RU2010134759A - Интерферометрический модулятор в режиме пропускания - Google Patents
Интерферометрический модулятор в режиме пропускания Download PDFInfo
- Publication number
- RU2010134759A RU2010134759A RU2010134759/28A RU2010134759A RU2010134759A RU 2010134759 A RU2010134759 A RU 2010134759A RU 2010134759/28 A RU2010134759/28 A RU 2010134759/28A RU 2010134759 A RU2010134759 A RU 2010134759A RU 2010134759 A RU2010134759 A RU 2010134759A
- Authority
- RU
- Russia
- Prior art keywords
- layer
- micromechanical device
- substrate
- movable partition
- optical
- Prior art date
Links
- 230000005540 biological transmission Effects 0.000 title claims abstract 6
- 239000000758 substrate Substances 0.000 claims abstract 30
- 230000003287 optical effect Effects 0.000 claims abstract 25
- 238000005192 partition Methods 0.000 claims abstract 25
- 239000000463 material Substances 0.000 claims 7
- 230000003111 delayed effect Effects 0.000 claims 5
- 239000003989 dielectric material Substances 0.000 claims 3
- 229910052737 gold Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 229910052709 silver Inorganic materials 0.000 claims 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 239000012528 membrane Substances 0.000 claims 1
- 229910003465 moissanite Inorganic materials 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 230000000717 retained effect Effects 0.000 abstract 4
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Abstract
1. Микромеханическое устройство пропускающего типа, содержащее ! подложку, ! подвижную перегородку, расположенную на первой стороне подложки, которая содержит частично отражающее зеркало, и ! заднюю подсветку, расположенную на второй стороне подложки и выполненную с возможностью излучения света, падающего на вторую сторону подложки, ! причем подвижная перегородка выполнена с возможностью перемещения из первого положения во второе положение, ! при этом в первом положении подвижной перегородки свет заданного цвета проходит через подвижную перегородку от подложки, а ! во втором положении подвижной перегородки по существу весь свет, проходящий через подложку, задерживается. ! 2. Микромеханическое устройство по п.1, в котором во втором положении подвижной перегородки задерживается по меньшей мере 90% света, падающего на вторую сторону подложки. ! 3. Микромеханическое устройство по п.2, в котором во втором положении подвижной перегородки задерживается по меньшей мере 95% света, падающего на вторую сторону подложки. ! 4. Микромеханическое устройство по п.3, в котором во втором положении подвижной перегородки задерживается по меньшей мере 98% света, падающего на вторую сторону подложки. ! 5. Микромеханическое устройство по п.4, в котором во втором положении подвижной перегородки задерживается по меньшей мере 99% света, падающего на вторую сторону подложки. ! 6. Микромеханическое устройство по п.5, в котором подвижная перегородка во втором положении определяет по меньшей мере частично оптический интерференционный резонатор, выполненный с возможностью пропускания света с заданными длинами волн, причем подвижная перегород
Claims (34)
1. Микромеханическое устройство пропускающего типа, содержащее
подложку,
подвижную перегородку, расположенную на первой стороне подложки, которая содержит частично отражающее зеркало, и
заднюю подсветку, расположенную на второй стороне подложки и выполненную с возможностью излучения света, падающего на вторую сторону подложки,
причем подвижная перегородка выполнена с возможностью перемещения из первого положения во второе положение,
при этом в первом положении подвижной перегородки свет заданного цвета проходит через подвижную перегородку от подложки, а
во втором положении подвижной перегородки по существу весь свет, проходящий через подложку, задерживается.
2. Микромеханическое устройство по п.1, в котором во втором положении подвижной перегородки задерживается по меньшей мере 90% света, падающего на вторую сторону подложки.
3. Микромеханическое устройство по п.2, в котором во втором положении подвижной перегородки задерживается по меньшей мере 95% света, падающего на вторую сторону подложки.
4. Микромеханическое устройство по п.3, в котором во втором положении подвижной перегородки задерживается по меньшей мере 98% света, падающего на вторую сторону подложки.
5. Микромеханическое устройство по п.4, в котором во втором положении подвижной перегородки задерживается по меньшей мере 99% света, падающего на вторую сторону подложки.
6. Микромеханическое устройство по п.5, в котором подвижная перегородка во втором положении определяет по меньшей мере частично оптический интерференционный резонатор, выполненный с возможностью пропускания света с заданными длинами волн, причем подвижная перегородка содержит поглощающий слой, выполненный с возможностью поглощения света с другими длинами волн.
7. Микромеханическое устройство по п.6, отличающееся тем, что поглощающий слой содержит полупроводник.
8. Микромеханическое устройство по п.1, которое дополнительно содержит механический слой, включающий диэлектрический материал.
9. Микромеханическое устройство по п.8, отличающееся тем, что диэлектрический материал представляет собой SiN или SiO2.
10. Микромеханическое устройство по п.8, дополнительно содержащее тонкий слой металла, нанесенный на верхнюю часть диэлектрического материала.
11. Микромеханическое устройство по п.10, отличающееся тем, что тонкий слой металла представляет собой Au или Ag.
12. Микромеханическое устройство по п.11, отличающееся тем, что подложка выполнена прозрачной.
13. Микромеханическое устройство по п.12, отличающееся тем, что зеркало содержит гибкую посеребренную перегородку.
14. Микромеханическое устройство по п.13, дополнительно содержащее линзу, выполненную с возможностью фокусирования света, выходящего из микромеханического устройства.
15. Микромеханическое устройство пропускающего типа, содержащее первую оптическую стопу и
вторую оптическую стопу, отделенной от первой оптической стопы промежутком,
причем первая оптическая стопа содержит первую по существу прозрачную подложку и расположена между источником света и второй оптической стопой, а
вторая оптическая стопа содержит вторую по существу прозрачную подложку и расположена между первой оптической стопой и линзой.
16. Микромеханическое устройство по п.15, в котором первая оптическая стопа содержит слой MgF2, и вторая оптическая стопа содержит слой MgF2.
17. Микромеханическое устройство по п.16, в котором первая оптическая стопа содержит слой SiC, и вторая оптическая стопа содержит слой SiC.
18. Микромеханическое устройство по п.17, в котором первая оптическая стопа содержит два слоя MgF2 и два слоя SiC, причем первый слой MgF2 расположен на подложке, первый слой SiC расположен на первом слое MgF2, второй слой MgF2 расположен на первом слое SiC, а второй слой SiC расположен на втором слое MgF2.
19. Микромеханическое устройство по п.18, в котором вторая оптическая стопа содержит два слоя MgF2 и два слоя SiC, причем первый слой MgF2 расположен на подложке, первый слой SiC расположен на первом слое MgF2, второй слой MgF2 расположен на первом слое SiC, а второй слой SiC расположен на втором слое MgF2.
20. Микромеханическое устройство пропускающего типа, содержащее
первую оптическую стопу и вторую оптическую стопу, разделенные промежутком,
источник света, расположенный на первой стороне первой оптической стопы и выполненный с возможностью излучения света через первую оптическую стопу ко второй оптической стопе, и
линза, выполненная с возможностью фокусирования света, выходящего из второй оптической стопы,
причем первая оптическая стопа содержит стеклянную подложку, по меньшей мере один материал с показателем преломления больше 2 и по меньшей мере один материал с показателем преломления менее 1,3, а вторая оптическая стопа содержит по меньшей мере один материал с показателем преломления больше 2 и по меньшей мере один материал с показателем преломления менее 1,3.
21. Микромеханическое устройство по п.20, в котором первый материал с более высоким относительным показателем преломления образует трехслойную структуру со вторым материалом с более низким относительным показателем преломления.
22. Микромеханическое устройство по п.21, в котором разность между показателем преломления крайних слоев и среднего слоя максимальна.
23. Микромеханическое устройство по п.20, в котором по меньшей мере один слой содержит диэлектрик.
24. Микромеханическое устройство по п.20, в котором по меньшей мере один слой содержит полупроводник.
25. Микромеханическое устройство по п.20, в котором толщина каждого слоя более чем на 25% превышает длину волны света, падающего на подложку.
26. Интерферометрический модулятор (IMOD) пропускающего типа, содержащий
прозрачную подложку,
первый отражающий слой, расположенный на первой поверхности прозрачной подложки,
подвижную перегородку, содержащую второй отражающий слой, причем второй и первый отражающие слои образуют регулируемый оптический резонатор, и
источник света, причем прозрачная подложка расположена между источником света и подвижной перегородкой, а источник света выполнен с возможностью излучения света, падающего на прозрачную подложку,
при этом регулируемый оптический резонатор задается при движении подвижной перегородки из первого положения во второе, а
в первом положении подвижной перегородки она позволяет проходить длинам волн в диапазоне ультрафиолетового или инфракрасного света и поглощает по существу весь диапазон длин волн падающего видимого света.
27. Интерферометрический модулятор по п.26, в котором первый отражающий слой содержит материал с показателем преломления более 2,0.
28. Интерферометрический модулятор по п.26, в котором первый отражающий слой содержит Au, Ag или SiC.
29. Интерферометрический модулятор по п.п.26, в котором полная длина волны падающего света является конкретной длиной волны.
30. Интерферометрический модулятор по п.26, в котором в первом положении подвижной перегородки при примерно 300 нм максимальное пропускание происходит примерно при 650 нм.
31. Интерферометрический модулятор по п.26, в котором во втором положении подвижной перегородки максимальное пропускание происходит примерно при 450 нм.
32. Интерферометрический модулятор по п.26, дополнительно содержащий линейный поляризатор.
33. Интерферометрический модулятор по п.п.26, дополнительно содержащий оптрон.
34. Интерферометрический модулятор по п.п.26, дополнительно содержащий линзу, выполненную с возможностью фокусирования света, выходящего из подвижной мембраны.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US3491708P | 2008-03-07 | 2008-03-07 | |
| US61/034,917 | 2008-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| RU2010134759A true RU2010134759A (ru) | 2012-04-20 |
Family
ID=40802101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2010134759/28A RU2010134759A (ru) | 2008-03-07 | 2009-03-02 | Интерферометрический модулятор в режиме пропускания |
Country Status (10)
| Country | Link |
|---|---|
| US (3) | US7944604B2 (ru) |
| EP (1) | EP2257846A1 (ru) |
| JP (1) | JP5444255B2 (ru) |
| KR (1) | KR20100138974A (ru) |
| CN (1) | CN101960355A (ru) |
| BR (1) | BRPI0908985A2 (ru) |
| CA (1) | CA2717312A1 (ru) |
| RU (1) | RU2010134759A (ru) |
| TW (1) | TW200944470A (ru) |
| WO (1) | WO2009114323A1 (ru) |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7527998B2 (en) | 2006-06-30 | 2009-05-05 | Qualcomm Mems Technologies, Inc. | Method of manufacturing MEMS devices providing air gap control |
| US7944604B2 (en) | 2008-03-07 | 2011-05-17 | Qualcomm Mems Technologies, Inc. | Interferometric modulator in transmission mode |
| US7612933B2 (en) | 2008-03-27 | 2009-11-03 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device with spacing layer |
| US7898723B2 (en) | 2008-04-02 | 2011-03-01 | Qualcomm Mems Technologies, Inc. | Microelectromechanical systems display element with photovoltaic structure |
| US7969638B2 (en) | 2008-04-10 | 2011-06-28 | Qualcomm Mems Technologies, Inc. | Device having thin black mask and method of fabricating the same |
| US7768690B2 (en) * | 2008-06-25 | 2010-08-03 | Qualcomm Mems Technologies, Inc. | Backlight displays |
| US7791783B2 (en) * | 2008-06-25 | 2010-09-07 | Qualcomm Mems Technologies, Inc. | Backlight displays |
| US8023167B2 (en) | 2008-06-25 | 2011-09-20 | Qualcomm Mems Technologies, Inc. | Backlight displays |
| US7746539B2 (en) | 2008-06-25 | 2010-06-29 | Qualcomm Mems Technologies, Inc. | Method for packing a display device and the device obtained thereof |
| US7859740B2 (en) | 2008-07-11 | 2010-12-28 | Qualcomm Mems Technologies, Inc. | Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control |
| US7855826B2 (en) * | 2008-08-12 | 2010-12-21 | Qualcomm Mems Technologies, Inc. | Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices |
| US8358266B2 (en) | 2008-09-02 | 2013-01-22 | Qualcomm Mems Technologies, Inc. | Light turning device with prismatic light turning features |
| KR101509564B1 (ko) * | 2008-11-28 | 2015-04-06 | 삼성전자주식회사 | 분할 휘도 조절 기능을 갖는 측면형 백라이트 유닛 |
| US8270056B2 (en) | 2009-03-23 | 2012-09-18 | Qualcomm Mems Technologies, Inc. | Display device with openings between sub-pixels and method of making same |
| CN102449513B (zh) | 2009-05-29 | 2015-01-21 | 高通Mems科技公司 | 照明装置及其制造方法 |
| US8270062B2 (en) | 2009-09-17 | 2012-09-18 | Qualcomm Mems Technologies, Inc. | Display device with at least one movable stop element |
| US8488228B2 (en) | 2009-09-28 | 2013-07-16 | Qualcomm Mems Technologies, Inc. | Interferometric display with interferometric reflector |
| US20110169724A1 (en) * | 2010-01-08 | 2011-07-14 | Qualcomm Mems Technologies, Inc. | Interferometric pixel with patterned mechanical layer |
| US20110248958A1 (en) * | 2010-04-08 | 2011-10-13 | Qualcomm Mems Technologies, Inc. | Holographic based optical touchscreen |
| US20110248960A1 (en) * | 2010-04-08 | 2011-10-13 | Qualcomm Mems Technologies, Inc. | Holographic touchscreen |
| WO2011126953A1 (en) | 2010-04-09 | 2011-10-13 | Qualcomm Mems Technologies, Inc. | Mechanical layer of an electromechanical device and methods of forming the same |
| KR20130091763A (ko) | 2010-08-17 | 2013-08-19 | 퀄컴 엠이엠에스 테크놀로지스, 인크. | 간섭 디스플레이 장치에서의 전하 중성 전극의 작동 및 교정 |
| US9057872B2 (en) | 2010-08-31 | 2015-06-16 | Qualcomm Mems Technologies, Inc. | Dielectric enhanced mirror for IMOD display |
| US20120120081A1 (en) * | 2010-11-16 | 2012-05-17 | Qualcomm Mems Technologies, Inc. | Illumination device with passivation layer |
| US9134527B2 (en) | 2011-04-04 | 2015-09-15 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
| US8963159B2 (en) | 2011-04-04 | 2015-02-24 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
| US8659816B2 (en) | 2011-04-25 | 2014-02-25 | Qualcomm Mems Technologies, Inc. | Mechanical layer and methods of making the same |
| US9019240B2 (en) | 2011-09-29 | 2015-04-28 | Qualcomm Mems Technologies, Inc. | Optical touch device with pixilated light-turning features |
| US8736939B2 (en) | 2011-11-04 | 2014-05-27 | Qualcomm Mems Technologies, Inc. | Matching layer thin-films for an electromechanical systems reflective display device |
| US8760751B2 (en) * | 2012-01-26 | 2014-06-24 | Qualcomm Mems Technologies, Inc. | Analog IMOD having a color notch filter |
| US9075226B2 (en) * | 2012-04-06 | 2015-07-07 | Qualcomm Mems Technologies, Inc. | Multi-state IMOD with RGB absorbers |
| US9135843B2 (en) * | 2012-05-31 | 2015-09-15 | Qualcomm Mems Technologies, Inc. | Charge pump for producing display driver output |
| US20150022876A1 (en) * | 2013-07-22 | 2015-01-22 | Qualcomm Mems Technologies, Inc. | Multi-state interferometric modulator with color attenuator |
| CA2890560C (en) * | 2013-10-20 | 2021-06-01 | Mtt Innovation Incorporated | Light field projectors and methods |
| WO2015172236A1 (en) * | 2014-05-15 | 2015-11-19 | Mtt Innovation Incorporated | Optimizing drive schemes for multiple projector systems |
| US10551162B2 (en) | 2015-05-06 | 2020-02-04 | North Carolina State University | Code-modulated phased-array interferometric imaging |
| GB2541685A (en) * | 2015-08-26 | 2017-03-01 | Bae Systems Plc | Time code display |
| CN107167915A (zh) * | 2017-05-17 | 2017-09-15 | 杭州元色科技有限公司 | 环境光干涉式彩色透明显示模块及透明显示方法 |
| KR102184388B1 (ko) * | 2017-11-28 | 2020-11-30 | 주식회사 엘지화학 | 투과도 가변 장치 및 그 용도 |
| JP7490340B2 (ja) * | 2018-06-29 | 2024-05-27 | ヴァイアヴィ・ソリューションズ・インコーポレイテッド | 非対称層構造を有する光学デバイス |
| US11530952B2 (en) | 2020-01-17 | 2022-12-20 | Spectrove Inc. | MEMS device for interferometric spectroscopy |
Family Cites Families (478)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2010A (en) * | 1841-03-18 | Machine foe | ||
| US720725A (en) * | 1902-05-14 | 1903-02-17 | Alexander Moffitt | Portable shipping-stall for horses, &c. |
| US2534846A (en) | 1946-06-20 | 1950-12-19 | Emi Ltd | Color filter |
| US2590906A (en) | 1946-11-22 | 1952-04-01 | Farrand Optical Co Inc | Reflection interference filter |
| US2677714A (en) | 1951-09-21 | 1954-05-04 | Alois Vogt Dr | Optical-electrical conversion device comprising a light-permeable metal electrode |
| US3247392A (en) * | 1961-05-17 | 1966-04-19 | Optical Coating Laboratory Inc | Optical coating and assembly used as a band pass interference filter reflecting in the ultraviolet and infrared |
| US3296530A (en) | 1962-09-28 | 1967-01-03 | Lockheed Aircraft Corp | Voltage controlled electroluminescent meter display |
| US3728030A (en) * | 1970-06-22 | 1973-04-17 | Cary Instruments | Polarization interferometer |
| US3679313A (en) | 1970-10-23 | 1972-07-25 | Bell Telephone Labor Inc | Dispersive element for optical pulse compression |
| US3701586A (en) | 1971-04-21 | 1972-10-31 | George G Goetz | Light modulating deflectable membrane |
| JPS4946974A (ru) | 1972-09-11 | 1974-05-07 | ||
| DE2336930A1 (de) | 1973-07-20 | 1975-02-06 | Battelle Institut E V | Infrarot-modulator (ii.) |
| US3886310A (en) | 1973-08-22 | 1975-05-27 | Westinghouse Electric Corp | Electrostatically deflectable light valve with improved diffraction properties |
| US4087810A (en) | 1976-06-30 | 1978-05-02 | International Business Machines Corporation | Membrane deformographic display, and method of making |
| JPH0134088Y2 (ru) | 1979-12-11 | 1989-10-17 | ||
| NL8001281A (nl) | 1980-03-04 | 1981-10-01 | Philips Nv | Weergeefinrichting. |
| DE3109653A1 (de) * | 1980-03-31 | 1982-01-28 | Jenoptik Jena Gmbh, Ddr 6900 Jena | "resonanzabsorber" |
| US4421381A (en) | 1980-04-04 | 1983-12-20 | Yokogawa Hokushin Electric Corp. | Mechanical vibrating element |
| US4441791A (en) * | 1980-09-02 | 1984-04-10 | Texas Instruments Incorporated | Deformable mirror light modulator |
| US4518959A (en) | 1982-05-13 | 1985-05-21 | Mitsubishi Denki Kabushiki Kaisha | Electronic analog display device |
| EP0109160A3 (en) | 1982-10-14 | 1986-04-09 | The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and | Electronic displays |
| US4497974A (en) * | 1982-11-22 | 1985-02-05 | Exxon Research & Engineering Co. | Realization of a thin film solar cell with a detached reflector |
| US4498953A (en) * | 1983-07-27 | 1985-02-12 | At&T Bell Laboratories | Etching techniques |
| US5096279A (en) * | 1984-08-31 | 1992-03-17 | Texas Instruments Incorporated | Spatial light modulator and method |
| US4560435A (en) | 1984-10-01 | 1985-12-24 | International Business Machines Corporation | Composite back-etch/lift-off stencil for proximity effect minimization |
| US4655554A (en) * | 1985-03-06 | 1987-04-07 | The United States Of America As Represented By The Secretary Of The Air Force | Spatial light modulator having a capacitively coupled photoconductor |
| US4859060A (en) | 1985-11-26 | 1989-08-22 | 501 Sharp Kabushiki Kaisha | Variable interferometric device and a process for the production of the same |
| US4705361A (en) | 1985-11-27 | 1987-11-10 | Texas Instruments Incorporated | Spatial light modulator |
| US5835255A (en) * | 1986-04-23 | 1998-11-10 | Etalon, Inc. | Visible spectrum modulator arrays |
| GB8621438D0 (en) | 1986-09-05 | 1986-10-15 | Secr Defence | Electro-optic device |
| US4786128A (en) | 1986-12-02 | 1988-11-22 | Quantum Diagnostics, Ltd. | Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction |
| JPS63194285A (ja) | 1987-02-06 | 1988-08-11 | シャープ株式会社 | カラ−表示装置 |
| US4822993A (en) | 1987-02-17 | 1989-04-18 | Optron Systems, Inc. | Low-cost, substantially cross-talk free high spatial resolution 2-D bistable light modulator |
| DE3776157D1 (de) * | 1987-06-04 | 1992-02-27 | Walter Lukosz | Optisches modulations- und mess-verfahren. |
| US4956619A (en) | 1988-02-19 | 1990-09-11 | Texas Instruments Incorporated | Spatial light modulator |
| US4980775A (en) | 1988-07-21 | 1990-12-25 | Magnascreen Corporation | Modular flat-screen television displays and modules and circuit drives therefor |
| US5028939A (en) | 1988-08-23 | 1991-07-02 | Texas Instruments Incorporated | Spatial light modulator system |
| US4925259A (en) | 1988-10-20 | 1990-05-15 | The United States Of America As Represented By The United States Department Of Energy | Multilayer optical dielectric coating |
| US4982184A (en) * | 1989-01-03 | 1991-01-01 | General Electric Company | Electrocrystallochromic display and element |
| US4973131A (en) | 1989-02-03 | 1990-11-27 | Mcdonnell Douglas Corporation | Modulator mirror |
| US5022745A (en) | 1989-09-07 | 1991-06-11 | Massachusetts Institute Of Technology | Electrostatically deformable single crystal dielectrically coated mirror |
| DE3930259A1 (de) | 1989-09-11 | 1991-03-21 | Thomson Brandt Gmbh | Ansteuerschaltung fuer eine fluessigkristallanzeige |
| US4954789A (en) | 1989-09-28 | 1990-09-04 | Texas Instruments Incorporated | Spatial light modulator |
| JP2923656B2 (ja) | 1989-12-11 | 1999-07-26 | 富士通株式会社 | マトリクス型表示装置のデータドライバ |
| US5216537A (en) | 1990-06-29 | 1993-06-01 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
| US5083857A (en) * | 1990-06-29 | 1992-01-28 | Texas Instruments Incorporated | Multi-level deformable mirror device |
| US5062689A (en) | 1990-08-21 | 1991-11-05 | Koehler Dale R | Electrostatically actuatable light modulating device |
| US5034351A (en) | 1990-10-01 | 1991-07-23 | Motorola, Inc. | Process for forming a feature on a substrate without recessing the surface of the substrate |
| US5416514A (en) | 1990-12-27 | 1995-05-16 | North American Philips Corporation | Single panel color projection video display having control circuitry for synchronizing the color illumination system with reading/writing of the light valve |
| JPH04276721A (ja) | 1991-03-04 | 1992-10-01 | Fuji Photo Film Co Ltd | 液晶表示素子 |
| JPH04309925A (ja) | 1991-04-08 | 1992-11-02 | Nec Corp | アクティブマトリックスカラー液晶表示素子 |
| US5142414A (en) | 1991-04-22 | 1992-08-25 | Koehler Dale R | Electrically actuatable temporal tristimulus-color device |
| US5287215A (en) | 1991-07-17 | 1994-02-15 | Optron Systems, Inc. | Membrane light modulation systems |
| US5170283A (en) | 1991-07-24 | 1992-12-08 | Northrop Corporation | Silicon spatial light modulator |
| US5240818A (en) | 1991-07-31 | 1993-08-31 | Texas Instruments Incorporated | Method for manufacturing a color filter for deformable mirror device |
| US5315370A (en) | 1991-10-23 | 1994-05-24 | Bulow Jeffrey A | Interferometric modulator for optical signal processing |
| US6381022B1 (en) | 1992-01-22 | 2002-04-30 | Northeastern University | Light modulating device |
| JPH05281479A (ja) | 1992-03-31 | 1993-10-29 | Nippon Steel Corp | 表示装置 |
| TW245772B (ru) * | 1992-05-19 | 1995-04-21 | Akzo Nv | |
| US5638084A (en) | 1992-05-22 | 1997-06-10 | Dielectric Systems International, Inc. | Lighting-independent color video display |
| US5818095A (en) * | 1992-08-11 | 1998-10-06 | Texas Instruments Incorporated | High-yield spatial light modulator with light blocking layer |
| US5285196A (en) | 1992-10-15 | 1994-02-08 | Texas Instruments Incorporated | Bistable DMD addressing method |
| FI96450C (fi) | 1993-01-13 | 1996-06-25 | Vaisala Oy | Yksikanavainen kaasun pitoisuuden mittausmenetelmä ja -laitteisto |
| JP3240724B2 (ja) | 1993-02-09 | 2001-12-25 | ソニー株式会社 | 配線形成方法 |
| US6674562B1 (en) | 1994-05-05 | 2004-01-06 | Iridigm Display Corporation | Interferometric modulation of radiation |
| US7830587B2 (en) | 1993-03-17 | 2010-11-09 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light with semiconductor substrate |
| US5446567A (en) | 1993-03-23 | 1995-08-29 | Honeywell Inc. | Liquid crystal display with first and second aperatures where one aperature has protuberances |
| US5337191A (en) | 1993-04-13 | 1994-08-09 | Photran Corporation | Broad band pass filter including metal layers and dielectric layers of alternating refractive index |
| US5559358A (en) | 1993-05-25 | 1996-09-24 | Honeywell Inc. | Opto-electro-mechanical device or filter, process for making, and sensors made therefrom |
| US5526172A (en) | 1993-07-27 | 1996-06-11 | Texas Instruments Incorporated | Microminiature, monolithic, variable electrical signal processor and apparatus including same |
| US5452024A (en) | 1993-11-01 | 1995-09-19 | Texas Instruments Incorporated | DMD display system |
| FI94804C (fi) | 1994-02-17 | 1995-10-25 | Vaisala Oy | Sähköisesti säädettävä pintamikromekaaninen Fabry-Perot-interferometri käytettäväksi optisessa materiaalianalyysissä |
| US5796378A (en) | 1994-03-29 | 1998-08-18 | Casio Computer Co., Ltd. | Birifringence control type liquid crystal display device and apparatus and method of driving the same |
| US5665997A (en) | 1994-03-31 | 1997-09-09 | Texas Instruments Incorporated | Grated landing area to eliminate sticking of micro-mechanical devices |
| US5457900A (en) | 1994-03-31 | 1995-10-17 | Roy; Avery J. | Footwear display device |
| US7776631B2 (en) | 1994-05-05 | 2010-08-17 | Qualcomm Mems Technologies, Inc. | MEMS device and method of forming a MEMS device |
| US7839556B2 (en) | 1994-05-05 | 2010-11-23 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
| US7800809B2 (en) | 1994-05-05 | 2010-09-21 | Qualcomm Mems Technologies, Inc. | System and method for a MEMS device |
| US7123216B1 (en) | 1994-05-05 | 2006-10-17 | Idc, Llc | Photonic MEMS and structures |
| US7550794B2 (en) * | 2002-09-20 | 2009-06-23 | Idc, Llc | Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer |
| US6710908B2 (en) * | 1994-05-05 | 2004-03-23 | Iridigm Display Corporation | Controlling micro-electro-mechanical cavities |
| US7460291B2 (en) | 1994-05-05 | 2008-12-02 | Idc, Llc | Separable modulator |
| US7852545B2 (en) | 1994-05-05 | 2010-12-14 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
| US8081369B2 (en) | 1994-05-05 | 2011-12-20 | Qualcomm Mems Technologies, Inc. | System and method for a MEMS device |
| US6680792B2 (en) * | 1994-05-05 | 2004-01-20 | Iridigm Display Corporation | Interferometric modulation of radiation |
| US7808694B2 (en) | 1994-05-05 | 2010-10-05 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
| US7738157B2 (en) | 1994-05-05 | 2010-06-15 | Qualcomm Mems Technologies, Inc. | System and method for a MEMS device |
| US7826120B2 (en) * | 1994-05-05 | 2010-11-02 | Qualcomm Mems Technologies, Inc. | Method and device for multi-color interferometric modulation |
| US20010003487A1 (en) | 1996-11-05 | 2001-06-14 | Mark W. Miles | Visible spectrum modulator arrays |
| US8014059B2 (en) | 1994-05-05 | 2011-09-06 | Qualcomm Mems Technologies, Inc. | System and method for charge control in a MEMS device |
| US6040937A (en) * | 1994-05-05 | 2000-03-21 | Etalon, Inc. | Interferometric modulation |
| US5920418A (en) | 1994-06-21 | 1999-07-06 | Matsushita Electric Industrial Co., Ltd. | Diffractive optical modulator and method for producing the same, infrared sensor including such a diffractive optical modulator and method for producing the same, and display device including such a diffractive optical modulator |
| US5485304A (en) | 1994-07-29 | 1996-01-16 | Texas Instruments, Inc. | Support posts for micro-mechanical devices |
| US5636052A (en) | 1994-07-29 | 1997-06-03 | Lucent Technologies Inc. | Direct view display based on a micromechanical modulation |
| JP3363606B2 (ja) | 1994-08-05 | 2003-01-08 | 三洋電機株式会社 | 光起電力モジュール |
| US5544268A (en) | 1994-09-09 | 1996-08-06 | Deacon Research | Display panel with electrically-controlled waveguide-routing |
| FR2726960B1 (fr) | 1994-11-10 | 1996-12-13 | Thomson Csf | Procede de realisation de transducteurs magnetoresistifs |
| JPH08153700A (ja) * | 1994-11-25 | 1996-06-11 | Semiconductor Energy Lab Co Ltd | 導電性被膜の異方性エッチング方法 |
| US6115014A (en) | 1994-12-26 | 2000-09-05 | Casio Computer Co., Ltd. | Liquid crystal display by means of time-division color mixing and voltage driving methods using birefringence |
| US5550373A (en) | 1994-12-30 | 1996-08-27 | Honeywell Inc. | Fabry-Perot micro filter-detector |
| US5699074A (en) | 1995-03-24 | 1997-12-16 | Teletransaction, Inc. | Addressing device and method for rapid video response in a bistable liquid crystal display |
| US7898722B2 (en) | 1995-05-01 | 2011-03-01 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device with restoring electrode |
| US5661592A (en) | 1995-06-07 | 1997-08-26 | Silicon Light Machines | Method of making and an apparatus for a flat diffraction grating light valve |
| US6046840A (en) * | 1995-06-19 | 2000-04-04 | Reflectivity, Inc. | Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements |
| US6849471B2 (en) * | 2003-03-28 | 2005-02-01 | Reflectivity, Inc. | Barrier layers for microelectromechanical systems |
| US5835256A (en) | 1995-06-19 | 1998-11-10 | Reflectivity, Inc. | Reflective spatial light modulator with encapsulated micro-mechanical elements |
| US6124851A (en) | 1995-07-20 | 2000-09-26 | E Ink Corporation | Electronic book with multiple page displays |
| US8139050B2 (en) | 1995-07-20 | 2012-03-20 | E Ink Corporation | Addressing schemes for electronic displays |
| KR100213026B1 (ko) | 1995-07-27 | 1999-08-02 | 윤종용 | 디엠디 및 그 제조공정 |
| US5963788A (en) | 1995-09-06 | 1999-10-05 | Sandia Corporation | Method for integrating microelectromechanical devices with electronic circuitry |
| US6324192B1 (en) | 1995-09-29 | 2001-11-27 | Coretek, Inc. | Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same |
| JPH09127551A (ja) * | 1995-10-31 | 1997-05-16 | Sharp Corp | 半導体装置およびアクティブマトリクス基板 |
| US7907319B2 (en) | 1995-11-06 | 2011-03-15 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light with optical compensation |
| US5999306A (en) | 1995-12-01 | 1999-12-07 | Seiko Epson Corporation | Method of manufacturing spatial light modulator and electronic device employing it |
| US5889568A (en) | 1995-12-12 | 1999-03-30 | Rainbow Displays Inc. | Tiled flat panel displays |
| US5825528A (en) | 1995-12-26 | 1998-10-20 | Lucent Technologies Inc. | Phase-mismatched fabry-perot cavity micromechanical modulator |
| US5751469A (en) | 1996-02-01 | 1998-05-12 | Lucent Technologies Inc. | Method and apparatus for an improved micromechanical modulator |
| US6114862A (en) | 1996-02-14 | 2000-09-05 | Stmicroelectronics, Inc. | Capacitive distance sensor |
| JP3597305B2 (ja) | 1996-03-05 | 2004-12-08 | 株式会社半導体エネルギー研究所 | 液晶表示装置およびその作製方法 |
| US5867301A (en) | 1996-04-22 | 1999-02-02 | Engle; Craig D. | Phase modulating device |
| US5710656A (en) * | 1996-07-30 | 1998-01-20 | Lucent Technologies Inc. | Micromechanical optical modulator having a reduced-mass composite membrane |
| US5838484A (en) | 1996-08-19 | 1998-11-17 | Lucent Technologies Inc. | Micromechanical optical modulator with linear operating characteristic |
| GB9619781D0 (en) | 1996-09-23 | 1996-11-06 | Secr Defence | Multi layer interference coatings |
| FI108581B (fi) | 1996-10-03 | 2002-02-15 | Valtion Teknillinen | Sähköisesti säädettävä optinen suodin |
| US5771116A (en) | 1996-10-21 | 1998-06-23 | Texas Instruments Incorporated | Multiple bias level reset waveform for enhanced DMD control |
| US7471444B2 (en) * | 1996-12-19 | 2008-12-30 | Idc, Llc | Interferometric modulation of radiation |
| US7830588B2 (en) | 1996-12-19 | 2010-11-09 | Qualcomm Mems Technologies, Inc. | Method of making a light modulating display device and associated transistor circuitry and structures thereof |
| US6028689A (en) * | 1997-01-24 | 2000-02-22 | The United States Of America As Represented By The Secretary Of The Air Force | Multi-motion micromirror |
| US5786927A (en) | 1997-03-12 | 1998-07-28 | Lucent Technologies Inc. | Gas-damped micromechanical structure |
| US6034752A (en) | 1997-03-22 | 2000-03-07 | Kent Displays Incorporated | Display device reflecting visible and infrared radiation |
| US6384952B1 (en) | 1997-03-27 | 2002-05-07 | Mems Optical Inc. | Vertical comb drive actuated deformable mirror device and method |
| EP0879991A3 (en) | 1997-05-13 | 1999-04-21 | Matsushita Electric Industrial Co., Ltd. | Illuminating system |
| FI104658B (fi) | 1997-05-26 | 2000-03-15 | Nokia Mobile Phones Ltd | Kahden näytön näyttöjärjestely ja päätelaite |
| US6142358A (en) | 1997-05-31 | 2000-11-07 | The Regents Of The University Of California | Wafer-to-wafer transfer of microstructures using break-away tethers |
| US6147680A (en) | 1997-06-03 | 2000-11-14 | Koa T&T Corporation | Touchpad with interleaved traces |
| US5959777A (en) | 1997-06-10 | 1999-09-28 | The University Of British Columbia | Passive high efficiency variable reflectivity image display device |
| WO1998059382A1 (en) | 1997-06-23 | 1998-12-30 | Fed Corporation | Voltage controlled color organic light emitting device and method of producing the same |
| US5870221A (en) * | 1997-07-25 | 1999-02-09 | Lucent Technologies, Inc. | Micromechanical modulator having enhanced performance |
| US5867302A (en) * | 1997-08-07 | 1999-02-02 | Sandia Corporation | Bistable microelectromechanical actuator |
| US6031653A (en) * | 1997-08-28 | 2000-02-29 | California Institute Of Technology | Low-cost thin-metal-film interference filters |
| EP0969306B1 (en) | 1998-01-20 | 2005-05-11 | Seiko Epson Corporation | Optical switching device and image display device |
| JPH11211999A (ja) | 1998-01-28 | 1999-08-06 | Teijin Ltd | 光変調素子および表示装置 |
| US5914804A (en) | 1998-01-28 | 1999-06-22 | Lucent Technologies Inc | Double-cavity micromechanical optical modulator with plural multilayer mirrors |
| US6100861A (en) | 1998-02-17 | 2000-08-08 | Rainbow Displays, Inc. | Tiled flat panel display with improved color gamut |
| JPH11258558A (ja) | 1998-03-13 | 1999-09-24 | Fuji Photo Film Co Ltd | 平面表示装置 |
| US6195196B1 (en) | 1998-03-13 | 2001-02-27 | Fuji Photo Film Co., Ltd. | Array-type exposing device and flat type display incorporating light modulator and driving method thereof |
| US6262697B1 (en) | 1998-03-20 | 2001-07-17 | Eastman Kodak Company | Display having viewable and conductive images |
| WO1999052006A2 (en) | 1998-04-08 | 1999-10-14 | Etalon, Inc. | Interferometric modulation of radiation |
| US8928967B2 (en) * | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
| US7532377B2 (en) | 1998-04-08 | 2009-05-12 | Idc, Llc | Movable micro-electromechanical device |
| US6097145A (en) | 1998-04-27 | 2000-08-01 | Copytele, Inc. | Aerogel-based phase transition flat panel display |
| US6282010B1 (en) | 1998-05-14 | 2001-08-28 | Texas Instruments Incorporated | Anti-reflective coatings for spatial light modulators |
| US6046659A (en) * | 1998-05-15 | 2000-04-04 | Hughes Electronics Corporation | Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications |
| JP3865942B2 (ja) | 1998-07-17 | 2007-01-10 | 富士フイルムホールディングス株式会社 | アクティブマトリクス素子、及びアクティブマトリクス素子を用いた発光素子、光変調素子、光検出素子、露光素子、表示装置 |
| US6242989B1 (en) | 1998-09-12 | 2001-06-05 | Agere Systems Guardian Corp. | Article comprising a multi-port variable capacitor |
| JP4074714B2 (ja) | 1998-09-25 | 2008-04-09 | 富士フイルム株式会社 | アレイ型光変調素子及び平面ディスプレイの駆動方法 |
| US6323834B1 (en) * | 1998-10-08 | 2001-11-27 | International Business Machines Corporation | Micromechanical displays and fabrication method |
| JP3919954B2 (ja) | 1998-10-16 | 2007-05-30 | 富士フイルム株式会社 | アレイ型光変調素子及び平面ディスプレイの駆動方法 |
| US6171945B1 (en) | 1998-10-22 | 2001-01-09 | Applied Materials, Inc. | CVD nanoporous silica low dielectric constant films |
| JP2000147262A (ja) | 1998-11-11 | 2000-05-26 | Nobuyuki Higuchi | 集光装置及びこれを利用した太陽光発電システム |
| US6316289B1 (en) | 1998-11-12 | 2001-11-13 | Amerasia International Technology Inc. | Method of forming fine-pitch interconnections employing a standoff mask |
| US6465956B1 (en) | 1998-12-28 | 2002-10-15 | Pioneer Corporation | Plasma display panel |
| US6188519B1 (en) | 1999-01-05 | 2001-02-13 | Kenneth Carlisle Johnson | Bigrating light valve |
| JP3864204B2 (ja) | 1999-02-19 | 2006-12-27 | 株式会社日立プラズマパテントライセンシング | プラズマディスプレイパネル |
| US6242932B1 (en) | 1999-02-19 | 2001-06-05 | Micron Technology, Inc. | Interposer for semiconductor components having contact balls |
| US6323987B1 (en) | 1999-05-14 | 2001-11-27 | Agere Systems Optoelectronics Guardian Corp. | Controlled multi-wavelength etalon |
| US6297811B1 (en) | 1999-06-02 | 2001-10-02 | Elo Touchsystems, Inc. | Projective capacitive touchscreen |
| US6335235B1 (en) * | 1999-08-17 | 2002-01-01 | Advanced Micro Devices, Inc. | Simplified method of patterning field dielectric regions in a semiconductor device |
| US6813032B1 (en) | 1999-09-07 | 2004-11-02 | Applied Materials, Inc. | Method and apparatus for enhanced embedded substrate inspection through process data collection and substrate imaging techniques |
| WO2003007049A1 (en) * | 1999-10-05 | 2003-01-23 | Iridigm Display Corporation | Photonic mems and structures |
| US6351329B1 (en) * | 1999-10-08 | 2002-02-26 | Lucent Technologies Inc. | Optical attenuator |
| US6518944B1 (en) | 1999-10-25 | 2003-02-11 | Kent Displays, Inc. | Combined cholesteric liquid crystal display and solar cell assembly device |
| US6960305B2 (en) | 1999-10-26 | 2005-11-01 | Reflectivity, Inc | Methods for forming and releasing microelectromechanical structures |
| US7061678B1 (en) | 1999-11-10 | 2006-06-13 | Thomson Licensing | Stereoscopic display device with two back light sources |
| AU1813001A (en) | 1999-12-03 | 2001-06-12 | California Institute Of Technology | Optically efficient liquid crystal display device |
| US6519073B1 (en) * | 2000-01-10 | 2003-02-11 | Lucent Technologies Inc. | Micromechanical modulator and methods for fabricating the same |
| CN1258448C (zh) | 2000-01-21 | 2006-06-07 | 光学涂层实验公司 | 光学可变防伪图样 |
| US6307663B1 (en) | 2000-01-26 | 2001-10-23 | Eastman Kodak Company | Spatial light modulator with conformal grating device |
| JP2001221913A (ja) | 2000-02-08 | 2001-08-17 | Yokogawa Electric Corp | ファブリペローフィルタ及び赤外線ガス分析計 |
| GB2359636B (en) | 2000-02-22 | 2002-05-01 | Marconi Comm Ltd | Wavelength selective optical filter |
| EP1185972A1 (en) | 2000-02-24 | 2002-03-13 | Koninklijke Philips Electronics N.V. | Display device comprising a light guide |
| US6836366B1 (en) | 2000-03-03 | 2004-12-28 | Axsun Technologies, Inc. | Integrated tunable fabry-perot filter and method of making same |
| US6747775B2 (en) | 2000-03-20 | 2004-06-08 | Np Photonics, Inc. | Detunable Fabry-Perot interferometer and an add/drop multiplexer using the same |
| US6665109B2 (en) | 2000-03-20 | 2003-12-16 | Np Photonics, Inc. | Compliant mechanism and method of forming same |
| US6698295B1 (en) * | 2000-03-31 | 2004-03-02 | Shipley Company, L.L.C. | Microstructures comprising silicon nitride layer and thin conductive polysilicon layer |
| US7101047B2 (en) | 2000-03-31 | 2006-09-05 | Sharp Laboratories Of America, Inc. | Projection display systems for light valves |
| US6744805B2 (en) | 2000-04-05 | 2004-06-01 | Nortel Networks Limited | Single mode operation of microelectromechanically tunable, half-symmetric, vertical cavity surface emitting lasers |
| US6400738B1 (en) | 2000-04-14 | 2002-06-04 | Agilent Technologies, Inc. | Tunable Fabry-Perot filters and lasers |
| US6864882B2 (en) | 2000-05-24 | 2005-03-08 | Next Holdings Limited | Protected touch panel display system |
| US7008812B1 (en) | 2000-05-30 | 2006-03-07 | Ic Mechanics, Inc. | Manufacture of MEMS structures in sealed cavity using dry-release MEMS device encapsulation |
| FR2811139B1 (fr) | 2000-06-29 | 2003-10-17 | Centre Nat Rech Scient | Dispositif optoelectronique a filtrage de longueur d'onde integre |
| DE60142383D1 (de) | 2000-07-03 | 2010-07-29 | Sony Corp | Optische mehrschichtige Struktur, optische Schalteinrichtung, und Bildanzeigevorrichtung |
| JP4830183B2 (ja) * | 2000-07-19 | 2011-12-07 | ソニー株式会社 | 光学多層構造体および光スイッチング素子、並びに画像表示装置 |
| JP3823016B2 (ja) | 2000-07-21 | 2006-09-20 | 株式会社日立製作所 | 液晶表示装置 |
| JP2002062490A (ja) | 2000-08-14 | 2002-02-28 | Canon Inc | 干渉性変調素子 |
| US6466354B1 (en) | 2000-09-19 | 2002-10-15 | Silicon Light Machines | Method and apparatus for interferometric modulation of light |
| US6707594B2 (en) | 2000-09-20 | 2004-03-16 | General Nutronics, Inc. | Method and device for switching wavelength division multiplexed optical signals using two-dimensional micro-electromechanical mirrors |
| GB2371119A (en) | 2000-09-25 | 2002-07-17 | Marconi Caswell Ltd | Micro electro-mechanical systems |
| JP2004511824A (ja) | 2000-10-12 | 2004-04-15 | レベオ， インコーポレイティッド | デジタル・ライト・プロセシング方式の３ｄ投影システム及び方法 |
| US6714565B1 (en) | 2000-11-01 | 2004-03-30 | Agilent Technologies, Inc. | Optically tunable Fabry Perot microelectromechanical resonator |
| US6556338B2 (en) * | 2000-11-03 | 2003-04-29 | Intpax, Inc. | MEMS based variable optical attenuator (MBVOA) |
| US6433917B1 (en) | 2000-11-22 | 2002-08-13 | Ball Semiconductor, Inc. | Light modulation device and system |
| TW565726B (en) | 2000-11-27 | 2003-12-11 | Asulab Sa | Reflective liquid crystal display device with improved display contrast |
| US6847752B2 (en) | 2000-12-07 | 2005-01-25 | Bluebird Optical Mems Ltd. | Integrated actuator for optical switch mirror array |
| US7307775B2 (en) | 2000-12-07 | 2007-12-11 | Texas Instruments Incorporated | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| US6906847B2 (en) | 2000-12-07 | 2005-06-14 | Reflectivity, Inc | Spatial light modulators with light blocking/absorbing areas |
| US6614576B2 (en) * | 2000-12-15 | 2003-09-02 | Texas Instruments Incorporated | Surface micro-planarization for enhanced optical efficiency and pixel performance in SLM devices |
| DE10064616C2 (de) * | 2000-12-22 | 2003-02-06 | Ovd Kinegram Ag Zug | Dekorfolie und Verfahren zum Beschriften der Dekorfolie |
| US20020149834A1 (en) | 2000-12-22 | 2002-10-17 | Ball Semiconductor, Inc. | Light modulation device and system |
| US6911891B2 (en) | 2001-01-19 | 2005-06-28 | Massachusetts Institute Of Technology | Bistable actuation techniques, mechanisms, and applications |
| JP2002221678A (ja) | 2001-01-25 | 2002-08-09 | Seiko Epson Corp | 光スイッチングデバイス、その製造方法および画像表示装置 |
| JP3818857B2 (ja) | 2001-02-07 | 2006-09-06 | シャープ株式会社 | 表示装置 |
| WO2002079853A1 (en) | 2001-03-16 | 2002-10-10 | Corning Intellisense Corporation | Electrostatically actuated micro-electro-mechanical devices and method of manufacture |
| US6661561B2 (en) | 2001-03-26 | 2003-12-09 | Creo Inc. | High frequency deformable mirror device |
| GB0108309D0 (en) | 2001-04-03 | 2001-05-23 | Koninkl Philips Electronics Nv | Matrix array devices with flexible substrates |
| JP4603190B2 (ja) | 2001-04-16 | 2010-12-22 | 株式会社日立製作所 | 液晶表示装置 |
| US6600587B2 (en) | 2001-04-23 | 2003-07-29 | Memx, Inc. | Surface micromachined optical system with reinforced mirror microstructure |
| US6657832B2 (en) | 2001-04-26 | 2003-12-02 | Texas Instruments Incorporated | Mechanically assisted restoring force support for micromachined membranes |
| FR2824643B1 (fr) | 2001-05-10 | 2003-10-31 | Jean Pierre Lazzari | Dispositif de modulation de lumiere |
| AU2002303842A1 (en) | 2001-05-22 | 2002-12-03 | Reflectivity, Inc. | A method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants |
| US6511183B2 (en) | 2001-06-02 | 2003-01-28 | Koninklijke Philips Electronics N.V. | Digital image projector with oriented fixed-polarization-axis polarizing beamsplitter |
| WO2003003108A1 (fr) | 2001-06-29 | 2003-01-09 | Citizen Watch Co., Ltd. | Ecran lcd et procede de fabrication correspondant |
| DE60230673D1 (de) | 2001-07-05 | 2009-02-12 | Ibm | Mikrosystemschalter |
| JP3740444B2 (ja) | 2001-07-11 | 2006-02-01 | キヤノン株式会社 | 光偏向器、それを用いた光学機器、ねじれ揺動体 |
| JP4032216B2 (ja) * | 2001-07-12 | 2008-01-16 | ソニー株式会社 | 光学多層構造体およびその製造方法、並びに光スイッチング素子および画像表示装置 |
| US6594059B2 (en) * | 2001-07-16 | 2003-07-15 | Axsun Technologies, Inc. | Tilt mirror fabry-perot filter system, fabrication process therefor, and method of operation thereof |
| US6632698B2 (en) | 2001-08-07 | 2003-10-14 | Hewlett-Packard Development Company, L.P. | Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS |
| US6661562B2 (en) * | 2001-08-17 | 2003-12-09 | Lucent Technologies Inc. | Optical modulator and method of manufacture thereof |
| GB2389150B (en) * | 2001-09-07 | 2004-08-25 | Avon Polymer Prod Ltd | Noise and vibration suppressors |
| US7015457B2 (en) | 2002-03-18 | 2006-03-21 | Honeywell International Inc. | Spectrally tunable detector |
| US20030053078A1 (en) * | 2001-09-17 | 2003-03-20 | Mark Missey | Microelectromechanical tunable fabry-perot wavelength monitor with thermal actuators |
| WO2003028059A1 (en) | 2001-09-21 | 2003-04-03 | Hrl Laboratories, Llc | Mems switches and methods of making same |
| US6870581B2 (en) * | 2001-10-30 | 2005-03-22 | Sharp Laboratories Of America, Inc. | Single panel color video projection display using reflective banded color falling-raster illumination |
| WO2003040338A2 (en) | 2001-11-09 | 2003-05-15 | Coventor, Incorporated | Micro-scale interconnect device with internal heat spreader and method for fabricating same |
| TWI234157B (en) | 2001-12-07 | 2005-06-11 | Matsushita Electric Ind Co Ltd | Information recording medium and method for producing the same |
| JP2003177336A (ja) | 2001-12-11 | 2003-06-27 | Fuji Photo Film Co Ltd | 光変調素子及び光変調素子アレイ並びにそれを用いた露光装置 |
| WO2004041306A2 (en) | 2001-12-14 | 2004-05-21 | Laird Technologies, Inc. | Emi shielding including a lossy medium |
| JP3893421B2 (ja) | 2001-12-27 | 2007-03-14 | 富士フイルム株式会社 | 光変調素子及び光変調素子アレイ並びにそれを用いた露光装置 |
| US6791735B2 (en) * | 2002-01-09 | 2004-09-14 | The Regents Of The University Of California | Differentially-driven MEMS spatial light modulator |
| US20030128175A1 (en) | 2002-01-09 | 2003-07-10 | International Business Machines Corporation | Stereoscopic display system and method |
| US6608268B1 (en) | 2002-02-05 | 2003-08-19 | Memtronics, A Division Of Cogent Solutions, Inc. | Proximity micro-electro-mechanical system |
| US6794119B2 (en) | 2002-02-12 | 2004-09-21 | Iridigm Display Corporation | Method for fabricating a structure for a microelectromechanical systems (MEMS) device |
| US6574033B1 (en) | 2002-02-27 | 2003-06-03 | Iridigm Display Corporation | Microelectromechanical systems device and method for fabricating same |
| AU2003211809A1 (en) | 2002-03-01 | 2003-09-16 | Sharp Kabushiki Kaisha | Light emitting device and display unit using the light emitting device and reading device |
| GB0205479D0 (en) | 2002-03-08 | 2002-04-24 | Koninkl Philips Electronics Nv | Matrix display devices |
| CN1643565A (zh) | 2002-03-13 | 2005-07-20 | 不列颠哥伦比亚大学 | 高动态范围显示装置 |
| US7145143B2 (en) | 2002-03-18 | 2006-12-05 | Honeywell International Inc. | Tunable sensor |
| US6768555B2 (en) | 2002-03-21 | 2004-07-27 | Industrial Technology Research Institute | Fabry-Perot filter apparatus with enhanced optical discrimination |
| US6965468B2 (en) * | 2003-07-03 | 2005-11-15 | Reflectivity, Inc | Micromirror array having reduced gap between adjacent micromirrors of the micromirror array |
| AU2003219505A1 (en) | 2002-04-11 | 2003-10-27 | Moshe Ben-Chorin | Color display devices and methods with enhanced attributes |
| US6972882B2 (en) | 2002-04-30 | 2005-12-06 | Hewlett-Packard Development Company, L.P. | Micro-mirror device with light angle amplification |
| US6954297B2 (en) | 2002-04-30 | 2005-10-11 | Hewlett-Packard Development Company, L.P. | Micro-mirror device including dielectrophoretic liquid |
| US6778034B2 (en) | 2002-05-07 | 2004-08-17 | G.M.W.T. (Global Micro Wire Technology) Ltd. | EMI filters |
| DE10221301B4 (de) | 2002-05-14 | 2004-07-29 | Junghans Uhren Gmbh | Vorrichtung mit Solarzellenanordnung und Flüssigkristallanzeige |
| JP2003340795A (ja) | 2002-05-20 | 2003-12-02 | Sony Corp | 静電駆動型ｍｅｍｓ素子とその製造方法、光学ｍｅｍｓ素子、光変調素子、ｇｌｖデバイス及びレーザディスプレイ |
| JP3801099B2 (ja) | 2002-06-04 | 2006-07-26 | 株式会社デンソー | チューナブルフィルタ、その製造方法、及びそれを使用した光スイッチング装置 |
| US6813059B2 (en) | 2002-06-28 | 2004-11-02 | Silicon Light Machines, Inc. | Reduced formation of asperities in contact micro-structures |
| US6741377B2 (en) | 2002-07-02 | 2004-05-25 | Iridigm Display Corporation | Device having a light-absorbing mask and a method for fabricating same |
| JP4001066B2 (ja) | 2002-07-18 | 2007-10-31 | セイコーエプソン株式会社 | 電気光学装置、配線基板及び電子機器 |
| US6738194B1 (en) | 2002-07-22 | 2004-05-18 | The United States Of America As Represented By The Secretary Of The Navy | Resonance tunable optical filter |
| US6822798B2 (en) * | 2002-08-09 | 2004-11-23 | Optron Systems, Inc. | Tunable optical filter |
| US7071895B2 (en) | 2002-08-22 | 2006-07-04 | Novus Communication Technologies, Inc. | Pseudo bit-depth system for dynamic billboards |
| JP2004145264A (ja) | 2002-08-30 | 2004-05-20 | Victor Co Of Japan Ltd | 投射型表示装置 |
| CN100483176C (zh) * | 2002-09-19 | 2009-04-29 | 皇家飞利浦电子股份有限公司 | 可切换光学元件 |
| JP4057871B2 (ja) | 2002-09-19 | 2008-03-05 | 東芝松下ディスプレイテクノロジー株式会社 | 液晶表示装置 |
| CN100395607C (zh) | 2002-09-20 | 2008-06-18 | 株式会社日立显示器 | 半透过反射型液晶显示器件 |
| KR100512960B1 (ko) | 2002-09-26 | 2005-09-07 | 삼성전자주식회사 | 플렉서블 ｍｅｍｓ 트랜스듀서와 그 제조방법 및 이를채용한 플렉서블 ｍｅｍｓ 무선 마이크로폰 |
| US6885409B2 (en) | 2002-09-27 | 2005-04-26 | Eastman Kodak Company | Cholesteric liquid crystal display system |
| US7085121B2 (en) | 2002-10-21 | 2006-08-01 | Hrl Laboratories, Llc | Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters |
| FR2846318B1 (fr) * | 2002-10-24 | 2005-01-07 | Commissariat Energie Atomique | Microstructure electromecanique integree comportant des moyens de reglage de la pression dans une cavite scellee et procede de reglage de la pression |
| US7370185B2 (en) | 2003-04-30 | 2008-05-06 | Hewlett-Packard Development Company, L.P. | Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers |
| JP3796499B2 (ja) | 2002-11-06 | 2006-07-12 | キヤノン株式会社 | カラー表示素子、カラー表示素子の駆動方法及びカラー表示装置 |
| US6958846B2 (en) | 2002-11-26 | 2005-10-25 | Reflectivity, Inc | Spatial light modulators with light absorbing areas |
| US6844959B2 (en) * | 2002-11-26 | 2005-01-18 | Reflectivity, Inc | Spatial light modulators with light absorbing areas |
| US6813060B1 (en) | 2002-12-09 | 2004-11-02 | Sandia Corporation | Electrical latching of microelectromechanical devices |
| TWI289708B (en) | 2002-12-25 | 2007-11-11 | Qualcomm Mems Technologies Inc | Optical interference type color display |
| JP2004212680A (ja) | 2002-12-27 | 2004-07-29 | Fuji Photo Film Co Ltd | 光変調素子アレイ及びその製造方法 |
| TW594155B (en) | 2002-12-27 | 2004-06-21 | Prime View Int Corp Ltd | Optical interference type color display and optical interference modulator |
| JP2004212638A (ja) | 2002-12-27 | 2004-07-29 | Fuji Photo Film Co Ltd | 光変調素子及び平面表示素子 |
| KR100491257B1 (ko) | 2002-12-31 | 2005-05-24 | 엘지.필립스 엘시디 주식회사 | 반투과형 액정표시장치 |
| JP2004219843A (ja) | 2003-01-16 | 2004-08-05 | Seiko Epson Corp | 光変調器、表示装置及びその製造方法 |
| US6930816B2 (en) | 2003-01-17 | 2005-08-16 | Fuji Photo Film Co., Ltd. | Spatial light modulator, spatial light modulator array, image forming device and flat panel display |
| US7079154B2 (en) | 2003-01-18 | 2006-07-18 | Hewlett-Packard Development Company, L.P. | Sub-pixel assembly with dithering |
| TW200413810A (en) | 2003-01-29 | 2004-08-01 | Prime View Int Co Ltd | Light interference display panel and its manufacturing method |
| TW557395B (en) | 2003-01-29 | 2003-10-11 | Yen Sun Technology Corp | Optical interference type reflection panel and the manufacturing method thereof |
| US7436573B2 (en) | 2003-02-12 | 2008-10-14 | Texas Instruments Incorporated | Electrical connections in microelectromechanical devices |
| US7459402B2 (en) | 2003-02-12 | 2008-12-02 | Texas Instruments Incorporated | Protection layers in micromirror array devices |
| TW200417806A (en) | 2003-03-05 | 2004-09-16 | Prime View Int Corp Ltd | A structure of a light-incidence electrode of an optical interference display plate |
| JP4505189B2 (ja) * | 2003-03-24 | 2010-07-21 | 富士フイルム株式会社 | 透過型光変調装置及びその実装方法 |
| TW583469B (en) | 2003-03-28 | 2004-04-11 | Au Optronics Corp | Back light module and liquid crystal display |
| US6913942B2 (en) | 2003-03-28 | 2005-07-05 | Reflectvity, Inc | Sacrificial layers for use in fabrications of microelectromechanical devices |
| TW567355B (en) | 2003-04-21 | 2003-12-21 | Prime View Int Co Ltd | An interference display cell and fabrication method thereof |
| TWI226504B (en) * | 2003-04-21 | 2005-01-11 | Prime View Int Co Ltd | A structure of an interference display cell |
| TWI224235B (en) | 2003-04-21 | 2004-11-21 | Prime View Int Co Ltd | A method for fabricating an interference display cell |
| TW594360B (en) | 2003-04-21 | 2004-06-21 | Prime View Int Corp Ltd | A method for fabricating an interference display cell |
| US7072093B2 (en) | 2003-04-30 | 2006-07-04 | Hewlett-Packard Development Company, L.P. | Optical interference pixel display with charge control |
| US7447891B2 (en) * | 2003-04-30 | 2008-11-04 | Hewlett-Packard Development Company, L.P. | Light modulator with concentric control-electrode structure |
| US6940630B2 (en) | 2003-05-01 | 2005-09-06 | University Of Florida Research Foundation, Inc. | Vertical displacement device |
| JP4075678B2 (ja) | 2003-05-06 | 2008-04-16 | ソニー株式会社 | 固体撮像素子 |
| TW591716B (en) * | 2003-05-26 | 2004-06-11 | Prime View Int Co Ltd | A structure of a structure release and manufacturing the same |
| TW570896B (en) * | 2003-05-26 | 2004-01-11 | Prime View Int Co Ltd | A method for fabricating an interference display cell |
| TWI223855B (en) * | 2003-06-09 | 2004-11-11 | Taiwan Semiconductor Mfg | Method for manufacturing reflective spatial light modulator mirror devices |
| JP2007027150A (ja) | 2003-06-23 | 2007-02-01 | Hitachi Chem Co Ltd | 集光型光発電システム |
| US7221495B2 (en) | 2003-06-24 | 2007-05-22 | Idc Llc | Thin film precursor stack for MEMS manufacturing |
| FR2857153B1 (fr) | 2003-07-01 | 2005-08-26 | Commissariat Energie Atomique | Micro-commutateur bistable a faible consommation. |
| US7190337B2 (en) | 2003-07-02 | 2007-03-13 | Kent Displays Incorporated | Multi-configuration display driver |
| US6862127B1 (en) * | 2003-11-01 | 2005-03-01 | Fusao Ishii | High performance micromirror arrays and methods of manufacturing the same |
| JP3786106B2 (ja) * | 2003-08-11 | 2006-06-14 | セイコーエプソン株式会社 | 波長可変光フィルタ及びその製造方法 |
| TWI251712B (en) * | 2003-08-15 | 2006-03-21 | Prime View Int Corp Ltd | Interference display plate |
| TW200506479A (en) * | 2003-08-15 | 2005-02-16 | Prime View Int Co Ltd | Color changeable pixel for an interference display |
| TWI231865B (en) * | 2003-08-26 | 2005-05-01 | Prime View Int Co Ltd | An interference display cell and fabrication method thereof |
| TWI230801B (en) | 2003-08-29 | 2005-04-11 | Prime View Int Co Ltd | Reflective display unit using interferometric modulation and manufacturing method thereof |
| JP3979982B2 (ja) * | 2003-08-29 | 2007-09-19 | シャープ株式会社 | 干渉性変調器および表示装置 |
| TWI232333B (en) * | 2003-09-03 | 2005-05-11 | Prime View Int Co Ltd | Display unit using interferometric modulation and manufacturing method thereof |
| US7422928B2 (en) | 2003-09-22 | 2008-09-09 | Matsushita Electric Works, Ltd. | Process for fabricating a micro-electro-mechanical system with movable components |
| US6982820B2 (en) * | 2003-09-26 | 2006-01-03 | Prime View International Co., Ltd. | Color changeable pixel |
| US7027204B2 (en) | 2003-09-26 | 2006-04-11 | Silicon Light Machines Corporation | High-density spatial light modulator |
| TW593126B (en) * | 2003-09-30 | 2004-06-21 | Prime View Int Co Ltd | A structure of a micro electro mechanical system and manufacturing the same |
| US7265809B2 (en) | 2003-10-07 | 2007-09-04 | Universal Avionics Systems Corporation | Flat panel display having integral metal heater optically hidden behind an EMI shield |
| US7324176B2 (en) | 2003-10-07 | 2008-01-29 | American Panel Corporation | Flat panel display having integral heater, EMI shield, and thermal sensors |
| JP2005121906A (ja) | 2003-10-16 | 2005-05-12 | Fuji Photo Film Co Ltd | 反射型光変調アレイ素子及び露光装置 |
| US20050122306A1 (en) | 2003-10-29 | 2005-06-09 | E Ink Corporation | Electro-optic displays with single edge addressing and removable driver circuitry |
| US7782523B2 (en) | 2003-11-01 | 2010-08-24 | Fusao Ishii | Analog micromirror devices with continuous intermediate states |
| US7198873B2 (en) | 2003-11-18 | 2007-04-03 | Asml Netherlands B.V. | Lithographic processing optimization based on hypersampled correlations |
| TW200524236A (en) | 2003-12-01 | 2005-07-16 | Nl Nanosemiconductor Gmbh | Optoelectronic device incorporating an interference filter |
| US7161728B2 (en) | 2003-12-09 | 2007-01-09 | Idc, Llc | Area array modulation and lead reduction in interferometric modulators |
| ATE552521T1 (de) | 2003-12-19 | 2012-04-15 | Barco Nv | Breitbandige reflektive anzeigevorrichtung |
| WO2005089098A2 (en) | 2004-01-14 | 2005-09-29 | The Regents Of The University Of California | Ultra broadband mirror using subwavelength grating |
| TWI235345B (en) | 2004-01-20 | 2005-07-01 | Prime View Int Co Ltd | A structure of an optical interference display unit |
| JP2005235403A (ja) | 2004-02-17 | 2005-09-02 | Hitachi Displays Ltd | 有機・ｅｌ表示装置 |
| TWI256941B (en) * | 2004-02-18 | 2006-06-21 | Qualcomm Mems Technologies Inc | A micro electro mechanical system display cell and method for fabricating thereof |
| US20050195370A1 (en) | 2004-03-02 | 2005-09-08 | Gore Makarand P. | Transmissive/reflective light engine |
| US7119945B2 (en) | 2004-03-03 | 2006-10-10 | Idc, Llc | Altering temporal response of microelectromechanical elements |
| TW200530669A (en) | 2004-03-05 | 2005-09-16 | Prime View Int Co Ltd | Interference display plate and manufacturing method thereof |
| US7855824B2 (en) | 2004-03-06 | 2010-12-21 | Qualcomm Mems Technologies, Inc. | Method and system for color optimization in a display |
| TWI261683B (en) | 2004-03-10 | 2006-09-11 | Qualcomm Mems Technologies Inc | Interference reflective element and repairing method thereof |
| JP4581453B2 (ja) | 2004-03-29 | 2010-11-17 | ソニー株式会社 | Ｍｅｍｓ素子、光学ｍｅｍｓ素子、回折型光学ｍｅｍｓ素子、並びにレーザディスプレイ |
| JP2005308871A (ja) | 2004-04-19 | 2005-11-04 | Aterio Design Kk | 干渉カラーフィルター |
| JP2005309099A (ja) | 2004-04-21 | 2005-11-04 | Seiko Epson Corp | 波長可変フィルタ及びその製造方法 |
| US7400041B2 (en) | 2004-04-26 | 2008-07-15 | Sriram Muthukumar | Compliant multi-composition interconnects |
| US7245285B2 (en) | 2004-04-28 | 2007-07-17 | Hewlett-Packard Development Company, L.P. | Pixel device |
| US7476327B2 (en) * | 2004-05-04 | 2009-01-13 | Idc, Llc | Method of manufacture for microelectromechanical devices |
| US7612759B2 (en) | 2004-05-12 | 2009-11-03 | Shimano Inc. | Cycle computer display apparatus |
| US7164520B2 (en) | 2004-05-12 | 2007-01-16 | Idc, Llc | Packaging for an interferometric modulator |
| US7787170B2 (en) | 2004-06-15 | 2010-08-31 | Texas Instruments Incorporated | Micromirror array assembly with in-array pillars |
| US7113322B2 (en) | 2004-06-23 | 2006-09-26 | Reflectivity, Inc | Micromirror having offset addressing electrode |
| US7075700B2 (en) | 2004-06-25 | 2006-07-11 | The Boeing Company | Mirror actuator position sensor systems and methods |
| US7256922B2 (en) | 2004-07-02 | 2007-08-14 | Idc, Llc | Interferometric modulators with thin film transistors |
| US7872790B2 (en) | 2004-07-09 | 2011-01-18 | University Of Cincinnati | Display capable electrowetting light valve |
| TWI233916B (en) * | 2004-07-09 | 2005-06-11 | Prime View Int Co Ltd | A structure of a micro electro mechanical system |
| TWI270722B (en) * | 2004-07-23 | 2007-01-11 | Au Optronics Corp | Dual-side display panel |
| EP2246726B1 (en) * | 2004-07-29 | 2013-04-03 | QUALCOMM MEMS Technologies, Inc. | System and method for micro-electromechanical operating of an interferometric modulator |
| US7436389B2 (en) | 2004-07-29 | 2008-10-14 | Eugene J Mar | Method and system for controlling the output of a diffractive light device |
| US7126741B2 (en) | 2004-08-12 | 2006-10-24 | Hewlett-Packard Development Company, L.P. | Light modulator assembly |
| US7372348B2 (en) * | 2004-08-20 | 2008-05-13 | Palo Alto Research Center Incorporated | Stressed material and shape memory material MEMS devices and methods for manufacturing |
| KR100648310B1 (ko) * | 2004-09-24 | 2006-11-23 | 삼성전자주식회사 | 영상의 휘도 정보를 이용한 색변환장치 및 이를 구비하는디스플레이 장치 |
| US7321456B2 (en) * | 2004-09-27 | 2008-01-22 | Idc, Llc | Method and device for corner interferometric modulation |
| US7893919B2 (en) * | 2004-09-27 | 2011-02-22 | Qualcomm Mems Technologies, Inc. | Display region architectures |
| US8102407B2 (en) * | 2004-09-27 | 2012-01-24 | Qualcomm Mems Technologies, Inc. | Method and device for manipulating color in a display |
| US7554714B2 (en) | 2004-09-27 | 2009-06-30 | Idc, Llc | Device and method for manipulation of thermal response in a modulator |
| US7289259B2 (en) | 2004-09-27 | 2007-10-30 | Idc, Llc | Conductive bus structure for interferometric modulator array |
| US7420725B2 (en) | 2004-09-27 | 2008-09-02 | Idc, Llc | Device having a conductive light absorbing mask and method for fabricating same |
| US7719500B2 (en) * | 2004-09-27 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | Reflective display pixels arranged in non-rectangular arrays |
| US7564612B2 (en) | 2004-09-27 | 2009-07-21 | Idc, Llc | Photonic MEMS and structures |
| US7372613B2 (en) | 2004-09-27 | 2008-05-13 | Idc, Llc | Method and device for multistate interferometric light modulation |
| US7527995B2 (en) | 2004-09-27 | 2009-05-05 | Qualcomm Mems Technologies, Inc. | Method of making prestructure for MEMS systems |
| US7446927B2 (en) | 2004-09-27 | 2008-11-04 | Idc, Llc | MEMS switch with set and latch electrodes |
| US7944599B2 (en) | 2004-09-27 | 2011-05-17 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
| US7630119B2 (en) * | 2004-09-27 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Apparatus and method for reducing slippage between structures in an interferometric modulator |
| US7936497B2 (en) * | 2004-09-27 | 2011-05-03 | Qualcomm Mems Technologies, Inc. | MEMS device having deformable membrane characterized by mechanical persistence |
| US7184202B2 (en) * | 2004-09-27 | 2007-02-27 | Idc, Llc | Method and system for packaging a MEMS device |
| US7612932B2 (en) * | 2004-09-27 | 2009-11-03 | Idc, Llc | Microelectromechanical device with optical function separated from mechanical and electrical function |
| US7327510B2 (en) * | 2004-09-27 | 2008-02-05 | Idc, Llc | Process for modifying offset voltage characteristics of an interferometric modulator |
| US7684104B2 (en) | 2004-09-27 | 2010-03-23 | Idc, Llc | MEMS using filler material and method |
| US7420728B2 (en) | 2004-09-27 | 2008-09-02 | Idc, Llc | Methods of fabricating interferometric modulators by selectively removing a material |
| US7130104B2 (en) | 2004-09-27 | 2006-10-31 | Idc, Llc | Methods and devices for inhibiting tilting of a mirror in an interferometric modulator |
| JP4155361B2 (ja) | 2004-09-27 | 2008-09-24 | 株式会社デュエラ | シート状集光器及びこれを用いた太陽電池シート |
| US8008736B2 (en) * | 2004-09-27 | 2011-08-30 | Qualcomm Mems Technologies, Inc. | Analog interferometric modulator device |
| US7304784B2 (en) * | 2004-09-27 | 2007-12-04 | Idc, Llc | Reflective display device having viewable display on both sides |
| US7302157B2 (en) | 2004-09-27 | 2007-11-27 | Idc, Llc | System and method for multi-level brightness in interferometric modulation |
| US7750886B2 (en) | 2004-09-27 | 2010-07-06 | Qualcomm Mems Technologies, Inc. | Methods and devices for lighting displays |
| CN101027744B (zh) | 2004-09-27 | 2011-01-12 | 旭硝子株式会社 | 等离子体显示器基板用电极和/或黑条的制造方法 |
| US7369296B2 (en) | 2004-09-27 | 2008-05-06 | Idc, Llc | Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator |
| US7898521B2 (en) | 2004-09-27 | 2011-03-01 | Qualcomm Mems Technologies, Inc. | Device and method for wavelength filtering |
| US7573547B2 (en) | 2004-09-27 | 2009-08-11 | Idc, Llc | System and method for protecting micro-structure of display array using spacers in gap within display device |
| AU2005289445A1 (en) | 2004-09-27 | 2006-04-06 | Idc, Llc | Method and device for multistate interferometric light modulation |
| US7184193B2 (en) | 2004-10-05 | 2007-02-27 | Hewlett-Packard Development Company, L.P. | Systems and methods for amorphous flexures in micro-electro mechanical systems |
| KR100815337B1 (ko) | 2004-10-08 | 2008-03-19 | 삼성전기주식회사 | 디지탈 미세 경사형 회절격자 광변조기 |
| JP4384005B2 (ja) | 2004-10-15 | 2009-12-16 | 株式会社東芝 | 表示装置 |
| US7170697B2 (en) | 2004-10-20 | 2007-01-30 | Hewlett-Packard Development Company, L.P. | Programmable waveform for lamp ballast |
| JP4907544B2 (ja) | 2004-10-27 | 2012-03-28 | エプコス アクチエンゲゼルシャフト | 電子デバイス |
| US20080068697A1 (en) * | 2004-10-29 | 2008-03-20 | Haluzak Charles C | Micro-Displays and Their Manufacture |
| US20060132927A1 (en) | 2004-11-30 | 2006-06-22 | Yoon Frank C | Electrowetting chromatophore |
| US7463406B2 (en) | 2004-12-31 | 2008-12-09 | Au Optronics Corp. | Method for fabricating microelectromechanical optical display devices |
| KR100659298B1 (ko) | 2005-01-04 | 2006-12-20 | 삼성전자주식회사 | Ｍｅｍｓ 스위치 및 그 제조 방법 |
| JP4603489B2 (ja) | 2005-01-28 | 2010-12-22 | セイコーエプソン株式会社 | 波長可変フィルタ |
| US7521666B2 (en) | 2005-02-17 | 2009-04-21 | Capella Microsystems Inc. | Multi-cavity Fabry-Perot ambient light filter apparatus |
| US7675665B2 (en) | 2005-02-23 | 2010-03-09 | Pixtronix, Incorporated | Methods and apparatus for actuating displays |
| US7405852B2 (en) | 2005-02-23 | 2008-07-29 | Pixtronix, Inc. | Display apparatus and methods for manufacture thereof |
| US8310442B2 (en) | 2005-02-23 | 2012-11-13 | Pixtronix, Inc. | Circuits for controlling display apparatus |
| US7375465B2 (en) | 2005-05-19 | 2008-05-20 | Chunghwa Picture Tubes, Ltd. | Plasma display panel with single sided driving circuit |
| US20060262389A1 (en) | 2005-05-23 | 2006-11-23 | Christoph Zaczek | Reflective optical element for ultraviolet radiation, projection optical system and projection exposure system therewith, and method for forming the same |
| US7884989B2 (en) | 2005-05-27 | 2011-02-08 | Qualcomm Mems Technologies, Inc. | White interferometric modulators and methods for forming the same |
| US7460292B2 (en) | 2005-06-03 | 2008-12-02 | Qualcomm Mems Technologies, Inc. | Interferometric modulator with internal polarization and drive method |
| US7184195B2 (en) * | 2005-06-15 | 2007-02-27 | Miradia Inc. | Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator |
| US7733553B2 (en) | 2005-09-21 | 2010-06-08 | Hewlett-Packard Development Company, L.P. | Light modulator with tunable optical state |
| DE102005046156B3 (de) | 2005-09-27 | 2007-05-31 | Siemens Ag | Vorrichtung mit Funktionselement und Verfahren zum Herstellen der Vorrichtung |
| JP4641478B2 (ja) | 2005-09-27 | 2011-03-02 | キヤノン株式会社 | 光走査装置及びそれを用いた画像形成装置 |
| US8574823B2 (en) | 2005-10-05 | 2013-11-05 | Hewlett-Packard Development Company, L.P. | Multi-level layer |
| US7513327B1 (en) | 2005-10-13 | 2009-04-07 | Kent Peterson | System for converting a recreational vehicle |
| GB0521251D0 (en) | 2005-10-19 | 2005-11-30 | Qinetiq Ltd | Optical modulation |
| US7760197B2 (en) | 2005-10-31 | 2010-07-20 | Hewlett-Packard Development Company, L.P. | Fabry-perot interferometric MEMS electromagnetic wave modulator with zero-electric field |
| KR101146527B1 (ko) | 2005-11-30 | 2012-05-25 | 엘지디스플레이 주식회사 | 게이트 인 패널 구조 액정표시장치 및 그 제조 방법 |
| US7428092B2 (en) | 2005-11-30 | 2008-09-23 | Spatial Photonics, Inc. | Fast-response micro-mechanical devices |
| JP2007167998A (ja) | 2005-12-20 | 2007-07-05 | Toshiba Corp | 梁構造を有する装置、および半導体装置 |
| TWI428642B (zh) | 2005-12-21 | 2014-03-01 | Fujifilm Corp | 配備黑矩陣之濾光片及液晶顯示器 |
| US7417746B2 (en) | 2005-12-29 | 2008-08-26 | Xerox Corporation | Fabry-perot tunable filter systems and methods |
| US7916980B2 (en) | 2006-01-13 | 2011-03-29 | Qualcomm Mems Technologies, Inc. | Interconnect structure for MEMS device |
| US7652814B2 (en) | 2006-01-27 | 2010-01-26 | Qualcomm Mems Technologies, Inc. | MEMS device with integrated optical element |
| GB2434877A (en) | 2006-02-06 | 2007-08-08 | Qinetiq Ltd | MOEMS optical modulator |
| US7550810B2 (en) | 2006-02-23 | 2009-06-23 | Qualcomm Mems Technologies, Inc. | MEMS device having a layer movable at asymmetric rates |
| US20070211257A1 (en) | 2006-03-09 | 2007-09-13 | Kearl Daniel A | Fabry-Perot Interferometer Composite and Method |
| WO2007110928A1 (ja) * | 2006-03-28 | 2007-10-04 | Fujitsu Limited | 可動素子 |
| US7477440B1 (en) * | 2006-04-06 | 2009-01-13 | Miradia Inc. | Reflective spatial light modulator having dual layer electrodes and method of fabricating same |
| US7628493B2 (en) | 2006-04-18 | 2009-12-08 | Xerox Corporation | Projector based on tunable individually-addressable Fabry-Perot filters |
| US20070249078A1 (en) | 2006-04-19 | 2007-10-25 | Ming-Hau Tung | Non-planar surface structures and process for microelectromechanical systems |
| US20070268201A1 (en) | 2006-05-22 | 2007-11-22 | Sampsell Jeffrey B | Back-to-back displays |
| US7649671B2 (en) | 2006-06-01 | 2010-01-19 | Qualcomm Mems Technologies, Inc. | Analog interferometric modulator device with electrostatic actuation and release |
| US7321457B2 (en) | 2006-06-01 | 2008-01-22 | Qualcomm Incorporated | Process and structure for fabrication of MEMS device having isolated edge posts |
| US7471442B2 (en) | 2006-06-15 | 2008-12-30 | Qualcomm Mems Technologies, Inc. | Method and apparatus for low range bit depth enhancements for MEMS display architectures |
| US7835061B2 (en) * | 2006-06-28 | 2010-11-16 | Qualcomm Mems Technologies, Inc. | Support structures for free-standing electromechanical devices |
| US7385744B2 (en) | 2006-06-28 | 2008-06-10 | Qualcomm Mems Technologies, Inc. | Support structure for free-standing MEMS device and methods for forming the same |
| US7527998B2 (en) | 2006-06-30 | 2009-05-05 | Qualcomm Mems Technologies, Inc. | Method of manufacturing MEMS devices providing air gap control |
| US7593189B2 (en) * | 2006-06-30 | 2009-09-22 | Seagate Technology Llc | Head gimbal assembly to reduce slider distortion due to thermal stress |
| US7566664B2 (en) | 2006-08-02 | 2009-07-28 | Qualcomm Mems Technologies, Inc. | Selective etching of MEMS using gaseous halides and reactive co-etchants |
| TWI331231B (en) * | 2006-08-04 | 2010-10-01 | Au Optronics Corp | Color filter and frbricating method thereof |
| DE102006039071B4 (de) | 2006-08-09 | 2012-04-19 | Universität Kassel | Optisches Filter und Verfahren zu seiner Herstellung |
| US20080043315A1 (en) | 2006-08-15 | 2008-02-21 | Cummings William J | High profile contacts for microelectromechanical systems |
| US7629197B2 (en) | 2006-10-18 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Spatial light modulator |
| US7684106B2 (en) | 2006-11-02 | 2010-03-23 | Qualcomm Mems Technologies, Inc. | Compatible MEMS switch architecture |
| JP2010510639A (ja) | 2006-11-22 | 2010-04-02 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 照明システム及びディスプレイ装置 |
| US20080121270A1 (en) | 2006-11-28 | 2008-05-29 | General Electric Company | Photovoltaic roof tile system |
| US7535621B2 (en) | 2006-12-27 | 2009-05-19 | Qualcomm Mems Technologies, Inc. | Aluminum fluoride films for microelectromechanical system applications |
| US7403180B1 (en) | 2007-01-29 | 2008-07-22 | Qualcomm Mems Technologies, Inc. | Hybrid color synthesis for multistate reflective modulator displays |
| US8115987B2 (en) | 2007-02-01 | 2012-02-14 | Qualcomm Mems Technologies, Inc. | Modulating the intensity of light from an interferometric reflector |
| US7916378B2 (en) | 2007-03-08 | 2011-03-29 | Qualcomm Mems Technologies, Inc. | Method and apparatus for providing a light absorbing mask in an interferometric modulator display |
| US7742220B2 (en) | 2007-03-28 | 2010-06-22 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device and method utilizing conducting layers separated by stops |
| US7715085B2 (en) | 2007-05-09 | 2010-05-11 | Qualcomm Mems Technologies, Inc. | Electromechanical system having a dielectric movable membrane and a mirror |
| US7643202B2 (en) | 2007-05-09 | 2010-01-05 | Qualcomm Mems Technologies, Inc. | Microelectromechanical system having a dielectric movable membrane and a mirror |
| US7643199B2 (en) | 2007-06-19 | 2010-01-05 | Qualcomm Mems Technologies, Inc. | High aperture-ratio top-reflective AM-iMod displays |
| US7782517B2 (en) | 2007-06-21 | 2010-08-24 | Qualcomm Mems Technologies, Inc. | Infrared and dual mode displays |
| US7569488B2 (en) | 2007-06-22 | 2009-08-04 | Qualcomm Mems Technologies, Inc. | Methods of making a MEMS device by monitoring a process parameter |
| US7630121B2 (en) * | 2007-07-02 | 2009-12-08 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
| US7813029B2 (en) | 2007-07-31 | 2010-10-12 | Qualcomm Mems Technologies, Inc. | Devices and methods for enhancing color shift of interferometric modulators |
| US7773286B2 (en) * | 2007-09-14 | 2010-08-10 | Qualcomm Mems Technologies, Inc. | Periodic dimple array |
| US7847999B2 (en) * | 2007-09-14 | 2010-12-07 | Qualcomm Mems Technologies, Inc. | Interferometric modulator display devices |
| EP2191320A2 (en) | 2007-09-17 | 2010-06-02 | Qualcomm Mems Technologies, Inc. | Semi-transparent / transflective lighted interferometric modulator devices |
| US20090078316A1 (en) | 2007-09-24 | 2009-03-26 | Qualcomm Incorporated | Interferometric photovoltaic cell |
| US8058549B2 (en) | 2007-10-19 | 2011-11-15 | Qualcomm Mems Technologies, Inc. | Photovoltaic devices with integrated color interferometric film stacks |
| JP5302322B2 (ja) | 2007-10-19 | 2013-10-02 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | 一体型光起電力を有するディスプレイ |
| KR20100103467A (ko) | 2007-10-23 | 2010-09-27 | 퀄컴 엠이엠스 테크놀로지스, 인크. | 조절가능하게 투과성인 ｍｅｍｓ―기반 장치 |
| US20090293955A1 (en) | 2007-11-07 | 2009-12-03 | Qualcomm Incorporated | Photovoltaics with interferometric masks |
| US7729036B2 (en) | 2007-11-12 | 2010-06-01 | Qualcomm Mems Technologies, Inc. | Capacitive MEMS device with programmable offset voltage control |
| US8941631B2 (en) | 2007-11-16 | 2015-01-27 | Qualcomm Mems Technologies, Inc. | Simultaneous light collection and illumination on an active display |
| US7715079B2 (en) | 2007-12-07 | 2010-05-11 | Qualcomm Mems Technologies, Inc. | MEMS devices requiring no mechanical support |
| WO2009085601A2 (en) | 2007-12-21 | 2009-07-09 | Qualcom Mems Technologies, Inc. | Multijunction photovoltaic cells |
| US8164821B2 (en) | 2008-02-22 | 2012-04-24 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device with thermal expansion balancing layer or stiffening layer |
| US7944604B2 (en) * | 2008-03-07 | 2011-05-17 | Qualcomm Mems Technologies, Inc. | Interferometric modulator in transmission mode |
| US7612933B2 (en) | 2008-03-27 | 2009-11-03 | Qualcomm Mems Technologies, Inc. | Microelectromechanical device with spacing layer |
| US7898723B2 (en) | 2008-04-02 | 2011-03-01 | Qualcomm Mems Technologies, Inc. | Microelectromechanical systems display element with photovoltaic structure |
| US7969638B2 (en) | 2008-04-10 | 2011-06-28 | Qualcomm Mems Technologies, Inc. | Device having thin black mask and method of fabricating the same |
| US7746539B2 (en) | 2008-06-25 | 2010-06-29 | Qualcomm Mems Technologies, Inc. | Method for packing a display device and the device obtained thereof |
| US7791783B2 (en) | 2008-06-25 | 2010-09-07 | Qualcomm Mems Technologies, Inc. | Backlight displays |
| US7768690B2 (en) | 2008-06-25 | 2010-08-03 | Qualcomm Mems Technologies, Inc. | Backlight displays |
| US8023167B2 (en) | 2008-06-25 | 2011-09-20 | Qualcomm Mems Technologies, Inc. | Backlight displays |
| US7855826B2 (en) | 2008-08-12 | 2010-12-21 | Qualcomm Mems Technologies, Inc. | Method and apparatus to reduce or eliminate stiction and image retention in interferometric modulator devices |
| US7999995B2 (en) | 2009-09-28 | 2011-08-16 | Sharp Laboratories Of America, Inc. | Full color range interferometric modulation |
| US20120056855A1 (en) | 2010-09-03 | 2012-03-08 | Qualcomm Mems Technologies, Inc. | Interferometric display device |
-
2009
- 2009-02-10 US US12/368,915 patent/US7944604B2/en not_active Expired - Fee Related
- 2009-03-02 CN CN2009801064366A patent/CN101960355A/zh active Pending
- 2009-03-02 KR KR1020107021526A patent/KR20100138974A/ko not_active Withdrawn
- 2009-03-02 CA CA2717312A patent/CA2717312A1/en not_active Abandoned
- 2009-03-02 RU RU2010134759/28A patent/RU2010134759A/ru unknown
- 2009-03-02 BR BRPI0908985A patent/BRPI0908985A2/pt not_active Application Discontinuation
- 2009-03-02 JP JP2010549789A patent/JP5444255B2/ja not_active Expired - Fee Related
- 2009-03-02 WO PCT/US2009/035737 patent/WO2009114323A1/en active Application Filing
- 2009-03-02 EP EP09721055A patent/EP2257846A1/en not_active Withdrawn
- 2009-03-06 TW TW098107438A patent/TW200944470A/zh unknown
-
2011
- 2011-04-14 US US13/087,184 patent/US8174752B2/en not_active Expired - Fee Related
-
2012
- 2012-04-27 US US13/458,215 patent/US8693084B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US7944604B2 (en) | 2011-05-17 |
| CA2717312A1 (en) | 2009-09-17 |
| US20120212795A1 (en) | 2012-08-23 |
| JP5444255B2 (ja) | 2014-03-19 |
| KR20100138974A (ko) | 2010-12-31 |
| TW200944470A (en) | 2009-11-01 |
| EP2257846A1 (en) | 2010-12-08 |
| BRPI0908985A2 (pt) | 2015-11-24 |
| CN101960355A (zh) | 2011-01-26 |
| WO2009114323A1 (en) | 2009-09-17 |
| US20110194169A1 (en) | 2011-08-11 |
| US8174752B2 (en) | 2012-05-08 |
| US8693084B2 (en) | 2014-04-08 |
| JP2011515707A (ja) | 2011-05-19 |
| US20090225395A1 (en) | 2009-09-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| RU2010134759A (ru) | Интерферометрический модулятор в режиме пропускания | |
| JP7511274B2 (ja) | 偏光スクランブル用光導波路光学素子 | |
| WO2016171219A1 (ja) | 光学フィルタおよび撮像装置 | |
| CN105093518B (zh) | 滤光器、滤光器模块、光谱测量仪及光设备 | |
| TW200643476A (en) | Thick film multilayer reflector with tailored layer thickness profile | |
| JP2009105106A5 (ru) | ||
| JP2020537194A5 (ru) | ||
| EP3361295A3 (en) | Optical polarizing filter | |
| WO2007119761A3 (en) | Vcsel with photonic crystal mirror for waveguiding by diffraction | |
| JP2013508777A5 (ru) | ||
| WO2007014125A3 (en) | Optical wavelength division coupler and associated methods | |
| US20090207495A1 (en) | Wavelength separation film and filter for optical communication using the same | |
| FI128573B (en) | Waveguide display element | |
| JPWO2021200652A5 (ru) | ||
| CN102073103B (zh) | 基于亚波长二元衍射光栅的波长分离器 | |
| JP2003139945A5 (ru) | ||
| JP5302339B2 (ja) | Ｍｅｍｓに基づく薄膜ビームスプリッタ | |
| CN100388652C (zh) | 色散补偿器 | |
| JP2008276074A (ja) | 光通信用フィルタ及びこれを用いた光通信用モジュール | |
| TW200643457A (en) | Film layer structure of optical lens | |
| JPWO2021105978A5 (ru) | ||
| RU2010139858A (ru) | Солнечный элемент | |
| JP2006038940A5 (ru) | ||
| Lohithakshan et al. | Realisation of optical filters using multi-layered thin film coatings by transfer matrix model simulations | |
| JP2005275294A5 (ru) |