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US20010041456A1 - Semiconductor device production method - Google Patents

Semiconductor device production method Download PDF

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Publication number
US20010041456A1
US20010041456A1 US09/551,780 US55178000A US2001041456A1 US 20010041456 A1 US20010041456 A1 US 20010041456A1 US 55178000 A US55178000 A US 55178000A US 2001041456 A1 US2001041456 A1 US 2001041456A1
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Prior art keywords
photoresist
semiconductor substrate
peripheral region
production method
device production
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US09/551,780
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US6331489B2 (en
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Takahiro Sasaki
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NEC Electronics Corp
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G03F7/2026—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure for the removal of unwanted material, e.g. image or background correction
    • G03F7/2028—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure for the removal of unwanted material, e.g. image or background correction of an edge bead on wafers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/32—Liquid compositions therefor, e.g. developers

Definitions

  • the present invention relates to a semiconductor device production method and in particular, to a semiconductor device production method which can preferably be used for a photoresist pattern formation.
  • a photoresist pattern is formed by a photolithography procedure shown in FIG. 3 and after this, various post-treatments are performed.
  • the photolithography procedure includes: pre-treatment (S 100 ); photoresist application onto a semiconductor substrate (S 101 ) which has been subjected to the pretreatment; an exposure step (S 102 ) for exposing a circuit pattern such as a semiconductor integrated circuit, onto the semiconductor substrate having the photoresist; and a developing step (S 103 ) for developing the semiconductor substrate having the circuit pattern exposed.
  • a semiconductor substrate 1 is divided into a circuit pattern area 2 and a non-circuit pattern area 3 , i.e., a photoresist remaining area where the photoresist film is to remain so as not to be exposed to light. Only the circuit pattern area 2 is exposed to light and after this the entire semiconductor substrate 1 is developed to form the circuit pattern.
  • a semiconductor device production method in which photoresist is applied to the entire surface of a semiconductor substrate and patterning is performed only on a region excluding a peripheral region of the semiconductor substrate, leaving the photoresist on a peripheral region of the semiconductor substrate, wherein when exposing the photoresist, a predetermined light quantity is applied to the peripheral region, so that the photoresist on the peripheral region will not be removed completely by development.
  • a semiconductor device production method in which photoresist is applied to the entire surface of a semiconductor substrate and patterning is performed only on a region region excluding a peripheral region of the semiconductor substrate, leaving the photoresist on a peripheral region of the semiconductor substrate, after which a wet etching is performed using an etching solution, wherein when exposing the photoresist, a predetermined light quantity is applied to the peripheral region, so that the photoresist on the peripheral region will not be removed completely by development, thus making a surface of the photoresist on the peripheral region hydrophilic so as to improve wettability of the etching solution.
  • FIG. 1 schematically shows a step of a semiconductor device production method according to an embodiment: a plan view showing a developing solution applied on a semiconductor substrate having photoresist; a cross sectional view; and a graph showing a circuit pattern dimension on the semiconductor substrate surface.
  • FIG. 2 is a plan view of a circuit pattern dimension measurement row.
  • FIG. 3 is a flowchart showing a photoresist pattern formation procedure.
  • FIG. 4 schematically shows a step of a conventional semiconductor device production method: a plan view showing a developing solution applied on a semiconductor substrate having photoresist; a cross sectional view; and a graph showing a circuit pattern dimension on the semiconductor substrate surface.
  • the semiconductor device production method is realized as follows.
  • the entire surface of a semiconductor surface is coated with photoresist and subjected to baking.
  • the circuit pattern area ( 2 in FIG. 1) at the center of the semiconductor substrate is subjected to a normal exposure, and the photoresist remaining region ( 3 in FIG. 1) is subjected to a weaker light so that the photoresist will not be removed completely in the development step of a later stage and the photoresist surface of this area is made hydrophilic, thus improving wettability for a developing solution.
  • the developing solution can be uniformly placed on the semiconductor substrate, thus enabling to reduce irregularities of the circuit pattern dimensions due to uneven development.
  • FIG. 1 includes a plan view and a cross sectional view of a semiconductor substrate covered with a developing solution, and a graph showing circuit pattern dimensions on the semiconductor substrate.
  • FIG. 2 shows a circuit pattern dimension measurement place.
  • FIG. 3 is a flowchart showing an ordinary photoresist pattern formation procedure.
  • the photoresist pattern formation procedure includes: a pre-treatment (S 100 ) of a semiconductor substrate; a photoresist coating and baking step (S 101 ) for applying a predetermined thickness of photoresist onto the semiconductor substrate and baking the semiconductor substrate coated with the photoresist; an exposure step (S 102 ) for exposing a circuit pattern such as a semiconductor integrated circuit by using an exposure apparatus, onto a predetermined area of the semiconductor substrate coated with the photoresist; a development step (S 103 ) for developing the circuit pattern exposed on the semiconductor substrate; and a subsequent step (S 104 ) for using the photoresist pattern for etching, ion injection, or the like.
  • the exposure step light of weak exposure energy is applied to the non-circuit area (photoresist remaining area), so that the photoresist film will not melt completely in the development step S 103 .
  • the subsequent step is dry etching
  • light of weak exposure energy is applied to the non-circuit area (photoresist remaining area) so that a photoresist film will remain after the dry etching.
  • the water or the developing solution 5 is not expelled by the non-circuit area and spreads uniformly over the semiconductor substrate 1 .
  • This effect is not to be limited to the water or the developing solution 5 .
  • the subsequent step S 104 is a wet etching step using a water soluble etching solution
  • the etching solution can be uniformly spread over the semiconductor substrate 1 .
  • the etching reaction can be uniformly controlled over the semiconductor substrate 1 , enabling to obtain a uniform etching processing.
  • a weak light is applied to the non-circuit area (photoresist remaining area) at the periphery of the semiconductor substrate, so that the non-circuit area becomes hydrophilic by a chemical reaction, thus enabling to uniformly spread an aqueous solution such as a developing solution and an etching solution over the semiconductor substrate. This results in uniform dimensions of a circuit pattern formed on the semiconductor substrate.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

An entire surface of a semiconductor substrate is coated with photoresist and baked. A circuit pattern area (2 in FIG. 1) in the region excluding a peripheral region of the semiconductor substrate is subjected to normal exposure while a non-circuit area (photoresist remaining area ) in the peripheral region of the semiconductor substrate is subjected to a weak light so that the photoresist will not be removed completely during a development step and the remaining photoresist will have a hydrophilic surface. This improves wettability against a developing solution, enabling to apply the developing solution uniformly over the semiconductor substrate surface. This in turn reduces irregularities of circuit pattern dimensions due to uneven development.

Description

    BACKGROUND OF THE INVENTION
  • 1. Field of the Invention [0001]
  • The present invention relates to a semiconductor device production method and in particular, to a semiconductor device production method which can preferably be used for a photoresist pattern formation. [0002]
  • 2. Description of the Related Art [0003]
  • In general, when forming a circuit pattern such as a semiconductor integrated circuit on a semiconductor substrate, a photoresist pattern is formed by a photolithography procedure shown in FIG. 3 and after this, various post-treatments are performed. The photolithography procedure includes: pre-treatment (S[0004] 100); photoresist application onto a semiconductor substrate (S101) which has been subjected to the pretreatment; an exposure step (S102) for exposing a circuit pattern such as a semiconductor integrated circuit, onto the semiconductor substrate having the photoresist; and a developing step (S103) for developing the semiconductor substrate having the circuit pattern exposed.
  • Conventionally, a [0005] semiconductor substrate 1 is divided into a circuit pattern area 2 and a non-circuit pattern area 3, i.e., a photoresist remaining area where the photoresist film is to remain so as not to be exposed to light. Only the circuit pattern area 2 is exposed to light and after this the entire semiconductor substrate 1 is developed to form the circuit pattern.
  • However, when the aforementioned photolithography uses a chemically amplified photoresist, in the [0006] circuit pattern area 2, acid generated by exposure de-protects a protection group of the photoresist 4 and the surface of the photoresist 4 becomes hydrophilic while in a non-exposed area, i.e., the photoresist remaining area 3, the surface of the photoresist 4 remains hydrophobic. Accordingly, in the development step S103, as shown in FIG. 4, water or developing solution 5 is expelled by the photoresist remaining area 3 and gathered in the circuit pattern area 2.
  • As a result, the water or developing [0007] solution 5 is not uniformly placed on the circuit pattern area 2, which disables uniform development. Fluctuation of pattern dimensions of the circuit pattern area 2 at the pattern dimension measuring row 6 shown in FIG. 2 becomes greater toward the photoresist remaining area 3. That is, the uniformity of the pattern dimensions in the semiconductor substrate 1 becomes worse. This problem is also present in the wet etching processing when using an etching solution for wet-etching the semiconductor substrate 1 having a photoresist pattern formed.
    • SUMMARY OF THE INVENTION
  • It is therefore an object of the present invention to provide a semiconductor device production method for improving the dimension uniformity of a photoresist pattern formed on a semiconductor substrate so as to obtain uniformity of a processing such as a wet etching performed after the photoresist pattern formation. [0008]
  • According to an aspect of the present invention, there is provided a semiconductor device production method in which photoresist is applied to the entire surface of a semiconductor substrate and patterning is performed only on a region excluding a peripheral region of the semiconductor substrate, leaving the photoresist on a peripheral region of the semiconductor substrate, wherein when exposing the photoresist, a predetermined light quantity is applied to the peripheral region, so that the photoresist on the peripheral region will not be removed completely by development. [0009]
  • According to another aspect of the present invention, there is provided a semiconductor device production method in which photoresist is applied to the entire surface of a semiconductor substrate and patterning is performed only on a region region excluding a peripheral region of the semiconductor substrate, leaving the photoresist on a peripheral region of the semiconductor substrate, after which a wet etching is performed using an etching solution, wherein when exposing the photoresist, a predetermined light quantity is applied to the peripheral region, so that the photoresist on the peripheral region will not be removed completely by development, thus making a surface of the photoresist on the peripheral region hydrophilic so as to improve wettability of the etching solution.[0010]
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 schematically shows a step of a semiconductor device production method according to an embodiment: a plan view showing a developing solution applied on a semiconductor substrate having photoresist; a cross sectional view; and a graph showing a circuit pattern dimension on the semiconductor substrate surface. [0011]
  • FIG. 2 is a plan view of a circuit pattern dimension measurement row. [0012]
  • FIG. 3 is a flowchart showing a photoresist pattern formation procedure. [0013]
  • FIG. 4 schematically shows a step of a conventional semiconductor device production method: a plan view showing a developing solution applied on a semiconductor substrate having photoresist; a cross sectional view; and a graph showing a circuit pattern dimension on the semiconductor substrate surface.[0014]
    • DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • The semiconductor device production method according to a preferred embodiment of the present invention is realized as follows. The entire surface of a semiconductor surface is coated with photoresist and subjected to baking. Then, the circuit pattern area ([0015] 2 in FIG. 1) at the center of the semiconductor substrate is subjected to a normal exposure, and the photoresist remaining region (3 in FIG. 1) is subjected to a weaker light so that the photoresist will not be removed completely in the development step of a later stage and the photoresist surface of this area is made hydrophilic, thus improving wettability for a developing solution. Thus, the developing solution can be uniformly placed on the semiconductor substrate, thus enabling to reduce irregularities of the circuit pattern dimensions due to uneven development.
    • EXAMPLE
  • The aforementioned embodiment of the present invention will be further detailed with reference to FIG. 1 to FIG. 3. FIG. 1 includes a plan view and a cross sectional view of a semiconductor substrate covered with a developing solution, and a graph showing circuit pattern dimensions on the semiconductor substrate. Moreover, FIG. 2 shows a circuit pattern dimension measurement place. FIG. 3 is a flowchart showing an ordinary photoresist pattern formation procedure. [0016]
  • Firstly, referring to FIG. 3, an outline of the photoresist pattern formation procedure will be explained. The photoresist pattern formation procedure includes: a pre-treatment (S[0017] 100) of a semiconductor substrate; a photoresist coating and baking step (S101) for applying a predetermined thickness of photoresist onto the semiconductor substrate and baking the semiconductor substrate coated with the photoresist; an exposure step (S102) for exposing a circuit pattern such as a semiconductor integrated circuit by using an exposure apparatus, onto a predetermined area of the semiconductor substrate coated with the photoresist; a development step (S103) for developing the circuit pattern exposed on the semiconductor substrate; and a subsequent step (S104) for using the photoresist pattern for etching, ion injection, or the like.
  • According to the present embodiment, in the exposure step, light of weak exposure energy is applied to the non-circuit area (photoresist remaining area), so that the photoresist film will not melt completely in the development step S[0018] 103. Moreover, when the subsequent step is dry etching, light of weak exposure energy is applied to the non-circuit area (photoresist remaining area) so that a photoresist film will remain after the dry etching.
  • That is, a weak light is applied to the non-circuit area (photoresist remaining area) [0019] 3, so that acid is generated in the chemically amplified photoresist. The acid de-protects the protection group of the chemically amplified photoresist, so that the photoresist surface becomes hydrophilic. Thus, in the development step (S103), when water or developing solution 5 is applied onto the semiconductor substrate 1, the water or developing solution 5 spreads uniformly on the semiconductor substrate 1.
  • That is, the water or the developing [0020] solution 5 is not expelled by the non-circuit area and spreads uniformly over the semiconductor substrate 1. This improves uniformity of the circuit pattern dimensions in the circuit pattern area 2. This effect is not to be limited to the water or the developing solution 5. For example, if the subsequent step S104 is a wet etching step using a water soluble etching solution, the etching solution can be uniformly spread over the semiconductor substrate 1. Thus, the etching reaction can be uniformly controlled over the semiconductor substrate 1, enabling to obtain a uniform etching processing.
  • As has been described above, according to the present invention, a weak light is applied to the non-circuit area (photoresist remaining area) at the periphery of the semiconductor substrate, so that the non-circuit area becomes hydrophilic by a chemical reaction, thus enabling to uniformly spread an aqueous solution such as a developing solution and an etching solution over the semiconductor substrate. This results in uniform dimensions of a circuit pattern formed on the semiconductor substrate. [0021]
  • The invention may be embodied in other specific forms without departing from the spirit or essential characteristic thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. [0022]
  • The entire disclosure of Japanese Patent Application No. 11-113143 (Filed on Apr. 21, 1999) including specification, claims, drawings and summary are incorporated herein by reference in its entirety. [0023]

Claims (6)

What is claimed is:
1. A semiconductor device production method in which photoresist is applied to the entire surface of a semiconductor substrate and pattern formation is performed only on a region excluding a peripheral region of the semiconductor substrate, leaving the photoresist on the peripheral region of the semiconductor substrate,
wherein the photoresist on the peripheral region is subjected to a processing for making its surface hydrophilic.
2. A semiconductor device production method in which photoresist is applied to the entire surface of a semiconductor substrate and patterning is performed only on a region excluding a peripheral region of the semiconductor substrate, leaving the photoresist on a peripheral region of the semiconductor substrate,
wherein when exposing the photoresist, a predetermined light quantity is applied to the peripheral region, so that the photoresist on the peripheral region will not be removed completely by development.
3. A semiconductor device production method as claimed in
claim 2
, wherein the photoresist remaining on the peripheral region of the semiconductor substrate after development functions as a protection film during a processing after a photoresist pattern formation.
4. A semiconductor device production method in which photoresist is applied to the entire surface of a semiconductor substrate and patterning is performed only on a region excluding a peripheral region of the semiconductor substrate, leaving the photoresist on a peripheral region of the semiconductor substrate, after which a wet etching is performed using an etching solution,
wherein when exposing the photoresist, a predetermined light quantity is applied to the peripheral region, so that the photoresist on the peripheral region will not be removed completely by development, thus making a surface of the photoresist on the peripheral region hydrophilic so as to improve wettability of the etching solution.
5. A semiconductor device production method comprising steps of:
(a) coating an entire surface of a semiconductor substrate with a photoresist,
(b) performing exposure using a photo mask only to a region excluding a peripheral region of the semiconductor substrate,
(c) applying a predetermined light quantity to the peripheral region of the semiconductor substrate, so that the photoresist will not be removed completely by development, and
(d) developing the photoresist.
6. A semiconductor device production method, said method further comprising a step of:
(e) performing wet etching with an etching solution using the photoresist as a mask.
US09/551,780 1999-04-21 2000-04-18 Semiconductor device production method Expired - Fee Related US6331489B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP11-113143 1999-04-21
JP11314399A JP3353740B2 (en) 1999-04-21 1999-04-21 Method for manufacturing semiconductor device

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US20010041456A1 true US20010041456A1 (en) 2001-11-15
US6331489B2 US6331489B2 (en) 2001-12-18

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CN111799179A (en) * 2020-07-31 2020-10-20 武汉新芯集成电路制造有限公司 Method for forming semiconductor device

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KR100958702B1 (en) 2003-03-24 2010-05-18 삼성전자주식회사 Semiconductor process to remove defects caused by edge chips of semiconductor wafers
KR20050002359A (en) * 2003-06-30 2005-01-07 주식회사 하이닉스반도체 Method for Forming Pattern of Semiconductor Device
JP2005311024A (en) * 2004-04-21 2005-11-04 Matsushita Electric Ind Co Ltd Method for forming pattern
US7374866B2 (en) * 2004-10-08 2008-05-20 Texas Instruments Incorporated System and method for exposure of partial edge die
JP2008042019A (en) 2006-08-08 2008-02-21 Tokyo Electron Ltd Patterning method and device
JP5361498B2 (en) * 2009-04-01 2013-12-04 キヤノン株式会社 Inkjet head manufacturing method and inkjet head
JP5276559B2 (en) * 2009-09-24 2013-08-28 大日本スクリーン製造株式会社 Substrate processing method and substrate processing apparatus
JP6938260B2 (en) * 2017-07-20 2021-09-22 株式会社ディスコ Wafer grinding method
JP7221048B2 (en) * 2018-12-28 2023-02-13 株式会社Ｓｃｒｅｅｎホールディングス SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
CN110391135B (en) * 2019-08-08 2022-02-08 武汉新芯集成电路制造有限公司 Method for removing photoresist residue and method for manufacturing semiconductor device

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