CN114112964B - A Fourier transform infrared spectrometer multi-field automatic measurement system and method - Google Patents
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Abstract
本发明公开了一种傅里叶红外光谱仪多元视场自动测量系统及方法,系统包括:黑体辐射源:产生入射辐射;光学斩波器:实现对入射辐射的频率调制;狭缝及电动三维平台:狭缝扫描遍历视场区域;平行光管:将经过狭缝的光转换为平行光,进入待测仪器;常温探测器:用于常温下的光电转换;多通道微弱信号处理系统:实现对探测器微弱信号的锁相放大和采集;协同处理软件:用于狭缝的自动控制,视场响应曲线的绘制及视场参数的计算。本发明通过狭缝扫描替代传统的被测仪器转动产生视场的位移,通过软件的协同控制和数据采集,以高精度锁相放大获取信号强度随视场的响应曲线,计算视场参数,有效提高了傅里叶光谱仪冷光学系统在常温下的装校效率和精度。
The invention discloses a multi-field automatic measurement system and method for a Fourier infrared spectrometer. The system includes: a blackbody radiation source: generating incident radiation; an optical chopper: realizing frequency modulation of the incident radiation; a slit and an electric three-dimensional platform : Slit scanning traverses the field of view area; parallel light tube: converts the light passing through the slit into parallel light and enters the instrument under test; normal temperature detector: used for photoelectric conversion at normal temperature; multi-channel weak signal processing system: realizes Phase-locked amplification and collection of weak signals from the detector; collaborative processing software: used for automatic control of slits, drawing of field of view response curves and calculation of field of view parameters. This invention uses slit scanning to replace the traditional rotation of the instrument under test to generate displacement of the field of view. Through collaborative control and data collection of software, it uses high-precision phase-locked amplification to obtain the response curve of signal strength with the field of view, and calculates field of view parameters, which is effective The assembly and calibration efficiency and accuracy of the cold optical system of the Fourier spectrometer at room temperature are improved.
Description
技术领域:Technical areas:
本发明涉及光学检测领域,具体是涉及一种傅里叶红外光谱仪多元视场自动测量系统及方法。The invention relates to the field of optical detection, and specifically to a multi-field automatic measurement system and method for a Fourier transform infrared spectrometer.
背景技术:Background technique:
傅里叶红外光谱仪采用干涉分光的方式探测红外光谱辐射,很好地解决了仪器高灵敏度与高光谱分辨率之间的矛盾,具有高光通量、高光谱分辨率、宽光谱覆盖等一系列显著优点,是空间遥感仪器的主要发展方向。美国自20世纪60年代就开始研制空间干涉式光谱探测装置。以干涉分光方式的大气探测仪在20世纪70年代前后就在“雨云”试验卫星上搭载过。几十年来,欧美研制了多种空间高光谱分辨率大气探测仪器,极轨卫星平台的研究包括干涉式热探测仪(ITS)、红外大气干涉探测仪(IASI)和跨轨红外大气探测仪(CrIS)等,地球同步卫星平台的研究包括高分辨率红外探测仪(GHIS)、成像光谱仪(GIFTS)和超光谱环境探测组件(HES)等。我国的极轨气象卫星风云三号D星首次搭载了红外高光谱大气探测仪(HIRAS),在新一代静止轨道气象卫星风云四号A星上也装载了大气垂直探测仪(GIIRS),实现大气温度和湿度参数的垂直结构观测,提高探测精度,改进气象观测的垂直分辨率,为数值天气预报提供输入数据,为灾害性天气监视和大气化学成分探测服务。The Fourier transform infrared spectrometer uses interference spectroscopy to detect infrared spectral radiation, which effectively solves the contradiction between the instrument's high sensitivity and high spectral resolution. It has a series of significant advantages such as high luminous flux, high spectral resolution, and wide spectral coverage. , is the main development direction of space remote sensing instruments. The United States has been developing spatial interference spectrum detection devices since the 1960s. Atmospheric detectors based on interference spectroscopy were carried on the "Nimbus" test satellite around the 1970s. Over the past few decades, Europe and the United States have developed a variety of space-based high spectral resolution atmospheric detection instruments. Research on polar-orbiting satellite platforms includes the Interferometric Thermal Sounder (ITS), the Infrared Atmospheric Interferometer Sounder (IASI) and the Cross-orbit Infrared Atmospheric Sounder (IASI). CrIS), etc., research on geostationary satellite platforms includes high-resolution infrared sounder (GHIS), imaging spectrometer (GIFTS) and hyperspectral environmental detection component (HES). my country's polar-orbiting meteorological satellite Fengyun-3D is equipped with a hyperspectral infrared atmospheric sounder (HIRAS) for the first time, and the new generation of geostationary-orbiting meteorological satellite Fengyun-4A is also equipped with a vertical atmospheric sounder (GIIRS). Vertical structure observation of temperature and humidity parameters improves detection accuracy, improves the vertical resolution of meteorological observations, provides input data for numerical weather forecasting, and serves disastrous weather monitoring and atmospheric chemical composition detection.
视场角测量是获取仪器各个通道像元的实际光学视场,为仪器在常温实验室状态下进行光学装校和配准提供依据,同时也是仪器线型函数计算和光谱定标所需的重要参数。对于傅里叶红外光谱仪,通常需对光路及探测器冷却,降低背景干扰、提高探测性能。由于辐射制冷和低温状态下的光学视场只能在真空试验时获取,而光学组件的装校则在实验室常温下进行,因此需要在实验室常温状态下获取视场角,也为低温下的视场测量和性能验证提供参考。Field angle measurement is to obtain the actual optical field of view of each channel pixel of the instrument, which provides a basis for the optical calibration and registration of the instrument in a room temperature laboratory. It is also an important step in the calculation of the instrument's line function and spectral calibration. parameter. For Fourier transform infrared spectrometers, it is usually necessary to cool the optical path and detector to reduce background interference and improve detection performance. Since the optical field of view under radiation cooling and low temperature conditions can only be obtained during vacuum testing, and the assembly and calibration of optical components are carried out at room temperature in the laboratory, it is necessary to obtain the field of view angle at room temperature in the laboratory, also at low temperatures. Provides reference for field of view measurement and performance verification.
传统的实验室视场测量方法通过调整光学转台的移动实现视场内不同区域的扫描,且目前的锁相放大器大部分是单通道的,每完成一个方向扫描只能测量单个像元。探测信号的采样和视场的移动都靠人工操作,缺乏协同和自动化,导致测量效率较低。同时由于测试时间较长,探测器积累的热辐射导致信号的本底逐渐增大,影响测试的精度和视场的计算。目前针对傅里叶红外光谱仪在实验室常温状态下的视场角测量,还未能做到高度协同自动化并满足多像元同时测量。The traditional laboratory field of view measurement method realizes scanning of different areas within the field of view by adjusting the movement of the optical turntable. Most of the current lock-in amplifiers are single-channel, and only a single pixel can be measured for each direction of scanning. The sampling of detection signals and the movement of the field of view all rely on manual operations, lacking coordination and automation, resulting in low measurement efficiency. At the same time, due to the long test time, the thermal radiation accumulated by the detector causes the signal background to gradually increase, affecting the test accuracy and field of view calculation. At present, for the field of view measurement of Fourier transform infrared spectrometer at room temperature in the laboratory, it has not been able to achieve a high degree of collaborative automation and meet the simultaneous measurement of multiple pixels.
发明内容:Contents of the invention:
针对现有手段的局限性,本发明的目的是提供一种傅里叶红外光谱仪多元视场自动测量系统及方法。In view of the limitations of existing means, the purpose of the present invention is to provide a multi-field automatic measurement system and method for a Fourier transform infrared spectrometer.
傅里叶红外光谱仪多元视场自动测量系统,包括:黑体辐射源1、光学斩波器2、狭缝及电动三维平台3、平行光管4、待测傅里叶光谱仪光学系统5、常温探测器6、前置放大器7、多通道微弱信号处理系统8和协同处理软件9。Fourier infrared spectrometer multi-field automatic measurement system, including: blackbody radiation source 1, optical chopper 2, slit and electric three-dimensional platform 3, parallel light tube 4, Fourier spectrometer optical system to be measured 5, normal temperature detection 6, preamplifier 7, multi-channel weak signal processing system 8 and collaborative processing software 9.
黑体辐射源1产生黑体红外辐射入射到光学斩波器2,经过它的频率调制再入射到狭缝及电动三维平台3处,通过狭缝的辐射能量进入平行光管4转化为平行光,再进入待测傅里叶光谱仪光学系统5,经过系统的分光、准直,最终聚焦到常温探测器上6。光电转换后的微弱电信号通过前置放大器7进行低噪声放大,再由多通道微弱信号处理系统8进行锁相放大和采集,最后协同处理软件9通过串口和多通道微弱信号处理系统8进行通讯,控制狭缝移动和数据采集的协同工作,每移动到一个视场位置,启动红外探测信号的采集,绘制信号强度随位移距离的变化曲线,计算视场的大小和中心位置。The blackbody radiation source 1 generates blackbody infrared radiation and is incident on the optical chopper 2. After its frequency modulation, it is incident on the slit and the electric three-dimensional platform 3. The radiation energy passing through the slit enters the parallel light tube 4 and is converted into parallel light. Entering the optical system 5 of the Fourier spectrometer to be measured, after systematic light splitting and collimation, it is finally focused on the normal temperature detector 6. The weak electrical signal after photoelectric conversion is amplified by low noise through the preamplifier 7, and then is phase-locked amplified and collected by the multi-channel weak signal processing system 8. Finally, the collaborative processing software 9 communicates through the serial port and the multi-channel weak signal processing system 8 , control the collaborative work of slit movement and data collection. Each time it moves to a field of view position, the collection of infrared detection signals is started, the signal intensity changes curve with the displacement distance is drawn, and the size and center position of the field of view are calculated.
所述的黑体辐射源1温度范围在0--500℃,温度的稳定性在0.1K。The temperature range of the blackbody radiation source 1 is 0-500°C, and the temperature stability is 0.1K.
所述的光学斩波器2的调制频率为17.46Hz。The modulation frequency of the optical chopper 2 is 17.46Hz.
所述的狭缝及电动三维平台3的狭缝宽度为0.5mm,对应视场分辨率为2”。根据被测系统的焦距和所需的视场分辨率,可调节狭缝的宽度。狭缝可随电机水平、垂直扫描,水平方向运动时狭缝竖直安装,垂直方向运动时狭缝水平安装。狭缝扫描的步距、起始点、终点、驻留时间可通过软件设置。The width of the slit and the slit of the electric three-dimensional platform 3 is 0.5mm, and the corresponding field of view resolution is 2". The width of the slit can be adjusted according to the focal length of the system under test and the required field of view resolution. The slit can be scanned horizontally and vertically with the motor. When moving in the horizontal direction, the slit is installed vertically, and when moving in the vertical direction, the slit is installed horizontally. The step distance, starting point, end point, and dwell time of the slit scanning can be set through the software.
所述的多通道微弱信号处理系统8包括9通道锁相放大电路、锁相参考信号发生器、AD采样电路及FPGA数据处理和传输电路。The multi-channel weak signal processing system 8 includes a 9-channel phase-locked amplifier circuit, a phase-locked reference signal generator, an AD sampling circuit and an FPGA data processing and transmission circuit.
本发明还提供了一种傅里叶红外光谱仪多元视场自动测量方法,步骤如下:The invention also provides an automatic measurement method for multiple fields of view of a Fourier transform infrared spectrometer. The steps are as follows:
步骤1:调整黑体温度合适状态,并达到稳定;Step 1: Adjust the blackbody temperature to a suitable state and achieve stability;
步骤2:水平狭缝运动到视场外,开始采样记录数据;Step 2: Move the horizontal slit outside the field of view and start sampling and recording data;
步骤3:按照狭缝对应视场2”的步距,进行垂直方向的移动,每移动到一个位置,进行探测信号的采集,直到垂直方向的所有像元视场扫描结束;Step 3: Move the slit in the vertical direction according to the step distance of 2" corresponding to the field of view. Each time it moves to a position, the detection signal is collected until the field of view scanning of all pixels in the vertical direction is completed;
步骤4:将水平狭缝换成竖直狭缝,运动到视场外,开始采样记录数据;Step 4: Replace the horizontal slit with a vertical slit, move outside the field of view, and start sampling and recording data;
步骤5:按照狭缝对应视场2”的步距,进行水平方向的移动,每移动到一个位置,进行探测信号的采集和记录,直到水平方向的所有像元视场扫描结束;Step 5: Move the slit in the horizontal direction according to the step distance of 2" corresponding to the field of view. Each time it moves to a position, the detection signal is collected and recorded until the scanning of the field of view of all pixels in the horizontal direction is completed;
步骤6:根据记录的数据和仪器的焦距,将水平和垂直方向的狭缝运动距离换算成角度,绘制垂直方向和水平方向探测信号强度随扫描角度的变化曲线;Step 6: According to the recorded data and the focal length of the instrument, convert the horizontal and vertical slit movement distances into angles, and draw the curves of the vertical and horizontal detection signal strengths as a function of the scanning angle;
步骤7:根据每个像元的视场响应曲线,计算其视场大小和中心位置。Step 7: Based on the field of view response curve of each pixel, calculate its field of view size and center position.
本发明针对傅里叶红外光谱仪的光学系统和探测器特点,将仪器视场的移动转换成目标源狭缝的移动实现视场的扫描,通过研制最高10路的多路锁相放大器实现多个像元的同步测试。光源调制、视场扫描以及探测信号的获取通过软件协调控制,实现自动测量、显示和计算。可以大大提高光学系统装校、配准、测试的效率和精度。Based on the characteristics of the optical system and detector of the Fourier transform infrared spectrometer, this invention converts the movement of the instrument's field of view into the movement of the target source slit to achieve scanning of the field of view. It achieves multiple lock-in amplifiers by developing a multi-channel lock-in amplifier with up to 10 channels. Synchronous testing of pixels. Light source modulation, field of view scanning and detection signal acquisition are coordinated and controlled through software to achieve automatic measurement, display and calculation. It can greatly improve the efficiency and accuracy of optical system assembly, registration, and testing.
附图说明:Picture description:
图1是本发明实施例所提供的傅里叶红外光谱仪多元视场自动测量系统的结构示意图。Figure 1 is a schematic structural diagram of a multi-field automatic measurement system for a Fourier transform infrared spectrometer provided by an embodiment of the present invention.
其中:in:
1、黑体辐射源;1. Blackbody radiation source;
2、光学调制器;2. Optical modulator;
3、狭缝及电动三维平台;3. Slit and electric three-dimensional platform;
4、平行光管;4. Parallel light tube;
5、待测傅里叶光谱仪光学系统;5. The optical system of the Fourier spectrometer to be tested;
6、常温探测器;6. Normal temperature detector;
7、前置放大器;7. Preamplifier;
8、多通道微弱信号处理系统;8. Multi-channel weak signal processing system;
9、协调处理软件。9. Coordination and processing software.
图2是傅里叶红外光谱仪理论视场和狭缝扫描原理示意图。其中(1)是9个像元的理论视场排布和狭缝扫描原理;(2)是9个像元的信号随狭缝扫描的变化曲线。Figure 2 is a schematic diagram of the theoretical field of view and slit scanning principle of the Fourier transform infrared spectrometer. Among them (1) is the theoretical field of view arrangement and slit scanning principle of 9 pixels; (2) is the change curve of the signal of 9 pixels with slit scanning.
图3是本发明实施例提供的傅里叶红外光谱仪多元视场自动测量方法流程图。Figure 3 is a flow chart of an automatic measurement method for multiple fields of view of a Fourier transform infrared spectrometer provided by an embodiment of the present invention.
图4是本发明方法获取的像元视场响应曲线。其中(1)是横狭缝垂直扫描时1、2、3像元的视场响应曲线;(2)是4、5、6像元的视场响应曲线;(3)是7、8、9像元的视场响应曲线。Figure 4 is the pixel field of view response curve obtained by the method of the present invention. Among them (1) is the field of view response curve of pixels 1, 2, and 3 during vertical scanning with a transverse slit; (2) is the field of view response curve of pixels 4, 5, and 6; (3) is the field of view response curve of pixels 7, 8, and 9 The field of view response curve of the pixel.
图5是本发明方法获取的光学视场。Figure 5 is an optical field of view obtained by the method of the present invention.
具体实施方式:Detailed ways:
下面结合具体实施例对本发明进行详细说明。以下实施例将有助于本领域的技术人员进一步理解本发明,但不以任何形式限制本发明。应当指出的是,对本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干变化和改进。这些都属于本发明的保护范围。The present invention will be described in detail below with reference to specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that, for those of ordinary skill in the art, several changes and improvements can be made without departing from the concept of the present invention. These all belong to the protection scope of the present invention.
如图1所示,为本发明实施例所提供的傅里叶红外光谱仪多元视场自动测量系统的结构示意图,包括:黑体辐射源1、光学斩波器2、狭缝及电动三维平台3、平行光管4、待测傅里叶光谱仪光学系统5、常温探测器6、前置放大器7、多通道微弱信号处理系统8和协同处理软件9。As shown in Figure 1, it is a schematic structural diagram of a multi-field automatic measurement system for a Fourier infrared spectrometer provided by an embodiment of the present invention, including: a blackbody radiation source 1, an optical chopper 2, a slit and an electric three-dimensional platform 3, Collimator 4, Fourier spectrometer optical system to be tested 5, room temperature detector 6, preamplifier 7, multi-channel weak signal processing system 8 and collaborative processing software 9.
黑体辐射源1发出的辐射聚焦在光学系统入射焦面处,焦面处为一可调狭缝,在狭缝和光源处放置一套光学斩波器2,实现对光源的调制。狭缝的长度确保能够覆盖3×3的总视场范围,狭缝宽度设置为1mm。为了遍历3×3分布的9个瞬时视场,将斩波器和狭缝放置在电动三维平台上,通过软件设置起止点和步距,控制狭缝的运动。这里步距设置为0.5mm,系统焦距为850mm,因此测试的角度分辨率为2”。The radiation emitted by the blackbody radiation source 1 is focused on the incident focal plane of the optical system. The focal plane is an adjustable slit. A set of optical choppers 2 are placed between the slit and the light source to achieve modulation of the light source. The length of the slit ensures that it can cover a total field of view of 3 × 3, and the slit width is set to 1 mm. In order to traverse the nine instantaneous fields of view distributed in 3×3, the chopper and slit are placed on the motorized three-dimensional platform, and the start and end points and step distance are set through the software to control the movement of the slit. Here the step distance is set to 0.5mm and the system focal length is 850mm, so the angular resolution tested is 2".
由于采用常温探测器6替代傅里叶红外光谱仪中的致冷型探测器,其性能相差几个数量级,且常温光学相比于冷光学也有较大的背景噪声。为了保证输出信噪比,其核心是研制9路锁相放大器实现红外探测器微弱信号的测量。集成化的9通道高性能锁相放大器实现了所有像元的同步观测。Since the normal temperature detector 6 is used to replace the refrigerated detector in the Fourier transform infrared spectrometer, its performance differs by several orders of magnitude, and normal temperature optics also has larger background noise than cold optics. In order to ensure the output signal-to-noise ratio, the core is to develop a 9-channel lock-in amplifier to measure the weak signals of the infrared detector. The integrated 9-channel high-performance lock-in amplifier enables simultaneous observation of all pixels.
傅里叶红外光谱仪的视场如图2所示,每个工作波段有3×3的9个像元视场分布,分别对应3×3小面阵红外探测器,单像元瞬时视场设计值为1°。图2中视场角的测量采用狭缝扫描的方式,通过横竖狭缝在水平和垂直二维方向的移动,获取视场内接收的信号强度随扫描角度的变化关系。The field of view of the Fourier transform infrared spectrometer is shown in Figure 2. Each working band has a 3×3 9-pixel field of view distribution, which corresponds to a 3×3 small area array infrared detector. Single-pixel instantaneous field of view design The value is 1°. In Figure 2, the field of view angle is measured using slit scanning. By moving the horizontal and vertical slits in the horizontal and vertical two-dimensional directions, the relationship between the signal intensity received in the field of view and the scanning angle is obtained.
图3所示是星载傅里叶红外光谱仪视场角多通道自动测量方法流程图。完成系统搭建和测试准备后,首先针对傅里叶光谱仪的工作波段和动态范围,将黑体温度设置到合适的温度,水平狭缝垂直移出视场外,通过软件设置水平狭缝的运动起始点、终点和步距,然后控制三维移动平台带动水平狭缝进行垂直移动,每个位置驻留采样锁相信号再取平均,作为该位置的探测信号值,记录、存储并绘制信号强度随运动距离的变化曲线,直到整个9元视场垂直扫描结束。再换成垂直狭缝,按照同样的方式进行水平扫描。Figure 3 shows the flow chart of the multi-channel automatic measurement method of the field of view angle of the spaceborne Fourier transform infrared spectrometer. After completing the system construction and test preparation, first set the blackbody temperature to an appropriate temperature according to the working band and dynamic range of the Fourier spectrometer, move the horizontal slit vertically out of the field of view, and set the starting point of the movement of the horizontal slit through the software. The end point and step distance are then controlled, and the three-dimensional mobile platform is controlled to drive the horizontal slit to move vertically. The phase-locked signal is sampled at each position and then averaged as the detection signal value at that position. The signal intensity is recorded, stored and plotted with the movement distance. Change the curve until the vertical scan of the entire 9-element field of view ends. Then switch to the vertical slit and scan horizontally in the same way.
图4是获取的像元视场响应曲线,对每个像元响应曲线寻找信号峰值:Figure 4 is the obtained pixel field of view response curve. Find the signal peak for each pixel response curve:
DNMax=Max(DNi,i=1,2...M) (1)DNMax=Max(DN i ,i=1,2...M) (1)
公式(1)中DN为各个采样点的信号数字量,M为采样点数,DNMax为信号峰值。然后对探测器接收并经过锁相放大的红外探测信号强度进行了归一化。根据狭缝中心在圆形视场边缘和在视场中心时所截的视场面积之比为0.241,然后得到视场响应曲线与0.241×DNMax的交点位置,从而确定视场中心和尺寸大小:In formula (1), DN is the signal digital quantity of each sampling point, M is the number of sampling points, and DNMax is the signal peak value. Then the intensity of the infrared detection signal received by the detector and amplified by phase lock-in was normalized. According to the ratio of the area of the field of view intercepted when the center of the slit is at the edge of the circular field of view and the center of the field of view is 0.241, then the intersection position of the field of view response curve and 0.241×DNMax is obtained, thereby determining the center and size of the field of view:
Z0=k,DNk=DNMax (2)Z0=k,DN k =DNMax (2)
Z1=i,DNi=0.241×DNMax,i<k (3)Z1=i,DN i =0.241×DNMax,i<k (3)
Z2=j,DNj=0.241×DNMax,j>k (4)Z2=j,DN j =0.241×DNMax,j>k (4)
IFOVcenter=(Z1+Z2)/2 (5)IFOV center =(Z1+Z2)/2 (5)
IFOVsize=Z2-Z1 (6)IFOV size =Z2-Z1 (6)
其中Z0为信号峰值位置,Z1和Z2分别是视场响应曲线与0.241×DNMax交点位置,IFOVcenter则是视场中心位置,IFOVsize视场大小。根据上述公式,可分别在水平和垂直两个方向得到中心和尺寸。如图5所示,通过该方法最终获取了一个波段9像元的光学视场。Among them, Z0 is the signal peak position, Z1 and Z2 are the intersection positions of the field of view response curve and 0.241×DNMax respectively, IFOV center is the center position of the field of view, and IFOV size is the size of the field of view. According to the above formula, the center and size can be obtained in the horizontal and vertical directions respectively. As shown in Figure 5, an optical field of view with 9 pixels in the band was finally obtained through this method.
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