US20020131917A1 - Non-thermal plasma apparatus utilizing dielectrically-coated electrodes for treating effluent gas - Google Patents
Non-thermal plasma apparatus utilizing dielectrically-coated electrodes for treating effluent gas Download PDFInfo
- Publication number
- US20020131917A1 US20020131917A1 US09/987,769 US98776901A US2002131917A1 US 20020131917 A1 US20020131917 A1 US 20020131917A1 US 98776901 A US98776901 A US 98776901A US 2002131917 A1 US2002131917 A1 US 2002131917A1
- Authority
- US
- United States
- Prior art keywords
- electrodes
- accordance
- plasma reactor
- gas
- fluoropolymeric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000007789 gas Substances 0.000 claims abstract description 89
- 238000006243 chemical reaction Methods 0.000 claims abstract description 37
- JCXJVPUVTGWSNB-UHFFFAOYSA-N Nitrogen dioxide Chemical class O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 claims abstract description 14
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims abstract description 14
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 7
- 125000006850 spacer group Chemical group 0.000 claims abstract description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 81
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical group O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims description 49
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 claims description 13
- 239000000126 substance Substances 0.000 claims description 10
- 230000005684 electric field Effects 0.000 claims description 6
- 230000001737 promoting effect Effects 0.000 claims description 3
- 238000007373 indentation Methods 0.000 claims description 2
- 239000003989 dielectric material Substances 0.000 abstract description 11
- 238000003487 electrochemical reaction Methods 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 6
- 239000012212 insulator Substances 0.000 abstract description 3
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 3
- 229910002089 NOx Inorganic materials 0.000 description 16
- 229920006362 Teflon® Polymers 0.000 description 12
- 239000011521 glass Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 239000005297 pyrex Substances 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 4
- 239000000470 constituent Substances 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 239000003595 mist Substances 0.000 description 4
- 229910017604 nitric acid Inorganic materials 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000009467 reduction Effects 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 229920002313 fluoropolymer Polymers 0.000 description 3
- 239000004811 fluoropolymer Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 241000206761 Bacillariophyta Species 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- QGQFOJGMPGJJGG-UHFFFAOYSA-K [B+3].[O-]N=O.[O-]N=O.[O-]N=O Chemical compound [B+3].[O-]N=O.[O-]N=O.[O-]N=O QGQFOJGMPGJJGG-UHFFFAOYSA-K 0.000 description 2
- NHWNVPNZGGXQQV-UHFFFAOYSA-J [Si+4].[O-]N=O.[O-]N=O.[O-]N=O.[O-]N=O Chemical compound [Si+4].[O-]N=O.[O-]N=O.[O-]N=O.[O-]N=O NHWNVPNZGGXQQV-UHFFFAOYSA-J 0.000 description 2
- IKHGUXGNUITLKF-XPULMUKRSA-N acetaldehyde Chemical compound [14CH]([14CH3])=O IKHGUXGNUITLKF-XPULMUKRSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- QLJCFNUYUJEXET-UHFFFAOYSA-K aluminum;trinitrite Chemical compound [Al+3].[O-]N=O.[O-]N=O.[O-]N=O QLJCFNUYUJEXET-UHFFFAOYSA-K 0.000 description 2
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Chemical compound O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 239000003574 free electron Substances 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 231100001261 hazardous Toxicity 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 231100001231 less toxic Toxicity 0.000 description 2
- 229910052863 mullite Inorganic materials 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000009877 rendering Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229920005372 Plexiglas® Polymers 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000003916 acid precipitation Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003610 charcoal Substances 0.000 description 1
- 238000001311 chemical methods and process Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- -1 compounds peroxy acetyl nitrate Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000002803 fossil fuel Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 239000011491 glass wool Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- VGQXTTSVLMQFHM-UHFFFAOYSA-N peroxyacetyl nitrate Chemical compound CC(=O)OO[N+]([O-])=O VGQXTTSVLMQFHM-UHFFFAOYSA-N 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
- F01N3/08—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for rendering innocuous
- F01N3/0892—Electric or magnetic treatment, e.g. dissociation of noxious components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/40—Nitrogen compounds
- B01D2257/404—Nitrogen oxides other than dinitrogen oxide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
- B01D2259/818—Employing electrical discharges or the generation of a plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
- B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
- B01J2219/0809—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes employing two or more electrodes
- B01J2219/0813—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes employing two or more electrodes employing four electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
- B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
- B01J2219/0824—Details relating to the shape of the electrodes
- B01J2219/0835—Details relating to the shape of the electrodes substantially flat
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0873—Materials to be treated
- B01J2219/0875—Gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0894—Processes carried out in the presence of a plasma
- B01J2219/0896—Cold plasma
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N2570/00—Exhaust treating apparatus eliminating, absorbing or adsorbing specific elements or compounds
- F01N2570/14—Nitrogen oxides
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2418—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the electrodes being embedded in the dielectric
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2245/00—Applications of plasma devices
- H05H2245/10—Treatment of gases
- H05H2245/17—Exhaust gases
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
Definitions
- This invention relates to an improved apparatus for treatment of hazardous gases, in particular, an improved non-thermal plasma apparatus for the removal of NO x from gas streams resulting from various chemical processes and by the combustion of carbonaceous fuels.
- NO x are primary contributors to photochemical smog and acid rain, and may deplete the ozone layer. Up to millions of tons of nitrogen oxides, generally denoted herein as “NO x ,” are emitted into the atmosphere each year as a result of numerous industrial and military processes, ranging from high temperature combustion of fossil fuels, to explosive manufacturing and munitions disposal processing and further to operations of powered aerospace ground equipment.
- Electron beam irradiation has also been used in various forms to convert to the individual elemental diatoms. Such systems also use electron beams or ultraviolet light to oxidize the NO x . The ionization caused by the electron beam irradiation converts the NO x to acid mist at low temperatures and/or solid particles at high temperatures which may be removed by conventional methods employing filters and scrubbers. However, due to potential harm to operation personnel, costly and elaborate shielding measures must be employed.
- NTPDs non-thermal plasma devices
- These devices employ electrodes and dielectrics driven by a voltage supply for generating an electric field driving electrochemical reactions converting NO x to other atomic and molecular forms, either chemically less toxic, and/or structurally more readily removed from the gas stream.
- Numerous materials have been used to construct such dielectrics, including quartz, glass, alumina, mullite, and oxide free ceramic such as silicon nitrite, boron nitrite, aluminum nitrite.
- the dielectrics isolating the electrodes from the gas and enabling the non-thermal plasma environment which drives various electro-chemical reactions are typically constructed of glass. While glass has the required thermal and electrical properties, it fractures easily and may not be well suited for any mobile applications of non-thermal plasma devices. In addition, an appreciable thickness of glass is typically used to standoff the voltages applied, which limits the flow rate or throughput of the devices. As for the other conventional dielectric materials, many have suitable dielectric strength and many have suitable working temperatures; however, none combine both of these factors in providing a desirable dielectric for use in an efficient effluent gas treating non-thermal plasma apparatus.
- a non-thermal plasma apparatus having a plasma reactor and an inlet and outlet connected thereto through which the exhaust gas enters and leaves the plasma reactor.
- a scrubber may be provided to scrub the exhaust gas leaving the plasma reactor and a stack may be connected to the scrubber to permit the exhaust gas to exit the apparatus.
- the plasma reactor is equipped with a plurality of dielectrically-coated electrodes between which a selected voltage is applied to generate a non-thermal plasma environment for driving selected electrochemical reactions.
- a voltage supply is electrically configured to apply a predefined voltage across the electrodes to create microdischarges in the exhaust gas stream.
- electro-chemical reactions involve the conversion of nitric oxides to various diatomic and molecular forms, including primarily nitrogen dioxide
- the efficiency in terms of energy per molecule of remediated NO x
- total reduction in terms of percentage of hazardous compounds reduced per treatment pass
- the non-thermal plasma apparatus utilizes the dielectrically-coated electrodes of the plasma reactor to drive the desired conversions.
- the electrodes are constructed of metal plates that are coated with a fluoropolymeric material, such as fluorocarbon.
- a fluoropolymeric material such as fluorocarbon.
- a selected thickness of fluorocarbon coating is applied to the planar surfaces of the plate, forming “double-dielectric” electrodes.
- a plurality of such double-dielectric electrodes are used in the plasma reactor, arranged in parallel formation and alternating between positive and negative charges.
- Fluoropolymeric (e.g., fluorocarbon) spacers are positioned between adjacent double-dielectric electrodes and may be configured with selected thicknesses to provide a plurality of desired reaction zones or gaps therebetween. With a plurality of gaps, the total non-thermal plasma environment is expanded to increase the overall flow rate of the exhaust gas or throughput of the apparatus.
- fluoropolymeric spacers are positioned between adjacent double-dielectric electrodes and may be configured with selected thicknesses to provide a plurality of desired reaction zones or gaps therebetween. With a plurality of gaps, the total non-thermal plasma environment is expanded to increase the overall flow rate of the exhaust gas or throughput of the apparatus.
- a plurality of double-dielectric electrodes may be supported on a specially configured fluoropolymeric (e.g., fluorocarbon) insulators adapted for placement inside the plasma reactor.
- the insulators may be configured with grooves or indentations which support the double-dielectric electrodes at their edge portions, in parallel formation, alternating between positive and negative charges.
- the grooves may be configured to be spaced apart at selected distances such that adjacent double-dielectric electrodes may provide a plurality of desired reaction zones or gaps. Again, with a plurality of gaps, the total non-thermal plasma environment is expanded to increase the overall flow rate of the exhaust gas or throughput of the apparatus.
- the non-thermal plasma apparatus of the instant invention may provide for the pretreatment of the exhaust gas with ethanol, either by vapor absorption or direct vapor injection.
- ethanol before the exhaust gas is exposed to plasma reactor, at least a portion of the exhaust gas is exposed to ethanol before entering the plasma reactor.
- One method involves diverting at least a portion or the exhaust gas through an ethanol bath before the exhaust gas enters the plasma reactor.
- Another method involves directly injecting ethanol directly into the path of the exhaust gas before it enters the plasma reactor.
- the high vapor pressure of ethanol permits a significant portion of the ethanol to be absorbed by the exhaust gas.
- the ethanol-bearing exhaust gas is pretreated in preparation for the plasma reactor.
- the plasma reactor exposes to the pretreated exhaust gas to reactive species generated by the plasma reactor, e.g., oxygen atoms, whereupon nitric oxides are converted to a variety of products, including primarily nitrogen dioxide, with significantly improved efficiency.
- reactive species generated by the plasma reactor e.g., oxygen atoms
- the solubility of ethanol permits the ethanol to be readily scrubbed from the exhaust gas downstream of the plasma reactor, along with the converted nitrogen dioxide.
- the non-thermal plasma apparatus comprises an inlet and an outlet connected to the reaction chamber, permitting the exhaust gas to enter and leave the reaction chamber.
- the inlet is further connected to a diverter equipped with an injector, which diverts a portion of the gas stream through an ethanol bath before reinjecting the ethanol-bearing gas stream into the inlet. Ethanol is readily absorbed by the gas stream as it passes through the ethanol bath.
- the inlet is equipped with an injector which receives a supply of ethanol that is sprayed as a fine mist directly into the gas stream.
- the fine mist of ethanol is substantially uniformly absorbed by the gas stream before it enters the reactor chamber.
- a reservoir stores the ethanol which is delivered to the injector by a metered pump.
- the non-thermal plasma treatment may be used for a variety of gas streams.
- a typical gas stream contains approximately nitrogen, oxygen, water vapor and nitric oxide.
- the primary function of the treatment is to convert the nitric oxide into nitrogen dioxide.
- FIG. 1 is a perspective view of an embodiment of a non-thermal plasma apparatus
- FIG. 1B is a partial perspective view of an embodiment of a dielectrically-coated (double-dielectric) electrode
- FIG. 2 is a perspective view of another embodiment of a non-thermal plasma apparatus
- FIGS. 3A and 3B are a side elevational view and an end elevational view of an embodiment of a non-thermal plasma reactor utilizing double-dielectric electrodes;
- FIGS. 4A and 4B are a side, partially exploded, elevational view and an end elevational view of another embodiment of a non-thermal plasma reactor utilizing double-dielectric electrodes.
- FIG. 5 is a graph of NO concentration as function of power of a non-thermal plasma apparatus.
- a non-thermal plasma apparatus 10 for treating effluent or exhaust gas 11 containing nitric oxides (“NO x ”) is illustrated.
- the apparatus includes a plasma reactor 12 having a plasma chamber or reaction chamber 14 , connected to a voltage supply 16 .
- An inlet 18 (shown partially broken away) and an outlet 20 are connected to opposing ends of the chamber 14 , allowing the gas 11 to enter and exit the chamber 14 .
- a scrubber 22 is provided below or downstream from the plasma reactor 12 , for the removal of soluble constituents from the gas 11 .
- the scrubber 22 may ultimately lead to a stack 24 to release the exhaust gas 11 from the apparatus 10 .
- nitric oxide (NO) may be converted into nitrogen dioxide (NO 2 ).
- NO 2 nitrogen dioxide
- the nitric oxide (NO) may be converted to primarily to nitrogen dioxide (NO2) and some nitric acid (HNO3).
- small amounts of the compounds peroxy acetyl nitrate, acetaldehyde, and n-propyl nitrate may also be produced.
- the desired conversions are driven by electro-chemical reactions facilitated by the plasma reactor 12 of the apparatus 10 .
- These reactions are non-thermal or “cool” reactions in that the dispersed electron charge or electric field (i.e., a “corona”) generated by the plasma reactor energizes primarily the electrons, substantially leaving the constituents of the gas relatively unenergized or “unheated.”
- the energized electrons enhance the electron density of the gas as it travels through the plasma reactor 12 , promoting electron-molecule collision, as opposed to molecule-molecule collision.
- charge dispersion and electron concentration drive the desired conversion of nitric oxides to other atomic and molecular forms, either chemically less toxic, and/or structurally better suited for removable or separation from the gas stream 11 .
- the plasma reactor 12 includes at least a pair of dielectrically-coated electrodes 26 a and 26 b and defining a non-thermal plasma environment or reaction zone 28 therebetween.
- the electrode has a planar configuration and includes a metal electrode plate 30 covered with a coating 32 of a fluoropolymeric substance, for example, fluorocarbon.
- the coating 32 isolates the electrode plate 30 from the exhaust gas 11 and its nonconductive nature enables it to standoff a defined level of voltage that is applied to the electrode plate.
- the voltage is applied by the voltage 16 supply via a wire 34 that is attached to the plate 30 and extends through the coating 32 .
- fluoropolymers may be readily applied to the surface of the electrode plate 30 to constitute the coating 32 .
- the thickness of the coating 32 may vary depending on the level of contamination of the gas and the flow rate.
- Fluorocarbon tapes commercially available under the names of Teflon®, Teflon® PFA, and Dykor® may be applied directly to the electrode plates.
- Teflon® PFA—coated plate electrodes are available from Toefco Engineering, Inc., Niles, Mich.
- the apparatus 10 utilizing the coated electrodes 26 a and 26 b has improved overall durability, when compared to conventional non-thermal plasma devices.
- the relatively high tensile strength of fluoropolymers, in particular, fluorocarbon renders the coated electrodes more ductile and therefore offers greater protection against breakage.
- the apparatus 10 offers improved durability with relatively little change in electrical and thermal performance.
- the plasma reactor 12 may utilize more than the coated electrodes 26 a and 26 b.
- the reaction chamber 14 may house a plurality of coated electrodes 26 i which are arranged in parallel formation, alternating between positively-charged and negatively-charged electrodes.
- the number of electrodes also varies depending on the level of contamination in the gas and the flow rate of the gas.
- the electrodes 26 i are each coated on both surfaces of the underlying plate 30 i. Accordingly, the plates of adjacent alternating high and low electrodes remain coated and isolated from the gas. These electrodes may be referred to as “double-dielectric” electrodes.
- the voltage supply 16 may supply voltage to all the electrodes, such that the reaction zone 28 of the apparatus is expanded to include all gaps 36 in between each adjacent pairs of high and low electrodes 26 i. Such a voltage supply is available from Elgar Corporation, San Diego, Calif., under part #1001SL-11.
- the exhaust gas 11 may be forced or drawn through the apparatus 10 by an induction fan (now shown), including through the inlet 18 , the plasma chamber 14 , the outlet 18 , the scrubber 22 and the stack 24 , as understood by those of ordinary skill in the art.
- the exhaust gas 11 enters the apparatus 10 through the inlet 18 which terminates at the plasma reactor 12 .
- the gas 11 is exposed to the electric field between the electrodes 26 i of the reactor 12 as generated by the selected voltage applied by the voltage supply 16 .
- the strength of the electric field is above the critical field strength of the exhaust gas 11 , but not so high as to establish a condition conducive to sustain arcing between the electrodes 26 i.
- the selected voltage creates a multitude of short-lived current filaments or breakdown channels (commonly called microdischarges) within the gas inside the reaction zone 28 .
- the flow of electrons at high velocity and in high density increase the likelihood of an NO x reduction producing collision.
- the reactive species e.g., oxygen atoms
- the apparatus 10 provides an attractive technique for selectively driving specific chemical reactions. In this regard, the apparatus 10 has applications beyond the specific chemical reaction discussed herein.
- FIGS. 3A and 3B a planar, variable gap, non-thermal plasma reactor 40 for use with the apparatus 10 is illustrated.
- two to five double-dielectric electrodes 42 i are provided in the reactor's chamber 44 and arranged in parallel formation such that the gas 11 is directed through gaps 46 between the electrodes 42 i.
- the chamber 44 in FIGS. 3A and 3B is constructed of aluminum with penetrations for the inlet 48 and the outlet 50 and high and low voltage terminals 52 .
- Such inlet/outlet coupling and connection devices are commercially available from The Swagelok Companies, Solon, Ohio.
- the interior of the chamber is overlaid with Kapton® high voltage tape and the upper portion is sealed with a rubber gasket 54 and a Plexiglas cover 56 .
- the electrodes 42 i may range between approximately 6′′ to 8′′ wide by approximately 22′′ to 24′′ long, by approximately 0.09′′ to 1.25′′ thick.
- the electrodes 42 i are configured to alternate between positive (high) or negative (low) charges and are separated by fluorocarbon spacers 58 to provide the desired gaps 46 .
- the thickness of the fluoropolymer-based coating 32 on the electrodes, as well as the thickness of the spacers 58 , may be varied to vary the width of the gaps 46 .
- a suitable gap width may range between approximately 0.5 to 3.0 mm, rendering the total active volume of the reaction zone of the plasma reactor 40 to range between 50.0 to 1,500 ml.
- the flow rate of the apparatus may vary up to approximately 400 cubic feet per minute.
- the residence time of the mixed gas in the reaction chamber 44 may range between 0.1 to 60.0 seconds, for example, approximately 0.3 seconds.
- FIGS. 4A and 4B Another plasma reactor 64 that may be used with the apparatus 10 is illustrated in FIGS. 4A and 4B.
- a reactor chamber 66 of the reactor 64 is again constructed of aluminum and defines an interior region measuring approximately 8′′ by 8′′.
- the chamber 66 is approximately 31′′ in length and is fitted with an inlet 68 and an outlet 70 .
- Silicone rubber gaskets 72 and end caps 74 are provided.
- a glass window (not shown) may be fitted in the end caps included to permit viewing of the interior of the chamber.
- Ceramic and copper high voltage terminals 76 are also provided.
- Insulating the interior of the reactor chamber 66 is a fluorocarbon member 78 configured with grooves 82 of selected dimensions to receive and support edge portions of double-dielectric electrodes 80 in a desired arrangement.
- Different insulating members may be used with the reactor 64 , configured with different separation distances between the grooves 82 . Accordingly, different desired gap dimensions may be attained.
- the electrodes 80 can readily slide in and out of the chamber 66 .
- the electrodes 80 are arranged in alternating high and low configuration and connected to the high voltage terminals 76 at opposite ends of the chamber 66 .
- the plasma reactor of the apparatus 10 is non-thermal in that there is a cool discharge promoting the free flow of electrons. Significantly, only the electrons gain appreciable energy in the reaction zone(s) or gap(s) and hence increased temperature is experienced primarily by the electrons, leaving the remaining constituents of the gas stream substantially unheated. The energy is generally evenly distributed over the non-thermal plasma environment; any hot discharge is typically a localized point to point arc.
- Table 1 shows selected properties of one type of fluorocarbon (i.e., PFA Teflon ®) compared to Pyrex ® glass. Dielectric Tensile Working Dielectric Strength Strength Temp. Material Constant (kV/mm) (kpsi) (C.) PFA 2.1 60 2.20 260 Teflon ® Pyrex ® 4.5 13 0.14 450 glass
- PFA Teflon® While the dielectric constant of PFA Teflon® is comparable to that of Pyrex® glass, the dielectric strength is much higher. In view of this observation, the thickness of a PFA Teflon® coating can be less than that used for Pyrex®, leaving more volume for the gas stream. The desirable working is temperature of PFA Teflon® is lower than that for Pyrex®, however, it remains sufficient for treating most types of contaminated gas. As previously noted, the PFA Teflon® provides relatively high tensile strength, rendering the electrodes ductile and less susceptible to breakage, thus improving the efficiency and durability of the apparatus.
- an ethanol bath 84 is provided to improve the efficiency of the conversion process.
- a diverter 86 is connected to the inlet 18 , having a first section 86 a extending from the inlet 18 to the ethanol bath 84 and a second section 86 b extending from the ethanol bath 84 to the inlet 18 .
- an injector 88 is provided above or upstream from the plasma reactor 12 .
- the apparatus 10 diverts a portion of the exhaust gas 11 through the diverter 86 to pass through the ethanol bath 84 .
- the ethanol Due to the high vapor pressure of ethanol (C 2 H 5 OH), the ethanol is vaporized along with and mixed into the gas stream. As the ethanol-bearing gas reaches the injector 88 , it is injected into the inlet 18 to mix with the gas in the inlet.
- FIG. 2 an alternative embodiment of the non-thermal plasma apparatus 10 is illustrated.
- the injector 88 remains upstream from the plasma reactor 12 , but is fed directly with ethanol stored in a reservoir 90 and delivered via a metered pump 92 .
- the ethanol is injected into the gas in the inlet as a fine mist that evaporates substantially uniformly into the gas stream 11 .
- a small varistaltic pump available from Manostat Corporation, Barrington, Ill., under Model #72-305-000, may be used.
- a non-thermal plasma environment is prepared in the reaction chamber 14 .
- the non-thermal plasma environment of the reaction zone 28 contains generated reactive agents, in particular, energetic electrons, to drive selected electrical and/or chemical reactions in the gas, which are discussed in detail further below.
- ethanol as a pre-injectant increases the efficiency of the non-thermal plasma apparatus by as much as a factor of ten.
- the combined use of ethanol injection and fluorocarbon dielectrics further increases efficiency.
- the NO concentrations in gas streams containing molar ratios of ethanol to initial NO of 8:1 are compared for Pyrex® glass and Teflon® PFA dielectrics.
- Teflon® PFA dielectrics substantially 90% NO removal was obtained with only 48 Watts of plasma reactor power.
- the calculated molecular energy consumption for this data point was approximately 17 eV per NO representing a 30% decrease in energy consumption as compared to the stream treated with Pyrex® glass dielectrics.
- the ethanol offering a high vapor pressure and solubility in water offers ease in application. Its characteristic high vapor pressure renders it to be readily injected into the gas stream in either vapor or liquid form. Its high solubility in water also ensures that it may be readily scrubbed from the system along with the converted nitrogen dioxide (NO 2 ) from the exiting gas stream.
- NO 2 converted nitrogen dioxide
- the apparatus is pack-free, that is, free of any additional dielectric material, such as glass wool packing. Accordingly, the gas stream flows through the reaction zone(s) or gap(s) substantially unimpeded.
- the system of the present invention may be readily incorporated in various embodiments to provide a non-thermal plasma treatment of effluent or exhaust gas.
- the voltage applied, the frequency of the voltage applied, the gas stream flow rate, temperature and residence time in the reactor chamber may affect power consumption and therefore efficiency of the apparatus.
- the configurations and dimensions of various components, such as the plasma chamber, the electrodes, the spacers and the insulation may affect the efficiency and throughput of the apparatus.
- the electrodes may be variously configured as two dimensional or three dimensional conductive elements. They may be rectilinear or tubular, or combinations thereof. Any one or combinations of these parameters may be tailored to generate specific reactive species and/or to target specific constituents in the exhaust gas for conversion. In that regard, various alternative techniques and configures may be employed departing from those disclosed and suggested herein.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Health & Medical Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Treating Waste Gases (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
An improved non-thermal plasma apparatus for treating NOx bearing gas streams has a plasma reactor and an inlet and outlet. The plasma reactor is equipped with a plurality of dielectrically-coated electrodes between which a selected voltage is applied to generate a non-thermal plasma environment for driving selected electro-chemical reactions. A predefined voltage is applied across the electrodes to create microdischarges in the exhaust gas stream to convert nitric oxides into primarily nitrogen dioxides. The electrodes are constructed of metal plates, and a fluoropolymeric material, such as fluorocarbon, as the dielectrics. The electrodes are arranged in parallel formation and alternating between positive and negative charges. In one embodiment, fluoropolymeric spacers are positioned between adjacent electrodes and may be configured with selected thicknesses to provide a plurality of desired reaction zones or gaps therebetween. In another embodiment, the electrodes are supported on a specially configured fluoropolymeric (e.g., fluorocarbon) insulators adapted for placement inside the plasma reactor to provide a plurality of gaps. With a plurality of gaps, the total non-thermal plasma environment is expanded to increase the overall flow rate of the exhaust gas or throughput of the apparatus.
Description
- [0001] The United States Government may have rights in this invention pursuant to the Cooperative Research And Development Agreement (“CRDA”) between Science Applications International Corporation and the Air Force Wright Laboratory Armament Directorate.
- This invention relates to an improved apparatus for treatment of hazardous gases, in particular, an improved non-thermal plasma apparatus for the removal of NOx from gas streams resulting from various chemical processes and by the combustion of carbonaceous fuels.
- The current global concern for the environment has generated a strong need by both government and industry for technologies that reduce emissions of NOx. NOx are primary contributors to photochemical smog and acid rain, and may deplete the ozone layer. Up to millions of tons of nitrogen oxides, generally denoted herein as “NOx,” are emitted into the atmosphere each year as a result of numerous industrial and military processes, ranging from high temperature combustion of fossil fuels, to explosive manufacturing and munitions disposal processing and further to operations of powered aerospace ground equipment.
- The impact of such emissions on human health and the environment in general has been the subject of intense study and public debate and legislative action to mandate safer emissions has already been enacted. For example, the Clean Air Act Amendment of 1990 mandates that emission generating industrial plants develop and/or implement techniques to significantly reduce their emissions of NOx. Such legislation affects power plants, iron and steel plants, pulp and paper mills, acid production plants, petroleum refineries, lime plants, fuel conversion plants, glass fiber processing plants, charcoal production plants, cement plants, copper smelters, coal cleaning plants, etc.
- Developmental efforts have been directed to converting NOx to the individual elemental diatoms, N2 and O2. Conventional processes typically utilized thermal techniques for generating very high temperature conditions within a reactor. These techniques are highly inefficient as excessively high electrical power is needed not only to treat relatively low pollutant concentrations, but to cool the resultant effluent emerging from the reactor.
- Electron beam irradiation has also been used in various forms to convert to the individual elemental diatoms. Such systems also use electron beams or ultraviolet light to oxidize the NOx. The ionization caused by the electron beam irradiation converts the NOx to acid mist at low temperatures and/or solid particles at high temperatures which may be removed by conventional methods employing filters and scrubbers. However, due to potential harm to operation personnel, costly and elaborate shielding measures must be employed.
- Numerous research agencies have investigated the use of non-thermal plasma devices (“NTPDs”) to reduce NOx in gas streams. These devices employ electrodes and dielectrics driven by a voltage supply for generating an electric field driving electrochemical reactions converting NOx to other atomic and molecular forms, either chemically less toxic, and/or structurally more readily removed from the gas stream. Numerous materials have been used to construct such dielectrics, including quartz, glass, alumina, mullite, and oxide free ceramic such as silicon nitrite, boron nitrite, aluminum nitrite.
- Of the conventional non-thermal plasma devices, the dielectrics isolating the electrodes from the gas and enabling the non-thermal plasma environment which drives various electro-chemical reactions are typically constructed of glass. While glass has the required thermal and electrical properties, it fractures easily and may not be well suited for any mobile applications of non-thermal plasma devices. In addition, an appreciable thickness of glass is typically used to standoff the voltages applied, which limits the flow rate or throughput of the devices. As for the other conventional dielectric materials, many have suitable dielectric strength and many have suitable working temperatures; however, none combine both of these factors in providing a desirable dielectric for use in an efficient effluent gas treating non-thermal plasma apparatus.
- Accordingly, there exists a demand for an improved non-thermal plasma apparatus for treating NOx bearing gas streams, with significantly improved efficiency and durability. It is also desired that such an apparatus has significantly increased applicability and ease of application. In accordance with the present invention, a non-thermal plasma apparatus is provided, having a plasma reactor and an inlet and outlet connected thereto through which the exhaust gas enters and leaves the plasma reactor. A scrubber may be provided to scrub the exhaust gas leaving the plasma reactor and a stack may be connected to the scrubber to permit the exhaust gas to exit the apparatus. The plasma reactor is equipped with a plurality of dielectrically-coated electrodes between which a selected voltage is applied to generate a non-thermal plasma environment for driving selected electrochemical reactions. A voltage supply is electrically configured to apply a predefined voltage across the electrodes to create microdischarges in the exhaust gas stream. Where such electro-chemical reactions involve the conversion of nitric oxides to various diatomic and molecular forms, including primarily nitrogen dioxide, the efficiency (in terms of energy per molecule of remediated NOx) and total reduction (in terms of percentage of hazardous compounds reduced per treatment pass) may be increased by approximately 30% when compared with conventional non-thermal plasma devices.
- Operating with improved efficiency and durability, the non-thermal plasma apparatus utilizes the dielectrically-coated electrodes of the plasma reactor to drive the desired conversions. In that regard, the electrodes are constructed of metal plates that are coated with a fluoropolymeric material, such as fluorocarbon. Depending on the level of contamination in the exhaust gas and the flow rate of the exhaust gas, a selected thickness of fluorocarbon coating is applied to the planar surfaces of the plate, forming “double-dielectric” electrodes. In one embodiment, a plurality of such double-dielectric electrodes are used in the plasma reactor, arranged in parallel formation and alternating between positive and negative charges. Fluoropolymeric (e.g., fluorocarbon) spacers are positioned between adjacent double-dielectric electrodes and may be configured with selected thicknesses to provide a plurality of desired reaction zones or gaps therebetween. With a plurality of gaps, the total non-thermal plasma environment is expanded to increase the overall flow rate of the exhaust gas or throughput of the apparatus.
- In another embodiment, a plurality of double-dielectric electrodes may be supported on a specially configured fluoropolymeric (e.g., fluorocarbon) insulators adapted for placement inside the plasma reactor. In particular, the insulators may be configured with grooves or indentations which support the double-dielectric electrodes at their edge portions, in parallel formation, alternating between positive and negative charges. The grooves may be configured to be spaced apart at selected distances such that adjacent double-dielectric electrodes may provide a plurality of desired reaction zones or gaps. Again, with a plurality of gaps, the total non-thermal plasma environment is expanded to increase the overall flow rate of the exhaust gas or throughput of the apparatus.
- The non-thermal plasma apparatus of the instant invention may provide for the pretreatment of the exhaust gas with ethanol, either by vapor absorption or direct vapor injection. In particular, before the exhaust gas is exposed to plasma reactor, at least a portion of the exhaust gas is exposed to ethanol before entering the plasma reactor. One method involves diverting at least a portion or the exhaust gas through an ethanol bath before the exhaust gas enters the plasma reactor. Another method involves directly injecting ethanol directly into the path of the exhaust gas before it enters the plasma reactor.
- For either method, the high vapor pressure of ethanol permits a significant portion of the ethanol to be absorbed by the exhaust gas. As such, the ethanol-bearing exhaust gas is pretreated in preparation for the plasma reactor. In particular, the plasma reactor exposes to the pretreated exhaust gas to reactive species generated by the plasma reactor, e.g., oxygen atoms, whereupon nitric oxides are converted to a variety of products, including primarily nitrogen dioxide, with significantly improved efficiency. As an added advantage, the solubility of ethanol permits the ethanol to be readily scrubbed from the exhaust gas downstream of the plasma reactor, along with the converted nitrogen dioxide.
- To implement the ethanol pretreatment, the non-thermal plasma apparatus comprises an inlet and an outlet connected to the reaction chamber, permitting the exhaust gas to enter and leave the reaction chamber. In one embodiment, the inlet is further connected to a diverter equipped with an injector, which diverts a portion of the gas stream through an ethanol bath before reinjecting the ethanol-bearing gas stream into the inlet. Ethanol is readily absorbed by the gas stream as it passes through the ethanol bath.
- In another embodiment, the inlet is equipped with an injector which receives a supply of ethanol that is sprayed as a fine mist directly into the gas stream. The fine mist of ethanol is substantially uniformly absorbed by the gas stream before it enters the reactor chamber. A reservoir stores the ethanol which is delivered to the injector by a metered pump.
- The non-thermal plasma treatment may be used for a variety of gas streams. A typical gas stream contains approximately nitrogen, oxygen, water vapor and nitric oxide. The primary function of the treatment is to convert the nitric oxide into nitrogen dioxide.
- These, as well as other features of the invention, will become apparent from the detailed description which follows, considered together with the appended drawings.
- In the drawings, which constitute a part of this specification, exemplary embodiments demonstrating various features of the invention are set forth as follows:
- FIG. 1 is a perspective view of an embodiment of a non-thermal plasma apparatus;
- FIG. 1B is a partial perspective view of an embodiment of a dielectrically-coated (double-dielectric) electrode;
- FIG. 2 is a perspective view of another embodiment of a non-thermal plasma apparatus;
- FIGS. 3A and 3B are a side elevational view and an end elevational view of an embodiment of a non-thermal plasma reactor utilizing double-dielectric electrodes;
- FIGS. 4A and 4B are a side, partially exploded, elevational view and an end elevational view of another embodiment of a non-thermal plasma reactor utilizing double-dielectric electrodes; and
- FIG. 5 is a graph of NO concentration as function of power of a non-thermal plasma apparatus.
- As indicated above, detailed illustrative embodiments are disclosed herein. However, structures for accomplishing the objectives of the present invention may be detailed quite differently from the disclosed embodiments. Consequently, specific structural and functional details disclosed herein are merely representative; yet, in that regard, they are deemed to afford the best embodiment for purposes of disclosure and to provide a basis for the claims herein which define the scope of the present invention.
- Referring to FIG. 1A, a
non-thermal plasma apparatus 10 for treating effluent orexhaust gas 11 containing nitric oxides (“NOx”) is illustrated. The apparatus includes aplasma reactor 12 having a plasma chamber orreaction chamber 14, connected to avoltage supply 16. An inlet 18 (shown partially broken away) and anoutlet 20 are connected to opposing ends of thechamber 14, allowing thegas 11 to enter and exit thechamber 14. Ascrubber 22 is provided below or downstream from theplasma reactor 12, for the removal of soluble constituents from thegas 11. Thescrubber 22 may ultimately lead to astack 24 to release theexhaust gas 11 from theapparatus 10. treatment may contain 82% nitrogen, 15% oxygen, 3% water vapor, and approximately 1000 ppm nitric oxide (NO). A primary function of theapparatus 10 is to convert the nitric oxide (NO) into nitrogen dioxide (NO2). In certain instances, particularly where a preinjectant such as ethanol is used, the nitric oxide (NO) may be converted to primarily to nitrogen dioxide (NO2) and some nitric acid (HNO3). In addition, small amounts of the compounds peroxy acetyl nitrate, acetaldehyde, and n-propyl nitrate may also be produced. - The desired conversions are driven by electro-chemical reactions facilitated by the
plasma reactor 12 of theapparatus 10. These reactions are non-thermal or “cool” reactions in that the dispersed electron charge or electric field (i.e., a “corona”) generated by the plasma reactor energizes primarily the electrons, substantially leaving the constituents of the gas relatively unenergized or “unheated.” As such, the energized electrons enhance the electron density of the gas as it travels through theplasma reactor 12, promoting electron-molecule collision, as opposed to molecule-molecule collision. Such charge dispersion and electron concentration drive the desired conversion of nitric oxides to other atomic and molecular forms, either chemically less toxic, and/or structurally better suited for removable or separation from thegas stream 11. - In accordance with a feature of the present invention, the
plasma reactor 12 includes at least a pair of dielectrically-coatedelectrodes 26 a and 26 b and defining a non-thermal plasma environment orreaction zone 28 therebetween. As shown in FIG. 1B, the electrode has a planar configuration and includes ametal electrode plate 30 covered with acoating 32 of a fluoropolymeric substance, for example, fluorocarbon. Thecoating 32 isolates theelectrode plate 30 from theexhaust gas 11 and its nonconductive nature enables it to standoff a defined level of voltage that is applied to the electrode plate. The voltage is applied by thevoltage 16 supply via awire 34 that is attached to theplate 30 and extends through thecoating 32. In contrast to conventional materials from which dielectrics may be made (e.g., such as quartz, glass, alumina, mullite, and oxide free ceramic such as silicon nitrite, boron nitrite, aluminum nitrite), fluoropolymers, and especially fluorocarbons, may be readily applied to the surface of theelectrode plate 30 to constitute thecoating 32. The thickness of thecoating 32 may vary depending on the level of contamination of the gas and the flow rate. Fluorocarbon tapes, commercially available under the names of Teflon®, Teflon® PFA, and Dykor® may be applied directly to the electrode plates. Moreover, Teflon® PFA—coated plate electrodes are available from Toefco Engineering, Inc., Niles, Mich. - The
apparatus 10 utilizing thecoated electrodes 26 a and 26 b has improved overall durability, when compared to conventional non-thermal plasma devices. The relatively high tensile strength of fluoropolymers, in particular, fluorocarbon, renders the coated electrodes more ductile and therefore offers greater protection against breakage. Significantly, theapparatus 10 offers improved durability with relatively little change in electrical and thermal performance. - The
plasma reactor 12 may utilize more than thecoated electrodes 26 a and 26 b. In particular, as illustrated in FIG. 1, thereaction chamber 14 may house a plurality of coated electrodes 26 i which are arranged in parallel formation, alternating between positively-charged and negatively-charged electrodes. The number of electrodes also varies depending on the level of contamination in the gas and the flow rate of the gas. - It can be seen that the electrodes26 i are each coated on both surfaces of the underlying plate 30 i. Accordingly, the plates of adjacent alternating high and low electrodes remain coated and isolated from the gas. These electrodes may be referred to as “double-dielectric” electrodes. The
voltage supply 16 may supply voltage to all the electrodes, such that thereaction zone 28 of the apparatus is expanded to include allgaps 36 in between each adjacent pairs of high and low electrodes 26 i. Such a voltage supply is available from Elgar Corporation, San Diego, Calif., under part #1001SL-11. - In operation, the
exhaust gas 11 may be forced or drawn through theapparatus 10 by an induction fan (now shown), including through theinlet 18, theplasma chamber 14, theoutlet 18, thescrubber 22 and thestack 24, as understood by those of ordinary skill in the art. Theexhaust gas 11 enters theapparatus 10 through theinlet 18 which terminates at theplasma reactor 12. Once inside theplasma chamber 14 of theplasma reactor 12, thegas 11 is exposed to the electric field between the electrodes 26 i of thereactor 12 as generated by the selected voltage applied by thevoltage supply 16. The strength of the electric field is above the critical field strength of theexhaust gas 11, but not so high as to establish a condition conducive to sustain arcing between the electrodes 26 i. In particular, the selected voltage creates a multitude of short-lived current filaments or breakdown channels (commonly called microdischarges) within the gas inside thereaction zone 28. - Regardless of the configuration of the electrodes, the flow of electrons at high velocity and in high density increase the likelihood of an NOx reduction producing collision. Specifically, after a discharge extinguishes, the reactive species, e.g., oxygen atoms, diffuse out of the channels into the rest of the gas stream in the reaction zone 28 (i.e., in between each of the gaps 36) where they drive the desired conversions. Because the energy of the discharge is used to directly accelerate the electrons, rather than heating the
gas 11, theapparatus 10 provides an attractive technique for selectively driving specific chemical reactions. In this regard, theapparatus 10 has applications beyond the specific chemical reaction discussed herein. - Referring to FIGS. 3A and 3B, a planar, variable gap,
non-thermal plasma reactor 40 for use with theapparatus 10 is illustrated. In particular, two to five double-dielectric electrodes 42 i are provided in the reactor'schamber 44 and arranged in parallel formation such that thegas 11 is directed throughgaps 46 between the electrodes 42 i. - The
chamber 44 in FIGS. 3A and 3B is constructed of aluminum with penetrations for theinlet 48 and theoutlet 50 and high andlow voltage terminals 52. Such inlet/outlet coupling and connection devices are commercially available from The Swagelok Companies, Solon, Ohio. The interior of the chamber is overlaid with Kapton® high voltage tape and the upper portion is sealed with arubber gasket 54 and aPlexiglas cover 56. The electrodes 42 i may range between approximately 6″ to 8″ wide by approximately 22″ to 24″ long, by approximately 0.09″ to 1.25″ thick. The electrodes 42 i are configured to alternate between positive (high) or negative (low) charges and are separated byfluorocarbon spacers 58 to provide the desiredgaps 46. The thickness of the fluoropolymer-basedcoating 32 on the electrodes, as well as the thickness of thespacers 58, may be varied to vary the width of thegaps 46. A suitable gap width may range between approximately 0.5 to 3.0 mm, rendering the total active volume of the reaction zone of theplasma reactor 40 to range between 50.0 to 1,500 ml. - Depending on the capacity of the
reactor 40, the flow rate of the apparatus may vary up to approximately 400 cubic feet per minute. As such, the residence time of the mixed gas in thereaction chamber 44 may range between 0.1 to 60.0 seconds, for example, approximately 0.3 seconds. - Another
plasma reactor 64 that may be used with theapparatus 10 is illustrated in FIGS. 4A and 4B. Areactor chamber 66 of thereactor 64 is again constructed of aluminum and defines an interior region measuring approximately 8″ by 8″. Thechamber 66 is approximately 31″ in length and is fitted with aninlet 68 and anoutlet 70.Silicone rubber gaskets 72 and end caps 74 (one shown in exploded view) are provided. A glass window (not shown) may be fitted in the end caps included to permit viewing of the interior of the chamber. Ceramic and copperhigh voltage terminals 76 are also provided. - Insulating the interior of the
reactor chamber 66 is afluorocarbon member 78 configured withgrooves 82 of selected dimensions to receive and support edge portions of double-dielectric electrodes 80 in a desired arrangement. Different insulating members may be used with thereactor 64, configured with different separation distances between thegrooves 82. Accordingly, different desired gap dimensions may be attained. Supported on its edge portions, theelectrodes 80 can readily slide in and out of thechamber 66. Theelectrodes 80 are arranged in alternating high and low configuration and connected to thehigh voltage terminals 76 at opposite ends of thechamber 66. - It bears emphasis that the plasma reactor of the
apparatus 10 is non-thermal in that there is a cool discharge promoting the free flow of electrons. Significantly, only the electrons gain appreciable energy in the reaction zone(s) or gap(s) and hence increased temperature is experienced primarily by the electrons, leaving the remaining constituents of the gas stream substantially unheated. The energy is generally evenly distributed over the non-thermal plasma environment; any hot discharge is typically a localized point to point arc.Table 1 shows selected properties of one type of fluorocarbon (i.e., PFA Teflon ®) compared to Pyrex ® glass. Dielectric Tensile Working Dielectric Strength Strength Temp. Material Constant (kV/mm) (kpsi) (C.) PFA 2.1 60 2.20 260 Teflon ® Pyrex ® 4.5 13 0.14 450 glass - While the dielectric constant of PFA Teflon® is comparable to that of Pyrex® glass, the dielectric strength is much higher. In view of this observation, the thickness of a PFA Teflon® coating can be less than that used for Pyrex®, leaving more volume for the gas stream. The desirable working is temperature of PFA Teflon® is lower than that for Pyrex®, however, it remains sufficient for treating most types of contaminated gas. As previously noted, the PFA Teflon® provides relatively high tensile strength, rendering the electrodes ductile and less susceptible to breakage, thus improving the efficiency and durability of the apparatus.
- Experimental results presented in Table 2. also demonstrates an improvement in efficiency when the
apparatus 10 is used to treated NO-bearing exhaust stream from a diesel generator.TABLE 2 Increased Efficiency of Fluorocarbon Dielectric in NO Conversion Percentage Power Flow (liters Conversion eV/molecule Material (Watts) per minute) NO to NO2 Converted PFA 48 100 100 17 Teflon ® Pyrex ® 48 100 66 22 Glass - As also mentioned, the addition of ethanol (C2H5OH) into the exhaust gas significantly enhances the efficiency of the conversion in terms of the electrical power used to drive the conversion.
- Referring back to FIG. 1, an
ethanol bath 84 is provided to improve the efficiency of the conversion process. A diverter 86 is connected to theinlet 18, having afirst section 86 a extending from theinlet 18 to theethanol bath 84 and a second section 86 b extending from theethanol bath 84 to theinlet 18. At the junction between thesecond section 86 a and theinlet 18, aninjector 88 is provided above or upstream from theplasma reactor 12. In operation, theapparatus 10 diverts a portion of theexhaust gas 11 through the diverter 86 to pass through theethanol bath 84. Due to the high vapor pressure of ethanol (C2H5OH), the ethanol is vaporized along with and mixed into the gas stream. As the ethanol-bearing gas reaches theinjector 88, it is injected into theinlet 18 to mix with the gas in the inlet. - Referring to FIG. 2, an alternative embodiment of the
non-thermal plasma apparatus 10 is illustrated. Theinjector 88 remains upstream from theplasma reactor 12, but is fed directly with ethanol stored in areservoir 90 and delivered via a meteredpump 92. The ethanol is injected into the gas in the inlet as a fine mist that evaporates substantially uniformly into thegas stream 11. A small varistaltic pump available from Manostat Corporation, Barrington, Ill., under Model #72-305-000, may be used. - Referring to both FIGS. 1 and 2, as the gas stream (ethanol-bearing or not) approaches the
plasma reactor 12, a non-thermal plasma environment is prepared in thereaction chamber 14. The non-thermal plasma environment of thereaction zone 28 contains generated reactive agents, in particular, energetic electrons, to drive selected electrical and/or chemical reactions in the gas, which are discussed in detail further below. - It has been observed that low energy gaseous plasma exhibit physical and chemical properties different than their normal properties. One such property is extreme chemical reactivity, which as discussed above, involves free electrons being energized in the electrical field or corona until the electrons attain sufficient energy to cause ionization of some of the gas molecules. Reactions for NOx reduction using the free electron e may be as follows:
- O2+e -->20+e
- N2+e -->2N+e
- NO+e -->NO*
- NO*+NO -->NO2+N+e
- NO* -->N+O+e
- N+O -->NO
- N+N -->N2
- NO+O -->NO2
- 2NO2 -->N2+202
- With the preinjection of ethanol (C2H5OH) in accordance with feature of the present invention, several additional molecular compounds are possible, such as nitric acid (HNO3) and even small amounts of peroxy acetyl nitrate, acetaldehyde, and n-propyl nitrate.
- The use of ethanol as a pre-injectant increases the efficiency of the non-thermal plasma apparatus by as much as a factor of ten. The combined use of ethanol injection and fluorocarbon dielectrics further increases efficiency. Referring to FIG. 5, the NO concentrations in gas streams containing molar ratios of ethanol to initial NO of 8:1 are compared for Pyrex® glass and Teflon® PFA dielectrics. When using the Teflon® PFA dielectrics, substantially 90% NO removal was obtained with only 48 Watts of plasma reactor power. The calculated molecular energy consumption for this data point was approximately 17 eV per NO representing a 30% decrease in energy consumption as compared to the stream treated with Pyrex® glass dielectrics.
- Improvements in efficiencies were observed when treating NOx contained in diesel generator exhaust. Referring to Table 1, results of an untreated stream were compared with results of a stream treated with approximately 4.0 ml/min. of ethanol injectant.
TABLE 3 Ethanol Injection Performance in Diesel Exhaust Stream Percent NO Electron Condition Reduction Volts/Molecule Ethanol Treated 99.6 17.3 Untreated 17.3 170.4 - As also mentioned, the ethanol offering a high vapor pressure and solubility in water offers ease in application. Its characteristic high vapor pressure renders it to be readily injected into the gas stream in either vapor or liquid form. Its high solubility in water also ensures that it may be readily scrubbed from the system along with the converted nitrogen dioxide (NO2) from the exiting gas stream.
- In comparison to other preinjection compounds, an increase in efficiency may be achieved, however, not without increased complication in the overall process and apparatus. Many hydrocarbons have a lower vapor pressure which makes injection into the gas stream difficult except in higher temperature conditions. Also, as the gas stream cools, the injectant tends to condense on the surface of the electrodes shorting out the voltage circuit. Other possible injectants are not water soluble and therefore complicates the scrubbing process.
- As illustrated in FIGS. 1 and 2, the apparatus is pack-free, that is, free of any additional dielectric material, such as glass wool packing. Accordingly, the gas stream flows through the reaction zone(s) or gap(s) substantially unimpeded.
- It may be seen that the system of the present invention may be readily incorporated in various embodiments to provide a non-thermal plasma treatment of effluent or exhaust gas. It is understood by one of ordinary skill in the art that the voltage applied, the frequency of the voltage applied, the gas stream flow rate, temperature and residence time in the reactor chamber may affect power consumption and therefore efficiency of the apparatus. It is also understood by one of ordinary skill in the art that the configurations and dimensions of various components, such as the plasma chamber, the electrodes, the spacers and the insulation may affect the efficiency and throughput of the apparatus. For example, the electrodes may be variously configured as two dimensional or three dimensional conductive elements. They may be rectilinear or tubular, or combinations thereof. Any one or combinations of these parameters may be tailored to generate specific reactive species and/or to target specific constituents in the exhaust gas for conversion. In that regard, various alternative techniques and configures may be employed departing from those disclosed and suggested herein.
- Consequently, it is to be understood that the scope hereof should be determined in accordance with the claims as set forth below.
Claims (17)
1. An non-thermal plasma reactor for treating nitric oxide-bearing exhaust gas, comprising:
a plurality of electrodes defining at least one reaction zone receiving the gas, said electrodes each having an electrode plate and a fluoropolymeric substance applied to said electrode plate;
a voltage supply connected to the electrodes to provide a voltage across the electrodes.
2. A plasma reactor in accordance with claim 1 , wherein said plurality of electrodes are of a planar configuration and are arranged in parallel formation.
3. A plasma reactor in accordance with claim 1 , wherein the electrode plate has two surfaces and said fluoropolymeric substance is applied to the two surfaces.
4. A plasma reactor in accordance with claim 1 , wherein said electrode plate is embedded in said fluoropolymeric substance.
5. A plasma reactor in accordance with claim 1 , wherein said fluoropolymeric substance is fluorocarbon.
6. A plasma reactor in accordance with claim 1 , further comprising spacers of a fluoropolymeric substance, that are positioned between adjacent electrodes to provide a gap therebetween.
7. A plasma reactor in accordance with claim 1 , further comprising a insulating member of a fluoropolymeric substance, said member being configured with indentations to receive and support said electrodes.
8. An apparatus for converting nitric oxide in exhaust gas into nitrogen dioxide, comprising:
a plasma reactor having a plurality of electrodes defining at least one reaction zone receiving the gas, said electrodes each having an electrode plate and a fluoropolymeric substance applied to said electrode plate; and
a voltage supply connected to the electrodes to provide a voltage across the electrodes.
9. An apparatus in accordance with claim 8 , further comprising a scrubber.
10. An apparatus in accordance with claim 8 , further comprising an injector introducing ethanol into said gas.
11. An apparatus in accordance with claim 8 , further comprising an inlet and an outlet, each connected to the plasma reactor.
12. An apparatus in accordance with claim 8 , further comprising an ethanol bath through which at least a portion of the gas is diverted.
13. An apparatus in accordance with claim 8 , wherein the voltage applied across the electrodes creates an electric field whose strength is above the critical field strength of the gas, but not so high as to establish a condition conducive to sustain arcing between the electrodes.
14. An apparatus in accordance with claim 8 , wherein the voltage applied across the electrodes creates a multitude of short-lived current filaments within the gas.
15. An apparatus in accordance with claim 8 , wherein reactive species are generated by the plasma reactor, to react with said nitric oxides.
16. An apparatus in accordance with claim 9 , wherein the reactive species are electrons promoting primarily electron-molecule collisions in the gas.
17. An apparatus in accordance with claim 8 , comprising at least three electrodes arranged in parallel formation defining at least two gaps therebetween through which the gas passes.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/987,769 US20020131917A1 (en) | 1998-05-27 | 2001-11-15 | Non-thermal plasma apparatus utilizing dielectrically-coated electrodes for treating effluent gas |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/085,669 US6309610B1 (en) | 1998-05-27 | 1998-05-27 | Non-thermal plasma apparatus utilizing dielectrically-coated electrodes for treating effluent gas |
US09/987,769 US20020131917A1 (en) | 1998-05-27 | 2001-11-15 | Non-thermal plasma apparatus utilizing dielectrically-coated electrodes for treating effluent gas |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/085,669 Continuation US6309610B1 (en) | 1998-05-27 | 1998-05-27 | Non-thermal plasma apparatus utilizing dielectrically-coated electrodes for treating effluent gas |
Publications (1)
Publication Number | Publication Date |
---|---|
US20020131917A1 true US20020131917A1 (en) | 2002-09-19 |
Family
ID=22193184
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/085,669 Expired - Lifetime US6309610B1 (en) | 1998-05-27 | 1998-05-27 | Non-thermal plasma apparatus utilizing dielectrically-coated electrodes for treating effluent gas |
US09/987,769 Abandoned US20020131917A1 (en) | 1998-05-27 | 2001-11-15 | Non-thermal plasma apparatus utilizing dielectrically-coated electrodes for treating effluent gas |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/085,669 Expired - Lifetime US6309610B1 (en) | 1998-05-27 | 1998-05-27 | Non-thermal plasma apparatus utilizing dielectrically-coated electrodes for treating effluent gas |
Country Status (1)
Country | Link |
---|---|
US (2) | US6309610B1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020076363A1 (en) * | 2000-12-18 | 2002-06-20 | Nelson David Emil | Scaleable inter-digitized tine non-thermal plasma reactor |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6309610B1 (en) * | 1998-05-27 | 2001-10-30 | Science Applications International Corporation | Non-thermal plasma apparatus utilizing dielectrically-coated electrodes for treating effluent gas |
JP2001252527A (en) * | 2000-03-13 | 2001-09-18 | Seiko Epson Corp | PFC processing method and processing apparatus |
US6887440B2 (en) * | 2000-11-16 | 2005-05-03 | Delphi Technologies, Inc. | Edge-connected non-thermal plasma exhaust after-treatment device |
US7160521B2 (en) * | 2001-07-11 | 2007-01-09 | Applied Materials, Inc. | Treatment of effluent from a substrate processing chamber |
CA2456202A1 (en) * | 2001-08-02 | 2003-05-15 | Plasmasol Corp. | Chemical processing using non-thermal discharge plasma |
US7642720B2 (en) * | 2006-01-23 | 2010-01-05 | The Board Of Trustees Of The University Of Illinois | Addressable microplasma devices and arrays with buried electrodes in ceramic |
US8123396B1 (en) | 2007-05-16 | 2012-02-28 | Science Applications International Corporation | Method and means for precision mixing |
US8008617B1 (en) | 2007-12-28 | 2011-08-30 | Science Applications International Corporation | Ion transfer device |
US8071957B1 (en) | 2009-03-10 | 2011-12-06 | Science Applications International Corporation | Soft chemical ionization source |
US9272238B1 (en) * | 2013-05-10 | 2016-03-01 | Truman Bonds | Plasma generation through ceramic substrate |
CN108533363B (en) * | 2018-06-04 | 2023-08-18 | 江苏大学 | A vehicle-mounted DPF online regeneration system and control method |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6117403A (en) * | 1996-10-09 | 2000-09-12 | Zero Emissions Technology Inc. | Barrier discharge conversion of Hg, SO2 and NOx |
US6139694A (en) * | 1998-05-28 | 2000-10-31 | Science Applications International Corporation | Method and apparatus utilizing ethanol in non-thermal plasma treatment of effluent gas |
US6309610B1 (en) * | 1998-05-27 | 2001-10-30 | Science Applications International Corporation | Non-thermal plasma apparatus utilizing dielectrically-coated electrodes for treating effluent gas |
US6565716B1 (en) * | 1999-02-24 | 2003-05-20 | Regents Of The University Of Minnesota | Dielectric barrier discharge system and method for decomposing hazardous compounds in fluids |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0273165B1 (en) | 1986-11-29 | 1992-10-07 | Klaus Kalwar | Method of making a corona electrode and electrode made by this method |
US4954320A (en) | 1988-04-22 | 1990-09-04 | The United States Of America As Represented By The Secretary Of The Army | Reactive bed plasma air purification |
US5545380A (en) * | 1993-02-05 | 1996-08-13 | Teledyne Industries, Inc. | Corona discharge system with conduit structure |
US5352251A (en) * | 1993-03-30 | 1994-10-04 | Shell Oil Company | Fuel compositions |
US5490973A (en) | 1994-05-23 | 1996-02-13 | The United States Of America As Represented By The Secretary Of The Navy | Pulsed corona reactor system for abatement of pollution by hazardous agents |
US5807466A (en) * | 1996-08-19 | 1998-09-15 | Hughes Electronics | Fuel injection system and method for treatment of NOx in a corona discharge pollutant destruction apparatus |
US5827488A (en) * | 1996-09-06 | 1998-10-27 | Dravo Lime Company | Process for removing SO2 and NOx from a gaseous stream |
US5872426A (en) * | 1997-03-18 | 1999-02-16 | Stevens Institute Of Technology | Glow plasma discharge device having electrode covered with perforated dielectric |
-
1998
- 1998-05-27 US US09/085,669 patent/US6309610B1/en not_active Expired - Lifetime
-
2001
- 2001-11-15 US US09/987,769 patent/US20020131917A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6117403A (en) * | 1996-10-09 | 2000-09-12 | Zero Emissions Technology Inc. | Barrier discharge conversion of Hg, SO2 and NOx |
US6309610B1 (en) * | 1998-05-27 | 2001-10-30 | Science Applications International Corporation | Non-thermal plasma apparatus utilizing dielectrically-coated electrodes for treating effluent gas |
US6139694A (en) * | 1998-05-28 | 2000-10-31 | Science Applications International Corporation | Method and apparatus utilizing ethanol in non-thermal plasma treatment of effluent gas |
US6565716B1 (en) * | 1999-02-24 | 2003-05-20 | Regents Of The University Of Minnesota | Dielectric barrier discharge system and method for decomposing hazardous compounds in fluids |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020076363A1 (en) * | 2000-12-18 | 2002-06-20 | Nelson David Emil | Scaleable inter-digitized tine non-thermal plasma reactor |
US6800256B2 (en) * | 2000-12-18 | 2004-10-05 | Delphi Technologies, Inc. | Scaleable inter-digitized tine non-thermal plasma reactor |
Also Published As
Publication number | Publication date |
---|---|
US6309610B1 (en) | 2001-10-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6139694A (en) | Method and apparatus utilizing ethanol in non-thermal plasma treatment of effluent gas | |
Rosocha et al. | Treatment of hazardous organic wastes using silent discharge plasmas | |
Chang et al. | Corona discharge processes | |
Liu et al. | A review on removal of elemental mercury from flue gas using advanced oxidation process: chemistry and process | |
Kohno et al. | Destruction of volatile organic compounds used in a semiconductor industry by a capillary tube discharge reactor | |
Yamamoto et al. | Catalysis-assisted plasma technology for carbon tetrachloride destruction | |
US5236672A (en) | Corona destruction of volatile organic compounds and toxics | |
Futamura et al. | Byproduct identification and mechanism determination in plasma chemical decomposition of trichloroethylene | |
US6309610B1 (en) | Non-thermal plasma apparatus utilizing dielectrically-coated electrodes for treating effluent gas | |
AU2434201A (en) | Segmented electrode capillary discharge, non-thermal plasma apparatus and process for promoting chemical reactions | |
Chakrabarti et al. | Gas cleaning with semi-wet type plasma reactor | |
US6576573B2 (en) | Atmospheric pressure plasma enhanced abatement of semiconductor process effluent species | |
Urashima et al. | Removal of C/sub 2/F/sub 6/from a semiconductor process flue gas by a ferroelectric packed-bed barrier discharge reactor with an adsorber | |
Shimizu et al. | Pulsed-plasma treatment of polluted gas using wet-/low-temperature corona reactors | |
Yamamoto et al. | Aerosol generation and decomposition of CFC-113 by the ferroelectric plasma reactor | |
Dalaine et al. | H 2 S destruction in 50 Hz and 25 kHz gliding arc reactors | |
Bhattacharyya et al. | Performance of helical and straight-wire corona electrodes for NOx abatement under AC/pulse energizations | |
EP0489073B1 (en) | Apparatus and method for treatment of gas | |
Jiang et al. | Decomposition of a gas mixture of four n-alkanes using a DBD reactor | |
Mohapatro et al. | Studies on $\hbox {NO} _ {\rm X} $ Removal From Diesel Engine Exhaust Using Duct-Type DBD Reactor | |
US9393519B2 (en) | Waste disposal | |
JP2006247507A (en) | Exhaust gas treatment apparatus and treatment method thereof | |
Penetrante et al. | Basic energy efficiency of plasma production in electrical discharge and electron beam reactors | |
Nomura et al. | A study of NO removal by packed-beads discharge reactor | |
Penetrante et al. | Comparison of non-thermal plasma techniques for abatement of volatile organic compounds and nitrogen oxides |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: SCIENCE APPLICATIONS INTERNATIONAL CORPORATION, CA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:NEJEZCHLEB, ALLEN J.;ROGERS, JOHN W.;JAMISON, KEITH A.;REEL/FRAME:013508/0420;SIGNING DATES FROM 19980327 TO 19980521 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |