CN114279303B - Device and method for detecting verticality of double-sided micro-cylindrical lens array - Google Patents

Abstract

The invention discloses a device and method for detecting the perpendicularity of a double-sided micro-cylindrical lens array. The device comprises a double-sided micro-cylindrical lens array (101), a first small ball (102), and a second small ball (103). , a rotating stage (105) around the Z-axis, a two-dimensional translation stage (104) along the X-axis and Y-axis, and the Z-axis direction height contacts the measuring device (106) and the computer (107). The first small ball (102) and the second small ball (103) are two identical small balls. Through the positioning of the two small balls and the fitting processing of the test data, precise adjustment of the double-sided microcylindrical lens array and the The relationship of the axes of motion. Through the testing and data processing of the profile data of the upper and lower cylinders, the busbar directions of the two cylinders are calculated, thereby realizing the accurate detection of the perpendicularity of the double-sided micro-cylindrical lens array.

Description

Device and method for detecting the verticality of a double-sided microcylindrical lens array

technical field

The invention belongs to the field of optical element detection, and in particular relates to a device and method for detecting the verticality of a double-sided microcylindrical lens array.

Background technique

The microlens cylindrical array refers to the orderly arrangement of sub-cylindrical mirrors with diameters of tens to hundreds of microns on the substrate. Microlens cylindrical arrays are widely used in laser array scanning, beam homogenization, beam shaping and other systems due to their small unit size and high integration. In practical use, due to space constraints and assembly problems, it is usually designed as a double-sided microlens cylindrical array, that is, the upper and lower sides are both microlens cylindrical arrays, and the busbars of the upper and lower microlens cylindrical arrays are vertical. Since the two directions are used together in the optical path, the verticality of the two sides is required to be high. Since the structures on the two sides are not on the same side, high-precision detection of the squareness of the two sides is difficult.

SUMMARY OF THE INVENTION

In order to solve the above technical problems, the present invention provides a device and method for detecting the verticality of a double-sided micro-cylindrical lens array, which realizes high-precision detection of the verticality of a double-sided micro-cylindrical lens array.

In order to achieve the above purpose, the present invention proposes a device for detecting the perpendicularity of a double-sided microcylindrical lens array. The device includes: a double-sided microcylindrical lens array 101, a first small ball 102, a second small ball 103, The two-dimensional translation stage 104 of the X-axis and the Y-axis, the rotation stage 105 around the Z-axis, the height of the Z-axis direction is in contact with the measuring device 106 , and the computer 107 . The XYZ coordinate system is the two-dimensional translation stage 104 along the X-axis and the Y-axis, the rotation stage 105 around the Z-axis and the coordinate system in which the Z-axis direction is in high contact with the measuring device 106 . Among them, the double-sided micro-cylindrical lens array 101 is placed on the rotary table 105 around the Z-axis, the rotary table 105 around the Z-axis is placed on the two-dimensional translation stage 104 along the X-axis and the Y-axis, and the double-sided micro-cylindrical lens The array 101 is located below the height contact measurement device 106 in the Z-axis direction. Wherein, the height contact measuring device 106 in the Z-axis direction can move along the Z-axis and accurately measure the height information. The upper surface of the double-sided micro-cylindrical lens array 101 is a micro-cylindrical lens array, and the lower surface is also a micro-cylindrical lens array. The computer 107 is connected to the two-dimensional translation stage 104 along the X-axis and the Y-axis, the rotary stage 105 around the Z-axis and the Z-axis height contact measuring device 106 for sending control signals and obtaining the topographic information of the measured object . Among them, the first small ball 102 and the second small ball 103 have the same size, the radius of curvature R is known, the surface shape accuracy is high, and the bottom is cut off by 1/5 of the sphere.

In addition, the present invention provides a method for detecting the verticality of a double-sided microcylindrical lens array, using the above-mentioned device, and the method includes the following steps:

Step (1), placing the double-sided micro-cylindrical lens array 101 on the turntable 105 around the Z-axis, and adjusting so that the end face ABCD of the double-sided micro-cylindrical lens array 101 is parallel to the X-axis;

Step (2), test the top surface of the double-sided micro-cylindrical lens array 101 for a certain cylindrical area morphology, and perform cylindrical fitting to obtain the bus bar direction vector of the upper surface of the double-sided micro-cylindrical lens array 101, the direction vector(a ₁ ,b ₁ ,c ₁ );

Step (3), rotate the double-sided micro-cylindrical lens array 101 by 180 degrees around the Y-axis and place it on the rotary table 105 around the Z-axis, and adjust so that the end face ABCD of the double-sided micro-cylindrical lens array 101 is parallel to the X-axis;

Step (4): Test the topography of a certain cylindrical area on the lower surface of the double-sided micro-cylindrical lens array 101, and perform cylindrical fitting to obtain the busbar direction and direction vector of the lower surface of the double-sided micro-cylindrical lens array 101 (a ₂ , b ₂ , c ₂ );

Step (5): Calculate the angle θ between the generatrix direction of the upper surface cylinder and the generatrix direction of the lower surface cylinder of the double-sided microcylindrical lens array 101, as shown in the following formula:

Further, when the double-sided micro-cylindrical lens array 101 is placed on the rotary table 105 around the Z-axis, and the end face ABCD of the double-sided micro-cylindrical lens array 101 is adjusted to be parallel to the X-axis, the method used is as follows:

(11) Place the double-sided micro-cylindrical lens array 101 on the rotary table 105 around the Z-axis, the end face ABCD of the double-sided micro-cylindrical lens array (101) is substantially perpendicular to the X-axis, and the first ball 102 is placed on the On the rotary table 105 around the Z axis and tangent to the end face ABCD of the double-sided micro-cylindrical lens array 101, the second ball 103 is placed on the rotary table 105 around the Z-axis, and is tangent to the double-sided micro-cylindrical lens array 101. The end face ABCD of 101 is tangent;

(12), test the shape of the top area of the first small ball 102, and do spherical fitting to obtain the spherical center coordinates of the first small ball 102, the computer 107 controls the two-dimensional translation stage 104 and Z along the X axis and the Y axis The height in the axial direction touches the measuring device 106, tests the top area of the first ball 102, and obtains data points (x _1i , y _1i , z _1i ), i=1, 2, . . . , N ₁ , where N ₁ is the total number of test points, using The least squares method is used for spherical fitting, so that the fitting residual ε ₁ is the smallest, and the coordinates (x ₁₀ , y ₁₀ , z ₁₀ ) of the center of the first ball 102 are obtained, and R is the radius of curvature of the ball, as shown in the following formula Show,

(13), test the topography of the second small ball 103, and obtain the coordinates of the center of the second small ball 103 by fitting, the computer 107 controls the two-dimensional translation stage 104 along the X-axis and the Y-axis and the Z-axis direction The height touches the measuring device 106, tests the top area of the second ball 103, and obtains data points (x _2j , y _2j , z _2j ), j=1, 2,..., N ₂ , N ₂ is the total number of test points, using the minimum two Multiplication is performed for spherical fitting, so that the fitting residual ε ₂ is the smallest, and the coordinates of the center of the second ball 103 (x ₂₀ , y ₂₀ , z ₂₀ ) are obtained, and R is the radius of curvature of the ball, as shown in the following formula:

(14) The angle between the line connecting the center of the first ball 102 and the center of the second ball 103 and the X-axis is calculated as α, and the calculation method is as follows:

(15) The computer 107 controls the rotary table 105 around the Z axis to rotate -α, so that the line connecting the center of the first ball 102 and the center of the second ball 103 is parallel to the X axis, that is, the double-sided microcylindrical lens The end face ABCD of the array 101 is parallel to the X axis.

Further, when obtaining the generatrix direction of the upper surface cylinder of the double-sided micro-cylindrical lens array 101, the method used is as follows: the computer 107 controls the two-dimensional translation stage 104 along the X-axis and the Y-axis and the Z-axis direction height contact measuring equipment 106. Test a certain cylindrical area on the upper surface of the double-sided micro-cylindrical lens array 101 to obtain data points (x _3k , y _3k , z _3k ), k=1, 2, . . . , N ₃ , where N ₃ is the test point The total number, the least squares algorithm is used for cylinder fitting, so that the fitting residual ε ₃ is the smallest, the radius of curvature is R ₃ , the cylinder generatrix passes through the points (x ₃₀ , y ₃₀ , z ₃₀ ), the direction of the cylinder generatrix vector (a ₁ , b ₁ , c ₁ ), as follows:

where a ₁ ² +b ₁ ² +c ₁ ² =1.

Further, the double-sided micro-cylindrical lens array 101 is rotated 180 degrees around the Y-axis and placed on the turntable 105 around the Z-axis, and adjusted so that the end face ABCD of the double-sided micro-cylindrical lens array 101 is at the same level as the X-axis, using Methods as below:

(31) Rotate the double-sided micro-cylindrical lens array 101 by 180 degrees around the Y-axis and place it on the turntable 105 around the Z-axis. The end face ABCD of the double-sided micro-cylindrical lens array 101 is approximately perpendicular to the X-axis. The small ball 102 is placed on the rotary table 105 around the Z axis, and is tangent to the end face ABCD of the double-sided microcylindrical lens array 101, and the second small ball 103 is placed on the rotary table 105 around the Z axis, and is tangent to the double-sided microcylindrical lens array 101. The end face ABCD of the microcylindrical lens array 101 is tangent;

(32), test the shape of the top area of the first small ball 102, and do spherical fitting to obtain the spherical center coordinates of the first small ball 102, the computer 107 controls the two-dimensional translation stage 104 and Z along the X axis and the Y axis The height in the axial direction is in contact with the measuring device 106, and the top area of the first ball 102 is tested to obtain data points (x _4l , y _4l , z _4l ), where l=1, 2,..., N ₄ , where N ₄ is the total number of test points, using The least squares method is used for spherical fitting, so that the fitting residual ε ₄ is the smallest, and the coordinates (x ₄₀ , y ₄₀ , z ₄₀ ) of the center of the first ball 102 are obtained, and R is the radius of curvature of the ball, as shown in the following formula Show.

(33), test the morphology of the top area of the second small ball 103, and obtain the center coordinates of the second small ball 103 by fitting. The computer 107 controls the two-dimensional translation stage 104 along the X-axis and the Y-axis and the height of the Z-axis direction Contact the measuring device 106, test the top area of the second ball 103, and obtain data points (x _5m , y _5m , z _5m ), j=1, 2, ..., N ₅ , where N ₅ is the total number of test points, using the least squares method Perform spherical fitting to minimize the fitting residual ε ₅ , and obtain the coordinates (x ₅₀ , y ₅₀ , z ₅₀ ) of the center of the second ball 103 , which is the radius of curvature of the ball, as shown in the following formula:

(34) The angle between the line connecting the center of the first ball 102 and the center of the second ball 103 and the X-axis is calculated as β, and the calculation method is as follows:

(35), the computer 107 controls the rotary table 105 around the Z axis to rotate -β, so that the line connecting the center of the first ball 102 and the center of the second ball 103 is parallel to the X axis, that is, the double-sided microcylindrical lens The end face ABCE of the array 101 is parallel to the X axis.

Further, when obtaining the generatrix direction of the lower surface cylinder of the double-sided microcylindrical lens array 101, the method used is as follows: the computer 107 controls the two-dimensional translation stage 104 along the X-axis and the Y-axis and the Z-axis direction height contact measuring equipment 106. Test a certain cylindrical area on the upper surface of the double-sided micro-cylindrical lens array 101 to obtain data points (x _6n , y _6n , z _6n ), n=1, 2, . . . , N ₆ , where N ₆ is the test point The total number, the least squares algorithm is used for cylinder fitting, so that the fitting residual ε ₆ is the smallest, the radius of curvature is R ₆ , the cylinder generatrix passes through the points (x ₆₀ , y ₆₀ , z ₆₀ ), and the direction of the cylinder generatrix vector (a ₂ , b ₂ , c ₂ ), as follows:

where a ₂ ² +b ₂ ² +c ₂ ² =1.

The advantages of the present invention compared with the prior art are:

(1) When testing the upper and lower surfaces of the double-sided micro-cylindrical lens array, the present invention uses the end face of the double-sided micro-cylindrical lens array as a benchmark, so that the method for detecting the perpendicularity of the double-sided micro-cylindrical lens array becomes feasible.

(2) The use of the small ball in the present invention can quickly and accurately align the end face of the double-sided micro-cylindrical lens array with the X axis, thereby making the detection of the perpendicularity of the double-sided micro-cylindrical lens array more accurate.

(3) The present invention adjusts the position of the double-sided micro-cylindrical lens array by analyzing and processing the test data, thereby reducing the installation requirements during the measurement of the double-sided micro-cylindrical lens array and realizing fast testing.

Description of drawings

1 is a schematic diagram of a device for detecting the verticality of a double-sided microcylindrical lens array according to the present invention;

2 is a three-dimensional schematic diagram of a double-sided micro-cylindrical lens array of the present invention;

Fig. 3 is the front view of the pellet of the present invention;

4 is a schematic view of the installation of small balls when testing the upper surface of the double-sided micro-cylindrical lens array of the present invention;

Fig. 5 is the right diagram of the ball installation when testing the upper surface of the double-sided micro-cylindrical lens array of the present invention;

6 is a schematic diagram of the installation of small balls when testing the lower surface of the double-sided micro-cylindrical lens array of the present invention;

Fig. 7 is the right diagram of the ball installation when testing the lower surface of the double-sided micro-cylindrical lens array of the present invention;

In the figure, 101 is a double-sided micro-cylindrical lens array, 102 is a first ball, 103 is a second ball, 104 is a two-dimensional translation stage along the X and Y axes, 105 is a rotation stage around the Z axis, 106 is a height contact measuring device in the Z-axis direction, and 107 is a computer.

Detailed ways

The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

1 is a schematic diagram of a device for detecting the perpendicularity of a double-sided micro-cylindrical lens array according to the present invention, including a double-sided micro-cylindrical lens array 101, a first ball 102, a second ball 103, along the X axis and the Y axis The two-dimensional translation stage 104 of the axis, the rotation stage 105 around the Z-axis, and the Z-axis direction height contact the measuring device 106 and the computer 107 . The XYZ coordinate system is the two-dimensional translation stage 104 along the X-axis and the Y-axis, the rotation stage 105 around the Z-axis and the coordinate system in which the Z-axis direction is in high contact with the measuring device 106 . Among them, the double-sided micro-cylindrical lens array 101 is placed on the rotary table 105 around the Z-axis, the rotary table 105 around the Z-axis is placed on the two-dimensional translation stage 104 along the X-axis and the Y-axis, and the double-sided micro-cylindrical lens The array 101 is located below the height contact measurement device 106 in the Z-axis direction. Wherein, the height contact measuring device 106 in the Z-axis direction can move along the Z-axis and accurately measure the height information. A schematic structural diagram of the double-sided micro-cylindrical lens array 101 is shown in FIG. 1 , the upper surface is a micro-cylindrical lens array, and the lower surface is also a micro-cylindrical lens array. Among them, the computer 107 is connected with the two-dimensional translation stage 104 along the X-axis and the Y-axis, the rotary stage 105 around the Z-axis, and the height-contact measuring device 106 in the Z-axis direction, and is used for sending control signals and obtaining the topography information of the measured object. . Among them, the first small ball 102 and the second small ball 103 have the same size, the radius of curvature R is known, the surface shape accuracy is high, and the bottom is cut out of a 1/5 sphere, the schematic diagram is shown in FIG. 3 .

The method for detecting the verticality of a double-sided microcylindrical lens array using the device of the present invention includes the following steps:

In step (1), the generatrix direction of the cylinder on the upper surface of the double-sided microcylindrical lens array 101 is obtained. The specific steps are as follows:

Step (11): Place the double-sided microcylindrical lens array 101 , the small ball 102 and the small ball 103 . The double-sided micro-cylindrical lens array 101 is placed on the turntable 105 around the Z-axis, and the end face ABCD of the double-sided micro-cylindrical lens array 101 is substantially perpendicular to the X-axis. The small ball 102 is placed on the rotary table 105 around the Z axis and is tangent to the end face ABCD of the double-sided microcylindrical lens array 101. The end face ABCE of the surface lens array 101 is tangent, as shown in FIG. 4 , and the right side view is shown in FIG. 5 .

Step (12): Test the topography of the small ball 102 and perform spherical fitting to obtain the spherical center coordinates of the small ball 102 . The computer 106 controls the two-dimensional translation stage 104 along the X-axis and the Y-axis and the height-contact measurement device 106 in the Z-axis direction to test the top area of the ball 102 to obtain data points (x _1i , y _1i , z _1i ), i=1, 2,...,N ₁ , where N ₁ is the total number of test points. Use the least squares method for spherical fitting to minimize the fitting residual ε ₁ , and obtain the coordinates of the center of the ball 102 (x ₁₀ , y ₁₀ , z ₁₀ ), and R is the radius of curvature of the ball, as shown in the following formula ,

Step (13): Test the topography of the small ball 103 and obtain the coordinates of the center of the small ball 103 by fitting. The computer 106 controls the two-dimensional translation stage 104 along the X-axis and the Y-axis and the height-contact measuring device 106 in the Z-axis direction to test the top area of the ball 103 to obtain data points (x _2j , y _2j , z _2j ), j=1, 2,...,N ₂ , where N ₂ is the total number of test points. Use the least squares method for spherical fitting to minimize the fitting residual ε ₂ , and obtain the coordinates of the center of the ball 103 (x ₂₀ , y ₂₀ , z ₂₀ ), and R is the radius of curvature of the ball, as shown in the following formula ,

In step (14), the angle between the line connecting the center of the ball 102 and the center of the ball 103 and the X axis is α, and the calculation method is as follows:

In step (15), the computer 106 controls the rotary table 105 around the Z axis to rotate -α, so that the line connecting the center of the ball 102 and the center of the ball 103 is parallel to the X axis, that is, the double-sided microcylindrical lens array 101 The end face ABCE is parallel to the X axis.

Step (16): Test the topography of a certain cylindrical area on the upper surface of the double-sided micro-cylindrical lens array 101, and perform cylindrical fitting to obtain the generatrix direction vector of the cylinder. The computer 107 controls the two-dimensional translation stage 104 along the X-axis and the Y-axis and the height-contact measuring device 106 in the Z-axis direction to test a certain cylindrical area on the upper surface of the double-sided microcylindrical lens array 101 to obtain data points (x _3k , y _3k , z _3k ), k=1, 2, . . . , N ₃ , where N ₃ is the total number of test points. The least squares algorithm is used for cylinder fitting, so that the fitting residual ε ₃ is the smallest, the radius of curvature is R ₃ , the cylinder generatrix passes through the points (x ₃₀ , y ₃₀ , z ₃₀ ), and the direction vector of the cylinder generatrix ( a ₁ ,b ₁ ,c ₁ ), as shown in the following formula,

where a ₁ ² +b ₁ ² +c ₁ ² =1.

In step (2), the generatrix direction of the lower surface cylinder of the double-sided microcylindrical lens array 101 is obtained. The specific steps are as follows:

Step (21): Rotate the double-sided micro-cylindrical lens array 101 by 180 degrees around the Y axis and place it on the turntable 105 around the Z-axis. The end face ABCD of the double-sided micro-cylindrical lens array 101 is substantially perpendicular to the X axis. The ball 102 is placed on the rotary table 105 around the Z axis and is tangent to the end face ABCD of the double-sided microcylindrical lens array 101. The end face ABCE of the surface lens array 101 is tangent, as shown in FIG. 6 , and the right side view is shown in FIG. 7 .

Step (22): Test the topography of the small ball 102, and perform spherical fitting to obtain the spherical center coordinates of the small ball 102. The computer 106 controls the two-dimensional translation stage 104 along the X-axis and the Y-axis and the height-contact measurement device 106 in the Z-axis direction to test the top area of the ball 102 to obtain data points (x _4l , y _4l , z _4l ), l=1, 2,...,N ₄ , where N ₄ is the total number of test points. Use the least squares method for spherical fitting to make the fitting residual ε ₄ the smallest, and obtain the coordinates of the center of the ball 102 (x ₄₀ , y ₄₀ , z ₄₀ ), and R is the radius of curvature of the ball, as shown in the following formula ,

Step (23), test the morphology of the top area of the small ball 103, and obtain the spherical center coordinates of the small ball 103 by fitting. 106. Test the top area of the small ball 103 to obtain data points (x _5m , y _5m , z _5m ), j=1, 2, . . . , N ₅ , where N ₅ is the total number of test points. Use the least squares method for spherical fitting to minimize the fitting residual ε ₅ , and obtain the coordinates of the center of the ball 103 (x ₅₀ , y ₅₀ , z ₅₀ ), and R is the radius of curvature of the ball, as shown in the following formula ,

In step (24), it is calculated that the angle between the line connecting the center of the ball 102 and the center of the ball 103 and the X axis is β, and the calculation method is as follows:

In step (25), the computer 107 controls the rotation of the rotary table 105 around the Z axis by -β, so that the line connecting the center of the ball 102 and the center of the ball 103 is parallel to the X axis, that is, the double-sided microcylindrical lens array 101 . The end face ABCE is parallel to the X axis.

Step (26): Test the topography of a certain cylindrical area on the lower surface of the double-sided micro-cylindrical lens array 101, and perform cylindrical fitting to obtain the generatrix direction vector of the cylinder on the lower surface of the double-sided micro-cylindrical lens array 101. The computer 106 controls the two-dimensional translation stage 104 along the X-axis and the Y-axis and the height-contact measurement device 106 in the Z-axis direction to test a certain cylindrical area on the upper surface of the double-sided microcylindrical lens array 101 to obtain data points (x _6n , y _6n , z _6n ), n=1, 2, . . . , N ₆ , where N ₆ is the total number of test points. The least squares algorithm is used for cylinder fitting, so that the fitting residual ε ₆ is the smallest, the radius of curvature is R ₆ , the cylinder generatrix passes through the points (x ₆₀ , y ₆₀ , z ₆₀ ), and the direction vector of the cylinder generatrix ( a ₂ , b ₂ , c ₂ ), as shown in the following formula,

where a ₂ ² +b ₂ ² +c ₂ ² =1.

Step (3): Calculate the angle θ between the generatrix direction of the upper surface cylinder and the generatrix direction of the lower surface cylinder of the double-sided microcylindrical lens array 101, as shown in the following formula:

Parts not described in detail in the present invention belong to the well-known technologies of those skilled in the art.

The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited to this, and any transformation or replacement made by anyone familiar with the technology within the technical scope disclosed by the present invention shall be covered by the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims (4)

1. A detection method of a detection device based on the verticality of a double-sided micro-cylindrical lens array is characterized by comprising the following steps: the device comprises: a double-sided micro-cylindrical lens array (101), a first small ball (102), a second small ball (103), a two-dimensional translation stage (104) along an X axis and a Y axis, a rotation stage (105) around a Z axis, a Z-axis direction height contact measuring device (106) and a computer (107); wherein:

the double-sided micro-cylindrical lens array (101) is placed on a rotating table (105) around a Z axis, the rotating table (105) around the Z axis is placed on a two-dimensional translation table (104) along an X axis and a Y axis, and the double-sided micro-cylindrical lens array (101) is positioned below a height contact measuring device (106) in the Z axis direction; wherein, the height contact measuring equipment (106) in the Z-axis direction can move along the Z-axis and accurately measure the height information; the computer (107) is connected with the two-dimensional translation table (104) along the X axis and the Y axis, the rotating table (105) around the Z axis and the height contact measuring equipment (106) in the Z axis direction, and is used for sending out a control signal and acquiring the topography information of the measured object;

the upper surface of the double-sided micro cylindrical lens array (101) is a micro cylindrical lens array, and the lower surface of the double-sided micro cylindrical lens array is also a micro cylindrical lens array;

the first small ball (102) and the second small ball (103) are the same in size, the curvature radius R is known, the surface shape precision is high, and 1/5 of a ball body is cut off from the bottom;

the generatrixes of the upper and lower surface microlens cylinder arrays are mutually vertical;

the method comprises the following steps:

the method comprises the following steps of (1) placing a double-sided micro-cylindrical lens array (101) on a rotating table (105) around a Z axis, and adjusting to enable the end face ABCD of the double-sided micro-cylindrical lens array (101) to be parallel to an X axis;

step (2), testing the appearance of a certain cylindrical surface area on the upper surface of the double-sided micro-cylindrical lens array (101), and performing cylindrical surface fitting to obtain a generatrix direction vector (a) of the upper surface of the double-sided micro-cylindrical lens array (101) ₁ ,b ₁ ,c ₁ )；

Step (3), the double-sided micro-cylindrical lens array (101) is rotated 180 degrees around the Y axis and then placed on a rotating table (105) around the Z axis, and the adjustment is carried out to enable the end face ABCD of the double-sided micro-cylindrical lens array (101) to be parallel to the X axis;

step (4) of testing the appearance of a certain cylindrical area on the lower surface of the double-sided micro cylindrical lens array (101), and performing cylindrical fitting to obtain a generatrix direction vector (a) of the lower surface of the double-sided micro cylindrical lens array (101) ₂ ,b ₂ ,c ₂ )；

Step (5), calculating an included angle theta between a generatrix direction vector of the upper surface cylindrical surface and a generatrix direction vector of the lower surface cylindrical surface of the double-sided micro cylindrical lens array (101) as shown in the following formula,

when the double-sided micro-cylindrical lens array (101) is placed on a rotating table (105) around a Z axis and adjusted so that the end face ABCD of the double-sided micro-cylindrical lens array (101) is parallel to an X axis, the method adopted is as follows:

(11) Placing a double-sided micro-cylindrical lens array (101) on a rotating table (105) around a Z axis, wherein the end face ABCD of the double-sided micro-cylindrical lens array (101) is approximately vertical to the X axis, a first small ball (102) is placed on the rotating table (105) around the Z axis and is tangent to the end face ABCD of the double-sided micro-cylindrical lens array (101), and a second small ball (103) is placed on the rotating table (105) around the Z axis and is tangent to the end face ABCD of the double-sided micro-cylindrical lens array (101);

(12) The appearance of the top area of the first small ball (102) is tested, spherical fitting is carried out to obtain the center coordinates of the first small ball (102), the computer (107) controls the two-dimensional translation table (104) along the X axis and the Y axis and the Z axis to be in height contact with the measuring equipment (106), the top area of the first small ball (102) is tested, and data points (X and Y) are obtained _1i ,y _1i ,z _1i ),i＝1,2,…,N ₁ ，N ₁ For the total number of test points, a least square method is used for spherical surface fitting, so that the fitting residual error epsilon ₁ At a minimum, the coordinates (x) of the center of the first sphere (102) are obtained ₁₀ ,y ₁₀ ,z ₁₀ ) R isThe radius of curvature of the pellet, as shown in the following formula,

(13) Testing the appearance of the top area of the second small ball (103), fitting to obtain the center coordinates of the second small ball (103), controlling a two-dimensional translation table (104) along an X axis and a Y axis and a Z axis to contact with a measuring device (106) in height, testing the top area of the second small ball (103), and obtaining data points (X and Y) _2j ,y _2j ,z _2j ),j＝1,2,…,N ₂ ，N ₂ For the total number of test points, a least square method is used for spherical surface fitting, so that the fitting residual error epsilon ₂ At minimum, the coordinates (x) of the center of the second ball (103) are obtained ₂₀ ,y ₂₀ ,z ₂₀ ) R is the curvature radius of the small ball, as shown in the following formula,

(14) Calculating to obtain the included angle alpha between the connecting line of the sphere center of the first small ball (102) and the sphere center of the second small ball (103) and the X axis, wherein the calculation method is as follows,

(15) And the computer (107) controls the rotating table (105) to rotate alpha around the Z axis, so that the connecting line of the spherical centers of the first small ball (102) and the second small ball (103) is parallel to the X axis, namely the end face ABCD of the double-sided micro-cylindrical lens array (101) is parallel to the X axis.

2. The detection method according to claim 1, characterized in that when obtaining the generatrix direction vector of the upper surface cylindrical surface of the double-sided micro-cylindrical lens array (101), the following method is adopted: the computer (107) controls the two-dimensional translation stage (104) along the X-axis and the Y-axis and the Z-axis height contact measuring equipment (106) to measureA certain cylindrical area on the upper surface of the double-sided micro cylindrical lens array (101) is tried to obtain a data point (x) _3k ,y _3k ,z _3k ),k＝1,2,…,N ₃ ，N ₃ For the total number of test points, a least square algorithm is used for cylindrical surface fitting, so that the fitting residual error epsilon ₃ Minimum, obtaining a radius of curvature R ₃ Cylindrical bus crossing point (x) ₃₀ ,y ₃₀ ,z ₃₀ ) Direction vector (a) of cylindrical generatrix ₁ ,b ₁ ,c ₁ ) As shown in the following formula,

wherein, a ₁ ² +b ₁ ² +c ₁ ² ＝1。

3. The inspection method according to claim 1, wherein the double-sided micro-cylindrical lens array (101) is rotated 180 degrees around the Y-axis and then placed on a rotary stage (105) around the Z-axis, and the adjustment is made so that the end face ABCD of the double-sided micro-cylindrical lens array (101) is flat with the X-axis by the following method:

(31) The double-sided micro-cylindrical lens array (101) is rotated 180 degrees around a Y axis and then placed on a rotating table (105) around a Z axis, the end face ABCD of the double-sided micro-cylindrical lens array (101) is approximately vertical to the X axis, a first small ball (102) is placed on the rotating table (105) around the Z axis and is tangent to the end face ABCD of the double-sided micro-cylindrical lens array (101), and a second small ball (103) is placed on the rotating table (105) around the Z axis and is tangent to the end face ABCD of the double-sided micro-cylindrical lens array (101);

(32) The appearance of the top area of the first small ball (102) is tested, spherical fitting is carried out to obtain the center coordinates of the first small ball (102), the computer (107) controls the two-dimensional translation table (104) along the X axis and the Y axis and the Z axis to be in height contact with the measuring equipment (106), the top area of the first small ball (102) is tested, and data points (X and Y) are obtained _4l ,y _4l ,z _4l ),l＝1,2,…,N ₄ ，N ₄ For the total number of test points, a least square method is used for spherical surface fitting, so that the fitting residual error epsilon ₄ At a minimum, the coordinates (x) of the sphere center of the first small sphere (102) are obtained ₄₀ ,y ₄₀ ,z ₄₀ ) And R is the curvature radius of the small ball and is shown as the following formula:

(33) Testing the appearance of the top area of the second small ball (103), fitting to obtain the center coordinates of the second small ball (103), controlling a two-dimensional translation table (104) along an X axis and a Y axis and a Z axis to contact with a measuring device (106) in height, testing the top area of the second small ball (103), and obtaining data points (X and Y) _5m ,y _5m ,z _5m ),j＝1,2,…,N ₅ ，N ₅ For the total number of test points, a least square method is used for spherical surface fitting, so that the fitting residual error epsilon ₅ At minimum, the coordinates (x) of the center of the second ball (103) are obtained ₅₀ ,y ₅₀ ,z ₅₀ ) The radius of curvature of the pellet is shown as follows,

(34) Calculating to obtain the included angle beta between the connecting line of the sphere center of the first small ball (102) and the sphere center of the second small ball (103) and the X axis, wherein the calculation method is as follows,

(35) And the computer (107) controls the rotating platform (105) to rotate-beta around the Z axis, so that the connecting line of the spherical centers of the first small ball (102) and the second small ball (103) is parallel to the X axis, namely the end face ABCE of the double-sided micro-cylindrical lens array (101) is parallel to the X axis.

4. The detection method according to claim 1, wherein when obtaining the generatrix direction vector of the lower surface cylindrical surface of the double-sided micro-cylindrical lens array (101), the following method is adopted: meterA computer (107) controls a two-dimensional translation table (104) along an X axis and a Y axis and a Z axis direction height contact measuring device (106), a certain cylindrical area of the upper surface of the double-sided micro-cylindrical lens array (101) is tested, and a data point (X) is obtained _6n ,y _6n ,z _6n ),n＝1,2,…,N ₆ ，N ₆ Performing cylindrical surface fitting for the total number of the test points by using a least square algorithm to ensure that a fitting residual error epsilon ₆ Minimum, obtaining a radius of curvature R ₆ Cylindrical bus crossing point (x) ₆₀ ,y ₆₀ ,z ₆₀ ) Direction vector (a) of cylindrical generatrix ₂ ,b ₂ ,c ₂ ) As shown in the following formula:

wherein, a ₂ ² +b ₂ ² +c ₂ ² ＝1。

Images