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DE59708427D1 - Micro valve with preloaded valve flap structure - Google Patents

Micro valve with preloaded valve flap structure

Info

Publication number
DE59708427D1
DE59708427D1 DE59708427T DE59708427T DE59708427D1 DE 59708427 D1 DE59708427 D1 DE 59708427D1 DE 59708427 T DE59708427 T DE 59708427T DE 59708427 T DE59708427 T DE 59708427T DE 59708427 D1 DE59708427 D1 DE 59708427D1
Authority
DE
Germany
Prior art keywords
valve
preloaded
flap structure
micro
valve flap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE59708427T
Other languages
German (de)
Inventor
Dipl-Phys Richter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Application granted granted Critical
Publication of DE59708427D1 publication Critical patent/DE59708427D1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15CFLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C3/00Circuit elements having moving parts
    • F15C3/08Circuit elements having moving parts using reeds
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15CFLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Electrostatic Spraying Apparatus (AREA)
DE59708427T 1996-09-17 1997-08-13 Micro valve with preloaded valve flap structure Expired - Lifetime DE59708427D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19637878A DE19637878C2 (en) 1996-09-17 1996-09-17 Micro valve with preloaded valve flap structure

Publications (1)

Publication Number Publication Date
DE59708427D1 true DE59708427D1 (en) 2002-11-14

Family

ID=7805898

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19637878A Expired - Fee Related DE19637878C2 (en) 1996-09-17 1996-09-17 Micro valve with preloaded valve flap structure
DE59708427T Expired - Lifetime DE59708427D1 (en) 1996-09-17 1997-08-13 Micro valve with preloaded valve flap structure

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19637878A Expired - Fee Related DE19637878C2 (en) 1996-09-17 1996-09-17 Micro valve with preloaded valve flap structure

Country Status (2)

Country Link
EP (1) EP0829649B1 (en)
DE (2) DE19637878C2 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6887615B1 (en) 1999-07-30 2005-05-03 The Procter & Gamble Company Microvalve for controlling fluid flow
AU6356600A (en) * 1999-07-30 2001-02-19 Procter & Gamble Company, The Microvalve for controlling fluid flow
US6962170B1 (en) 1999-07-30 2005-11-08 The Procter & Gamble Company Microvalve for controlling fluid flow
US6590267B1 (en) * 2000-09-14 2003-07-08 Mcnc Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
DE20116898U1 (en) 2001-10-15 2002-01-17 FESTO AG & Co., 73734 Esslingen microvalve
FR2834324B1 (en) * 2001-12-31 2007-04-13 Bosch Gmbh Robert ELECTRICALLY CONTROLLED VALVE, MEMBRANE COMPRISING SUCH VALVES AND BRAKE ASSIST SERVOMOTOR COMPRISING SUCH A MEMBRANE
DE10243997B4 (en) * 2002-09-21 2005-05-25 Festo Ag & Co. Micro valve in multi-layer construction
US7195026B2 (en) 2002-12-27 2007-03-27 American Air Liquide, Inc. Micro electromechanical systems for delivering high purity fluids in a chemical delivery system
EP1574724B1 (en) * 2004-03-10 2008-02-27 Festo AG & Co Pneumatic micro valve
WO2006012510A1 (en) 2004-07-23 2006-02-02 Afa Controls, Llc Microvalve assemblies and related methods
FR2892485B1 (en) * 2005-10-21 2008-01-04 Aldes Aeraulique Sa DEVICE FOR REGULATION AND SEALING ON AN ORIFICE WHICH HAS BEEN OBTURED OR OPEN AS NEEDED
DE102007034116B4 (en) * 2007-07-21 2009-10-22 Ab Skf contraption
DE102007034117B4 (en) * 2007-07-21 2011-03-10 Ab Skf lubricator

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4231287A (en) * 1978-05-01 1980-11-04 Physics International Company Spring diaphragm
US4585209A (en) * 1983-10-27 1986-04-29 Harry E. Aine Miniature valve and method of making same
CH684209A5 (en) * 1990-11-20 1994-07-29 Westonbridge Int Ltd Integrated valve and micropump comprising such a valve
US5050838A (en) * 1990-07-31 1991-09-24 Hewlett-Packard Company Control valve utilizing mechanical beam buckling
DE4119955C2 (en) * 1991-06-18 2000-05-31 Danfoss As Miniature actuator
US5176358A (en) * 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
DE29603364U1 (en) * 1996-02-27 1996-04-18 Forschungszentrum Karlsruhe GmbH, 76133 Karlsruhe Microvalve

Also Published As

Publication number Publication date
EP0829649B1 (en) 2002-10-09
DE19637878A1 (en) 1998-04-02
EP0829649A2 (en) 1998-03-18
EP0829649A3 (en) 1998-11-04
DE19637878C2 (en) 1998-08-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
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