques such as wire bonds.
- the PBOL technique may be used to produce a range of innovative single die and multi-die semiconductor products.
- One example is a two die implementation of a synchronous Buck converter.
- a silicon controller IC is included as a first die and a silicon MOSFET push-pull power stage is included as a second die.
- the power stage includes a high-side power MOSFET, which may be a P-channel or N-channel device, and a low-side N-channel MOSFET.
- the controller IC includes appropriate buffers to drive the high and low-side switches.
- the buffers are driven, in turn by a PFM/PFM control circuit and a break-before-make (BBM) circuit.
- BBM break-before-make
- the Buck converter just described replaces the silicon MOSFET die with a MESFET based power stage.
- the MESFET power stage includes a high-side switch and a low-side switch both implemented as enhancement mode N-channel MESFET devices.
- the high-side switch is necessarily an N-channel device (P-channel MESFET devices are difficult to manufacture and are not commercially available)
- its gate buffer must “float” with respect to the output voltage Vx. For this reason, an additional connection between the two die is required so that the voltage Vx may be utilized as the ground voltage for the gate buffer of the high-side switch.
- the disadvantage of an extra connection may be outweighed by the higher frequency switching possible using MESFETs when compared to traditional silicon devices.
- a second variation on the silicon Buck converter repartitions the two dice so that the PFM/PFM control is included in a first die and all other functions (including the BBM circuit, gate drive buffers, high and low-side switches) are included in a second die.
- Integrating the BBM circuit and gate drivers monolithically facilitates circuit methods to cancel the adverse impact of threshold variation in controlling the timing of the break-before-make interval. In other words, a shorter BBM time can be employed without risk of shoot-through.
- Only three interconnections are required to interconnect the two dice, namely V batt , ground and the input to the BBM circuit. In this partitioning, no power parasitics are present.
- the monolithic construction of the switches, buffers and PFM/PWM circuit makes the use of non-silicon implementations (such as MESFET) problematic.
- a boost converter that includes a control die and a separate die for a discrete Schottky diode rectifier.
- the control die includes a PWM/PFM control circuit, gate buffers as well as high and low-side switches.
- the two dice require four interconnections for V batt , ground, feedback V FB , and output V x .
- the buck and boost converters just described partition their functions between two dice.
- the two dice share a number of interconnections, some of which are also connected to external components.
- both dice are connected to the battery voltage V batt and ground.
- both dice share a connection for the output voltage Vx.
- these converters are advantageously implemented in a configuration that places one die above and one die below the leadframe.
- the two dice are configures so that common interconnections (e.g., V BATT , V x . and ground) may be bump connected to the same lead.
- Implementations that combine PBOL connected dice with wire bond connected dice can also be used to produce a range of novel semiconductor products.
- a vertical power MOSFET device and a parallel Schottky diode are combined in a single package.
- the MOSFET is attached using wire bonding techniques and the Schottky is bumped attached to the same leads.
- a complementary half-bridge for use in synchronous Buck converters may be produced.
- the two MOSFETS are connected in series using wire bonds to the leadframe.
- the Schottky is pillar bump connected to the leadframe in parallel with the N-channel device.
- the PBOL method may also be used to produce a novel protection circuit for one-cell lithium ion batteries implemented as two separate dice.
- Each dice includes an overcharge protection (OCP) trench powered MOSFET and an over discharge protection (ODCP) trench powered MOSFET.
- OCP overcharge protection
- ODCP over discharge protection
- the two MOSFETS in each dice are connected in series—drain to drain.
- the two dice are positioned in the same package with one above and one below the leadframe.
- the PBOL method is used to connect to the two dice in parallel with the two OCP MOSFETS (one in each die) connected source to source and gate to gate and the two two ODCP MOSFETS (one in each die) connected source to source and gate to gate.
- the use of two die and therefore, two OCP MOSFETS and two ODCP MOSFETS) means that the overall resistance of the safety switch is reduced in comparison with traditional single die implementations.
- FIG. 1A is a cross-section of a PBOL (Pillar Bump-On-Leadframe) semiconductor product.
- PBOL Planar Bump-On-Leadframe
- FIG. 1B is a detailed view of a pillar bump connecting a leadframe and semiconductor.
- FIG. 2 is another detailed view of a pillar bump connecting a leadframe and semiconductor.
- FIG. 3 is a cross-section of a stacked PBOL semiconductor product.
- FIG. 4 is a cross-section of a combination PBOL and wirebond semiconductor product.
- FIG. 5 is a cross-section of a gullwing PBOL (Pillar Bump-On-Leadframe) semiconductor product.
- FIG. 6 is a cross-section of a flatpack PBOL (Pillar Bump-On-Leadframe) semiconductor product.
- PBOL Planar Bump-On-Leadframe
- a representative semiconductor product 100 that uses this method includes an injection molded plastic package 102 that surrounds leads 104 A and 104 B, a semiconductor dice 106 and conducting pillar bumps 108 A and 108 B.
- the pillar bumps serve both as the mechanical support for the die during assembly and as an electrical connection to the die, and therefore should ideally exhibit low thermal and electrical resistance.
- the conductive pillar bump includes a substantially cylindrical base which may or may not be tapered and is typically made from a conductive material such as copper.
- the base section is connected to the surface of the semiconductor dice.
- the second end of the base i.e., the end not connected to the dice) is a soft metal ball or cap typically made of solder.
- each pillar bump is typically on the order of 140 microns in width (dimension A) and 100 microns in height (dimension B).
- the base portion is typically 60 microns in height (dimension C) and the bump portion is 35 microns high.
- Adjacent pillar bumps are spaced 300 microns or more apart (dimension D).
- each of the preceding dimensions is intended to be representative in nature and other values may be used for differing implementations.
- the pillar bump interconnection method may be used for a wide range of differing semiconductor products.
- the pillar bump method is used for an implementation where the leads extend over the semiconductor dice. It is equally practical to produce products in which the dice extends over the leads. Alternately, as shown in FIG. 3 , two dice may be used—one under and one over the leads.
- FIG. 4 shows another variation that also includes two dice. In this case, however one device is connected using pillar bumps and the other is connected using traditional wire bonds. It may be appreciated that the two dice in FIG. 4 may be repositioned with the wirebonded dice on top and the pillar bump attached dice underneath.
- FIGS. 5 and 6 show semiconductor products that use the pillar bump method for interconnection.
- a gullwing package is shown and in FIG. 6 a flat package is shown.
- single or multiple dice may be used with pillar bump interconnection or any combination of pillar bump and wire bond interconnections.
- the pillar bump method offers the following advantages:
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Lead Frames For Integrated Circuits (AREA)
Abstract
Description
- U.S. patent application Ser. No. 11/381,292 (incorporated in this document by reference) discloses a package technology for semiconductor products that reduces electrical parasitics. The package technology provides an interconnection method referred to as “bump-on-leadframe” or BOL. A typical implementation of a semiconductor product that uses the BOL method includes a leadframe and a die both included in a plastic package. Unlike prior art, where wires are used to interconnect the leadframe and die, the BOL method uses “bumps” made out of silver or other conducting material to interconnect the leadframe and die.
- In its simplest form, the leadframe consists of a series of leads that project from one or more sides of the package. Inside the package, each lead extends to overlap some portion of the die. A bump or ball, made of a conductive material such as silver, is positioned between each lead and the die in the region of overlap. The bumps perform several different functions, including: 1) they form the electrical connection between the leads and the die, 2) they support the die during packaging, and 3) they conduct heat away from the die.
- In a typical implementation, the die is positioned below the leads. In other words, this means that the leads extend over or above the die to create the required regions of overlap. Alternately, the die may be position above the leads with the leads extending under the die. This flexibility also means that two separate die may be included: one above and one below the leadframe.
- In some implementations, it may be desirable or necessary for one or more leads to be electrically isolated from the die. When BOL is used, this is typically accomplished by omitting the bump between those leads and the die. Alternately, the die may be fabricated to be non-conducting at the relevant locations.
- The BOL method may be used in combination with traditional interconnection methods such as wire bonding. In some cases, this means that a single die may be attached to the leadframe using a combination of wire bonds and bumps. In other cases, where a single package includes multiple dice, some die may be connected using bumps while others are connected using traditional techniques such as wire bonds.
- To alleviate the deficiencies of conventional bond wire packages, the current invention provides an interconnection method referred to as “pillar bump-on-leadframe” or PBOL. A typical implementation of a semiconductor product that uses the PBOL method includes a leadframe and a die both included in a plastic package. Unlike prior art, where wires are used to interconnect the leadframe and die, the PBOL method uses “pillar bumps” to interconnect the leadframe and die. Each pillar bump has a cylindrical (or substantially cylindrical) base section. On one end of the base section, a solder bump or ball is attached.
- In its simplest form, the leadframe consists of a series of leads that project from one or more sides of the package. Inside the package, each lead extends to overlap some portion of the die. A pillar bump is positioned between each lead and the die in the region of overlap. The base section of each pillar bump is connected to the die and the pillar bump portion is in contact with one of the leads.
- The pillar bumps perform several different functions, including: 1) they form the electrical connection between the leads and the die, 2) they support the die during packaging, and 3) they conduct heat away from the die.
- In a typical implementation, the die is positioned below the leads. In other words, this means that the leads extend over or above the die to create the required regions of overlap. Alternately, the die may be position above the leads with the leads extending under the die. This flexibility also means that two separate die may be included: one above and one below the leadframe.
- In some implementations, it may be desirable or necessary for one or more leads to be electrically isolated from the die. When PBOL is used, this is typically accomplished by omitting the pillar bump between those leads and the die. Alternately, the die may be fabricated to be non-conducting at the relevant locations.
- The PBOL method may be used in combination with traditional interconnection methods such as wire bonding. In some cases, this means that a single die may be attached to the leadframe using a combination of wire bonds and pillar bumps. In other cases, where a single package includes multiple dice, some die may be connected using pillar bumps while others are connected using traditional techniques such as wire bonds.
- The PBOL technique may be used to produce a range of innovative single die and multi-die semiconductor products. One example is a two die implementation of a synchronous Buck converter. For this implementation, a silicon controller IC is included as a first die and a silicon MOSFET push-pull power stage is included as a second die. The power stage includes a high-side power MOSFET, which may be a P-channel or N-channel device, and a low-side N-channel MOSFET. The controller IC includes appropriate buffers to drive the high and low-side switches. The buffers are driven, in turn by a PFM/PFM control circuit and a break-before-make (BBM) circuit.
- One possible variation of the Buck converter just described replaces the silicon MOSFET die with a MESFET based power stage. The MESFET power stage includes a high-side switch and a low-side switch both implemented as enhancement mode N-channel MESFET devices. Because the high-side switch is necessarily an N-channel device (P-channel MESFET devices are difficult to manufacture and are not commercially available), its gate buffer must “float” with respect to the output voltage Vx. For this reason, an additional connection between the two die is required so that the voltage Vx may be utilized as the ground voltage for the gate buffer of the high-side switch. The disadvantage of an extra connection may be outweighed by the higher frequency switching possible using MESFETs when compared to traditional silicon devices.
- A second variation on the silicon Buck converter repartitions the two dice so that the PFM/PFM control is included in a first die and all other functions (including the BBM circuit, gate drive buffers, high and low-side switches) are included in a second die. Integrating the BBM circuit and gate drivers monolithically facilitates circuit methods to cancel the adverse impact of threshold variation in controlling the timing of the break-before-make interval. In other words, a shorter BBM time can be employed without risk of shoot-through. Only three interconnections are required to interconnect the two dice, namely Vbatt, ground and the input to the BBM circuit. In this partitioning, no power parasitics are present. The monolithic construction of the switches, buffers and PFM/PWM circuit makes the use of non-silicon implementations (such as MESFET) problematic.
- Another example of an innovative multi-die semiconductor product that uses the PBOL technique is a boost converter that includes a control die and a separate die for a discrete Schottky diode rectifier. The control die includes a PWM/PFM control circuit, gate buffers as well as high and low-side switches. The two dice require four interconnections for Vbatt, ground, feedback VFB, and output Vx.
- The buck and boost converters just described partition their functions between two dice. The two dice share a number of interconnections, some of which are also connected to external components. For example, in each of the examples, both dice are connected to the battery voltage Vbatt and ground. In several implementations, both dice share a connection for the output voltage Vx. When the PBOL method is used, these converters are advantageously implemented in a configuration that places one die above and one die below the leadframe. The two dice are configures so that common interconnections (e.g., VBATT, Vx. and ground) may be bump connected to the same lead.
- Implementations that combine PBOL connected dice with wire bond connected dice can also be used to produce a range of novel semiconductor products. For one such example, a vertical power MOSFET device and a parallel Schottky diode are combined in a single package. The MOSFET is attached using wire bonding techniques and the Schottky is bumped attached to the same leads. Similarly, by combining an N-channel MOSFET, P-channel MOSFET and Schottky diode, in a single package, a complementary half-bridge for use in synchronous Buck converters may be produced. In this particular implementation, the two MOSFETS are connected in series using wire bonds to the leadframe. The Schottky is pillar bump connected to the leadframe in parallel with the N-channel device.
- The PBOL method may also be used to produce a novel protection circuit for one-cell lithium ion batteries implemented as two separate dice. Each dice includes an overcharge protection (OCP) trench powered MOSFET and an over discharge protection (ODCP) trench powered MOSFET. The two MOSFETS in each dice are connected in series—drain to drain. The two dice are positioned in the same package with one above and one below the leadframe. The PBOL method is used to connect to the two dice in parallel with the two OCP MOSFETS (one in each die) connected source to source and gate to gate and the two two ODCP MOSFETS (one in each die) connected source to source and gate to gate. The use of two die (and therefore, two OCP MOSFETS and two ODCP MOSFETS) means that the overall resistance of the safety switch is reduced in comparison with traditional single die implementations.
-
FIG. 1A is a cross-section of a PBOL (Pillar Bump-On-Leadframe) semiconductor product. -
FIG. 1B is a detailed view of a pillar bump connecting a leadframe and semiconductor. -
FIG. 2 is another detailed view of a pillar bump connecting a leadframe and semiconductor. -
FIG. 3 is a cross-section of a stacked PBOL semiconductor product. -
FIG. 4 is a cross-section of a combination PBOL and wirebond semiconductor product. -
FIG. 5 is a cross-section of a gullwing PBOL (Pillar Bump-On-Leadframe) semiconductor product. -
FIG. 6 is a cross-section of a flatpack PBOL (Pillar Bump-On-Leadframe) semiconductor product. - This document discloses a method for interconnecting semiconductor products to their leadframes using pillar bumps. As shown in
FIG. 1A , arepresentative semiconductor product 100 that uses this method includes an injection moldedplastic package 102 that surrounds leads 104A and 104B, asemiconductor dice 106 and conducting pillar bumps 108A and 108B. The pillar bumps serve both as the mechanical support for the die during assembly and as an electrical connection to the die, and therefore should ideally exhibit low thermal and electrical resistance. In a preferred embodiment shown more clearly inFIG. 1B , the conductive pillar bump includes a substantially cylindrical base which may or may not be tapered and is typically made from a conductive material such as copper. The base section is connected to the surface of the semiconductor dice. The second end of the base (i.e., the end not connected to the dice) is a soft metal ball or cap typically made of solder. - As shown in
FIG. 2 , each pillar bump is typically on the order of 140 microns in width (dimension A) and 100 microns in height (dimension B). The base portion is typically 60 microns in height (dimension C) and the bump portion is 35 microns high. Adjacent pillar bumps are spaced 300 microns or more apart (dimension D). Of course, each of the preceding dimensions is intended to be representative in nature and other values may be used for differing implementations. - The pillar bump interconnection method may be used for a wide range of differing semiconductor products. In
FIG. 1 , the pillar bump method is used for an implementation where the leads extend over the semiconductor dice. It is equally practical to produce products in which the dice extends over the leads. Alternately, as shown inFIG. 3 , two dice may be used—one under and one over the leads. -
FIG. 4 shows another variation that also includes two dice. In this case, however one device is connected using pillar bumps and the other is connected using traditional wire bonds. It may be appreciated that the two dice inFIG. 4 may be repositioned with the wirebonded dice on top and the pillar bump attached dice underneath. -
FIGS. 5 and 6 show semiconductor products that use the pillar bump method for interconnection. InFIG. 5 , a gullwing package is shown and inFIG. 6 a flat package is shown. In each case, single or multiple dice may be used with pillar bump interconnection or any combination of pillar bump and wire bond interconnections. - Compared to the bump on leadframe method, the pillar bump method offers the following advantages:
-
- 1) Copper pillar has fine pitch capability of 80 um and below;
- 2) Bump height control or coplanarity is better (or more accurate).
- 3) Copper pillar allows easier flow of mold compound (or underfill) between bumps, minimizing molding voids in molded packages.
- 4) Copper has better thermal resistance than Solder—better heat dissipation.
- 5) Copper pillar can make pillar bar (i.e. elongated bump) to reduce contact resistance for both thermal and electrical performance.
- 6) Copper pillar bump can have less current crowding, reduced local Joule heating, longer bump life (better reliability), and increase current density/capability.
- 7) Copper does not have Tin (Solder) whisker reliability issue.
- In general, it should be appreciated that the present invention is specifically intended to cover the specific embodiments shown in the accompanying figures. In addition, the present invention specifically includes modification of all of the embodiments shown in U.S. patent application Ser. No. 11/381,292 to replace the disclosed bump on leadframe with the pillar bump on leadframe method of the present invention.
Claims (13)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/696,172 US20080017966A1 (en) | 2006-05-02 | 2007-04-03 | Pillar Bump Package Technology |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US38129206A | 2006-05-02 | 2006-05-02 | |
US11/696,172 US20080017966A1 (en) | 2006-05-02 | 2007-04-03 | Pillar Bump Package Technology |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US38129206A Continuation-In-Part | 2006-05-02 | 2006-05-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
US20080017966A1 true US20080017966A1 (en) | 2008-01-24 |
Family
ID=38970658
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/696,172 Abandoned US20080017966A1 (en) | 2006-05-02 | 2007-04-03 | Pillar Bump Package Technology |
Country Status (1)
Country | Link |
---|---|
US (1) | US20080017966A1 (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080136003A1 (en) * | 2006-12-07 | 2008-06-12 | Stats Chippac, Inc. | Multi-layer semiconductor package |
US20090189678A1 (en) * | 2006-08-30 | 2009-07-30 | Neill Thornton | High temperature operating package and circuit design |
US20110000224A1 (en) * | 2008-03-19 | 2011-01-06 | Uttam Ghoshal | Metal-core thermoelectric cooling and power generation device |
US8669139B1 (en) * | 2007-08-29 | 2014-03-11 | Marvell International Ltd. | Leadless multi-chip module structure |
US9922945B2 (en) | 2012-06-15 | 2018-03-20 | Stmicroelectronics S.R.L. | Methods, circuits and systems for a package structure having wireless lateral connections |
US20220246489A1 (en) * | 2020-03-20 | 2022-08-04 | Texas Instruments Incorporated | Semiconductor device package with reduced stress |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5917242A (en) * | 1996-05-20 | 1999-06-29 | Micron Technology, Inc. | Combination of semiconductor interconnect |
US20040104456A1 (en) * | 2002-11-12 | 2004-06-03 | Duffy Thomas P. | Methods and apparatus for reducing parasitic inductance using inter-digitated bond, wires |
US20070131938A1 (en) * | 2005-11-29 | 2007-06-14 | Advanced Analogic Technologies, Inc. | Merged and Isolated Power MESFET Devices |
-
2007
- 2007-04-03 US US11/696,172 patent/US20080017966A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5917242A (en) * | 1996-05-20 | 1999-06-29 | Micron Technology, Inc. | Combination of semiconductor interconnect |
US20040104456A1 (en) * | 2002-11-12 | 2004-06-03 | Duffy Thomas P. | Methods and apparatus for reducing parasitic inductance using inter-digitated bond, wires |
US20070131938A1 (en) * | 2005-11-29 | 2007-06-14 | Advanced Analogic Technologies, Inc. | Merged and Isolated Power MESFET Devices |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8030764B2 (en) * | 2006-08-30 | 2011-10-04 | Fairchild Semiconductor Corporation | High temperature operating package and circuit design |
US20090189678A1 (en) * | 2006-08-30 | 2009-07-30 | Neill Thornton | High temperature operating package and circuit design |
US8803239B2 (en) | 2006-08-30 | 2014-08-12 | Fairchild Semiconductor Corporation | High temperature operating package and circuit design |
US20100007002A1 (en) * | 2006-12-07 | 2010-01-14 | Pendse Rajendra D | Multi-layer semiconductor package |
US7994626B2 (en) | 2006-12-07 | 2011-08-09 | Stats Chippac, Inc. | Multi-layer semiconductor package with vertical connectors and method of manufacture thereof |
US20080136003A1 (en) * | 2006-12-07 | 2008-06-12 | Stats Chippac, Inc. | Multi-layer semiconductor package |
US7608921B2 (en) * | 2006-12-07 | 2009-10-27 | Stats Chippac, Inc. | Multi-layer semiconductor package |
US8669139B1 (en) * | 2007-08-29 | 2014-03-11 | Marvell International Ltd. | Leadless multi-chip module structure |
US8912664B1 (en) * | 2007-08-29 | 2014-12-16 | Marvell International Ltd. | Leadless multi-chip module structure |
US20110000224A1 (en) * | 2008-03-19 | 2011-01-06 | Uttam Ghoshal | Metal-core thermoelectric cooling and power generation device |
US9922945B2 (en) | 2012-06-15 | 2018-03-20 | Stmicroelectronics S.R.L. | Methods, circuits and systems for a package structure having wireless lateral connections |
US10497655B2 (en) | 2012-06-15 | 2019-12-03 | Stmicroelectronics S.R.L. | Methods, circuits and systems for a package structure having wireless lateral connections |
US20220246489A1 (en) * | 2020-03-20 | 2022-08-04 | Texas Instruments Incorporated | Semiconductor device package with reduced stress |
US12119280B2 (en) * | 2020-03-20 | 2024-10-15 | Texas Instruments Incorporated | Semiconductor device package with reduced stress |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10204899B2 (en) | Semiconductor device with first and second chips and connections thereof and a manufacturing method of the same | |
US8344459B2 (en) | Semiconductor device | |
US8345458B2 (en) | Semiconductor device | |
CN100495702C (en) | Stacked Dual Metal Oxide Semiconductor Field Effect Transistor Package | |
USRE41719E1 (en) | Power MOSFET with integrated drivers in a common package | |
US8497574B2 (en) | High power semiconductor package with conductive clips and flip chip driver IC | |
US7227198B2 (en) | Half-bridge package | |
US8742490B2 (en) | Vertical power transistor die packages and associated methods of manufacturing | |
US7095099B2 (en) | Low profile package having multiple die | |
US20080017966A1 (en) | Pillar Bump Package Technology | |
US9754862B2 (en) | Compound semiconductor device including a multilevel carrier |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: ADVANCED ANALOGIC TECHNOLOGIES, CALIFORNIA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:WILLIAMS, RICHARD K.;REEL/FRAME:020527/0218 Effective date: 20080219 |
|
AS | Assignment |
Owner name: ADVANCED ANALOGIC TECHNOLOGIES, CALIFORNIA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:LAM, ALLEN;REEL/FRAME:020547/0268 Effective date: 20080221 |
|
AS | Assignment |
Owner name: ADVANCED ANALOGIC TECHNOLOGIES, CALIFORNIA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:LIN, KENG HUNG;REEL/FRAME:020568/0034 Effective date: 20080227 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |