US20070058117A1 - Pixel structure for transflective LCD panel and fabricating method thereof - Google Patents
Pixel structure for transflective LCD panel and fabricating method thereof Download PDFInfo
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- US20070058117A1 US20070058117A1 US11/444,576 US44457606A US2007058117A1 US 20070058117 A1 US20070058117 A1 US 20070058117A1 US 44457606 A US44457606 A US 44457606A US 2007058117 A1 US2007058117 A1 US 2007058117A1
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- 238000000034 method Methods 0.000 title claims description 55
- 239000000758 substrate Substances 0.000 claims abstract description 68
- 238000002161 passivation Methods 0.000 claims abstract description 36
- 239000004065 semiconductor Substances 0.000 claims description 23
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 221
- 229910021417 amorphous silicon Inorganic materials 0.000 description 14
- 238000005530 etching Methods 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 230000008901 benefit Effects 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 239000000377 silicon dioxide Substances 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000002355 dual-layer Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133553—Reflecting elements
- G02F1/133555—Transflectors
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
Definitions
- Taiwan application serial no. 94131048 filed on Sep. 9, 2005. All disclosure of the Taiwan application is incorporated herein by reference.
- the present invention relates to a pixel structure and a fabricating method thereof, and particularly to a pixel structure for a transflective thin film transistor (TFT) liquid crystal display (LCD) for improving efficiency in backlight utilization and a fabricating method thereof.
- TFT transflective thin film transistor
- LCD liquid crystal display
- CTR cathode ray tube
- TFT LCDs can be generally categorized into transmissive type, reflective type and transflective type, according to the light source and array substrates used.
- a typical transmissive TFT LCD uses a backlight source, and employs transparent electrodes as pixel electrodes of the TFT array substrate for allowing backlights to transmit through.
- a typical reflective TFT LCD uses a front-light source and/or ambient lights as a light source, and employs metal or other reflective material as reflective electrodes for reflecting the front-lights or the ambient lights.
- a typical transflective TFT LCD can be viewed as a combination of a transmissive TFT LCD and a reflective TFT LCD, taking advantages of the backlight source and the front-light source or the ambient lights for display.
- the reflective layers are usually designed to have rough surfaces for obtaining widely distributed reflected lights.
- the process to make the surfaces rough increases production costs.
- the backlight source provides backlights for display, only those radiating on the transparent electrodes rather than those radiating on the reflective layer can be used. Therefore, such a conventional transflective TFT LCD has lower utilization efficiency of lights provided by the backlight module.
- an object of the invention is to provide a pixel structure for a transflective TFT LCD panel, adapted for improving efficiency in backlights utilization of the TFT LCD.
- Another object of the invention is to provide a method for fabricating a transflective TFT LCD panel having higher efficiency in backlights utilization.
- the present invention provides a pixel structure for a transflective TFT LCD.
- the pixel structure includes a transparent substrate, a TFT, at least one reflective structure, a passivation layer, a pixel electrode and a reflective layer.
- the TFT is disposed in a reflective region of the transparent substrate.
- the reflective structure is configured at one side of the TFT and located in the reflective region of the transparent substrate.
- the passivation layer is disposed over the transparent substrate and covers the TFT and the reflective structure.
- the pixel electrode is disposed above the TFT and the reflective structure, and at least is located in a transparent region.
- the pixel electrode is electrically connected to the TFT.
- the reflective layer is disposed above the TFT and the reflective structure, and is located in the reflective region.
- the TFT includes a gate electrode, a gate insulating layer, a semiconductor layer and a source/drain electrode.
- the gate electrode is disposed on the transparent substrate.
- the gate insulating layer is also disposed over the transparent substrate and covers the gate electrode.
- the semiconductor layer is disposed on the gate insulating layer and above the gate electrode.
- the source/drain electrode is disposed on the semiconductor layer and above the gate electrode.
- the reflective structure includes a first metallic layer.
- the first metallic layer and the gate electrode are of a same film layer, for example.
- the first metallic layer is lodged into a depression of or protrudes from the transparent substrate surface, for example.
- the gate insulating layer extends outside the TFT for example, and covers the first metallic layer.
- the first metallic layer and the source/drain electrode for example are of a same layer.
- the gate insulating layer for example extends outside the TFT and is disposed between the first metallic layer and the transparent substrate.
- the first metallic layer for example is lodged in a depression of the gate insulating layer surface.
- the reflective structure for example further includes a second metallic layer.
- the second metallic layer is disposed on the first metallic layer.
- the first metallic layer and the gate electrode for example are of a same film layer, and the second metallic layer and the source/drain electrode for example are of a same layer.
- the gate insulating layer for example extends outside the TFT, and the gate insulating layer for example is disposed between the first metallic layer and the second metallic layer.
- the reflective structure is sawtooth-shaped or block-shaped.
- the pixel structure for a transflective TFT LCD panel further includes a flatting layer, disposed between the pixel electrode and the transparent substrate, and covering the TFT and the reflective structure.
- the present invention further provides a method for fabricating a pixel structure for a transflective LCD panel.
- the fabricating method includes the steps of: providing a transparent substrate; then forming a TFT and configuring a reflective structure on the transparent substrate, wherein the reflective structure is located at one side of the TFT; forming a passivation layer over the transparent substrate, wherein the passivation layer covers the TFT and the reflective structure; forming a pixel electrode above the TFT and the reflective structure, wherein the pixel electrode and the TFT are electrically connected to each other; then forming a reflective layer above the TFT and the reflective structure.
- the step of forming a reflective structure for example includes forming a first metallic layer on the transparent substrate, wherein the first metallic layer for example is formed simultaneously with the gate electrode. Further, before the first metallic is formed, a lithographic process and an etching process are performed on the transparent substrate to form a first depression, the first depression being adapted for receiving the first metallic layer. Also, the gate insulating layer for example covers the first metallic layer.
- the method of forming a reflective structure for example is by forming a first metallic layer on the transparent substrate, simultaneously with the gate electrode. Further, before forming the first metallic layer, the method includes conducting a lithographic process and an etching process to form a first depression for receiving the metallic layer therein; and thereafter, forming the gate insulating layer covering the first metallic layer.
- the first metallic layer for example is formed simultaneously with the source/drain electrode. Further, before the first metallic layer is formed, a lithographic process and an etching process are performed on the gate insulating layer to form a second depression, the second depression being adapted for receiving the first metallic layer.
- the step of forming a reflective structure for example further includes forming a second metallic layer above the first metallic layer.
- the first metallic layer for example is simultaneously formed with the gate electrode
- the second metallic layer for example is simultaneously formed with the source/drain electrode.
- a lithographic process and an etching process are performed on the transparent substrate to form a first depression, the first depression being adapted for receiving the first metallic layer.
- a lithographic process and an etching process are performed on the gate insulating layer to form a second depression, the second depression being adapted for receiving the second metallic layer.
- a flatting layer is formed for covering the TFT and the reflective structure.
- a reflective structure is simultaneously formed on at least one side of the TFT. There is no extra processing needed to form the reflective structure. Further, this reflective structure is adapted for improving efficiency in backlights utilization of the TFT LCD.
- FIGS. 1A through 1E schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the first embodiment of the invention.
- FIGS. 2A through 2E schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the second embodiment of the invention.
- FIGS. 3A through 3D schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the third embodiment of the invention.
- FIGS. 4A through 4D schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the fourth embodiment of the invention.
- FIGS. 5A through 5D schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the fifth embodiment of the invention.
- the following embodiments illustrate different types of pixel structures for a transflective LCD.
- the pixel structure mainly includes a transparent substrate, a TFT, at least one reflective structure, a pixel electrode and a reflective layer.
- the TFT is disposed on the transparent substrate, and is located in a reflective region.
- the reflective structure is configured at one side of the TFT on the transparent substrate, and located in the reflective region.
- the pixel electrode is disposed above the TFT and the reflective structure, and at least is located in a transparent region.
- the pixel electrode is electrically connected to the TFT.
- the reflective layer is disposed above the TFT and the reflective structure, and is located in the reflective region.
- FIGS. 1A through 1E schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the first embodiment of the invention.
- the step shown in FIG. 1A includes providing a transparent substrate 100 , and simultaneously forming a gate electrode 110 and a metallic layer 122 on the transparent substrate 100 , wherein the metallic layer 122 is formed at one side of the gate electrode 110 for configuring a reflective structure 120 .
- the reflective structure 120 for example can be either sawtooth-shaped or block-shaped.
- the transparent substrate 100 for example is a glass substrate.
- the reflective structure 120 and the gate electrode 110 are made of a same material.
- the following step shown in FIG. 1B includes forming a gate insulating layer 130 over the transparent substrate 100 in a chemical vapor deposition (CVD) method, for example, wherein the gate insulating layer 130 covers the gate electrode 110 and the reflective structure 120 .
- the gate insulating layer 130 for example is made of silicon dioxide, silicon nitride or silicon oxynitride.
- the following step shown in FIG. 1C includes forming a semiconductor layer 140 above the gate electrode 110 .
- the method for forming the semiconductor layer 140 includes: forming an amorphous silicon layer 142 ; then forming an ohmic contact layer 144 on the amorphous silicon layer 142 , wherein the ohmic contact layer 144 is made of N+ doped amorphous silicon, for example; and thereafter, forming a source electrode 152 and a drain electrode 154 .
- the source electrode 152 and the drain electrode 154 for example are made of a material selected from a group consisting of copper, tungsten, chromium, aluminum or a combination thereof.
- the gate electrode 110 , the semiconductor layer 140 , the source electrode 152 and the drain electrode 154 constitute a TFT 160 .
- the following step shown in FIG. 1D includes optionally forming a passivation layer 170 over the transparent substrate 100 , the passivation layer 170 covering the TFT 160 ; forming a flatting layer 180 ; then patterning the flatting layer 180 and the passivation layer 170 to form an contact hole 182 of the flatting layer 180 and the passivation layer 170 .
- the following step shown in FIG. 1E includes: forming a pixel electrode 190 , and forming a reflective layer 192 on the pixel electrode 190 .
- the pixel electrode 190 is electrically connected with the drain electrode 154 via the contact hole 182 of the flatting layer 180 and the passivation layer 170 .
- the area of the pixel structure of the transflective LCD panel covered by the reflective layer 192 is a reflective region 101 b , and the area not covered thereby is a transparent region 101 a .
- the pixel electrode 190 covers the entire flatting layer 180 , while according to other aspects of the embodiment, the pixel electrode 190 can be located within the transparent region 101 a , being adjacent to the reflective layer 192 .
- the TFT 160 and the reflective structure 120 are simultaneously configured according to the first embodiment, while in other embodiments, they are individually configured.
- the TFT 160 is configured at first, and thereafter the reflective structure 120 is configured at one side of the TFT 160 , or the reflective structure 120 is configured at first and then the TFT 160 is configured.
- the reflective structure 120 is simultaneously formed at one side of the TFT 160 , when the gate electrode 110 is formed.
- a backlight module (not shown) provides a backlight, the backlight including a light L 1 incident to the transparent region 101 a and a light L 2 incident to the reflective region 101 b .
- the light L 1 is adapted for passing through the transparent region 101 a for display, and the light L 2 is reflected by the reflective layer 192 to the reflective structure 120 , wherein the reflective structure 120 reflects the light L 2 out of the panel. Therefore, the efficiency in backlights utilization can be improved.
- FIGS. 2A through 2E schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the second embodiment of the invention.
- the step shown in FIG. 2A includes providing a transparent substrate 200 , conducting a lithographic process and an etching process to form a depression 202 at the surface of the transparent substrate 200 .
- the transparent substrate 200 for example is a glass substrate, and the etching liquid used for etching the transparent substrate 200 for example is a hydrogen fluoride solution.
- the following step shown in FIG. 2B includes forming a gate electrode 210 , and at the same time forming a metallic layer 222 at one side of the gate electrode 210 , wherein the metallic layer 222 is lodged into the depression 202 for configuring a reflective structure 220 .
- the reflective structure 220 and the gate electrode 210 are made of a same material.
- the following step shown in FIG. 2C includes forming a gate insulating layer 230 over the transparent substrate 100 by a CVD method, for example, wherein the gate insulating layer 230 covers the gate electrode 110 and the reflective structure 120 .
- the gate insulating layer 230 is made of silicon dioxide, silicon nitride, or silicon oxynitride, for example.
- the following step shown in FIG. 2D includes: forming a semiconductor layer 240 on the gate insulating layer 230 and above the gate electrode 210 .
- the method for forming the semiconductor layer 240 includes: forming an amorphous silicon layer 242 ; then forming an ohmic contact layer 244 on the amorphous silicon layer 242 , wherein the ohmic contact layer 244 for example is made of N+ doped amorphous silicon; and thereafter, forming a source electrode 252 and a drain electrode 254 .
- the source electrode 252 and the drain electrode 254 for example are made of a material selected from a group consisting of copper, tungsten, chromium, aluminum or a combination thereof.
- the gate electrode 210 , the semiconductor layer 240 , the source electrode 252 and the drain electrode 254 constitute a TFT 260 .
- the following step shown in FIG. 2E includes optionally forming a passivation layer 270 over the transparent substrate 200 , the passivation layer 270 covering the TFT 260 ; forming a flatting layer 280 ; then patterning the flatting layer 280 and the passivation layer 270 to form an contact hole 282 of the flatting layer 280 and the passivation layer 270 .
- the step shown in FIG. 2E further includes forming a pixel electrode 290 and forming a reflective layer 292 on the pixel electrode 290 .
- the pixel electrode 290 is electrically connected with the drain electrode 254 via the contact hole 282 of the flatting layer 280 and the passivation layer 270 .
- the area of the pixel structure of the transflective LCD panel covered by the reflective layer 292 is a reflective region 201 b , and the area not covered thereby is a transparent region 201 a .
- the pixel electrode 290 covers the entire flatting layer 280 , while according to other aspects of the embodiment, the pixel electrode 290 is located within the transparent region 201 a , adjacent to the reflective layer 292 .
- a plurality of depressions 202 are formed at the surface of the transparent substrate 200 for the reflective structure 220 to be formed therein when the gate electrode 210 is formed.
- File reflective structure 220 for example is block-shaped.
- the reflective structure 220 configured at one side of the TFT 260 is adapted for improving the efficiency in backlights utilization.
- FIGS. 3A through 3D schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the third embodiment of the invention.
- the step shown in FIG. 3A includes providing a transparent substrate 300 , and forming gate electrode 310 on the transparent substrate 300 .
- the following step shown in FIG. 3B includes: forming a gate insulating layer 330 over the transparent substrate 300 by a CVD method, for example, wherein the gate insulating layer 330 covers the gate electrode 310 ; and forming a semiconductor layer 340 above the gate insulating layer 330 .
- the gate insulating layer 330 for example is made of silicon dioxide, silicon nitride or silicon oxynitride.
- the method for forming the semiconductor layer 340 includes: forming an amorphous silicon layer 342 ; then forming an ohmic contact layer 344 on the amorphous silicon layer 342 , wherein the ohmic contact layer 344 for example is made of N+ doped amorphous silicon.
- the following step shown in FIG. 3C includes: forming a source electrode 352 , a drain electrode 354 , and at the same time forming a metallic layer 322 at one side of the source electrode 352 and the drain electrode 322 .
- the gate electrode 310 , the semiconductor layer 340 , the source electrode 352 and the drain electrode 354 constitute a TFT 360 , and the metallic layer 322 functions as a reflective structure 320 .
- the reflective structure 320 for example is sawtooth-shaped or block-shaped. Further, the reflective structure 320 , the source electrode 352 and the drain electrode 354 are made of a same material.
- the following step shown in FIG. 3D includes: optionally forming a passivation layer 370 over the transparent substrate 300 , the passivation layer 370 covering the TFT 360 and the metallic layer 322 ; forming a flatting layer 380 ; then patterning the flatting layer 380 and the passivation layer 370 to form an contact hole 382 of the flatting layer 380 and the passivation layer 370 .
- the step shown in FIG. 3D further includes forming a pixel electrode 390 , and forming a reflective layer 392 on the pixel electrode 390 .
- the pixel electrode 390 is electrically connected with the drain electrode 354 via the contact hole 382 of the flatting layer 380 and the passivation layer 370 .
- the area of the pixel structure of the transflective LCD panel covered by the reflective layer 392 is a reflective region 301 b , and the area not covered thereby is a transparent region 301 a .
- the pixel electrode 390 covers the entire flatting layer 380 , while according to other aspects of the embodiment, the pixel electrode 390 is located within the transparent region 301 a , adjacent to the reflective layer 392 .
- a reflective structure 320 is configured on the gate insulating layer 330 at one side of the TFT 360 , when the source electrode 352 and the drain electrode 354 are formed.
- the reflective structure 320 is adapted for improving the efficiency in backlights utilization.
- FIGS. 4A through 4D schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the fourth embodiment of the invention.
- the step shown in FIG. 4A includes providing a transparent substrate 400 , and forming gate electrode 410 on the transparent substrate 400 .
- the following step shown in FIG. 4B includes: forming a gate insulating layer 430 over the transparent substrate 400 by a CVD method, for example, wherein the gate insulating layer 430 covers the gate electrode 410 ; and forming a semiconductor layer 440 above the gate insulating layer 430 .
- the gate insulating layer 430 for example is made of silicon dioxide, silicon nitride or silicon oxynitride.
- the method for forming the semiconductor layer 440 includes: forming an amorphous silicon layer 442 ; then forming an ohmic contact layer 444 on the amorphous silicon layer 442 , wherein the ohmic contact layer 444 for example is made of N+ doped amorphous silicon.
- the following step shown in FIG. 4C includes: conducting a lithographic process and an etching process to form a depression 432 on the gate insulating layer 430 ; then simultaneously forming a source electrode 452 , a drain electrode 454 and a metallic layer 422 , wherein the source electrode 452 and the drain electrode 454 are located on the gate electrode 410 , and the metallic layer 422 is lodged in the depression 432 for configuring a reflective structure 420 .
- the gate electrode 410 , the semiconductor layer 440 , the source electrode 452 and the drain electrode 454 constitute a TFT 460 .
- the reflective structure 420 for example is sawtooth-shaped or block-shaped. Further, the reflective structure 420 , the source electrode 420 and the drain electrode 454 are made of a same material.
- the following step shown in FIG. 4D includes: optionally forming a passivation layer 470 over the transparent substrate 400 , the passivation layer 470 covering the TFT 460 and the metallic layer 422 ; forming a flatting layer 480 ; then patterning the flatting layer 480 and the passivation layer 470 to form an contact hole 482 of the flatting layer 480 and the passivation layer 470 .
- the step shown in FIG. 4D further includes forming a pixel electrode 490 , and forming a reflective layer 492 on the pixel electrode 490 .
- the pixel electrode 490 is electrically connected with the drain electrode 454 via the contact hole 482 of the flatting layer 480 and the passivation layer 470 .
- the area of the pixel structure of the transflective LCD panel covered by the reflective layer 492 is a reflective region 401 b , and the area not covered thereby is a transparent region 401 a .
- the pixel electrode 490 covers the entire flatting layer 480 , while according to other aspects of the embodiment, the pixel electrode 490 is located within the transparent region 401 a , adjacent to the reflective layer 492 .
- the depression 432 is formed on the gate insulating layer 430 for configuring a reflective structure 420 lodged in the depression 432 of the gate insulating layer 430 at one side of the TFT 460 , when the source electrode 452 and the drain electrode 454 are formed.
- the reflective structure 420 is adapted for improving the efficiency in backlights utilization.
- FIGS. 5A through 5D schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the fifth embodiment of the invention.
- the step shown in FIG. 5A includes providing a transparent substrate 500 , and forming gate electrode 510 and a metallic layer 522 on the transparent substrate 500 , wherein the metallic layer 522 is located at one side of the gate electrode 510 .
- a method for forming the metallic layer 522 is by directly forming a patterned metallic layer on the transparent substrate 500 as shown in FIG. 1 .
- Another method for forming the metallic layer 522 can be, as shown in FIG. 2 , by conducting a lithographic process and an etching process to form a depression (not shown) for receiving the metallic layer 522 when forming the gate electrode 510 .
- the following step shown in FIG. 5B includes: forming a gate insulating layer 530 over the transparent substrate 500 by a CVD method, for example, wherein the gate insulating layer 530 covers the gate electrode 510 and the metallic layer 522 ; and forming a semiconductor layer 540 on the gate insulating layer 530 and above the gate electrode 510 .
- the gate insulating layer 530 for example is made of silicon dioxide, silicon nitride or silicon oxynitride.
- the method for forming the semiconductor layer 540 includes: forming an amorphous silicon layer 542 ; then forming an ohmic contact layer 544 , wherein the ohmic contact layer 544 for example is made of N+ doped amorphous silicon.
- the following step shown in FIG. 5C includes: forming a source electrode 552 , a drain electrode 554 , and at the same time forming a metallic layer 522 , wherein the source electrode 552 and the drain electrode 554 are above the gate electrode 510 , and the metallic layer 524 is above the metallic layer 522 .
- the gate electrode 510 , the semiconductor layer 540 , the source electrode 552 and the drain electrode 554 constitute a TFT 560 , and the metallic layer 522 and the metallic layer 524 function as a reflective structure 320 .
- the metallic layer 522 and the gate electrode 510 are made of a same material, while the metallic layer 524 and the source electrode 552 , the drain electrode 554 are made of a same material.
- the metallic layer 522 and the metallic layer 524 for example are sawtooth-shaped or block-shaped.
- the method for forming the metallic layer 524 can also be, as shown in FIG. 4 , by conducting a lithographic process and an etching process to form a depression (not shown) on the gate insulating layer 530 , and then simultaneously forming the source electrode 552 , the drain electrode 554 and the metallic layer 524 , for receiving the metallic layer 524 in the depression.
- the following step shown in FIG. 5D includes: optionally forming a passivation layer 570 over the transparent substrate 500 , the passivation layer 570 covering the TFT 560 and the metallic layer 522 ; forming a flatting layer 580 ; then patterning the flatting layer 580 and the passivation layer 570 to form an contact hole 582 of the flatting layer 580 and the passivation layer 570 .
- the step shown in FIG. 5D further includes forming a pixel electrode 590 , and forming a reflective layer 592 on the pixel electrode 590 .
- the pixel electrode 590 is electrically connected with the drain electrode 554 via the contact hole 582 of the flatting layer 580 and the passivation layer 570 .
- the area of the pixel structure of the transflective LCD panel covered by the reflective layer 592 is a reflective region 501 b , and the area not covered thereby is a transparent region 501 a .
- the pixel electrode 590 covers the entire flatting layer 580 , while according to other aspects of the embodiment, the pixel electrode 590 is located within the transparent region 501 a , adjacent to the reflective layer 592 .
- the reflective structure 520 for example is a dual-layer structure configured simultaneously with the gate electrode 510 , the source electrode 522 and the drain electrode 554 .
- the reflective structure 520 is located at one side of the TFT 560 for improving the efficiency in backlights utilization.
- the present invention is adapted for fabricating a reflective structure at one side of a TFT, for improving the efficiency in backlights utilization.
- the reflective structure can be formed simultaneously with the gate, and can either protrude from or lodge into the substrate surface. Further, the reflective structure can also be formed simultaneously with the source/drain electrode, and can either protrude from or lodge into the substrate surface. Furthermore, the reflective structure can also be a dual-layer structure, or even a combination of the above-mentioned types.
- the pixel structure for a transflective LCD panel and the fabricating method thereof according to the present invention have at least the following advantages and features:
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Abstract
Description
- This application claims the priority benefit of Taiwan application serial no. 94131048, filed on Sep. 9, 2005. All disclosure of the Taiwan application is incorporated herein by reference.
- 1. Field of the Invention
- The present invention relates to a pixel structure and a fabricating method thereof, and particularly to a pixel structure for a transflective thin film transistor (TFT) liquid crystal display (LCD) for improving efficiency in backlight utilization and a fabricating method thereof.
- 2. Description of Related Art
- Since the first cathode ray tube (CRT) television was invented, display technology has developed rapidly. However, CRT displays have obvious disadvantages such as large size, heavy weight, high radiation and poor pixel quality, and therefore various flat display panels are explored and introduced. Among them, LCDs, with advantages such as compact size, power consumption, no radiation, full color display, and portability, have become the most developed and popular products. LCDs are used in various applications including cellular phone, electronic dictionary, digital camera, digital camcorder, personal digital assistant, notebook computer and desktop computer.
- TFT LCDs can be generally categorized into transmissive type, reflective type and transflective type, according to the light source and array substrates used. A typical transmissive TFT LCD uses a backlight source, and employs transparent electrodes as pixel electrodes of the TFT array substrate for allowing backlights to transmit through. A typical reflective TFT LCD uses a front-light source and/or ambient lights as a light source, and employs metal or other reflective material as reflective electrodes for reflecting the front-lights or the ambient lights. A typical transflective TFT LCD can be viewed as a combination of a transmissive TFT LCD and a reflective TFT LCD, taking advantages of the backlight source and the front-light source or the ambient lights for display.
- In the conventional transflective TFT LCDs, the reflective layers are usually designed to have rough surfaces for obtaining widely distributed reflected lights. However, the process to make the surfaces rough increases production costs. Further, when the backlight source provides backlights for display, only those radiating on the transparent electrodes rather than those radiating on the reflective layer can be used. Therefore, such a conventional transflective TFT LCD has lower utilization efficiency of lights provided by the backlight module.
- Therefore, an object of the invention is to provide a pixel structure for a transflective TFT LCD panel, adapted for improving efficiency in backlights utilization of the TFT LCD.
- Another object of the invention is to provide a method for fabricating a transflective TFT LCD panel having higher efficiency in backlights utilization.
- According to the foregoing objects and others, the present invention provides a pixel structure for a transflective TFT LCD. The pixel structure includes a transparent substrate, a TFT, at least one reflective structure, a passivation layer, a pixel electrode and a reflective layer. The TFT is disposed in a reflective region of the transparent substrate. The reflective structure is configured at one side of the TFT and located in the reflective region of the transparent substrate. The passivation layer is disposed over the transparent substrate and covers the TFT and the reflective structure. The pixel electrode is disposed above the TFT and the reflective structure, and at least is located in a transparent region. The pixel electrode is electrically connected to the TFT. The reflective layer is disposed above the TFT and the reflective structure, and is located in the reflective region.
- According to an embodiment of the pixel structure for a transflective TFT LCD panel, the TFT includes a gate electrode, a gate insulating layer, a semiconductor layer and a source/drain electrode. The gate electrode is disposed on the transparent substrate. The gate insulating layer is also disposed over the transparent substrate and covers the gate electrode. The semiconductor layer is disposed on the gate insulating layer and above the gate electrode. The source/drain electrode is disposed on the semiconductor layer and above the gate electrode.
- According to an embodiment of the pixel structure for a transflective TFT LCD panel, the reflective structure includes a first metallic layer. The first metallic layer and the gate electrode are of a same film layer, for example. The first metallic layer is lodged into a depression of or protrudes from the transparent substrate surface, for example. Furthermore, the gate insulating layer extends outside the TFT for example, and covers the first metallic layer.
- According to an embodiment of the pixel structure for a transflective TFT LCD panel, the first metallic layer and the source/drain electrode for example are of a same layer. The gate insulating layer for example extends outside the TFT and is disposed between the first metallic layer and the transparent substrate. The first metallic layer for example is lodged in a depression of the gate insulating layer surface.
- According to an embodiment of the pixel structure for a transflective TFT LCD panel, the reflective structure for example further includes a second metallic layer. The second metallic layer is disposed on the first metallic layer. The first metallic layer and the gate electrode for example are of a same film layer, and the second metallic layer and the source/drain electrode for example are of a same layer. Furthermore, the gate insulating layer for example extends outside the TFT, and the gate insulating layer for example is disposed between the first metallic layer and the second metallic layer.
- According to an embodiment of the pixel structure for a transflective TFT LCD panel, the reflective structure is sawtooth-shaped or block-shaped.
- According to an embodiment of the invention, the pixel structure for a transflective TFT LCD panel further includes a flatting layer, disposed between the pixel electrode and the transparent substrate, and covering the TFT and the reflective structure.
- The present invention further provides a method for fabricating a pixel structure for a transflective LCD panel. The fabricating method includes the steps of: providing a transparent substrate; then forming a TFT and configuring a reflective structure on the transparent substrate, wherein the reflective structure is located at one side of the TFT; forming a passivation layer over the transparent substrate, wherein the passivation layer covers the TFT and the reflective structure; forming a pixel electrode above the TFT and the reflective structure, wherein the pixel electrode and the TFT are electrically connected to each other; then forming a reflective layer above the TFT and the reflective structure.
- According to an embodiment of the method for fabricating a pixel structure for a transflective LCD panel, the step of forming a reflective structure for example includes forming a first metallic layer on the transparent substrate, wherein the first metallic layer for example is formed simultaneously with the gate electrode. Further, before the first metallic is formed, a lithographic process and an etching process are performed on the transparent substrate to form a first depression, the first depression being adapted for receiving the first metallic layer. Also, the gate insulating layer for example covers the first metallic layer.
- According to an embodiment of the method for fabricating a pixel structure for a transflective LCD panel, the method of forming a reflective structure for example is by forming a first metallic layer on the transparent substrate, simultaneously with the gate electrode. Further, before forming the first metallic layer, the method includes conducting a lithographic process and an etching process to form a first depression for receiving the metallic layer therein; and thereafter, forming the gate insulating layer covering the first metallic layer.
- According to an embodiment of the method for fabricating a pixel structure for a transflective LCD panel, the first metallic layer for example is formed simultaneously with the source/drain electrode. Further, before the first metallic layer is formed, a lithographic process and an etching process are performed on the gate insulating layer to form a second depression, the second depression being adapted for receiving the first metallic layer.
- According to an embodiment of the method for fabricating a pixel structure for a transflective LCD panel, the step of forming a reflective structure for example further includes forming a second metallic layer above the first metallic layer. The first metallic layer for example is simultaneously formed with the gate electrode, and the second metallic layer for example is simultaneously formed with the source/drain electrode. Further, before the first metallic layer and the gate electrode are formed, a lithographic process and an etching process are performed on the transparent substrate to form a first depression, the first depression being adapted for receiving the first metallic layer. Furthermore, after the gate insulating layer is formed and before the second metallic layer is formed, a lithographic process and an etching process are performed on the gate insulating layer to form a second depression, the second depression being adapted for receiving the second metallic layer.
- According to an embodiment of the invention, after the passivation layer is formed and before the pixel electrode is formed, a flatting layer is formed for covering the TFT and the reflective structure.
- When forming a TFT, a reflective structure is simultaneously formed on at least one side of the TFT. There is no extra processing needed to form the reflective structure. Further, this reflective structure is adapted for improving efficiency in backlights utilization of the TFT LCD.
- The features of the invention which are believed to be novel are set forth with particularity in the appended claims. The invention, together with its objects and the advantages thereof, may be best understood by reference to the following description taken in conjunction with the accompanying drawings, in which like reference numerals identify like elements in the figures and in which:
-
FIGS. 1A through 1E schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the first embodiment of the invention. -
FIGS. 2A through 2E schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the second embodiment of the invention. -
FIGS. 3A through 3D schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the third embodiment of the invention. -
FIGS. 4A through 4D schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the fourth embodiment of the invention. -
FIGS. 5A through 5D schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the fifth embodiment of the invention. - Reference will now be made in detail to the present embodiments of the invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers are used in the drawings and the description to refer to the same or like parts.
- The following embodiments illustrate different types of pixel structures for a transflective LCD. The pixel structure mainly includes a transparent substrate, a TFT, at least one reflective structure, a pixel electrode and a reflective layer. The TFT is disposed on the transparent substrate, and is located in a reflective region. The reflective structure is configured at one side of the TFT on the transparent substrate, and located in the reflective region. The pixel electrode is disposed above the TFT and the reflective structure, and at least is located in a transparent region. The pixel electrode is electrically connected to the TFT. The reflective layer is disposed above the TFT and the reflective structure, and is located in the reflective region. Detailed structures accompanying with the manufacturing process thereof will be described in the following embodiments.
-
FIGS. 1A through 1E schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the first embodiment of the invention. First, the step shown inFIG. 1A , includes providing atransparent substrate 100, and simultaneously forming agate electrode 110 and ametallic layer 122 on thetransparent substrate 100, wherein themetallic layer 122 is formed at one side of thegate electrode 110 for configuring areflective structure 120. According to the first embodiment, thereflective structure 120 for example can be either sawtooth-shaped or block-shaped. Further, thetransparent substrate 100 for example is a glass substrate. Thereflective structure 120 and thegate electrode 110 are made of a same material. - Then, the following step shown in
FIG. 1B includes forming agate insulating layer 130 over thetransparent substrate 100 in a chemical vapor deposition (CVD) method, for example, wherein thegate insulating layer 130 covers thegate electrode 110 and thereflective structure 120. Thegate insulating layer 130 for example is made of silicon dioxide, silicon nitride or silicon oxynitride. - Then, the following step shown in
FIG. 1C includes forming asemiconductor layer 140 above thegate electrode 110. The method for forming thesemiconductor layer 140 includes: forming anamorphous silicon layer 142; then forming anohmic contact layer 144 on theamorphous silicon layer 142, wherein theohmic contact layer 144 is made of N+ doped amorphous silicon, for example; and thereafter, forming asource electrode 152 and adrain electrode 154. Thesource electrode 152 and thedrain electrode 154 for example are made of a material selected from a group consisting of copper, tungsten, chromium, aluminum or a combination thereof. Thegate electrode 110, thesemiconductor layer 140, thesource electrode 152 and thedrain electrode 154 constitute aTFT 160. - Then, the following step shown in
FIG. 1D includes optionally forming apassivation layer 170 over thetransparent substrate 100, thepassivation layer 170 covering theTFT 160; forming aflatting layer 180; then patterning theflatting layer 180 and thepassivation layer 170 to form ancontact hole 182 of theflatting layer 180 and thepassivation layer 170. - Then, the following step shown in
FIG. 1E includes: forming apixel electrode 190, and forming areflective layer 192 on thepixel electrode 190. Thepixel electrode 190 is electrically connected with thedrain electrode 154 via thecontact hole 182 of theflatting layer 180 and thepassivation layer 170. The area of the pixel structure of the transflective LCD panel covered by thereflective layer 192 is areflective region 101 b, and the area not covered thereby is atransparent region 101 a. According to an aspect of the embodiment, thepixel electrode 190 covers theentire flatting layer 180, while according to other aspects of the embodiment, thepixel electrode 190 can be located within thetransparent region 101 a, being adjacent to thereflective layer 192. - It is to be noted that the
TFT 160 and thereflective structure 120 are simultaneously configured according to the first embodiment, while in other embodiments, they are individually configured. For example, theTFT 160 is configured at first, and thereafter thereflective structure 120 is configured at one side of theTFT 160, or thereflective structure 120 is configured at first and then theTFT 160 is configured. - According to the first embodiment, the
reflective structure 120 is simultaneously formed at one side of theTFT 160, when thegate electrode 110 is formed. In operation, a backlight module (not shown) provides a backlight, the backlight including a light L1 incident to thetransparent region 101 a and a light L2 incident to thereflective region 101 b. The light L1 is adapted for passing through thetransparent region 101 a for display, and the light L2 is reflected by thereflective layer 192 to thereflective structure 120, wherein thereflective structure 120 reflects the light L2 out of the panel. Therefore, the efficiency in backlights utilization can be improved. -
FIGS. 2A through 2E schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the second embodiment of the invention. First, the step shown inFIG. 2A includes providing atransparent substrate 200, conducting a lithographic process and an etching process to form adepression 202 at the surface of thetransparent substrate 200. Thetransparent substrate 200 for example is a glass substrate, and the etching liquid used for etching thetransparent substrate 200 for example is a hydrogen fluoride solution. - Then, the following step shown in
FIG. 2B includes forming agate electrode 210, and at the same time forming ametallic layer 222 at one side of thegate electrode 210, wherein themetallic layer 222 is lodged into thedepression 202 for configuring areflective structure 220. It is to be noted that thereflective structure 220 and thegate electrode 210 are made of a same material. - Then, the following step shown in
FIG. 2C includes forming agate insulating layer 230 over thetransparent substrate 100 by a CVD method, for example, wherein thegate insulating layer 230 covers thegate electrode 110 and thereflective structure 120. Thegate insulating layer 230 is made of silicon dioxide, silicon nitride, or silicon oxynitride, for example. - Then, the following step shown in
FIG. 2D includes: forming asemiconductor layer 240 on thegate insulating layer 230 and above thegate electrode 210. The method for forming thesemiconductor layer 240 includes: forming anamorphous silicon layer 242; then forming anohmic contact layer 244 on theamorphous silicon layer 242, wherein theohmic contact layer 244 for example is made of N+ doped amorphous silicon; and thereafter, forming asource electrode 252 and adrain electrode 254. Thesource electrode 252 and thedrain electrode 254 for example are made of a material selected from a group consisting of copper, tungsten, chromium, aluminum or a combination thereof. Thegate electrode 210, thesemiconductor layer 240, thesource electrode 252 and thedrain electrode 254 constitute aTFT 260. - Then, the following step shown in
FIG. 2E includes optionally forming apassivation layer 270 over thetransparent substrate 200, thepassivation layer 270 covering theTFT 260; forming aflatting layer 280; then patterning theflatting layer 280 and thepassivation layer 270 to form ancontact hole 282 of theflatting layer 280 and thepassivation layer 270. The step shown inFIG. 2E further includes forming apixel electrode 290 and forming areflective layer 292 on thepixel electrode 290. Thepixel electrode 290 is electrically connected with thedrain electrode 254 via thecontact hole 282 of theflatting layer 280 and thepassivation layer 270. The area of the pixel structure of the transflective LCD panel covered by thereflective layer 292 is areflective region 201 b, and the area not covered thereby is atransparent region 201 a. According to an aspect of the embodiment, thepixel electrode 290 covers theentire flatting layer 280, while according to other aspects of the embodiment, thepixel electrode 290 is located within thetransparent region 201 a, adjacent to thereflective layer 292. - According to the second embodiment, a plurality of
depressions 202 are formed at the surface of thetransparent substrate 200 for thereflective structure 220 to be formed therein when thegate electrode 210 is formed. Filereflective structure 220 for example is block-shaped. Thereflective structure 220 configured at one side of theTFT 260 is adapted for improving the efficiency in backlights utilization. -
FIGS. 3A through 3D schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the third embodiment of the invention. First, the step shown inFIG. 3A includes providing atransparent substrate 300, and forminggate electrode 310 on thetransparent substrate 300. - Then, the following step shown in
FIG. 3B includes: forming agate insulating layer 330 over thetransparent substrate 300 by a CVD method, for example, wherein thegate insulating layer 330 covers thegate electrode 310; and forming asemiconductor layer 340 above thegate insulating layer 330. Thegate insulating layer 330 for example is made of silicon dioxide, silicon nitride or silicon oxynitride. The method for forming thesemiconductor layer 340 includes: forming anamorphous silicon layer 342; then forming anohmic contact layer 344 on theamorphous silicon layer 342, wherein theohmic contact layer 344 for example is made of N+ doped amorphous silicon. - Then, the following step shown in
FIG. 3C , includes: forming asource electrode 352, adrain electrode 354, and at the same time forming ametallic layer 322 at one side of thesource electrode 352 and thedrain electrode 322. Thegate electrode 310, thesemiconductor layer 340, thesource electrode 352 and thedrain electrode 354 constitute aTFT 360, and themetallic layer 322 functions as areflective structure 320. Thereflective structure 320 for example is sawtooth-shaped or block-shaped. Further, thereflective structure 320, thesource electrode 352 and thedrain electrode 354 are made of a same material. - Then, the following step shown in
FIG. 3D , includes: optionally forming apassivation layer 370 over thetransparent substrate 300, thepassivation layer 370 covering theTFT 360 and themetallic layer 322; forming aflatting layer 380; then patterning theflatting layer 380 and thepassivation layer 370 to form ancontact hole 382 of theflatting layer 380 and thepassivation layer 370. The step shown inFIG. 3D further includes forming apixel electrode 390, and forming areflective layer 392 on thepixel electrode 390. Thepixel electrode 390 is electrically connected with thedrain electrode 354 via thecontact hole 382 of theflatting layer 380 and thepassivation layer 370. The area of the pixel structure of the transflective LCD panel covered by thereflective layer 392 is areflective region 301 b, and the area not covered thereby is atransparent region 301 a. According to an aspect of the embodiment, thepixel electrode 390 covers theentire flatting layer 380, while according to other aspects of the embodiment, thepixel electrode 390 is located within thetransparent region 301 a, adjacent to thereflective layer 392. - According to the third embodiment, a
reflective structure 320 is configured on thegate insulating layer 330 at one side of theTFT 360, when thesource electrode 352 and thedrain electrode 354 are formed. Thereflective structure 320 is adapted for improving the efficiency in backlights utilization. -
FIGS. 4A through 4D schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the fourth embodiment of the invention. First, the step shown inFIG. 4A includes providing atransparent substrate 400, and forminggate electrode 410 on thetransparent substrate 400. - Then, the following step shown in
FIG. 4B includes: forming agate insulating layer 430 over thetransparent substrate 400 by a CVD method, for example, wherein thegate insulating layer 430 covers thegate electrode 410; and forming asemiconductor layer 440 above thegate insulating layer 430. Thegate insulating layer 430 for example is made of silicon dioxide, silicon nitride or silicon oxynitride. The method for forming thesemiconductor layer 440 includes: forming anamorphous silicon layer 442; then forming anohmic contact layer 444 on theamorphous silicon layer 442, wherein theohmic contact layer 444 for example is made of N+ doped amorphous silicon. - Then, the following step shown in
FIG. 4C , includes: conducting a lithographic process and an etching process to form adepression 432 on thegate insulating layer 430; then simultaneously forming asource electrode 452, adrain electrode 454 and ametallic layer 422, wherein thesource electrode 452 and thedrain electrode 454 are located on thegate electrode 410, and themetallic layer 422 is lodged in thedepression 432 for configuring areflective structure 420. Thegate electrode 410, thesemiconductor layer 440, thesource electrode 452 and thedrain electrode 454 constitute aTFT 460. Thereflective structure 420 for example is sawtooth-shaped or block-shaped. Further, thereflective structure 420, thesource electrode 420 and thedrain electrode 454 are made of a same material. - Then, the following step shown in
FIG. 4D includes: optionally forming apassivation layer 470 over thetransparent substrate 400, thepassivation layer 470 covering theTFT 460 and themetallic layer 422; forming aflatting layer 480; then patterning theflatting layer 480 and thepassivation layer 470 to form ancontact hole 482 of theflatting layer 480 and thepassivation layer 470. The step shown inFIG. 4D further includes forming apixel electrode 490, and forming areflective layer 492 on thepixel electrode 490. Thepixel electrode 490 is electrically connected with thedrain electrode 454 via thecontact hole 482 of theflatting layer 480 and thepassivation layer 470. The area of the pixel structure of the transflective LCD panel covered by thereflective layer 492 is areflective region 401 b, and the area not covered thereby is atransparent region 401 a. According to an aspect of the embodiment, thepixel electrode 490 covers theentire flatting layer 480, while according to other aspects of the embodiment, thepixel electrode 490 is located within thetransparent region 401 a, adjacent to thereflective layer 492. - According to the third embodiment, the
depression 432 is formed on thegate insulating layer 430 for configuring areflective structure 420 lodged in thedepression 432 of thegate insulating layer 430 at one side of theTFT 460, when thesource electrode 452 and thedrain electrode 454 are formed. Thereflective structure 420 is adapted for improving the efficiency in backlights utilization. -
FIGS. 5A through 5D schematically illustrate a flow chart of fabricating a pixel structure for a transflective LCD panel, according to the fifth embodiment of the invention. First, the step shown inFIG. 5A includes providing atransparent substrate 500, and forminggate electrode 510 and ametallic layer 522 on thetransparent substrate 500, wherein themetallic layer 522 is located at one side of thegate electrode 510. According to an aspect of the embodiment, a method for forming themetallic layer 522 is by directly forming a patterned metallic layer on thetransparent substrate 500 as shown inFIG. 1 . Another method for forming themetallic layer 522 can be, as shown inFIG. 2 , by conducting a lithographic process and an etching process to form a depression (not shown) for receiving themetallic layer 522 when forming thegate electrode 510. - Then, the following step shown in
FIG. 5B includes: forming agate insulating layer 530 over thetransparent substrate 500 by a CVD method, for example, wherein thegate insulating layer 530 covers thegate electrode 510 and themetallic layer 522; and forming asemiconductor layer 540 on thegate insulating layer 530 and above thegate electrode 510. Thegate insulating layer 530 for example is made of silicon dioxide, silicon nitride or silicon oxynitride. The method for forming thesemiconductor layer 540 includes: forming anamorphous silicon layer 542; then forming anohmic contact layer 544, wherein theohmic contact layer 544 for example is made of N+ doped amorphous silicon. - Then, the following step shown in
FIG. 5C includes: forming asource electrode 552, adrain electrode 554, and at the same time forming ametallic layer 522, wherein thesource electrode 552 and thedrain electrode 554 are above thegate electrode 510, and themetallic layer 524 is above themetallic layer 522. Thegate electrode 510, thesemiconductor layer 540, thesource electrode 552 and thedrain electrode 554 constitute aTFT 560, and themetallic layer 522 and themetallic layer 524 function as areflective structure 320. Further, themetallic layer 522 and thegate electrode 510 are made of a same material, while themetallic layer 524 and thesource electrode 552, thedrain electrode 554 are made of a same material. Themetallic layer 522 and themetallic layer 524 for example are sawtooth-shaped or block-shaped. - Moreover, according to the embodiment, the method for forming the
metallic layer 524 can also be, as shown inFIG. 4 , by conducting a lithographic process and an etching process to form a depression (not shown) on thegate insulating layer 530, and then simultaneously forming thesource electrode 552, thedrain electrode 554 and themetallic layer 524, for receiving themetallic layer 524 in the depression. - Then, the following step shown in
FIG. 5D includes: optionally forming apassivation layer 570 over thetransparent substrate 500, thepassivation layer 570 covering theTFT 560 and themetallic layer 522; forming aflatting layer 580; then patterning theflatting layer 580 and thepassivation layer 570 to form ancontact hole 582 of theflatting layer 580 and thepassivation layer 570. The step shown inFIG. 5D further includes forming apixel electrode 590, and forming areflective layer 592 on thepixel electrode 590. Thepixel electrode 590 is electrically connected with thedrain electrode 554 via thecontact hole 582 of theflatting layer 580 and thepassivation layer 570. The area of the pixel structure of the transflective LCD panel covered by thereflective layer 592 is areflective region 501 b, and the area not covered thereby is atransparent region 501 a. According to an aspect of the embodiment, thepixel electrode 590 covers theentire flatting layer 580, while according to other aspects of the embodiment, thepixel electrode 590 is located within thetransparent region 501 a, adjacent to thereflective layer 592. - According to the fifth embodiment, the
reflective structure 520 for example is a dual-layer structure configured simultaneously with thegate electrode 510, thesource electrode 522 and thedrain electrode 554. Thereflective structure 520 is located at one side of theTFT 560 for improving the efficiency in backlights utilization. - According to the above-described embodiments, combined with an optical mask processing, the present invention is adapted for fabricating a reflective structure at one side of a TFT, for improving the efficiency in backlights utilization. The reflective structure can be formed simultaneously with the gate, and can either protrude from or lodge into the substrate surface. Further, the reflective structure can also be formed simultaneously with the source/drain electrode, and can either protrude from or lodge into the substrate surface. Furthermore, the reflective structure can also be a dual-layer structure, or even a combination of the above-mentioned types.
- In summary, the pixel structure for a transflective LCD panel and the fabricating method thereof according to the present invention have at least the following advantages and features:
- 1. A reflective structure is disposed on at least one side of the TFT, thus improving the efficiency in backlights utilization;
- 2. The reflective structure is formed at one side of the TFT while the TFT is formed, thereby excluding additional optical masks and process, and saving production cost.
- Other modifications and adaptations of the above-described preferred embodiments of the present invention may be made to meet particular requirements. This disclosure is intended to exemplify the invention without limiting its scope. All modifications that incorporate the invention disclosed in the preferred embodiment are to be construed as coming within the scope of the appended claims or the range of equivalents to which the claims are entitled.
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US12/487,998 US7956963B2 (en) | 2005-09-09 | 2009-06-19 | Pixel structure for transflective LCD panel having a reflective structure formed in a depression on the TFT substrate |
US13/090,062 US20110194044A1 (en) | 2005-09-09 | 2011-04-19 | Pixel structure for transflective lcd panel |
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TW094131048A TWI314658B (en) | 2005-09-09 | 2005-09-09 | Pixel structure of transflective tft lcd panel and fabricating method thereof |
TW94131048 | 2005-09-09 |
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US12/487,998 Division US7956963B2 (en) | 2005-09-09 | 2009-06-19 | Pixel structure for transflective LCD panel having a reflective structure formed in a depression on the TFT substrate |
Publications (1)
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US20070058117A1 true US20070058117A1 (en) | 2007-03-15 |
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US11/444,576 Abandoned US20070058117A1 (en) | 2005-09-09 | 2006-05-31 | Pixel structure for transflective LCD panel and fabricating method thereof |
US12/487,998 Active US7956963B2 (en) | 2005-09-09 | 2009-06-19 | Pixel structure for transflective LCD panel having a reflective structure formed in a depression on the TFT substrate |
US13/090,062 Abandoned US20110194044A1 (en) | 2005-09-09 | 2011-04-19 | Pixel structure for transflective lcd panel |
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US12/487,998 Active US7956963B2 (en) | 2005-09-09 | 2009-06-19 | Pixel structure for transflective LCD panel having a reflective structure formed in a depression on the TFT substrate |
US13/090,062 Abandoned US20110194044A1 (en) | 2005-09-09 | 2011-04-19 | Pixel structure for transflective lcd panel |
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US (3) | US20070058117A1 (en) |
TW (1) | TWI314658B (en) |
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2011
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US20100265441A1 (en) * | 2007-12-18 | 2010-10-21 | Koki Hongo | Liquid crystal display device |
US20100208155A1 (en) * | 2009-02-18 | 2010-08-19 | Beijing Boe Optoelectronics Technology Co., Ltd. | Array substrate and manufacturing method thereof and liquid crystal display |
US8553184B2 (en) * | 2009-02-18 | 2013-10-08 | Beijing Boe Optoelectronics Technology Co., Ltd. | Manufacturing method of an array substrate including a four step process |
US20140002766A1 (en) * | 2009-02-18 | 2014-01-02 | Beijing Boe Optoelectronics Technology Co., Ltd. | Array substrate and liquid crystal display |
US9070848B2 (en) * | 2009-02-18 | 2015-06-30 | Beijing Boe Optoelectronics Technology Co., Ltd. | Array substrate and liquid crystal display |
CN108803161A (en) * | 2018-06-29 | 2018-11-13 | 上海天马微电子有限公司 | Display panel, method for manufacturing display panel, and display device |
Also Published As
Publication number | Publication date |
---|---|
TWI314658B (en) | 2009-09-11 |
US20110194044A1 (en) | 2011-08-11 |
US20090256152A1 (en) | 2009-10-15 |
TW200710480A (en) | 2007-03-16 |
US7956963B2 (en) | 2011-06-07 |
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