CN206806305U - A kind of diffusing quartz boat - Google Patents

Abstract

The utility model discloses a diffused quartz boat, which comprises a base, a plurality of quartz rods vertically arranged on the base and a top plate located at the upper end of the quartz rods, and a plurality of clamps are arranged on the quartz rods along the radial direction thereof. Groove, the groove spacing of two adjacent card grooves is different, the groove spacing of the described card groove located in the middle position of the quartz rod is the largest, and the groove spacing of the card groove is from the middle position of the quartz rod to the quartz rod. The ends of the rod taper off. A diffused quartz boat of the utility model is provided with a quartz rod clamping groove. The groove spacing is gradually reduced from the middle to both ends, so that the source flow contacted by the silicon chip is gradually reduced, and the square resistance is gradually increased to the silicon chip in the middle position. Consistent; in the case of the same inner diameter of the furnace tube, the groove spacing of the slots is reduced, the number of slots is increased, and a single quartz boat can carry more silicon wafers, so a diffusion quartz boat of the present invention can Obtaining a uniform sheet resistance can in turn increase the yield of the diffusion process.

Description

A Diffused Quartz Boat

technical field

The utility model belongs to the technical field of manufacturing solar cells, in particular to a diffusion quartz boat.

Background technique

With the continuous development of photovoltaic technology, solar cell products, which are semiconductor devices that convert solar energy into electrical energy, have been rapidly developed.

In the production process of crystalline silicon solar cells, a PN junction needs to be formed through a diffusion process. This process requires high cleanliness and a long-term high-temperature power-on process. At present, the quartz boats used in the diffusion process are mostly placed horizontally. The quartz rods of the quartz boats are provided with a plurality of slots with a uniform slot spacing d (as shown in Figure 1), and the cleaned silicon wafers are inserted vertically into the slots. Then put it into the diffusion furnace to carry out the diffusion process. The disadvantage of this method is that the distance between the silicon wafer at different positions and the heating wire of the furnace tube wall is different, resulting in different temperatures, and the uneven air flow makes the phosphorus source carried by the carrier gas uneven, resulting in uneven square resistance of the silicon wafer.

To solve such a problem, those skilled in the art think of adjusting the distance between the card slots. For example, the Chinese application number is 201320629905.6, and the name is "a diffused quartz boat structure". By changing the spacing of the diffused quartz boats, the square resistance of the silicon wafers on the quartz boats, from the furnace mouth to the furnace, and between the wafers more uniform. However, its disadvantage is that on the one hand, the productivity of the horizontally placed quartz boat with this structure is low; The silicon wafer is closest to the heating wire of the furnace tube wall and has the highest temperature, which causes the temperature of the silicon wafer from the middle to both ends to gradually increase. After the diffusion process is completed, the square resistance of the silicon wafer from the middle to both ends gradually decreases.

Contents of the invention

In view of this, in order to overcome the defects of the prior art, the purpose of this utility model is to provide a diffusion quartz boat, the groove spacing of the quartz rod clamping groove is gradually reduced from the middle to both ends, so that the source that the silicon chip contacts The flow rate gradually decreases, and the square resistance gradually increases to be consistent with the silicon wafer in the middle; and the groove spacing of the slots is reduced, and the number of slots is relatively increased, so that a single quartz boat can carry more silicon wafers.

In order to achieve the above object, the utility model adopts the following technical solutions:

A diffused quartz boat, comprising a base, a plurality of quartz rods vertically arranged on the base and a top plate located at the upper end of the quartz rods, a plurality of slots are opened on the quartz rods along its radial direction, two adjacent The slot pitches of the two clamping grooves are different, the slot spacing of the clamping slot located in the middle position of the quartz rod is the largest, and the slot spacing of the clamping slots is gradually from the middle position of the quartz rod to the two ends of the quartz rod decrease. The top plate can be arranged parallel to the bottom plate to increase the stability of the quartz boat.

Preferably, the groove spacing is at most 3.5 mm.

More preferably, the gradual reduction is uniform reduction with equal amplitude.

Further preferably, the uniform reduction with equal amplitude is equal reduction with a gradient of 0.01 mm, and the reduction range can also be adjusted according to actual conditions.

Preferably, the quartz rod is connected to the base and the top plate by welding.

Preferably, the base can be set in a shape matching the diffusion furnace carrying device to facilitate automated production, for example, the base can be set in a U shape.

Preferably, there are four quartz rods, which are symmetrically arranged on both sides of the base.

Preferably, the quartz boat further includes a handle disposed between the two quartz rods on the same side of the base.

More preferably, the handle has an outwardly protruding extension, which is convenient for taking the quartz boat without touching the quartz rod.

Further preferably, the base, the quartz rod, the top plate and the handle are all made of quartz.

Compared with the prior art, the utility model is beneficial in that: a diffused quartz boat of the utility model is provided with a quartz rod clamping groove. The flow rate gradually decreases, and the square resistance gradually increases to be consistent with the silicon wafer in the middle position; in the case of the same inner diameter of the furnace tube, the slot spacing is reduced, and the number of slots is relatively increased, so that a single quartz boat can carry more Many silicon wafers. Therefore, the diffusion quartz boat of the utility model can not only obtain uniform sheet resistance but also improve the output of the diffusion process.

Description of drawings

Fig. 1 is the schematic diagram of quartz boat groove spacing in the prior art;

Fig. 2 is the perspective view of the diffusion quartz boat of the present utility model;

Fig. 3 is the schematic diagram of the diffusion quartz boat groove spacing of the present utility model;

Among them: base-1, quartz rod-2, top plate-3, handle-4, extension part-41.

detailed description

Preferred embodiments of the present utility model will be described in detail below in conjunction with the accompanying drawings.

With reference to accompanying drawing 2-3, a kind of diffusion quartz boat of present embodiment comprises base 1, four quartz rods 2 vertically arranged on base 1 and top plate 3 that is positioned at the upper end of quartz rod 2 and is arranged parallel to base 1, The four quartz rods 2 include two quartz rods 2 symmetrically arranged on the left side of the base 1 and two quartz rods 2 on the right side of the base 1, and a handle 4 is arranged between the two quartz rods 2 on the left side of the base 1. The two quartz rods 2 on the right side of the base 1 are also provided with handles 4 , and the handles 4 also have outwardly protruding extensions 41 , which are convenient for taking the quartz boat without touching the quartz rods 2 . The whole quartz boat includes a base 1, a quartz rod 2, a top plate 3 and a handle 4 all of which are made of quartz, and each part is connected together by welding. The base 1 can be set in a shape such as a U shape matching with the diffusion furnace carrying device, so as to facilitate automatic production.

In the present embodiment, each quartz rod 2 is provided with 300 draw-in slots, and the groove spacing d of two adjacent draw-in slots is different. From the middle position to the two ends of the quartz rod 2, the gradient decreases evenly with a gradient of 0.01mm, and the groove distance d closest to the base 1 and the top plate 3 is the smallest.

In other embodiments, the number of quartz rods 2 and the position arrangement on the base 1, the setting of the number of slots on the quartz rod 2, the slot spacing d of the slots and the reduction of the slot spacing d can all be based on actual conditions. Use to adjust.

A diffused quartz boat of the utility model is provided with a quartz rod clamping groove. The groove spacing is gradually reduced from the middle to both ends, so that the source flow contacted by the silicon chip is gradually reduced, and the square resistance is gradually increased to the silicon chip in the middle position. Consistent; in the case of the same inner diameter of the furnace tube, the groove spacing of the slots is reduced, and the number of slots is relatively increased, so that a single quartz boat can carry more silicon wafers. Therefore, the diffusion quartz boat of the utility model can not only obtain uniform sheet resistance but also improve the output of the diffusion process.

The above-mentioned embodiments are only to illustrate the technical conception and characteristics of the present utility model, and its purpose is to allow those familiar with this technology to understand the content of the present utility model and implement it accordingly, and cannot limit the protection scope of the present utility model. Equivalent changes or modifications made according to the spirit of the present utility model shall fall within the protection scope of the present utility model.

Claims (10)

1. a diffusion quartz boat, comprising a base, a plurality of quartz rods vertically arranged on the base and a top plate positioned at the upper end of the quartz rod, the quartz rod is provided with a plurality of draw-in grooves along its radial direction, and It is characterized in that: the groove spacing of two adjacent card slots is different, the groove spacing of the card slot located in the middle position of the quartz rod is the largest, and the groove spacing of the card slots is from the middle position of the quartz rod to the The ends of the quartz rod taper off. 2. A diffusion quartz boat according to claim 1, characterized in that the distance between the grooves is at most 3.5 mm. 3. A diffusion quartz boat according to claim 2, characterized in that: said gradual reduction is uniform reduction with equal amplitude. 4 . A diffusion quartz boat according to claim 3 , characterized in that: said equal-amplitude uniform reduction is equal-amplitude uniform reduction with a gradient of 0.01 mm. 5. The diffusion quartz boat according to claim 1, wherein the quartz rod is connected to the base and the top plate by welding. 6. A diffusion quartz boat according to claim 1, characterized in that: said base can be set in a shape matching with the diffusion furnace carrying device. 7. A diffusion quartz boat according to claim 1, characterized in that there are four quartz rods, which are arranged symmetrically on both sides of the base. 8 . The diffusion quartz boat according to claim 1 , wherein the quartz boat further comprises a handle disposed between the two quartz rods on the same side of the base. 9. The diffusion quartz boat according to claim 8, wherein the handle has an outwardly protruding extension. 10 . The diffusion quartz boat according to claim 9 , wherein the base, the quartz rod, the top plate and the handle are all made of quartz. 11 .