FR2768813B1 - Spectrometre photoacoustique miniaturise - Google Patents

Spectrometre photoacoustique miniaturise

Info

Publication number: FR2768813B1
Authority: FR; France
Prior art keywords: photoacoustic spectrometer; miniaturized; miniaturized photoacoustic; spectrometer; photoacoustic
Prior art date: 1997-09-19
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

FR9711697A

Other languages

English (en)

Other versions

FR2768813A1 (fr

Inventor

Anne Jourdain

Claude Bieth

Olivier Constantin

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Commissariat a lEnergie Atomique et aux Energies Alternatives CEA

Original Assignee

Commissariat a lEnergie Atomique CEA

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1997-09-19

Filing date

1997-09-19

Publication date

1999-10-22

1997-09-19 Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA

1997-09-19 Priority to FR9711697A priority Critical patent/FR2768813B1/fr

1998-09-18 Priority to JP51863599A priority patent/JP2002511946A/ja

1998-09-18 Priority to US09/297,087 priority patent/US6344647B1/en

1998-09-18 Priority to PCT/FR1998/002003 priority patent/WO1999015879A1/fr

1998-09-18 Priority to EP98944020A priority patent/EP0939893A1/fr

1999-03-26 Publication of FR2768813A1 publication Critical patent/FR2768813A1/fr

1999-10-22 Application granted granted Critical

1999-10-22 Publication of FR2768813B1 publication Critical patent/FR2768813B1/fr

2017-09-19 Anticipated expiration legal-status Critical

Status Expired - Fee Related legal-status Critical Current

Links

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Chemical & Material Sciences (AREA)
Optics & Photonics (AREA)
Health & Medical Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
Spectroscopy & Molecular Physics (AREA)
Analytical Chemistry (AREA)
Biochemistry (AREA)
General Health & Medical Sciences (AREA)
Immunology (AREA)
Pathology (AREA)
Mechanical Light Control Or Optical Switches (AREA)
Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Investigating Or Analysing Materials By Optical Means (AREA)

FR9711697A 1997-09-19 1997-09-19 Spectrometre photoacoustique miniaturise Expired - Fee Related FR2768813B1 (fr)

Priority Applications (5)

Application Number	Priority Date	Filing Date	Title
FR9711697A FR2768813B1 (fr)	1997-09-19	1997-09-19	Spectrometre photoacoustique miniaturise
JP51863599A JP2002511946A (ja)	1997-09-19	1998-09-18	小型光音響分光計
US09/297,087 US6344647B1 (en)	1997-09-19	1998-09-18	Miniaturized photoacoustic spectrometer
PCT/FR1998/002003 WO1999015879A1 (fr)	1997-09-19	1998-09-18	Spectrometre photoacoustique miniaturise
EP98944020A EP0939893A1 (fr)	1997-09-19	1998-09-18	Spectrometre photoacoustique miniaturise

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FR9711697A FR2768813B1 (fr)	1997-09-19	1997-09-19	Spectrometre photoacoustique miniaturise

Publications (2)

Publication Number	Publication Date
FR2768813A1 FR2768813A1 (fr)	1999-03-26
FR2768813B1 true FR2768813B1 (fr)	1999-10-22

Family

ID=9511272

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FR9711697A Expired - Fee Related FR2768813B1 (fr)	1997-09-19	1997-09-19	Spectrometre photoacoustique miniaturise

Country Status (5)

Country	Link
US (1)	US6344647B1 (fr)
EP (1)	EP0939893A1 (fr)
JP (1)	JP2002511946A (fr)
FR (1)	FR2768813B1 (fr)
WO (1)	WO1999015879A1 (fr)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6662627B2 (en)	2001-06-22	2003-12-16	Desert Research Institute	Photoacoustic instrument for measuring particles in a gas
US6975402B2 (en) *	2002-11-19	2005-12-13	Sandia National Laboratories	Tunable light source for use in photoacoustic spectrometers
US7151787B2 (en)	2003-09-10	2006-12-19	Sandia National Laboratories	Backscatter absorption gas imaging systems and light sources therefore
JP3770326B2 (ja) *	2003-10-01	2006-04-26	セイコーエプソン株式会社	分析装置
US7304732B1 (en) *	2003-11-19	2007-12-04	United States Of America As Represented By The Secretary Of The Army	Microelectromechanical resonant photoacoustic cell
US7375814B2 (en) *	2005-03-11	2008-05-20	Sandia Corporation	Natural gas leak mapper
JP5123492B2 (ja) *	2006-05-22	2013-01-23	オリンパス株式会社	分光画像観察用光学装置
US8975604B2 (en) *	2009-09-18	2015-03-10	Thermo Electron Scientific Instruments Llc	Emissivity enhanced mid IR source
FR2951545B1 (fr) *	2009-10-21	2014-01-03	Commissariat Energie Atomique	Detecteur de gaz photoacoustique
US8695402B2 (en)	2010-06-03	2014-04-15	Honeywell International Inc.	Integrated IR source and acoustic detector for photoacoustic gas sensor
FR2974413B1 (fr) *	2011-04-21	2014-06-13	Commissariat Energie Atomique	Detecteur de gaz photoacoustique a cellule de helmholtz
US8848191B2 (en)	2012-03-14	2014-09-30	Honeywell International Inc.	Photoacoustic sensor with mirror
US9513261B2 (en)	2013-10-14	2016-12-06	Infineon Technologies Ag	Photoacoustic gas sensor device and a method for analyzing gas
EP3254088B1 (fr)	2015-02-02	2022-09-14	Paj Sensor A/S	Méthodologie et système de capteur photoacoustique permettant de détecter des molécules cibles
DE202015002315U1 (de) *	2015-03-27	2015-05-06	Infineon Technologies Ag	Gassensor
DE102015106373B4 (de) *	2015-04-24	2023-03-02	Infineon Technologies Ag	Photoakustisches gassensormodul mit lichtemittereinheit und einer detektoreinheit
NO343314B1 (no)	2015-11-29	2019-01-28	Tunable As	Optisk trykksensor
DE102016103646B4 (de) *	2016-01-22	2023-03-02	Infineon Technologies Ag	Integriertes photoakustisches gassensormodul
FR3072788B1 (fr)	2017-10-24	2020-05-29	Commissariat A L'energie Atomique Et Aux Energies Alternatives	Source de rayonnement infrarouge modulable
US10782270B2 (en) *	2018-07-16	2020-09-22	Infineon Technologies Ag	Photoacoustic gas sensor package
DE102018120061A1 (de) *	2018-08-17	2020-02-20	Infineon Technologies Ag	Ein Detektormodul für einen photoakustischen Gassensor
FR3088721B1 (fr) *	2018-11-21	2022-10-07	Univ Montpellier	Capteur capacitif pour la spectroscopie photo-acoustique, dispositif et procédé mettant en œuvre un tel capteur.
DE102019134279B3 (de) *	2019-12-13	2021-05-27	Infineon Technologies Ag	Photoakustische Sensoren und MEMS-Bauelemente
EP3919890B1 (fr) *	2020-06-05	2023-12-13	Hahn-Schickard-Gesellschaft für angewandte Forschung e.V.	Spectroscopie photoacoustique des mélanges gazeux à l'aide d'un interféromètre fabry-pérot réglable
DE102021111012A1 (de)	2021-04-29	2022-11-03	Technische Universität Dortmund, Körperschaft des öffentlichen Rechts	Photoakustischer Gassensor und Verfahren zur Herstellung

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO1985003574A1 (fr) *	1984-02-07	1985-08-15	Oskar Oehler	Installation pour la detection photo-acoustique de gaz
DK247786D0 (da) *	1986-05-27	1986-05-27	Brueel & Kjaer As	Fotoakustisk gasanalysator
FI94804C (fi) *	1994-02-17	1995-10-25	Vaisala Oy	Sähköisesti säädettävä pintamikromekaaninen Fabry-Perot-interferometri käytettäväksi optisessa materiaalianalyysissä
FI110727B (fi) *	1994-06-23	2003-03-14	Vaisala Oyj	Sähköisesti moduloitava terminen säteilylähde
FI945124A0 (fi) *	1994-10-31	1994-10-31	Valtion Teknillinen	Spektrometer
NO300078B1 (no) *	1995-02-10	1997-04-01	Sinvent As	Fotoakustisk gassdetektor

1997
- 1997-09-19 FR FR9711697A patent/FR2768813B1/fr not_active Expired - Fee Related
1998
- 1998-09-18 JP JP51863599A patent/JP2002511946A/ja active Pending
- 1998-09-18 EP EP98944020A patent/EP0939893A1/fr not_active Withdrawn
- 1998-09-18 US US09/297,087 patent/US6344647B1/en not_active Expired - Fee Related
- 1998-09-18 WO PCT/FR1998/002003 patent/WO1999015879A1/fr not_active Application Discontinuation

Also Published As

Publication number	Publication date
US6344647B1 (en)	2002-02-05
EP0939893A1 (fr)	1999-09-08
JP2002511946A (ja)	2002-04-16
FR2768813A1 (fr)	1999-03-26
WO1999015879A1 (fr)	1999-04-01

Legal Events

Date	Code	Title	Description
2006-07-14	ST	Notification of lapse	Effective date: 20060531

Publication	Publication Date	Title
FR2768813B1 (fr)	1999-10-22	Spectrometre photoacoustique miniaturise
DE10084057D2 (de)	2003-10-02	Miniaturisiertes Spektrometer
DE69737478D1 (de)	2007-04-26	Miniaturspektrometer
DE69731406D1 (de)	2004-12-02	Spektrometer
DE69524282D1 (de)	2002-01-17	Ionenmobilitätsspektrometer
DE69431873D1 (de)	2003-01-23	Photoakustisches Analysegerät
DE19681632T1 (de)	1998-10-15	Miniaturisierte Vierpol-Massenspektrometeranordnung
DE69514485D1 (de)	2000-02-17	Spektroskopisches gerät
DK1011413T3 (da)	2008-09-22	Speculum
DE69518386D1 (de)	2000-09-21	Spektrometer
DE69823808D1 (de)	2004-06-17	Abbildungs-spektrometer
DE69739114D1 (de)	2009-01-02	Verbessertes spektrophotometer
DE59802134D1 (de)	2001-12-20	Einknüpflager
DE59806819D1 (de)	2003-02-06	Hadamard-spektrometer
DE69836289D1 (de)	2006-12-14	Infrarotspektrometer
DK0863105T3 (da)	2003-09-01	Vinde
DE69721444T2 (de)	2004-01-29	Spektralanalysator
DE69836166D1 (de)	2006-11-30	Wellenlängenstandard
DE69837507D1 (de)	2007-05-24	Humanes Hedgehog-Protein
DE19880533T1 (de)	1999-06-17	Spektralanalyse
DE69700101D1 (de)	1999-03-04	Drucktasteneinrichtung
DE69838813D1 (de)	2008-01-17	Miniatur-spektrometer-anordnung
DE59913800D1 (de)	2006-10-12	Spektrometer
NO974189D0 (no)	1997-09-11	Skinne
DE59705376D1 (de)	2001-12-20	Ionen-Mobilitäts-Spektrometer