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US20030148632A1 - Method for avoiding the ion penetration with the plasma doping - Google Patents

Method for avoiding the ion penetration with the plasma doping Download PDF

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US20030148632A1
US20030148632A1 US10/368,381 US36838103A US2003148632A1 US 20030148632 A1 US20030148632 A1 US 20030148632A1 US 36838103 A US36838103 A US 36838103A US 2003148632 A1 US2003148632 A1 US 2003148632A1
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Wei-Wen Chen
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Macronix International Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/28008—Making conductor-insulator-semiconductor electrodes
    • H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H01L21/28158—Making the insulator
    • H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
    • H01L21/28202—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation in a nitrogen-containing ambient, e.g. nitride deposition, growth, oxynitridation, NH3 nitridation, N2O oxidation, thermal nitridation, RTN, plasma nitridation, RPN
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/223—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a gaseous phase
    • H01L21/2236—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a gaseous phase from or into a plasma phase
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
    • H01L21/2251—Diffusion into or out of group IV semiconductors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/68—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator
    • H10D64/681—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator having a compositional variation, e.g. multilayered
    • H10D64/685—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator having a compositional variation, e.g. multilayered being perpendicular to the channel plane
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/68—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator
    • H10D64/693—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes characterised by the insulator, e.g. by the gate insulator the insulator comprising nitrogen, e.g. nitrides, oxynitrides or nitrogen-doped materials

Definitions

  • the present invention relates generally to a method for forming a metal-oxide-semiconductor device, and more particularly to a method for avoiding the ion penetration with the plasma doping.
  • MOS Metal-Oxide-Semiconductor
  • the area occupied of the chip has to be maintained or more less, so as to reduce the unit cost of the circuit.
  • the area occupied by the devices shrinks, as well as the design rule.
  • the dimensions of the integrated circuit (IC) devices have been shrunk to the deep sub-micron range. As the semiconductor device continuously shrinks to deep sub-micron region, some problems are incurred due to the process of scaling down.
  • MOSFET Metal-oxide-semiconductor
  • FETs Field-effect transistors
  • a MOSFET generally consists of two closely spaced, doped regions in a substrate; namely, the source region and the drain region. The region between the two doped regions is the channel above which a thin insulation layer such as a gate oxide layer is formed.
  • a gate conductor is formed from a gate material directly over the insulation layer directly above the channel and a voltage applied to the gate conductor affects the electronic properties of the channel region, whereby the MOSFET can control current flow between the source region and the drain region (e.g., is turned on and off).
  • CMOS complementary metal-oxide-semiconductor
  • CMOS complementary metal-oxide-semiconductor
  • the PMOS devices are formed by implanting the substrate with a p-type dopant to form heavily doped p + source and drain regions using a self-aligned process
  • the NMOS devices are formed by implanting the substrate with a n-type dopant to form heavily doped n source and drain regions using a self-aligned process.
  • the gate conductor is used in the self-aligned process, it is also implanted with a p-type/n-type dopant, for example of p-type dopant ions include B + and BF 2 + .
  • p-type dopant ions include B + and BF 2 + .
  • B + and BF 2 + BF 2 + is preferred because of its larger atomic mass.
  • FIGS. 1A to 1 C are cross-sectional views showing the progression of manufacturing steps in the formation of the metal-oxide-semiconductor according a conventional method.
  • a substrate 100 is provided, and a shallow trench isolation 110 is formed in the substrate 100 .
  • a gate oxide layer 120 having an uniform thickness is formed on the substrate 100 by way of a thermal oxidation process.
  • a poly gate 130 A is formed and defined on the gate oxide layer 120 .
  • a uniform ion-implanting region 150 and a poly gate 130 B having a lower contact resistance are formed by way of using a thermal anneal process.
  • BF 2 + ions are implanted simultaneously with the forming of the p+ poly-Si gate and a p+ shallow junction.
  • fluorine when fluorine is present in a gate conductor along with boron, fluorine enhances boron penetration through the gate oxide and into the channel region during thermal anneals. Boron ions which have penetrated into the silicon substrate may cause a shift in the threshold voltage (V th ) of the operating device. This is because boron diffusion into the channel region results in a change in the concentration level of the n-channel substrate thereby causing a shift in threshold voltage and degrading the reliability of the devices oxide quality.
  • the present invention provides a method for fabricating the metal-oxide-semiconductor.
  • This invention can use plasma doping to substitute for conventional process, so as to avoid damaging gate dielectric layer and decrease the complex of process.
  • the present invention is appropriate for deep sub-micron technology to provide the semiconductor devices.
  • Another object of the present invention is to provide a method for forming the gate dielectric layer.
  • the present invention can form a ultra shallow ions-distribution as an ion-barrier layer on the gate dielectric layer by means of a plasma doping process and a thermal process, so as to prevent the ions penetration effect and protect threshold voltage. Accordingly, this invention can provide a metal-oxide-semiconductor device whose performance is better than the conventional one to increase yield and quality of the process and, hence, decrease cost. Therefore, the present invention can correspond to economic effect.
  • Still another object of the present invention is to provide a method for forming the gate.
  • the present invention can make nitrogen onto the surface of the gate oxide layer by way of a pulsed plasma doped process and a thermal process, so as to obtain a shallow distribution of dosage and form a poly-gate having a concentration distribution of silicon nitride (Si x N y ).
  • this invention can avoid boron ions into substrate during the thermal process to protect the channel characteristic of the device.
  • a new method for forming semiconductor devices is disclosed. First of all, a semiconductor substrate is provided. Then a gate oxide layer having an uniform thickness is formed on the semiconductor substrate by way of using thermal oxidation. Subsequently, a doping layer is formed on the gate oxide layer by a plasma doped process. Next, forming a poly-layer on the doping layer of the gate oxide layer, wherein the poly-layer has an ions-distribution. Afterward, defining the poly-layer to form a poly-gate. The P-type ions are then implanted into the poly-gate and the substrate by way of using a self-aligned process. Finally, performing a thermal annealing process to form a uniform ion-implanting region and a poly-gate having a lower contact-resistance.
  • FIG. 1A to FIG. 1C show cross-sectional views illustrative of the metal-oxide-semiconductor by way of using the conventional process
  • FIG. 2A and FIG. 2B show cross-sectional views illustrative of various stages for forming a dielectric layer in accordance with the first embodiment of the present invention
  • FIG. 3A to FIG. 3E show cross-sectional views illustrative of various stages for forming a metal-oxide-semiconductor device in accordance with the second embodiment of the present invention
  • FIG. 4A to FIG. 4D show cross-sectional views illustrative of various stages for forming a metal-oxide-semiconductor device having salicide in accordance with the third embodiment of the present invention
  • FIG. 5A to FIG. 5C show cross-sectional views illustrative of various stages for forming a metal-oxide-semiconductor device having salicide in accordance with the fourth embodiment of the present invention.
  • FIG. 6A to FIG. 6D show cross-sectional views illustrative of various stages for forming a metal-oxide-semiconductor device having salicide in accordance with the fifth embodiment of the present invention.
  • a semiconductor substrate 200 is provided.
  • a dielectric layer 210 are formed on the semiconductor substrate 200 , wherein the method for forming the dielectric layer 210 comprises a thermal process, such as a thermal oxide process.
  • a dosage 220 is absorbed on the dielectric layer 210 by way of using a plasma doped process to form a doped layer on the dielectric layer 210 , wherein the dosage 220 comprises nitrogen, as shown in FIG. 2B.
  • a semiconductor substrate 300 such as a silicon substrate
  • a gate dielectric layer 310 such as a oxide layer
  • a reacted gas 320 is absorbed on the gate dielectric layer 310 by way of using a plasma doped process, such as a pulsed plasma doped process to form a doped layer 330 A, wherein the plasma doped process can separate the reacted gas 320 to form the plasma ions and make the plasma ions to absorbed on the doped layer 330 A, as shown in FIG. 3B.
  • a thermal process such as a rapid thermal process (RTP) to form an ion-barrier layer 330 B from doped layer 330 A.
  • RTP rapid thermal process
  • a conductor layer 340 A is formed on the ion-barrier layer 330 B.
  • defining the conductor layer 340 A to form a gate 350 A.
  • the ions are implanted into the gate 350 A and the substrate 300 by way of using a self-aligned process.
  • performing a thermal annealing process to form an ion-doping region 360 in the substrate 300 and a gate 350 B having a lower contact-resistance.
  • a semiconductor substrate 400 such as a silicon substrate
  • a gate dielectric layer 410 such as an oxide layer
  • a reacted gas 420 is absorbed on the gate dielectric layer 410 by way of using a plasma doped process, such as a pulsed plasma doped process to form a doped layer 430 A on the gate dielectric layer 410 , wherein the plasma doped process can separate the reacted gas 420 to form the plasma ions and make the plasma ions to absorbed on the doped layer 430 A, as shown in FIG. 4B.
  • a conductor layer 440 A is formed on the doped layer 430 A, wherein the plasma ions of the doped layer 430 A can react with the conductor layer 440 A during the growth of the conductor layer 440 A, so as to form an ions-distribution as an ion-barrier layer 430 B in the conductor layer 440 A.
  • the ions are implanted into the gate 440 B and the substrate 400 by way of using a self-aligned process.
  • performing a thermal annealing process to form an ion-doping region 450 in the substrate 400 and a gate 440 B having a lower contact-resistance, as shown in FIG. 4D.
  • a silicon substrate 500 is provided. Then depositing a gate oxide layer 510 and forming on the silicon substrate 500 . Afterward, an nitrogen gas 520 is absorbed on the gate oxide layer 510 by a pulsed plasma doped process having a dosage concentration that is about 10 14 /cm 2 to 10 17 /cm 2 , wherein the pulsed plasma doped process comprises an energy that is about 200 eV to 10000 eV. Next, proceeding a rapid thermal process (RTP) to form an nitride oxide layer 530 B, such as SiON, wherein the temperature of the rapid thermal process(RTP)is about 800° C. to 1000° C., as shown in FIG. 5B.
  • RTP rapid thermal process
  • a poly-layer is formed on the nitride oxide layer layer 530 .
  • defining the poly-layer to form a poly-gate 540 .
  • the P-type ions such as boron ions, are implanted into the poly-gate 540 and the substrate 500 by way of using a self-aligned process.
  • performing a thermal annealing process to form an P-type ion-doping region 550 in the substrate 500 and a poly-gate 540 having a lower contact-resistance.
  • a silicon substrate 600 is provided. Then a gate oxide layer 610 are formed on the silicon substrate 600 . Afterward, an nitrogen gas 620 is absorbed on the gate oxide layer 610 by a pulsed plasma doped process having a dosage concentration that is about 10 14 /cm 2 to 10 17 /cm 2 , so as to form an absorbed layer, wherein the pulsed plasma doped process comprises an energy that is about 200 eV to 10000 eV, as shown in FIG. 6B.
  • a poly-layer 640 A is formed on the absorbed layer 630 , wherein the nitrogen ions in the absorbed layer 630 can react with the poly-layer 640 A during the growth of the poly-layer 640 A, so as to form an ions-distribution as an ion-barrier layer 650 in the poly-layer 640 A, and that the ion-barrier layer 650 comprises Si x N y .
  • defining the poly-layer 640 A to form a poly-gate 640 B.
  • the boron ions are implanted into the poly-gate 640 B and the substrate 600 by way of using a self-aligned process.
  • performing a thermal annealing process to form a boron ion-doping region 660 in the substrate 600 and a poly-gate 640 B having a lower contact-resistance, as shown in FIG. 6D.
  • the present invention provide a method for preventing ion-penetration effect.
  • This invention can use the plasma doping process to substitute for conventional process, so as to avoid damaging the gate dielectric layer, and that can simplify complex process.
  • the present invention is appropriate for deep sub-micron technology to provide the semiconductor devices.
  • the present invention can form a ultra shallow ions-distribution as an ion-barrier layer on the gate dielectric layer by means of a plasma doping process and a thermal process, so as to prevent the ions penetration effect and protect threshold voltage.
  • this invention can provide a metal-oxide-semiconductor device whose performance is better than the conventional one to increase yield and quality of the process and, hence, decrease cost. Therefore, the present invention can correspond to economic effect.
  • the present invention can make nitrogen onto the surface of the gate oxide layer by way of a pulsed plasma doped process and a thermal process, so as to obtain a shallow distribution of dosage and form a poly-gate having a concentration distribution of silicon nitride(Si x N y ).
  • this invention can avoid boron ions into substrate during the thermal process to protect the channel characteristic of the device.
  • the plasma doping process directly uses the plasma ions that flow into the reaction chamber to react, whereby forming a reacted boundary layer on the surface of the substrate, and the boundary layer will be changed in according with the variation of the concentration.
  • the concept for pulsed plasma doping is using the gas flow into the reaction chamber with intermittent voltage method that is controlled by add/none voltage, so as to separate positive ions from the gas, and then the positive ions move forward to the substrate surface so that the boundary layer is uniform and steady-state. Accordingly, the driving force can be controlled to keep constant.
  • the present invention can obtain a shallow dosage profile by way of the pulse plasma doping, that is the pulse plasma doping,can drive the nitrogen to close to the surface of the substrate, so as to avoid affecting the channel of the devices.
  • this method can also reduce the destructiveness of the substrate so that the damage is easy to be repaired during the thermal oxidation process, and that acquire an interface between silicon and silicon oxide in the integrity.
  • the present invention is possible to apply to the process for forming the dielectric layer, and also it is possible to the present invention to any one metal-oxide-semiconductor in the semiconductor devices. Also, this invention can be applied to use pulsed plasma doping concerning the metal-oxide-semiconductor process used for forming dielectric layer have not been developed at present. Method of the present invention is the best metal-oxide-semiconductor compatible process for deep sub-micro process.

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Abstract

First of all, a semiconductor substrate is provided. Then a gate oxide layer having an uniform thickness is formed on the semiconductor substrate by way of using thermal oxidation. Subsequently, a doping layer is formed on the gate oxide layer by a plasma doped process. Next, forming a poly-layer on the doping layer of the gate oxide layer, wherein the poly-layer has an ions-distribution. Afterward, defining the poly-layer to form a poly-gate. The P-type ions are then implanted into the poly-gate and the substrate by way of using a self-aligned process. Finally, performing a thermal annealing process to form a uniform ion-implanting region and a poly-gate having a lower contact-resistance.

Description

    BACKGROUND OF THE INVENTION
  • 1. Field of the Invention [0001]
  • The present invention relates generally to a method for forming a metal-oxide-semiconductor device, and more particularly to a method for avoiding the ion penetration with the plasma doping. [0002]
  • 2. Description of the Prior Art [0003]
  • As semiconductor devices, such as Metal-Oxide-Semiconductor (MOS) devices, become highly integrated, the area occupied of the chip has to be maintained or more less, so as to reduce the unit cost of the circuit. For corresponding with the development of the high technology industry in the future, there is only one method to achieve this objective, that is, the area occupied by the devices shrinks, as well as the design rule. With advances in the semiconductor technology, the dimensions of the integrated circuit (IC) devices have been shrunk to the deep sub-micron range. As the semiconductor device continuously shrinks to deep sub-micron region, some problems are incurred due to the process of scaling down. [0004]
  • Metal-oxide-semiconductor (MOS) devices have been well known in the prior art. In particular, Field-effect transistors (FETs) and other related insulated-gate electronic devices are mainstay components of metal-oxide-semiconductor integrated circuits. A MOSFET generally consists of two closely spaced, doped regions in a substrate; namely, the source region and the drain region. The region between the two doped regions is the channel above which a thin insulation layer such as a gate oxide layer is formed. A gate conductor is formed from a gate material directly over the insulation layer directly above the channel and a voltage applied to the gate conductor affects the electronic properties of the channel region, whereby the MOSFET can control current flow between the source region and the drain region (e.g., is turned on and off). [0005]
  • As is generally well-known in the art of CMOS technology, a CMOS (complementary metal-oxide-semiconductor) device is formed of an N-channel MOS device and a P-channel MOS device, wherein the PMOS devices are formed by implanting the substrate with a p-type dopant to form heavily doped p[0006] + source and drain regions using a self-aligned process, and the NMOS devices are formed by implanting the substrate with a n-type dopant to form heavily doped n source and drain regions using a self-aligned process. Since the gate conductor is used in the self-aligned process, it is also implanted with a p-type/n-type dopant, for example of p-type dopant ions include B+ and BF2 +. Among B+ and BF2 +, BF2 + is preferred because of its larger atomic mass.
  • Furthermore, in order to increase the speed of the CMOS devices, there has existed in the micro-electronics industry over the last two decades an aggressive scaling-down of the channel length dimensions. However, as the channel length reduction occurs, the thickness of the gate oxide has to be likewise reduced down so as to avoid short channel effects. Thus, there has been proposed heretofore of using a p+-type polycrystalline silicon (poly-Si) gate so as to provide a surface channel feature in P-channel MOS devices in advanced CMOS structures. This is due to the fact that it is known that surface-channel P-channel MOS devices with p+-type poly-Si gates can improve short-channel and sub-threshold I-V characteristics and produce better controllability of the threshold voltage. [0007]
  • FIGS. 1A to [0008] 1C are cross-sectional views showing the progression of manufacturing steps in the formation of the metal-oxide-semiconductor according a conventional method. First of all, a substrate 100 is provided, and a shallow trench isolation 110 is formed in the substrate 100. Then, a gate oxide layer 120 having an uniform thickness is formed on the substrate 100 by way of a thermal oxidation process. Thereafter, a poly gate 130A is formed and defined on the gate oxide layer 120. Next, proceeding a self-aligned implanting process with boron ions into the poly gate 130A and substrate 100. Afterward, a uniform ion-implanting region 150 and a poly gate 130B having a lower contact resistance are formed by way of using a thermal anneal process.
  • Typically, BF[0009] 2 + ions are implanted simultaneously with the forming of the p+ poly-Si gate and a p+ shallow junction. In particular, when fluorine is present in a gate conductor along with boron, fluorine enhances boron penetration through the gate oxide and into the channel region during thermal anneals. Boron ions which have penetrated into the silicon substrate may cause a shift in the threshold voltage (Vth) of the operating device. This is because boron diffusion into the channel region results in a change in the concentration level of the n-channel substrate thereby causing a shift in threshold voltage and degrading the reliability of the devices oxide quality. Accordingly, the problem of boron penetration through the thin gate oxide due to scaling-down has become one of the major concerns for advanced CMOS technology. There are known in the art of various techniques which have been used for suppressing boron penetration. One such method is the use of nitrogen implantation into the p+ poly-Si gate. Another known method in the prior art is utilizing of an amorphous silicon gate. Also, still another known method involves the use of a stacked amorphous silicon/poly-Si gate. However, all of these aforementioned approaches suffer from the disadvantage of increasing the complexity of the conventional CMOS fabrication process. This is because of the different deposition process required for the poly as well as different etching processes needed to remove the poly. In view of the foregoing, there still exists a method for fabricating advanced CMOS integrated circuits so as to prevent ions penetration through the thin gate oxide of devices, which require only minimal modification to the conventional MOS fabrication process.
  • In accordance with the above description, a new and improved method for forming the metal-oxide-semiconductor is therefore necessary, so as to raise the yield and quality of the follow-up process. [0010]
    • SUMMARY OF THE INVENTION
  • In accordance with the present invention, a method is provided for fabricating the MOS that substantially overcomes drawbacks of above mentioned problems arised from the conventional methods. [0011]
  • Accordingly, it is a main object of the present invention to provide a method for fabricating the metal-oxide-semiconductor. This invention can use plasma doping to substitute for conventional process, so as to avoid damaging gate dielectric layer and decrease the complex of process. Hence, the present invention is appropriate for deep sub-micron technology to provide the semiconductor devices. [0012]
  • Another object of the present invention is to provide a method for forming the gate dielectric layer. The present invention can form a ultra shallow ions-distribution as an ion-barrier layer on the gate dielectric layer by means of a plasma doping process and a thermal process, so as to prevent the ions penetration effect and protect threshold voltage. Accordingly, this invention can provide a metal-oxide-semiconductor device whose performance is better than the conventional one to increase yield and quality of the process and, hence, decrease cost. Therefore, the present invention can correspond to economic effect. [0013]
  • Still another object of the present invention is to provide a method for forming the gate. The present invention can make nitrogen onto the surface of the gate oxide layer by way of a pulsed plasma doped process and a thermal process, so as to obtain a shallow distribution of dosage and form a poly-gate having a concentration distribution of silicon nitride (Si[0014] xNy). Hence, this invention can avoid boron ions into substrate during the thermal process to protect the channel characteristic of the device.
  • In accordance with the present invention, a new method for forming semiconductor devices is disclosed. First of all, a semiconductor substrate is provided. Then a gate oxide layer having an uniform thickness is formed on the semiconductor substrate by way of using thermal oxidation. Subsequently, a doping layer is formed on the gate oxide layer by a plasma doped process. Next, forming a poly-layer on the doping layer of the gate oxide layer, wherein the poly-layer has an ions-distribution. Afterward, defining the poly-layer to form a poly-gate. The P-type ions are then implanted into the poly-gate and the substrate by way of using a self-aligned process. Finally, performing a thermal annealing process to form a uniform ion-implanting region and a poly-gate having a lower contact-resistance.[0015]
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • The foregoing aspects and many of the attendant advantages of this invention will become more readily appreciated as the same becomes better understood by reference to the following detailed description, when taken in conjunction with the accompanying drawings, wherein: [0016]
  • FIG. 1A to FIG. 1C show cross-sectional views illustrative of the metal-oxide-semiconductor by way of using the conventional process; [0017]
  • FIG. 2A and FIG. 2B show cross-sectional views illustrative of various stages for forming a dielectric layer in accordance with the first embodiment of the present invention; [0018]
  • FIG. 3A to FIG. 3E show cross-sectional views illustrative of various stages for forming a metal-oxide-semiconductor device in accordance with the second embodiment of the present invention; [0019]
  • FIG. 4A to FIG. 4D show cross-sectional views illustrative of various stages for forming a metal-oxide-semiconductor device having salicide in accordance with the third embodiment of the present invention; [0020]
  • FIG. 5A to FIG. 5C show cross-sectional views illustrative of various stages for forming a metal-oxide-semiconductor device having salicide in accordance with the fourth embodiment of the present invention; and [0021]
  • FIG. 6A to FIG. 6D show cross-sectional views illustrative of various stages for forming a metal-oxide-semiconductor device having salicide in accordance with the fifth embodiment of the present invention. [0022]
    • DESCRIPTION OF THE PREFERRED EMBODIMENT
  • A preferred embodiment of the present invention will now be described in greater detail. Nevertheless, it should be recognized that the present invention can be practiced in a wide range of other embodiments besides those explicitly described, and the scope of the present invention is expressly not limited except as specified in the accompanying claims. [0023]
  • As illustrated in FIG. 2A, in the first embodiment of the present invention, first of all, a [0024] semiconductor substrate 200 is provided. Then a dielectric layer 210 are formed on the semiconductor substrate 200, wherein the method for forming the dielectric layer 210 comprises a thermal process, such as a thermal oxide process. Afterward, a dosage 220 is absorbed on the dielectric layer 210 by way of using a plasma doped process to form a doped layer on the dielectric layer 210, wherein the dosage 220 comprises nitrogen, as shown in FIG. 2B.
  • As illustrated in FIG. 3A, in the second embodiment of the present invention, first of all, a [0025] semiconductor substrate 300, such as a silicon substrate, is provided. Then a gate dielectric layer 310, such as a oxide layer, are formed on the semiconductor substrate 300. Afterward, a reacted gas 320, such as nitrogen, is absorbed on the gate dielectric layer 310 by way of using a plasma doped process, such as a pulsed plasma doped process to form a doped layer 330A, wherein the plasma doped process can separate the reacted gas 320 to form the plasma ions and make the plasma ions to absorbed on the doped layer 330A, as shown in FIG. 3B.
  • As illustrated in FIG. 3C to FIG. 3E, in this embodiment, proceeding a thermal process, such as a rapid thermal process (RTP) to form an ion-[0026] barrier layer 330B from doped layer 330A. Then a conductor layer 340A is formed on the ion-barrier layer 330B. Afterward, defining the conductor layer 340A to form a gate 350A. Next, the ions are implanted into the gate 350A and the substrate 300 by way of using a self-aligned process. Finally, performing a thermal annealing process to form an ion-doping region 360 in the substrate 300 and a gate 350B having a lower contact-resistance.
  • As illustrated in FIG. 4A, in the third embodiment of the present invention, first of all, a [0027] semiconductor substrate 400, such as a silicon substrate, is provided. Then a gate dielectric layer 410, such as an oxide layer, are formed on the semiconductor substrate 400. Afterward, a reacted gas 420, such as nitrogen, is absorbed on the gate dielectric layer 410 by way of using a plasma doped process, such as a pulsed plasma doped process to form a doped layer 430A on the gate dielectric layer 410, wherein the plasma doped process can separate the reacted gas 420 to form the plasma ions and make the plasma ions to absorbed on the doped layer 430A, as shown in FIG. 4B.
  • As illustrated in FIG. 4C, in this embodiment, a [0028] conductor layer 440A is formed on the doped layer 430A, wherein the plasma ions of the doped layer 430A can react with the conductor layer 440A during the growth of the conductor layer 440A, so as to form an ions-distribution as an ion-barrier layer 430B in the conductor layer 440A. Afterward, defining the conductor layer 440A to form a gate 440B. Next, the ions are implanted into the gate 440B and the substrate 400 by way of using a self-aligned process. Finally, performing a thermal annealing process to form an ion-doping region 450 in the substrate 400 and a gate 440B having a lower contact-resistance, as shown in FIG. 4D.
  • As illustrated in FIG. 5A, in the fourth embodiment of the present invention, first of all, a [0029] silicon substrate 500 is provided. Then depositing a gate oxide layer 510 and forming on the silicon substrate 500. Afterward, an nitrogen gas 520 is absorbed on the gate oxide layer 510 by a pulsed plasma doped process having a dosage concentration that is about 1014/cm2 to 1017/cm2, wherein the pulsed plasma doped process comprises an energy that is about 200 eV to 10000 eV. Next, proceeding a rapid thermal process (RTP) to form an nitride oxide layer 530B, such as SiON, wherein the temperature of the rapid thermal process(RTP)is about 800° C. to 1000° C., as shown in FIG. 5B.
  • As illustrated in FIG. 5C, in this embodiment, a poly-layer is formed on the nitride [0030] oxide layer layer 530. Afterward, defining the poly-layer to form a poly-gate 540. Next, the P-type ions, such as boron ions, are implanted into the poly-gate 540 and the substrate 500 by way of using a self-aligned process. Finally, performing a thermal annealing process to form an P-type ion-doping region 550 in the substrate 500 and a poly-gate 540 having a lower contact-resistance.
  • As illustrated in FIG. 6A, in the fifth embodiment of the present invention, first of all, a [0031] silicon substrate 600 is provided. Then a gate oxide layer 610 are formed on the silicon substrate 600. Afterward, an nitrogen gas 620 is absorbed on the gate oxide layer 610 by a pulsed plasma doped process having a dosage concentration that is about 1014/cm2 to 1017/cm2, so as to form an absorbed layer, wherein the pulsed plasma doped process comprises an energy that is about 200 eV to 10000 eV, as shown in FIG. 6B.
  • As illustrated in FIG. 6C, in this embodiment, a poly-[0032] layer 640A is formed on the absorbed layer 630, wherein the nitrogen ions in the absorbed layer 630 can react with the poly-layer 640A during the growth of the poly-layer 640A, so as to form an ions-distribution as an ion-barrier layer 650 in the poly-layer 640A, and that the ion-barrier layer 650 comprises SixNy. Afterward, defining the poly-layer 640A to form a poly-gate 640B. Next, the boron ions are implanted into the poly-gate 640B and the substrate 600 by way of using a self-aligned process. Finally, performing a thermal annealing process to form a boron ion-doping region 660 in the substrate 600 and a poly-gate 640B having a lower contact-resistance, as shown in FIG. 6D.
  • In these embodiments of the present invention, as discussed above, the present invention provide a method for preventing ion-penetration effect. This invention can use the plasma doping process to substitute for conventional process, so as to avoid damaging the gate dielectric layer, and that can simplify complex process. Hence, the present invention is appropriate for deep sub-micron technology to provide the semiconductor devices. Furthermore, The present invention can form a ultra shallow ions-distribution as an ion-barrier layer on the gate dielectric layer by means of a plasma doping process and a thermal process, so as to prevent the ions penetration effect and protect threshold voltage. Accordingly, this invention can provide a metal-oxide-semiconductor device whose performance is better than the conventional one to increase yield and quality of the process and, hence, decrease cost. Therefore, the present invention can correspond to economic effect. The present invention can make nitrogen onto the surface of the gate oxide layer by way of a pulsed plasma doped process and a thermal process, so as to obtain a shallow distribution of dosage and form a poly-gate having a concentration distribution of silicon nitride(Si[0033] xNy). Hence, this invention can avoid boron ions into substrate during the thermal process to protect the channel characteristic of the device.
  • Moreover, the plasma doping process directly uses the plasma ions that flow into the reaction chamber to react, whereby forming a reacted boundary layer on the surface of the substrate, and the boundary layer will be changed in according with the variation of the concentration. On the contrary, the concept for pulsed plasma doping is using the gas flow into the reaction chamber with intermittent voltage method that is controlled by add/none voltage, so as to separate positive ions from the gas, and then the positive ions move forward to the substrate surface so that the boundary layer is uniform and steady-state. Accordingly, the driving force can be controlled to keep constant. Therefore, the present invention can obtain a shallow dosage profile by way of the pulse plasma doping, that is the pulse plasma doping,can drive the nitrogen to close to the surface of the substrate, so as to avoid affecting the channel of the devices. Hence, this method can also reduce the destructiveness of the substrate so that the damage is easy to be repaired during the thermal oxidation process, and that acquire an interface between silicon and silicon oxide in the integrity. [0034]
  • Of course, it is possible to apply the present invention to the process for forming the dielectric layer, and also it is possible to the present invention to any one metal-oxide-semiconductor in the semiconductor devices. Also, this invention can be applied to use pulsed plasma doping concerning the metal-oxide-semiconductor process used for forming dielectric layer have not been developed at present. Method of the present invention is the best metal-oxide-semiconductor compatible process for deep sub-micro process. [0035]
  • Obviously, many modifications and variations of the present invention are possible in light of the above teachings. It is therefore to be understood that within the scope of the appended claims, the present invention may be practiced otherwise than as specifically described herein. [0036]
  • Although specific embodiments have been illustrated and described, it will be obvious to those skilled in the art that various modifications may be made without departing from what is intended to be limited solely by the appended claims. [0037]

Claims (32)

What is claimed is:
1. A method for doping a dielectric layer, said method comprising:
providing a substrate;
forming a dielectric layer on said substrate; and
performing a plasma doping process to form a doping layer on said dielectric layer.
2. The method according to claim 1, wherein the step for forming said dielectric layer comprises a thermal process.
3. The method according to claim 1, wherein said plasma doping process comprises a pulsed plasma doping process.
4. A method for forming a gate, said method comprising:
providing a substrate;
forming a dielectric layer on said substrate;
performing a plasma doping process to form an absorbed layer on said dielectric layer;
forming an ion-barrier layer in said absorbed layer; and
forming and defining a gate on said ion-barrier layer.
5. The method according to claim 4, wherein said plasma doping process comprises a pulsed plasma doping process.
6. The method according to claim 4, wherein said absorbed layer comprises an nitrogen.
7. The method according to claim 4, wherein the step for forming said ion-barrier layer comprises a thermal process.
8. A method for forming a gate, said method comprising:
providing a substrate;
forming a dielectric layer on said substrate;
performing a plasma doping process to form an absorbed layer on said dielectric layer;
forming a first conductor layer to react with said absorbed layer, so as to form a second conductor layer having an absorbed-ions distribution on said dielectric layer; and
forming and defining said second conductor layer to form a gate having said absorbed-ions distribution on said dielectric layer on said dielectric layer.
9. The method according to claim 8, wherein said plasma doping process comprises a pulsed plasma doping process.
10. The method according to claim 8, wherein said absorbed layer comprises an nitrogen.
11. A method for forming a gate, said method comprising:
providing a silicon substrate;
forming an oxide layer on said silicon substrate;
performing a pulsed plasma doping process to absorb an nitrogen on said oxide layer;
forming an ion-barrier layer on said oxide layer by way of using a thermal oxidation process;
forming and defining a gate on said ion-barrier layer; and
forming an ion-doping region in said gate and an ion-doping region in said silicon substrate.
12. The method according to claim 11, wherein the energy of said pulsed plasma doping process is about 200 eV to 10000 eV.
13. The method according to claim 11, wherein the dosage of said nitrogen is about 1014/cm2 to 1017/cm2.
14. The method according to claim 11, wherein the temperature of said thermal oxidation process is about 800° C. to 1000° C.
15. The method according to claim 11, wherein said ion-barrier layer comprises an nitride oxide.
16. The method according to claim 11, wherein the step for forming said ion-doping region comprises a self-aligned implanting process.
17. The method according to claim 11, wherein the step for forming said ion-doping region comprises a thermal annealing process.
18. The method according to claim 11, wherein said ion-doping region comprises a P-type ion.
19. The method according to claim 18, wherein said P-type ion comprises a boron ion.
20. A method for forming a gate, said method comprising:
providing a silicon substrate;
forming an oxide layer on said silicon substrate;
performing a pulsed plasma doping process to form an nitrogen-absorbed layer on said oxide layer;
forming a first conductor layer to react with said nitrogen-absorbed layer, so as to form a second conductor layer having an ions-absorbed distribution on said oxide layer;
defining said second conductor layer to form a gate having said ions-absorbed distribution on said oxide layer; and
forming an ion-doping region in said gate and an ion-doping region in said silicon substrate by way of using an implanting process.
21. The method according to claim 20, wherein the energy of said pulsed plasma doping process is about 200 eV to 10000 eV.
22. The method according to claim 20, wherein the dosage of said nitrogen is about 1014/cm2 to 1017/cm2.
23. The method according to claim 20, wherein said conductor layer comprises a silicon nitride.
24. The method according to claim 20, wherein said implanting process comprises a self-aligned implanting process.
25. The method according to claim 20, wherein the step for forming said ion-doping region comprises a thermal annealing process.
26. The method according to claim 20, wherein said ion-doping region comprises a P-type ion.
27. The method according to claim 26, wherein said P-type ion comprises a boron ion.
28. A method for forming a gate, said method comprising:
providing a silicon substrate;
forming a gate oxide layer on said silicon substrate;
performing a pulsed plasma doping process having an energy about 200 eV to 10000 eV to absorb an nitrogen on said gate oxide layer;
forming an silicon nitride oxide layer on said gate oxide layer by way of using a thermal oxidation process;
forming and defining a gate on said silicon nitride oxide layer; and
forming a doping region of boron in said gate and a doping region of boron in said silicon substrate.
29. The method according to claim 28, wherein the dosage of said nitrogen is about 1014/cm2to 1017/cm2.
30. The method according to claim 28, wherein the temperature of said thermal oxidation process is about 800° C. to 1000° C.
31. A method for forming a gate, said method comprising:
providing a silicon substrate;
forming a gate oxide layer on said silicon substrate;
performing a pulsed plasma doping process having an energy about 200 eV to 10000 eV to form an nitrogen-absorbed layer on said gate oxide layer;
forming a first conductor layer to react with said nitrogen-absorbed layer, so as to form a second conductor layer having an silicon nitride on said gate oxide layer;
defining said second conductor layer to form a gate having said silicon nitride distribution on said gate oxide layer; and
forming a doping region of boron in said gate and a doping region of boron in said silicon substrate by way of using an implanting process.
32. The method according to claim 31, wherein the dosage of said nitrogen is about 1014/cm2 to 1017/cm2.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090035927A1 (en) * 2007-07-30 2009-02-05 Applied Materials, Inc. Method of forming dielectric layers on a substrate and apparatus therefor
US11430794B2 (en) 2020-10-13 2022-08-30 Samsung Electronics Co., Ltd. Method for fabricating semiconductor devices

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US6200651B1 (en) * 1997-06-30 2001-03-13 Lam Research Corporation Method of chemical vapor deposition in a vacuum plasma processor responsive to a pulsed microwave source
US6184110B1 (en) * 1998-04-30 2001-02-06 Sharp Laboratories Of America, Inc. Method of forming nitrogen implanted ultrathin gate oxide for dual gate CMOS devices
US6432780B2 (en) * 2000-01-30 2002-08-13 Wei-Wen Chen Method for suppressing boron penetrating gate dielectric layer by pulsed nitrogen plasma doping
US6660657B1 (en) * 2000-08-07 2003-12-09 Micron Technology, Inc. Methods of incorporating nitrogen into silicon-oxide-containing layers

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090035927A1 (en) * 2007-07-30 2009-02-05 Applied Materials, Inc. Method of forming dielectric layers on a substrate and apparatus therefor
US7910497B2 (en) * 2007-07-30 2011-03-22 Applied Materials, Inc. Method of forming dielectric layers on a substrate and apparatus therefor
US11430794B2 (en) 2020-10-13 2022-08-30 Samsung Electronics Co., Ltd. Method for fabricating semiconductor devices
US11800701B2 (en) 2020-10-13 2023-10-24 Samsung Electronics Co., Ltd. Method for fabricating semiconductor devices

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