TWI339851B - Halogen gas discharge laser electrodes - Google Patents

Halogen gas discharge laser electrodes

Info

Publication number: TWI339851B
Authority: TW; Taiwan
Prior art keywords: gas discharge; halogen gas; discharge laser; laser electrodes; electrodes
Prior art date: 2003-07-29

Application number

TW093121901A

Other languages

Chinese (zh)

Other versions

TW200509178A (en

Inventor

Thomas D Steiger

Richard C Ujazdowski

Timothy S Dyer

Thomas P Duffey

Walter D Gillespie

Bryan G Moosman

Richard G Morton

Brian D Strate

Original Assignee

Cymer Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2003-07-29

Filing date

2004-07-22

Publication date

2011-04-01

2003-07-29 Priority claimed from US10/629,364 external-priority patent/US7132123B2/en

2003-09-26 Priority claimed from US10/672,182 external-priority patent/US7339973B2/en

2003-09-26 Priority claimed from US10/672,181 external-priority patent/US7095774B2/en

2003-09-26 Priority claimed from US10/672,722 external-priority patent/US7230965B2/en

2004-06-25 Priority claimed from US10/877,737 external-priority patent/US7301980B2/en

2004-07-22 Application filed by Cymer Inc filed Critical Cymer Inc

2005-03-01 Publication of TW200509178A publication Critical patent/TW200509178A/en

2011-04-01 Application granted granted Critical

2011-04-01 Publication of TWI339851B publication Critical patent/TWI339851B/en

Links

TW093121901A 2003-07-29 2004-07-22 Halogen gas discharge laser electrodes TWI339851B (en)

Applications Claiming Priority (5)

Application Number	Priority Date	Filing Date	Title
US10/629,364 US7132123B2 (en)	2000-06-09	2003-07-29	High rep-rate laser with improved electrodes
US10/672,182 US7339973B2 (en)	2001-09-13	2003-09-26	Electrodes for fluorine gas discharge lasers
US10/672,181 US7095774B2 (en)	2001-09-13	2003-09-26	Cathodes for fluorine gas discharge lasers
US10/672,722 US7230965B2 (en)	2001-02-01	2003-09-26	Anodes for fluorine gas discharge lasers
US10/877,737 US7301980B2 (en)	2002-03-22	2004-06-25	Halogen gas discharge laser electrodes

Publications (2)

Publication Number	Publication Date
TW200509178A TW200509178A (en)	2005-03-01
TWI339851B true TWI339851B (en)	2011-04-01

Family

ID=55855714

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW093121901A TWI339851B (en)	2003-07-29	2004-07-22	Halogen gas discharge laser electrodes

Country Status (1)

Country	Link
TW (1)	TWI339851B (en)

2004
- 2004-07-22 TW TW093121901A patent/TWI339851B/en not_active IP Right Cessation

Also Published As

Publication number	Publication date
TW200509178A (en)	2005-03-01

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Legal Events

Date	Code	Title	Description
2024-01-01	MM4A	Annulment or lapse of patent due to non-payment of fees