TWI589414B - Tool calibration apparatus of robot manipulator - Google Patents

Description

Robotic tool calibration device

This case relates to a tool calibration device, and more particularly to a tool correction device for a robot arm.

With the advancement of industrial technology, a wide variety of robots have been extensively developed for use in life and industry. In general, the robotic arm is an important component of the robot, and the robotic arm assembles tools at its ends to perform the required tasks. For example, the tool can be a welding tool, a drilling tool, a gripping tool, an abrasive tool, or a cutting tool. The tool attached to the end of the robot arm needs to have a defined endpoint called Tool Center Point (hereinafter referred to as TCP). When the tool is placed at the end of the robot arm, the relative offset between the TCP of the tool and the End-Effect Point of the robot arm must be accurately obtained and preset. In other words, the size of the tool must be known when the robot is assembled with the tool, so that when the robot is working on the assembly tool, the robot can correct it based on the offset obtained, thereby enabling the tool to run on the correct path. And location.

Currently, in order to facilitate the TCP of the calibration tool, it can be implemented using a tool correction device. The conventional tool calibration device includes a frame and a plurality of infrared sensors. When the tool is assembled at the end of the robot arm, the tool calibration procedure is performed. First, the tool is moved toward the tool calibration device, and the tool point simulation and teaching program is performed, that is, the robot arm drives the tool to move in the space defined by the frame of the tool calibration device, and the tool calibration device is based on the TCP of the tool. Move to teach the point program and build a sample of this tool. In this way, when replacing the same type of tool, the tool calibration device can compare the amount of deviation generated before and after the tool is replaced, and the robot can compensate the correctness of the tool and complete the tool calibration procedure.

However, conventional tool correction devices with infrared sensors are quite expensive. In addition, when the tool mounted on the robot arm is replaced with the same type of tool, although the conventional tool correction device with the infrared sensor can obtain the relative offset between the TCP and the end effect point of the robot arm, When the tool mounted on the robot arm is replaced with a different type of tool, the conventional tool correction device with the infrared sensor does not correctly obtain the relative offset between the TCP and the end effect point of the robot arm. The correctness of tool correction with conventional tool calibration devices is reduced. In addition, the misalignment of the tool will cause the entire production line to shut down and waste material, time and cost.

Therefore, it is necessary to develop a tool correction device for a robot arm to solve the problems faced by the prior art.

The purpose of the present invention is to provide a tool correction device for a robot arm that is low in cost and modular to assemble. In addition, the tool calibration device of the present invention can correctly measure the relative offset between the TCP and the end effect point of the robot arm of the acquisition tool, whereby the robot can quickly compensate the correctness of the tool to ensure the tool's Correct operation position. Compared with the manual correction method, the tool calibration device of the present invention can not only save operation time, but also realize high-precision correction of the tool.

In order to achieve the above purpose, the present invention provides a tool calibration device for a robotic arm with a tool that moves the tool. The tool calibration device includes a base, an X-axis measuring device, a Y-axis measuring device, and a Z-axis measurement. Device. The base has a recess. The X-axis measuring device is disposed on the base and includes a first measuring board and a first sensor, wherein the first measuring board is axially moved on the X-axis, and the first sensor is driven by the tool A first displacement amount of the movement of the first measuring plate is sensed when a measuring plate moves. The Y-axis measuring device is disposed on the base and adjacent to one side of the X-axis measuring device, and includes a second measuring plate and a second sensor, wherein the second measuring plate is in the Y-axis axial direction Moving, and the second sensor senses a second displacement amount of movement of the second measuring plate when the tool drives the second measuring plate to move. The Z-axis measuring device is disposed in the recessed portion and has two adjacent sides respectively adjacent to the X-axis measuring device and the Y-axis measuring device, and includes a third measuring plate and a third sensor, wherein the third The measuring plate is axially moved in the Z axis, and the third sensor senses a third displacement amount of the movement of the third measuring plate when the tool drives the third measuring plate to move. Wherein, according to the tool, the first displacement amount, the second displacement amount and the third displacement amount obtained by the sensing are moved in the X-axis, the Y-axis and the Z-axis, so as to obtain information about the tool center point of the tool, and the tool center of the tool is performed. Point correction.

1, 1a, 1b, 1c, 1d: tool calibration device
10: base
101: Groove
101a: top surface
143a, 243a: first side wall surface
102: depression
102a: bottom surface
10a: X-axis measuring device
11: The first measuring board
11a: first sliding portion
11b: The first measuring part
11c: first side wall
111c: outer side
112c, 212c: inner side
12: First sensor
12a: first sensing slot
13: First linear orbit
13a: first side
13b: second side
14: first elastic element
14a: first spring
144a: first side wall surface
14b: first column
10b: Y-axis measuring device
21: The second measuring board
21a: second sliding portion
21b: second measuring part
21c: second side wall
22: second sensor
22a: second sensing slot
23: Second linear orbit
23a: first side
23b: second side
24: second elastic element
24a: second spring
24b: second column
10c: Z-axis measuring device
31: third measuring board
31a: third sliding portion
31b: Third measuring part
31c: third side wall
32: third sensor
32a: third sensing slot
33: Third linear orbit
34: third elastic element
34a: third spring
34b: third column
101c: first side
102c: second side
103c: top surface
103: Sensing space
2: Robotic arm
2a: end effect point
3: Tools
3a: connector
3b: Tool Center Point
S1-S6: Steps

Fig. 1A is a schematic structural view of the tool correcting device of the first embodiment of the present invention.
Fig. 1B is a side view showing the structure of the tool correcting device shown in Fig. 1A.
Fig. 2A is a schematic structural view of a tool correcting device applied to the present invention by a robot arm assembly tool.
Fig. 2B is a partial enlarged view of the structure shown in Fig. 2A.
Figure 3 is a flow chart of the operation of the robotic arm assembly tool applied to the tool calibration device.
Fig. 4A is a schematic structural view of the tool correcting device of the second embodiment of the present invention.
Fig. 4B is a side view showing the structure of the tool correcting device shown in Fig. 4A.
Fig. 5A is a schematic structural view of the tool correcting device of the third embodiment of the present invention.
Fig. 5B is a side view showing the structure of the tool correcting device shown in Fig. 5A.
Fig. 6A is a schematic structural view of the tool correcting device of the fourth embodiment of the present invention.
Fig. 6B is a side view showing the structure of the tool correcting device shown in Fig. 6A.
Fig. 7A is a schematic structural view of a correction device of the fifth embodiment of the present invention.
Fig. 7B is a side view showing the structure of the tool correcting device shown in Fig. 7A.

Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in the various aspects of the present invention, and the description and drawings are intended to be illustrative and not limiting.

1A is a schematic structural view of a tool calibration device according to a first embodiment of the present invention, FIG. 1B is a structural side view of the tool calibration device shown in FIG. 1A, and FIG. 2A is a machine arm assembly tool applied to the case. Schematic diagram of the tool calibration device (the robotic arm is selected from the Selective Compliance Assembly Robot Arm (SCARA), but not limited to this), and the 2B image is a partial enlarged view of the structure shown in Figure 2A. . As shown in Figs. 1A, 1B, 2A and 2B, the tool correcting device 1 of the present invention is for correcting the tool 3 assembled at the end of the robot arm 2 so that the robot arm 2 can secure the tool 3 when performing the required task. Operate in the right place. The tool calibration device 1 includes a base 10, an X-axis measuring device 10a, a Y-axis measuring device 10b, and a Z-axis measuring device 10c. The base 10 includes a plurality of groove portions 101 and a recess portion 102. The X-axis measuring device 10a and the Y-axis measuring device 10b are respectively disposed on the base 10, and the Z-axis measuring device 10c is disposed on the recessed portion 102 of the base 10, wherein one side of the X-axis measuring device 10a is One side of the Y-axis measuring device 10b is disposed adjacent to each other, and the X-axis measuring device 10a and the Y-axis measuring device 10b are respectively disposed adjacent to the first side 101c and the second side 102c of the Z-axis measuring device 10c. The top surface 103c of the Z-axis measuring device 10c is raised, whereby the X-axis measuring device 10a, the Y-axis measuring device 10b, and the Z-axis measuring device 10c are defined to form the sensing space 103.

The X-axis measuring device 10a includes a first measuring plate 11, a first sensor 12, a first linear track 13 and a first elastic member 14. In this embodiment, the first sensor 12 is adjacent to the first side 13a of the first linear track 13, and the first elastic element 14 is adjacent to the second side 13b of the first linear track 13. . The first measuring plate 11 includes a first sliding portion 11a, a first measuring portion 11b and a first side wall 11c. The first measuring portion 11b is disposed corresponding to the first sensor 12 for sensing the first measurement. The amount of displacement of the portion 11b. The first sensor 12 includes a first sensing slot 12a, and the first sensing slot 12a is disposed corresponding to the first measuring portion 11b of the first measuring board 11, thereby making the first measuring board 11 first. The measuring portion 11b can be moved in the first sensing slot 12a. In this way, the displacement of the first measuring portion 11b can be measured and acquired by the first sensor 12. Preferably, the first sensor 12 is a position sensor. The first linear track 13 is fixed to the top surface of the base 10, and the first sliding portion 11a of the first measuring plate 11 is coupled with the first linear track 13 whereby the first measuring plate 11 is slidable On the first linear track 13. The first elastic member 14 is disposed in the corresponding groove portion 101 of the base 10 and includes a first spring 14a and a first post 14b, wherein the first spring 14a is sleeved on the first post 14b, and the first spring 14a Corresponding to the first side wall 11c of the first measuring plate 11, in detail, one end of the first spring 14a abuts against the outer side surface 111c of the first side wall 11c, and the other end of the first spring 14a is abutted The first side wall surface 143a of the groove portion 101 is formed, whereby when the first side wall 11c of the first measuring plate 11 is applied to the first spring 14a, the first spring 14a is compressed and generates an elastic restoring force, so that The first measuring plate 11 moves back to the original position.

The Y-axis measuring device 10b includes a second measuring plate 21, a second sensor 22, a second linear track 23, and a second elastic member 24. In this embodiment, the second sensor 22 is adjacent to the first side 23a of the second linear track 23, and the second elastic element 24 is adjacent to the second side 23b of the second linear track 23. The second measuring plate 21 includes a second sliding portion 21a, a second measuring portion 21b and a second side wall 21c. The second measuring portion 21b is correspondingly disposed with the second sensor 22 for sensing the second measurement. The amount of displacement of the portion 21b. The second sensor 22 includes a second sensing slot 22a, and the second sensing slot 22a is disposed corresponding to the second measuring portion 21b of the second measuring board 21, thereby making the second measuring board 21 second. The measuring portion 21b can be moved in the second sensing slot 22a. In this way, the displacement of the second measuring portion 21b can be measured and acquired by the second sensor 22. Preferably, the second sensor 22 is a position sensor. The second linear track 23 is fixed to the top surface of the base 10, and the second sliding portion 21a of the second measuring plate 21 and the second linear track 23 cooperate with each other, whereby the second measuring plate 21 can slide to the second On the linear track 23. The second elastic member 24 is disposed in the corresponding groove portion 101 of the base 10 and includes a second spring 24a and a second column 24b, wherein the second spring 24a is sleeved on the second column 24b, and the second spring 24a Corresponding to the second side wall 21c of the second measuring plate 21, in detail, one end of the second spring 24a abuts against the outer side of the second side wall 21c (not shown), and the second spring 24a is another One end is abutted against the first side wall surface 243a of the groove portion 101, whereby when the second side wall 21c of the second measuring plate 21 is applied to the second spring 24a, the second spring 24a is compressed and generates elastic restoring force. In order to move the second measuring plate 21 back to the original position.

The Z-axis measuring device 10c includes a third measuring plate 31, a third sensor 32, a third linear track 33, and a third elastic member 34. The third measuring plate 31 includes a third sliding portion 31a, a third measuring portion 31b and a third side wall 31c. The third measuring portion 31b is disposed corresponding to the third sensor 32 for sensing the third measurement. The amount of displacement of the portion 31b. The third sensor 32 is disposed on the bottom surface 102a of the recess 102, and includes a third sensing slot 32a corresponding to the third measuring portion 31b of the third measuring board 31, thereby making the third measuring board The third measuring portion 31b of the third measuring portion 31b is movable in the third sensing groove 32a. Thus, the displacement amount of the third measuring portion 31b can be measured and obtained by the third sensor 32. Preferably, the third sensor 32 is a position sensor. The third linear track 33 is disposed adjacent to the side of the recess 102, and the third sliding portion 31a of the third measuring plate 31 and the third linear track 33 cooperate with each other, whereby the third measuring plate 31 can slide On the trilinear track 33. The third elastic member 34 is disposed on the bottom surface 102a of the recess portion 102 and includes a third spring 34a and a third post 34b. The third post 34b is vertically connected to the bottom surface 102a of the recess portion 102, wherein the third spring 34a is sleeved. In the third column 34b, and the third spring 34a is disposed corresponding to the third side wall 31c of the third measuring plate 31, in detail, one end of the third spring 34a is abutted against the side of the third side wall 31c, and the third The other end of the spring 34a is abutted against the bottom surface 102a of the recess 102, whereby the third spring 34a is compressed and elastic when the third side wall 31c of the third measuring plate 31 is applied to the third spring 34a. The restoring force is such that the third measuring plate 31 moves back to the original position.

The tool 3 includes a connecting end 3a and a tool center point 3b (ie, an end point), wherein the connecting end 3a is fixed and connected to the end effect point 2a of the robot arm 2, and the tool center point 3b of the tool 3 is movable to the X axis. The sensing space 103 formed by the measuring device 10a, the Y-axis measuring device 10b, and the Z-axis measuring device 10c, in other words, the robot arm 2 can drive the tool 3 to move the tool center point 3b into the sensing space 103.

The mode of operation of the tool correcting device 1 will be further described below. First, taking X-axis sensing as an example, when the robot arm 2 drives the tool 3 to move axially in the X-axis, the tool center point 3b of the tool 3 moves axially in the X-axis in the sensing space 103, and The position moves toward the first measuring plate 11. The tool 3 will touch the first measuring plate 11 and push the first measuring plate 11 to slide along the first linear track 13. At this time, the first side wall 11c of the first measuring plate 11 applies a force to the first spring 14a of the first elastic member 14, so that the first spring 14a generates an elastic restoring force, and the first amount of the first measuring plate 11 The measuring portion 11b is moved and placed into the first sensing slot 12a of the first sensor 12, so that the first sensor 12 can acquire the tool 3 according to the displacement amount of the first measuring portion 11b. The displacement parameter of the axial direction of the shaft, that is, the first displacement amount. Thereafter, the robot arm 2 drives the tool 3 to move in the opposite direction along the X-axis axial direction, so that the first measuring plate 11 is moved back to the original position due to the elastic restoring force of the first spring 14a.

Next, taking the Y-axis sensing as an example, when the robot arm 2 drives the tool 3 to move axially in the Y-axis, the tool center point 3b of the tool 3 moves axially in the sensing space 103 with the Y-axis, and The position moves toward the second measuring plate 21. The tool 3 will touch the second measuring plate 21 and push the second measuring plate 21 to slide along the second linear track 23. At this time, the second side wall 21c of the second measuring plate 21 applies a force to the second spring 24a of the second elastic member 24, so that the second spring 24a generates an elastic restoring force, and the second amount of the second measuring plate 21 The measuring portion 21b is moved and placed in the second sensing slot 22a of the second sensor 22, so that the second sensor 22 can acquire the tool 3 in the Y according to the displacement amount of the second measuring portion 21b. The displacement parameter of the axial direction of the shaft, that is, the second displacement amount. Thereafter, the robot arm 2 drives the tool 3 to move in opposite directions along the Y-axis axial direction, so that the second measuring plate 21 is moved back to the original position due to the elastic restoring force of the second spring 24a.

Further, taking Z-axis sensing as an example, when the robot arm 2 drives the tool 3 to move axially in the Z-axis, the tool center point 3b of the tool 3 moves axially in the sensing space 103 with the Z-axis, and The original position moves toward the third measuring plate 31. The tool 3 will touch the third measuring plate 31 and push the third measuring plate 31 to slide along the third linear track 33. At this time, the third side wall 31c of the third measuring plate 31 applies a force to the third spring 34a of the third elastic member 34, so that the third spring 34a generates an elastic restoring force, and the third amount of the third measuring plate 31 The measuring portion 31b is moved and placed into the third sensing slot 32a of the third sensor 32. In this way, the third sensor 32 can acquire the tool 3 according to the displacement amount of the third measuring portion 31b. The displacement parameter of the axial direction of the shaft, that is, the third displacement amount. Thereafter, the robot arm 2 drives the tool 3 to move in the opposite direction along the Z-axis axial direction, so that the third measuring plate 31 is moved back to the original position due to the elastic restoring force of the third spring 34a.

After the three-axis axial sensing of the X-axis, the Y-axis, and the Z-axis, the offset between the tool center point 3b of the tool 3 and the end effect point 2a of the robot arm 2 with respect to the XYZ space can be obtained. The robot arm 2 can perform tool accuracy compensation according to the offset control tool 3.

Figure 3 is a flow chart of the operation of the robotic arm assembly tool applied to the tool calibration device. First, the tool correcting device 1 is placed directly under the robot arm 2, and the distance parameter between the tool correcting device 1 and the robot arm 2 is obtained (step S1). Next, the tool 3 is assembled to the end of the robot arm 2, and the robot arm 2 is caused to move the tool 3 to the tool correcting device 1 so that the tool center point 3b of the tool 3 is located in the sensing space 103 (as in step S2). Then, the robot arm 2 drives the tool 3 to move axially in the X-axis, and the tool 3 touches and pushes the first measuring plate 11 to move, so that the first measuring portion 11b is moved into the first sensing slot 12a. After the first sensor 12 obtains the displacement parameter of the tool 3 in the X-axis direction (ie, the first displacement amount), and after the displacement parameter of the X-axis is obtained, the robot arm 2 drives the tool 3 along the X-axis to the opposite direction. The direction is moved to cause the first measuring plate 11 to move back to the original position (step S3). Then, the robot arm 2 drives the tool 3 to move axially in the Y-axis, and the tool 3 touches and pushes the second measuring plate 21 to move, so that the second measuring portion 21b is moved into the second sensing slot 22a. So that the second sensor 22 obtains the displacement parameter of the tool 3 in the Y-axis (ie, the second displacement amount), and after the displacement parameter in the Y-axis is obtained, the robot arm 2 drives the tool 3 along the Y-axis to the opposite The direction is moved to cause the second measuring plate 21 to move back to the original position (step S4). Then, the robot arm 2 drives the tool 3 to move axially in the Z axis, and the tool 3 touches and pushes the third measuring plate 31 to move, so that the third measuring portion 31b is moved into the third sensing slot 32a. After the third sensor 32 obtains the displacement parameter of the tool 3 in the Z-axis (ie, the third displacement amount), and after the displacement parameter of the Z-axis is obtained, the robot arm 2 drives the tool 3 along the Z-axis to reverse The direction is moved to cause the third measuring plate 31 to move back to the original position (step S5). Finally, after the three-axis axial sensing of the X-axis, the Y-axis, and the Z-axis, the offset between the tool center point 3b of the tool 3 and the end effect point 2a of the robot arm 2 with respect to the XYZ space can be obtained. The robot arm 2 can be made to perform tool accuracy compensation according to the offset amount control tool 3 (step S6).

It should be noted that the tool correction device 1 is not limited to the above embodiment. 4 to 7 show various possible variations of the tool correcting device 1 shown in Fig. 1 of the present invention, and in Figs. 4 to 7, similar to the structure and component characteristics of the tool correcting device 1 shown in Fig. 1. They are denoted by the same component symbols and will not be described later.

Fig. 4A is a structural schematic view of the tool correcting device of the second embodiment of the present invention, and Fig. 4B is a side view showing the structure of the tool correcting device shown in Fig. 4A. The first spring 14a and the second spring 24a of the tool correcting device 1a of the present embodiment are disposed at different positions than the tool correcting device 1 shown in Figs. 1A and 1B. One end of the first spring 14a is fixed to the first side wall surface 144a of the groove portion 101, and the other end of the first spring 14a is fixed to the inner side surface 112c of the first side wall 11c. When the first measuring plate 11 moves axially in the X-axis, the first side wall 11c of the first measuring plate 11 moves correspondingly, so that the first side wall 11c of the first measuring plate 11 is stretched. The first spring 14a causes the first spring 14a to generate an elastic restoring force, and the first measuring plate 11 can be moved back to the original position. Further, one end of the second spring 24a is fixed to the second side wall surface (not shown) of the groove portion 101, and the other end of the second spring 24a is fixed to the inner side surface 212c of the second side wall 21c. When the second measuring plate 21 moves axially in the Y-axis, the second side wall 21c of the second measuring plate 21 moves correspondingly, so that the second side wall 21c of the second measuring plate 21 is stretched. The second spring 24a causes the second spring 24a to generate an elastic restoring force, and the second measuring plate 21 can be moved back to the original position.

Fig. 5A is a structural schematic view of the tool correcting device of the third embodiment of the present invention, and Fig. 5B is a side view showing the structure of the tool correcting device shown in Fig. 5A. The base 10 of the tool correcting device 1b of the present embodiment does not have a corresponding groove portion 101, and the first elastic member 14 and the second elastic member are compared with the tool correcting device 1 shown in FIGS. 1A and 1B. The 24 series are respectively disposed on the top surface 101a of the base 10.

Fig. 6A is a structural schematic view of the tool correcting device of the fourth embodiment of the present invention, and Fig. 6B is a side view showing the structure of the tool correcting device shown in Fig. 6A. The base 10 of the tool correcting device 1c of the present embodiment also has no corresponding groove portion 101, and the first elastic member 14 and the second elastic member are the same as the tool correcting device 1 shown in FIGS. 1A and 1B. The 24 series are also respectively disposed on the top surface 101a of the base 10. In addition, the first sensor 12 is disposed on the second side 13b of the first linear track 13, and the first elastic element 14 is disposed on the first side 13a of the first linear track 13. In addition, the second sensor 22 is disposed on the second side 23b of the second linear track 23, and the second elastic member 24 is disposed on the first side 23a of the second linear track 23.

Fig. 7A is a structural schematic view of the tool correcting device of the fifth embodiment of the present invention, and Fig. 7B is a structural side view of the tool correcting device shown in Fig. 7A. Compared with the tool calibration device 1 shown in FIG. 1A and FIG. 1B, the tool calibration device 1d of the present embodiment uses different sensors, that is, the first sensor 12 and the first embodiment of the present embodiment. The second sensor 22 and the third sensor 32 can respectively use a contact switch, which differs from the sensor of the foregoing embodiment in that the first measuring portion 11b, the second measuring portion 21b or the third When the measuring unit 31b moves and touches the contact switch, the contact opening relationship can correspondingly sense the displacement amounts of the first measuring unit 11b, the second measuring unit 21b, and the third measuring unit 31b. Therefore, the contact switch and the sensor can also measure the displacement amounts of the first measuring portion 11b, the second measuring portion 21b, and the third measuring portion 31b.

In summary, the present invention provides a tool correction device for a robot arm, which is low in cost and modular in assembly. In addition, the tool calibration device of the present invention can correctly measure the relative offset between the TCP and the end effect point of the robot arm of the acquisition tool, whereby the robot can quickly compensate the correctness of the tool to ensure the tool's Correct operation position. Compared with the manual correction method, the tool calibration device of the present invention not only saves operation time, but also can realize high-precision correction of the tool.

This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application.

1: Tool calibration device
10: base
101: Groove
243a: first side wall surface
102: depression
102a: bottom surface
10a: X-axis measuring device
11: The first measuring board
11a: first sliding portion
11b: The first measuring part
11c: first side wall
12: First sensor
12a: first sensing slot
13: First linear orbit
13a: first side
13b: second side
14: first elastic element
10b: Y-axis measuring device
21: The second measuring board
21a: second sliding portion
21b: second measuring part
21c: second side wall
22: second sensor
22a: second sensing slot
23: Second linear orbit
23a: first side
23b: second side
24: second elastic element
24a: second spring
24b: second column
10c: Z-axis measuring device
32a: third sensing slot
33: Third linear orbit
101c: first side
102c: second side
103c: top surface
103: Sensing space

Claims (11)

A tool calibration device is applied to a robot arm having a tool, and the robot arm drives the tool to move. The tool calibration device comprises:
a base having a recess;
An X-axis measuring device is disposed on the base and includes a first measuring plate and a first sensor, wherein the first measuring plate is axially moved on the X axis, and the first feeling The detector senses a first displacement amount of movement of the first measuring plate when the tool drives the first measuring plate to move;
a Y-axis measuring device is disposed on the base and adjacent to one side of the X-axis measuring device, and includes a second measuring plate and a second sensor, wherein the second measuring device The plate is axially moved in the Y-axis, and the second sensor senses a second displacement amount of the movement of the second measuring plate when the tool drives the second measuring plate to move; and a Z-axis The measuring device is disposed on the recessed portion and has two adjacent sides respectively adjacent to the X-axis measuring device and the Y-axis measuring device, and includes a third measuring plate and a third sensor. The third measuring plate is axially moved in the Z axis, and the third sensor senses a third displacement of the third measuring plate when the tool drives the third measuring plate to move. the amount;
The first displacement amount, the second displacement amount, and the third displacement amount obtained by the sensing on the X axis, the Y axis, and the Z axis are obtained by the tool to obtain a tool center point of the tool. Information, the correction of the tool's center point for the tool. The tool calibration device of claim 1, wherein the X-axis measuring device further comprises a first linear track and a first elastic element, wherein the first linear track is for the first measuring plate Sliding, and the first elastic element generates an elastic restoring force when the tool drives the first measuring plate to move, wherein the Y-axis measuring device further comprises a second linear track and a second elastic element, the second a linear track for the second measuring plate to slide, and the second elastic element generates an elastic restoring force when the tool drives the second measuring plate to move, wherein the Z-axis measuring device further comprises a third linear track And a third elastic member for sliding the third measuring plate, and the third elastic member is configured to generate an elastic restoring force when the tool drives the third measuring plate to move. The tool calibration device of claim 2, wherein the first measuring plate comprises a first sliding portion that cooperates with the first linear track to slide the first measuring plate to the first a linear track, wherein the second measuring plate comprises a second sliding portion that cooperates with the second linear track to slide the second measuring plate on the second linear track, wherein the third measuring plate The measuring plate includes a third sliding portion that cooperates with the third linear track to slide the third measuring plate on the third linear track. The tool calibration device of claim 3, wherein the first measuring plate comprises a first measuring portion corresponding to the first sensor for sensing a displacement of the first measuring portion The second measuring device includes a second measuring portion corresponding to the second sensor for sensing a displacement amount of the second measuring portion, wherein the third measuring plate comprises a first The three measuring portion is disposed corresponding to the third sensor for sensing the displacement amount of the third measuring portion. The tool calibration device of claim 4, wherein the first sensor, the second sensor, and the third sensor are respectively a position sensor or a contact switch. The tool calibration device of claim 4, wherein the first sensor further comprises a first sensing slot corresponding to the first measuring portion, and the second sensor further comprises a second The sensing slot is disposed corresponding to the second measuring portion, and the third sensor includes a third sensing slot corresponding to the third measuring portion. The tool calibration device of claim 6, wherein the first measuring plate comprises a first sidewall opposite to the first elastic member, and the second measuring panel comprises a second sidewall and the second The elastic member abuts against the top, and the third measuring plate includes a third sidewall abutting the third elastic member. The tool calibration device of claim 7, wherein the first elastic component comprises a first spring and a first post, and the first spring is sleeved on the first post, wherein the second elastic The component includes a second spring and a second post, and the second spring is sleeved on the second post, wherein the third elastic component comprises a third spring and a third post, and the third spring sleeve Located in the third column. The tool calibration device of claim 8, wherein the first sensor is disposed on one side of the first linear track, and the first elastic element is disposed on the first linear track. The other side, wherein the second sensor is disposed on one side of the second linear track, and the second elastic element is disposed on the other side of the second linear track. The tool calibration device of claim 8, wherein the base comprises a plurality of groove portions, wherein the first elastic member and the second elastic member are disposed in the corresponding groove portion. The tool calibration device of claim 1, wherein the first measuring plate and the second measuring plate are respectively adjacent to the two adjacent sides of the third measuring plate, and the portion is higher a top surface of the third measuring board, wherein the first measuring board, the second measuring board and the third measuring board define a sensing space for the mechanical arm to drive the tool The tool center moves within the sensing space.