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US20030025177A1 - Optically and electrically programmable silicided polysilicon fuse device - Google Patents

Optically and electrically programmable silicided polysilicon fuse device Download PDF

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Publication number
US20030025177A1
US20030025177A1 US09/921,136 US92113601A US2003025177A1 US 20030025177 A1 US20030025177 A1 US 20030025177A1 US 92113601 A US92113601 A US 92113601A US 2003025177 A1 US2003025177 A1 US 2003025177A1
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US
United States
Prior art keywords
silicide
fuse device
silicon based
poly silicon
silicided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US09/921,136
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English (en)
Inventor
Chandrasekharan Kothandaraman
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Individual
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Individual
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Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to US09/921,136 priority Critical patent/US20030025177A1/en
Priority to EP02751171A priority patent/EP1412981A1/fr
Priority to PCT/EP2002/008647 priority patent/WO2003015168A1/fr
Priority to TW091117508A priority patent/TW561604B/zh
Priority to CNA028167856A priority patent/CN1547773A/zh
Publication of US20030025177A1 publication Critical patent/US20030025177A1/en
Priority to US10/669,026 priority patent/US7029955B2/en
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
    • H01L23/5329—Insulating materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
    • H01L23/5256—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising fuses, i.e. connections having their state changed from conductive to non-conductive
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
    • H01L23/5256—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising fuses, i.e. connections having their state changed from conductive to non-conductive
    • H01L23/5258—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising fuses, i.e. connections having their state changed from conductive to non-conductive the change of state resulting from the use of an external beam, e.g. laser beam or ion beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/64—Impedance arrangements
    • H01L23/66—High-frequency adaptations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/3011—Impedance

Definitions

  • the invention relates to integrated circuit devices, and more particularly, to fusible link devices in semiconductor integrated circuits in which the laser fuse is made in the poly-Si level, as opposed to the metal level, which can be placed in oxide.
  • Programmable links are electrical interconnects which are broken or created at selected electronic nodes by the end user after the integrated circuit device has been fabricated in order to activate or deactivate the selected electronic nodes.
  • programmable links are used widely in programmable read-only memory devices (PROMs).
  • PROMs programmable read-only memory devices
  • the fusible link Upon obtaining a PROM device, typically it will consist of an X-Y lattice of conductors or semiconductors. The lattice comprises a cross-over point of a conducting link, which is referred to as a fusible link, that connects a transistor to this lattice network.
  • the fusible link is blown at selected nodes to create an open circuit.
  • the combination of blown and unblown links constitutes a digital bit pattern of ones and zeros that constitute data which the user stores in the PROM.
  • fusible link PROM systems Some of the key disadvantages of fusible link PROM systems is that, because of the nature of the conducting material in the link, high voltage and high current levels are usually needed during programming in order to complete blowing of the fusible link. Because the link is relatively high in conductance, it requires a considerable amount of power dissipation to blow it. Further, the size and shape of the fusible link must be exacting so that the link will function effectively as a conductor if it is not blown and be a completely open circuit if it is blown.
  • a second type of programmable link has also been utilized frequently.
  • the second type of programmable link is referred to as an anti-fuse link, and enjoys considerable use in integrated circuit applications.
  • the programming mechanism instead of the programming mechanism causing an open circuit as is the case with fusible links, the programming mechanism creates a short circuit or low resistance link.
  • the anti-fuse link consists of two conductor and/or semiconductor materials with a dielectric or insulating material between them. During programming, the insulating or dielectric material at selected points in between the conductive material is broken down by a predetermined applied voltage to electrically connect the conducting or semiconducting materials together.
  • a silicide agglomeration fuse device is disclosed in U.S. Pat. No. 5,708,291.
  • the fusible link device is disposed on a semiconductor substrate and comprises:
  • a silicide layer formed on the polysilicon layer having a second resistance lower than the first resistance, the silicide layer agglomerating to form an electrical discontinuity in response to a predetermined programming potential being applied across the silicide layer, such that the resistance of the fusible link device can be selectively increased and;
  • U.S. Pat. No. 5,969,404 disclose a fusible link device on a semiconductor substrate for providing discretionary electrical connections.
  • the fusible link device has a first un-programmed resistance and includes a polysilicon layer and a silicide layer.
  • the silicide layer is formed on the polysilicon layer, and agglomerates to form an electrical discontinuity in response to a predetermined programming potential being applied across the silicide layer, such that the resistance of the fusible link device can be selectively increased to a second programmed resistance.
  • a polysilicon fuse array structure for integrated circuits is disclosed in U.S. Pat. No. 5,536,968.
  • the semiconductor structure comprises:
  • a polysilicon strip connecting the first and second electrical conductors and forming a fuse between the first and second electrical conductors, the polysilicon strip including a narrow middle section, whereby the fuse will be opened by a current which is passed from the first electrical conductor through the polysilicon strip into the second electrical conductor;
  • a second patterned signal layer electrically separated from the first patterned signal layer, the second electrical conductor residing in the second patterned signal layer.
  • U.S. Pat. No. 6,104,079 disclose closely pitched polysilicon fuses and a method for making the same.
  • tungsten barriers are formed adjacent to the fuse elements and the tungsten barriers are made compatible with the process to form a crack stop.
  • the tungsten is stacked at the via level on top of the tungsten at the contact level in the crack stop, and the interlevel dielectric is used as a cover for the fuse. In this way, the tungsten fuse barrier process is made compatible with the polysilicon fuse crack stop process.
  • An electrically global fuse in a reduced co-sectional area is disclosed in U.S. Pat. No. 6,222,244 B1.
  • the semiconductor fuse is positioned between conductors for connecting at least two wiring lines.
  • the fuse comprises spacers positioned on adjacent one's of the conductors, and the fuse element is positioned between the spacers and connected to the wiring lines.
  • a space between the conductors comprises the first width comprising a smallest possible photolithographic width and the fuse element has a second width smaller than the first width. This fuse protects the semiconductor device from excessive voltage and/or current or selectively and permanently connect/disconnect semiconductor devices from one another.
  • U.S. Pat. No. 5,266,829 disclose an electrically programmable low-impedance, anti-fuse element. It consists of a capacitor-like structure having a first electrode and a second electrode with a dielectric layer in between, characterized by a high impedance and very low leakage current before programming and a low-resistance after programming. A plurality of these anti-fuses is disposed in a semiconductor integrated circuit, and maybe selectively blown to create low impedance interconnects at selected locations within the integrated circuit. The anti-fuses may be blown either before or after packaging of the integrated circuit die.
  • U.S. Pat. No. 5,882,998 disclose a low power programmable fuse structure and method of making the same.
  • the method comprises:
  • forming a silicide metal over the doped polysilicon strip such that a thinner layer of the silicide metal is formed over the increased dopant concentration region and a thicker layer of the silicide metal is formed over other regions of the doped polysilicon strip.
  • One object of the present invention is to provide programmable fuses in integrated circuits that reduce the damage to interlevel dielectrics and neighboring structures by avoiding using fuses in the final metal level (which may be placed in oxide), and where some damage to the structure still occurs.
  • Another object of the present invention is to provide programmable fuse links for use in integrated circuits that, unlike all currently known methods of programming, are free from physical damage to the structure.
  • a further object of the present invention is to provide programmable fuses for use in integrated circuits that utilize less energy in comparison to ablation or melting techniques, and that reduces the pitch and damage to nearby structures upon programming.
  • a yet further object of the present invention is to provide programmable fuses for use in integrated circuits that are capable of being programmed by optical means, of shorter wavelengths, and thereby reducing the focal spot size of the optical beam that lead to reduced pitch, but which also lends itself to being electrically programmed as well as optically programmed.
  • FIG. 1 is a microphotograph of a fuse link of the prior art in which there are metal lines on oxide/low dielectric constant materials, and in which there is a splatter.
  • FIG. 2 is a microphotograph of a fuse link of the prior art in which there is a metal line on oxide/low-dielectric constant materials, and in which there is a crack.
  • FIG. 3 is a microphotograph of the silicided polysilicon based fuse of the invention after programming.
  • FIG. 4 shows a top view of a microphotograph of a fusible link device of the present invention comprising a large array structure of an eFuse bank in which silicided poly-Si lines are programmed by a thick-oxide.
  • FIG. 5 shows a top view of a microphotograph of a single fusible link device of the present invention comprising an eFuse in which silicided Poly-Si lines are programmed by a thick-oxide.
  • FIG. 1 shows a microphotograph of a fuse link, wherein metal lines on oxide/low dielectric constant materials evidence a splatter formed by the high energy needed to program this fuse.
  • a still further disadvantage in addition to the splatter created from high energy when programming the prior art fuse link is that cracks 11 are created upon programming, as can be seen in the microphotograph of FIG. 2.
  • FIG. 3 The invention silicided polysilicon based fuse device that may be programmed either optically or electrically is shown in FIG. 3.
  • FIG. 3 which comprises a top view as well as a cross sectional side view of the silicided polysilicon based fuse device, there is a silicon substrate 20 with an insulating layer 21 disposed above.
  • the fuse device section FDS is disposed on the insulating layer 21 , as a part of a larger integrated circuit device.
  • the polysilicon layer 22 may be doped p-type; however, other embodiments or configurations may include other types of doping including n-type or the formation of p-n junctions in the polysilicon layer 22 .
  • the fuse device section FDS includes a Cobalt silicide (CoSi 2 ) layer 23 disposed on the polysilicon layer 22 , and a transparent passivation layer 24 on the CoSi 2 layer 23 .
  • the fuse device section FDS is characterized by a resistance in the silicided polysilicon before it is programmed or blown. As may be seen from FIG. 3, in the programmed state, the higher resistance is obtained because of the removal of the CoSi 2 in some regions. It is apparent that the fuse link has not been physically ruptured in order to achieve this higher resistance state. Furthermore, the passivation layer 24 is unperturbed during the entire process.
  • the SiN layer functions as an encapsulation or barrier layer, which while allowing the transmission of optical energy, allows for the change in the resistance of the silicided polysilicon layer without rupturing this layer.
  • CoSi 2 is preferred as the silicide
  • other silicides such as titanium, tungsten, or platinum silicides are equally operable.
  • SiN is the preferred encapsultation layer; however, any transparent, encapsulation or barrier layer will suffice.
  • FIG. 4 shows a microphotograph of the present invention structure comprising a large array of fuse links, showing silicided poly-Si links that are programmed.
  • the programming in this embodiment is done at about 3.3V and about 10 mA for about 200 microseconds, whereupon current is caused to flow between contacts 30 as shown in FIG. 5.
  • the current flows through the fuse link to affect a change in the resistance of the fuse link, without rupturing the link 31 .
  • the basic resistivity fuse link is changed.
  • the silicided polysilicon based fuse device of the invention may be programmed by the application of optical energy in the visible and NIR (near infrared) range realizing the increased local resistivity, again without any rupture. Further, there is no absorption in the inter-level dielectrics, oxide and nitride.
  • the novel inventive structure removes the disadvantages of metal-link laser fuses, provides flexibility in product choice and test flow, and allows programming by either laser or electrical means, and in so doing, induces a large resistance change in excess of 10 5 ohms, without rupture of the link.

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
US09/921,136 2001-08-03 2001-08-03 Optically and electrically programmable silicided polysilicon fuse device Abandoned US20030025177A1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US09/921,136 US20030025177A1 (en) 2001-08-03 2001-08-03 Optically and electrically programmable silicided polysilicon fuse device
EP02751171A EP1412981A1 (fr) 2001-08-03 2002-08-02 Dispositif de coupe-circuit fusible en polysilicium a base de siliciure programmable optiquement et electriquement
PCT/EP2002/008647 WO2003015168A1 (fr) 2001-08-03 2002-08-02 Dispositif de coupe-circuit fusible en polysilicium a base de siliciure programmable optiquement et electriquement
TW091117508A TW561604B (en) 2001-08-03 2002-08-02 Optically and electrically programmable silicided polysilicon fuse device
CNA028167856A CN1547773A (zh) 2001-08-03 2002-08-02 光及电可编程硅化多晶硅熔丝器件
US10/669,026 US7029955B2 (en) 2001-08-03 2003-09-23 Optically and electrically programmable silicided polysilicon fuse device

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Application Number Priority Date Filing Date Title
US09/921,136 US20030025177A1 (en) 2001-08-03 2001-08-03 Optically and electrically programmable silicided polysilicon fuse device

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US10/669,026 Continuation US7029955B2 (en) 2001-08-03 2003-09-23 Optically and electrically programmable silicided polysilicon fuse device

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US20030025177A1 true US20030025177A1 (en) 2003-02-06

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US09/921,136 Abandoned US20030025177A1 (en) 2001-08-03 2001-08-03 Optically and electrically programmable silicided polysilicon fuse device
US10/669,026 Expired - Fee Related US7029955B2 (en) 2001-08-03 2003-09-23 Optically and electrically programmable silicided polysilicon fuse device

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US10/669,026 Expired - Fee Related US7029955B2 (en) 2001-08-03 2003-09-23 Optically and electrically programmable silicided polysilicon fuse device

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EP (1) EP1412981A1 (fr)
CN (1) CN1547773A (fr)
TW (1) TW561604B (fr)
WO (1) WO2003015168A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050093091A1 (en) * 2003-11-04 2005-05-05 International Business Machines Corporation Structure and programming of laser fuse
US20050121741A1 (en) * 2003-12-03 2005-06-09 Voldman Steven H. Apparatus and method for electronic fuse with improved ESD tolerance
US20050122204A1 (en) * 2003-12-03 2005-06-09 International Business Machines Corporation Apparatus and method for electronic fuse with improved esd tolerance
US20050145982A1 (en) * 2004-01-05 2005-07-07 Victorio Chavarria Integrated fuse for multilayered structure
US20070111403A1 (en) * 2005-11-15 2007-05-17 Chun Jiang Polycide fuse with reduced programming time
US20090051002A1 (en) * 2007-08-22 2009-02-26 International Business Machines Corporation Electrical fuse having a thin fuselink

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US7872897B2 (en) 2003-04-11 2011-01-18 International Business Machines Corporation Programmable semiconductor device
US7857510B2 (en) * 2003-11-08 2010-12-28 Carl F Liepold Temperature sensing circuit
CN1324679C (zh) * 2004-11-24 2007-07-04 联华电子股份有限公司 电气硅熔丝组件的使用方法
US20060267136A1 (en) * 2005-05-24 2006-11-30 International Business Machines Corporation Integrated circuit (ic) with on-chip programmable fuses
US7759226B1 (en) 2005-08-30 2010-07-20 Altera Corporation Electrical fuse with sacrificial contact
US7732898B2 (en) * 2007-02-02 2010-06-08 Infineon Technologies Ag Electrical fuse and associated methods
US7713792B2 (en) 2007-10-10 2010-05-11 International Business Machines Corporation Fuse structure including monocrystalline semiconductor material layer and gap
US7924597B2 (en) * 2007-10-31 2011-04-12 Hewlett-Packard Development Company, L.P. Data storage in circuit elements with changed resistance
JP5430879B2 (ja) * 2008-06-03 2014-03-05 ルネサスエレクトロニクス株式会社 電気ヒューズ、半導体装置、および電気ヒューズの切断方法

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Publication number Priority date Publication date Assignee Title
US7064409B2 (en) 2003-11-04 2006-06-20 International Business Machines Corporation Structure and programming of laser fuse
US7981732B2 (en) * 2003-11-04 2011-07-19 International Business Machines Corporation Programming of laser fuse
US20080194064A1 (en) * 2003-11-04 2008-08-14 Badami Dinesh A Programming of laser fuse
US7384824B2 (en) 2003-11-04 2008-06-10 International Business Machines Corporation Structure and programming of laser fuse
US20050093091A1 (en) * 2003-11-04 2005-05-05 International Business Machines Corporation Structure and programming of laser fuse
US20060145291A1 (en) * 2003-11-04 2006-07-06 International Business Machines Corporation Structure and programming of laser fuse
US7106164B2 (en) 2003-12-03 2006-09-12 International Business Machines Corporation Apparatus and method for electronic fuse with improved ESD tolerance
US7334320B2 (en) 2003-12-03 2008-02-26 International Business Machines Corporation Method of making an electronic fuse with improved ESD tolerance
US20050127475A1 (en) * 2003-12-03 2005-06-16 International Business Machines Corporation Apparatus and method for electronic fuse with improved esd tolerance
US20050122204A1 (en) * 2003-12-03 2005-06-09 International Business Machines Corporation Apparatus and method for electronic fuse with improved esd tolerance
US20080254609A1 (en) * 2003-12-03 2008-10-16 International Business Machines Corporation Apparatus and method for electronic fuse with improved esd tolerance
US7943437B2 (en) 2003-12-03 2011-05-17 International Business Machines Corporation Apparatus and method for electronic fuse with improved ESD tolerance
US20050121741A1 (en) * 2003-12-03 2005-06-09 Voldman Steven H. Apparatus and method for electronic fuse with improved ESD tolerance
US6946718B2 (en) 2004-01-05 2005-09-20 Hewlett-Packard Development Company, L.P. Integrated fuse for multilayered structure
US20050145982A1 (en) * 2004-01-05 2005-07-07 Victorio Chavarria Integrated fuse for multilayered structure
US20070111403A1 (en) * 2005-11-15 2007-05-17 Chun Jiang Polycide fuse with reduced programming time
US20090051002A1 (en) * 2007-08-22 2009-02-26 International Business Machines Corporation Electrical fuse having a thin fuselink
US7759766B2 (en) 2007-08-22 2010-07-20 International Business Machines Corporation Electrical fuse having a thin fuselink

Also Published As

Publication number Publication date
EP1412981A1 (fr) 2004-04-28
CN1547773A (zh) 2004-11-17
WO2003015168A1 (fr) 2003-02-20
TW561604B (en) 2003-11-11
US7029955B2 (en) 2006-04-18
US20040056325A1 (en) 2004-03-25

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