SG147336A1 - Cleaning process and apparatus - Google Patents
Cleaning process and apparatusInfo
- Publication number
- SG147336A1 SG147336A1 SG200702957-2A SG2007029572A SG147336A1 SG 147336 A1 SG147336 A1 SG 147336A1 SG 2007029572 A SG2007029572 A SG 2007029572A SG 147336 A1 SG147336 A1 SG 147336A1
- Authority
- SG
- Singapore
- Prior art keywords
- cleaning
- substrate
- brush
- relation
- disclosed
- Prior art date
Links
- 238000004140 cleaning Methods 0.000 title abstract 8
- 238000000034 method Methods 0.000 title abstract 4
- 239000000758 substrate Substances 0.000 abstract 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- 238000005201 scrubbing Methods 0.000 abstract 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Cleaning Process and Apparatus A cleaning module for cleaning one or more substrates, more particularly but not exclusively for cleaning aluminium discs, is disclosed. In particular, the cleaning module comprises one or more brushes operable to move along a radial path in relation to the substrate. In addition, a method of positioning at least one brush during the cleaning of the substrate by moving the brush along a radial path in relation to the substrate is also disclosed. Finally, a method of cleaning the substrate by moving the brush along the radial path in relation to the substrate and overlapping a scrubbing portion of the brush with a corresponding portion of the at least one substrate is disclosed.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SG200702957-2A SG147336A1 (en) | 2007-04-27 | 2007-04-27 | Cleaning process and apparatus |
| SG200719147-1A SG147361A1 (en) | 2007-04-27 | 2007-12-24 | Cleaning process and apparatus |
| SG2010079713A SG180053A1 (en) | 2007-04-27 | 2007-12-24 | Cleaning process and apparatus |
| CN200880021905XA CN101687228B (en) | 2007-04-27 | 2008-04-22 | Cleaning process and apparatus |
| PCT/SG2008/000133 WO2008133593A2 (en) | 2007-04-27 | 2008-04-22 | Cleaning process and apparatus |
| MYPI20094436A MY154924A (en) | 2007-04-27 | 2008-04-22 | Cleaning process and apparatus |
| TW97115680A TWI473667B (en) | 2007-04-27 | 2008-04-28 | Cleaning process and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SG200702957-2A SG147336A1 (en) | 2007-04-27 | 2007-04-27 | Cleaning process and apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG147336A1 true SG147336A1 (en) | 2008-11-28 |
Family
ID=40032348
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG200702957-2A SG147336A1 (en) | 2007-04-27 | 2007-04-27 | Cleaning process and apparatus |
| SG2010079713A SG180053A1 (en) | 2007-04-27 | 2007-12-24 | Cleaning process and apparatus |
| SG200719147-1A SG147361A1 (en) | 2007-04-27 | 2007-12-24 | Cleaning process and apparatus |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG2010079713A SG180053A1 (en) | 2007-04-27 | 2007-12-24 | Cleaning process and apparatus |
| SG200719147-1A SG147361A1 (en) | 2007-04-27 | 2007-12-24 | Cleaning process and apparatus |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN101687228B (en) |
| SG (3) | SG147336A1 (en) |
| TW (1) | TWI473667B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105057273A (en) * | 2015-08-27 | 2015-11-18 | 苏州凯锝微电子有限公司 | Ultrasonic lens cleaning device |
| CN107716273A (en) * | 2016-08-12 | 2018-02-23 | 宁波创润新材料有限公司 | To the processing method of metalliferous material |
| CN107401893A (en) * | 2017-08-21 | 2017-11-28 | 无锡市强力干燥设备厂 | PCR reacts lid plate rubber dedicated drying case |
| JP7101528B2 (en) * | 2018-04-25 | 2022-07-15 | 東京エレクトロン株式会社 | Board processing equipment |
| CN112354764B (en) * | 2020-11-12 | 2021-08-06 | 湖南昕泰装饰材料有限公司 | Surface pretreatment device for aluminum profile machining |
| CN114683163A (en) * | 2020-12-31 | 2022-07-01 | 上海新昇半导体科技有限公司 | Dehumidifying device and polishing equipment |
| CN115990594A (en) * | 2021-10-19 | 2023-04-21 | 杭州众硅电子科技有限公司 | An arrayed megasonic cleaning device for cleaning wafers |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4601223A (en) * | 1984-07-16 | 1986-07-22 | Westinghouse Electric Corp. | Flail tube cutter |
| JPH0652977U (en) * | 1992-12-22 | 1994-07-19 | 株式会社北村製作所 | Cleaning equipment |
| US5937469A (en) * | 1996-12-03 | 1999-08-17 | Intel Corporation | Apparatus for mechanically cleaning the edges of wafers |
| JPH10323635A (en) * | 1997-05-26 | 1998-12-08 | Sony Corp | Ultrasonic cleaning device |
| JP2001274130A (en) * | 2000-03-24 | 2001-10-05 | Mitsubishi Electric Corp | Method of wet cleaning and manufacturing semiconductor device |
| US6532974B2 (en) * | 2001-04-06 | 2003-03-18 | Akrion Llc | Process tank with pressurized mist generation |
| US6871657B2 (en) * | 2001-04-06 | 2005-03-29 | Akrion, Llc | Low profile wafer carrier |
| TWI234497B (en) * | 2004-08-17 | 2005-06-21 | Yang-Kuan Wang | Device using ultrasonic waves to clean LP records |
| US20070006892A1 (en) * | 2005-07-08 | 2007-01-11 | Imtec Acculine, Inc. | Uniform, far-field megasonic cleaning method and apparatus |
| TWI348939B (en) * | 2006-12-22 | 2011-09-21 | Hon Hai Prec Ind Co Ltd | Apparatus for cleaning article |
-
2007
- 2007-04-27 SG SG200702957-2A patent/SG147336A1/en unknown
- 2007-12-24 SG SG2010079713A patent/SG180053A1/en unknown
- 2007-12-24 SG SG200719147-1A patent/SG147361A1/en unknown
-
2008
- 2008-04-22 CN CN200880021905XA patent/CN101687228B/en active Active
- 2008-04-28 TW TW97115680A patent/TWI473667B/en active
Also Published As
| Publication number | Publication date |
|---|---|
| TW200900166A (en) | 2009-01-01 |
| CN101687228A (en) | 2010-03-31 |
| TWI473667B (en) | 2015-02-21 |
| SG180053A1 (en) | 2012-05-30 |
| SG147361A1 (en) | 2008-11-28 |
| CN101687228B (en) | 2013-05-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| SG147336A1 (en) | Cleaning process and apparatus | |
| TW200740536A (en) | Method and apparatus for cleaning a semiconductor substrate | |
| WO2009099757A3 (en) | Method, system, and apparatus for modifying surfaces | |
| TW200737320A (en) | Apparatus and methods for treating substrates | |
| DE602004000051D1 (en) | Process for coating large-area substrates | |
| TW200639269A (en) | Plating method | |
| EP2131387A3 (en) | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | |
| EP1950799A4 (en) | METHOD FOR PRODUCING NANOPOROUS SUBSTRATE | |
| WO2009126443A8 (en) | Method and apparatus for debonding a submounted substrate | |
| AP2299A (en) | Washing apparatus and washing method for solar panels. | |
| WO2013049207A3 (en) | Post-cmp cleaning apparatus and method | |
| TW200644098A (en) | Enhanced wafer cleaning method | |
| GB0803305D0 (en) | Method for laser processing on the opposite sides of thin transparent substrates | |
| TW200725727A (en) | Substrate processing method and substrate processing apparatus | |
| WO2010132371A3 (en) | Multi-stage substrate cleaning method and apparatus | |
| DE60328551D1 (en) | Process for producing a large-area substrate | |
| MY150875A (en) | Apparatus and method for cleaning substrates/media disks | |
| TW200704630A (en) | Novel organic compound and method for producing radioactive halogen-labeled organic compound using the same | |
| TWI339641B (en) | Method for attaching film for glass substrate | |
| WO2011133793A3 (en) | Method of simultaneously cleaning and whitening teeth | |
| WO2007079366A3 (en) | Method for improving glass bond adhesion | |
| TW200712798A (en) | Novel method and system for advanced reticle contaimination cleaning | |
| WO2009031401A1 (en) | Method for manufacturing glass substrate for information recording medium, glass substrate for information recording medium, and magnetic recording medium | |
| PL2185389T3 (en) | Device and method for cleaning the brushes of a vehicle wash gantry | |
| HK1150950A1 (en) | Pressure-sensitive adhesive tape roll for cleaning, apparatus for producing pressure-sensitive adhesive tape, and process for producing the same |