US20040085700A1 - Delay line and transistor with RC delay gate - Google Patents
Delay line and transistor with RC delay gate Download PDFInfo
- Publication number
- US20040085700A1 US20040085700A1 US10/696,101 US69610103A US2004085700A1 US 20040085700 A1 US20040085700 A1 US 20040085700A1 US 69610103 A US69610103 A US 69610103A US 2004085700 A1 US2004085700 A1 US 2004085700A1
- Authority
- US
- United States
- Prior art keywords
- delay
- transistor
- substrate
- coupled
- input signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000009966 trimming Methods 0.000 claims abstract description 88
- 230000007423 decrease Effects 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims description 42
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 16
- 229920005591 polysilicon Polymers 0.000 claims description 16
- 238000001914 filtration Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 13
- 238000010586 diagram Methods 0.000 description 13
- 230000008569 process Effects 0.000 description 8
- 230000008901 benefit Effects 0.000 description 7
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 230000001965 increasing effect Effects 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000001934 delay Effects 0.000 description 3
- 230000002708 enhancing effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000012421 spiking Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
- G11C17/14—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM
- G11C17/18—Auxiliary circuits, e.g. for writing into memory
Definitions
- the present invention relates generally to integrated circuits. More particularly, embodiments of the invention relate to a method and apparatus for implementing trimming circuits.
- Trimming circuits are used to configure and fine-tune IC products to meet final specification requirements. Such a trimming process typically occurs during the final stages of production. ICs are typically constructed with redundant circuit elements that are enabled or disabled by eliminating certain connections. The trimming process should reliably disengage undesired electrical connections while securely maintaining connections at other locations, as needed, for the lifetime of the product.
- fuses are also referred to as trimming fuses.
- One common method used for trimming involves intentional loading of certain metal structures—fuses—with current well beyond the carrying capability of the fuse line. This results in vaporization of the metal and electrical discontinuity. Trimming is usually done on automatic testing machines using test programs that select the fuses to be eliminated. Fuse trimming is done by passing several hundred milliamps through the metal line. This instantaneously heats up the fuse to a high enough temperature so that it vaporizes within microseconds. Typically, the current passes to the fuse through a dedicated pad. Also, the external circuit can include a power supply with sufficient current carrying capability to eliminate several fuses at a time.
- Partial trimming can result in a trimmed fuse that has a lower than acceptable residual resistance. This is undesirable after trimming and for the lifetime of the product because once this occurs the fuse can not be trimmed again. If the residual conductance is not high enough, sufficient current is unable to flow through the fuse and dissipate adequate heat to vaporize the residual conductive material.
- Partial trimming of the fuse can be caused by power spikes during a turn-on transition of the power supply. Power spikes can result from the bouncing of relays that turn on the power supply. Power spikes can also result from power ringing within the power supply. Power ringing occurs during the turn-on transition as the circuit used to trim the fuse is closed and a large load is instantaneously realized.
- the circuit should remove power bouncing and voltage spiking during trimming. This circuit should also be capable of conducting sufficient current through the trimming fuse to efficiently break the connection with high residual resistance.
- the present invention achieves the above needs with a method and circuitry for implementing trimming circuits. More particularly, embodiments of the present invention provide a transistor that supplies sufficient current to trim a trimming fuse when the transistor is powered up and after it receives a select signal at its gate. Also provided is a delay structure that adds an RC delay to the select signal. The RC delay is of a sufficiently long duration so as to decrease the switching speed of the transistor. The delay structure also provides a pass filter to filter power and voltage spikes in the select signal. Embodiments of the present invention enhance product yield by increasing the amount of IC products meeting specified performance requirements.
- the trimming circuit includes a delay structure that is designed into the gate of a transistor.
- the trimming circuit includes a delay pad structure that is coupled between the first input pad and the gate of the transistor.
- the trimming circuit includes a delay line structure coupled between the delay pad structure and the gate of the transistor.
- the delay structure is designed into a combination of a gate of a transistor, an input pad, and a transmission line.
- Another embodiment provides a delay transistor having a substrate, a plurality of conduction channels embedded in the substrate, and a plurality of active regions embedded in the substrate.
- the active regions alternate with the conduction channels to form source and drain portions of the delay transistor.
- a source contact coupled with first alternating active regions, a drain contact coupled with second alternating active regions, and a gate structure overlaying the conduction channels.
- the gate structure is configured to receive an input signal.
- the gate structure is a single gate structure.
- the gate structure has a serpentine shape to provide an RC delay to an input signal.
- the RC delay is of a sufficiently long duration so as to decrease the switching speed of the transistor.
- the RC attributes of the gate structure provide a pass filter to filter power and voltage spikes in the select signal.
- Another embodiment provides a delay pad structure having a substrate and an active region embedded in the substrate.
- the active region is configured to receive an input signal.
- the active region has a serpentine shape to provide an RC delay to an input signal and to filter power and voltage spikes in the input signal.
- a plurality of diodes coupled with the active region. The diodes are reversed biased and provide additional capacitance to the RC delay.
- Another embodiment provides a delay line structure having a substrate and a thin oxide layer coupled onto a first side of the substrate. Also, included is a polysilicon layer coupled onto the thin oxide layer. The polysilicon layer is configured to receive an input signal. The combination of the thin oxide layer coupled between the substrate and the polysilicon layer provide an RC delay to the input signal and to filter power and voltage spikes in the input signal. The thin oxide and polysilicon layers have a serpentine shape to provide additional RC delay to an input signal. Also, included is a plurality of diodes coupled with the polysilicon layer. The diodes are reversed biased and provide additional capacitance to the RC delay.
- FIG. 1 shows a simplified high-level block diagram of an exemplary trimming circuit, according to an embodiment of the present invention
- FIG. 2 shows a simplified high-level block diagram of an exemplary trimming circuit including a delay transistor, according to another embodiment of the present invention
- FIG. 3 shows a simplified high-level schematic diagram of an exemplary trimming circuit including delay transistors and delay pad structures, according to another embodiment of the present invention
- FIG. 4 shows a simplified high-level schematic diagram of an exemplary trimming circuit including delay transistors, delay pad structures, and a delay line structure, according to another embodiment of the present invention
- FIG. 5 shows a simplified high-level schematic diagram of an exemplary trimming circuit including delay transistors, delay pad structures, and a delay line structure, according to another embodiment of the present invention
- FIG. 6 shows a simplified high-level schematic diagram of an exemplary trimming circuit including delay transistors, delay pad structures, and a delay line structure, according to another embodiment of the present invention
- FIG. 7 shows a top-view layout of an exemplary delay transistor structure, according to an embodiment of the present invention.
- FIG. 8 shows a simplified high-level schematic diagram of the delay transistor structure of FIG. 7, according to another embodiment of the present invention.
- FIG. 9 shows a top-view layout of an exemplary delay pad structure, according to an embodiment of the present invention.
- FIG. 10 shows a top-view layout of an exemplary delay line structure, according to an embodiment of the present invention.
- FIG. 1 shows a simplified high-level block diagram of an exemplary trimming circuit 100 , according to an embodiment of the present invention.
- Trimming circuit 100 includes an input pad 102 configured to receive a select signal (also referred to hereinafter as a trigger signal) and includes a delay structure 104 coupled with input pad 102 .
- Delay structure 104 is configured to add a delay to the trigger signal.
- Trimming circuit 100 also includes a transistor 108 coupled with delay structure 104 . The exact dimensions of transistor 108 will depend on the specific application.
- Transistor 108 is sized to provide sufficient current to trim a metal or polysilicon trimming fuse.
- Transistor 108 also couples between an input pad 109 and an output node 110 .
- Input pad 109 is configured to receive a first voltage potential.
- the first voltage potential is VDD.
- VDD can be a variety of voltages, e.g., 3 volts, 5 volts, 12 volts, etc.
- VDD is 3.3 V.
- a trimming fuse 112 is coupled between output node 110 and an input pad 114 .
- the required trimming fuse width will depend on the particular process technology and layer thickness of the fuse. Also, in this specific embodiment, trimming fuse 112 has a passivation opening above it to allow escape of residual material and heat.
- Input pad 114 is configured to receive a second voltage potential.
- the second voltage potential is VSS. Typically, VSS is ground. Configuration with the first potential being VSS and the second potential being VDD is also possible.
- Output node 110 couples to a circuit 120 .
- circuit 120 includes a transistor 124 coupled between a node 126 and a node 128 .
- Circuit 120 also includes resistive element 131 coupled between the gate of transistor 124 and node 132 .
- the resistive element may be either conventional resistor or bipolar/MOS transistor with the base/gate properly biased.
- Nodes 126 and 128 can couple to any number of circuits, depending on the specific application of circuit 120 .
- Nodes 126 and 128 can also be coupled with a variety of voltage sources such as VDD or VSS.
- the gate of transistor 124 weakly couples to node 132 through resistive element 131 . Also, the gate of transistor 124 strongly couples with node 130 via trimming fuse 112 .
- nodes 130 and 132 can couple to any number of circuits, depending on the specific application of circuit 120 , and can also couple with a variety of voltage sources such as VDD or VSS.
- the gate of transistor 124 is controlled by node 130 via trimming fuse 112 .
- the parameters of circuit 120 can be modified by decoupling the gate of transistor 124 from node 130 . This decoupling is accomplished as follows. A first voltage potential, VDD in this specific embodiment, is applied to input pad 109 . Also, a second voltage potential, VSS in this specific embodiment, is applied to input pad 114 . A trigger signal is applied to input pad 102 to turn on transistor 108 . Transistor 108 is configured to supply sufficient current to trim trimming fuse 112 when transistor 108 turns on. When trimming fuse 112 is trimmed, it decouples output node 110 from node 130 .
- delay structure 104 delays the trigger signal incoming via input pad 102 for a sufficiently long duration so as to decrease the switching speed of transistor 108 . More specifically, delay structure 104 delays the rise time of the trigger signal by slowly and controllably ramping up its voltage one the rising edge. As a result, transistor 108 switches on slowly and controllably.
- Delay structure 104 is effectively a low pass filter that reduces high frequency components of the trigger signal incoming via input pad 102 .
- the filter is provided by the RC elements of delay structure 104 .
- High frequency in the present embodiment is larger than approximately 3 kHz. Hence, any changes in the input signal occurring faster than 1 ⁇ 3 kHz ⁇ 330 microsecond are strongly attenuated. Power and voltage spikes that are shorter than approximately 330 microsecond are thus filtered.
- the delay structure would filter power surges less than 330 microseconds.
- the actual delay is not limited to 330 microseconds and will vary depending on the specific application. Accordingly, power surges are filtered and accordingly would not be sufficient to initiate evaporation of trimming fuse 112 .
- FIG. 1 is merely an example and should not limit the scope of the claims herein.
- additional protection against power surges can be provided by increasing the delay.
- One way to increase or vary the delay could be by implementing a series of delay structures.
- delay structure 104 can be separate from transistor 108 . In other embodiments, delay structure 104 is an integral part of transistor 108 .
- FIG. 2 shows a simplified high-level block diagram of an exemplary trimming circuit 200 including a delay transistor 208 , according to another embodiment of the present invention.
- Trimming circuit 200 is configured and operates similarly to trimming circuit 100 except that a delay structure is an integral part of delay transistor 208 .
- the delay structure is a delay gate which couples to input pad 102 .
- Delay transistor 208 couples between input pad 109 and output node 110 .
- delay gate increases the rise time of the input signal and this way decreases the switching speed of delay transistor 208 .
- transistor 208 switches on slowly and controllably.
- the delay gate attenuates any signal that occurs faster than the rise time of the input signal.
- delay transistor 208 is a wide channel transistor. The exact dimensions will of course depend on the specific application.
- delay transistor 208 is an NMOS transistor.
- Delay transistor 208 can also be other types of transistors such as a PMOS transistor.
- a guard-band can be placed around transistor 208 for latch-up protection. Guard-bands are well-known in the art.
- Embodiments of the present invention can have more than one delay structure.
- Embodiments can have more than one delay gate, each coupled with a different trimming fuse.
- a series of delay transistors can be used to increase or vary the delay.
- FIG. 3 shows a simplified high-level schematic diagram of an exemplary trimming circuit 300 including delay transistors and delay pad structures, according to another embodiment of the present invention.
- Trimming circuit 300 includes an input delay pad structure 302 which includes an input pad 304 coupled with a delay structure 306 .
- Delay pad structure 302 is configured to receive a trigger signal.
- Trimming circuit 300 also includes delay transistor 310 .
- Delay transistor 310 is structured and operates similarly to the delay transistor 208 of FIG. 2.
- Delay transistor 310 has a delay structure that is integrated with its gate. In this specific embodiment, delay transistor 310 has a delay gate coupled with delay pad structure 302 .
- Transistor 310 couples between input pad 311 and a trimming fuse 312 .
- Trimming fuse 312 couples with a delay pad structure 314 .
- Delay pad structure 314 includes an input pad 316 spatially integrated but electrically not coupled with a delay structure 318 .
- Delay structure 318 is coupled between delay pad structure 302 and the gate of delay transistor 310 .
- Trimming circuit also includes delay transistor 320 .
- Delay transistor 320 is structured and operates similarly to delay transistor 310 .
- transistor 320 has a delay gate coupled with the delay gate of delay transistor 310 .
- Transistor 320 couples between input pad 311 and a trimming fuse 322 .
- Trimming fuse 322 couples with a delay pad structure 324 .
- Delay pad 324 includes input pad 326 that is spatially integrated with but electrically not coupled to delay structure 328 .
- Trimming circuit also includes delay transistor 330 .
- Delay transistor 330 is structured and operates similarly to the delay transistor 310 .
- transistor 330 has a delay gate coupled with the delay gate of delay transistor 320 .
- Transistor 330 couples between input pad 311 and a trimming fuse 332 .
- Trimming fuse 332 couples with a delay pad structure 334 .
- Delay pad 334 includes an input pad 336 coupled with a delay structure 338 .
- delay structure 338 is built under input pad 336 .
- Delay structure 338 can also be located elsewhere.
- Input pad 311 is configured to receive a first voltage potential. In this specific embodiment, input pad 311 is configured to receive a VSS voltage. Delay pads 314 , 324 , and 334 are configured to receive a second voltage potential. In this specific embodiment, delay pads 314 , 324 , and 334 are configured to receive a VDD voltage.
- Trimming circuit 300 operates similarly to trimming circuit 200 of FIG. 2 except that trimming circuit 300 includes a delay pad structure to add additional delay to the trigger signal. Also, trimming circuit 300 includes multiple delay transistors, each with corresponding trimming fuses and delay pad structures. Accordingly, trimming circuit 300 can readily modify more parameters of a circuit to be modified by trimming more fuses. How each specific fuse couples with such a circuit will depend on the specific application of the circuit.
- a decoupling of two nodes coupled by a trimming fuse occurs when the corresponding trimming fuse is trimmed.
- a first voltage potential, VSS in this specific embodiment is applied to input pad 311 .
- a second voltage potential, VDD in this specific embodiment is applied to one or more of input pads 314 , 324 , and 334 depending on the fuses to be trimmed.
- a trigger signal is applied to delay pad 302 to turn on the delay transistors connected to the first and second voltage potentials. When the appropriate transistors are turned on, they supply sufficient current to trim their corresponding trimming fuses in effect decoupling the nodes coupled by these trimming fuses.
- the trigger signal incoming through delay pad 302 passes through delay structure 318 , delay transistor 310 , delay structure 328 , delay transistor 320 , delay structure 338 and finally reaches delay transistor 330 .
- the rise time of the trigger signal cumulatively increases every time it passes through a delay element either integrated within a pad or in a transistor. The increased rise time results in increased filtering of voltage spikes potentially present in the trigger signal. Every time the trigger signal passes through a transistor gate it opens the transistor and if the associated fuse has been pre-selected for trimming by connecting the associated delay pad to VDD the fuse is trimmed.
- the trigger signal rise time monotonically increases as it sequentially reaches transistors 310 , 320 and 330 , thus the transistors will turn on sequentially.
- the filtering of spikes potentially present in the trigger signal entering delay pad 302 will increase as the on transistors 310 , 320 and 330 , in that order.
- the sequential turn on alleviates the load on the power supply providing VDD for the circuit, as load is distributed in time.
- Alternative embodiments of the present invention can also have a delay structure coupled to trimming fuse 312 via other elements.
- a delay structure can be placed anywhere along the path between input pad 311 and trimming fuse 312 . This would filter power or voltage spikes in signals coming through pad 311 .
- FIG. 4 shows a simplified high-level schematic diagram of an exemplary trimming circuit 400 including delay transistors, delay pad structures, and a delay line structure, according to another embodiment of the present invention.
- Trimming circuit 400 is structured and operates similarly to trimming 300 except that trimming circuit 400 has a delay line structure 450 coupled between delay pad 302 and delay transistor 310 .
- Delay line structure 450 adds an additional trigger signal delay to the delay provided by the other delay structures shown in FIG. 400.
- Alternative embodiments of the present invention can have more than one delay line structure. Also, embodiments can have more than one delay pad structure configured to receive trigger signals.
- FIGS. 5 and 6 show a simplified high-level schematic diagram of an exemplary trimming circuit including delay transistors, delay pad structures, and a delay line structure, according to another embodiment of the present invention.
- FIG. 5 shows a trimming circuit 500 is similar to the trimming circuit of FIG. 4 except that the input pad that receives a trigger signal and the input pad that receives a first voltage potential to supply power to the delay transistors are the same input pad.
- delay pad 501 is connected to VDD and delay pad 502 , 503 and 504 are optionally connected to VSS if trimming of the associated fuses is desired.
- FIG. 6 shows a trimming circuit 600 that is configured to allow for more variety in the trigger signal delays depending on whether a delay pad 660 or a delay pad 662 is used. Also, test pads 670 , 672 , and 674 are added to provide probe contacts. Residual fuse resistance can be tested with these additional test pads.
- FIG. 7 shows a top-view layout of an exemplary delay transistor structure 700 , according to an embodiment of the present invention.
- Delay transistor 700 includes a substrate 702 and conduction channels 710 , 712 , 714 , 716 , 718 , and 720 embedded in substrate 702 .
- Delay transistor 700 also includes active regions 730 , 732 , 734 , 736 , 738 , 740 , and 742 embedded in the substrate. The active regions alternate with the conduction channels.
- a source contact 750 couples with alternating active regions.
- a drain contact 752 couples with the other alternating active regions.
- a gate structure 760 overlays the conduction channels 710 , 712 , 714 , 716 , 718 , and 720 .
- gate structure 760 is a single gate structure made of polysilicon and has a serpentine shape.
- delay transistor 700 is an NMOS transistor.
- the substrate is a p-type substrate and the active regions are n+ wells.
- delay transistor 700 can other types of transistors such as a PMOS transistor.
- the gate structure is configured to receive an input signal 762 .
- the gate structure provides an RC delay to input signal 762 and the RC delay is of a sufficiently long duration so as to decrease the switching speed of the transistor.
- Delay transistor 700 also includes diodes 751 , 753 , 754 , 756 , 758 , and 760 coupled with gate structure 760 . These diodes are reversed biased such that they contribute additional capacitance to the RC delay. In this specific embodiment, the diodes also coupled with substrate 702 . The diodes also have the benefit of enhancing process reliability. In light of the present invention, one of ordinary skill in the art would recognize many other variations, modifications, and alternatives. Alternative embodiments, for example, can include more conduction channels and action regions than does the specific embodiment of delay transistor 700 .
- FIG. 8 shows a simplified high-level schematic diagram of the delay transistor structure of FIG. 7, according to another embodiment of the present invention.
- FIG. 8 shows only three transistors 770 , 772 , and 774 .
- Transistors 770 , 772 , and 774 coupled in parallel between VDD and VSS.
- Diodes 756 and 750 couple between gate 760 and the substrate.
- the gates are formed by a single gate structure, wherein the combination of the gate and the diodes provide a distributed RC delay to decrease the switching speed of the transistors and filter power and voltage spikes in the trigger signal.
- FIG. 9 shows a top-view layout of an exemplary delay pad structure 900 , according to an embodiment of the present invention.
- Delay pad structure 900 includes a substrate 902 .
- the substrate is a p-type substrate.
- Delay pad structure 900 also includes an active region 904 embedded in substrate 902 .
- active region is an n+ region.
- Active region 904 is configured to receive and transmit an input signal 906 .
- Active region 904 has a serpentine shape such that it provides an RC delay to signal 906 .
- Delay pad structure 900 also includes diodes 910 , 912 , 914 , 916 , 918 , 920 , 922 , 924 , and 926 coupled between the active region 904 and substrate 902 .
- the diodes are reversed biased to provide additional capacitance to the RC delay.
- the diodes also have the benefit of enhancing process reliability.
- delay pad structure 900 can be used the trimming circuits described above.
- the substrate can be an n-type substrate and the active region can be a p+ region.
- FIG. 10 shows a top-view layout of an exemplary delay line structure 1000 , according to an embodiment of the present invention.
- Delay line structure 1000 includes a substrate 1002 .
- the substrate is a p-type substrate.
- Delay line structure 1000 also includes a thin oxide layer 1003 coupled onto substrate 1002 .
- the thin oxide layer 1003 has a square shape.
- a polysilicon layer 1004 couples onto the thin oxide layer and also has a serpentine shape.
- Polysilicon layer 1004 is configured to receive and transmit a signal 1006 .
- the combination of the thin oxide layer coupled between the substrate and the polysilicon layer providing an RC delay to input signal 1006 .
- Delay line structure also includes diodes 1010 , 1012 , 1014 , 1016 , 1018 , 1020 , 1022 , 1024 , and 1026 coupled between polysilicon layer 1004 and substrate 1002 .
- the diodes are reversed biased to provide additional capacitance to the RC delay.
- the diodes also have the benefit of enhancing process reliability.
- delay line structure 1000 can be used the trimming circuits described above.
- the substrate can be an n-type substrate.
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Abstract
A method and apparatus for implementing trimming circuits. More particularly, embodiments of the present invention provide a transistor that supplies sufficient current to trim a trimming fuse when the transistor is powered up and after it receives a select signal at its gate. When the trimming fuse is trimmed, it decouples undesired electrical connections in a circuit. Also provided is a delay structure that adds an RC delay to the select signal. The RC delay is of a sufficiently long duration so as to decrease the switching speed of the transistor. The delay structure also provides a pass filter to filter power and voltage spikes in the select signal.
Description
- This application is a divisional of U.S. application No. 10/118,687, filed Apr. 8, 2002 and entitled “Bounce Tolerant Fuse Trimming Circuit with Controlled Timing”, the disclosure of which is incorporated herein by reference.
- Not Applicable
- Not Applicable
- The present invention relates generally to integrated circuits. More particularly, embodiments of the invention relate to a method and apparatus for implementing trimming circuits.
- Trimming circuits are used to configure and fine-tune IC products to meet final specification requirements. Such a trimming process typically occurs during the final stages of production. ICs are typically constructed with redundant circuit elements that are enabled or disabled by eliminating certain connections. The trimming process should reliably disengage undesired electrical connections while securely maintaining connections at other locations, as needed, for the lifetime of the product. Hereinafter, fuses are also referred to as trimming fuses.
- One common method used for trimming involves intentional loading of certain metal structures—fuses—with current well beyond the carrying capability of the fuse line. This results in vaporization of the metal and electrical discontinuity. Trimming is usually done on automatic testing machines using test programs that select the fuses to be eliminated. Fuse trimming is done by passing several hundred milliamps through the metal line. This instantaneously heats up the fuse to a high enough temperature so that it vaporizes within microseconds. Typically, the current passes to the fuse through a dedicated pad. Also, the external circuit can include a power supply with sufficient current carrying capability to eliminate several fuses at a time.
- Partial trimming can result in a trimmed fuse that has a lower than acceptable residual resistance. This is undesirable after trimming and for the lifetime of the product because once this occurs the fuse can not be trimmed again. If the residual conductance is not high enough, sufficient current is unable to flow through the fuse and dissipate adequate heat to vaporize the residual conductive material.
- Partial trimming of the fuse can be caused by power spikes during a turn-on transition of the power supply. Power spikes can result from the bouncing of relays that turn on the power supply. Power spikes can also result from power ringing within the power supply. Power ringing occurs during the turn-on transition as the circuit used to trim the fuse is closed and a large load is instantaneously realized.
- Thus, there is a need for an improved trimming circuit. The circuit should remove power bouncing and voltage spiking during trimming. This circuit should also be capable of conducting sufficient current through the trimming fuse to efficiently break the connection with high residual resistance.
- The present invention achieves the above needs with a method and circuitry for implementing trimming circuits. More particularly, embodiments of the present invention provide a transistor that supplies sufficient current to trim a trimming fuse when the transistor is powered up and after it receives a select signal at its gate. Also provided is a delay structure that adds an RC delay to the select signal. The RC delay is of a sufficiently long duration so as to decrease the switching speed of the transistor. The delay structure also provides a pass filter to filter power and voltage spikes in the select signal. Embodiments of the present invention enhance product yield by increasing the amount of IC products meeting specified performance requirements.
- In one embodiment, the trimming circuit includes a delay structure that is designed into the gate of a transistor. In another embodiment, the trimming circuit includes a delay pad structure that is coupled between the first input pad and the gate of the transistor. In another embodiment, the trimming circuit includes a delay line structure coupled between the delay pad structure and the gate of the transistor. In other embodiments, the delay structure is designed into a combination of a gate of a transistor, an input pad, and a transmission line.
- Another embodiment provides a delay transistor having a substrate, a plurality of conduction channels embedded in the substrate, and a plurality of active regions embedded in the substrate. The active regions alternate with the conduction channels to form source and drain portions of the delay transistor. Also included is a source contact coupled with first alternating active regions, a drain contact coupled with second alternating active regions, and a gate structure overlaying the conduction channels. The gate structure is configured to receive an input signal. The gate structure is a single gate structure. The gate structure has a serpentine shape to provide an RC delay to an input signal. The RC delay is of a sufficiently long duration so as to decrease the switching speed of the transistor. The RC attributes of the gate structure provide a pass filter to filter power and voltage spikes in the select signal.
- Another embodiment provides a delay pad structure having a substrate and an active region embedded in the substrate. The active region is configured to receive an input signal. The active region has a serpentine shape to provide an RC delay to an input signal and to filter power and voltage spikes in the input signal. Also included is a plurality of diodes coupled with the active region. The diodes are reversed biased and provide additional capacitance to the RC delay.
- Another embodiment provides a delay line structure having a substrate and a thin oxide layer coupled onto a first side of the substrate. Also, included is a polysilicon layer coupled onto the thin oxide layer. The polysilicon layer is configured to receive an input signal. The combination of the thin oxide layer coupled between the substrate and the polysilicon layer provide an RC delay to the input signal and to filter power and voltage spikes in the input signal. The thin oxide and polysilicon layers have a serpentine shape to provide additional RC delay to an input signal. Also, included is a plurality of diodes coupled with the polysilicon layer. The diodes are reversed biased and provide additional capacitance to the RC delay.
- Embodiments of the present invention achieve their purposes and benefits in the context of known circuit and process technology and known techniques in the electronic and process arts. Further understanding, however, of the nature, objects, features, and advantages of the present invention is realized by reference to the latter portions of the specification, accompanying drawings, and appended claims. Other objects, features, and advantages of the present invention will become apparent upon consideration of the following detailed description, accompanying drawings, and appended claims.
- FIG. 1 shows a simplified high-level block diagram of an exemplary trimming circuit, according to an embodiment of the present invention;
- FIG. 2 shows a simplified high-level block diagram of an exemplary trimming circuit including a delay transistor, according to another embodiment of the present invention;
- FIG. 3 shows a simplified high-level schematic diagram of an exemplary trimming circuit including delay transistors and delay pad structures, according to another embodiment of the present invention;
- FIG. 4 shows a simplified high-level schematic diagram of an exemplary trimming circuit including delay transistors, delay pad structures, and a delay line structure, according to another embodiment of the present invention;
- FIG. 5 shows a simplified high-level schematic diagram of an exemplary trimming circuit including delay transistors, delay pad structures, and a delay line structure, according to another embodiment of the present invention;
- FIG. 6 shows a simplified high-level schematic diagram of an exemplary trimming circuit including delay transistors, delay pad structures, and a delay line structure, according to another embodiment of the present invention;
- FIG. 7 shows a top-view layout of an exemplary delay transistor structure, according to an embodiment of the present invention;
- FIG. 8 shows a simplified high-level schematic diagram of the delay transistor structure of FIG. 7, according to another embodiment of the present invention;
- FIG. 9 shows a top-view layout of an exemplary delay pad structure, according to an embodiment of the present invention; and
- FIG. 10 shows a top-view layout of an exemplary delay line structure, according to an embodiment of the present invention.
- FIG. 1 shows a simplified high-level block diagram of an
exemplary trimming circuit 100, according to an embodiment of the present invention. Trimmingcircuit 100 includes aninput pad 102 configured to receive a select signal (also referred to hereinafter as a trigger signal) and includes adelay structure 104 coupled withinput pad 102.Delay structure 104 is configured to add a delay to the trigger signal. Trimmingcircuit 100 also includes atransistor 108 coupled withdelay structure 104. The exact dimensions oftransistor 108 will depend on the specific application.Transistor 108 is sized to provide sufficient current to trim a metal or polysilicon trimming fuse.Transistor 108 also couples between aninput pad 109 and anoutput node 110.Input pad 109 is configured to receive a first voltage potential. In this particular embodiment, the first voltage potential is VDD. VDD can be a variety of voltages, e.g., 3 volts, 5 volts, 12 volts, etc. Typically, VDD is 3.3 V.A trimming fuse 112 is coupled betweenoutput node 110 and aninput pad 114. The required trimming fuse width will depend on the particular process technology and layer thickness of the fuse. Also, in this specific embodiment, trimmingfuse 112 has a passivation opening above it to allow escape of residual material and heat.Input pad 114 is configured to receive a second voltage potential. In this particular embodiment, the second voltage potential is VSS. Typically, VSS is ground. Configuration with the first potential being VSS and the second potential being VDD is also possible. -
Output node 110 couples to acircuit 120. In this particular example,circuit 120 includes atransistor 124 coupled between anode 126 and anode 128.Circuit 120 also includesresistive element 131 coupled between the gate oftransistor 124 andnode 132. The resistive element may be either conventional resistor or bipolar/MOS transistor with the base/gate properly biased.Nodes circuit 120.Nodes transistor 124 weakly couples tonode 132 throughresistive element 131. Also, the gate oftransistor 124 strongly couples withnode 130 via trimmingfuse 112. Whenfuse 112 has not been trimmed coupling of the gate oftransistor 124 tonode 130 overrides coupling of the gate tonode 132. Similar tonodes nodes circuit 120, and can also couple with a variety of voltage sources such as VDD or VSS. - In normal operation of
circuit 120, the gate oftransistor 124 is controlled bynode 130 via trimmingfuse 112. During a trimming operation, the parameters ofcircuit 120 can be modified by decoupling the gate oftransistor 124 fromnode 130. This decoupling is accomplished as follows. A first voltage potential, VDD in this specific embodiment, is applied toinput pad 109. Also, a second voltage potential, VSS in this specific embodiment, is applied toinput pad 114. A trigger signal is applied toinput pad 102 to turn ontransistor 108.Transistor 108 is configured to supply sufficient current to trim trimmingfuse 112 whentransistor 108 turns on. When trimmingfuse 112 is trimmed, it decouplesoutput node 110 fromnode 130. In the absence of strong coupling throughfuse 112 the weak coupling of the gate oftransistor 124 throughresistive element 131 tonode 132 is in effect. While this decouples the gate oftransistor 124 fromnode 130, it could also decouple other circuit elements that might be coupled tonode 130 via trimmingfuse 112. The actual couplings would of course depend on the specific application ofcircuit 120. - To filter power or voltage spikes in the trigger signal,
delay structure 104 delays the trigger signal incoming viainput pad 102 for a sufficiently long duration so as to decrease the switching speed oftransistor 108. More specifically,delay structure 104 delays the rise time of the trigger signal by slowly and controllably ramping up its voltage one the rising edge. As a result,transistor 108 switches on slowly and controllably. -
Delay structure 104 is effectively a low pass filter that reduces high frequency components of the trigger signal incoming viainput pad 102. The filter is provided by the RC elements ofdelay structure 104. High frequency in the present embodiment is larger than approximately 3 kHz. Hence, any changes in the input signal occurring faster than ⅓ kHz≅330 microsecond are strongly attenuated. Power and voltage spikes that are shorter than approximately 330 microsecond are thus filtered. Thus, the delay structure would filter power surges less than 330 microseconds. The actual delay, however, is not limited to 330 microseconds and will vary depending on the specific application. Accordingly, power surges are filtered and accordingly would not be sufficient to initiate evaporation of trimmingfuse 112. - It is to be understood that the implementation of FIG. 1 is merely an example and should not limit the scope of the claims herein. In light of the present invention, one of ordinary skill in the art would recognize many other variations, modifications, and alternatives. For example, in some embodiments, additional protection against power surges can be provided by increasing the delay. One way to increase or vary the delay could be by implementing a series of delay structures. Also, in some embodiments,
delay structure 104 can be separate fromtransistor 108. In other embodiments,delay structure 104 is an integral part oftransistor 108. - FIG. 2 shows a simplified high-level block diagram of an
exemplary trimming circuit 200 including adelay transistor 208, according to another embodiment of the present invention. Trimmingcircuit 200 is configured and operates similarly to trimmingcircuit 100 except that a delay structure is an integral part ofdelay transistor 208. In this specific embodiment, the delay structure is a delay gate which couples toinput pad 102.Delay transistor 208 couples betweeninput pad 109 andoutput node 110. - The delay gate increases the rise time of the input signal and this way decreases the switching speed of
delay transistor 208. As a result,transistor 208 switches on slowly and controllably. By being a low pass filter the delay gate attenuates any signal that occurs faster than the rise time of the input signal. In specific embodiment,delay transistor 208 is a wide channel transistor. The exact dimensions will of course depend on the specific application. In the specific embodiment shown in FIG. 2,delay transistor 208 is an NMOS transistor.Delay transistor 208 can also be other types of transistors such as a PMOS transistor. Also, a guard-band can be placed aroundtransistor 208 for latch-up protection. Guard-bands are well-known in the art. - Alternative embodiments of the present invention can have more than one delay structure. Embodiments can have more than one delay gate, each coupled with a different trimming fuse. Also, a series of delay transistors can be used to increase or vary the delay.
- FIG. 3 shows a simplified high-level schematic diagram of an
exemplary trimming circuit 300 including delay transistors and delay pad structures, according to another embodiment of the present invention. Trimmingcircuit 300 includes an inputdelay pad structure 302 which includes an input pad 304 coupled with adelay structure 306. Delaypad structure 302 is configured to receive a trigger signal. Trimmingcircuit 300 also includesdelay transistor 310.Delay transistor 310 is structured and operates similarly to thedelay transistor 208 of FIG. 2.Delay transistor 310 has a delay structure that is integrated with its gate. In this specific embodiment,delay transistor 310 has a delay gate coupled withdelay pad structure 302.Transistor 310 couples betweeninput pad 311 and a trimming fuse 312. Trimming fuse 312 couples with adelay pad structure 314. Delaypad structure 314 includes aninput pad 316 spatially integrated but electrically not coupled with adelay structure 318.Delay structure 318 is coupled betweendelay pad structure 302 and the gate ofdelay transistor 310. - Trimming circuit also includes
delay transistor 320.Delay transistor 320 is structured and operates similarly to delaytransistor 310. In this specific embodiment,transistor 320 has a delay gate coupled with the delay gate ofdelay transistor 310.Transistor 320 couples betweeninput pad 311 and a trimmingfuse 322. Trimmingfuse 322 couples with adelay pad structure 324.Delay pad 324 includesinput pad 326 that is spatially integrated with but electrically not coupled to delaystructure 328. - Trimming circuit also includes
delay transistor 330.Delay transistor 330 is structured and operates similarly to thedelay transistor 310. In this specific embodiment,transistor 330 has a delay gate coupled with the delay gate ofdelay transistor 320.Transistor 330 couples betweeninput pad 311 and a trimmingfuse 332. Trimmingfuse 332 couples with adelay pad structure 334.Delay pad 334 includes an input pad 336 coupled with adelay structure 338. In this specific embodiment,delay structure 338 is built under input pad 336.Delay structure 338 can also be located elsewhere. -
Input pad 311 is configured to receive a first voltage potential. In this specific embodiment,input pad 311 is configured to receive a VSS voltage. Delaypads delay pads - Trimming
circuit 300 operates similarly to trimmingcircuit 200 of FIG. 2 except thattrimming circuit 300 includes a delay pad structure to add additional delay to the trigger signal. Also, trimmingcircuit 300 includes multiple delay transistors, each with corresponding trimming fuses and delay pad structures. Accordingly, trimmingcircuit 300 can readily modify more parameters of a circuit to be modified by trimming more fuses. How each specific fuse couples with such a circuit will depend on the specific application of the circuit. - During a trimming operation, a decoupling of two nodes coupled by a trimming fuse occurs when the corresponding trimming fuse is trimmed. A first voltage potential, VSS in this specific embodiment, is applied to
input pad 311. A second voltage potential, VDD in this specific embodiment, is applied to one or more ofinput pads pad 302 to turn on the delay transistors connected to the first and second voltage potentials. When the appropriate transistors are turned on, they supply sufficient current to trim their corresponding trimming fuses in effect decoupling the nodes coupled by these trimming fuses. - The trigger signal incoming through
delay pad 302 passes throughdelay structure 318,delay transistor 310,delay structure 328,delay transistor 320,delay structure 338 and finally reachesdelay transistor 330. The rise time of the trigger signal cumulatively increases every time it passes through a delay element either integrated within a pad or in a transistor. The increased rise time results in increased filtering of voltage spikes potentially present in the trigger signal. Every time the trigger signal passes through a transistor gate it opens the transistor and if the associated fuse has been pre-selected for trimming by connecting the associated delay pad to VDD the fuse is trimmed. The trigger signal rise time monotonically increases as it sequentially reachestransistors delay pad 302 will increase as the ontransistors input pad 311 and trimming fuse 312. This would filter power or voltage spikes in signals coming throughpad 311. - FIG. 4 shows a simplified high-level schematic diagram of an
exemplary trimming circuit 400 including delay transistors, delay pad structures, and a delay line structure, according to another embodiment of the present invention. Trimmingcircuit 400 is structured and operates similarly to trimming 300 except that trimmingcircuit 400 has adelay line structure 450 coupled betweendelay pad 302 anddelay transistor 310.Delay line structure 450 adds an additional trigger signal delay to the delay provided by the other delay structures shown in FIG. 400. Alternative embodiments of the present invention can have more than one delay line structure. Also, embodiments can have more than one delay pad structure configured to receive trigger signals. - FIGS. 5 and 6 show a simplified high-level schematic diagram of an exemplary trimming circuit including delay transistors, delay pad structures, and a delay line structure, according to another embodiment of the present invention. FIG. 5 shows a
trimming circuit 500 is similar to the trimming circuit of FIG. 4 except that the input pad that receives a trigger signal and the input pad that receives a first voltage potential to supply power to the delay transistors are the same input pad. For thisimplementation delay pad 501 is connected to VDD anddelay pad - FIG. 6 shows a
trimming circuit 600 that is configured to allow for more variety in the trigger signal delays depending on whether adelay pad 660 or adelay pad 662 is used. Also,test pads - FIG. 7 shows a top-view layout of an exemplary
delay transistor structure 700, according to an embodiment of the present invention.Delay transistor 700 includes asubstrate 702 andconduction channels substrate 702.Delay transistor 700 also includesactive regions source contact 750 couples with alternating active regions. Adrain contact 752 couples with the other alternating active regions. Agate structure 760 overlays theconduction channels gate structure 760 is a single gate structure made of polysilicon and has a serpentine shape. In this specific embodiment,delay transistor 700 is an NMOS transistor. The substrate is a p-type substrate and the active regions are n+ wells. In other embodiments,delay transistor 700 can other types of transistors such as a PMOS transistor. - The gate structure is configured to receive an
input signal 762. In operation, the gate structure provides an RC delay to input signal 762 and the RC delay is of a sufficiently long duration so as to decrease the switching speed of the transistor.Delay transistor 700 also includesdiodes gate structure 760. These diodes are reversed biased such that they contribute additional capacitance to the RC delay. In this specific embodiment, the diodes also coupled withsubstrate 702. The diodes also have the benefit of enhancing process reliability. In light of the present invention, one of ordinary skill in the art would recognize many other variations, modifications, and alternatives. Alternative embodiments, for example, can include more conduction channels and action regions than does the specific embodiment ofdelay transistor 700. - FIG. 8 shows a simplified high-level schematic diagram of the delay transistor structure of FIG. 7, according to another embodiment of the present invention. For simplicity, FIG. 8 shows only three
transistors Transistors Diodes gate 760 and the substrate. The gates are formed by a single gate structure, wherein the combination of the gate and the diodes provide a distributed RC delay to decrease the switching speed of the transistors and filter power and voltage spikes in the trigger signal. - FIG. 9 shows a top-view layout of an exemplary
delay pad structure 900, according to an embodiment of the present invention. Delaypad structure 900 includes asubstrate 902. In this specific embodiment the substrate is a p-type substrate. Delaypad structure 900 also includes anactive region 904 embedded insubstrate 902. In this specific embodiment, active region is an n+ region.Active region 904 is configured to receive and transmit aninput signal 906.Active region 904 has a serpentine shape such that it provides an RC delay to signal 906. Delaypad structure 900 also includesdiodes active region 904 andsubstrate 902. The diodes are reversed biased to provide additional capacitance to the RC delay. The diodes also have the benefit of enhancing process reliability. In application,delay pad structure 900 can be used the trimming circuits described above. Alternative embodiments will be recognized in light of the present invention. For example, in other embodiments the substrate can be an n-type substrate and the active region can be a p+ region. - FIG. 10 shows a top-view layout of an exemplary
delay line structure 1000, according to an embodiment of the present invention.Delay line structure 1000 includes asubstrate 1002. In this specific embodiment the substrate is a p-type substrate.Delay line structure 1000 also includes athin oxide layer 1003 coupled ontosubstrate 1002. Thethin oxide layer 1003 has a square shape. Apolysilicon layer 1004 couples onto the thin oxide layer and also has a serpentine shape.Polysilicon layer 1004 is configured to receive and transmit asignal 1006. The combination of the thin oxide layer coupled between the substrate and the polysilicon layer providing an RC delay to inputsignal 1006. - Delay line structure also includes
diodes polysilicon layer 1004 andsubstrate 1002. The diodes are reversed biased to provide additional capacitance to the RC delay. The diodes also have the benefit of enhancing process reliability. In application,delay line structure 1000 can be used the trimming circuits described above. In alternative embodiments, the substrate can be an n-type substrate. - Conclusion
- In conclusion, it can be seen that embodiments of the present invention provide numerous advantages. Principally, they eliminate problems and limitations resulting from power and voltage spikes. Specific embodiments of the present invention are presented above for purposes of illustration and description. The full description will enable others skilled in the art to best utilize and practice the invention in various embodiments and with various modifications suited to particular uses. After reading and understanding the present disclosure, many modifications, variations, alternatives, and equivalents will be apparent to a person skilled in the art and are intended to be within the scope of this invention. Therefore, it is not intended to be exhaustive or to limit the invention to the specific embodiments described, but is intended to be accorded the widest scope consistent with the principles and novel features disclosed herein, and as defined by the following claims.
Claims (14)
1. A delay transistor comprising:
a substrate;
a plurality of conduction channels embedded in the substrate;
a plurality of active regions embedded in the substrate, the active regions alternating with the conduction channels;
a source contact coupled with first alternating active regions;
a drain contact coupled with second alternating active regions; and
a gate structure overlaying the conduction channels, the gate structure being configured to receive an input signal, wherein the gate structure is a single gate structure, and wherein the gate structure provides an RC delay to the input signal and filters power and voltage spikes in the input signal, the RC delay being of a sufficiently long duration so as to decrease the switching speed of the transistor and allow the gate structure to filter power and voltage spikes.
2. The delay transistor of claim 1 wherein the gate structure has a serpentine shape.
3. The delay transistor of claim 1 wherein the gate structure comprises polysilicon.
4. The delay transistor of claim 1 wherein the delay transistor further comprises a plurality of diodes coupled with the single gate structure, the diodes being reversed biased, wherein the diodes contribute additional capacitance to the RC delay.
5. The trimming circuit of claim 1 wherein the delay transistor is an NMOS transistor.
6. The trimming circuit of claim 1 wherein the delay transistor is a PMOS transistor.
7. A delay transistor comprising:
a plurality of transistors coupled in parallel, each transistor being coupled between a first voltage potential and a second voltage potential; and
a plurality of diodes coupled between the gates of the transistors and the second voltage potential, the gates being formed by a single gate structure, wherein the combination of the gate and the diodes provide a distributed RC delay to the input signal and filters power and voltage spikes in the input signal, the RC delay being of a sufficiently long duration so as to decrease the switching speed of the transistor and allow the gate structure to filter power and voltage spikes.
8. A delay pad structure comprising:
a substrate;
an active region embedded in the substrate, and active region being configured to receive an input signal, the active region having a serpentine shape, the active region providing an RC delay to the input signal and filtering power and voltage spikes in the input signal; and
a plurality of diodes coupled with the active region, the diodes being reversed biased, wherein the diodes provide additional capacitance to the RC delay.
9. The delay pad structure of claim 8 wherein the substrate is a p-type substrate.
10. The delay pad structure of claim 8 wherein the active region is an n+ region.
11. The delay pad structure of claim 8 wherein the delay pad structure is used in a trimming circuit for modifying electronic circuits.
12. A delay line structure comprising:
a substrate;
a thin oxide layer coupled onto a first side of the substrate, the thin oxide layer having a square shape;
a polysilicon layer coupled onto the thin oxide layer, the polysilicon layer being configured to receive an input signal, the combination of the thin oxide layer coupled between the substrate and the polysilicon layer providing an RC delay to the input signal and filtering power and voltage spikes in the input signal; and
a plurality of diodes coupled with the polysilicon layer, the diodes being reversed biased, wherein the diodes provide additional capacitance to the RC delay.
13. The delay line structure of claim 12 wherein the substrate is a p-type substrate.
14. The delay pad structure of claim 12 wherein the delay pad structure is used in a trimming circuit for modifying electronic circuits.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/696,101 US20040085700A1 (en) | 2002-04-08 | 2003-10-28 | Delay line and transistor with RC delay gate |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/118,687 US6693783B2 (en) | 2002-04-08 | 2002-04-08 | Bounce tolerant fuse trimming circuit with controlled timing |
US10/696,101 US20040085700A1 (en) | 2002-04-08 | 2003-10-28 | Delay line and transistor with RC delay gate |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/118,687 Division US6693783B2 (en) | 2002-04-08 | 2002-04-08 | Bounce tolerant fuse trimming circuit with controlled timing |
Publications (1)
Publication Number | Publication Date |
---|---|
US20040085700A1 true US20040085700A1 (en) | 2004-05-06 |
Family
ID=29214422
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/118,687 Expired - Fee Related US6693783B2 (en) | 2002-04-08 | 2002-04-08 | Bounce tolerant fuse trimming circuit with controlled timing |
US10/696,101 Abandoned US20040085700A1 (en) | 2002-04-08 | 2003-10-28 | Delay line and transistor with RC delay gate |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/118,687 Expired - Fee Related US6693783B2 (en) | 2002-04-08 | 2002-04-08 | Bounce tolerant fuse trimming circuit with controlled timing |
Country Status (1)
Country | Link |
---|---|
US (2) | US6693783B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113098463A (en) * | 2020-01-09 | 2021-07-09 | 长鑫存储技术有限公司 | Power gating circuit and storage chip |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3732834B2 (en) * | 2003-04-17 | 2006-01-11 | 株式会社東芝 | Input protection circuit |
US20120176177A1 (en) * | 2011-01-07 | 2012-07-12 | Garret Phillips | Switch with improved edge rate control |
CN203675091U (en) * | 2012-11-15 | 2014-06-25 | 东莞赛微微电子有限公司 | Fuse wire trimming circuit |
CN103812479A (en) * | 2014-02-17 | 2014-05-21 | 科易达智能科技(苏州)有限公司 | Reed power-on switchover time-delay shutdown circuit |
CN112968696B (en) * | 2021-02-26 | 2023-06-06 | 西安微电子技术研究所 | Trimming circuit with virtual trimming function |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4288829A (en) * | 1976-02-18 | 1981-09-08 | Agency Of Industrial Science And Technology | Protective circuit on insulating substrate for protecting MOS integrated circuit |
US4725747A (en) * | 1986-08-29 | 1988-02-16 | Texas Instruments Incorporated | Integrated circuit distributed geometry to reduce switching noise |
US4937639A (en) * | 1987-10-16 | 1990-06-26 | Nissan Motor Company, Limited | Input protector device for semiconductor device |
US5146306A (en) * | 1989-02-28 | 1992-09-08 | Vlsi Technology, Inc | Semiconductor FET structures with slew-rate control |
US5589702A (en) * | 1994-01-12 | 1996-12-31 | Micrel Incorporated | High value gate leakage resistor |
US5744838A (en) * | 1994-09-27 | 1998-04-28 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device having internal circuit other than initial input stage circuit |
US6218706B1 (en) * | 1996-12-31 | 2001-04-17 | Stmicroelectronics, Inc. | Integrated circuit with improved electrostatic discharge protection circuitry |
US6274908B1 (en) * | 1997-10-09 | 2001-08-14 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device having input-output protection circuit |
US6617649B2 (en) * | 2000-12-28 | 2003-09-09 | Industrial Technology Research Institute | Low substrate-noise electrostatic discharge protection circuits with bi-directional silicon diodes |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5552338A (en) * | 1994-09-26 | 1996-09-03 | Intel Corporation | Method of using latchup current to blow a fuse in an integrated circuit |
US6456186B1 (en) * | 1999-10-27 | 2002-09-24 | Motorola, Inc. | Multi-terminal fuse device |
US6583977B1 (en) * | 1999-10-27 | 2003-06-24 | Motorola, Inc. | Zipper fuse |
-
2002
- 2002-04-08 US US10/118,687 patent/US6693783B2/en not_active Expired - Fee Related
-
2003
- 2003-10-28 US US10/696,101 patent/US20040085700A1/en not_active Abandoned
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4288829A (en) * | 1976-02-18 | 1981-09-08 | Agency Of Industrial Science And Technology | Protective circuit on insulating substrate for protecting MOS integrated circuit |
US4725747A (en) * | 1986-08-29 | 1988-02-16 | Texas Instruments Incorporated | Integrated circuit distributed geometry to reduce switching noise |
US4937639A (en) * | 1987-10-16 | 1990-06-26 | Nissan Motor Company, Limited | Input protector device for semiconductor device |
US5146306A (en) * | 1989-02-28 | 1992-09-08 | Vlsi Technology, Inc | Semiconductor FET structures with slew-rate control |
US5589702A (en) * | 1994-01-12 | 1996-12-31 | Micrel Incorporated | High value gate leakage resistor |
US5744838A (en) * | 1994-09-27 | 1998-04-28 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device having internal circuit other than initial input stage circuit |
US6218706B1 (en) * | 1996-12-31 | 2001-04-17 | Stmicroelectronics, Inc. | Integrated circuit with improved electrostatic discharge protection circuitry |
US6274908B1 (en) * | 1997-10-09 | 2001-08-14 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor device having input-output protection circuit |
US6617649B2 (en) * | 2000-12-28 | 2003-09-09 | Industrial Technology Research Institute | Low substrate-noise electrostatic discharge protection circuits with bi-directional silicon diodes |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113098463A (en) * | 2020-01-09 | 2021-07-09 | 长鑫存储技术有限公司 | Power gating circuit and storage chip |
Also Published As
Publication number | Publication date |
---|---|
US6693783B2 (en) | 2004-02-17 |
US20030197996A1 (en) | 2003-10-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW560038B (en) | Electrostatic discharge protection circuit using whole chip trigger technique | |
US7187530B2 (en) | Electrostatic discharge protection circuit | |
KR100260960B1 (en) | Electrostatic discharge protection for cmos integrated circuits | |
EP2057682B1 (en) | N-channel esd clamp with improved performance | |
US5789964A (en) | Decoupling capacitor network for off-state operation | |
US7453676B2 (en) | RC-triggered ESD power clamp circuit and method for providing ESD protection | |
US7705404B2 (en) | Electrostatic discharge protection device and layout thereof | |
US8363367B2 (en) | Electrical overstress protection circuit | |
US20030137789A1 (en) | Low voltage breakdown element for ESD trigger device | |
US20030042499A1 (en) | ESD protection for a CMOS output stage | |
US7889469B2 (en) | Electrostatic discharge protection circuit for protecting semiconductor device | |
CN112889151A (en) | Trimming circuit and trimming method | |
US20090197377A1 (en) | Esd power clamp with stable power start up function | |
US7907373B2 (en) | Electrostatic discharge circuit | |
JPH03272180A (en) | Semiconductor integrated circuit | |
US6693783B2 (en) | Bounce tolerant fuse trimming circuit with controlled timing | |
US7616417B2 (en) | Semiconductor device including protection circuit and switch circuit and its testing method | |
US8669806B2 (en) | Low voltage antifuse programming circuit and method | |
JP2003068870A (en) | ESD protection circuit | |
JP2006515960A (en) | Electrostatic discharge circuit and method therefor | |
US7164185B1 (en) | Semiconductor component and method of manufacture | |
US6667865B2 (en) | Efficient design of substrate triggered ESD protection circuits | |
US6163056A (en) | Semiconductor device having electrostatic discharge | |
JP4404589B2 (en) | Fuse circuit | |
US6573778B2 (en) | Electrostatic discharge protection device for an integrated transistor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |