US20060163318A1 - Continuous mode solder jet apparatus and method - Google Patents
Continuous mode solder jet apparatus and method Download PDFInfo
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- US20060163318A1 US20060163318A1 US11/387,162 US38716206A US2006163318A1 US 20060163318 A1 US20060163318 A1 US 20060163318A1 US 38716206 A US38716206 A US 38716206A US 2006163318 A1 US2006163318 A1 US 2006163318A1
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- 229910000679 solder Inorganic materials 0.000 title claims abstract description 149
- 238000000034 method Methods 0.000 title claims abstract description 20
- 239000000758 substrate Substances 0.000 claims description 47
- 229910001338 liquidmetal Inorganic materials 0.000 claims description 44
- 239000002184 metal Substances 0.000 claims description 28
- 239000007788 liquid Substances 0.000 claims description 20
- 238000000151 deposition Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 6
- 239000000411 inducer Substances 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims 3
- 238000005421 electrostatic potential Methods 0.000 claims 2
- 230000001939 inductive effect Effects 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000001465 metallisation Methods 0.000 claims 1
- 230000007547 defect Effects 0.000 abstract description 6
- 230000008439 repair process Effects 0.000 abstract description 6
- 238000007747 plating Methods 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 101150071746 Pbsn gene Proteins 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
- B23K20/004—Wire welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K3/00—Tools, devices, or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
- B23K3/06—Solder feeding devices; Solder melting pans
- B23K3/0607—Solder feeding devices
- B23K3/0623—Solder feeding devices for shaped solder piece feeding, e.g. preforms, bumps, balls, pellets, droplets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/07—Ink jet characterised by jet control
- B41J2/075—Ink jet characterised by jet control for many-valued deflection
- B41J2/08—Ink jet characterised by jet control for many-valued deflection charge-control type
- B41J2/085—Charge means, e.g. electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/07—Ink jet characterised by jet control
- B41J2/075—Ink jet characterised by jet control for many-valued deflection
- B41J2/08—Ink jet characterised by jet control for many-valued deflection charge-control type
- B41J2/09—Deflection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
- G01N33/68—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing involving proteins, peptides or amino acids
- G01N33/6803—General methods of protein analysis not limited to specific proteins or families of proteins
- G01N33/6842—Proteomic analysis of subsets of protein mixtures with reduced complexity, e.g. membrane proteins, phosphoproteins, organelle proteins
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
- B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
- B22F9/082—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
- B22F2009/0836—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid with electric or magnetic field or induction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
- H05K2203/013—Inkjet printing, e.g. for printing insulating material or resist
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/10—Using electric, magnetic and electromagnetic fields; Using laser light
- H05K2203/105—Using an electrical field; Special methods of applying an electric potential
Definitions
- the present invention relates generally to applying solder to a substrate and, more particularly, to the selected placement of solder using a solder jet.
- Depositing solder selectively on a substrate is well known. Different techniques include stenciling or screening a solder paste onto the substrate, using solder balls selectively placed where metal contact is desired, and chemically vapor depositing the metal onto the surface of the substrate. Each one of these methods has advantages and disadvantages.
- solder balls have been a tremendous advance in the art of electrically connecting a device to the surface of a printed circuit board.
- Solder balls have quality control problems as their critical dimensions continue to decrease.
- the ability to produce balls of the same diameter consistently decreases as the diameter decreases.
- the range of acceptable product can be solder balls having diameters more than twice the desired diameter. Or, they can have diameters half the size of the desired diameter. This requires that the tolerances at the surface contact level of a substrate, such as a semiconductor device, must allow for a solder ball having a diameter that is from 50% smaller to 100% larger than the specified size. Further, working with solder balls is difficult because of their size and the methods needed to place them accurately.
- CVD Chemical vapor deposition
- PCB printed circuit board
- a new approach to deposit solder on a surface, such as a printed circuit board (PCB), is to deposit the solder using a solder jet, similar to the manner in which ink jets deposit ink onto paper for printing.
- the ink jet technology is well established, but due to different problems associated with solder, ink jet technology is not directly applicable to solder jet technology.
- solder jets use molten melt as a print agent, whereas ink jets use heated water-based ink. Since the print agent is metal in solder jets, the viscosities and densities are much different as are the operating temperatures. Thus, applying ink jet solutions to solder jet problems is impractical.
- solder jet apparatus takes liquid solder and forms it into a stream of droplets that have a uniform size and composition.
- the formation of the droplets involves generating a consistent pressure coupled with a vibration force sufficient enough to dislodge the drops from the jet nozzle in a steady state with a uniform size and consistency.
- gravity forces them downward where they impact on the surface of the substrate.
- the solder droplets pass through a charging electrode to impart a charge on the metal droplets.
- the system operates using a binary control that either allows the droplets to impact on the surface or to be removed into a droplet catcher for recycling when no droplets are desired. Since the droplets were charged at one point, an electric field or pulse can be asserted, causing the droplets to either continue to the surface or to fall into the catcher. With this system, the exact position of the droplets is known and never varies. Thus, the substrate must be moved to the desired grid for the droplets to impact the area desired to be soldered. This results in a highly inefficient system since the substrate must be stopped for each application of solder to a new location. This also involves greater mechanical complexity since the table holding the substrate, or the solder jet apparatus itself, must be moved and aligned properly before solder can be deposited.
- solder applicator that allows for greater precision in placing the droplets along with increased efficiency in product throughput.
- a solder jet apparatus is disclosed.
- the solder jet apparatus is a continuous mode solder jet that includes a blanking system and raster scan system.
- the use of the raster scan and blanking systems allows for a continuous stream of solder to be placed anywhere on the surface in any desired X-Y plane. This allows for greater accuracy as well as greater product throughput. Additionally, with the raster scan system, repairs to existing soldered surfaces can be quickly and easily performed using a map of the defects for directing the solder to the defects.
- FIG. 1 is a schematic block diagram of a solder jet apparatus according to the present invention.
- FIG. 2 is a top plan view of a substrate having solder deposited according to the solder jet apparatus of FIG. 1 .
- solder jet apparatus 10 is depicted in the schematic block diagram of FIG. 1 .
- Solder jet apparatus 10 deposits metal on substrate 12 in the form of solder droplets 14 .
- the solder droplets 14 can be directed in an X-Y plane of deflection using a raster scan and blanking system. This allows the solder droplets to be “written” on substrate 12 .
- the solder droplets 14 are formed from melted metal held in liquid metal reservoir 16 .
- a temperature controller 18 is connected to liquid metal reservoir 16 so that the temperature of the liquid metal held in the reservoir can be kept at a desired temperature that leads to optimum droplet formation and release.
- the solder eutectic temperature at the point of release is 190° C. and its temperature at impact is 183° C.
- a constant surrounding temperature is provided and, if desired, the apparatus can be placed in a container that is either under vacuum or is filled with an inert gas.
- the solder droplets 14 can be formed by the application of a driving pressure and a sufficient vibration force.
- the driving pressure can be provided by pressure inducer 20 , which is comprised of a piezoelectric crystal that is driven by a tuning frequency sufficient enough to cause pressure to build up in liquid metal reservoir 16 .
- the mechanical vibration is generated by vibrator 22 , which comprises a second piezoelectric crystal that is driven by another tuning frequency, causing liquid metal reservoir 16 to vibrate.
- the timing of the pressure and the vibrations is established so as to produce uniform droplets of the same consistency.
- Liquid metal reservoir 16 further includes a solder jet nozzle 23 , which is opened and closed via a solenoid 24 .
- the aperture of solder jet nozzle 23 is selected with a size sufficient enough to generate the droplets of a desired size.
- the solder droplets 14 are formed having a diameter of micron size, ranging from 40-300.
- Solder droplets 14 pass through several zones before either being deposited on substrate 12 or recycled back to liquid metal reservoir 16 .
- the first zone is a charging field driven by charge driver 26 .
- Charge driver 26 causes charge electrodes 28 to generate an electric field therebetween. As solder droplets 14 pass past charge electrodes 28 , they are imparted with an electric charge. With this charge, solder droplets 14 can be deflected at later stages as appropriate.
- the second zone is a blanking zone that uses blanking electrodes or coil 30 .
- the blanking electrodes are activated having sufficient electric field so as to cause solder droplets 14 to deflect to a catcher 32 . This is the return function of the scanning function as is described below.
- Catcher 32 catches the liquid solder and causes the metal to be recycled to liquid metal reservoir 16 . This prevents solder droplets 14 from depositing on the surface of substrate 12 .
- This blanking can be done in a selective manner so that droplets are deposited in some locations, but not others.
- Blanking electrodes or coil 30 are controlled by signal controller 34 .
- Signal controller 34 can be a signal processor such as a computer system.
- the computer system allows greater control of solder droplets 14 by programming the blanking electrodes or coil 30 to turn on and off in a desired sequence so as to pattern the substrate with a desired solder pattern.
- An alternative embodiment can include an air jet system if the electrical pulse is insufficient to remove the droplets.
- a photo cell can be located above the air jet system in order to ensure proper timing of electrical pulses or the air pressure.
- the third zone is the raster scan system and includes electrostatic deflection plates or magnetic coil 36 .
- Electrostatic deflection plates 36 are charged by signal controller 34 so that solder droplets 14 are deflected in either the horizontal X-direction or the vertical Y-direction, or both. Further, the solder droplets 14 can be held in a steady position in the X-Y plane in order to build up the solder to a desired height. Since the droplet stream now scans in the X- and Y-directions, the substrate 12 can now stay stationary throughout the droplet application process.
- Signal controller 34 can be programmed to perform a variety of soldering patterns for placing solder droplets 14 on substrate 12 .
- a CAD/CAM system programmed with a desired output sends signals to blanking electrodes 30 and to electrostatic deflection plates 36 to guide the droplet stream in the desired pattern of placing droplets in certain locations, but not in others. Additionally, when the “stream” of solder droplets 14 is returned to the beginning of the horizontal scan, blanking electrodes 30 cause the solder droplets 14 to deflect to catcher 32 so as not to “write” across the substrate during the return scan. The location of blanking electrodes 30 and electrostatic deflection plates 36 can be switched, if desired.
- An electronic light sensor 38 which connects to signal controller 34 , is positioned so that the solder droplets 14 pass through the electronic light sensor 38 .
- Electronic light sensor 38 is used to count the number of solder droplets 14 passing by. This allows signal controller 34 to monitor the droplet output and either blank or pass droplets as needed.
- FIG. 2 is a top plan view of the surface of substrate 12 as solder droplets 14 are deposited.
- a first line 40 scans across the surface, depositing solder droplets 14 in selected positions and leaving blanks 42 in the remaining positions.
- a return scan line 44 which is ghosted, indicates when the stream of droplets is caught by catcher 32 as the stream returns to the beginning of the next line 40 . This process is repeated as often as is necessary with catcher 32 collecting all the blank spots and scan returns.
- solenoid 24 can be activated to close solder jet nozzle 23 during the return scan. This also prevents unwanted solder droplets 14 from depositing on the surface of substrate 12 .
- the type of solder used with the solder jet apparatus 10 can include any type of metal solder such as, for example, 63/37 PbSN, 62/36/2PbSnAa, In/Sn.
- the solder jet apparatus 10 can be used for many types of solder application.
- One type of application includes that of applying uniform solder balls, in the form of solder droplets, to the substrate 12 .
- This provides a universal ball applicator system.
- the system can repair particular locations where the solder ball application process has failed to insert a desired solder ball.
- a scan of the surface of substrate 12 can be provided and then a map of the defective areas can be programmed to the signal controller 34 . This allows for a rapid repair of the surface of substrate 12 where solder balls had been omitted.
- Another application is to pre-tin a location on substrate 12 . Pre-tinning is accomplished by applying one or more droplets to the same location or to apply droplets in such a manner as to thoroughly cover the surface of substrate 12 or a grid section of substrate 12 .
- pre-plating a board Similar to pre-tinning is pre-plating a board.
- Pre-plating a board involves applying solder droplets over the entire surface area of the board to cover it with a metal plate. An exposed portion of the board can be selected where desirable. Typically, this area is along the edge of the board either on one edge, two edges, or all four edges, or can be in the center section of the board.
- Prior methods of pre-plating a board resulted in a problem known as “measling.” Measling is where small holes exist in the plating surface that lead to electrical defaults.
- the use of the solder jet apparatus 10 allows the system to eliminate the measling locations by applying solder directly to those openings.
- solder jet apparatus 10 eliminates measling entirely.
- pre-plated boards may have measling problems
- boards that had been stenciled with solder paste had similar problems. These problems can include openings or gaps in the stenciled design.
- a map of the surface defects can be ascertained and then used by the signal controller 34 to make appropriate correction and repair to those particular problem points.
- large areas can be printed using the X-Y motion of the table in combination with the X-Y slowing of the solder application.
- the final ball size can be changed on demand. Further, in prior ball application systems that apply 7 balls/sec, the board needs to be moved to a new location. With this invention, no relocation time is required, thus reducing processing time.
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Abstract
A solder jet apparatus and method is disclosed. The solder jet apparatus is a continuous mode solder jet that includes a blanking system and raster scan system. The use of the raster scan and blanking systems allows for a continuous stream of solder to be placed anywhere on the surface in any desired X-Y plane. This allows for greater accuracy as well as greater product throughput. Additionally, with the raster scan system, repairs to existing soldered surfaces can be quickly and easily performed using a map of the defects for directing the solder to the defects.
Description
- This application is a continuation of application Ser. No. 10/616,184, filed Jul. 7, 2003, pending, which is a continuation of application Ser. No. 10/159,000, filed May 30, 2002, now U.S. Pat. No. 6,588,645, issued Jul. 8, 2003, which is a continuation of application Ser. No. 09/924,525, filed Aug. 8, 2001, now U.S. Pat. No. 6,443,350, issued Sep. 3, 2002, which is a continuation of application Ser. No. 09/569,215, filed May 11, 2000, now U.S. Pat. No. 6,325,271, issued Dec. 4, 2001, which is a continuation of application Ser. No. 09/388,032, filed Sep. 1, 1999, now U.S. Pat. No. 6,082,605, issued Jul. 4, 2000, which is a continuation of application Ser. No. 08/989,578, filed Dec. 12, 1997, now U.S. Pat. No. 5,988,480, issued Nov. 23, 1999.
- The present invention relates generally to applying solder to a substrate and, more particularly, to the selected placement of solder using a solder jet.
- Depositing solder selectively on a substrate is well known. Different techniques include stenciling or screening a solder paste onto the substrate, using solder balls selectively placed where metal contact is desired, and chemically vapor depositing the metal onto the surface of the substrate. Each one of these methods has advantages and disadvantages.
- The use of a stencil to fabricate a conductive trace pattern on the surface allows for precise alignment and placement of the solder. Unfortunately, the stencils are expensive to design and produce and they wear out after repeated use. When they wear out, solder seeps through the worn stencil areas across those areas where no solder is desired, causing shorts, or no solder is being placed where it is needed, causing a breach or open connection. These areas have to be repaired and if these types of conditions are repeated with any type of frequency, the stencil must be replaced with a new stencil. Additionally, stencils require periodic cleaning, which adds another processing step to clean the stencil as well as lessens the useful life of the stencil.
- The use of solder balls has been a tremendous advance in the art of electrically connecting a device to the surface of a printed circuit board. Solder balls, however, have quality control problems as their critical dimensions continue to decrease. The ability to produce balls of the same diameter consistently decreases as the diameter decreases. Thus, for some diameters of solder balls, the range of acceptable product can be solder balls having diameters more than twice the desired diameter. Or, they can have diameters half the size of the desired diameter. This requires that the tolerances at the surface contact level of a substrate, such as a semiconductor device, must allow for a solder ball having a diameter that is from 50% smaller to 100% larger than the specified size. Further, working with solder balls is difficult because of their size and the methods needed to place them accurately. When they fail to be placed accurately, or are missing entirely, problems occur in the resulting assembly of a semiconductor device attached to a substrate that must be corrected. These problems include shorts or opens that must be fixed. No easy solution yet exists for repairing missing or improperly sized solder balls after a semiconductor device has been mechanically attached in place on a substrate.
- Chemical vapor deposition (CVD) allows for precise alignment of conductive traces and for batch processing. CVD does have limitations however. These limitations include being unable to place the package directly on the surface of the printed circuit board (PCB) immediately after depositing the metal on the surface since a cooling step is typically needed. Further, clean conditions are always necessary when using CVD, which requires expensive equipment and control. Additionally, when clean conditions do not exist, shorts or opens in assemblies can occur that need to be repaired once they are discovered.
- A new approach to deposit solder on a surface, such as a printed circuit board (PCB), is to deposit the solder using a solder jet, similar to the manner in which ink jets deposit ink onto paper for printing. The ink jet technology is well established, but due to different problems associated with solder, ink jet technology is not directly applicable to solder jet technology. For example, solder jets use molten melt as a print agent, whereas ink jets use heated water-based ink. Since the print agent is metal in solder jets, the viscosities and densities are much different as are the operating temperatures. Thus, applying ink jet solutions to solder jet problems is impractical.
- One typical solder jet apparatus has recently been developed by MPM Corporation. The solder jet apparatus takes liquid solder and forms it into a stream of droplets that have a uniform size and composition. The formation of the droplets involves generating a consistent pressure coupled with a vibration force sufficient enough to dislodge the drops from the jet nozzle in a steady state with a uniform size and consistency. Once the solder droplets are formed, gravity forces them downward where they impact on the surface of the substrate. The solder droplets pass through a charging electrode to impart a charge on the metal droplets.
- The system operates using a binary control that either allows the droplets to impact on the surface or to be removed into a droplet catcher for recycling when no droplets are desired. Since the droplets were charged at one point, an electric field or pulse can be asserted, causing the droplets to either continue to the surface or to fall into the catcher. With this system, the exact position of the droplets is known and never varies. Thus, the substrate must be moved to the desired grid for the droplets to impact the area desired to be soldered. This results in a highly inefficient system since the substrate must be stopped for each application of solder to a new location. This also involves greater mechanical complexity since the table holding the substrate, or the solder jet apparatus itself, must be moved and aligned properly before solder can be deposited.
- Accordingly, what is needed is a solder applicator that allows for greater precision in placing the droplets along with increased efficiency in product throughput.
- According to the present invention, a solder jet apparatus is disclosed. The solder jet apparatus is a continuous mode solder jet that includes a blanking system and raster scan system. The use of the raster scan and blanking systems allows for a continuous stream of solder to be placed anywhere on the surface in any desired X-Y plane. This allows for greater accuracy as well as greater product throughput. Additionally, with the raster scan system, repairs to existing soldered surfaces can be quickly and easily performed using a map of the defects for directing the solder to the defects.
-
FIG. 1 is a schematic block diagram of a solder jet apparatus according to the present invention; and -
FIG. 2 is a top plan view of a substrate having solder deposited according to the solder jet apparatus ofFIG. 1 . - A
solder jet apparatus 10 is depicted in the schematic block diagram ofFIG. 1 .Solder jet apparatus 10 deposits metal onsubstrate 12 in the form ofsolder droplets 14. Thesolder droplets 14 can be directed in an X-Y plane of deflection using a raster scan and blanking system. This allows the solder droplets to be “written” onsubstrate 12. - The
solder droplets 14 are formed from melted metal held inliquid metal reservoir 16. Atemperature controller 18 is connected toliquid metal reservoir 16 so that the temperature of the liquid metal held in the reservoir can be kept at a desired temperature that leads to optimum droplet formation and release. For example, the solder eutectic temperature at the point of release is 190° C. and its temperature at impact is 183° C. To preventsolder droplets 14 from cooling too rapidly or from oxidizing, a constant surrounding temperature is provided and, if desired, the apparatus can be placed in a container that is either under vacuum or is filled with an inert gas. - The
solder droplets 14 can be formed by the application of a driving pressure and a sufficient vibration force. The driving pressure can be provided bypressure inducer 20, which is comprised of a piezoelectric crystal that is driven by a tuning frequency sufficient enough to cause pressure to build up inliquid metal reservoir 16. The mechanical vibration is generated byvibrator 22, which comprises a second piezoelectric crystal that is driven by another tuning frequency, causingliquid metal reservoir 16 to vibrate. The timing of the pressure and the vibrations is established so as to produce uniform droplets of the same consistency. Once thesolder droplets 14 are formed, the vibration releases them fromliquid metal reservoir 16 and the force of gravity draws them down at a predictable velocity. -
Liquid metal reservoir 16 further includes asolder jet nozzle 23, which is opened and closed via asolenoid 24. The aperture ofsolder jet nozzle 23 is selected with a size sufficient enough to generate the droplets of a desired size. Thesolder droplets 14 are formed having a diameter of micron size, ranging from 40-300. Whensolenoid 24 is activated, it either closes or openssolder jet nozzle 23. -
Solder droplets 14 pass through several zones before either being deposited onsubstrate 12 or recycled back toliquid metal reservoir 16. The first zone is a charging field driven bycharge driver 26.Charge driver 26 causescharge electrodes 28 to generate an electric field therebetween. Assolder droplets 14 passpast charge electrodes 28, they are imparted with an electric charge. With this charge,solder droplets 14 can be deflected at later stages as appropriate. - The second zone is a blanking zone that uses blanking electrodes or
coil 30. The blanking electrodes are activated having sufficient electric field so as to causesolder droplets 14 to deflect to acatcher 32. This is the return function of the scanning function as is described below.Catcher 32 catches the liquid solder and causes the metal to be recycled toliquid metal reservoir 16. This preventssolder droplets 14 from depositing on the surface ofsubstrate 12. This blanking can be done in a selective manner so that droplets are deposited in some locations, but not others. Blanking electrodes orcoil 30 are controlled bysignal controller 34.Signal controller 34 can be a signal processor such as a computer system. The computer system allows greater control ofsolder droplets 14 by programming the blanking electrodes orcoil 30 to turn on and off in a desired sequence so as to pattern the substrate with a desired solder pattern. An alternative embodiment can include an air jet system if the electrical pulse is insufficient to remove the droplets. A photo cell can be located above the air jet system in order to ensure proper timing of electrical pulses or the air pressure. - The third zone is the raster scan system and includes electrostatic deflection plates or
magnetic coil 36.Electrostatic deflection plates 36 are charged bysignal controller 34 so thatsolder droplets 14 are deflected in either the horizontal X-direction or the vertical Y-direction, or both. Further, thesolder droplets 14 can be held in a steady position in the X-Y plane in order to build up the solder to a desired height. Since the droplet stream now scans in the X- and Y-directions, thesubstrate 12 can now stay stationary throughout the droplet application process.Signal controller 34 can be programmed to perform a variety of soldering patterns for placingsolder droplets 14 onsubstrate 12. For example, a CAD/CAM system programmed with a desired output sends signals to blankingelectrodes 30 and toelectrostatic deflection plates 36 to guide the droplet stream in the desired pattern of placing droplets in certain locations, but not in others. Additionally, when the “stream” ofsolder droplets 14 is returned to the beginning of the horizontal scan, blankingelectrodes 30 cause thesolder droplets 14 to deflect tocatcher 32 so as not to “write” across the substrate during the return scan. The location of blankingelectrodes 30 andelectrostatic deflection plates 36 can be switched, if desired. - An electronic
light sensor 38, which connects to signalcontroller 34, is positioned so that thesolder droplets 14 pass through theelectronic light sensor 38. Electroniclight sensor 38 is used to count the number ofsolder droplets 14 passing by. This allowssignal controller 34 to monitor the droplet output and either blank or pass droplets as needed. -
FIG. 2 is a top plan view of the surface ofsubstrate 12 assolder droplets 14 are deposited. Afirst line 40 scans across the surface, depositingsolder droplets 14 in selected positions and leavingblanks 42 in the remaining positions. Areturn scan line 44, which is ghosted, indicates when the stream of droplets is caught bycatcher 32 as the stream returns to the beginning of thenext line 40. This process is repeated as often as is necessary withcatcher 32 collecting all the blank spots and scan returns. Alternatively,solenoid 24 can be activated to closesolder jet nozzle 23 during the return scan. This also preventsunwanted solder droplets 14 from depositing on the surface ofsubstrate 12. - The type of solder used with the
solder jet apparatus 10 can include any type of metal solder such as, for example, 63/37 PbSN, 62/36/2PbSnAa, In/Sn. - The
solder jet apparatus 10 can be used for many types of solder application. One type of application includes that of applying uniform solder balls, in the form of solder droplets, to thesubstrate 12. This provides a universal ball applicator system. Further, the system can repair particular locations where the solder ball application process has failed to insert a desired solder ball. In order to repair any and all solder ball defects, a scan of the surface ofsubstrate 12 can be provided and then a map of the defective areas can be programmed to thesignal controller 34. This allows for a rapid repair of the surface ofsubstrate 12 where solder balls had been omitted. Another application is to pre-tin a location onsubstrate 12. Pre-tinning is accomplished by applying one or more droplets to the same location or to apply droplets in such a manner as to thoroughly cover the surface ofsubstrate 12 or a grid section ofsubstrate 12. - Similar to pre-tinning is pre-plating a board. Pre-plating a board involves applying solder droplets over the entire surface area of the board to cover it with a metal plate. An exposed portion of the board can be selected where desirable. Typically, this area is along the edge of the board either on one edge, two edges, or all four edges, or can be in the center section of the board. Prior methods of pre-plating a board resulted in a problem known as “measling.” Measling is where small holes exist in the plating surface that lead to electrical defaults. The use of the
solder jet apparatus 10 allows the system to eliminate the measling locations by applying solder directly to those openings. Additionally, using the pre-plating process provided bysolder jet apparatus 10 eliminates measling entirely. Just as pre-plated boards may have measling problems, boards that had been stenciled with solder paste had similar problems. These problems can include openings or gaps in the stenciled design. Again, a map of the surface defects can be ascertained and then used by thesignal controller 34 to make appropriate correction and repair to those particular problem points. Additionally, large areas can be printed using the X-Y motion of the table in combination with the X-Y slowing of the solder application. Also, the final ball size can be changed on demand. Further, in prior ball application systems that apply 7 balls/sec, the board needs to be moved to a new location. With this invention, no relocation time is required, thus reducing processing time. - While the present invention has been described in terms of certain preferred embodiments, it is not so limited, and those of ordinary skill in the art will readily recognize and appreciate that many additions, deletions and modifications to the embodiments described herein may be made without departing from the scope of the invention as hereinafter claimed.
Claims (19)
1. A liquid metal deposition apparatus comprising:
a continuous stream generator for producing a stream of liquid metal solder droplets, the liquid metal solder droplets having a substantially uniform size within a consistent predetermined range, the consistent predetermined range of substantially uniform size metal solder droplets being within a size of a selected bond pad of one a semiconductor die and the contact pads of the substrate; and
a director for selectively directing a stream of liquid metal solder droplets after being produced by the continuous stream generator onto the selected bond pads of the at least one semiconductor die of the substrate, the stream director including a raster scanner for scanning the stream of liquid metal solder droplets, the raster scanner including:
an electrical charge generator for charging at least a portion of the liquid metal solder droplets of the stream of liquid metal solder droplets with an electrical charge;
a stream blanking device for intermittently blanking at least some of the liquid metal solder droplets of the stream of liquid metal solder droplets; and
an electrically charged droplet deflector for deflecting at least one electrically charged liquid metal solder droplet of the stream of liquid metal solder droplets in a first direction and a second direction for deposition at a location of a plurality of locations extending throughout the surface of the substrate while the substrate remains stationary.
2. The apparatus according to claim 1 , wherein the continuous stream generator comprises:
a pressure inducer; and
the vibrator comprises a vibrator connected to the pressure inducer for causing formation of the stream of liquid metal solder droplets in connection with the pressure inducer.
3. The apparatus according to claim 2 , wherein the pressure inducer comprises a piezoelectric crystal operating at a desired frequency.
4. The apparatus according to claim 2 , wherein the vibrator comprises a piezoelectric crystal operating at a selected frequency to form liquid metal droplets having a size in the range of micron size droplets of a liquid metal solder.
5. The apparatus according to claim 1 , wherein the continuous stream generator includes a solder jet nozzle having an aperture producing a consistent range of droplets of the liquid metal solder for forming the stream of liquid metal solder droplets.
6. The apparatus according to claim 5 , wherein the continuous stream generator further includes a solenoid connected to the solder jet nozzle.
7. The apparatus according to claim 1 , wherein the stream blanking device at least provides blanking of the at least some of the stream of liquid metal solder droplets when the stream of liquid metal solder droplets is positioned between the endpoint of a first location of the plurality of locations extending throughout the surface of the substrate and the start point of a second location of the plurality of locations extending throughout the surface of the substrate.
8. The apparatus according to claim 1 , wherein the stream blanking device comprises:
a deflector field device selectively deflecting at least one droplet of the stream of liquid metal solder droplets; and
a droplet catcher catching the at least one droplet which has been deflected from the stream of liquid metal solder droplets prior to the at least one droplet which has been deflected from the stream of liquid solder droplets being deposited on at least one bond pad of the at least one semiconductor die of the substrate.
9. The apparatus according to claim 1 , wherein the stream director includes a programmable direction controller for determining a direction of the stream of liquid metal solder droplets.
10. A method for depositing liquid metal comprising:
producing a stream of liquid metal solder droplets having a substantially uniform size within a consistent predetermined range, the consistent predetermined range of substantially uniform size metal solder droplets being within a size of a selected bond pad of one a semiconductor die and the contact pads of the substrate; and
directing a stream of liquid metal solder droplets after being produced by the continuous stream generator onto the selected bond pads of the at least one semiconductor die of the substrate, the stream director including a raster scanner for scanning the stream of liquid metal solder droplets, the raster scanner including:
an electrical charge generator for charging at least a portion of the liquid metal solder droplets of the stream of liquid metal solder droplets with an electrical charge;
a stream blanking device for intermittently blanking at least some of the liquid metal solder droplets of the stream of liquid metal solder droplets; and
deflecting at least one electrically charged liquid metal solder droplet of the stream of liquid metal solder droplets in a first direction and a second direction for deposition at a location of a plurality of locations extending throughout the surface of the substrate while the substrate remains stationary using an electrically charged droplet deflector.
11. The method according to claim 10 , wherein said producing further comprises:
heating a solder metal to a liquid state in the reservoir; and
controlling a temperature of the liquid solder metal in the reservoir for providing said stream of liquid solder metal droplets in said liquid state while selectively directing said stream of liquid solder metal droplets for contacting portions of a substrate located on a stationary support.
12. The method according to claim 10 , wherein said producing further comprises:
inducing a pressure on a source of liquid metal; and
vibrating said liquid metal to cause said stream of liquid solder metal droplets to be formed as said pressure is induced on said source of liquid metal.
13. The method according to claim 12 , wherein said pressure inducing is generated by a first piezoelectric crystal driven by a given frequency to produce a desired pressure.
14. The method according to claim 13 , wherein said vibrating is generated by a second piezoelectric crystal driven by a selected frequency to produce a given vibration frequency sufficient enough to form droplets having a diameter in the range of 40 microns to 300 microns.
15. The method according to claim 10 , wherein said producing further comprises forming said stream of liquid solder metal droplets having a consistent diameter in the range of 40 microns to 300 microns.
16. The method according to claim 10 , wherein said blanking comprises blanking when said stream of liquid solder metal droplets is positioned between an endpoint of a first horizontal scan line and a start point of a second horizontal scan line with respect to a substrate located on a stationary support.
17. The method according to claim 10 , wherein said blanking further comprises:
deflecting said stream of liquid solder metal droplets; and
catching said deflected stream of liquid solder metal droplets to prevent said drops from being deposited on said substrate located on a stationary support.
18. The method according to claim 10 , wherein said directing comprises
programmably controlling a direction of said stream of liquid solder metal droplets for deposition on portions of a substrate located on a stationary support.
19. The method of claim 10 , wherein the directing said stream of liquid solder metal droplets in a first dimension and a second dimension, such that solder is deposited at said locations on a substrate maintained in a stationary portion located on said stationary support, said directing comprising:
raster scanning said stream of liquid solder metal droplets, said raster scanning including electrically charging said stream of liquid solder metal droplets;
electrostatically deflecting said electrically charged stream of liquid solder metal droplets in a first variable electrostatic potential in said first dimension for contacting portions of a substrate located on a stationary support;
electrostatically deflecting said electrically charged stream of liquid metal droplets in a second variable electrostatic potential in said second dimension to said locations on said substrate located on a stationary support; and
blanking selectively said stream of liquid solder metal droplets to prevent a portion of said stream of liquid solder metal droplets from contacting said substrate located on a stationary support.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/387,162 US20060163318A1 (en) | 1997-12-12 | 2006-03-23 | Continuous mode solder jet apparatus and method |
US11/604,442 US20070068996A1 (en) | 1997-12-12 | 2006-11-27 | Continuous mode solder jet apparatus |
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/989,578 US5988480A (en) | 1997-12-12 | 1997-12-12 | Continuous mode solder jet apparatus |
US09/388,032 US6082605A (en) | 1997-12-12 | 1999-09-01 | Continuous mode solder jet apparatus |
US09/569,215 US6325271B1 (en) | 1996-12-13 | 2000-05-11 | Continuous mode solder jet apparatus |
US09/924,525 US6443350B2 (en) | 1997-12-12 | 2001-08-08 | Continuous mode solder jet apparatus |
US10/159,000 US6588645B2 (en) | 1997-12-12 | 2002-05-30 | Continuous mode solder jet apparatus |
US10/616,184 US7159752B2 (en) | 1997-12-12 | 2003-07-07 | Continuous mode solder jet apparatus |
US11/387,162 US20060163318A1 (en) | 1997-12-12 | 2006-03-23 | Continuous mode solder jet apparatus and method |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/616,184 Continuation US7159752B2 (en) | 1997-12-12 | 2003-07-07 | Continuous mode solder jet apparatus |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/604,442 Division US20070068996A1 (en) | 1997-12-12 | 2006-11-27 | Continuous mode solder jet apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
US20060163318A1 true US20060163318A1 (en) | 2006-07-27 |
Family
ID=25535241
Family Applications (10)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/989,578 Expired - Lifetime US5988480A (en) | 1996-12-13 | 1997-12-12 | Continuous mode solder jet apparatus |
US09/339,015 Expired - Fee Related US6350494B1 (en) | 1997-12-12 | 1999-06-23 | Method for generating continuous stream of liquid metal droplets |
US09/388,032 Expired - Lifetime US6082605A (en) | 1996-12-13 | 1999-09-01 | Continuous mode solder jet apparatus |
US09/569,215 Expired - Fee Related US6325271B1 (en) | 1996-12-13 | 2000-05-11 | Continuous mode solder jet apparatus |
US09/924,525 Expired - Lifetime US6443350B2 (en) | 1997-12-12 | 2001-08-08 | Continuous mode solder jet apparatus |
US09/944,508 Expired - Fee Related US6960373B2 (en) | 1997-12-12 | 2001-08-30 | Continuous mode solder jet method |
US10/159,000 Expired - Fee Related US6588645B2 (en) | 1997-12-12 | 2002-05-30 | Continuous mode solder jet apparatus |
US10/616,184 Expired - Fee Related US7159752B2 (en) | 1997-12-12 | 2003-07-07 | Continuous mode solder jet apparatus |
US11/387,162 Abandoned US20060163318A1 (en) | 1997-12-12 | 2006-03-23 | Continuous mode solder jet apparatus and method |
US11/604,442 Abandoned US20070068996A1 (en) | 1997-12-12 | 2006-11-27 | Continuous mode solder jet apparatus |
Family Applications Before (8)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/989,578 Expired - Lifetime US5988480A (en) | 1996-12-13 | 1997-12-12 | Continuous mode solder jet apparatus |
US09/339,015 Expired - Fee Related US6350494B1 (en) | 1997-12-12 | 1999-06-23 | Method for generating continuous stream of liquid metal droplets |
US09/388,032 Expired - Lifetime US6082605A (en) | 1996-12-13 | 1999-09-01 | Continuous mode solder jet apparatus |
US09/569,215 Expired - Fee Related US6325271B1 (en) | 1996-12-13 | 2000-05-11 | Continuous mode solder jet apparatus |
US09/924,525 Expired - Lifetime US6443350B2 (en) | 1997-12-12 | 2001-08-08 | Continuous mode solder jet apparatus |
US09/944,508 Expired - Fee Related US6960373B2 (en) | 1997-12-12 | 2001-08-30 | Continuous mode solder jet method |
US10/159,000 Expired - Fee Related US6588645B2 (en) | 1997-12-12 | 2002-05-30 | Continuous mode solder jet apparatus |
US10/616,184 Expired - Fee Related US7159752B2 (en) | 1997-12-12 | 2003-07-07 | Continuous mode solder jet apparatus |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/604,442 Abandoned US20070068996A1 (en) | 1997-12-12 | 2006-11-27 | Continuous mode solder jet apparatus |
Country Status (1)
Country | Link |
---|---|
US (10) | US5988480A (en) |
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US20090179019A1 (en) * | 2008-01-16 | 2009-07-16 | International Business Machines Corporation | Removing material from defective opening in glass mold |
US20090179020A1 (en) * | 2008-01-16 | 2009-07-16 | International Business Machines Corporation | Removing material from defective opening in glass mold and related glass mold for injection molded solder |
US8237086B2 (en) | 2008-01-16 | 2012-08-07 | International Business Machines Corporation | Removing material from defective opening in glass mold |
US8800952B2 (en) | 2008-01-16 | 2014-08-12 | International Business Machines Corporation | Removing material from defective opening in glass mold and related glass mold for injection molded solder |
US9254533B2 (en) | 2008-01-16 | 2016-02-09 | GlobalFoundries, Inc. | Removing material from defective opening in glass mold |
Also Published As
Publication number | Publication date |
---|---|
US6443350B2 (en) | 2002-09-03 |
US6325271B1 (en) | 2001-12-04 |
US20040026479A1 (en) | 2004-02-12 |
US6960373B2 (en) | 2005-11-01 |
US20070068996A1 (en) | 2007-03-29 |
US20020145030A1 (en) | 2002-10-10 |
US20020031612A1 (en) | 2002-03-14 |
US5988480A (en) | 1999-11-23 |
US6082605A (en) | 2000-07-04 |
US6588645B2 (en) | 2003-07-08 |
US7159752B2 (en) | 2007-01-09 |
US20010048017A1 (en) | 2001-12-06 |
US6350494B1 (en) | 2002-02-26 |
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