US20070151416A1 - Thermal interface material and semiconductor device incorporating the same - Google Patents
Thermal interface material and semiconductor device incorporating the same Download PDFInfo
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- US20070151416A1 US20070151416A1 US11/309,463 US30946306A US2007151416A1 US 20070151416 A1 US20070151416 A1 US 20070151416A1 US 30946306 A US30946306 A US 30946306A US 2007151416 A1 US2007151416 A1 US 2007151416A1
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- Prior art keywords
- thermal interface
- interface material
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- heat
- weight
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- 239000000463 material Substances 0.000 title claims abstract description 45
- 239000004065 semiconductor Substances 0.000 title claims abstract description 7
- 125000003342 alkenyl group Chemical group 0.000 claims abstract description 13
- 229920001296 polysiloxane Polymers 0.000 claims abstract description 13
- 239000000945 filler Substances 0.000 claims abstract description 10
- 239000002245 particle Substances 0.000 claims abstract description 10
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims abstract description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 7
- 150000001875 compounds Chemical class 0.000 claims abstract description 5
- 239000002199 base oil Substances 0.000 claims description 20
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 12
- 239000000126 substance Substances 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 7
- 239000003054 catalyst Substances 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 6
- 229940045985 antineoplastic platinum compound Drugs 0.000 claims description 4
- 150000003058 platinum compounds Chemical class 0.000 claims description 4
- 239000002253 acid Substances 0.000 claims description 2
- 230000017525 heat dissipation Effects 0.000 description 5
- -1 2-phenylpropyl Chemical group 0.000 description 3
- 239000003570 air Substances 0.000 description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 3
- UPWOTATYTJQYSI-UHFFFAOYSA-N C.C.C=C[Si](C)(O[Si](C)(C)C)O[Si](C)(C)C Chemical compound C.C.C=C[Si](C)(O[Si](C)(C)C)O[Si](C)(C)C UPWOTATYTJQYSI-UHFFFAOYSA-N 0.000 description 2
- CNADZBRHWQJAHI-UHFFFAOYSA-N C.[H][Si]1(C)O[Si]([H])(C)O[Si](C)(CC(C)C(=O)OCCC[SiH2]C)O[Si]([H])(C)O1.[H][Si]1(C)O[Si]([H])(C)O[Si](C)(CCC2CCC3OC3C2)O[Si]([H])(C)O1.[H][Si]1(C)O[Si]([H])(C)O[Si](C)(CCCOCC2CO2)O[Si]([H])(C)O1 Chemical compound C.[H][Si]1(C)O[Si]([H])(C)O[Si](C)(CC(C)C(=O)OCCC[SiH2]C)O[Si]([H])(C)O1.[H][Si]1(C)O[Si]([H])(C)O[Si](C)(CCC2CCC3OC3C2)O[Si]([H])(C)O1.[H][Si]1(C)O[Si]([H])(C)O[Si](C)(CCCOCC2CO2)O[Si]([H])(C)O1 CNADZBRHWQJAHI-UHFFFAOYSA-N 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 125000004973 1-butenyl group Chemical group C(=CCC)* 0.000 description 1
- 125000006039 1-hexenyl group Chemical group 0.000 description 1
- 125000001731 2-cyanoethyl group Chemical group [H]C([H])(*)C([H])([H])C#N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- LPHSKPJDAPUFHG-UHFFFAOYSA-N C.C#[SiH].C#[Si]C=C.C#[Si]CC[SiH3].[Pt] Chemical compound C.C#[SiH].C#[Si]C=C.C#[Si]CC[SiH3].[Pt] LPHSKPJDAPUFHG-UHFFFAOYSA-N 0.000 description 1
- CDKORUOSPOCBCQ-UHFFFAOYSA-N C.COOC.[H][Si]1(C)O[Si]([H])(C)O[Si](C)(CC(C)C(=O)OCCC[SiH2]OC)O[Si]([H])(C)O1.[H][Si]1(C)O[Si]([H])(C)O[Si](C)(CCC2CCC3OC3C2)O[Si]([H])(C)O1.[H][Si]1(C)O[Si]([H])(C)O[Si](C)(CCCOCC2CO2)O[Si]([H])(C)O1 Chemical compound C.COOC.[H][Si]1(C)O[Si]([H])(C)O[Si](C)(CC(C)C(=O)OCCC[SiH2]OC)O[Si]([H])(C)O1.[H][Si]1(C)O[Si]([H])(C)O[Si](C)(CCC2CCC3OC3C2)O[Si]([H])(C)O1.[H][Si]1(C)O[Si]([H])(C)O[Si](C)(CCCOCC2CO2)O[Si]([H])(C)O1 CDKORUOSPOCBCQ-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- SNRUBQQJIBEYMU-UHFFFAOYSA-N Dodecane Natural products CCCCCCCCCCCC SNRUBQQJIBEYMU-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- JFYVSVZSPWHVHN-UHFFFAOYSA-N [H][Si](C)(O[Si](C)(C)C)O[Si](C)(C)O[Si](C)(C)C Chemical compound [H][Si](C)(O[Si](C)(C)C)O[Si](C)(C)O[Si](C)(C)C JFYVSVZSPWHVHN-UHFFFAOYSA-N 0.000 description 1
- 238000007259 addition reaction Methods 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 125000003710 aryl alkyl group Chemical group 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 125000005998 bromoethyl group Chemical group 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 125000004218 chloromethyl group Chemical group [H]C([H])(Cl)* 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- 125000000596 cyclohexenyl group Chemical group C1(=CCCCC1)* 0.000 description 1
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001183 hydrocarbyl group Chemical group 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- 125000000555 isopropenyl group Chemical group [H]\C([H])=C(\*)C([H])([H])[H] 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 230000005923 long-lasting effect Effects 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 125000001624 naphthyl group Chemical group 0.000 description 1
- 125000001971 neopentyl group Chemical group [H]C([*])([H])C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000004365 octenyl group Chemical group C(=CCCCCCC)* 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- 125000000286 phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000004368 propenyl group Chemical group C(=CC)* 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 125000003944 tolyl group Chemical group 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 125000005023 xylyl group Chemical group 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3737—Organic materials with or without a thermoconductive filler
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/10—Metallic powder containing lubricating or binding agents; Metallic powder containing organic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
Definitions
- the present invention relates to a thermal interface material which is interposable between a heat-generating electronic component and a heat dissipating component, and it also relates to a semiconductor device using the thermal interface material.
- a heat dissipating apparatus such as a heat sink or a heat spreader is attached to a surface of the electronic component, so that the heat is transferred from the electronic component to ambient air via the heat dissipating apparatus.
- the contact surfaces between the heat dissipating apparatus and the electronic component are rough and therefore are separated from each other by a layer of interstitial air no mater how precisely the heat dissipating apparatus and the electronic component are brought into contact.
- the contact resistance is relatively high.
- a thermal interface material may be applied to the contact surfaces to eliminate the air interstices between the heat dissipating apparatus and the electronic component in order to improve heat dissipation.
- the thermal interface material includes base oil and fillers filled in the base oil.
- the base oil is used for filling the air interstices to create an intimate contact between the heat dissipating apparatus and the electronic component, whilst the fillers are used for improving the thermal conductivity of the thermal interface material to thereby increase the heat dissipation efficiency of the heat dissipating apparatus.
- the base oil may bleed from the thermal interface material when exposed to heat for a long period of time.
- the thermal interface material therefore tends to gradually harden, finally losing flexibility so that it peels off from the contact surfaces between the heat dissipating apparatus and the electronic component. This results in the thermal interface material undesirably increasing its thermal resistance and the heat dissipating apparatus accordingly decreasing its heat dissipation efficiency over time.
- the operational temperatures of the electronic components are undesirably increased, which leads to deterioration in their performance. Therefore, a thermal interface material, which can prevent the base oil from bleeding, is needed.
- the present invention relates, in one respect, to a thermal interface material for electronic products, and in another respect, to a semiconductor device using the thermal interface material.
- the semiconductor device includes a heat source, a heat-dissipating component for dissipating heat generated by the heat source, and a thermal interface material filled in spaces formed between the heat source and the heat-dissipating component.
- the thermal interface material includes 100 parts by weight of an alkenyl groups-containing organopolysiloxane, and a Si—H groups-containing compound selected from the group consisting of organo-hydrogenpolysiloxane and polyorganohydrogensiloxane, and 800 to 1200 parts by weight of fillers consisting of aluminum powder having a mean particle size of 0.1 to 1 um and zinc oxide powder having a mean particle size of 1 to 5 um in a weight ratio from 1/1 to 10/1.
- FIG. 1 is a schematic cross-sectional view of a semiconductor device having a thermal interface material according to a preferred embodiment of the present invention.
- an electronic device 10 includes a heat source 12 disposed on a circuit board 11 , a heat-dissipating component 13 for dissipating heat generated by the heat source 12 , and a thermal interface material 14 filled in spaces formed between the heat source 12 and the heat-dissipating component 13 .
- the heat source 12 is an electronic component, such as a central processing unit (CPU) of a computer, which needs to be cooled.
- the heat-dissipating component 13 is a heat sink, which includes a base 131 and a plurality of fins 133 disposed on the base 131 .
- the heat-dissipating component 13 is attached to the circuit board 11 via a resilient fixing member 15 , which provides a resilient force for clamping the heat dissipation component 13 and the circuit board 11 together.
- the base 131 of the heat-dissipating component 13 is sandwiched between the fixing member 15 and the circuit board 11 , and is urged downwardly towards the heat source 12 on the circuit board 11 via the resilient force exerted thereon.
- the thermal interface material 14 is pressed by the heat-dissipating component 13 thus filled in the spaces formed between the heat source 12 and the heat-dissipating component 13 .
- the thermal interface material 14 is silicone grease composition having high thermal conductivity, and includes a base oil and an amount of fillers filled in the base oil.
- the base oil makes up 100 parts by weight of the thermal interface material 14 .
- the base oil is cured silicone oil including three components: component (A), component (B), and component (C).
- Component (A) of the base oil is an organo-hydrogenpolysiloxane having a chemical structure formula:
- Component (A) contains at least a Si—H group at side chains thereof.
- Component (B) of the base oil is a polyorganohydrogensiloxane having one of the following chemical structure formulas:
- component (B) contains at least three Si-bonded hydrogen atoms therein.
- Component (C) of the base oil is an organopolysiloxane having a chemical structure formula:
- component (C) contains at least two alkenyl groups therein.
- m can also be numbered to satisfy a viscosity of component (C) being in a range from 50 to 5000 cps at 25° C.
- the amount of components (A), (B), and (C) of the base oil is such that the ratio of the number of the alkenyl groups in component (C) to the number of the Si—H groups in component (A), and to the number of the Si-bonded hydrogens in component (B) is 4:1:3.
- Components (A), (B), and (C) of the base oil are used in such proportions that component (C), component (B), and component (A) are heat cured and cross linked together to thereby obtain a composition with a satisfactorily networked structure, giving the thermal interface material a sufficient structure to prevent displacement of the base oil.
- the base oil may include two components, i.e. component (A)/component (B), and component (C).
- the ratio of Si—H groups in component (A)/component (B) to alkenyl groups in component (C) is 1:1, which heat cures and cross links the component (A)/component (B) and component (C) together to thereby obtain compositions with satisfactorily networked structures.
- the reaction formula for the Si—H groups and the alkenyl groups is:
- the fillers are 800 to 1200 parts by weight of the thermal interface material 14 .
- the fillers are a mixture of aluminum powder and zinc oxide powder in a weight ratio of from 1/1 to 10/1.
- the aluminum powder is substantially spherical-shaped and has an average particle size from 1 to 5 um.
- the zinc oxide powder is substantially spherical-shaped and has an average particle size from 0.1 to 1 um.
- the thermal interface material further includes a catalyst selected from among platinum and platinum compounds, which serves to promote addition reaction between alkenyl groups in component (C) and Si—H groups in component (A), and/or Si-bonded hydrogen in component (B).
- a catalyst selected from among platinum and platinum compounds, which serves to promote addition reaction between alkenyl groups in component (C) and Si—H groups in component (A), and/or Si-bonded hydrogen in component (B).
- Exemplary catalysts are elemental platinum, chloroplatinic acid, platinum-olefin complexes, platinum-alcohol complexes, and platinum coordinate compounds.
- An appropriate amount of the catalyst is 0.1 to 500 parts by weight of per million parts of component (C).
- the thermal interface material 14 is used to fill the spaces formed between the heat source 12 and the heat-dissipating component 13 .
- components (A), (B), and (C) cure with the heat produced by the heat source and the catalyst blending thereinto. Once cured, the thermal interface material 14 has a sufficient structure to prevent displacement of the base oil and a long-lasting flexibility to prevent its peeling off from the heat source 12 or the heat-dissipating component 13 . Therefore, the silicone composition ensures a high level of heat dissipation efficiency, improving the overall reliability of the electronic device 10 .
- examples of the substituted hydrocarbon group for methyl attached to a silicon atom include alkyl groups such as ethyl, propyl, isopropyl, butyl, isobutyl, pentyl, neopentyl, hexyl, cyclohexyl, octyl, nonyl, decyl and dodecyl; aryl groups such as phenyl, tolyl, xylyl and naphthyl; aralkyl groups such as benzyl, phenylethyl and 2-phenylpropyl; alkenyl groups such as vinyl, allyl, propenyl, isopropenyl, 1-butenyl, 1-hexenyl, cyclohexenyl and octenyl; and substituted ones of the foregoing groups in which some or all of the hydrogen atoms are substituted with halogen atoms (e.g.
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Lubricants (AREA)
Abstract
A semiconductor device (10) includes a heat source (12), a heat-dissipating component (13) for dissipating heat generated by the heat source, and thermal interface material (14) filled in spaces formed between the heat source and the heat-dissipating component. The thermal interface material includes 100 parts by weight of alkenyl groups-containing organopolysiloxane, and Si—H groups-containing compound selected from the group consisting of organo-hydrogenpolysiloxane and polyorganohydrogensiloxane, and 800 to 1200 parts by weight of fillers consisting of aluminum powder having a mean particle size of 0.1 to 1 um and zinc oxide powder having a mean particle size of 1 to 5 um in a weight ratio of from 1/1 to 10/1 .
Description
- The present invention relates to a thermal interface material which is interposable between a heat-generating electronic component and a heat dissipating component, and it also relates to a semiconductor device using the thermal interface material.
- With the fast development of the electronics industry, advanced electronic components such as CPUs (central processing units) are being made with ever faster operating speeds. During operation of the advanced electronic components, much heat is generated. In order to ensure good performance and reliability of the electronic components, their operational temperature must be kept within a suitable range. Generally, a heat dissipating apparatus such as a heat sink or a heat spreader is attached to a surface of the electronic component, so that the heat is transferred from the electronic component to ambient air via the heat dissipating apparatus. However, the contact surfaces between the heat dissipating apparatus and the electronic component are rough and therefore are separated from each other by a layer of interstitial air no mater how precisely the heat dissipating apparatus and the electronic component are brought into contact. Thus, the contact resistance is relatively high. A thermal interface material may be applied to the contact surfaces to eliminate the air interstices between the heat dissipating apparatus and the electronic component in order to improve heat dissipation.
- The thermal interface material includes base oil and fillers filled in the base oil. The base oil is used for filling the air interstices to create an intimate contact between the heat dissipating apparatus and the electronic component, whilst the fillers are used for improving the thermal conductivity of the thermal interface material to thereby increase the heat dissipation efficiency of the heat dissipating apparatus. However, the base oil may bleed from the thermal interface material when exposed to heat for a long period of time. The thermal interface material therefore tends to gradually harden, finally losing flexibility so that it peels off from the contact surfaces between the heat dissipating apparatus and the electronic component. This results in the thermal interface material undesirably increasing its thermal resistance and the heat dissipating apparatus accordingly decreasing its heat dissipation efficiency over time. The operational temperatures of the electronic components are undesirably increased, which leads to deterioration in their performance. Therefore, a thermal interface material, which can prevent the base oil from bleeding, is needed.
- The present invention relates, in one respect, to a thermal interface material for electronic products, and in another respect, to a semiconductor device using the thermal interface material. According to a preferred embodiment of the present invention, the semiconductor device includes a heat source, a heat-dissipating component for dissipating heat generated by the heat source, and a thermal interface material filled in spaces formed between the heat source and the heat-dissipating component. The thermal interface material includes 100 parts by weight of an alkenyl groups-containing organopolysiloxane, and a Si—H groups-containing compound selected from the group consisting of organo-hydrogenpolysiloxane and polyorganohydrogensiloxane, and 800 to 1200 parts by weight of fillers consisting of aluminum powder having a mean particle size of 0.1 to 1 um and zinc oxide powder having a mean particle size of 1 to 5 um in a weight ratio from 1/1 to 10/1.
- Other advantages and novel features of the present invention will become more apparent from the following detailed description of preferred embodiment when taken in conjunction with the accompanying drawings, in which:
- Many aspects of the present thermal interface material can be better understood with reference to the following drawings. The components in the drawings are not necessarily drawn to scale, the emphasis instead being placed upon clearly illustrating the principles of the present thermal interface material. Moreover, in the drawings, like reference numerals designate corresponding parts throughout the several views.
-
FIG. 1 is a schematic cross-sectional view of a semiconductor device having a thermal interface material according to a preferred embodiment of the present invention. - Referring to
FIG. 1 , anelectronic device 10 includes aheat source 12 disposed on acircuit board 11, a heat-dissipating component 13 for dissipating heat generated by theheat source 12, and athermal interface material 14 filled in spaces formed between theheat source 12 and the heat-dissipating component 13. Theheat source 12 is an electronic component, such as a central processing unit (CPU) of a computer, which needs to be cooled. The heat-dissipating component 13 is a heat sink, which includes abase 131 and a plurality offins 133 disposed on thebase 131. The heat-dissipating component 13 is attached to thecircuit board 11 via aresilient fixing member 15, which provides a resilient force for clamping theheat dissipation component 13 and thecircuit board 11 together. Thebase 131 of the heat-dissipating component 13 is sandwiched between thefixing member 15 and thecircuit board 11, and is urged downwardly towards theheat source 12 on thecircuit board 11 via the resilient force exerted thereon. Thethermal interface material 14 is pressed by the heat-dissipatingcomponent 13 thus filled in the spaces formed between theheat source 12 and the heat-dissipating component 13. - The
thermal interface material 14 is silicone grease composition having high thermal conductivity, and includes a base oil and an amount of fillers filled in the base oil. - The base oil makes up 100 parts by weight of the
thermal interface material 14. The base oil is cured silicone oil including three components: component (A), component (B), and component (C). - Component (A) of the base oil is an organo-hydrogenpolysiloxane having a chemical structure formula:
- where a and b are positive numbers satisfying 0.01<a/(a+b)<0.4. Component (A) contains at least a Si—H group at side chains thereof.
- Component (B) of the base oil is a polyorganohydrogensiloxane having one of the following chemical structure formulas:
- where, Me is a methyl group, and component (B) contains at least three Si-bonded hydrogen atoms therein.
- Component (C) of the base oil is an organopolysiloxane having a chemical structure formula:
- where Me is a methyl group, and m is larger than or equal to 2, so that component (C) contains at least two alkenyl groups therein. In addition, m can also be numbered to satisfy a viscosity of component (C) being in a range from 50 to 5000 cps at 25° C.
- The amount of components (A), (B), and (C) of the base oil is such that the ratio of the number of the alkenyl groups in component (C) to the number of the Si—H groups in component (A), and to the number of the Si-bonded hydrogens in component (B) is 4:1:3. Components (A), (B), and (C) of the base oil are used in such proportions that component (C), component (B), and component (A) are heat cured and cross linked together to thereby obtain a composition with a satisfactorily networked structure, giving the thermal interface material a sufficient structure to prevent displacement of the base oil. Alternatively, the base oil may include two components, i.e. component (A)/component (B), and component (C). With this composition, the ratio of Si—H groups in component (A)/component (B) to alkenyl groups in component (C) is 1:1, which heat cures and cross links the component (A)/component (B) and component (C) together to thereby obtain compositions with satisfactorily networked structures. The reaction formula for the Si—H groups and the alkenyl groups is:
- The fillers are 800 to 1200 parts by weight of the
thermal interface material 14. The fillers are a mixture of aluminum powder and zinc oxide powder in a weight ratio of from 1/1 to 10/1. The aluminum powder is substantially spherical-shaped and has an average particle size from 1 to 5 um. The zinc oxide powder is substantially spherical-shaped and has an average particle size from 0.1 to 1 um. - The thermal interface material further includes a catalyst selected from among platinum and platinum compounds, which serves to promote addition reaction between alkenyl groups in component (C) and Si—H groups in component (A), and/or Si-bonded hydrogen in component (B). Exemplary catalysts are elemental platinum, chloroplatinic acid, platinum-olefin complexes, platinum-alcohol complexes, and platinum coordinate compounds. An appropriate amount of the catalyst is 0.1 to 500 parts by weight of per million parts of component (C).
- In the present
electronic device 10, thethermal interface material 14 is used to fill the spaces formed between theheat source 12 and the heat-dissipating component 13. After being dispersed, components (A), (B), and (C) cure with the heat produced by the heat source and the catalyst blending thereinto. Once cured, thethermal interface material 14 has a sufficient structure to prevent displacement of the base oil and a long-lasting flexibility to prevent its peeling off from theheat source 12 or the heat-dissipating component 13. Therefore, the silicone composition ensures a high level of heat dissipation efficiency, improving the overall reliability of theelectronic device 10. - In the present
thermal interface material 14, examples of the substituted hydrocarbon group for methyl attached to a silicon atom include alkyl groups such as ethyl, propyl, isopropyl, butyl, isobutyl, pentyl, neopentyl, hexyl, cyclohexyl, octyl, nonyl, decyl and dodecyl; aryl groups such as phenyl, tolyl, xylyl and naphthyl; aralkyl groups such as benzyl, phenylethyl and 2-phenylpropyl; alkenyl groups such as vinyl, allyl, propenyl, isopropenyl, 1-butenyl, 1-hexenyl, cyclohexenyl and octenyl; and substituted ones of the foregoing groups in which some or all of the hydrogen atoms are substituted with halogen atoms (e.g. fluorine, bromine and chlorine), cyano groups or the like, such as chloromethyl, chloropropyl, bromoethyl, 3,3,3-trifluoropropyl and cyanoethyl. - It is to be understood, however, that even though numerous characteristics and advantages of the present invention have been set forth in the foregoing description, together with details of the structure and function of the invention, the disclosure is illustrative only, and changes may be made in detail, especially in matters of shape, size, and arrangement of portions within the principles of the invention to the full extent indicated by the broad general meaning of the terms in which the appended claims are expressed.
Claims (15)
1. A thermal interface material comprising:
100 parts by weight of base oil; and
800 to 1200 parts by weight of fillers in the base oil;
wherein the base oil comprises Si—H groups contained in at least one of organo-hydrogenpolysiloxane and polyorganohydrogensiloxane, and alkenyl groups contained in organopolysiloxane and cured with the Si—H groups.
2. The thermal interface material as described in claim 1 , wherein the organopolysiloxane has a viscosity from 50 to 5000 cps at 25° C.
3. The thermal interface material as described in claim 1 , wherein a ratio of the number of the alkenyl groups to the number of the Si—H groups is 1:1.
4. The thermal interface material as described in claim 1 , wherein a ratio of the number of the alkenyl groups in the organopolysiloxane to the number of the Si—H groups in the organo-hydrogenpolysiloxane, and to the number of the Si—H groups in polyorganohydrogensiloxane is 4:1:3.
7. The thermal interface material as described in claim 1 , wherein the fillers are a mixture of aluminum powder and zinc oxide powder in a weight ratio from 1/1 to 10/1.
8. The thermal interface material as described in claim 7 , wherein the aluminum powder has an average particle size of from 1 to 5 um, whilst the zinc oxide powder has an average particle size of from 0.1 to 1 um.
9. The thermal interface material as described in claim 1 , further comprising a catalyst selected from among platinum and platinum compounds, in such an amount as to give 0.1 to 500 parts by weight of per million parts of the organopolysiloxane.
10. The thermal interface material as described in claim 9 , wherein the platinum compounds are chloroplatinic acid, platinum-olefin complexes, platinum-alcohol complexes, and platinum coordinate compounds.
11. A semiconductor device comprising:
a heat source;
a heat-dissipating component for dissipating heat generated by the heat source; and
thermal interface material filled in spaces formed between the heat source and the heat-dissipating component, the thermal interface material comprising:
100 parts by weight of alkenyl groups-containing organopolysiloxane, and Si—H groups-containing compound selected from the group consisting of organo-hydrogenpolysiloxane and polyorganohydrogensiloxane;
800 to 1200 parts by weight of fillers consisting of aluminum powder having a mean particle size of 0.1 to 1 um and zinc oxide powder having a mean particle size of 1 to 5 um in a weight ratio from 1/1 to 10/1; and
a catalyst selected from the group consisting of platinum and platinum compounds, in such an amount as to give 0.1 to 500 parts by weight of per million parts of the organopolysiloxane.
12. The thermal interface material as described in claim 11 , wherein a ratio of the number of the alkenyl groups in the organopolysiloxane to the number of the Si—H groups in the organo-hydrogenpolysiloxane, and to the number of the Si—H groups in the polyorganohydrogensiloxane is 4:1:3.
Applications Claiming Priority (2)
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TW094144809A TWI285675B (en) | 2005-12-16 | 2005-12-16 | Heat conductive grease and semiconductor device |
TW94144809 | 2005-12-16 |
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US20070151416A1 true US20070151416A1 (en) | 2007-07-05 |
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US11/309,463 Abandoned US20070151416A1 (en) | 2005-12-16 | 2006-08-10 | Thermal interface material and semiconductor device incorporating the same |
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TW (1) | TWI285675B (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090057877A1 (en) * | 2007-08-29 | 2009-03-05 | Maxat Touzelbaev | Semiconductor Device with Gel-Type Thermal Interface Material |
US7833839B1 (en) * | 2007-09-15 | 2010-11-16 | Globalfoundries Inc. | Method for decreasing surface delamination of gel-type thermal interface material by management of the material cure temperature |
US20110163460A1 (en) * | 2008-09-01 | 2011-07-07 | Dow Corning Toray Co., Ltd. | Thermally Conductive Silicone Composition And Semiconductor Device |
CN103483372A (en) * | 2013-09-02 | 2014-01-01 | 上海硅普化学品有限公司 | 3,4-epoxy cyclohexylethylmethyl cyclosiloxane and preparation method for same |
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US5021494A (en) * | 1988-10-03 | 1991-06-04 | Toshiba Silicone Co., Ltd | Thermal conductive silicone composition |
US5239034A (en) * | 1990-08-03 | 1993-08-24 | Shin-Etsu Chemical Co., Ltd. | High-strength silicon rubber compositions |
US5925709A (en) * | 1996-08-29 | 1999-07-20 | Shin-Etsu Chemical Co., Ltd. | Method for the preparation of silicone rubber |
US6169142B1 (en) * | 1998-06-17 | 2001-01-02 | Shin Etsu Chemical Co., Ltd. | Thermal conductive silicone rubber compositions and method of making |
US6649258B2 (en) * | 2001-05-01 | 2003-11-18 | Shin-Etsu Chemical Co., Ltd. | Heat conductive silicone composition and semiconductor device |
-
2005
- 2005-12-16 TW TW094144809A patent/TWI285675B/en active
-
2006
- 2006-08-10 US US11/309,463 patent/US20070151416A1/en not_active Abandoned
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US5021494A (en) * | 1988-10-03 | 1991-06-04 | Toshiba Silicone Co., Ltd | Thermal conductive silicone composition |
US5239034A (en) * | 1990-08-03 | 1993-08-24 | Shin-Etsu Chemical Co., Ltd. | High-strength silicon rubber compositions |
US5925709A (en) * | 1996-08-29 | 1999-07-20 | Shin-Etsu Chemical Co., Ltd. | Method for the preparation of silicone rubber |
US6169142B1 (en) * | 1998-06-17 | 2001-01-02 | Shin Etsu Chemical Co., Ltd. | Thermal conductive silicone rubber compositions and method of making |
US6649258B2 (en) * | 2001-05-01 | 2003-11-18 | Shin-Etsu Chemical Co., Ltd. | Heat conductive silicone composition and semiconductor device |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US20090057877A1 (en) * | 2007-08-29 | 2009-03-05 | Maxat Touzelbaev | Semiconductor Device with Gel-Type Thermal Interface Material |
US7678615B2 (en) * | 2007-08-29 | 2010-03-16 | Advanced Micro Devices, Inc. | Semiconductor device with gel-type thermal interface material |
US7833839B1 (en) * | 2007-09-15 | 2010-11-16 | Globalfoundries Inc. | Method for decreasing surface delamination of gel-type thermal interface material by management of the material cure temperature |
US20110163460A1 (en) * | 2008-09-01 | 2011-07-07 | Dow Corning Toray Co., Ltd. | Thermally Conductive Silicone Composition And Semiconductor Device |
CN103483372A (en) * | 2013-09-02 | 2014-01-01 | 上海硅普化学品有限公司 | 3,4-epoxy cyclohexylethylmethyl cyclosiloxane and preparation method for same |
Also Published As
Publication number | Publication date |
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TWI285675B (en) | 2007-08-21 |
TW200724661A (en) | 2007-07-01 |
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