JP2016064378A - Light irradiation apparatus and light irradiation method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light irradiation device suppressing insufficient curing of photo-curable resin for irradiation-target objects: and to provide a light irradiation method.SOLUTION: A light irradiation apparatus 1 includes: a light-emitting part 10 having at least one light-emitting element emitting ultraviolet light; and control means 40 making the light-emitting part 10 emit the ultraviolet light to a plurality of irradiation target objects W in order. The control means 40 repeats reduction in relative illuminance of the ultraviolet light emitted to each of the irradiation-target objects W by the light-emitting element within a prescribed period of time as time advances, for each of the irradiation-target objects W.SELECTED DRAWING: Figure 2

Description

  Embodiments described herein relate generally to a light irradiation apparatus and a light irradiation method including a light emitting element.

  Currently, there are discharge lamps (for example, low-pressure fluorescent lamps, high-pressure mercury lamps, metal halide lamps) that emit light by exciting the metal enclosed in the tube with a light irradiation device used for curing, polymerization and bonding of liquid crystal panels. It is used.

JP 59-43320 A JP 60-59733 A

  By the way, in the prior art, for example, when light is cured to cure the photocurable resin of the irradiated object, it is required to suppress insufficient curing.

  An object of this invention is to provide the light irradiation apparatus and light irradiation method which suppress the nonuniformity of the photochemical reaction of a to-be-irradiated object.

  The light irradiation apparatus according to the embodiment includes a light emitting unit having at least one light emitting element that emits ultraviolet light, and a control unit that sequentially irradiates a plurality of objects to be irradiated with ultraviolet light from the light emitting unit. The control means repeats, for each object to be irradiated, the relative illuminance of the ultraviolet light emitted by the light emitting element within a predetermined time with respect to each object to be irradiated is decreased with time.

  In the light irradiation method of the embodiment, ultraviolet light emitted from a light emitting element is sequentially irradiated onto a plurality of irradiated objects. In the light irradiation method, the relative illuminance of the ultraviolet light emitted from the light emitting element within a predetermined time with respect to each object to be irradiated is decreased for each object to be irradiated with time.

  ADVANTAGE OF THE INVENTION According to this invention, the light irradiation apparatus and light irradiation method which suppress the nonuniformity of the photochemical reaction of a to-be-irradiated object can be provided.

FIG. 1 is a perspective view illustrating a schematic configuration of a light irradiation apparatus according to an embodiment. FIG. 2 is a cross-sectional view of the light irradiation apparatus shown in FIG. 1 as viewed in the X-axis direction. FIG. 3 is a plan view of a light emitting portion of the light irradiation device shown in FIG. FIG. 4 is a cross-sectional view of the light emitting unit shown in FIG. 3 as viewed in the X-axis direction. FIG. 5 is a diagram illustrating a change in relative illuminance of the light emitting unit of the light irradiation device illustrated in FIG. 1. FIG. 6 is an example of a flowchart of the control means of the light irradiation apparatus shown in FIG. FIG. 7 is a diagram showing a change in relative illuminance after the product of the present invention and Comparative Examples 1 to 3 are operated. FIG. 8 is a cross-sectional view in the X-axis direction showing a schematic configuration of the light irradiation apparatus according to the first modification of the embodiment. FIG. 9 is a cross-sectional view in the X-axis direction showing a schematic configuration of a light irradiation apparatus according to Modification 2 of the embodiment. FIG. 10 is a cross-sectional view in the X-axis direction showing a schematic configuration of a light irradiation apparatus according to Modification 3 of the embodiment. FIG. 11 is a diagram illustrating a modification of the change in relative illuminance of the light emitting unit of the light irradiation device illustrated in FIG. 5. FIG. 12 is a perspective view illustrating a schematic configuration of a light irradiation apparatus according to Modification 4 of the embodiment. FIG. 13 is a side view of the light emitting unit of the light irradiation apparatus according to Modification 5 of the embodiment. FIG. 14 is a plan view of the light emitting unit shown in FIG. 13 as viewed from below. FIG. 15 is a plan view of the light emitting unit of the light irradiation apparatus according to the sixth modification of the embodiment as viewed from below. FIG. 16 is a diagram illustrating a schematic configuration of a light irradiation apparatus according to Modification 7 of the embodiment.

  The light irradiation devices 1,1-1,1-2,1-3,1-4,1-5,1-6,1-7 according to the embodiments and modifications 1 to 7 described below are ultraviolet light. A light emitting unit 10 having at least one light emitting element 12 that emits light, and a control unit 40 that sequentially irradiates a plurality of irradiated objects W from the light emitting unit 10 with ultraviolet light. The control means 40 repeats decreasing the relative illuminance of the ultraviolet light emitted from the light emitting element 12 within the predetermined time T with respect to each irradiation object W over time for each irradiation object W.

  In the light irradiation devices 1,1-1,1-2,1-3,1-4,1-5,1-6,1-7 according to the embodiment and the first to seventh modifications, the light emitting element 12 is used. Emits ultraviolet light having a peak wavelength of 240 nm to 450 nm.

  Moreover, in the light irradiation apparatus 1,1-1,1-2,1-3,1-4,1-5,1-6,1-7 which concerns on embodiment and the modifications 1-7, the control means 40 is The relative illuminance of the ultraviolet light emitted by the light emitting element 12 within the predetermined time T is set to the strongest immediately after the emission and is decreased with the passage of time.

  In addition, the light irradiation devices 1,1-1,1-2,1-3,1-4,1-5,1-6,1-7 according to the embodiment and the modifications 1 to 7 are irradiated objects W. Contains resin.

  In addition, the light irradiation devices 1, 1-1, 1-2, 1-3, 1-4, 1-5, 1-6, and 1-7 according to the embodiment and the modified examples 1 to 7 And a polarization element 70 for extracting a polarization component of the ultraviolet light emitted from the light emitting unit 10.

  Moreover, the light irradiation method which concerns on embodiment and the modifications 1-7 demonstrated below irradiates the some to-be-irradiated object W in order with the ultraviolet light discharge | released from the light emitting element 12. FIG. In the light irradiation method, the relative illuminance of the ultraviolet light emitted from the light emitting element 12 within the predetermined time T with respect to each irradiation object W is gradually reduced for each irradiation object W with time.

[Embodiment]
Next, the light irradiation apparatus 1 and the light irradiation method which concern on embodiment of this invention are demonstrated based on drawing. 1 is a perspective view illustrating a schematic configuration of a light irradiation apparatus according to the embodiment, FIG. 2 is a cross-sectional view of the light irradiation apparatus shown in FIG. 1 as viewed in the X-axis direction, and FIG. 3 is a light irradiation illustrated in FIG. 4 is a cross-sectional view of the light emitting unit shown in FIG. 3 as viewed in the X-axis direction, and FIG. 5 is a graph showing the relative illuminance of the light emitting unit of the light emitting device shown in FIG. It is a figure which shows a change.

  The light irradiation device 1 according to the embodiment (hereinafter simply referred to as a light irradiation device) is a light containing at least ultraviolet rays in an irradiated object W (shown in FIG. 1) having an ultraviolet curable resin (corresponding to a photocurable resin). It is an apparatus that irradiates (ultraviolet light) to cure the ultraviolet curable resin of the irradiated object W. The light irradiation device 1 is a device that irradiates a plurality of irradiated objects W by irradiating the irradiated objects W with ultraviolet light one by one. Hereinafter, the width direction of the irradiation object W is referred to as the X-axis direction, and the longitudinal direction of the irradiation object W (also referred to as the conveyance direction) is referred to as the Y-axis direction. A direction orthogonal to the axial direction is referred to as a Z-axis direction.

  As shown in FIG. 1, the light irradiation device 1 includes a light emitting unit 10 that emits ultraviolet light, a reflecting plate 20 that controls light distribution of ultraviolet light emitted from the light emitting unit 10, and a reflecting plate 20. In addition, it is arranged on the traveling direction side of the ultraviolet light whose light distribution is controlled by the reflecting plate 20, and includes a transport means 30 (shown in FIG. 2) for transporting the irradiated object W, a control means 40, and the like. .

  The light emitting unit 10 is a rod-shaped or linear light source. In addition, as shown in FIGS. 3 and 4, for example, the light emitting unit 10 includes at least one light emitting element 12 in which a plurality of light emitting elements 12 are attached to the outer surface of the body member 11 having a cylindrical appearance. It has a linear light emitting part. The longitudinal direction of the light emitting part of the light emitting part 10 is parallel to the X-axis direction, and the length of the light emitting part of the light emitting part 10 is longer than the width of the irradiated object W.

  The light emitting element 12 emits at least ultraviolet light, and is composed of a semiconductor such as an LED (Light Emitting Diode) or an LD (Laser Diode). The light emitting elements 12 are attached to the outer surface of the main body member 11 at intervals in the circumferential direction, and are attached at intervals in the longitudinal direction of the main body member 11, that is, the X-axis direction.

  The light emitting element 12 emits ultraviolet rays having a peak wavelength of 254 nm, 313 nm, 365 nm, 385 nm, or 405 nm. That is, in the present invention, the plurality of light emitting elements 12 constituting the light emitting unit 10 are the light emitting element 12 having a peak wavelength of 254 nm, the light emitting element 12 having a peak wavelength of 313 nm, and the light emitting element having a peak wavelength of 365 nm. 12, one or more of the light emitting element 12 having a peak wavelength of 385 nm and the light emitting element 12 having a peak wavelength of 405 nm are used. That is, the light emitting element 12 emits ultraviolet light having a peak wavelength of 240 nm to 450 nm. The light emitting element 12 having these peak wavelengths is appropriately selected according to the irradiated object W. Note that the peak wavelength in this specification refers to the wavelength of ultraviolet light having the strongest relative illuminance among the ultraviolet light emitted from the light emitting element 12.

  In addition, the relative illuminance referred to in the present invention is an index representing the relative illuminance of ultraviolet rays emitted from the light emitting unit 10, that is, the light emitting element 12. The relative illuminance can be used as the relative illuminance by standardizing the illuminance measured using a so-called illuminometer such as Ushio Electric's UV integrated light meter UIT-250, photoreceiver UVD-S365. The illuminance meter is not limited to the above, and for example, UV-MO3A manufactured by Oak Manufacturing Co., Ltd., or a light receiver UV-SN35 may be used. In addition, the relative illuminance may be such that, for example, a change in the intensity of the ultraviolet light is detected relatively by using a light receiving element that receives the ultraviolet light and outputs an electrical signal at a position where the irradiated object is placed.

  The light emitting unit 10 can emit ultraviolet light having a wavelength of 240 nm to 450 nm, for example, from a linear light emitting unit, and the ultraviolet light emitted from the light emitting unit 10 has various polarization axis components. It has so-called non-polarized ultraviolet light. The diameter R of the light emitting unit 10 is, for example, 15.5 mm, and the length L of the light emitting unit 10 is, for example, 1149 mm.

  The reflecting plate 20 has a reflecting surface 21 that reflects the ultraviolet light emitted from the light emitting unit 10 on the surface facing the light emitting unit 10. The reflection surface 21 is a part of an ellipse when viewed in the axial direction, that is, when viewed in the direction along the axial center of the light emitting unit 10 formed in a rod shape, that is, when viewed in the X-axis direction. Has an open shape. The reflecting plate 20 reflects the ultraviolet light emitted from the light emitting unit 10 toward the irradiated object W by the reflecting surface 21. Moreover, the reflecting plate 20 is disposed in a direction that opens in the Z-axis direction.

  The reflector 20 extends in parallel with the light emitting unit 10 in the shape of the light emitting unit 10 formed in a rod shape. Further, the reflecting plate 20 is a gap in the circumferential direction of the ellipse or in the Y-axis direction in the vicinity of the portion where the curvature of the ellipse is the maximum on the opposite side of the reflecting surface 21 where the ellipse is open. A gap portion 22 is formed. That is, the gap 22 is formed on the side opposite to the side where the ellipse of the reflection surface 21 is opened in the Z-axis direction when viewed from the light emitting unit 10. The reflection plate 20 is connected to the space between the inner side and the outer side of the ellipse at the gap portion 22. Further, the reflecting plate 20 has a base material made of an aluminum alloy, and a reflecting surface 21 is constituted by a multilayer film. In addition, the reflecting plate 20 is not limited to what is comprised from an aluminum alloy, The cold mirror which permeate | transmits the heat | fever emitted from the light emission part 10 may be sufficient.

  The conveying means 30 is irradiated between an irradiation position (shown in FIG. 2) where the ultraviolet light emitted from the light emitting unit 10 and reflected by the reflecting plate 20 is irradiated, and a spaced position apart from the irradiation position. The object W is conveyed. The conveyance means 30 will convey one by one to the irradiation position one by one among the plurality of irradiated objects W.

  The control means 40 controls the irradiation operation of the ultraviolet light by the light irradiation apparatus 1 by sequentially emitting (i.e., irradiating) ultraviolet light from the light emitting unit 10 to the plurality of irradiated objects W one by one. The control means 40 is mainly composed of an arithmetic processing unit constituted by a CPU or the like, and a microprocessor (not shown) provided with a ROM, a RAM and the like. Etc. are connected to the operation means used when registering.

  Next, the irradiation operation of the irradiation object W of the light irradiation apparatus 1, that is, the light irradiation method will be described. The light irradiation method is a method of sequentially irradiating a plurality of irradiated objects W with ultraviolet light emitted from the light emitting element 12. FIG. 6 is an example of a flowchart of the control means of the light irradiation apparatus shown in FIG. First, the operator registers the irradiation content information in the control means 40, and starts the irradiation operation when there is an instruction to start the irradiation operation. First, in the irradiation operation, the control means 40 stops one irradiated object W that first irradiates the ultraviolet light on the conveying means 30 at the irradiation position, and the ultraviolet light is emitted from the light emitting unit 10 at time t0 (shown in FIG. 5). ) To t1 (shown in FIG. 5) for a predetermined time T (step ST1). Then, the control means 40 irradiates one irradiated object W with T ultraviolet light for a predetermined time.

  At this time, as shown in FIG. 5, the control means 40 sets the relative illuminance of the ultraviolet light emitted from the light emitting element 12 of the light emitting unit 10 within a predetermined time T for each irradiation object W at the time t0, that is, immediately after the emission. The strongest is set to be gradually weakened with the passage of time from time t0 to time t1. The horizontal axis in FIG. 5 indicates the elapsed time from the start of the irradiation operation, and the vertical axis indicates that the light emitting unit 10 emits the relative illuminance of the strongest ultraviolet light emitted by the light emitting unit 10 as 100%. The relative illuminance of ultraviolet light is shown. Here, “immediately after the emission of ultraviolet light” actually includes a period from “immediately after the emission of ultraviolet light” to “1 second after the emission of ultraviolet light”. The predetermined time T, that is, the time from the time t0 to the time t1, is set to an arbitrary value in the range of 2 seconds to 2 hours, preferably 2 seconds to 900 seconds, for example.

  And the light irradiation apparatus 1 will complete | finish the irradiation of the ultraviolet light to the one to-be-irradiated object W mentioned above, will refer to the irradiation content information registered from the operator, and will be registered to the predetermined number of to-be-irradiated objects W It is determined whether or not the irradiation of the ultraviolet light is completed (step ST2). When the control means 40 determines that the irradiation of ultraviolet light to the predetermined number of registered objects W has not been completed (step ST2: No), the control unit 40 transmits the ultraviolet light to the one object W described above. It is determined whether or not a second predetermined time T2 (shown in FIG. 5) has elapsed since the end of the irradiation, and the conveying means 30 conveys the irradiated object W to which the light irradiation has been completed to a separated position before the light irradiation. The object W to be irradiated is transported to the irradiation position (step ST3). Here, the predetermined time T2, that is, the time from the time t1 to the time t2, is set to an arbitrary value in the range of, for example, 1 second to 15 minutes, preferably 1 second to 10 minutes.

  When the control means 40 determines that the second predetermined time T2 has not elapsed since the irradiation of the ultraviolet light to the one irradiation object W described above has been completed (step ST3: No), step ST3 is repeated. When it is determined that the second predetermined time T2 has elapsed since the irradiation of the ultraviolet light to the one irradiation object W described above is completed (step ST3: Yes), the control unit 40 returns to step ST1, and the control unit 40, the ultraviolet light is emitted from the light emitting unit 10 at time t2 (shown in FIG. 5), that is, the strongest immediately after emission, and is emitted for a predetermined time T from time t2 to t3 (shown in FIG. 5) (step ST1). It is determined whether or not the irradiation of the predetermined number of irradiated objects W has been completed (step ST2: No), and the second predetermined time T2 (shown in FIG. 5) after the irradiation of the ultraviolet light is completed. It is determined whether or not it has elapsed (step ST3). In this way, as shown in FIG. 5, the control means 40 reduces the relative illuminance of the ultraviolet light emitted by the light emitting element 12 within a predetermined time T with respect to each irradiation object W over time. This is repeated for each irradiation object W.

  When the control means 40 determines that the irradiation of ultraviolet light to the predetermined number of registered objects W has been completed (step ST2: Yes), the irradiation operation is terminated. As described above, the light irradiation method to the irradiation object W using the light irradiation apparatus 1 weakens the relative illuminance of the ultraviolet light emitted from the light emitting element 12 within the predetermined time T with respect to each irradiation object W with time. To do. In the light irradiation method, the relative illuminance of the ultraviolet light emitted from the light emitting element 12 within a predetermined time T is weakened with the passage of time, and light emission is repeated for each irradiation object W every second predetermined time T2. The ultraviolet light emitted from the element 12 is sequentially irradiated onto the plurality of irradiated objects W one by one.

  Next, the inventor of this invention confirmed the effect of the light irradiation apparatus 1 of embodiment. The results are shown in FIG. FIG. 7 is a diagram showing a change in relative illuminance after the product of the present invention and Comparative Examples 1 to 3 are operated. The horizontal axis of FIG. 7 shows the elapsed time since the start of the emission of ultraviolet light, and the vertical axis shows the relative illuminance of the strongest ultraviolet light irradiated to the irradiation object W as 100%, and the irradiation object W Shows the relative illuminance of the ultraviolet light irradiated to.

  The product of the present invention indicated by a solid line in FIG. 7 emits ultraviolet light from the light emitting unit 10 including the light emitting element 12 described in the embodiment. In Comparative Example 1 indicated by a dotted line in FIG. 7, ultraviolet light was emitted from a low-pressure fluorescent lamp in which a fluorescent material was applied to the inner surface of the arc tube of the low-pressure mercury lamp. In Comparative Example 2 indicated by a one-dot chain line in FIG. 7, ultraviolet light was emitted from a high-pressure mercury lamp in which a rare gas such as mercury, argon, or xenon was sealed in an ultraviolet light transmissive glass tube. In Comparative Example 3 indicated by a two-dot chain line in FIG. 7, a high pressure mercury lamp in which mercury or a rare gas is sealed in a straight tubular airtight container, or a metal halide such as mercury, iron or iodine is further sealed in a straight tubular airtight container. Ultraviolet light was emitted from a metal halide lamp.

  According to FIG. 7, it takes about 100 sec to 500 sec until the desired relative illuminance is obtained even when operated in Comparative Examples 1 to 3, whereas the product according to the present invention can obtain the desired relative illuminance immediately when operated. It became clear. As described above, by using the light emitting unit 10 having the light emitting element 12, the irradiation object W can be irradiated with ultraviolet light having an appropriate relative illuminance, and the relative illuminance of the ultraviolet light within the predetermined time T with respect to each irradiation object W. It has become clear that it can be repeated for each irradiation object W to weaken as time elapses.

  In the light irradiation apparatus 1 according to the embodiment having the above-described configuration, since the light emitting unit 10 includes the light emitting element 12, as soon as the light emitting unit 10 is operated, ultraviolet light having a desired relative illuminance is irradiated. The relative illuminance of the ultraviolet light applied to the irradiation object W can be appropriately changed according to the irradiation object W. Moreover, the light irradiation apparatus 1 weakens the relative illuminance of the ultraviolet light emitted from the light emitting unit 10 as time elapses when each object W is irradiated with ultraviolet light. For this reason, ultraviolet light can be irradiated to the depth of the ultraviolet curable resin of the irradiation object W, and the nonuniformity of the photochemical reaction of the irradiation object W can be suppressed. In addition, when the light irradiation device 1 irradiates a plurality of irradiated objects W one by one with ultraviolet light one by one, the relative illuminance of the ultraviolet light emitted by the light emitting unit 10 is reduced as time passes. Since it repeats for every to-be-irradiated object W every predetermined time T2, the nonuniformity of the photochemical reaction of the some to-be-irradiated object W can be suppressed.

  Moreover, since the light irradiation apparatus 1 which concerns on embodiment discharge | releases the ultraviolet light whose peak wavelength of the light emitting element 12 is 240 nm-450 nm, it is the short wavelength ultraviolet light which is light with higher energy with respect to the to-be-irradiated object W. Since it can irradiate, the nonuniformity of the photochemical reaction of the to-be-irradiated object W can be suppressed.

  Further, in the light irradiation apparatus 1 according to the embodiment, the control unit 40 makes the relative illuminance of the ultraviolet light emitted by the light emitting element 12 within a predetermined time the strongest immediately after the emission and weakens with the passage of time, for example, Even if an irradiation object W that instantly cures when irradiated with ultraviolet light is used, the irradiation object W can be cured from a deep position in the depth direction to a shallow position in the depth direction. Nonuniformity of the photochemical reaction of the object W can be suppressed.

  Moreover, since the light irradiation apparatus 1 which concerns on embodiment can perform the process hardened from the deep position of the depth direction of the to-be-irradiated object W to the shallow position of the depth direction sequentially, because the to-be-irradiated object W contains resin. , Non-uniformity of the photochemical reaction of the irradiated object W can be suppressed.

[Modification 1]
Next, the light irradiation apparatus 1-1 which concerns on the modification 1 of embodiment of this invention is demonstrated based on drawing. FIG. 8 is a cross-sectional view in the X-axis direction showing a schematic configuration of the light irradiation apparatus according to the first modification of the embodiment. In FIG. 8, the same parts as those of the above-described embodiment are denoted by the same reference numerals and description thereof is omitted.

  As illustrated in FIG. 8, the light irradiation device 1-1 according to the first modification of the embodiment continuously moves a plurality of irradiated objects W in the Y-axis direction instead of the conveyance unit 30 to be irradiated. A moving conveyance means 50 is provided for moving the objects W one after another to the irradiation position. The moving and conveying means 50 includes a driving roller 51 that is rotationally driven by a motor or the like, a driven roller 52 that is rotatably provided, and spans between the driving roller 51 and the driven roller 52 to drive the driving roller 51 and the driven roller. A conveyance belt 53 that circulates between and the like is provided.

  The light irradiation device 1-1 places a plurality of irradiated objects W on the conveyor belt 53, and the drive roller 51 moves the conveyor belt 53 in the Y-axis direction, thereby moving the irradiated object W in the Y-axis direction. The ultraviolet light emitted from the light emitting unit 10 is irradiated to each irradiation object W one by one while being moved.

  Similarly to the embodiment, the light irradiation device 1-1 according to the modification 1 can immediately irradiate the irradiation object W with ultraviolet light having a desired relative illuminance when the light emitting unit 10 is operated. Ultraviolet light can be irradiated to the back of the ultraviolet curable resin of W, and nonuniformity of the photochemical reaction of the irradiated object W can be suppressed.

[Modification 2]
Next, the light irradiation apparatus 1-2 which concerns on the modification 2 of embodiment of this invention is demonstrated based on drawing. FIG. 9 is a cross-sectional view in the X-axis direction showing a schematic configuration of a light irradiation apparatus according to Modification 2 of the embodiment. In FIG. 9, the same parts as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  As illustrated in FIG. 9, the light irradiation device 1-2 according to the second modification of the embodiment moves the light emitting unit 10 continuously in the Y axis direction instead of the transport unit 30, and moves the light emitting unit 10 in the Y axis direction. A light source moving means 60 is provided for moving the arranged plurality of irradiated objects W to the irradiation position one by one with respect to the light emitting unit 10 one by one.

  The light source moving means 60 includes a slider 61 to which the light emitting unit 10 and the reflection plate 20 are attached, a rail 62 that allows the slider 61 to move in the Y-axis direction, and a slider 61 that slides relative to the rail 62. Not equipped with a drive source. The light irradiation device 1-2 arranges a plurality of irradiated objects W in the Y-axis direction, and the light source moving unit 60 moves the light emission unit 10 and the like in the Y-axis direction, thereby moving the light emission unit 10 and the like in the Y-axis direction. Each of the irradiated objects W is irradiated with ultraviolet light emitted by the light emitting unit 10 while being moved.

  As in the embodiment and the first modification, the light irradiation device 1-2 according to the second modification can immediately irradiate the irradiated object W with ultraviolet light having a desired relative illuminance when the light emitting unit 10 is operated. Further, it is possible to irradiate ultraviolet light to the back of the ultraviolet curable resin of the irradiation object W, and to suppress the nonuniformity of the photochemical reaction of the irradiation object W. In addition, since the light emitting unit 10 includes the light emitting element 12 that generates little heat, it is not necessary to cool the light emitting unit 10 with a water cooling jacket or the like. Therefore, even if the light emission part 10 is moved, damage to the water cooling jacket can be suppressed.

[Modification 3]
Next, the light irradiation apparatus 1-3 which concerns on the modification 3 of embodiment of this invention is demonstrated based on drawing. FIG. 10 is a cross-sectional view in the X-axis direction showing a schematic configuration of a light irradiation apparatus according to Modification 3 of the embodiment. In FIG. 10, the same parts as those in the above-described embodiment, modification 1 and modification 2 are denoted by the same reference numerals and description thereof is omitted.

  As illustrated in FIG. 10, the light irradiation device 1-3 according to the third modification of the embodiment continuously moves a plurality of irradiated objects W in the Y-axis direction instead of the conveyance unit 30 to be irradiated. A moving conveyance means 50 is provided for moving the objects W one after another to the irradiation position. Further, the light irradiation device 1-3 continuously moves the light emitting unit 10 in the Y-axis direction, and each of the plurality of irradiated objects W arranged in the Y-axis direction with respect to the light emitting unit 10 one by one. A light source moving means 60 for sequentially moving to the irradiation position is provided.

  The light irradiation device 1-3 moves the irradiated object W in the Y-axis direction and moves the light emitting unit 10 in the Y-axis direction to emit ultraviolet light emitted by the light emitting unit 10 as one of the irradiated objects W. Irradiate each one.

  Similar to the embodiment, the first modification, and the second modification, the light irradiation device 1-3 according to the third modification irradiates the irradiated object W with ultraviolet light having a desired relative illuminance immediately when the light emitting unit 10 is operated. It is possible to irradiate ultraviolet light to the depth of the ultraviolet curable resin of the irradiation object W, and to suppress the nonuniformity of the photochemical reaction of the irradiation object W.

  Further, in the light irradiation device 1-3 according to the modified example 3, since the light emitting unit 10 includes the light emitting element 12 with less heat generation, it is not necessary to cool the light emitting unit 10 with a water cooling jacket or the like. Therefore, even if the light emitting unit 10 is moved, it is not necessary to provide a water cooling jacket, so that damage to the water cooling jacket can be suppressed.

  Moreover, the control means 40 of the light irradiation devices 1, 1-2, and 1-3 may be configured so that the relative illuminance when the ultraviolet light is emitted from the light emitting unit 10 for a predetermined time T is shown in FIG. FIG. 11 is a diagram showing a modification of the change in relative illuminance of the light emitting unit of the light irradiation device shown in FIG. As shown by the solid line in FIG. 11 (a), the control means 40 sets the relative illuminance of the ultraviolet light emitted by the light emitting unit 10 within a predetermined time T to the strongest immediately after emission, and in a so-called sawtooth waveform as time elapses. You may make it weak gradually gradually in several steps. As shown by the solid line in FIG. 11 (b), the control means 40 gradually increases the relative illuminance of the ultraviolet light emitted by the light emitting unit 10 within a predetermined time T, with the strongest immediately after the emission, in proportion to the passage of time. May be weakened. As shown by the solid line in FIG. 11 (c), the control means 40 sets the relative illuminance of the ultraviolet light emitted by the light emitting unit 10 within a predetermined time T to be the strongest immediately after the emission, and gradually increases with the passage of time ( FIG. 11 (c) shows a case where there are two stages). 11A to 11C, the change in relative illuminance of the light emitting unit 10 of the light irradiation device 1 shown in FIG. 5 is indicated by a dotted line.

[Modification 4]
Next, the light irradiation apparatus which concerns on the modification 4 of embodiment of this invention is demonstrated based on drawing. FIG. 12 is a perspective view illustrating a schematic configuration of a light irradiation apparatus according to Modification 4 of the embodiment. In FIG. 12, the same parts as those in the above-described embodiment are denoted by the same reference numerals, and description thereof is omitted.

  The light irradiation device 1-4 according to the modification 4 of the embodiment includes a polarizing element 70 that extracts a polarization component of ultraviolet light emitted from the light emitting unit 10 between the light emitting unit 10 and the irradiation object W. . That is, in the light irradiation device 1-4, the polarizing element 70 is provided between the light emitting element 12 of the light emitting unit 10 and the irradiated object W.

  The polarizing element 70 transmits ultraviolet light having a polarization axis (also referred to as a vibration direction) parallel to a predetermined reference direction out of the ultraviolet light emitted from the light emitting unit 10 and irradiates the irradiated object W with the reference light in the reference direction. The transmission of ultraviolet light with a polarization axis that intersects with is regulated. A plurality of polarizing elements 70 are arranged in the X-axis direction, and the plurality of polarizing elements 70 are surrounded by a frame 71 in the X-axis direction and the Y-axis direction. Accordingly, the plurality of polarizing elements 70 are supported by the frame 71.

  As the polarizing element 70, a wire grid is used to form a so-called reflective polarizing element that reflects ultraviolet light having a polarization axis that intersects the reference direction, or metal nanoparticles aligned in a certain direction included in a glass plate. A so-called absorption polarizing element that absorbs ultraviolet light having a polarization axis that intersects the reference direction can be used. As an absorptive polarizing element, for example, colorpol (registered trademark) UV375BC5 manufactured by CODIXX can be used.

  Similarly to the embodiment, the first modification, the second modification, and the third modification, the light irradiation device 1-4 according to the fourth modification is irradiated with ultraviolet light having a desired relative illuminance immediately when the light emitting unit 10 is operated. The object W can be irradiated, the ultraviolet light can be irradiated to the depth of the ultraviolet curable resin of the irradiation object W, and the nonuniformity of the photochemical reaction of the irradiation object W can be suppressed.

  Moreover, since the light irradiation apparatus 1-4 is provided with the polarizing element 70, it can be used in order to perform an alignment process on the surface of the irradiated object W.

[Modification 5]
Next, the light irradiation apparatus which concerns on the modification 5 of embodiment of this invention is demonstrated based on drawing. FIG. 13 is a side view of the light emitting unit of the light irradiation apparatus according to Modification 5 of the embodiment, and FIG. 14 is a plan view of the light emitting unit shown in FIG. 13 as viewed from below. In FIG. 13 and FIG. 14, the same reference numerals are given to the same portions as those in the above-described embodiment and the description thereof is omitted.

  As shown in FIGS. 13 and 14, the light emitting unit 10 of the light irradiation device 1-5 according to the fifth modification of the embodiment includes a water cooling jacket 80 that circulates cooling water inside and allows the emission of ultraviolet light. Is attached. The water cooling jacket 80 is for cooling the light emitting unit 10 and is accommodated in an inert gas accommodating chamber 90 that circulates an inert gas such as nitrogen gas inside and permits the emission of ultraviolet light. Yes. As shown in FIG. 14, the light emitting unit 10 of the light irradiation device 1-5 has a light emitting element 12 that emits ultraviolet light having a peak wavelength of 254 nm, 313 nm, 365 nm, 385 nm, or 405 nm on the substrate. They are arranged at intervals in the X-axis direction.

  The light irradiation device 1-5 according to the fifth modification of the embodiment can irradiate the irradiated object W with ultraviolet light having a desired relative illuminance immediately when the light emitting unit 10 is operated, as in the embodiment and the like. Further, it is possible to irradiate ultraviolet light to the back of the ultraviolet curable resin of the irradiation object W, and to suppress the nonuniformity of the photochemical reaction of the irradiation object W.

  Moreover, since the light irradiation apparatus 1-5 is filled with inert gas, such as nitrogen gas, around the water cooling jacket 80 which cools the light emission part 10, even if the light emission part 10 is cooled, the light emission part 10 is filled. Can suppress the occurrence of defects due to condensation.

[Modification 6]
Next, the light irradiation apparatus which concerns on the modification 6 of embodiment of this invention is demonstrated based on drawing. FIG. 15 is a plan view of the light emitting unit of the light irradiation apparatus according to the sixth modification of the embodiment as viewed from below. In FIG. 15, the same parts as those of the above-described embodiment and the like are denoted by the same reference numerals and description thereof is omitted.

  As shown in FIG. 15, the light emitting unit 10 of the light irradiation device 1-6 according to the modification 6 of the embodiment emits ultraviolet light whose peak wavelength is any one of 254 nm, 313 nm, 365 nm, 385 nm, and 405 nm. The light emitting elements 12 to be arranged are arranged on the substrate with an interval in the X-axis direction and the Y-axis direction.

  The light irradiation apparatus 1-6 according to the modification 6 of the embodiment can irradiate the irradiated object W with ultraviolet light having a desired relative illuminance immediately when the light emitting unit 10 is operated, as in the embodiment and the like. Further, it is possible to irradiate ultraviolet light to the back of the ultraviolet curable resin of the irradiation object W, and to suppress the nonuniformity of the photochemical reaction of the irradiation object W.

[Modification 7]
Next, the light irradiation apparatus which concerns on the modification 7 of embodiment of this invention is demonstrated based on drawing. FIG. 16 is a diagram illustrating a schematic configuration of a light irradiation apparatus according to Modification 7 of the embodiment. In FIG. 16, the same parts as those of the above-described embodiment and the like are denoted by the same reference numerals and description thereof is omitted.

  The light emitting unit 10 of the light irradiation device 1-7 according to the modification 7 of the embodiment emits ultraviolet light having a peak wavelength of any one of 254 nm, 313 nm, 365 nm, 385 nm, and 405 nm, as shown in FIG. The irradiated object W is irradiated with ultraviolet light emitted from the light emitting element 12 (not shown) through the optical fiber 13.

  The light irradiation device 1-7 according to the modified example 7 of the embodiment can irradiate the irradiated object W with ultraviolet light having a desired relative illuminance immediately when the light emitting unit 10 is operated, as in the embodiment and the like. Further, it is possible to irradiate ultraviolet light to the back of the ultraviolet curable resin of the irradiation object W, and to suppress the nonuniformity of the photochemical reaction of the irradiation object W.

  Although some embodiments and modifications of the present invention have been described, these embodiments and modifications are presented as examples, and are not intended to limit the scope of the invention. These embodiments and modifications can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the spirit of the invention. These embodiments and modifications are included in the scope of the invention and the gist thereof, and are also included in the invention described in the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 1,1-1,1-2,1-3,1-4,1-5,1-6,1-7 Light irradiation apparatus 10 Light emission part 12 Light emitting element 40 Control means W Subject to be irradiated

Claims (6)

A light emitting portion having at least one light emitting element that emits ultraviolet light;
Control means for sequentially irradiating a plurality of irradiated objects with ultraviolet light from the light emitting portion;
Comprising
The said control means is a light irradiation apparatus which repeats for every to-be-irradiated object to weaken the relative illumination intensity of the ultraviolet light which the said light emitting element discharge | releases within a predetermined time with respect to each to-be-irradiated object with progress of time. The light irradiation apparatus according to claim 1, wherein the light emitting element emits ultraviolet light having a peak wavelength of 240 nm to 450 nm. The light irradiation apparatus according to claim 1, wherein the control unit makes the relative illuminance of the ultraviolet light emitted by the light emitting element within the predetermined time the strongest immediately after the emission and weakens as time elapses.   The said irradiation object is a light irradiation apparatus as described in any one of Claims 1-3 containing resin. The light irradiation apparatus according to claim 1, further comprising: a polarizing element that extracts a polarization component of ultraviolet light emitted from the light emitting unit between the light emitting unit and the irradiation object. . A method of sequentially irradiating a plurality of irradiated objects with ultraviolet light emitted from a light emitting element,
A light irradiation method in which the relative illuminance of ultraviolet light emitted from a light emitting element within a predetermined time with respect to each irradiated object is weakened with time, for each irradiated object.

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