TWD223990S - Front opening wafer carrier - Google Patents
Front opening wafer carrier Download PDFInfo
- Publication number
- TWD223990S TWD223990S TW111301059F TW111301059F TWD223990S TW D223990 S TWD223990 S TW D223990S TW 111301059 F TW111301059 F TW 111301059F TW 111301059 F TW111301059 F TW 111301059F TW D223990 S TWD223990 S TW D223990S
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer carrier
- design
- open
- front opening
- opening wafer
- Prior art date
Links
- 235000012431 wafers Nutrition 0.000 abstract description 10
- 238000009792 diffusion process Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 230000000007 visual effect Effects 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 1
Images
Abstract
【物品用途】;本設計之前開式晶圓載具係用於在半導體製程中保護、運送並儲存晶圓的容器。;【設計說明】;本案創作之前開式晶圓載具係為一新穎獨特之設計，藉由獨特地設計的前開式晶圓載具，可顯現出先前技藝未曾有過的視覺效果。;使用狀態參考圖係顯示本設計之前開式晶圓載具插入有擴散管及其支撐件的形態。[Item Usage]; The open wafer carrier before this design is a container used to protect, transport and store wafers during the semiconductor manufacturing process. ;[Design Description];Before the creation of this project, the open-type wafer carrier was a novel and unique design. Through the uniquely designed front-opening wafer carrier, it can show visual effects that have never been seen in previous technologies. ;The reference picture of the use state shows the form of the open wafer carrier with the diffusion tube and its support inserted before this design.
Description
本設計之前開式晶圓載具係用於在半導體製程中保護、運送並儲存晶圓的容器。The open wafer carrier before this design is a container used to protect, transport and store wafers in semiconductor manufacturing process.
本案創作之前開式晶圓載具係為一新穎獨特之設計，藉由獨特地設計的前開式晶圓載具，可顯現出先前技藝未曾有過的視覺效果。The front-opening wafer carrier created in this case is a novel and unique design. With the uniquely designed front-opening wafer carrier, it can show visual effects that have never been seen before.
使用狀態參考圖係顯示本設計之前開式晶圓載具插入有擴散管及其支撐件的形態。The use state reference diagram shows the form of the open wafer carrier inserted with the diffusion tube and its support before this design.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW111301059F TWD223990S (en) | 2022-03-03 | 2022-03-03 | Front opening wafer carrier |
| JP2022017431F JP1734009S (en) | 2022-03-03 | 2022-08-16 | Front-opening wafer carrier |
| US29/850,241 USD1069741S1 (en) | 2022-03-03 | 2022-08-18 | Front opening unified pod |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW111301059F TWD223990S (en) | 2022-03-03 | 2022-03-03 | Front opening wafer carrier |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD223990S true TWD223990S (en) | 2023-03-01 |
Family
ID=84797035
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW111301059F TWD223990S (en) | 2022-03-03 | 2022-03-03 | Front opening wafer carrier |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD1069741S1 (en) |
| JP (1) | JP1734009S (en) |
| TW (1) | TWD223990S (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD223988S (en) * | 2022-03-03 | 2023-03-01 | 家登精密工業股份有限公司 | air box |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD214942S (en) | 2021-05-14 | 2021-10-21 | 日商日立全球先端科技股份有限公司 | Semiconductor substrate conveying device |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110005967A1 (en) * | 2008-01-13 | 2011-01-13 | Entegris, Inc. | Methods and apparatuses for large diameter wafer handling |
| JP6231012B2 (en) * | 2012-11-28 | 2017-11-15 | 信越ポリマー株式会社 | Substrate storage container |
| KR102219534B1 (en) * | 2013-04-26 | 2021-02-24 | 엔테그리스, 아이엔씨. | Wafer container with latching mechanism for large diameter wafers |
| KR101986924B1 (en) * | 2014-12-18 | 2019-06-07 | 엔테그리스, 아이엔씨. | Wafer container with shock condition protection |
| TWI579215B (en) * | 2016-10-07 | 2017-04-21 | 家登精密工業股份有限公司 | Vertical Fixing Transmission Box and Transmission Method Using the Same |
| JP6992240B2 (en) * | 2017-11-16 | 2022-01-13 | 信越ポリマー株式会社 | Board storage container |
| JP7313975B2 (en) * | 2019-08-27 | 2023-07-25 | 信越ポリマー株式会社 | Substrate storage container |
| WO2021234809A1 (en) * | 2020-05-19 | 2021-11-25 | ミライアル株式会社 | Substrate storage container |
| TWI817828B (en) * | 2022-08-11 | 2023-10-01 | 家登精密工業股份有限公司 | Substrate container with built-in negative pressure cavity |
| TW202421288A (en) * | 2022-09-19 | 2024-06-01 | 美商恩特葛瑞斯股份有限公司 | Substrate container systems and methods of purging a substrate container |
| TW202439510A (en) * | 2023-03-23 | 2024-10-01 | 家登精密工業股份有限公司 | Valve cover and substrate container using the same |
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2022
- 2022-03-03 TW TW111301059F patent/TWD223990S/en unknown
- 2022-08-16 JP JP2022017431F patent/JP1734009S/en active Active
- 2022-08-18 US US29/850,241 patent/USD1069741S1/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWD214942S (en) | 2021-05-14 | 2021-10-21 | 日商日立全球先端科技股份有限公司 | Semiconductor substrate conveying device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP1734009S (en) | 2023-01-10 |
| USD1069741S1 (en) | 2025-04-08 |
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