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TW200806816A - Crystalline chromium deposit - Google Patents

Crystalline chromium deposit Download PDF

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Publication number
TW200806816A
TW200806816A TW096111396A TW96111396A TW200806816A TW 200806816 A TW200806816 A TW 200806816A TW 096111396 A TW096111396 A TW 096111396A TW 96111396 A TW96111396 A TW 96111396A TW 200806816 A TW200806816 A TW 200806816A
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group
alkyl
chromium
deposit
crystalline
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TW096111396A
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Chinese (zh)
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TWI435957B (en
Inventor
Craig V Bishop
Agnes Rousseau
Zoltan Mathe
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Atotech Deutschland Gmbh
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/04Electroplating: Baths therefor from solutions of chromium
    • C25D3/10Electroplating: Baths therefor from solutions of chromium characterised by the organic bath constituents used
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/04Electroplating: Baths therefor from solutions of chromium
    • C25D3/06Electroplating: Baths therefor from solutions of chromium from solutions of trivalent chromium
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/18Electroplating using modulated, pulsed or reversing current
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/615Microstructure of the layers, e.g. mixed structure
    • C25D5/617Crystalline layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/615Microstructure of the layers, e.g. mixed structure
    • C25D5/619Amorphous layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/627Electroplating characterised by the visual appearance of the layers, e.g. colour, brightness or mat appearance
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D15/00Electrolytic or electrophoretic production of coatings containing embedded materials, e.g. particles, whiskers, wires
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00Stock material or miscellaneous articles
    • Y10S428/922Static electricity metal bleed-off metallic stock
    • Y10S428/9335Product by special process
    • Y10S428/934Electrical process
    • Y10S428/935Electroplating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771Transition metal-base component
    • Y10T428/12806Refractory [Group IVB, VB, or VIB] metal-base component
    • Y10T428/12826Group VIB metal-base component
    • Y10T428/12847Cr-base component

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

A crystalline chromium deposit having a lattice parameter of 2.8895 +/- 0.0025 Å, and an article including the crystalline chromium deposit. An article including a crystalline chromium deposit, wherein the crystalline chromium deposit has a {111} preferred orientation. A process for electrodepositing a crystalline chromium deposit on a substrate, including providing an electroplating bath comprising trivalent chromium and a source of divalent sulfur, and substantially free of hexavalent chromium; immersing a substrate in the electroplating bath; and applying an electrical current to deposit a crystalline chromium deposit on the substrate, wherein the chromium deposit is crystalline as deposited.

Description

200806816 九、發明說明: 【發明所屬之技術領域】 概s之,本發明係關於自三價鉻浴沉積之電沉積結晶 鉻、電沉積該等鉻沉積物之方法及具有該等施加於其之鉻 沉積物的物件。 【先前技術】 鉻電鍍開始於20世紀早期或1 9世紀後期且在耐磨及耐腐 蝕兩個方面提供優良功能性表面塗層。然而,在過去,此 優良塗層作為一種功能性塗層(與裝飾性塗層不同)僅自六 價鉻電鍍浴獲得。自六價鉻浴電沉積之鉻係以結晶形式沉 積,此係人們所高度期望的。非晶形鉻板毫無用處。用於 本技術中之化學品係以認為其致癌且有毒的六價鉻離子為 主。六價鉻鍍敷作業具有嚴格且若干環境限制。儘管工業 上已研發若干對六價鉻起作用以降低危害之方法,但工業 及學術上雙方皆已花費若干年來尋找適宜替代物。 考慮到鉻鑛敷之重要性及優勢,用於鉻鍍敷之最明顯替 代鉻來源係三價鉻。三價鉻鹽對健康及環境之危害較六價 鉻化合物更小。數年内已試驗及測試過若干不同的三價鉻 電沉積浴。然而,該等三價鉻浴皆未能成功製造與自六價 鉻電沉積方法所獲得者相當之可靠一致的鉻沉積物。 六價鉻極毒且受到三價鉻沒有的法規控制。關於六價鉻 暴露之最新OSHA準則係公開於79/0, 79/5,以200806816 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to a method for electrodepositing crystalline chromium from a trivalent chromium bath deposition, electrodepositing the chromium deposits, and having such a coating thereon Objects of chromium deposits. [Prior Art] Chromium plating began in the early 20th century or in the late 19th century and provided an excellent functional surface coating in both wear resistance and corrosion resistance. However, in the past, this excellent coating was obtained as a functional coating (unlike decorative coatings) only from hexavalent chromium plating baths. The chromium deposited from the hexavalent chromium bath is deposited in crystalline form, which is highly desirable. Amorphous chrome plates are useless. The chemicals used in the art are mainly hexavalent chromium ions which are considered to be carcinogenic and toxic. The hexavalent chromium plating operation has strict and several environmental restrictions. Although several methods have been developed in the industry to reduce hexavalent chromium to reduce hazards, both industrial and academic have spent several years looking for suitable alternatives. Considering the importance and advantages of chrome ore deposits, the most obvious alternative source for chromium plating is trivalent chromium. Trivalent chromium salts are less harmful to health and the environment than hexavalent chromium compounds. Several different trivalent chromium electrodeposition baths have been tested and tested over several years. However, none of these trivalent chromium baths have successfully produced chromium deposits that are as reliable as those obtained from the hexavalent chromium electrodeposition process. Hexavalent chromium is extremely toxic and is subject to regulations not controlled by trivalent chromium. The latest OSHA guidelines for hexavalent chromium exposure are published on 79/0, 79/5,

Occupational Exposure to Hexavalent Chromium; Final h/e中。在此準則中,將替代闡述為一種”理想(工程)控制 119773.doc 200806816 措施”及"應始終考慮利用較小危險替代物替換有毒材料 ^(Federal Register/VoL 719 No. S9/Tuesday, February 28, 似,第 10345 頁)。因此,業内對 利用另一種形式之鉻代替六價鉻係基於強烈的政府命令。 然而,直至本發明為止,沒有一種方法成功自三價或其他 非六價鉻電鍍浴中電沉積可靠一致的結晶鉻沉積物。 一般而言,在先前技術中,所有三價鉻電沉積方法皆形 成非晶形鉻沉積物。儘管可使該非晶形鉻沉積物在約 35 0-3 70 C下退火,且藉此產生一結晶鉻沉積物,但退火 導致形成不期望的大裂紋,此致使該鉻沉積物實質上毫無 用處。大裂紋係定義成延伸穿過鉻層之整個厚度直至該基 板之裂紋。由於該等大裂紋到達該基板,因此使得周圍材 料接觸該基板,故該鉻沉積物不能提供其耐腐蝕功能。據 信,該等大裂紋係源於結晶製程,此乃因合意體心立方晶 型具有較沉積態非晶形鉻沉積物為小之體積且所得應力使 該鉻沉積物破裂,形成大裂紋。相反,來自六價電沉積方 法之結晶鉻沉積物通常包含較小且僅自沉積物表面向基板 延伸一部分距離之小裂紋,且不會延伸穿過該鉻沉積物之 整個厚度。此係其中可獲得來自六價鉻電解質之無裂紋鉻 沉積物的一些情況。在來自六價鉻電解質之鉻中出現小裂 紋(若存在)之頻率係每公分大約4〇處或以上裂紋,而在來 自一彳貝鉻電解質經退火形成結晶鉻之非晶形沉積物中大裂 、次(右存在)之數量小於約一個數量級。即使具有更低的頻 率’但該等大裂紋致使三價鉻衍生之結晶沉積物用於功能 119773.doc 200806816 用迷不為人們所接受。功能性鉻沉積物需要提供耐磨及耐 腐蝕性一者,且大裂紋之存在使得物件易受腐蝕,且因此 該等鉻沉積物不可接受。 二饧鉻電沉積方法可成功沉積一裝飾性鉻沉積物。然 而衣飾性鉻並非功能性鉻,且不能提供功能性鉻之益 處。Occupational Exposure to Hexavalent Chromium; Final h/e. In this Code, the alternative is described as an “ideal (engineering) control 119773.doc 200806816 measure” and “should always consider replacing a toxic material with a lesser dangerous alternative^ (Federal Register/VoL 719 No. S9/Tuesday, February 28, like, p. 10345). Therefore, the industry is based on the use of another form of chromium instead of hexavalent chromium based on strong government orders. However, up to the present invention, none of the methods successfully electrodeposited a reliable and consistent crystalline chromium deposit from a trivalent or other non-hexavalent chromium plating bath. In general, in the prior art, all trivalent chromium electrodeposition processes formed amorphous chromium deposits. Although the amorphous chromium deposit can be annealed at about 35 0-3 70 C and thereby produce a crystalline chromium deposit, the annealing results in the formation of undesirable large cracks, which renders the chromium deposit substantially useless. . A large crack is defined as a crack that extends through the entire thickness of the chrome layer up to the substrate. Since the large cracks reach the substrate, the surrounding material is brought into contact with the substrate, so the chromium deposit cannot provide its corrosion resistance. It is believed that these large cracks originate from the crystallization process because the desired body-centered cubic crystal form has a smaller volume than the deposited amorphous chromium deposit and the resulting stress causes the chromium deposit to rupture, forming large cracks. In contrast, crystalline chromium deposits from hexavalent electrodeposition methods typically contain small cracks that extend only a portion of the distance from the surface of the deposit to the substrate and do not extend across the entire thickness of the chromium deposit. This is where some of the crack-free chromium deposits from hexavalent chromium electrolytes are available. The frequency of occurrence of small cracks (if present) in chromium from hexavalent chromium electrolytes is about 4 每 or more cracks per cm, and is cracked in amorphous deposits from a mussel chrome electrolyte that has been annealed to form crystalline chromium. The number of times (right exists) is less than about an order of magnitude. Even with a lower frequency, these large cracks cause trivalent chromium-derived crystalline deposits to be used for functioning. 119773.doc 200806816 is not accepted. Functional chromium deposits need to provide wear and corrosion resistance, and the presence of large cracks makes the article susceptible to corrosion, and thus the chromium deposits are unacceptable. The bismuth chromium electrodeposition method can successfully deposit a decorative chromium deposit. However, clothing chrome is not a functional chrome and does not provide the benefits of functional chrome.

儘管看來似乎施加裝飾性I沉積物並使其適用於功能性 ,沉積物係_件簡單的事情,但此尚未達成。相反,儘管 夕年來人們-直致力於解決此問題及達成可形成結晶絡沉 積物之二價鉻電沉積方法的目標,但依舊未能達成上述目 標0 尋找-½鉻電沉積方法之另—原因在於基於三價鉻之方 法理娜上而要差不多六價方法所需約一半的電能。利用法 拉第定律(Faraday,s law),且假設鉻密度為7.14克/公分3, 則對於六價鉻鍍敷方法而言,25%陰極效率製程之鑛敷速 t (其中所施加電流密度為50 A/dm^ 56 6微米/dm2/小 時。利用相同陰極效率及電流密度,I自三價態之鉻沉積 物在相同時期内具有兩倍的厚度。 出於所有該等原因,長期以爽豐Although it seems that applying decorative I deposits and making them suitable for functional, sedimentary systems is a simple matter, but this has not been achieved. On the contrary, despite the fact that people have been working hard to solve this problem and achieve the goal of divalent chromium electrodeposition methods that can form crystalline collateral deposits, they still fail to achieve the above objective 0. It is based on the method of trivalent chromium that it takes about half of the electricity required by the hexavalent method. Using Faraday's law, and assuming a chromium density of 7.14 g/cm 3, for a hexavalent chromium plating process, the 2% cathodic efficiency process has a rate of mineralization t (where the applied current density is 50) A/dm^ 56 6 μm/dm 2 /hr. Using the same cathode efficiency and current density, the chromium deposit from the trivalent state has twice the thickness in the same period. For all of these reasons, the long-term

At 贫Μ Λ术業内仍需要一種功能性沉 積恶結晶絡沉積物、雷沉供 、 U積初冤,儿積冷及忐夠形成此一鉻沉積物之 方法及利用此一鉻沉積物製得 ,^ 衣于々物件,其中該鉻沉積物無 大4紋且能夠提供與自六價鉻雷 m 1貝絡電/儿積方法獲得之功能性硬 路、/儿積物相當之功能性耐磨及耐腐 a p 汉町厲蝕特性。在此之前未能 滿足業内對一種浴及方法能夠自 日貫負上不含六價鉻之浴提 119773.doc 200806816 供結晶功能性鉻沉積物之方法的迫切需要 【發明内容】 晶,且係自三 本發明提供一種鉻沉積物,其沉積時為結 價鉻溶液沉積。 儘管本發明可用於形成裝飾性鉻沉積物,但主要係關於 功能性鉻沉積物,且具體而言係用於此前僅藉助六價絡電 沉積方法可用之功能性結晶鉻沉積物。 本發明提供-種解決自實質上不含六價鉻之三價鉻浴提 供結晶功能性鉻沉積物之問題的方案,但其仍然能夠提供 具有與彼等自六祕電沉積所獲得者實質上等效之功能特 性的產品。本發明提供一種解決代替六價鉻電鍍浴問題的 方案。 【實施方式】 如本文所用,裝飾性鉻沉積物係一種通常施加於電沉積 錄或鎳&至塗層上、或於一糸列鋼及錄或鎳合金塗層(其 組合厚度不超過3微米)上厚度小於丨微米、且通常小於〇 8 微米之鉻沉積物。 如本文所用,功能性鉻沉積物係一種施加(通常直接)於 一基板之鉻沉積物(例如帶鋼ECCS(經電解鉻塗佈之鋼, 其中鉻厚度通常大於❹”或丨微米,且係用於工業而非裝飾 應用功此性鉻沉積物通常直接施加於基板上。工業塗層 係利用鉻之特定性質,其包括其硬度、其對熱、磨耗、腐 及姓亥j之抗性、及其低摩擦係數。即使其與性能毫無關 係,但許多使用者仍希望功能性鉻沉積物在外觀上具有装 H9773.doc 200806816 飾性。功能性鉻沉積物之厚度可介於上述〇·8或1微米至3 微米或更多之間。在一些情況中,功能性鉻沉積物係施加 於’’衝擊板例如在基板上鍍鎳或鐵)或”雙重"系統上,其 中鎳、鐵或合金塗層具有大於3微米之厚度且鉻厚度通常 超過3微米。功能性鍍鉻及沉積物通常稱為”硬"鍍鉻及沉 積物。 裝飾性鉻電鍍浴涉及在寬鍍敷範圍上之薄鉻沉積物以便At the barren industry, there is still a need for a functional deposition of crystallization of collateral deposits, thunder and sedimentation, U accumulation of primary enthalpy, cold accumulation and enthalpy formation of this chrome deposit and the use of this chrome deposit得, ^ clothing in the 々 object, wherein the chrome deposit has no large 4 lines and can provide functional equivalent to the functional hard path, / pediatric product obtained from the hexavalent chrome Abrasion resistance and corrosion resistance ap Prior to this, the industry has not been able to meet the urgent need for a bath and method that can freely fluorinate 169773.doc 200806816 for crystallization of functional chromium deposits. The invention provides a chromium deposit which is deposited as a tantalum chromium solution upon deposition. While the present invention can be used to form decorative chromium deposits, it is primarily concerned with functional chromium deposits, and in particular for functional crystalline chromium deposits previously available only by means of hexavalent electrodeposition processes. The present invention provides a solution to the problem of providing crystalline functional chromium deposits from a trivalent chromium bath substantially free of hexavalent chromium, but which is still capable of providing substantially the same as those obtained from the six-electrode electrodeposition A product with equivalent functional characteristics. The present invention provides a solution to the problem of replacing a hexavalent chromium plating bath. [Embodiment] As used herein, a decorative chromium deposit is typically applied to an electrodeposition recording or nickel & to a coating, or to a tantalum steel and a nickel or nickel alloy coating (the combined thickness of which does not exceed 3 microns) A chromium deposit having a thickness less than 丨 microns and typically less than 〇 8 microns. As used herein, a functional chromium deposit is a chromium deposit applied (usually directly) to a substrate (eg, strip steel ECCS (electrolyzed chromium coated steel, where the chromium thickness is typically greater than ❹ or 丨 micron) and is For industrial rather than decorative applications, chromium deposits are typically applied directly to the substrate. Industrial coatings utilize the specific properties of chromium, including its hardness, its resistance to heat, abrasion, corrosion, and surnames. And its low coefficient of friction. Even if it has nothing to do with performance, many users still hope that the functional chromium deposits have the appearance of H9773.doc 200806816. The thickness of functional chromium deposits can be between the above. 8 or 1 micron to 3 microns or more. In some cases, a functional chromium deposit is applied to a ''impact plate such as nickel or iron on a substrate) or a "dual" system in which nickel, Iron or alloy coatings have a thickness greater than 3 microns and chromium thickness typically exceeds 3 microns. Functional chrome plating and deposits are commonly referred to as "hard" chrome and deposits. Decorative chrome plating baths are involved in a wide plating range. thin Chromium deposits so

凡王覆盍不規則形狀之物件。另一方面,功能性鉻鍍敷係 經設計用於規則形狀物件上之較厚沉積物,其中在較高電 流效率及較高電流密度下之鍍敷極為重要。先前使用三價 鉻離子之鉻鍍敷方法通常適用於形成僅"裝飾性"潤飾。本 發明提供”硬”或功能性鉻沉積物,但並不限於此,且可用 於裝飾性鉻潤飾。”硬”或"功能性"及"裝飾性"鉻沉積物係 該項技術之習知術語。 如本文所用,當參照(例電鑛浴或其他組合物使用"實 質上不含六價鉻"時係指如此閣述之電鑛浴或其他組合物 你η 4何有,5添加之六價鉻。應瞭解,此—浴或其他組合 粗Γ匕3痕里”價鉻’其係作為添加於該浴或組合物之材 之副產物存在/ …物所實施電解或化學製程 者戶==義術語”較佳定向"具有彼等熟悉結晶學技術 示與一特定方向對準<心],而疋在主體材料中展 對旱之傾向。因此,較佳定向可為(例 119773.doc 200806816 如M100丨、U10}、{ill}及其整倍數(例如(222))。 本發明提供來自三價鉻浴之可靠一致的體心立方(BCC) 結晶鉻沉積物,該浴實質上不含六價鉻,且其中該鉻沉積 物係沉積態結晶,而盔;隹 lf. ^ 而…、而進一步處理以使該鉻沉積物結 晶。因此’本發明為先前長期未能解決的自實質上不含六 價鉻之電鍍浴及方法獲得可靠一致的結晶鉻沉積物的問題 提供一種解決方案。Where the king covers an irregular shape of the object. Functional chrome plating, on the other hand, is designed for thicker deposits on regularly shaped articles where plating at higher current efficiencies and higher current densities is extremely important. Previous chrome plating methods using trivalent chromium ions have generally been applied to form only "decorative" retouching. The present invention provides "hard" or functional chromium deposits, but is not limited thereto and can be used for decorative chrome finishes. "Hard" or "Functional" "Decorative" Chromium Sediment is a well-known term for this technology. As used herein, when reference (for example, the use of an electric ore bath or other composition, "substantially free of hexavalent chromium" refers to the electromineral bath or other composition so described, η 4, 5 added Hexavalent chromium. It should be understood that this bath or other combination of coarse slag marks "valence chrome" which is used as a by-product of the addition of the bath or composition to the electrolysis or chemical process. == The term "better orientation" has the familiarity with crystallographic techniques to align with a particular direction <heart], while the enthalpy exhibits a tendency to drought in the host material. Therefore, the preferred orientation can be 119773.doc 200806816 Such as M100丨, U10}, {ill} and its integral multiple (eg (222)). The present invention provides a reliable and consistent body-centered cubic (BCC) crystalline chromium deposit from a trivalent chromium bath, the bath Substantially free of hexavalent chromium, and wherein the chromium deposit is deposited in a crystalline state, and the helmet; 隹lf. ^ and ..., and further processed to crystallize the chromium deposit. Therefore, the present invention has not been solved for a long time. Reliable and consistent crystallization from electroplating baths and methods that are essentially free of hexavalent chromium The problem of chromium deposits provides a solution.

在貝施例中本發明之結晶鉻沉積物使用標準測試方 法測試實質上無大裂紋。換言之,在此實施例中,在標準 測試方法下,當檢測所沉積鉻之樣品時實質上未觀察到大 裂紋。 在一實施例中,本發明之結晶鉻沉積物具有2·8895+厂 0.0025埃(人)之立方晶格參數。應注意,術語"晶格參數,,有 時亦用作’’晶格常數”。出於本發明之目的,該等術語視為 同義。應注意,對於體心立方結晶鉻而言,由於該單位晶 胞為立方體,故有單一晶格參數。將此晶格參數稱為立方 晶格參數更恰當,但在本文中簡稱為”晶格參數,,。在一實 施例中,本發明之結晶鉻沉積物具有2·8895埃+厂〇〇〇2〇埃 之晶格參數。在另一實施例中,本發明之結晶鉻沉積物具 有2.8895埃+/_0·0015埃之晶格參數。在又一實施例中,本 發明之結晶鉻沉積物具有2·8895埃+/_〇.〇〇1〇埃之晶格參 數。本文一些特定實例提供晶格參數在該等範圍内之結晶 絡沉積物。 高溫冶金元素結晶鉻具有2.8839埃之晶格參數。 119773.doc -11- 200806816 自六價鉻浴電沉積之結晶鉻具有自約2·88〇9埃至約 2.8858埃之晶格參數。 經退火電沉積之三價沉積態非晶形鉻具有自約2·88ΐ8埃 至约2.8852埃之晶格參數,但亦具有大裂紋。 口此本發明鉻沉積物之晶格參數大於其他習知結晶鉻 形式之晶格參數。儘管不欲受限於理論,但認為此差異可 能係由於在根據本發明所獲得結晶鉻沉積物之晶格中納入 雜原子(例如硫、氮、碳、氧及/或氫)之故。 在一實施例中,本發明之結晶鉻沉積物具有{111丨較佳 定向。 在一實施例中,該結晶鉻沉積物實質上無大裂紋。在一 貝施例中,g將該結晶絡沉積物加熱至高達約3 〇 〇。〇之溫 度時並未形成大裂紋。在一實施例中,當將該結晶鉻沉積 物加熱至高達約3〇(TC之溫度時,其晶體結構並無變化。 在一實施例中,該結晶鉻沉積物進一步包括碳、氮及硫 於該鉻沉積物中。 在一實施例中,該結晶鉻沉積物包含約1〇重量%至約1〇 重篁%之硫。在另一實施例中,該鉻沉積物包含約15重量 %至約6重量〇/❻之硫。在另一實施例中,該鉻沉積物包含約 1.7重量%至約4重量%之硫。該硫在該沉積物中係作為元 素硫存在且可為晶格之一部分,即,代替並因此佔據鉻原 子在該晶格中之位置或佔據四面體或八面體孔位置中的一 個位置並使該晶格扭曲。在一實施例中,硫來源可為二價 硫化合物。關於實例性硫來源之更多細節提供於下文中。 H9773.doc -12- 200806816 在一實施例中,該沉積物包含硒及/或碲以代替硫,或 者,除了硫以外還包含砸及/或蹄。 應注意,自六價鉻浴所沉積之某些形式之結晶鉻包含 硫’但該等鉻沉積物之硫含量實質上低於本發明結晶鉻沉 積物之硫含量。 在一實施例中,該結晶鉻沉積物包含約0.1重量%至約5 重量%之氮。在另一實施例中,該結晶鉻沉積物包含約〇.5 重量%至約3重量%之氮。在另一實施例中,該結晶鉻沉積 _ .物包含約〇.4重量%之氮。 在一實施例中,該結晶鉻沉積物包含約〇· 1重量%至約5 重量%之碳。在另一實施例中,該結晶鉻沉積物包含約0.5 重量%至約3重量%之碳。在另一實施例中,該結晶鉻沉積 物包含約1 ·4重量%之碳。在一實施例中,該結晶鉻沉積物 包含數量小於致使該鉻沉積物變成非晶形之數量的碳。換 言之’高於某一含量,在一實施例中為高於約10重量%, φ 該碳致使該鉻沉積物變成非晶形,且因此將其自本發明範 圍排除。因此’應控制碳含量以便不會使該鉻沉積物變成 非晶形。該碳可作為元素碳或作為碳化物碳存在。若碳係 作為70素存在,則其可作為石墨或作為非晶形碳存在。 在一實施例中,該結晶鉻沉積物包含約1.7重量%至約4 重量%之硫、約O.i重量%至約5重量%之氮及約〇1重量%至 約10重量%之碳。 本發明之結晶鉻沉積物係自三價鉻電鍍浴電沉積。該三 4貝鉻/谷貝貝上不含六價鉻。在一實施例中,該浴不含可檢 119773.doc -13- 200806816 測量的六價鉻。該三價鉻可作為以下物質供應:氯化鉻 CrCl3、氟化鉻CrF3、硝酸鉻Cr(N03)3、三氧化二鉻 Cr203、鱗S曼鉻CrP04、或市售溶液,例如來自(例 如)McGean Chemical公司或 Sentury Reagents之二氯氫氧化 鉻溶液、氣化鉻溶液或硫酸鉻溶液。三價鉻亦作為硫酸鉻/ 硫酸鈉或硫酸鉀鹽使用,例如通常稱為鉻鞣劑(chrometan 或kromsan)之Cr(0H)S04.Na2S04,其係通常用於皮革鞣製 之化學品,且係自諸如Elementis、Lancashire Chemical及 Soda Sanayii等公司購得。如下文所述,該三價鉻亦可作 為來自Sentury Reagents之曱酸絡Cr(HCOO)3提供。 該三價鉻之濃度可介於約〇·1莫耳(M)至約5 Μ之間。三 價鉻之濃度越高,可施加而不會導致樹枝狀沉積物之電流 密度越高,且因此可達成之結晶鉻沉積速率越快。 該三價鉻浴可進一步包含一種有機添加劑,例如甲酸或 其鹽,例如甲酸鈉、曱酸鉀、甲酸銨、曱酸鈣、甲酸鎂等 中之一或多個。亦可使用包括胺基酸(例如甘胺酸)及硫氰 酸鹽在内的其他有機添加劑以自三價鉻製備結晶鉻沉積物 且其用途係在本發明一實施例之範圍内。曱酸鉻(ΠΙ)(即 Cr(HCOO)3)亦可用作三價鉻與甲酸二者之來源。 該三價鉻浴可進一步包括氮來源,其可為氫氧化銨或其 鹽形式或可為一級、二級或三級烷基胺,其中該烷基基團 係C!-C6烷基。在一實施例中,該氮來源不為四級銨化合 物。除胺以外,可使用胺基酸、羥基胺(例如quadrol)及多 元羥烷醇胺作為該氮來源。在該等氮來源之一實施例中, 119773.doc -14- 200806816The crystalline chromium deposit of the present invention in the shell example was tested to be substantially free of large cracks using standard test methods. In other words, in this embodiment, under the standard test method, substantially no large crack was observed when the sample of the deposited chromium was detected. In one embodiment, the crystalline chromium deposit of the present invention has a cubic lattice parameter of 2.8895 + plant 0.0025 angstroms (person). It should be noted that the term "lattice parameters, and sometimes also as ''lattice constants'. For the purposes of the present invention, these terms are considered synonymous. It should be noted that for body-centered cubic chromium, The unit cell is a cube, so there is a single lattice parameter. It is more appropriate to refer to this lattice parameter as a cubic lattice parameter, but in this paper it is simply referred to as "lattice parameter,". In one embodiment, the crystalline chromium deposit of the present invention has a lattice parameter of 2.8895 angstroms + 〇〇〇 2 〇. In another embodiment, the crystalline chromium deposit of the present invention has a lattice parameter of 2.8895 angstroms + / _0 0015 angstroms. In still another embodiment, the crystalline chromium deposit of the present invention has a lattice parameter of 2.8895 Å + / _ 〇 〇〇 1 〇. Some specific examples herein provide crystalline deposits having lattice parameters within the ranges. The pyrometallurgical elemental crystalline chromium has a lattice parameter of 2.8839 angstroms. 119773.doc -11- 200806816 Crystalline chromium deposited from a hexavalent chromium bath has a lattice parameter from about 2.88 〇 9 Å to about 2.8858 angstroms. The annealed electrodeposited trivalent deposited amorphous chromium has a lattice parameter from about 2.88 ΐ 8 Å to about 2.8852 angstroms, but also has large cracks. The lattice parameter of the chromium deposit of the present invention is greater than that of other conventional crystalline chromium forms. While not wishing to be bound by theory, it is believed that this difference may be due to the inclusion of heteroatoms (e.g., sulfur, nitrogen, carbon, oxygen, and/or hydrogen) in the crystal lattice of the crystalline chromium deposit obtained in accordance with the present invention. In one embodiment, the crystalline chromium deposit of the present invention has a preferred orientation of {111. In one embodiment, the crystalline chromium deposit is substantially free of large cracks. In a single embodiment, g crystallizes the collateral deposit up to about 3 〇 〇. No large cracks were formed at the temperature of the crucible. In one embodiment, when the crystalline chromium deposit is heated to a temperature of up to about 3 Torr (TC), its crystal structure does not change. In one embodiment, the crystalline chromium deposit further includes carbon, nitrogen, and sulfur. In the chromium deposit, in one embodiment, the crystalline chromium deposit comprises from about 1% by weight to about 1% by weight of sulfur. In another embodiment, the chromium deposit comprises about 15% by weight. Up to about 6 weights of lanthanum/lanthanum sulfur. In another embodiment, the chromium deposit comprises from about 1.7% to about 4% by weight sulfur. The sulfur is present in the deposit as elemental sulfur and may be crystalline a portion of the grid, ie, instead of and thus occupying a position of the chromium atom in the lattice or occupying a position in the tetrahedral or octahedral pore location and distorting the lattice. In one embodiment, the source of sulfur may be Divalent sulfur compounds. Further details regarding exemplary sulfur sources are provided below. H9773.doc -12- 200806816 In one embodiment, the deposit comprises selenium and/or germanium in place of sulfur or, in addition to sulfur Also includes enamel and/or hoof. It should be noted that since the hexavalent chromium bath Some forms of crystalline chromium comprise sulfur 'but the chromium content of the chromium deposits is substantially lower than the sulfur content of the crystalline chromium deposit of the present invention. In one embodiment, the crystalline chromium deposit comprises about 0.1% by weight. Up to about 5% by weight of nitrogen. In another embodiment, the crystalline chromium deposit comprises from about 0.5% by weight to about 3% by weight of nitrogen. In another embodiment, the crystalline chromium deposit contains About 4% by weight of nitrogen. In one embodiment, the crystalline chromium deposit comprises from about 1% by weight to about 5% by weight carbon. In another embodiment, the crystalline chromium deposit comprises about 0.5%. % by weight to about 3% by weight of carbon. In another embodiment, the crystalline chromium deposit comprises about 1/4% by weight of carbon. In one embodiment, the crystalline chromium deposit comprises less than the amount causing the chromium deposit The material becomes an amorphous quantity of carbon. In other words, above a certain content, in one embodiment is greater than about 10% by weight, the carbon causes the chromium deposit to become amorphous, and thus is from the scope of the invention Excluded. Therefore 'the carbon content should be controlled so as not to sink the chrome The deposit becomes amorphous. The carbon may exist as elemental carbon or as carbide carbon. If the carbon system exists as 70, it may exist as graphite or as amorphous carbon. In one embodiment, the crystalline chromium deposit It comprises from about 1.7% by weight to about 4% by weight of sulfur, from about 0% by weight to about 5% by weight of nitrogen, and from about 1% by weight to about 10% by weight of carbon. The crystalline chromium deposit of the present invention is derived from trivalent chromium. Electroplating bath electrodeposition. The three 4 shell chromium/gluten babe does not contain hexavalent chromium. In one embodiment, the bath does not contain hexavalent chromium which can be measured by 119773.doc -13-200806816. Provided as: chromium chloride CrCl3, chromium fluoride CrF3, chromium nitrate Cr(N03)3, chromium oxide Cr203, scale Smann chromium CrP04, or a commercially available solution, for example from, for example, McGean Chemical Company or Sentury Reagents of chromium dichloride, chromium carbonate solution or chromium sulfate solution. Trivalent chromium is also used as chromium sulphate/sodium sulphate or potassium sulphate, such as Cr(0H)S04.Na2S04, commonly known as chrome tantalum (chrometan or kromsan), which is commonly used in leather tanning chemicals. Purchased from companies such as Elementis, Lancashire Chemical, and Soda Sanayii. As described below, the trivalent chromium can also be provided as a sulphuric acid Cr (HCOO) 3 from Sentury Reagents. The concentration of the trivalent chromium may range from about 〇1 mole (M) to about 5 。. The higher the concentration of trivalent chromium, the higher the current density that can be applied without causing dendritic deposits, and thus the faster the crystallization chromium deposition rate that can be achieved. The trivalent chromium bath may further comprise an organic additive such as formic acid or a salt thereof such as one or more of sodium formate, potassium citrate, ammonium formate, calcium citrate, magnesium formate, and the like. Other organic additives including amino acids (e.g., glycine) and thiocyanate may also be used to prepare crystalline chromium deposits from trivalent chromium and their use is within the scope of one embodiment of the invention. Chromium ruthenate (ΠΙ) (i.e., Cr(HCOO)3) can also be used as a source of both trivalent chromium and formic acid. The trivalent chromium bath may further comprise a source of nitrogen which may be in the form of ammonium hydroxide or a salt thereof or may be a primary, secondary or tertiary alkylamine wherein the alkyl group is a C!-C6 alkyl group. In one embodiment, the nitrogen source is not a quaternary ammonium compound. In addition to the amine, an amino acid, a hydroxylamine (e.g., quadrol), and a polyhydric hydroxy alkanolamine can be used as the nitrogen source. In one embodiment of such nitrogen sources, 119773.doc -14- 200806816

作為一鹽(例如胺鹽,例如氫自化物鹽)添加。It is added as a salt (for example, an amine salt such as a hydrogen salt).

如上所述,該結晶鉻沉接‘ π a a』 、、_ · (例如)該浴中所包含之有 及氫,該等可係自該浴之其他組 或可衍生自甲酸或其鹽、或其他 同樣,該結晶鉻可包含氧及氫, 份獲得(包括水的電解),或可狗 浴組份。 該結晶鉻沉積物中除鉻原子外,可共沉積其他金屬。如 彼等熟悉該項技術者所瞭解,該等金屬可適於添加於該三 4貝鉻電鍍浴中(若期望)以在沉積物中獲得鉻的各種結晶合 金。該等金屬包括(但不必限於)Re、Cu、Fe、w、Ni、 Μη,且亦可包括(例如(磷)。實際上,在此方法中可熔 合自水溶液直接或藉由如1>011]:1^}^或Brenner所述之誘導可 電沉積之所有元素。在一實施例中,該合金金屬不為鋁。 如該項技術中所習知,可自水溶液電沉積之金屬包括: Ag、As、Au ' Bi、Cd、c〇、Cr、Cu、以、&、以、&、 Mn、Mo、Ni、p、pb、pd、pt、Rh、&、Ru、s、外、 〜、Sn、Te、Ti、w&Zn,且可誘導元素包括B、c及N。 如彼等热悉該項技術者所瞭解,該共沉積金屬或原子係以 =於沉積物中鉻數量之量存在,且如同在不存在該共沉積 孟屬或原子所獲得之本發明結晶鉻沉積物一樣,由此獲得 之 >冗積物應為體心立方結晶。 該二價鉻浴進一步具有至少4·〇之pH,且該pH可高達至 夕約6.5。在一實施例中,該三價鉻浴之pH係自約4·5至約 H9773.doc •15- 200806816 6·5 ’且在另一實施例中,該三價鉻浴之pH係自約4.5至約 6 ’且在另一實施例中,該三價鉻浴之pH係自約5至約6之 間’且在一實施例中,該三價鉻浴之pH係約5.5。 在一實施例中,該三價鉻浴在電沉積本發明結晶鉻沉積 物之製程期間係維持在自約35。〇至約115。〇或該溶液之沸 點中的較低者間之溫度下。在電沉積該結晶鉻沉積物之製 程期間’在一實施例中,該浴溫度係自約45°C至約75°C, 且在另一實施例中,該浴溫度係自約50°C至約65°C,且在 一實施例中,該浴溫度係維持在約55〇c。 在電沉積本發明結晶鉻沉積物之製程期間,該電流係以 至少約10安培7平方分米(A/dm2)之電流密度施加。在根據 本發明自該三價鉻浴電沉積結晶鉻沉積物期間,在另一實 施例中,該電流密度係自約1〇 A/dm2至約200 A/dm2,且在 另一實施例中,該電流密度係自約1〇 A/dm2至約100 A/dm ’且在另一實施例中,該電流密度係自約2〇 A/dm2 至約70 A/dm2,且在又一實施例中,該電流密度係自約3〇 A/dm2至約 60 A/dm2。 在電沉積本發明結晶鉻沉積物之製程期間,該電流可使 用直流、脈動波形或脈動週期性反波形中之任一種或其兩 種或以上之任何組合來施加。 因此’在-實施例中,本發明提供—種在—基板上電沉 積結晶鉻沉積物之方法,其包括以下步驟: 提供-種水性電㈣,其包含三價鉻、甲㈣其鹽及至 少一種二價硫來源,且實質上不含六價鉻; 119773.doc -16 - 200806816 將一基板浸於該電鍍浴中;及 其中該鉻 施加電流以將結晶鉻沉積物沉積於該基板上 沉積物係沉積態結晶。 在一實施例中 之結晶絡沉積物具有 根據此方法獲得 2.8895+/-0_0025埃之晶格參數。* ^ 敌在一實施例中,根據此方 法獲得之結晶鉻沉積物具有較佳定向(”p〇,,)。 在另一實施例中,本發明提供一 ^ . u ^ ^ 禋在一基板上電沉積結As described above, the crystalline chromium is attached to 'π aa』, , for example, the hydrogen contained in the bath, and the other groups may be derived from the group or may be derived from formic acid or a salt thereof, or Otherwise, the crystalline chromium may comprise oxygen and hydrogen, a portion obtained (including electrolysis of water), or a dog bath component. In addition to chromium atoms, the crystalline chromium deposit can co-deposit other metals. As will be appreciated by those skilled in the art, such metals may be suitable for addition to the three-shell chromium plating bath (if desired) to obtain various crystalline alloys of chromium in the deposit. Such metals include, but are not necessarily limited to, Re, Cu, Fe, w, Ni, Μη, and may also include (for example, (phosphorus). In fact, in this method, it may be fused from an aqueous solution directly or by, for example, 1 > ]: 1^}^ or Brenner, inducing all elements of electrodeposition. In one embodiment, the alloy metal is not aluminum. As is known in the art, metals that can be electrodeposited from aqueous solutions include: Ag, As, Au ' Bi, Cd, c〇, Cr, Cu, I, &, &, &, Mn, Mo, Ni, p, pb, pd, pt, Rh, &, Ru, s, Exo, ~, Sn, Te, Ti, w&Zn, and inducible elements include B, c, and N. As will be appreciated by those skilled in the art, the co-deposited metal or atomic system is in the deposit. The amount of chromium is present, and as in the absence of the co-deposited M. genus or atom, the resulting crystalline chromium deposit, the resulting > redundancy should be body-centered cubic crystal. The divalent chromium bath Further having a pH of at least 4 〇, and the pH can be as high as about 6.5. In one embodiment, the pH of the trivalent chromium bath is from about 4.5 to about H9773.doc • 15- 200806816 6·5 'and in another embodiment, the pH of the trivalent chromium bath is from about 4.5 to about 6 ' and in another embodiment, the pH of the trivalent chromium bath is from about 5 to about 6 Between and in one embodiment, the pH of the trivalent chromium bath is about 5.5. In one embodiment, the trivalent chromium bath is maintained at about 35 during the process of electrodepositing the crystalline chromium deposit of the present invention. 〇 to a temperature between about 115. or the lower of the boiling point of the solution. During the process of electrodepositing the crystalline chromium deposit, 'in one embodiment, the bath temperature is from about 45 ° C to About 75 ° C, and in another embodiment, the bath temperature is from about 50 ° C to about 65 ° C, and in one embodiment, the bath temperature is maintained at about 55 ° C. During the process of inventing the crystalline chromium deposit, the current is applied at a current density of at least about 10 amps and 7 square decimeters (A/dm2). During the electrodeposition of the crystalline chromium deposit from the trivalent chromium bath in accordance with the present invention, In another embodiment, the current density is from about 1 A/dm2 to about 200 A/dm2, and in another embodiment, the current density is from about 1 A/dm2. About 100 A/dm' and in another embodiment, the current density is from about 2 A/dm2 to about 70 A/dm2, and in yet another embodiment, the current density is from about 3 A/A. Dm2 to about 60 A/dm 2. During the process of electrodepositing the crystalline chromium deposit of the present invention, the current may be applied using any one of a direct current, a pulsating waveform, or a pulsating periodic inverse waveform, or any combination of two or more thereof. Therefore, in an embodiment, the present invention provides a method for electrodepositing a crystalline chromium deposit on a substrate, comprising the steps of: providing a water-based electricity (IV) comprising trivalent chromium, a (iv) salt thereof, and At least one source of divalent sulfur and substantially free of hexavalent chromium; 119773.doc -16 - 200806816 immersing a substrate in the electroplating bath; and applying chromium to the chromium to deposit crystalline chromium deposits on the substrate Sedimentary sedimentary crystals. The crystalline deposit in one embodiment has a lattice parameter of 2.8895 +/- 0_0025 angstroms obtained according to this method. * ^ In one embodiment, the crystalline chromium deposit obtained according to this method has a preferred orientation ("p〇,"). In another embodiment, the present invention provides a ^.u ^ ^ 禋 on a substrate Power-on deposition

晶鉻沉積物之方法’其包括以下步驟: 甲酸且實質上不含六價 提供一電鍍浴,其包含三價鉻 鉻; 將一基板浸於該電鍍浴中;及 施加電流以將結晶鉻沉積物沉積於該基板上,其中該鉻 沉積物係沉積態結晶且該結晶鉻沉積物具有2 8895+/_ 0.0025埃之晶格參數^在—實施例中,根據此獲得之結晶 鉻沉積物具有{111}較佳定向。 本發明之該等方法可在本文所述之條件下、且根據電沉 積鉻之標準試驗操作實施。 如上所述’該三價鉻電鍍浴中較佳提供二價硫來源。根 據本發明可使用各種含二價硫之化合物。 在一實施例中,該二價硫來源可包括具有以下通式(I)化 合物中之一或其中兩個或以上之混合物: 其中在⑴中,X1與X2可相同或不同且X1與X2各自獨立 包括氫、自素、胺基、氰基、硝基、亞硝基、偶氮基、烷 119773.doc -17- 200806816 羰基、甲醯基、烷氧羰基、胺基羰基、烷基胺基羰基、二 烷基胺基羰基、羧基(如本文所用,"羧基”包括羧基基團之 所有形式,例如,羧酸、羧酸烷基酯及羧酸鹽)、羧酸 酯、磺酸根、亞磺酸根、膦酸根、亞膦酸根、亞砜、胺基 甲酸酯基、聚乙氧基化烷基、聚丙氧基化烷基、羥基、經 鹵素取代之烧基、烧氧基、硫酸烧基自旨、烧硫基、烧基亞 磺醯基、烷基磺醯基、膦酸烷基酯基或亞膦酸烷基酯基, 其中該等烷基及烷氧基係Ci-C^,或X1與X2—起可形成自 R1至R2之鍵結,因此形成一個包含R1及R2基團之環, 其中R1與R2可相同或不同且R1與R2各自獨立包括單鍵、 烷基、烯丙基、烯基、炔基、環己基、芳族及雜芳族環、 烷氧羰基、胺基羰基、烷基胺基羰基、二烷基胺基羰基、 聚乙氧基化及聚丙氧基化烷基,其中該等烷基基團係 Ci,C6,且 其中η具有介於1至約5之間之平均值。 在一實施例中,該二價硫來源可包括具有以下通式(IIa) 及/或(lib)化合物中之一或其中兩者或以上之混合物··A method of crystalline chromium deposits comprising the steps of: formic acid and substantially free of hexavalent to provide an electroplating bath comprising trivalent chromium chromium; immersing a substrate in the electroplating bath; and applying an electric current to deposit crystalline chromium Depositing on the substrate, wherein the chromium deposit is a crystalline state of deposition and the crystalline chromium deposit has a lattice parameter of 2 8895 + / 0.0025 angstroms. In the embodiment, the crystalline chromium deposit obtained according to the method has {111} preferred orientation. The methods of the present invention can be practiced under the conditions described herein and in accordance with standard test procedures for electroplating chromium. As described above, the source of divalent sulfur is preferably provided in the trivalent chromium plating bath. Various divalent sulfur-containing compounds can be used in accordance with the present invention. In one embodiment, the source of divalent sulfur may comprise one or a mixture of two or more of the following formula (I): wherein in (1), X1 and X2 may be the same or different and X1 and X2 are each Independently includes hydrogen, argin, amine, cyano, nitro, nitroso, azo, alkane 119773.doc -17- 200806816 carbonyl, methionyl, alkoxycarbonyl, aminocarbonyl, alkylamino Carbonyl, dialkylaminocarbonyl, carboxyl (as used herein, "carboxy" includes all forms of carboxyl groups, for example, carboxylic acids, alkyl carboxylates and carboxylates), carboxylates, sulfonates, Sulfite, phosphonate, phosphinate, sulfoxide, urethane, polyethoxylated alkyl, polypropoxylated alkyl, hydroxy, halogen-substituted alkyl, alkoxy, sulfuric acid a thiol group, a thiol group, a sulfinyl group, an alkyl sulfonyl group, an alkyl phosphonate group or an alkyl phosphinate group, wherein the alkyl group and the alkoxy group are Ci-C ^, or X1 and X2 may form a bond from R1 to R2, thus forming a ring comprising R1 and R2 groups, wherein R1 and R2 may be the same or Different and R1 and R2 each independently include a single bond, an alkyl group, an allyl group, an alkenyl group, an alkynyl group, a cyclohexyl group, an aromatic and heteroaromatic ring, an alkoxycarbonyl group, an aminocarbonyl group, an alkylaminocarbonyl group, and two Alkylaminocarbonyl, polyethoxylated, and polypropoxylated alkyl, wherein the alkyl groups are Ci, C6, and wherein η has an average value between 1 and about 5. In the example, the divalent sulfur source may include one or a mixture of two or more of the following compounds of the formula (IIa) and/or (lib).

其中在(IIa)及(lib)中,I、I、汉5及心可相同或不同且 獨立地包括氫、鹵素、胺基、氰基、硝基、亞硝基、偶氮 119773.doc •18· 200806816 基、烧羰基、甲醯基、烷氧羰基、胺基羰基、烷基胺基羰 基、一烧基胺基.基、竣基、續酸根、亞績酸根、膦酸 根、亞膦酸根、亞砜、胺基甲酸酯基、聚乙氧基化烷基、 聚丙氧基化烷基、羥基、經齒素取代之烷基、烷氧基、硫 酸烷基酯、烷硫基、烷基亞磺醯基、烷基磺醯基、膦酸烷 基酯基或亞膦酸烷基酯基,其中該等烷基及烷氧基係 Ci-C6 5 其中X代表碳、氮、氧、硫、硒或碲且其中m介於0至約 3之間, 其中η具有介於1至約5之間之平均值,且 其中(Ila)或(lib)各自包括至少一個二價硫原子。 在一實施例中,該二價硫來源可包括具有以下通式 (Ilia)及/或(Illb)化合物中之一或其中兩個或以上之混合 物:Wherein (IIa) and (lib), I, I, Han 5 and heart may be the same or different and independently include hydrogen, halogen, amine, cyano, nitro, nitroso, azo 117773.doc • 18· 200806816 base, calcined carbonyl, formyl, alkoxycarbonyl, aminocarbonyl, alkylaminocarbonyl, monoalkylamino, sulfhydryl, sulphate, yoghurt, phosphonate, phosphinate , sulfoxide, urethane group, polyethoxylated alkyl group, polypropoxylated alkyl group, hydroxyl group, dentate substituted alkyl group, alkoxy group, alkyl sulfate group, alkylthio group, alkane a sulfinyl group, an alkyl sulfonyl group, an alkyl phosphonate group or an alkyl phosphinate group, wherein the alkyl group and the alkoxy group are Ci-C6 5 wherein X represents carbon, nitrogen, oxygen, Sulfur, selenium or tellurium and wherein m is between 0 and about 3, wherein η has an average value between 1 and about 5, and wherein (Ila) or (lib) each comprise at least one divalent sulfur atom. In one embodiment, the source of divalent sulfur may comprise one or a mixture of two or more of the following compounds of the formula (Ilia) and/or (Illb):

其中,在(Ilia)及(Illb)中,R3、R4、115及r6可相同或不 同且獨立包括氫、鹵素、胺基、氰基、硝基、亞硝基、偶 氮基、烷羰基、甲醯基、烷氧羰基、胺基羰基、烷基胺基 幾基、二烧基胺基魏基、竣基、續酸根、亞續酸根、膊酸 根、亞膦酸根、亞颯、胺基甲酸酯基、聚乙氧基化烷基、 119773.doc -19- 200806816 聚丙氧基化烷基、羥基、經_素取代之烷基、烷氧基、硫 酉文烷基酯、烷硫基、烷基亞磺醯基、烷基磺醯基、膦酸烷 基_基或亞膦酸烷基醋基,其中該等烷基及烷氧基係 Ci-C6 ^ 其中X代表碳、氮、硫、硒或碲且其中m介於0至約3之 間, 其中η具有介於1至約5之間之平均值,及 其中(Ilia)或(Illb)各自包括至少一個二價硫原子。 在一實施例中,在任何上述含硫化合物中,該硫可由硒 或碲代替。實例性硒化合物包括硒-DL_甲硫胺酸、硒 胱胺酸、其他硒化物(即,R-Se_R,)、二硒化物(即,R_Se-Se-R/)及砸醇(即,R-Se-H),其中尺與化,可獨立為具有 至約20個碳原子之烧基或芳基基團,其可類似於彼等上文 關於硫之闡述包括其他雜原子(例如氧或氮)。實例性碑化 合物包括乙氧基及甲氧基蹄化物,即Te(〇C2H5)4及 Te(〇CH3)4 〇 如應瞭解,所用取代基較佳經選擇以便如此獲得之化合 物保持溶於本發明電鍍浴中。 比較實例:六價鉻 在下表1中列舉製造功能性鉻沉積物之各種水性含六價 鉻酸之電解質的比較實例,將該沉積物之結晶性質列示於 表格中,並基於c、〇、H、N及S分析報告元素組成。 H9773.doc -20- 200806816Wherein, in (Ilia) and (Illb), R3, R4, 115 and r6 may be the same or different and independently include hydrogen, halogen, amine, cyano, nitro, nitroso, azo, alkylcarbonyl, Mercapto, alkoxycarbonyl, aminocarbonyl, alkylamino, dialkylaminowei, sulfhydryl, sulphate, sulphate, sulphate, phosphinate, hydrazine, amine Acid ester group, polyethoxylated alkyl group, 119773.doc -19- 200806816 polypropoxylated alkyl group, hydroxyl group, alkyl group substituted by alkene, alkoxy group, thioxanthyl ester, alkylthio group Or alkylsulfinyl, alkylsulfonyl, phosphonic acid alkyl or phosphinate alkyl acrylate, wherein the alkyl and alkoxy are Ci-C6 ^ wherein X represents carbon, nitrogen, Sulfur, selenium or tellurium and wherein m is between 0 and about 3, wherein η has an average value between 1 and about 5, and wherein (Ilia) or (Illb) each comprise at least one divalent sulfur atom. In one embodiment, in any of the above sulfur-containing compounds, the sulfur may be replaced by selenium or tellurium. Exemplary selenium compounds include selenium-DL-methionine, selenocetine, other selenides (ie, R-Se_R,), diselectide (ie, R_Se-Se-R/), and sterol (ie, R-Se-H), wherein flanking, can independently be an alkyl or aryl group having up to about 20 carbon atoms, which can be similar to those described above with respect to sulfur, including other heteroatoms (eg, oxygen) Or nitrogen). Exemplary monumental compounds include ethoxy and methoxy-hoofed compounds, namely Te(〇C2H5)4 and Te(〇CH3)4. It should be understood that the substituents used are preferably selected so that the compound thus obtained remains soluble in the present invention. Invented in the electroplating bath. Comparative Example: Hexavalent Chromium A comparative example of various aqueous hexavalent chromic acid-containing electrolytes for the production of functional chromium deposits is set forth in Table 1 below, and the crystalline properties of the deposits are listed in the table and based on c, 〇, H, N and S analysis report element composition. H9773.doc -20- 200806816

表1用於功能性鉻以六價鉻為主之電解質Table 1 is used for electrolytes with functional chromium as hexavalent chromium

晶格 晶粒較佳定向 BCC 無規 BCC (222) PO BCC BCC-SC BCC 沉積態之晶格參數 體積[〇]原子% 體積[H]原子 體積[〇2]原子i 體積[s]原子% 2.883 2.882 BCC (222) (211) PO 2.883 0.055 0.078 0.36 0.62 (222) PO (110) P〇 無規 2.881 0.04 0.076 0.84 0.04 2.882 0.06 0.068 0.98 0.12 2.886 在下表2中列舉Ecochrome項目認為為最有效技術之三價 鉻製程溶液的比較實例。該Ecochrome項目係多年歐洲聯 盟贊助計劃(European Union sponsored program)(GlRD CT-2002-0071 8)以尋找一種基於三價鉻之有效且高性能硬鉻替 代物(參見,Hard Chromium Alternatives Team (HCAT) 119773.doc -21- 200806816Lattice grain preferred orientation BCC random BCC (222) PO BCC BCC-SC BCC Lattice parameter volume of deposited state [〇] Atomic % Volume [H] Atomic volume [〇2] Atomic i Volume [s] Atomic % 2.883 2.882 BCC (222) (211) PO 2.883 0.055 0.078 0.36 0.62 (222) PO (110) P〇 random 2.881 0.04 0.076 0.84 0.04 2.882 0.06 0.068 0.98 0.12 2.886 The following table 2 lists the Ecochrome project as the most effective technology. A comparative example of a trivalent chromium process solution. The Ecochrome project is a European Union sponsored program (GlRD CT-2002-0071 8) to find an effective and high performance hard chrome alternative based on trivalent chromium (see Hard Chromium Alternatives Team (HCAT)). 119773.doc -21- 200806816

Meeting,San Diego,CA,Jan. 24-26,2006)。該等三種製程 溶液係來自Cidetec,其係一西班牙聯合體;ENSME,其 係一法國聯合體;及Musashi,其係一日本聯合體。在此 表中,若未特定列舉化學式,則認為該材料係所闡述的獲 得該等數據之專利材料,且無市售。 表2根據Ecochrome項目功能性三價鉻方法之最有效習知 技術。 EC1 (Cidetec) EC2 (ENSME) EC3 (Musashi) Cr(III) (Μ) 0.40 1.19 來自 Cr(OH)3+3HCl之CrCl3.6H20 (Μ) 1.13 H2NCH2C02H (Μ) 0.67 配體1 (Μ) 0.60 配體2 (Μ) 0.30 配體3 (Μ) 0.75 Η3Β〇3 (Μ) 0.75 導電鹽(Μ) 2.25 HC02H (Μ) 0.19 NH4C1 (Μ) 0.19 2.43 Η3Β〇3 (Μ) 0.08 0.42 Α1〇3·6Η20 (Μ) 0.27 表面活性劑毫升/公升 0.225 0.2 pH 2-2.3 〜0·1 〜0·3 溫度(°C) 45-50 50 50 電流密度A/dm2 20.00 •70.00 40.00 陰極效率 10% 〜27% 13% 鍍態結構 非晶形 非晶形 非晶形 定向 NA ΝΑ ΝΑ 119773.doc -22 - 200806816 在表2比較實例中,EC3實例包含氯化鋁。已闡述其他 含氯化銘之三價鉻溶液。Suvegh等人(Journal of Electroanalytical Chemistry 455 (1998) 69-73)使用包含 0·8 M [Cr(H20)4Cl2]C1.2H20、0.5 Μ ΝΗ4α、0·5 M Naa、 0.15 Μ Η3Β〇3、1 Μ甘胺酸及0.45 Μ A1C13之電解質,其 pH未闡述。Hong 等人(Plating and Surface Finishing,2001 年3月)闡述一種pH為1-3包含魏酸、絡鹽、硼酸、氯化钟 及銘鹽之混合物的電解質。Ishida等人(Journal of the Hard Chromium Platers Association of Japan 17,No· 2,2002年 10 月 31 曰)闡述包含 1.126 Μ [(:γ(Η2Ο)4(:12](:1·2Η2Ο、0·67 M 甘胺酸、2.43 M NH4C1及0.48 M H3B〇3之溶液,向其中添 加數量自〇·11-〇·41 Μ變化之A1C13_6H20 ;未闡述pH。在該 等四個揭示三價鉻浴中之氯化鋁的參考文獻中,僅Ishida 等人主張該鉻沉積物為結晶,其闡述結晶沉積物係隨 A1C13濃度之增加而產生。然而,本發明者複製該試驗並 製造結晶沉積物之重複嘗試失敗。據信,有一個重要試驗 變量Ishida等人並未闡述。因此,認為Ishida等人未能教示 如何製得可靠一致的結晶鉻沉積物。 在表3中列舉各種水性("T”)含三價鉻之電解質及一種離 子性液體("IL")含三價鉻之電解質,所有該等皆可製造厚 度超過1微米之鉻沉積物,並將該沉積物之結晶性質列示 於表格中。 119773.doc -23- 200806816 表3用於功能性鉻以三價鉻為主之電解質 T1 T2 Τ3 Τ4 Τ5 Τ6 Τ7 IL1 MW Cr(0H)S04. Na2S040 (Μ) 0.39 0.39 0.39 0.55 0.39 307 KC1 (Μ) 3.35 74.55 h3bo3(m) 1.05 61.84 HC02'K+(M) 0.62 84.1 CrCl36H20 1.13 2.26 266.4 (M) Cr(HC02)3 0.38 187 (M) CH2OHCH2 2.13 139.5 (M) NH4CH02(M) 3.72 5.55 63.1 LiCl (M) 2.36 42.4 HC02H (M) 3.52 3.03 3.52 0.82 4.89 46.02 NH4OH (M) 5.53 4.19 5.53 35 (nh4)2so4 0.61 0.61 1.18 132.1 (M) NH4CI (M) 0.56 0.56 1.87 0.56 0.56 53.5 NH4Br (M) 0.10 0.10 0.51 0.10 0.10 0.10 97.96 Ν^4Ρ2〇7" 10 0.034 0.034 0.034 446 H20 (M) KBr (M) 0.042 119 h2o 補足 補足 補足 補足 補足 補足 補足 無 18 至1公 至1公 至1公 至1公 至1公 至1公 至1公 升 升 升 升 升 升 升 119773.doc •24- 200806816 pH 0.1-3 0.1-3 0.1-3 0.1-3 0.1-3 0.1-3 0.1-3 NA 電流密度 (A/dm2) 12.4 20 20 20 20 50 80 溫度,°c 45 45 45 45 45 45 45 80 陰極效率 25% 15% 15% 15% 15% 30% 約 10% 晶格 Amor. Amor. Amor. Amor. Amor. Amor. NA sc 晶粒較佳定 向 ΝΑ NA NA NA NA Pwdr Pwdr Rndm 4 小時/19l°c 退火後之晶 格參數 2.882 2.884 2.882 2.886 2.883 NA NA — 有機添加齊J pH>4 Amor. xtal. xtal· xtal. xtal. xtal. xtal. 晶粒定向 (111), Rndm (111), Rndm (111), Rndm (111), Rndm (111), Rndm (111), Rndm 電解質 +A1C13*6H20 0.62 Μ, ρΗ<3 Amor. xtal. xtal. xtal. xtal. xtal. xtal. (在表3中:pwdr=粉末;Amor. =非晶开多;rndm=無規;NA= 不適用;SC=簡單立方;xtal. =結晶) 在表4中,來自表1、2及3之各沉積物係使用通常用於評 價沉積態功能性鉻電沉積物之標準測試方法來比較。自此 表可觀察到,非晶形沉積物、及不為BCC(體心立方)之沉 積物不能通過所有必須初始測試。 119773.doc -25- 200806816 表4來自表1-3電解質之沉積態功能性鉻之測試結果的比較 電解質 結構 定向 外觀 研磨 測試 加熱後之 大裂紋 硬度 Vickers (100 g) 有無 凹陷 所致 裂紋 H1 BCC 無規 粉末狀 失敗 有 — — H2 BCC (222) 有光澤 合格 無 900 無 H3 BCC (222)(211) 有光澤 合格 無 950 無 H4 BCC (222) 有光澤 合格 無 950 無 H5 BCC+ SC (222)(110) 有光澤 失敗 無 900 無 H6 BCC 無規 有光澤 失敗 無 960 有 EC1 amor. ΝΑ 有光澤 失敗 有 845- 1000 有 EC2 amor. ΝΑ 有光澤 失敗 有 1000 有 EC3 amor. ΝΑ 有光澤 失敗 有 — 有 T1 amor. ΝΑ 有光澤 失敗 有 1000 有 T2 amor. ΝΑ 有光澤 失敗 有 950 有 T3 amor. ΝΑ 有光澤 失敗 有 950 有 T4 amor. ΝΑ 有光澤 失敗 有 900 有 T5 amor. ΝΑ 有光澤 失敗 有 1050 益 T6 amor. ΝΑ 有光澤 失敗 有 950 有 T7 粉末狀 — — — — — IL1 SC 無規 黑色 微粒 失敗 有 — — 根據代替六價鉻電沉積浴之工業需要,來自三價鉻電沉 119773.doc -26- 200806816 積浴之沉積物必須係結晶有效且用作功能性鉻沉積物。已 發現,某些添加劑可與該電沉積方法之製程變量的調節一 起使用以自實質上不含六價鉻之三價絡浴獲得合意的結晶 鉻沉積物。典型製程變量包括電流密度、溶液溫度、溶液 攪拌、添加劑濃度、所施加電流波形之控制、及溶液pH。 可使用各_試來正確估計具體添加狀效率,該等測試 包括(例如)x-射線繞射(XRD)(以研究該鉻沉積物之結構卜 X-射線光電子光譜法(XPS)(用於測定該鉻沉積物之組成, 大於約0.2-0.5重量%)、彈性回彈測定(ERD)(用於測定氣含 量)、及電子顯微鏡(用於測定物理或形態特徵,例如裂 紋)。 在先前技術巾,通常且廣泛料自三祕浴之鉻沉積必 須在PH值小於约2.5下實施、然而,料係隔離三價路錢 敷製程’其包括刷覆鍍敷製程,其中使用較高阳,但該^ 刷覆鍍敷方案中所用較高阳不能獲得結晶鉻沉積物。因 此,為評價各種添加劑之效率、穩定性,對高阳電解質以 及通常公認的低pH電解質進行測試。 119773.doc 27- 200806816 表5 :誘導自三價鉻浴T2結晶之添加劑 添加劑 所添加濃度範圍 Τ2 pH 2.5: 是否結 晶? T2 pH 4.2: 是否結晶? 甲硫胺酸 0.1,0.5, 1.0, 1.5克/公升 否 否,是,是,na 胱胺酸 0.1,0.5, 1.0, 1.5克/公升 否 是,是,是,是 硫嗎琳 0.1,0.5, 1,1.5, 2, 3毫升/公 升 否 否,否,是,是,是, 是 硫代二丙酸 0.1,0.5, 1.0, 1·5 克/公升 否 否,是,是,是 硫代二乙醇 0.1,0·5, 1-0, 1.5 克/公升 否 否,是,是,是 半胱胺酸 0.1,1,2.0, 3.0克/公升 否 是,是,是,是 細丙基硫 0.5, 1.0, 1.5毫升/公升 否 否,是,是,na 硫代水楊酸 0.5, 13 1.5 否 是,是,是 3J-二硫代二丙 酸 1,2, 5, 10克/公升 否 是,是,是,是 四氫噻吩 0.5, 1.0, 1.5毫升/公升 否 否,是,是 根據表5中所示之數據,很明顯,當自三價鉻溶液以約 上述濃度電沉積鉻時且當該浴之pH大於約4時,在其結構 中具有二價硫之化合物誘導結晶,其中根據本發明該鉻晶 體具有2.8895+/-0.0025埃之晶格參數。在一實施例中,在 本文所述浴中可使用其他二價硫化合物以電沉積具有本發 明晶格參數之結晶鉻。在一實施例中,當如本文所述使用 具有硫、硒或碲之化合物時亦誘導鉻結晶。在一實施例 中,該等硒及碲化合物相當於以上所確定硫化合物,且如 119773.doc -28 - 200806816 同該等硫化合物一樣,導致電沉積具有2.8895+/-0.0025埃 之晶格參數的結晶鉻。 為進一步闡述該等結晶之誘導作用,使用電解質丁3在 pH 5.5且溫度5〇。〇下利用40 A/dm2之相同陰極電流密度及 3〇分鐘之鍍敷時間使用黃銅基板對結晶誘導添加劑之研究 報告於下表6中。鍍敷完成後,使用X-射線繞射、射線 誘導之X-射線螢光用於測定厚度、及電子誘導之又_射線螢 光連同能量離散分光光度計以量測硫含量來檢驗試樣。表 6匯總該等數據。該數據可表明,不僅該溶液中存在濃度 超過誘導結晶之臨界濃度的二價硫化合物而且該沉積物中 同樣存在硫。 表6來自各種二價硫添加劑之硫的誘導及對Cr+3溶液之 Cr鍍態結晶、及鍍敷速率之影響Meeting, San Diego, CA, Jan. 24-26, 2006). The three process solutions are from Cidetec, which is a Spanish consortium; ENSME, which is a French consortium; and Musashi, which is a Japanese consortium. In this table, if a chemical formula is not specifically listed, the material is considered to be the patented material for obtaining such data, and is not commercially available. Table 2 is based on the most effective conventional techniques of the functional trivalent chromium method of the Ecochrome project. EC1 (Cidetec) EC2 (ENSME) EC3 (Musashi) Cr(III) (Μ) 0.40 1.19 CrCl3.6H20 from Cr(OH)3+3HCl (Μ) 1.13 H2NCH2C02H (Μ) 0.67 Ligand 1 (Μ) 0.60 Body 2 (Μ) 0.30 Ligand 3 (Μ) 0.75 Η3Β〇3 (Μ) 0.75 Conductive salt (Μ) 2.25 HC02H (Μ) 0.19 NH4C1 (Μ) 0.19 2.43 Η3Β〇3 (Μ) 0.08 0.42 Α1〇3·6Η20 (Μ) 0.27 Surfactant cc / liter 0.225 0.2 pH 2-2.3 ~0·1 ~0·3 Temperature (°C) 45-50 50 50 Current Density A/dm2 20.00 •70.00 40.00 Cathode efficiency 10% ~27% 13% plated structure amorphous amorphous amorphous orientation NA ΝΑ 119 119773.doc -22 - 200806816 In the comparative example of Table 2, the EC3 example contains aluminum chloride. Other trivalent chromium solutions containing chlorinated compounds have been described. Suvegh et al. (Journal of Electroanalytical Chemistry 455 (1998) 69-73) uses 0·8 M [Cr(H20)4Cl2]C1.2H20, 0.5 Μ ΝΗ4α, 0·5 M Naa, 0.15 Μ Η3Β〇3,1 The pH of lysine and 0.45 Μ A1C13 electrolyte is not illustrated. Hong et al. (Plating and Surface Finishing, March 2001) describe an electrolyte having a pH of 1-3 comprising a mixture of formic acid, complex salt, boric acid, chlorinated clock and salt. Ishida et al. (Journal of the Hard Chromium Platers Association of Japan 17, No. 2, October 31, 2002) states that 1.126 Μ [(: γ(Η2Ο)4(:12](:1·2Η2Ο, 0·) A solution of 67 M glycine, 2.43 M NH4C1 and 0.48 M H3B 〇3, to which is added A1C13_6H20 in a quantity varying from 〇11-〇·41 ;; pH is not illustrated. In the four disclosed trivalent chromium baths In the reference for aluminum chloride, only Ishida et al. claimed that the chromium deposit was crystalline, which states that the crystalline deposit system is produced with an increase in the concentration of A1C13. However, the inventors replicated the test and produced a repeat of the crystalline deposit. The attempt failed. It is believed that an important test variable, Ishida et al., did not elaborate. Therefore, Ishida et al. were not able to teach how to produce reliable and consistent crystalline chromium deposits. Table 3 lists various water-based ("T" An electrolyte containing trivalent chromium and an ionic liquid ("IL") an electrolyte containing trivalent chromium, all of which can produce chromium deposits having a thickness of more than 1 micrometer and list the crystalline properties of the deposit In the table. 119773.doc -23- 200806816 Table 3 for functional chromium with trivalent chromium-based electrolyte T1 T2 Τ3 Τ4 Τ5 Τ6 Τ7 IL1 MW Cr(0H)S04. Na2S040 (Μ) 0.39 0.39 0.39 0.55 0.39 307 KC1 (Μ) 3.35 74.55 h3bo3(m ) 1.05 61.84 HC02'K+(M) 0.62 84.1 CrCl36H20 1.13 2.26 266.4 (M) Cr(HC02)3 0.38 187 (M) CH2OHCH2 2.13 139.5 (M) NH4CH02(M) 3.72 5.55 63.1 LiCl (M) 2.36 42.4 HC02H (M 3.52 3.03 3.52 0.82 4.89 46.02 NH4OH (M) 5.53 4.19 5.53 35 (nh4)2so4 0.61 0.61 1.18 132.1 (M) NH4CI (M) 0.56 0.56 1.87 0.56 0.56 53.5 NH4Br (M) 0.10 0.10 0.51 0.10 0.10 0.10 97.96 Ν^4Ρ2 〇7" 10 0.034 0.034 0.034 446 H20 (M) KBr (M) 0.042 119 h2o Make up to make up the foot to make up the foot to make up the full without 18 to 1 to 1 to 1 to 1 to 1 to 1 to 1 to 1 liter Lit up and rise 119773.doc •24- 200806816 pH 0.1-3 0.1-3 0.1-3 0.1-3 0.1-3 0.1-3 0.1-3 NA Current density (A/dm2) 12. 4 20 20 20 20 50 80 Temperature, °c 45 45 45 45 45 45 45 80 Cathode efficiency 25% 15% 15% 15% 15% 30% About 10% Lattice Amor. Amor. Amor. Amor. Amor. NA sc grain preferred orientation ΝΑ NA NA NA NA Pwdr Pwdr Rndm 4 hours / 19l °c Annealed lattice parameter 2.882 2.884 2.882 2.886 2.883 NA NA - organically added J pH>4 Amor. xtal. xtal· xtal. Xtal. xtal. xtal. Grain orientation (111), Rndm (111), Rndm (111), Rndm (111), Rndm (111), Rndm (111), Rndm electrolyte + A1C13*6H20 0.62 Μ, ρΗ<3 Xtal. xtal. xtal. xtal. xtal. xtal. (In Table 3: pwdr = powder; Amor. = amorphous open; rndm = random; NA = not applicable; SC = simple cubic; xtal. = Crystallization) In Table 4, the sediments from Tables 1, 2, and 3 were compared using standard test methods commonly used to evaluate deposited functional chromium electrodeposits. It can be observed from this table that amorphous deposits, and deposits that are not BCC (body-centered cubic) cannot pass all necessary initial tests. 119773.doc -25- 200806816 Table 4 Comparison of Test Results of Deposited Functional Chromium from Electrolytes in Table 1-3 Electrolyte Structure Directional Appearance Grinding Test Large Crack Hardness after Heating Vickers (100 g) Cracks Caused by Depression H1 BCC Random powder failure - H2 BCC (222) Glossy qualified No 900 No H3 BCC (222) (211) Glossy qualified No 950 No H4 BCC (222) Glossy qualified No 950 No H5 BCC+ SC (222) (110) Gloss failure No 900 No H6 BCC Random Gloss Failure No 960 EC1 amor. ΝΑ Glossy failure has 845-1000 with EC2 amor. ΝΑ Glossy failure has 1000 EC3 amor. ΝΑ Glossy failure has - There is T1 amor. ΝΑ Glossy failure has 1000 T2 amor. ΝΑ Glossy failure has 950 T3 amor. ΝΑ Glossy failure has 950 T4 amor. ΝΑ Glossy failure has 900 T5 amor. ΝΑ Glossy failure has 1050益T6 amor. ΝΑ Glossy failure has 950 T7 powdery — — — — IL1 SC random black particle failure has — based on substitution Industry needs chromium electrodeposition bath, the deposit of the product from a trivalent chromium bath electrodeposition 119773.doc -26- 200806816 valid and must be based crystals as a functional chromium deposit. It has been discovered that certain additives can be used in conjunction with the adjustment of the process variables of the electrodeposition process to obtain a desired crystalline chromium deposit from a trivalent complex bath substantially free of hexavalent chromium. Typical process variables include current density, solution temperature, solution agitation, additive concentration, control of the applied current waveform, and solution pH. Each additive test can be used to correctly estimate the specific additive efficiency, including, for example, x-ray diffraction (XRD) (to study the structure of the chromium deposit, X-ray photoelectron spectroscopy (XPS) (for The composition of the chromium deposit is determined to be greater than about 0.2-0.5% by weight, elastic rebound determination (ERD) (for determining gas content), and electron microscopy (for determining physical or morphological characteristics, such as cracks). Technical towels, usually and widely derived from the chrome deposit of the San Mi bath must be implemented at a pH of less than about 2.5, however, the system isolating the three-valent road money processing process, which includes a brush plating process, in which a higher yang is used, but The higher cation used in the brush plating scheme cannot obtain crystalline chromium deposits. Therefore, in order to evaluate the efficiency and stability of various additives, high-electrolytes and generally recognized low-pH electrolytes were tested. 119773.doc 27- 200806816 5: Additive concentration range of additive additive induced from T2 crystallization from trivalent chromium bath Τ2 pH 2.5: Is it crystallized? T2 pH 4.2: Is it crystallized? Methionine 0.1, 0.5, 1.0, 1.5 g/liter No Yes, yes, na cystine 0.1, 0.5, 1.0, 1.5 g / liter No, yes, yes, is thiophene 0.1, 0.5, 1, 1.5, 2, 3 ml / liter No No, no, yes Yes, yes, is thiodipropionic acid 0.1, 0.5, 1.0, 1.5 gram / liter No No, yes, yes, thiodiethanol 0.1,0·5, 1-0, 1.5 g / liter No No, yes, yes, is cysteine 0.1,1,2.0, 3.0 g / liter No, yes, yes, is fine propyl sulfide 0.5, 1.0, 1.5 ml / liter No No, yes, yes, na sulfur Sub-salicylic acid 0.5, 13 1.5 No, yes, is 3J-dithiodipropionic acid 1,2, 5, 10 g / liter No, yes, yes, is tetrahydrothiophene 0.5, 1.0, 1.5 ml / Whether the liter is negative or not, according to the data shown in Table 5, it is apparent that when the chromium is electrodeposited from the trivalent chromium solution at about the above concentration and when the pH of the bath is greater than about 4, there are two in its structure. The sulphur-containing compound induces crystallization, wherein the chromium crystal according to the invention has a lattice parameter of 2.8895 +/- 0.0025 angstroms. In one embodiment, other divalent sulphur compounds may be used in the baths described herein for electrodeposition. Crystalline chromium of the lattice parameters of the present invention. In one embodiment, chromium crystals are also induced when a compound having sulfur, selenium or tellurium is used as described herein. In one embodiment, the selenium and tellurium compounds correspond to the above The identified sulfur compounds, and like 119773.doc -28 - 200806816, as with the sulfur compounds, resulted in the electrodeposition of crystalline chromium having a lattice parameter of 2.8895 +/- 0.0025 angstroms. To further illustrate the induction of such crystallization, electrolyte D3 was used at pH 5.5 and at a temperature of 5 Torr. A study using a brass substrate for the crystallization-inducing additive using the same cathode current density of 40 A/dm2 and a plating time of 3 minutes was reported in Table 6 below. After the plating is completed, X-ray diffraction, radiation-induced X-ray fluorescence is used to measure the thickness, and electron-induced ray-ray fluorescence is combined with an energy discrete spectrophotometer to measure the sulfur content to test the sample. Table 6 summarizes these data. This data indicates that not only is there a divalent sulfur compound present in the solution at a concentration exceeding the critical concentration for inducing crystallization but also sulfur is present in the deposit. Table 6: Induction of sulfur from various divalent sulfur additives and effect on Cr-plated crystallization and plating rate of Cr+3 solution

H9773.doc -29- 200806816 1.5毫升 是 2.68 6.7 2毫升 是 4.56 7.8 3毫升 是 6.35 7.1 硫代二丙酸 〇·1克 否 6.73 1 0.5克 是 4.83 3.5 1.0克 是 8.11 1.8 1.5克 是 8.2 3.1 硫代二乙醇 0·1毫升 否 4.88 0.8 0.5毫升 是 5.35 4 1.0毫升 是 6.39 4 1.5毫升 是 3.86 4.9 半胱胺酸 0.1克 是 2.08 5.1 1.0克 是 1.3 7.5 2.0克 是 0.35 8.3 3.0克 是 0.92 9.7 晞丙基硫 0.1毫升 否 6.39 1.3 (油) 0.5毫升 是 4.06 3.4 1.0毫升 是 1.33 4.9 1.5毫升 (不溶) 5.03 2.6 硫代水楊酸 0.5克 是 2.09 5.8 1_〇克 是 0.52 5.5 1_5克 是 0.33 7.2 1.5克 是 0.33 7.2 3,3’-硫代二丙酸 1克 是 7.5 5.9 2克 是 6 6.1 5克 是 4 6 10克 是 1 6.2 (S含量藉由EDS測定) 119773.doc •30- 200806816 ("(不溶)”係指該添加劑在給定濃度下飽和) 下表7提供關於根據本發明三價鉻電鍍浴之額外數據。 表7用於自Cr+3溶液製備沉積態結晶Cr之代表性調配 物。 方法 電解質 添加劑 pH-0C· A/dm2 陰極 效率 較佳 定向 Hv [C] [S] [Ν] P1 T2 4毫升/公升硫 嗎琳 5.5-50-40 5-10% (222) 900- 980 3.3 1.57 0.6 P2 T2 3毫升/公升硫 代二乙醇 5.5-50-40 10% 無規及 (222) - 3.0 1.4 0.6 P3 T2 1克/公升1-半 胱胺酸 5.5-50-40 5% 無規及 (222) - P4 T5 4毫升/公升硫 嗎琳 5.5-50-40 5-10% (222) 900- 980 P5 T5 3毫升/公升硫 代二乙醇 5.5-50-40 10% 無規及 (222) - P6 T5 1克/公升1-半 胱胺酸 5.5-50-40 5% 無規及 (222) - P7 T5 4毫升/公升硫 嗎琳 5.5-50-40 15% (222) 900- 980 P8 T5 3毫升/公升疏 代二乙醇 5.5-50-40 10-12% 無規及 (222) - P9 T5 1克/公升1-半 胱胺酸 5.5-50-40 7-9% 無規及 (222) P10 T5 2克/公升硫代 水揚酸 5.5-50-40 10-12% (222) 940- 975 5.5 1.8 1.3 P11 T5 2克/公升3,3’-二石荒代二丙酸 5.5-50-40 12-15% (222) 930- 980 4.9 2.1 1.1 119773.doc -31 - 200806816 以上實例皆利用直流而不使用複雜陰極波形(例如脈動 或週期性反脈動鍍敷)製備,但該等對所施加㈣之變化 皆在本發明範圍内。表7中所有為 负兩、、、σ日日之實例沉積態皆具 有2.8895+Λ0.0025埃之晶格常數。 在本發明料之其他實财,脈㈣㈣使㈣單脈動 波形使时法_有或沒有硫嗎敎情況下實施,該脈動 波形係利用配備有功率增強介面及Kepc〇雙極+/_ι〇Α電源 之Princeton Applied Researeh 273Α型恒電位儀產生。脈動 波形係矩形波,5〇%工作循環,具有足約電流以產生4〇 A/dm2總電流密度。所用頻率為〇·5 Hz、5 Ηζ、5〇 Ηζ^5〇〇H9773.doc -29- 200806816 1.5 ml is 2.68 6.7 2 ml is 4.56 7.8 3 ml is 6.35 7.1 thiodipropionate · 1 g no 6.73 1 0.5 g is 4.83 3.5 1.0 g is 8.11 1.8 1.5 g is 8.2 3.1 sulfur Substituted diethanol 0. 1 ml No 4.88 0.8 0.5 ml is 5.35 4 1.0 ml is 6.39 4 1.5 ml is 3.86 4.9 Cysteine 0.1 g is 2.08 5.1 1.0 g is 1.3 7.5 2.0 g is 0.35 8.3 3.0 g is 0.92 9.7 晞Propyl sulphate 0.1 ml No 6.39 1.3 (Oil) 0.5 ml is 4.06 3.4 1.0 ml is 1.33 4.9 1.5 ml (insoluble) 5.03 2.6 thiosalicylic acid 0.5 g is 2.09 5.8 1_ gram is 0.52 5.5 1_5 gram is 0.33 7.2 1.5 g is 0.33 7.2 3, 3'-thiodipropionic acid 1 g is 7.5 5.9 2 g is 6 6.1 5 g is 4 6 10 g is 1 6.2 (S content is determined by EDS) 119773.doc • 30- 200806816 (" (insoluble) means that the additive is saturated at a given concentration.) Table 7 provides additional data regarding the trivalent chromium plating bath according to the present invention. Table 7 is used to prepare deposited crystalline Cr from a Cr+3 solution. Representative formulation. Electrolyte additive pH-0C· A/dm2 Cathodic efficiency better orientation Hv [C] [S] [Ν] P1 T2 4 ml / liter thiophene 5.5-50-40 5-10% (222) 900- 980 3.3 1.57 0.6 P2 T2 3 ml / liter thiodiethanol 5.5-50-40 10% random and (222) - 3.0 1.4 0.6 P3 T2 1 g / liter 1-cysteine 5.5-50-40 5% random and (222) - P4 T5 4 ml / liter thiophene 5.5-50-40 5-10% (222) 900- 980 P5 T5 3 ml / liter thiodiethanol 5.5-50-40 10% random and (222 ) - P6 T5 1 g / liter 1-cysteine 5.5-50-40 5% random and (222) - P7 T5 4 ml / liter thiophene 5.5-50-40 15% (222) 900- 980 P8 T5 3 ml / liter sparse diethanol 5.5-50-40 10-12% random and (222) - P9 T5 1 g / liter 1-cysteine 5.5-50-40 7-9% random and (222) P10 T5 2 g / liter thiosalicylic acid 5.5-50-40 10-12% (222) 940- 975 5.5 1.8 1.3 P11 T5 2 g / liter 3,3 '- two stone waste dipropionic acid 5.5-50-40 12-15% (222) 930- 980 4.9 2.1 1.1 119773.doc -31 - 200806816 The above examples all use DC without using complex cathode waveforms (eg pulsation or cycle) Counter-pulsation plating) was prepared, but those changes are applied within the scope of the invention (iv). All of the examples in Table 7 are negative two, , and σ. The example deposition states have a lattice constant of 2.8895 + Λ 0.0025 angstrom. In the other real money of the present invention, the pulse (4) (4) enables (4) a single pulsation waveform to be implemented with or without sulphur, which is equipped with a power enhancement interface and a Kepc 〇 bipolar +/_ι〇Α Power is produced by the Princeton Applied Researeh 273Α potentiostat. The pulsating waveform is a rectangular wave with a 5 〇 % duty cycle and a sufficient current to produce a total current density of 4 〇 A/dm 2 . The frequency used is 〇·5 Hz, 5 Ηζ, 5〇 Ηζ^5〇〇

Hz。在所有頻率下,根據方法ρι在沒有硫嗎啉之情況下該 等沉積物為非晶形,而根據方法^在有硫嗎啉之情況下該 專沉積物為沉積態結晶。 在本發明用途之其他實例中,脈動沉積係使用簡單脈動 波形使用方法P1在有或沒有硫嗎琳之情況下實施,該脈動 波形係利用配備有功率增強介面及KepC0雙極+/-10A電源 之Princeton Applied Research 273A型恒電位儀產生。脈動 波形係矩形波,50%工作循環,具有足夠電流以產生4〇 A/dm2總電流密度。所用頻率為〇 5 Hz、5 Hz、50 Hz及500 Hz。在所有頻率下,根據方法P1在沒有硫嗎啉之情況下該 等沉積物為非晶形,而根據方法?1在有硫嗎啉之情況下該 等沉積物為沉積態結晶,且具有2.8895+/-0.0025埃之晶格 常數。 同樣,電解質T5係在有或沒有硫代水楊酸之情況下以2 119773.doc • 32 - 200806816 克/公升之濃度使用各種脈動波形進行測試,該等脈動波 形具有66-109 A/dm2之電流範圍,其中脈動持續時間自 0.4-200毫秒且靜止時間為0.1-1毫秒,其包括具有38-55 A/dm2之反電流及0.1-2毫秒持續時間之週期性反波形。在 所有情況下,在沒有硫代水揚酸之情況下,該沉積物為非 晶形’在有硫代水楊酸之情況下該沉積物為結晶’且具有 2.8895+/-0.0025埃之晶格常數° 在一實施例中’該等結晶絡沉積物係均相’沒有有意包 夾之粒子,且具有2.8895+Λ0.0025埃之晶格常數。舉例而 言,氧化鋁、特氟隆(Teflon)、碳化矽、碳化鎢、氮化鈦 等粒子可與本發明一起使用以形成沉積物中包含該等粒子 之結晶鉻沉積物。與本發明一起使用之該等粒子係實質上 以自先前技術方法得知之相同方式實施。 上述實例係使用鉑鈦陽極。然而,本發明決不限於使用 該等陽極。在一實施例中,可使用石墨陽極作為不溶性陽 極。在另一實施例中,可使用可溶性鉻或鉻鐵陽極。 在一實施例中,該等陽極可與該浴隔離。在一實施例 中,該等陽極可藉由使用可經緊密針織或鬆散編織之織物 隔離。適宜織物包括彼等該項技術中習知用於該用途者, 其包括(例如)棉織品及聚丙烯,後者係自Chautauqua Metal Finishing Supply,Ashville,NY獲得。在另一實施例中,該 陽極可藉由使用陰離子或陽離子膜隔離,例如以商品名 NAFION® (DuPont) 、 AC1PLEX® (Asahi Kasei)、 FLEMION® (Asahi Glass)出售之全氟磺酸膜或其他由Dow 119773.doc -33- 200806816 或由Membranes International Glen R〇ck(NJ)供應者。在一 實施例中,該陽極可放置於一隔室中,其中該隔室藉由一 離子交換裝置(例如陽離子或陰離子膜或鹽橋μ真充有不同 於整體電解質之酸性、中性、或鹼性電解質。 圖1包括三個根據本發明一實施例及利用先前技術之六 價鉻所沉積結晶鉻之X-射線繞射圖案(Cu k α)。該等1射 線繞射圖案在底部及中間分別包括在三價鉻浴中具有2克/ 公升(底部)及10克/公升(中間)3,3,_二硫代二丙(DTDp)酸自 二4貝鉻電解質T5所沉積之結晶鉻。每一該等樣品皆利用相 同沉積時間及電流密度沉積。與此相反,頂部樣品係來自 八仏電解質H4(如上文所述)之傳統鉻沉積物。如頂部及底 部掃描所示,對於六價鉻及2克/公升DTDp兩種情況而 言,無黃銅基板峰(對於中間掃描而言用(*)標識;亦參見 圖9及關於其之原文)表明厚沉積物,大於約2〇微米(Cu匕以 輻射穿過鉻之穿透深度)。與此相反,在1〇克/公升DTDp之 情況下黃銅峰之存在表明過量DTDP可使陰極效率減小。 然而,在兩種DTDP情況下,強及寬(222)反射表明存在強 {111}較佳定向且鉻之連續繞射域(通常認為與粒徑相關)極 小,且類似於來自六價方法H4之鉻。 圖2係來自先前技術三價鉻浴之非晶形鉻的典型乂_射線 繞射圖案(Cu k α)。如圖2中所示,其中沒有對應於該結構 中原子之規則出現位置之尖峰,若該鉻沉積物為結晶則應 觀察到尖峰。 ~ 圖3係一系列典型X-射線繞射圖案(Cu k α),其展示來自 119773.doc -34- 200806816 先前技術三價鉻浴(不含硫)之非晶形鉻沉積物退火的漸進 效應。在圖3中展示一系列x_射線繞射掃描,在圖3中自下 圖向上係指鉻沉積物採用越來越長退火時間時之情形。如 Θ中所示初始5亥非晶形路沉積物獲得類似於圖2之X-射 線繞射圖案,但隨著持續退火,該鉻沉積物逐漸結晶,此 獲得對應於有序晶體結構中規則出現原子之尖峰的圖案。 經退火鉻沉積物之晶格參數在2.882至2 885範圍内,儘管 此系列之品質並未好至足以使量測精確。 一 =4係-系列電子顯微照μ,其展示使一來自先前技術 三價鉻浴之初始非晶形鉻沉積物退火的大裂紋效應。在標 記為”沉積態非晶形鉻”之顯微照片中,鉻層係沉積於斑駁 外觀基板上之淺色層。在標記為,,於250〇c 小時"之顯微 照片中,於250。(:下退火丨小時後,形成大裂紋,同時該鉻 沉積物結晶,該等大裂紋延伸穿過該鉻沉積物之厚度直至 該基板。在此及隨後顯微照片中,鉻沉積物與基板間之介 面係大體上垂直於該等大裂紋之傳播方向蔓延之模糊界 線,且係由其中有”P1"之小黑色正方形標識。在標記為 π於350°C下1小時"之顯微照片中,於35〇t:下退火i小時 後,形成更大且更確定大裂紋(與"於小時,,樣品相 比),同時該鉻沉積物結晶,該等大裂紋延伸穿過該鉻沉 積物之厚度直至該基板。在標記為"於45〇t下i小時"之顯 微照片中,於45(TC下退火丨小時後,形成該等大裂紋且其 較更低溫度樣品大,同時該鉻沉積物結晶,該等大裂紋延 伸穿過該鉻沉積物之厚度直至該基板。在標記為,,於55〇<t H9773.doc -35- 200806816 下1小時"之顯微照片中,於550°C下退火1小時後,形成該 等大裂紋且其看來似乎必更低溫度樣品更大,同時該鉻沉 積物結晶,該等大裂紋延伸穿過該鉻沉積物之厚度直至該 基板。 圖5展示一根據本發明沉積態結晶鉻沉積物之典型χ•射 線繞射圖案(Cu k α)。如圖5中所示,該等射線繞射峰尖 銳且經清晰界定,此表明根據本發明該鉻沉積物結晶。Hz. At all frequencies, the deposit is amorphous in the absence of thiomorpholine according to the method ρι, and according to the method 在 in the case of thiomorpholine, the deposit is crystalline. In other examples of the use of the invention, the pulsation deposition is performed using a simple pulsation waveform using method P1 with or without thiophene, which utilizes a power enhancement interface and a KepC0 bipolar +/- 10A power supply. Produced by the Princeton Applied Research Model 273A potentiostat. The pulsating waveform is a rectangular wave with a 50% duty cycle and sufficient current to produce a total current density of 4 〇 A/dm2. The frequencies used are 〇 5 Hz, 5 Hz, 50 Hz and 500 Hz. At all frequencies, according to method P1, in the absence of thiomorpho, the deposits are amorphous, according to the method? 1 In the presence of thiomorpholine, the deposits are in the as-deposited state and have a lattice constant of 2.8895 +/- 0.0025 angstroms. Similarly, electrolyte T5 was tested at various concentrations of 2 119773.doc • 32 - 200806816 g/L with or without thiosalicylic acid using a variety of pulsating waveforms of 66-109 A/dm2. The current range, wherein the pulsation duration is from 0.4 to 200 milliseconds and the rest time is 0.1 to 1 millisecond, including a periodic inverse waveform having a counter current of 38-55 A/dm2 and a duration of 0.1-2 milliseconds. In all cases, in the absence of thiosalicylic acid, the deposit is amorphous 'the crystallization is in the case of thiosalicylic acid' and has a lattice of 2.8895 +/- 0.0025 angstroms Constants In one embodiment, 'these crystalline deposits are homogeneous' have no intentionally entrapped particles and have a lattice constant of 2.8895 + Λ 0.0025 angstroms. By way of example, particles of alumina, Teflon, tantalum carbide, tungsten carbide, titanium nitride, and the like can be used with the present invention to form crystalline chromium deposits comprising such particles in the deposit. The particle systems used with the present invention are substantially carried out in the same manner as known from prior art methods. The above examples use a platinum titanium anode. However, the invention is in no way limited to the use of such anodes. In one embodiment, a graphite anode can be used as the insoluble anode. In another embodiment, a soluble chromium or chrome-iron anode can be used. In an embodiment, the anodes can be isolated from the bath. In one embodiment, the anodes can be isolated by using a fabric that can be tightly knitted or loosely woven. Suitable fabrics include those of ordinary skill in the art for use in this application, including, for example, cotton and polypropylene, the latter being available from Chautauqua Metal Finishing Supply, Ashville, NY. In another embodiment, the anode can be isolated by using an anionic or cationic membrane, such as a perfluorosulfonic acid membrane sold under the tradenames NAFION® (DuPont), AC1PLEX® (Asahi Kasei), FLEMION® (Asahi Glass) or Others are supplied by Dow 119773.doc -33- 200806816 or by Membranes International Glen R〇ck (NJ). In one embodiment, the anode can be placed in a compartment wherein the compartment is filled with an acid exchange device (eg, a cationic or anionic membrane or a salt bridge) that is acidic, neutral, or Alkaline electrolyte. Figure 1 includes three X-ray diffraction patterns (Cu k α) of crystalline chromium deposited according to an embodiment of the invention and using hexavalent chromium of the prior art. The 1 ray diffraction pattern is at the bottom and The middle consists of 2 g/liter (bottom) and 10 g/liter (intermediate) 3,3,_dithiodipropene (DTDp) acid deposited in a trivalent chromium bath from a 2 4 chrome electrolyte T5. Chromium. Each of these samples is deposited using the same deposition time and current density. In contrast, the top sample is from a conventional chromium deposit of the eight-electrolyte electrolyte H4 (described above), as shown by the top and bottom scans, for In both cases of hexavalent chromium and 2 g/LDT DTDp, no brass substrate peaks (marked with (*) for intermediate scanning; see also Figure 9 and the original text) indicate thick deposits greater than about 2 〇micron (Cu匕 penetrates through the chrome In contrast, the presence of a brass peak at 1 gram per liter of DTDp indicates that excess DTDP can reduce cathode efficiency. However, in both DTDP cases, strong and broad (222) reflections indicate strong presence. {111} is preferably oriented and the continuous diffraction domain of chromium (generally considered to be related to particle size) is extremely small and similar to chromium from the hexavalent process H4. Figure 2 is typical of amorphous chromium from prior art trivalent chromium baths.乂 _ ray diffraction pattern (Cu k α). As shown in Figure 2, there is no peak corresponding to the regular occurrence of atoms in the structure, if the chromium deposit is crystalline, a spike should be observed. ~ Figure 3 A series of typical X-ray diffraction patterns (Cu k α) showing the progressive effect of annealing of amorphous chromium deposits from the prior art trivalent chromium bath (without sulfur) from 119773.doc -34-200806816. A series of x-ray diffraction scans are shown in Figure 3, and in Figure 3, the upward graph refers to the case where the chromium deposits are subjected to longer and longer annealing times. The initial 5 Hai amorphous road deposits are obtained as shown in the scheme. Similar to the X-ray diffraction pattern of Figure 2, but with continued retreat The chromium deposit gradually crystallizes, which results in a pattern corresponding to the peak of the regularly occurring atom in the ordered crystal structure. The lattice parameter of the annealed chromium deposit is in the range of 2.882 to 2 885, although the quality of the series is not good. Sufficient to make the measurement accurate. One = 4 series - series electron microscopy μ, which shows the large crack effect of annealing an initial amorphous chromium deposit from a prior art trivalent chromium bath. In the photomicrograph of the crystalline chromium, the chrome layer is deposited on a light-colored layer on the mottled-substrate substrate. In the photomicrograph labeled "at 250" hour, at 250. (: under annealing 丨 hours Thereafter, a large crack is formed while the chromium deposit crystallizes, and the large cracks extend through the thickness of the chromium deposit up to the substrate. In this and subsequent photomicrographs, the interface between the chromium deposit and the substrate is substantially perpendicular to the blurring boundary of the propagation of the large cracks, and is identified by a small black square with "P1". In the photomicrograph of π at 350 ° C for 1 hour, after annealing for 1 hour at 35 °t:, a larger and more determined large crack is formed (compared with " in hours, compared to the sample), The chromium deposits crystallize and the large cracks extend through the thickness of the chromium deposit up to the substrate. In the photomicrograph labeled "i hours" at 45 〇t, annealed at 45 (TC) After an hour, the large cracks are formed and the sample is larger at a lower temperature, while the chromium deposit crystallizes, the large cracks extending through the thickness of the chromium deposit up to the substrate. At the mark, at 55〇<;t H9773.doc -35- 200806816 In the photo of the next hour ", after annealing at 550 ° C for 1 hour, these large cracks are formed and it seems that the temperature sample must be lower, and Crystallization of chromium deposits through which the large cracks extend Thickness up to the substrate. Figure 5 shows a typical χ-ray diffraction pattern (Cu k α) of a deposited crystalline chromium deposit according to the present invention. As shown in Figure 5, the ray diffraction peaks are sharp and clearly defined This indicates that the chromium deposit crystallizes according to the invention.

圖6展不根據本發明結晶鉻沉積物之典型χ_射線繞射圖 案(Cu k α)。圖6中所示中間兩個χ·射線繞射圖案展示強 (222)峰,此表明該{111}較佳定向(ρ〇)類似於利用自六價 鉻浴所沉積之結晶鉻所觀察到的。圖6中所示之頂部及底 部X-射線繞射圖案包括指示針對其他結晶鉻沉積物所觀察 之較佳定向的(2〇〇)峰。 圖7係緣示在鉻沉積物之—實施例中硫濃度與鉻沉積物 結晶度關係的曲線圖。在圖7所示之圖表中,若該沉積物 係晶體,則該結晶度軸指定為值】,而若該沉積物係非晶 形,則該結晶度軸指定為值〇。因此,在圖7所示實施例 中,當該鉻沉積物之硫含量自約17重量%至約4重量❶^ 該沉積物係結晶,而在此範心外,㈣㈣係非晶 ^ ’就此而言’在給定結晶鉻沉積物中所存在硫 之數量可改變。換言之,在一此者 二貝轭例中,一結晶鉻沉積 物可包έ (例如“^重量❹^硫 立局日日,且在其他實施例 ㈣有此硫含量之沉積物可為非晶形(如圖7中所 ,、他實施例中,舉例而言,可在為結晶之絡沉積物中發現 H9773.doc -36- 200806816 一雨達約l 〇重量%之更高硫含量,而在其他實施例中,若 硫含量大於4重量%,則該沉積物可為非晶形。因此,硫 含量極為重要,但並非控制及影響三價衍生之鉻沉積物結 晶度之唯^變量。 圖8係一比較晶袼參數(以埃(Α)表示)之曲線圖,其將根 據本發明之結晶鉻沉積物與來自六價鉻浴之結晶鉻沉積物 及經退火沉積態非晶形鉻沉積物進行比較。如圖8中所 示本發明結aa鉻;儿積物之晶格參數明顯較以高溫冶金方 式獲得之鉻("PyroCr”)的晶格參數為大且與其截然不同, 其明顯較所有六價鉻沉積物之晶格參數為大且 與其截然不同,且明顯較經退火沉積態非晶形鉻沉積物 (”T1(350°C )”、”T1(450°C ),’及"T1(550°C ),,)之晶格參數為 大且與其截然不同。本發明三價結晶鉻沉積物之晶格參數 與其他鉻沉積物(例如彼等圖8中所繪示者)之晶袼參數間之 差異係統計有效的,根據標準研究"t,,檢驗至少95%信賴水 準。 圖9係展示硫代水揚酸數量增加之漸進效應的典型χ_射 線繞射圖案(Cu k α),其展示根據本發明一實施例來自三 價鉻浴之結晶鉻沉積物的可靠一致的(222)反射、(η ”較 佳定向。在圖9中,結晶鉻係利用標稱2-6克/公升硫代水揚 酸(過罝140 AH/L)在1〇安培/公升(A/L)下電解自三價鉻電 解質T5(如上文所闡述者)沉積於黃銅基板(來自黃銅之峰由 (*)標示)上,此證明可靠一致的(222)反射、{111}較佳定向 沉積物。該等樣品係以約14 ΑΗ間隔獲得。 H9773.doc -37- 200806816 在一實施例中’陰極效率係介於約5%至約8〇%之間,且 在一實施例中’陰極效率係介於約1 〇%至約4〇%之間,且 在另一實施例中,陰極效率係介於約1 〇%至约30%之間。 在另一實施例中,該結晶鉻電沉積物(其中該鉻具有 2.8895+/-0.0025埃之晶袼常數)之附加合金化可使用硫酸亞 鐵及次構酸鈉作為鐵及磷來源在有或無額外2克/公升硫代 水揚酸之情況下實施。將〇· 1克/公升至2克/公升亞鐵離子 添加於電解質T7獲得包含2-20%鐵之合金。該等合金在添 加硫代水揚酸之情況下係非晶形。添加1-2〇克/公升次磷酸 鈉獲得沉積物中包含2-12%磷的合金。除非添加硫代水揚 酸,否則該等合金為非晶形。 在另一實施例中,晶格常數為2·8895+/-〇·0〇25埃之結晶 鉻/儿積物係自具有2克/公升硫代水楊酸之電解質Τ7使用超 音波能以25 kHz及0.5 MHz之頻率攪動獲得。所得沉積物 係晶格常數為2·8895+/·〇.〇〇25埃之光亮結晶,且無論所用 頻率如何,沉積速率無明顯改變。 應主思,在整個說明書及請求項中,所揭示範圍及比例 之數字限值可經組合,且認為包括所有中間值。因此,舉 例而言’當特定揭示範圍^㈧及1〇_5〇時,認為範圍 110 I*"50、10-100及5〇-100如同中間整數值一樣皆在該 2内,容範圍内。而且,認為所有數值皆在前面加上修飾 ”吾約,無論此術語是否為特定陳述。而且,當該鉻沉積 物係根據本發明如本文所揭示自三價鉻浴電沉積,且如此 形成之沉積物係如本文所述為結晶時,認為晶格常數為 119773.doc -38- 200806816 2.8895+/-0.0025埃,無論該晶格常數是否特定陳述。最 後,認為所揭示之元素及組份之所有可能組合皆在揭示内 容之範圍内,無論是否經特定提及。 儘管已針對某些具體實施例解釋本發明之原理,且係出 於现明目的提供,但應瞭解,閱讀該說明書後其各種改變 對熟悉該項技術者將變得顯而易見。因此,應瞭解,本文 所揭示之發明意欲將該等改變涵蓋於隨附請求項之範圍 内。本發明之範圍只受請求項範圍之限制。 【圖式簡單說明】 圖1包括二個根據本發明一實施例及利用先前技術之六 價鉻所沉積結晶鉻之χ_射線繞射圖案(Cu k α)。 圖2係來自先前技術三價鉻浴之非晶形鉻的典型χ•射線 繞射圖案(Cu k (X)。 圖3係典型X-射線繞射圖案(Cu ka),其展示來自先前 技術二價鉻浴之非晶形鉻沉積物退火的漸進效應。 圖4係一系列電子顯微照片,其展示使一來自先前技術 三價絡浴之初始非晶形鉻沉積物退火的大裂紋效應。 圖5係根據本發明一實施例沉積態結晶鉻沉積物之典型 X-射線繞射圖案(CU k a)。 圖6係根據本發明一實施例結晶鉻沉積物之―系列典型 X-射線繞射圖案(Cllka)。 圖7係繪示在鉻沉積物之一實施例中硫濃度與鉻沉積物 結晶度關係之曲線圖。 、 圖8係一比較晶格參數(以埃(A)表示)之曲線圖,其將 119773.doc -39- 200806816 根據本發明一實施例之結晶鉻沉積物與(2)來自六價鉻浴之 結晶鉻沉積物及(3)經退火沉積態非晶形鉻沉積物進行比 較。 圖9係展不硫代水揚酸數量增加之漸進效應的典型乂_射 線%射圖案(Cu k α) ’其展示根據本發明一實施例來自三 辐鉻冷之結晶鉻沉積物的可靠一致的(222)反射、(111》較 佳定向。 應瞭解’下文所揭*之製程㈣及結構並未構成製造包 含本發明功能性結晶鉻沉積物之部件的完整製程流程。本 發明可結合該項技術中目前所用製造技術實施,且彼等常 用製程步誠料了理解本發明之需要而包括於本文中。Figure 6 shows a typical χ-ray diffraction pattern (Cu k α) of a crystalline chromium deposit according to the present invention. The middle two χ·ray diffraction patterns shown in Figure 6 show a strong (222) peak, which indicates that the {111} preferred orientation (ρ〇) is similar to that observed with crystalline chromium deposited from a hexavalent chromium bath. of. The top and bottom X-ray diffraction patterns shown in Figure 6 include (2 〇〇) peaks indicating the preferred orientation observed for other crystalline chromium deposits. Figure 7 is a graph showing the relationship between the sulfur concentration and the crystallinity of chromium deposits in the chromium deposit-embodiment. In the graph shown in Fig. 7, the crystallinity axis is designated as a value if the deposit is a crystal, and the crystallinity axis is designated as a value 若 if the deposit is amorphous. Therefore, in the embodiment shown in FIG. 7, when the sulfur content of the chromium deposit is from about 17% by weight to about 4% by weight, the deposit is crystallized, and outside the core, (4) (four) is amorphous ^ ' In other words, the amount of sulfur present in a given crystalline chromium deposit can vary. In other words, in the case of the bismuth yoke, a crystalline chromium deposit may be coated (for example, "the weight of the sulphur is deflated, and in other embodiments (4), the deposit having the sulphur content may be amorphous. (As shown in FIG. 7 , in his embodiment, for example, H9773.doc -36-200806816 can be found in the crystallization complex as a rain, up to about 1% by weight of the higher sulfur content, and In other embodiments, if the sulfur content is greater than 4% by weight, the deposit may be amorphous. Therefore, the sulfur content is extremely important, but is not a variable that controls and affects the crystallinity of the trivalent-derived chromium deposit. A graph comparing the crystal enthalpy parameters (expressed in angstroms), which will be carried out according to the crystalline chromium deposit of the present invention and the crystalline chromium deposits from the hexavalent chromium bath and the annealed as-form amorphous chromium deposits. Comparing. As shown in Fig. 8, the present invention has a lattice of aa chrome; the lattice parameter of the cherries is significantly larger than that of the chromium obtained by pyrometallurgy ("PyroCr"), and is substantially different from The lattice parameters of all hexavalent chromium deposits are large and Significantly different, and significantly more lattice parameters than the annealed deposited amorphous chromium deposits ("T1 (350 ° C)", "T1 (450 ° C), 'and " T1 (550 ° C),) Large and distinctly different. The difference between the lattice parameters of the trivalent crystalline chromium deposit of the present invention and the crystal parameters of other chromium deposits (such as those depicted in Figure 8) is valid, according to the standard. Study "t, test at least 95% confidence level. Figure 9 is a typical χ-ray diffraction pattern (Cu k α) showing the progressive effect of an increase in the amount of thio-salicylic acid, which is shown in accordance with an embodiment of the present invention. Reliable consistent (222) reflection of the crystalline chromium deposits of the trivalent chromium bath, (η) preferred orientation. In Figure 9, the crystalline chromium system utilizes a nominal 2-6 g/L thiosalicylic acid (over 罝140 AH/L) electrolyzed from a trivalent chromium electrolyte T5 (as described above) at 1 ampere/liter (A/L) onto a brass substrate (from the peak of brass (*)) This demonstrates reliable (222) reflection, {111} preferred directional deposits. These samples were obtained at approximately 14 。 intervals. H9773.doc -37- 200806816 In one embodiment, the cathode efficiency is between about 5% and about 8%, and in one embodiment the 'cathode efficiency is between about 1% and about 4,000%, and in another In one embodiment, the cathode efficiency is between about 1% and about 30%. In another embodiment, the crystalline chromium electrodeposit (wherein the chromium has a crystal constant of 2.8895 +/- 0.0025 angstroms) Additional alloying can be carried out using ferrous sulfate and sodium hypochlorite as sources of iron and phosphorus with or without an additional 2 g/L of thiosalicylic acid. 〇·1 g/L to 2 g/L Ferrous ions are added to the electrolyte T7 to obtain an alloy containing 2-20% of iron. These alloys are amorphous in the presence of thiosalicylic acid. An alloy containing 2-12% of phosphorus in the deposit was obtained by adding 1-2 g/L of sodium hypophosphite. These alloys are amorphous unless thiosalicylic acid is added. In another embodiment, the crystalline chromium/integral having a lattice constant of 2.8895 +/- 〇·0 〇 25 Å is derived from an electrolyte having 2 g/liter of thiosalicylic acid Τ7 using ultrasonic energy. Frequency agitation at 25 kHz and 0.5 MHz is obtained. The resulting deposits had a lattice constant of 2·8895+/·〇·〇〇25 Å, and the deposition rate did not change significantly regardless of the frequency used. It should be understood that throughout the specification and claims, the numerical limits of the disclosed ranges and ratios can be combined and are considered to include all intermediate values. Therefore, for example, when the specific disclosure range ^(8) and 1〇_5〇, the range 110 I*"50, 10-100, and 5〇-100 are considered to be within the same range as the intermediate integer value. Inside. Moreover, it is believed that all values are preceded by a modification, whether or not the term is a particular statement. Moreover, when the chromium deposit is electrodeposited from a trivalent chromium bath as disclosed herein, and thus formed When the sediment system is crystallized as described herein, the lattice constant is considered to be 119773.doc -38 - 200806816 2.8895 +/- 0.0025 angstroms, regardless of whether the lattice constant is specifically stated. Finally, the disclosed elements and components are considered All possible combinations are within the scope of the disclosure, whether or not specifically recited. Although the principles of the present invention have been explained for some specific embodiments and are provided for the purpose of the present disclosure, it should be understood that after reading this specification It will be apparent to those skilled in the art that the present invention is to be construed as being limited to the scope of the claims. The scope of the present invention is limited only by the scope of the claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 includes two χ-ray diffraction patterns (Cu) of crystalline chromium deposited by hexavalent chromium according to an embodiment of the present invention. k α) Figure 2 is a typical χ•ray diffraction pattern (Cu k (X) from amorphous chromium of the prior art trivalent chromium bath. Figure 3 is a typical X-ray diffraction pattern (Cu ka), which shows Asymptotic effect of annealing of amorphous chromium deposits from prior art divalent chromium baths. Figure 4 is a series of electron micrographs showing large cracks that anneal an initial amorphous chromium deposit from a prior art trivalent complex bath. Figure 5 is a typical X-ray diffraction pattern (CU ka) of a deposited crystalline chromium deposit according to an embodiment of the invention. Figure 6 is a series of typical X-rays of crystalline chromium deposits in accordance with one embodiment of the present invention. Diffraction pattern (Cllka). Figure 7 is a graph showing the relationship between sulfur concentration and crystallinity of chromium deposits in one embodiment of chromium deposits. Figure 8 is a comparison of lattice parameters (expressed by angstrom (A) a graph of 119773.doc -39 - 200806816 according to an embodiment of the invention, a crystalline chromium deposit and (2) a crystalline chromium deposit from a hexavalent chromium bath and (3) an annealed as-form amorphous chromium The sediments were compared. Figure 9 shows an increase in the amount of non-thiosalicylic acid. A typical 乂-ray % shot pattern (Cu k α) of the progressive effect, which exhibits a reliable consistent (222) reflection, (111) preferred orientation from a three-spoke chromium cold crystalline chromium deposit in accordance with an embodiment of the present invention. It should be understood that the process (four) and structure disclosed in the following paragraphs do not constitute a complete process flow for manufacturing a component comprising the functional crystalline chromium deposit of the present invention. The present invention can be implemented in conjunction with the manufacturing techniques currently used in the art, and they are commonly used. The process steps are hereby incorporated by reference to the needs of the present invention.

119773.doc 40·119773.doc 40·

Claims (1)

200806816 十、申請專利範圍: 一種具有2.8895+/-0.0025埃之晶格參數的結晶鉻沉 物。 。 、 2·如請求項1之結晶鉻沉積物,其中該鉻沉積物係自三價 鉻浴電沉積。 如明求項1之結晶鉻沉積物,在該鉻沉積物中進一步包 括碳、氮及硫。 4·如吻求項3之結晶鉻沉積物,其中該鉻沉積物包括約i重 i %至約1〇重量%之硫。 月求項3之結晶鉻,其中該鉻沉積物包括約〇 · 1至約$重 量%之氮。 6·如凊求項3之結晶鉻,其中該鉻沉積物包括數量小於致 使該鉻沉積物變成非晶形之數量的碳。 7·如明求項3之結晶鉻沉積物,其中該沉積物包含約〗·7重 量%至約4重量%之硫、約〇1重量%至約3重量%之氮及約 0·1重量%至約10重量c/❶之碳。 8.如明求項1之結晶鉻沉積物,其中該沉積物實質上無大 裂紋。 … 9如明求項1之結晶鉻沉積物,其中該鉻具有{111}較佳定 向0 10·種包含結晶鉻沉積物之物件,其中該結晶絡沉積物具 有2.8895+/-0.0025埃之晶格參數。 11.如哨求項10之物件,其中該鉻沉積物具有{⑴}較佳定 向0 119773.doc 200806816 12.如請求項l〇之物件 及硫。 其中該鉻〉冗積物進一步包含碳 氮 13. -種在基板上電沉積結晶鉻沉積物之方法,其包括: 長:供一電錢浴,其台会二價祝 、匕3 一1貝珞有機添加劑及至少一 種二價硫來源,且實質上不含六價鉻; 將一基板浸於該電锻浴中;及 靶加電机以在該基板上沉積結晶鉻沉積物,其中該鉻 沉積物係當沉積時,係呈結晶態。200806816 X. Patent application scope: A crystalline chromium deposit having a lattice parameter of 2.8895 +/- 0.0025 angstroms. . 2. The crystalline chromium deposit of claim 1, wherein the chromium deposit is electrodeposited from a trivalent chromium bath. The crystalline chromium deposit of claim 1 further comprising carbon, nitrogen and sulfur in the chromium deposit. 4. A crystalline chromium deposit as claimed in claim 3, wherein the chromium deposit comprises from about 1% by weight to about 1% by weight of sulfur. The crystalline chromium of item 3, wherein the chromium deposit comprises from about 1 to about $% by weight of nitrogen. 6. The crystalline chromium of claim 3, wherein the chromium deposit comprises carbon in an amount less than the amount that causes the chromium deposit to become amorphous. 7. The crystalline chromium deposit of claim 3, wherein the deposit comprises from about 7% by weight to about 4% by weight sulfur, from about 1% by weight to about 3% by weight nitrogen and about 0.1 weight % to about 10 weights c/❶ of carbon. 8. The crystalline chromium deposit of claim 1, wherein the deposit is substantially free of large cracks. 9) The crystalline chromium deposit of claim 1, wherein the chromium has a {111} preferred orientation. The article comprises a crystalline chromium deposit, wherein the crystalline deposit has a crystal of 2.8895 +/- 0.0025 angstroms. Grid parameters. 11. The article of claim 10, wherein the chromium deposit has {(1)} preferred orientation 0 119773.doc 200806816 12. The article of claim 1 and sulfur. Wherein the chromium > redundancy further comprises carbon nitrogen 13. - a method of electrodepositing crystalline chromium deposits on a substrate, comprising: long: for a money bath, the table will be bivalent, 匕 3 - 1 shell An organic additive and at least one source of divalent sulfur, and substantially free of hexavalent chromium; immersing a substrate in the electric forging bath; and applying a motor to deposit a crystalline chromium deposit on the substrate, wherein the chromium Sediment systems are crystalline when deposited. 14. 如請求項13之方法,其中該結晶絡沉積物具有2簡+/_ 0 · 0 0 2 5埃之晶格參數。 15 ·如明求項13之方法,其中該結晶鉻沉積物具有丨111丨較佳 定向。 16·如請求項13之方法,其中該鉻沉積物於該鉻沉積物中進 一步包含碳、氮及硫。 17·如請求項16之方法,其中該鉻沉積物包含約j重量%至約 10重量%之硫。 18.如請求項16之方法,其中該鉻沉積物包含約〇1至約5重 量%之氮。 19·如請求項16之方法,其中該鉻沉積物包括數量小於致使 該鉻沉積物變成非晶形之數量的碳。 20.如請求項16之方法,其中該沉積物包含約ι·7重量。/❶至約 4重量%之硫、約〇」重量%至約3重量%之氮及約〇1重量 %至約10重量%之碳。 21·如請求項13之方法,其中該沉積物實質上無大裂紋。 119773.doc 200806816 22·如咕求項π之方法,其中該電鍍浴進一步包含氫氧化銨 或鹽或一級、二級或三級胺。 23·如請求項13之方法,其中該電鍍浴具有自4至約6·5之 pH。 24. 如請求項13之方法,其中該電鍍浴係處於自約35。〇至約 95°C之溫度下。 25. 如請求項13之方法,其中該電流係以至少約1〇安培/平方 分米(A/dm2)之電流密度施加。 26·如請求項13之方法,其中該電流係使用直流、脈動波形 或脈動週期性反波形中之任一者或任何其中兩種或以上 之組合施加。 27·如請求項13之方法,其中該二價硫來源包括具有以下通 式(Ϊ)的化合物中之一或兩者或以上之混合物: XLRi-XSVR^X2 (I) 其中在(I)中,X1與X2可相同或不同且X1與X2各自獨立 包括氫、_素、胺基、氰基、硝基、亞硝基、偶氮基、 烧m基、曱醯基、烷氧羰基、胺基羰基、烷基胺基羰 基、二烷基胺基羰基、羧基、磺酸根、亞磺酸根、膦酸 根、亞膦酸根、亞砜、胺基甲酸酯基、聚乙氧基化烷 基、聚丙氧基化烧基、經基、經鹵素取代之烧基、烧氧 基、硫酸烷基酯(alkyl sulfate ester)、烷硫基、烷基亞石黃 酿基、烷基磺醯基、膦酸烷基酯基或亞膦酸烷基酯基, 其中該等烷基及烷氧基係,或X1與X2—起可形成自 R1至R2之鍵結, 119773.doc 200806816 其中R1與R2可相同或不同且Ri與R2各自獨立包括單 鍵、烧基、稀丙基、烯基、快基、環己基、芳族及雜芳 族環、烧氧羰基、胺基羰基、烷基胺基羰基、二烷基胺 基羰基、聚乙氧基化及聚丙氧基化烧基,其中該等烧基 基團係CKC6,且 其中η具有自1至約5之平均值。 28.如請求項13之方法,其中該二價硫來源包括具有以下通 式(Ila)及/或(lib)的化合物中之一或其中兩者或以上之混 合物: R4v^Sk^R5 及/或 入 Re (Ila)14. The method of claim 13, wherein the crystalline collateral deposit has a lattice parameter of 2 Jane + / 0 0 0 2 5 angstroms. The method of claim 13, wherein the crystalline chromium deposit has a preferred orientation of 丨111丨. The method of claim 13, wherein the chromium deposit further comprises carbon, nitrogen and sulfur in the chromium deposit. 17. The method of claim 16, wherein the chromium deposit comprises from about j% by weight to about 10% by weight sulfur. 18. The method of claim 16, wherein the chromium deposit comprises from about 1 to about 5 weight percent nitrogen. The method of claim 16, wherein the chromium deposit comprises a quantity of carbon that is less than an amount that causes the chromium deposit to become amorphous. 20. The method of claim 16, wherein the deposit comprises about io.7 by weight. /❶ to about 4% by weight of sulfur, about 5% by weight to about 3% by weight of nitrogen and from about 1% by weight to about 10% by weight of carbon. The method of claim 13, wherein the deposit is substantially free of large cracks. 119773.doc 200806816 22. The method of claim π, wherein the electroplating bath further comprises ammonium hydroxide or a salt or a primary, secondary or tertiary amine. The method of claim 13, wherein the electroplating bath has a pH of from 4 to about 6.5. 24. The method of claim 13, wherein the electroplating bath system is at about 35. 〇 to a temperature of about 95 ° C. 25. The method of claim 13, wherein the current is applied at a current density of at least about 1 ampere amperage per square meter (A/dm2). The method of claim 13, wherein the current is applied using any one of a direct current, a pulsating waveform, or a pulsating periodic inverse waveform, or a combination of two or more thereof. The method of claim 13, wherein the divalent sulfur source comprises one or a mixture of two or more of the following formula (Ϊ): XLRi-XSVR^X2 (I) wherein in (I) X1 and X2 may be the same or different and X1 and X2 each independently include hydrogen, _ s, amine, cyano, nitro, nitroso, azo, alkyl, fluorenyl, alkoxycarbonyl, amine Carbocarbonyl, alkylaminocarbonyl, dialkylaminocarbonyl, carboxyl, sulfonate, sulfinate, phosphonate, phosphinate, sulfoxide, urethane, polyethoxylated alkyl, Polypropoxylated alkyl, perylene, halogen-substituted alkyl, alkoxy, alkyl sulfate, alkylthio, alkyl sulphate, alkylsulfonyl, phosphine An acid alkyl ester group or an alkyl phosphinate group, wherein the alkyl group and the alkoxy group, or X1 and X2 together form a bond from R1 to R2, 119773.doc 200806816 wherein R1 and R2 are Identical or different and Ri and R2 each independently include a single bond, an alkyl group, a dipropyl group, an alkenyl group, a fast group, a cyclohexyl group, an aromatic and heteroaromatic ring, a oxycarbonyl group, a carbonyl group, an alkylaminocarbonyl group, a dialkylaminocarbonyl group, a polyethoxylated group, and a polypropoxylated alkyl group, wherein the alkyl group is CKC6, and wherein η has an average of from 1 to about 5 value. 28. The method of claim 13, wherein the divalent sulfur source comprises one or a mixture of two or more of the compounds of the following formula (Ila) and/or (lib): R4v^Sk^R5 and / Or into Re (Ila) 其中在(Ila)及(lib)中,R3、R4、115及R6可相同或不同 且獨立地包括氫、函素、胺基、氰基、硝基、亞硝基、 偶氮基、烷羰基、甲醯基、烷氧羰基、胺基羰基、烷基 胺基羰基、二烧基胺基羰基、緩基、續酸根、亞績酸 根、膦酸根、亞膦酸根、亞砜、胺基甲酸酯基、聚乙氧 基化烧基、聚丙氧基化烧基、經基、經產素取代之烧 基、烷氧基、硫酸烷基酯、烷硫基、烷基亞磺醯基、烷 基磺醯基、膦酸烷基酯基或亞膦酸烷基酯基,其中該等 烷基及烷氧基係, 其中X代表碳、氮、氧、硫、硒或碲且其中m係自0至 119773.doc 200806816 約3, 其中η具有自1至約5之平均值,且 其中(Ila)或(lib)各自包括至少一個二價硫原子。 29.如請求項13之方法,其中二價硫來源包括具有以下通式 (Ilia)及/或(Illb)的化合物中之一或其中兩者或以上之混 合物:Wherein (Ila) and (lib), R3, R4, 115 and R6 may be the same or different and independently include hydrogen, a hydroxyl group, an amine group, a cyano group, a nitro group, a nitroso group, an azo group, an alkylcarbonyl group. , mercapto, alkoxycarbonyl, aminocarbonyl, alkylaminocarbonyl, dialkylaminocarbonyl, buffer, sulphate, yoghurt, phosphonate, phosphinate, sulfoxide, urethane Ester group, polyethoxylated alkyl, polypropoxylated alkyl, perylene, calcinin-substituted alkyl, alkoxy, alkyl sulfate, alkylthio, alkylsulfinyl, alkane a sulfonyl group, an alkyl phosphonate group or an alkyl phosphinate group, wherein the alkyl group and the alkoxy group, wherein X represents carbon, nitrogen, oxygen, sulfur, selenium or tellurium and wherein m is derived from 0 to 119773.doc 200806816 about 3, wherein η has an average value from 1 to about 5, and wherein (Ila) or (lib) each includes at least one divalent sulfur atom. 29. The method of claim 13 wherein the source of divalent sulfur comprises one or a mixture of two or more of the following compounds of the formula (Ilia) and/or (Illb): R4 丫線yR5R4 twist line yR5 A丄Rs及’或 iIIIa> (Illb) 其中,在(Ilia)及(Illb)中,&、I、心及以可相同或 不同且獨立包括氫、鹵素、胺基、氰基、硝基、亞硝 基、偶氮基、烷羰基、甲醯基、烷氧羰基、胺基羰基、 烷基胺基羰基、二烷基胺基羰基、羧基、磺酸根、亞磺 酸根、膦酸根、亞膦酸根、亞石風、胺基甲酸酯基、聚乙 氧基化烧基、聚丙氧基化燒基、經基、經函素取代之燒 基、烷氧基、硫酸烷基酯、烷硫基、烷基亞磺醯基、烷 基磺醯基、膦酸烷基酯基或亞膦酸烷基酯基,其中該等 烷基及烷氧基係CKC6, 其中X代表碳、氮、硫、硒或碲且其中m係自〇至約3, 其中η具有自1至約5之平均值,且 其中(Ilia)或(Illb)各自包括至少一個二價硫原子。 30·如請求項13之方法,其中當該結晶鉻沉積物加熱至高達 約300°C之溫度時並未形成大裂紋。 119773.doc 200806816 31. 一種在基板上電沉積結晶鉻沉積物 提供一電鍍浴,其包括三價鉻、 上不含六價鉻; 之方法,其包括: 有機添加劑,且實質 將一基板浸於該電鍍浴中;及 施加電流以將結晶鉻沉積物沉積於該基板上 鉻沉積物係當沉積時,係呈結晶態且該結晶鉻 有2.8895+Λ0.0025埃之晶格參數。 ’其中該 沉積物具A丄Rs and 'or iIIIa> (Illb) wherein, in (Ilia) and (Illb), &, I, and oxime may be the same or different and independently include hydrogen, halogen, amine, cyano, nitro , nitroso, azo, alkylcarbonyl, decyl, alkoxycarbonyl, aminocarbonyl, alkylaminocarbonyl, dialkylaminocarbonyl, carboxyl, sulfonate, sulfinate, phosphonate, sub Phosphonate, sulphur, urethane, polyethoxylated alkyl, polypropoxylated alkyl, thiol, alkoxy, alkyl sulfate, alkane a thio group, an alkylsulfinyl group, an alkylsulfonyl group, an alkyl phosphonate group or an alkyl phosphinate group, wherein the alkyl group and the alkoxy group are CCK6, wherein X represents carbon, nitrogen, Sulfur, selenium or tellurium and wherein m is from about 3 to 3, wherein η has an average value from 1 to about 5, and wherein (Ilia) or (Illb) each comprise at least one divalent sulfur atom. 30. The method of claim 13 wherein no large cracks are formed when the crystalline chromium deposit is heated to a temperature of up to about 300 °C. 119773.doc 200806816 31. A method of electrodepositing a crystalline chromium deposit on a substrate to provide an electroplating bath comprising trivalent chromium and no hexavalent chromium thereon; the method comprising: an organic additive, and substantially immersing a substrate in In the electroplating bath; and applying an electric current to deposit a crystalline chromium deposit on the substrate. The chromium deposit is in a crystalline state when deposited and the crystalline chromium has a lattice parameter of 2.8895 + Λ 0.0025 angstrom. Where the sediment 32_如請求項31之方法 定向。 j ’其中該結晶鉻沉積物具有(i j j )較佳 33.如請求項31之方法,其中在該鉻沉積物中該路沉積物進 一步包含碳、氮及硫。 34·如請求項33之方法,其中談鉻沉積物包含約i重量❶/❶至約 10重量%之硫。 3 5 · 士吻求項3 3之方法,其中該鉻沉積物包含約〇 · 1至約$重 量%之氮。32_ Method as requested in item 31. j ' wherein the crystalline chromium deposit has (i j j ) preferably 33. The method of claim 31, wherein the deposit in the chromium deposit further comprises carbon, nitrogen and sulfur. 34. The method of claim 33, wherein the chromium deposit comprises from about 1 weight ❶/❶ to about 10% by weight sulfur. The method of claim 3, wherein the chromium deposit comprises from about 1 to about $% by weight of nitrogen. 36·如請求項33之方法,其中該鉻沉積物包括數量小於致使 該鉻沉積物變成非晶形之數量的碳。 37·如請求項33之方法,其中該沉積物包含約17重量%至約 4重量❶/α之硫、約〇」重量%至約3重量%之氮及約〇1重量 %至約10重量❶/Q之碳。 38·如請求項31之方法,其中該沉積物實質上無大裂紋。 39·如請求項31之方法,其中該電鍍浴進一步包含氫氧化銨 或鹽,或一級、二級或三級胺。 40·如睛求項31之方法,其中該電鍍浴具有自45至約6.5之 119773.doc 200806816 pH。 41·如請求項31之方法,其中該電鍍浴係處於自約乃。。至約 95°C之溫度下。 42.如請求項31之方法,其中該電流係以至少約1〇安培/平方 分米(A/dm2)之電流密度施加。 43·如請求項31之方法,其中該電流係使用直流、脈動波形 或脈動週期性反波形施加。 44·如請求項3 1之方法,其中該電鍍浴進一步包含一含有以 下通式(I)的化合物中之一或其中兩者或以上之混合物之 二價硫來源: X1-R1-(S)n-R2-X2 (I) 其中在(I)中,X1與X2可相同或不同且X1與X2各自獨立 包括氫、鹵素、胺基、氰基、硝基、亞硝基、偶氮基、 烷羰基、甲醯基、烷氧羰基、胺基羰基、烷基胺基羰 基、二烷基胺基羰基、羧基、磺酸根、亞磺酸根、膦酸 根、亞膦酸根、亞砜、胺基甲酸酯基、聚乙氧基化烧 基、聚丙氧基化烧基、經基、經鹵素取代之燒基、燒氧 基、硫酸烧基酯、烧硫基、烧基亞續醯基、烧基續醯 基、膦酸烷基酯基或亞膦酸烷基酯基,其中該等烷基及 烷氧基係(^-<:6,或X1與X2—起可形成自R1至R2之鍵結, 其中R1與R2可相同或不同且R1與R2各自獨立包括單 鍵、烷基、烯丙基、烯基、炔基、環己基、芳族及雜芳 族環、烧氧羰基、胺基羰基、烧基胺基魏基、二烧基胺 基羰基、聚乙氧基化及聚丙氧基化烷基,其中該等烷基 119773.doc 200806816 基團係Ci-C6,且 其中n具有自1至約5之平均值。 45_如請求項31之方法,其中該電鍍浴進一步包含一含有具 有以下通式(Ila)及/或(IIb)的化合物中之一或其中兩者或 以上之混合物之二價硫來源:36. The method of claim 33, wherein the chromium deposit comprises a quantity of carbon that is less than an amount that causes the chromium deposit to become amorphous. The method of claim 33, wherein the deposit comprises from about 17% by weight to about 4% by weight ❶/α of sulfur, from about 重量% by weight to about 3% by weight of nitrogen, and from about 1% by weight to about 10% by weight. ❶ / Q carbon. 38. The method of claim 31, wherein the deposit is substantially free of large cracks. The method of claim 31, wherein the electroplating bath further comprises ammonium hydroxide or a salt, or a primary, secondary or tertiary amine. 40. The method of claim 31, wherein the electroplating bath has a pH of from 119773.doc 200806816 from 45 to about 6.5. 41. The method of claim 31, wherein the electroplating bath is in a self-contained. . To a temperature of about 95 ° C. 42. The method of claim 31, wherein the current is applied at a current density of at least about 1 ampere amperage per square meter (A/dm2). 43. The method of claim 31, wherein the current is applied using a direct current, a pulsating waveform, or a pulsating periodic inverse waveform. The method of claim 3, wherein the electroplating bath further comprises a divalent sulfur source comprising one or a mixture of two or more of the following compounds of the formula (I): X1-R1-(S) n-R2-X2 (I) wherein in (I), X1 and X2 may be the same or different and X1 and X2 each independently include hydrogen, halogen, amine, cyano, nitro, nitroso, azo, Alkylcarbonyl, methionyl, alkoxycarbonyl, aminocarbonyl, alkylaminocarbonyl, dialkylaminocarbonyl, carboxyl, sulfonate, sulfinate, phosphonate, phosphinate, sulfoxide, amine Acid ester group, polyethoxylated alkyl group, polypropoxylated alkyl group, mercapto group, halogen-substituted alkyl group, alkoxy group, sulfuric acid alkyl ester, sulfur-burning group, alkyl group, sulphur group a thiol group, an alkyl phosphonate group or an alkyl phosphinate group, wherein the alkyl group and the alkoxy group (^-<:6, or X1 and X2 may form from R1 to R2 a linkage, wherein R1 and R2 may be the same or different and R1 and R2 each independently comprise a single bond, an alkyl group, an allyl group, an alkenyl group, an alkynyl group, a cyclohexyl group, an aromatic and heteroaromatic ring, a oxycarbonyl group, An aminocarbonyl group, an alkylamino group, a dialkylaminocarbonyl group, a polyethoxylated group, and a polypropoxylated alkyl group, wherein the alkyl group 119773.doc 200806816 is a Ci-C6 group, and wherein The method of claim 31, wherein the electroplating bath further comprises one or both of the compounds having the following formula (Ila) and/or (IIb) or Source of divalent sulfur of the above mixture: 其中在(Ila)及(lib)中,尺3、厌4、1^5及化6可相同或不同 且獨立地包括氫、鹵素、胺基、氰基、硝基、亞硝基、 偶氮基、烷羰基、曱醯基、烷氧羰基、胺基羰基、烷基 胺基羰基、二烷基胺基羰基、羧基、磺酸根、亞磺酸 根、膦酸根、亞膦酸根、亞砜、胺基甲酸酯基、聚乙氧 基化烧基、聚丙氧基化烷基、羥基、經齒素取代之烷 • 基、烷氧基、硫酸烷基酯、烷硫基、烷基亞磺醯基、烷 基磺醯基、膦酸烷基酯基或亞膦酸烷基酯基,其中該等 烷基及烷氡基係(^(:6, — 其中X代表碳、氮、氧、硫、硒或碲且其中m係自〇至 其中η具有自1至約5之平均值,且 其中(Ila)或(lib)各自包括至少一個二價硫原子。 46·如請求項31之方法,其中該電鍍浴進一步包含一含有具 119773.doc 200806816 有以下通式(Ilia)及/或(Illb)的化合物中之一或其中兩者 或以上之混合物之二價硫來源:Wherein (Ila) and (lib), Rule 3, Disgust 4, 1^5 and 6 may be the same or different and independently include hydrogen, halogen, amine, cyano, nitro, nitroso, azo Base, alkylcarbonyl, decyl, alkoxycarbonyl, aminocarbonyl, alkylaminocarbonyl, dialkylaminocarbonyl, carboxyl, sulfonate, sulfinate, phosphonate, phosphinate, sulfoxide, amine Carbamate-based, polyethoxylated alkyl, polypropoxylated alkyl, hydroxyl, dentate-substituted alkane, alkoxy, alkyl sulfate, alkylthio, alkylsulfin Alkyl, alkylsulfonyl, alkyl phosphonate or alkyl phosphinate, wherein the alkyl and alkane groups (^(:6, - where X represents carbon, nitrogen, oxygen, sulfur) And selenium or hydrazine wherein m is self-enthalpy to wherein η has an average value from 1 to about 5, and wherein (Ila) or (lib) each comprises at least one divalent sulfur atom. 46. The method of claim 31, Wherein the electroplating bath further comprises a mixture comprising one or a mixture of two or more of the following formula (Ilia) and/or (Illb) having 119773.doc 200806816; The divalent sulfur sources: R4N^Sk/R5 T 及/或 ("丨句 (Illb) 其中,在(Ilia)及(Illb)中,R3、r4、心及心可相同或 φ 不同且獨立包括氫、鹵素、胺基、氰基、硝基、亞硝 基、偶氮基、烷羰基、曱醯基、烷氧羰基、胺基羰基、 燒基胺基幾基、二烧基胺基幾基、繞基、確酸根、亞石黃 酸根、膦酸根、亞膦酸根、亞砜、胺基甲酸酯基、聚乙 氧基化烧基·、聚丙氧基化烧基、經基、經鹵素取代之院 基、烧氧基、硫酸烧基酯、烧硫基、烧基亞績醯基、燒 基磺醯基、膦酸烷基酯基或亞膦酸烷基酯基,其中該等 烷基及烷氧基係(:1-(:6, • 其中X代表碳、氮、硫、硒或碲且其中m係自0至約3, 其中η具有自1至約5之平均值,且 其中(Ilia)或(mb)各自包括至少一個二價硫原子。 、 47·如請求項31之方法,其中該結晶鉻沉積物當加熱至高達 約3 0 0 C之溫度時並不形成大裂紋。 48· —種用於電沉積結晶鉻沉積物之電沉積浴,其包括: 三價鉻之來源,其具有至少仏丨莫耳之濃度且實質上不 含額外六價鉻; 119773.doc 200806816 有機添加劑; 二價硫來源; 自4至約6.5之pH ; 自約35°C至約95°C之運作溫度;及 一施加於浸於該電沉積浴中之陽極與陰極間之電能來 源。 ’ 49·如請求項48之電沉積浴,其中該二價硫來源包括具有以 下通式(I)的化合物中之一或其中兩者或以上之混合物: ® X1-R1-(S)n-R2-X2 (I) 其中在(I)中,X1與X2可相同或不同且χΐ與χ2各自獨立 包括氫、鹵素、胺基、氰基、硝基、亞硝基、偶氮基、 烧^基、甲醯基、烧氧羰基、胺基羰基、燒基胺基魏 基、二烧基胺基幾基、魏基、續酸根、亞續酸根、膦酸 根、亞膦酸根、亞砜、胺基甲酸酯基、聚乙氧基化燒 基、聚丙氧基化烧基、經基、經鹵素取代之烧基、烧氧 0 基、硫酸烷基酯、烷硫基、烷基亞磺醯基、烷基磺醯 基、膦酸烷基酯基或亞膦酸烷基酯基,其中該等烷基及 烧氧基係€^-(:6,或X1與X2—起可形成自R1至r2之鍵結, 其中!^與化2可相同或不同且R1與R2各自獨立包括單 鍵、烷基、烯丙基、烯基、炔基、環己基、芳族及雜芳 族環、烧氧羰基、胺基羰基、烷基胺基羰基、二烷基胺 基緩基、聚乙氧基化及聚丙氧基化烷基,其中該等烷基 基團係(VC6,且 其中η具有自1至約5之平均值。 119773.doc -10- 200806816 50·如請求項48之電沉積浴,其中該二價硫來源包括具有以 下通式(Ila)及/或(lib)的化合物中之一或其中兩者或以上 之混合物:R4N^Sk/R5 T and/or ("丨l(Illb) where, in (Ilia) and (Illb), R3, r4, heart and heart may be the same or φ different and independently include hydrogen, halogen, amine , cyano, nitro, nitroso, azo, alkylcarbonyl, decyl, alkoxycarbonyl, aminocarbonyl, alkylamino, dialkylamino, cyclyl, acid , sulphate, phosphonate, phosphinate, sulfoxide, urethane, polyethoxylated alkyl, polypropoxylated alkyl, trans-base, halogen-substituted yard, burned An oxy group, a sulfuric acid alkyl ester, a sulfur-burning group, a pyrenyl group, a alkyl sulfonyl group, an alkyl phosphonate group or an alkyl phosphinate group, wherein the alkyl group and the alkoxy group are (:1-(:6, • where X represents carbon, nitrogen, sulfur, selenium or tellurium and wherein m is from 0 to about 3, where η has an average value from 1 to about 5, and wherein (Ilia) or Each of mb) includes at least one divalent sulfur atom. The method of claim 31, wherein the crystalline chromium deposit does not form a large crack when heated to a temperature of up to about 300 ° C. to An electrodeposition bath for depositing a crystalline chromium deposit, comprising: a source of trivalent chromium having a concentration of at least 仏丨mol and substantially free of additional hexavalent chromium; 119773.doc 200806816 organic additive; source of divalent sulfur; a pH from 4 to about 6.5; an operating temperature of from about 35 ° C to about 95 ° C; and a source of electrical energy applied between the anode and the cathode immersed in the electrodeposition bath. ' 49 · as claimed in claim 48 An electrodeposition bath, wherein the source of divalent sulfur comprises one or a mixture of two or more of the following formula (I): ® X1-R1-(S)n-R2-X2 (I) wherein In (I), X1 and X2 may be the same or different and χΐ and χ2 each independently include hydrogen, halogen, amine group, cyano group, nitro group, nitroso group, azo group, alkyl group, methyl group, and oxygen-burning group. Carbonyl, aminocarbonyl, alkylaminowei, dialkylamino, weigen, sulphate, sulphate, phosphonate, phosphinate, sulfoxide, urethane, poly Oxylated alkyl group, polypropoxylated alkyl group, trans group, halogen-substituted alkyl group, calcined oxygen group, alkyl sulfate, alkane a thio group, an alkylsulfinyl group, an alkylsulfonyl group, an alkyl phosphonate group or an alkyl phosphinate group, wherein the alkyl group and the alkoxy group are €^-(:6, or X1 The bond may be formed from R1 to R2 together with X2, wherein ^^ and 2 may be the same or different and R1 and R2 each independently include a single bond, an alkyl group, an allyl group, an alkenyl group, an alkynyl group, a cyclohexyl group, An aromatic and heteroaromatic ring, a pyrocarbonyl group, an amine carbonyl group, an alkylaminocarbonyl group, a dialkylamino group, a polyethoxylated group, and a polypropoxylated alkyl group, wherein the alkyl groups are Line (VC6, and wherein η has an average value from 1 to about 5. The electrodeposition bath of claim 48, wherein the divalent sulfur source comprises one or more of the compounds of the following formula (Ila) and/or (lib) or both mixture: 又r6 (Ha)And r6 (Ha) 着 其中在(Ila)及(lib)中,R3、r4、义5及r6可相同或不同 且獨立地包括氫、鹵素、胺基、氰基、硝基、亞硝基、 偶氮基、烷羰基、曱醯基、烷氧羰基、胺基羰基、烷基 胺基戴基、二烧基胺基羧基、叛基、績酸根、亞磺酸 根、膦酸根、亞膦酸根、亞碉1、胺基曱酸酯基、聚乙氧 基化烷基、聚丙氧基化烷基、羥基、經函素取代之烧 基、烷氧基、硫酸烷基酯、烷硫基、烷基亞磺醯基、烷 基磺醯基、膦酸烷基酯基或亞膦酸烷基酯基,其中該等 • 烷基及烷氧基係匕-匕, 其中X代表碳、氮、乳、硫、石西或碑且其中瓜係自〇至 約3, 其中η具有自1至約5之平均值,且 其中(Ila)或(lib)各自包括至少一個二價硫原子。 5 1 ·如請求項48之電沉積浴,其中該二價硫來源包括具有以 下通式(Ilia)及/或(Illb)的化合物中之一或其中兩者或以 上之混合物: 119773.doc 11 200806816Wherein (Ila) and (lib), R3, r4, sense 5 and r6 may be the same or different and independently include hydrogen, halogen, amine, cyano, nitro, nitroso, azo, alkane Carbonyl, fluorenyl, alkoxycarbonyl, aminocarbonyl, alkylamino Daidyl, dialkylaminocarboxy, thiol, citrate, sulfinate, phosphonate, phosphinate, hydrazine 1, amine Ruthenium ester group, polyethoxylated alkyl group, polypropoxylated alkyl group, hydroxyl group, functional group substituted by a hydroxyl group, alkoxy group, alkyl sulfate, alkylthio group, alkylsulfinyl group An alkyl sulfonyl group, an alkyl phosphonate group or an alkyl phosphinate group, wherein the alkyl group and the alkoxy group 匕-匕, wherein X represents carbon, nitrogen, milk, sulfur, or silli Or a monument and wherein the melon is self-twisted to about 3, wherein η has an average value from 1 to about 5, and wherein (Ila) or (lib) each comprise at least one divalent sulfur atom. 5. The electrodeposition bath of claim 48, wherein the source of divalent sulfur comprises one or a mixture of two or more of the following compounds of the formula (Ilia) and/or (Illb): 119773.doc 11 200806816 (Ilia) (Hlb) 其中,在(Ilia)及(Illb)中,R3、R4、R5及R6可相同或 不同且獨立包括氫、_素、胺基、氰基、硝基、亞石肖 基、偶氮基、烷羰基、曱醯基\烷氧羰基、胺基羰基、 烧基胺基據基、二烧基胺基織基、竣基、崎酸根、亞石黃 酸根、膦酸根、亞膦酸根、亞砜、胺基甲酸酯基、聚乙 氧基化烧基、聚丙氧基化烧基、經基、經函素取代之燒 基、烷氧基、硫酸烷基酯、烷硫基、烷基亞磺醯基、烧 基磺醯基、膦酸烷基酯基或亞膦酸烷基酯基,其中該等 烷基及烷氧基係匕-匕, 其中X代表碳、氮、硫、石西或碲且其中πι係自0至約3, 其中η具有自1至約5之平均值,且 其中(Ilia)或(Illb)各自包括至少一個二價硫原子。 52_如請求項48之電沉積浴,其中該電能來源以欲鍍敷基板 之面積計能夠提供至少1 〇 A/dm2之電流密度。 53·如請求項48之電沉積浴,其中當運作時,該浴係沉積一 種當沉積時,係呈結晶態之功能性鉻沉積物。 54·如請求項53之電沉積浴,其中該結晶鉻沉積物具有 2·8895+Μ)·0025埃之晶格參數。 55·如請求項53之電沉積浴,其中該結晶鉻沉積物具有 較佳定向。 119773.doc -12- 200806816 56·如請求項53之電沉積浴,其中該結晶鉻沉積物在該鉻沉 積物中進一步包含碳、氮及硫。 57·如請求項53之電沉積浴,其中該結晶鉻沉積物包含約1 重里、至約10重量%之硫。 如μ求項5 3之電沉積洛’其中該結晶絡沉積物包含約〇 · 1 重量%至約5重量%之氮。(Ilia) (Hlb) wherein, in (Ilia) and (Illb), R3, R4, R5 and R6 may be the same or different and independently include hydrogen, _, amine, cyano, nitro, succinyl, or Nitrogen, alkylcarbonyl, fluorenyl/alkoxycarbonyl, aminocarbonyl, alkylamino, dialkylamino, sulfhydryl, sulphate, sulphate, phosphonate, phosphinate a sulfoxide, a urethane group, a polyethoxylated alkyl group, a polypropoxylated alkyl group, a carboxylic acid group, an alkoxy group, an alkyl sulfate group, an alkylthio group, An alkylsulfinyl group, a alkylsulfonyl group, an alkyl phosphonate group or an alkyl phosphinate group, wherein the alkyl group and the alkoxy group are ruthenium-iridium, wherein X represents carbon, nitrogen, sulfur And hexose or hydrazine wherein πι is from 0 to about 3, wherein η has an average value from 1 to about 5, and wherein (Ilia) or (Illb) each includes at least one divalent sulfur atom. 52. The electrodeposition bath of claim 48, wherein the source of electrical energy is capable of providing a current density of at least 1 A/dm2 based on the area of the substrate to be plated. 53. The electrodeposition bath of claim 48, wherein when in operation, the bath system deposits a functional chromium deposit that is crystalline when deposited. 54. The electrodeposition bath of claim 53, wherein the crystalline chromium deposit has a lattice parameter of 2.8895 + Μ)·0025 angstroms. 55. The electrodeposition bath of claim 53, wherein the crystalline chromium deposit has a preferred orientation. The electrodeposition bath of claim 53, wherein the crystalline chromium deposit further comprises carbon, nitrogen and sulfur in the chromium deposit. 57. The electrodeposition bath of claim 53, wherein the crystalline chromium deposit comprises from about 1 weight to about 10 weight percent sulfur. The electrodeposition of the substrate 5 is as described in μ, wherein the crystal collateral deposit comprises from about 1% by weight to about 5% by weight of nitrogen. 59·如凊求項53之電沉積浴,其中該結晶鉻沉積物包括數量 小於致使該鉻沉積物變成非晶形之數量的碳。 6〇_如請求項53之電沉積浴,其中該結晶鉻沉積物包含約17 重量%至約4重量❹/〇之硫、約〇·ΐ重量%至約3重量%之氮及 約ο·1重量%至約ίο重量%之碳。 61·如請求項53之電沉積浴,其中該結晶鉻沉積物實質上無 大裂紋。 62. ^請求項53之電沉積浴,其中該電.能來源能夠施加直 流、脈動波形或脈動週期性反波形中之一或多者。 63. 如請求項53之電沉積浴,其進一步包含氣來源。 二:求項!之結晶鉻沉積物’其中該沉積 裝飾性鉻沉積物。 A Μ:項W之物件’其中該沉積物係功能性或裝飾性鉻 ,方法’其中該方法沉積-種功能性或裝飾 之方法,其中該有機添加劑包括 胺基酸或硫氰酸鹽 一或多者 甲酸或其 119773.doc • 13 - 200806816 68.如請求項63之電沉積浴,其中該氮來源包括氫氧化銨或 其鹽、其中烷基係烷基之一級、二級或三級烷基 胺、胺基酸、羥基胺或多元羥烷醇胺,其中該氮來源中 之烧基包括CrC6烷基。 69·如請求項13之方法,其進一步包括氮來源。 70·如凊求項69之方法,其中該氮來源包括氫氧化銨或其 鹽、其中烷基為CpC6烷基之一級、二級或三級烷基胺、59. The electrodeposition bath of claim 53, wherein the crystalline chromium deposit comprises carbon in an amount less than the amount that causes the chromium deposit to become amorphous. The electrodeposition bath of claim 53, wherein the crystalline chromium deposit comprises from about 17% by weight to about 4% by weight of sulphur, from about 3% by weight to about 3% by weight of nitrogen and about ο. 1% by weight to about ί% by weight of carbon. 61. The electrodeposition bath of claim 53, wherein the crystalline chromium deposit is substantially free of large cracks. 62. The electrodeposition bath of claim 53, wherein the source of electrical energy is capable of applying one or more of a direct current, a pulsating waveform, or a pulsating periodic inverse waveform. 63. The electrodeposition bath of claim 53, further comprising a source of gas. Two: the project! Crystallized chromium deposits' where the decorative chromium deposits are deposited. A Μ: The object of item W, wherein the deposit is functional or decorative chrome, the method wherein the method deposits a functional or decorative method, wherein the organic additive comprises an amino acid or a thiocyanate or And a dec. a base amine, an amino acid, a hydroxylamine or a polyhydric hydroxyalkanolamine, wherein the alkyl group in the nitrogen source comprises a CrC6 alkyl group. 69. The method of claim 13, which further comprises a source of nitrogen. 70. The method of claim 69, wherein the source of nitrogen comprises ammonium hydroxide or a salt thereof, wherein the alkyl group is a CpC6 alkyl primary, secondary or tertiary alkylamine, 胺基酸、羥基胺或多元羥烷醇胺,其中該氮來源中之烷 基包括Ci_C6烧基。 71·如請求項13之方法,其中該浴包括代替二價硫之硒或碲 或二者之混合物,或者除了二價硫以外還包括硒或碲或 二者之混合物。 72.如請求項44之方法,其中該浴包括代替二價硫之硒或碲 或者之/>:&&物,或者除了 一價硫以外還包括碼或碲或 二者之混合物。An amino acid, a hydroxylamine or a polyhydric hydroxy alkanolamine, wherein the alkyl group in the nitrogen source comprises a Ci_C6 alkyl group. 71. The method of claim 13, wherein the bath comprises selenium or tellurium or a mixture of the two in place of divalent sulfur, or selenium or tellurium or a mixture of the two in addition to divalent sulfur. The method of claim 44, wherein the bath comprises selenium or bismuth in place of divalent sulfur or />:&&> or in addition to monovalent sulfur, a code or hydrazine or a mixture of the two. 73.如請求項45之方法,其中該浴包括代替二價硫之砸或碌 或二者U合物’或者除了二價•外還包括砸或碑或 二者之混合物 二者之混合物 74.如請求項46之方法,其中該浴包括代替二價硫之场或碑 或二者之混合物’或者除了二價琉以外還包括碼或碑或 包括代替二價硫之砸 價硫以外還包括碼或 75·如請求項48之電沉積浴,其中該浴 或碌或二者之混合物,或者除了二 碲或二者之混合物。 119773.doc • 14·73. The method of claim 45, wherein the bath comprises a mixture of divalent sulfur or bismuth or both, or a mixture of both or a mixture of the two. The method of claim 46, wherein the bath comprises a field or a mixture of the two in place of the divalent sulfur' or includes a code or a monument in addition to the divalent euro or a code including a sulfur equivalent to the divalent sulfur. Or 75. The electrodeposition bath of claim 48, wherein the bath is either a mixture of the two or a mixture of the two, or a mixture of the two. 119773.doc • 14·
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