US20020112954A1 - Plating rack for plating procedures and processes for making and using same - Google Patents
Plating rack for plating procedures and processes for making and using same Download PDFInfo
- Publication number
- US20020112954A1 US20020112954A1 US10/061,157 US6115702A US2002112954A1 US 20020112954 A1 US20020112954 A1 US 20020112954A1 US 6115702 A US6115702 A US 6115702A US 2002112954 A1 US2002112954 A1 US 2002112954A1
- Authority
- US
- United States
- Prior art keywords
- plate
- brackets
- plating
- spring
- shaped part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000007747 plating Methods 0.000 title claims abstract description 113
- 238000000034 method Methods 0.000 title claims abstract description 44
- 239000012530 fluid Substances 0.000 claims abstract description 52
- 238000009713 electroplating Methods 0.000 claims description 21
- 230000000717 retained effect Effects 0.000 claims description 12
- 238000001914 filtration Methods 0.000 claims description 3
- 238000005086 pumping Methods 0.000 claims description 3
- 238000007772 electroless plating Methods 0.000 claims description 2
- 239000003792 electrolyte Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 1
- 230000037390 scarring Effects 0.000 abstract description 2
- 230000014759 maintenance of location Effects 0.000 description 11
- 230000008901 benefit Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- 230000007547 defect Effects 0.000 description 6
- 238000013019 agitation Methods 0.000 description 5
- 231100000241 scar Toxicity 0.000 description 5
- 208000032544 Cicatrix Diseases 0.000 description 4
- 230000037387 scars Effects 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 230000009977 dual effect Effects 0.000 description 3
- 239000008151 electrolyte solution Substances 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 239000010963 304 stainless steel Substances 0.000 description 2
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000639 Spring steel Inorganic materials 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/06—Suspending or supporting devices for articles to be coated
- C25D17/08—Supporting racks, i.e. not for suspending
Definitions
- the present invention generally relates to a plating rack and more particularly to a plating rack used for releasably holding parts in a plating process, as well as processes for fabricating and using such a rack.
- the plating defect can be problematic.
- Some high precision microelectronic parts or related support parts, for instance, may not meet performance requirements, tolerances and/or specifications if such unplated “scars” are formed on the plated part, even in the case where such defects are restricted to the peripheral side edges of the part.
- a plating rack holds plate-shaped parts or workpieces in a plating process with retaining means permitting all exterior surface areas of the part to be completely covered by plating material.
- the plating rack of the present invention does not leave plating defects, such as scars or witness marks of the retaining device, in the plated part.
- the plating rack includes a unique fixturing arrangement well-suited for use in plating procedures in which relatively predictable relative movement between parts and the plating solution in the plating tank is created during the plating procedure.
- the plating rack is lowered into a plating tank sufficient that the fixtured part(s) is immersed in the plating fluid.
- the part can be plated in a plating process involving turbulence created in the plating fluid.
- This turbulence can be created in a variety of manners, such as by sparging of gas into the working fluid in the plating tank, and the like; and/or by mechanical agitating or stirring the working fluid, and the like; and/or by constant flow movement of the working fluid in the plating tank due to continuous circulation of the working fluid, such as an electrolyte solution for electroplating, out of and back into the plating tank using pumping action for additional purposes of filtering and/or replenishment of the working fluid, and the like.
- the terms “plating fluid” and “working fluid” are generally synonymous for purposes herein.
- the plating fluid can be an electroplating fluid or an electroless plating fluid.
- a plating rack including a frame having brackets in-between which plate-shaped parts are retained during a plating procedure, from opposite side edges thereof, using certain spring members as fixturing devices.
- the spring members each are fixedly attached at one end to a bracket and the opposite free end is spring biased toward a nearest side edge of the part.
- the free or distal end of each spring member includes a curved portion having inner surface defining a notch such that the curved portion makes points of contact with the part that is limited to the pair of right angle edges, i.e., the edge corners, of the side edges of the part.
- the corners of the part are formed where the major surfaces thereof intersect with the side edges arranged generally at approximately right angles thereto.
- the spring force provided by the spring members is sufficiently matched to the agitation/turbulence/fluid motion in the plating solution such that plating occurs all over the plate. That is, the turbulence in the electroplating bath causes the part to move around within the notch of the spring retention device sufficiently to ultimately expose all the exterior surfaces of the part to contact with the plating fluid, while retaining the part sufficiently such that the part does not become inadvertently disengaged from the spring arm and fall off the rack into the plating tank.
- the spring tension is thus set in advance to provide a minimal force needed to retain the part by the spring arms assigned to that part for the duration of the plating procedure and associated handling, while leaving enough “play” in the retentive force between the spring arm notches and the corners of the part such that turbulence in the plating bath can create circulation of the plating fluid over the entire side edge surfaces as the spring notch moves to-and-fro and laterally relative to the plate edges due to the turbulence in the working fluid in the electroplating tank.
- the retention system is configured such that the amount of lateral movement permitted and tolerated does not permit the spring member to become disengaged from the part.
- the spring force of the spring retention devices against side edges of the part and the surface forces created by the movement induced in the plating fluid against the part surfaces are balanced such that the plating fluid can flow and circulate over all exposed surfaces of the plate.
- the spring arms also retain the plate on the plating rack during loading and unloading transfer of the plating rack before and after, respectively, conducting the electroplating procedure.
- FIG. 1 is a frontal view of a plating rack including fixtured parts to be plated according to an embodiment of the invention
- FIG. 2 is a side view of the plating rack shown in FIG. 1;
- FIG. 3 is an isolated enlarged side view of region “B” indicated in FIG. 2, including a part in a retained position using spring arms according to an embodiment of the invention
- FIG. 4 is an isolated perspective view of a spring arm used to retain parts being plated according to embodiments of the invention.
- FIG. 5 is an isolated frontal view of a part in the retained position with spring arms according to another embodiment of the invention, where spring arms extend at angles from shared attachment means on the frame brackets to engage and retain opposite sides of the part to be plated;
- FIG. 6 is an isolated, enlarged side view of a part to be plated in the retained position within the notch of a spring arm according to the invention including indication of slight relative to-and-fro (rocking) motion induced as between the plate and the spring arm, such as by plating bath turbulence;
- FIG. 7 is an isolated side view of a spring arm with its structural dimensions and geometries shown and indicated according to one preferred embodiment of the invention.
- FIGS. 8A and 8B show steps of an exemplary procedure for racking (retaining) parts according to an embodiment of the invention.
- the present invention relates to a plating rack for holding plate-shaped parts or workpieces in a plating process with retaining means permitting all exterior surface areas of the part to be completely covered by plating material.
- the plating rack of the present invention does not leave plating defects, such as scars or witness marks of the retaining device, in the plated part.
- the terminology “plate-shaped”, as used herein, generally refers to an overall shape of a discrete object having relatively flat major surfaces on opposite sides thereof, and length and width dimensions of the major surfaces are substantially greater in magnitude than the thickness dimension of the object as measured between the major surfaces.
- a plating rack 10 includes a frame 10 comprising a series of brackets 12 a - 12 j, and the neighboring pairs of which are spaced-apart a uniform equal distance “m” between their midlines. Plate-shaped parts 13 a - 13 e , and so forth, are retained during a plating procedure from opposite side edges thereof using spring members 14 a - 14 d , and so forth, as fixturing devices.
- the spring members 14 a - 14 d are integral double-armed spring wire structures, as discussed in more detail below, that are connected to the brackets at a medial portion of the spring members. In that way, spring members 14 a, 14 b, and so forth, can support retention of parts located on both sides of a bracket. As illustrated in FIG. 1, the spring members 14 a - 14 d preferably are oriented generally at right angles (90°) relative to the nearest sides of the part 13 a being retained.
- the loaded plating rack 10 is shown as immersed into a plating fluid bath 23 in a vertical orientation and maintained at that position by a hook 22 provided at the top of the frame 11 , which is hooked over a stationary bus bar 21 .
- a hook 22 provided at the top of the frame 11 , which is hooked over a stationary bus bar 21 .
- means is provided for removably loading the plating rack 10 into a plating tank or container.
- each spring member 14 a - 14 d and so forth, used to retain a part for plating, are fixedly attached at one end 14 e to a bracket.
- spring member 14 a is attached to bracket 12 b by attachment means 15 , which, for example, can be a threaded bolt 15 a and washer 15 b.
- the bracket includes through-holes for receiving the bolts 15 , and the bolts have flanges at one end that clamp a portion of the spring member against the bracket, such as at an intermediate crimped or looped portion 14 j of the spring member 14 a (best seen in FIG. 4).
- the free end 14 f of the spring member 14 a includes a portion 14 g which is spring biased toward a nearest side edge 13 f of the part 13 a.
- the spring biased portion 14 g includes a curved inner surface 14 h defining a notch 14 i such that the curved inner surface 14 h makes contact and bears against the part 13 a.
- the curved inner surface 14 h makes varying points of contact with the side edge 13 f of the part 13 a where the points of contact are limited to the edge corners where the side edges meet the major faces of the part.
- Spring member 14 d similarly bears against the opposite side edge 13 g of part 13 a.
- spring arm members 140 a - 140 d are single-armed wire structures.
- the spring members are attached at an angle “p” to the nearest side edge of the part 130 a.
- the angle “p”, for example, can be any angle at which the retention of the part 130 a is still maintained, such as where “p” is about 50 to about 130° (including 90°), while also permitting adjoining spring members to share an attachment means (e.g., see features 150 A, 150 B).
- the arrangement shown in FIG. 2 has laterally-neighboring spring members 14 a and 14 b being bolted separately to the same bracket 12 b.
- each of spring members 140 a - 140 d comprise a partial version of the spring member shown in FIG. 4 such that spring member comprises only the structure below line 14 k.
- the crimped or looped intermediate area 14 j provided in each of spring arms 140 a - 140 d is included and is fastenable to a bracket using attachment means 150 A or 150 B.
- Phantom lines included in FIG. 5 indicate possible separate spring members that extend from the attachment means towards the next set of brackets (not shown) located above and below brackets 120 b, 120 a, for holding additional parts in the rack array.
- turbulence created in an electroplating bath, or other suitable plating bath for the parts causes the part 130 a to move along points of contact made between the inner curved surface 14 h of the notch in spring arm 14 d and the corners 130 h and 130 i of part 130 a.
- the corners 130 h and 130 i are where the side edge 130 f of part 130 a meets at right angles with the opposing major faces 130 j and 130 k of the part 130 a.
- the part movement made at the points of contact limited to the corners of part 130 a occur in a limited predictable fashion within the respective retention notches 14 i of the spring member 140 a, and so forth, dedicated to each respective part to be plated.
- This movement occurs as a to-and-fro or rocking motion on the part corners, as indicated by the double arrow in FIG. 6.
- the movement also involves slight relative lateral motion induced as between the part 130 a and spring arm members by the plating bath turbulence, such as indicated in FIG. 5.
- the other depicted spring member 140 e shown can form part of a double armed spring member, such as described in connection with FIG. 4, or, alternatively, it could be a separate discrete spring member joined to a common bracket with spring member 140 a using a common attachment means, such as described in connection with FIG. 5.
- the limited to-and-fro and lateral movement, or “play,” provided at the notched portions of the spring arms described herein is sufficient to permit the plating fluid to flow and circulate over all the exterior surfaces of the plate to permit uniform complete plating to be provided without leaving scars, while still retaining the part sufficiently such that the part, or parts, being plated does not become inadvertently disengaged from the spring arm member and fall off the rack into the electroplating tank.
- the spring force needed is determined empirically for a given set of expected or specified plating conditions and that information is matched to the agitation/turbulence that will be encountered by the part during the electroplating procedure.
- the bracket spacing, the plating conditions, and the general geometry of the spring arms to be used one of ordinary skill in the art can determine by empirical experimentation in an electroplating tank the appropriate spring material, size and geometric specifics to attain the dual functionality needed.
- each spring arm to be used has one end to be fixed at a cross bracket of the rack, and one free end including first major turn or loop (see FIG. 6, feature 14 m ), to create bias toward the part or workpiece, as applicable thereto through the notch ( 14 i ) located closer to the distal end ( 14 f ), as shown in several of the included figures).
- the spring arms generally are comprised of a discrete elongated piece of wire or rod (preferably circular in cross section) having a general geometry along the length thereof as mentioned above.
- a series of different test rods or wires of various types and gauges of steel wire can be tested at a given loop dimension (imparted by mandrel for example) to check by trial and error whether the aforementioned dual functionality in the retention behavior is attained.
- refinements in the spring bias force of the spring arms if necessary, after creating the loop via mandrel, can be manually induced by longitudinally extending or compressing the loop in the spring arm (e.g., longitudinally extending the loop to reduce the bias force).
- each spring member or arm can be a separate member attached to a bracket along with other separate springs by a common attachment means (e.g., a bolt).
- a common attachment means e.g., a bolt.
- One, two or more spring members could be used at a time to engage a side of the part.
- a symmetry in spring members should be deployed over opposite side edges of a common part.
- the plate-shaped part to be plated using this invention includes side edges having a uniform thickness along the length of at least the top and bottom sides, and preferably all around the part.
- the bulk of the part generally has a uniform thickness, although some contour spaced from the edges can be included, such as to form lid seats if the part is a lid.
- the part generally has top and bottom side edges extending parallel to each other.
- the part can have any profile meeting these criteria and usually is a discrete rectangular-shaped wafer or slab of material.
- the part can be plated in a electroplating process involving turbulence created in the plating fluid by by sparging of gas into the plating fluids in the plating tank, and the like; and/or by mechanical agitation or stirring means immersed in the working fluid, and the like; and/or due to constant flow movement of the working fluid caused by continuous circulation of the electrolyte solution out and back into the plating tank by pumping such as for additional purposes of filtering and replenishment, and the like.
- the relative movement between the part and working fluid is created by sparging of gas (e.g., air) conducted at a location in the tank fluids below the loaded plating racks in combination with the constant flow movement of the working fluid caused by continuous circulation of the electrolyte solution (i.e., the working fluid) out and back into the plating tank via manifolds in the tank walls using pumps.
- gas e.g., air
- Turbulent electroplating systems using mechanical agitation means are described, for example, in U.S. Pat. No. 4,686,014, which teachings are incorporated herein by reference.
- the plating racks of this invention generally contemplate applicability in plating procedures, such as electroplating procedures, involving agitation or stirring and the like of the electrolyte or other applicable plating solution in the tank.
- a non-limiting, illustrative example of a suitable plating frame and a spring arm construction are as follows.
- the spring arm material can be, for example, tempered, stress-relieved stainless spring steel, such as 302 or 304 stainless steel.
- the spring arm diameter is 0.030 inch; the steel has an ASTM A313 tensile strength of 250-325 KPSI; the spring arm loop (see FIG. 6, feature 14 m ) has a loop radius of a 0.25 inch mandrel.
- the spring arm retention notch 14 i has a radius of curvature imparted effective to make point contact at each of two corner edges of the part to be plated (top or bottom as applicable); used with an air vise.
- FIG. 7 shows a spring member ( 14 a, 14 e ) according to one preferred, non-limiting embodiment having dimensions providing the appropriate biasing forces and part retaining functionality described herein for that component.
- Y is an angle of 110°
- X is an angle of 40°
- Z is an angle of 79°
- U is an angle of 29°
- the dimension “a” is 1.930 inches (49.0 mm)
- the radius of curvature R is 0.140 mm.
- the radius of curvature of the intermediary loop or crimp 14 j can vary depending, for example, on the size of bolt attachment means.
- the frame material can be stainless steel, such as 302 or 304 stainless steel, or other material resistant to corrosion or chemical attack from the plating fluid.
- the attachment means for fixing the spring arm to the frame can be threaded steel bolt used with a counter-threaded washer used on backside of the bracket.
- a part to be plated having a thickness as small as approximately 0.125 inch or even less can be releasably retained by the inventive plating rack and spring fixtures components thereof described herein.
- FIGS. 8A and 8B steps of a method are shown for racking parts using a plating rack in accordance with one aspect of the invention.
- the spring members 140 a - 140 d , and so forth, needed to retain parts to be plated have been attached to brackets 120 and 120 b using bolts 150 A and 150 B.
- the bottom of each part 130 a and 130 b, and so forth is tilted backwards relative to the top of the part such that the side edge of the part at the bottom can be placed in the upward facing notches of the spring members located immediately below the part.
- the rack is removed from the plating tank and the rack of plated parts is set down horizontally on a flat surface or tray, which preferably is lined with clean plastic.
- the rack preferably is positioned on the flat surface such that the curves of the spring members face upward.
- the parts can be gently pressed downward relative to one set of gripping spring members, such as manually or mechanically, until the spring members release from the opposite set of gripping spring members.
- the plated racks of the present invention can be used in the fabrication of nickel-plated copper heat sink parts for microelectronic parts to ensure the parts are uniformly and completely plated on every exposed surface, including the side edge faces. This preferably, but not exclusively, is an electroplating procedure.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
Plating rack for releasably holding parts in a plating process, as well as processes for fabricating and using such a rack, including spring members mounted to a frame which releasably hold plate-shaped parts from the opposite side edges of the parts in a manner permitting the part to move sufficiently, without disengagement, when immersed in an agitated plating fluid such that plating occurs on all the exterior surface regions of the plate and scarring is avoided.
Description
- This application claims the benefit of priority under 35 U.S.C. §119(e) to U.S. Provisional application serial No. 60/268,864, filed Feb. 16, 2001, the entire disclosure and contents of which are incorporated herein by reference for all purposes.
- The present invention generally relates to a plating rack and more particularly to a plating rack used for releasably holding parts in a plating process, as well as processes for fabricating and using such a rack.
- Work holding fixtures, also often referred to as plating racks, have been used for temporarily holding a plate-shaped part or workpiece during an immersion electroplating operation, and the handling associated with loading and unloading the part from the plating tank. Unfortunately, previous rack plating fixtures arrangements and techniques have retained the part during plating in a manner leaving a plating defect in the form of a “scar” of unplated surface area on the part. This “scarring” defect occurs where the retention device physically contacts the part throughout the duration of the plating procedure. Consequently, such prior retention systems blinded and masked a portion of the peripheral side edges, and/or major surface regions of the part adjoining the side edges, from the plating solution. Those surface regions of the plate were left bare and unplated. The plating defect can be problematic. Some high precision microelectronic parts or related support parts, for instance, may not meet performance requirements, tolerances and/or specifications if such unplated “scars” are formed on the plated part, even in the case where such defects are restricted to the peripheral side edges of the part.
- The above problems and shortcomings are solved by the present invention in which a plating rack holds plate-shaped parts or workpieces in a plating process with retaining means permitting all exterior surface areas of the part to be completely covered by plating material. Advantageously, the plating rack of the present invention does not leave plating defects, such as scars or witness marks of the retaining device, in the plated part.
- In one aspect, the plating rack includes a unique fixturing arrangement well-suited for use in plating procedures in which relatively predictable relative movement between parts and the plating solution in the plating tank is created during the plating procedure. The plating rack is lowered into a plating tank sufficient that the fixtured part(s) is immersed in the plating fluid. To create the relative movement between the part and plating fluids, the part can be plated in a plating process involving turbulence created in the plating fluid. This turbulence can be created in a variety of manners, such as by sparging of gas into the working fluid in the plating tank, and the like; and/or by mechanical agitating or stirring the working fluid, and the like; and/or by constant flow movement of the working fluid in the plating tank due to continuous circulation of the working fluid, such as an electrolyte solution for electroplating, out of and back into the plating tank using pumping action for additional purposes of filtering and/or replenishment of the working fluid, and the like. The terms “plating fluid” and “working fluid” are generally synonymous for purposes herein.
- In general, the plating fluid can be an electroplating fluid or an electroless plating fluid.
- In one aspect of the present invention, there is a plating rack including a frame having brackets in-between which plate-shaped parts are retained during a plating procedure, from opposite side edges thereof, using certain spring members as fixturing devices. The spring members each are fixedly attached at one end to a bracket and the opposite free end is spring biased toward a nearest side edge of the part. The free or distal end of each spring member includes a curved portion having inner surface defining a notch such that the curved portion makes points of contact with the part that is limited to the pair of right angle edges, i.e., the edge corners, of the side edges of the part. The corners of the part are formed where the major surfaces thereof intersect with the side edges arranged generally at approximately right angles thereto.
- The significance of this configuration is that the spring force provided by the spring members, also referred to herein occasionally as spring arms, is sufficiently matched to the agitation/turbulence/fluid motion in the plating solution such that plating occurs all over the plate. That is, the turbulence in the electroplating bath causes the part to move around within the notch of the spring retention device sufficiently to ultimately expose all the exterior surfaces of the part to contact with the plating fluid, while retaining the part sufficiently such that the part does not become inadvertently disengaged from the spring arm and fall off the rack into the plating tank. The spring tension is thus set in advance to provide a minimal force needed to retain the part by the spring arms assigned to that part for the duration of the plating procedure and associated handling, while leaving enough “play” in the retentive force between the spring arm notches and the corners of the part such that turbulence in the plating bath can create circulation of the plating fluid over the entire side edge surfaces as the spring notch moves to-and-fro and laterally relative to the plate edges due to the turbulence in the working fluid in the electroplating tank. The retention system is configured such that the amount of lateral movement permitted and tolerated does not permit the spring member to become disengaged from the part. In this way, the spring force of the spring retention devices against side edges of the part and the surface forces created by the movement induced in the plating fluid against the part surfaces are balanced such that the plating fluid can flow and circulate over all exposed surfaces of the plate. In addition, the spring arms also retain the plate on the plating rack during loading and unloading transfer of the plating rack before and after, respectively, conducting the electroplating procedure.
- Other features, objects, and advantages of the present invention will become apparent from the following additional description of the invention with reference to the drawings, in which:
- FIG. 1 is a frontal view of a plating rack including fixtured parts to be plated according to an embodiment of the invention;
- FIG. 2 is a side view of the plating rack shown in FIG. 1;
- FIG. 3 is an isolated enlarged side view of region “B” indicated in FIG. 2, including a part in a retained position using spring arms according to an embodiment of the invention;
- FIG. 4 is an isolated perspective view of a spring arm used to retain parts being plated according to embodiments of the invention.
- FIG. 5 is an isolated frontal view of a part in the retained position with spring arms according to another embodiment of the invention, where spring arms extend at angles from shared attachment means on the frame brackets to engage and retain opposite sides of the part to be plated;
- FIG. 6 is an isolated, enlarged side view of a part to be plated in the retained position within the notch of a spring arm according to the invention including indication of slight relative to-and-fro (rocking) motion induced as between the plate and the spring arm, such as by plating bath turbulence;
- FIG. 7 is an isolated side view of a spring arm with its structural dimensions and geometries shown and indicated according to one preferred embodiment of the invention; and
- FIGS. 8A and 8B show steps of an exemplary procedure for racking (retaining) parts according to an embodiment of the invention.
- Skilled artisans will appreciate that elements in the figures are illustrated for simplicity and clarity and have not necessarily been drawn to scale. Similar numbered features in different figures represent similar parts unless indicated otherwise below.
- The present invention relates to a plating rack for holding plate-shaped parts or workpieces in a plating process with retaining means permitting all exterior surface areas of the part to be completely covered by plating material. The plating rack of the present invention does not leave plating defects, such as scars or witness marks of the retaining device, in the plated part. The terminology “plate-shaped”, as used herein, generally refers to an overall shape of a discrete object having relatively flat major surfaces on opposite sides thereof, and length and width dimensions of the major surfaces are substantially greater in magnitude than the thickness dimension of the object as measured between the major surfaces.
- While the detailed discussion of the invention provided herein may illustrate the invention by way of the processing of a single plate-shaped part or the structure or nature of a given spring member, it will be appreciated that the invention encompasses use of a plurality of spring members to retain each part to be plated, and that invention contemplates using its precepts for plating a single part or a plurality of parts simultaneously.
- Referring now to FIG. 1, a plating
rack 10 includes aframe 10 comprising a series ofbrackets 12 a-12 j, and the neighboring pairs of which are spaced-apart a uniform equal distance “m” between their midlines. Plate-shaped parts 13 a-13 e, and so forth, are retained during a plating procedure from opposite side edges thereof usingspring members 14 a-14 d, and so forth, as fixturing devices. - In one preferred embodiment, the
spring members 14 a-14 d are integral double-armed spring wire structures, as discussed in more detail below, that are connected to the brackets at a medial portion of the spring members. In that way,spring members 14 a, 14 b, and so forth, can support retention of parts located on both sides of a bracket. As illustrated in FIG. 1, thespring members 14 a-14 d preferably are oriented generally at right angles (90°) relative to the nearest sides of thepart 13 a being retained. - As shown in FIG. 2, the loaded
plating rack 10 is shown as immersed into aplating fluid bath 23 in a vertical orientation and maintained at that position by ahook 22 provided at the top of the frame 11, which is hooked over astationary bus bar 21. In this way, means is provided for removably loading theplating rack 10 into a plating tank or container. - Referring to FIG. 3, each
spring member 14 a-14 d, and so forth, used to retain a part for plating, are fixedly attached at oneend 14 e to a bracket. For instance, spring member 14 a is attached to bracket 12 b by attachment means 15, which, for example, can be a threadedbolt 15 a and washer 15 b. The bracket includes through-holes for receiving thebolts 15, and the bolts have flanges at one end that clamp a portion of the spring member against the bracket, such as at an intermediate crimped or looped portion 14 j of the spring member 14 a (best seen in FIG. 4). Then, the bolt is fastened to the bracket via the washer on the opposite side of the bracket to clamp a portion or end of the spring member to the bracket. Thefree end 14 f of the spring member 14 a includes a portion 14 g which is spring biased toward anearest side edge 13 f of thepart 13 a. The spring biased portion 14 g includes a curvedinner surface 14 h defining a notch 14 i such that the curvedinner surface 14 h makes contact and bears against thepart 13 a. In particular, the curvedinner surface 14 h makes varying points of contact with theside edge 13 f of thepart 13 a where the points of contact are limited to the edge corners where the side edges meet the major faces of the part.Spring member 14 d similarly bears against the opposite side edge 13 g ofpart 13 a. - In another embodiment of the invention illustrated in FIG. 5, four discrete spring members140 a-140 d are attached in pairs at common attachment means 150B and 150A located on the
respective brackets 120 b and 120 a. In one preferred embodiment, spring arm members 140 a-140 d are single-armed wire structures. The spring members are attached at an angle “p” to the nearest side edge of thepart 130 a. The angle “p”, for example, can be any angle at which the retention of thepart 130 a is still maintained, such as where “p” is about 50 to about 130° (including 90°), while also permitting adjoining spring members to share an attachment means (e.g., see features 150A, 150B). By comparison, the arrangement shown in FIG. 2 has laterally-neighboringspring members 14 a and 14 b being bolted separately to the same bracket 12 b. - In one aspect, each of spring members140 a-140 d comprise a partial version of the spring member shown in FIG. 4 such that spring member comprises only the structure below
line 14 k. The crimped or looped intermediate area 14 j provided in each of spring arms 140 a-140 d is included and is fastenable to a bracket using attachment means 150A or 150B. - Phantom lines included in FIG. 5 indicate possible separate spring members that extend from the attachment means towards the next set of brackets (not shown) located above and below
brackets 120 b, 120 a, for holding additional parts in the rack array. - With reference now to FIG. 6, turbulence created in an electroplating bath, or other suitable plating bath for the parts, causes the
part 130 a to move along points of contact made between the innercurved surface 14 h of the notch inspring arm 14 d and thecorners 130 h and 130 i ofpart 130 a. Thecorners 130 h and 130 i are where theside edge 130 f ofpart 130 a meets at right angles with the opposingmajor faces 130 j and 130 k of thepart 130 a. - The part movement made at the points of contact limited to the corners of
part 130 a occur in a limited predictable fashion within the respective retention notches 14 i of thespring member 140 a, and so forth, dedicated to each respective part to be plated. This movement occurs as a to-and-fro or rocking motion on the part corners, as indicated by the double arrow in FIG. 6. Also, the movement also involves slight relative lateral motion induced as between thepart 130 a and spring arm members by the plating bath turbulence, such as indicated in FIG. 5. - Referring again to FIG. 6, the other depicted spring member140 e shown can form part of a double armed spring member, such as described in connection with FIG. 4, or, alternatively, it could be a separate discrete spring member joined to a common bracket with
spring member 140 a using a common attachment means, such as described in connection with FIG. 5. - The limited to-and-fro and lateral movement, or “play,” provided at the notched portions of the spring arms described herein is sufficient to permit the plating fluid to flow and circulate over all the exterior surfaces of the plate to permit uniform complete plating to be provided without leaving scars, while still retaining the part sufficiently such that the part, or parts, being plated does not become inadvertently disengaged from the spring arm member and fall off the rack into the electroplating tank.
- In designing the spring arm members to provide the aforementioned dual retention/play functionality needed, the spring force needed is determined empirically for a given set of expected or specified plating conditions and that information is matched to the agitation/turbulence that will be encountered by the part during the electroplating procedure. By knowing the relative dimensions of the part to be plated, the bracket spacing, the plating conditions, and the general geometry of the spring arms to be used, one of ordinary skill in the art can determine by empirical experimentation in an electroplating tank the appropriate spring material, size and geometric specifics to attain the dual functionality needed.
- For instance, as discussed above, each spring arm to be used has one end to be fixed at a cross bracket of the rack, and one free end including first major turn or loop (see FIG. 6, feature14 m), to create bias toward the part or workpiece, as applicable thereto through the notch (14 i) located closer to the distal end (14 f), as shown in several of the included figures). The spring arms generally are comprised of a discrete elongated piece of wire or rod (preferably circular in cross section) having a general geometry along the length thereof as mentioned above. In one embodiment, a series of different test rods or wires of various types and gauges of steel wire can be tested at a given loop dimension (imparted by mandrel for example) to check by trial and error whether the aforementioned dual functionality in the retention behavior is attained. During this regimen, refinements in the spring bias force of the spring arms, if necessary, after creating the loop via mandrel, can be manually induced by longitudinally extending or compressing the loop in the spring arm (e.g., longitudinally extending the loop to reduce the bias force).
- Once the appropriate spring arm geometry and size is identified and confirmed in this manner, electroplating production runs can be run using those springs members under the conditions used in the trials.
- After being put into service, further adjustments in the spring bias force of the spring arms can be made, if necessary, e.g., to offset any spring memory fatigue effects, by manually inducing longitudinal extension or compression of the loop in the spring arm (e.g., longitudinally compressing the loop to increase the bias force).
- In one implementation, mentioned above, the spring arms are provided as a pairing in a one-piece assembly fixedly attached to the bracket at the middle of the assembly, so that the pairing of springs engages a common side of a part, as shown in several of the figures. Alternatively, each spring member or arm can be a separate member attached to a bracket along with other separate springs by a common attachment means (e.g., a bolt). One, two or more spring members could be used at a time to engage a side of the part. Generally, a symmetry in spring members should be deployed over opposite side edges of a common part.
- The plate-shaped part to be plated using this invention includes side edges having a uniform thickness along the length of at least the top and bottom sides, and preferably all around the part. The bulk of the part generally has a uniform thickness, although some contour spaced from the edges can be included, such as to form lid seats if the part is a lid. The part generally has top and bottom side edges extending parallel to each other. The part can have any profile meeting these criteria and usually is a discrete rectangular-shaped wafer or slab of material.
- To create the relative movement between the part and plating fluids, the part can be plated in a electroplating process involving turbulence created in the plating fluid by by sparging of gas into the plating fluids in the plating tank, and the like; and/or by mechanical agitation or stirring means immersed in the working fluid, and the like; and/or due to constant flow movement of the working fluid caused by continuous circulation of the electrolyte solution out and back into the plating tank by pumping such as for additional purposes of filtering and replenishment, and the like. In a preferred embodiment, the relative movement between the part and working fluid is created by sparging of gas (e.g., air) conducted at a location in the tank fluids below the loaded plating racks in combination with the constant flow movement of the working fluid caused by continuous circulation of the electrolyte solution (i.e., the working fluid) out and back into the plating tank via manifolds in the tank walls using pumps.
- Turbulent electroplating systems using mechanical agitation means are described, for example, in U.S. Pat. No. 4,686,014, which teachings are incorporated herein by reference. Again, the plating racks of this invention generally contemplate applicability in plating procedures, such as electroplating procedures, involving agitation or stirring and the like of the electrolyte or other applicable plating solution in the tank.
- A non-limiting, illustrative example of a suitable plating frame and a spring arm construction, are as follows.
- Spring (arm) member:
- The spring arm material can be, for example, tempered, stress-relieved stainless spring steel, such as 302 or 304 stainless steel. As one non-limiting illustration, the spring arm diameter is 0.030 inch; the steel has an ASTM A313 tensile strength of 250-325 KPSI; the spring arm loop (see FIG. 6, feature14 m) has a loop radius of a 0.25 inch mandrel. The spring arm retention notch 14 i has a radius of curvature imparted effective to make point contact at each of two corner edges of the part to be plated (top or bottom as applicable); used with an air vise.
- FIG. 7 shows a spring member (14 a, 14 e) according to one preferred, non-limiting embodiment having dimensions providing the appropriate biasing forces and part retaining functionality described herein for that component. For this non-limiting illustrative embodiment, Y is an angle of 110°, X is an angle of 40°, Z is an angle of 79°, U is an angle of 29°, the dimension “a” is 1.930 inches (49.0 mm), and the radius of curvature R is 0.140 mm. The radius of curvature of the intermediary loop or crimp 14 j can vary depending, for example, on the size of bolt attachment means.
- Frame:
- The frame material can be stainless steel, such as 302 or 304 stainless steel, or other material resistant to corrosion or chemical attack from the plating fluid. The attachment means for fixing the spring arm to the frame can be threaded steel bolt used with a counter-threaded washer used on backside of the bracket.
- Part(s) for Plating:
- A part to be plated having a thickness as small as approximately 0.125 inch or even less can be releasably retained by the inventive plating rack and spring fixtures components thereof described herein.
- Racking and Unracking of Plating Parts:
- Referring to FIGS. 8A and 8B, steps of a method are shown for racking parts using a plating rack in accordance with one aspect of the invention. In FIG. 8A, the spring members140 a-140 d, and so forth, needed to retain parts to be plated have been attached to
brackets 120 and 120 b using bolts 150A and 150B. As one non-limiting example, to install parts on the attached spring members, such as shown in FIG. 8B, the bottom of eachpart 130 a and 130 b, and so forth, is tilted backwards relative to the top of the part such that the side edge of the part at the bottom can be placed in the upward facing notches of the spring members located immediately below the part. Then the top of the part is tilted back until guided into the downward facing notches of the spring members located immediately above the part. To unrack the parts after completing a plating procedure, for example, the rack is removed from the plating tank and the rack of plated parts is set down horizontally on a flat surface or tray, which preferably is lined with clean plastic. The rack preferably is positioned on the flat surface such that the curves of the spring members face upward. To release the parts, from the spring members, the parts can be gently pressed downward relative to one set of gripping spring members, such as manually or mechanically, until the spring members release from the opposite set of gripping spring members. - In one exemplary implementation, the plated racks of the present invention can be used in the fabrication of nickel-plated copper heat sink parts for microelectronic parts to ensure the parts are uniformly and completely plated on every exposed surface, including the side edge faces. This preferably, but not exclusively, is an electroplating procedure.
- While the invention has been described in terms of preferred embodiments, those skilled in the art will recognize that the invention can be practiced with modification within the spirit and scope of the appended claims.
- For instance, while this invention has been illustrated as being applicable to fixturing parts for electroplating processes, it will be understood that the plating rack of the invention also has usefulness in other types of plate coating processes involving turbulent/agitated/stirred plating fluids.
- Benefits, other advantages, and solutions to problems have been described above with regard to specific embodiments. However, the benefits, advantages, solutions to problems, and any element(s) that may cause any benefit, advantage, or solution to occur or become more pronounced are not to be construed as a critical, required, or essential features or elements of any or all the claims. As used herein, the terms “comprises,” “comprising,” “includes”, “including”, “having”, or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Claims (20)
1. A plating rack, comprising:
a rack comprising a frame including at least first and second spaced-apart brackets;
spring members associated with each of the brackets and adapted to hold plate-shaped parts having first and second major surfaces and first and second opposite side edges extending generally perpendicular to said first and second major surfaces and forming corners where the side edges intersect with the first and second major surfaces, and at least one of the spring members extends from each of the brackets to each of the opposite side edges of a plate-shaped part when the plate-shaped part is located between the brackets, and wherein the spring members each include a first portion attached to a bracket and a free end spring biased toward a nearest one of the side edges of the plate-shaped part when positioned between the brackets, wherein the spring members include retaining means for exerting a spring biasing force against the respective corners of the plate-shaped part effective to permit the plate-shaped part to be retained by the spring members from the opposite side edges of the part while permitting the part to move when immersed in an agitated electroplating fluid bath such that plating occurs on the first and second major surfaces and the opposite side edges of the part.
2. The plating rack according to claim 1 , wherein said retaining means being located proximate a free end of each spring member and includes a curved portion having an inner surface defining a notch and adapted to bear against a corner of the plate-shaped part when the part is positioned between the brackets.
3. The plating rack according to claim 1 , wherein the curved portions of the free ends of the spring members are adapted to revolve around, while in contact with, the contacted corners, and move transversely along the corners in a direction parallel to the brackets, when the part is immersed in an agitated electroplating fluid bath.
4. The plating rack according to claim 1 , wherein a plurality of said spring members extend from each of the first and second brackets to the respective nearest sides of the plate-shaped part located therebetween.
5. The plating rack according to claim 1 , further comprising a plurality of plate-shaped parts retained on the rack.
6. The plating rack according to claim 1 , further comprising a third bracket in which the first, second and third brackets are spaced apart in that order, and including a plurality of spring members each of which include (a) an intermediate portion along a longitudinal length of the respective spring members and the intermediate portion is attached to said second bracket, and (b) first and second opposite free ends extending in opposite directions from the intermediate portion towards the respective first and third brackets, wherein the spring members attached to the second bracket being adapted to be both (i) spring biased toward a nearest side edge of a first plate-shaped part when positioned between the first and second brackets wherein the first free end of each spring member includes a curved portion having an inner surface defining a notch and being adapted to bear against a corner of the first plate-shaped part when positioned between the first and second brackets, and (ii) spring biased toward a nearest side edge of a second plate-shaped part when positioned between the third and second brackets wherein the second free end of each spring member includes a curved portion having an inner surface defining a notch and being adapted to bear against a corner of the second plate-shaped part when positioned between the third and second brackets.
7. A process for plating plate-shaped parts, comprising:
providing a rack comprising a frame including at least first and second spaced-apart brackets, and at least one spring member extending from each of the brackets such that spring members are extending to opposite side edges of a plate-shaped part located between the brackets, wherein the plate-shaped part has first and second major surfaces and first and second opposite side edges extending generally perpendicular to said first and second major surfaces and forming corners where intersecting with the first and second major surfaces, in which the spring members include a portion adapted to be attachable to a bracket and a free end adapted to be spring biased toward a nearest side edge of a plate-shaped part located between the brackets wherein the free end of each spring member includes a retaining means for bearing against a corner of the plate-shaped part;
providing a spring biasing force for the spring members that is effective to permit the plate-shaped part to be retained by the spring members from the opposite side edges of the part while additionally permitting limited movement of the part in an agitated electroplating fluid bath to permit plating to occur on the first and second major surfaces and the opposite side edges of the part;
attaching the attachable end of at least one spring member having said spring biasing force to each of the frame brackets of the frame;
holding each said part from the opposite side edges thereof with the curved portions of the free ends of the spring members having the spring biasing force;
immersing the frame and retained parts into a plating fluid provided in a fluid holding container;
agitating the plating fluid including where located adjacent the plate-shaped part, wherein said plating fluid flows over the major surfaces, side edges and corners of the plate.
8. The process according to claim 7 , wherein, during the agitating, the curved portions of the free ends of the spring members revolve around, while in contact with, the contacted corners without disengaging the part from the retaining means.
9. The process according to claim 7 , wherein, during the agitating, the curved portions of the free ends of the spring members, move transversely along the corners in a direction parallel to the brackets without disengaging the part from the retaining means.
10. The process according to claim 7 , wherein said retaining means being selected as including a curved portion having an inner surface defining a notch and adapted to bear against a corner of the plate-shaped part when positioned between the brackets.
11. The process according to claim 7 , wherein the agitating comprises mechanically agitating the plating fluid.
12. The process according to claim 7 , wherein the agitating comprises creating turbulence by sparging the plating fluid.
13. The process according to claim 7 , further comprising agitating plating fluid at a position adjacent the plate-shaped part by pumping plating fluid out of the fluid holding container and through a recirculation means including in-line filtering means before reintroducing the filtered plating fluid back into the container.
14. The process according to claim 7 , further comprising providing the plating fluid as a solution containing electroplating fluid.
15. The process according to claim 7 , further comprising providing the plating fluid as a solution containing electroplating fluid comprising an electrolyte.
16. The process according to claim 7 , further comprising providing the plating fluid as a solution containing electroless plating fluid.
17. The process according to claim 7 , wherein at least two of said spring members extend from each of the brackets to each of the opposite sides of the plate-shaped part.
18. The process according to claim 7 , wherein the plate-shaped part being selected as a metal plate having a square or rectangular shape.
19. The process according to claim 7 , further comprising providing a third bracket in which the first, second and third brackets are spaced apart in that order, and including a plurality of spring members each of which include (a) an intermediate portion along a longitudinal length of the respective spring members and the intermediate portion is attached to said second bracket and (b) first and second opposite free ends extending in opposite directions from the intermediate portion towards the respective first and third brackets, wherein the spring members attached to the second bracket are both (i) spring biased toward a nearest side edge of a first plate-shaped part positioned between the first and second brackets wherein the first free end of each spring member includes a curved portion having an inner surface defining a notch that bears against a corner of the first plate-shaped part positioned between the first and second brackets, and (ii) spring biased toward a nearest side edge of a second plate-shaped part positioned between the third and second brackets wherein the second free end of each spring member includes a curved portion having an inner surface defining a notch that bears against a corner of the second plate-shaped part positioned between the third and second brackets.
20. The process according to claim 7 , further comprising retaining a plurality of plate-shaped parts on the rack.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/061,157 US20020112954A1 (en) | 2001-02-16 | 2002-02-04 | Plating rack for plating procedures and processes for making and using same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US26886401P | 2001-02-16 | 2001-02-16 | |
US10/061,157 US20020112954A1 (en) | 2001-02-16 | 2002-02-04 | Plating rack for plating procedures and processes for making and using same |
Publications (1)
Publication Number | Publication Date |
---|---|
US20020112954A1 true US20020112954A1 (en) | 2002-08-22 |
Family
ID=26740788
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/061,157 Abandoned US20020112954A1 (en) | 2001-02-16 | 2002-02-04 | Plating rack for plating procedures and processes for making and using same |
Country Status (1)
Country | Link |
---|---|
US (1) | US20020112954A1 (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050145486A1 (en) * | 2004-01-07 | 2005-07-07 | Chung-Ho Chen | Clipping device of an electroplating base plate |
US20050248858A1 (en) * | 2002-10-19 | 2005-11-10 | Carl Zeiss Smt Ag | Device for holding a beam splitter element |
US20070187233A1 (en) * | 2006-02-15 | 2007-08-16 | International Business Machines Corporation | Universal plating fixture |
US20090238958A1 (en) * | 2008-03-20 | 2009-09-24 | Nishant Sinha | Methods of Forming Electrically Conductive Structures |
CN106283170A (en) * | 2016-08-29 | 2017-01-04 | 中航动力股份有限公司 | A kind of low-pressure turbine dish blue anodic attack auxiliary device |
CN106757289A (en) * | 2016-12-23 | 2017-05-31 | 贵州黎阳航空动力有限公司 | A kind of fixture and electro-plating method for improving electronickelling coating uniformity and uniformity |
US10960418B2 (en) * | 2019-01-03 | 2021-03-30 | Production Plus Corp. | Cross bar for powder coating and electronic coating |
US11380557B2 (en) * | 2017-06-05 | 2022-07-05 | Applied Materials, Inc. | Apparatus and method for gas delivery in semiconductor process chambers |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1749953A (en) * | 1928-11-27 | 1930-03-11 | Chromeplate Inc | Rack or hanger for articles to be plated |
US3970540A (en) * | 1975-03-26 | 1976-07-20 | The Mitchell-Bate Company | Clamping device for use in electroplating |
US4899966A (en) * | 1988-11-10 | 1990-02-13 | The Boeing Company | Rack clip for anodizing and painting |
-
2002
- 2002-02-04 US US10/061,157 patent/US20020112954A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1749953A (en) * | 1928-11-27 | 1930-03-11 | Chromeplate Inc | Rack or hanger for articles to be plated |
US3970540A (en) * | 1975-03-26 | 1976-07-20 | The Mitchell-Bate Company | Clamping device for use in electroplating |
US4899966A (en) * | 1988-11-10 | 1990-02-13 | The Boeing Company | Rack clip for anodizing and painting |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050248858A1 (en) * | 2002-10-19 | 2005-11-10 | Carl Zeiss Smt Ag | Device for holding a beam splitter element |
US7079331B2 (en) | 2002-10-19 | 2006-07-18 | Carl Zeiss Smt Ag | Device for holding a beam splitter element |
US20050145486A1 (en) * | 2004-01-07 | 2005-07-07 | Chung-Ho Chen | Clipping device of an electroplating base plate |
US20070187233A1 (en) * | 2006-02-15 | 2007-08-16 | International Business Machines Corporation | Universal plating fixture |
US20110212260A1 (en) * | 2008-03-20 | 2011-09-01 | Micron Technology, Inc. | Methods Of Forming Electrically Conductive Structures |
US7951414B2 (en) * | 2008-03-20 | 2011-05-31 | Micron Technology, Inc. | Methods of forming electrically conductive structures |
US20090238958A1 (en) * | 2008-03-20 | 2009-09-24 | Nishant Sinha | Methods of Forming Electrically Conductive Structures |
US8431184B2 (en) | 2008-03-20 | 2013-04-30 | Micron Technology, Inc. | Methods of forming electrically conductive structures |
CN106283170A (en) * | 2016-08-29 | 2017-01-04 | 中航动力股份有限公司 | A kind of low-pressure turbine dish blue anodic attack auxiliary device |
CN106757289A (en) * | 2016-12-23 | 2017-05-31 | 贵州黎阳航空动力有限公司 | A kind of fixture and electro-plating method for improving electronickelling coating uniformity and uniformity |
US11380557B2 (en) * | 2017-06-05 | 2022-07-05 | Applied Materials, Inc. | Apparatus and method for gas delivery in semiconductor process chambers |
US10960418B2 (en) * | 2019-01-03 | 2021-03-30 | Production Plus Corp. | Cross bar for powder coating and electronic coating |
USD987585S1 (en) | 2019-01-03 | 2023-05-30 | Production Plus Corp. | Cross bar for powder coating and electronic coating |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20020112954A1 (en) | Plating rack for plating procedures and processes for making and using same | |
US10669643B2 (en) | Clamper and holding jig including same | |
KR100924569B1 (en) | Racks for Automobile Wheel Nut Plating | |
EP2162569B1 (en) | Vertical system for the plating treatment of a work piece and method for conveying the work piece | |
JP6574475B2 (en) | Magazine device for holding glass articles during processing | |
US20030098047A1 (en) | Semiconductor wafer cleaning systems and methods | |
JP6448494B2 (en) | Suction plating equipment | |
KR20190002993U (en) | Carrier tray for film coating, silicon chip carrier device and silicon chip conveying system | |
KR102751660B1 (en) | Substrate holder | |
CN110940250A (en) | Assembled pipe fitting checking fixture | |
JPH0855895A (en) | Wafer carrier | |
US20180290841A1 (en) | System for transferring components of different designs | |
CN101300376A (en) | Device for the surface treatment of workpieces | |
WO2020105524A1 (en) | Jig conveyance member and surface treatment apparatus and method | |
KR20170099919A (en) | Galvanic plating device of a horizontal galvanic plating processing line for galvanic metal deposition and use thereof | |
JP2004217954A (en) | Plating tool | |
CN213570702U (en) | Loading equipment for surface anti-corrosion treatment of anchor chains | |
JPH0437661Y2 (en) | ||
US20050051083A1 (en) | Apparatus for carrying reticles and method of using the same to process reticles | |
CN222175867U (en) | Bracket and sand core components | |
KR101549091B1 (en) | Apparatus For Continuous Zinc Flake Coating | |
CN216712290U (en) | Anchor clamps and battery piece transmission device | |
US20010042726A1 (en) | Cassette carrier for wafer cleaning processes | |
CN219508018U (en) | Sheet clamping device | |
CN219930315U (en) | Automatic electrodeposition production system |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: ASSOCIATED PLATING CO., CALIFORNIA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:EVANS, MICHAEL W.;REEL/FRAME:012558/0753 Effective date: 20020131 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |