JPH10109206A - Surface coated cutting tool - Google Patents
Surface coated cutting toolInfo
- Publication number
- JPH10109206A JPH10109206A JP28175496A JP28175496A JPH10109206A JP H10109206 A JPH10109206 A JP H10109206A JP 28175496 A JP28175496 A JP 28175496A JP 28175496 A JP28175496 A JP 28175496A JP H10109206 A JPH10109206 A JP H10109206A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- ticn
- cutting tool
- coated cutting
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010410 layer Substances 0.000 claims abstract description 99
- 239000013078 crystal Substances 0.000 claims abstract description 39
- 239000011195 cermet Substances 0.000 claims abstract description 4
- 239000002356 single layer Substances 0.000 claims abstract description 3
- 239000000919 ceramic Substances 0.000 claims abstract 3
- 239000002245 particle Substances 0.000 claims description 25
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 17
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 12
- 239000000460 chlorine Substances 0.000 claims description 12
- 229910052801 chlorine Inorganic materials 0.000 claims description 12
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 8
- 238000005524 ceramic coating Methods 0.000 claims description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 150000001247 metal acetylides Chemical class 0.000 claims 1
- 230000000737 periodic effect Effects 0.000 claims 1
- 238000005245 sintering Methods 0.000 claims 1
- 238000005299 abrasion Methods 0.000 abstract description 7
- 239000000956 alloy Substances 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 description 15
- 238000000576 coating method Methods 0.000 description 15
- 230000000052 comparative effect Effects 0.000 description 10
- 238000012360 testing method Methods 0.000 description 10
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 9
- 230000004888 barrier function Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910001208 Crucible steel Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 2
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- -1 carbide Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は強靭かつ耐摩耗性に優れ
た皮膜を形成した表面被覆切削工具に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface-coated cutting tool having a tough film having excellent wear resistance.
【０００２】[0002]
【従来の技術】超硬合金、サーメットにＣＶＤによるセ
ラミックコーティング皮膜をした工具が広く用いられて
いる。セラミック皮膜としては、ＴｉＣ、ＴｉＮ、Ｔｉ
ＣＮ、Ａｌ2Ｏ3の単層、または多層が用いられている。
この中で、ＴｉＣＮの皮膜に関しては従来より、時とし
て大規模な脱落が起こるため寿命が不安定になる傾向が
見られた。この問題を解決するために、例えば特開平７
−２８５００１や特開平８−７１８１４などＴｉＣＮ層
の微視的な構造を改善した特許が出願されている。しか
し、これらは膜厚と結晶粒径の関係を規定するにとどま
り、切削工具として最適な柱状結晶粒のテーパー形状に
ついては規定していない。2. Description of the Related Art Tools having a ceramic coating film formed on a cemented carbide or cermet by CVD are widely used. TiC, TiN, Ti
A single layer or a multilayer of CN or Al 2 O 3 is used.
Among these, the TiCN coating film has sometimes tended to be unstable because its large-scale detachment sometimes occurred. To solve this problem, see, for example,
Patents with improved microscopic structure of the TiCN layer, such as -285001 and JP-A-8-71814, have been filed. However, they only define the relationship between the film thickness and the crystal grain size, but do not specify the optimum tapered shape of columnar crystal grains as a cutting tool.
【０００３】[0003]
【発明が解決しようとする課題】本発明はＴｉＣＮ皮膜
の結晶粒形状を、切削加工に適したテーパー形状にコン
トロールし、さらにその膜厚や下層等を最適化する事に
より、耐摩耗性、耐欠損性に優れる表面被覆切削工具を
提供するものである。SUMMARY OF THE INVENTION The present invention controls the crystal grain shape of a TiCN film to a taper shape suitable for cutting, and further optimizes the film thickness and the lower layer thereof, thereby achieving abrasion resistance and resistance. An object of the present invention is to provide a surface-coated cutting tool having excellent chipping properties.
【０００４】[0004]
【課題を解決するための手段】ＴｉＣＮ層の柱状晶の成
長過程において、成膜面に凹凸があるなどの理由で膜表
面に高さの不均一があると、粒子間で成長速度に差が現
れる。このため、ある粒子はテーパー状に拡がりながら
成長を続ける反面、別の粒子は先細りとなりＴｉＣＮ層
の上面にまで達しない場合もある。従って、ＴｉＣＮ層
の上部と下部では水平方向の平均粒子径が異なることに
なるが、これを最適に制御することにより工具に最適な
構造を得るに至ったのである。本発明者等は上記の課題
を解決するために種々検討を加えた結果、下記のように
すれば耐摩耗性、耐欠損性に優れ、切削工具として満足
できる性能が得られることを見出した。即ち、表面被覆
切削工具の皮膜を構成するＴｉＣＮ層は柱状晶からな
り、該ＴｉＣＮ層の上端から該ＴｉＣＮ層内部に向かっ
て該ＴｉＣＮ層の厚さの１／５の距離の位置におけるＴ
ｉＣＮ柱状結晶粒の水平方向の平均粒径ｄ１と、該Ｔｉ
ＣＮ層の下端から該ＴｉＣＮ層内部に向かって該ＴｉＣ
Ｎ層の厚さの２／５の距離の位置におけるＴｉＣＮ柱状
結晶粒の水平方向の平均粒径ｄ２の比、ｄ１／ｄ２が１
≦ｄ１／ｄ２≦１．３を満たすようにすること。さらに
ｄ１を０．２〜１．５μｍとすること。さらにＴｉＣＮ
層の膜厚が、全膜厚に対して６０％以上の厚さを占め、
かつ、１０μｍ以上とすること。また、該ＴｉＣＮ層の
塩素含有量を０．０１〜０．７ｗｔ％とすること。さら
に、皮膜を構成する層の内、基体と接する第１層をＴｉ
Ｃ、ＴｉＣＮ、ＴｉＮの何れか１種以上とし、その上の
第２層を該柱状晶のＴｉＣＮ層とし、第３層以降の層を
、Ａｌ2Ｏ3、ＴｉＮ、ＴｉＣＮ、ＴｉＣ、ＴｉＣＯ、
ＴｉＣＮＯのうちの１種又は２種以上の多層で構成する
こと。さらに基体に接する第１層を０．３〜１．５μｍ
のＴｉＮとすること。さらに基体はＺｒ及び／又はＨｆ
を合計０．０４〜１ｗｔ％含むこと。Means for Solving the Problems In the process of growing columnar crystals of a TiCN layer, if the film surface has a non-uniform height due to, for example, irregularities on the film-forming surface, a difference in growth rate between the particles will occur. appear. For this reason, while a certain particle continues to grow while expanding in a tapered shape, another particle may be tapered and may not reach the upper surface of the TiCN layer. Therefore, the average particle diameter in the horizontal direction is different between the upper part and the lower part of the TiCN layer. By controlling this optimally, the optimum structure for the tool is obtained. The present inventors have made various studies in order to solve the above-mentioned problems, and as a result, have found that the following features provide excellent wear resistance and chipping resistance and provide satisfactory performance as a cutting tool. That is, the TiCN layer constituting the coating of the surface-coated cutting tool is composed of columnar crystals, and the TCN at a distance of 1/5 of the thickness of the TiCN layer from the upper end of the TiCN layer toward the inside of the TiCN layer.
The horizontal average grain size d1 of the iCN columnar crystal grains and the Ti
From the lower end of the CN layer toward the inside of the TiCN layer, the TiC
The ratio of the average grain size d2 in the horizontal direction of the TiCN columnar crystal grains at a position 2/5 of the thickness of the N layer, d1 / d2 is 1
≤ d1 / d2 ≤ 1.3. Further, d1 is set to 0.2 to 1.5 μm. Further TiCN
The thickness of the layer accounts for more than 60% of the total thickness,
In addition, it should be 10 μm or more. Further, the chlorine content of the TiCN layer is set to 0.01 to 0.7 wt%. Further, of the layers constituting the film, the first layer in contact with the base is made of Ti.
At least one of C, TiCN, and TiN, the second layer on which is the columnar TiCN layer, and the third and subsequent layers are formed of Al 2 O 3 , TiN, TiCN, TiC, TiCO,
To be composed of one or more layers of TiCNO. Further, the first layer in contact with the base is 0.3 to 1.5 μm
Of TiN. Further, the substrate is made of Zr and / or Hf
In total of 0.04 to 1 wt%.
【０００５】[0005]
【作用】本発明の最も重要なポイントはｄ１とｄ２の比
を１≦ｄ１／ｄ２≦１．３とした点である。ＴｉＣＮ層
の垂直方向に長い粒子では、切削中の力が１つの粒子に
粒界を介さずに伝わるため、垂直方向の力に非常に強い
ものとなる。また、摩耗に関しては、方向性の無い粒子
では粒子が、粒界より脱落することにより摩耗が進行す
るが、垂直方向に長い粒子では、脱落することがなく、
耐摩耗性に対して優れている。これらが柱状晶のＴｉＣ
Ｎを採用する大きな理由であるが、本発明では特に柱状
晶粒子のテーパー形状に留意し、柱状晶の上部と下部で
粒径に差が少なくｄ１／ｄ２が１に近いものとした。こ
のようにすることで断続切削において、皮膜に発生する
クラックは垂直方向に入り、基体表面と平行なクラック
は従来のものと比べて非常に入りにくい。基体表面と平
行なクラックは、皮膜の破壊、剥離につながり、これは
即ち工具寿命を大幅に縮める。The most important point of the present invention is that the ratio of d1 and d2 is 1 ≦ d1 / d2 ≦ 1.3. In a vertically long particle of the TiCN layer, the force during cutting is transmitted to one particle without passing through a grain boundary, so that the force is extremely strong in the vertical direction. In addition, with respect to abrasion, in particles having no directionality, abrasion proceeds by falling off from the grain boundary, but in particles that are vertically long, they do not fall off,
Excellent in wear resistance. These are columnar crystals of TiC
Although this is a major reason for adopting N, the present invention pays particular attention to the tapered shape of the columnar crystal grains, and has a small difference in particle diameter between the upper and lower portions of the columnar crystal and d1 / d2 is close to 1. In this manner, in the intermittent cutting, cracks generated in the film enter in the vertical direction, and cracks parallel to the surface of the base are very unlikely to occur as compared with the conventional one. Cracks parallel to the substrate surface lead to destruction and delamination of the film, which significantly reduces tool life.
【０００６】また、この時のＴｉＣＮの粒径としてはｄ
１が１．５μｍ以下の場合に、特に耐摩耗性に優れてい
る。ｄ１が１．５μｍより大では１つの粒子が大きくな
りすぎ、切削時の力を多くの粒界で分散して受け止める
ことが出来ず、皮膜が破壊しやすくなる。ｄ１を１．５
μｍ以下とすれば皮膜が破壊しにくくなる上に、たとえ
破壊が起こっても微細な結晶粒故に大規模な結晶粒の脱
落が起こりにくくなるため、摩耗の進行が不安定になり
にくい利点がある。より好ましくはｄ１を１．２μｍ以
下とする。しかし、ｄ１が小さすぎる場合は柱状晶の効
果が現れにくくなるのでｄ１は０．２μｍ以上が必要で
ある。より好ましくはｄ１を０．５μｍ以上とする。The particle diameter of TiCN at this time is d
When 1 is 1.5 μm or less, the abrasion resistance is particularly excellent. When d1 is larger than 1.5 μm, one particle becomes too large, and the force at the time of cutting cannot be dispersed and received at many grain boundaries, and the film is easily broken. d1 is 1.5
When the thickness is less than μm, the coating is not easily broken, and even if the breaking occurs, large-scale crystal grains do not easily fall off due to the fine crystal grains, so that there is an advantage that the progress of abrasion hardly becomes unstable. . More preferably, d1 is set to 1.2 μm or less. However, if d1 is too small, the effect of the columnar crystal is unlikely to appear, so d1 needs to be 0.2 μm or more. More preferably, d1 is 0.5 μm or more.
【０００７】尚、平均粒径ｄ１及びｄ２の評価は、電子
顕微鏡により撮影された皮膜の破面の一定視野の写真の
中にみられる粒子の数を数えることによって行われる。
ｄ１はＴｉＣＮ層の上端の界面からＴｉＣＮ層膜厚の１
／５の距離の位置において測定する。例えば、この位置
に引いた基体表面と水平な１０μｍの線分上に２０本の
粒子がある場合、水平方向の平均粒径は０．５μｍとな
る。同様に、ｄ２はＴｉＣＮ層の下端の界面からＴｉＣ
Ｎ層膜厚の２／５の距離の位置において測定する。The evaluation of the average particle diameters d1 and d2 is carried out by counting the number of particles seen in a photograph of a fixed field of view of the fracture surface of the film taken by an electron microscope.
d1 is the thickness of the TiCN layer 1 from the interface at the upper end of the TiCN layer.
Measured at a distance of / 5. For example, if there are 20 particles on a line of 10 μm horizontal to the substrate surface drawn at this position, the average particle size in the horizontal direction is 0.5 μm. Similarly, d2 is TiC from the interface at the lower end of the TiCN layer.
It is measured at a position at a distance of ／ of the thickness of the N layer.
【０００８】このようにして得られた、優れた特性を有
するＴｉＣＮ層の性能を最大限発揮させるためには従来
から行われているようにＡｌ2Ｏ3、ＴｉＮ、ＴｉＣ、Ｔ
ｉＣ等の皮膜と組み合わせた多層皮膜とすることが推奨
される。特に耐酸化性に優れたＡｌ2Ｏ3層をＴｉＣＮ層
よりも表面側に配置することで工具寿命の延命が図られ
る。尚、柱状晶のＴｉＣＮ層の膜厚は１０μｍ以上であ
ることが望ましく、さらに全膜厚に対して６０％以上の
厚さを占めることが望ましい。ＴｉＣＮ膜をこのような
膜厚にすることで、耐摩耗性に優れ長時間の使用に耐え
る皮膜となる。鋳鉄の切削に際して、耐摩耗性に優れた
ＴｉＣＮ層の膜厚が厚いほど長寿命となるのは当然のこ
とであるが、鋼の切削においては従来の工具では刃先の
基体が塑性変形するために皮膜が破壊し寿命に至るケー
スが多かった。しかし本発明のＴｉＣＮ層を上記の厚さ
にすることで工具刃先の剛性が増し塑性変形しにくくな
る。結果、皮膜は破壊、脱落することなく正常な摩耗状
態を示すので長時間に渡り安定した切削が可能となる。
さらに高い耐塑性変形性が必要な場合には基体成分にＺ
ｒ、Ｈｆ等を加え耐塑性変形性を向上させる方法もあ
る。In order to maximize the performance of the thus obtained TiCN layer having excellent properties, Al 2 O 3 , TiN, TiC, T
It is recommended to use a multilayer coating in combination with a coating such as iC. Particularly, by disposing the Al 2 O 3 layer having excellent oxidation resistance on the surface side of the TiCN layer, the tool life can be extended. The thickness of the columnar crystal TiCN layer is preferably 10 μm or more, and more preferably occupies 60% or more of the total thickness. By setting the TiCN film to such a thickness, a film having excellent wear resistance and enduring long-term use can be obtained. When cutting cast iron, it is natural that the longer the thickness of the TiCN layer, which is superior in wear resistance, the longer the life will be. In many cases, the film was broken and the life was extended. However, by setting the TiCN layer of the present invention to the above-described thickness, the rigidity of the tool edge is increased, and plastic deformation is difficult. As a result, the film shows a normal wear state without breaking or falling off, so that stable cutting can be performed for a long time.
If higher plastic deformation resistance is required, Z
There is also a method of improving the plastic deformation resistance by adding r, Hf or the like.
【０００９】しかし、皮膜を厚くするために、ただ単に
長時間のコーティング処理を行うと結晶粒子が粗大化し
上記の粒径、テーパー形状から外れるので目的とする特
性が得られない。そのため、コーティング処理条件を時
間と共に変更して、皮膜の結晶粒子が粗大化しないよう
に制御する必要がある。同一コーティング処理条件では
皮膜が厚くなるにつれて、粒径が大きくなる。皮膜粒子
の粗大化を抑えるために、反応ガス濃度、反応圧力、温
度を連続的に変化させる。段階的に条件を変更すると、
変更の前後で水平方向の粒界が形成され、皮膜が２層に
分かれるので好ましくない。However, if the coating treatment is simply performed for a long time to make the film thick, the crystal grains become coarse and deviate from the above-mentioned particle diameter and tapered shape, so that the desired characteristics cannot be obtained. Therefore, it is necessary to change the coating processing conditions with time so as to control the crystal grains of the coating so as not to become coarse. Under the same coating conditions, the larger the film, the larger the particle size. The reaction gas concentration, reaction pressure, and temperature are continuously changed in order to suppress the coarsening of the film particles. If you change the conditions step by step,
Before and after the change, a horizontal grain boundary is formed, and the film is divided into two layers, which is not preferable.
【００１０】通常のＣＶＤコーティング皮膜には原料物
質から混入する塩素はほとんど含まれないが、結晶粒子
の粗大化を抑制するようコーティング条件を変更する
と、皮膜中の塩素が増加する傾向がみられる。塩素が過
度に含まれると皮膜の耐摩耗性が劣化するが、０．７ｗ
ｔ％以下であるならば通常の使用上、特に問題にならな
い。特に耐摩耗性を重視し長寿命を狙う場合には０．１
ｗｔ％以下とすることが望ましい。Although a normal CVD coating film hardly contains chlorine mixed from a raw material, when the coating conditions are changed so as to suppress the coarsening of crystal grains, the chlorine in the film tends to increase. If the chlorine content is excessive, the wear resistance of the coating deteriorates.
If it is less than t%, there is no particular problem in normal use. In particular, when the wear resistance is emphasized and a long service life is aimed at, 0.1%
It is desirable that the content be not more than wt%.
【００１１】尚、全膜厚が過度に厚くなると皮膜が壊れ
やすくなる。本発明者等の実験では全膜厚が２３μｍま
では実用に耐えることがわかっている。また、使用条件
を制限すれば全膜厚が３０μｍ程度のものまで実用可能
である。When the total film thickness is excessively large, the film is easily broken. Experiments by the present inventors have shown that practical use is possible up to a total film thickness of 23 μm. In addition, if the use conditions are restricted, it is practical to use a film having a total thickness of about 30 μm.
【００１２】超硬合金やサーメットの基体にＴｉＣＮ皮
膜を形成する場合に基体に接する第１層としてＴｉＮ層
を設けた後にＴｉＣＮを設けることが従来より行われて
いる。これはコーティング処理の際に基体から基体成
分、特に炭素と鉄族元素の皮膜中への拡散を防ぐバリア
の目的で行われているものである。このバリアは本発明
のＴｉＣＮ皮膜においても有効であるがＴｉＮ層の膜厚
は１．５μｍ以下であることが重要である。１．５μｍ
を越えるとその上に形成するＴｉＣＮの結晶粒子は粗大
化する傾向にあり上記の最適な粒径及びテーパー形状を
保つことが極めて困難となるからである。また、ＴｉＮ
層の膜厚の下限は０．２μｍ程度でこれを下回るとバリ
アの効果が不充分となる。好ましいＴｉＮ層の膜厚の範
囲は０．３〜１．３μｍである。[0012] When a TiCN film is formed on a cemented carbide or cermet substrate, it has been customary to provide TiCN after providing a TiN layer as a first layer in contact with the substrate. This is performed for the purpose of a barrier for preventing the diffusion of the components of the substrate, particularly carbon and iron group elements, into the film during the coating treatment. Although this barrier is effective also in the TiCN film of the present invention, it is important that the thickness of the TiN layer is 1.5 μm or less. 1.5 μm
This is because, when the value exceeds, the crystal grains of TiCN formed thereon tend to be coarse, and it is extremely difficult to maintain the above-mentioned optimum particle size and tapered shape. Also, TiN
The lower limit of the thickness of the layer is about 0.2 μm, and below this, the barrier effect becomes insufficient. The preferable range of the thickness of the TiN layer is 0.3 to 1.3 μm.
【００１３】このような構成の皮膜を被覆する超硬合金
基体として、基体に耐熱性のあるＩＳＯ Ｐ１０、Ｍ１
０相当の超硬合金が最適である。しかし、高速切削によ
り刃先温度が高くなる場合には、皮膜の摩耗よりも先
に、基体超硬が塑性変形し、寿命に至る。この問題に対
してはＺｒ及び／又はＨｆを超硬基体成分中に含有させ
ることにより、耐熱性が増し、長寿命となる。含有量は
０．０４〜１ｗｔ％が適当である。この範囲を下回ると
効果がなく、上回ると靱性の劣化につながる。Ｚｒ、Ｈ
ｆは炭化物、窒化物、炭窒化物等の化合物の形で添加し
ても良い。このようにすることで必要な炭素、窒素等を
安定した形で添加することができる。例えばＺｒＣは
０．０５〜１．１ｗｔ％を添加すれば良い。As a cemented carbide substrate coated with a film having such a structure, a heat-resistant substrate such as ISO P10 or M1 is used.
A cemented carbide equivalent to 0 is optimal. However, when the cutting edge temperature is increased by high-speed cutting, the base carbide is plastically deformed before the wear of the film, and the life is extended. To solve this problem, by including Zr and / or Hf in the cemented carbide component, the heat resistance is increased and the life is extended. The content is suitably 0.04 to 1 wt%. Below this range, there is no effect, and above this range leads to deterioration in toughness. Zr, H
f may be added in the form of a compound such as carbide, nitride, carbonitride and the like. In this way, necessary carbon, nitrogen and the like can be added in a stable manner. For example, 0.05 to 1.1 wt% of ZrC may be added.
【００１４】[0014]
【実施例】以下のように６種類のスローアウエイチップ
を作成した。本発明例１として、ＣＮＭＧ１２０４０８
形状の超硬合金（ＩＳＯ Ｐ１０相当）を基体とし、そ
の表面に公知の熱ＣＶＤにより第１層ＴｉＮを０．３μ
ｍ成膜、アセトニトリルを用いたＭＴ−ＣＶＤにより第
２層ＴｉＣＮ（粒成長を抑えるコーティング条件）を１
１μｍ成膜、第３層にＣＶＤでＴｉＣを１．０μｍ成
膜、第４層ＣＶＤでＡｌ2Ｏ3を１．５μｍ成膜、最外層
にＣＶＤでＴｉＮを０．５μｍ成膜。全膜厚は１４．３
μｍ。第２層のＴｉＣＮ柱状晶の膜厚は、全膜厚の７７
％。第２層のＴｉＣＮ柱状晶の粒径は、ｄ１＝０．９μ
ｍ、ｄ２＝０．８μｍ、ｄ１／ｄ２＝１．１。第２層中
の塩素量は０．３ｗｔ％。本発明例２として、本発明例
１と同一形状の超硬合金基体（ＩＳＯ Ｐ１０相当、Ｚ
ｒＣを０．３ｗｔ％含有）の表面に本発明例１と同様の
条件、層構造、膜厚で成膜した。全膜厚は１４．３μ
ｍ。第２層のＴｉＣＮ柱状晶の膜厚は、全膜厚の７７
％。第２層のＴｉＣＮ柱状晶の粒径は、ｄ１＝０．９μ
ｍ、ｄ２＝０．８μｍ、ｄ１／ｄ２＝１．１。第２層中
の塩素量は０．３ｗｔ％。本発明例３として、本発明例
１と同様の超硬基体を用い、本発明例１と同様の条件で
基体表面より第１層ＴｉＮを０．３μｍ、第２層ＴｉＣ
Ｎを５．５μｍ、第３層ＴｉＣを２．０μｍ、第４層Ａ
ｌ2Ｏ3を２．０μｍ、最外層ＴｉＮを０．５μｍ順次成
膜。全膜厚は１０．３μｍ。第２層のＴｉＣＮ柱状晶の
膜厚は、全膜厚の５３％。第２層のＴｉＣＮ柱状晶の粒
径は、ｄ１＝１．０μｍ、ｄ２＝０．９μｍ、ｄ１／ｄ
２＝１．１。第２層中の塩素量は０．１ｗｔ％。EXAMPLES Six types of throw-away chips were prepared as follows. As Example 1 of the present invention, CNMG120408
A first layer TiN of 0.3 μm is formed on the surface of a cemented carbide (equivalent to ISO P10) by a known thermal CVD method.
m, and the second layer TiCN (coating conditions for suppressing grain growth) is set to 1 by MT-CVD using acetonitrile.
A 1 μm film is formed, a 1.0 μm TiC film is formed on the third layer by CVD, a 1.5 μm film is formed on Al 2 O 3 by the fourth layer CVD, and a 0.5 μm film is formed on the outermost layer by CVD. The total film thickness is 14.3
μm. The thickness of the TiCN columnar crystal of the second layer is 77
%. The particle size of the TiCN columnar crystals in the second layer is d1 = 0.9 μm
m, d2 = 0.8 μm, d1 / d2 = 1.1. The amount of chlorine in the second layer is 0.3 wt%. As a second example of the present invention, a cemented carbide substrate having the same shape as the first example of the present invention (equivalent to ISO P10, Z
A film having the same conditions, layer structure, and film thickness as in Example 1 of the present invention was formed on the surface (containing 0.3 wt% of rC). Total thickness 14.3μ
m. The thickness of the TiCN columnar crystal of the second layer is 77
%. The particle size of the TiCN columnar crystals in the second layer is d1 = 0.9 μm
m, d2 = 0.8 μm, d1 / d2 = 1.1. The amount of chlorine in the second layer is 0.3 wt%. As Example 3 of the present invention, a cemented carbide substrate similar to that of Example 1 of the present invention was used, and the first layer TiN was 0.3 μm thick and the second layer TiC was
N = 5.5 μm, third layer TiC = 2.0 μm, fourth layer A
l 2 O 3 is formed in order of 2.0 μm and the outermost layer TiN is formed in order of 0.5 μm. The total film thickness is 10.3 μm. The thickness of the second layer of TiCN columnar crystals is 53% of the total thickness. The particle size of the TiCN columnar crystals of the second layer is d1 = 1.0 μm, d2 = 0.9 μm, d1 / d
2 = 1.1. The amount of chlorine in the second layer is 0.1 wt%.
【００１５】本発明例４として、本発明例１と同様の基
体の表面に公知の熱ＣＶＤにより第１層ＴｉＮを０．３
μｍ成膜、アセトニトリルを用いたＭＴ−ＣＶＤ、但し
本発明例１の場合よりも３０℃温度を下げて第２層Ｔｉ
ＣＮを１１μｍ成膜、第３層にＣＶＤでＴｉＣを１．０
μｍ成膜、第４層ＣＶＤでＡｌ2Ｏ3を１．５μｍ成膜、
最外層にＣＶＤでＴｉＮを０．５μｍ成膜。全膜厚は１
４．３μｍ。第２層のＴｉＣＮ柱状晶の膜厚は、全膜厚
の７７％。第２層のＴｉＣＮ柱状晶の粒径は、ｄ１＝
０．７μｍ、ｄ２＝０．７μｍ、ｄ１／ｄ２＝１．０。
第２層中の塩素量は０．９ｗｔ％。比較例５として、本
発明例１と同様の超硬合金基体を用い、基体表面より第
１層ＴｉＮを０．３μｍ成膜、アセトニトリルを用いた
ＭＴ−ＣＶＤにより第２層ＴｉＣＮを１１μｍ、第３層
にＴｉＣを１．０μｍ、第４層にＡｌ2Ｏ3を１．５μ
ｍ、最外層にＴｉＮを０．５μｍ成膜。全膜厚は１４．
３μｍ。第２層のＴｉＣＮ柱状晶の膜厚は、全膜厚の７
７％。第２層のＴｉＣＮ柱状晶の粒径は、ｄ１＝１．５
μｍ、ｄ２＝０．７μｍ、ｄ１／ｄ２＝２．１。第２層
中の塩素量は０．１ｗｔ％。比較例６として、本発明例
１と同様の基体を用い、第１層のＴｉＮの膜厚を１．６
μｍとした以外は本願発明例１と同様の条件、層構造、
膜厚で成膜した。全膜厚は１５．６μｍ。第２層のＴｉ
ＣＮ柱状晶の膜厚は、全膜厚の７１％。ｄ１＝２．５μ
ｍ、ｄ２＝１．２μｍ、ｄ１／ｄ２＝２．１。第２層中
の塩素量は０．３ｗｔ％。As Example 4 of the present invention, a first layer TiN of 0.3 was formed on the surface of the same substrate as in Example 1 of the present invention by known thermal CVD.
μm film-formed, MT-CVD using acetonitrile, except that the temperature was lowered by 30 ° C. as compared with the case of Example 1 of the present invention, and the second layer Ti was formed.
11 μm thick CN, TiC 1.0
μm film formation, Al 2 O 3 film formation with a fourth layer CVD of 1.5 μm,
A 0.5 μm TiN film is formed on the outermost layer by CVD. Total film thickness is 1
4.3 μm. The thickness of the second layer of TiCN columnar crystals is 77% of the total thickness. The particle size of the TiCN columnar crystals of the second layer is d1 =
0.7 μm, d2 = 0.7 μm, d1 / d2 = 1.0.
The amount of chlorine in the second layer is 0.9 wt%. As Comparative Example 5, a cemented carbide substrate similar to that of Example 1 of the present invention was used, a first layer TiN was formed to a thickness of 0.3 μm from the substrate surface, and a second layer TiCN was formed to a thickness of 11 μm by MT-CVD using acetonitrile. 1.0 μm of TiC for the layer and 1.5 μm of Al 2 O 3 for the fourth layer
m, a 0.5 μm TiN film is formed on the outermost layer. The total film thickness is 14.
3 μm. The thickness of the TiCN columnar crystal of the second layer is 7
7%. The particle size of the TiCN columnar crystals of the second layer is d1 = 1.5
μm, d2 = 0.7 μm, d1 / d2 = 2.1. The amount of chlorine in the second layer is 0.1 wt%. As Comparative Example 6, a substrate similar to that of Inventive Example 1 was used, and the thickness of the first layer of TiN was 1.6.
The same conditions, layer structure, and
The film was formed to have a thickness. The total film thickness is 15.6 μm. Second layer Ti
The thickness of CN columnar crystals is 71% of the total thickness. d1 = 2.5μ
m, d2 = 1.2 μm, d1 / d2 = 2.1. The amount of chlorine in the second layer is 0.3 wt%.
【００１６】以上の試料を以下の切削試験１〜３にて評
価した。切削試験１では鋼を旋削した。被削材：Ｓ４５
Ｃ丸棒、切削速度：２００ｍ／ｍｉｎ、送り：０．３ｍ
ｍ／ｒｅｖ、切り込み：２．０ｍｍ、湿式切削とした。
切削試験１についてはチップの逃げ面摩耗幅が０．３ｍ
ｍとなるまでの切削時間で評価した。結果は、本発明例
１が６２分、本発明例２が６８分、本発明例３が２０
分、本発明例４が５７分、比較例５が３５分、比較例６
が２０分であった。切削試験２では鋳鋼を旋削した。被
削材：ＦＣＤ７０丸棒、切削速度：１５０ｍ／ｍｉｎ、
送り：０．３ｍｍ／ｒｅｖ、切り込み：２．０ｍｍ、湿
式切削とした。切削試験２もチップの逃げ面摩耗幅が
０．３ｍｍとなるまでの切削時間で評価した。結果は、
本発明例１が３２分、本発明例２が３３分、本発明例３
が１６分、本発明例４が２８分、比較例５が１３分、比
較例６が１０分であった。The above samples were evaluated in the following cutting tests 1 to 3. In cutting test 1, the steel was turned. Work material: S45
C round bar, cutting speed: 200m / min, feed: 0.3m
m / rev, depth of cut: 2.0 mm, wet cutting.
For cutting test 1, the flank wear width of the insert was 0.3 m
The evaluation was made based on the cutting time until the value reached m. The results were as follows: Example 1 of the present invention was 62 minutes, Example 2 of the present invention was 68 minutes, and Example 3 of the present invention was 20 minutes.
Minute, Inventive Example 4 was 57 minutes, Comparative Example 5 was 35 minutes, Comparative Example 6
Was 20 minutes. In cutting test 2, the cast steel was turned. Work material: FCD70 round bar, Cutting speed: 150m / min,
Feeding: 0.3 mm / rev, cutting depth: 2.0 mm, wet cutting. Cutting test 2 was also evaluated by cutting time until the flank wear width of the chip became 0.3 mm. Result is,
Invention Example 1 for 32 minutes, Invention Example 2 for 33 minutes, Invention Example 3
Was 16 minutes, Invention Example 4 was 28 minutes, Comparative Example 5 was 13 minutes, and Comparative Example 6 was 10 minutes.
【００１７】本発明例１、２は切削試験１、２の両方で
良好な結果を得た。本発明例３はＴｉＣＮ層が薄いため
鋳鋼の切削では膜厚に相応した寿命を示したが、刃先の
剛性不足のため、鋼の切削においては膜厚が薄いことを
差し引いてもやや劣る結果となった。本発明例４はＴｉ
ＣＮの柱状晶を特に微粒とした為に塩素濃度が高く、切
削試験１、２の両方で本発明例１、２よりもやや劣る結
果となった。比較例５はＴｉＣＮの柱状晶が粗粒であ
り、強いテーパー形状であるため耐摩耗性に劣り、切削
試験１、２の両方で劣る結果となった。比較例６は第１
層のＴｉＮが厚すぎるためＴｉＣＮの柱状晶が粗粒かつ
強いテーパー形状となり非常に劣る結果となった。In Examples 1 and 2 of the present invention, good results were obtained in both cutting tests 1 and 2. Inventive Example 3 showed a life corresponding to the film thickness when cutting cast steel because the TiCN layer was thin. became. Inventive Example 4 is Ti
Since the columnar crystals of CN were particularly fine, the chlorine concentration was high, and the results of cutting tests 1 and 2 were slightly inferior to those of Examples 1 and 2 of the present invention. In Comparative Example 5, the columnar crystals of TiCN were coarse and had a strong tapered shape, so that the wear resistance was poor, and the results of both cutting tests 1 and 2 were poor. Comparative Example 6 is the first
Since the TiN layer was too thick, the columnar crystals of TiCN were coarse and strongly tapered, resulting in very poor results.
【００１８】切削試験３は工具の耐欠損性を調べるため
に外周部に溝を設けた丸棒を用い断続切削とした。被削
材：ＳＣＭ４３５ ４つ溝付丸棒、切削速度：１５０ｍ
／ｍｉｎ、送り：０．２ｍｍ／ｒｅｖ、切り込み：２．
０ｍｍ、乾式切削とした。この条件で最大１０００回ま
での衝撃を工具に与え、工具に欠損が生じたときの衝撃
回数で評価した。尚、この試験は各チップの４コーナに
ついて行った。In the cutting test 3, an intermittent cutting was performed using a round bar provided with a groove on the outer periphery in order to examine the fracture resistance of the tool. Work material: SCM435 4 round bar with groove, cutting speed: 150m
/ Min, feed: 0.2 mm / rev, cut: 2.
0 mm, dry cutting. Under these conditions, a maximum of 1000 impacts were applied to the tool, and the number of impacts when the tool was damaged was evaluated. This test was performed at four corners of each chip.
【００１９】結果は、本発明例１では３コーナが１００
０回の衝撃に耐え残り１コーナも８００回であった。本
発明例２では、２コーナが１０００回の衝撃に耐え、残
り２コーナも８５０回、９００回であった。本発明例３
は全てのコーナが１０００回の衝撃に耐えた。本発明例
４は１コーナが１０００回の衝撃に耐え、残りのコーナ
は８００回、７５０回、９００回であった。比較例５、
６では１０００回の衝撃に耐えたコーナはなく４コーナ
の平均でそれぞれ７６０回、４９０回であった。本発明
例１、２、３はいずれも良好な結果を示した。特に本発
明例３は膜厚が薄いので良好であった。本発明例４は皮
膜がやや脆弱であり、やや劣る結果となった。比較例
５、６は強いテーパー形状のため欠けやすく、劣る結果
となった。As a result, in Example 1 of the present invention, three corners were 100.
It survived zero impacts and 800 corners. In Example 2 of the present invention, two corners withstood 1000 impacts, and the remaining two corners were 850 and 900 times. Invention Example 3
All the corners withstood 1000 impacts. In Inventive Example 4, one corner withstood 1,000 shocks, and the remaining corners were 800, 750, and 900 times. Comparative Example 5,
In No. 6, there were no corners that withstood 1000 impacts, and the average of four corners was 760 and 490, respectively. Inventive Examples 1, 2, and 3 all showed good results. Particularly, Example 3 of the present invention was excellent because the film thickness was thin. Inventive Example 4 had a slightly fragile coating, which resulted in slightly inferior results. Comparative Examples 5 and 6 were easily chipped due to the strong tapered shape, resulting in inferior results.
【００２０】[0020]
【発明の効果】以上の結果より明らかなように、本発明
品は耐摩耗性、耐欠損性の両方に優れ、断続切削を含む
長時間の切削加工に耐えるものであるので、切削加工の
高能率化に特に効果を発揮するものである。As is clear from the above results, the product of the present invention is excellent in both abrasion resistance and chipping resistance and can withstand long-time cutting including interrupted cutting. It is particularly effective for efficiency.
Claims (7)
５ａ、６ａ族元素のうち少なくとも１種類以上の炭化
物、窒化物、炭窒化物からなる硬質相を、鉄族元素の金
属により焼結した超硬合金またはサーメットからなる基
体の表面にセラミック皮膜を形成した表面被覆切削工具
において、該セラミック被覆は柱状晶のＴｉＣＮ層を必
ず含む単層または多層で構成され、該ＴｉＣＮ層の上端
から該ＴｉＣＮ層内部に向かって該ＴｉＣＮ層の厚さの
１／５の距離の位置におけるＴｉＣＮ柱状結晶粒の水平
方向の平均粒径ｄ１と、該ＴｉＣＮ層の下端から該Ｔｉ
ＣＮ層内部に向かって該ＴｉＣＮ層の厚さの２／５の距
離の位置におけるＴｉＣＮ柱状結晶粒の水平方向の平均
粒径ｄ２の比、ｄ１／ｄ２が１≦ｄ１／ｄ２≦１．３を
満たすことを特徴とする表面被覆切削工具。1. A main component is 4a of the periodic table of the element,
Forming a ceramic film on the surface of a substrate made of a cemented carbide or cermet obtained by sintering a hard phase made of at least one of carbides, nitrides and carbonitrides of at least one of group 5a and 6a elements with a metal of iron group element In the surface-coated cutting tool described above, the ceramic coating is composed of a single layer or a multilayer including a columnar crystal TiCN layer, and is 向 か っ て of the thickness of the TiCN layer from the upper end of the TiCN layer toward the inside of the TiCN layer. And the horizontal average particle size d1 of the TiCN columnar crystal grains at a distance of
The ratio of the average grain size d2 in the horizontal direction of the TiCN columnar crystal grains at a position at a distance of 2/5 of the thickness of the TiCN layer toward the inside of the CN layer, d1 / d2 is 1 ≦ d1 / d2 ≦ 1.3. A surface-coated cutting tool characterized by satisfying.
いて、該ｄ１が０．２〜１．５μｍであることを特徴と
する表面被覆切削工具。2. The surface-coated cutting tool according to claim 1, wherein d1 is 0.2 to 1.5 μm.
具において、該ＴｉＣＮ層の膜厚が１０μｍ以上である
ことを特徴とする表面被覆切削工具。3. The surface-coated cutting tool according to claim 1, wherein the TiCN layer has a thickness of 10 μm or more.
具において、該ＴｉＣＮ層の塩素含有量が０．０１〜
０．７ｗｔ％であることを特徴とする表面被覆切削工
具。4. The surface-coated cutting tool according to claim 1, wherein the TiCN layer has a chlorine content of 0.01 to 0.01.
A surface-coated cutting tool characterized by being 0.7 wt%.
具において、該セラミック皮膜を構成する層の内、基体
と接する第１層がＴｉＣ、ＴｉＣＮ、ＴｉＮの何れか１
種以上からなり、その上の第２層が該柱状晶のＴｉＣＮ
層であり、第３層以降の層が 、Ａｌ2Ｏ3、ＴｉＮ、Ｔ
ｉＣＮ、ＴｉＣ、ＴｉＣＯ、ＴｉＣＮＯのうちの１種又
は２種以上の多層で構成されることを特徴とする表面被
覆切削工具。5. The surface-coated cutting tool according to claim 1, wherein, of the layers constituting the ceramic coating, the first layer in contact with the substrate is any one of TiC, TiCN, and TiN.
A second layer on which the columnar crystal TiCN is formed.
And the third and subsequent layers are composed of Al 2 O 3 , TiN, T
A surface-coated cutting tool comprising one or more layers of iCN, TiC, TiCO, and TiCNO.
いて、該第１層が厚さ０．２〜１．５μｍのＴｉＮから
なることを特徴とする表面被覆切削工具。6. The surface-coated cutting tool according to claim 5, wherein said first layer is made of TiN having a thickness of 0.2 to 1.5 μm.
具において、該基体はＺｒ及び／又はＨｆを合計０．０
４〜１ｗｔ％含むことを特徴とする表面被覆切削工具。7. The surface-coated cutting tool according to claim 1, wherein the substrate has a total content of Zr and / or Hf of 0.0.
A surface-coated cutting tool comprising 4 to 1 wt%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28175496A JPH10109206A (en) | 1996-10-03 | 1996-10-03 | Surface coated cutting tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28175496A JPH10109206A (en) | 1996-10-03 | 1996-10-03 | Surface coated cutting tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH10109206A true JPH10109206A (en) | 1998-04-28 |
Family
ID=17643515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28175496A Withdrawn JPH10109206A (en) | 1996-10-03 | 1996-10-03 | Surface coated cutting tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10109206A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6627335B2 (en) * | 2000-03-30 | 2003-09-30 | Toshiba Tungaloy Co., Ltd. | Coated cutting tool and method for producing the same |
| US7172807B2 (en) | 2003-02-17 | 2007-02-06 | Kyocera Corporation | Surface-coated member |
| CN102371379A (en) * | 2010-07-09 | 2012-03-14 | 三菱综合材料株式会社 | Surface Covering Drill Having Excellent Abrasion Resistance And Swarf Extraction Performance |
| JPWO2015099047A1 (en) * | 2013-12-26 | 2017-03-23 | 京セラ株式会社 | Cutting tools |
| WO2017179233A1 (en) * | 2016-04-14 | 2017-10-19 | 住友電気工業株式会社 | Hard coating and cutting tool |
| WO2020241533A1 (en) * | 2019-05-29 | 2020-12-03 | 京セラ株式会社 | Coated tool and cutting tool |
-
1996
- 1996-10-03 JP JP28175496A patent/JPH10109206A/en not_active Withdrawn
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6627335B2 (en) * | 2000-03-30 | 2003-09-30 | Toshiba Tungaloy Co., Ltd. | Coated cutting tool and method for producing the same |
| US6824823B2 (en) | 2000-03-30 | 2004-11-30 | Toshiba Tungaloy Co., Ltd. | Coated cutting tool and method for producing the same |
| US7172807B2 (en) | 2003-02-17 | 2007-02-06 | Kyocera Corporation | Surface-coated member |
| CN102371379A (en) * | 2010-07-09 | 2012-03-14 | 三菱综合材料株式会社 | Surface Covering Drill Having Excellent Abrasion Resistance And Swarf Extraction Performance |
| JPWO2015099047A1 (en) * | 2013-12-26 | 2017-03-23 | 京セラ株式会社 | Cutting tools |
| WO2017179233A1 (en) * | 2016-04-14 | 2017-10-19 | 住友電気工業株式会社 | Hard coating and cutting tool |
| JPWO2017179233A1 (en) * | 2016-04-14 | 2019-02-21 | 住友電気工業株式会社 | Hard coating and cutting tool |
| WO2020241533A1 (en) * | 2019-05-29 | 2020-12-03 | 京セラ株式会社 | Coated tool and cutting tool |
| JPWO2020241533A1 (en) * | 2019-05-29 | 2020-12-03 | ||
| US12121976B2 (en) | 2019-05-29 | 2024-10-22 | Kyocera Corporation | Coated tool and cutting tool |
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