DE59708427D1 - Micro valve with preloaded valve flap structure - Google Patents
Micro valve with preloaded valve flap structureInfo
- Publication number
- DE59708427D1 DE59708427D1 DE59708427T DE59708427T DE59708427D1 DE 59708427 D1 DE59708427 D1 DE 59708427D1 DE 59708427 T DE59708427 T DE 59708427T DE 59708427 T DE59708427 T DE 59708427T DE 59708427 D1 DE59708427 D1 DE 59708427D1
- Authority
- DE
- Germany
- Prior art keywords
- valve
- preloaded
- flap structure
- micro
- valve flap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C3/00—Circuit elements having moving parts
- F15C3/08—Circuit elements having moving parts using reeds
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Electrostatic Spraying Apparatus (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19637878A DE19637878C2 (en) | 1996-09-17 | 1996-09-17 | Micro valve with preloaded valve flap structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE59708427D1 true DE59708427D1 (en) | 2002-11-14 |
Family
ID=7805898
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19637878A Expired - Fee Related DE19637878C2 (en) | 1996-09-17 | 1996-09-17 | Micro valve with preloaded valve flap structure |
| DE59708427T Expired - Lifetime DE59708427D1 (en) | 1996-09-17 | 1997-08-13 | Micro valve with preloaded valve flap structure |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19637878A Expired - Fee Related DE19637878C2 (en) | 1996-09-17 | 1996-09-17 | Micro valve with preloaded valve flap structure |
Country Status (2)
| Country | Link |
|---|---|
| EP (1) | EP0829649B1 (en) |
| DE (2) | DE19637878C2 (en) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6887615B1 (en) | 1999-07-30 | 2005-05-03 | The Procter & Gamble Company | Microvalve for controlling fluid flow |
| AU6356600A (en) * | 1999-07-30 | 2001-02-19 | Procter & Gamble Company, The | Microvalve for controlling fluid flow |
| US6962170B1 (en) | 1999-07-30 | 2005-11-08 | The Procter & Gamble Company | Microvalve for controlling fluid flow |
| US6590267B1 (en) * | 2000-09-14 | 2003-07-08 | Mcnc | Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods |
| DE20116898U1 (en) | 2001-10-15 | 2002-01-17 | FESTO AG & Co., 73734 Esslingen | microvalve |
| FR2834324B1 (en) * | 2001-12-31 | 2007-04-13 | Bosch Gmbh Robert | ELECTRICALLY CONTROLLED VALVE, MEMBRANE COMPRISING SUCH VALVES AND BRAKE ASSIST SERVOMOTOR COMPRISING SUCH A MEMBRANE |
| DE10243997B4 (en) * | 2002-09-21 | 2005-05-25 | Festo Ag & Co. | Micro valve in multi-layer construction |
| US7195026B2 (en) | 2002-12-27 | 2007-03-27 | American Air Liquide, Inc. | Micro electromechanical systems for delivering high purity fluids in a chemical delivery system |
| EP1574724B1 (en) * | 2004-03-10 | 2008-02-27 | Festo AG & Co | Pneumatic micro valve |
| WO2006012510A1 (en) | 2004-07-23 | 2006-02-02 | Afa Controls, Llc | Microvalve assemblies and related methods |
| FR2892485B1 (en) * | 2005-10-21 | 2008-01-04 | Aldes Aeraulique Sa | DEVICE FOR REGULATION AND SEALING ON AN ORIFICE WHICH HAS BEEN OBTURED OR OPEN AS NEEDED |
| DE102007034116B4 (en) * | 2007-07-21 | 2009-10-22 | Ab Skf | contraption |
| DE102007034117B4 (en) * | 2007-07-21 | 2011-03-10 | Ab Skf | lubricator |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4231287A (en) * | 1978-05-01 | 1980-11-04 | Physics International Company | Spring diaphragm |
| US4585209A (en) * | 1983-10-27 | 1986-04-29 | Harry E. Aine | Miniature valve and method of making same |
| CH684209A5 (en) * | 1990-11-20 | 1994-07-29 | Westonbridge Int Ltd | Integrated valve and micropump comprising such a valve |
| US5050838A (en) * | 1990-07-31 | 1991-09-24 | Hewlett-Packard Company | Control valve utilizing mechanical beam buckling |
| DE4119955C2 (en) * | 1991-06-18 | 2000-05-31 | Danfoss As | Miniature actuator |
| US5176358A (en) * | 1991-08-08 | 1993-01-05 | Honeywell Inc. | Microstructure gas valve control |
| DE29603364U1 (en) * | 1996-02-27 | 1996-04-18 | Forschungszentrum Karlsruhe GmbH, 76133 Karlsruhe | Microvalve |
-
1996
- 1996-09-17 DE DE19637878A patent/DE19637878C2/en not_active Expired - Fee Related
-
1997
- 1997-08-13 EP EP97113980A patent/EP0829649B1/en not_active Expired - Lifetime
- 1997-08-13 DE DE59708427T patent/DE59708427D1/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0829649B1 (en) | 2002-10-09 |
| DE19637878A1 (en) | 1998-04-02 |
| EP0829649A2 (en) | 1998-03-18 |
| EP0829649A3 (en) | 1998-11-04 |
| DE19637878C2 (en) | 1998-08-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |