IL133749A0 - Acousto-optic modulator array with reduced rf crosstalk - Google Patents

Acousto-optic modulator array with reduced rf crosstalk

Info

Publication number: IL133749A0
Authority: IL; Israel
Prior art keywords: acousto; crosstalk; reduced; optic modulator; modulator array
Prior art date: 1997-07-08

Application number

IL13374998A

Original Assignee

Etec Systems Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1997-07-08

Filing date

1998-06-19

Publication date

2001-04-30

1998-06-19 Application filed by Etec Systems Inc filed Critical Etec Systems Inc

2001-04-30 Publication of IL133749A0 publication Critical patent/IL133749A0/en

Links

Classifications

- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
- G02F1/332—Acousto-optical deflection devices comprising a plurality of transducers on the same crystal surface, e.g. multi-channel Bragg cell

Landscapes

Physics & Mathematics (AREA)
Nonlinear Science (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Chemical & Material Sciences (AREA)
Crystallography & Structural Chemistry (AREA)
Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Laser Beam Printer (AREA)

IL13374998A 1997-07-08 1998-06-19 Acousto-optic modulator array with reduced rf crosstalk IL133749A0 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US5197397P	1997-07-08	1997-07-08
US9232198A	1998-06-05	1998-06-05
PCT/US1998/012463 WO1999003016A1 (en)	1997-07-08	1998-06-19	Acousto-optic modulator array with reduced rf crosstalk

Publications (1)

Publication Number	Publication Date
IL133749A0 true IL133749A0 (en)	2001-04-30

Family

ID=26730016

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IL13374998A IL133749A0 (en)	1997-07-08	1998-06-19	Acousto-optic modulator array with reduced rf crosstalk

Country Status (6)

Country	Link
EP (1)	EP0988575A1 (en)
JP (1)	JP2002508088A (en)
KR (1)	KR20010014272A (en)
CA (1)	CA2296278A1 (en)
IL (1)	IL133749A0 (en)
WO (1)	WO1999003016A1 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6295157B1 (en) *	1999-08-23	2001-09-25	Etec Systems, Inc.	Thermally balanced acousto-optic modulator
US6724002B2 (en)	2001-01-31	2004-04-20	Applied Materials, Inc.	Multiple electron beam lithography system with multiple beam modulated laser illumination
US20030048427A1 (en)	2001-01-31	2003-03-13	Applied Materials, Inc.	Electron beam lithography system having improved electron gun
US6936981B2 (en)	2002-11-08	2005-08-30	Applied Materials, Inc.	Retarding electron beams in multiple electron beam pattern generation
EP1920387B1 (en) *	2005-08-31	2015-07-01	Heidelberg Instruments Mikrotechnik GmbH	Device for the optical splitting and modulation of electromagnetic radiation
EP2024783A1 (en) *	2006-05-30	2009-02-18	BAE Systems PLC	Acousto-optic devices
US11187962B2 (en) *	2018-12-14	2021-11-30	Mycronic AB	Reducing impact of cross-talk between modulators that drive a multi-channel AOM
US11662612B2 (en)	2019-11-21	2023-05-30	Eagle Technology, Llc	Acousto-optic modulator system and device with connections and related methods
US11454837B2 (en)	2019-11-22	2022-09-27	Eagle Technology, Llc	AOM system with interface board and signal vias and related methods
US12218709B2 (en)	2020-01-23	2025-02-04	University Of Maryland, College Park	Crosstalk reduction in multi-channel acousto-optic modulators
US11573477B2 (en) *	2020-01-23	2023-02-07	University Of Maryland, College Park	Crosstalk reduction in multi-channel acousto-optic modulators

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH01293315A (en) *	1988-05-20	1989-11-27	Think Lab Kk	Light beam modulating device
US5309178A (en) *	1992-05-12	1994-05-03	Optrotech Ltd.	Laser marking apparatus including an acoustic modulator

1998
- 1998-06-19 CA CA002296278A patent/CA2296278A1/en not_active Abandoned
- 1998-06-19 WO PCT/US1998/012463 patent/WO1999003016A1/en not_active Application Discontinuation
- 1998-06-19 IL IL13374998A patent/IL133749A0/en unknown
- 1998-06-19 EP EP98930258A patent/EP0988575A1/en not_active Ceased
- 1998-06-19 KR KR1019997012392A patent/KR20010014272A/en not_active Withdrawn
- 1998-06-19 JP JP50867099A patent/JP2002508088A/en active Pending

Also Published As

Publication number	Publication date
KR20010014272A (en)	2001-02-26
CA2296278A1 (en)	1999-01-21
JP2002508088A (en)	2002-03-12
EP0988575A1 (en)	2000-03-29
WO1999003016A1 (en)	1999-01-21

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